A substrate thinning apparatus

Abstract

The application discloses a substrate thinning device, which comprises a base, a thinning module arranged on the upper portion of the base, a rotating disc arranged on the upper portion of the base and located at the side portion of the thinning module, a chuck configured above the rotating disc and used for placing a substrate, and a position checking assembly comprising a rotating part, a swing arm and a measuring part, wherein one end of the swing arm is connected to the rotating part, and the other end of the swing arm is provided with the measuring part; the measuring part is provided with a detection sensor, which can be moved to above the chuck through the swing arm; a grinding wheel of the thinning module is moved towards the measuring part, so that the detection sensor of the measuring part is in abutment with the chuck; the detection sensor triggers a signal for stopping the downward movement of the grinding wheel, so as to obtain the distance between the grinding wheel and the chuck.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of substrate thinning, and particularly relates to a substrate thinning device. BACKGROUND

[0002] Before a substrate is divided into semiconductor chips, the back surface opposite to the surface on which electronic circuit devices are formed is ground by a thinning processing device, so that the substrate is thinned to a predetermined thickness. In the thinning processing device, the moving position of the grinding wheel is very important, and the position of the grinding wheel needs to be manually checked regularly, which affects the efficiency of the grinding wheel position checking to some extent.

[0003] The existing grinding wheel position checking assembly has a complex structure, and when the grinding wheel position is checked, the measurement module is prone to tilt and jam, thereby affecting the accuracy of position detection. In addition, the existing grinding wheel position checking assembly is exposed to cutting fluid and grinding dust for a long time, and grinding dust is attached to the surface, which also affects the accuracy of the grinding wheel position checking. SUMMARY

[0004] The embodiments of the present application provide a substrate thinning device, which aims to at least solve one of the technical problems existing in the prior art.

[0005] The embodiments of the present application provide a substrate thinning device, which comprises:

[0006] a base;

[0007] a thinning module arranged on the upper portion of the base;

[0008] a turntable arranged on the upper portion of the base and located on the side portion of the thinning module; the upper portion of the turntable is configured with a chuck for placing a substrate;

[0009] The position checking assembly further comprises a rotating portion, a swing arm and a measurement portion, one end of the swing arm is connected to the rotating portion, and the other end of the swing arm is provided with the measurement portion; the measurement portion is configured with a detection sensor, which can be moved to the upper portion of the chuck through the swing arm; the grinding wheel of the thinning module moves towards the measurement portion, so that the detection sensor of the measurement portion abuts against the chuck; the detection sensor triggers a signal for stopping the downward movement of the grinding wheel, so as to obtain the distance between the grinding wheel and the chuck.

[0010] In some embodiments, the swing arm and the measurement portion are flexibly connected.

[0011] In some embodiments, the swing arm is connected to the measurement portion through a connecting rod, so that the measurement portion can be adaptively moved in the vertical direction.

[0012] In some embodiments, the position checking assembly further comprises a spring connected between the swing arm and the connecting rod; the number of the spring is one pair, which is symmetrically arranged on both sides of the connecting rod.

[0013] In some embodiments, the rotating part comprises a rotating shaft and a rotating cylinder, the rotating shaft is arranged above the rotating cylinder, and the swing arm is arranged at the upper end of the rotating shaft.

[0014] In some embodiments, the top of the measuring part is provided with a wear-resistant pad made of polytetrafluoroethylene.

[0015] In some embodiments, the measuring part is further provided with a limit sensor arranged at a position spaced from the detection sensor, and the installation position of the limit sensor is higher than that of the detection sensor.

[0016] In some embodiments, the position checking assembly further comprises a protective cover arranged outside the suction cup, and the arrangement position of the protective cover matches the position of the swing arm.

[0017] In some embodiments, the side of the protective cover is provided with a switch door hinged to the protective cover, and the swing arm enters and exits the protective cover through the switch door.

[0018] In some embodiments, the top of the swing arm is provided with a limit piece, and when the swing arm and the measuring part connected thereto are outside the protective cover, at least part of the limit piece supports the switch door, so that the switch door is in an open state.

