Vacuumizing device, coating equipment and battery production system

Abstract

This invention relates to the field of battery manufacturing technology, providing a vacuuming device, coating equipment, and battery manufacturing system. The vacuuming device includes a vacuum pump, a main vacuuming pipeline, and an auxiliary vacuuming pipeline. The first end of the main vacuuming pipeline is connected to the vacuum pump, and the second end can be connected to the working chamber of a vapor deposition equipment. A first control valve is provided on the main vacuuming pipeline to control its on / off state. Both ends of the auxiliary vacuuming pipeline are connected to the main vacuuming pipeline, and the two ends of the auxiliary vacuuming pipeline are located on either side of the first control valve. The auxiliary vacuuming pipeline includes a second control valve and at least two parallel branch pipelines. The inner diameters of any two branch pipelines are different, and the inner diameter of each branch pipeline is smaller than the inner diameter of the main vacuuming pipeline. The second control valve is configured to selectively control at least one branch pipeline to connect to the main vacuuming pipeline. This configuration solves the problem in the prior art that the vacuuming speed cannot be adjusted during the slow vacuuming phase.

Description

Technical Field

[0001] This invention relates to the field of battery manufacturing technology, and in particular to a vacuuming device, coating equipment, and battery manufacturing system. Background Technology

[0002] A solar cell is a semiconductor device that directly generates electricity using sunlight. In the production process of solar cells, thin films are typically deposited on silicon wafers using vapor deposition equipment such as tubular PECVD or tubular HWCVD. During the operation of the vapor deposition equipment, the working chamber is under vacuum. Therefore, before vapor deposition begins, the working chamber needs to be evacuated. When evacuating the working chamber, the evacuation speed must be controlled to avoid stress concentration and potential cracking inside the working chamber due to rapid changes in vacuum level.

[0003] To ensure the service life of the working chamber of the vapor deposition equipment, reduce the time required to complete the vacuuming process, and improve production efficiency, the existing technology generally equips the vapor deposition equipment with both a main vacuum system and an auxiliary vacuum system. During vacuuming, the auxiliary vacuum system is first used to slowly evacuate until a certain vacuum level is reached in the working chamber, and then the main vacuum system is used to quickly evacuate until the vacuum level required by the process is reached.

[0004] However, the existing auxiliary vacuum system includes components such as vacuum tanks, vacuum pipes, pumps, and valves, which are complex in structure. The pump is used to evacuate the vacuum tank until the vacuum level inside the vacuum tank reaches a certain value, and then the vacuum tank is used to evacuate the working chamber. The operation is complicated, and the evacuation speed of the auxiliary vacuum system cannot be adjusted. When evacuating working chambers of different volumes, the time of the slow evacuation stage cannot be controlled within the process requirements.

[0005] Therefore, how to solve the problem of the inability to adjust the vacuuming speed during the slow pumping stage in the existing technology has become an important technical problem to be solved by those skilled in the art. Summary of the Invention

[0006] This invention provides a vacuuming device, a coating equipment, and a battery production system to solve the defect in the prior art that the vacuuming speed cannot be adjusted during the slow vacuuming stage.

[0007] This invention provides a vacuum pumping device, comprising:

[0008] Vacuum pump;

[0009] The main extraction pipeline has a first end connected to the vacuum pump and a second end connected to the working chamber of the vapor deposition equipment. The main extraction pipeline is equipped with a first control valve for controlling the on / off state of the main extraction pipeline.

[0010] An auxiliary extraction pipeline is connected to the main extraction pipeline at both ends, and the two ends of the auxiliary extraction pipeline are located on both sides of the first control valve. The auxiliary extraction pipeline includes a second control valve and at least two branch pipelines arranged in parallel. The inner diameters of any two branch pipelines are different, and the inner diameter of each branch pipeline is smaller than the inner diameter of the main extraction pipeline. The second control valve is configured to selectively control at least one branch pipeline to be connected to the main extraction pipeline.

[0011] According to a vacuuming device provided by the present invention, the sum of the flow cross-sectional areas of each of the branch pipes is less than the flow cross-sectional area of ​​the main vacuuming pipe.

