Calibration adjustment device and method for manufacturing electronic device

Abstract

The calibration adjustment device comprises: a first holding frame made of a first material, which supports the optical element; a first adjustment device, which includes a first telescopic portion made of a second material different from the first material, and the first holding frame and the optical element are rotated around a first axis by bringing the first telescopic portion into contact with the first holding frame and adjusting the length of the first telescopic portion; and a first supporting member made of the second material, which supports the first adjustment device, and the first adjustment device is configured to be able to adjust the position where the first telescopic portion contacts the first holding frame to a first plane including a first end of the first supporting member and the first axis.

Description

Technical Field

[0001] The invention relates to a calibration adjustment device and a method for manufacturing an electronic device. Background Art

[0002] In recent years, in semiconductor exposure devices, as semiconductor integrated circuits become smaller and more highly integrated, there is a demand for improved resolution. Therefore, the wavelength of light emitted from the exposure light source has been shortened. For example, as a gas laser device for exposure, a KrF excimer laser device that outputs a laser with a wavelength of about 248nm and an ArF excimer laser device that outputs a laser with a wavelength of about 193nm are used.

[0003] The spectral line width of the natural oscillation light of the KrF excimer laser device and the ArF excimer laser device is relatively wide, about 350 to 400 pm. Therefore, when the projection lens is composed of a material that allows ultraviolet light such as KrF and ArF lasers to pass through, chromatic aberration sometimes occurs. As a result, the resolution may be reduced. Therefore, it is necessary to narrow the spectral line width of the laser output from the gas laser device to a level where chromatic aberration can be ignored. Therefore, in order to narrow the spectral line width in the laser resonator of the gas laser device, there is a narrowband module (Line Narrow Module: LNM) containing narrowband elements (etalon, grating, etc.). Hereinafter, the gas laser device that narrows the spectral line width will be referred to as a narrowband gas laser device.

[0004] Prior art literature

[0005] Patent Literature

[0006] Patent Document 1: U.S. Patent No. 6973111

[0007] Patent Document 2: U.S. Patent Application Publication No. 2005 / 015790 Summary of the invention

[0008] A calibration adjustment device according to one aspect of the present invention comprises: a first holding frame made of a first material, which supports an optical element; a first adjustment device, which includes a first telescopic portion made of a second material different from the first material, and the first holding frame and the optical element are rotated around a first axis by bringing the first telescopic portion into contact with the first holding frame and adjusting the length of the first telescopic portion; and a first supporting member made of the second material, which supports the first adjustment device, the first adjustment device being configured to adjust the position at which the first telescopic portion contacts the first holding frame to a first plane including a first end of the first supporting member and the first axis.

[0009] A calibration adjustment device according to another aspect of the present invention comprises: a first holding frame made of a first material, which supports an optical element; a first adjustment device, which includes a first telescopic portion made of a second material different from the first material, and the first holding frame and the optical element are rotated around a first axis by bringing the first telescopic portion into contact with the first holding frame and adjusting the length of the first telescopic portion; a first supporting member made of the second material, which supports the first adjustment device; a second holding frame made of the first material, which supports the first holding frame on the first axis and supports the first supporting member at a first end of the first supporting member; a second adjustment device, which includes a second telescopic portion made of a second material, and the second holding frame, the first holding frame and the optical element are rotated around a second axis intersecting the first axis by bringing the second telescopic portion into contact with the second holding frame and adjusting the length of the second telescopic portion; and a second supporting member made of the second material, which supports the second adjustment device, the first end of which is located in a fifth plane including the first axis and the second axis.

[0010] A method for manufacturing an electronic device according to one aspect of the present invention includes the following steps: generating a pulsed laser by a laser device having a calibration and adjustment device, outputting the pulsed laser to an exposure device, and exposing the pulsed laser to a photosensitive substrate in the exposure device to manufacture the electronic device, wherein the calibration and adjustment device comprises: a first holding frame made of a first material, which supports an optical element; a first adjustment device, which includes a first telescopic portion made of a second material different from the first material, and wherein the first holding frame and the optical element are rotated around a first axis by bringing the first telescopic portion into contact with the first holding frame and adjusting the length of the first telescopic portion; and a first supporting member made of the second material, which supports the first adjustment device, wherein the first adjustment device is configured to adjust the position where the first telescopic portion contacts the first holding frame to a first plane including a first end of the first supporting member and a first axis. BRIEF DESCRIPTION OF THE DRAWINGS

[0011] Several embodiments of the present invention will be described below by way of example only with reference to the accompanying drawings.

[0012] Figure 1 The structure of a laser device according to a comparative example is schematically shown.

[0013] Figure 2A A calibration adjustment device of a comparative example is schematically shown.

[0014] Figure 2B yes Figure 2A Cross-sectional view at line IIB-IIB.

[0015] Figure 2C yes Figure 2A Cross-sectional view at line IIC-IIC.

[0016] Figure 2D yes Figure 2A Cross-sectional view at the IID-IID line.

[0017] Figure 2E The figure shows the equivalent of the case where the second holder is rotated in the comparative example. Figure 2B A cross-sectional view of a portion of.

[0018] Figure 2F The figure shows the equivalent of the case where the first holder is rotated in the comparative example. Figure 2D A cross-sectional view of a portion of.

[0019] Figure 3A The calibration adjustment device according to the first embodiment is schematically shown.

[0020] Figure 3B yes Figure 3A Cross-sectional view at line IIIB-IIIB.

[0021] Figure 3C yes Figure 3A Cross-sectional view at line IIIC-IIIC.

[0022] Figure 3D yes Figure 3A Cross-sectional view at line IIID-IIID.

[0023] Figure 4A A calibration adjustment device according to a second embodiment is schematically shown.

[0024] Figure 4B yes Figure 4A Cross-sectional view at line IVB-IVB.

[0025] Figure 4C yes Figure 4A Cross-sectional view at the IVC-IVC line.

[0026] Figure 4D yes Figure 4A Cross-sectional view at the IVD-IVD line.

[0027] Figure 4E It is a diagram showing the positional relationship between the second telescopic portion and the second shaft when in the adjustment state in the first embodiment.

[0028] Figure 4F It is a diagram showing the positional relationship between the second telescopic portion and the second shaft in the adjustment state in the second embodiment.

