Semiconductor device and base adjustment mechanism thereof

Abstract

The application discloses a semiconductor device and a base adjusting mechanism thereof, and belongs to the technical field of semiconductor processes. The base adjusting mechanism of the semiconductor device comprises a mechanism seat body, a first movable element, a second movable element, an adapter seat body, a first direction adjusting assembly, a second direction adjusting assembly and a locking assembly. A first direction clamping structure is arranged between the first movable element and a second fixed element of the mechanism seat body, and the first direction clamping structure limits the first movable element to move in a first direction only relative to the second fixed element. A second direction clamping structure is arranged between the second movable element and the first movable element, and the second direction clamping structure limits the second movable element to move in a second direction only relative to the first movable element. The base adjusting mechanism can separately adjust the base assembly in the first direction and the second direction which are perpendicular to each other when centering the base assembly, so that the two directions are not affected during adjustment, and the adjustment difficulty is greatly reduced.

Description

Technical Field

[0001] This application belongs to the field of semiconductor process technology, and in particular relates to a semiconductor device and its base adjustment mechanism. Background Technology

[0002] In semiconductor manufacturing processes, wafers sometimes need to be lifted and lowered by a wafer lifting device driven by a substrate carrier. This requires high positional accuracy and repeatability for each wafer lift to ensure the safety and accurate positioning of the wafer during robotic loading and unloading. Due to manufacturing and installation errors, the substrate lifting device requires adjustment to ensure the wafer's position meets requirements. This necessitates precise positioning of the substrate during assembly. Existing substrate lifting devices primarily employ a cross-axis type connection and adjustment mechanism for substrate alignment. This involves adjusting the substrate in two mutually perpendicular directions. However, this cross-axis type connection and adjustment mechanism performs these adjustments simultaneously, meaning that adjusting in one direction affects the adjustment in the other, significantly complicating the overall alignment process. Summary of the Invention

[0003] This application provides a base adjustment mechanism and a semiconductor device, aiming to solve the problem that existing base adjustment mechanisms cause mutual interference when adjusting the base in two mutually perpendicular directions, which brings great difficulty to the entire centering adjustment.

[0004] In a first aspect, embodiments of this application provide a base adjustment mechanism for a semiconductor device, used for transitional connection between a base assembly and a base lifting device, the base adjustment mechanism comprising:

[0005] The mechanism base includes a first fixing element and a second fixing element arranged perpendicularly to each other, and the first fixing element is drivenly connected to the base lifting device.

[0006] The first movable element is disposed close to the surface of the second fixed element away from the base assembly, and a first direction locking structure is provided between the first movable element and the second fixed element to restrict the first movable element to move only in a first direction relative to the second fixed element.

[0007] The second movable element is disposed close to the surface of the first movable element away from the second fixed element, and a second direction locking structure is provided between the second movable element and the first movable element to restrict the second movable element to move only in a second direction relative to the first movable element, wherein the second direction is perpendicular to the first direction.

[0008] An adapter body, one end of which is fastened to the base assembly, and the other end of which passes sequentially through the second fixed element, the first movable element, and the second movable element, and is fastened to the second movable element.

[0009] A first direction adjustment assembly is disposed between the second movable element and the second fixed element to drive the second movable element and respectively drive the adapter body and the first movable element to move together relative to the second fixed element in a first direction.

[0010] The second direction adjustment component is disposed between the second movable element and the second fixed element to drive the second movable element and the adapter body to move in a second direction relative to the first movable element.

[0011] A locking assembly is disposed between the second movable element and the second fixed element to lock the second movable element and the first movable element onto the second fixed element after the first direction adjustment assembly and the second adjustment assembly have been adjusted.

[0012] Optionally, in some embodiments, the first directional locking structure includes a first groove extending along a first direction and a first protrusion locked in the first groove and freely movable along the extending direction of the first groove. The first groove is recessed on the side surface of the second fixing element away from the base assembly, and the first protrusion is protruded on the side surface of the first movable element facing the second fixing element.

[0013] Optionally, in some embodiments, the second directional locking structure includes a second groove extending along a second direction and a second protrusion locked in the second groove and freely movable along the extension direction of the second groove. The second groove is recessed on the side surface of the second movable element facing the first movable element, and the second protrusion is protruded on the side surface of the first movable element away from the second fixed element.

[0014] Optionally, in some embodiments, the first direction adjustment assembly includes a first direction adjustment knob, a first knob fixing member, and a first knob adapter. The first knob adapter is fixed on the surface of the second fixing element away from the base assembly. The first knob fixing member is fixed on the side wall of the second movable element. The first direction adjustment knob includes a first knob portion, a first limiting member, and a first drive shaft portion extending along the first direction. One end of the first drive shaft portion is fastened to the first knob portion. The other end of the first drive shaft portion passes through the first knob fixing member and is sequentially fixed with the first limiting member and threadedly connected to the first knob adapter.

