Vibration measurement and control device and method for multi-layer multi-flexible beam coupling mechanical arm

Abstract

The invention discloses a vibration measurement and control device for a multi-layer multi-flexible beam coupled mechanical arm, comprising a mechanical arm body, a vibration detection part and a drive control part; the mechanical arm body comprises a first short flexible beam, a second short flexible beam, a first long flexible beam, a second long flexible beam, a bottom aluminum plate, a middle aluminum plate, an upper aluminum plate, a clamp and a spring; the vibration detection part comprises a piezoelectric sensor, an acceleration sensor and a laser displacement sensor; the drive control part comprises a piezoelectric driver, a piezoelectric amplifier circuit, a charge amplifier, a terminal board, a motion control card and a computer; the piezoelectric sensor, the acceleration sensor and the piezoelectric driver are all arranged on the flexible beam, the laser displacement sensor is projected on the flexible beam, the computer receives the detection signals of the piezoelectric sensor, the acceleration sensor and the laser displacement sensor, obtains a control signal after processing, and outputs the control signal to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of each flexible beam through the piezoelectric driver.

Description

Technical Field

[0001] The present invention relates to the field of positioning and vibration control of flexible structures, and in particular to a vibration analysis and control device and method of a multi-flexible coupling mechanical arm based on spring coupling. Background Art

[0002] Flexible structures are widely used in aerospace and industrial production fields. Compared with rigid structures, they have the advantages of light weight, low energy consumption, high efficiency, and flexible operation. However, the low natural frequency of flexible structures and the easy excitation of low-frequency modal vibrations limit their application and development in certain fields.

[0003] In recent years, active vibration control of flexible structures has become a key and hot topic in the world. Accelerometers are light, easy to install, and have a wide frequency band. Accelerometer feedback control can increase the active damping of the system in a wide frequency band and enhance the robustness of the system. Since the application of accelerometers will introduce a large amount of high-frequency noise signals into the system, filtering is required. Piezoelectric ceramic materials have the advantages of fast response, wide frequency band, good linearity, and easy processing. They are particularly suitable for vibration control applications of flexible structures such as flexible beams. Summary of the invention

[0004] The purpose of the present invention is to overcome the shortcomings and deficiencies of the prior art and to provide a vibration measurement and control device for a multi-layer multi-flexible beam coupled robotic arm. The present invention fully considers the influence of various factors on the vibration of the robotic arm and realizes real-time detection and active control of the vibration of the multi-flexible beam coupled robotic arm.

[0005] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0006] A vibration measurement and control device for a multi-layer multi-flexible beam coupling mechanical arm, comprising a mechanical arm body, a vibration detection part and a drive control part;

[0007] The robot arm body comprises a first short flexible beam, a second short flexible beam, a first long flexible beam, a second long flexible beam, a bottom aluminum plate, a middle aluminum plate, an upper aluminum plate, a clamping block and a spring. The first short flexible beam and the second short flexible beam are placed vertically, the first long flexible beam and the second long flexible beam are placed horizontally, the first long flexible beam is perpendicular to the second long flexible beam, and the wide surfaces of the first long flexible beam and the second long flexible beam are both perpendicular to the horizontal direction.

[0008] One end of the first short flexible beam is fixed to the bottom aluminum plate, and the other end is fixed to the middle aluminum plate. The bottom aluminum plate and the middle aluminum plate are connected by four first short flexible beams whose wide surfaces are parallel to each other. The wide surface of the first short flexible beam is in the same plane as the narrow surface of the bottom aluminum plate and the middle aluminum plate.

[0009] One end of the second short flexible beam is fixed to the upper aluminum plate, and the other end is fixed to the middle aluminum plate. The upper aluminum plate and the middle aluminum plate are connected by four second short flexible beams whose wide surfaces are parallel to each other. The wide surface of the second short flexible beam is perpendicular to the wide surface of the first short flexible beam.