[0029] Figure 5 The structure of an exposure device connected to a laser device is schematically shown. DETAILED DESCRIPTION

[0030] <Content>

[0031] 1. Comparative Example

[0032] 1.1 Structure of the laser device 1

[0033] 1.1.1 Main Oscillator MO

[0034] 1.1.2 First beam steering unit 76

[0035] 1.1.3 Amplifier PO

[0036] 1.1.4 Second beam steering unit 86

[0037] 1.1.5 Optical Pulse Stretcher 89

[0038] 1.2 Operation of the laser device 1

[0039] 1.2.1 Operation of the Master Oscillator MO

[0040] 1.2.2 Operation of amplifier PO

[0041] 1.2.3 Operation of the optical pulse stretcher 89

[0042] 1.3 Structure of the calibration and adjustment device

[0043] 1.3.1 First cage 11

[0044] 1.3.2 Second cage 22

[0045] 1.3.3 Third cage 33

[0046] 1.3.4 First Adjustment Device 41 and Second Adjustment Device 52

[0047] 1.4 Operation of the calibration adjustment device

[0048] 1.4.1 Rotation of the first cage 11

[0049] 1.4.2 Rotation of the second retaining frame 22

[0050] 1.5 Function

[0051] 1.6 Issues of Comparative Example

[0052] 1.6.1 Relationship between the first telescopic portion 411 and the second retaining frame 22

[0053] 1.6.2 Relationship between the second telescopic portion 522 and the third retaining frame 33

[0054] 1.6.3 Research on solutions

[0055] 2. An alignment adjustment device including a support member made of the same material as the telescopic part

[0056] 2.1 Structure and Action

[0057] 2.1.1 Second Holding Frame 22a and First Support Member 21a

[0058] 2.1.2 Third Retaining Frame 33a and Second Supporting Member 32a

[0059] 2.2 Other structural examples

[0060] 2.3 Function

[0061] 3. Calibration and adjustment device for the second plane P2 to be perpendicular to the first plane P1

[0062] 3.1 Structure and Action

[0063] 3.1.1 Second Holder 22b and First Support Member 21b

[0064] 3.1.2 Third Retaining Frame 33b and Second Supporting Member 32b

[0065] 3.2 Other structural examples

[0066] 3.3 Function

[0067] 4. Others

[0068] Below, the embodiments of the present invention are described in detail with reference to the accompanying drawings. The embodiments described below illustrate several examples of the present invention and do not limit the content of the present invention. In addition, the structures and actions described in each embodiment are not necessarily all necessary for the structures and actions of the present invention. In addition, the same reference numerals are marked on the same structural elements and repeated descriptions are omitted.

[0069] 1. Comparative Example

[0070] 1.1 Structure of the laser device 1

[0071] Figure 1 The structure of the laser device 1 of the comparative example is schematically shown. The laser device 1 of the comparative example includes a master oscillator MO, a first beam steering unit 76 , an amplifier PO, a second beam steering unit 86 , and an optical pulse stretcher 89 .

[0072] 1.1.1 Main Oscillator MO

[0073] The master oscillator MO comprises a laser cavity 70 , a narrowbanding module 74 and an output coupling mirror 75 .

[0074] The laser cavity 70 is arranged on the optical path of the laser resonator composed of the narrowband module 74 and the output coupling mirror 75. Two windows 701 and 702 are provided in the laser cavity 70. The laser cavity 70 accommodates discharge electrodes 711 and 712. The discharge electrodes 711 and 712 are connected to a pulse power supply not shown. The laser cavity 70 accommodates laser gas as a laser medium. The laser gas includes, for example, argon gas, fluorine gas, and neon gas. Alternatively, the laser gas includes, for example, krypton gas, fluorine gas, and neon gas.

[0075] The narrowband module 74 includes wavelength selection elements such as a prism 741 and a grating 742. The output coupling mirror 75 is composed of a partial reflection mirror.

[0076] 1.1.2 First beam steering unit 76

[0077] The first beam steering unit 76 includes high reflection mirrors 761 and 762. The high reflection mirrors 761 and 762 are supported by alignment adjustment devices 766 and 767, respectively.

[0078] 1.1.3 Amplifier PO

[0079] The amplifier PO includes a laser cavity 80, a rear mirror 84 and an output coupling mirror 85. The laser cavity 80, the output coupling mirror 85, and the windows 801 and 802 and the discharge electrodes 811 and 812 attached to the laser cavity 80 are the same as the corresponding structural elements in the master oscillator MO.

[0080] The rear mirror 84 is disposed on the optical path of the pulse laser beam after passing through the first beam steering unit 76. The rear mirror 84 is formed of a partial reflection mirror. The rear mirror 84 and the output coupling mirror 85 form a laser resonator.

[0081] 1.1.4 Second beam steering unit 86

[0082] The second beam steering unit 86 includes high reflection mirrors 861 and 862. The high reflection mirrors 861 and 862 are supported by alignment adjustment devices 866 and 867, respectively.

[0083] 1.1.5 Optical Pulse Stretcher 89

[0084] The optical pulse stretcher 89 is disposed on the optical path of the pulse laser light after passing through the second beam steering unit 86. The optical pulse stretcher 89 includes a beam splitter 895 and first to fourth concave mirrors 891 to 894. The first to fourth concave mirrors 891 to 894 are supported by alignment adjustment devices 896 to 899, respectively.

[0085] 1.2 Operation of the laser device 1

[0086] 1.2.1 Operation of the Master Oscillator MO

[0087] In the master oscillator MO, a pulse power supply (not shown) generates a pulsed high voltage and applies the high voltage between the discharge electrodes 711 and 712.

[0088] When a high voltage is applied between the discharge electrodes 711 and 712, a discharge is induced between the discharge electrodes 711 and 712. The laser gas in the laser cavity 70 is excited by the energy of the discharge and transitions to a high energy level. Then, when the excited laser gas transitions to a low energy level, light of a wavelength corresponding to the energy level difference is emitted.

[0089] The light generated in the laser cavity 70 is emitted to the outside of the laser cavity 70 via windows 701 and 702. The beam width of the light emitted from the window 701 is expanded by the prism 741, and the light is incident on the grating 742. The light incident on the grating 742 from the prism 741 is reflected by the plurality of grooves of the grating 742, and diffracted in a direction corresponding to the wavelength of the light. The grating 742 is configured in a Littrow configuration so that the incident angle of the light incident on the grating 742 from the prism 741 and the diffraction angle of the diffracted light of the desired wavelength are consistent. Thus, the light near the desired wavelength returns to the laser cavity 70 via the prism 741.

[0090] The output coupling mirror 75 transmits a part of the light emitted from the window 702 to output the light, and reflects the other part to return to the laser cavity 70 .

[0091] In this way, the light emitted from the laser cavity 70 reciprocates between the narrowband module 74 and the output coupling mirror 75. The light is amplified each time it passes through the discharge space between the discharge electrodes 711 and 712. In addition, the light is narrowbanded each time it passes through the narrowband module 74 and returns. The light oscillated by laser in this way and narrowbanded is output from the output coupling mirror 75 as pulsed laser.

[0092] 1.2.2 Operation of amplifier PO

[0093] The pulse laser light output from the output coupling mirror 75 is incident on the laser cavity 80 via the first beam steering unit 76 and the rear mirror 84 .

[0094] In synchronization with the injection of the pulse laser into the laser cavity 80 , in the amplifier PO, a pulse power source (not shown) generates a pulsed high voltage, and the high voltage is applied between the discharge electrodes 811 and 812 .

[0095] When a high voltage is applied between the discharge electrodes 811 and 812, discharge occurs between the discharge electrodes 811 and 812. The pulse laser light incident on the laser cavity 80 is amplified by the energy of the discharge.

[0096] The light amplified in the laser cavity 80 reciprocates between the rear mirror 84 and the output coupling mirror 85. The light is amplified each time it passes through the discharge space between the discharge electrodes 811 and 812. The light amplified in this way is output from the output coupling mirror 85 as a pulsed laser.