[0015] Optionally, in some embodiments, the second direction adjustment assembly includes a second direction adjustment knob, a second knob fixing member, and a second knob adapter. The second knob adapter is fixed on the surface of the second movable element away from the first movable element. The second knob fixing member is fixed on one side wall of the second fixing element. The second direction adjustment knob includes a second knob portion, a second limiting member, and a first drive shaft portion extending along the second direction. One end of the second drive shaft portion is fastened to the second knob portion. The other end of the second drive shaft portion passes through the second knob fixing member and is sequentially fixed with the second limiting member and threadedly connected to the second knob adapter.

[0016] Optionally, in some embodiments, the surface of the first direction adjustment knob and / or the surface of the second direction adjustment knob are provided with scale lines.

[0017] Optionally, in some embodiments, the other end of the adapter body is fastened to the second movable element via a third movable element. The third movable element is disposed close to the surface of the second movable element away from the first movable element, and the other end of the adapter body is fastened to the third movable element by a first screw. The third movable element is fastened to the second movable element by a second screw. Several horizontal height adjustment components are also provided between the third movable element and the second movable element.

[0018] Optionally, in some embodiments, the third movable element is triangular, and a horizontal height adjustment element is provided at each corner of the third movable element.

[0019] Optionally, in some embodiments, the leveling member includes a screw portion and a knob portion for driving the screw portion to rotate. The surface of the knob portion is provided with scale lines. One end of the screw portion is fixed to the knob portion, and the other end of the screw portion passes through the third movable element and abuts against the surface of the second movable element. The screw portion and the third movable element are connected by a threaded engagement.

[0020] Optionally, in some embodiments, the adapter body is a hollow structure.

[0021] Secondly, embodiments of this application provide a semiconductor device, including a semiconductor process assembly, a base assembly, a base lifting device, a chamber with an enclosed space, and the aforementioned base adjustment mechanism. The base assembly and the semiconductor process assembly are respectively housed within the enclosed space. The base lifting device and the base adjustment mechanism are respectively mounted below the chamber via a frame. The base assembly includes a base body and a base connecting shaft. The lower surface of the base body passes through the bottom wall of the chamber via the base connecting shaft and is then securely connected to one end of the adapter seat of the base adjustment mechanism, so that the base lifting device is driven to connect to the base assembly via the base adjustment mechanism.

[0022] Optionally, in some embodiments, the portion of the base connecting shaft located outside the chamber is further fitted with a bellows, one end flange of which is fixed to one end of the adapter body, and the other end flange of which is fixed to the bottom wall of the chamber or the frame.

[0023] In this application, the base adjustment mechanism for a semiconductor device includes a base body, a first movable element, a second movable element, a transfer base, a first direction adjustment assembly, a second direction adjustment assembly, and a locking assembly. A first direction locking structure is provided between the first movable element and the second fixed element of the base body, restricting the first movable element to move only in a first direction relative to the second fixed element. Similarly, a second direction locking structure is provided between the second movable element and the first movable element, restricting the second movable element to move only in a second direction relative to the first movable element. Thus, when the base adjustment mechanism of this application adjusts the base in the first direction using the first direction adjustment assembly, it can, under the limitation of the first direction locking structure, drive only the second movable element and, respectively, the transfer base and the first movable element to move together in the first direction relative to the second fixed element, thereby adjusting the first direction of the base assembly fixed on the transfer base without affecting the adjustment of the second direction of the base assembly. Similarly, when the base adjustment mechanism of this application adjusts the base assembly in the second direction using the second direction adjustment component, it can, under the limitation of the second direction locking structure, drive only the second movable element and the adapter body to move relative to the first movable element in the second direction, thereby achieving the adjustment of the base assembly fixed on the adapter body in the second direction without affecting the adjustment of the base assembly in the first direction. Therefore, the base adjustment mechanism of this application can adjust the base assembly separately in the first and second directions, which are perpendicular to each other, during the centering operation, ensuring that the two adjustments do not affect each other, thus greatly reducing the difficulty of adjustment. Attached Figure Description

[0024] The technical solution and its beneficial effects will become apparent from the following detailed description of specific embodiments of this application, in conjunction with the accompanying drawings.

[0025] Figure 1 This is a partial structural schematic diagram of the semiconductor device provided in the embodiments of this application.

[0026] Figure 2 yes Figure 1 A partial cross-sectional view of the semiconductor device shown.

[0027] Figure 3 yes Figure 1 A schematic diagram of the base adjustment mechanism of the semiconductor device shown.

[0028] Figure 4 yes Figure 3 The diagram shows another angle of the base adjustment mechanism.

[0029] Figure 5 yes Figure 3 The diagram shows a top view of the base adjustment mechanism.