[0019] The beneficial effects of the present application include:

[0020] a. The swing arm is connected to the measuring part through a four-bar linkage, and the connecting rod in the four-bar linkage is provided with a spring to improve the smoothness of the vertical movement of the measuring part, avoid the inclination of the measuring part, and ensure the accuracy of the position checking of the grinding wheel;

[0021] b. The measuring part is provided with a detection sensor and a limit sensor to form double-layer protection for the position checking of the grinding wheel, and avoid the hard pressing of the grinding wheel and the suction cup on the measuring part;

[0022] c. The position checking assembly is provided with a protective cover, and the swing arm and the measuring part can be timely folded into the inside of the protective cover to avoid the splashing of grinding chips and / or grinding liquid onto the surface of the swing arm and the measuring part. BRIEF DESCRIPTION OF DRAWINGS

[0023] The advantages of the present application will become more apparent and more easily understood from the following detailed description, which is only illustrative and not restrictive, and is made in connection with the accompanying drawings, in which:

[0024] Figure 1 is a schematic view of a substrate thinning device provided by an embodiment of the present application;

[0025] Figure 2is a schematic view of a position checking assembly provided by an embodiment of the present application;

[0026] Figure 3 is Figure 2 is a front view of a corresponding position checking assembly;

[0027] Figure 4 is a schematic view of an application embodiment of the position checking assembly provided by the present application. DETAILED DESCRIPTION

[0028] The technical solutions of the present application will be described in detail below with reference to specific embodiments and the accompanying drawings. The embodiments described herein are specific concrete embodiments of the present application, which are used to illustrate the concept of the present application; these descriptions are all explanatory and exemplary, and should not be understood as limiting the embodiments of the present application and the protection scope of the present application. In addition to the embodiments described herein, those skilled in the art can also employ other technical solutions that are obvious based on the content disclosed in the claims and the specification of the present application, which include technical solutions that make any obvious substitutions and modifications to the embodiments described herein.

[0029] The drawings of the present specification are schematic drawings that assist in illustrating the concept of the present application, and schematically represent the shape of each part and the relationship between them. It should be understood that in order to clearly show the structure of each component of the embodiments of the present application, the drawings are not drawn according to the same scale, and the same reference numerals are used to represent the same parts in the drawings.

[0030] Figure 1 is a schematic view of a substrate thinning device provided by an embodiment of the present application, which includes a base 10 and a thinning module 20, and the thinning module 20 is arranged on the upper part of the base 10. Specifically, the thinning module 20 includes a column 21 and a spindle assembly, and the spindle assembly is slidingly connected to the side wall of the column 21 and can move in the vertical direction, so that the grinding wheel 22 at the bottom of the spindle assembly can abut against the substrate to be thinned.

[0031] Figure 1 In the embodiment shown, the base 10 further includes a turntable 30, which is arranged on the upper part of the base 10 and located at the side of the column 21 of the thinning module 20; and three suction cups 40 are arranged above the turntable 30, which are used to adsorb the substrate to be thinned.

[0032] Figure 1 In the embodiment shown, the turntable 30 is internally provided with driving devices, support shaft systems and other structures. The turntable 30 can rotate around its vertical central axis, so that the turntable 30 drives the plurality of suction cups 40 to rotate as a whole, thereby realizing the position conversion of the suction cups 40 between different stations.

[0033] Figure 1In the embodiment shown, the three suction cups 40 are uniformly distributed on the rotating disc 30, and the three suction cups 40 can be completely identical in structure and function. The three suction cups 40 can be made of porous ceramic. The three suction cups 40 are arranged at an angle of 120° with respect to the center of the rotating disc 30. The three suction cups 40 correspond to three workstations, i.e., a rough grinding workstation, a fine grinding workstation, and a loading and unloading workstation. The two workstations relative to the grinding tool 20 are used for rough grinding and fine grinding, respectively, and the remaining workstation is used for loading and unloading the substrate and cleaning the substrate. The rotating disc 30 can drive the three suction cups 40 to switch between the three workstations, so that the substrate carried by the suction cup 40 moves in the order of the loading and unloading workstation-rough grinding workstation-fine grinding workstation-loading and unloading workstation.

