An axial alignment calibration device for a focusing lens and a sampling grating

Abstract

The present invention provides an axis alignment and calibration device for a focusing lens and a sampling grating, which relates to the field of optical technology. The axis alignment and calibration device for the focusing lens and the sampling grating according to the present invention includes a focusing lens assembly, a front axis alignment crosshair plate, a collimating member, a focusing member, a rear axis alignment crosshair plate, a first axis alignment member, and a second axis alignment member. The front axis alignment crosshair plate is fixed to the front side of the focusing lens assembly, the rear axis alignment crosshair plate is fixed to the rear side of the focusing lens assembly, the focusing member is located on the side of the front axis alignment crosshair plate away from the focusing lens assembly, the collimating member is located between the front axis alignment crosshair plate and the focusing member, and the first axis alignment member and the second axis alignment member are located inside the focusing lens assembly and are adapted to align the axis of the focusing lens assembly. The technical solution of the present invention effectively improves the focusing ability of the focusing lens assembly by calibrating the axis of the focusing lens assembly through the collimating member and the focusing member.

Description

Technical Field

[0001] The present invention relates to the field of optical technology, and in particular, to an axial alignment calibration device for a focusing lens and a sampling grating. Background Art

[0002] In a single-aperture focusing lens assembly, the optical lens includes a focusing lens, a phase optical element, and a shielding member. The focusing lens, the phase optical element, and the shielding member are not parallel to each other. Among optical elements, the focal point is sensitive to the pose of the optical element. Therefore, when the focusing lens, the phase optical element, and the shielding member are not parallel to each other, there is a deviation from the theoretical position during actual installation, which will affect the formation of the focal point and ultimately affect the focusing effect of the focusing lens. Summary of the Invention

[0003] The problem solved by the present invention is that the deviation of the focusing lens, the phase optical element, and the shielding member from the theoretical position affects the formation of the focal point and thus affects the focusing.

[0004] To solve the above problems, the present invention provides an axial alignment calibration device for a focusing lens and a sampling grating, including a focusing lens assembly, a front axial alignment crosshair plate, a collimator, a focusing adjustment member, a rear axial alignment crosshair plate, a first axial alignment member, and a second axial alignment member. The front axial alignment crosshair plate is fixed to the front side of the focusing lens assembly, and the rear axial alignment crosshair plate is fixed to the rear side of the focusing lens assembly. The centers of the front axial alignment crosshair plate and the rear axial alignment crosshair plate are adapted to be located on the theoretical optical axis. The focusing adjustment member is located on the side of the front axial alignment crosshair plate away from the focusing lens assembly. The objective crosshairs of the focusing adjustment member are respectively adapted to coincide with the central crosshairs of the front axial alignment crosshair plate and the central crosshairs of the rear axial alignment crosshair plate. The collimator is located between the front axial alignment crosshair plate and the focusing adjustment member, and the optical axis of the collimator is adapted to coincide with the optical axis of the focusing adjustment member. The first axial alignment member and the second axial alignment member are located inside the focusing lens assembly and are adapted to perform axial alignment on the focusing lens assembly.

[0005] In the axial alignment calibration device for a focusing lens and a sampling grating of the present invention, the position of the focusing adjustment member is determined by the front axial alignment crosshair plate and the rear axial alignment crosshair plate, and the position of the collimator is determined by the focusing adjustment member. Furthermore, the positions of the first axial alignment member and the second axial alignment member can be adjusted through the collimator, that is, axial alignment calibration of the focusing lens assembly can be performed, effectively improving the focusing ability of the focusing lens assembly.

[0006] Preferably, the alignment and calibration device for the focusing lens and the sampling grating further includes a shielding member and a phase optical element disposed within the focusing lens assembly. The first alignment member is fixed to the phase optical element and is adapted to align the phase optical element when the first alignment member is collinear with the collimating member. The second alignment member is fixed to the shielding member and is adapted to align the shielding member when the second alignment member is collinear with the collimating member.