[0010] The clamp block is fixed in the middle of the upper aluminum plate, one end of the first long flexible beam and the second long flexible beam are respectively fixed to the clamp block, the other ends of the first long flexible beam and the second long flexible beam are both free ends, the free ends of the two first long flexible beams in the same direction are coupled by a spring, and the free ends of the two second long flexible beams in the same direction are coupled by a spring;

[0011] The vibration detection part includes a piezoelectric sensor, an acceleration sensor and a laser displacement sensor, the piezoelectric sensor is arranged on the first long flexible beam and the second long flexible beam, the acceleration sensor is arranged on the free end of the first long flexible beam, and the laser displacement sensor is projected on the free end of the second long flexible beam;

[0012] The driving control part includes a piezoelectric driver, a piezoelectric amplifying circuit, a charge amplifier, a terminal board, a motion control card and a computer. The piezoelectric driver is arranged on each flexible beam, the piezoelectric amplifying circuit is connected to the piezoelectric driver, the charge amplifier is connected to the piezoelectric sensor and the acceleration sensor, the laser displacement sensor, the piezoelectric amplifying circuit, the charge amplifier and the motion control card are respectively connected to the terminal board, and the computer is connected to the motion control card;

[0013] The computer receives the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor, obtains the control signal after processing, outputs it to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of each flexible beam through the piezoelectric driver.

[0014] Furthermore, the distance between two adjacent upper aluminum plates, between two middle aluminum plates, and between two bottom aluminum plates on the same layer is 100 mm.

[0015] Furthermore, the first short flexible beam and the bottom aluminum plate and the middle aluminum plate, the second short flexible beam and the middle aluminum plate and the upper aluminum plate, the first long flexible beam and the clamping block, and the second long flexible beam and the clamping block are fixed respectively by clamping plates.

[0016] Furthermore, the piezoelectric sensor is a piezoelectric ceramic sheet, which is installed on the center line of the first long flexible beam and the second long flexible beam in the beam width direction and 150 mm away from the clamping plate. The attitude angle is 0° and it is pasted on one side. One sheet is pasted on each of the first long flexible beam and the second long flexible beam, and there are a total of 8 piezoelectric sensors.

[0017] Furthermore, the piezoelectric driver is a piezoelectric ceramic sheet. On the first short flexible beam and the second short flexible beam, the piezoelectric driver is pasted at the middle position of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with an attitude angle of 0°, and is pasted symmetrically on both sides; on the first long flexible beam and the second long flexible beam, the piezoelectric driver is pasted at a position 60 mm away from the clamping plate of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with an attitude angle of 0°, and is pasted symmetrically on both sides.

[0018] Furthermore, there are 160 piezoelectric actuators in total, with 4 piezoelectric actuators attached to each flexible beam.

[0019] Furthermore, the motion control card includes an A / D conversion module, and the A / D conversion module is used for converting analog signals and digital signals.

[0020] Further, the springs coupled to the free ends of the first long flexible beam and the second long flexible beam are respectively fixed by the first bracket.

[0021] Furthermore, the laser displacement sensors are respectively opposite to the free ends of the second long flexible beams, and the laser displacement sensors are fixed to the experimental table through the second bracket.

[0022] A vibration measurement and control method for a multi-layer multi-flexible beam coupled mechanical arm, using any of the vibration measurement and control devices for a multi-layer multi-flexible beam coupled mechanical arm described above, comprises the following steps:

[0023] S1. The piezoelectric sensor detects the vibration of each of the first long flexible beam and the second long flexible beam, the acceleration sensor detects the vibration acceleration of the first long flexible beam, and the laser displacement sensor detects the vibration displacement of the second long flexible beam;

[0024] S2. The detection signals of the piezoelectric sensor and the acceleration sensor are transmitted through the charge amplifier and the terminal board, and are input into the computer through the motion control card. The detection signal of the laser displacement sensor is input into the computer by the terminal board and the motion control card;

[0025] S3. The computer processes the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor to obtain control signals, which are output to the piezoelectric amplifier circuit through the motion control card and the terminal board, and the vibration of each flexible beam is controlled by the piezoelectric driver.