[0030] Figure 6 yes Figure 5 The diagram shows a cross-sectional view of the base adjustment mechanism along section line AA.

[0031] Figure 7 yes Figure 5 The diagram shows a cross-sectional view of the base adjustment mechanism along section line BB.

[0032] Figure 8 yes Figure 3 The diagram shows the structural design of the base adjustment mechanism's base body.

[0033] Figure 9 yes Figure 3 A schematic diagram of the structure of the first movable element of the base adjustment mechanism shown.

[0034] Figure 10 yes Figure 3 A schematic diagram of the structure of the second movable element of the base adjustment mechanism shown.

[0035] Figure 11 yes Figure 3 A schematic diagram of the first direction adjustment component of the base adjustment mechanism shown.

[0036] Figure 12 yes Figure 3 The diagram shows the structure of the second direction adjustment component of the base adjustment mechanism.

[0037] Figure 13 yes Figure 3 The diagram shows the locking principle of the locking assembly of the base adjustment mechanism.

[0038] Figure 14 yes Figure 3 The diagram shows the adjustment principle of the second direction adjustment component of the base adjustment mechanism. Detailed Implementation

[0039] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of this application, and not all of them. Based on the embodiments in this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application. In the absence of conflict, the following embodiments and their technical features can be combined with each other.

[0040] In semiconductor manufacturing processes, wafers sometimes need to be lifted and lowered by a wafer lifting device driven by a substrate carrier. This requires high positional accuracy and repeatability for each wafer lift to ensure the safety and accurate positioning of the wafer during robotic loading and unloading. Due to manufacturing and installation errors, the substrate lifting device requires adjustment to ensure the wafer's position meets requirements. This necessitates precise positioning of the substrate during assembly. Existing substrate lifting devices primarily employ a cross-axis type connection and adjustment mechanism for substrate alignment. This involves adjusting the substrate in two mutually perpendicular directions. However, this cross-axis type connection and adjustment mechanism performs these adjustments simultaneously, meaning that adjusting in one direction affects the adjustment in the other, significantly complicating the overall alignment process.

[0041] Therefore, it is necessary to provide a new solution for the base adjustment mechanism to solve the problem that the existing base adjustment mechanism affects each other when adjusting the base in two mutually perpendicular directions, which brings great difficulties to the entire centering adjustment.

[0042] like Figures 1 to 7 As shown, in one embodiment, this application provides a semiconductor device, which includes a semiconductor process assembly, a base assembly 100, a base lifting device 200, a chamber (not shown) with an enclosed space, and a base adjustment mechanism 300. The base assembly 100 and the semiconductor process assembly are respectively built into the enclosed space. The base lifting device 200 and the base adjustment mechanism 300 are respectively mounted below the chamber via a frame 400. The base assembly 100 may specifically include a base body 110 and a base connecting shaft 120. The lower surface of the base body 110 passes through the bottom wall of the chamber via the base connecting shaft 120 and is fastened to one end of the adapter seat 340 of the base adjustment mechanism 300, so that the base lifting device 200 drives the base assembly 100 through the base adjustment mechanism 300. That is, the base adjustment mechanism 300 is used for transitional connection between the base assembly 100 and the base lifting device 200.

[0043] Specifically, the base adjustment mechanism 300 may include a mechanism base 310, a first movable element 320, a second movable element 330, a transition base 340, a first direction adjustment assembly 350, a second direction adjustment assembly 360, and a locking assembly 370. The mechanism base 310 may include a first fixing element 311 and a second fixing element 312 arranged perpendicularly to each other, with the first fixing element 311 being drivenly connected to the base lifting device 200. The first movable element 320 may be disposed close to the surface of the second fixing element 312 away from the base assembly 100, and a first direction locking structure is provided between the first movable element 320 and the second fixing element 312 to restrict the first movable element 320 to move only in a first direction relative to the second fixing element 312. The second movable element 330 is disposed close to the surface of the first movable element 320 away from the second fixed element 312. A second-direction locking structure is provided between the second movable element 330 and the first movable element 320, restricting the second movable element 330 to move only in a second direction relative to the first movable element 320. This second direction is perpendicular to the first direction. One end of the adapter body 340 is securely connected to the base assembly 100. The other end of the adapter body 340 passes sequentially through the second fixed element 312, the first movable element 320, and the second movable element 330, and is securely connected to the second movable element 330. Specifically, the first-direction adjustment assembly 350 can be disposed between the second movable element 330 and the second fixed element 312 to drive the second movable element 330 and, respectively, the adapter body 340 and the first movable element 320 to move together in the first direction relative to the second fixed element 312. The second direction adjustment component 360 can be specifically disposed between the second movable element 330 and the second fixed element 312 to drive the second movable element 330 and the adapter 340 to move relative to the first movable element 320 in a second direction. The locking component 370 can be specifically disposed between the second movable element 330 and the second fixed element 312 to lock the second movable element 330 and the first movable element 320 onto the second fixed element 312 after the first direction adjustment component 350 and the second adjustment component 360 have been adjusted.