[0007] For the alignment and calibration device of the focusing lens and the sampling grating according to the present invention, the phase optical element is aligned and calibrated by the first alignment member, and the shielding member is aligned and calibrated by the second alignment member, effectively improving the focusing ability of the focusing lens assembly.

[0008] Preferably, the shielding member includes two parallel shielding sheets.

[0009] For the alignment and calibration device of the focusing lens and the sampling grating according to the present invention, two parallel shielding sheets are provided to provide protection against debris sputtering, providing necessary protection measures for the focusing lens assembly, thereby facilitating the improvement of the focusing effect of the focusing lens assembly.

[0010] Preferably, the phase optical element is a continuous phase plate.

[0011] For the alignment and calibration device of the focusing lens and the sampling grating according to the present invention, using a continuous phase plate as the phase optical element is conducive to improving the focusing effect of the focusing lens assembly.

[0012] Preferably, the alignment and calibration device for the focusing lens and the sampling grating further includes a focusing lens disposed within the focusing lens assembly. The optical axis of the focusing lens is adapted to coincide with the theoretical optical axis, and the focusing lens is a wedge lens.

[0013] For the alignment and calibration device of the focusing lens and the sampling grating according to the present invention, one-dimensional longitudinal focusing is achieved through a wedge lens, and the clean third-harmonic light is focused on the target point, which is conducive to improving the focusing effect of the focusing lens assembly.

[0014] Preferably, the alignment and calibration device for the focusing lens and the sampling grating further includes a first bracket. The collimating member is fixed to the first bracket. The first bracket is adapted to adjust the position and orientation of the collimating member and is adapted to align the phase optical element when the first alignment member is collinear with the collimating member, and to align the shielding member when the second alignment member is collinear with the collimating member.

[0015] For the alignment and calibration device of the focusing lens and the sampling grating according to the present invention, the position and orientation of the collimating member are adjusted through the first bracket, thereby realizing the alignment and calibration of the collimating member to the phase optical element and the shielding member, effectively improving the focusing ability of the focusing lens assembly.

[0016] Preferably, the collimation calibration device for the focusing lens and the sampling grating further includes a second bracket, the focusing member is fixed on the second bracket, and the second bracket is adapted to adjust the position and posture of the focusing member and is adapted to use the focusing member as the collimation reference of the focusing lens when the objective crosshairs of the focusing member coincide with the central crosshairs of the front collimation crosshair plate and the central crosshairs of the rear collimation crosshair plate respectively.

[0017] For the collimation calibration device of the focusing lens and the sampling grating of the present invention, the position and posture of the focusing member are adjusted through the second bracket, thereby realizing the collimation calibration of the focusing lens, and effectively improving the focusing ability of the focusing lens assembly.

[0018] Preferably, the collimating member is an optoelectronic autocollimator.

[0019] For the collimation calibration device of the focusing lens and the sampling grating of the present invention, by setting the collimating member as an optoelectronic autocollimator, the calibration speed and accuracy are effectively improved, which is beneficial to improving the focusing effect of the focusing lens assembly.

[0020] Preferably, the focusing member is an internal focusing telescope.

[0021] For the collimation calibration device of the focusing lens and the sampling grating of the present invention, by setting the focusing member as an internal focusing telescope, it is beneficial to improve the accuracy of the focusing process, which is beneficial to improving the focusing effect of the focusing lens assembly.

[0022] Preferably, the first collimation member and the second collimation member are tooling wedges.

[0023] For the collimation calibration device of the focusing lens and the sampling grating of the present invention, by setting the first collimation member and the second collimation member as tooling wedges, it is beneficial to improve the collimation calibration efficiency of the shielding member and the phase optical element, which is beneficial to improving the focusing effect of the focusing lens assembly. Description of the Drawings

[0024] Figure 1 is a schematic diagram of the collimation calibration device for the focusing lens and the sampling grating according to an embodiment of the present invention;

[0025] Figure 2 is a cross-sectional view of the collimation calibration device for the focusing lens and the sampling grating according to an embodiment of the present invention.

