A micron-level gap detection method for resonant gyroscope based on surface data

Abstract

The present invention discloses a method for detecting the micron-level gap of a resonator gyroscope based on surface shape data, comprising the following steps: S1, predefining a resonator surface A, a resonator surface D, a plate electrode surface B, and a plate electrode surface C; S2, measuring the dimensional data of the resonator and the plate electrode before assembling the resonator and the plate electrode and saving them in a database; S3, during the assembly process of the resonator and the plate electrode, performing real-time detection of the surface shapes of the resonator and the plate electrode end surfaces and their positional errors, thereby obtaining surface shape data of the plate electrode surface B, surface shape data of the resonator surface A, and the positional error between the A-B surfaces; S4, searching the database for the surface shape data of the plate electrode surface B and surface C, and the resonator surface A and surface D, and their positional errors, based on the serial numbers of the resonator and the plate electrode; and S5, obtaining the positional error of the C-D surface, i.e., the lip gap of the resonator gyroscope, by a preset calculation method. The present invention is easy to implement and is insensitive to positional errors in the installation of the detection sensor.

Description

Technical Field

[0001] The present invention relates to the technical fields of inertial devices and their precision assembly and intelligent manufacturing, and more specifically, to a resonant gyroscope micron-level gap detection method based on surface data. Background Art

[0002] The gyroscope is a sensor that measures the angular motion of a carrier in inertial space. It is a basic core component of inertial navigation and attitude measurement systems. It has very important dual-use military and civilian application value in the fields of precision guidance, unmanned platforms, aerospace, stable platforms, and spacecraft.

[0003] The HRG is a solid-state wave gyroscope with a rotorless structure based on the Coriolis effect. Compared with laser gyroscopes, fiber optic gyroscopes, mechanical rotor gyroscopes, etc., the HRG has more stable physical properties and many advantages such as higher precision, higher reliability, longer service life, miniaturization, and integration. It is recognized by the inertial technology community at home and abroad as the most ideal inertial device that can be used in aerospace navigation, deep space exploration, autonomous driving, and industrial control in the 21st century.

[0004] According to the structure, the hemispherical resonant gyroscope can be divided into a three-piece structure and a two-piece structure, such as Figure 1 As shown in a, the three-piece structure includes an excitation cover (exciter), a resonator, and a signal readout base (vibration pickup); Figure 1 As shown in b, the two-piece structure combines the excitation cover and the signal readout base of the three-piece structure into one device, namely the signal excitation readout base (electrode base). Therefore, it only includes two core components: the resonator and the electrode base.

[0005] At present, compared with the three-piece gyroscope structure, the two-piece hemispherical resonant gyroscope is the research trend and focus at home and abroad.

[0006] Precision assembly is one of the key issues that needs to be addressed urgently. However, there are relatively few studies and reports on the precision assembly technology of resonant gyroscopes in the industry.

[0007] In order to ensure the high precision and high performance of the hemispherical resonator gyroscope, a very critical assembly indicator for the two-piece structure is to ensure the gap size and consistency between the lip edge of the resonator and the electrode base, such as Figure 2 As shown in Figure 1, this gap typically ranges from tens to hundreds of microns, with circumferential nonuniformity typically below the micron level, or even at the submicron level. During assembly, if the gap between the lip of the resonator and the electrode base is inconsistent, this will lead to inconsistent capacitance between the gyroscope's electrodes, further introducing errors in gyroscope excitation and detection, thereby reducing the gyroscope's accuracy and performance. Therefore, during the assembly of a hemispherical resonator gyroscope, precise alignment between the resonator and the plate electrodes must be ensured.

[0008] The traditional hemispherical resonant gyroscope is assembled manually and is highly dependent on the experience of the assembly technicians. During the assembly process, problems such as repeated adjustments, unstable assembly accuracy, and assembly performance that fails to meet design indicators are very likely to occur. This is not conducive to the development of resonant gyroscopes towards automated, digital, and intelligent manufacturing, and seriously restricts the assembly accuracy, efficiency, and stability of resonant gyroscopes.