[0097] 1.2.3 Operation of the optical pulse stretcher 89

[0098] The pulse laser output from the output coupling mirror 85 is directed to the second beam steering unit 86. Figure 1 The right side of the optical pulse is incident on the beam splitter 895 of the optical pulse stretcher 89. The beam splitter 895 makes the Figure 1 A portion of the pulse laser light incident from the right is transmitted through and emitted as pulse laser light B1, and the other portion is directed to Figure 1 The reflected pulse laser is reflected by the 1st to 4th concave mirrors 891 to 894 in sequence and goes to Figure 1 is incident on beam splitter 895 from below.

[0099] The beam cross section of the pulse laser beam input from the second beam steering unit 86 in the beam splitter 895 is imaged on the beam splitter 895 at a ratio of 1:1 through the first to fourth concave mirrors 891 to 894. The beam splitter 895 directs the beam from the fourth concave mirror 894 to the Figure 1 A portion of the pulsed laser that is injected from below is directed toward Figure 1 The pulse laser light B1 and the pulse laser light B2 are substantially coaxial.

[0100] There is a time difference between the pulse laser B1 and the pulse laser B2 corresponding to the optical path length of the delay optical path formed by the first to fourth concave mirrors 891 to 894. By spatially overlapping the pulse laser B1 and the pulse laser B2, pulse laser light with a prolonged pulse width can be emitted.

[0101] 1.3 Structure of the calibration and adjustment device

[0102] Figure 2A A calibration adjustment device of a comparative example is schematically shown. Figure 2A In the diagram, the horizontal axis is set as the H axis, the vertical axis is set as the V axis, and the axis perpendicular to the paper surface is set as the Z axis. The H axis, V axis, and Z axis are orthogonal to each other.

[0103] Figure 2B yes Figure 2A The cross-sectional view at the IIB-IIB line, Figure 2C yes Figure 2A The cross-sectional view at the IIC-IIC line, Figure 2D yes Figure 2A Cross-sectional view at the IID-IID line.

[0104] The alignment adjustment device is a device that supports an optical element and adjusts the posture of the optical element. In the following description, a mirror 10 is used as an example of an optical element. As an example of the mirror 10, reference Figure 1 The high reflection mirrors 761, 762, 861 and 862, the first to fourth concave mirrors 891 to 894, etc. are described.

[0105] The alignment adjustment device includes a first holding frame 11 , a second holding frame 22 , a third holding frame 33 , a first adjustment device 41 , and a second adjustment device 52 .

[0106] 1.3.1 First cage 11

[0107] The first holder 11 surrounds the mirror 10 and supports the mirror 10 in contact with the mirror 10. However, the first holder 11 does not cover the reflective surface 101 which is the surface on the +Z side of the mirror 10.

[0108] 1.3.2 Second cage 22

[0109] The second holder 22 surrounds the first holder 11 and supports the first holder 11 at a distance therefrom. The second holder 22 supports the first holder 11 via the pins 16 and 17, and the first holder 11 is rotatable about a first axis AX1 defined by the pins 16 and 17. The first axis AX1 is a straight line connecting the centers of the pins 16 and 17.

[0110] The second holder 22 does not cover the reflecting surface 101 of the mirror 10. In addition, the second holder 22 has an opening 25. The reason why the second holder 22 has the opening 25 is as follows. Although most of the light incident on the reflecting surface 101 of the mirror 10 is reflected by the mirror 10, a part of the light passes through the mirror 10. When the light after passing through the mirror 10 enters the second holder 22, the temperature of the second holder 22 rises, and the second holder 22 expands thermally, thereby sometimes changing the posture of the mirror 10 unintentionally. By providing the opening 25 to allow the light after passing through the mirror 10 to pass, the thermal expansion of the second holder 22 can be suppressed. In addition, the heat of the mirror 10 can be dissipated to the side of the mirror 10 opposite to the reflecting surface 101, that is, the back side. Not only the second holder 22, but also in the first holder 11, an opening (not shown) smaller than the diameter of the mirror 10 can be provided at the back side of the mirror 10.

[0111] 1.3.3 Third cage 33

[0112] The third holder 33 surrounds the second holder 22 and supports the second holder 22 at a distance from the second holder 22. The third holder 33 supports the second holder 22 through the pins 26 and 27, and the second holder 22 can rotate around the second axis AX2 defined by the pins 26 and 27. The second axis AX2 is a straight line connecting the centers of the pins 26 and 27, and the second axis AX2 is parallel to the H axis. The first axis AX1 and the second axis AX2 are orthogonal to each other at a position approximately at the center of the reflection surface 101 of the mirror 10. In the following description, the plane including the first axis AX1 and the second axis AX2 is referred to as the fifth plane P5.

[0113] The third holder 33 does not cover the reflecting surface 101 of the mirror 10. In addition, the third holder 33 has an opening 35. The reason why the third holder 33 has the opening 35 is the same as the reason explained about the opening 25. The first, second and third holders 11, 22 and 33 are made of aluminum, for example. Aluminum corresponds to the first material in the present invention.

[0114] 1.3.4 First Adjustment Device 41 and Second Adjustment Device 52

[0115] The first adjustment device 41 is supported by the second holding frame 22. The first adjustment device 41 includes a driving portion 410 and a first telescopic portion 411. The driving portion 410 is fixed to the -Z side surface 228 of the second holding frame 22. The first telescopic portion 411 is a rod-shaped member that passes through the second holding frame 22. The end 419 of the first telescopic portion 411 is located outside the driving portion 410, and the end of the first telescopic portion 411 on the opposite side (not shown) is accommodated in the driving portion 410. The driving portion 410 moves a part of the first telescopic portion 411 in and out, thereby expanding and contracting the length of the portion of the first telescopic portion 411 located outside the driving portion 410. In the following description, the expansion and contraction of the length of the portion of the first telescopic portion 411 located outside the driving portion 410 is sometimes referred to as "expansion and contraction of the first telescopic portion 411". Expansion and contraction include extension and contraction. The X direction in which the first telescopic portion 411 is extended is perpendicular to the fifth plane P5.

[0116] The end portion 419 of the first telescopic portion 411 contacts the first holder 11 at a position closer to the +H side than the first axis AX1.

[0117] The spring 45 is arranged in an extended state near the first telescopic portion 411 between the first holder 11 and the second holder 22. Alternatively, a spring (not shown) may be arranged in a compressed state at a position closer to the -H side than the first axis AX1 between the first holder 11 and the second holder 22. Alternatively, a spring (not shown) may be arranged on the surface of the first holder 11 on the +Z side.

[0118] The second adjustment device 52 is supported by the third holding frame 33. The second adjustment device 52 includes a driving portion 520 and a second telescopic portion 522. The driving portion 520 is fixed to the surface 338 on the -Z side of the third holding frame 33. The second telescopic portion 522 is a rod-shaped member that passes through the third holding frame 33. An end 529 of the second telescopic portion 522 is located outside the driving portion 520, and an end on the opposite side of the second telescopic portion 522, which is not shown in the figure, is accommodated in the driving portion 520. The driving portion 520 moves a part of the second telescopic portion 522 in and out, thereby expanding and contracting the length of the portion of the second telescopic portion 522 located outside the driving portion 520. In the following description, the expansion and contraction of the length of the portion of the second telescopic portion 522 located outside the driving portion 520 is sometimes referred to as "expansion and contraction of the second telescopic portion 522". The direction in which the second telescopic portion 522 extends is the +Z direction.