[0026] Description of the Reference Numerals:

[0027] 1 - Focusing lens assembly; 2 - Front collimation crosshair plate; 3 - Collimating member; 4 - Focusing member; 5 - First bracket; 6 - Second bracket; 7 - Rear collimation crosshair plate; 8 - First collimation member; 9 - Second collimation member; 10 - Shielding member; 11 - Phase optical element; 12 - Focusing lens. Detailed implementation mode

[0028] To make the above objects, features and advantages of the present invention more obvious and understandable, the following detailed description will be given to the specific embodiments of the present invention with reference to the accompanying drawings.

[0029] It should be noted that in the accompanying drawings of the specification of the present invention, an XYZ coordinate system is attached, wherein the positive direction of X represents "left", the negative direction of X represents "right", the positive direction of Y represents "front", the negative direction of Y represents "rear", the positive direction of Z represents "up", and the negative direction of Z represents "down".

[0030] As Figure 1 shown, the present invention provides an axis alignment calibration device for a focusing lens and a sampling grating, including a focusing lens assembly 1, a front axis alignment crosshair plate 2, a collimating member 3, a focusing member 4, a rear axis alignment crosshair plate 7, a first axis alignment member 8 and a second axis alignment member 9. The front axis alignment crosshair plate 2 is fixed to the front side of the focusing lens assembly 1, the rear axis alignment crosshair plate 7 is fixed to the rear side of the focusing lens assembly 1, the centers of the front axis alignment crosshair plate 2 and the rear axis alignment crosshair plate 7 are adapted to be located on the theoretical optical axis. The focusing member 4 is located on the side of the front axis alignment crosshair plate 2 away from the focusing lens assembly 1, and the objective crosshairs of the focusing member 4 are respectively adapted to coincide with the central crosshairs of the front axis alignment crosshair plate 2 and the central crosshairs of the rear axis alignment crosshair plate 7. The collimating member 3 is located between the front axis alignment crosshair plate 2 and the focusing member 4, and the optical axis of the collimating member 3 is adapted to coincide with the optical axis of the focusing member 4. The first axis alignment member 8 and the second axis alignment member 9 are located inside the focusing lens assembly 1 and are adapted to align the focusing lens assembly 1.

[0031] Specifically, in this embodiment, as Figure 1As shown, an axis alignment calibration device for a focusing lens and a sampling grating includes a focusing lens assembly 1, a front axis alignment crosshair plate 2, a collimating member 3, a focusing member 4, a rear axis alignment crosshair plate 7, a first axis alignment member 8, and a second axis alignment member 9. Among them, the front axis alignment crosshair plate 2 and the rear axis alignment crosshair plate 7 are respectively fixed on the front side and the rear side of the focusing lens assembly 1. During axis alignment calibration, the centers of the front axis alignment crosshair plate 2 and the rear axis alignment crosshair plate 7 are both located on the theoretical optical axis. Among them, the focusing member 4 is located on the side of the front axis alignment crosshair plate 2 away from the focusing lens assembly 1, that is, on the front side of the focusing lens assembly 1. The collimating member 3 is located between the front axis alignment crosshair plate 2 and the focusing member 4, also on the front side of the focusing lens assembly 1. During axis alignment calibration, the focusing member 4 is used to calibrate the focusing lens 12 in the focusing lens assembly 1. Specifically, it is reflected as follows: the crosshairs at the center of the focusing lens 12 are clearly imaged, the crosshairs at the center of the focusing lens 12 coincide with the crosshairs at the center of the objective lens of the focusing member 4, and the crosshairs on the objective lens of the focusing member 4 coincide with the crosshairs imaged on the focusing member 4 after being reflected by the focusing lens 12. At this time, the optical axis of the focusing lens 12 coincides with the theoretical optical axis, and the position and attitude of the focusing lens 12 are calibrated. During axis alignment calibration, the collimating member 3 is used to calibrate the shielding member 10 and the phase optical element 11 in the focusing lens assembly 1. That is, in this embodiment, the axis alignment calibration of the focusing lens assembly 1 is performed through the collimating member 3 and the focusing member 4, effectively improving the focusing ability of the focusing lens assembly 1.

