A piezoelectric inertial motor drive module

Abstract

The present application relates to a piezoelectric inertia motor drive module, comprising: a stator and a rotor. Wherein the rotor is mainly composed of a piezoelectric element, a first support body and a second support body. Wherein the first support body and the second support body are respectively located at both ends of the piezoelectric element along the extension and retraction direction and are connected to the piezoelectric element; and the first support body is pivotally connected to the stator through a first hinge, one side of the second support body is provided with a friction device; and a prestress loading device is used to apply a prestress to the second support body along the extension and retraction direction of the piezoelectric element, so as to generate a rotational torque around the pivot axis of the first hinge, and the rotational torque makes the friction device press against the to-be-driven element. The present application also provides a piezoelectric inertia motor.

Description

Technical Field

[0001] This application relates to the field of electromechanical technology, and in particular to a piezoelectric inertial motor drive module. Background Technology

[0002] The piezoelectric effect can be divided into the direct piezoelectric effect and the inverse piezoelectric effect. When certain dielectrics are deformed by an external force along a certain direction, polarization occurs inside them, and opposite charges appear on their two opposing surfaces. When the external force is removed, they return to their uncharged state; this phenomenon is called the direct piezoelectric effect. When the direction of the force changes, the polarity of the charges also changes. Conversely, when an electric field is applied in the polarization direction of the dielectric, these dielectrics will also deform; when the electric field is removed, the deformation of the dielectric disappears; this phenomenon is called the inverse piezoelectric effect.

[0003] Piezoelectric motors, based on the inverse piezoelectric effect of piezoelectric sensing elements, are mainly classified into traveling wave and standing wave types in principle. They typically consist of a stator, a mover, and a prestressing mechanism. Their driving mechanism utilizes the piezoelectric element to convert the input alternating voltage into mechanical deformation of the crystal. The deformation of the piezoelectric sensing element under stress has five basic forms: thickness deformation, length deformation, volume deformation, thickness shear, and plane shear. Through the deformation of the piezoelectric sensing element, the piezoelectric motor uses the inverse piezoelectric effect to convert electrical energy into mechanical energy or mechanical motion, driving the mover to reciprocate. During this reciprocating motion, the prestressing mechanism must apply a force to the mover, creating pressure between the mover and the supporting surface, thus generating friction.

[0004] Most piezoelectric elements used in common piezoelectric inertial motors are thick-polarized co-fired piezoelectric ceramic stacks. As a drive module, this piezoelectric ceramic stack requires a large preload in its direction of motion; in addition, since piezoelectric inertial motors are driven by friction, a pressure also needs to be applied in the vertical direction of motion, which increases the complexity of the piezoelectric inertial motor. Summary of the Invention

[0005] To address the aforementioned problems in the prior art, this application provides a piezoelectric inertial motor drive module, which has a simple structure and low manufacturing cost. A brief overview of exemplary embodiments is provided below to offer a basic understanding of some aspects of various embodiments. It should be noted that this overview is not intended to identify key features of the basic elements or define the scope of the embodiments; its sole purpose is to introduce some concepts in a simple form as a prelude to the more detailed description provided below.

[0006] In a first aspect, an exemplary embodiment of a piezoelectric inertial motor drive module is provided, comprising: a stator; a mover including a piezoelectric element, a first support body, and a second support body, the first support body and the second support body being located at opposite ends of the piezoelectric element along a telescoping direction and connected to the piezoelectric element, the first support body being pivotally connected to the stator via a first hinge, and a friction device being provided on one side of the second support body; and a prestressing loading device for applying prestress to the second support body along the telescoping direction of the piezoelectric element, thereby generating a rotational torque about a pivot axis of the first hinge, the rotational torque causing the friction device to press against the element to be driven.

[0007] In some exemplary embodiments, the prestressing loading device includes an elastic element, one end of which is fixed to a fixed frame and the other end of which abuts against the second support to apply the prestress to the second support.

[0008] In some exemplary embodiments, the mover further includes an elastic element disposed on the side of the second support opposite to the piezoelectric element, through which the prestressing loading device applies the prestress to the second support.

[0009] In some exemplary embodiments, the elastic element includes an elastic structure integrally formed with the second support.

[0010] In some exemplary embodiments, the elastic structure includes a bow-shaped structure, a zigzag structure, or a sawtooth structure extending from the second support.