[0012] And / or, of all the branch pipes, the branch pipe with the largest inner diameter has an inner diameter less than or equal to 50 mm.

[0013] According to the present invention, a vacuuming device further includes a first connector and a second connector, wherein the first connector is disposed on the inlet side of the first control valve and the second connector is disposed on the outlet side of the first control valve.

[0014] Of all the branch pipes, the branch pipe with the smallest inner diameter is the first branch pipe, and the rest are the second branch pipes;

[0015] Both the first connector and the second connector have a first interface, a second interface, and a third interface. The first interface is connected to the main extraction pipeline. The two ends of the first branch pipeline are respectively connected to the second interface of the first connector and the second interface of the second connector. The third interface corresponds one-to-one with the second branch pipeline. The two ends of the second branch pipeline are respectively connected to the third interface of the first connector and the third interface of the second connector.

[0016] According to a vacuuming device provided by the present invention, among the branch pipes, the branch pipe with the smallest inner diameter is the first branch pipe, and the remaining branch pipes are the second branch pipes.

[0017] Both the first connector and the second connector include a connector body, the connector body comprising:

[0018] The main conduit has the first interface formed at its first end and the second interface formed at its second end.

[0019] A branch pipe, corresponding one-to-one with the second branch pipe, the first end of the branch pipe is connected to the main pipe, and the second end of the branch pipe forms the third interface.

[0020] According to a vacuum pumping device provided by the present invention, the main pipe is a pipe of equal diameter, and the inner diameter of the main pipe is equal to the inner diameter of the first branch pipe;

[0021] The branch pipe is a reducing pipe, which includes a first equal diameter section, a reducing diameter section, and a second equal diameter section. The first equal diameter section is connected to the main pipe, and the second equal diameter section is connected to the second branch pipe. The inner diameter of the first equal diameter section is smaller than the inner diameter of the second equal diameter section. The reducing diameter section is located between the first equal diameter section and the second equal diameter section, and both ends of the reducing diameter section are smoothly connected to the first equal diameter section and the second equal diameter section, respectively.

[0022] According to a vacuuming device provided by the present invention, the second control valve includes:

[0023] A first valve is disposed between the first interface of the first connector and the main extraction pipeline. The first valve is configured to control the on / off state between the first interface and the main extraction pipeline.

[0024] The second valve corresponds one-to-one with the branch pipe of the first connector. The second valve is located between the branch pipe of the first connector and the second branch pipe. The second valve is configured to control the on / off state between the branch pipe of the first connector and the second branch pipe.

[0025] According to a vacuuming device provided by the present invention, the second end of the main vacuuming pipeline is provided with a flexible pipe capable of bending and deformation.

[0026] A vacuum pumping device according to the present invention further includes:

[0027] A filter device is installed in the main extraction pipeline, and the filter device is configured to filter the gas.

[0028] The present invention also provides a coating apparatus, including a vapor deposition apparatus and a vacuum pumping device for evacuating the working chamber of the vapor deposition apparatus, wherein the vacuum pumping device is the aforementioned vacuum pumping device.

[0029] The present invention also provides a battery production system, including the above-described coating equipment.

