Cutting tool shaping methods

Abstract

The present invention provides a cutting tool shaping method that can easily and cost-effectively shape the cutting tool. The cutting tool shaping method includes the following steps: a shaping preparation step, in which the front end of a rotating cutting tool (21) is inserted into the dressing plate (200) held by the chuck table (10) by a predetermined amount (201); and a shaping step, after performing the shaping preparation step, while moving the cutting tool (21) in the axial direction of the spindle, the cutting tool (21) is raised to form an inclined surface (28) on one side (surface (26)) of the front end of the cutting tool (21), and the shaping preparation step and the shaping step are repeated until the inclined surface (28) of the cutting tool (21) becomes the desired angle or width.

Description

Technical Field

[0001] This invention relates to a method for shaping cutting tools. Background Technology

[0002] To cut various plate-shaped workpieces such as semiconductor device wafers, ceramic substrates, glass substrates, and resin encapsulation substrates into individual chips using a cutting tool, a cutting device (dicing machine) is used. In conventional cutting, the substrate is completely cut to divide the workpiece. To suppress chip defects or to form V-grooves or inclined surfaces on the chip, a cutting tool with a V-shaped tip is sometimes used for cutting or grooving (see, for example, Patent Documents 1, 2, and 3).

[0003] Patent Document 1: Japanese Patent Application Publication No. 2004-039906

[0004] Patent Document 2: Japanese Patent Application Publication No. 2012-044096

[0005] Patent Document 3: Japanese Patent Application Publication No. 2019-160887

[0006] In this situation, the cutting tool tip is prone to deformation due to wear, and replacing the cutting tool with a new one each time it deforms increases the cost of the cutting tool. Therefore, a machining device for shaping the cutting tool is considered, but this requires the introduction of new equipment, which presents a problem of impractical implementation. Furthermore, when a pre-shaped cutting tool with an angled tip is purchased from the tool manufacturer and installed on the spindle, the spindle's rotation center is offset from the cutting tool's center, resulting in a slight misalignment. Moreover, when attempting to correct this misalignment, the shape of the cutting tip changes rapidly due to tool wear, making correction impossible, thus creating a problem of uncorrectable misalignment. Summary of the Invention

[0007] The present invention was made in view of this problem, and its object is to provide a cutting tool shaping method that enables easy and low-cost shaping of the cutting tool.

[0008] To address the aforementioned issues and achieve the objective, the cutting tool shaping method of the present invention uses a cutting device having a chuck table, a cutting unit, and a moving unit to shape the cutting tool. The chuck table holds the workpiece using a holding surface. The cutting unit, with an annular cutting tool mounted on a spindle having an axis parallel to the holding surface, cuts the workpiece held by the chuck table. The moving unit moves the chuck table and the cutting unit relative to each other. The cutting tool shaping method includes the following steps: a shaping preparation step, where the tip of a rotating cutting tool cuts into the dressing plate held by the chuck table by a predetermined amount; and a shaping step, after performing the shaping preparation step, whereby the cutting tool is moved along the axis of the spindle while being raised, forming an inclined surface on one side of the tip of the cutting tool. The shaping preparation step and the shaping step are repeated until the inclined surface of the cutting tool reaches a desired angle or width.

[0009] Alternatively, the shaping step can be performed on both the positive and negative directions of the spindle's axis, forming inclined surfaces at the front ends of one and the other faces of the cutting tool.

[0010] Alternatively, the cutting tool shaping method may include the following consumption measurement step: after the shaping step is performed and before the shaping preparation step is performed again, the consumption of the cutting tool is measured, and even if the cutting tool is consumed, the cutting tool is made to cut in by a specified amount in the shaping preparation step.

[0011] This invention enables easy and low-cost shaping of cutting tools. Attached Figure Description

[0012] Figure 1 This is a perspective view showing an example of the structure of a cutting apparatus for a cutting tool shaping method according to an embodiment.

[0013] Figure 2 It is shown Figure 1 An exploded perspective view of the cutting unit of the cutting device.

[0014] Figure 3 This is a flowchart illustrating an example of the processing procedure of the cutting tool shaping method according to an embodiment.

[0015] Figure 4 This is a cross-sectional view illustrating the shaping method of the cutting tool according to the embodiment.

[0016] Figure 5 Yes Figure 3 A 3D diagram illustrating the steps involved in plastic surgery preparation.

[0017] Figure 6 Yes Figure 3 A 3D diagram illustrating the steps involved in plastic surgery preparation.

[0018] Figure 7 Yes Figure 3 A cross-sectional view illustrating the preparatory steps for plastic surgery.

[0019] Figure 8 Yes Figure 3 A cross-sectional view illustrating the shaping steps.

[0020] Figure 9 Yes Figure 3 A cross-sectional view illustrating the shaping steps.

[0021] Figure 10 Yes Figure 3 A cross-sectional view illustrating an example of the steps for determining the inclined surface.

[0022] Figure 11 Yes Figure 3 A top view illustrating an example of the steps for determining the inclined surface.

