An integrated hinged movable lens fine-tuning device

Abstract

The present invention is an integrated hinge movable lens fine-tuning device, comprising a lens barrel (1), a lens seat (2), a lens (3), a motor (4), a ball head rod (5) and a ball head end cover (6). Three flexible hinges are evenly distributed along the circumference of the lens barrel (1), each of which has a translation block in the middle, and a moving ring (1.1) is connected to the top of the three translation blocks. The upper end surface (101) of the moving ring is connected to the lens seat. The lens is mounted on the lens seat. The motor (4) is mounted on the bottom surface (102) of the lens barrel, and the front end is connected to the ball head rod (5). The front end surface of the ball head rod (5) is tangent to the inner end surface of the ball head end cover (6). The motor (4) drives the ball head rod to move, and the driving force generated causes the flexible hinge on the lens barrel (1) to deform, driving the lens seat (2) to move, thereby driving the lens (3) to move. When the three motors move synchronously, the Z-direction displacement adjustment of the lens is realized; when the three motors move differentially, the θx and θy adjustments of the lens are realized. The invention has high adjustment accuracy, good repeatability and compact structure, and can realize three-degree-of-freedom adjustment of the lens within axial and radial limited spaces.

Description

Technical Field

[0001] The present invention is used in the technical field of projection lithography machines, and relates to an integrated hinged movable lens fine-tuning device, which can be used for fine-tuning of lenses in three directions of freedom that are specially required in projection objective lenses. Background Art

[0002] With the rapid development of large-scale integrated circuits, the demand for high-precision projection lithography machines is increasing. At present, the manufacturing errors of lenses and their supports caused by the limitations of optical and mechanical processing levels are difficult to avoid. At the same time, considering the impact of changes in the use environment (temperature, pressure, etc.) on the imaging quality of the projection objective, the position and posture of specific lenses must be adjusted during the normal operation of the projection objective. Among them, adjusting the Z-direction, θx-direction and θy-direction posture of specific lenses is an effective means to improve the imaging quality of the projection objective. Summary of the invention

[0003] The purpose of the present invention is to provide an integrated hinged movable lens fine-tuning device, which has high precision, compact structure, and is easy to install. It can compensate in real time for image quality changes caused by lens processing and assembly errors and environmental changes, thereby ensuring the imaging quality of the objective lens.

[0004] In order to achieve the above-mentioned purpose, the technical solution adopted by the present invention is: an integrated hinge movable lens fine-tuning device, which includes: a lens barrel 1, a lens seat 2, a lens 3, a motor 4, a ball head rod 5 and a ball head end cover 6. Three flexible hinges are evenly distributed along the circumference of the lens barrel 1, namely the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13, and the three flexible hinge structures are exactly the same. The first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 are respectively provided in the middle of the first flexible hinge 11a, the second flexible hinge 12a and the third flexible hinge 13a, and a moving ring 1.1 is connected above the three moving blocks. The upper end surface 101 of the moving ring 1.1 is connected to the lens seat 2. The lens 3 is installed on the upper end surface 2b of the lens seat 2 through the first step A, the second step B and the third step C. The motor 4 includes a first motor 41, a second motor 42 and a third motor 43, and the three motors are identical. The first motor 41, the second motor 42 and the third motor 43 are evenly installed on the bottom surface 102 of the lens barrel 1 in the circumferential direction. The ball head rod 5 includes a first ball head rod 51, a second ball head rod 52 and a third ball head rod 53, and the three ball head rods are identical. The front ends of the first motor 41, the second motor 42 and the third motor 43 are respectively connected to the first ball head rod 51, the second ball head rod 52 and the third ball head rod 53. The ball head end cover 6 includes a first ball head end cover 61, a second ball head end cover 62 and a third ball head end cover 63, and the three ball head end covers are identical. The front end face 51a of the first ball head rod 51, the front end face 52a of the second ball head rod 52 and the front end face 53a of the third ball head rod 53 are tangent to the inner end face 61a of the first ball head end cover 61, the inner end face 62a of the second ball head end cover 62 and the inner end face 63a of the third ball head end cover 63 respectively. The motor 4 drives the ball head rod 5 to move, and the driving force generated causes the flexible hinge on the lens barrel 1 to deform, drive the lens seat 2 to move, and thus drive the lens 3 to move. When the three motors move synchronously, the Z-direction displacement adjustment of the lens is realized; when the three motors move differentially, the θx and θy adjustments of the lens are realized. The one-piece hinge movable lens fine-tuning device provided by the present invention has high adjustment accuracy, good repeatability, and compact structure, and can realize three-degree-of-freedom adjustment of the lens in a limited space in the axial and radial directions.

