A black body responsivity testing device and method

Abstract

The application discloses a kind of blackbody responsivity test device and method, by signal input module to be measured unit and reference unit respectively provide same test signal;By light source processing module, the first light emitted by blackbody module is converted into the second light of required wave band, and the second light is divided into two beams, and is respectively shot to be measured unit and reference unit;By signal analysis and calculation module, the first output signal voltage of measured unit and the second output signal voltage of reference unit are respectively measured, and according to the known first nominal area of measured unit and the second nominal area of reference unit, and the second blackbody responsivity of reference unit, the first blackbody responsivity of measured unit is calculated, can eliminate the loss of light emitted by blackbody in transmission process, and error between theoretical calculation and actual measurement, improve measurement accuracy.

Description

Technical Field

[0001] This invention relates to the field of semiconductor testing technology, and in particular to a blackbody response rate testing device and method. Background Technology

[0002] A thermal sensor is a device that converts incident thermal radiation signals into electrical signals. The blackbody responsivity is defined as the ratio of the electrical signal output by the thermal sensor to the incident radiation power. Therefore, the blackbody responsivity is one of the important performance indicators for evaluating thermal sensors.

[0003] Currently, the blackbody responsivity test of thermal sensors generally adopts the direct measurement method. This method detects the signal output of the thermal sensor under a certain incident power condition to obtain the signal of the thermal sensor at unit incident power, and then judges the response capability of the thermal sensor to incident energy. After measuring the output voltage signal with a spectrum analyzer, the blackbody irradiance E is calculated according to the following formula (1), the radiation power P incident on the thermal sensor is calculated according to formula (2), and finally the blackbody responsivity R is calculated according to formula (3). bb .

[0004] Formulas (1) to (3) are expressed as follows:

[0005]

[0006] In the formula:

[0007] E – Blackbody irradiance, W / cm² 2 ;

[0008] α — Modulation factor;

[0009] ε — the effective emissivity of a blackbody radiation source;

[0010] σ — Schiffan-Boltzmann constant;

[0011] T—Blackbody temperature, K;

[0012] T0 — Ambient temperature, K;

[0013] A – Aperture area of ​​the blackbody radiation source, in cm² 2 ;

[0014] L—the distance between the aperture of the blackbody radiation source and the thermal sensor being measured, in cm;

[0015] P = A n E (2)

[0016] In the formula:

[0017] P – Radiated power, W;

[0018] An — Nominal area of ​​the thermal sensor, in cm² 2 ;

[0019]

[0020] In the formula:

[0021] R bb —Blackbody response rate, V / W;

[0022] V s —Signal voltage, V.

[0023] However, the above method requires first measuring the distance between the aperture of the blackbody radiation source and the thermal sensor under test, as well as parameters such as ambient temperature that are subject to variation errors, and then performing theoretical calculations on the blackbody radiation illuminance. It does not consider the losses caused during the transmission of the blackbody radiation source. Therefore, when using the above method to measure the blackbody responsivity of the thermal sensor, there is an unavoidable error between the theoretical value and the actual value calculated using formulas (1) to (3). Summary of the Invention

[0024] The purpose of this invention is to overcome the above-mentioned defects in the prior art and to provide a blackbody response rate testing device and method.

[0025] To achieve the above objectives, the technical solution of the present invention is as follows:

[0026] This invention provides a blackbody response rate testing device, comprising:

[0027] Signal input module, blackbody module, light source processing module, measured module, and signal analysis and calculation module;

[0028] The module under test includes a unit under test and a reference unit. The signal input module is used to provide the same test signal to the unit under test and the reference unit respectively. The light source processing module is used to convert the first light emitted by the blackbody module into a second light of the required wavelength band, and to divide the second light into two beams, which are directed to the unit under test and the reference unit respectively so that they can be received simultaneously.

[0029] The signal analysis and calculation module is used to measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit, respectively, and calculate the first blackbody responsivity of the unit under test based on the known first nominal area of ​​the unit under test, the second nominal area of ​​the reference unit, and the second blackbody responsivity of the reference unit.

