Annealing furnace for preparing thin films on silicon wafers

Abstract

The present invention discloses an annealing furnace for preparing thin films of silicon wafers, which relates to the technical field of annealing furnaces and includes an equipment box, the bottom end of the equipment box is fixedly connected to a base, the bottom end of the base is fixedly connected to a support leg, the surface of the equipment box is fixedly installed with a control panel, the surface of the equipment box is fixedly installed with an emergency switch, the top of the equipment box is fixedly installed with a processing table, the processing table is fixedly installed with a lower box body, the rear side of the lower box body is hinged with a hinge, the other side of the hinge is hinged to the upper box body, and the upper box body is fixedly connected with a handle. The present invention has a reasonable structure, and realizes the placement of silicon wafers by the loading table on the feeding assembly, and then the threaded rod on the feeding assembly is driven to rotate by the power assembly, and the rotation of the threaded rod moves the loading table to the interior of the annealing furnace body for processing.

Description

Technical Field

[0001] The present invention relates to the technical field of annealing furnaces, and in particular to an annealing furnace for preparing silicon wafer thin films. Background Art

[0002] Annealing furnace is a device specially designed for heating semiconductor wafers. It is an energy-saving periodic operation furnace with super energy-saving structure and fiber structure. The function of annealing furnace is to heat the material to a certain degree and then reduce the temperature by gradually annealing, thereby refining the grains and improving the organization to improve the mechanical properties of the workpiece.

[0003] When processing silicon wafers in existing annealing furnaces, most of them fix the silicon wafers inside the annealing furnace. However, this method has some problems when taking or placing the silicon wafers. Since the temperature inside the annealing furnace is too high, it is easy to burn the workers' hands, which will affect the annealing furnace's processing efficiency for silicon wafers. Therefore, the present application provides an annealing furnace for silicon wafer thin film preparation to meet the needs. Summary of the Invention

[0004] The purpose of this application is to provide an annealing furnace for the preparation of silicon wafer thin films, which realizes the placement of silicon wafers through the loading platform on the feeding assembly, and then the threaded rod on the feeding assembly is driven to rotate by the power assembly, and the rotation of the threaded rod moves the loading platform to the interior of the annealing furnace body for processing.

[0005] To achieve the above-mentioned objectives, the present application provides the following technical solutions: an annealing furnace for preparing thin films of silicon wafers, comprising an equipment box, wherein the bottom end of the equipment box is fixedly connected to a base, the bottom end of the base is fixedly connected to a supporting foot, a control panel is fixedly installed on the surface of the equipment box, an emergency switch is fixedly installed on the surface of the equipment box, a processing table is fixedly installed on the top of the equipment box, a lower box is fixedly installed on the processing table, a hinge is hinged on the rear side of the lower box, the other side of the hinge is hinged on the upper box, and a handle is fixedly connected to the upper box; a heating device is fixedly installed on the top of the upper box, a heating pipe is fixedly installed inside the upper box, the heating device and the heating pipe are connected to each other, an annealing furnace body is provided inside the lower box, and a material inlet is provided on one side of the annealing furnace body; the annealing furnace body also includes a fastening assembly, a feeding assembly and a power assembly, the fastening assembly is used to install between the lower box and the upper box, the feeding assembly is used to feed materials into the interior of the annealing furnace body for processing, and the power assembly is used in conjunction with the feeding assembly.

[0006] Preferably, the fastening assembly includes a buckle fixedly mounted on the upper box body, the bottom end of the buckle is inserted into the interior of the operating box, the operating box is fixedly mounted on the surface of the lower box body, the interior of the operating box is rotatably connected to a rotating shaft, a camshaft is fixedly mounted on the rotating shaft, one end of the rotating shaft extends to the outside of the operating box, and an adjusting disk is fixedly mounted on one end of the rotating shaft.

[0007] Preferably, a pair of sliding rods are fixedly connected to the inside of the operating box, one end of the pair of sliding rods is fixedly connected to a limiting plate, and the sliding sleeves on the pair of sliding rods are provided with the same movable plate, one side of the movable plate is fixedly connected to a block, and the other side of the movable plate is fixedly connected to a pull rod, the other end of the pull rod extends to the outside of the operating box, and the other end of the pull rod is fixedly installed with a control rod.

[0008] Preferably, a spring is sleeved on the pull rod, and two ends of the spring are fixedly connected to one side of the movable plate and the inner wall of the operation box respectively.