[0119] The end portion 529 of the second expandable and contractable portion 522 contacts the second holder 22 at a position closer to the +V side than the second axis AX2. The end portion 529 of the second expandable and contractable portion 522 is located on the fifth plane P5.

[0120] The spring 55 is arranged in an extended state near the second telescopic portion 522 between the second holder 22 and the third holder 33. Alternatively, a spring (not shown) may be arranged in a compressed state at a position closer to the -V side than the second axis AX2 between the second holder 22 and the third holder 33. Alternatively, a spring (not shown) may be arranged on the surface of the second holder 22 on the +Z side.

[0121] The first adjusting device 41 and the second adjusting device 52 are each constituted by a micrometer, for example.

[0122] The first telescopic portion 411 and the second telescopic portion 522 are made of, for example, stainless steel (SUS). Stainless steel corresponds to the second material in the present invention. The thermal expansion coefficient of the second material such as stainless steel is smaller than the thermal expansion coefficient of the first material such as aluminum. The specific gravity of the first material such as aluminum is smaller than the specific gravity of the second material such as stainless steel.

[0123] 1.4 Operation of the calibration adjustment device

[0124] Figure 2E The figure shows the equivalent of the case where the second holder 22 is rotated in the comparative example. Figure 2B A cross-sectional view of a portion of. Figure 2F The figure shows the equivalent of the case where the first holder 11 is rotated in the comparative example. Figure 2D A cross-sectional view of a portion of.

[0125] 1.4.1 Rotation of the first cage 11

[0126] When the first expandable portion 411 is expanded by the driving unit 410 , a portion of the first holder 11 is pressed by the first expandable portion 411 , whereby the first holder 11 rotates about the first axis AX1 relative to the second holder 22 .

[0127] When the first telescopic portion 411 is contracted by the driving portion 410, a portion of the first holder 11 is pulled by the spring 45, whereby the first holder 11 rotates relative to the second holder 22 about the first axis AX1 (see Figure 2F ) The rotation of the first holder 11 becomes opposite rotation when the first telescopic portion 411 is extended and when it is contracted.

[0128] In this way, by bringing the first expandable portion 411 into contact with the first holder 11 and adjusting the length of the first expandable portion 411 , the first holder 11 and the mirror 10 are rotated around the first axis AX1 .

[0129] like Figure 2D As shown, in the following description, the state in which the end 419 of the first telescopic portion 411 is located on the fifth plane P5 may be referred to as an “unadjusted state”.

[0130] like Figure 2F As shown, in the following description, a state in which the end 419 of the first telescopic portion 411 is located outside the fifth plane P5 due to the extension and contraction of the first telescopic portion 411 may be referred to as an “adjusted state”.

[0131] 1.4.2 Rotation of the second retaining frame 22

[0132] When the second telescopic portion 522 is extended by the driving unit 520 , a portion of the second holder 22 is pressed by the second telescopic portion 522 , whereby the second holder 22 rotates about the second axis AX2 relative to the third holder 33 .

[0133] When the second telescopic portion 522 is contracted by the driving unit 520, a portion of the second holder 22 is pulled by the spring 55, whereby the second holder 22 rotates relative to the third holder 33 about the second axis AX2 (see Figure 2E ). The rotation of the second holder 22 becomes opposite rotation when the second telescopic portion 522 is extended and when it is contracted. When the second holder 22 rotates around the second axis AX2, the first axis AX1 also rotates around the second axis AX2, and the fifth plane P5 also tilts.

[0134] In this way, by bringing the second telescopic portion 522 into contact with the second holding frame 22 and adjusting the length of the second telescopic portion 522 , the second holding frame 22 , the first adjustment device 41 , the first holding frame 11 , and the mirror 10 rotate around the second axis AX2 .

[0135] In the following descriptions, sometimes Figure 2CThe state in which the fifth plane P5 is perpendicular to the +Z direction in which the second telescopic portion 522 is extended as shown is referred to as an “unadjusted state.” When the second telescopic portion 522 is in the unadjusted state, the first axis AX1 is parallel to the V axis.

[0136] In the following descriptions, sometimes Figure 2E As shown in the figure, the state in which the fifth plane P5 is inclined with respect to the +Z direction in which the second telescopic portion 522 is extended due to the extension and contraction of the second telescopic portion 522 is referred to as an “adjusted state”.

[0137] 1.5 Function

[0138] As described above, the first holder 11 can be rotated about the first axis AX1 relative to the second holder 22, and the second holder 22 can be rotated about the second axis AX2 relative to the third holder 33. Thus, the mirror 10 can be rotated about two axes orthogonal to each other to adjust its posture, and the rotation angles about these axes can be adjusted independently.

[0139] The first telescopic portion 411 and the second telescopic portion 522 may also be configured to not only contact the first holder 11 and the second holder 22, but also be hooked on the first holder 11 and the second holder 22. In this case, when the first telescopic portion 411 and the second telescopic portion 522 are contracted, the first holder 11 and the second holder 22 may be stretched and rotated, respectively, and the springs 45 and 55 may not be provided.

[0140] 1.6 Issues of Comparative Example

[0141] 1.6.1 Relationship between the first telescopic portion 411 and the second retaining frame 22

[0142] As described above, the driving portion 410 of the first adjustment device 41 is fixed to the second holding frame 22, and the position where the end portion 419 of the first telescopic portion 411 contacts the first holding frame 11 in the unadjusted state coincides with the fifth plane P5.

[0143] Here, when the thermal expansion coefficients of the second holder 22 and the first telescopic part 411 are different, the following problem occurs. The distance in the Z direction from the surface 228 on the -Z side of the second holder 22 to which the drive part 410 is fixed to the fifth plane P5 is related to the thermal expansion coefficient and temperature of the second holder 22. The distance in the Z direction from the surface 228 to the end 419 of the first telescopic part 411 is related to the thermal expansion coefficient and temperature of the first telescopic part 411. When the temperature of the calibration adjustment device including the second holder 22 and the first telescopic part 411 changes according to the energy of the pulsed laser, the positional relationship between the fifth plane P5 and the end 419 of the first telescopic part 411 changes with respect to the adjustment of the drive part 410. Therefore, the posture of the mirror 10 changes.

[0144] In addition, when a temperature difference occurs between the second retaining frame 22 and the first telescopic portion 411 due to factors such as a difference in thermal conductivity or specific heat between the second retaining frame 22 and the first telescopic portion 411, the positional relationship between the fifth plane P5 and the end 419 of the first telescopic portion 411 will also change.

[0145] 1.6.2 Relationship between the second telescopic portion 522 and the third retaining frame 33

[0146] As described above, the driving portion 520 of the second adjustment device 52 is fixed to the third holder 33, and the end 529 of the second telescopic portion 522 contacts the second holder 22 in the fifth plane P5. The fifth plane P5 in the unadjusted state is perpendicular to the +Z direction in which the second telescopic portion 522 extends.

[0147] Here, when the thermal expansion coefficients of the third holder 33 and the second telescopic portion 522 are different, the same problem as described above occurs. That is, when the temperature of the calibration adjustment device changes according to the energy of the pulsed laser, the degree of inclination of the fifth plane P5 in the +Z direction relative to the extension of the second telescopic portion 522 changes separately with respect to the adjustment of the driving unit 520. Therefore, the posture of the mirror 10 changes.