[0034] Figure 1 In the embodiment shown, the substrate thinning device further comprises a position checking assembly 50 for checking the vertical position of the grinding wheel 22.

[0035] Figure 2 FIG. 1 is a schematic view of the position checking assembly 50 according to an embodiment of the present application. The position checking assembly 50 comprises a measuring portion 51, a swing arm 52, and a rotating portion 53. The swing arm 52 is rotatably connected to the rotating portion 53, and the end of the swing arm 52 is provided with the measuring portion 51.

[0036] Figure 2 In the embodiment shown, the rotating portion 53 comprises a rotating shaft 53a and a rotating cylinder 53b. The rotating cylinder 53b is arranged above the rotating shaft 53a, and the swing arm 52 is arranged at the upper end of the rotating shaft 53a. Figure 1 In the embodiment shown, the rotating shaft 53a is arranged above the rotating cylinder 53b, and the swing arm 52 is arranged at the upper end of the rotating shaft 53a. Under the action of the rotating cylinder 53b, the swing arm 52 drives the measuring portion 51 connected thereto to rotate around the rotating shaft 53a, so as to move close to or away from the suction cup 40.

[0037] Further, the measuring portion 51 is provided with a detection sensor 51a. Figure 3 In the embodiment shown, the detection sensor 51a can be moved above the suction cup 40 by the swing arm 52.

[0038] When checking the position of the grinding wheel 22, the spindle assembly of the thinning module 20 moves towards the measuring portion 51, and the grinding wheel 22 at the bottom of the spindle assembly presses against the measuring portion 51, so that the detection sensor 51a abuts against the suction cup 40. Then, the detection sensor 51a triggers a signal, so that the grinding wheel 22 of the thinning module 20 stops moving downward. At this time, the vertical position of the grinding wheel 22 is the initial vertical position of the grinding wheel 22.

[0039] In the embodiment shown, the vertical height of the measuring portion 51 is relatively fixed. By controlling the measurement accuracy of the detection sensor 51a arranged on the measuring portion 51, the measurement accuracy of the distance between the grinding wheel 22 and the suction cup 40 can be improved, so as to determine the initial position of the grinding wheel 22 in the vertical direction.

[0040] In order to reduce the damage of the measuring part 51 to the grinding wheel 22, a wear-resistant pad 51b can be arranged on the top of the measuring part 51, as shown in Figure 2 In some embodiments, the wear-resistant pad 51b can be made of, for example, polytetrafluoroethylene, so as to ensure that the vertical height of the measuring part 51 is relatively fixed. It can be understood that the wear-resistant pad 51b can also be made of other non-metallic materials with wear resistance, such as polyphenylene sulfide (PPS), polyethylene, etc.

[0041] Since the surfaces of the grinding wheel 22 and the chuck 40 can be worn, the measuring part 51 needs to be flexibly connected with the swing arm 52. In some embodiments, at least the measuring part 51 needs to have a certain degree of freedom in the vertical direction, so as to improve the applicability of the position checking assembly 50.

[0042] Figure 3 is Figure 2 The front view of the position checking assembly 50 is shown, the swing arm 52 is hinged to the measuring part 51 through the connecting rod 54, so that the measuring part 51 can be adaptively moved in the vertical direction, so that the detection sensor 51a of the measuring part 51 can abut against the top surface of the chuck 40 in the case that the grinding wheel 22 and / or the chuck 40 are worn.

[0043] Figure 3 In the embodiment shown, the number of connecting rods 54 is a pair, the connecting rod 54 hinged to the swing arm 52 can be vertically swung along the hinge axis; the pair of connecting rods 54, the swing arm 52 and the measuring part 51 form a four-bar mechanism, so as to ensure that the swing arm 52 is flexibly connected with the measuring part 51 in the vertical direction, and the vertical position of the detection sensor 51a on the measuring part 51 is adaptively adjusted.