[0011] In some exemplary embodiments, the elastic element is integrally formed with the first support and the second support, the first support including an extension extending along the telescoping direction of the piezoelectric element on one side of the piezoelectric element, the second support and the elastic element, the extension being connected to the end of the elastic element opposite to the second support.

[0012] In some exemplary embodiments, the friction device includes a friction block for providing a friction surface, the friction block being rotatably connected to one side of the second support via a ball joint.

[0013] In some exemplary embodiments, the piezoelectric element is mainly composed of the first hinge (103), which includes a bearing or a ball joint.

[0014] In some exemplary embodiments, each of the first support and the second support is a conductive support, which is bonded to the piezoelectric element by conductive adhesive.

[0015] In a second aspect, a piezoelectric inertial motor is provided, which includes one or more piezoelectric inertial motor drive modules as described in any one of the above claims.

[0016] When read in conjunction with the accompanying drawings, the drawings illustrate the principles of exemplary embodiments of this application; other features and advantages of exemplary embodiments of this application will also be apparent from the following description of specific embodiments. Attached Figure Description

[0017] Now, by way of non-limiting example, some exemplary embodiments will be described with reference to the accompanying drawings.

[0018] Figure 1 A schematic diagram of the structure of a piezoelectric inertial motor drive module according to an exemplary embodiment of this application is shown;

[0019] Figure 2 A schematic diagram illustrating the operation of a piezoelectric inertial motor drive module according to an exemplary embodiment of this application is shown.

[0020] Figure 3 A schematic diagram of the structure of a piezoelectric inertial motor drive module according to another exemplary embodiment of this application is shown;

[0021] Figure 4 A schematic diagram illustrating the operation of a piezoelectric inertial motor drive module according to another exemplary embodiment of this application is shown.

[0022] Figure 5 A schematic diagram of the structure of a piezoelectric inertial motor drive module according to yet another exemplary embodiment of this application is shown;

[0023] Figure 6 A schematic diagram of the structure of a piezoelectric inertial motor drive module according to another exemplary embodiment of this application is shown;

[0024] Figure 7 A schematic diagram of a piezoelectric inertial motor according to an exemplary embodiment of this application is shown.

[0025] Throughout all the accompanying drawings, the same or similar reference numerals indicate the same or similar elements. Repeated descriptions of the same elements will be omitted.

[0026] Explanation of reference numerals in the attached figures:

[0027] 101-Stator, 102-Motor, 103-Connecting device, 104-Prestressed drive device, 1021-Piezoelectric element, 1022-First support plate, 1023-Second support plate, 1024-Friction device, 105-Element to be driven, 201-Stator, 202-Motor, 203-Connecting device, 204-Prestressed drive device, 2021-Piezoelectric element, 2022-First support plate, 2023-Second support plate, 2024-Friction device, 2025-Elastic element, 205-Element to be driven, 301-Stator, 30 2-Motor, 303-Connecting device, 304-Prestressed driving device, 3021-Piezoelectric element, 3022-First support plate, 3023-Second support plate, 3024a-Spherical hinge, 3024b-Friction block, 305-Element to be driven, 401-Stator, 402-Motor, 403-Connecting device, 404-Prestressed driving device, 4021-Piezoelectric element, 4022-First support plate, 4023-Second support plate, 4024a-Spherical hinge, 4024b-Friction block, 4025-Elastic element, 405-Element to be driven. Detailed Implementation

[0028] Some exemplary embodiments are described in detail below with reference to the accompanying drawings. Specific details are included in the following description to provide a thorough understanding of the various concepts. However, it will be apparent to those skilled in the art that these concepts can be implemented without these specific details. In some cases, well-known structures, components, and techniques are shown schematically to avoid confusion with the described concepts and features.

[0029] It should be understood that although this application may use terms such as "first" and "second" to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from another. For example, a first element may be referred to as a second element without departing from the scope of the exemplary embodiments, and similarly, a second element may be referred to as a first element. Similarly, although several specific implementation details are included in the foregoing discussion, they should not be construed as limiting the scope of this application, but rather as descriptions of features that may be specific to particular embodiments. Certain features described in the context of a single embodiment may also be implemented in combination with that single embodiment. Conversely, various features described in the context of a single embodiment may also be implemented individually or in any suitable sub-combination in multiple embodiments. It should also be understood that terms such as "having," "comprising," and "including" as used in this application do not exclude the presence or addition of one or more other elements or combinations.

