A feeding device and a feeding method thereof

Abstract

The present invention discloses a feeding device and a feeding method thereof, belonging to the technical field of display device manufacturing. The feeding device of the present invention includes: an upper unit for receiving workpieces; a lower unit on which the upper unit places the workpieces; and an adsorption unit for adsorbing the workpieces on the lower unit for laser etching. The present invention improves the accuracy of feeding the display screen body during cathode etching, realizes more precise positioning of the display screen body, and improves the processing efficiency of the display screen body.

Description

Technical Field

[0001] The present invention relates to the technical field of display device manufacturing, and more specifically, to a loading device and a loading method thereof. Background Art

[0002] In order to balance a higher screen-to-body ratio and a front camera function, placing a camera component or the like under the display screen, that is, an under-screen camera component solution, has become the mainstream direction in the display industry. However, the current display panel is composed of multiple layers of materials, and the complex multi-layer structure results in a relatively low overall external light transmittance. The main reason for the low external light transmittance is that the cathode layer in the display panel structure absorbs and reflects external light. Adopting a process of laser etching the cathode layer to remove some cathode layer materials has become the main technical development direction. Usually, a loading process is required before the laser cathode etching process. How to effectively load the workpiece is a technical problem to be solved. Therefore, it is necessary to study a loading device and a loading method for a display screen to address the deficiencies of the prior art and solve one or more of the above problems. Summary of the Invention

[0003] (1) Technical Solution

[0004] On the one hand, the present invention provides a loading device, including:

[0005] An upper unit for receiving a workpiece;

[0006] A lower unit, and the upper unit places the workpiece on the lower unit.

[0007] Further, the upper unit includes a first lifting and clamping part and a first lifting and abutting part. The first lifting and clamping part is used to clamp or release the workpiece, and the first lifting and abutting part is used to abut or release the workpiece. The first lifting and abutting part is installed on the first lifting and clamping part. When receiving the workpiece, the first lifting and clamping part clamps the workpiece, and the first lifting and pressing part abuts the workpiece.

[0008] Further, the loading device is installed in a vacuum chamber. The first lifting and clamping part includes a first lifting part and a clamping part, and the first lifting part is connected to the clamping part; the first lifting and abutting part includes a lifting part and an abutting part, and the lifting part is connected to the abutting part.

[0009] Further, the first lifting part includes a first driving part, a first moving part, a first lifting plate, a first lifting tube, and a first lower plate; the first driving part drives the first moving part to move, the first moving part is connected to the first lifting plate, the first lifting plate is connected to the first lifting tube, and the first lifting tube is connected to the first lower plate.

[0010] Furthermore, the clamping part includes a driving component, a transmission rod, a turntable, a connecting rod, a first moving component, a second moving component and a clamping claw; the driving component is installed on the first lifting plate, the driving component drives the transmission rod to rotate, the transmission rod drives the turntable to rotate, the turntable is connected to the first moving component and the second moving component through multiple connecting rods, and the first moving component and the second moving component are both provided with multiple clamping claws.

[0011] Furthermore, the lifting part includes a driving part, a moving part, a lifting plate, a lifting column, and a lower plate, the driving part drives the moving part to move, the moving part is connected to the lifting plate, the lifting plate is connected to the lifting column, the lifting column is connected to the lower plate, and the interference part includes a interference component and an installation component, and the interference component is installed on the lower plate through the installation component.

[0012] Furthermore, the lower unit includes an adjusting part, a bearing part, an adjusting part and a second lifting part. The workpiece is placed on the bearing part and the adjusting part. The second lifting part is used for lifting and lowering the bearing part. The adjusting part is used for UVW adjustment of the bearing part. The adjusting part is used for adjustably supporting the workpiece.

[0013] Furthermore, the loading device also includes a cover plate, which is installed on the vacuum chamber, and a plurality of image detection parts are provided on the cover plate for accurately placing the workpiece on the carrying part and the adjusting part; and / or, the loading device also includes an adsorption unit, which adsorbs the workpiece on the lower unit for laser etching.

