Gas circulating device, gas circulating method, pneumatic device, and semiconductor apparatus

Abstract

The embodiment of the present application discloses a kind of gas circulation device, gas circulation method, pneumatic device and semiconductor equipment, gas circulation device is applied to the pneumatic device including electromagnetic valve device and cylinder device, and it is connected between electromagnetic valve device and cylinder device.Gas circulation device includes valve core structure, first circulation cavity and second circulation cavity;Valve core structure is used to be collected and stored when moving along the first direction, the compressed gas that the first cylinder cavity of cylinder device is discharged via electromagnetic valve device by first circulation cavity, and the compressed gas stored by second circulation cavity and the compressed gas provided by electromagnetic valve device are collectively inflated for the second cylinder cavity of the cylinder device.It is like this, for the compressed gas discharged by cylinder device, it is recycled by gas circulation device, and the recycled compressed gas can also be used to inflate cylinder device, so as to realize the recycling of compressed gas, reduce compressed gas consumption, save cost.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a gas circulation device, a gas circulation method, a pneumatic device, and a semiconductor equipment. Background Technology

[0002] Existing semiconductor equipment typically contains numerous pneumatic components used for the movement of valves, levers, or drive discs within the equipment. Because pneumatic components offer both stability and durability, they can meet the demands of long-term, high-frequency operation in semiconductor equipment, and are therefore widely used in various types of machines.

[0003] Currently, the widespread application of pneumatic components requires a stable supply of compressed air, which is consumed in large quantities. These components rely on compressed air filling cylinders to drive connecting rods, and then returning to their original position via springs, gravity, or compressed air. Simultaneously, the gas filling the cylinders is discharged to the outside through exhaust ports or pressure relief valves. However, because pneumatic components operate very frequently, many valves are constantly filling and venting, resulting in a significant amount of compressed air being discharged and wasted, leading to a waste of compressed air. Summary of the Invention

[0004] This application provides a gas circulation device, a gas circulation method, a pneumatic device, and a semiconductor device that can reduce the consumption of compressed gas, avoid waste, and achieve cost savings.

[0005] The technical solution of this application is implemented as follows:

[0006] In a first aspect, embodiments of this application provide a gas circulation device applied to a pneumatic device including a solenoid valve device and a cylinder device, wherein the gas circulation device is connected in series between the solenoid valve device and the cylinder device; the gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber; wherein...

[0007] The valve core structure is used to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device through the first circulation chamber via the solenoid valve device when moving in the first direction, and to charge the second cylinder chamber of the cylinder device with the compressed gas stored in the second circulation chamber and the compressed gas provided by the solenoid valve device.

[0008] Secondly, embodiments of this application provide a gas circulation method, which is applied to a gas circulation device connected in series between a solenoid valve device and a cylinder device. The gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber. The method includes:

[0009] When the valve core structure moves along the first direction, it controls the first circulation chamber to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device after passing through the solenoid valve device, and controls the compressed gas stored in the second circulation chamber and the compressed gas provided by the solenoid valve device to jointly inflate the second cylinder chamber of the cylinder device.

[0010] Thirdly, embodiments of this application provide a pneumatic device, which includes a cylinder device, a solenoid valve device, and a gas circulation device as described in the first aspect.

[0011] Fourthly, embodiments of this application provide a semiconductor device that includes the pneumatic device as described in the third aspect.

[0012] This application provides a gas circulation device, gas circulation method, pneumatic device, and semiconductor device. The gas circulation device is applied to a pneumatic device including a solenoid valve device and a cylinder device, and is connected in series between the solenoid valve device and the cylinder device. The gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber. The valve core structure, when moving in a first direction, collects and stores compressed gas discharged from the first cylinder chamber of the cylinder device via the first circulation chamber after passing through the solenoid valve device. The compressed gas stored in the second circulation chamber, together with the compressed gas provided by the solenoid valve device, inflates the second cylinder chamber of the cylinder device. In this way, the compressed gas discharged from the cylinder device is recovered through the gas circulation device, and the recovered compressed gas can also be used to inflate the cylinder device, thereby achieving the recycling of compressed gas, reducing compressed gas consumption, avoiding waste, and achieving cost savings. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the hardware structure of a pneumatic device provided in an embodiment of this application;

[0014] Figure 2 A schematic diagram illustrating the working principle of a dual-acting cylinder provided in this application embodiment;

[0015] Figure 3 This is a schematic diagram illustrating the working principle of a gas solenoid valve provided in an embodiment of this application;

[0016] Figure 4 This is a schematic diagram of the composition and structure of a gas circulation device provided in an embodiment of this application;

[0017] Figure 5 This is a schematic diagram of the hardware structure of a gas circulation device provided in an embodiment of this application;

[0018] Figure 6 A schematic diagram of the hardware structure of another pneumatic device provided in an embodiment of this application;

[0019] Figure 7 This is a schematic diagram illustrating the working principle of a gas circulation device provided in an embodiment of this application;

[0020] Figure 8 A schematic diagram of the hardware structure of another pneumatic device provided in the embodiments of this application;

[0021] Figure 9 This is a schematic diagram illustrating the working principle of another gas circulation device provided in an embodiment of this application;

[0022] Figure 10 A schematic diagram of the hardware structure of another gas circulation device provided in the embodiments of this application;

[0023] Figure 11 A schematic diagram illustrating the relationship between the supply pressure at the pipeline front end and the compressed air flow rate is provided for an embodiment of this application.

[0024] Figure 12 A schematic diagram illustrating the relationship between the supply pressure at the pipeline front end and the average gas consumption of the cylinder, provided for an embodiment of this application;

[0025] Figure 13 A schematic flowchart of a gas circulation method provided in an embodiment of this application;

[0026] Figure 14 This is a schematic diagram of the composition structure of a pneumatic device provided in an embodiment of this application;

[0027] Figure 15 This is a schematic diagram of the composition structure of a semiconductor device provided in an embodiment of this application. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are only for explaining the relevant application and not for limiting the application. Furthermore, it should be noted that, for ease of description, only the parts related to the relevant application are shown in the accompanying drawings.

[0029] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used herein is for the purpose of describing embodiments of this application only and is not intended to limit this application.

[0030] In the following description, references are made to “some embodiments,” which describe a subset of all possible embodiments. However, it is understood that “some embodiments” may be the same subset or different subsets of all possible embodiments and may be combined with each other without conflict.

[0031] It should be noted that the terms "first, second, and third" used in the embodiments of this application are merely to distinguish similar objects and do not represent a specific ordering of objects. It is understood that "first, second, and third" can be interchanged in a specific order or sequence where permitted, so that the embodiments of this application described herein can be implemented in an order other than that illustrated or described herein.

[0032] Currently, semiconductor equipment typically contains numerous pneumatic components used for the movement of valves, levers, or drive discs within the equipment. Because pneumatic components offer both stability and durability, they can meet the demands of long-term, high-frequency operation in semiconductor equipment, and are therefore widely used in various types of machines.

[0033] In one embodiment of this application, see [link to embodiment]. Figure 1 This illustration shows a schematic diagram of the hardware structure of a pneumatic device provided in an embodiment of this application. Figure 1 As shown, the pneumatic device can consist of a double-acting cylinder and a gas solenoid valve, and may also include an A-line and a B-line connected between the double-acting cylinder and the gas solenoid valve.

