Tower elevators, including their logistics systems and the conveying methods using them.
By introducing a gap adjustment unit and a drive unit into the tower elevator, the problem of low conveying efficiency caused by the limited number of substrates and the difference in layer height is solved, and more efficient substrate conveying is achieved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- SYSTEM ENGINEERING MEGA SOLUTION CO LTD
- Filing Date
- 2022-08-30
- Publication Date
- 2026-05-26
AI Technical Summary
Existing tower lifts have limitations when conveying substrates. They have a limited number of substrates and cannot simultaneously convey containers to different floors, resulting in low conveying efficiency, especially when the floors are at different heights.
The tower lift design includes a first bracket module and a second bracket module. The vertical movement of the bracket modules is achieved through a drive unit and a gap adjustment unit. The gap between the bracket modules is adjusted through the gap adjustment unit to accommodate the height differences of different floors.
The increased number of substrates conveyed in the tower lift improves conveying efficiency and enables containers to be conveyed to multiple layers simultaneously, adapting to the height differences between different layers.
Smart Images
Figure CN115744712B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to a tower lift, a logistics system including the tower lift, and a conveying method using the tower lift. More specifically, this invention relates to a tower lift for vertically conveying objects to be conveyed using a bracket module, a logistics system including the tower lift, and a conveying method using the tower lift. Background Technology
[0002] Typically, a production line in a semiconductor or display manufacturing plant consists of multiple layers, and equipment for performing processes such as deposition, exposure, etching, ion implantation, and cleaning can be set on each layer. Semiconductor devices or display devices can be manufactured by repeatedly performing a series of unit processes on a semiconductor wafer used as a semiconductor substrate or a glass substrate used as a display substrate.
[0003] At the same time, material transfer between layers can be performed by installing tower lifts that pass through each layer in the vertical direction, such as the transfer of materials like semiconductor wafers or glass substrates. Figure 1 This is a schematic diagram showing the configuration of a standard tower lift 100 used to transfer materials to a tower 1 equipped with a production line for processing substrates.
[0004] refer to Figure 1 The tower lift 100 includes a main frame 102, a bracket module 110, a drive module, etc. The main frame 102 extends vertically. The bracket module 110 is positioned in front of the main frame 102 and configured to move vertically along the main frame 102. The bracket module 110 is loaded with material and conveys the material to positions corresponding to each layer 1-a, 1-b, and 1-c of the tower 1 equipped with a production line for processing substrates. For example, the bracket module 110 may be loaded with containers 10 for storing substrates. In one example, the bracket module 110 is loaded with two containers 10 vertically. The bracket module 110 is connected to a drive belt 142, and the drive module 140 causes the drive belt 142 to move the bracket module 110. For example, the drive module 140 may include a drive pulley in which the bracket module 110 is coupled to the drive belt 142, a drive unit for rotating the drive pulley, etc.
[0005] However, when each bracket module 110 moves uniformly on the same drive belt 142, the position of any one container 10 restricts the position of any other container 10. Consequently, there is a problem that the number of substrates that can be transported is limited, and transporting a large number of substrates takes a long time.
[0006] Furthermore, even if the number of bracket modules 110 increases, each bracket module 110 is fixed to the same drive belt 142, and therefore the gap between the individual bracket modules 110 is also fixed. Accordingly, when the heights of each layer 1-a, 1-b, and 1-c are different, there is a problem that it is impossible to simultaneously transfer the container 10 to multiple layers 1-a, 1-b, and 1-c. Summary of the Invention
[0007] This invention aims to provide a tower elevator that can increase the number of substrates that can be conveyed.
[0008] The problems to be solved by this invention are not limited to those described above. Those skilled in the art will clearly understand any problems not mentioned below based on the following description.
[0009] An exemplary embodiment of the present invention provides a tower lift, comprising: a body; a first bracket module and a second bracket module configured to move vertically along the body and each supporting an object to be transported; a drive unit including a drive belt for vertically moving the first bracket module and the second bracket module, the first bracket module or the second bracket module being mounted on the drive belt; and a gap adjustment unit for adjusting the gap between the first bracket module and the second bracket module.
[0010] In an exemplary embodiment, the gap adjustment unit may include: a base plate mounted on a drive belt; and a drive member that causes one of the first bracket module and the second bracket module to move relative to the other on the base plate.