[0005] Furthermore, the three motors are evenly distributed along the circumference, and the driving direction of the motors is vertically upward.

[0006] Furthermore, three flexible hinges are evenly distributed along the circumferential direction on the lens barrel 1, namely, a first flexible hinge 11, a second flexible hinge 12 and a third flexible hinge 13, and the structures of the three hinges are completely the same. The first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 are all processed by cutting the lens barrel 1 and are integrated with the lens barrel 1. The lens barrel 1 is made of 9Cr18 and is quenched.

[0007] Furthermore, the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 are connected to the moving ring 1.1 only through three translation blocks, namely the first translation block 11a, the second translation block 12a and the third translation block 13a, and the rest of them are suspended.

[0008] Furthermore, the driving surface 1101a of the first flexible hinge 11, the driving surface 1201a of the second flexible hinge 12, and the driving surface 1301a of the third flexible hinge 13 are all conical. When the motor retracts, the front end surface of the ball head rod contacts the driving surface, thereby driving the flexible hinge to deform.

[0009] Furthermore, the flexible hinge comprises seven fulcrums, namely, a first fulcrum R1, a second fulcrum R2, a third fulcrum R3, a fourth fulcrum R4, a fifth fulcrum R5, a sixth fulcrum R6, and a seventh fulcrum R7. The first fulcrum R1, the second fulcrum R2, and the third fulcrum R3 together constitute a labor-saving mechanism, which drives the translation block of the flexible hinge to move up and down by driving the connecting rod between the second fulcrum R2 and the third fulcrum R3. The fourth fulcrum R4, the fifth fulcrum R5, the sixth fulcrum R6, and the seventh fulcrum R7 constitute a parallelogram mechanism, which guides the up and down movement of the translation block.

[0010] Furthermore, the ball head end cover is fixed on the flexible hinge, and the inner end surface of the ball head end cover is conical. When the motor is extended, the front end surface of the ball head rod contacts the inner end surface of the ball head end cover, driving the ball head end cover to move, and then driving the flexible hinge to deform.

[0011] The beneficial effects of the present invention are as follows: three circumferentially evenly distributed flexible hinges are processed in the circumferential direction of the lens barrel by wire cutting, so as to ensure that the flexible hinge and the lens barrel are integrated, so that the overall structure is simple and easy to install and adjust, and has good rigidity and stability in the non-driven movement direction; the fulcrum of the flexible hinge constitutes a labor-saving mechanism, which amplifies the driving force output by the motor and reduces the driving displacement, so that the device has higher precision; the driving surface of the flexible hinge and the inner end surface of the ball head end cover are both tapered, which can avoid the movement of the ball head rod in the non-driven direction; during assembly, the gap between the ball head end cover and the flexible hinge can be adjusted by grinding the installation surface of the ball head end cover, so as to ensure that the front end surface of the ball head rod is always in contact with the inner end surface of the ball head end cover and the driving surface of the flexible hinge, so as to avoid backlash during use. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1It is a front view of the integrated hinge movable lens fine-tuning device of the present invention, wherein 1 is the lens barrel, 11 is the first flexible hinge, 11a is the first translation block, 1.1 is the moving ring, 2 is the lens seat, 2b is the upper end surface of the lens seat 2, 3 is the lens, 41 is the first motor, 42 is the second motor, 43 is the third motor, 61 is the first ball head end cover, 62 is the second ball head end cover, 101 is the upper end surface of the lens barrel 1, 102 is the bottom surface of the lens barrel 1, A is the first step, B is the second step, and C is the third step.

[0013] Figure 2 It is a top view of the integrated hinge movable lens fine-tuning device of the present invention, wherein 1 is the lens barrel, 2 is the lens holder, 3 is the lens, 4 is the motor, 61 is the first ball head end cover, 62 is the second ball head end cover, 63 is the third ball head end cover, 11 is the first flexible hinge, 11a is the first translation block, 12 is the second flexible hinge, 12a is the second translation block, 13 is the third flexible hinge, 13a is the third translation block, A is the first step, B is the second step, and C is the third step.

[0014] Figure 3 This is a top view of the hidden upper part structure of the integrated hinge movable lens fine-tuning device of the present invention, wherein 51 is the first ball head rod, 52 is the second ball head rod, and 53 is the third ball head rod.