[0009] Existing methods for visual measurement, confocal sensor detection, and capacitive detection are sensitive to the sensor's mounting position. For example, during visual inspection, if the optical axis is not perpendicular to the gap, measurement errors can be introduced, and these errors increase with increasing angular deviation. Therefore, it is necessary to develop a resonant gyroscope micron-level gap detection method based on surface data. Summary of the Invention

[0010] The purpose of the present invention is to provide a method for detecting micron-level gap of a resonant gyroscope based on surface data, so as to overcome the defects of the prior art.

[0011] In order to achieve the above object, the technical solution adopted by the present invention is as follows:

[0012] A method for detecting micron-level gaps of a resonant gyroscope based on surface data, comprising the following steps:

[0013] S1. The predefined resonator surface A is the end surface of the support rod in the center of the resonator, the resonator surface D is the end surface of the resonator shell structure, the plate electrode surface B is the end surface of the plate electrode away from the resonator during assembly, and the plate electrode surface C is the end surface of the plate electrode close to the resonator during assembly;

[0014] S2. Before assembling the resonator and the flat electrode, measuring the dimensional data of the resonator and the flat electrode and storing them in a database, wherein the dimensional data includes the measured values ​​of the structural dimensions of the resonator and the flat electrode, the surface shape data of the B and C surfaces of the flat electrode, and the A and D surfaces of the resonator, and their position errors;

[0015] S3. During the assembly process of the resonator and the flat electrode, the surface shapes of the end surfaces of the resonator and the flat electrode and their position errors are detected in real time to obtain the surface shape data of the flat electrode surface B, the surface shape data of the resonator surface A, and the position error between the A and B surfaces;

[0016] S4. According to the serial numbers of the resonator and the flat electrode, the surface shape data of the flat electrode surface B and surface C, and the surface A and surface D of the resonator and their position errors are searched in the database;

[0017] S5. Based on the error transmission path during the assembly of the resonator and the flat electrode, according to the surface shape and position error of the DA surface, the surface shape and position error of the AB surface, and the surface shape and position error of the BC surface, the position error of the CD surface is obtained by a preset calculation method. The position error of the CD surface is the lip edge gap between the resonator and the flat electrode and its distribution.

[0018] Furthermore, in the step S1, the size data of the resonator and the flat electrode are measured based on a 3D displacement sensor.

[0019] Furthermore, the size data of the resonator and the flat electrode stored in the database in step S1 correspond to the serial number of the resonator and the serial number of the flat electrode.

[0020] Furthermore, in step S2, a sensing detection module is arranged just above the flat electrode to perform real-time detection on the surface shapes and position errors of the resonator and the flat electrode end surfaces during the assembly process.

[0021] Furthermore, the sensing detection module is a 3D displacement sensor, and the 3D displacement sensor is a three-dimensional scanning measuring instrument, a surface laser rangefinder or an interferometer.

[0022] Furthermore, the calculation method preset in step S4 includes:

[0023] For each resonator and flat electrode, the initial position is marked on the side of the cylinder. Using this initial position as the starting point, the angular coordinate position in the circumferential direction is calibrated to establish an XYZ right-handed rectangular coordinate system. The Y axis is determined based on the marked point, with the Y axis as the starting axis and the counterclockwise direction as positive to determine the angular orientation.

[0024] Based on the XYZ right-hand rectangular coordinate system, the surface shapes Fd1(r1,θ1), Fa1(r2,θ2) and their position error Hda1(θ) of the DA surface, the surface shapes Fa2(r3,θ3), Fb1(r4,θ4) and their position error Hab1(θ) of the AB surface, and the surface shapes Fb2(r5,θ5), Fc1(r6,θ6) and their position error Hbc1(θ) of the BC surface were measured, and corresponding databases were established for each.