[0148] In addition, when a temperature difference occurs between the third retaining frame 33 and the second telescopic portion 522 due to factors such as the difference in thermal conductivity and specific heat between the third retaining frame 33 and the second telescopic portion 522, the inclination of the fifth plane P5 relative to the +Z direction of extension of the second telescopic portion 522 will also change.

[0149] 1.6.3 Research on solutions

[0150] If the second holder 22 and the third holder 33 are formed of the same second material as the first telescopic portion 411 and the second telescopic portion 522, the thermal expansion coefficient, thermal conductivity and specific heat are the same between these components, so the above-mentioned problem is alleviated. However, if the specific gravity of the second material is large, the second holder 22 and the like become heavy, and high-speed posture control may be difficult.

[0151] In some embodiments described below, the first support member 21a or 21b supporting the first adjustment device 41 is arranged on the second holder 22a or 22b, and the first support member 21a or 21b and the first telescopic portion 411 are made of the same material. In addition, the second support member 32a or 32b supporting the second adjustment device 52 is arranged on the third holder 33a or 33b, and the second support member 32a or 32b and the second telescopic portion 522 are made of the same material.

[0152] 2. An alignment adjustment device including a support member made of the same material as the telescopic part

[0153] 2.1 Structure and Action

[0154] Figure 3A The calibration adjustment device according to the first embodiment is schematically shown. Figure 3B yes Figure 3A The cross-sectional view at line IIIB-IIIB is shown in FIG. Figure 3C yes Figure 3A The cross-sectional view at line IIIC-IIIC of Figure 3D yes Figure 3A Cross-sectional view at line IIID-IIID.

[0155] 2.1.1 Second Holding Frame 22a and First Support Member 21a

[0156] The alignment adjustment device of the first embodiment includes a second holder 22a and a first support member 21a instead of the second holder 22 in the comparative example. The shape of the second holder 22a and the first support member 21a combined is substantially equivalent to the shape of the second holder 22 in the comparative example.

[0157] The second holder 22a supports the first holder 11 on the first axis AX1 and also supports the first support member 21a at the first end 211 on the +Z side of the first support member 21a. The second holder 22a is made of a first material such as aluminum. The first support member 21a is fixed to the second holder 22a by a bolt (not shown) that penetrates the first end 211.

[0158] The first supporting member 21a supports the first adjusting device 41. The driving unit 410 included in the first adjusting device 41 is fixed to the -Z side surface 218 of the first supporting member 21a.

[0159] The first end 211 of the first supporting member 21a is located on the fifth plane P5. Thus, the first plane P1 including the first end 211 and the first axis AX1 coincides with the fifth plane P5. The first plane P1 is perpendicular to the X direction in which the first telescopic portion 411 extends.

[0160] The end 419 of the first telescopic portion 411 in the unadjusted state is located not only on the fifth plane P5 but also on the first plane P1. Therefore, the distance in the Z direction from the surface 218 on the -Z side of the first supporting member 21a to which the driving unit 410 is fixed to the end 419 of the first telescopic portion 411 in the unadjusted state and the distance in the Z direction from the surface 218 to the first end 211 of the first supporting member 21a are substantially equal.

[0161] The first supporting member 21a is made of the same second material as the first telescopic portion 411, for example, stainless steel. Therefore, even if the temperature of the first supporting member 21a and the first telescopic portion 411 changes, the length of the first supporting member 21a in the Z direction and the length of the first telescopic portion 411 in the Z direction change substantially the same. Therefore, the positional relationship between the end 419 of the first telescopic portion 411 and the fifth plane P5 in the unadjusted state can be stabilized.

[0162] Here, the case where the position of the end 419 of the first telescopic portion 411 in contact with the first holder 11 coincides with the first plane P1 in the unadjusted state is described, but the present invention is not limited to this. It is sufficient as long as the position of the end 419 of the first telescopic portion 411 in contact with the first holder 11 can be adjusted to the first plane P1. Adjustable means that a part of the first plane P1 is included in the movable range of the position of the end 419 of the first telescopic portion 411 in contact with the first holder 11.

[0163] 2.1.2 Third Retaining Frame 33a and Second Supporting Member 32a

[0164] The alignment adjustment device of the first embodiment includes a third holder 33a and a second support member 32a instead of the third holder 33 in the comparative example. The shape of the third holder 33a and the second support member 32a combined is substantially equivalent to the shape of the third holder 33 in the comparative example.

[0165] The third holder 33a supports the second holder 22a along the second axis AX2 and further includes a third end portion 323 (see FIG. 1 ) on the +Z side of the second support member 32a. Figure 3C ) supports the second support member 32a. The third holder 33a is made of a first material such as aluminum. The second support member 32a is fixed to the third holder 33a by a bolt 326 penetrating the third end portion 323.

[0166] The second support member 32a supports the second adjustment device 52. The driving unit 520 included in the second adjustment device 52 is fixed to the -Z side surface 328 of the second support member 32a. The third plane P3 including the third end 323 of the second support member 32a and the second axis AX2 is perpendicular to the +Z direction in which the second telescopic portion 522 extends.

[0167] The third end portion 323 is located on the fifth plane P5 in the unadjusted state. That is, the third plane P3 coincides with the fifth plane P5 in the unadjusted state.

[0168] As described above, the end portion 529 of the second expandable and contractible portion 522 is located on the fifth plane P5. That is, the second expandable and contractible portion 522 is in contact with the second holder 22a on the fifth plane P5.

[0169] In addition, the position where the end 529 of the second telescopic portion 522 contacts the second holding frame 22a in the unadjusted state coincides with the third plane P3. Therefore, the distance in the Z direction from the surface 328 on the -Z side of the second supporting member 32a to which the driving portion 520 is fixed to the end 529 of the second telescopic portion 522 in the unadjusted state is substantially equal to the distance in the Z direction from the surface 328 to the third end 323 of the second supporting member 32a.

[0170] The second supporting member 32a is made of the same second material as the second telescopic portion 522, for example, stainless steel. Therefore, even if the temperature of the second telescopic portion 522 and the second supporting member 32a changes, the length of the second telescopic portion 522 in the Z direction and the length of the second supporting member 32a in the Z direction change substantially the same. Therefore, the degree of inclination of the fifth plane P5 with respect to the +Z direction in which the second telescopic portion 522 is extended can be stabilized.

[0171] Here, the case where the position of the end 529 of the second telescopic portion 522 in contact with the second holder 22a coincides with the third plane P3 in the unadjusted state is described, but the present invention is not limited to this. It is sufficient as long as the position of the end 529 of the second telescopic portion 522 in contact with the second holder 22a can be adjusted to the third plane P3. Adjustable means that a part of the third plane P3 is included in the movable range of the position of the end 529 of the second telescopic portion 522 in contact with the second holder 22a.

[0172] 2.2 Other structural examples

[0173] In the first embodiment, the posture of the mirror 10 is adjusted using two mutually orthogonal axes, but the present invention is not limited thereto. The rotation axis may be only the first axis AX1, and the third holder 33a, the second support member 32a, and the second adjustment device 52 may not be provided.