[0009] Preferably, a slot is provided on the camshaft, and the other end of the block is inserted into the slot.

[0010] Preferably, the feeding assembly includes a pair of guide rails fixedly mounted on the processing table, a pair of slide blocks slidably connected to the guide rails, a first shaft rod seat is fixedly mounted on the processing table, a threaded rod is rotatably connected to the first shaft rod seat, the other end of the threaded rod is rotatably connected to the inner wall of the processing table, the other end of the threaded rod is fixedly mounted on the first pulley, the threaded rod is sleeved with a sleeve block, the sleeve block is fixedly mounted with a fixing plate, the bottom of the fixing plate is fixedly connected to the top of the slider, a pair of support rods are fixedly connected to the fixing plate, the top of the support rod is inserted with a pin, the slider is fixed by bolts, the bolts are fixedly connected to the arm rod, the arm rod is fixedly connected to a disc, the disc is fixedly connected to a pair of fixing columns, and a pair of fixing columns are fixedly connected to the loading platform.

[0011] Preferably, an internal thread is provided inside the sleeve block, and the sleeve block and the threaded rod form a spiral rotation structure.

[0012] Preferably, a reinforcing rib is fixedly connected between the support rod and the fixing plate, and a cross bar is fixedly connected to the reinforcing rib.

[0013] Preferably, the power assembly includes a servo motor fixedly mounted inside the equipment box, the output end of the servo motor is fixedly connected to an output rod, a second shaft rod seat is sleeved on the output rod, the second shaft rod seat is fixedly mounted inside the equipment box, the other end of the output rod is fixedly connected to a second pulley, a transmission belt is sleeved on the second pulley, and the top end of the transmission belt is sleeved on the first pulley.

[0014] In summary, the technical effects and advantages of the present invention are:

[0015] 1. The present invention has a reasonable structure. When the threaded rod needs to be rotated, the control panel on the surface of the equipment box is operated. The servo motor is controlled by the operation of the control panel, so that the servo motor starts to operate. The servo motor is fixedly installed inside the equipment box. The output end of the servo motor is fixedly connected to an output rod. The output rod is rotated by the rotation of the servo motor. A second pulley is fixedly connected to the other end of the output rod. The second pulley is rotated by the rotation of the output rod. A transmission belt is sleeved on the second pulley. The top end of the transmission belt is sleeved on the first pulley. The rotation of the second pulley drives the first pulley to rotate through the transmission belt, thereby facilitating the operation of a series of components on the feeding assembly.

[0016] 2. In the present invention, when the silicon wafer needs to be annealed, the silicon wafer is placed on the loading platform, and then the threaded rod is rotated by the power unit, the threaded rod is threadedly connected with a sleeve block, and the sleeve block is fixedly mounted on the fixed plate, and a slider is also fixedly connected to the bottom end of the fixed plate, and the slider is slidably connected to the guide rail, and the sleeve block is moved by the rotation of the threaded rod, and the fixed plate is driven to move by the movement of the sleeve block, and the movement of the fixed plate causes the pin on the support rod to move, an arm is fixedly mounted on the pin, and a disc is fixedly mounted on the arm, the disc is fixedly connected with a fixed column, and the loading platform is fixedly mounted on the fixed column, and the loading platform is moved through the inlet to the interior of the annealing furnace body for processing by the movement of the pin;

[0017] When the camshaft is moved, the lever is released, and the camshaft is released from the groove on the buckle by rotating the lever, and the camshaft is released from the groove on the buckle by rotating the lever, and then the handle on the upper box body is pulled, thereby facilitating the opening of the upper box body. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without paying any creative work.

[0019] Figure 1 This is a schematic diagram of the three-dimensional structure of the equipment box;

[0020] Figure 2 This is a schematic diagram of the three-dimensional structure of the equipment box when viewed from above;

[0021] Figure 3 This is a schematic diagram of the three-dimensional structure of the equipment box;

[0022] Figure 4 Schematic diagram of the internal three-dimensional structure of the lower box;

[0023] Figure 5 It is a schematic diagram of the partial cross-section of the three-dimensional structure of the equipment box;

[0024] Figure 6 It is a schematic diagram of the three-dimensional structure of the feeding component;

[0025] Figure 7 Schematic diagram of the internal three-dimensional structure of the operation box.