[0030] Figure 1 A schematic diagram of a piezoelectric inertial motor drive module 100 according to an exemplary embodiment of this application is shown. (Reference) Figure 1 The piezoelectric inertial motor drive module 100 includes a stator 101 and a mover 102. The stator 101 is a fixed element; during the operation of the piezoelectric inertial motor drive module 100, the stator 101 will not be displaced under the periodic force of the mover 102. Specifically, the mover 102 mainly consists of a piezoelectric element 1021, a first support body 1022, and a second support body 1023. The first support body 1022 and the second support body 1023 are located at both ends of the piezoelectric element 1021 along the extension / retraction direction and are connected to the piezoelectric element 1021. When the piezoelectric inertial motor drive module 100 operates, the deformation of the piezoelectric element 1021 after being energized generates an output force, causing the distance between the first support body 1022 and the second support body 1023 to change with the extension / retraction deformation of the piezoelectric element 1021. The first support 1022 is pivotally connected to the stator 101 via the first hinge 103. A friction device 1024 and a prestressing device 104 are provided on one side of the second support 1023 to apply prestress to the second support 1023 along the extension / retraction direction of the piezoelectric element 1021, thereby generating a rotational torque about the pivot axis of the first hinge 103. This rotational torque causes the friction device 1024 to press against the driven element 105. This rotational torque can be decomposed relative to the friction device 1024 to obtain the torque component that causes the friction device 1024 to press against the driven element 105. Under the action of this torque component, the driven element 105 is subjected to force, thus undergoing macroscopic motion.

[0031] Preferably, the piezoelectric element 1021 can adopt a piezoelectric sheet structure, such as a piezoelectric stack; more preferably, the piezoelectric element 1021 can also be a stack of piezoelectric ceramic sheets. When the piezoelectric element 1021 is composed of a stack of piezoelectric ceramic sheets, the piezoelectric ceramic sheets therein are polarized along the thickness direction; and the multiple piezoelectric ceramic sheets forming the stack are arranged parallel to each other along their extension and contraction directions, and connected to the first support 1022 and the second support 1023. In principle, ferroelectric ceramics in their natural state carry an unbalanced positive and negative charge in the crystal, which causes a bias charge, that is, spontaneous polarization. With the application of a high DC voltage, the polar axes generated by spontaneous polarization align in the same direction, and even if the voltage is removed, the polar axes will not disappear. The process of aligning the spontaneously polarized polar axes is called polarization. If polarization is applied to ferroelectric ceramics, piezoelectric ceramics are generated. Multiple piezoelectric ceramic sheets stacked together can generate greater displacement and force, forming a piezoelectric ceramic sheet stack.

[0032] Preferably, the first hinge 103 can be a bearing. Sliding friction leads to significant energy loss and noise. In some example embodiments, more preferably, the first hinge 103 can also be a ball joint, which can reduce frictional losses.

[0033] In some example embodiments, the piezoelectric element 1021 can be made of a variety of piezoelectric materials. Common piezoelectric materials include organic piezoelectric materials, such as polyvinylidene fluoride (PVDF). The piezoelectric properties of organic piezoelectric materials can be further improved by copolymerization, blending, or doping. For example, PVDF can be blended with polymethyl methacrylate (PMMA) to form a multiphase structure to improve the temperature stability of the piezoelectric polymer.

[0034] like Figure 1 As shown, a first support 1022 and a second support 1023 are respectively provided on both sides of the piezoelectric element 1021 in the extension direction to provide support for the piezoelectric element 1021. The first support 1022 and the second support 1023 can be made of metal plates or other materials with conductive properties, such as organic conductive materials. Since the piezoelectric ceramic sheet stack is used to drive the movement of the support, the deformation of the piezoelectric ceramic stack needs to generate a certain amount of force applied to the support.

[0035] In some example embodiments, the piezoelectric element 1021 can be fixed to the surface in contact with the first support 1022 and the second support 1023 by adhesive bonding, ensuring the flatness of the piezoelectric element 1021. In some example embodiments, the flatness of the end face of the piezoelectric ceramic sheet stack can even reach the micrometer level.

[0036] Figure 2 A schematic diagram illustrating the operation of a piezoelectric inertial motor drive module according to an exemplary embodiment of this application is shown below; in conjunction with... Figure 2 Briefly describe the working principle of the piezoelectric inertial motor drive module.

