A device for quickly adjusting the beam scale

Abstract

The present invention belongs to the technical field of particle beam control, and particularly relates to a device for quickly adjusting the beam scale, which includes a housing composed of a diaphragm base (1) and a diaphragm top cover (7). A beam outlet through which the particle beam can pass is provided on the housing. A rotary drive disk (6), a vertical movable baffle (3), and a horizontal movable baffle (5) are arranged inside the housing. The rotation of the rotary drive disk (6) drives the vertical movable baffle (3) and the horizontal movable baffle (5) to move, so as to realize the opening or closing of the beam outlet and the adjustment of the size of the beam outlet, thereby realizing the adjustment of the scale of the particle beam. The present invention realizes the continuous and rapid adjustment of the size of the beam outlet between 0 cm and 10×10 cm. In terms of the beam scale, it is improved from the original 1 cm×1 cm - 5 cm×5 cm to 0 - 10 cm×10 cm, which can meet the requirements of large-size devices and simultaneous irradiation of multiple devices, improve the utilization rate of the beam, simplify the experimental process, and improve the experimental efficiency.

Description

Technical Field

[0001] The present invention belongs to the technical field of particle beam control, and particularly relates to a device for quickly adjusting the beam size. Background Art

[0002] In the experimental research on heavy ion single event effects, it is necessary to adjust the beam spot size of the particle beam according to the size of the sensitive area of the irradiated device. In recent years, with the continuous progress of the electronics industry and the aerospace industry, devices are developing towards high integration, high frequency, high speed, low power consumption, etc. The increasing integration of electronic systems makes the evaluation results of the radiation resistance of a single device unable to reflect the overall radiation resistance of the system. Expanding the irradiation beam spot size of the accelerator to meet the requirements of large-size devices (such as optoelectronic devices: the size of the image sensor is greater than 7 cm × 7 cm), board-level, system-level irradiation, and simultaneous irradiation of multiple devices, and endowing it with the ability to continuously adjust the size will effectively improve the single event effect test ability in China and the utilization rate of the beam.

[0003] Currently, the existing device for adjusting the beam size realizes the synchronous adjustment in the X and Y directions by using a single stepping motor combined with a bidirectional threaded screw and a direction-changing conversion gear shaft, and can be remotely controlled by a computer to quickly adjust the beam spot size from 1 cm × 1 cm to 5 cm × 5 cm. However, due to processing technology reasons, there is a gap of about 1 cm between the bidirectional threaded screws, so this aperture cannot achieve the adjustment of sizes below 1 cm × 1 cm. In addition, it cannot meet the experimental requirements for irradiating large-scale image sensors. Summary of the Invention

[0004] The purpose of the present invention is to provide a new device for quickly adjusting the beam size. The whole device consists of two groups (four in total) of horizontally and vertically movable baffles that can move synchronously. By the opposite movement between each group of baffles, a square aperture with adjustable size is constructed.

[0005] To achieve the above object, the technical solution adopted by the present invention is a device for quickly adjusting the beam size, which includes a housing composed of a diaphragm base and a diaphragm top cover. The housing is provided with a beam outlet through which the particle beam can pass. Inside the housing, there are a rotary drive disk, a vertical movable baffle, and a horizontal movable baffle. By the rotation of the rotary drive disk, the vertical movable baffle and the horizontal movable baffle are driven to move, so as to realize the opening or closing of the beam outlet and the adjustment of the size of the beam outlet, thereby realizing the adjustment of the size of the particle beam.

[0006] Furthermore,

[0007] A square first through-hole is provided in the middle of the diaphragm base, and a square fourth through-hole is provided in the middle of the diaphragm top cover. The first through-hole and the fourth through-hole are coaxial and have the same size, jointly forming the beam outlet.

[0008] The vertical movable baffle is composed of two oppositely arranged movable baffles, which can approach or move away from each other in the vertical direction as the rotary drive disk rotates.

[0009] The horizontal movable baffle is composed of two oppositely arranged movable baffles, which can approach or move away from each other in the horizontal direction as the rotary drive disk rotates.

[0010] The beam outlet adjusted by the vertical movable baffle and the horizontal movable baffle is square.

[0011] Furthermore, it further includes a mounting disk. The mounting disk is close to the diaphragm base. A square second through-hole is provided in the middle of the mounting disk. The second through-hole is coaxial with the first through-hole and has the same size. A first limiting groove is also provided on the surface of the mounting disk that is not close to the diaphragm base. The vertical movable baffle is arranged in the first limiting groove and moves in the vertical direction along the first limiting groove.

[0012] Furthermore, it further includes a fixing disk. The fixing disk is composed of two symmetrically arranged fixing disk pieces up and down, which are used to arrange the vertical movable baffle in the first limiting groove of the mounting disk. At the same time, the space separated between the two fixing disk pieces of the fixing disk serves as a second limiting groove, and the horizontal movable baffle is arranged in the second limiting groove and moves in the horizontal direction along the second limiting groove.