[0011] In an exemplary embodiment, the gap adjustment unit may further include: a drive rail disposed on a base plate, and a first bracket module and a second bracket module mounted on the drive rail; and the drive component may include: a first drive device for moving the first bracket module on the drive rail; and a second drive device for moving the second bracket module on the drive rail.
[0012] In an exemplary embodiment, one of the first bracket module or the second bracket module may be fixed to the drive belt, and the gap adjustment unit may include: a telescopic structure connected to the first bracket module and the second bracket module; and an actuator mounted on the first bracket module or the second bracket module to extend or retract the telescopic structure.
[0013] In an exemplary embodiment, the first bracket module may be fixed to the drive belt, the first bracket module may be located above the second bracket module, and the gap adjustment unit may include: a secondary belt with a secondary pulley connected to the first bracket module and the second bracket module; a secondary pulley fixed to the first bracket module and connected to the secondary belt; and a rotating component for rotating the secondary pulley.
[0014] In an exemplary embodiment, the drive module may further include: a main pulley disposed above the body and connected to a drive belt; and a rotating device for rotating the main pulley.
[0015] In an exemplary embodiment, the tower crane may further include a guide rail for guiding the vertical movement of the first bracket module and the second bracket module, and the first bracket module and the second bracket module may be provided with guide wheels that contact the guide rail.
[0016] In an exemplary embodiment, the object to be transported may be a container that holds a substrate.
[0017] Another exemplary embodiment of the present invention provides a logistics system including a tower lift for conveying containers storing substrates to one or more destinations, wherein the tower lift includes: a body; a first bracket module and a second bracket module configured to be vertically movable along the body via a drive belt; and a gap adjustment unit for adjusting the gap between the first bracket module and the second bracket module, wherein the gap between the first bracket module and the second bracket module is set to be changeable by the gap adjustment unit, and the gap between the one or more destinations is different.
[0018] In an exemplary embodiment, the gap adjustment unit may include: a base plate mounted on a drive belt; and a drive member that causes one of the first bracket module and the second bracket module to move relative to the other on the base plate.
[0019] In an exemplary embodiment, one of the first bracket module or the second bracket module may be fixed to the drive belt, and the gap adjustment unit may include: a telescopic structure connected to the first bracket module and the second bracket module; and an actuator mounted on the first bracket module or the second bracket module to extend or retract the telescopic structure.
[0020] In an exemplary embodiment, the first bracket module may be fixed to the drive belt, the first bracket module may be located above the second bracket module, and the gap adjustment unit may include: a secondary belt with a secondary pulley connected to the first bracket module and the second bracket module; a secondary pulley fixed to the first bracket module and connected to the secondary belt; and a rotating component for rotating the secondary pulley.
[0021] In an exemplary embodiment, the logistics system may further include: a main pulley disposed above the body and connected to a drive belt; and a rotating device for rotating the main pulley.
[0022] In an exemplary embodiment, the tower crane may further include a guide rail for guiding the vertical movement of the first bracket module and the second bracket module, and the first bracket module and the second bracket module may be provided with guide wheels that contact the guide rail.
[0023] In an exemplary embodiment, the first bracket module and the second bracket module each further include: a support member for supporting a container for storing a substrate therein; and a moving device for extending the support member in the direction of the destination or retracting the support member in the opposite direction.
[0024] Another exemplary embodiment of the present invention provides a transmission method, comprising: when an object to be transmitted is simultaneously transmitted to adjacent destinations at a distance of a first distance, raising a first bracket module and a second bracket module, respectively supporting the object to be transmitted, by means of a drive unit, while the distance between the first bracket module and the second bracket module is adjusted to the first distance; and when an object to be transmitted is simultaneously transmitted to adjacent destinations at a distance of a second distance, raising a first bracket module and a second bracket module, while the distance between the first bracket module and the second bracket module is adjusted to the second distance, wherein the first distance and the second distance are different from each other.
[0025] In an exemplary embodiment, the object to be transported may be a container for holding a substrate, and each of the destinations may be provided with a storage device for storing equipment for processing the substrate or a container for holding the substrate.