[0026] Compared with the prior art, the present invention has the following advantages and beneficial effects:

[0027] 1. The present invention fixes multiple flexible beams together to form a mechanical arm through reasonable mechanical structure design, and couples them through springs, effectively eliminating the influence of other uncontrollable factors on the vibration control effect.

[0028] 2. The present invention uses a piezoelectric sensor to measure the strain information of the flexible beam, which can quickly respond to the vibration information of multiple low-order modes of the robotic arm, has good measurement sensitivity, and is light and cheap.

[0029] 3. The present invention uses an acceleration sensor to measure the vibration of the flexible beam at the installation point of the acceleration sensor, which is more accurate for local measurement.

[0030] 4. The present invention uses a laser displacement sensor for detection. The laser displacement sensor is particularly suitable for measuring rapid displacement changes, has no direct contact with the object being measured, and has higher measurement accuracy.

[0031] 5. The present invention adopts a detection method of a multi-sensor combination, which can achieve accurate and stable measurement of the vibration signal of the robot arm. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1 It is a partial structural schematic diagram of the vibration measurement and control device of the present invention.

[0033] Figure 2 It is a partial structural schematic diagram of the vibration measurement and control device of the present invention.

[0034] Figure 3 for Figure 1 A local enlarged schematic diagram of point A in the middle.

[0035] Figure 4 for Figure 1 A local enlarged schematic diagram of point B in the middle.

[0036] Figure 5 It is a schematic flow chart of the vibration measurement and control method of the present invention.

[0037] Description of Figure Numbers:

[0038] 100-laboratory table; 1-first short flexible beam; 2-second short flexible beam; 3-first long flexible beam; 4-second long flexible beam; 5-bottom aluminum plate; 6-middle aluminum plate; 7-upper aluminum plate; 8-clamp; 9-spring; 10-clamp; 11-piezoelectric sensor; 12-acceleration sensor; 13-laser displacement sensor; 14-first bracket; 15-second bracket; 16-piezoelectric driver; 17-piezoelectric amplifier circuit; 18-charge amplifier; 19-terminal board; 20-motion control card; 21-computer. DETAILED DESCRIPTION

[0039] The vibration measurement and control device and method of the multi-layer multi-flexible beam coupling mechanical arm of the present invention will be further described below in conjunction with the accompanying drawings and specific embodiments.

[0040] See also Figure 1 and Figure 2The present invention discloses a vibration measurement and control device for a multi-layer multi-flexible beam coupling mechanical arm, which includes a mechanical arm body, a vibration detection part and a drive control part. The mechanical arm body is arranged on a test bench 100, which is assembled from three aluminum profiles with lengths of 900mm, 1880mm and 2880mm respectively. The table top of the test bench 100 is a 3000mm×2000mm×8mm stainless steel plate, which is connected to the aluminum profile by screws, and each connection of the aluminum profile is fixed with an angle iron.

[0041] See also Figure 1 and Figure 4 The robot body includes sixteen first short flexible beams 1, sixteen second short flexible beams 2, four first long flexible beams 3, four second long flexible beams 4, four bottom aluminum plates 5, four middle aluminum plates 6, four upper aluminum plates 7, four half-box clamps 8 and multiple springs 9. The first short flexible beams 1 and the second short flexible beams 2 are placed vertically, the first long flexible beams 3 and the second long flexible beams 4 are placed horizontally, the first long flexible beams 3 are perpendicular to the second long flexible beams 4, and the wide surfaces of the first long flexible beams 3 and the second long flexible beams 4 are both perpendicular to the horizontal direction.