[0015] Figure 4 It is a cross-sectional view of the integrated hinge movable lens fine-tuning device of the present invention, wherein 1 is the lens barrel, 1101a is the driving surface of the first flexible hinge 11, 2 is the lens seat, 3 is the lens, 41 is the first motor, 43 is the third motor, 51 is the first ball head rod, 51a is the front end surface of the first ball head rod 51, 61 is the first ball head end cover, 61a is the inner end surface of the first ball head end cover 61, 101 is the upper end surface of the lens barrel 1, and 102 is the bottom surface of the lens barrel 1.

[0016] Figure 5 It is a partial cross-sectional view of the driving component of the present invention, wherein 1.1 is a moving ring, 11 is a first flexible hinge, 11a is a first translation block, 2 is a lens holder, 3 is a lens, 41 is a first motor, 42 is a second motor, 43 is a third motor, 51 is a first ball head rod, 51a is a front end surface of the first ball head rod 51, 61 is a first ball head end cover, 61a is an inner end surface of the first ball head end cover 61, 101 is an upper end surface of the lens barrel 1, and 102 is a bottom surface of the lens barrel 1.

[0017] Figure 6This is a schematic diagram of the lens barrel described in the present invention, wherein 1.1 is a moving ring, 11 is a first flexible hinge, 12 is a second flexible hinge, 13 is a third flexible hinge, 11a is a first translation block, 1101a is a driving surface of the first flexible hinge 11, 12a is a second translation block, 1201a is a driving surface of the second flexible hinge 12, 13a is a third translation block, and 1301a is a driving surface of the third flexible hinge 13.

[0018] Figure 7 It is a front view of the flexible hinge described in the present invention, wherein 1.1 is a moving ring, 11a is a first translation block, 101 is an upper end surface of the lens barrel 1, 102 is, R1 is a first fulcrum, R2 is a second fulcrum, R3 is a third fulcrum, R4 is a fourth fulcrum, R5 is a fifth fulcrum, R6 is a sixth fulcrum, and R7 is a seventh fulcrum.

[0019] Figure 8 This is a simplified diagram of the hinge mechanism movement of the present invention, wherein 1a is 1 fulcrum on the upper end surface, 1b is 2 fulcrums, 1c is 3 fulcrums, 1d is 4 fulcrums, 1e is 5 fulcrums, 1f is 6 fulcrums, 1g is 7 fulcrums, and 11a is the first translation block. DETAILED DESCRIPTION

[0020] In order to make the objectives, technical solutions and advantages of the present invention more clearly understood, the present invention is described in detail with reference to the accompanying drawings and specific embodiments.

[0021] like Figure 1 , Figure 2 , Figure 3 and Figure 4As shown, the device includes a lens barrel 1, a lens seat 2, a lens 3, a motor, a ball head rod and a ball head end cap. The upper end surface 101 of the lens barrel 1 is connected to the lens seat 2. The lens 3 is installed on the upper end surface 2b of the lens seat 2 through a first step A, a second step B, and a third step C. The motor includes a first motor 41, a second motor 42, and a third motor 43, and the first motor 41, the second motor 42, and the third motor 43 are evenly installed on the bottom surface 102 of the lens barrel 1 in a circumferential direction. The ball head rod includes a first ball head rod 51, a second ball head rod 52, and a third ball head rod 53, and the three ball head rods are exactly the same. The front ends of the first motor 41, the second motor 42, and the third motor 43 are connected to the first ball head rod 51, the second ball head rod 52, and the third ball head rod 53 respectively. The ball head end cap includes a first ball head end cap 61, a second ball head end cap 62, and a third ball head end cap 63, and the three ball head end caps are exactly the same. The front end face 51a of the first ball head rod 51, the front end face 52a of the second ball head rod 52 and the front end face 53a of the third ball head rod 53 are respectively tangent to the inner end face 61a of the first ball head end cover 61, the inner end face 62a of the second ball head end cover 62 and the inner end face 63a of the third ball head end cover 63. The motor drives the ball head rod to move, and the driving force generated causes the flexible hinge on the lens barrel 1 to deform, drive the lens holder 2 to move, and thus drive the lens 3 to move.