[0032] Among them, in this embodiment, the axis alignment of three optical elements, namely the shielding member 10, the phase optical element 11, and the focusing lens 12, is performed in order to obtain a better focal image. Among them, "axis alignment" means that there is an error in the optical axis of the optical element and corresponding calibration is required.

[0033] Among them, the crosshairs refer to a specially made cross-shaped fixed mark on the focal plane of the optical system to determine the line of sight direction. The center crosshairs of the front axis alignment crosshair plate 2 or the rear axis alignment crosshair plate 7 also refer to the crosshairs with scales on the plate.

[0034] Among them, for "the objective crosshairs of the focusing member 4 are respectively adapted to coincide with the central crosshairs of the front fixed-axis crosshair plate 2 and the central crosshairs of the rear fixed-axis crosshair plate 7", it means adjusting the focal length of the focusing member 4 so that within the field of view of the focusing member 4, the central crosshairs of the front fixed-axis crosshair plate 2 are clearly imaged; adjusting the position and pose of the focusing member 4 through the second bracket 6 so that within the field of view of the focusing member 4, the objective crosshairs of the focusing member 4 coincide with the central crosshairs of the front fixed-axis crosshair plate 2, thereby realizing the preliminary adjustment of the focusing member 4; adjusting the focal length of the focusing member 4 so that within the field of view of the focusing member 4, the central crosshairs of the rear fixed-axis crosshair plate 7 are clearly imaged; adjusting the position and pose of the focusing member 4 through the second bracket 6 so that within the field of view of the focusing member 4, the objective crosshairs of the focusing member 4 coincide with the central crosshairs of the rear fixed-axis crosshair plate 7, thereby realizing the further adjustment of the focusing member 4. At this time, the optical axis of the focusing member 4 can be used as the optical reference of the focusing lens 12.

[0035] In this embodiment, the position of the focusing member is determined by the front fixed-axis crosshair plate and the rear fixed-axis crosshair plate, and the position of the collimating member is determined by the focusing member. Furthermore, the positions of the first fixed-axis member and the second fixed-axis member can be adjusted through the collimating member, that is, the focusing lens assembly can be axis-aligned and calibrated, effectively improving the focusing ability of the focusing lens assembly.

[0036] Optionally, the axis-alignment and calibration device for the focusing lens and the sampling grating further includes a shielding member 10 and a phase optical element 11 disposed in the focusing lens assembly 1. The first fixed-axis member 8 is fixed on the phase optical element 11 and is adapted to align the phase optical element 11 when the first fixed-axis member 8 is collimated with the collimating member 3. The second fixed-axis member 9 is fixed on the shielding member 10 and is adapted to align the shielding member 10 when the second fixed-axis member 9 is collimated with the collimating member 3.

[0037] Specifically, in this embodiment, as shown in Figure 1 and Figure 2 a shielding member 10, a phase optical element 11, and a focusing lens 12 are disposed in the focusing lens assembly 1. The first fixed-axis member 8 is fixed on the phase optical element 11 and is adapted to align the phase optical element 11. The second fixed-axis member 9 is fixed on the shielding member 10 and is adapted to align the shielding member 10. During axis-alignment and calibration, the collimating member 3 is also used to calibrate the shielding member 10 and the phase optical element 11 in the focusing lens assembly 1. Specifically, it is embodied as: adjusting the postures of the phase optical element 11 and the shielding member 10 so that the first fixed-axis member 8 and the second fixed-axis member 9 are respectively collimated with the collimating member 3, completing the axis-alignment and calibration of the shielding member 10 and the phase optical element 11, thereby effectively improving the focusing ability of the focusing lens assembly 1.

[0038] In this embodiment, the axis alignment and calibration of the phase optical element are respectively performed through the first fixed-axis member, and the axis alignment and calibration of the shielding member are performed through the second fixed-axis member, effectively improving the focusing ability of the focusing lens assembly 1.

[0039] Optionally, the shielding member 10 includes two mutually parallel shielding sheets.