[0034] See Figure 2 It shows a schematic diagram illustrating the working principle of a dual-acting cylinder provided in an embodiment of this application. Figure 2 (a) in the diagram represents the working principle of the piston rod when it is withdrawing. Figure 2 (b) in the diagram represents a schematic representation of the working principle when the piston rod retracts. For example... Figure 2 As shown, this dual-acting cylinder can include chamber 1, chamber 2, piston, piston rod, air port 1 (A path), and air port 1 (B path). Different air ports can supply air to different chambers, enabling the piston and piston rod to move in different directions. Furthermore, this type of dual-acting cylinder is widely used in chamber valves of semiconductor equipment, characterized by frequent operation and the requirement for high stability.

[0035] See Figure 3 This illustration shows a schematic diagram illustrating the working principle of a gas solenoid valve provided in an embodiment of this application. Figure 3 (a) in the diagram represents the working principle of the gas solenoid valve when gas is supplied to chamber 3. Figure 3 (b) in the diagram represents the working principle of the gas solenoid valve when gas is supplied to chamber 4. Figure 3As shown, the gas solenoid valve may include an air supply port, a cavity 3, a cavity 4, an exhaust port 1, an exhaust port 2, a sealing structure, an A-path air port 2, and a B-path air port 2. The sealing structure seals the cavity to prevent air leakage. The air supply port supplies air to different cavities, and then the different air ports supply air to different cavities of the double-acting cylinder, so as to realize that the piston and piston rod of the double-acting cylinder move in different directions.

[0036] When controlling a double-acting cylinder, it is possible to... Figure 3 The pneumatic solenoid valve shown is used for control. The double-acting cylinder is connected to the gas solenoid valve by an air pipe to form a pneumatic circuit. The opening and closing of the valve core of the gas solenoid valve can control the charging and discharging of the double-acting cylinder, thereby realizing the reciprocating motion of the piston. However, the frequent operation of the double-acting cylinder requires a large amount of compressed air.

[0037] Understandably, see Figure 2 (a) and Figure 3 In step (a), when the piston rod is withdrawn, compressed air needs to be supplied to the chamber 3 of the gas solenoid valve through the air supply port. The compressed air enters the chamber 1 of the double-acting cylinder through the A air passage port 2 and then through the A air passage port 1, providing pressure to the piston to push the piston and piston rod towards the chamber 2. At this time, the compressed air in the chamber 2 will be squeezed out. The squeezed-out compressed air can enter the chamber 4 of the gas solenoid valve through the B air passage port 1 and then through the B air passage port 2, and is discharged from the exhaust port 2.

[0038] It is also understandable that, see Figure 2 (b) and Figure 3 In (b), when the piston rod retracts, compressed air is supplied to the cavity 4 of the gas solenoid valve through the air supply port. This compressed air enters the cavity 2 of the double-acting cylinder via air port 2 of air path B, then through air path B port 1, providing pressure to the piston and pushing the piston and piston rod towards cavity 1. At this time, the compressed air in cavity 1 is squeezed out. The squeezed-out compressed air can enter the cavity 3 of the gas solenoid valve via air port 1 of air path A, through air path A port 2, and is discharged from exhaust port 1. Air port 1 of air path A and air port 1 of air path B are either the exhaust port or the pressure relief valve port of the double-acting cylinder.

[0039] In the aforementioned pneumatic device, regardless of which pipeline supplies the air, excess compressed air needs to be discharged through exhaust port 1 or exhaust port 2. In this embodiment, when handling exhaust, a silencer can be installed at the exhaust port to reduce noise, and the compressed air can be discharged into the atmosphere through the exhaust port of the gas solenoid valve. However, while this reduces noise and allows for flexible control of the cylinder, the frequent movements of the dual-action cylinder consume a large amount of compressed air, resulting in a significant waste of resources due to the discharge of a large amount of compressed air.

[0040] Based on this, in order to save compressed air, the pneumatic device provided in the embodiments of this application can be further improved as follows.

[0041] In another embodiment of this application, see Figure 4 This illustrates a schematic diagram of the structural composition of a gas circulation device 40 provided in an embodiment of this application. Figure 4 As shown, the gas circulation device 40 can be applied to pneumatic devices including a solenoid valve device and a cylinder device, with the gas circulation device 40 connected in series between the solenoid valve device and the cylinder device. Figure 4 As shown, the gas circulation device 40 may include a valve core structure 401, a first circulation chamber 402, and a second circulation chamber 403; wherein,

[0042] The valve core structure 401 is used to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device through the first circulation chamber 402 after passing through the solenoid valve device when moving in the first direction, and to charge the second cylinder chamber of the cylinder device with the compressed gas stored in the second circulation chamber 403 and the compressed gas provided by the solenoid valve device.

[0043] It should be noted that the gas circulation device 40 provided in this application embodiment is applied in a pneumatic device, such as an etching machine. The structure of the solenoid valve device (e.g., a gas solenoid valve) and cylinder device (e.g., a double-acting cylinder) included in the pneumatic device can be referred to Figure 1 , Figure 2 and Figure 3 As shown. For Figure 1 The pneumatic device shown can be directly connected between the gas solenoid valve and the double-acting cylinder provided in this application embodiment to the gas circulation device 40, without damaging the original structure of the pneumatic device, and without requiring any modification to the gas solenoid valve and the double-acting cylinder.

[0044] Based on this, see Figure 5 This diagram illustrates the hardware structure of a gas circulation device 40 according to an embodiment of this application. For a clearer understanding of the working principle of the gas circulation device 40, and based on its specific application in pneumatic devices, please refer to... Figure 6 It shows a schematic diagram of the hardware structure of another pneumatic device 60 provided in an embodiment of this application.

[0045] like Figure 6 As shown, the pneumatic device 60 includes the gas circulation device 40 described in the embodiments of this application, and may also include a solenoid valve device 601 and a cylinder device 602, wherein the solenoid valve device 601 is preferably a gas solenoid valve (e.g., Figure 3 The solenoid valve device shown may include a first solenoid valve chamber 6011 and a second solenoid valve chamber 6012; the cylinder device 602 is preferably a double-acting cylinder (such as...). Figure 2 The cylinder device 602 (shown as a dual-acting cylinder) may include a first cylinder chamber 6021, a second cylinder chamber 6022, and a piston rod 6023.

[0046] See Figure 7 This illustrates a schematic diagram of the working principle of a gas circulation device provided in an embodiment of this application. According to... Figure 7 The working principle is as follows: when the valve core structure of the gas circulation device 40 moves along the first direction, the flow direction of the compressed gas in the pneumatic device 60 is as follows. Figure 6 As shown by the black arrow in the image.

[0047] At this time, the piston rod 6023 of the cylinder device 602 is pulled out. The compressed gas discharged from the first cylinder chamber 6021 of the cylinder device 602 will pass through the gas circulation device 40 and the solenoid valve device 601 via the A gas path, and finally enter the first circulation chamber 402 for storage. At the same time, the compressed gas originally stored in the second circulation chamber 403, together with the compressed gas provided by the solenoid valve device 601, fills the second cylinder chamber 6022 of the cylinder device 602.

[0048] It should also be noted that the gas circulation device provided in this application embodiment can be applied not only to devices driven by compressed air, but also to devices driven by other gases. This application embodiment does not make any specific limitations in this regard.

[0049] In some embodiments, the valve core structure 401 is also used to collect and store the compressed gas discharged from the second cylinder chamber 6023 of the cylinder device 602 via the second circulation chamber 403 after passing through the solenoid valve device 601 when moving in the second direction, and to charge the first cylinder chamber 6021 of the cylinder device 602 together with the compressed gas stored in the first circulation chamber 402 and the compressed gas provided by the solenoid valve device 601.