[0023] Figure 12 Yes Figure 3 A top view illustrating an example of the consumption measurement procedure.

[0024] Figure 13 This is a cross-sectional view illustrating the shaping method of the cutting tool in Modified Example 1.

[0025] Figure 14 This is a cross-sectional view illustrating the shaping method of the cutting tool in Modified Example 2.

[0026] Label Explanation

[0027] 1: Cutting device; 10: Chuck table; 20: Cutting unit; 21: Cutting tool; 22: Spindle; 26, 27: Surface; 28, 29: Inclined surface; 30: Moving unit; 100: Workpiece; 200: Dressing plate. Detailed Implementation

[0028] Referring to the accompanying drawings, the embodiments (implementations) for carrying out the present invention will be described in detail. The present invention is not limited to the contents described in the following embodiments. Furthermore, the constituent elements described below include contents that are readily conceived by those skilled in the art and substantially the same. Additionally, the structures described below can be appropriately combined. Furthermore, various omissions, substitutions, or modifications to the structure can be made without departing from the spirit of the present invention.

[0029] [Implementation Method]

[0030] The shaping method for cutting tools according to embodiments of the present invention will be described with reference to the accompanying drawings. Figure 1 This is a perspective view showing an example of the structure of a cutting device 1 for shaping a cutting tool according to an embodiment. Figure 2 It is shown Figure 1 An exploded perspective view of the cutting unit 20 of the cutting device 1. (See figure) Figure 1 As shown, the cutting device 1 includes a chuck table 10, a cutting unit 20, a moving unit 30, a shooting unit 40, and a control unit 50.

[0031] In this embodiment, the workpiece 100, which is the object of cutting by the cutting device 1, is, for example, a disc-shaped semiconductor device wafer or optical device wafer made of silicon, sapphire, silicon carbide (SiC), gallium arsenide, or the like. Figure 1 As shown, the workpiece 100 has a device 103 formed in an area divided by multiple pre-defined dividing lines 102 in a grid pattern on its flat front surface 101. In this embodiment, an adhesive tape 105 is attached to the back surface 104 of the workpiece 100 on the back side of the front surface 101, and an annular frame 106 is mounted on the outer edge of the adhesive tape 105, but this is not the only limitation in this invention. In addition, in this invention, the workpiece 100 may be a rectangular encapsulation substrate, ceramic plate, or glass plate, etc., having multiple devices sealed with resin.

[0032] The chuck stage 10 includes a circular plate-shaped frame with recesses, and a circular plate-shaped suction portion embedded in the recesses. The suction portion of the chuck stage 10 is formed of porous ceramic or the like and is connected to a vacuum suction source (not shown) via a vacuum suction path. The upper surface of the suction portion of the chuck stage 10 is a holding surface 11 for holding and attracting the workpiece 100. In this embodiment, the holding surface 11 holds the workpiece 100 with its front 101 facing upwards, and attracts and holds the workpiece 100 from the back 104 side via an adhesive tape 105. The holding surface 11 and the upper surface of the frame of the chuck stage 10 are arranged on the same plane and are formed parallel to each other on the XY plane, which is a horizontal plane. The chuck table 10 is configured to move freely in the X-axis direction, which is a horizontal direction, via the X-axis moving unit 31 of the moving unit 30, and to rotate freely about an axis parallel to the Z-axis direction, which is a vertical direction and perpendicular to the holding surface 11, via a rotation drive source (not shown).

[0033] like Figure 2As shown, the cutting unit 20 includes: a spindle 22 with a cutting tool 21 mounted at its front end; and a mounting flange 24. The cutting tool 21 is a cutting abrasive with an annular cutting edge 21-1, which is formed by fixing abrasive grains such as diamond or CBN (Cubic Boron Nitride) to a specified thickness using a bonding material such as metal or resin. As the cutting tool 21 performs cutting, the cutting edge 21-1 wears and undergoes spontaneous sharpening, always maintaining a certain level of sharpness. Figure 2 In the example shown, the cutting tool 21 is a hubless tool, but it is not limited to this in the present invention. It can also be a hub tool with an annular cutting edge 21-1 fixed on the outer periphery of the annular base.

[0034] The spindle 22 has an axis parallel to the Y-axis (which is the opposite direction to the horizontal direction and perpendicular to the X-axis), i.e., an axis parallel to the holding surface 11. The mounting flange 24 clamps the cutting tool 21 and fixes it to the front end of the spindle 22. The cutting tool 21, mounted at the front end of the spindle 22, rotates about the axis parallel to the Y-axis due to the rotation of the spindle 22, thus performing cutting on the workpiece 100 held by the chuck table 10. Figure 1 As shown, the workpiece 100 held by the cutting unit 20 relative to the chuck table 10 is configured to move freely in the Y-axis direction via the Y-axis moving unit 32 of the moving unit 30 and to move freely in the Z-axis direction (lifting direction) via the Z-axis moving unit 33 of the moving unit 30.