[0025] The position error of the CD surface is calculated according to the formula Hdc1(θ)=Hda1(θ)-Hab1(θ)-Hbc1(θ), θ∈[0,360°).

[0026] Compared with the prior art, the advantages of the present invention are that the present invention can obtain the lip gap distribution on the entire circumference through a single measurement. The distribution is based on the relative position relationship between the surfaces and can tolerate the position error relationship at the beginning of sensor installation. Compared with the existing visual measurement, confocal sensor detection and capacitive detection methods, which require sensing arrangements for multiple position states to achieve gap detection at multiple positions, the detection scheme of the present invention is easy to implement and is insensitive to the position error of the detection sensor installation. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0028] Figure 1 (a) is a schematic diagram of the structure of a three-piece hemispherical resonator gyroscope, and (b) is a schematic diagram of the structure of a two-piece hemispherical resonator gyroscope.

[0029] Figure 2 This is a schematic diagram of the lip gap of a two-piece hemispherical resonator gyroscope.

[0030] Figure 3 Schematic diagram of the resonant gyroscope micron-level gap detection method based on surface data of the present invention.

[0031] Figure 4 Schematic diagram of the error transmission route during the assembly process of the resonator of the present invention.

[0032] Figure 5 Schematic diagram of the surface shape and position error definition of each detection surface of the resonator and the flat electrode of the present invention.

[0033] Figure 6 Schematic diagram of the azimuth definition of the surface shape and position error of the DA surface of the present invention.

[0034] Figure 7 The figure is a flow chart of the resonant gyroscope micron-level gap detection method based on surface data of the present invention. DETAILED DESCRIPTION

[0035] The preferred embodiments of the present invention are described in detail below with reference to the accompanying drawings so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more precise definition of the protection scope of the present invention.

[0036] See Figure 2 The figure shows the lip gap of a two-piece hemispherical resonant gyroscope. Figure 2 The two-piece hemispherical resonant gyroscope shown is used as the object to solve the problem of precision control of the lip edge gap between the resonator and the flat electrode during the assembly process. It is specifically manifested in two indicators: one is that the lip edge gap reaches the design requirement value, such as 30 microns, or 40 or 50 or 100 microns; the other is that the circumferential unevenness of the lip edge gap (maximum gap minus minimum gap) is not less than 1 micron or submicron.

[0037] See Figure 3 As shown, this embodiment discloses a method for detecting micron-level gaps of a resonant gyroscope based on surface shape data, including the following methods:

[0038] Step S1, predefine the resonator A surface as the end surface of the support rod in the center of the resonator, the resonator D surface as the end surface of the resonator shell structure, that is, the lip edge surface, the flat electrode B surface as the end surface of the flat electrode away from the resonator during the assembly process, and the flat electrode C surface as the end surface of the flat electrode close to the resonator during the assembly process.

[0039] Step S2: Before assembling the resonator and the plate electrode, the dimensional data of the resonator and the plate electrode are measured and stored in the database DATA-HRG. The dimensional data include the measured values ​​of the structural dimensions of the resonator and the plate electrode, the surface shape data of the upper end surface B and the lower end surface C of the plate electrode, and the surface A and the surface D of the resonator and their position errors, such as Figure 4 shown.

[0040] Specifically, this embodiment measures the size data of the resonator and the flat electrode based on a 3D displacement sensor, and the size data of the resonator and the flat electrode stored in the database correspond one-to-one to the number of the resonator and the number of the flat electrode.

[0041] Step S3: During the assembly process of the resonator and the flat electrode, the surface shapes of the end surfaces of the resonator and the flat electrode and their position errors are detected in real time to obtain the surface shape data of the flat electrode B surface, the surface shape data of the resonator A surface, and the position error between the A and B surfaces.