[0040] Specifically, in this embodiment, the shielding member 10 includes two mutually parallel shielding sheets. The shielding sheets can provide protection against debris sputtering, preventing debris generated on the target surface during the target shooting from adhering to the surface of important optical elements. Therefore, in this embodiment, setting two mutually parallel shielding sheets can provide necessary protection measures for the focusing lens assembly 1, thus facilitating the improvement of the focusing effect of the focusing lens assembly 1.

[0041] In this embodiment, by setting two mutually parallel shielding sheets to provide protection against debris sputtering, necessary protection measures are provided for the focusing lens assembly, thus facilitating the improvement of the focusing effect of the focusing lens assembly.

[0042] Optionally, the phase optical element 11 is a continuous phase plate.

[0043] Specifically, in this embodiment, the phase optical element 11 is a continuous phase plate. The continuous phase plate is an optical diffraction element used to control the far-field beam quality in large laser devices. The continuous phase plate (cpp) has high energy utilization efficiency, the focal spot shape is easy to control, and it has a beam shaping function, thus realizing the smoothing of high-energy laser beams. CPP elements are used as an active control means for laser beam quality in large laser devices such as the US NIF and the French LMJ. Therefore, in this embodiment, using a continuous phase plate as the phase optical element 11 is beneficial to the improvement of the focusing effect of the focusing lens assembly 1.

[0044] In this embodiment, using a continuous phase plate as the phase optical element is beneficial to the improvement of the focusing effect of the focusing lens assembly.

[0045] Optionally, the axis alignment and calibration device for the focusing lens and the sampling grating further includes a focusing lens 12 disposed in the focusing lens assembly 1. The optical axis of the focusing lens 12 is adapted to coincide with the theoretical optical axis, and the focusing lens 12 is a wedge-shaped lens.

[0046] Specifically, in this embodiment, the axis alignment and calibration device for the focusing lens and the sampling grating further includes a focusing lens 12 disposed in the focusing lens assembly 1. During axis alignment and calibration, the optical axis of the focusing lens 12 coincides with the theoretical optical axis. The focusing lens 12 is a wedge-shaped lens, and the wedge-shaped lens is used to achieve one-dimensional longitudinal focusing, which can focus the clean third-harmonic light on the target point, and at the same time, a certain proportion of the third-harmonic light beam is sampled at a certain angle through the phase optical element 11, and the smoothing of the light beam is realized simultaneously.

[0047] In this embodiment, one-dimensional longitudinal focusing is achieved through a wedge lens, and the clean third-harmonic light is focused on the target point, which is beneficial to improving the focusing effect of the focusing lens assembly.

[0048] Optionally, the coaxial calibration device for the focusing lens and the sampling grating further includes a first bracket 5, the collimating member 3 is fixed on the first bracket 5, and the first bracket 5 is adapted to adjust the position and posture of the collimating member 3 and is adapted to align the phase optical element 11 when the first coaxial member 8 and the collimating member 3 are coaxial, and align the shielding member 10 when the second coaxial member 9 and the collimating member 3 are coaxial.

[0049] Specifically, in this embodiment, in combination with Figure 1 As shown, the coaxial calibration device for the focusing lens and the sampling grating further includes a first bracket 5, the collimating member 3 is fixed on the first bracket 5. During coaxial calibration, the position and posture of the collimating member 3 are adjusted through the first bracket 5, which is specifically embodied as: the collimating member 3 is erected on the first bracket 5 based on the focusing member 4, so that the optical axes of the focusing member 4 and the collimating member 3 coincide; the position and posture of the collimating member 3 are locked, and the collimating member 3 forms an optical reference for the phase optical element 11 and the shielding member 10; furthermore, the postures of the phase optical element 11 and the shielding member 10 can be adjusted so that the first coaxial member 8, the second coaxial member 9 and the collimating member 3 are coaxial. At this time, the postures of the phase optical element 11 and the shielding member 10 are accurate; the postures of the phase optical element 11 and the shielding member 10 are locked, and the coaxial calibration of the phase optical element 11 and the shielding member 10 is completed.