[0030] Furthermore, the light source processing module includes a light modulation unit, a wavelength selection unit, and a beam splitting unit. The light modulation unit is used to convert the first light ray with constant light energy into a third light ray with alternating light energy. The wavelength selection unit is used to separate the second light ray with a monochromatic light thermal radiation band from the third light ray. The beam splitting unit is used to divide the second light ray into a fourth light ray and a fifth light ray through transmission and reflection, and direct them to the unit under test and the reference unit, respectively.

[0031] Furthermore, the signal input module includes a first signal input unit and a second signal input unit, which are respectively used to provide the same first test signal and second test signal to the unit under test and the reference unit.

[0032] Furthermore, the signal analysis and calculation module includes a first signal analysis module, a second signal analysis module, and a calculation module. The first signal analysis module and the second signal analysis module are used to measure the first output signal voltage and the second output signal voltage, respectively, and the calculation module calculates the first blackbody responsivity.

[0033] Furthermore, it also includes: a signal processing module; the signal processing module includes a first signal amplification unit and a second signal amplification unit, which are respectively used to amplify the first initial output signal of the unit under test and the second initial output signal of the reference unit equally, and output a first intermediate output signal and a second intermediate output signal accordingly, and the first signal analysis module and the second signal analysis module respectively measure the first output signal voltage and the second output signal voltage according to the first intermediate output signal and the second intermediate output signal.

[0034] Furthermore, it also includes: a power supply module; the power supply module includes a first power supply unit and a second power supply unit, which are respectively used to provide the same first bias signal and second bias signal to the unit under test and the reference unit.

[0035] This invention also provides a method for testing blackbody response rate, comprising:

[0036] Provide the unit under test and the reference unit;

[0037] The same test signal is provided to both the unit under test and the reference unit.

[0038] The first light emitted by the blackbody module is converted into a second light of the desired wavelength band, and the second light is split into two beams, which are then directed toward the unit under test and the reference unit respectively so that they can be received simultaneously.

[0039] Measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit;

[0040] The first blackbody responsivity of the unit under test is calculated based on the known first nominal area of ​​the unit under test, the second nominal area of ​​the reference unit, and the second blackbody responsivity of the reference unit.

[0041] Furthermore, the process of converting the first light emitted by the blackbody module into a second light of the desired wavelength, and then splitting the second light into two beams, which are directed towards the unit under test and the reference unit respectively for simultaneous reception, specifically includes:

[0042] The first ray with constant light energy is converted into a third ray with alternating light energy;

[0043] Separate the second ray with a monochromatic light and heat radiation band from the third ray;

[0044] The second light beam is split into a fourth light beam and a fifth light beam through transmission and reflection, and then directed towards the unit under test and the reference unit respectively so that they can be received simultaneously.

[0045] Further, the measurement of the first output signal voltage of the unit under test and the second output signal voltage of the reference unit specifically includes:

[0046] The first initial output signal of the unit under test and the second initial output signal of the reference unit are amplified equally, and the first intermediate output signal and the second intermediate output signal are output accordingly.

[0047] The voltage of the first output signal and the voltage of the second output signal are measured based on the first intermediate output signal and the second intermediate output signal, respectively.

[0048] Further, the calculated first blackbody responsivity R of the unit under test is... D It satisfies the following formula:

[0049]

[0050] Among them, A C V is the second nominal area of ​​the reference cell. D A is the first output signal voltage of the unit under test. D V is the first nominal area of ​​the cell to be measured. C R is the second output signal voltage of the reference unit. C The second blackbody response rate is the reference unit.

[0051] As can be seen from the above technical solution, this invention introduces a reference unit and, after separating the modulated light source (third ray) into monochromatic light (second ray), splits it into transmitted light (fourth ray) and reflected light (fifth ray). The unit under test is placed on the transmitted light path, and the reference unit is placed on the reflected light path, allowing both the reference unit and the unit under test to be measured simultaneously. Two signal analysis modules (first signal analysis module and second signal analysis module) measure the output signal voltages (first output signal voltage and second output signal voltage) of the unit under test and the reference unit, respectively. Therefore, based on the known nominal areas of the unit under test and the reference unit (first nominal area and second nominal area), and the blackbody responsivity of the reference unit (second blackbody responsivity), the blackbody responsivity (first blackbody responsivity) of the unit under test can be obtained through simple calculation. This invention, by employing a reference comparison method instead of the traditional direct testing method, eliminates losses during blackbody radiation transmission and avoids the influence of errors between theoretical and actual values ​​during calculation, making the measured blackbody responsivity of the unit under test more accurate. This is beneficial for the performance evaluation and accurate analysis of thermal sensor devices. Attached Figure Description

[0052] Figure 1 This is a block diagram illustrating the testing principle of a blackbody response rate testing device according to the present invention.