[0035] like Figure 1 As shown, the moving unit 30 includes an X-axis moving unit 31, a Y-axis moving unit 32, and a Z-axis moving unit 33. The X-axis moving unit 31 moves the chuck table 10 relative to the cutting unit 20 along the X-axis direction (machining feed direction). The Y-axis moving unit 32 moves the cutting unit 20 relative to the chuck table 10 along the Y-axis direction (indexing feed direction). The Z-axis moving unit 33 moves the cutting unit 20 relative to the chuck table 10 along the Z-axis direction (cut-in feed direction). In this way, the moving unit 30 moves the chuck table 10 and the cutting unit 20 relative to each other.

[0036] The X-axis movement unit 31, Y-axis movement unit 32, and Z-axis movement unit 33 each have: a known ball screw configured to rotate freely about an axis; a known pulse motor for rotating the ball screw about an axis; and a known guide rail for supporting the chuck table 10 or cutting unit 20 so that it can move freely in the X-axis, Y-axis, or Z-axis directions. Furthermore, the X-axis movement unit 31, Y-axis movement unit 32, and Z-axis movement unit 33 each have a known position detector for detecting the position of the chuck table 10 or cutting unit 20 in the X-axis, Y-axis, or Z-axis directions, and output the position detected by the position detector to the control unit 50.

[0037] The cutting device 1 uses the moving unit 30 to position the cutting tool 21 mounted on the front end of the spindle 22 relative to the workpiece 100 held by the chuck table 10 at a predetermined position. The cutting tool 21 rotates while moving relative to the workpiece 100 held by the chuck table 10 along the predetermined dividing line 102, thereby using the cutting tool 21 to perform cutting on the workpiece 100 along the predetermined dividing line 102.

[0038] In this embodiment, the imaging unit 40 is mounted on the cutting unit 20 and moves integrally with it. The imaging unit 40 has an imaging element for capturing images of the workpiece 100 held by the chuck table 10 before and after machining. The imaging element is, for example, a CCD (Charge-Coupled Device) imaging element or a CMOS (Complementary Metal-Oxide-Semiconductor) imaging element. The imaging unit 40 captures images of the workpiece 100 held by the chuck table 10 to obtain images for alignment, i.e., for aligning the workpiece 100 with the cutting tool 21, and outputs the obtained images to the control unit 50. The imaging unit 40 also captures images of the workpiece 100 held by the chuck table 10 to obtain images for kerf inspection (i.e., to confirm the quality of the cutting grooves formed on the workpiece 100), and outputs the obtained images to the control unit 50.

[0039] The control unit 50 controls the operation of various components of the cutting device 1, thereby enabling the cutting device 1 to perform cutting processing of the workpiece 100 and the cutting tool shaping method of the embodiment. In this embodiment, the control unit 50 includes a computer system. The computer system included in the control unit 50 includes: an arithmetic processing unit having a microprocessor such as a CPU (Central Processing Unit); a storage device having a memory such as ROM (Read-Only Memory) or RAM (Random Access Memory); and an input / output interface device. The arithmetic processing unit of the control unit 50 performs arithmetic processing according to the computer program stored in the storage device of the control unit 50, and outputs control signals for controlling the cutting device 1 to each component of the cutting device 1 via the input / output interface device of the control unit 50.

[0040] Next, this specification will describe the processing operation of the cutting tool shaping method according to the embodiments using the accompanying drawings. Figure 3 This is a flowchart illustrating an example of the processing procedure of the cutting tool shaping method according to an embodiment. Figure 4 This is a cross-sectional view illustrating the shaping method of the cutting tool according to the embodiment. Figure 5 and Figure 6 Yes Figure 3 A three-dimensional diagram illustrating step 1001 of the plastic surgery preparation process. Figure 7 Yes Figure 3 A cross-sectional view illustrating the preparatory steps for plastic surgery, step 1001. Figure 8 and Figure 9 Yes Figure 3 A cross-sectional view illustrating shaping step 1002. Figure 10 and Figure 11 They are respectively for Figure 3 The sectional view and top view are used to illustrate an example of step 1003 for determining the inclined surface. Figure 12 Yes Figure 3 A top view illustrating an example of consumption measurement step 1004.

[0041] The cutting tool shaping method of the embodiment is an example of an action processing performed by the cutting device 1, such as... Figure 3 As shown, the cutting tool shaping method includes a shaping preparation step 1001, a shaping step 1002, an inclined surface determination step 1003, and a consumption measurement step 1004. The cutting tool shaping method of this embodiment is performed on the cutting tool 21, for example, before mounting the cutting tool 21 on the spindle 22 and using the cutting tool 21 to cut the workpiece 100.