[0042] See also Figure 1 and Figure 4 , one end of the first short flexible beam 1 is fixed to the bottom aluminum plate 5, and the other end is fixed to the middle aluminum plate 6. The bottom aluminum plate 5 and the middle aluminum plate 6 are connected by the first short flexible beam 1 with four wide faces parallel to each other, and the wide face of the first short flexible beam 1 is in the same plane as the narrow faces of the bottom aluminum plate 5 and the middle aluminum plate 6. One end of the second short flexible beam 2 is fixed to the upper aluminum plate 7, and the other end is fixed to the middle aluminum plate 6. The upper aluminum plate 7 and the middle aluminum plate 6 are connected by the second short flexible beam 2 with four wide faces parallel to each other, and the wide face of the second short flexible beam 2 is perpendicular to the wide face of the first short flexible beam 1.

[0043] See also Figure 1 , Figure 3 and Figure 4, the first short flexible beam 1 and the bottom aluminum plate 5 and the middle aluminum plate 6, the second short flexible beam 2 and the middle aluminum plate 6 and the upper aluminum plate 7, the first long flexible beam 3 and the clamp 8, and the second long flexible beam 4 and the clamp 8 are fixed respectively by clamps 10. When the first short flexible beam 1 and the bottom aluminum plate 5 are fixed by clamps 10, the bottom aluminum plate 5 is also fixed on the table of the experimental table 100. The distance between two adjacent upper aluminum plates 7, between two middle aluminum plates 6, and between two bottom aluminum plates 5 on the same layer is 100 mm. Four half-box clamps 8 are respectively fixed in the middle of the four upper aluminum plates 7, one end of the first long flexible beam 3 and the second long flexible beam 4 is respectively fixed to the clamp 8, and the other end of the first long flexible beam 3 and the second long flexible beam 4 are both free ends. The free ends of the two first long flexible beams 3 in the same direction are coupled by springs 9, and the free ends of the two second long flexible beams 4 in the same direction are coupled by springs 9.

[0044] In this embodiment, the materials of the first short flexible beam 1, the second short flexible beam 2, the first long flexible beam 3 and the second long flexible beam 4 are exactly the same, all of which are epoxy resin sheets. The geometric dimensions of the first short flexible beam 1 and the second short flexible beam 2 are 300mm×150mm×2.5mm, and the geometric dimensions of the first long flexible beam 3 and the second long flexible beam 4 are 800mm×150mm×2mm. The elastic modulus of epoxy resin is E p =34.64Gpa, density is.

[0045] See also Figure 1 and Figure 2 The vibration detection part includes a piezoelectric sensor 11, an acceleration sensor 12 and a laser displacement sensor 13. The piezoelectric sensor 11 is arranged on the first long flexible beam 3 and the second long flexible beam 4, the acceleration sensor 12 is arranged at the free end of the first long flexible beam 3, and the laser displacement sensor 13 is projected on the free end of the second long flexible beam 4.

[0046] See also Figure 1 and Figure 3 The piezoelectric sensor 11 is a piezoelectric ceramic sheet. The piezoelectric sensor 11 is installed on the center line of the first long flexible beam 3 and the second long flexible beam 4 in the beam width direction and at a distance of 150mm from the clamping plate 10, with a posture angle of 0° and single-sided pasting (only the first long flexible beam 3 is drawn in the attached figure). One sheet is pasted on each first long flexible beam 3 and the second long flexible beam 4, and there are a total of 8 piezoelectric sensors 11. The geometric dimensions of the piezoelectric sensor 12 are 25mm×10mm×1mm.

