Sensors and electronics
By designing a MEMS sensor with crossed and extended conductive parts, the shortcomings of existing sensors in improving characteristics are solved, high-sensitivity and large dynamic range acceleration and angle detection are achieved, and the accuracy and stability of the sensor are improved.
Patent Information
- Application Number
- CN202210176109.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- Priority Date
- 2021-09-02
- Filing Date
- 2022-02-25
- Publication Date
- 2025-09-30
- Estimated Expiration
- 2042-02-25
AI Technical Summary
Existing MEMS sensors have deficiencies in improving their characteristics and it is difficult to achieve both high precision and a large dynamic range.
The sensor design adopts a specific structure, including a base, a supporting part and a movable part. The design of crossed and extended conductive parts increases the area of electrostatic capacitance change, uses the resonant frequency difference of the movable beam to detect acceleration, and expands the detection range through the mass difference of the asymmetric movable conductive part.
The sensor has achieved high sensitivity and large dynamic range, can effectively detect acceleration and angle, takes into account high precision and wide bandwidth, reduces phase noise and improves temperature stability.
Smart Images
Figure CN115754349B_ABST
Abstract
Description
[0001] This application is based upon and claims the benefit of priority from Japanese Patent Application No. 2021-143209 (filing date: September 2, 2021), the entire contents of which are incorporated herein by reference. Technical Field
[0002] Embodiments of the present invention relate to sensors and electronic devices. Background Art
[0003] For example, there are sensors using a MEMS structure. In sensors, it is desired to improve characteristics. Summary of the Invention
[0004] The embodiments provide a sensor and an electronic device capable of improving characteristics.
[0005] Means for solving problems
[0006] According to an embodiment, the sensor includes a base, a first supporting portion, and a first movable portion. The first supporting portion is fixed to the base. The first movable portion is supported by the first supporting portion and is separated from the base. The first movable portion includes a first movable base, a second movable base, a connecting base, a first movable beam, a second movable beam, a first movable conductive portion, and a second movable conductive portion. The first movable base is supported by the first supporting portion. The second direction from the first movable base to the second movable base intersects with the first direction from the base to the first movable portion. The connecting base is provided between the first movable base and the second movable base, connecting the second movable base to the first movable base. The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam middle portion. The first beam end portion is connected to the first movable base. The other end of the first beam is connected to the second movable base. The middle portion of the first beam is located between the end of the first beam and the other end of the first beam. The second movable beam includes a second beam end, the other end of the second beam, and the middle portion of the second beam. The second beam end is connected to the first movable base. The other end of the second beam is connected to the second movable base. The middle portion of the second beam is located between the end of the second beam and the other end of the second beam. In a third direction intersecting with a plane including the first direction and the second direction, the connecting base is located between the middle portion of the first beam and the middle portion of the second beam. The first movable conductive portion is connected to the middle portion of the first beam. The middle portion of the first beam is located between the first movable conductive portion and the connecting base in the third direction. The first movable conductive portion includes: a first intersecting conductive portion connected to the first beam middle portion and extending along the third direction; a first extended conductive portion connected to the first intersecting conductive portion and extending along the second direction; and a first further extended conductive portion connected to the first intersecting conductive portion and extending along the second direction. The first further extended conductive portion is located between the first extended conductive portion and the first beam middle portion in the third direction. The second movable conductive portion is connected to the second beam middle portion. The second beam middle portion is located between the connecting base and the second movable conductive portion in the third direction. The second movable conductive portion includes: a second intersecting conductive portion connected to the second beam middle portion and extending along the third direction; a second extended conductive portion connected to the second intersecting conductive portion and extending along the second direction; and a second further extended conductive portion connected to the second intersecting conductive portion and extending along the second direction. The second further extended conductive portion is located between the second beam middle portion and the second extended conductive portion in the third direction.
[0007] According to the sensor having the above configuration, it is possible to provide a sensor and an electronic device having improved characteristics. BRIEF DESCRIPTION OF THE DRAWINGS
[0008] Figure 1 (a) and Figure 1 (b) is a schematic diagram illustrating the sensor according to the first embodiment.
[0009] Figure 2 (a) and Figure 2 (b) is a schematic diagram illustrating the sensor according to the first embodiment.
[0010] Figure 3 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0011] Figure 4 (a)~ Figure 4 (c) is a schematic cross-sectional view illustrating the sensor according to the first embodiment.
[0012] Figure 5 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0013] Figure 6 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0014] Figure 7 This is a schematic diagram illustrating a sensor according to the second embodiment.
[0015] Figure 8 (a) and Figure 8 (b) is a schematic cross-sectional view illustrating a sensor according to the third embodiment.
[0016] Figure 9 This is a schematic diagram illustrating an electronic device according to a fourth embodiment.
[0017] Figure 10 (a)~ Figure 10 (h) is a schematic diagram illustrating an application of an electronic device.
[0018] Figure 11 (a) and Figure 11 (b) is a schematic diagram illustrating a sensor according to the fifth embodiment.
[0019]
Number Description
[0020] 10...first movable portion, 10A, 10B...first and second movable bases, 10E...electrode, 10P...connecting base, 10R...cover, 10S...second movable portion, 10T...container, 10U...first detection element, 10V...second detection element, 10X...movable member, 10Z...gap, 10h...hole, 11, 12...first and second movable beams, 11c, 12c...first and second beam middle portions, 11e, 12e...first and second beam end portions, 11f, 12f...the other end portions of the first and second beams, 19...fixed member, 21, 22...the first and second movable conductive portions, 21a, 22a...the first and second extended conductive portions, 21b, 22b...the first and second further extended conductive portions, 21c, 22c...the first and second intermediate extended conductive portions, 21h, 22h...the first and second holes, 21y, 22y...the first and second cross conductive portions, 50A, 50B...the first and second supporting portions, 50S...the base Body, 50Sf...first surface, 51, 52...first and second opposing conductive portions, 51E, 52E...electrodes, 51S, 52S...support portion, 59...structure, 61, 61A...first opposing electrode, 62, 62A...second opposing electrode, 65, 65A...first structure, 66, 66A...second structure, 70...control unit, 75...processing circuit, 78a, 78b...wiring, 110-112, 120...sensor, 170... Circuit processing unit, 180…circuit, 185…drive unit, 310…electronic device, 410…slope, 420…transmitter / receiver, 430…sensor, 440…bridge pier, 450…main beam, 460…bridge, 470…river, L10A, L10B, L10P, L10X…length, L21a, L21b, L21y, L22a, L22b, L22y…length, S1…signal, SP…space, W21b, W22b…length DETAILED DESCRIPTION
[0021] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.
[0022] The drawings are schematic or conceptual, and the relationship between the thickness and width of each part, the size ratio between parts, etc. are not necessarily the same as the actual ones. Even when showing the same parts, the sizes and ratios shown may be different according to the drawings.
[0023] In the present specification and each drawing, the same elements as those described with respect to the already mentioned drawings are denoted by the same reference numerals, and detailed description thereof will be appropriately omitted.