[0050] It should be noted that, in this embodiment, both the first circulation chamber 402 and the second circulation chamber 403 simultaneously serve the functions of storing compressed gas and supplying gas to the chambers of the cylinder device 602. See also Figure 8 This illustrates a schematic diagram of the hardware structure of another pneumatic device 60 provided in this application embodiment when the valve core structure 401 moves along the second direction. Figure 6 In comparison, the two are identical in terms of hardware structure, except for the different flow direction of compressed gas.

[0051] See Figure 9 This illustrates a schematic diagram of the working principle of another gas circulation device provided in this application embodiment when the valve core structure 401 moves along the second direction. Figure 9 The working principle is as follows: when the valve core structure 401 of the gas circulation device 40 moves in the second direction, the flow direction of the compressed gas in the pneumatic device 60 is as follows. Figure 8 As shown by the black arrow in the image.

[0052] At this time, the piston rod 6023 of the cylinder device 602 retracts, and the compressed gas discharged from the second cylinder chamber 6022 of the cylinder device 602 passes through the gas circulation device 40 and the solenoid valve device 601 via the B air passage, and finally enters the second circulation chamber 403 for storage; at the same time, the compressed gas originally stored in the first circulation chamber 402, together with the compressed gas provided by the solenoid valve device 601, inflates the first cylinder chamber 6021 of the cylinder device 602.

[0053] As can be seen, by installing the gas circulation device provided in this embodiment between the solenoid valve device 601 and the cylinder device 602, the gas discharged from the cylinder device 602 is recycled. Connecting the exhaust port of the solenoid valve device to the gas circulation device 40 avoids the waste of directly discharging exhaust into the air, effectively saving energy and reducing costs. After applying the gas circulation device 40 to the cylinder device 602 (such as a double-acting cylinder), the compressed air discharged from the exhaust port of the cylinder device 602 is reused in the drive circuit, thus achieving recycling. Furthermore, the gas circulation device 40 can be extended to more gas-driven circuits, resulting in significant energy savings after widespread application.

[0054] In some embodiments, see Figure 7 and Figure 9 The gas circulation device 40 may further include a connecting rod 404, which is connected to the valve core structure 401; wherein,

[0055] The connecting rod 404 is used to drive the valve core structure 401 to move in a first direction when a first driving command is received, so that the gas circulation device 40 is in a first working state; or...

[0056] The connecting rod 404 is also used to drive the valve core structure 401 to move in a second direction when a second driving command is received, so that the gas circulation device 40 is in a second working state.

[0057] It should be noted that in the gas circulation device 40, the connecting rod 404 can be a spring-driven structure or any other structure known in the art that can drive the valve core structure 401 to move. This application embodiment does not specifically limit this.

[0058] When the connecting rod 404 receives the first driving command, it drives the valve core structure 401 to move in the first direction, thereby putting the gas circulation device 40 into the first working state, that is: the first circulation chamber 402 stores the compressed gas discharged from the first cylinder chamber 6021 of the cylinder device 602, and the second circulation chamber 403 uses its own stored compressed gas and the compressed gas provided by the solenoid valve device 601 to supply gas to the second cylinder chamber 6022 of the cylinder device 602.

[0059] When the connecting rod 404 receives the second driving command, it drives the valve core structure 401 to move in the second direction, thereby putting the gas circulation device 40 into the second working state, that is: the second circulation chamber 403 stores the compressed gas discharged from the second cylinder chamber 6022 of the cylinder device 602, and the first circulation chamber 402 uses its own stored compressed gas and the compressed gas provided by the solenoid valve device 601 to supply gas to the first cylinder chamber 6021 of the cylinder device 602.

[0060] Thus, by receiving different driving commands, the connecting rod 404 drives the valve core structure 401 in different directions, thereby putting the gas circulation device 40 into different working states. Furthermore, in this embodiment, when the gas circulation device 40 is applied to the pneumatic device 60, the gas circulation device 40 and the solenoid valve device 601 can receive the same control commands (e.g., receive the same input / output (IO) signals) to jointly supply air to the cylinder device 602 and cooperate in completing the recovery and storage of compressed gas.

[0061] In some embodiments, see Figure 7 and Figure 9 The gas circulation device 40 may further include a first gas recovery hole 405 and a second gas recovery hole 406. The first gas recovery hole 405 is disposed on the side wall of the first circulation chamber 402, and the second gas recovery hole 406 is disposed on the side wall of the second circulation chamber 403.

[0062] The first gas recovery hole 405 is used to introduce the compressed gas discharged from the first cylinder chamber 6021 into the first circulation chamber 402 after passing through the solenoid valve device 601 when the gas circulation device 40 is in the first working state.

[0063] The second gas recovery port 406 is used to guide the compressed gas discharged from the second cylinder chamber 6022 into the second circulation chamber 403 via the solenoid valve device 601 when the gas circulation device 40 is in the second working state.

[0064] It should be noted that, Figure 6 and Figure 7 This illustrates the working principle of the gas circulation device 40 when it is in its first working state. Specifically, in the first working state, the compressed gas discharged from the first cylinder chamber 6021 is introduced into the first circulation chamber 402 through the B gas path via the solenoid valve device 601 (specifically, through the first solenoid valve chamber 6011) and then through the first gas recovery hole 405.

[0065] It should also be noted that, Figure 8 and Figure 9 This illustrates the working principle of the gas circulation device 40 when it is in the second working state. Specifically, in the second working state, the compressed gas discharged from the second cylinder chamber 6022 will pass through the A gas path via the solenoid valve device 601 (specifically, through the second solenoid valve chamber 6012) and then be introduced into the second circulation chamber 403 through the second gas recovery hole 406.

[0066] In some specific embodiments, the connecting rod 404 is specifically used to drive the valve core structure 401 to move along a first direction, and stops moving when it reaches the position where the first gas recovery hole 405 is open and the second gas recovery hole 406 is closed, so that the gas circulation device 40 is in a first working state.

[0067] It should be noted that, with Figure 6 and Figure 7 For example, when the valve core structure 401 is driven to move along the first direction by the connecting rod 404 so that the gas circulation state 40 is in the first working state, it can be achieved in the following way: When the valve core structure 401 moves along the first direction, when the first gas recovery hole 405 is opened and the second gas recovery hole 406 is closed, at this time, since the first gas recovery hole 405 is open, compressed gas can enter the first circulation chamber 402 through the first gas recovery hole 405 to realize gas recovery; since the second gas recovery hole 406 is closed, compressed gas will not enter the second circulation chamber 403 through the second gas recovery hole 406.

[0068] In some other specific embodiments, the connecting rod 404 is specifically used to drive the valve core structure 401 to move in the second direction, and stops moving when it reaches the position of closing the first gas recovery hole 405 and opening the second gas recovery hole 406, so that the gas circulation device 40 is in the second working state.

[0069] It should also be noted that, with Figure 8 and Figure 9 For example, when the valve core structure 401 is driven to move along the second direction by the connecting rod 404 so that the gas circulation state 40 is in the second working state, it can be achieved in the following way: When the valve core structure 401 moves along the second direction, when the first gas recovery hole 405 is closed and the second gas recovery hole 406 is open, at this time, since the first gas recovery hole 405 is closed, the compressed gas will not enter the first circulation chamber 402 through the first gas recovery hole 405; since the second gas recovery hole 406 is open, the compressed gas can enter the second circulation chamber 403 through the second gas recovery hole 406, thereby realizing gas recovery.

[0070] Further, see Figure 7 and Figure 9 In some embodiments, the gas circulation device 40 may further include a first sealing structure 407 and a second sealing structure 408, wherein the first sealing structure 407 is disposed inside the first circulation chamber 402 and the second sealing structure 408 is disposed inside the second circulation chamber 403.