[0044] It is understood that the aforementioned base lifting device 200 is specifically a device that provides lifting power to the base assembly 100, and it can be installed below the chamber via a frame 400. The frame 400 may specifically include an upper plate 410 and a side plate 420. The upper plate 410 can be fixed to the outside of the bottom wall of the chamber, and the side plate 420 is fixed to one side of the upper plate 410. The bottom end of the base connecting shaft 120 away from the base body 110 passes through the bottom wall of the chamber and the upper plate 410 in sequence and is tightly connected to one end of the adapter seat 340 of the base adjustment mechanism 300. At the same time, the part of the base connecting shaft 120 located outside the chamber is also fitted with a bellows 500. One end flange 510 of the bellows 500 is fixed to one end of the adapter seat 340, and the other end flange 520 of the bellows 500 is fixed to the upper plate 410 of the frame 400. In this way, dynamic sealing at the corresponding position can be achieved through the bellows 500, thereby ensuring the sealing performance of the chamber. For those skilled in the art, the frame 400 may specifically include only the side plate 420. In this case, the side plate 420 may be directly fixed to the outside of the bottom wall of the chamber, while the flange 520 at the other end of the bellows 500 may be directly fixed to the bottom wall of the chamber. In this way, dynamic sealing at the corresponding position can also be achieved through the bellows 500, thereby ensuring the sealing performance of the chamber.

[0045] The aforementioned base lifting device 200 may specifically include a guide rail 210 fixed on the side plate 420, a slider 220 slidably connected to the guide rail 210, a lead screw 230 driving the slider 220 to move up and down along the guide rail 210, and a lead screw motor 250 driving the lead screw 230 via a coupling 240. At this time, the first fixing element 311 of the mechanism base 310 can be fastened to the slider 220 by screws or other structures to achieve a drive connection between the first fixing element 311 and the base lifting device 200. The end of the base connecting shaft 120 away from the base body 110 can be fastened to one end of the adapter body 340 by screws or other structures to achieve a tight connection between one end of the adapter body 340 and the base assembly 100. Simultaneously, this also enables the base lifting device 200 to be driven and connected to the base assembly 100 via the base adjustment mechanism 300. In addition, to allow the other end of the adapter body 340 to pass sequentially through the second fixed element 312, the first movable element 320, and the second movable element 330, corresponding through holes are provided in the middle of the second fixed element 312, the middle of the first movable element 320, and the middle of the second movable element 330. The diameter of each through hole is slightly larger than the diameter of the corresponding part of the adapter body 340, so as to leave adjustment margin for the adapter body 340 along the first and second directions. Furthermore, to facilitate the adjustment of the base adjustment mechanism 300 along the first and second directions, the fixed elements and movable elements mentioned in all examples of this application are preferably plate structures. At the same time, to better realize the connection of water or electrical circuits in the base assembly 100, the adapter body 340 can be a hollow structure. In addition, several wiring holes or water holes are reserved in the corresponding positions of the fixed elements and movable elements.

[0046] In this way, when the base adjustment mechanism 300 of this application adjusts the base assembly 100 in the first direction through the first direction adjustment component 350, it can, under the limitation of the first direction locking structure, only drive the second movable element 330 and respectively drive the adapter body 340 and the first movable element 320 to move in the first direction relative to the second fixed element 312, thereby achieving the adjustment of the base assembly 100 fixed on the adapter body 340 in the first direction, without affecting the adjustment of the base assembly 100 in the second direction. Similarly, when the base adjustment mechanism 300 of this application adjusts the base in the second direction through the second direction adjustment component 360, it can, under the limitation of the second direction locking structure, only drive the second movable element 330 and drive the adapter body 340 to move in the second direction relative to the first movable element 320, thereby achieving the adjustment of the base assembly 100 fixed on the adapter body 340 in the second direction, without affecting the adjustment of the base assembly 100 in the first direction. As can be seen, the base adjustment mechanism 300 of this application can adjust the base assembly 100 separately in a first direction and a second direction that are perpendicular to each other when the base is being aligned, so that the two directions are adjusted without affecting each other, thereby greatly reducing the difficulty of adjustment.