[0014] On the other hand, the present invention further provides a feeding method, which uses any of the above-mentioned feeding devices and comprises the following steps:

[0015] S100: The upper unit receives the workpiece;

[0016] S200: Accurately place the workpiece on the lower unit.

[0017] Furthermore, step S100 includes the following steps:

[0018] Step S101: using a robot to send the workpiece into a vacuum chamber;

[0019] Step S102: The first lifting and lowering clamping part clamps the workpiece, and the first lifting and lowering contact part contacts the workpiece.

[0020] Step S103: the robot arm exits the vacuum chamber;

[0021] And / or, step S200 includes the following steps:

[0022] Step S201: the first lifting unit drives the workpiece to descend to a first height from the bearing portion of the lower unit;

[0023] Step S202: two diagonal image detection units acquire the postures or marks of two diagonal portions of the carrying portion, the adjustment unit 230 compensates and adjusts the posture of the carrying portion, and the workpiece is placed on the carrying portion and the adjustment unit;

[0024] Step S203: At this time, the other two diagonal image detection units obtain the postures or marks of the other two diagonal corners of the carrying part to determine whether the workpiece is accurately placed on the carrying part. If yes, proceed to step S300, if not, proceed to step S204;

[0025] Step S204: when the result is no, the first lifting unit drives the workpiece to rise, and when the workpiece rises to a second height from the bearing part of the lower unit, the adjustment unit compensates and adjusts the posture of the bearing part according to the result of obtaining the posture or mark of the other two diagonal corners of the bearing part by the two other diagonal image detection units, and accurately places the workpiece on the bearing part and the adjustment unit;

[0026] Step S205: the abutting portion is disengaged from the abutting workpiece, the first lifting portion continues to descend, the clamping portion is disengaged from the clamping workpiece, and the upper unit is lifted away from the lower unit;

[0027] And / or, further comprising step S300: adsorbing the workpiece on the lower unit for laser etching;

[0028] Step S300 includes the following steps:

[0029] Step S301: the adsorption unit moves to the top of the lower unit, and the lower unit drives the workpiece to rise;

[0030] Step S302: the workpiece enters the adsorption unit, and the adsorption unit adsorbs the workpiece;

[0031] Step S303: the adsorption unit moves the workpiece to the laser etching unit, and the laser etching unit performs laser etching on the workpiece.

[0032] (2) Beneficial effects

[0033] Compared with the prior art, the technical solution provided by the present invention has the following beneficial effects:

[0034] (1) The present invention provides an upper unit, which includes a first lifting clamping part and a first lifting abutting part, which can clamp the workpiece to receive the workpiece, and can abut the workpiece to prevent the workpiece from moving up and down and affecting the position of the workpiece, thereby providing a good foundation for the subsequent accurate positioning of the screen on the lower unit;

[0035] (2) The present invention provides a lower unit, which includes an adjustment part, a bearing part, an adjustment part and a second lifting part. The adjustment part can perform UVW adjustment on the bearing part to adjust the position where the workpiece is placed, providing a good adjustment space for the workpiece before entering the receiving groove on the back of the adsorption unit. The adjustment part can also adjust and support the workpiece to prevent the workpiece from sinking and being completely deformed, which affects the position and accuracy of the subsequent laser etching process of the workpiece.

[0036] (3) The present invention provides four image detection parts, which are arranged at the four corners of the cover plate. Two diagonal image detection parts obtain the postures or marks of two diagonals of the bearing part, and the adjustment part compensates and adjusts the posture of the bearing part. The workpiece is placed on the bearing part and the adjustment part. The other two diagonal image detection parts obtain the postures or marks of the other two diagonals of the bearing part to determine whether the workpiece is accurately placed on the bearing part. When the result is negative, according to the result of the postures or marks of the other two diagonals of the bearing part obtained by the other two diagonal image detection parts, the adjustment part compensates and adjusts the posture of the bearing part to accurately place the workpiece on the bearing part and the adjustment part. Description of the Drawings

[0037] Figure 1 It is a schematic structural view of the loading device of the present invention installed on the vacuum chamber.