[0071] The valve core structure 401 may include a first piston 409 and a second piston 4010, wherein the first piston 409 is located within a first circulation chamber 402, and the second piston 4010 is located within a second circulation chamber 403; wherein...

[0072] The valve core structure 401 is also used to control the first piston 409 to move to open the first gas recovery hole 405 and control the second piston 4010 to move to fit against the second sealing structure 408 to close the second gas recovery hole 406 when moving in the first direction; or...

[0073] The valve core structure 401 is also used to control the first piston 409 to move to fit with the first sealing structure 407 when moving in the second direction, thereby closing the first gas recovery hole 405, and to control the second piston 4010 to move to open the second gas recovery hole 406.

[0074] It should be noted that, with Figure 7 For example, when the valve core structure 401 moves along the first direction, the first piston 409 moves along the first direction with the valve core structure 401 and opens the first gas recovery hole 405. At this time, the compressed gas in the B gas path can enter the first circulation chamber 402 through the first gas recovery hole 405. At the same time, the second piston 4010 also moves along the first direction with the valve core structure 401 and fits against the second sealing structure 408, closing the second gas recovery hole 406. That is, the second piston 4010 blocks the second gas recovery hole 406. At this time, since the second gas recovery hole 406 is closed, the compressed gas cannot enter the second circulation chamber 403 through the second gas recovery hole 406.

[0075] It should also be noted that, with Figure 9 For example, when the valve core structure 401 moves along the second direction, the first piston 409 moves along the second direction with the valve core structure 401 and comes into contact with the first sealing structure 407, thus closing the first gas recovery hole 405. The first piston 409 blocks the first gas recovery hole 405. At this time, since the first gas recovery hole 405 is closed, the compressed gas cannot enter the first circulation chamber 402 through the first gas recovery hole 405. At the same time, the second piston 4010 also moves along the first direction with the valve core structure 401 and opens the second gas recovery hole 406. At this time, the compressed gas in the A gas path can enter the second circulation chamber 403 through the second gas recovery hole 406.

[0076] Further, see Figure 7 and Figure 9 In some embodiments, the valve core structure 401 may further include a third piston 4011 and a fourth piston 4012, wherein the third piston 4011 is located in the first circulation chamber 402 and the fourth piston 4012 is located in the second circulation chamber 403.

[0077] The valve core structure 401 is also used to control the third piston 4011 to move to fit against the first seal 407 structure when moving in the first direction, dividing the first circulation chamber 402 into a first gas recovery chamber and a first gas passage, and controlling the fourth piston 4012 to move to merge the second gas recovery chamber and the second gas passage into a second circulation chamber 403; or,

[0078] The valve core structure 401 is also used to control the third piston 4011 to move to merge the first gas recovery chamber and the first gas passage into the first circulation chamber 402 when moving in the second direction, and to control the fourth piston 4012 to move to fit with the second sealing structure 408 to divide the second circulation chamber 403 into the second gas recovery chamber and the second gas passage.

[0079] The first gas passage is used to connect the first cylinder cavity 6021 to the solenoid valve device 601, and the second gas passage is used to connect the second cylinder cavity 6022 to the solenoid valve device 601.

[0080] It should be noted that, in this embodiment, the valve core structure 401 may further include a third piston 4011 located in the first circulation chamber 402 and a fourth piston 4012 located in the second circulation chamber 403. The third piston 4011 and the fourth piston 4012 move in different directions with the valve core structure, so that the first circulation chamber 402 and the second circulation chamber 403 are in different states.

[0081] Specifically, with Figure 7For example, when the valve core structure 401 moves along the first direction, the third piston 4011 moves along the first direction with the valve core structure 401 until the third piston 4011 is in contact with the first sealing structure 407. At this time, the first circulation chamber 402 is divided into two parts by the third piston 4011: a first gas recovery chamber and a first gas passage. The first gas recovery chamber refers to... Figure 7 The area where the middle gas path is located, the first gas path refers to Figure 7 The area where the middle d air path is located. At this time, the compressed gas discharged from the first cylinder cavity 6021 passes through the first gas passage, enters the solenoid valve device 601 after passing through the gas circulation device 40, and then enters the first gas recovery chamber through the first gas recovery hole 405. The airflow of the compressed gas after entering the first gas recovery chamber is as shown in the c air path.

[0082] Furthermore, such as Figure 7 As shown, when the valve core structure 401 moves along the first direction, the fourth piston 4012 also moves along the first direction with the valve core structure 401, separating from the second sealing structure 408. At this time, the second gas recovery chamber and the second gas passage are no longer two independent parts; that is, they are interconnected and together form the second circulation chamber 403. At this point, the compressed gas provided by the solenoid valve device 601 and the compressed gas stored in the second gas recovery chamber will be jointly introduced into the second cylinder chamber 6022 of the cylinder device 602, supplying gas to the second cylinder chamber 6022.

[0083] by Figure 9 For example, when the valve core structure 401 moves along the second direction, the fourth piston 4012 moves along the second direction with the valve core structure 401 until the fourth piston 4012 is in contact with the second sealing structure 408. At this time, the second circulation chamber 403 is divided into two parts by the fourth piston 4012: a second gas recovery chamber and a second gas passage. The second gas recovery chamber refers to the area where gas passage b is located in the figure, and the second gas passage refers to the area where gas passage a is located in the figure. At this time, the compressed gas discharged from the second cylinder chamber 6022 enters the solenoid valve device 601 through the gas circulation device 40 in the second gas passage, and then enters the second gas recovery chamber through the second gas recovery hole 406. The airflow of the compressed gas after entering the second gas recovery chamber is as shown in gas passage b.

[0084] Furthermore, such as Figure 9 As shown, when the valve core structure 401 moves along the second direction, the third piston 4011 also moves along the second direction with the valve core structure 401, separating from the first sealing structure 407. At this time, the first gas recovery chamber and the first gas passage will no longer be two independent parts, as... Figure 8 and Figure 9As shown, the two are interconnected and together form the first circulation chamber 402. At this time, the compressed gas provided by the solenoid valve device 601 and the compressed gas stored in the first gas recovery chamber will be jointly introduced into the first cylinder chamber 6021 of the cylinder device 602 to supply gas to the first cylinder chamber 6021.

[0085] As can be seen, the first gas passage is used to connect the first cylinder chamber 6021 to the solenoid valve device 601, so that the compressed gas discharged from the first cylinder chamber 6021 enters the solenoid valve device 601, and the second gas passage is used to connect the second cylinder chamber 6022 to the solenoid valve device 601, so that the compressed gas discharged from the second cylinder chamber 6022 enters the solenoid valve device 601.

[0086] In some embodiments, see Figure 7 and Figure 9 The first gas passage may include a first vent 4013 and a first second vent 4014; wherein the first vent 4013 is disposed on the side wall of the first circulation chamber 402 near the solenoid valve device 601, and the first second vent 4014 is disposed on the side wall of the first circulation chamber 402 near the first cylinder chamber 6021.

[0087] The second gas passage may include a second first vent 4015 and a second second vent 4016; wherein the second first vent 4015 is disposed on the side wall of the second circulation chamber 403 near the solenoid valve device 601, and the second second vent 4016 is disposed on the side wall of the second circulation chamber 403 near the second cylinder chamber 6022.