[0026] In the figure: 1. Equipment box; 101. Base; 102. Support legs; 103. Control panel; 104. Emergency switch; 105. Processing table; 106. Lower box; 107. Hinge; 108. Upper box; 109. Handle; 110. Heating device; 112. Heating tube; 113. Annealing furnace body; 114. Feeding port; 2. Buckle; 201. Operation box; 202. Rotating shaft; 203. Camshaft; 204. Adjusting disk; 205. Sliding rod; 206. Limiting piece; 207. Moving plate; 208. Block; 209 , pull rod; 210, control rod; 212, spring; 3, guide rail; 301, slider; 302, first shaft rod seat; 303, threaded rod; 304, first pulley; 305, sleeve; 306, fixed plate; 307, support rod; 308, reinforcing rib; 309, cross bar; 310, latch; 312, bolt; 313, arm; 314, disc; 315, fixed column; 316, loading platform; 4, servo motor; 401, output rod; 402, second shaft rod seat; 403, second pulley; 404, transmission belt. DETAILED DESCRIPTION

[0027] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0028] Example: Reference Figure 1-3 The annealing furnace for preparing thin films of silicon wafers shown in the figure comprises an equipment box 1, the bottom end of the equipment box 1 is fixedly connected to a base 101, the bottom end of the base 101 is fixedly connected to a support leg 102, a control panel 103 is fixedly installed on the surface of the equipment box 1, an emergency switch 104 is fixedly installed on the surface of the equipment box 1, a processing table 105 is fixedly installed on the top of the equipment box 1, a lower box body 106 is fixedly installed on the processing table 105, a hinge 107 is hinged on the rear side of the lower box body 106, the other side of the hinge 107 is hinged on the upper box body 108, and a handle 106 is fixedly connected to the upper box body 108. 09; A heating device 110 is fixedly installed on the top of the upper box body 108, and a heating tube 112 is fixedly installed inside the upper box body 108. The heating device 110 and the heating tube 112 are connected to each other. An annealing furnace body 113 is provided inside the lower box body 106, and a material inlet 114 is provided on one side of the annealing furnace body 113; it also includes a fastening assembly, a feeding assembly and a power assembly. The fastening assembly is used for installation between the lower box body 106 and the upper box body 108, the feeding assembly is used to feed materials into the interior of the annealing furnace body 113 for processing, and the power assembly is used in conjunction with the feeding assembly.

[0029] Specifically, it should be noted that the heating device 110 and the servo motor 4 are electrically connected to the control panel 103 through wires, and the specific working principles therebetween are referenced by the existing technology and will not be elaborated on here. By operating the control panel 103, the heating device 110 is operated to enable the heating tube 112 to heat the entire annealing furnace body 113, and then the servo motor 4 is operated to enable the feeding assembly to feed the material into the annealing furnace body 113 for heating.

[0030] As an implementation method in this embodiment, according to the attached Figure 4As shown, the fastening assembly includes a buckle 2 fixedly mounted on the upper box 108, the bottom end of the buckle 2 is inserted into the interior of the operation box 201, the operation box 201 is fixedly mounted on the surface of the lower box 106, the interior of the operation box 201 is rotatably connected to a rotating shaft 202, a cam shaft 203 is fixedly mounted on the rotating shaft 202, one end of the rotating shaft 202 extends to the outside of the operation box 201, an adjusting disk 204 is fixedly mounted on one end of the rotating shaft 202, a pair of slide rods 205 are fixedly connected to the interior of the operation box 201, and one end of the pair of slide rods 205 is fixedly connected to a limiting plate 206 A pair of slide rods 205 are slidably sleeved with the same movable plate 207, one side of the movable plate 207 is fixedly connected with a block 208, and the other side of the movable plate 207 is fixedly connected with a pull rod 209, the other end of the pull rod 209 extends to the outside of the operation box 201, and the other end of the pull rod 209 is fixedly installed with a control rod 210, and a spring 212 is sleeved on the pull rod 209, and the two ends of the spring 212 are respectively fixedly connected to one side of the movable plate 207 and the inner wall of the operation box 201, and a slot is provided on the camshaft 203, and the other end of the block 208 is inserted into the slot.