[0013] Furthermore, it further includes a rotary drive disk. The rotary drive disk is located between the fixing disk and the diaphragm top cover. A circular third through-hole is provided at the central position of the rotary drive disk. The third through-hole is coaxial with the first through-hole, and the diameter of the third through-hole is larger than the diagonal length of the first through-hole. Four fourth limiting grooves are provided on the rotary drive disk, corresponding to two vertical movable baffles and two horizontal movable baffles respectively, for driving the vertical movable baffle and the horizontal movable baffle to move.

[0014] Furthermore,

[0015] A third limiting groove is also provided on the fixing disk, and a first convex rib is provided on the vertical movable baffle. The first convex rib passes through the third limiting groove and extends into the fourth limiting groove.

[0016] A second convex rib is provided on the horizontal movable baffle, and the second convex rib extends into the fourth limiting groove.

[0017] When the rotation drive disk rotates forward, it drives the first convex lug and the second convex lug through the fourth limiting groove, causing the vertical movable baffles to approach each other in the vertical direction and the horizontal movable baffles to approach each other in the horizontal direction;

[0018] When the rotation drive disk rotates reversely, it drives the first convex lug and the second convex lug through the fourth limiting groove, causing the vertical movable baffles to move away from each other in the vertical direction and the horizontal movable baffles to move away from each other in the horizontal direction;

[0019] Bearings are arranged on both the first convex lug and the second convex lug to reduce friction.

[0020] Furthermore, a stepping motor is further included and is arranged on the diaphragm top cover. The stepping motor is used to provide power for the rotation of the rotation drive disk. A toothed structure is provided at the edge of the rotation drive disk, and a gear adapted to the toothed structure of the rotation drive disk is provided on the transmission shaft of the stepping motor to realize the transmission of the stepping motor to the rotation drive disk.

[0021] Furthermore, a controller for controlling the rotation direction and rotation angle of the stepping motor is further included. By controlling the rotation of the stepping motor through the controller, continuous and rapid adjustment of the size of the beam outlet between 0 cm and 10×10 cm is achieved.

[0022] Furthermore, the controller can realize local control of the stepping motor and can also realize remote control of the stepping motor through remote communication between the computer and the controller, thereby realizing local control and remote control of the size of the beam outlet.

[0023] The beneficial effects of the present invention are as follows:

[0024] 1. Continuous and rapid adjustment of the size of the beam outlet between 0 cm and 10×10 cm is achieved through the controller.

[0025] 2. In terms of the beam scale, it is increased from the original 1 cm×1 cm - 5 cm×5 cm to 0 - 10 cm×10 cm, which can meet the needs of large-size devices and simultaneous irradiation of multiple devices, improve the experimental efficiency, especially improve the test ability of single particle effects in the experimental research of heavy ion single particle effects, improve the utilization rate of the beam, and simplify the experimental process. Description of the Drawings

[0026] Figure 1 is the front view of a device for quickly adjusting the beam scale described in the specific embodiment of the present invention;

[0027] Figure 2It is a three-dimensional perspective view of a device for quickly adjusting the beam size described in the specific implementation manner of the present invention;

[0028] Figure 3 It is an exploded schematic view of a device for quickly adjusting the beam size described in the specific implementation manner of the present invention;

[0029] Figure 4 It is a front perspective view of a device for quickly adjusting the beam size described in the specific implementation manner of the present invention;

[0030] In the figure: 1 - diaphragm base, 2 - mounting disc, 3 - vertically movable baffle, 4 - fixed disc, 5 - horizontally movable baffle, 6 - rotary drive disc, 7 - diaphragm top cover, 8 - stepper motor, 9 - first through hole, 10 - second through hole, 11 - third through hole, 12 - fourth through hole, 13 - first limit groove, 14 - first convex lug, 15 - third limit groove, 16 - second convex lug, 17 - fourth limit groove. Specific implementation manner

[0031] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0032] A device for quickly adjusting the beam size provided by the present invention (see Figures 1 to 4 ), wherein, it includes a housing composed of a diaphragm base 1 and a diaphragm top cover 7, and a beam outlet (diaphragm opening) capable of passing particle beam current is provided on the housing. Inside the housing, there are a rotary drive disc 6, a vertically movable baffle 3 and a horizontally movable baffle 5. The rotation of the rotary drive disc 6 drives the vertically movable baffle 3 and the horizontally movable baffle 5 to move, so as to realize the opening or closing of the beam outlet and the adjustment of the size of the beam outlet, thereby realizing the adjustment of the size of the particle beam current.