[0053] Figure 2 This is a schematic diagram of a blackbody response rate testing device according to a preferred embodiment of the present invention. Detailed Implementation

[0054] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by those skilled in the art. The terms "comprising" and similar expressions used herein mean that the element or object preceding the word covers the element or object listed after the word and its equivalents, but does not exclude other elements or objects.

[0055] The specific embodiments of the present invention will be further described in detail below with reference to the accompanying drawings.

[0056] Please see Figure 1 , Figure 1 This is a block diagram illustrating the testing principle of a blackbody response rate testing device according to the present invention. Figure 1As shown, a blackbody responsivity testing device of the present invention includes the following main components: a signal input module, a blackbody module (blackbody radiation module), a light source processing module, a test module (test thermal sensing module), and a signal analysis and calculation module, which are coupled together.

[0057] The module under test includes the unit under test (thermal sensing unit under test) and the reference unit (reference thermal sensing unit).

[0058] The signal input module is used to provide the same test signal to both the unit under test and the reference unit.

[0059] The light source processing module is used to convert the first light ray (first thermal radiation light) emitted by the blackbody module into a second light ray (second thermal radiation light) of the required wavelength band, and to split the second light ray into two beams, which are directed toward the unit under test and the reference unit respectively so that they can be received simultaneously.

[0060] The signal analysis and calculation module is used to measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit respectively, and calculate the first blackbody responsivity of the unit under test based on the known first nominal area of ​​the unit under test, the second nominal area of ​​the reference unit, and the second blackbody responsivity of the reference unit.

[0061] Please see Figure 2 And in conjunction with reference Figure 1 In some embodiments, the light source processing module may include a light modulation unit, a wavelength selection unit, and a beam splitting unit.

[0062] In some embodiments, the blackbody module may include, for example, a blackbody radiation source.

[0063] In some embodiments, the optical modulation unit may include, for example, a modulation disk.

[0064] In some embodiments, the wavelength selection unit may include, for example, a monochromator.

[0065] In some embodiments, the beam splitting unit may include, for example, a beam splitter. The beam splitter can split the incident light into two paths: reflected light and transmitted light.

[0066] In some embodiments, the signal input module may include a first signal input unit and a second signal input unit; the first signal input unit and the second signal input unit are respectively used to provide the same first test signal and second test signal to the unit under test and the reference unit.

[0067] In some embodiments, the first signal input unit may include, for example, a first standard signal generator; the second signal input unit may include, for example, a second standard signal generator.

[0068] In some embodiments, a bias power supply module may also be included. The bias power supply module may include a first power supply unit and a second power supply unit. Further, the first power supply unit may include a first bias power supply; the second power supply unit may include a second bias power supply. The first bias power supply and the second bias power supply may be used to provide the same first bias signal and second bias signal to the unit under test and the reference unit, respectively. The first bias signal and the second bias signal may be, for example, a bias voltage signal.

[0069] In some embodiments, the first bias power supply and the second bias power supply may include batteries or the like that can provide the same voltage.

[0070] In some embodiments, the unit under test may include a thermal sensor under test, etc.; the reference unit may include a reference thermal sensor, etc.

[0071] Furthermore, the thermal sensor under test and the reference thermal sensor can have the same nominal area. That is, the first nominal area and the second nominal area can be equal.

[0072] Furthermore, the distances between the thermal sensor under test and the reference thermal sensor and the beam splitter can be equal.

[0073] In some embodiments, a signal processing module may also be included. The signal processing module may include a first signal amplification unit and a second signal amplification unit.