[0031] Specifically, when it is necessary to open the upper box 108, the control rod 210 on the pull rod 209 is first pulled, and the pull rod 209 is pulled by the operation box 201 to drive the movable plate 207 to move. The movable plate 207 is slidably connected to the slide rod 205, and a limit plate 206 is fixedly connected to one end of the slide rod 205 to prevent the movable plate 207 from being separated from the slide rod 205 as a whole. A card block 208 is fixedly connected to the other side of the movable plate 207, and the card block 208 is clamped on the cam shaft 203 by the elastic force of the spring 212. In the slot, the moving plate 207 is moved to make the block 208 disengage from the slot on the camshaft 203, and then the adjusting disk 204 on the operating box 201 is rotated, and the rotation of the adjusting disk 204 drives the rotating shaft 202 to rotate. The camshaft 203 is fixedly mounted on the rotating shaft 202, and the camshaft 203 is stuck in the groove on the buckle 2. The camshaft 203 is disengaged from the groove on the buckle 2 by the rotation of the rotating shaft 202, and then the handle 109 on the upper box body 108 is pulled, thereby facilitating the opening of the upper box body 108.

[0032] As an implementation method in this embodiment, according to the attached Figure 5 and 6As shown, the feeding assembly includes a pair of guide rails 3 fixedly mounted on the processing table 105, a slider 301 is slidably connected to the pair of guide rails 3, a first shaft rod seat 302 is fixedly mounted on the processing table 105, a threaded rod 303 is rotatably connected to the first shaft rod seat 302, the other end of the threaded rod 303 is rotatably connected to the inner wall of the processing table 105, the other end of the threaded rod 303 is fixedly mounted with a first pulley 304, a sleeve block 305 is sleeved on the threaded rod 303, and a fixed plate 306 is fixedly mounted on the sleeve block 305, the bottom end of the fixed plate 306 is fixedly connected to the top of the slider 301, and the fixed plate 306 is fixedly connected to the A pair of support rods 307 are connected, and a pin 310 is inserted at the top of the support rod 307. The slider 301 is fixed by a bolt 312, and the bolt 312 is fixedly connected to the arm rod 313. The arm rod 313 is fixedly connected to a disk 314, and the disk 314 is fixedly connected to a pair of fixing columns 315. The pair of fixing columns 315 are fixedly connected to the stage 316. The interior of the sleeve block 305 is provided with an internal thread. The sleeve block 305 and the threaded rod 303 form a spiral rotating structure. A reinforcing rib 308 is fixedly connected between the support rod 307 and the fixed plate 306, and a cross bar 309 is fixedly connected to the reinforcing rib 308.

[0033] Specifically, when the silicon wafer needs to be annealed, the silicon wafer is placed on the stage 316, and then the threaded rod 303 is rotated by the power unit. The threaded rod 303 is threadedly connected with a sleeve 305, and the sleeve 305 is fixedly installed on the fixed plate 306. The bottom end of the fixed plate 306 is also fixedly connected with a slider 301, and the slider 301 is slidably connected to the guide rail 3. The sleeve 305 is moved by the rotation of the threaded rod 303, and the sleeve 305 is fixedly installed on the fixed plate 306. The movement of the fixed plate 306 drives the movement of the fixed plate 306, and the movement of the fixed plate 306 causes the pin 310 on the support rod 307 to move. An arm 313 is fixedly mounted on the pin 310, and a disc 314 is fixedly mounted on the arm 313. A fixed column 315 is fixedly connected to the disc 314, and a loading platform 316 is fixedly mounted on the fixed column 315. The movement of the pin 310 causes the loading platform 316 to move through the feed port 114 to the interior of the annealing furnace body 113 for processing.

[0034] As an implementation method in this embodiment, according to the attached Figure 7 As shown, the power assembly includes a servo motor 4 fixedly installed inside the equipment box 1, the output end of the servo motor 4 is fixedly connected to the output rod 401, the output rod 401 is provided with a second shaft rod seat 402, the second shaft rod seat 402 is fixedly installed inside the equipment box 1, the other end of the output rod 401 is fixedly connected to the second pulley 403, the second pulley 403 is provided with a transmission belt 404, and the top end of the transmission belt 404 is provided on the first pulley 304.