[0033] A square first through hole 9 is provided in the middle of the diaphragm base 1, and a square fourth through hole 12 is provided in the middle of the diaphragm top cover 7. The first through hole 9 and the fourth through hole 12 are coaxial and have the same size, and together they form the beam outlet;

[0034] The vertically movable baffle 3 is composed of two relatively arranged movable baffles, which can approach or move away from each other in the vertical direction along with the rotation of the rotary drive disc 6;

[0035] The horizontally movable baffle 5 is composed of two relatively arranged movable baffles, which can approach or move away from each other in the horizontal direction along with the rotation of the rotary drive disc 6;

[0036] The beam outlet adjusted by the vertically movable baffle 3 and the horizontally movable baffle 5 is square.

[0037] It also includes an installation disk 2. The installation disk 2 is close to the diaphragm base 1. A square second through hole 10 is provided in the middle of the installation disk 2. The second through hole 10 is coaxial with and has the same size as the first through hole 9. A first limiting groove 13 is also provided on the surface of the installation disk 2 that is not close to the diaphragm base 1. The vertical movable baffle 3 is arranged in the first limiting groove 13 and moves in the vertical direction along the first limiting groove 13.

[0038] It also includes a fixed disk 4. The fixed disk 4 consists of two fixed disk pieces symmetrically arranged up and down, which are used to arrange the vertical movable baffle 3 in the first limiting groove 13 of the installation disk 2. At the same time, the space separated between the two fixed disk pieces of the fixed disk 4 serves as a second limiting groove, and the horizontal movable baffle 5 is arranged in the second limiting groove and moves in the horizontal direction along the second limiting groove.

[0039] It also includes a rotary drive disk 6. The rotary drive disk 6 is located between the fixed disk 4 and the diaphragm top cover 7. A circular third through hole 11 is provided at the center position of the rotary drive disk 6. The third through hole 11 is coaxial with the first through hole 9, and the diameter of the third through hole 11 is greater than the diagonal length of the first through hole 9. Four fourth limiting grooves 17 are provided on the rotary drive disk 6, corresponding to two vertical movable baffles 3 and two horizontal movable baffles 5 respectively, for driving the vertical movable baffle 3 and the horizontal movable baffle 5 to move.

[0040] A third limiting groove 15 is also provided on the fixed disk 4. A first convex lug 14 is provided on the vertical movable baffle 3. The first convex lug 14 passes through the third limiting groove 15 and extends into the fourth limiting groove 17.

[0041] A second convex lug 16 is provided on the horizontal movable baffle 5. The second convex lug 16 extends into the fourth limiting groove 17.

[0042] When the rotary drive disk 6 rotates forward, it drives the first convex lug 14 and the second convex lug 16 to move through the fourth limiting groove 17, so that the vertical movable baffles 3 approach each other in the vertical direction and the horizontal movable baffles 5 approach each other in the horizontal direction, thereby realizing the reduction adjustment of the size of the beam outlet.

[0043] When the rotary drive disk 6 rotates reversely, it drives the first convex lug 14 and the second convex lug 16 to move through the fourth limiting groove 17, so that the vertical movable baffles 3 move away from each other in the vertical direction and the horizontal movable baffles 5 move away from each other in the horizontal direction, thereby realizing the enlargement adjustment of the size of the beam outlet.

[0044] Small-sized bearings are provided on both the first convex lug 14 and the second convex lug 16 to reduce friction.

[0045] It further includes a stepper motor 8 disposed on the diaphragm top cover 7. The stepper motor 8 is used to provide power for the rotation of the rotary drive disk 6. The stepper motor 8 drives the rotary drive disk 6 to rotate through a gear. A toothed structure is provided at the edge of the rotary drive disk 6, and a gear adapted to the toothed structure of the rotary drive disk 6 is provided on the transmission shaft of the stepper motor 8 for realizing the transmission of the stepper motor 8 to the rotary drive disk 6.

[0046] It further includes a controller for controlling the rotation direction and rotation angle of the stepper motor 8. By controlling the rotation of the stepper motor 8 through the controller, continuous and rapid adjustment of the size of the beam outlet between 0 cm and 10×10 cm is achieved.

[0047] The controller can realize the local control of the stepper motor 8, and can also realize the remote control of the stepper motor 8 through the remote communication between the computer and the controller, so as to realize the local control and remote control of the size of the beam outlet.

[0048] The device described in the present invention is not limited to the embodiments described in the specific embodiments. Those skilled in the art can obtain other embodiments according to the technical solutions of the present invention, which also belong to the scope of the technical innovation of the present invention.