[0026] In an exemplary embodiment, the drive unit may include: a drive belt that causes a first bracket module and a second bracket module to move vertically, and the first bracket module or the second bracket module is mounted on the drive belt; a main pulley that is connected to the drive belt; and a rotating device for rotating the main pulley.
[0027] In an exemplary embodiment, the first bracket module and the second bracket module can be mounted on a base plate, and when the base plate is raised and lowered by a drive belt, the first bracket module and the second bracket module can be raised simultaneously by a drive unit, and the gap between the first bracket module and the second bracket module can be adjusted on the base plate.
[0028] In an exemplary embodiment, the first bracket module can be raised and lowered directly via a drive belt, the second bracket module can be connected to the first bracket module to be raised and lowered together with the first bracket module, and the second bracket module can be connected to the first bracket module to be able to adjust the gap relative to the first bracket module.
[0029] In an exemplary embodiment, the second bracket module may be connected to the first bracket module via a secondary belt, and the secondary belt may be configured to operate separately from the drive unit via a secondary pulley fixed to the first bracket module and connected to the secondary belt, and a rotating component for rotating the secondary pulley.
[0030] In an exemplary embodiment, the second bracket module can be connected to the first bracket module via a telescopic structure, and the second bracket module can be raised and lowered relative to the first bracket module via an actuator that extends or retracts the telescopic structure.
[0031] According to an exemplary embodiment of the present invention, an advantage is that the number of substrates conveyed in the tower elevator can be increased.
[0032] The effects of this invention are not limited to those described above. Those skilled in the art will clearly understand from this specification and the accompanying drawings any effects not mentioned. Attached Figure Description
[0033] Figure 1 This is a schematic diagram illustrating a typical tower lift.
[0034] Figure 2 This is a schematic diagram illustrating a tower elevator according to an exemplary embodiment of the present invention.
[0035] Figure 3 This is a schematic diagram illustrating a tower elevator including a gap adjustment unit according to another exemplary embodiment of the present invention.
[0036] Figure 4 and Figure 5 It is a display Figure 3 A schematic diagram of the gap adjustment unit.
[0037] Figure 6 This is a schematic diagram illustrating a tower elevator including a gap adjustment unit according to another exemplary embodiment of the present invention.
[0038] Figure 7 It is a display Figure 6 A schematic diagram of the gap adjustment unit.
[0039] Figures 8 to 12 Each of these is a schematic diagram illustrating the state of transferring an object to be transferred to a semiconductor production line according to an exemplary embodiment of the present invention. Detailed Implementation
[0040] Advantages and features, as well as methods for implementing them, will become apparent when the exemplary embodiments described in detail with reference to the accompanying drawings are given. However, this disclosure is not limited to the exemplary embodiments disclosed herein, but will be practiced in various forms, and the exemplary embodiments are provided so that this disclosure is fully disclosed and its scope will be fully understood by those skilled in the art, and this disclosure will be limited only by the scope of the appended claims.
[0041] Even if not defined, all terms used herein (including technical or scientific terms) have the same meaning as commonly accepted by one of ordinary skill in the relevant art to which this invention pertains. Terms defined by a general dictionary may be interpreted as having the same meaning as in the text of related technologies and / or this application, and even if a term is not clearly defined herein, it is not to be conceptualized or over-formally interpreted. The terminology used in this specification is for the purpose of describing exemplary embodiments and is not intended to limit the invention.
[0042] In this specification, unless otherwise stated, the singular form includes the plural form. In addition to the compositions, components, elements, steps, operations, and / or devices mentioned, the term "comprising" and / or various variations of the verb do not exclude the presence or addition of one or more other compositions, components, elements, steps, operations, and / or devices. Furthermore, "provided" and "having," etc., should be interpreted in the same manner.
[0043] Figure 2 This is a schematic diagram illustrating a tower lift according to an exemplary embodiment of the present invention. The tower lift 200 according to an embodiment of the present invention can be used to transport objects in a vertical direction. For example, the tower lift 200 can be used to transport materials to each floor of a multi-story manufacturing plant equipped with semiconductor or display manufacturing equipment.
[0044] refer to Figure 2 The tower hoist 200 includes a main body 202, a bracket module 220, a drive unit 240, a guide rail 204, and a gap adjustment unit 300.