[0024] (First embodiment)
[0025] Figure 1 (a) Figure 1 (b) Figure 2 (a) Figure 2 (b) and Figure 3 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0026] Figure 1 (a) Figure 1 (b) Figure 2 (a) and Figure 3 It is a top view. Figure 1 (a) and Figure 1 (b) Enlarged example Figure 2 Part of (a). Figure 2 (b) Yes Figure 2 (a) is a cross-sectional view along the line X1-X2.
[0027] like Figure 2 (a) and Figure 2 As shown in (b), the sensor 110 of the embodiment includes a base 50S, a first support 50A, and a first movable portion 10. For example, the first support 50A and the first movable portion 10 may be included in a first detection element 10U. The first detection element 10U may include the base 50S.
[0028] The first support portion 50A is fixed to the base 50S. The first support portion 50A is provided on the first surface 50Sf of the base 50S. The first movable portion 10 is supported by the first support portion 50A. The first movable portion 10 is separated from the base 50S.
[0029] The first direction from the base 50S toward the first movable portion 10 is defined as the Z-axis direction. A direction perpendicular to the Z-axis direction is defined as the X-axis direction. A direction perpendicular to the Z-axis direction and the X-axis direction is defined as the Y-axis direction.
[0030] The first movable portion 10 includes a first movable base 10A, a second movable base 10B, a connecting base 10P, a first movable beam 11, a second movable beam 12, a first movable conductive portion 21, and a second movable conductive portion 22. The first movable base 10A is supported by a first supporting portion 50A. The second direction from the first movable base 10A toward the second movable base 10B intersects with the first direction (Z-axis direction) from the base 50S toward the first movable portion 10. The second direction is, for example, the X-axis direction.
[0031] The connection base 10P is provided between the first movable base 10A and the second movable base 10B. The connection base 10P connects the second movable base 10B and the first movable base 10A.
[0032] like Figure 1 (a) and Figure 1As shown in (b), the first movable beam 11 includes a first beam end 11e, a first beam other end 11f, and a first beam middle portion 11c. The first beam end 11e is connected to the first movable base 10A. The first beam other end 11f is connected to the second movable base 10B. The first beam middle portion 11c is located between the first beam end 11e and the first beam other end 11f. The first movable beam 11 extends along the second direction (X-axis direction).
[0033] The second movable beam 12 includes a second beam end 12e, a second beam other end 12f, and a second beam middle portion 12c. The second beam end 12e is connected to the first movable base 10A. The second beam other end 12f is connected to the second movable base 10B. The second beam middle portion 12c is located between the second beam end 12e and the second beam other end 12f. The second movable beam 12 extends along the second direction (X-axis direction). In a third direction intersecting a plane including the first and second directions, the connecting base 10P is located between the first beam middle portion 11c and the second beam middle portion 12c. The third direction is, for example, the Y-axis direction.
[0034] like Figure 1 (a) and Figure 1 As shown in (b), the first movable conductive part 21 is connected to the first beam intermediate part 11c. The first beam intermediate part 11c is located between the first movable conductive part 21 and the connection base 10P in the third direction (Y-axis direction).
[0035] The first movable conductive portion 21 includes a first intersecting conductive portion 21y, a first extended conductive portion 21a, and a first further extended conductive portion 21b. The first intersecting conductive portion 21y is connected to the first beam intermediate portion 11c and extends along the third direction (the Y-axis). The first extended conductive portion 21a is connected to the first intersecting conductive portion 21y and extends along the second direction (the X-axis). For example, the center portion of the first extended conductive portion 21a is connected to the first intersecting conductive portion 21y.
[0036] The first further extended conductive portion 21b is connected to the first intersecting conductive portion 21y and extends along the second direction (X-axis direction). For example, the center portion of the first further extended conductive portion 21b is connected to the first intersecting conductive portion 21y. The first further extended conductive portion 21b is located between the first extended conductive portion 21a and the first beam intermediate portion 11c in the third direction (Y-axis direction).
[0037] like Figure 1 (a) and Figure 1 As shown in (b), the second movable conductive portion 22 is connected to the second beam intermediate portion 12c. The second beam intermediate portion 12c is located between the connection base 10P and the second movable conductive portion 22 in the third direction (Y-axis direction).
[0038] The second movable conductive portion 22 includes a second intersecting conductive portion 22y, a second extended conductive portion 22a, and a second further extended conductive portion 22b. The second intersecting conductive portion 22y is connected to the second beam intermediate portion 12c and extends along the third direction (the Y-axis). The second extended conductive portion 22a is connected to the second intersecting conductive portion 22y and extends along the second direction (the X-axis). For example, the center portion of the second extended conductive portion 22a is connected to the second intersecting conductive portion 22y.
[0039] The second further extended conductive portion 22b is connected to the second intersecting conductive portion 21y and extends along the second direction (X-axis direction). For example, the center portion of the second further extended conductive portion 22b is connected to the second intersecting conductive portion 22y. The second further extended conductive portion 22b is located between the second beam intermediate portion 12c and the second extended conductive portion 22a in the third direction (Y-axis direction).
[0040] For example, when acceleration is applied to the sensor 110, one of compressive stress and tensile stress is generated in the first movable beam 11. Meanwhile, the other of compressive stress and tensile stress is generated in the second movable beam 12. This creates a difference in the resonant frequency of the first movable beam 11 and the resonant frequency of the second movable beam 12. For example, acceleration can be detected by detecting the difference in resonant frequency (and its change).
[0041] like Figure 3 As shown, for example, the sensor 110 includes a first opposing conductive portion 51 and a second opposing conductive portion 52. The first opposing conductive portion 51 is opposed to at least a portion of the first movable conductive portion 21 in a third direction (e.g., the Y-axis direction). The second opposing conductive portion 52 is opposed to at least a portion of the second movable conductive portion 22 in a third direction (e.g., the Y-axis direction). For example, as the distance between the first opposing conductive portion 51 and the first movable conductive portion 21 changes (displacement), the electrostatic capacitance changes. By detecting this change in electrostatic capacitance, the vibration state of the first movable conductive portion 21 (and the first movable beam 11) can be detected. For example, as the distance between the second opposing conductive portion 52 and the second movable conductive portion 22 changes (displacement), the electrostatic capacitance changes. By detecting this change in electrostatic capacitance, the vibration state of the second movable conductive portion 22 (and the second movable beam 12) can be detected.
[0042] In the embodiment, the first movable conductive portion 21 includes a first extended conductive portion 21a and a first further extended conductive portion 21b. The first extended conductive portion 21a and the first further extended conductive portion 21b face the first opposing conductive portion 51. As a result, the area of the region where the first movable conductive portion 21 faces the first opposing conductive portion 51 increases compared to a case where the first movable conductive portion 21 includes a single extended conductive portion. This increases the change in capacitance with respect to displacement. According to the embodiment, high sensitivity is achieved. A sensor with improved characteristics can be provided.