Claims

1. A device for quickly adjusting the beam scale, characterized in that: A housing composed of a diaphragm base (1) and a diaphragm top cover (7), wherein a beam outlet capable of passing a particle beam is provided on the housing, and a rotary drive disk (6), a vertical movable baffle (3) and a horizontal movable baffle (5) are provided inside the housing. The rotation of the rotary drive disk (6) drives the vertical movable baffle (3) and the horizontal movable baffle (5) to move, so as to open or close the beam outlet and adjust the size of the beam outlet, thereby realizing the adjustment of the scale of the particle beam; A square first through hole (9) is provided in the middle of the diaphragm base (1), and a square fourth through hole (12) is provided in the middle of the diaphragm top cover (7). The first through hole (9) and the fourth through hole (12) are coaxial and have the same size, and together they form the beam outlet; The vertical movable baffle (3) is composed of two oppositely arranged movable baffles, and can approach or move away from each other in the vertical direction as the rotary drive disk (6) rotates; The horizontal movable baffle (5) is composed of two oppositely arranged movable baffles, and can approach or move away from each other in the horizontal direction as the rotary drive disk (6) rotates; The beam outlet adjusted by the vertical movable baffle (3) and the horizontal movable baffle (5) is square; It further includes a mounting disk (2). The mounting disk (2) is close to the diaphragm base (1). A square second through hole (10) is provided in the middle of the mounting disk (2). The second through hole (10) is coaxial with the first through hole (9) and has the same size; a first limiting groove (13) is further provided on the surface of the mounting disk (2) that is not close to the diaphragm base (1). The vertical movable baffle (3) is arranged in the first limiting groove (13) and moves in the vertical direction along the first limiting groove (13).

2. The device for quickly adjusting the beam scale according to claim 1, characterized in that: It further includes a fixing disk (4). The fixing disk (4) is composed of two symmetrically arranged fixing disk pieces up and down, and is used to arrange the vertical movable baffle (3) in the first limiting groove (13) of the mounting disk (2). At the same time, the space between the two fixing disk pieces of the fixing disk (4) serves as a second limiting groove, and the horizontal movable baffle (5) is arranged in the second limiting groove and moves in the horizontal direction along the second limiting groove.

3. A device for quickly adjusting the beam scale according to claim 2, characterized in that: It further includes a rotary drive disk (6). The rotary drive disk (6) is located between the fixing disk (4) and the diaphragm top cover (7). A circular third through hole (11) is provided at the central position of the rotary drive disk (6). The third through hole (11) is coaxial with the first through hole (9), and the diameter of the third through hole (11) is greater than the diagonal length of the first through hole (9); four fourth limiting grooves (17) are provided on the rotary drive disk (6), corresponding to the two vertical movable baffles (3) and the two horizontal movable baffles (5) respectively, and are used to drive the vertical movable baffle (3) and the horizontal movable baffle (5) to move.

4. The device for quickly adjusting the beam scale according to claim 3, characterized in that: A third limiting groove (15) is further provided on the fixed disk (4), and a first convex projection (14) is provided on the vertical movable baffle (3). The first convex projection (14) passes through the third limiting groove (15) and extends into the fourth limiting groove (17). A second convex projection (16) is provided on the horizontal movable baffle (5), and the second convex projection (16) extends into the fourth limiting groove (17). When the rotary drive disk (6) rotates forward, the first convex projection (14) and the second convex projection (16) are driven to move through the fourth limiting groove (17), so that the vertical movable baffles (3) approach each other in the vertical direction, and the horizontal movable baffles (5) approach each other in the horizontal direction. When the rotary drive disk (6) rotates reversely, the first convex projection (14) and the second convex projection (16) are driven to move through the fourth limiting groove (17), so that the vertical movable baffles (3) move away from each other in the vertical direction, and the horizontal movable baffles (5) move away from each other in the horizontal direction. Bearings are provided on both the first convex projection (14) and the second convex projection (16) to reduce friction.

5. A device for quickly adjusting the beam scale according to claim 4, characterized in that: It further includes a stepping motor (8) provided on the aperture top cover (7). The stepping motor (8) is used to provide power for the rotation of the rotary drive disk (6). A toothed structure is provided on the edge of the rotary drive disk (6), and a gear adapted to the toothed structure of the rotary drive disk (6) is provided on the transmission shaft of the stepping motor (8) to realize the transmission of the stepping motor (8) to the rotary drive disk (6).

6. The apparatus for quickly adjusting the beam scale according to claim 5, characterized in that: It further includes a controller for controlling the rotation direction and rotation angle of the stepping motor (8). By controlling the rotation of the stepping motor (8) through the controller, the size of the beam outlet can be continuously and rapidly adjusted between 0 cm and 10×10 cm; the controller can be remotely controlled.

7. The device for quickly adjusting the beam scale according to claim 6, characterized in that: The controller can realize the local control of the stepping motor (8), and can also realize the remote control of the stepping motor (8) through the remote communication between the computer and the controller, so as to realize the local control and remote control of the size of the beam outlet.

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