[0038] Figure 2 It is a partial schematic structural view of the loading device of the present invention.

[0039] Figure 3 It is a schematic structural view of the upper unit of the present invention.

[0040] Figure 4 It is a schematic structural view of the upper unit of the present invention (from another angle).

[0041] Figure 5 It is a front view of the upper unit of the present invention.

[0042] Figure 6 It is a schematic A-A cross-sectional view of the upper unit of the present invention.

[0043] Figure 7 It is a schematic structural view of the lower unit of the present invention.

[0044] Figure 8 It is a top view of the lower unit of the present invention.

[0045] Figure 9 It is a side view of the lower unit of the present invention. Detailed Embodiments

[0046] To further understand the content of the present invention, the present invention will be described in detail with reference to the drawings and embodiments.

[0047] The structures, proportions, sizes, etc. shown in the accompanying drawings of this specification are only used to cooperate with the content disclosed in the specification for those skilled in this technology to understand and read, and are not used to limit the conditions under which the present invention can be implemented. Therefore, they do not have any substantial technical significance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present invention can produce and the purposes that can be achieved, should still fall within the scope that can be covered by the technical content disclosed in the present invention. At the same time, terms such as "upper", "lower", "left", "right", "middle", etc. cited in this specification are only for the convenience of clear description and are not used to limit the scope that can be implemented. The change or adjustment of their relative relationships, without substantial change in the technical content, should also be regarded as the scope within which the present invention can be implemented.

[0048] For a better understanding of the technical solution of the present invention, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. The terms used in the embodiments of the present invention are only for the purpose of describing specific embodiments and are not intended to limit the present invention. The singular forms "a", "the", and "said" used in the embodiments of the present invention and the appended claims are also intended to include the plural forms unless the context clearly indicates otherwise. The references "first", "second", "third", and "fourth" are only for the purpose of making distinctions. It should also be understood that the term "and / or" used herein is only a description of the association relationship of associated objects, indicating that there can be three relationships. For example, A and / or B can represent: A exists alone, A and B exist simultaneously, and B exists alone. In addition, the character " / " in this text generally represents an "or" relationship between the associated objects before and after, and multiple includes one, two, two or more. It should be clear that the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts belong to the scope of protection of the present invention.

[0049] Figures 1-4 As shown, the present invention provides a loading device installed on a vacuum chamber VC, which includes: an upper unit 100 and a lower unit 200. The upper unit 100 is used to receive a workpiece and place the workpiece on the lower unit 200. The adsorption unit adsorbs the workpiece on the lower unit for laser etching. The workpiece can be a flexible substrate, a flexible panel, etc.

[0050] The upper unit 100 includes a first lifting and clamping part, a first lifting abutting part, and a cover plate G. The cover plate G is installed on the vacuum chamber VC. The first lifting and clamping part and the first lifting abutting part are installed on the cover plate G. The first lifting and clamping part is used to clamp or release the clamping of the workpiece. The first lifting abutting part is used to abut or release the abutment of the workpiece. The first lifting abutting part is formed on the first lifting and clamping part. When receiving the workpiece, the first lifting and clamping part clamps the workpiece, and the first lifting abutting part abuts the workpiece.

[0051] The first lifting and clamping part includes a first lifting part 110 and a clamping part 120. The first lifting part 110 is connected to the clamping part 120, and the clamping part 120 is used to clamp or release the clamping of the workpiece. Specifically, the clamping part 120 is used to clamp or release the clamping of the workpiece in the circumferential direction.

[0052] The first lifting part 110 includes a first driving part 111, a first moving part, a first lifting plate 112, a first lifting tube 113, and a first lower plate 114. The first driving part 111 drives the first moving part to move. The first moving part is connected to the first lifting plate 112. The first lifting plate 112 is connected to the first lifting tube 113. A bellows can be sleeved outside the first lifting tube 113. The first lifting tube 113 is connected to the first lower plate 114. The clamping part 120 includes a driving component 121, a transmission rod 122, a turntable 123, a base, a connecting rod 124, a first moving component 125, a second moving component 126, and a clamping jaw 127. A bellows can be sleeved outside the transmission rod 122. There are multiple connecting rods 124, multiple first moving components 125, and multiple second moving components 126. Exemplarily, there are four connecting rods 124, namely connecting rod one, connecting rod two, connecting rod three, and connecting rod four. There are two first moving components 125, namely the first moving component one and the first moving component two. There are two second moving components 126, namely the second moving component one and the second moving component two. Multiple clamping jaws 127 are arranged on the first moving component 125, and multiple clamping jaws 127 are arranged on the second moving component 126.