[0043] Similarly, the second extended conductive portion 22a and the second further extended conductive portion 22b face the second opposing conductive portion 52. Consequently, compared to a case where the second movable conductive portion 22 includes a single extended conductive portion, the area of the region where the second movable conductive portion 22 faces the second opposing conductive portion 52 increases. This increases the change in capacitance relative to displacement. According to this embodiment, high sensitivity is achieved, and a sensor with improved characteristics can be provided.
[0044] like Figure 3 As shown, the sensor 110 may include a first counter electrode 61 and a second counter electrode 62. The first counter electrode 61 faces at least a portion of the first movable conductive portion 21 in a third direction (e.g., the Y-axis direction). The second counter electrode 62 faces at least a portion of the second movable conductive portion 22 in the third direction (e.g., the Y-axis direction).
[0045] For example, an electrical signal (e.g., an AC signal) is supplied to the first counter electrode 61. This causes the first movable conductive portion 21 to displace, and the first movable beam 11 to vibrate. An electrical signal (e.g., an AC signal) is supplied to the second counter electrode 62. This causes the second movable conductive portion 22 to displace, and the second movable beam 12 to vibrate. In the absence of stress applied to the movable beams, these movable beams can vibrate at their designed resonant frequencies.
[0046] Based on the AC signal supplied to the opposing electrodes, the first movable beam 11 and the second movable beam 12 vibrate via the first movable conductive portion 21 and the second movable conductive portion 22. As described above, the vibration state of the first movable beam 11 and the second movable beam 12 can be detected via the first opposing conductive portion 51, the second opposing conductive portion 52, the first movable conductive portion 21, and the second movable conductive portion 22. From the vibration state, a value corresponding to the difference (or change) in the resonant frequency of the first movable beam 11 and the second movable beam 12 is obtained.
[0047] like Figure 2As shown, the first movable portion 10 may further include a movable member 10X. A second movable base 10B is disposed between the first movable base 10A and the movable member 10X in the second direction (X-axis direction). The length L10X of the movable member 10X along the third direction (Y-axis direction) is longer than the length L10B of the second movable base 10B along the third direction. The mass of the movable member 10X is greater than the mass of the second movable base 10B.
[0048] In this configuration, when acceleration is applied to the first movable portion 10, the movable member 10X displaces significantly. Consequently, the second movable base 10B displaces significantly. For example, the second movable base 10B displaces circumferentially around the connecting base 10P, centered about the Z-axis. This allows for greater stress to be applied to the first movable beam 11 and the second movable beam 12.
[0049] like Figure 1 As shown in FIG. 2( b ), in one example, the length L21b of the first further extended conductive portion 21b along the second direction (X-axis direction) is longer than the length L21a of the first extended conductive portion 21a along the second direction (X-axis direction). The length L22b of the second further extended conductive portion 22b along the second direction (X-axis direction) is longer than the length L22a of the second extended conductive portion 22a along the second direction (X-axis direction).
[0050] In this way, the length of the extended conductive portion farther from the first beam intermediate portion 11c is shorter than the length of the extended conductive portion closer to the first beam intermediate portion 11c. The length of the extended conductive portion farther from the second beam intermediate portion 12c is shorter than the length of the extended conductive portion closer to the second beam intermediate portion 12c. By adopting the aforementioned lengths of the extended conductive portion, for example, it is easier to more appropriately control the distance between the extended conductive portion and the opposing conductive portion. For example, contact between the extended conductive portion and the opposing conductive portion can be more effectively prevented.
[0051] For example, the length L21b of the first further extended conductive portion 21b along the second direction is at least 1.2 times the length L21a of the first extended conductive portion 21a along the second direction. The length L22b of the second further extended conductive portion 22b along the second direction is at least 1.2 times the length L22a of the second extended conductive portion 22a along the second direction.
[0052] like Figure 3As shown, at least a portion of the first opposing conductive portion 51 is located between the first further extended conductive portion 21b and the first extended conductive portion 21a in the third direction (e.g., the Y-axis direction). At least a portion of the second opposing conductive portion 52 is located between the second further extended conductive portion 22b and the second extended conductive portion 22a in the third direction (e.g., the Y-axis direction). This allows for a larger area of the region where the first opposing conductive portion 51 and the first movable conductive portion 21 face each other. It also allows for a larger area of the region where the second opposing conductive portion 52 and the second movable conductive portion 22 face each other.
[0053] like Figure 1 As shown in FIG. 2( b ), the length of the first further extended conductive portion 21b along the third direction (Y-axis direction) is referred to as length W21b. The length L21b of the first further extended conductive portion 21b along the second direction (X-axis direction) is longer than length W21b. The length of the second further extended conductive portion 22b along the third direction is referred to as length W22b. The length L22b of the second further extended conductive portion 22b along the second direction (X-axis direction) is longer than length W22b.
[0054] The length of the first intersecting conductive portion 21y along the second direction (X-axis direction) is defined as length L21y. The length L21a of the first extended conductive portion 21a along the second direction (X-axis direction) is longer than length L21y. The length of the second intersecting conductive portion 22y along the second direction (X-axis direction) is defined as length L22y. The length L22a of the second extended conductive portion 22a along the second direction (X-axis direction) is longer than length L22y.
[0055] like Figure 1 As shown in (b), the length L10A of the first movable base 10A along the third direction (Y-axis direction) is longer than the length L10P of the connecting base 10P along the third direction. The length L10B of the second movable base 10B along the third direction is longer than the length L10P of the connecting base 10P along the third direction. A smaller connecting base 10P makes it easier to displace the second movable base 10B, for example. This facilitates higher sensitivity.
[0056] like Figure 2 (a) and Figure 2 As shown in (b), a structure 59 may be provided around the first movable portion 10 .
[0057] like Figure 2 As shown in (b), a first support portion 50A is provided on a base 50S. The first support portion 50A supports the first movable base 10A. An electrode 10E is provided on the first movable base 10A.
[0058] like Figure 3As shown, the sensor 110 may include a first structure 65 and a second structure 66. In this example, another first structure 65A and another second structure 66A are provided. These structures are fixed to the base 50S (see Figure 1 (b)). Figure 3 As shown, at least a portion of the first structure 65 (and the other first structure 65A) is opposed to at least a portion of the first movable conductive portion 21 in the third direction (e.g., the Y-axis direction). At least a portion of the second structure 66 (and the other second structure 66A) is opposed to at least a portion of the second movable conductive portion 22 in the third direction (e.g., the Y-axis direction). These structures can, for example, function as stoppers. These structures can prevent the first movable conductive portion 21 and the second movable conductive portion 22 from being displaced excessively. For example, damage to the first movable portion 10 can be prevented.
[0059] Figure 4 (a)~ Figure 4 (c) is a schematic cross-sectional view illustrating the sensor according to the first embodiment.
[0060] Figure 4 (a) Yes Figure 3 A1-A2 line cross-sectional view. Figure 4 (b) Yes Figure 3 B1-B2 line cross-sectional view. Figure 4 (c) Yes Figure 3 C1-C2 line cross-sectional view.