[0050] In this embodiment, the position and posture of the collimating member are adjusted through the first bracket, and then the coaxial calibration of the collimating member for the phase optical element and the shielding member is realized, effectively improving the focusing ability of the focusing lens assembly.

[0051] Optionally, the coaxial calibration device for the focusing lens and the sampling grating further includes a second bracket 6, the focusing member 4 is fixed on the second bracket 6, and the second bracket 6 is adapted to adjust the position and posture of the focusing member 4 and is adapted to use the focusing member 4 as the coaxial reference for the focusing lens 12 when the objective crosshairs of the focusing member 4 coincide with the central crosshairs of the front coaxial crosshair plate 2 and the central crosshairs of the rear coaxial crosshair plate 7 respectively.

[0052] Specifically, in this embodiment, in combination with Figure 1As shown in the figure, the coaxial calibration device for the focusing lens and the sampling grating further includes a second bracket 6. The focusing member 4 is fixed to the second bracket 6. During coaxial calibration, the pose of the focusing member 4 is adjusted through the second bracket 6, which is specifically embodied as follows: the focusing member 4 is installed on the second bracket 6; the focal length of the focusing member 4 is adjusted so that the central crosshair of the front coaxial crosshair plate 2 is clearly imaged; the pose of the focusing member 4 is adjusted so that the objective crosshair of the focusing member 4 coincides with the central crosshair of the front coaxial crosshair plate 2; the focal length of the focusing member 4 is adjusted so that the central crosshair of the rear coaxial crosshair plate 7 is clearly imaged; the pose of the focusing member 4 is adjusted so that the objective crosshair of the focusing member 4 coincides with the central crosshair of the rear coaxial crosshair plate 7; the optical axis of the focusing member 4 is the coaxial calibration reference of the focusing lens 12; the focal length of the focusing member 4 is adjusted so that the crosshair at the center of the focusing lens 12 is clearly imaged.

[0053] In this embodiment, the pose of the focusing member is adjusted through the second bracket, thereby realizing the coaxial calibration of the focusing lens and effectively improving the focusing ability of the focusing lens assembly.

[0054] Optionally, the collimating member 3 is an optoelectronic autocollimator.

[0055] Specifically, in this embodiment, the collimating member 3 is an optoelectronic autocollimator. The optoelectronic autocollimator is a device designed based on the principle of optical autocollimation imaging, through an LED light-emitting element and a linear array CCD imaging technology. The optoelectronic autocollimator has the characteristics of high precision, stable performance and simple operation. During coaxial calibration, it can effectively improve the calibration speed and accuracy, thus being beneficial to the improvement of the focusing effect of the focusing lens assembly 1.

[0056] In this embodiment, by setting the collimating member as an optoelectronic autocollimator, the calibration speed and accuracy are effectively improved, thus being beneficial to the improvement of the focusing effect of the focusing lens assembly.

[0057] Optionally, the focusing member 4 is an internal focusing telescope.

[0058] Specifically, in this embodiment, the focusing member 4 is an internal focusing telescope. When the internal focusing telescope is focused, the length of the lens barrel remains unchanged, which is convenient for the coaxial calibration process. At the same time, the focal length of the combined objective lens is relatively long, so the magnification is higher. And during the focusing process, the internal focusing telescope is more stable as a whole, and the change of the visual axis is small, which is beneficial to improving the accuracy of the focusing process, thus being beneficial to the improvement of the focusing effect of the focusing lens assembly 1.

[0059] In this embodiment, by setting the focusing member as an internal focusing telescope, it is beneficial to improve the accuracy of the focusing process, thus being beneficial to the improvement of the focusing effect of the focusing lens assembly.

[0060] Optionally, the first coaxial member 8 and the second coaxial member 9 are tooling wedges.

[0061] Specifically, in this embodiment, in combination with Figure 1 As shown, the first fixed shaft member 8 and the second fixed shaft member 9 are tooling wedges, which is beneficial to improving the alignment and calibration efficiency of the shielding member 10 and the phase optical element 11, and thus beneficial to enhancing the focusing effect of the focusing lens assembly 1.