[0088] It should be noted that, with Figure 7 For example, the first gas passage may also include a first air port 4013 and a first second air port 4014, both of which are disposed on the side wall of the first circulation chamber 402. The two can be connected to transport compressed gas by connecting a pipeline between the first air port 4013 and the solenoid valve device 601. Specifically, it can be connected to the first solenoid valve cavity 6011 of the solenoid valve device 601. The two can be connected to transport compressed gas by connecting a pipeline between the first second air port 4014 and the first cylinder cavity 6021. In other words, the phrase "the first vent 4013 is located on the side wall of the first circulation chamber 402 near the solenoid valve device 601, and the first second vent 4014 is located on the side wall of the first circulation chamber 402 near the first cylinder chamber 6021" specifically means that the first vent 4013 is located in the right side wall of the first circulation chamber 402 where it connects to the solenoid valve device 601, and the first second vent 4014 is located in the left side wall of the first circulation chamber 402 where it connects to the first cylinder chamber 6021. However, those skilled in the art will understand that as long as connection and gas transport can be achieved, the actual location is not specifically limited.

[0089] It should also be noted that, with Figure 9 For example, the second gas passage may also include a second first vent 4015 and a second second vent 4016, both of which are disposed on the side wall of the second circulation chamber 403. The two can be connected to transport compressed gas by connecting a pipeline between the second first vent 4015 and the solenoid valve device 601. Specifically, it can be connected to the second solenoid valve chamber 6012 of the solenoid valve device 601. The two can be connected to transport compressed gas by connecting a pipeline between the second second vent 4016 and the second cylinder chamber 6022. In other words, the phrase "the second vent 4015 is located on the side wall of the second circulation chamber 403 near the solenoid valve device 601, and the second vent 4016 is located on the side wall of the second circulation chamber 403 near the second cylinder chamber 6022" specifically means that the second vent 4015 is located in the right side wall of the second circulation chamber 403 where it connects to the solenoid valve device 601, and the second vent 4016 is located in the left side wall of the second circulation chamber 403 where it connects to the second cylinder chamber 6022. However, those skilled in the art will understand that as long as connection and gas transport can be achieved, the actual location is not specifically limited.

[0090] In some embodiments, see Figure 7 and Figure 9 The valve core structure 401 may further include a fifth piston 4017 and a sixth piston 4018, wherein the fifth piston 4017 is located in the first circulation chamber 402, and the sixth piston 4018 is located in the second circulation chamber 403.

[0091] The sidewall of the first circulation chamber 402 may include a first piston 409 and a fifth piston 4017;

[0092] The sidewall of the second circulation chamber 403 may include a second piston 4010 and a sixth piston 4018.

[0093] It should be noted that, as Figure 7 or Figure 9 As shown, the valve core structure 401 may further include a fifth piston 4017 located in the first circulation chamber 402 and a sixth piston 4018 located in the second circulation chamber 403. It can be understood that as the valve core structure 401 moves in the first direction or the second direction, the positions of the first circulation chamber 402 and the second circulation chamber 403 are also changing. The first piston 409 and the fifth piston 4017, along with the housing of the gas circulation device 40, together form the cavity space of the first circulation chamber 402. That is, the sidewall of the first circulation chamber 402 may include the first piston 409 and the fifth piston 4017. In the figure, the first piston 409 serves as the upper wall of the first circulation chamber 402, and the fifth piston 4017 serves as the lower wall of the first circulation chamber 402.

[0094] The second piston 4010, the sixth piston 4018, and the housing of the gas circulation device 40 together form the cavity space of the second circulation cavity 403. That is, the side wall of the second circulation cavity 403 may include the second piston 4010 and the sixth piston 4018. In the figure, the sixth piston 4018 is shown as the upper wall of the second circulation cavity 403, and the second piston 406 is shown as the lower wall of the second circulation cavity 403.

[0095] In this situation, a cavity will be formed between the fifth piston 4017 and the sixth piston 4018 (that is, between the first circulating air chamber 402 and the second circulating chamber 403), such as Figure 7 or Figure 9 The blank area between the fifth piston 4017 and the sixth piston 4018 is shown.

[0096] In some embodiments, a cavity may not be formed between the first circulating air chamber 402 and the second circulating chamber 403, and the valve core structure 401 may only include the fifth piston 4017.

[0097] The sidewall of the first circulation chamber 402 may include a first piston 409 and a fifth piston 4017;

[0098] The sidewall of the second circulation chamber 403 may include a second piston 4010 and a fifth piston 4017.

[0099] It should be noted that, see Figure 10 This illustrates a schematic diagram of the hardware structure of another gas circulation device provided in an embodiment of this application. Figure 10 As shown, the difference from the aforementioned gas circulation device is that the first circulation chamber 402 and the second circulation chamber 403 share the fifth piston 4017 as their sidewall, that is, the fifth piston 4017 serves as both the lower wall of the first circulation chamber 402 and the upper wall of the second circulation chamber 403.

[0100] Furthermore, in the pneumatic device 60, the cylinder device 602 can be driven to different operating states based on the different operating states of the gas circulation device 40. Specifically, in some embodiments, the valve core structure 401 is also used to drive the piston rod 6023 of the cylinder device 602 to move in a third direction via the gas circulation device 40 when moving in a first direction; or to drive the piston rod 6023 of the cylinder device 602 to move in a fourth direction via the gas circulation device 40 when moving in a second direction.

[0101] It should be noted that, with Figure 6For example, in cylinder device 602, the direction indicated by the white arrow represents the third direction. When the valve core structure 401 of the gas circulation device 40 moves in the first direction, the second cylinder chamber 6022 is supplied with air through the second circulation chamber 403 and the solenoid valve device 601, which provides power to the piston in cylinder device 602 and pushes the piston rod 6023 to move in the direction of the first cylinder chamber 6021 (that is, the third direction).

[0102] by Figure 8 For example, in cylinder device 602, the direction indicated by the white arrow represents the fourth direction. When the valve core structure 401 of the gas circulation device 40 moves in the second direction, the first cylinder chamber 6021 is supplied with gas through the first circulation chamber 402 and the solenoid valve device 601, which provides power to the piston in cylinder device 602 and pushes the piston rod 6023 to move in the direction of the second cylinder chamber 6022 (that is, the fourth direction).

[0103] Thus, as can be seen from the gas circulation device and pneumatic device provided in the foregoing embodiments, the embodiments of this application can achieve the recycling of compressed gas by simply connecting the gas circulation device in series between the cylinder device and the solenoid valve device of the original pneumatic device without damaging the original pneumatic device structure. Each air hole / port can be directly connected by quick connectors. Moreover, for the solenoid valve device, there is no need to install an external silencer, which further saves costs.

[0104] For example, see Figure 11 This diagram illustrates the relationship between the supply pressure at the pipeline front end and the compressed air flow rate, as provided in an embodiment of this application. The horizontal axis (X-axis) represents the supply pressure at the pipeline front end, in kilopascals (kPa); the vertical axis (Y-axis) represents the compressed air flow rate, in liters per hour (L / h). Figure 11 The diagram illustrates the changing trend of gas flow rate per unit time in a pipeline as the supply pressure at the pipeline front end increases, under different valve diameters. Solid lines represent the trend for DN10 valve diameters, dashed lines for DN15, and dashed lines for DN20. Since most existing semiconductor equipment uses a unified compressed air piping system for the entire machine, high front-end pressures are required to drive pneumatic components. For example, in etching machines, the front-end pressure is typically no less than 0.3 MPa. Additionally, it should be noted that… Figure 11 This is merely an illustrative diagram to illustrate the trend of change; the coordinate values ​​shown may differ from the actual values. In this embodiment, the actual values ​​corresponding to the supply pressure and compressed air flow rate at the pipeline front end for different valve diameters need to be determined specifically based on the usage scenario.