[0030] The vacuum pumping device provided by this invention includes a vacuum pump, a main pumping pipeline, and an auxiliary pumping pipeline. The first end of the main pumping pipeline is connected to the vacuum pump, and the second end is connected to the working chamber of a vapor deposition apparatus. A first control valve is installed on the main pumping pipeline, which controls the on / off state of the main pumping pipeline. When the main pumping pipeline is in the connected state controlled by the first control valve, the vacuum pump can evacuate the working chamber of the vapor deposition apparatus through the main pumping pipeline. Both ends of the auxiliary pumping pipeline are connected to the main pumping pipeline, and the two ends of the auxiliary pumping pipeline are located on either side of the first control valve. The auxiliary pumping pipeline includes a second control valve and branch pipelines. At least two branch pipelines are provided, and each branch pipeline is connected in parallel. The second control valve is used to selectively control at least one branch pipeline to be connected to the main pumping pipeline. When the main pumping pipeline is controlled to be in the off state by the first control valve, and at least one branch pipeline is controlled to be connected to the main pumping pipeline by the second control valve, the vacuum pump can evacuate the working chamber of the vapor deposition apparatus through the auxiliary pumping pipeline. The inner diameter of each of the aforementioned branch pipes is smaller than that of the main extraction pipe. The vacuuming speed using the auxiliary extraction pipes is lower than that using the main extraction pipes. The main extraction pipes are suitable for the fast extraction stage, while the auxiliary extraction pipes are suitable for the slow extraction stage. Any two branch pipes have different inner diameters, resulting in different vacuuming speeds when using different branch pipes. When using the vacuuming device provided by this invention to evacuate working chambers of different volumes, the vacuuming speed can be adjusted by switching the branch pipe connected to the main extraction pipe using the second control valve, based on the volume of the working chamber and the required processing time for the slow extraction stage. This solves the problem in the prior art where the vacuuming speed during the slow extraction stage cannot be adjusted.

[0031] Furthermore, the coating equipment provided by the present invention also possesses the various advantages described above due to the vacuuming device described above.

[0032] Furthermore, the battery production system provided by this invention also possesses the various advantages described above due to the coating equipment described above. Attached Figure Description

[0033] To more clearly illustrate the technical solutions in this invention or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0034] Figure 1 This is a schematic diagram of the vacuum pumping device provided by the present invention. Figure 1 ;

[0035] Figure 2 yes Figure 1 Enlarged view of I in the middle;

[0036] Figure 3 This is a schematic diagram of the vacuum pumping device provided by the present invention. Figure 2 ;

[0037] Figure 4 yes Figure 3 Enlarged view of X in the middle;

[0038] Figure 5 This is a schematic diagram of the structure of the first connector provided by the present invention.

[0039] Figure label:

[0040] 1. Vacuum pump; 2. Main extraction pipeline; 3. First connector; 4. Second connector; 5. First interface; 6. Second interface; 7. First branch pipeline; 8. Second branch pipeline; 9. Main through pipe; 10. Branch pipe; 11. First valve; 12. Second valve; 13. Flexible pipeline; 14. Filter device; 15. Butterfly valve; 16. Vacuum baffle valve; 17. Third interface. Detailed Implementation

[0041] To make the objectives, technical solutions, and advantages of this invention clearer, the technical solutions of this invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this invention. All other embodiments obtained by those skilled in the art based on the embodiments of this invention without creative effort are within the scope of protection of this invention.

[0042] The following is combined Figures 1 to 5 The vacuum pumping device of the present invention is described.

[0043] like Figures 1 to 5 As shown, the vacuum pumping device provided in this embodiment of the invention includes a vacuum pump 1, a main pumping pipeline 2, and an auxiliary pumping pipeline.

[0044] Specifically, the first end of the main extraction pipeline 2 is connected to the vacuum pump 1, and the second end is connected to the working chamber of the vapor deposition equipment. A first control valve is installed on the main extraction pipeline 2, which controls the on / off state of the main extraction pipeline 2. When the main extraction pipeline 2 is in the connected state controlled by the first control valve, the vacuum pump 1 can use the main extraction pipeline 2 to evacuate the working chamber of the vapor deposition equipment.

[0045] Specifically, the first control valve includes a butterfly valve 15 and a vacuum baffle valve 16. The vacuum baffle valve 16 can control the on / off state of the main pumping pipeline 2, and the butterfly valve 15 can adjust the vacuuming speed during the rapid pumping phase.

[0046] Both ends of the auxiliary extraction pipeline are connected to the main extraction pipeline 2, and the two ends of the auxiliary extraction pipeline are located on both sides of the first control valve.

[0047] The auxiliary extraction pipeline includes a second control valve and branch pipelines. There are at least two branch pipelines, and each branch pipeline is connected in parallel. The second control valve is used to selectively control at least one branch pipeline to connect to the main extraction pipeline 2. The branch pipelines may be, but are not limited to, vacuum hoses.