[0074] In some embodiments, the first signal amplification unit may include a first operational amplifier; the second signal amplification unit may include a second operational amplifier with specifications consistent with the first operational amplifier.

[0075] In some embodiments, the signal analysis and calculation module may include a first signal analysis module, a second signal analysis module, and a calculation module.

[0076] In some embodiments, the first signal analysis module may include a first spectrum analyzer; the second signal analysis module may include a second spectrum analyzer with specifications consistent with the first spectrum analyzer.

[0077] In some embodiments, the computing module may include a host computer, etc.

[0078] Please see Figure 2In some embodiments, a first ray of light with constant energy emitted by a blackbody radiation source is modulated by a modulation disk and converted into a third ray (third thermal radiation light) with alternating energy. The third ray is then separated by a monochromator to obtain a second ray with a monochromatic thermal radiation band (i.e., the second ray is monochromatic light with a specific thermal radiation band), thus obtaining the thermal radiation light of the desired wavelength. A beam splitter can split the second ray into a fourth ray (fourth thermal radiation light) and a fifth ray (fifth thermal radiation light) through transmission and reflection, and direct them to the thermal sensor under test and the reference thermal sensor, respectively. The thermal sensor under test can be placed in the transmission path, and the reference thermal sensor can be placed in the reflection path. In this way, the fourth and fifth rays can be simultaneously received by the thermal sensor under test and the reference thermal sensor, respectively, achieving synchronous measurement of the thermal radiation light emitted by the blackbody radiation source, and outputting their respective electrical signals through photoelectric conversion.

[0079] Furthermore, the output of the first bias power supply is input to the thermal sensor under test, and the output of the first standard signal generator is connected to the input of the thermal sensor under test. The output of the thermal sensor under test is input to the input of the first operational amplifier, and the output of the first operational amplifier is input to the input of the first spectrum analyzer.

[0080] The output of the second bias power supply is input to the reference thermal sensor, and the output of the second standard signal generator is connected to the input of the reference thermal sensor. The output of the reference thermal sensor is input to the input of the second operational amplifier, and the output of the second operational amplifier is input to the input of the second spectrum analyzer.

[0081] The outputs of the first and second spectrum analyzers are input to the host computer.

[0082] The first spectrum analyzer is used to measure the first output signal voltage of the thermal sensor under test; the second spectrum analyzer is used to measure the second output signal voltage of the reference thermal sensor. The host computer is used to calculate the first blackbody responsivity of the thermal sensor under test.

[0083] Furthermore, the first operational amplifier and the second operational amplifier are used to amplify the first initial output signal from the thermal sensor under test and the second initial output signal from the reference thermal sensor equally, respectively, and output the first intermediate output signal and the second intermediate output signal accordingly. The first intermediate output signal and the second intermediate output signal can be read out using the first spectrum analyzer and the second spectrum analyzer, respectively, to measure the voltage of the first output signal and the voltage of the second output signal.

[0084] The host computer can calculate the first blackbody responsivity of the thermal sensor under test based on the known first nominal area of ​​the thermal sensor under test, the second nominal area of ​​the reference thermal sensor, and the second blackbody responsivity of the reference thermal sensor.

[0085] The following detailed description of a blackbody response rate testing method of the present invention, with reference to specific embodiments and accompanying drawings, will illustrate the invention in detail.

[0086] Please see Figures 1-2 The blackbody response rate testing method of the present invention can be implemented based on the blackbody response rate testing device of the present invention described above, and may include the following steps:

[0087] Step S1: Provide the unit under test and the reference unit.

[0088] In some embodiments, the unit under test may be a thermal sensor under test; the reference unit may be a reference thermal sensor.

[0089] Step S2: Provide the same test signal to both the unit under test and the reference unit.

[0090] In some embodiments, a first bias signal can be provided to the thermal sensor under test using a first bias power supply. Simultaneously, a second bias signal can be provided to a reference thermal sensor using a second bias power supply. The first and second bias signals can be, for example, bias voltage signals.

[0091] Furthermore, a first test signal can be provided to the thermal sensor under test using a first standard signal generator. Simultaneously, a second test signal can be provided to the reference thermal sensor using a second standard signal generator.