[0105] See Figure 12 This diagram illustrates the relationship between the pressure at the pipeline tip and the average gas consumption in the cylinder, as provided in an embodiment of this application. The horizontal axis (X-axis) represents the supply pressure at the pipeline tip, in kilopascals (kPa); the vertical axis (Y-axis) represents the average gas consumption in the cylinder, in liters per minute (L / min). Figure 12 The paper uses a conventional double-acting cylinder with a 50mm diameter as an example to illustrate a comparison of the average cylinder gas consumption in two cases: without using the gas circulation device (also known as the gas recovery device) provided in this application embodiment and with using the gas circulation device. The dashed line represents the consumption curve without using the gas circulation device provided in this application embodiment, and the solid line represents the consumption curve with using the gas circulation device provided in this application embodiment. According to... Figure 12 It can be seen that after applying the gas circulation device, the compressed air consumption is only about one-third of the original amount. Gas consumption is effectively reduced, resulting in significant energy savings and substantial cost reductions, demonstrating clear cost-effectiveness. Additionally, it should be noted that... Figure 12 This diagram is merely an illustrative representation to show the trend of gas consumption changes when using and not using a gas circulation device. The coordinate values ​​shown may differ from the actual values, and are only intended to illustrate the trend. In the embodiments of this application, the actual values ​​corresponding to the supply pressure at the pipeline front end and the average gas consumption of the cylinder for both the use of and without a gas circulation device need to be determined specifically based on the usage scenario.

[0106] In other words, the embodiments of this application can be applied to pneumatic components in semiconductor equipment, such as pneumatic solenoid valves, pneumatic pistons, and pneumatic swing valves. By using a gas circulation device, the gas discharged from the depressurization or exhaust of ordinary pneumatic components can be recovered and then put back into the pneumatic system (pneumatic device) for recycling. By recycling the compressed air that would otherwise be discharged into the air, the consumption of compressed air is effectively reduced, and the cost is lowered.

[0107] Furthermore, the gas circulation device provided in this application embodiment can be directly installed in the circuit of the original pneumatic device through a quick connector without changing the components and air circuit of the original pneumatic device. It can recover and recycle the gas depressurized from pneumatic components such as cylinders. That is, it is only necessary to connect the gas circulation device in the middle of the air circuit of the original cylinder and the gas solenoid valve, and connect the exhaust port of the original gas solenoid valve to the gas circulation device. Without changing the air circuit or components separately, compressed air can be recycled. This reduces the consumption of compressed gas and energy and saves costs without changing the control circuit of the original pneumatic device.

[0108] For example, a one-way valve structure (i.e., a specific example of a gas circulation device) is connected in series in the gas delivery path of the pneumatic component, and connected to the pressure relief valve port or exhaust port of the cylinder by another pipeline, so that the compressed air that is depressurized can be recycled as the gas used to drive the cylinder.

[0109] In short, the working principle of the gas circulation device is briefly described as follows (using...). Figure 9 (Taking the movement of the valve core device 401 in the second direction as an example): When the gas circulation device 40 receives the second drive command, it engages, and the valve core structure 401 moves downward. Due to the movement of the valve core structure 401, the upper end (fourth piston 4012) of the second circulation chamber 403 closes with the second sealing structure 408. The exhaust gas from gas path A returns to the solenoid valve device 601 through gas path a and is discharged through the exhaust port of the solenoid valve device 601. Then, it is collected in the second circulation chamber 403 of the gas circulation device through gas path b for later use. At the same time, the compressed gas stored in the first circulation chamber 402 is incorporated into gas path d through gas path c to charge the piston of the cylinder device 602. The principle is the same when the valve core device 401 moves in the first direction, but the gas paths are reversed. In this way, the exhaust gas can be recovered and utilized through the gas circulation device 401.

[0110] The actual test results show that after installing the gas circulation device, the original circuit of the pneumatic component remains unaffected, meaning no hardware changes are required, and the pneumatic component's operation is not delayed or sluggish. Applying the gas circulation device significantly reduces the compressed air consumption of the pneumatic component; for example, in one application scenario, the gas consumption of a single component can reach one-third of the original consumption, effectively reducing compressed air usage. This gas circulation device can be applied to all pneumatic components containing vent valves or exhaust ports; it is easy to install, has a simple structure, and effectively reduces compressed air consumption.

[0111] It should also be noted that the gas circulation device provided in this application embodiment can be applied to a system of cylinder movement with a certain stroke controlled by pneumatic valves, especially in some cylinders with periodic reciprocating motion. The effect of saving compressed gas is obvious, and it is particularly suitable for the valve system of semiconductor equipment transmission system. It solves the problem of large consumption of compressed air for driving pneumatic components in semiconductor equipment.

[0112] This embodiment provides a gas circulation device, a gas circulation method, a pneumatic device, and a semiconductor device. The gas circulation device is applied to a pneumatic device including a solenoid valve device and a cylinder device, and the gas circulation device is connected in series between the solenoid valve device and the cylinder device. The gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber. The valve core structure is used to collect and store compressed gas discharged from the first cylinder chamber of the cylinder device through the first circulation chamber after passing through the solenoid valve device when moving in a first direction, and to charge the second cylinder chamber of the cylinder device with compressed gas stored in the second circulation chamber and compressed gas provided by the solenoid valve device. In this way, the compressed gas discharged from the cylinder device is collected and stored through the gas circulation device, and the compressed gas stored in the gas circulation device can also be used to charge the cylinder device, thereby realizing the recycling of compressed gas, saving a lot of compressed gas, reducing compressed gas consumption, saving production costs and reducing expenditures. In addition, the gas circulation device can be directly installed in the gas circuit of the pneumatic device via quick connectors without changing the original pneumatic device (such as pneumatic valves), collecting and recycling the gas discharged from the cylinder device, which is convenient and quick. Furthermore, installing the gas circulation device in the pneumatic device also eliminates the cost of installing pressure relief valves, silence valves, etc., and reduces the noise of pneumatic components.

[0113] In another embodiment of this application, see [link to application]. Figure 13 This illustration shows a schematic flow diagram of a gas circulation method provided in an embodiment of this application. The method is applied to a gas circulation device connected in series between a solenoid valve device and a cylinder device. The gas circulation device may include a valve core structure, a first circulation chamber, and a second circulation chamber. Figure 13 As shown, the method may include:

[0114] S1301. When the valve core structure moves along the first direction, the first circulation chamber controls the first cylinder chamber to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device after passing through the solenoid valve device, and controls the compressed gas stored in the second circulation chamber and the compressed gas provided by the solenoid valve device to charge the second cylinder chamber of the cylinder device.

[0115] It should be noted that, in addition to moving along the first direction, the valve core structure can also move along the second direction; therefore, in some embodiments, the method may further include:

[0116] When the valve core structure moves in the second direction, the second circulation chamber controls the collection and storage of compressed gas discharged from the second cylinder chamber of the cylinder device via the solenoid valve device, and controls the compressed gas stored in the first circulation chamber and the compressed gas provided by the solenoid valve device to jointly inflate the first cylinder chamber of the cylinder device.

[0117] For a gas circulation device, a connecting rod is also included. In some embodiments, the method may further include:

[0118] Upon receiving the first drive command, the valve core structure is driven to move in the first direction via the connecting rod, thereby placing the gas circulation device in the first working state; or...

[0119] Upon receiving the second driving command, the valve core structure is driven to move in the second direction via the connecting rod, so that the gas circulation device is in the second working state.