[0022] like Figure 4 and Figure 5As shown, the first motor 41, the first ball head rod 51, the first ball head end cover 61 and the first flexible hinge 11 constitute the first group drive, the second motor 42, the second ball head rod 52, the second ball head end cover 62 and the second flexible hinge 12 constitute the second group drive, and the third motor 43, the third ball head rod 53, the third ball head end cover 63 and the third flexible hinge 13 constitute the third group drive, and the principles and dimensions of the three groups of drives are exactly the same. Here, the first group drive is used as an example for explanation. When the shaft of the first motor 41 is extended, the first ball head rod 51 is driven to move upward, and the front end face 51a of the first ball head rod 51 contacts the inner end face 61a of the first ball head end cover 61, driving the first ball head end cover 61 to move. Since the first ball head end cover 61 is fixed on the first flexible hinge 11, the movement of the first ball head end cover 61 is transmitted to the lens seat 2 through the first flexible hinge 11, thereby driving the lens 3 to move upward. Correspondingly, when the shaft of the first motor 41 is shortened, the first ball head rod 51 is driven to move downward, and the front end surface 51a of the first ball head rod 51 contacts the driving surface 1101a of the first flexible hinge 11, driving the translation block 11a of the first flexible hinge 11 to move downward, and transmitting the movement to the lens seat 2, thereby driving the lens 3 to move downward. In this way, the up and down movement of the lens 3 at the first flexible hinge 11 can be achieved. When the three motors move synchronously, the Z-direction displacement adjustment of the lens is achieved; when the three motors move differentially, the θx and θy adjustments of the lens are achieved. The one-piece hinge movable lens fine-tuning device provided by the present invention has high adjustment accuracy, good repeatability, and compact structure, and can achieve three-degree-of-freedom adjustment of the lens in a limited space in the axial and radial directions.

[0023] like Figure 6 As shown, three flexible hinges are evenly distributed along the circumference of the lens barrel 1, namely the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13. The three flexible hinges have exactly the same structure. The first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 are respectively provided with a first translation block 11a, a second translation block 12a and a third translation block 13a, and a moving ring 1.1 is connected above the three translation blocks. The three flexible hinges, namely the first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13, are connected to the moving ring 1.1 only through the three translation blocks, namely the first translation block 11a, the second translation block 12a and the third translation block 13a, and the rest of the parts are suspended. The first flexible hinge 11, the second flexible hinge 12 and the third flexible hinge 13 respectively have a first driving surface 1101a, a second driving surface 1201a and a third driving surface 1301a, all of which are conical. When the motor retracts, the front end surface of the ball head rod contacts the driving surface, thereby causing the flexible hinge to deform.

[0024] like Figure 7As shown, since the structures and working principles of the three hinges are the same, the first hinge is used as an example for explanation. The front of the first flexible hinge includes seven fulcrums: the first fulcrum R1, the second fulcrum R2, the third fulcrum R3, the fourth fulcrum R4, the fifth fulcrum R5, the sixth fulcrum R6, and the seventh fulcrum R7. The first fulcrum R1, the second fulcrum R2, and the third fulcrum R3 together constitute a labor-saving mechanism, and the driving surface 1101a is located between the second fulcrum R2 and the third fulcrum R3. By driving the connecting rod between the second fulcrum R2 and the third fulcrum R3, the translation block of the flexible hinge is driven to move up and down. The fourth fulcrum R4, the fifth fulcrum R5, the sixth fulcrum R6, and the seventh fulcrum R7 constitute a parallelogram mechanism, which guides the up and down movement of the translation block.

[0025] like Figure 8 As shown, according to the structure of the first flexible hinge 11, a simplified diagram of its mechanism movement is obtained. It includes 1 fulcrum 1a, 2 fulcrum 1b, 3 fulcrum 1c, 4 fulcrum 1d, 5 fulcrum 1e, 6 fulcrum 1f and 7 fulcrum 1g. The connecting rod between 2 fulcrum 1b and 3 fulcrum 1c is driven to drive the first translation block 1101 of the first flexible hinge 11 to move. The 4 fulcrum 1d, 5 fulcrum 1e, 6 fulcrum 1f and 7 fulcrum 1g together form a parallelogram structure to guide the up and down movement of the first translation block 11a of the first flexible hinge 11.