[0048] The main extraction pipeline 2 is controlled to be in the cut-off state by the first control valve, and at least one branch pipeline is connected to the main extraction pipeline 2 by the second control valve. The vacuum pump 1 can be used to evacuate the working chamber of the vapor deposition equipment through the auxiliary extraction pipeline.

[0049] The inner diameter of each of the above branch pipes is smaller than the inner diameter of the main extraction pipe 2. The speed of vacuuming using the auxiliary extraction pipe is lower than the speed of vacuuming using the main extraction pipe 2. The main extraction pipe 2 is suitable for the fast extraction stage, and the auxiliary extraction pipe is suitable for the slow extraction stage.

[0050] Among the above-mentioned branch pipes, any two branch pipes have different inner diameters, different branch pipes have different conductivities, and different branch pipes have different vacuuming speeds when vacuuming.

[0051] With this configuration, when using the vacuuming device provided in this embodiment of the invention to evacuate working chambers of different volumes, the vacuuming speed can be adjusted by switching the branch pipe connected to the main evacuation pipe 2 through the second control valve according to the volume of the working chamber and the process time requirements of the slow evacuation stage. This solves the problem in the prior art that the vacuuming speed of the slow evacuation stage cannot be adjusted.

[0052] In this embodiment of the invention, the sum of the flow cross-sectional areas of each branch pipe is less than the flow cross-sectional area of ​​the main extraction pipe 2, that is, the sum of the flow channel values ​​of each branch pipe is less than the flow conductance value of the main extraction pipe 2.

[0053] The flow cross-sectional area of ​​a branch pipe is the area of ​​its inner circle, which can be calculated using the inner diameter of the branch pipe.

[0054] When using auxiliary pumping lines for vacuuming, vacuuming can be performed using only one branch line, or simultaneously using two, three, or even all branch lines. The vacuuming speed when using all branch lines is lower than the vacuuming speed when using the main pumping line 2. This configuration increases the variety of vacuuming speeds during the slow evacuation phase compared to the number of branch lines, expanding the adjustable range of vacuuming speed when using auxiliary pumping lines and enhancing the applicability of the vacuuming device provided in this embodiment.

[0055] In this embodiment, the inner diameter of the main extraction pipeline 2 is set to be 80 mm or more. The inner diameter of the branch pipeline with the largest inner diameter is less than or equal to 50 mm. This effectively avoids stress concentration and damage caused by a rapid decrease in the vacuum level of the working chamber during the slow extraction phase.

[0056] In a specific embodiment, the auxiliary extraction pipeline includes three branch pipelines with inner diameters of 25 mm, 40 mm, and 50 mm, respectively.

[0057] In this embodiment, the vacuuming device also includes a first connector 3 and a second connector 4.

[0058] During vacuuming, the gas in the working chamber flows from the second end to the first end of the main evacuation pipeline 2. Therefore, the side of the first control valve furthest from the vacuum pump 1 is the inlet side of the first control valve, and the side of the first control valve closest to the vacuum pump 1 is the outlet side of the first control valve. The first connector 3 is located on the inlet side of the first control valve, and the second connector 4 is located on the outlet side of the first control valve. The two ends of the auxiliary evacuation pipeline are connected to the main evacuation pipeline 2 through the first connector 3 and the second connector 4.

[0059] In this embodiment of the invention, among the branch pipes of the auxiliary extraction pipeline, the branch pipe with the smallest inner diameter is the first branch pipe 7, and the remaining branch pipes are the second branch pipes 8. It should be noted that the inner diameters of each of the second branch pipes 8 are also different.

[0060] Both the first connector 3 and the second connector 4 have a first interface 5, a second interface 6, and a third interface 17.

[0061] The first interface 5 is connected to the main extraction pipeline 2.

[0062] The two ends of the first branch pipe 7 are respectively connected to the second interface 6 of the first connector 3 and the third interface 17 of the second connector 4.

[0063] The number of third interfaces 17 of the first connector 3 is the same as the number of second branch pipes 8. The diameters of the third interfaces 17 of the first connector 3 are different and correspond one-to-one with the diameters of the second branch pipes 8.