[0047] In some examples, to better achieve the aforementioned limitation that the first movable element 320 can only move in a first direction relative to the second fixed element 312, such as... Figure 7 , Figure 8 and Figure 9 As shown, the first-direction locking structure may specifically include a first groove 31 extending along the first direction and a first protrusion 32 locked within the first groove 31 and freely movable along the extending direction of the first groove 31. The first groove 31 is recessed on the surface of the second fixing element 312 away from the base, and the first protrusion 32 protrudes on the surface of the first movable element 320 facing the second fixing element 312. Specifically, the length of the first groove 31 should be greater than the length of the first protrusion 32 so that the first protrusion 32 can move freely along the extending direction of the first groove 31. At the same time, the width of the first groove 31 should be equal to the width of the first protrusion 32 to restrict the first protrusion 32 from moving in any direction other than the extending direction of the first groove 31.

[0048] In some examples, to better achieve the above restriction that the second movable element 330 can only move in a second direction relative to the first movable element 320, such as... Figure 6 , Figure 9 and Figure 10As shown, the second-direction locking structure includes a second groove 33 extending along the second direction and a second protrusion 34 locked within the second groove 33 and freely movable along the extending direction of the second groove 33. The second groove 33 is recessed on the surface of the second movable element 330 facing the first movable element 320, and the second protrusion 34 protrudes on the surface of the first movable element 320 away from the second fixed element 312. Specifically, the length of the second groove 33 should be greater than the length of the second protrusion 34 so that the second protrusion 34 can move freely along the extending direction of the second groove 33. At the same time, the width of the second groove 33 should be equal to the width of the second protrusion 34 to restrict the second protrusion 34 from moving in any direction other than the extending direction of the second groove 33.

[0049] In some examples, to better achieve the aforementioned driving of the second movable element 330 and respectively driving the adapter 340 and the first movable element 320 to move together relative to the second fixed element 312 in the first direction, such as... Figure 3 , Figure 4 , Figure 6 and Figure 11As shown, the first direction adjustment assembly 350 may specifically include a first direction adjustment knob 351, a first knob fixing member 352, and a first knob adapter 353. The first knob adapter 353 is fixed on the surface of the second fixing element 312 away from the base assembly 100. The first knob fixing member 352 is fixed on the side wall of the second movable element 330. The first direction adjustment knob 351 includes a first knob part 3511, a first limiting member 3512, and a first drive shaft part 3513 extending along the first direction. One end of the first drive shaft part 3513 is fastened to the first knob part 3511. The other end of the first drive shaft part 3513 passes through the first knob fixing member 352 and is sequentially fixed with the first limiting member 3512 and threadedly connected to the first knob adapter 353. Specifically, the fastening connection between the first knob adapter 353 and the second fixed element 312, and the fastening connection between the first knob fixing element 352 and the second movable element 330, can be achieved by screws or other structures. Meanwhile, since the first knob adapter 353 is fixed to the second fixed element 312 and then threadedly connected to the first drive shaft portion 3513 located in the second movable element 330, the end of the first knob adapter 353 away from the second fixed element 312 needs to penetrate the first movable element 320 and extend into the second movable element 330. Therefore, the first movable element 320 and the second movable element 330 need to have corresponding through holes, and these through holes need to have an adjustment margin allowing the first movable element 320 and the second movable element 330 to move in the first direction. In this way, when the aforementioned first direction adjustment assembly 350 performs first direction adjustment, the first knob portion 3511 of the first direction adjustment knob 351 can be rotated clockwise or counterclockwise to drive the first drive shaft portion 3513 to rotate clockwise or counterclockwise. This causes relative displacement between the threaded first drive shaft portion 3513 and the first knob adapter 353 along the first direction. Meanwhile, since the first knob adapter 353 is fixed on the second fixing element 312, it will remain stationary. The state of the first drive shaft 3513 causes it to move away from or towards the first knob adapter 353 in the first direction. Then, under the limiting cooperation of the first limiting member 3512 and the first knob part 3511 on the first knob fixing member 352, the second movable element 330 is driven and the adapter body 340 and the first movable element 320 are respectively driven to move in the first direction relative to the second fixing element 312, thereby realizing the adjustment of the base assembly 100 fixed on the adapter body 340 in the first direction.