[0045] The body 202 extends vertically. The bracket module 220 is configured to move vertically along the body 202. In one example, the bracket module 220 is positioned in front of the body 202. In one example, multiple bracket modules 220 are provided. For example, the bracket module 220 includes a first bracket module 222 and a second bracket module 224. Alternatively, a larger number of bracket modules 220 may be provided.
[0046] The tray module 220 includes guide wheels 205, a support member 22, and a moving device 24. The guide wheels 205 are mounted on a guide rail 204 (described later) to allow the tray module 220 to move parallel to the body 202. The object to be transferred is mounted on the support member 22. In one example, the object to be transferred is a container 20 containing materials such as semiconductor wafers, glass substrates, or marking sheets. In one example, the container 20 may be a front-opening unified pod (FOUP). Alternatively, the container 20 may be a POD. Furthermore, the container 20 may be a box for holding multiple printed circuit boards, a tray for holding multiple semiconductor packages, etc. The moving device 24 is configured as a robotic arm capable of extending or retracting the support member 22. The tray module 220 may also have a robotic arm for gripping the container 20. The tray module 20 can be transformed into various structures capable of moving the container 20.
[0047] The drive unit 240 moves the bracket module 220 in the vertical direction. In one example, the drive unit 240 includes a drive belt 242, a main pulley 241, and a rotating device 243.
[0048] Drive belt 242 allows bracket module 220 to move along body 202. Either the first bracket module 222 or the second bracket module 224 is directly or indirectly mounted on drive belt 242 to move integrally with it. Main pulley 241 and rotating device 243 allow drive belt 242 to move bracket module 220 in the vertical direction. Drive belt 242 is mounted on main pulley 241. In one example, drive belt 242 is configured as a timing belt. Rotating device 243 rotates main pulley 241. Drive belt 242 rotates via the rotation of main pulley 241, and correspondingly, bracket module 220 moves in the vertical direction.
[0049] The guide rail 204 allows the bracket module 220 to move along with the body 202 in a direction parallel to the body 202. The guide rail 204 extends vertically parallel to the body 202. The bracket module 220 may be provided with guide wheels 205. The guide wheels 205 are mounted on the guide rail 204 and guide the bracket module 220 vertically along the guide rail 204. For example, the bracket module 220 may be equipped with two guide wheels 205 connected to the guide rail 204 to support the bracket module 220 at two points.
[0050] In this example, the drive unit 240 may further include a braking module 250 and a weight module 244. The braking module 250 is configured to prevent the carrier module 220 from falling when the drive belt 242 breaks. In one example, the braking module 250 may be configured to prevent the carrier module 220 from falling by utilizing the friction between the body 202 and a disc, such as a disc. The weight module 244 applies weight to the drive belt 242 to facilitate stable transport of the carrier module 220. For example, the carrier module 220 may be connected to one end of the drive belt 242, and the weight module 244 may be connected to the other end of the drive belt 242. A balance belt 246 connected to the braking module 250 may be connected to both the carrier module 220 and the weight module 244.
[0051] The gap adjustment unit 300 adjusts the gap between the first bracket module 222 and the second bracket module 224. Hereinafter, the invention will be described based on the scenario where the bracket module 220 includes the first bracket module 222 and the second bracket module 224, and the gap adjustment unit 300 adjusts the gap between the first bracket module 222 and the second bracket module 224. However, alternatively, a larger number of bracket modules 220 can be provided, and the gap adjustment unit 300 can be provided to adjust the gap between the bracket modules 220. Reference will be made below. Figures 2 to 7 A detailed description of an exemplary embodiment of the gap adjustment unit 300 is provided.
[0052] Exemplary Example 1)
[0053] Figure 2 A tower lift 200 including a gap adjustment unit 300a according to an exemplary embodiment of the present invention is shown. (Reference) Figure 2 The spacing adjustment unit 300a has a base plate 321 and a driving component.