[0061] like Figure 4 (a)~ Figure 4 As shown in (c), a gap 10Z is provided between the base 50S and the first movable portion 10 .
[0062] like Figure 4 As shown in (c), a first opposing conductive portion 51 is provided on a support portion 51S provided on a base 50S. An electrode 51E is provided on the first opposing conductive portion 51. A second opposing conductive portion 52 is provided on a support portion 52S provided on the base 50S. An electrode 52E is provided on the second opposing conductive portion 52. For example, the detection electrode 51E and the electrode 10E (see Figure 2 (b)) Electrical characteristics (such as changes in electrostatic capacitance) between the electrodes 52E and 10E. For example, the electrical characteristics (such as changes in electrostatic capacitance) between the electrodes 52E and 10E are detected.
[0063] Figure 5 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0064] like Figure 5As shown, the sensor 110 may include a control unit 70. The control unit 70 is electrically connected to the first movable portion 10, the first opposing conductive portion 51, the second opposing conductive portion 52, the first opposing electrode 61, and the second opposing electrode 62. The control unit 70 applies an AC signal (e.g., a drive signal) between the first movable portion 10 and the opposing electrode. The control unit 70 detects electrical characteristics between the first movable portion 10 and the opposing conductive portion.
[0065] like Figure 5 As shown, the sensor 110 may include the first counter electrode 61 and another first counter electrode 61A. The sensor 110 may include the second counter electrode 62 and another second counter electrode 62A.
[0066] like Figure 1 (b) Figure 3 、 Figure 4 (a) and Figure 4 As shown in FIG. 1( b ), in the sensor 110 , the first movable conductive portion 21 may include one or more first holes 21h . At least one of the first cross conductive portion 21y , the first extended conductive portion 21a , and the first further extended conductive portion 21b may include one or more first holes 21h . The second movable conductive portion 22 may include one or more second holes 22h . At least one of the second cross conductive portion 22y , the second extended conductive portion 22a , and the second further extended conductive portion 22b may include one or more second holes 21h . The holes allow for adjustment of the mass of the first movable conductive portion 21 and the second movable conductive portion 22.
[0067] like Figure 3 As shown, the first movable base 10A and the second movable base 10B may include a hole 10h. Figure 4 (a) and Figure 4 In (b), the holes 10h of the first movable base 10A and the second movable base 10B are omitted. The movable member 10X may include the holes 10h.
[0068] like Figure 1 As shown in (b), the first movable conductive portion 21 may further include a first intermediate extending conductive portion 21c. The first intermediate extending conductive portion 21c is connected to the first cross conductive portion 21y and extends along the second direction (e.g., the X-axis direction). The first intermediate extending conductive portion 21c is located between the first extending conductive portion 21a and the first further extending conductive portion 21b in the third direction (e.g., the Y-axis direction). The length of the first intermediate extending conductive portion 21c along the second direction is between the length L21a of the first extending conductive portion 21a along the second direction and the length L21b of the first further extending conductive portion 21b along the second direction. For example, the center portion of the first intermediate extending conductive portion 21c is connected to the first cross conductive portion 21y.
[0069] like Figure 1 As shown in FIG. 2( b ), the second movable conductive portion 22 may further include a second intermediate extending conductive portion 22c. The second intermediate extending conductive portion 22c is connected to the second cross conductive portion 22y and extends along the second direction (e.g., the X-axis direction). The second intermediate extending conductive portion 22c is located between the second further extending conductive portion 22b and the second extending conductive portion 22a in the third direction (e.g., the Y-axis direction). The length of the second intermediate extending conductive portion 22c along the second direction is between the length L22b of the second further extending conductive portion 22b along the second direction and the length L22a of the second extending conductive portion 22a along the second direction. For example, the center portion of the second intermediate extending conductive portion 22c is connected to the second cross conductive portion 22y.
[0070] Figure 6 This is a schematic diagram illustrating the sensor according to the first embodiment.
[0071] like Figure 6 As shown, the sensor 111 of the embodiment includes a first movable portion 10. The first movable portion 10 includes a first movable conductive portion 21 and a second movable conductive portion 22. In the sensor 111, the configuration of the second movable conductive portion 22 is different from that of the first movable conductive portion 21. The remaining configuration of the sensor 111 can be the same as that of the sensor 110. For example, the first movable conductive portion 21 is connected to the first movable beam 11, and the second movable conductive portion 22 is connected to the second movable beam 12.
[0072] In this example, in sensor 111, the first movable conductive portion 21 includes a plurality of first holes 21h. The second movable conductive portion 22 includes a plurality of second holes 22h. The number of the plurality of second holes 22h is different from the number of the plurality of first holes 21h. For example, the mass of the second movable conductive portion 22 is different from the mass of the first movable conductive portion 21. For example, the second movable conductive portion 22 is asymmetrical relative to the first movable conductive portion 21.
[0073] This increases the difference in resonant frequency between the first movable beam 11 and the second movable beam 12 compared to a case where the movable conductive parts have the same mass. This large difference in resonant frequency broadens the acceleration detection range (dynamic range). For example, a wide dynamic range can be achieved while maintaining high accuracy. This allows for the provision of a sensor with improved performance.
[0074] In one example of the embodiment, the first movable conductive portion 21 may include the first hole 21 h , while the second movable conductive portion 22 may not include the hole 22 h .
[0075] In another example, the first movable conductive portion 21 includes the first hole 21h, and the second movable conductive portion 22 includes the second hole 22h. The area of the second hole 22h in a plane (XY plane) including the second and third directions may be different from the area of the first hole 21h in the plane (XY plane).
[0076] For example, the first movable conductive portion 21 includes a plurality of first holes 21h, and the second movable conductive portion 22 includes a plurality of second holes 22h. The sum of the areas of the plurality of second holes 22h in a plane (XY plane) including the second and third directions may be different from the sum of the areas of the plurality of first holes 21h in the plane (XY plane).
[0077] As described above, differences in the apertures result in differences in mass. For example, the second movable conductive portion 22 has a substantially identical outer shape in the XY plane to the first movable conductive portion 21. Consequently, these movable conductive portions have substantially the same temperature characteristics. By having substantially identical outer shapes but different aperture placements, adverse effects on temperature characteristics are suppressed while also achieving differences in mass. For example, while maintaining a substantially constant temperature coefficient of frequency, a wide dynamic range is achieved.
[0078] (Second embodiment)
[0079] Figure 7 This is a schematic diagram illustrating a sensor according to the second embodiment.
[0080] like Figure 7 As shown, the sensor 112 of the embodiment includes the first movable portion 10. The first movable portion 10 includes a first movable conductive portion 21 and a second movable conductive portion 22. In the sensor 112, the configuration of the second movable conductive portion 22 is different from that of the first movable conductive portion 21. The configuration of the sensor 112 other than this may be the same as that of the sensor 110.