[0050] In some examples, to better achieve the above-mentioned driving of the second movable element 330 and the driving of the adapter 340 to move in the second direction relative to the first movable element 320, such as... Figure 3 , Figure 4 , Figure 7 and Figure 12 As shown, the second direction adjustment assembly 360 may specifically include a second direction adjustment knob 361, a second knob fixing member 362, and a second knob adapter 363. The second knob adapter 363 is fixed on the surface of the second movable element 330 away from the first movable element 320. The second knob fixing member 363 is fixed on the side wall of the second fixed element 312. The second direction adjustment knob 361 includes a second knob part 3611, a second limiting member 3612, and a second drive shaft part 3613 extending along the second direction. One end of the second drive shaft part 3613 is fastened to the second knob part 3611. The other end of the second drive shaft part 3613 passes through the second knob fixing member 362 and is sequentially fixed with the second limiting member 3612 and threadedly connected to the second knob adapter 363. Specifically, the fastening connection between the second knob adapter 363 and the second movable element 330, and the fastening connection between the second knob fixing member 362 and the second fixing element 312, can be achieved using screws or other structures. The first knob adapter 363 can have a T-shaped structure, so that its horizontal part is fixed on the surface of the second movable element 330 away from the first movable element 320, while its vertical part can be threaded to the other end of the second drive shaft 3613. At the same time, since the second drive shaft 3613 is located in the second fixing element 312, the vertical part of the first knob adapter 363 needs to pass through the second movable element 330 and the first movable element 320 in sequence and extend into the second fixing element 312. Therefore, the second movable element 330, the first movable element 320, and the second fixing element 312 need to have corresponding through holes, and these through holes need to have an adjustment margin to allow the second movable element 330 to move in the second direction. In this way, when the aforementioned second direction adjustment assembly 360 performs second direction adjustment, the second knob portion 3611 of the second direction adjustment knob 361 can be rotated clockwise or counterclockwise to drive the second drive shaft portion 3613 to rotate clockwise or counterclockwise, thereby causing relative displacement between the threaded second drive shaft portion 3613 and the second knob adapter 363 along the second direction. Simultaneously, since the second knob fixing member 362 is fixed to the second fixing element 312, the second limiting member 3612 and the second knob adapter 363... With the two knobs 3611 working together to limit the first knob fixing member 352, the second drive shaft 3613 is in a state where it only rotates but its position remains unchanged. This causes the second knob adapter 363 to move away from or towards the second drive shaft 3613 in the second direction, thereby driving the second movable element 330 and the adapter body 340 to move relative to the second fixing element 312 in the second direction, thereby realizing the adjustment of the base assembly 100 fixed on the adapter body 340 in the second direction.

[0051] In some examples, this is to better achieve quantitative adjustment in the base assembly 100 pair. For example... Figure 3 and Figure 4 As shown, in the first direction adjustment assembly 350 and the second direction adjustment assembly 360 that realize the centering operation of the base assembly 100, the threaded connection between the other end of the first drive shaft 3513 and the first knob adapter 353, and the threaded connection between the other end of the second drive shaft 3613 and the second knob adapter 363 are achieved by fine threads or special threads. Meanwhile, the first direction adjustment knob 351 and the second direction adjustment knob 361 are provided with corresponding scales. Specifically, the surface of the first direction adjustment knob 351 (specifically, the first knob part 3511) and / or the surface of the second direction adjustment knob 361 (specifically, the second knob part 3611) are provided with scale lines, allowing the operator to adjust the centering of the first and second directions according to the scale lines. Figure 14 As shown, taking the centering adjustment in the second direction as an example for further explanation: An initial position mark 30 is provided on the second fixed element 312, and a scale line 3614 is provided on the surface of the second direction adjustment knob 361. With the initial position mark 30 as the reference, the centering adjustment in the second direction is achieved by rotating the second direction adjustment knob 361 clockwise or counterclockwise by a certain angle α. At the same time, the rotation angle α can be converted into the adjustment amount X0 of the current second direction centering adjustment through the conversion formula X0=Kα, where K is the conversion coefficient. Different conversion coefficients of K can be achieved through different thread designs in the first direction adjustment component 350, thereby achieving centering adjustments in the second direction with different adjustment accuracies. It can be understood that the centering adjustment in the first direction can also be achieved in the same way.

[0052] In some examples, to better lock the second movable element 330 and the first movable element 320 onto the second fixed element 312 after the first direction adjustment assembly 350 and the second adjustment assembly 360 have been adjusted, such as... Figure 4 and Figure 13 As shown, the number of the aforementioned locking components 370 can be set to multiple, specifically as follows: Figure 4 The four locking components shown are arranged at four corners. Each locking assembly 370 may specifically include a screw 371 and a washer 372. The screw shank of the screw 371 must pass through the washer 372, the second movable element 330, and the first movable element 320 in sequence before being fastened to the threaded hole on the second fixed element 312. Therefore, the second movable element 330 and the first movable element 320 need to be provided with corresponding through holes, and the diameter of the through holes needs to be slightly larger than the screw shank of the screw 371, so as to leave an adjustment margin for the first movable element 320 and the second movable element 330 to move in the first direction and for the second movable element to move in the second direction.

[0053] In some examples, since the base assembly 100 needs to maintain precise positioning and its bearing surface needs to remain parallel to the horizontal plane during operation, the base adjustment mechanism 300 of this application also needs to perform a leveling operation on the base assembly 100. In this case, such as Figure 4 and Figure 7 As shown, the other end of the adapter body 340 is specifically fastened to the second movable element 330 via a third movable element 380. The third movable element 380 is disposed close to the surface of the second movable element 330 away from the first movable element 320, and the other end of the adapter body 340 is fastened to the third movable element 380 by a first screw 381. The third movable element 380 is fastened to the second movable element 330 by a second screw 382. Several horizontal height adjustment components 390 are also provided between the third movable element 380 and the second movable element 330. In this way, the levelness of the base assembly 100 on the adapter body 340 can be adjusted by adjusting the gap between the third movable element 380 and the second movable element 330 in multiple positions using the several horizontal height adjustment components 390.