[0054] A base plate 321 is mounted on a drive belt 242. A drive member causes either the first bracket module 222 or the second bracket module 224 to move relative to the other on the base plate 321. In one example, the drive member includes a drive rail 323, a first drive device 322, and a second drive device 324. The drive rail 323 is disposed on the base plate 321. The first bracket module 222 and the second bracket module 224 are mounted on the drive rail 323. The drive rail 323 is disposed in a direction parallel to the drive belt 242. The first drive device 322 causes the first bracket module 222 to move vertically along the drive rail 323. The second drive device 324 causes the second bracket module 224 to move vertically along the drive rail 323. In one example, the first drive device 322 and the second drive device 324 are each configured as motors. However, the first drive device 322 and the second drive device 324 are not limited to this and may be configured as other drive devices capable of moving the first bracket module 222 and the second bracket module 224 along the rail. In the above examples, the invention has been described based on the configuration of each of the first drive device 322 and the second drive device 324. However, unlike this, only one of the first drive device 322 and the second drive device 324 may be configured to move the first bracket module 222 or the second bracket module 224 relative to the other.
[0055] The first bracket module 222 and the second bracket module 224 are connected to the base plate 321 via the drive rail 323. That is, the first bracket module 222 and the second bracket module 224 are indirectly connected to the drive belt 242 through the base plate 321 and the drive rail 323. When the drive belt 242 is driven, the base plate 321 moves vertically via the drive plate. When the base plate 321 moves, the first bracket module 222 and the second bracket module 224 move vertically simultaneously. However, due to the presence of the first drive device 322 and the second drive device 324, the first bracket module 222 and the second bracket module 224 can move independently on the base plate 321.
[0056] Exemplary Example 2)
[0057] Figure 3 This is a schematic diagram illustrating a tower elevator 200 including a gap adjustment unit 300b according to another exemplary embodiment of the present invention, and Figure 4 and Figure 5 Each show Figure 3 The telescopic structure 344. (Reference) Figures 3 to 5 The gap adjustment unit 300b includes a telescopic structure 344.
[0058] In exemplary embodiment 2, the first bracket module 222 is fixed to the drive belt 242. On the other hand, the second bracket module 224 is not fixed to the drive belt 242, but is indirectly connected to the drive belt 242 via the telescopic structure 344, which will be described later. The second bracket module 224 is not fixed to the drive belt 242, but is mounted on a guide rail via guide wheels, such that the second bracket module 224 is configured to move vertically along a direction parallel to the body.
[0059] The telescopic structure 344 connects the first bracket module 222 and the second bracket module 224. For example... Figures 4 to 5 As shown, the telescopic structure 344 is formed by a plurality of X-shaped links. The telescopic structure 344 retracts or extends to cause one of the first bracket module 222 and the second bracket module 224 to move relative to the other. The telescopic structure 344 has an actuator 342. The actuator 342 is mounted on either the first bracket module 222 or the second bracket module 224. In one example, the actuator 342 is mounted to the first bracket module 222. When the telescopic structure 344... Figure 4 The diagram unfolds or as shown Figure 5 When the diagram shows the retraction, the actuator 342 causes the second bracket module 224 to move relative to the first bracket module 222.
[0060] The first bracket module 222 is fixed to the drive belt 242, and the second bracket module 224 is indirectly connected to the drive belt 242 via a telescopic structure 344. When the drive belt 242 is driven, the first bracket module 222 moves in the vertical direction. Additionally, the second bracket module 224, connected to the first bracket module 222 via the telescopic structure 344, moves vertically together with the first bracket module 222. However, the telescopic structure 344 can adjust the gap between the first bracket module 222 and the second bracket module 224 as the telescopic structure 233 extends or retracts. Accordingly, the first bracket module 222 and the second bracket module 224 rise and fall together via the drive belt 242, but the gap between the first bracket module 222 and the second bracket module 224 can be adjusted within a range from the length of the telescopic structure 233 when extended to its maximum length to the length of the telescopic structure 233 when retracted to its minimum length.
[0061] Exemplary Example 3)
[0062] Figure 6 This is a schematic diagram illustrating a tower elevator 200 including a gap adjustment unit 300c according to another exemplary embodiment of the present invention, and Figure 7 It is a display Figure 6 A schematic diagram of the gap adjustment unit 300c. (Reference) Figures 6 to 7The gap adjustment unit 300c includes a connecting component 366, a secondary belt 364, a secondary pulley 362, and a rotating component 363.