[0064] Correspondingly, the number of third interfaces 17 of the second connector 4 is the same as the number of second branch pipes 8, and the diameter of each third interface 17 of the second connector 4 is different, and they correspond one-to-one with the diameter of the second branch pipes 8.

[0065] Each of the third interfaces 17 of the first connector 3 is connected to one end of each of the second branch pipes 8, and each of the third interfaces 17 of the second connector 4 is connected to the other end of each of the second branch pipes 8. The third interfaces 17 of the first connector 3 and the third interfaces 17 of the second connector 4 connected to both ends of the same second branch pipe 8 have the same diameter.

[0066] The first connector 3 and the second connector 4 have the same structure, both including a connector body.

[0067] The connector body includes a main pipe 9 and a branch pipe 10. The first end of the main pipe 9 is provided with a first interface 5 for connecting to the main extraction pipe 2. The second end of the main pipe 9 is provided with a second interface 6 for connecting to the first branch pipe 7.

[0068] The number of branch pipes 10 is equal to the number of second branch pipes 8, and there is a one-to-one correspondence between branch pipes 10 and second branch pipes 8. The first end of branch pipe 10 is connected to the main pipe 9, and the second end of branch pipe 10 is provided with a third interface 17 for connecting to the second branch pipe 8.

[0069] Reference Figure 2 The auxiliary extraction pipeline includes three branch pipelines, and the connector body includes a main pipe 9 and two branch pipes 10.

[0070] Each branch pipe 10 and the main pipe 9 form an integral structure. Specifically, the main pipe 9 and each branch pipe 10 can be machined separately, and then the branch pipe 10 can be fixedly connected to the main pipe 9 by welding. Alternatively, the branch pipe 10 and the main pipe 9 can be integrally machined by casting.

[0071] Connecting flanges are installed at both ends of the main pipe 9. Correspondingly, connecting flanges are installed at the corresponding positions of the main extraction pipe 2 and at the end of the first branch pipe 7. The main pipe 9 and the main extraction pipe 2 can be connected together using bolts, and the main pipe 9 and the first branch pipe 7 can be connected together using bolts.

[0072] A connecting flange is installed at the end of the branch pipe 10 away from the main pipe 9. Correspondingly, a connecting flange is installed at the end of the second branch pipe 8. The branch pipe 10 and the second branch pipe 8 can be connected together using bolts.

[0073] Specifically, connecting flanges can be installed at both ends of the main pipe 9, the end of the branch pipe 10 away from the main pipe 9, the corresponding position of the main extraction pipe 2, and the end of the first branch pipe 7 by welding.

[0074] In this embodiment, the main pipe 9 is a pipe of equal diameter, and its inner diameter is equal to that of the first branch pipe 7. The end face of the main pipe 9 is perpendicular to its axis, so that the end face of the main pipe 9 contacts the connecting flange face, increasing the contact area between the main pipe 9 and the connecting flange, improving the reliability of the welded structure between the main pipe 9 and the connecting flange, and reducing gas leakage during vacuuming, making the gas flow more uniform.

[0075] In a further embodiment, the branch pipe 10 is a reducing pipe, and the inner diameter of the branch pipe 10 gradually increases in the direction away from the main pipe 9. That is, the inner diameter of the end of the branch pipe 10 away from the main pipe 9 is greater than the inner diameter of the end of the branch pipe 10 close to the main pipe 9.

[0076] Branch pipe 10 includes a first equal-diameter section, a variable-diameter section, and a second equal-diameter section. The first equal-diameter section is connected to the main pipe 9, and the inner diameter of the second equal-diameter section is equal to the inner diameter of the corresponding second branch pipe 8. The inner diameter of the first equal-diameter section is smaller than the inner diameter of the second equal-diameter section. The variable-diameter section is located between the first and second equal-diameter sections, and its two ends are smoothly connected to the first and second equal-diameter sections, respectively. Specifically, the two ends of the generatrix of the variable-diameter section can be set to arc shape.

[0077] With this configuration, the end face of the second equal diameter section is perpendicular to the axis of the second equal diameter section, so that the end face of the second equal diameter section contacts the connecting flange face, which increases the contact area between the second equal diameter section and the connecting flange, improves the reliability of the welded structure between the second equal diameter section and the connecting flange, and can reduce gas leakage during vacuuming, making the gas flow more uniform. At the same time, it is beneficial to increase the conductivity of the auxiliary pumping pipeline.