[0047] See also Figure 1, an acceleration sensor 12 is installed on each of the four first long flexible beams 3 at a distance from the midline of the free end edge, and holes are also reserved at the same position of the four second long flexible beams 4, and the acceleration sensor 12 can be increased or decreased according to actual conditions. The acceleration sensor 12 is a capacitive sensor with a nominal sensitivity of 1000mv / g and a measurement frequency range of 0-250Hz. In the four first long flexible beams 3, the springs 9 coupled to the free ends of the first long flexible beams 3 in the same direction are respectively fixed by the first bracket 14, and in the four second long flexible beams 4, the springs 9 coupled to the free ends of the second long flexible beams 4 in the same direction are also respectively fixed by the first bracket 14. The laser displacement sensor 13 is respectively opposite to the free ends of the four second long flexible beams 4, and the laser displacement sensor 13 is fixed to the experimental table 100 through the second bracket 15.

[0048] See also Figure 2 and Figure 3 The driving control part includes a piezoelectric driver 16, a piezoelectric amplifier circuit 17, a charge amplifier 18, a terminal board 19, a motion control card 20 and a computer 21. The piezoelectric driver 16 is arranged on each flexible beam, the piezoelectric amplifier circuit 17 is connected to the piezoelectric driver 16, the charge amplifier 18 is connected to the piezoelectric sensor 11 and the acceleration sensor 12, the laser displacement sensor 13, the piezoelectric amplifier circuit 17, the charge amplifier 18 and the motion control card 20 are respectively connected to the terminal board 19, and the computer 21 is connected to the motion control card 20.

[0049] See also Figure 1 , Figure 3 and Figure 4 , the piezoelectric driver 16 is a piezoelectric ceramic sheet. On the first short flexible beam 1 and the second short flexible beam 2, the piezoelectric driver 16 is pasted in the middle of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with a posture angle of 0°, and is pasted symmetrically on both sides. On the first long flexible beam 3 and the second long flexible beam 4, the piezoelectric driver 16 is pasted at a position 60 mm away from the clamping plate 10 of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with a posture angle of 0°, and is pasted symmetrically on both sides. There are a total of 160 piezoelectric drivers 16, with 4 sheets pasted on each flexible beam. The geometric dimensions of the piezoelectric driver 13 are 60mm×25mm×2mm, and the elastic modulus of the piezoelectric ceramic material is E p =63Gpa, d31=-166pm / V.

[0050] See also Figure 1 and Figure 4 The installation positions of the piezoelectric driver 16 on the first short flexible beam 1 and the second short flexible beam 2 are the same. The installation positions of the piezoelectric sensor 11, the acceleration sensor 12 and the piezoelectric driver 16 on the first long flexible beam 3 are the same. The installation positions of the piezoelectric sensor 11, the laser displacement sensor 13 and the piezoelectric driver 16 on the second long flexible beam 4 are the same.

[0051] See also Figure 2 The amplification factor of the piezoelectric amplifier circuit 17 can reach 52 times, that is, -5V~+5V is amplified to -260~+260V. The motion control card 20 includes an A / D conversion module, which is used for converting analog signals and digital signals. The motion control card 20 provides a standard PCI bus interface, and there is a PCI-e slot in the mainboard of the computer 21, in which the motion control card 20 can be installed. The computer 21 receives the detection signals of the piezoelectric sensor 11, the acceleration sensor 12 and the laser displacement sensor 13, and obtains the control signal after processing, which is output to the piezoelectric amplifier circuit 17 through the motion control card 20 and the terminal board 19, and the vibration of each flexible beam is controlled through the piezoelectric driver 16.

[0052] See also Figure 1 , Figure 2 and Figure 5 The present invention also discloses a vibration measurement and control method for a multi-layer multi-flexible beam coupled mechanical arm, using the vibration measurement and control device for the multi-layer multi-flexible beam coupled mechanical arm, comprising the following steps:

[0053] S1. The piezoelectric sensor 11 detects the vibration of each of the first long flexible beam 3 and the second long flexible beam 4 , the acceleration sensor 12 detects the vibration acceleration of the first long flexible beam 3 , and the laser displacement sensor 13 detects the vibration displacement of the second long flexible beam 4 .