[0092] Step S3: Convert the first light emitted by the blackbody radiation source into a second light of the desired wavelength, and split the second light into two beams, which are then directed toward the unit under test and the reference unit respectively so that they can be received simultaneously.

[0093] In some embodiments, a first ray with constant light energy can be emitted using a blackbody radiation source, and the first ray can be converted into a third ray with alternating light energy after modulation using a modulation disk.

[0094] Then, a monochromator can be used to separate a second ray with a certain thermal radiation band and monochromatic light from the third ray, thereby obtaining the second ray of the required wavelength.

[0095] Next, a beam splitter can be used to split the second light beam into a fourth light beam and a fifth light beam through transmission and reflection, and then direct them toward the thermal sensor under test and the reference thermal sensor, respectively.

[0096] By placing the thermal sensor under test in the transmission path of the beam splitter and the reference thermal sensor in the reflection path of the beam splitter, the fourth and fifth rays can be simultaneously received by the thermal sensor under test and the reference thermal sensor, respectively, thus achieving synchronous measurement of the thermal radiation emitted by the blackbody radiation source, and outputting their respective electrical signals through photoelectric conversion.

[0097] Step S4: Measure the first output signal voltage of the unit under test and the second output signal voltage of the reference unit.

[0098] In some embodiments, a first operational amplifier and a second operational amplifier can be used to amplify the first initial output signal output by the thermal sensor under test and the second initial output signal output by the reference thermal sensor equally, and output the first intermediate output signal and the second intermediate output signal accordingly.

[0099] Then, the first intermediate output signal and the second intermediate output signal can be read out by the first spectrum analyzer and the second spectrum analyzer respectively, so as to measure the voltage of the first output signal and the voltage of the second output signal.

[0100] Step S5: Calculate the first blackbody responsivity of the cell under test based on the known first nominal area of ​​the cell under test, the second nominal area of ​​the reference cell, and the second blackbody responsivity of the reference cell.

[0101] In some embodiments, a host computer can be used to measure the first output signal voltage V of the thermal sensor under test. D The second output signal voltage V of the reference thermal sensor C And the known first nominal area A of the thermal sensor to be tested D and the second nominal area A of the reference thermal sensor C And the second blackbody responsivity R of the reference thermal sensor C Therefore, based on the aforementioned formulas (1) to (3), we can obtain the following formula (4):

[0102]

[0103] Therefore, the first blackbody responsivity R of the thermal sensor under test can be obtained through simple calculation. D .

[0104] In summary, this invention introduces a reference thermal sensor and splits the modulated light source (third ray) into monochromatic light (second ray) and then into transmitted light (fourth ray) and reflected light (fifth ray). The thermal sensor under test is placed in the transmitted light path, and the reference thermal sensor is placed in the reflected light path, allowing simultaneous measurement of both. The first output signal voltage of the thermal sensor under test and the second output signal voltage of the reference thermal sensor are measured using a first spectrum analyzer and a second spectrum analyzer, respectively. Based on the known first nominal area of ​​the thermal sensor under test, the second nominal area of ​​the reference thermal sensor, and the second blackbody responsivity of the reference thermal sensor, the first blackbody responsivity of the thermal sensor under test can be obtained through simple calculation. This invention, by employing a reference comparison method instead of the traditional direct testing method, eliminates losses during blackbody radiation transmission and avoids errors between theoretical and actual values ​​during calculation. This results in a more accurate measurement of the blackbody responsivity of the measured unit, which is beneficial for the performance evaluation and accurate analysis of thermal sensor devices.

[0105] While embodiments of the present invention have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of the invention as set forth in the claims. Furthermore, the invention described herein may have other embodiments and can be implemented or carried out in various ways.