[0174] 2.3 Function

[0175] According to the first embodiment, the calibration adjustment device includes a first holder 11, a first adjustment device 41, and a first support member 21a. The first holder 11 is made of a first material such as aluminum, and supports the mirror 10. The first adjustment device 41 includes a first telescopic portion 411 made of a second material such as stainless steel that is different from the first material. The first adjustment device 41 makes the first telescopic portion 411 contact the first holder 11 and adjusts the length of the first telescopic portion 411, thereby rotating the first holder 11 and the mirror 10 around the first axis AX1. The first support member 21a is made of a second material, and supports the first adjustment device 41.

[0176] The first adjustment device 41 is configured to be able to adjust the position where the first telescopic portion 411 contacts the first holder 11 on a first plane P1 including the first end portion 211 of the first support member 21 a and the first axis AX1 .

[0177] Thus, the distance in the Z direction from the surface 218 on the -Z side of the first support member 21a to the first end 211 and the distance in the Z direction from the surface 218 to the end 419 of the first telescopic portion 411 in contact with the first holder 11 can be adjusted to be equal. The first support member 21a and the first telescopic portion 411 are both made of the second material and have the same thermal expansion coefficient. Therefore, even if the temperature of the first support member 21a and the first telescopic portion 411 changes, the length in the Z direction of the first support member 21a and the length in the Z direction of the first telescopic portion 411 change substantially in the same manner. Therefore, it is suppressed that the positional relationship between the end 419 of the first telescopic portion 411 and the fifth plane P5 changes separately with respect to the adjustment of the drive unit 410. In addition, the first support member 21a and the first telescopic portion 411 have the same thermal conductivity and specific heat, so the temperature difference between the first support member 21a and the first telescopic portion 411 is suppressed. Therefore, a change in the positional relationship between the end portion 419 of the first telescopic portion 411 and the fifth plane P5 is suppressed.

[0178] According to the first embodiment, the alignment adjustment device further includes a second holder 22 a made of the first material, the second holder 22 a supports the first holder 11 along the first axis AX1 and supports the first support member 21 a at the first end portion 211 .

[0179] Thus, the first holder 11 is supported along the first axis AX1 and the first support member 21a supporting the first adjustment device 41 is supported at the first end 211 by the same second holder 22a. Therefore, the posture of the mirror 10 can be further stabilized.

[0180] According to the first embodiment, the thermal expansion coefficient of the second material is smaller than the thermal expansion coefficient of the first material.

[0181] Thus, the first telescopic portion 411 and the first supporting member 21 a are made of a material having a small thermal expansion coefficient, and the posture of the first holder 11 can be further stabilized.

[0182] According to the first embodiment, the specific gravity of the first material is smaller than the specific gravity of the second material.

[0183] Thus, the first holder 11 or both the first holder 11 and the second holder 22a are made of a material having a relatively low specific gravity, and high-speed posture control can be performed.

[0184] According to the first embodiment, the calibration adjustment device further includes a second adjustment device 52 and a second support member 32a. The second adjustment device 52 includes a second telescopic portion 522 made of a second material, and the second telescopic portion 522 is brought into contact with the second holder 22a and the length of the second telescopic portion 522 is adjusted, thereby rotating the second holder 22a, the first holder 11, and the mirror 10 around a second axis AX2 different from the first axis AX1. The second support member 32a is made of a second material and supports the second adjustment device 52.

[0185] Thereby, the posture of the mirror 10 can be adjusted on the second axis AX2 in addition to the first axis AX1.

[0186] According to the first embodiment, the second adjustment device 52 is configured to be able to adjust the position of the second telescopic portion 522 in contact with the second holder 22a to be on the third plane P3 including the third end portion 323 of the second support member 32a and the second axis AX2.

[0187] Thus, the distance in the Z direction from the surface 328 on the -Z side of the second support member 32a to the third end 323 and the distance in the Z direction from the surface 328 to the end 529 of the second telescopic portion 522 in contact with the second holder 22a can be adjusted to be equal. The second support member 32a and the second telescopic portion 522 are both made of the second material and have the same thermal expansion coefficient. Therefore, even if the temperature of the second support member 32a and the second telescopic portion 522 changes, the length in the Z direction of the second support member 32a and the length in the Z direction of the second telescopic portion 522 change substantially in the same manner. Therefore, the degree of inclination of the fifth plane P5 in the +Z direction relative to the extension of the second telescopic portion 522 is suppressed from changing separately due to the adjustment of the drive unit 520. In addition, the second support member 32a and the second telescopic portion 522 have the same thermal conductivity and specific heat, so the temperature difference between the second support member 32a and the second telescopic portion 522 is suppressed. Therefore, the change in the degree of inclination of the fifth plane P5 in the +Z direction with respect to the extension of the second telescopic portion 522 is suppressed.

[0188] According to the first embodiment, the alignment adjustment device further includes a third holder 33 a made of the first material, the third holder 33 a supporting the second holder 22 a along the second axis AX2 and supporting the second support member 32 a at the third end portion 323 .

[0189] Thus, the second holder 22a is supported along the second axis AX2 and the second support member 32a supporting the second adjustment device 52 is supported at the third end 323 by the same third holder 33a. Therefore, the posture of the mirror 10 can be further stabilized.

[0190] According to the first embodiment, the first axis AX1 and the second axis AX2 intersect each other, and the first end portion 211 of the first supporting member 21 a is located on the fifth plane P5 including the first axis AX1 and the second axis AX2.

[0191] Thus, the first supporting member 21 a is arranged with reference to the fifth plane P5 defined by the first and second axes AX1 and AX2 , so that the posture of the mirror 10 can be stabilized.

[0192] According to the first embodiment, the first plane P1 including the first end portion 211 and the first axis AX1 is perpendicular to the X direction in which the first telescopic portion 411 extends.

[0193] Thus, when the end portion 419 of the first telescopic portion 411 that contacts the first holder 11 is located on the first plane P1, a force for rotating the first holder 11 can be efficiently applied.

[0194] According to the first embodiment, the second expansion and contraction portion 522 is in contact with the second holder 22a in the fifth plane P5.

[0195] Thus, the posture of the second holder 22 a is adjusted with reference to the fifth plane P5 defined by the first and second axes AX1 and AX2 , so that the posture of the mirror 10 can be stabilized.

[0196] According to the first embodiment, the third plane P3 including the third end portion 323 of the second supporting member 32a and the second axis AX2 is perpendicular to the +Z direction in which the second telescopic portion 522 extends.

[0197] Thus, when the end portion 529 of the second telescopic portion 522 that contacts the second holder 22a is located on the third plane P3, a force for rotating the second holder 22a can be efficiently applied.

[0198] Regarding other aspects, the first embodiment is the same as the comparative example.

[0199] 3. Calibration and adjustment device for the second plane P2 to be perpendicular to the first plane P1

[0200] 3.1 Structure and Action

[0201] Figure 4A A calibration adjustment device according to a second embodiment is schematically shown. Figure 4B yes Figure 4A The cross-sectional view at the IVB-IVB line, Figure 4C yes Figure 4A The cross-sectional view at the IVC-IVC line, Figure 4D yes Figure 4A Cross-sectional view at the IVD-IVD line.