[0054] In some examples, to better achieve the above leveling operation, such as Figure 4 and Figure 7 As shown, the third movable element 380 is specifically triangular in shape, and a horizontal height adjustment component 390 is provided at each corner of the third movable element 380 to better adjust the levelness of the base assembly 100 on the adapter 340 using the principle of triangular positioning. Further, to achieve the gap adjustment between the third movable element 380 and the second movable element 330 in corresponding positions, the horizontal height adjustment component 390 includes a screw portion 391 and a knob portion 392 for driving the screw portion 391 to rotate. The surface of the knob portion 392 is provided with scale lines. One end of the screw portion 391 is fixed to the knob portion 392, and the other end of the screw portion 391 passes through the third movable element 380 and abuts against the surface of the second movable element 330. The screw portion 391 and the third movable element 380 are connected by a threaded engagement. Meanwhile, to provide some buffer protection for the surface of the third movable element 380, the other end of the screw portion 391 can first pass through the washer 393 and then through the third movable element 380, so that the washer 393 is buffered between the knob portion 392 and the third movable element 380. During adjustment, the second screw 382 that fastens the third movable element 380 and the second movable element 330 must first be loosened. Then, according to the scale line, the knob portion 392 of each leveling height adjustment component 390 is precisely adjusted to accurately change the length of the corresponding screw portion 391 between the third movable element 380 and the second movable element 330, thereby realizing the gap adjustment between the corresponding positions of the third movable element 380 and the second movable element 330, and thus realizing the above-mentioned leveling operation.

[0055] In one embodiment, this application also provides a base adjustment mechanism for a semiconductor device. The structure and function of the base adjustment mechanism can be referred to the base adjustment mechanism in the above embodiment, and will not be repeated here.

[0056] Although this application has been shown and described with respect to one or more implementations, equivalent variations and modifications will occur to those skilled in the art based on a reading and understanding of this specification and drawings. This application includes all such modifications and variations and is limited only by the scope of the appended claims. In particular, with respect to the various functions performed by the aforementioned components, the terminology used to describe such components is intended to correspond to any component (unless otherwise indicated) that performs the specified function of said component (e.g., is functionally equivalent to it), even if structurally not equivalent to the disclosed structure performing the functions in the exemplary implementations of this specification shown herein.

[0057] That is, the above description is only an embodiment of this application and does not limit the patent scope of this application. Any equivalent structural or procedural changes made using the content of this application’s specification and drawings, such as the combination of technical features between different embodiments, or direct or indirect application in other related technical fields, are similarly included within the patent protection scope of this application.

[0058] Furthermore, it should be understood that in the description of this application, the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application. Additionally, for structural elements with the same or similar characteristics, this application may use the same or different reference numerals for identification. Moreover, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more features. In the description of this application, "multiple" means two or more, unless otherwise explicitly specified.

[0059] In this application, the term "exemplary" is used to mean "serving as an example, illustration, or description." Any embodiment described as "exemplary" in this application is not necessarily to be construed as more preferred or advantageous than other embodiments. This application has been provided above to enable any person skilled in the art to implement and use it. Various details have been set forth in the above description for purposes of explanation. It should be understood that those skilled in the art will recognize that this application can be implemented without using these specific details. In other embodiments, well-known structures and processes will not be described in detail to avoid obscuring the description of this application with unnecessary detail. Therefore, this application is not intended to be limited to the embodiments shown, but is consistent with the broadest scope of the principles and features disclosed herein.

Claims

1. A base adjustment mechanism for a semiconductor device, used for transitional connection between a base assembly and a base lifting device, characterized in that, The base adjustment mechanism includes: The mechanism base includes a first fixing element and a second fixing element arranged perpendicularly to each other, and the first fixing element is drivenly connected to the base lifting device. The first movable element is disposed close to the surface of the second fixed element away from the base assembly, and a first direction locking structure is provided between the first movable element and the second fixed element to restrict the first movable element to move only in a first direction relative to the second fixed element. The second movable element is disposed close to the surface of the first movable element away from the second fixed element, and a second direction locking structure is provided between the second movable element and the first movable element to restrict the second movable element to move only in a second direction relative to the first movable element, wherein the second direction is perpendicular to the first direction. An adapter body is provided, one end of which is fastened to the base assembly. The other end of the adapter body passes through the second fixed element, the first movable element, and the second movable element in sequence, and is fastened to the second movable element. The middle portions of the first and second movable elements each have corresponding through holes, the diameter of which is larger than the diameter of the corresponding portion of the adapter body, allowing the other end of the adapter body to pass through, thus providing adjustment allowance for the adapter body along the first and second directions. A first direction adjustment assembly is disposed between the second movable element and the second fixed element to drive the second movable element and respectively drive the adapter body and the first movable element to move together relative to the second fixed element in a first direction. The second direction adjustment component is disposed between the second movable element and the second fixed element to drive the second movable element and the adapter body to move in a second direction relative to the first movable element. A locking assembly is disposed between the second movable element and the second fixed element to lock the second movable element and the first movable element onto the second fixed element after the first direction adjustment assembly and the second direction adjustment assembly have been adjusted.