[0044] Figure 3 In the embodiment shown, the number of connecting rods 54 is a pair, the connecting rod 54 hinged to the swing arm 52 can be vertically swung along the hinge axis; the pair of connecting rods 54, the swing arm 52 and the measuring part 51 form a four-bar mechanism, so as to ensure that the swing arm 52 is flexibly connected with the measuring part 51 in the vertical direction, and the vertical position of the detection sensor 51a on the measuring part 51 is adaptively adjusted.

[0045] Figure 2 In the embodiment shown, the number of springs 55 is a pair, which are symmetrically arranged on both sides of the connecting rod 54, so as to ensure that the measuring part 51 swings in the vertical direction along the hinge point, and the measuring part 51 moves in the vertical direction, so as to avoid the measuring part 51 from tilting, thereby improving the accuracy of the position checking of the grinding wheel 22. Figure 3 In the embodiment shown, the measuring part 51 is also provided with a limit sensor 51c, which is arranged in a spaced manner with the detection sensor 51a; and the installation position of the limit sensor 51c is higher than that of the detection sensor 51a, so that the bottom of the limit sensor 51c is higher than that of the detection sensor 51a.

[0046] Figure 4When the grinding wheel 22 moves vertically towards the chuck 40, the bottom surface of the grinding wheel 22 abuts against the measuring portion 51; the detection sensor 51a abuts against the surface of the chuck 40, and then the detection sensor 51a triggers a signal to control the spindle assembly to stop moving; if the detection sensor 51a fails to trigger the signal, the grinding wheel 22 continues to move downwards, and the limit sensor 51c abuts against the surface of the chuck 40, the limit sensor 51c triggers a signal, and the control unit receives the signal and controls the spindle assembly to stop moving, so as to prevent the grinding wheel 22 and the chuck 40 from hard contact with the measuring portion 51.

[0047] Compared with the detection sensor 51a, the limit sensor 51c has low measurement accuracy, which can avoid the grinding wheel 22 and the chuck 40 from hard contact with the measuring portion 51, and enhance the protection of the grinding wheel 22 and the chuck 40.

[0048] Figure 2 In the illustrated embodiment, the position checking assembly 50 further comprises a protective cover 56, which is arranged outside the chuck 40; specifically, the protective cover 56 is fixed to the side surface of the column 21, and is arranged at a position matching the position of the swing arm 52, so that the swing arm 52 and the measuring portion 51 connected thereto can be placed in the protective cover 56 as a whole.

[0049] Further, the side portion of the protective cover 56 is provided with a switch door 56a, which is hinged to one side of the protective cover 56, and the switch door 56a is arranged towards the turntable 30, and the swing arm 52 enters or exits the protective cover 56 via the switch door 56a.

[0050] Figure 2 In the illustrated embodiment, the top portion of the swing arm 52 is provided with a limit piece 57, and when the swing arm 52 and the measuring portion 51 connected thereto are located outside the protective cover 56, at least part of the limit piece 57 supports the switch door 56a, so that the switch door 56a is in an open state. When the position of the grinding wheel 22 is checked, the swing arm 52 swings towards the inside of the protective cover 56, and the hinged switch door 56a is automatically closed under the action of gravity.

[0051] Figure 2 In the illustrated embodiment, the side portion of the swing arm 52 is further provided with an opening block 58, which is arranged towards the switch door 56a, and the outer side surface of the opening block 58 is located outside the measuring portion 51. In this way, when the switch door 56a is opened, the opening block 58 abuts against the switch door 56a in advance, so as to realize automatic opening of the switch door 56a. In addition, the opening block 58 can also avoid collision between the measuring portion 51 and the switch door 56a, reduce vibration of the measuring portion 51 and the detection sensor 51a thereon, and ensure accurate checking of the position of the grinding wheel 22.