[0053] The clamping part 120 is formed on the first lifting part 110. The driving component 121 is installed on the first lifting plate 112. The driving component 121 drives the transmission rod 122 to rotate. The transmission rod 122 drives the turntable 123 to rotate. The turntable 123 rotates relative to the base. The base is installed on the first lower plate 114. The turntable 123 connects the first moving component 125 and the second moving component 126 through a plurality of connecting rods 124. Exemplarily, there are four connecting rods 124, namely the first connecting rod, the second connecting rod, the third connecting rod, and the fourth connecting rod. Specifically, the turntable 123 connects the first moving component 125 through two connecting rods 124 (such as the first connecting rod and the second connecting rod) respectively, so that the two first moving components 125 approach or move away from each other. For example, the two first moving components 125 approach or move away from the first lower plate 114, so that a plurality of jaws 127 clamp or release the workpiece in the width direction. The turntable 123 connects the second moving component 126 through the other two connecting rods 124 (such as the third connecting rod and the fourth connecting rod) respectively, so that the two second moving components 126 approach or move away from each other, and the two second moving components 126 approach or move away from the first lower plate 114, so that a plurality of jaws 127 clamp or release the workpiece in the length direction. The first moving component 125 is slidably connected to the first lower plate 114, and the second moving component 126 is slidably connected to the first lower plate 114. The sliding connection method can be, for example, a conventional slide rail and slider, a chute and slider, etc. Therefore, under the action of the driving component 120, the two first moving components 125 approach or move away from each other, and the two second moving components 126 approach or move away from each other, so that a plurality of jaws 127 clamp or release the workpiece in the circumferential direction.

[0054] The first lifting abutting part includes a lifting part 130 and an abutting part 140. The lifting part 130 is connected to the abutting part 140 and is used to abut or disengage from the workpiece. The lifting part 130 includes a driving part 131, a moving part, a lifting plate 132, a lifting column 133, and a lower plate 134. The driving part 131 drives the moving part to move. The moving part is connected to the lifting plate 132. The lifting plate 123 is connected to the lifting column 133. A corrugated pipe can be sleeved outside the lifting column 133. The lifting column 133 is connected to the lower plate 134. The lower plate 134 is provided with a hollow hole to reduce the weight of the lower plate.

[0055] The abutting part 140 includes an abutting component 141 and a mounting component 142. A plurality of abutting parts 140 are provided on the lower plate 134. The plurality of abutting parts 140 form a matrix to abut the workpiece, so as to position the workpiece well. The mounting component 142 is installed on the lower plate 134. The abutting component 141 is installed on the lower plate 134 through the mounting component 142. The lifting column 133 and the first lifting pipe 113 are sleeved, so that relative guiding movement in the lifting direction can be realized between the lifting column 133 and the first lifting pipe 1123.

[0056] When the first driving part 111 drives the first moving part to move, the first moving part drives the first lifting plate 112 to move up and down. Since the first lifting tube 133 is connected between the first lifting plate 132 and the first lower plate 134, it further drives the first lifting contact part and the clamping part to move up and down to approach or move away from the workpiece. When approaching the workpiece, the clamping part 120 can clamp or release the clamping of the workpiece. Specifically, the driving component 121 drives the transmission rod 122 to rotate, the transmission rod 122 drives the turntable 123 to rotate, the turntable 123 drives a plurality of connecting rods to rotate, causing the first moving component 125 and the second moving component 126 to move relative to the first lower plate 114, so that the first moving component 125 and the second moving component 126 approach or move away from the lower plate, and further enabling the jaws of the first moving component 125 and the jaws of the second moving component 126 to clamp or release the clamping of the workpiece.