[0037] When the piezoelectric inertial motor drive module is in state A, the prestress loading device 104 abuts against the second support body 1023 of the mover 102. The prestress loading device 104 applies prestress to the second support body 1023 along the extension and retraction direction of the piezoelectric element 1021, thereby generating a rotational torque about the pivot axis of the first hinge 103 connected to the stator 101, causing the friction device 1024 to press against the driven element 105, generating a certain pressure between the friction device and the driven element.

[0038] When the piezoelectric inertial motor drive module is in state B, the piezoelectric element 1021 between the first support 1022 and the second support 1023 is slowly energized. Under the action of the inverse piezoelectric effect, the piezoelectric element 1021 deforms and stretches, and under the action of friction, it drives the driven element 105 to undergo a certain displacement through the friction device 1024.

[0039] When the piezoelectric inertial motor drive module is in state C, the voltage applied to the piezoelectric element 1021 between the first support 1022 and the second support 1023 is quickly cut off, causing the piezoelectric element 1021 to retract rapidly when the inverse piezoelectric effect disappears, which in turn causes the second support 1023 and the friction device 1024 to retract rapidly as well. At this time, the driven element 105 does not retract with the piezoelectric ceramic due to the existence of inertia.

[0040] In state C, the piezoelectric drive module has returned to the state in state A, while the driven element 105 has undergone a certain displacement. Thus, by repeating the process from state B to state C, the macroscopic movement of the drive element 105 can be achieved.

[0041] Figure 3 A schematic diagram of the structure of a piezoelectric inertial motor drive module 200 according to another exemplary embodiment of this application is shown. (Reference) Figure 3 The piezoelectric inertial motor drive module 200 includes a stator 201 and a mover 202. The stator 201 is a fixed element; during operation, the stator 201 does not shift under the periodic force of the mover 202. Specifically, the mover 202 mainly consists of a piezoelectric element 2021, a first support 2022, and a second support 2023. The first support 2022 and the second support 2023 are located at both ends of the piezoelectric element 2021 along the extension / retraction direction and are connected to the piezoelectric element 2021. Figure 1 Compared to the piezoelectric inertial motor drive module 100 shown, the piezoelectric inertial motor drive module 200 differs in that: the mover 202 further includes an elastic element 2025 disposed on the side opposite to the piezoelectric element 2021 of the second support 2023, and the prestressing loading device 204 applies prestress to the second support 2023 through the elastic element 2025; and the first support 2022 is pivotally connected to the stator 201 through a ball joint 203.

[0042] The elastic element 2025 may include an elastic structure integrally formed with the second support 2023, making it part of the mover 202; preferably, the elastic structure of the elastic element 2025 may be an arc-shaped structure extending from the second support 2023. In some example embodiments, the elastic structure of the elastic element 2025 may also be a zigzag structure or a sawtooth structure extending from the second support 2023. Figure 3As shown, the elastic element 2025 can be integrally formed with the first support 2022 and the second support 2023; and the first support 2022 further includes an extension portion extending along the extension direction of the piezoelectric element 2021 on one side of the piezoelectric element 2021, the second support 2023 and the elastic element 2025, the extension portion being connected to the end of the elastic element opposite to the second support 2023.

[0043] When the piezoelectric inertial motor drive module 200 operates, the deformation of the piezoelectric element 2021 after being energized generates an output force, causing the distance between the first support 2022 and the second support 2023 to change with the expansion and contraction of the piezoelectric element 2021. A friction device 2024 is provided on one side of the second support 2023. The prestressing loading device 204 applies prestress to the second support 2023 along the expansion and contraction direction of the piezoelectric element 2021 through the elastic element 2025, thereby generating a rotational torque about the pivot axis of the ball joint 203. This rotational torque causes the friction device 2024 to press against the driven element 205. This rotational torque can be decomposed relative to the friction device 2024 to obtain the torque component that causes the friction device 2024 to press against the driven element 205. Under the action of this torque component, the driven element 205 is subjected to force, thereby undergoing macroscopic motion.