[0035] Specifically, when the threaded rod 303 needs to be rotated, the control panel 103 on the surface of the equipment box 1 is operated, and the servo motor 4 is controlled by the operation of the control panel 103, so that the servo motor 4 starts to operate. The servo motor 4 is fixedly installed inside the equipment box 1, and an output rod 401 is fixedly connected to the output end of the servo motor 4. The output rod 401 is rotated by the rotation of the servo motor 4. A second pulley 403 is fixedly connected to the other end of the output rod 401, and the second pulley 403 is rotated by the rotation of the output rod 401. A transmission belt 404 is sleeved on the second pulley 403, and the top end of the transmission belt 404 is sleeved on the first pulley 304. The rotation of the second pulley 403 drives the first pulley 304 to rotate through the transmission belt 404, thereby facilitating the work of a series of components on the feeding assembly.

[0036] Working principle of the present invention: when the threaded rod 303 needs to be rotated, the control panel 103 on the surface of the equipment box 1 is operated, and the servo motor 4 is controlled by the operation of the control panel 103, so that the servo motor 4 starts to operate, and the servo motor 4 is fixedly installed inside the equipment box 1, and the output end of the servo motor 4 is fixedly connected to the output rod 401, and the output rod 401 is rotated by the rotation of the servo motor 4, and the second pulley 403 is fixedly connected to the other end of the output rod 401, and the second pulley 403 is driven to rotate by the rotation of the output rod 401, and a transmission belt 404 is sleeved on the second pulley 403, and the top end of the transmission belt 404 is sleeved on the first pulley 304, and the rotation of the second pulley 403 drives the first pulley 304 to rotate through the transmission belt 404, thereby facilitating the work of a series of components on the feeding assembly;

[0037] When the silicon wafer needs to be annealed, the silicon wafer is placed on the stage 316, and then the threaded rod 303 is rotated by the power unit. The threaded rod 303 is threadedly connected with a sleeve 305, and the sleeve 305 is fixedly installed on the fixed plate 306. The bottom end of the fixed plate 306 is also fixedly connected with a slider 301, and the slider 301 is slidably connected to the guide rail 3. The sleeve 305 is moved by the rotation of the threaded rod 303, and the sleeve 305 is moved by the movement of the sleeve The fixed plate 306 is driven to move, and the movement of the fixed plate 306 causes the latch 310 on the support rod 307 to move. An arm 313 is fixedly mounted on the latch 310, and a disc 314 is fixedly mounted on the arm 313. A fixed column 315 is fixedly connected to the disc 314, and a loading platform 316 is fixedly mounted on the fixed column 315. The movement of the latch 310 causes the loading platform 316 to move through the feed port 114 to the interior of the annealing furnace body 113 for processing;

[0038] When the upper box body 108 needs to be opened, the control rod 210 on the pull rod 209 is first pulled, and the pull rod 209 is pulled by the operation box 201 to drive the movable plate 207 to move. The movable plate 207 is slidably connected to the slide rod 205, and a limit plate 206 is fixedly connected to one end of the slide rod 205 to prevent the movable plate 207 from being separated from the slide rod 205 as a whole. A card block 208 is fixedly connected to the other side of the movable plate 207, and the card block 208 is clamped in the card slot of the camshaft 203 by the elastic force of the spring 212. Inside, the moving plate 207 is moved to make the block 208 disengage from the slot on the camshaft 203, and then the adjusting disk 204 on the operation box 201 is rotated, and the rotation of the adjusting disk 204 drives the rotating shaft 202 to rotate. The camshaft 203 is fixedly mounted on the rotating shaft 202, and the camshaft 203 is stuck in the groove on the buckle 2. The camshaft 203 is disengaged from the groove on the buckle 2 by the rotation of the rotating shaft 202, and then the handle 109 on the upper box body 108 is pulled, thereby facilitating the opening of the upper box body 108.