[0042] Regarding the shaping method for cutting tools, in this embodiment, for example, the following method will be described: Figure 4 As shown, the cutting tool 21, a ceramic-bonded blade (Vitrified Bond Blade) with synthetic diamond (SD) abrasive grains of #800, a grit density of 100, an outer diameter of 58 mm, and a thickness of 0.2 mm, is shaped from a rectangular cross-section along its radial direction into a shape where an inclined surface 28 with a predetermined angle θ1 and a predetermined width W1 relative to the radial direction is formed on one side 26 of the cutting edge 21-1, and an inclined surface 29 with a predetermined angle θ2 and a predetermined width W2 relative to the radial direction is formed on the other side 27. Here, as... Figure 4 As shown, the widths W1 and W2 of the inclined surfaces 28 and 29 are the lengths along the thickness direction of the cutting edge 21-1 in the inclined surfaces 28 and 29. Furthermore, the method for shaping the cutting tool is not limited to this in the present invention; it can be implemented by shaping the cutting tool 21 with any abrasive grain, grain size, concentration, outer diameter, and thickness into the shape of inclined surfaces 28 and 29 with desired angles θ1 and θ2 on any side of the surfaces 26 and 27.

[0043] Furthermore, in this embodiment, the front end face 26 of the cutting edge 21-1 of the cutting tool 21 is in the positive direction of the axis of the spindle 22. Figure 4 On the -Y direction side, the other side 27 of the front end of the cutting edge 21-1 of the cutting tool 21 is in the negative direction of the axis of the spindle 22 ( Figure 4 (in the +Y direction). In this embodiment, the cutting tool shaping method is performed on both the positive and negative directions of the spindle 22's axial direction. That is, in this embodiment, the shaping step 1002 is performed on both the positive and negative directions of the spindle 22's axial direction, and inclined surfaces 28 and 29 are formed at the front ends of one face 26 and the other face 27 of the cutting edge 21-1 of the cutting tool 21, respectively. Before the implementation of the shaping step 1002, a shaping preparation step 1001 is performed according to these separately performed shaping steps 1002.

[0044] The shaping preparation step 1001 is to make the tip of the cutting edge 21-1 of the rotating cutting tool 21 move at a specified amount 201 (refer to...) Figure 7 The step of cutting into the state of the trimming plate 200 held by the chuck table 10. In the shaping preparation step 1001, firstly in this embodiment, for example, as shown in the example... Figure 5As shown, a plate-shaped trimming plate 200 is attached to the adhesive surface of the adhesive tape 105, which is attached in a manner that covers the opening on the back side of the annular frame 106, thereby housing the trimming plate 200 within the opening of the annular frame 106 on the adhesive tape 105. In the shaping preparation step 1001, the trimming plate 200 housed within the opening of the annular frame 106 on the adhesive tape 105 is then placed with the exposed side of one side of the trimming plate 200 facing upwards and the adhesive tape 105 side facing the holding surface 11 of the chuck table 10. The trimming plate 200 is attracted and held by the holding surface 11 of the chuck table 10 through the adhesive tape 105.

[0045] Here, the dressing plate 200 used in the cutting tool shaping method is a plate-shaped plate obtained by fixing abrasive grains with a bonding material in the dressing (rounding or sharpening) of the cutting tool 21. The dressing plate 200 is cut by the cutting tool 21, thereby causing the cutting edge 21-1 of the cutting tool 21 to wear, and the dressing plate 200 itself is also cut and removed by the cutting edge 21-1 of the cutting tool 21, forming cutting marks. Here, rounding means aligning the rotation center of the spindle 22 with the center of the outer edge of the cutting edge 21-1 of the cutting tool 21, and sharpening means that the cutting tool 21 is worn down to perform spontaneous sharpening that causes the abrasive grains to protrude, thereby restoring sharpness. In this embodiment, the dressing plate 200, according to the example of the cutting tool 21 described above, is, for example, a white fused alumina (WA) abrasive with a grit size of #800 and a concentration of 50, fixed in a plate shape with a resin binder. Furthermore, the dressing plate 200 is not limited to this in the present invention, and any dressing plate 200 with any abrasive, grit, concentration and binder can be used depending on the cutting tool 21.

[0046] In the shaping preparation step 1001, after the dressing plate 200 is attracted and held by the holding surface 11 of the chuck table 10 through the adhesive tape 105, the control unit 50 uses the moving unit 30 to align the cutting tool 21 mounted on the front end of the spindle 22 with a predetermined position (e.g., a position near the center of the dressing plate 200 where no cutting marks have formed) relative to the dressing plate 200 held by the chuck table 10. In the shaping preparation step 1001, the control unit 50 then rotates the aligned cutting tool 21 at a predetermined speed (e.g., 10000 rpm (rotations per minute) in this embodiment) while using the Z-axis moving unit 33 to move the cutting tool 21 relative to the dressing plate 200 in a direction of approaching each other along the feed direction. Figure 6 and Figure 7 As shown, the cutting edge 21-1 of the cutting tool 21 cuts into the trimming plate 200 by a specified amount 201.

[0047] Here, regarding the specified amount 201, when the shaping step 1002 is performed in the positive direction of the spindle 22's axial direction, it is appropriately set according to the radial length of the desired inclined surface 28 on the side of one face 26 of the cutting edge 21-1 of the cutting tool 21. As the radial length of the inclined surface 28 increases, the specified amount 201 is set larger. Furthermore, regarding the specified amount 201, when the shaping step 1002 is performed in the negative direction of the spindle 22's axial direction, it is appropriately set according to the radial length of the desired inclined surface 29 on the side of the other face 27 of the cutting edge 21-1 of the cutting tool 21, similarly to the positive direction. In this embodiment, the specified amount 201 is set to, for example, 0.7 mm.