[0078] In this embodiment of the invention, the second control valve includes a first valve 11 and a second valve 12.

[0079] The first valve 11 is located between the first interface 5 of the first connector 3 and the main extraction pipeline 2, and is used to control the on / off state between the first interface 5 and the main extraction pipeline 2.

[0080] Specifically, the first valve 11 may be, but is not limited to, a vacuum angle valve, which has two ports with perpendicular opening directions. These two ports are respectively connected to the first port 5 of the main pumping pipeline 2 and the first connector 3.

[0081] The number of second valves 12 is equal to the number of branch pipes 10 of the first connector 3, and the second valves 12 correspond one-to-one with the branch pipes 10 of the first connector 3. The second valves 12 are set between the branch pipes 10 of the first connector 3 and the second branch pipe 8 to control the on / off state between the branch pipes 10 of the first connector 3 and the second branch pipe 8.

[0082] The second valve 12 may be, but is not limited to, a vacuum shut-off valve. The two ports of the vacuum shut-off valve are respectively connected to the branch pipe 10 of the first connector 3 and the second branch pipe 8.

[0083] The second valve 12 can be a manually controlled vacuum shut-off valve. During the slow pumping phase, the action of each second valve 12 can be manually controlled to switch the branch pipe connected to the main pumping pipe 2.

[0084] In this embodiment, a flexible pipe 13 is provided at the second end of the main extraction pipe 2. The flexible pipe 13 is capable of bending and deformation. The main extraction pipe 2 is generally rigid and non-deformable. The bending and deformation capability of the flexible pipe 13 can reduce the accuracy requirements of the length dimension of the main extraction pipe 2, and facilitate the assembly and connection between the main extraction pipe 2 and the working chamber of the vapor deposition equipment.

[0085] In a specific embodiment, the flexible pipe 13 may be, but is not limited to, a corrugated pipe.

[0086] The vacuum pumping device in this embodiment also includes a filter device 14, which is installed in the main pumping pipeline 2 and connected in series with the auxiliary pumping pipeline. During vacuuming, the gas in the working chamber is filtered as it passes through the filter device 14, preventing impurities from entering the vacuum pump 1 with the gas and reducing the possibility of damage to the vacuum pump 1.

[0087] In a specific embodiment, the filter device 14 is positioned adjacent to the vacuum pump 1, and a bellows is also installed between the filter device 14 and the main pumping line 2. The bellows reduces the precision requirements for the relative position of the main pumping line 2 and the filter device 14, facilitating assembly.

[0088] The following is combined Figures 1 to 5 The following describes the vacuuming device in the embodiments of the present invention. The vacuuming device includes a vacuum pump 1, a filter device 14, a main vacuuming pipeline 2, a butterfly valve 15, a vacuum baffle valve 16, three vacuum hoses, a first connector 3, a second connector 4, a vacuum angle valve, and two manually controlled vacuum valves.

[0089] One end of the main extraction pipeline 2 is connected to the vacuum pump 1, and the other end is connected to the working chamber of the vapor deposition equipment. A filter device 14 is installed on the main extraction pipeline 2, adjacent to the vacuum pump 1. The main extraction pipeline 2 is connected to the filter device 14 via a bellows. A butterfly valve 15 and a vacuum baffle valve 16 are installed on the main extraction pipeline 2 and are arranged in series.

[0090] The first connector 3 has a first interface 5, a second interface 6, and two third interfaces 17. The diameter of the second interface 6 is smaller than the diameter of the third interface 17, and the two third interfaces 17 have different diameters. The first interface 5 of the first connector 3 is connected to the main extraction pipeline 2 and is located on the side of the vacuum baffle valve 16 away from the butterfly valve 15. A vacuum angle valve is located between the first interface 5 of the first connector 3 and the main extraction pipeline 2.