[0202] 3.1.1 Second Holder 22b and First Support Member 21b

[0203] The calibration adjustment device of the second embodiment includes a second holder 22b and a first support member 21b instead of the second holder 22a and the first support member 21a of the first embodiment. The shape formed by the combination of the second holder 22b and the first support member 21b is roughly equivalent to the shape formed by the combination of the second holder 22a and the first support member 21a in the first embodiment.

[0204] The second holder 22b supports the first holder 11 on the first axis AX1, and also supports the first support member 21b at the first end 211 on the +Z side of the first support member 21b and the second end 212 on the -H side of the first support member 21b. The first support member 21b is fixed to the second holder 22b by a bolt (not shown) penetrating the first end 211 and a bolt (not shown) penetrating the second end 212.

[0205] The second plane P2 including the second end 212 and the first axis AX1 is perpendicular to the first plane P1 including the first end 211 of the first supporting member 21b and the first axis AX1. The second plane P2 is also perpendicular to a fifth plane P5 including the first axis AX1 and the second axis AX2.

[0206] 3.1.2 Third Retaining Frame 33b and Second Supporting Member 32b

[0207] The calibration adjustment device of the second embodiment includes a third holder 33b and a second support member 32b instead of the third holder 33a and the second support member 32a in the first embodiment. The shape formed by the third holder 33b and the second support member 32b is roughly equivalent to the shape formed by the third holder 33a and the second support member 32a in the first embodiment.

[0208] The third holder 33b supports the second holder 22b on the second axis AX2, and also supports the second support member 32b at the third end 323 on the +Z side of the second support member 32b and the fourth end 324 on the -V side of the second support member 32b. The second support member 32b is fixed to the third holder 33b by a bolt 326 penetrating the third end 323 and a bolt 327 penetrating the fourth end 324.

[0209] A fourth plane P4 including the fourth end portion 324 and the second axis AX2 is perpendicular to a third plane P3 including the third end portion 323 of the second supporting member 32 b and the second axis AX2.

[0210] 3.2 Other structural examples

[0211] In the second embodiment, the posture of the mirror 10 is adjusted using two mutually orthogonal axes, but the present invention is not limited thereto. The rotation axis may be only the first axis AX1, and the third holder 33b, the second support member 32b, and the second adjustment device 52 may not be provided.

[0212] 3.3 Function

[0213] Figure 4E 1 is a diagram showing the positional relationship between the second telescopic portion 522 and the second axis AX2 in the adjustment state in the first embodiment.

[0214] The inclination degree of the mirror 10 in the adjusted state where the end 529 of the second telescopic portion 522 is offset from the third plane P3 by a distance Z1 is θ1 relative to the unadjusted state where the end 529 of the second telescopic portion 522 is located on the third plane P3. The distance in the V direction from the second axis AX2 to the second telescopic portion 522 is L1.

[0215] Here, the following case is considered: the adjustment state of the second telescopic portion 522 by the driving unit 520 remains unchanged, and the temperature of the calibration adjustment device including the third holder 33a, the second support member 32a and the second telescopic portion 522 rises. The distance L2 in the V direction from the second axis AX2 to the second telescopic portion 522 becomes a value increased by the thermal expansion coefficient αh of the first material constituting the third holder 33a relative to the distance L1. On the other hand, the distance Z2 between the end 529 and the third plane P3 becomes a value increased by the thermal expansion coefficient αm of the second material constituting the second support member 32a and the second telescopic portion 522 relative to the distance Z1. In the case where the thermal expansion coefficient of the second material is smaller than the thermal expansion coefficient of the first material, the degree of inclination of the mirror 10 becomes θ2 which is slightly smaller than θ1.

[0216] If the second telescopic portion 522 is in an unadjusted state, the end portion 529 is located at the third plane P3, and θ1 and θ2 are both 0. Therefore, in the first embodiment, even if the temperature of the calibration adjustment device changes, the inclination of the mirror 10 will hardly change. Figure 4E In the adjusted state shown, the tilt of the mirror 10 may change when the temperature changes.

[0217] Figure 4F 1 is a diagram showing the positional relationship between the second telescopic portion 522 and the second axis AX2 in the adjustment state in the second embodiment.

[0218] and Figure 4ESimilarly, consider the following case: the drive unit 520 maintains the adjustment state of the second telescopic portion 522 as it is, and the temperature of the calibration adjustment device rises. In the second embodiment, the distance L3 in the V direction from the second axis AX2 to the second telescopic portion 522 becomes a value that increases relative to the distance L1 according to the thermal expansion coefficient αm of the second material constituting the second support member 32b. On the other hand, the distance Z2 between the end 529 and the third plane P3 becomes a value that increases relative to the distance Z1 according to the thermal expansion coefficient αm of the second material constituting the second support member 32b and the second telescopic portion 522. In this case, even if the temperature of the calibration adjustment device rises, the inclination degree of the mirror 10 is still approximately θ1.

[0219] Here, the positional relationship between the second axis AX2 and the second expandable portion 522 is described, but the positional relationship between the first axis AX1 and the first expandable portion 411 is also the same.

[0220] According to the second embodiment, the second plane P2 including the second end 212 of the first supporting member 21 b and the first axis AX1 is perpendicular to the first plane P1 including the first end 211 of the first supporting member 21 b and the first axis AX1.

[0221] Thus, in the adjustment state where the end 419 of the first telescopic portion 411 is located outside the fifth plane P5, even if the temperature of the alignment adjustment device including the first supporting member 21 b and the first telescopic portion 411 changes, the change in the posture of the mirror 10 can be suppressed.

[0222] According to the second embodiment, the alignment adjustment device further includes a second holder 22 b made of the first material, the second holder 22 b supports the first holder 11 along the first axis AX1 and supports the first support member 21 b at both the first end 211 and the second end 212 .

[0223] Thus, the same second holder 22b supports the first holder 11 along the first axis AX1 and the first support member 21b supporting the first adjustment device 41 at both the first end 211 and the second end 212. Therefore, the posture of the mirror 10 can be further stabilized.

[0224] According to the second embodiment, the fourth plane P4 including the fourth end 324 of the second supporting member 32b and the second axis AX2 is perpendicular to the third plane P3 including the third end 323 of the second supporting member 32b and the second axis AX2.

[0225] Thus, in the adjustment state where the end 529 of the second telescopic portion 522 is located outside the third plane P3, even if the temperature of the alignment adjustment device including the second supporting member 32b and the second telescopic portion 522 changes, the change in the posture of the mirror 10 can be suppressed.

[0226] According to the second embodiment, the alignment adjustment device further includes a third holder 33 b made of the first material, the third holder 33 b supporting the second holder 22 b along the second axis AX2 and supporting the second support member 32 b at both the third end 323 and the fourth end 324 .

[0227] Thus, the same third holder 33b supports the second holder 22b along the second axis AX2 and supports the second support member 32b supporting the second adjustment device 52 at both the third end 323 and the fourth end 324. Therefore, the posture of the mirror 10 can be further stabilized.

[0228] According to the second embodiment, the second plane P2 including the second end portion 212 of the first supporting member 21 b and the first axis AX1 is perpendicular to the fifth plane P5 including the first axis AX1 and the second axis AX2.