[0057] When the driving part 131 drives the moving part to move, the moving part drives the lifting plate 132 to move up and down. Since the lifting column 133 is connected between the lifting plate 132 and the lower plate 134, it further drives the lower plate 134 to move up and down. The lower plate 134 drives the contact part 140 to move up and down, and the contact component 141 of the contact part 140 will contact or disengage from the workpiece. Specifically, the contact components 141 of multiple contact parts will form a matrix to contact or disengage from the workpiece.

[0058] The lower unit 200 includes an adjusting part 210, a bearing part 220, an adjusting part 230, and a second lifting part 240. The workpiece is placed on the adjusting part 210 and the bearing part 220. The second lifting part 240 is used for the lifting of the bearing part, and the adjusting part 230 is used for the UVW adjustment of the bearing part 220. The adjusting part 230 is installed on the vacuum chamber VC, and the adjusting part 210 is used for the adjustable support of the workpiece.

[0059] The bearing part 220 includes a bearing plate 221 and a receiving part 222. The bearing plate 221 has a hollow structure to reduce its mass. An adjusting part is provided on the bearing plate 221, and the receiving part 222 is used to accommodate the clamping jaw 127. The adjusting part 210 includes mounting components 212, adjusting components 211, supporting components 213, transmission components 214 and driving components 215. There are multiple mounting components 212, multiple adjusting components 211, and multiple supporting components. The mounting components 212 can adopt conventional guide rails. The adjusting components 211 are movably mounted on the mounting components 212. Exemplarily, both sides of the adjusting component 211 are movably mounted on multiple mounting components 212, or the adjusting component 211 can also be slidably mounted on the mounting components 212 through sliders. The transmission components 214 and driving components 215 are mounted on the bearing plate 221. The driving component 215 drives the transmission component 214 to rotate, and the rotation of the transmission component 214 drives the adjusting component 211 to move, for example, by using a conventional lead screw and nut pair. A supporting component 213 is provided on the adjusting component 211, and the supporting component 213 can support the workpiece in a point support mode, a line support mode or a surface support mode. The upper unit places the workpiece on the lower unit 200. Specifically, the first lifting and clamping part places the workpiece on the bearing part 220 and the adjusting part 210. The role of the adjusting part 210 is crucial and necessary because if the adjusting part 210 is not provided, the flexibility of the workpiece will cause the workpiece to sink and deform. The role of the adjusting part can provide multiple positions to support the workpiece, can reduce or avoid the deformation of the workpiece, and avoid affecting the position and accuracy of subsequent laser etching processing.

[0060] The adjusting part 230 includes a lower mounting part 231, an upper mounting part 233, and a UVW unit 232. There are multiple UVW units, and multiple UVW units are mounted between the lower mounting part 231 and the upper mounting part. The upper mounting part 233 is mounted on the vacuum chamber VC. The adjusting part 230 can realize the UVW adjustment of the lower mounting part, that is, realize the UVW adjustment of the bearing part 220. The second lifting part 240 includes a driving part 241, a moving part 242, a mounting part 243, and a lifting part 244. The mounting part 243 is mounted on the lower mounting part 231. The driving part 241 is mounted on the mounting part 243. The moving part 242 is connected to the lifting part 244. The driving part 241 drives the moving part 242 to move, and the movement of the moving part 242 drives the lifting part 244 to move up and down. The lifting part 244 drives the bearing part 220 and / or the adjusting part 210 to move up and down.