[0091] The second connector 4 has a first interface 5, a second interface 6 and two third interfaces 17. The diameter of the second interface 6 is smaller than the diameter of the third interface 17, and the two third interfaces 17 have different diameters. The first interface 5 of the second connector 4 is connected to the main pumping pipeline 2 and is located on the side of the butterfly valve 15 away from the vacuum baffle valve 16.

[0092] The three vacuum hoses have different inner diameters: the first vacuum hose, the second vacuum hose, and the third vacuum hose. The first vacuum hose has an inner diameter of 25 mm, the second vacuum hose has an inner diameter of 40 mm, and the third vacuum hose has an inner diameter of 50 mm. The main extraction line 2 has an inner diameter of 80 mm.

[0093] The second interface 6 of the first connector 3 and the second interface 6 of the second connector 4 are respectively connected to both ends of the first vacuum hose. The third interface 17 of the first connector 3 (with a relatively smaller diameter) and the third interface 17 of the second connector 4 (with a relatively smaller diameter) are respectively connected to both ends of the second vacuum hose. The third interface 17 of the first connector 3 (with a relatively larger diameter) and the third interface 17 of the second connector 4 (with a relatively larger diameter) are respectively connected to both ends of the third vacuum hose. Two manually controlled vacuum valves are respectively located between the second vacuum hose and one of the third interfaces 17 of the first connector 3, and between the third vacuum hose and the other third interface 17 of the first connector 3.

[0094] Close butterfly valve 15 and vacuum baffle valve 16, open vacuum angle valve to run vacuum pump 1, and vacuum treatment can be performed using the first vacuum hose. At this time, the total flow conductance of the auxiliary pumping pipeline is C0.

[0095] Open the manually controlled vacuum valve corresponding to the second vacuum hose and keep the manually controlled vacuum valve corresponding to the third vacuum hose closed. The first and second vacuum hoses can be used simultaneously for vacuuming. At this time, the total flow conductance of the auxiliary evacuation pipeline is C1.

[0096] Open the manually controlled vacuum valve corresponding to the third vacuum hose and close the manually controlled vacuum valve corresponding to the second vacuum hose. The first and third vacuum hoses can be used simultaneously for vacuuming. At this time, the total flow conductance of the auxiliary evacuation pipeline is C2.

[0097] Simultaneously opening the manually controlled vacuum valves corresponding to the second and third vacuum hoses allows for simultaneous vacuuming using the first, second, and third vacuum hoses. At this time, the total flow conductance of the auxiliary evacuation pipeline is C3.

[0098] Since the inner diameter of the first vacuum hose is smaller than that of the second vacuum hose, and the inner diameter of the second vacuum hose is smaller than that of the third vacuum hose, the relative order of the total conductivities is C0 < C1 < C2 < C3. Therefore, the auxiliary pumping line can have four different conductivities, resulting in four different pumping speeds for the vacuuming device. Different inner diameters and quantities of vacuum hoses can be selected according to the actual pumping time requirements, achieving an adjustable pumping time that is convenient and reliable to operate.

[0099] The vacuum pumping device in this embodiment has a simple structure. While ensuring that the working chamber of the vapor deposition equipment will not be damaged due to stress concentration caused by sudden changes in vacuum level, it allows for adjustment of the vacuum pumping speed, making the vacuum pumping time adjustable. Furthermore, the vacuum pumping device in this embodiment can meet the requirements of both the fast and slow pumping stages, without requiring an external vacuum system. Its simple structure and low manufacturing cost make it suitable for various applications.

[0100] On the other hand, embodiments of the present invention also provide a coating apparatus, including a vapor deposition apparatus and a vacuum device provided in any of the above embodiments. The vacuum device is used to perform vacuuming treatment on the working chamber of the vapor deposition apparatus. The vacuum device in the above embodiments can achieve both fast and slow vacuuming, and the vacuuming speed during the slow vacuuming phase can also be adjusted. Therefore, the coating apparatus in this embodiment has the advantage of adjustable vacuuming time during the slow vacuuming phase. The derivation process of the beneficial effects of the coating apparatus in the embodiments of the present invention is largely similar to the derivation process of the beneficial effects of the vacuum device described above, and therefore will not be repeated here.