[0081] For example, the sensor 112 includes a base 50S and a first support portion 50A (see Figure 2 (b), etc.). Similarly, in the sensor 112, the first movable portion 10 includes a first movable base 10A, a second movable base 10B, a connecting base 10P, a first movable beam 11, a second movable beam 12, a first movable conductive portion 21, and a second movable conductive portion 22. The configuration of the first movable base 10A, the second movable base 10B, the connecting base 10P, the first movable beam 11, and the second movable conductive portion 22 in the sensor 112 can be the same as that of the sensor 110.
[0082] In the sensor 112, the first beam intermediate portion 11c of the first movable beam 11 is located between the connection base 10P and the first movable conductive portion 21 in the third direction (Y-axis direction). The first movable conductive portion 21 includes a first extended conductive portion 21a extending in the second direction (X-axis direction). The first extended conductive portion 21a is connected to the first beam intermediate portion 11c via a first cross conductive portion 21y extending in the third direction (Y-axis direction), for example.
[0083] In the sensor 112, the second beam intermediate portion 12c of the second movable beam 12 is located between the connection base 10P and the second movable conductive portion 22 in the third direction (Y-axis direction). The second movable conductive portion 22 includes a second extended conductive portion 22a extending along the second direction (X-axis direction). The second extended conductive portion 22a is connected to the second beam intermediate portion 12c via a second cross conductive portion 22y extending along the third direction (Y-axis direction), for example.
[0084] In the sensor 112 , for example, the mass of the second movable conductive portion 22 is different from the mass of the first movable conductive portion 21 .
[0085] This increases the difference in resonant frequency between the first movable beam 11 and the second movable beam 12 compared to a case where the movable conductive parts have the same mass. This large difference in resonant frequency broadens the acceleration detection range (dynamic range). For example, a wide dynamic range can be achieved while maintaining high accuracy. This allows for the provision of a sensor with improved performance.
[0086] For example, the first movable conductive portion 21 includes a plurality of the first holes 21h. The second movable conductive portion 22 includes a plurality of second holes 22h. The number of the plurality of second holes 22h is different from the number of the plurality of first holes 21h.
[0087] In sensor 112, for example, the outer shape of the second movable conductive portion 22 in the XY plane can be substantially identical to the outer shape of the first movable conductive portion 21 in the XY plane. Consequently, these movable conductive portions have substantially the same temperature characteristics. By having substantially identical outer shapes but different hole placements, adverse effects on temperature characteristics are suppressed while achieving a difference in quality. For example, while maintaining a substantially constant temperature coefficient of frequency, a wide dynamic range can be achieved.
[0088] The embodiment can be applied to, for example, a DRA (Differential Resonant Accelerometer). In sensors, it is desirable to expand the dynamic range. Generally, it is difficult to achieve both high precision and a large dynamic range in sensors.
[0089] In one embodiment, multiple extended conductive portions are provided. This forms a "tree-shaped electrode." These extended conductive portions are connected to multiple movable beams (two resonant beams). This achieves high capacitance sensitivity. For example, this facilitates reducing the phase noise of the PLL circuit. This also facilitates achieving higher precision (e.g., reduced drift).
[0090] For example, the mass of the second movable conductive part 22 is different from the mass of the first movable conductive part 21. By using asymmetric mass, for example, the difference in frequency between the two resonant beams can be increased. This allows for a wide dynamic range. For example, the ratio of the frequency difference to the proportional factor can be increased. In this case, for example, the anchoring position and shape between the two movable conductive parts are preferably the same. This allows the temperature coefficients of the resonant frequencies of the two resonant beams to be maintained in a substantially identical state. For example, high temperature stability can be achieved through differential processing.
[0091] (Third embodiment)
[0092] Figure 8 (a) and Figure 8 (b) is a schematic cross-sectional view illustrating a sensor according to the third embodiment.
[0093] like Figure 8 As shown in (a), the sensor 120 of the embodiment further includes a second detection element 10V in addition to the first detection element 10U described in the first or second embodiment. The second detection element 10V includes, for example, a second support member 50B and a second movable member 10S. The second support member 50B is fixed to a base 50S. The second movable member 10S is supported by the second support member 50B and is separate from the base 50S. The sensor 120 can detect the angle of the sensor 120 based on a signal corresponding to the movement of the second movable member 10S. For example, at least a portion of the second movable member 10S vibrates. Angle detection can be achieved by detecting the vibration state that changes with the angle. For example, angle detection is performed based on the Foucault pendulum principle. The second movable member 10S is, for example, a direct angle detection gyroscope (RIG: Rate Integrating Gyroscope). The sensor 120 is, for example, an inertial measurement unit (IMU).
[0094] In the sensor 120 , the configurations of the base 50S, the first supporting member 50A, the first movable portion 10 , and the like can be applied to the configurations described in relation to the first embodiment or the second embodiment.
[0095] like Figure 8As shown in (a), the sensor 120 can be provided with a cover 10R. The cover 10R is connected to the base 50S. A first support member 50A, a first movable portion 10, a second support 50B, and a second movable portion 10S are provided between the base 50S and the cover 10R. For example, the space SP enclosed by the base 50S and the cover 10R is at a pressure of less than 1 atmosphere. By reducing the pressure in the space SP, higher-precision detection can be achieved. For example, the pressure in the space SP is less than 0.1 Pa.
[0096] like Figure 8 (a) and Figure 8 As shown in (b), the electrical signal obtained from the first movable part 10 and the electrical signal obtained from the second movable part 10S can be supplied to the processing circuit 75. For example, the first movable part 10 and the processing circuit 75 are electrically connected by wiring 78a. The second movable part 10S and the processing circuit 75 are electrically connected by wiring 78b. The processing circuit 75 is, for example, a PLL circuit. The processing circuit 75 is, for example, included in the control unit 70. The processing circuit 75 can detect changes in the resonant frequency obtained from the first movable part 10. Thus, for example, acceleration can be detected. The processing circuit 75 can detect changes in the resonant frequency obtained from the second movable part 10S. Thus, for example, angle can be detected. Angular velocity can also be detected. A small sensor can be obtained.
[0097] like Figure 8 As shown in FIG. 2( b ), in the sensor of the embodiment, the first detection element 10U and the second detection element 10V can be disposed between the container 10T and the lid 10R. The container 10T is, for example, a ceramic package. The space SP between the container 10T and the lid 10R is less than 1 atmosphere. The base 50S is secured to the container 10T by a securing member 19 or the like. The securing member 19 is, for example, a die bonding agent. The lid 10R can be made of at least one of ceramic and glass.
[0098] (Fourth embodiment)
[0099] The fourth embodiment relates to an electronic device.
[0100] Figure 9 This is a schematic diagram illustrating an electronic device according to a fourth embodiment.