[0061] The upper unit 100 further includes an image detection unit 150, and a plurality of image detection units 150 are provided on the cover plate G, for accurately placing the workpiece on the carrying unit 220. Specifically, the plurality of image detection units 150 are used to obtain the posture or mark of the carrying unit 220, and the adjustment unit 230 adjusts the posture of the carrying unit 220 so that the first lifting and clamping unit accurately places the workpiece on the carrying unit 220 and the adjustment unit 210. Specifically, four image detection units 150 can be set, and the four image detection units 150 are set at the four corners of the cover S. After the upper unit 100 receives the workpiece, the subsequent workpiece needs to be placed on the lower unit 200. When the first lifting unit 110 drives the workpiece to descend to the first height of the bearing part of the lower unit 200, the two diagonal image detection units 150 obtain the postures or marks of the two diagonals of the bearing part 220, and the adjustment unit 230 compensates and adjusts the posture of the bearing part 220. The workpiece is placed on the bearing part 220 and the adjustment part 210. At this time, the other two diagonal image detection units 150 obtain the postures or marks of the other two diagonals of the bearing part to determine whether the workpiece is accurately placed on the bearing part 220. When the result is no, the first lifting part 110 drives the workpiece to rise. When the workpiece rises to the second height of the carrying part of the lower unit 200, the adjustment part 230 compensates and adjusts the posture of the carrying part 220 based on the results of the posture or mark of the other two diagonals of the carrying part obtained by the two image detection parts 150 at the other diagonals, so as to accurately place the workpiece on the carrying part 220 and the adjustment part 210.

[0062] The present invention also provides a feeding method, which uses any of the above-mentioned feeding devices and comprises the following steps:

[0063] S100: the upper unit 100 receives the workpiece;

[0064] Specifically, step S100 includes the following steps:

[0065] Step S101: using a robot to send the workpiece into a vacuum chamber;

[0066] Step S102: The first lifting and lowering clamping part clamps the workpiece, and the first lifting and lowering contact part contacts the workpiece.

[0067] Specifically, step S102 includes the following steps:

[0068] Step S1021: When the first driving part 111 drives the first moving part to move, the first moving part drives the first lifting plate 112 to move up and down, thereby driving the first lifting conflicting part and the clamping part to move up and down, so that the clamping part is close to the workpiece;

[0069] Step S1022: The driving component 121 drives the transmission rod 122 to rotate. The transmission rod 122 drives the turntable 123 to rotate. The turntable 123 drives a plurality of connecting rods to rotate. The first moving component 125 and the second moving component 126 move relative to the first lower plate 114, so that the jaws of the first moving component 125 and the jaws of the second moving component 126 clamp the workpiece.

[0070] Step S1023: When the driving part 131 drives the moving part to move, the moving part drives the lifting plate 132 and the lower plate 134 to move up and down. The lower plate 134 drives the abutting part 140 to move up and down. The abutting component 141 of the abutting part 140 abuts against the workpiece.

[0071] Step S103: The manipulator exits the vacuum chamber.

[0072] S200: Accurately place the workpiece on the lower unit.

[0073] Specifically, step S200 includes the following steps:

[0074] Step S201: When the first lifting part drives the workpiece to descend to a distance of the first height of the bearing part of the lower unit 200;

[0075] Step S202: Two diagonal image detection parts 150 acquire the postures or marks of two diagonals of the bearing part 220, and the adjustment part 230 compensates and adjusts the posture of the bearing part 220. The workpiece is placed on the bearing part 220 and the adjustment part 210.

[0076] Step S203: At this time, the other two diagonal image detection parts 150 acquire the postures or marks of the other two diagonals of the bearing part, and determine whether the workpiece is accurately placed on the bearing part 220. If so, go to step S300. If not, go to step S204.

[0077] Step S204: When the result is no, the first lifting part 110 drives the workpiece to rise. When the workpiece rises to a distance of the second height of the bearing part of the lower unit 200, according to the result of the postures or marks of the other two diagonals of the bearing part acquired by the other two diagonal image detection parts 150, the adjustment part 230 compensates and adjusts the posture of the bearing part 220, and accurately places the workpiece on the bearing part and the adjustment part.

[0078] Step S205: The abutting part disengages from abutting against the workpiece, the first lifting part continues to descend, the clamping part disengages from clamping the workpiece, and the upper unit 100 rises away from the lower unit 200.

[0079] Step S300: Adsorb the workpiece on the lower unit for laser etching.

[0080] Specifically, step S300 includes the following steps:

[0081] Step S301: The adsorption unit moves above the lower unit 200, and the lower unit 200 drives the workpiece to rise.