[0063] In exemplary embodiment 3, the first bracket module 222 is fixed to the drive belt 242. On the other hand, the second bracket module 224 is not fixed to the drive belt 242, but is indirectly connected to the drive belt 242 via a secondary belt 364, which will be described later. The second bracket module 224 is not fixed to the drive belt 242, but is mounted on a guide rail via guide wheels, such that the second bracket module 224 is configured to move in a direction parallel to the body during vertical movement.
[0064] A secondary belt 364 is mounted on the first bracket module 222 and the second bracket module 224 to connect the first bracket module 222 and the second bracket module 224. The secondary belt 364 is mounted on a secondary pulley 362, and a rotating component 363 rotates the secondary pulley 362 to move the secondary belt 364. In one example, the secondary pulley 362 is mounted to the first bracket module 222 via a connecting component 366. In one example, one end of the secondary belt 364 may be wound around the secondary pulley 362, and the other end is connected to the second bracket module 224 via a connecting component 368. The gap between the first bracket module 222 and the second bracket module 224 increases with unidirectional rotation of the secondary pulley 362, and decreases in the opposite direction to the secondary pulley 362. The secondary belt 364 operates separately from the drive belt 242 via the secondary pulley 362 and the rotating component 363.
[0065] The first bracket module 222 is fixed to the drive belt 242, and the second bracket module 224 is indirectly connected to the drive belt 242 via a secondary belt 364. When the drive belt 242 is driven, the first bracket module 222 moves vertically. Then, the second bracket module 224, connected to the first bracket module 222 via the secondary belt 364, moves vertically together with the first bracket module 222. However, since the secondary belt 364 operates independently of the drive belt 242, the gap between the first bracket module 222 and the second bracket module 224 can be adjusted. Accordingly, the first bracket module 222 and the second bracket module 224 rise and fall together via the drive belt 242, but the gap between the first bracket module 222 and the second bracket module 224 can be adjusted independently via the secondary belt 364.
[0066] In the following text, reference will be made to Figures 8 to 12A method for conveying an object to be transferred to the semiconductor production line 800 of the present invention is described. Hereinafter, as an example, the transfer of the object to be transferred to the semiconductor production line 800 will be described using the gap adjustment unit 300 of Exemplary Example 1. However, the object to be transferred can also be transferred using the gap adjustment unit 300 of Exemplary Example 2 or Exemplary Example 3.
[0067] In the following text, the destination to which the object to be transferred is described is a semiconductor production line 800 with a multi-layered structure. However, unlike this, the destination can be set as another object (such as multiple processing chambers) instead of the semiconductor production line.
[0068] refer to Figure 8 The semiconductor production line 800 can have a multi-layered structure. For example, the semiconductor production line 800 can have a first layer, a second layer, a third layer, and a fourth layer. However, the invention is not limited to this, and the multi-layered structure of the semiconductor production line 800 can be modified in various ways. Semiconductor manufacturing equipment (not shown) for performing semiconductor manufacturing processes can be arranged in the semiconductor production line 800. In one example, the object to be transferred is a container 20 for holding substrates, and a storage device can be provided in each layer for storing equipment for handling substrates or for holding the container 20 for holding substrates. In one example, a tower crane 200 can transfer the container 20 for holding items between the various layers of the semiconductor production line 800.
[0069] In a semiconductor production line 800, the distance between adjacent layers can differ from one another. For example, the height of each layer can be set differently. When both the first carrier module 222 and the second carrier module 224 are directly connected to the drive belt 242, the gap between the first carrier module 222 and the second carrier module 224 cannot be adjusted. Consequently, when the heights of each layer are set differently, during the time it takes for one carrier module 220 to convey an object, the other carrier module 220 cannot convey the object. To prevent this, in this invention, the gap adjustment unit 300 adjusts the gap between the first carrier module 222 and the second carrier module 224.
[0070] In one example, the first carriage module 222 conveys the container 20 to each of the fourth and second layers, and the second carriage module 224 conveys the container 20 to each of the third and first layers.
[0071] In the following description, the invention will be based on the scenario where the first carrier module 222 conveys the container 20 to the fourth and second layers, and the second carrier module 224 conveys the container 20 to the third and first layers. However, the invention is not limited thereto, and the container 20 can be conveyed in various sequences in which the first carrier module 222 conveys the container 20 to layers higher than the second carrier module 224.