[0101] like Figure 9 As shown in FIG. 1 , the electronic device 310 of the embodiment includes the sensors of the first to third embodiments and the circuit processing unit 170. Figure 9 In the example shown in FIG, sensor 110 is depicted as a sensor. Circuit processing unit 170 can control circuit 180 based on signal S1 obtained from the sensor. Circuit 180 is, for example, a control circuit for driver 185. According to the embodiment, circuit 180 for controlling driver 185 can be controlled with high precision.
[0102] Figure 10 (a)~ Figure 10 (h) is a schematic diagram illustrating an application of an electronic device.
[0103] like Figure 10 As shown in (a), the electronic device 310 may also be at least a part of the robot. Figure 10 As shown in (b), the electronic device 310 may also be at least a part of a working robot installed in a manufacturing plant or the like. Figure 10 As shown in (c), the electronic device 310 may also be at least a part of an automatic transport vehicle in a factory. Figure 10 As shown in (d), the electronic device 310 may also be at least a part of a drone (unmanned aerial vehicle). Figure 10 As shown in (e), the electronic device 310 may also be at least a part of the aircraft. Figure 10 As shown in (f), the electronic device 310 may also be at least a part of the vessel. Figure 10 As shown in (g), the electronic device 310 may also be at least a part of the submarine. Figure 10 As shown in (h), the electronic device 310 may be at least a part of a vehicle. For example, the electronic device 310 may include at least one of a robot and a mobile object.
[0104] (Fifth embodiment)
[0105] Figure 11 (a) and Figure 11 (b) is a schematic diagram illustrating a sensor according to the fifth embodiment.
[0106] like Figure 11 As shown in (a), the sensor 430 of the embodiment includes the sensor of any one of the first to third embodiments and the transceiver 420. Figure 11 In the example of (a), sensor 110 is depicted as a sensor. Transceiver 420 can transmit the signal received from sensor 110 via at least one of wireless and wired methods. Sensor 430 is installed, for example, on a slope 410 of a road 400. Sensor 430 can monitor the status of a facility (e.g., infrastructure). Sensor 430 can be, for example, a status monitoring device.
[0107] For example, sensor 430 can accurately detect changes in the state of slope 410 of road 400. Changes in the state of slope 410 include, for example, at least one of a change in inclination angle and a change in vibration. Signals (inspection results) obtained from sensor 110 can be transmitted by transceiver 420. For example, the state of facilities (e.g., infrastructure) can be continuously monitored.
[0108] like Figure 11 As shown in (b), sensor 430 is installed on a portion of bridge 460, for example. Bridge 460 is installed over river 470. For example, bridge 460 includes a main beam 450 and at least one of piers 440. Sensor 430 is installed on at least one of main beam 450 and piers 440. For example, the angle of at least one of main beam 450 and piers 440 may change due to deterioration. For example, the vibration state of at least one of main beam 450 and piers 440 may change. Sensor 430 can detect these changes with high precision. The detection results can be transmitted to any location by transceiver 420. Abnormalities can be effectively detected.
[0109] The implementation method may include, for example, the following technical solutions.
[0110] (Technical Solution 1)
[0111] A sensor comprises a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion and separated from the base;
[0112] The first movable part has:
[0113] a first movable base supported by the first supporting portion;
[0114] a second movable base, wherein a second direction from the first movable base toward the second movable base intersects a first direction from the base toward the first movable portion;
[0115] a connecting base, the connecting base being provided between the first movable base and the second movable base, and connecting the second movable base to the first movable base;
[0116] a first movable beam, the first movable beam comprising a first beam end, a first beam other end, and a first beam middle portion, the first beam end being connected to the first movable base, the first beam other end being connected to the second movable base, and the first beam middle portion being located between the first beam end and the first beam other end;
[0117] a second movable beam, the second movable beam comprising a second beam end portion, a second beam other end portion, and a second beam middle portion, the second beam end portion being connected to the first movable base portion, the second beam other end portion being connected to the second movable base portion, the second beam middle portion being located between the second beam end portion and the second beam other end portion, and the connecting base being located between the first beam middle portion and the second beam middle portion in a third direction intersecting a plane including the first direction and the second direction;
[0118] a first movable conductive portion connected to the first beam middle portion, wherein the first beam middle portion is located between the first movable conductive portion and the connection base in the third direction, and wherein the first movable conductive portion includes:
[0119] a first cross-conductive portion connected to the middle portion of the first beam and extending along the third direction;
[0120] a first extended conductive portion connected to the first intersecting conductive portion and extending along the second direction; and
[0121] a first further extended conductive portion connected to the first intersecting conductive portion and extending along the second direction, the first further extended conductive portion being located between the first extended conductive portion and the first beam intermediate portion in the third direction; and
[0122] a second movable conductive portion connected to the second beam middle portion, the second beam middle portion being located between the connection base and the second movable conductive portion in the third direction, the second movable conductive portion comprising:
[0123] a second cross-conductive portion connected to the middle portion of the second beam and extending along the third direction;
[0124] a second extended conductive portion connected to the second intersecting conductive portion and extending along the second direction; and
[0125] a second further extended conductive portion connected to the second intersecting conductive portion and extending along the second direction, wherein the second further extended conductive portion is located between the second beam middle portion and the second extended conductive portion in the third direction.
[0126] (Technical Solution 2)
[0127] In the sensor described in Technical Solution 1,
[0128] The length of the first further extended conductive portion along the second direction is longer than the length of the first extended conductive portion along the second direction;
[0129] A length of the second further extended conductive portion along the second direction is longer than a length of the second extended conductive portion along the second direction.
[0130] (Technical Solution 3)
[0131] In the sensor described in Technical Solution 2,
[0132] The length of the first further extended conductive portion along the second direction is 1.2 times or more of the length of the first extended conductive portion along the second direction;
[0133] The length of the second further extended conductive portion along the second direction is 1.2 times or more the length of the second extended conductive portion along the second direction.
[0134] (Technical Solution 4)
[0135] In the sensor described in Technical Solution 2 or 3,
[0136] The length of the first further extended conductive portion along the second direction is longer than the length of the first further extended conductive portion along the third direction;
[0137] The length of the second another extended conductive portion along the second direction is longer than the length of the second another extended conductive portion along the third direction.
[0138] (Technical Solution 5)
[0139] In the sensor according to any one of technical solutions 2 to 4,
[0140] The length of the first extended conductive portion along the second direction is longer than the length of the first intersecting conductive portion along the second direction;
[0141] The length of the second extended conductive portion along the second direction is longer than the length of the second intersecting conductive portion along the second direction.
[0142] (Technical Solution 6)
[0143] In the sensor according to any one of technical solutions 2 to 5,
[0144] The first movable conductive portion further includes a first intermediate extending conductive portion;
[0145] The first intermediate extending conductive portion is connected to the first crossing conductive portion and extends along the second direction;
[0146] The first intermediate extending conductive portion is located between the first extending conductive portion and the first further extending conductive portion in the third direction;
[0147] The length of the first intermediate extending conductive portion along the second direction is between the length of the first extending conductive portion along the second direction and the length of the first other extending conductive portion along the second direction;
[0148] The second movable conductive portion further includes a second intermediate extending conductive portion;
[0149] The second intermediate extending conductive portion is connected to the second crossing conductive portion and extends along the second direction;
[0150] The second intermediate extending conductive portion is located between the second further extending conductive portion and the second extending conductive portion in the third direction;
[0151] The length of the second intermediate extended conductive portion along the second direction is between the length of the second other extended conductive portion along the second direction and the length of the second extended conductive portion along the second direction.