[0042] Specifically, this embodiment employs a sensing module positioned directly above the flat electrode to perform real-time detection of the surface shape and positional error of the resonator and the flat electrode during assembly. The sensing module is a 3D displacement sensor, such as a three-dimensional scanning measuring instrument, a surface laser rangefinder, or an interferometer.

[0043] Step S4: Based on the serial numbers of the resonator and the flat electrode, the surface shape data of the flat electrode's B and C surfaces, and the resonator's A and D surfaces, and their positional errors, are retrieved from the database. This data can be measured using a 3D displacement sensor before assembly and stored in the database (i.e., obtained in step S1).

[0044] Step S5: Based on the error transmission path during the assembly process of the resonator and the flat electrode, Figure 5 As shown, based on the surface shape and position error of the DA surface, the surface shape and position error of the AB surface, and the surface shape and position error of the BC surface, the position error of the CD surface is obtained by a preset calculation method (which can be program fitting). The position error of the CD surface is the lip edge gap between the resonator and the flat electrode and its distribution.

[0045] Therefore, the results of step S4, i.e., the lip gap detection results, can be used to guide the position adjustment of the resonator and the flat electrode during the assembly process. This can be done manually or by command-controlled precision instruments. After adjustment, steps S2-S4 are repeated until the measured gap meets the design specifications. The connection process between the resonator and the flat electrode can then be carried out.

[0046] In this embodiment, combined with Figure 4-Figure 6 , the calculation method preset in step S4 includes:

[0047] First, mark the starting position and establish a rectangular / polar coordinate system. For each resonator and flat electrode, mark the initial position on the side of the cylinder. Using this initial position as the starting point, calibrate the angular coordinate position in the circumferential direction to establish an XYZ right-handed rectangular coordinate system. Determine the Y axis based on the marked point, starting with the Y axis and determining the angular orientation in the counterclockwise direction.

[0048] Then, measure and record the dimensional error data. Based on the XYZ right-hand rectangular coordinate system, measure the surface shape Fd1 (r1, θ1), Fa1 (r2, θ2) and its position error Hda1 (θ) of the DA surface, the surface shape Fa2 (r3, θ3), Fb1 (r4, θ4) and its position error Hab1 (θ) of the AB surface, and the surface shape Fb2 (r5, θ5), Fc1 (r6, θ6) and its position error Hbc1 (θ) of the BC surface, and establish corresponding databases for each.

[0049] Take the DA surface shape and its position error as an example, Figure 6 The coordinates of the points on surface A and surface D can be expressed as follows:

[0050] Surface A: point (r1, θ1), where r1∈[0, R1], θ1∈[0, 360°); R1 is the radius of surface A.

[0051] D-surface: point (r2, θ2), where r2∈[R2, R3], θ2∈[0, 360°); R2 and R3 represent the inner and outer radii of the annular D-surface, respectively.

[0052] Therefore, the surface data graphs of surface D and surface A measured by the 3D displacement sensor can be expressed as Fd1(r1,θ1) and Fa1(r2,θ2), respectively; the height error between the D and A surfaces is mainly related to the angle and can be expressed as Hda1(θ).

[0053] Similarly, the surface data graphs of surface A and surface B can be expressed as Fa2(r3,θ3) and Fb1(r4,θ4), respectively; the height error between surfaces A and B can be expressed as Hab1(θ).

[0054] The surface data graphs of surface B and surface C can be expressed as Fb2(r5,θ5) and Fc1(r6,θ6), respectively; the height error between surfaces BC can be expressed as Hbc1(θ).

[0055] Finally, the position error of the CD surface (the circumferential height error between the DC surfaces) is calculated according to the formula Hdc1(θ)=Hda1(θ)-Hab1(θ)-Hbc1(θ), θ∈[0,360°).

[0056] The present invention measures the surface shape and position error relationship at the beginning of installation based on the detection sensor, and can obtain the lip edge gap distribution on the entire circumference through a single measurement, thereby ensuring the precise alignment between the resonator and the flat electrode and improving the assembly efficiency.