[0229] Thus, in the adjustment state where the end 419 of the first telescopic portion 411 is located outside the fifth plane P5, even if the temperature of the alignment adjustment device including the first supporting member 21 b and the first telescopic portion 411 changes, the change in the posture of the mirror 10 can be suppressed.

[0230] Regarding other aspects, the second embodiment is the same as the first embodiment.

[0231] 4. Others

[0232] Figure 5 The structure of the exposure device 600 connected to the laser device 1 is schematically shown. The laser device 1 generates pulsed laser light and outputs it to the exposure device 600.

[0233] exist Figure 5In the figure, the exposure device 600 includes an illumination optical system 601 and a projection optical system 602. The illumination optical system 601 illuminates the mask pattern of the mask (not shown) arranged on the mask stage RT by the pulse laser emitted from the laser device 1. The projection optical system 602 performs reduced projection of the pulse laser that passes through the mask so that it is imaged on the workpiece (not shown) arranged on the workpiece stage WT. The workpiece is a photosensitive substrate such as a semiconductor wafer coated with photoresist. The exposure device 600 causes the mask stage RT and the workpiece stage WT to move synchronously and parallelly, thereby exposing the pulse laser reflecting the mask pattern to the workpiece. After the mask pattern is transferred to the semiconductor wafer through the above exposure process, it is possible to manufacture electronic devices through multiple processes.

[0234] The above description is not intended to be limiting, but is simply illustrative. Therefore, those skilled in the art will appreciate that modifications can be made to the embodiments of the present invention without departing from the claims. In addition, those skilled in the art will appreciate that the embodiments of the present invention can be used in combination.

[0235] Unless explicitly stated otherwise, the terms used in this specification and claims as a whole should be interpreted as "non-limiting" terms. For example, terms such as "including", "having", "having", and "having" should be interpreted as "not excluding the existence of structural elements other than the recorded structural elements". In addition, the modifier "one" should be interpreted as meaning "at least one" or "one or more". In addition, terms such as "at least one of A, B, and C" should be interpreted as "A", "B", "C", "A+B", "A+C", "B+C", or "A+B+C". Moreover, it should be interpreted as also including combinations of them and parts other than "A", "B", and "C".

Claims

1. A calibration and adjustment device, comprising: A first holder made of a first material, which supports the optical element; a first adjustment device including a first telescopic portion made of a second material different from the first material, wherein the first telescopic portion is brought into contact with the first holder and a length of the first telescopic portion is adjusted to rotate the first holder and the optical element around a first axis; The first supporting member made of the second material supports the first adjusting device; and The second holder made of the first material supports the first holder on the first shaft and supports the first support member at the first end of the first support member. The first adjustment device is configured to be able to adjust a position where the first telescopic portion contacts the first holder on a first plane including the first end portion and the first axis.

2. The calibration adjustment device according to claim 1, wherein: A second plane including the second end portion of the first supporting member and the first axis is perpendicular to the first plane.

3. The calibration adjustment device according to claim 2, wherein: The second holder supports the first support member at both the first end portion and the second end portion.

4. The calibration adjustment device according to claim 1, wherein: The thermal expansion coefficient of the second material is smaller than the thermal expansion coefficient of the first material.

5. The calibration adjustment device according to claim 1, wherein: The specific gravity of the first material is smaller than the specific gravity of the second material.

6. The calibration adjustment device according to claim 1, wherein: The calibration and adjustment device also has: a second adjustment device including a second telescopic portion made of the second material, wherein the second telescopic portion is brought into contact with the second holder and a length of the second telescopic portion is adjusted to rotate the second holder, the first holder, and the optical element around a second axis different from the first axis; and The second supporting member made of the second material supports the second adjusting device.

7. The calibration adjustment device according to claim 6, wherein: The second adjustment device is configured to be able to adjust the position where the second telescopic portion contacts the second holder on a third plane including a third end portion of the second support member and the second axis.

8. The calibration adjustment device according to claim 7, wherein: The alignment adjustment device further includes a third holder made of the first material, the third holder supporting the second holder on the second shaft and supporting the second support member at the third end portion.

9. The calibration adjustment device according to claim 7, wherein: A fourth plane including a fourth end portion of the second supporting member and the second axis is perpendicular to the third plane.

10. The calibration adjustment device according to claim 9, wherein: The alignment adjustment device further includes a third holder made of the first material, the third holder supporting the second holder on the second shaft and supporting the second support member at both the third end and the fourth end.

11. The calibration adjustment device according to claim 6, wherein: A second plane including the second end portion of the second supporting member and the first axis is perpendicular to a fifth plane including the first axis and the second axis.

12. A calibration adjustment device, comprising: A first holder made of a first material, which supports the optical element; a first adjustment device including a first telescopic portion made of a second material different from the first material, wherein the first telescopic portion is brought into contact with the first holder and a length of the first telescopic portion is adjusted to rotate the first holder and the optical element around a first axis; A first supporting member made of the second material, which supports the first adjusting device; the second holder made of the first material, supporting the first holder on the first shaft and supporting the first supporting member at a first end portion of the first supporting member; a second adjustment device including a second telescopic portion made of the second material, wherein the second telescopic portion is brought into contact with the second holder and a length of the second telescopic portion is adjusted to rotate the second holder, the first holder, and the optical element around a second axis intersecting the first axis; and The second supporting member made of the second material supports the second adjusting device. The first end portion is located on a fifth plane including the first axis and the second axis.

13. The calibration adjustment device according to claim 12, wherein: A first plane including the first end portion and the first axis is perpendicular to a direction in which the first telescopic portion extends.

14. The calibration adjustment device according to claim 12, wherein: The alignment adjustment device further includes a third holder made of the first material, the third holder supporting the second holder on the second shaft and supporting the second support member at a third end portion of the second support member.

15. The calibration adjustment device according to claim 14, wherein: The second telescopic portion is in contact with the second holder in the fifth plane.

16. The calibration adjustment device according to claim 15, wherein: A third plane including the third end portion and the second axis is perpendicular to a direction in which the second telescopic portion extends.

17. The calibration adjustment device according to claim 12, wherein: A second plane including the second end of the first supporting member and the first axis is perpendicular to a first plane including the first end of the first supporting member and the first axis.

18. The calibration adjustment device according to claim 12, wherein: A fourth plane including a fourth end portion of the second supporting member and the second axis is perpendicular to a third plane including a third end portion of the second supporting member and the second axis.

19. A method for manufacturing an electronic device, comprising the following steps: The pulsed laser is generated by a laser device having a calibration adjustment device, outputting the pulse laser to an exposure device, exposing the pulsed laser to a photosensitive substrate in the exposure device to manufacture an electronic device, The calibration and adjustment device comprises: A first holder made of a first material, which supports the optical element; a first adjustment device including a first telescopic portion made of a second material different from the first material, wherein the first telescopic portion is brought into contact with the first holder and a length of the first telescopic portion is adjusted to rotate the first holder and the optical element around a first axis; The first supporting member made of the second material supports the first adjusting device; and The second holder made of the first material supports the first holder on the first shaft and supports the first support member at the first end of the first support member. The first adjustment device is configured to be able to adjust a position where the first telescopic portion contacts the first holder on a first plane including the first end portion and the first axis.

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