[0120] Furthermore, the gas circulation device may further include a first gas recovery port and a second gas recovery port. In some embodiments, the method may further include:

[0121] When the gas circulation device is in the first working state, the first gas recovery port is controlled to guide the compressed gas discharged from the first cylinder cavity into the first circulation cavity through the solenoid valve device; or, when the gas circulation device is in the second working state, the second gas recovery port is controlled to guide the compressed gas discharged from the second cylinder cavity into the second circulation cavity through the solenoid valve device.

[0122] Furthermore, the gas circulation device may further include a first sealing structure and a second sealing structure, and the valve core structure may include a first piston and a second piston. In some embodiments, upon receiving a first driving command, driving the valve core structure to move in a first direction via the connecting rod may include:

[0123] The valve core structure is driven to move along the first direction by the connecting rod, the first piston is controlled to move to open the first gas recovery hole, and the second piston is controlled to move to fit with the second sealing structure to close the second gas recovery hole;

[0124] Accordingly, upon receiving the second driving command, the movement of the valve core structure in the second direction via the connecting rod may include:

[0125] The valve core structure is driven to move in the second direction by the connecting rod, the first piston is controlled to move to fit with the first sealing structure to close the first gas recovery hole, and the second piston is controlled to move to open the second gas recovery hole.

[0126] Furthermore, the valve core structure may further include a third piston and a fourth piston. In some embodiments, upon receiving a first drive command, driving the valve core structure to move in a first direction via the connecting rod may include:

[0127] The valve core structure is driven to move along the first direction by the connecting rod, and the third piston is controlled to move to fit with the first sealing structure, dividing the first circulation chamber into a first gas recovery chamber and a first gas passage, and the fourth piston is controlled to move to merge the second gas recovery chamber and the second gas passage into a second circulation chamber.

[0128] Accordingly, upon receiving the second driving command, the movement of the valve core structure in the second direction via the connecting rod may include:

[0129] The valve core structure is driven to move along the second direction by the connecting rod, and the third piston is controlled to move to merge the first gas recovery chamber and the first gas passage into the first circulation chamber. The fourth piston is also controlled to move to fit with the second sealing structure, dividing the second circulation chamber into the second gas recovery chamber and the second gas passage.

[0130] The first gas passage is used to connect the first cylinder cavity to the solenoid valve device, and the second gas passage is used to connect the second cylinder cavity to the solenoid valve device.

[0131] In addition, in some embodiments, the method may further include: when the valve core structure moves along a first direction, driving the piston rod of the cylinder device to move in a third direction; or, when the valve core structure moves along a second direction, driving the piston rod of the cylinder device to move in a fourth direction.

[0132] It is understood that the gas circulation method provided in this application and the gas circulation device provided in the foregoing embodiments belong to the same inventive concept, and their specific descriptions are similar, having similar beneficial effects to the method embodiments. For technical details not disclosed in the gas circulation method embodiments of this application, please refer to the description of the gas circulation device embodiments of this application for understanding.

[0133] This application provides a gas circulation method applied to a gas circulation device connected in series between a solenoid valve device and a cylinder device. The gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber. When the valve core structure moves along a first direction, the first circulation chamber collects and stores compressed gas discharged from the first cylinder chamber of the cylinder device after passing through the solenoid valve device. The second circulation chamber stores compressed gas, and the compressed gas supplied by the solenoid valve device, together inflates the second cylinder chamber of the cylinder device. In this way, the compressed gas discharged from the cylinder device is collected and stored by the gas circulation device, and the compressed gas stored in the gas circulation device can also be used to inflate the cylinder device, thereby achieving the recycling of compressed gas, reducing compressed gas consumption, avoiding waste, and saving costs.

[0134] In another embodiment of this application, see [reference needed]. Figure 14This illustrates a schematic diagram of the structural composition of a pneumatic device 60 provided in an embodiment of this application. For example... Figure 14 As shown, the pneumatic device 60 may include a cylinder device 602, a solenoid valve device 601, and a gas circulation device 40 as described in any of the foregoing embodiments.

[0135] As for the pneumatic device 60, since it includes the aforementioned gas circulation device 40, the compressed gas discharged from the cylinder device is collected and stored by the gas circulation device, and the compressed gas stored by the gas circulation device can also be used to charge the cylinder device, thereby realizing the recycling of compressed gas, reducing the consumption of compressed gas, avoiding waste and saving costs.

[0136] In another embodiment of this application, see [reference needed]. Figure 15 This illustrates a schematic diagram of the structural composition of a semiconductor device 150 provided in an embodiment of this application. For example... Figure 15 As shown, the semiconductor device 150 includes a pneumatic device 60 as described in the foregoing embodiments.

[0137] For the semiconductor device 150, the compressed gas discharged from the cylinder device is collected and stored by the gas circulation device 40, and the compressed gas stored in the gas circulation device can also be used to charge the cylinder device, so as to realize the recycling of compressed gas, reduce the consumption of compressed gas, avoid waste and save costs.

[0138] The above description is merely a preferred embodiment of this application and is not intended to limit the scope of protection of this application.

[0139] It should be noted that, in this application, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes that element.

[0140] The sequence numbers of the embodiments in this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments.

[0141] The methods disclosed in the several method embodiments provided in this application can be arbitrarily combined without conflict to obtain new method embodiments.

[0142] The features disclosed in the several product embodiments provided in this application can be arbitrarily combined without conflict to obtain new product embodiments.

[0143] The features disclosed in the several method or device embodiments provided in this application can be arbitrarily combined without conflict to obtain new method or device embodiments.

[0144] The above description is merely a specific embodiment of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. A gas circulation device, characterized in that, This invention relates to a pneumatic device comprising a solenoid valve and a cylinder, wherein a gas circulation device is connected in series between the solenoid valve and the cylinder; the gas circulation device includes a valve core structure, a first circulation chamber, and a second circulation chamber; wherein... The valve core structure is used to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device through the first circulation chamber after passing through the solenoid valve device when moving in the first direction, and to charge the second cylinder chamber of the cylinder device with the compressed gas stored in the second circulation chamber and the compressed gas provided by the solenoid valve device. The gas circulation device further includes a connecting rod, which is connected to the valve core structure; wherein... The connecting rod is used to drive the valve core structure to move in a first direction upon receiving a first driving command, so that the gas circulation device is in a first working state; or... The connecting rod is also used to drive the valve core structure to move in a second direction when a second driving command is received, so that the gas circulation device is in a second working state.

2. The gas circulation device according to claim 1, characterized in that, The valve core structure is also used to collect and store the compressed gas discharged from the second cylinder chamber of the cylinder device through the second circulation chamber after passing through the solenoid valve device when moving in the second direction, and to charge the first cylinder chamber of the cylinder device together with the compressed gas stored in the first circulation chamber and the compressed gas provided by the solenoid valve device.

3. The gas circulation device according to claim 1, characterized in that, The gas circulation device further includes a first gas recovery port and a second gas recovery port. The first gas recovery port is disposed on the side wall of the first circulation chamber, and the second gas recovery port is disposed on the side wall of the second circulation chamber. The first gas recovery port is used to guide the compressed gas discharged from the first cylinder cavity into the first circulation cavity via the solenoid valve device when the gas circulation device is in the first working state. The second gas recovery port is used to guide the compressed gas discharged from the second cylinder cavity into the second circulation cavity via the solenoid valve device when the gas circulation device is in the second working state.