[0082] Step S302: The workpiece enters the adsorption unit, and the adsorption unit adsorbs the workpiece.

[0083] Step S303: The adsorption unit moves the workpiece to the laser etching unit, and the laser etching unit performs laser etching on the workpiece.

[0084] The loading method of the present invention can resist the workpiece to prevent the up and down displacement of the workpiece, which affects the position of the workpiece, and provides a good foundation for the subsequent accurate positioning of the screen body on the lower unit. It can reduce or avoid the deformation of the workpiece and avoid affecting the position and accuracy of the subsequent laser etching process.

[0085] Furthermore, the steps, measures, and solutions in the various operations, methods, and processes disclosed in the prior art and in the present application can also be alternated, changed, rearranged, decomposed, combined, or deleted.

[0086] The technical features of the above embodiments can be combined arbitrarily. For the sake of brevity of description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0087] Those skilled in the art of the present technology can understand that the steps, measures, and solutions in the various operations, methods, and processes discussed in the present application can be alternated, changed, combined, or deleted. Further, the other steps, measures, and solutions in the various operations, methods, and processes discussed in the present application can also be alternated, changed, rearranged, decomposed, combined, or deleted.

[0088] Furthermore, the steps, measures, and solutions in the various operations, methods, and processes disclosed in the prior art and in the present application can also be alternated, changed, rearranged, decomposed, combined, or deleted.

[0089] The above-described embodiments only represent several implementation manners of the embodiments of the present disclosure. The description is relatively specific and detailed, but it should not be construed as a limitation on the scope of the patent of the embodiments of the present disclosure. It should be noted that for those of ordinary skill in the art, without departing from the concept of the embodiments of the present disclosure, several modifications and improvements can be made, and these all belong to the protection scope of the embodiments of the present disclosure. Therefore, the protection scope of the embodiments of the present disclosure should be subject to the appended claims.

[0090] The above are only some embodiments of the present application. It should be noted that for those of ordinary skill in the art, without departing from the principle of the present application, several improvements and refinements can be made, and these improvements and refinements should also be regarded as the protection scope of the present application.

Claims

1. A feeding device, characterized in that, Comprising: An upper unit for receiving a workpiece; A lower unit onto which the upper unit places the workpiece; The upper unit includes a first lifting and clamping part and a first lifting abutting part. The first lifting and clamping part is used for clamping or disengaging from clamping the workpiece, and the first lifting abutting part is used for abutting or disengaging from abutting the workpiece; The loading device is installed in a vacuum chamber. The first lifting and clamping part includes a first lifting part and a clamping part, and the first lifting abutting part includes a lifting part and an abutting part; the lower unit includes an adjusting part for adjustably supporting the workpiece; The first lifting part includes a first lifting plate, and the clamping part includes a driving component, a transmission rod, a turntable, a connecting rod, a first moving component, a second moving component, and a clamping jaw; the driving component is installed on the first lifting plate, the driving component drives the transmission rod to rotate, the transmission rod drives the turntable to rotate, the turntable is connected to the first moving component and the second moving component through a plurality of connecting rods, and both the first moving component and the second moving component are provided with a plurality of clamping jaws; The lower unit further includes a bearing part, an adjusting part, and a second lifting part. The workpiece is placed on the bearing part and the adjusting part. The second lifting part is used for lifting the bearing part, and the adjusting part is used for UVW adjustment of the bearing part; The loading device further includes a cover plate installed on the vacuum chamber. A plurality of image detection parts are arranged on the cover plate. When the first lifting part drives the workpiece to descend a first height from the bearing part of the lower unit, two diagonal image detection parts are used to obtain the postures or marks of two diagonals of the bearing part, and the adjusting part compensates and adjusts the posture of the bearing part. The workpiece is placed on the bearing part and the adjusting part; and the other two diagonal image detection parts obtain the postures or marks of the other two diagonals of the bearing part to determine whether the workpiece is accurately placed on the bearing part and the adjusting part. When it is determined that the workpiece is not placed on the bearing part and the adjusting part, the first lifting part drives the workpiece to rise. When the workpiece rises a second height from the bearing part of the lower unit, according to the results of the postures or marks of the other two diagonals of the bearing part obtained by the other two diagonal image detection parts, the adjusting part compensates and adjusts the posture of the bearing part and accurately places the workpiece on the bearing part and the adjusting part; and / or, the loading device further includes an adsorption unit for adsorbing the workpiece on the lower unit for laser etching; The adjusting part includes a mounting component, an adjusting component, a supporting component, a transmission component, and a driving component. The two sides of the adjusting component are movably installed on a plurality of mounting components, the adjusting component is slidably installed on the mounting components through sliders, the transmission component and the driving component are installed on a bearing plate, and the driving component drives the transmission component to rotate, and the rotation of the transmission component drives the adjusting component to move.