[0152] (Technical Solution 7)
[0153] In the sensor according to any one of technical solutions 1 to 6,
[0154] The mass of the second movable conductive portion is different from the mass of the first movable conductive portion.
[0155] (Technical Solution 8)
[0156] In the sensor according to any one of technical solutions 1 to 7,
[0157] The first movable conductive portion includes a first hole;
[0158] The second movable conductive portion does not include a hole, or the second movable conductive portion includes a second hole;
[0159] An area of the second hole in a plane including the second direction and the third direction is different from an area of the first hole in the plane.
[0160] (Technical Solution 9)
[0161] In the sensor according to any one of technical solutions 1 to 7,
[0162] The first movable conductive portion includes a plurality of first holes;
[0163] The second movable conductive portion includes a plurality of second holes;
[0164] A sum of areas of the plurality of second holes in a plane including the second direction and the third direction is different from a sum of areas of the plurality of first holes in the plane.
[0165] (Technical Solution 10)
[0166] In the sensor according to any one of technical solutions 1 to 7,
[0167] The first movable conductive portion includes a plurality of first holes;
[0168] The second movable conductive portion includes a plurality of second holes;
[0169] The number of the second holes is different from the number of the first holes.
[0170] (Technical Solution 11)
[0171] A sensor comprises a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion and separated from the base;
[0172] The first movable part has:
[0173] a first movable base supported by the first supporting portion;
[0174] a second movable base, wherein a second direction from the first movable base toward the second movable base intersects a first direction from the base toward the first movable portion;
[0175] a connecting base, the connecting base being provided between the first movable base and the second movable base, and connecting the second movable base to the first movable base;
[0176] a first movable beam, the first movable beam comprising a first beam end, a first beam other end, and a first beam middle portion, the first beam end being connected to the first movable base, the first beam other end being connected to the second movable base, and the first beam middle portion being located between the first beam end and the first beam other end;
[0177] a second movable beam, the second movable beam comprising a second beam end portion, a second beam other end portion, and a second beam middle portion, the second beam end portion being connected to the first movable base portion, the second beam other end portion being connected to the second movable base portion, the second beam middle portion being located between the second beam end portion and the second beam other end portion, and the connecting base being located between the first beam middle portion and the second beam middle portion in a third direction intersecting a plane including the first direction and the second direction;
[0178] a first movable conductive portion connected to the first beam middle portion, the first beam middle portion being located between the first movable conductive portion and the connection base in the third direction, the first movable conductive portion including a first extending conductive portion extending along the second direction; and
[0179] a second movable conductive portion connected to the second beam middle portion, the second beam middle portion being located between the connection base and the second movable conductive portion in the third direction, the second movable conductive portion including a second extended conductive portion extending along the second direction;
[0180] The first movable conductive portion includes one or more first holes;
[0181] The second movable conductive portion includes one or more second holes;
[0182] The sum of areas of the one or more second holes in a plane including the second direction and the third direction is different from the sum of areas of the one or more first holes in the plane.
[0183] (Technical Solution 12)
[0184] In the sensor described in technical solution 11,
[0185] The first movable conductive portion includes a plurality of first holes;
[0186] The second movable conductive portion includes a plurality of second holes;
[0187] The number of the second holes is different from the number of the first holes.
[0188] (Technical Solution 13)
[0189] In the sensor described in technical solution 11 or 12,
[0190] The mass of the second movable conductive portion is different from the mass of the first movable conductive portion.
[0191] (Technical Solution 14)
[0192] In the sensor according to any one of technical solutions 1 to 13, the sensor further comprises:
[0193] a first opposing conductive portion opposing at least a portion of the first movable conductive portion, and
[0194] A second opposing conductive portion is opposed to at least a portion of the second movable conductive portion.
[0195] (Technical Solution 15)
[0196] In the sensor described in technical solution 14,
[0197] At least a portion of the first opposing conductive portion is located between the first further extending conductive portion and the first extending conductive portion in the third direction;
[0198] At least a portion of the second opposing conductive portion is located between the second other extended conductive portion and the second extended conductive portion in the third direction.
[0199] (Technical Solution 16)
[0200] In the sensor according to any one of technical solutions 1 to 13, the sensor further comprises:
[0201] a first counter electrode facing at least a portion of the first movable conductive portion, and a second counter electrode facing at least a portion of the second movable conductive portion.
[0202] (Technical Solution 17)
[0203] In the sensor according to any one of technical solutions 1 to 13,
[0204] It also has a first structure and a second structure fixed to the base;
[0205] At least a portion of the first structure faces at least a portion of the first movable conductive portion in the third direction;
[0206] At least a portion of the second structure faces at least a portion of the second movable conductive portion in the third direction.
[0207] (Technical Solution 18)
[0208] In the sensor according to any one of technical solutions 1 to 17,
[0209] The length of the first movable base along the third direction is longer than the length of the connecting base along the third direction;
[0210] A length of the second movable base along the third direction is longer than a length of the connection base along the third direction.
[0211] (Technical Solution 19)
[0212] In the sensor according to any one of technical solutions 1 to 17,
[0213] The first movable portion further includes a movable component;
[0214] The second movable base is provided between the first movable base and the movable member in the second direction;
[0215] The length of the movable member along the third direction is longer than the length of the second movable base along the third direction.
[0216] (Technical Solution 20)
[0217] An electronic device includes the sensor according to any one of claims 1 to 19, and a circuit processing unit capable of controlling a circuit based on a signal obtained from the sensor.
[0218] According to the embodiment, a sensor and an electronic device having improved characteristics can be provided.
[0219] The embodiments of the present invention have been described above with reference to specific examples. However, the present invention is not limited to these specific examples. For example, the specific configurations of the various elements of the sensor, such as the substrate, support portion, movable portion, opposing conductive portion, opposing electrode, and control portion, are encompassed within the scope of the present invention as long as those skilled in the art can appropriately select from the known ranges and implement the present invention in the same manner to achieve the same effects.
[0220] Furthermore, any configuration formed by combining two or more elements of the specific examples within a technically feasible range is also included in the scope of the present invention as long as it includes the gist of the present invention.
[0221] Furthermore, all sensors and electronic devices that can be implemented by those skilled in the art through appropriate design changes based on the sensors and electronic devices described as embodiments of the present invention also fall within the scope of the present invention as long as they include the gist of the present invention.
[0222] Furthermore, it should be understood that within the scope of the concept of the present invention, those skilled in the art can conceive of various changes and modifications, and these changes and modifications also fall within the scope of the present invention.