[0048] The shaping step 1002 is performed after the shaping preparation step 1001, by moving the cutting tool 21 along the axis of the spindle 22 while raising the cutting tool 21, forming inclined surfaces 28 and 29 on one face (arbitrary face 26, 27) of the front end of the cutting edge 21-1 of the cutting tool 21. In the shaping step 1002, when it is necessary to form an inclined surface 28 on one face 26 of the front end of the cutting edge 21-1 of the cutting tool 21, the control unit 50, as follows: Figure 8 As shown, the cutting tool 21 is rotated at a predetermined speed (e.g., 10,000 rpm in this embodiment), and while moving the cutting tool 21 from the position positioned in the shaping preparation step 1001 towards the side of one face 26 (the positive direction of the axis of the spindle 22) via the Y-axis moving unit 32, it is also raised via the Z-axis moving unit 33. That is, in this shaping step 1002, the control unit 50 presses the side of the rotating cutting tool 21 towards the positive direction of the axis of the spindle 22 onto the dressing plate 200, while raising the cutting tool 21 in an oblique direction. Thus, in the shaping step 1002, as shown... Figure 8 As shown, the dressing plate 200 wears one side 26 of the cutting edge 21-1 of the cutting tool 21 in a lateral oblique direction to form an inclined surface 28, and the cutting edge 21-1 of the cutting tool 21 cuts away the dressing plate 200 to form a cutting mark 202 on the dressing plate 200.

[0049] Additionally, in the shaping step 1002, if an inclined surface 29 is to be formed on the other side 27 of the front end of the cutting edge 21-1 of the cutting tool 21, the control unit 50, as follows: Figure 9As shown, the cutting tool 21 is rotated at a predetermined speed (e.g., 10,000 rpm in this embodiment), and while moving the cutting tool 21 from the position positioned in the shaping preparation step 1001 towards the other side of the face 27 (the negative direction of the axis of the spindle 22) via the Y-axis moving unit 32, it is also raised via the Z-axis moving unit 33. That is, in this shaping step 1002, the control unit 50 presses the face 27 side of the rotating cutting tool 21 toward the dressing plate 200 in the negative direction of the axis of the spindle 22, while raising the cutting tool 21 in an oblique direction. Thus, in the shaping step 1002, as shown... Figure 9 As shown, the dressing plate 200 causes the other side 27 of the cutting edge 21-1 of the cutting tool 21 to be worn in a lateral oblique direction to form an inclined surface 29, and the cutting edge 21-1 of the cutting tool 21 cuts away the dressing plate 200 to form a cutting mark 203 on the dressing plate 200.

[0050] Here, in shaping step 1002, the relationship between the axial movement speed of the spindle 22 of the cutting tool 21 and the upward movement speed of the cutting tool 21 is appropriately set based on the angles θ1 and θ2 of the desired inclined surfaces 28 and 29 to be formed, and taking into account the rigidity of the cutting edge 21-1 of the cutting tool 21. For example, the ratio of the axial movement speed to the upward movement speed is set based on the tangent (tan) of angles θ1 and θ2. In this embodiment, for example, both angles θ1 and θ2 are 45°, and both the axial movement speed of the spindle 22 of the cutting tool 21 and the upward movement speed of the cutting tool 21 in shaping step 1002 are set to 0.1 mm / s.

[0051] Furthermore, in the shaping step 1002, the control unit 50 can move the cutting tool 21 along the axis of the spindle 22 while raising the cutting tool 21, and the chuck table 10 holding the dressing plate 200 is moved relative to the cutting tool 21 along the X-axis direction via the X-axis movement unit 31. Thus, in the shaping step 1002, the cutting edge 21-1 of the cutting tool 21 can be rounded while forming inclined surfaces 28 and 29 on any face 26 or 27 of the tip of the cutting edge 21-1. Here, in this embodiment, the moving speed of the chuck table 10 relative to the cutting tool 21 is set to, for example, 0.3 mm / s.

[0052] The inclined surface determination step 1003 is a step that, after performing the shaping step 1002, determines whether the shapes of the inclined surfaces 28 and 29 formed on the sides of any surfaces 26 and 27 of the cutting edge 21-1 of the cutting tool 21 through the previous shaping step 1002 are the desired shapes. In the inclined surface determination step 1003, in this embodiment, as follows... Figure 10As shown, the cutting tool 21, after the shaping step 1002, performs cutting machining in the X-axis direction, cutting through the specified plate 300 held by the chuck table 10. The machined plate 300 is then removed from the cutting device 1, as shown. Figure 11 As shown, the plate 300 after cutting is observed from the side along the X-axis direction using a microscope or the like. The inclined surfaces 302 and 303 of the groove 301 formed in the plate 300 along the X-axis direction are observed. It is then determined whether the shapes of the inclined surfaces 28 and 29 are the desired shapes.