Claims

1. A black body responsivity test apparatus characterized by, The application relates to a blackbody responsivity test device and method. The device comprises a signal input module, a blackbody module, a light source processing module, a test module and a signal analysis and calculation module. The test module comprises a test unit and a reference unit, the signal input module is used for providing the same test signal to the test unit and the reference unit respectively, the light source processing module is used for converting the first light emitted by the blackbody module into the second light of a required wave band, and the second light is equally divided into two beams which are respectively emitted to the test unit and the reference unit to be simultaneously received. The signal analysis and calculation module is used for measuring the first output signal voltage of the test unit and the second output signal voltage of the reference unit respectively, and calculating the first blackbody responsivity of the test unit according to the known first nominal area of the test unit, the second nominal area of the reference unit and the second blackbody responsivity of the reference unit. The device further comprises a power module. The power module comprises a first power unit and a second power unit which are respectively used for providing the same bias voltage signal to the test unit and the reference unit.

2. The black body response rate test apparatus according to claim 1, wherein The light source processing module comprises a light modulation unit, a wavelength selection unit and a beam splitting unit, the light modulation unit is used for converting the first light with constant stable light energy into the third light with alternating light energy, the wavelength selection unit is used for separating the second light with monochromatic light thermal radiation wave band from the third light, and the beam splitting unit is used for equally dividing the second light into a fourth light and a fifth light through transmission and reflection, and respectively emitting the fourth light and the fifth light to the test unit and the reference unit.

3. The black body response rate test apparatus of claim 1, wherein The signal input module comprises a first signal input unit and a second signal input unit which are respectively used for providing the same first test signal and the second test signal to the test unit and the reference unit.

4. The black body response rate test apparatus of claim 1, wherein The signal analysis and calculation module comprises a first signal analysis module, a second signal analysis module and a calculation module, the first signal analysis module and the second signal analysis module are respectively used for measuring the first output signal voltage and the second output signal voltage, and the first blackbody responsivity is calculated through the calculation module.

5. The black body response rate test apparatus according to claim 4, wherein The device further comprises a signal processing module. The signal processing module comprises a first signal amplification unit and a second signal amplification unit which are respectively used for equally amplifying the first initial output signal of the test unit and the second initial output signal of the reference unit, and correspondingly outputting a first intermediate output signal and a second intermediate output signal, and the first signal analysis module and the second signal analysis module respectively measure the first output signal voltage and the second output signal voltage according to the first intermediate output signal and the second intermediate output signal. The method comprises the following steps.

6. A method of testing a black body response rate, the method comprising: The method comprises the following steps. The test unit and the reference unit are provided with the same test signal and the same bias voltage signal. The first light emitted by the blackbody module is converted into the second light of a required wave band, and the second light is equally divided into two beams which are respectively emitted to the test unit and the reference unit to be simultaneously received. ​ Measuring the first output signal voltage of the to-be-tested unit and the second output signal voltage of the reference unit; According to the known first nominal area of the to-be-tested unit and the second nominal area of the reference unit, and the second blackbody response rate of the reference unit, the first blackbody response rate of the to-be-tested unit is calculated; The first blackbody response rate R of the to-be-tested unit calculated D satisfies the following formula: wherein A C is the second nominal area of the reference cell, V D is the first output signal voltage of the cell under test, A D is the first nominal area of the cell under test, V C is the second output signal voltage of the reference cell, R C is the second blackbody responsivity of the reference cell.

7. The method of claim 6, wherein the blackbody responsivity test is performed at a temperature of 25°C. The first light emitted by the blackbody module is converted into second light of a required wave band, and the second light is equally divided into two beams, which are respectively directed to the to-be-tested unit and the reference unit to be simultaneously received, and specifically includes: The first light with constant stable light energy is converted into third light with alternating light energy; The second light with monochromatic light thermal radiation wave band is separated from the third light; The second light is divided into a fourth light and a fifth light by transmission and reflection, and is respectively directed to the to-be-tested unit and the reference unit to be simultaneously received.

8. The method of claim 6, wherein the black body response rate test method is characterized by, The measuring the first output signal voltage of the to-be-tested unit and the second output signal voltage of the reference unit specifically includes: The first initial output signal of the to-be-tested unit and the second initial output signal of the reference unit are amplified equally, and the first intermediate output signal and the second intermediate output signal are correspondingly output; According to the first intermediate output signal and the second intermediate output signal, the first output signal voltage and the second output signal voltage are measured respectively.

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