[0062] In this embodiment, by setting the first fixed shaft member and the second fixed shaft member as tooling wedges, it is beneficial to improve the alignment and calibration efficiency of the shielding member and the phase optical element, and thus beneficial to enhancing the focusing effect of the focusing lens assembly.

[0063] Although the present invention is disclosed as above, the protection scope of the present invention is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will all fall within the protection scope of the present invention.

Claims

1. An axial alignment calibration device for a focusing lens and a sampling grating, characterized in that, it includes a focusing lens assembly (1), a front axial alignment reticle plate (2), a collimator (3), a focusing member (4), a rear axial alignment reticle plate (7), a first axial alignment member (8) and a second axial alignment member (9). The front axial alignment reticle plate (2) is fixed to the front side of the focusing lens assembly (1), and the rear axial alignment reticle plate (7) is fixed to the rear side of the focusing lens assembly (1). The center of the front axial alignment reticle plate (2) and the center of the rear axial alignment reticle plate (7) are adapted to be located on the theoretical optical axis. The focusing member (4) is located on the side of the front axial alignment reticle plate (2) away from the focusing lens assembly (1). The objective reticles of the focusing member (4) are respectively adapted to coincide with the center reticle of the front axial alignment reticle plate (2) and the center reticle of the rear axial alignment reticle plate (7). The collimator (3) is located between the front axial alignment reticle plate (2) and the focusing member (4), and the optical axis of the collimator (3) is adapted to coincide with the optical axis of the focusing member (4). The first axial alignment member (8) and the second axial alignment member (9) are located inside the focusing lens assembly (1) and are adapted to align the focusing lens assembly (1); wherein, the axial alignment calibration device further includes a focusing lens (12) disposed inside the focusing lens assembly (1), the optical axis of the focusing lens (12) is adapted to coincide with the theoretical optical axis, and the focusing lens (12) is a wedge-shaped lens; wherein, the first axial alignment member (8) and the second axial alignment member (9) are tooling wedges.

2. The axial alignment calibration device for a focusing lens and a sampling grating according to claim 1, characterized in that, it further includes a shielding member (10) and a phase optical element (11) disposed inside the focusing lens assembly (1). The first axial alignment member (8) is fixed to the phase optical element (11) and is adapted to align the phase optical element (11) when the first axial alignment member (8) is collimated with the collimator (3). The second axial alignment member (9) is fixed to the shielding member (10) and is adapted to align the shielding member (10) when the second axial alignment member (9) is collimated with the collimator (3).

3. The axial alignment calibration device for a focusing lens and a sampling grating according to claim 2, characterized in that, the shielding member (10) includes two mutually parallel shielding sheets.

4. The axial alignment calibration device for a focusing lens and a sampling grating according to claim 2, characterized in that, the phase optical element (11) is a continuous phase plate.

5. The axial alignment calibration device for a focusing lens and a sampling grating according to claim 2, characterized in that, it further includes a first bracket (5). The collimator (3) is fixed to the first bracket (5). The first bracket (5) is adapted to adjust the position and posture of the collimator (3) and is adapted to align the phase optical element (11) when the first axial alignment member (8) is collimated with the collimator (3), and align the shielding member (10) when the second axial alignment member (9) is collimated with the collimator (3).

6. The axis alignment calibration device for the focusing lens and the sampling grating according to claim 1, characterized in that, it further includes a second bracket (6), the focusing member (4) is fixed on the second bracket (6), and the second bracket (6) is adapted to adjust the position and pose of the focusing member (4) and is adapted to use the focusing member (4) as the axis alignment reference of the focusing lens (12) when the objective crosshairs of the focusing member (4) coincide with the central crosshairs of the front axis alignment crosshair plate (2) and the central crosshairs of the rear axis alignment crosshair plate (7) respectively.

7. The axis alignment calibration device for the focusing lens and the sampling grating according to any one of claims 1 to 6, characterized in that, the collimating member (3) is an optoelectronic autocollimator.

8. The axis alignment calibration device for the focusing lens and the sampling grating according to any one of claims 1 to 6, characterized in that, the focusing member (4) is an internal focusing telescope.

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