[0053] Here, the plate 300 used in the inclined surface determination step 1003 is a plate-shaped plate made of a material whose hardness is sufficiently lower than that of the cutting edge 21-1 of the cutting tool 21. It is cut using the cutting tool 21, thereby preventing wear on the cutting edge 21-1 of the cutting tool 21. The plate 300 itself is cut away by the cutting edge 21-1 of the cutting tool 21, forming a cutting mark 302. In this embodiment, the plate 300 is, for example, a carbon plate or a silicon plate, depending on the example of the cutting tool 21 described above. However, the plate 300 is not limited to this in the present invention; any material with a hardness sufficiently lower than that of the cutting edge 21-1 of the cutting tool 21 can be used, depending on the cutting tool 21.

[0054] In the tilt surface determination step 1003, in this embodiment, the shape determination of the tilt surfaces 28 and 29 is performed by the operator of the cutting device 1. However, this invention is not limited to this. Alternatively, the measurement results of the angles θ1 and θ2 and the widths W1 and W2 of the tilt surfaces 28 and 29 obtained by the operator's observation can be input from the input unit (not shown) to the cutting device 1, and the control unit 50 of the cutting device 1, which receives the input, can determine whether the measurement results are the desired angles θ1 and θ2 and widths W1 and W2. In the case where the tilt surface determination step 1003 is performed by the control unit 50, as will be described later, the control unit 50 continues to automatically perform the subsequent consumption measurement step 1004 and the next shaping preparation step 1001 and shaping step 1002 based on the determination result.

[0055] Furthermore, the tilt surface determination step 1003 in this invention is not limited to observing the tilt surfaces 302 and 303 of the groove 301 formed in the X-axis direction of the plate 300. It can also be determined by observing the end of the groove formed by a so-called cleaving cut through the same plate 300 to a certain depth using the cutting tool 21. Alternatively, the tilt surface determination step 1003 can be performed by observing the tip of the cutting edge 21-1 of the cutting tool 21 after the previous shaping step 1002 in the circumferential direction using a contour microscope (not shown) provided with the cutting device 1, thereby determining the tilt surfaces 28 and 29. Alternatively, the groove 301 formed in the plate 300 can be observed from the side of the plate 300, thereby determining the tilt surfaces 28 and 29.

[0056] In the cutting tool shaping method of the embodiment, such as Figure 3 As shown, in the case where the tilted surfaces 28 and 29 on the side that were shaped by the previous shaping step 1002 are determined to have the desired shape through the tilted surface determination step 1003 (in Figure 3 In the inclined surface determination step 1003, if it is true, the series of processes that form inclined surfaces 28 and 29 on the sides of the determined consistent surfaces 26 and 27 are completed. On the other hand, in the cutting tool shaping method of the embodiment, such as Figure 3 As shown, in the case where the shape of the inclined surfaces 28 and 29, which were determined by the inclined surface determination step 1003 to have been shaped by the previous shaping step 1002, does not become the desired shape (in... Figure 3 If the tilt surface determination step 1003 is not successful, after performing the consumption measurement step 1004 (described later), a series of processes (shaping preparation step 1001 and shaping step 1002) are repeated to form the tilt surfaces 28 and 29 on the sides of the surfaces 26 and 27 that are determined not to have the desired shape. In this way, the cutting tool shaping method of the embodiment repeats the shaping preparation step 1001 and shaping step 1002 on each surface 26 and 27 of the front end of the cutting edge 21-1 of the cutting tool 21 until the tilt surfaces 28 and 29 become the desired shape (angles θ1, θ2 and widths W1, W2).

[0057] The consumption measurement step 1004 is a step that measures the consumption of the cutting edge 21-1 of the cutting tool 21 after the shaping step 1002 is performed and before the shaping preparation step 1001 is performed again. In this embodiment, the consumption measurement step 1004 is performed when the shaping preparation step 1001 and the shaping step 1002 are performed again based on the result of the tilt surface determination step 1003 performed after the shaping step 1002 is performed.

[0058] In this embodiment, the consumption measurement step 1004 uses the cutting tool detection unit 60 located below the cutting unit 20 in the cutting device 1. Figure 12 As shown in the diagram, this will be implemented. Figure 12 As shown, the cutting tool detection unit 60 includes a groove component 61, a light-emitting part 62, a light-receiving part 63, a light source 64, a photoelectric conversion part 65, a reference voltage setting part 66, a voltage comparison part 67, an end position detection part 68, a calculation part 69, and a position correction part 70.

[0059] The groove component 61 has a groove 61-1 formed along the X-axis direction, into which the cutting edge 21-1 of the cutting tool 21 can enter. A light-emitting part 62 and a light-receiving part 63, each having an optical axis along the Y-axis, are arranged facing each other on both sides of the groove 61-1. The light-emitting part 62 is optically connected to a light source 64 via an optical fiber or similar means, emitting light from the light source 64 toward the light-receiving part 63. The light-receiving part 63 is optically connected to a light-receiving element via an optical fiber or similar means, detecting light emitted from the light-emitting part 62 and reaching the light-receiving part 63. The light-receiving part 63 is optically connected to a photoelectric conversion unit 65 via an optical fiber or similar means, transmitting light received from the light-emitting part 62 to the photoelectric conversion unit 65.