[0057] Although the embodiments of the present invention are described in conjunction with the accompanying drawings, the patent owner may make various changes or modifications within the scope of the appended claims. As long as they do not exceed the scope of protection described in the claims of the present invention, they should be within the scope of protection of the present invention.

Claims

1. A method for detecting micron-level gap of a resonant gyroscope based on surface data, characterized in that: Includes the following methods: S1. The predefined resonator surface A is the end surface of the support rod in the center of the resonator, the resonator surface D is the end surface of the resonator shell structure, the plate electrode surface B is the end surface of the plate electrode away from the resonator during assembly, and the plate electrode surface C is the end surface of the plate electrode close to the resonator during assembly; S2. Before assembling the resonator and the flat electrode, measuring the dimensional data of the resonator and the flat electrode and storing them in a database, wherein the dimensional data includes the measured values ​​of the structural dimensions of the resonator and the flat electrode, the surface shape data of the B and C surfaces of the flat electrode, and the A and D surfaces of the resonator, and their position errors; S3. During the assembly process of the resonator and the flat electrode, the surface shapes of the end surfaces of the resonator and the flat electrode and their position errors are detected in real time to obtain the surface shape data of the flat electrode surface B, the surface shape data of the resonator surface A, and the position error between the A and B surfaces; S4. According to the serial numbers of the resonator and the flat electrode, the surface shape data of the flat electrode surface B and surface C, and the surface A and surface D of the resonator and their position errors are searched in the database; S5. Based on the error transmission path during the assembly of the resonator and the flat electrode, and according to the surface shape and position error of the DA surface, the surface shape and position error of the AB surface, and the surface shape and position error of the BC surface, a position error of the CD surface is obtained by a preset calculation method. The position error of the CD surface is the lip gap between the resonator and the flat electrode and its distribution. The calculation method preset in step S4 includes: For each resonator and flat electrode, the initial position is marked on the side of the cylinder. Using this initial position as the starting point, the angular coordinate position in the circumferential direction is calibrated to establish an XYZ right-handed rectangular coordinate system. The Y axis is determined based on the marked point, with the Y axis as the starting axis and the counterclockwise direction as positive to determine the angular orientation. Based on the XYZ right-hand rectangular coordinate system, the surface shapes Fd1(r2,θ2) and Fa1(r1,θ1) of the DA surface and their position error Hda1(θ), the surface shapes Fa2(r3,θ3) and Fb1(r4,θ4) of the AB surface and their position error Hab1(θ), and the surface shapes Fb2(r5,θ5) and Fc1(r6,θ6) of the BC surface and their position error Hbc1(θ) are measured, and corresponding databases are established for each. The position error of the CD surface is calculated according to the formula Hdc1(θ) = Hda1(θ)- Hab1(θ)- Hbc1(θ), θ∈[0,360°).

2. The method for detecting micron-level gap of a resonant gyroscope based on surface data according to claim 1, characterized in that: In the step S1 , the size data of the resonator and the flat electrode are measured based on a 3D displacement sensor.

3. The method for detecting micron-level gap of a resonant gyroscope based on surface data according to claim 1, characterized in that: The size data of the resonator and the flat electrode stored in the database in step S1 correspond to the serial number of the resonator and the serial number of the flat electrode.

4. The method for detecting micron-level gap of a resonant gyroscope based on surface data according to claim 1, characterized in that: In step S2, a sensing detection module is arranged just above the flat electrode to perform real-time detection on the surface shapes and position errors of the resonator and the flat electrode end surfaces during the assembly process.

5. The method for detecting micron-level gap of a resonant gyroscope based on surface data according to claim 4, characterized in that: The sensing detection module is a 3D displacement sensor, and the 3D displacement sensor is a three-dimensional scanning measuring instrument, a surface laser rangefinder or an interferometer.

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