Claims

1. An integrated hinged movable lens fine-tuning device, characterized in that: The invention comprises a lens barrel (1), a lens seat (2), a lens (3), a motor (4), a ball head rod (5) and a ball head end cover (6). Three flexible hinges are evenly distributed along the circumference of the lens barrel (1), namely a first flexible hinge (11), a second flexible hinge (12) and a third flexible hinge (13). The three flexible hinges have completely the same structure. A first translation block (11a), a second translation block (12a) and a third translation block (13a) are respectively arranged in the middle of the first flexible hinge (11), the second flexible hinge (12) and the third flexible hinge (13). A moving ring (1.1) is connected to the top of the three translation blocks (13a); an upper end surface (101) of the moving ring (1.1) is connected to the lens holder (2); a lens (3) is mounted on the upper end surface (2b) of the lens holder (2) via a first step (A), a second step (B), and a third step (C); a motor (4) comprises a first motor (41), a second motor (42), and a third motor (43); the three motors are completely identical; the first motor (41), the second motor (42), and the third motor (43) are evenly distributed in the circumferential direction and mounted on the bottom surface (102) of the lens barrel (1); and a ball head rod (5) comprises The first ball head rod (51), the second ball head rod (52) and the third ball head rod (53) are identical to each other. The front ends of the first motor (41), the second motor (42) and the third motor (43) are connected to the first ball head rod (51), the second ball head rod (52) and the third ball head rod (53) respectively. The ball head end cover (6) includes a first ball head end cover (61), a second ball head end cover (62) and a third ball head end cover (63). The three ball head end covers are identical to each other. The front end surface (51a) of the first ball head rod (51), the front end surface (52a) of the second ball head rod (52) and the third ball head rod (53) are identical to each other. ) are respectively tangent to the inner end surface (61a) of the first ball head end cover (61), the inner end surface (62a) of the second ball head end cover (62), and the inner end surface (63a) of the third ball head end cover (63); the motor (4) drives the ball head rod (5) to move, and the driving force generated causes the flexible hinge on the lens barrel (1) to deform, driving the lens seat (2) to move, thereby driving the lens (3) to move, and when the three motors move synchronously, the Z-direction displacement adjustment of the lens is achieved; when the three motors move differentially, the θx and θy adjustments of the lens are achieved, and the three-degree-of-freedom adjustment of the lens within the axial and radial limited space can be achieved; The flexible hinge comprises seven fulcrums, namely a first fulcrum (R1), a second fulcrum (R2), a third fulcrum (R3), a fourth fulcrum (R4), a fifth fulcrum (R5), a sixth fulcrum (R6) and a seventh fulcrum (R7). The first fulcrum (R1), the second fulcrum (R2) and the third fulcrum (R3) together constitute a labor-saving mechanism, which drives the translation block of the flexible hinge to move up and down by driving the connecting rod between the second fulcrum (R2) and the third fulcrum (R3). The fourth fulcrum (R4), the fifth fulcrum (R5), the sixth fulcrum (R6) and the seventh fulcrum (R7) constitute a parallelogram mechanism, which guides the up and down movement of the translation block.

2. The one-piece hinged movable lens fine-tuning device according to claim 1, characterized in that: The three motors are evenly distributed along the circumference, and the driving direction of the motors is vertically upward.

3. The one-piece hinge movable lens fine-tuning device according to claim 1, characterized in that: The lens barrel (1) is evenly distributed along a circumferential direction with three flexible hinges, namely a first flexible hinge (11), a second flexible hinge (12) and a third flexible hinge (13). The three flexible hinges have completely the same structure. The first flexible hinge (11), the second flexible hinge (12) and the third flexible hinge (13) are all processed by cutting the lens barrel (1) and are integrated with the lens barrel (1). The lens barrel (1) is made of 9Cr18 and is quenched.

4. The one-piece hinged movable lens fine-tuning device according to claim 1, characterized in that: The first flexible hinge (11), the second flexible hinge (12) and the third flexible hinge (13) are connected to the moving ring (1.1) only via three translation blocks, namely the first translation block (11a), the second translation block (12a) and the third translation block (13a), and the rest of the parts are suspended in the air.

5. The one-piece hinge movable lens fine-tuning device according to claim 1, characterized in that: The driving surface (1101a) of the first flexible hinge (11), the driving surface (1201a) of the second flexible hinge (12), and the driving surface (1301a) of the third flexible hinge (13) are all conical, and when the motor is retracted, the front end surface of the ball head rod contacts the driving surface, thereby driving the flexible hinge to deform.

6. The one-piece hinge movable lens fine-tuning device according to claim 1, characterized in that: The ball head end cover is fixed on the flexible hinge, and the inner end surface of the ball head end cover is conical. When the motor is extended, the front end surface of the ball head rod contacts the inner end surface of the ball head end cover, driving the ball head end cover to move, and then driving the flexible hinge to deform.

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