[0060] The photoelectric conversion unit 65 outputs a voltage corresponding to the amount of light emitted from the light-receiving unit 63 to the voltage comparison unit 67. As the tip of the cutting edge 21-1 of the cutting tool 21 enters the groove 61-1, the amount by which the cutting edge 21-1 of the cutting tool 21 blocks the space between the light-emitting unit 62 and the light-receiving unit 63 increases, and the output voltage from the photoelectric conversion unit 65 gradually decreases. In this embodiment, the photoelectric conversion unit 65 outputs a voltage of 5V (maximum voltage) when the ratio of the amount of light received by the light-receiving unit 63 to the amount of light emitted by the light-emitting unit 62, i.e., the light reception rate, is 100%, and outputs a voltage of 0V (minimum voltage) when the light reception rate is 0%. The photoelectric conversion unit 65 is configured to make the output voltage a predetermined reference voltage (3V in this embodiment) when the amount of light received by the light-receiving unit 63 reaches a predetermined amount of light, that is, when the tip of the cutting edge 21-1 of the cutting tool 21 reaches a predetermined position between the light-emitting unit 62 and the light-receiving unit 63. The reference voltage setting unit 66 outputs the set reference voltage to the voltage comparison unit 67. In this embodiment, the specified reference voltage is 3V as described above.

[0061] The voltage comparison unit 67 compares the output from the photoelectric conversion unit 65 with the reference voltage set by the reference voltage setting unit 66. When the output from the photoelectric conversion unit 65 reaches the reference voltage, it outputs a signal indicating this to the end position detection unit 68. The end position detection unit 68 outputs the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction at the moment of output from the voltage comparison unit 67 to the calculation unit 69. The calculation unit 69 outputs the difference between the pre-stored reference position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction and the position output from the end position detection unit 68 to the position correction unit 70. The position correction unit 70 corrects the position of the tip of the cutting edge 21-1 of the cutting tool 21 in the Z-axis direction based on the value output from the calculation unit 69.

[0062] Furthermore, in this embodiment, the functions of the photoelectric conversion unit 65, the reference voltage setting unit 66, the voltage comparison unit 67, the calculation unit 69, and the position correction unit 70 are implemented within the control unit 50 by the execution of a computer program stored in the storage device of the control unit 50 by the arithmetic processing device of the control unit 50.

[0063] In the consumption measurement step 1004, the calculation unit 69 obtains the Z-axis position of the tip of the cutting edge 21-1 of the cutting tool 21 via the end position detection unit 68. In the consumption measurement step 1004, the calculation unit 69 then calculates the difference between the Z-axis position of the tip of the cutting edge 21-1 of the cutting tool 21 obtained after the previous shaping step 1002 and the Z-axis position of the tip of the cutting edge 21-1 of the cutting tool 21 obtained before the previous shaping step 1002. The calculated difference is detected as the radial consumption (wear amount) of the tip of the cutting edge 21-1 of the cutting tool 21 during the previous shaping preparation step 1001 and shaping step 1002, and the detected consumption amount is output to the control unit 50.

[0064] In addition, in the consumption measurement step 1004, in this invention, the consumption of the cutting edge 21-1 of the cutting tool 21 can be measured by using the length of the groove formed by the cutting tool 21 in the specified plate 300 by the cutting tool 21 through cleaving cut, which is not limited to the method of using the cutting tool detection unit 60.

[0065] In the cutting tool shaping method of the embodiment, in the second and subsequent shaping preparation steps 1001, the control unit 50 moves the cutting tool 21 relative to the dressing plate 200 in a direction that is closer to each other along the cutting feed direction, according to the amount of consumption of the cutting edge 21-1 of the cutting tool 21 obtained in the previous consumption measurement step 1004, and uses the cutting edge 21-1 of the cutting tool 21 to cut into the dressing plate 200. Therefore, in the second and subsequent shaping preparation steps 1001, even if the cutting edge 21-1 of the cutting tool 21 is consumed due to the previous shaping preparation steps 1001 and shaping steps 1002, the amount of consumption can be taken into account so that the cutting edge 21-1 of the cutting tool 21 cuts into the dressing plate 200 by a predetermined amount 201.

[0066] In the cutting tool shaping method of the embodiment, the process is carried out as described above on one face 26 side of the front end of the cutting edge 21-1 of the cutting tool 21 (in the positive direction of the axial direction of the spindle 22). Figure 3 After the desired inclined surface 28 is formed by a series of processes in the cutting tool shaping method shown, independently of this series of processes, the other side 27 of the front end of the cutting edge 21-1 of the cutting tool 21 (the negative direction of the axial direction of the spindle 22) is further subjected to the above-described process. Figure 3 The cutting tool shaping method shown involves a series of processes to form the desired inclined surface 29, thereby implementing it on... Figure 4 The cutting edge 21-1 of the cutting tool 21 shown is formed by shaping the two faces 26 and 27 to form the desired inclined surfaces 28 and 29.