[0054] S2. The detection signals of the piezoelectric sensor 11 and the acceleration sensor 12 are transmitted through the charge amplifier 18 and the terminal board 19 and input into the computer 21 through the motion control card 20. The detection signal of the laser displacement sensor 13 is input into the computer 21 through the terminal board 19 and the motion control card 20.

[0055] S3. The computer 21 processes the detection signals of the piezoelectric sensor 11, the acceleration sensor 12 and the laser displacement sensor 13 to obtain a control signal, which is output to the piezoelectric amplifier circuit 17 through the motion control card 20 and the terminal board 19, and the vibration of each flexible beam is controlled by the piezoelectric driver 16.

[0056] In summary, the present invention has the following advantages and beneficial effects:

[0057] 1. The present invention fixes a plurality of flexible beams together to form a mechanical arm through reasonable mechanical structure design, and couples them through springs 9, thereby effectively eliminating the influence of other uncontrollable factors on the vibration control effect.

[0058] 2. The present invention uses a piezoelectric sensor 11 to measure the strain information of the flexible beam, which can quickly respond to the vibration information of multiple low-order modes of the robot arm, has good measurement sensitivity, and is light and cheap.

[0059] 3. The acceleration sensor 12 is used in the present invention to measure the vibration of the flexible beam at the installation point of the acceleration sensor 12, which is more accurate for local measurement.

[0060] 4. The present invention uses a laser displacement sensor 13 for detection. The laser displacement sensor 13 is particularly suitable for measuring rapid displacement changes, has no direct contact with the object being measured, and has higher measurement accuracy.

[0061] 5. The present invention adopts a detection method of a multi-sensor combination, which can achieve accurate and stable measurement of the vibration signal of the robot arm.

[0062] The above description is a detailed description of the preferred feasible embodiments of the present invention, but the embodiments are not intended to limit the scope of the patent application of the present invention. All equivalent changes or modified changes completed under the technical spirit disclosed by the present invention should fall within the patent scope covered by the present invention.

Claims

1. A vibration measurement and control device for a multi-layer multi-flexible beam coupling mechanical arm, characterized in that: It includes a mechanical arm body, a vibration detection part and a drive control part; The robot arm body comprises a first short flexible beam, a second short flexible beam, a first long flexible beam, a second long flexible beam, a bottom aluminum plate, a middle aluminum plate, an upper aluminum plate, a clamping block and a spring. The first short flexible beam and the second short flexible beam are placed vertically, the first long flexible beam and the second long flexible beam are placed horizontally, the first long flexible beam is perpendicular to the second long flexible beam, and the wide surfaces of the first long flexible beam and the second long flexible beam are both perpendicular to the horizontal direction. One end of the first short flexible beam is fixed to the bottom aluminum plate, and the other end is fixed to the middle aluminum plate. The bottom aluminum plate and the middle aluminum plate are connected by four first short flexible beams whose wide surfaces are parallel to each other. The wide surface of the first short flexible beam is in the same plane as the narrow surface of the bottom aluminum plate and the middle aluminum plate. One end of the second short flexible beam is fixed to the upper aluminum plate, and the other end is fixed to the middle aluminum plate. The upper aluminum plate and the middle aluminum plate are connected by four second short flexible beams whose wide surfaces are parallel to each other. The wide surface of the second short flexible beam is perpendicular to the wide surface of the first short flexible beam. The clamp block is fixed in the middle of the upper aluminum plate, one end of the first long flexible beam and the second long flexible beam are respectively fixed to the clamp block, the other ends of the first long flexible beam and the second long flexible beam are both free ends, the free ends of the two first long flexible beams in the same direction are coupled by a spring, and the free ends of the two second long flexible beams in the same direction are coupled by a spring; The vibration detection part includes a piezoelectric sensor, an acceleration sensor and a laser displacement sensor, the piezoelectric sensor is arranged on the first long flexible beam and the second long flexible beam, the acceleration sensor is arranged on the free end of the first long flexible beam, and the laser displacement sensor is projected on the free end of the second long flexible beam; The driving control part includes a piezoelectric driver, a piezoelectric amplifying circuit, a charge amplifier, a terminal board, a motion control card and a computer. The piezoelectric driver is arranged on each flexible beam, the piezoelectric amplifying circuit is connected to the piezoelectric driver, the charge amplifier is connected to the piezoelectric sensor and the acceleration sensor, the laser displacement sensor, the piezoelectric amplifying circuit, the charge amplifier and the motion control card are respectively connected to the terminal board, and the computer is connected to the motion control card; The computer receives the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor, obtains the control signal after processing, outputs it to the piezoelectric amplifier circuit through the motion control card and the terminal board, and controls the vibration of each flexible beam through the piezoelectric driver.

2. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 1 is characterized in that: The distance between two adjacent upper aluminum plates, between two middle aluminum plates, and between two bottom aluminum plates on the same layer is 100 mm.

3. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 1, characterized in that: The first short flexible beam and the bottom aluminum plate and the middle aluminum plate, the second short flexible beam and the middle aluminum plate and the upper aluminum plate, the first long flexible beam and the clamping block, and the second long flexible beam and the clamping block are fixed respectively by clamping plates.

4. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 3 is characterized in that: The piezoelectric sensor is a piezoelectric ceramic sheet. The piezoelectric sensor is installed on the center line of the first long flexible beam and the second long flexible beam in the beam width direction and at a distance of 150 mm from the clamping plate. The attitude angle is 0° and it is pasted on one side. One sheet is pasted on each of the first long flexible beam and the second long flexible beam. There are a total of 8 piezoelectric sensors.

5. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 3, characterized in that: The piezoelectric driver is a piezoelectric ceramic sheet. On the first short flexible beam and the second short flexible beam, the piezoelectric driver is pasted at the middle position of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with an attitude angle of 0°, and is pasted symmetrically on both sides; on the first long flexible beam and the second long flexible beam, the piezoelectric driver is pasted at a position 60 mm away from the clamping plate of the flexible beam, and is symmetrical about the midline of the width direction of the flexible beam, with an attitude angle of 0°, and is pasted symmetrically on both sides.

6. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 5, characterized in that: There are 160 piezoelectric actuators in total, with 4 attached to each flexible beam.

7. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 1, characterized in that: The motion control card includes an A / D conversion module, which is used for converting analog signals and digital signals.

8. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 1, characterized in that: The springs coupled to the free ends of the first long flexible beam and the second long flexible beam are respectively fixed by first brackets.

9. The vibration measurement and control device of the multi-layer multi-flexible beam coupling mechanical arm according to claim 8, characterized in that: The laser displacement sensors are respectively opposite to the free ends of the second long flexible beams, and the laser displacement sensors are fixed to the experimental table through the second bracket.

10. A vibration measurement and control method for a multi-layer multi-flexible beam coupled mechanical arm, using the vibration measurement and control device for a multi-layer multi-flexible beam coupled mechanical arm as claimed in any one of claims 1 to 9, characterized in that: The following steps are involved: S1. The piezoelectric sensor detects the vibration of each of the first long flexible beam and the second long flexible beam, the acceleration sensor detects the vibration acceleration of the first long flexible beam, and the laser displacement sensor detects the vibration displacement of the second long flexible beam; S2. The detection signals of the piezoelectric sensor and the acceleration sensor are transmitted through the charge amplifier and the terminal board, and are input into the computer through the motion control card. The detection signal of the laser displacement sensor is input into the computer by the terminal board and the motion control card; S3. The computer processes the detection signals of the piezoelectric sensor, acceleration sensor and laser displacement sensor to obtain control signals, which are output to the piezoelectric amplifier circuit through the motion control card and the terminal board, and the vibration of each flexible beam is controlled by the piezoelectric driver.

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