[0052] When the position of the grinding wheel 22 is checked, the rotating part 53 drives the swing arm 52 and the measuring part 51 thereon to rotate to the surface of the chuck 40; the main shaft assembly is slowly controlled to move downward until the grinding wheel 22 is pressed against the measuring part 51, so that the detection sensor 51a triggers a signal, and the control part receives and executes a signal of stopping the downward movement of the main shaft assembly; at this time, the detection sensor 51a can obtain the distance H between the grinding wheel 22 and the chuck 40, as shown in FIG. 8. The operator can set the substrate thinning parameters according to the distance H between the grinding wheel 22 and the chuck 40 to realize the thinning operation of the substrate. Figure 4

[0053] Figure 2 In the embodiment shown, the upper part of the protective cover 56 is provided with a gas pipe joint, and an external pipeline is connected to the protective cover 56 through the gas pipe joint to spray fluid into the interior of the protective cover 56. The sprayed fluid can clean the swing arm 52 and the surface of the measuring part 51 connected thereto from the adhered particles, so as to avoid the influence of the adhered particles on the accuracy of the position checking of the grinding wheel 22.

[0054] As an aspect of the embodiment, a certain temperature gas, such as normal temperature air, can be introduced into the protective cover 56, and the air temperature is controlled at 20±1℃, so as to reduce the influence of the ambient temperature on the size of the measuring part 51, and make the vertical height of the measuring part 51 fluctuate within a tolerance range, thereby realizing the accurate checking of the position of the grinding wheel 22. Figure 2

[0055] The substrate thinning device provided by the present application is provided with the position checking assembly 50, which can quickly move the grinding wheel 22 to a corresponding position, automatically ensure the distance between the grinding wheel 22 and the surface of the chuck 40, improve the efficiency of the position checking of the grinding wheel 22, and is especially suitable for the working condition of replacing a new grinding wheel 22 or a new chuck 40.

[0056] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "exemplary embodiment", "example", "specific example", or "some examples" means that the specific features, structures, materials or characteristics described in connection with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the exemplary description of the above terms does not necessarily mean the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0057] ​​While embodiments of the application have been shown and described, it is to be understood that the embodiments described are merely divergences of the principles and application of the present application and that numerous modifications, changes, substitutions, and alterations can be made thereto without departing from the spirit and scope of the present application, which is defined by the following claims and their equivalents.

Claims

1. A substrate thinning apparatus, characterized by comprising: The utility model relates to a thinning module for a substrate, comprising: a base; a thinning module arranged on the upper portion of the base; a turntable arranged on the upper portion of the base and located on the side of the thinning module; a chuck for placing a substrate is arranged above the turntable; a position checking assembly is further included, which comprises a rotating part, a swing arm, a measuring part and a spring, one end of the swing arm is connected to the rotating part, and the other end of the swing arm is provided with the measuring part; the measuring part is provided with a detection sensor, which can be moved above the chuck through the swing arm; the spring is connected between the swing arm and the connecting rod, and the number of the spring is one pair, which is symmetrically arranged on both sides of the connecting rod; the swing arm is hinged to the measuring part through the connecting rod, so that the measuring part moves adaptively in the vertical direction; the measuring part is further provided with a limit sensor, which is arranged at an interval from the detection sensor; and the installation position of the limit sensor is higher than that of the detection sensor; the grinding wheel of the thinning module moves towards the measuring part, so that the detection sensor of the measuring part abuts against the chuck; the detection sensor triggers a signal for stopping the grinding wheel from moving downward, so as to obtain the distance between the grinding wheel and the chuck.

2. The substrate thinning apparatus of claim 1, wherein The swing arm and the measuring part are flexibly connected.

3. The substrate thinning apparatus of claim 1, wherein The rotating part comprises a rotating shaft and a rotating cylinder, the rotating shaft is arranged above the rotating cylinder, and the swing arm is arranged on the upper end of the rotating shaft.

4. The substrate thinning apparatus of claim 1, wherein The top of the measuring part is provided with a wear-resistant pad made of polytetrafluoroethylene.

5. The substrate thinning apparatus of claim 1, wherein The position checking assembly further comprises a protective cover arranged outside the chuck; the arrangement position of the protective cover matches the position of the swing arm.

6. The substrate thinning apparatus of claim 5, wherein The side portion of the protective cover is provided with a switch door hinged to the protective cover, and the swing arm enters and exits the protective cover through the switch door.

7. The substrate thinning apparatus of claim 6, wherein The top of the swing arm is provided with a limiting piece, when the swing arm and the connected measuring part are located outside the protective cover, at least part of the limiting piece supports the switch door, so that the switch door is in an open state.

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