2. The base adjustment mechanism according to claim 1, characterized in that, The first directional locking structure includes a first groove extending along a first direction and a first protrusion locked in the first groove and freely movable along the extension direction of the first groove. The first groove is recessed on the side surface of the second fixing element away from the base assembly, and the first protrusion is protruded on the side surface of the first movable element facing the second fixing element.

3. The base adjustment mechanism according to claim 1, characterized in that, The second directional locking structure includes a second groove extending along the second direction and a second protrusion locked in the second groove and freely movable along the extension direction of the second groove. The second groove is recessed on the side surface of the second movable element facing the first movable element, and the second protrusion is protruded on the side surface of the first movable element away from the second fixed element.

4. The base adjustment mechanism according to claim 1, characterized in that, The first direction adjustment assembly includes a first direction adjustment knob, a first knob fixing member, and a first knob adapter. The first knob adapter is fixed on the surface of the second fixing element away from the base assembly. The first knob fixing member is fixed on the side wall of the second movable element. The first direction adjustment knob includes a first knob part, a first limiting member, and a first drive shaft part extending along the first direction. One end of the first drive shaft part is fastened to the first knob part. The other end of the first drive shaft part passes through the first knob fixing member and is sequentially fixed with the first limiting member and threadedly connected to the first knob adapter.

5. The base adjustment mechanism according to claim 4, characterized in that, The second direction adjustment assembly includes a second direction adjustment knob, a second knob fixing member, and a second knob adapter. The second knob adapter is fixed on the surface of the second movable element away from the first movable element. The second knob fixing member is fixed on one side wall of the second fixing element. The second direction adjustment knob includes a second knob part, a second limiting member, and a second drive shaft part extending along the second direction. One end of the second drive shaft part is fastened to the second knob part. The other end of the second drive shaft part passes through the second knob fixing member and is sequentially fixed with the second limiting member and threadedly connected to the second knob adapter.

6. The base adjustment mechanism according to claim 5, characterized in that, The surface of the first direction adjustment knob and / or the surface of the second direction adjustment knob are provided with scale lines.

7. The base adjustment mechanism according to any one of claims 1-6, characterized in that, The other end of the adapter body is fastened to the second movable element through a third movable element. The third movable element is disposed close to the surface of the second movable element away from the first movable element. The other end of the adapter body is fastened to the third movable element by a first screw. The third movable element is fastened to the second movable element by a second screw. Several horizontal height adjustment components are also provided between the third movable element and the second movable element.

8. The base adjustment mechanism according to claim 7, characterized in that, The third movable element is triangular, and a horizontal height adjustment element is provided at each corner of the third movable element.

9. The base adjustment mechanism according to claim 7, characterized in that, The horizontal height adjustment component includes a screw part and a knob part for driving the screw part to rotate. The surface of the knob part is provided with scale lines. One end of the screw part is fixed to the knob part, and the other end of the screw part passes through the third movable element and abuts against the surface of the second movable element. The screw part and the third movable element are connected by a threaded engagement.

10. The base adjustment mechanism according to any one of claims 1-6, 8 and 9, characterized in that, The adapter body has a hollow structure.

11. A semiconductor device, characterized in that, The device includes a semiconductor process assembly, a base assembly, a base lifting device, a chamber with an enclosed space, and a base adjustment mechanism as described in any one of claims 1-10. The base assembly and the semiconductor process assembly are respectively built into the enclosed space. The base lifting device and the base adjustment mechanism are respectively mounted on the lower part of the chamber via a frame. The base assembly includes a base body and a base connecting shaft. The lower surface of the base body passes through the bottom wall of the chamber via the base connecting shaft and is fastened to one end of the adapter seat of the base adjustment mechanism, so that the base lifting device is driven to connect to the base assembly through the base adjustment mechanism.

12. The semiconductor device according to claim 11, characterized in that, The portion of the base connecting shaft located outside the chamber is also fitted with a bellows. One end flange of the bellows is fixed to one end of the adapter body, and the other end flange of the bellows is fixed to the bottom wall of the chamber or the frame.

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