[0072] First, such as Figure 9 As shown, the first bracket module 222 and the second bracket module 224 are simultaneously raised by driving the drive belt 242. The drive of the drive belt 242 is stopped when the first bracket module 222 is positioned corresponding to the fourth layer or the second bracket module 224 is positioned corresponding to the third layer. In one example, the invention will be described based on the case where the drive of the drive belt 242 is stopped when the first bracket module 222 is positioned corresponding to the fourth layer. Subsequently, the second bracket module 224 moves to the position corresponding to the third layer via a second drive device provided in the gap adjustment module. Accordingly, as... Figure 10 As shown, the second carriage module 224 can transport container 20 to the third layer, while the first carriage module 222 can transport container 20 to the fourth layer.
[0073] Optionally, when the second bracket module 224 is placed in the position corresponding to the third layer, the drive belt 242 is stopped. Thereafter, the first bracket module 222 can be moved to the position corresponding to the fourth layer by means of the first drive device provided in the gap adjustment module. Alternatively, after the base plate 321 has moved to a position adjacent to both the third and fourth layers, the first bracket module 222 can be moved to the position corresponding to the fourth layer by means of the first drive device, and the second bracket module 224 can be moved to the position corresponding to the third layer by means of the second drive device.
[0074] Then, the first carriage module 222 conveys container 20 to the second layer, and the second carriage module 224 conveys container 20 to the first layer. (See reference) Figure 11 The first bracket module 222 and the second bracket module 224 are simultaneously lowered by driving the drive belt 242. The drive of the drive belt 242 is stopped when the first bracket module 222 is positioned corresponding to the second layer or the second bracket module 224 is positioned corresponding to the first layer. In one example, the invention is described based on the case where the drive of the drive belt 242 is stopped when the first bracket module 222 is positioned corresponding to the second layer. Thereafter, the second bracket module 224 moves to the position corresponding to the first layer via a second drive device provided in the gap adjustment module. Accordingly, as... Figure 12As shown, the second carriage module 224 can transport the container 20 to the first layer, while the first carriage module 222 can transport the container 20 to the second layer.
[0075] Optionally, when the second bracket module 224 is placed in the position corresponding to the third layer, the drive belt 242 is stopped. Thereafter, the first bracket module 222 can be moved to the position corresponding to the fourth layer by means of the first drive device provided in the gap adjustment module. Alternatively, after the base plate 321 has moved to a position adjacent to both the third and fourth layers, the first bracket module 222 can be moved to the position corresponding to the fourth layer by means of the first drive device, and the second bracket module 224 can be moved to the position corresponding to the third layer by means of the second drive device.
[0076] In the above example, the invention has been described in the case where the container 20 is transferred to the third and fourth layers based on the first bracket module 222 and the second bracket module 224, and then the container 20 is transferred to the first and second layers. However, unlike this, the first bracket module 222 and the second bracket module 224 can transfer the container 20 to the first and second layers, and then the container 20 is transferred to the third and fourth layers.
[0077] In the examples above, the invention has been described with reference to the case where the container 20 is transferred to an adjacent layer based on the first bracket module 222 and the second bracket module 224. However, unlike this, the second bracket module 224 may transfer the container 20 to the first or second layer, while the first bracket module 222 may transfer the container 20 to the fourth layer. Alternatively, the second bracket module 224 may transfer the container 20 to the first layer, while the first bracket module 222 may transfer the container 20 to the third layer.
[0078] According to the present invention, since the gap between the first bracket module 222 and the second bracket module 224 is adjusted, it has the advantage that the number of objects being transported can be increased.
[0079] The foregoing exemplary embodiments are provided to aid in understanding the present invention and do not limit the scope of the invention. It should be understood that various modified exemplary embodiments derived from the foregoing exemplary embodiments are also included within the scope of the present invention. The scope of protection of the present invention should be determined by the technical spirit of the claims, and it should be understood that the scope of protection of the present invention is not limited to the literal description of the claims themselves, but is substantially equivalent to the technical value.