2. The feeding device according to claim 1, wherein: The first lifting abutting part is installed on the first lifting and clamping part. When receiving the workpiece, the first lifting and clamping part clamps the workpiece, and the first lifting abutting part abuts the workpiece.

3. The feeding device according to claim 2, characterized in that: The first lifting part is connected to the clamping part; the lifting part is connected to the abutting part.

4. The feeding device according to claim 3, characterized in that: The first lifting part further includes a first driving part, a first moving part, a first lifting tube, and a first lower plate; the first driving part drives the first moving part to move, the first moving part is connected to the first lifting plate, the first lifting plate is connected to the first lifting tube, and the first lifting tube is connected to the first lower plate.

5. The feeding device according to claim 4, characterized in that: The lifting part includes a driving part, a moving part, a lifting plate, a lifting column, and a lower plate. The driving part drives the moving part to move, the moving part is connected to the lifting plate, the lifting plate is connected to the lifting column, and the lifting column is connected to the lower plate; the conflicting part includes a conflicting component and an installation component, and the conflicting component is installed on the lower plate through the installation component.

6. A feeding method, which uses the feeding device described in any one of the above claims 1-5, is characterized in that The following steps are involved: S100: The upper unit receives the workpiece; S200: Accurately place the workpiece on the lower unit.

7. The feeding method according to claim 6, characterized in that: Step S100 includes the following steps: Step S101: using a robot to send the workpiece into a vacuum chamber; Step S102: The first lifting and lowering clamping part clamps the workpiece, and the first lifting and lowering abuts against the workpiece; Step S103: the robot arm exits the vacuum chamber; And / or, step S200 includes the following steps: Step S201: the first lifting unit drives the workpiece to descend to a first height from the bearing portion of the lower unit; Step S202: two diagonal image detection units acquire the postures or marks of two diagonal portions of the carrying unit, the adjustment unit compensates and adjusts the posture of the carrying unit, and the workpiece is placed on the carrying unit and the adjustment unit; Step S203: At this time, the other two diagonal image detection units obtain the postures or marks of the other two diagonal corners of the carrying part to determine whether the workpiece is accurately placed on the carrying part. If yes, proceed to step S300, if not, proceed to step S204; Step S204: when the result is no, the first lifting unit drives the workpiece to rise, and when the workpiece rises to a second height from the bearing part of the lower unit, the adjustment unit compensates and adjusts the posture of the bearing part according to the result of obtaining the posture or mark of the other two diagonal corners of the bearing part by the two other diagonal image detection units, and accurately places the workpiece on the bearing part and the adjustment unit; Step S205: the abutting portion is disengaged from the abutting workpiece, the first lifting portion continues to descend, the clamping portion is disengaged from the clamping workpiece, and the upper unit is lifted away from the lower unit; And / or, further comprising step S300: adsorbing the workpiece on the lower unit for laser etching; Step S300 includes the following steps: Step S301: the adsorption unit moves to the top of the lower unit, and the lower unit drives the workpiece to rise; Step S302: the workpiece enters the adsorption unit, and the adsorption unit adsorbs the workpiece; Step S303: the adsorption unit moves the workpiece to the laser etching unit, and the laser etching unit performs laser etching on the workpiece.

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