[0039] Finally, it should be noted that the above is only a preferred embodiment of the present invention and is not intended to limit the present invention. Although the present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art can still modify the technical solutions described in the aforementioned embodiments or make equivalent substitutions for some of the technical features therein. Any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. An annealing furnace for preparing thin films on silicon wafers, comprising an equipment box (1), characterized in that: The bottom end of the equipment box (1) is fixedly connected to a base (101), the bottom end of the base (101) is fixedly connected to a support leg (102), a control panel (103) is fixedly installed on the surface of the equipment box (1), an emergency switch (104) is fixedly installed on the surface of the equipment box (1), a processing table (105) is fixedly installed on the top end of the equipment box (1), a lower box body (106) is fixedly installed on the processing table (105), a hinge (107) is hinged on the rear side of the lower box body (106), the other side of the hinge (107) is hinged on the upper box body (108), and a handle (109) is fixedly connected to the upper box body (108); A heating device (110) is fixedly installed on the top of the upper box (108), a heating tube (112) is fixedly installed inside the upper box (108), the heating device (110) and the heating tube (112) are connected to each other, an annealing furnace body (113) is provided inside the lower box (106), and a material inlet (114) is provided on one side of the annealing furnace body (113); It also includes a fastening assembly, a feeding assembly and a power assembly, wherein the fastening assembly is used to install between the lower box body (106) and the upper box body (108), the feeding assembly is used to feed the material into the interior of the annealing furnace body (113) for processing, and the power assembly is used in conjunction with the feeding assembly; The fastening assembly comprises a buckle (2) fixedly mounted on the upper box (108), the bottom end of the buckle (2) is inserted into the interior of the operating box (201), the operating box (201) is fixedly mounted on the surface of the lower box (106), the interior of the operating box (201) is rotatably connected to a rotating shaft (202), a cam shaft (203) is fixedly mounted on the rotating shaft (202), one end of the rotating shaft (202) extends to the outside of the operating box (201), and an adjusting disk (204) is fixedly mounted on one end of the rotating shaft (202). A pair of slide rods (205) are fixedly connected to the interior of the operation box (201), one end of the pair of slide rods (205) is fixedly connected to a limit plate (206), a sliding sleeve is provided on the pair of slide rods (205) with a same movable plate (207), one side of the movable plate (207) is fixedly connected to a clamping block (208), the other side of the movable plate (207) is fixedly connected to a pull rod (209), the other end of the pull rod (209) extends to the outside of the operation box (201), and the other end of the pull rod (209) is fixedly installed with a control rod (210).

2. The annealing furnace for preparing thin films on silicon wafers according to claim 1, characterized in that: A spring (212) is sleeved on the pull rod (209), and two ends of the spring (212) are fixedly connected to one side of the movable plate (207) and the inner wall of the operating box (201) respectively.

3. The annealing furnace for preparing thin films on silicon wafers according to claim 2, characterized in that: A slot is provided on the camshaft (203), and the other end of the clamping block (208) is inserted into the slot.

4. The annealing furnace for preparing thin films on silicon wafers according to claim 1, characterized in that: The feeding assembly comprises a pair of guide rails (3) fixedly mounted on the processing table (105), a slider (301) being slidably connected to the pair of guide rails (3), a first shaft seat (302) being fixedly mounted on the processing table (105), a threaded rod (303) being rotatably connected to the first shaft seat (302), the other end of the threaded rod (303) being rotatably connected to the inner wall of the processing table (105), a first pulley (304) being fixedly mounted on the other end of the threaded rod (303), a sleeve block (305) being sleeved on the threaded rod (303), and a sleeve block (305) being fixedly mounted on the sleeve block (305). A fixed plate (306), the bottom end of the fixed plate (306) is fixedly connected to the top end of the slider (301), a pair of support rods (307) are fixedly connected to the fixed plate (306), a latch (310) is inserted at the top end of the support rod (307), the slider (301) is fixed by a bolt (312), the bolt (312) is fixedly connected to the arm (313), the arm (313) is fixedly connected to a disk (314), the disk (314) is fixedly connected to a pair of fixing columns (315), and the pair of fixing columns (315) are fixedly connected to the stage (316).

5. The annealing furnace for preparing thin films on silicon wafers according to claim 4, characterized in that: An internal thread is provided inside the sleeve block (305), and the sleeve block (305) and the threaded rod (303) form a spiral rotation structure.

6. The annealing furnace for preparing thin films on silicon wafers according to claim 5, characterized in that: A reinforcing rib (308) is fixedly connected between the support rod (307) and the fixed plate (306), and a crossbar (309) is fixedly connected to the reinforcing rib (308).

7. The annealing furnace for preparing thin films on silicon wafers according to claim 6, characterized in that: The power assembly comprises a servo motor (4) fixedly mounted inside the equipment box (1); an output end of the servo motor (4) is fixedly connected to an output rod (401); a second shaft rod seat (402) is sleeved on the output rod (401); the second shaft rod seat (402) is fixedly mounted inside the equipment box (1); the other end of the output rod (401) is fixedly connected to a second pulley (403); a transmission belt (404) is sleeved on the second pulley (403); and the top end of the transmission belt (404) is sleeved on the first pulley (304).

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