4. The gas circulation device according to claim 3, characterized in that, The connecting rod is specifically used to drive the valve core structure to move along a first direction, stopping when it reaches a position where the first gas recovery hole is open and the second gas recovery hole is closed, thus placing the gas circulation device in the first working state; or... The connecting rod is specifically used to drive the valve core structure to move in the second direction, and stops moving when it reaches the position of closing the first gas recovery hole and opening the second gas recovery hole, so that the gas circulation device is in the second working state.

5. The gas circulation device according to claim 3, characterized in that, The gas circulation device further includes a first sealing structure and a second sealing structure, wherein the first sealing structure is disposed on the inner side of the first circulation cavity and the second sealing structure is disposed on the inner side of the second circulation cavity; The valve core structure includes a first piston and a second piston, wherein the first piston is located within the first circulation chamber, and the second piston is located within the second circulation chamber; wherein... The valve core structure is also used to control the first piston to move to open the first gas recovery orifice when moving along the first direction, and to control the second piston to move to fit against the second sealing structure to close the second gas recovery orifice; or... The valve core structure is also used to control the first piston to move to fit against the first sealing structure and close the first gas recovery hole when moving in the second direction, and to control the second piston to move to open the second gas recovery hole.

6. The gas circulation device according to claim 5, characterized in that, The valve core structure further includes a third piston and a fourth piston, wherein the third piston is located in the first circulation chamber and the fourth piston is located in the second circulation chamber. The valve core structure is also used to control the third piston to move to fit against the first sealing structure when moving along the first direction, dividing the first circulation chamber into a first gas recovery chamber and a first gas passage, and controlling the fourth piston to move to merge the second gas recovery chamber and the second gas passage into the second circulation chamber; or, The valve core structure is also used to control the third piston to move to merge the first gas recovery chamber and the first gas passage into the first circulation chamber when moving in the second direction, and to control the fourth piston to move to fit with the second sealing structure to divide the second circulation chamber into the second gas recovery chamber and the second gas passage. The first gas passage is used to connect the first cylinder cavity to the solenoid valve device, and the second gas passage is used to connect the second cylinder cavity to the solenoid valve device.

7. The gas circulation device according to claim 5, characterized in that, The valve core structure further includes a fifth piston and a sixth piston, wherein the fifth piston is located in the first circulation chamber and the sixth piston is located in the second circulation chamber. The sidewall of the first circulation chamber includes the first piston and the fifth piston; The sidewall of the second circulation chamber includes the second piston and the sixth piston.

8. The gas circulation device according to claim 5, characterized in that, The valve core structure also includes a fifth piston, wherein... The sidewall of the first circulation chamber includes the first piston and the fifth piston; The sidewall of the second circulation chamber includes the second piston and the fifth piston.

9. The gas circulation device according to claim 6, characterized in that, The first gas passage includes a first vent and a second vent; wherein the first vent is disposed on the side wall of the first circulation chamber near the solenoid valve device, and the second vent is disposed on the side wall of the first circulation chamber near the first cylinder chamber. The second gas passage includes a second first vent and a second second vent; wherein the second first vent is disposed on the side wall of the second circulation chamber near the side of the solenoid valve device, and the second second vent is disposed on the side wall of the second circulation chamber near the side of the second cylinder chamber.

10. The gas circulation device according to any one of claims 1 to 9, characterized in that, The valve core structure is also used to drive the piston rod of the cylinder device to move in a third direction via the gas circulation device when moving in the first direction; or to drive the piston rod of the cylinder device to move in a fourth direction via the gas circulation device when moving in the second direction.

11. A gas circulation method, characterized in that, The method is applied to the gas circulation device according to any one of claims 1 to 10, wherein the gas circulation device is connected in series between the solenoid valve device and the cylinder device, the gas circulation device including a valve core structure, a first circulation chamber, a second circulation chamber, and a connecting rod, and the method includes: When the valve core structure moves along the first direction, the first circulation chamber is controlled to collect and store the compressed gas discharged from the first cylinder chamber of the cylinder device after passing through the solenoid valve device, and the compressed gas stored in the second circulation chamber and the compressed gas provided by the solenoid valve device are controlled to jointly inflate the second cylinder chamber of the cylinder device. Upon receiving the first driving command, the valve core structure is driven to move in a first direction via the connecting rod, thereby placing the gas circulation device in a first operating state; or... Upon receiving the second driving command, the valve core structure is driven to move in the second direction via the connecting rod, so that the gas circulation device is in the second working state.

12. The method according to claim 11, characterized in that, The method further includes: When the valve core structure moves in the second direction, it controls the second circulation chamber to collect and store the compressed gas discharged from the second cylinder chamber of the cylinder device after passing through the solenoid valve device, and controls the compressed gas stored in the first circulation chamber and the compressed gas provided by the solenoid valve device to jointly inflate the first cylinder chamber of the cylinder device.

13. The method according to claim 11, characterized in that, The gas circulation device further includes a first gas recovery port and a second gas recovery port, and the method further includes: When the gas circulation device is in the first operating state, the first gas recovery port is controlled to guide the compressed gas discharged from the first cylinder cavity into the first circulation cavity via the solenoid valve device; or... When the gas circulation device is in the second working state, the second gas recovery hole is controlled to guide the compressed gas discharged from the second cylinder cavity into the second circulation cavity via the solenoid valve device.

14. The method according to claim 13, characterized in that, The gas circulation device further includes a first sealing structure and a second sealing structure, and the valve core structure includes a first piston and a second piston. Upon receiving the first driving command, the step of driving the valve core structure to move in the first direction via the connecting rod includes: The valve core structure is driven to move along the first direction by the connecting rod, the first piston is controlled to move to open the first gas recovery hole, and the second piston is controlled to move to fit with the second sealing structure to close the second gas recovery hole; Accordingly, upon receiving the second driving command, driving the valve core structure to move in the second direction via the connecting rod includes: The valve core structure is driven to move along the second direction by the connecting rod, the first piston is controlled to move to fit with the first sealing structure, the first gas recovery hole is closed, and the second piston is controlled to move to open the second gas recovery hole.

15. The method according to claim 14, characterized in that, The valve core structure also includes a third piston and a fourth piston; Upon receiving the first driving command, the step of driving the valve core structure to move in the first direction via the connecting rod includes: The valve core structure is driven to move along the first direction by the connecting rod, and the third piston is controlled to move to fit with the first sealing structure, dividing the first circulation chamber into a first gas recovery chamber and a first gas passage, and the fourth piston is controlled to move to merge the second gas recovery chamber and the second gas passage into the second circulation chamber; Accordingly, upon receiving the second driving command, driving the valve core structure to move in the second direction via the connecting rod includes: The valve core structure is driven to move along the second direction by the connecting rod, and the third piston is controlled to move to merge the first gas recovery chamber and the first gas passage into the first circulation chamber. The fourth piston is also controlled to move to fit with the second sealing structure, dividing the second circulation chamber into the second gas recovery chamber and the second gas passage. The first gas passage is used to connect the first cylinder cavity to the solenoid valve device, and the second gas passage is used to connect the second cylinder cavity to the solenoid valve device.

16. The method according to any one of claims 11 to 15, characterized in that, The method further includes: When the valve core structure moves in the first direction, it drives the piston rod of the cylinder device to move in the third direction; or... When the valve core structure moves in the second direction, it drives the piston rod of the cylinder device to move in the fourth direction.

17. A pneumatic device, characterized in that, The pneumatic device includes a cylinder device, a solenoid valve device, and a gas circulation device as described in any one of claims 1 to 10.

18. A semiconductor device, characterized in that, The semiconductor device includes the pneumatic device as described in claim 17.

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