Claims
1. A tower lift, comprising: ontology; A first bracket module and a second bracket module are configured to move vertically along the body and each support an object to be transported. A drive unit, the drive unit including a drive belt, the drive belt causing the first bracket module and the second bracket module to move vertically, and the first bracket module or the second bracket module is mounted on the drive belt; as well as A gap adjustment unit adjusts the gap between the first bracket module and the second bracket module. The gap adjustment unit includes: Base plate, said base plate is mounted on the drive belt; and A driving member that causes one of the first bracket module and the second bracket module to move relative to the other on the base plate. The gap adjustment unit further includes: A drive rail is provided on the base plate, and the first bracket module and the second bracket module are mounted on the drive rail. The driving component includes: A first driving device, the first driving device being used to move the first bracket module on the driving rail; and A second drive unit is used to move the second bracket module on the drive rail. The first drive device and the second drive device independently move the first bracket module and the second bracket module on the base plate.
2. The tower hoist according to claim 1, wherein the drive unit further comprises: A main pulley, which is disposed above the body and connected to the drive belt; as well as A rotating device for rotating the main pulley.
3. The tower hoist according to claim 1, further comprising: A guide rail is provided to guide the vertical movement of the first bracket module and the second bracket module. The first bracket module and the second bracket module are provided with guide wheels that contact the guide rail.
4. The tower elevator according to any one of claims 1 to 3, wherein the object to be transported is a container for holding a substrate.
5. A logistics system, comprising: A tower lift for transporting containers of storage substrates to one or more destinations. The tower lift mentioned above includes: ontology; A first bracket module and a second bracket module, the first bracket module and the second bracket module being configured to be movable in a vertical direction along the body via a drive belt; and A gap adjustment unit is provided, which is used to adjust the gap between the first bracket module and the second bracket module. The gap between the first bracket module and the second bracket module is configured to be changeable by the gap adjustment unit, and The gaps between one or more destinations may be the same or different. The gap adjustment unit includes: Base plate, said base plate is mounted on the drive belt; and A driving member that causes one of the first bracket module and the second bracket module to move relative to the other on the base plate. The driving component includes: A first drive unit, the first drive unit being used to move the first bracket module on a drive rail; and A second drive unit is used to move the second bracket module on the drive rail. The first drive device and the second drive device independently move the first bracket module and the second bracket module on the base plate.
6. The logistics system according to claim 5 further includes: A main pulley, which is disposed above the body and connected to the drive belt; as well as A rotating device for rotating the main pulley.
7. The logistics system according to claim 5 further includes: A guide rail is provided to guide the vertical movement of the first bracket module and the second bracket module. The first bracket module and the second bracket module are provided with guide wheels that contact the guide rail.
8. The logistics system according to any one of claims 5 to 7, wherein the first bracket module and the second bracket module each further include: A support member for supporting a container for storing the substrate therein; as well as A moving device for extending the support member in the direction of setting the destination or retracting the support member in the opposite direction.
9. A transmission method, comprising: When an object to be transported is simultaneously transported to an adjacent destination at a distance of a first distance, and the distance between the first bracket module and the second bracket module supporting the object to be transported is adjusted to the first distance, the first bracket module and the second bracket module are raised by the drive unit. as well as When objects to be transported are simultaneously transported to adjacent destinations at a distance of a second distance, and the distance between the first and second bracket modules is adjusted to the second distance, the first and second bracket modules are raised via the drive unit. The first distance and the second distance are different from each other. The first bracket module and the second bracket module are mounted on the base plate, and when the base plate is raised by the drive belt, the first bracket module and the second bracket module are raised simultaneously by the drive unit. Adjust the gap between the first bracket module and the second bracket module on the base plate. The adjustment of the gap between the first bracket module and the second bracket module on the base plate is performed by a first drive device for moving the first bracket module and a second drive device for moving the second bracket module, and the first drive device and the second drive device independently move the first bracket module and the second bracket module on the base plate.
10. The conveying method according to claim 9, wherein the object to be conveyed is a container for holding a substrate, and Each of the destinations is provided with a storage device for storing equipment for processing the substrate or a container for holding the substrate.
11. The transmission method according to claim 9, wherein the driving unit comprises: A drive belt causes the first bracket module and the second bracket module to move vertically, and the first bracket module or the second bracket module is mounted on the drive belt. The main pulley is connected to the drive belt; as well as A rotating device for rotating the main pulley.