[0101] Furthermore, embodiments of the present invention also provide a battery production system, including the coating equipment provided in any of the above embodiments. It possesses all the advantages of the aforementioned coating equipment, which will not be repeated here. The derivation process of the beneficial effects of the battery production system in these embodiments is largely similar to the derivation process of the beneficial effects of the aforementioned coating equipment, and therefore will not be repeated here.

[0102] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention, and not to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features; and these modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of the present invention.

Claims

1. A vacuum pumping device, characterized in that, include: Vacuum pump; The main extraction pipeline has a first end connected to the vacuum pump and a second end connected to the working chamber of the vapor deposition equipment. The main extraction pipeline is equipped with a first control valve for controlling the on / off state of the main extraction pipeline. An auxiliary extraction pipeline is connected to the main extraction pipeline at both ends, and the two ends of the auxiliary extraction pipeline are located on both sides of the first control valve. The auxiliary extraction pipeline includes a second control valve and at least two branch pipelines arranged in parallel. The inner diameters of any two branch pipelines are different, and the inner diameter of each branch pipeline is smaller than the inner diameter of the main extraction pipeline. The second control valve is configured to selectively control at least one branch pipeline to be connected to the main extraction pipeline. The vacuuming device further includes a first connector and a second connector, wherein the first connector is disposed on the inlet side of the first control valve and the second connector is disposed on the outlet side of the first control valve. Of all the branch pipes, the branch pipe with the smallest inner diameter is the first branch pipe, and the rest are the second branch pipes; Both the first connector and the second connector have a first interface, a second interface, and a third interface. The first interface is connected to the main extraction pipeline. The two ends of the first branch pipeline are respectively connected to the second interface of the first connector and the second interface of the second connector. The third interface corresponds one-to-one with the second branch pipeline. The two ends of the second branch pipeline are respectively connected to the third interface of the first connector and the third interface of the second connector. Both the first connector and the second connector include a connector body, the connector body comprising: The main pipe has the first interface formed at its first end and the second interface formed at its second end. A branch pipe, corresponding one-to-one with the second branch pipe, the first end of the branch pipe is connected to the main pipe, and the second end of the branch pipe forms the third interface; The main pipe is a pipe of equal diameter, and the inner diameter of the main pipe is equal to the inner diameter of the first branch pipe. The branch pipe is a variable diameter pipe, which includes a first equal diameter section, a variable diameter section and a second equal diameter section. The first equal diameter section is connected to the main pipe, and the second equal diameter section is connected to the second branch pipe. The inner diameter of the first equal diameter section is smaller than the inner diameter of the second equal diameter section. The variable diameter section is located between the first equal diameter section and the second equal diameter section, and both ends of the variable diameter section are smoothly connected to the first equal diameter section and the second equal diameter section, respectively. The second end of the main extraction pipeline is equipped with a flexible pipe that can bend and deform.

2. The vacuum pumping device according to claim 1, characterized in that, The sum of the flow cross-sectional areas of all the branch pipes is less than the flow cross-sectional area of ​​the main extraction pipe; And / or, of all the branch pipes, the branch pipe with the largest inner diameter has an inner diameter less than or equal to 50 mm.

3. The vacuum pumping device according to claim 1, characterized in that, The second control valve includes: A first valve is disposed between the first interface of the first connector and the main extraction pipeline. The first valve is configured to control the on / off state between the first interface and the main extraction pipeline. The second valve corresponds one-to-one with the branch pipe of the first connector. The second valve is located between the branch pipe of the first connector and the second branch pipe. The second valve is configured to control the on / off state between the branch pipe of the first connector and the second branch pipe.

4. The vacuum pumping device according to claim 1, characterized in that, Also includes: A filter device is installed in the main extraction pipeline, and the filter device is configured to filter the gas.

5. A coating apparatus, characterized in that, The device includes a vapor deposition apparatus and a vacuum pumping device for evacuating the working chamber of the vapor deposition apparatus, wherein the vacuum pumping device is the vacuum pumping device as described in any one of claims 1 to 4.

6. A battery production system, characterized in that, Including the coating equipment as described in claim 5.

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