[0067] Regarding the cutting tool shaping method of the embodiment having the structure described above, by simply having the cutting tool 21 cut into the dressing plate 200 used daily for dressing (rounding or sharpening) the cutting tool 21 and rising at an angle, it is easy to form inclined surfaces 28 and 29 at the front end of the cutting tool 21. Therefore, it has the following effect: the inclined shape of the cutting tool 21 can be easily and cost-effectively shaped without introducing new equipment or components.

[0068] Furthermore, in the past, when purchasing pre-shaped cutting tools with an inclined tip from the manufacturer, the center of the outer edge of the cutting edge of the cutting tool would be slightly offset from the rotation center of the spindle when mounted on the spindle, resulting in an off-center state. However, in the cutting tool shaping method of this embodiment, the shape of the cutting tool 21 is shaped after mounting on the spindle 22, thus achieving the effect of shaping the cutting tool 21 without off-center positioning. In addition, the cutting tool shaping method of this embodiment also has the following effect: even if the cutting tool 21 is deformed, its shape can be easily and readily reshaped.

[0069] [Variation Example]

[0070] The shaping methods of the cutting tools in variations 1 and 2 of the present invention will be described with reference to the accompanying drawings. Figure 13 and Figure 14 These are cross-sectional views illustrating the shaping methods of the cutting tools in variations 1 and 2, respectively. Figure 13 and Figure 14 In this document, parts that are the same as those in the implementation method are marked with the same reference numerals, and the description is omitted.

[0071] like Figure 4 and Figure 13 As shown, the cutting tool shaping method of Modification 1 differs from that of the cutting tool shaping method of Embodiment 1 in that the shape of the cutting tool 21 before shaping is different, while other structures are the same as in Embodiment 1. In Modification 1, the cutting tool 21 before shaping has inclined surfaces 28 and 29 formed on the faces 26 and 27 at the tip of the cutting edge 21-1, respectively, but its shape is deformed due to cutting processing of the workpiece 100, etc. The cutting tool shaping method of Modification 1 can shape the cutting tool 21 before shaping with such a shape into a shape with the desired inclined surfaces 28 and 29 using the same method as that of the cutting tool shaping method of Embodiment 1.

[0072] like Figure 4 and Figure 14 As shown, the cutting tool shaping method of Modification 2 differs from that of the embodiment in that the shape of the cutting tool 21 before and after shaping is different, while other structures are the same as in the embodiment. In Modification 2, the cutting tool 21 before shaping does not form an inclined surface 29 on the face 27 at the tip of the cutting edge 21-1, but forms an inclined surface 28 on the face 26 at the tip of the cutting edge 21-1 with a width W1 equal to the thickness of the cutting edge 21-1, which is larger than that in the embodiment. However, the shape is deformed due to the cutting process of the workpiece 100, etc. In addition, in Modification 2, the cutting tool 21 after shaping does not form an inclined surface 29 on the face 27 at the tip of the cutting edge 21-1, but forms a desired inclined surface 28 on the face 26 at the tip of the cutting edge 21-1 with a width W1 larger than that in the embodiment. The cutting tool shaping method of Modification 2 can shape the cutting tool 21 with such a shape into a shape having a desired inclined surface 28 by performing the same method as the cutting tool shaping method of the embodiment on only the front face 26 side of the cutting edge 21-1 of the cutting tool 21.

[0073] Furthermore, the present invention is not limited to the embodiments described above. That is, various modifications and implementations can be made without departing from the spirit of the present invention.

Claims

1. A method of dressing a cutting tool, using a cutting apparatus having a chuck table, a cutting unit, and a moving unit to dress the cutting tool, wherein, The chuck table uses a holding surface to hold the workpiece. The cutting unit, with an annular cutting tool mounted on a spindle having an axis parallel to the holding surface, cuts the workpiece held by the chuck table. The moving unit causes the chuck table and the cutting unit to move relative to each other. The shaping method for this cutting tool has the following steps: The shaping preparation step involves positioning the tip of the rotating cutting tool into the dressing plate held by the chuck table by a specified amount; and In the shaping step, after the shaping preparation step is performed, the cutting tool is moved along the axis of the spindle while being raised, forming an inclined surface on one side of the cutting tool's front end. Repeat the shaping preparation step and the shaping step until the inclined surface of the cutting tool reaches the desired angle or width.

2. The cutting tool shaping method according to claim 1, wherein, The shaping step is performed on both the positive and negative directions of the spindle axis, forming inclined surfaces at the front ends of one and the other faces of the cutting tool.

3. The cutting tool shaping method according to claim 1 or 2, wherein, The cutting tool shaping method includes the following consumption measurement step: after performing the shaping step and before performing the shaping preparation step again, the consumption of the cutting tool is measured. Even if the cutting tool is worn out, it is still used to cut in at a specified depth during the shaping preparation step.

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