[0223] While several embodiments of the present invention have been described, these embodiments are presented merely as examples and are not intended to limit the scope of the invention. These novel embodiments may be implemented in various other ways, and various omissions, substitutions, and modifications may be made without departing from the gist of the invention. These embodiments and their variations are intended to be within the scope and spirit of the invention and are encompassed by the invention set forth in the claims and their equivalents.
Claims
1. A sensor comprising a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion and separated from the base; The first movable portion includes a first movable base, a second movable base, a connecting base, a first movable beam, a second movable beam, a first movable conductive portion, and a second movable conductive portion. The first movable base is supported by the first supporting portion; a second direction from the first movable base toward the second movable base intersecting with a first direction from the base toward the first movable portion; The connecting base is provided between the first movable base and the second movable base, connecting the second movable base and the first movable base; The first movable beam includes a first beam end portion, a first beam other end portion, and a first beam middle portion, the first beam end portion is connected to the first movable base portion, the first beam other end portion is connected to the second movable base portion, and the first beam middle portion is located between the first beam end portion and the first beam other end portion; The second movable beam includes a second beam end portion, a second beam other end portion, and a second beam middle portion, the second beam end portion is connected to the first movable base portion, the second beam other end portion is connected to the second movable base portion, the second beam middle portion is located between the second beam end portion and the second beam other end portion, and the connecting base portion is located between the first beam middle portion and the second beam middle portion in a third direction intersecting a plane including the first direction and the second direction; The first movable conductive portion is connected to the first beam middle portion, the first beam middle portion is located between the first movable conductive portion and the connection base in the third direction, and the first movable conductive portion includes: a first cross-conductive portion connected to the middle portion of the first beam and extending along the third direction; a first extending conductive portion connected to the first crossing conductive portion and extending along the second direction; as well as a first further extended conductive portion connected to the first intersecting conductive portion and extending along the second direction, the first further extended conductive portion being located between the first extended conductive portion and the first beam middle portion in the third direction; The second movable conductive portion is connected to the second beam middle portion, the second beam middle portion is located between the connection base and the second movable conductive portion in the third direction, and the second movable conductive portion includes: a second cross-conductive portion connected to the middle portion of the second beam and extending along the third direction; a second extended conductive portion connected to the second intersecting conductive portion and extending along the second direction; and a second further extending conductive portion connected to the second crossing conductive portion and extending along the second direction, the second further extending conductive portion being located between the second beam middle portion and the second extending conductive portion in the third direction; The length of the first movable base along the third direction is longer than the length of the connecting base along the third direction. The length of the second movable base along the third direction is longer than the length of the connecting base along the third direction. In the third direction, the connection base is located between the first intersecting conductive portion and the second intersecting conductive portion.
2. The sensor according to claim 1, The length of the first further extended conductive portion along the second direction is longer than the length of the first extended conductive portion along the second direction; A length of the second further extended conductive portion along the second direction is longer than a length of the second extended conductive portion along the second direction.
3. The sensor according to claim 2, The first movable conductive portion further includes a first intermediate extending conductive portion; The first intermediate extending conductive portion is connected to the first crossing conductive portion and extends along the second direction; The first intermediate extending conductive portion is located between the first extending conductive portion and the first further extending conductive portion in the third direction; The length of the first intermediate extending conductive portion along the second direction is between the length of the first extending conductive portion along the second direction and the length of the first other extending conductive portion along the second direction; The second movable conductive portion further includes a second intermediate extending conductive portion; The second intermediate extending conductive portion is connected to the second crossing conductive portion and extends along the second direction; The second intermediate extending conductive portion is located between the second further extending conductive portion and the second extending conductive portion in the third direction; The length of the second intermediate extended conductive portion along the second direction is between the length of the second other extended conductive portion along the second direction and the length of the second extended conductive portion along the second direction.
4. The sensor according to claim 1, The mass of the second movable conductive portion is different from the mass of the first movable conductive portion.
5. The sensor according to claim 1, The first movable conductive portion includes a plurality of first holes; The second movable conductive portion includes a plurality of second holes; The number of the second holes is different from the number of the first holes.
6. The sensor according to claim 1, further comprising: a first opposing conductive portion opposing at least a portion of the first movable conductive portion, and A second opposing conductive portion is opposed to at least a portion of the second movable conductive portion.
7. The sensor according to claim 1, further comprising: a first counter electrode facing at least a portion of the first movable conductive portion, and a second counter electrode facing at least a portion of the second movable conductive portion.
8. A sensor comprising a base, a first support portion fixed to the base, and a first movable portion supported by the first support portion and separated from the base; The first movable part has: a first movable base supported by the first supporting portion; a second movable base, wherein a second direction from the first movable base toward the second movable base intersects a first direction from the base toward the first movable portion; a connecting base, the connecting base being provided between the first movable base and the second movable base, and connecting the second movable base to the first movable base; a first movable beam, the first movable beam comprising a first beam end, a first beam other end, and a first beam middle portion, the first beam end being connected to the first movable base, the first beam other end being connected to the second movable base, and the first beam middle portion being located between the first beam end and the first beam other end; a second movable beam, the second movable beam comprising a second beam end portion, a second beam other end portion, and a second beam middle portion, the second beam end portion being connected to the first movable base portion, the second beam other end portion being connected to the second movable base portion, the second beam middle portion being located between the second beam end portion and the second beam other end portion, and the connecting base being located between the first beam middle portion and the second beam middle portion in a third direction intersecting a plane including the first direction and the second direction; a first movable conductive portion connected to the first beam middle portion, the first beam middle portion being located between the first movable conductive portion and the connection base in the third direction, the first movable conductive portion including a first extending conductive portion extending along the second direction; as well as a second movable conductive portion connected to the second beam middle portion, the second beam middle portion being located between the connection base and the second movable conductive portion in the third direction, the second movable conductive portion including a second extended conductive portion extending along the second direction; The first movable conductive portion includes one or more first holes; The second movable conductive portion includes one or more second holes; The sum of the areas of the one or more second holes in a plane including the second direction and the third direction is different from the sum of the areas of the one or more first holes in the plane, The first movable conductive portion further includes a first cross conductive portion connected to the first beam middle portion and extending along the third direction. The first extended conductive portion is connected to the first intersecting conductive portion, The second movable conductive portion further includes a second cross conductive portion connected to the second beam middle portion and extending along the third direction. The second extended conductive portion is connected to the second intersecting conductive portion. The length of the first movable base along the third direction is longer than the length of the connecting base along the third direction. The length of the second movable base along the third direction is longer than the length of the connecting base along the third direction. In the third direction, the connection base is located between the first intersecting conductive portion and the second intersecting conductive portion.
9. The sensor according to claim 8, The first movable conductive portion includes a plurality of first holes; The second movable conductive portion includes a plurality of second holes; The number of the second holes is different from the number of the first holes. 10 . An electronic device comprising the sensor according to claim 1 and a circuit processing unit capable of controlling a circuit based on a signal obtained from the sensor.