[0044] It should be understood that in the piezoelectric inertial motor drive module 200 of the embodiment, the elastic element 2025 is integrally formed with the second support 2023, becoming part of the mover 202. The prestressing loading device 204 can be a device without an elastic structure, such as a screw. However, in some other example embodiments, the prestressing loading device may also include an elastic element, such as a spring; one end of the elastic element is fixed to a fixed frame, and the other end abuts against the second support to apply prestress to the second support. In this case, the prestressing loading device containing the elastic element applies prestress to the second support along the extension and contraction direction of the piezoelectric element, thereby generating a rotational torque about the pivot axis of the ball joint. This rotational torque can be decomposed relative to the friction device to obtain the torque component (not shown) that causes the friction device to press against the driven element.

[0045] Figure 4 A schematic diagram illustrating the operation of a piezoelectric inertial motor drive module according to another exemplary embodiment of this application is shown. The following is in conjunction with... Figure 4 Briefly describe the working principle of a piezoelectric inertial motor drive module in which the elastic element and the second support are integrally formed and become part of the mover.

[0046] When the piezoelectric inertial motor drive module is in state a, the prestress loading device 204 abuts against the second support 2023 of the mover 202. The prestress loading device 204 applies prestress to the elastic element 2025 along the extension and retraction direction of the piezoelectric element 2021, thereby generating a rotational torque around the pivot axis of the ball joint 203 connected to the stator 201, causing the friction device 2024 to press against the driven element 205, generating a certain pressure between the friction device and the driven element.

[0047] When the piezoelectric inertial motor drive module is in state b, the piezoelectric element 2021 between the first support 2022 and the second support 2023 is slowly energized. Under the action of the inverse piezoelectric effect, the piezoelectric element 2021 deforms and stretches, and under the action of friction, it drives the driven element 205 to undergo a certain displacement through the friction device 2024.

[0048] When the piezoelectric inertial motor drive module is in state c, the voltage applied to the piezoelectric element 2021 between the first support 2022 and the second support 2023 is quickly cut off, causing the piezoelectric element 2021 to retract rapidly when the inverse piezoelectric effect disappears, which in turn causes the second support 2023 and the friction device 2024 to retract rapidly as well. At this time, the driven element 205 does not retract with the piezoelectric ceramic due to the existence of inertia.

[0049] In state c, the piezoelectric drive module has returned to the state in state a, while the driven element 205 has already undergone a certain displacement. Thus, by repeating the process from state b to state c, the macroscopic movement of the drive element 205 can be achieved.

[0050] Figure 5 A schematic diagram of a piezoelectric inertial motor drive module 300 according to yet another exemplary embodiment of this application is shown. (Reference) Figure 5 The piezoelectric inertial motor drive module 300 includes a stator 301 and a mover 302. The stator 301 is a fixed element; during operation, the stator 301 does not shift under the periodic force of the mover 302. Specifically, the mover 302 mainly consists of a piezoelectric element 3021, a first support 3022, and a second support 3023. The first support 3022 and the second support 3023 are located at both ends of the piezoelectric element 3021 along the extension / retraction direction and are connected to the piezoelectric element 3021. Figure 1 Compared to the piezoelectric inertial motor drive module 100 shown, the piezoelectric inertial motor drive module 300 differs in that the friction device further includes a friction block 3024b for providing a friction surface. The friction block is rotatably connected to one side of the second support 3023 via a ball joint 3024a. In this case, the ball joint 3024a and the friction block 3024b cooperate to reduce frictional losses.

[0051] When the piezoelectric inertial motor drive module 300 operates, the deformation of the piezoelectric element 3021 after being energized generates an output force, causing the distance between the first support 3022 and the second support 3023 to change with the expansion and contraction of the piezoelectric element 3021. The prestressing loading device 304 applies prestress to the second support 3023 along the expansion and contraction direction of the piezoelectric element 3021, thereby generating a rotational torque about the pivot axis of the first hinge 303. This rotational torque causes the ball joint 3024a to press against the friction block 3024b and the driven element 305. This rotational torque can be decomposed relative to the friction block 3024b to obtain the torque component that causes the friction block 3024b to press against the driven element 305. Under the action of this torque component, the driving element 305 is subjected to force, thereby undergoing macroscopic motion.

[0052] Figure 6 A schematic diagram of a piezoelectric inertial motor drive module 400 according to another exemplary embodiment of this application is shown. (Refer to...) Figure 5 The piezoelectric inertial motor drive module 400 includes a stator 401 and a mover 402. The stator 401 is a fixed element; during operation, the stator 401 does not shift under the periodic force of the mover 402. Specifically, the mover 402 mainly consists of a piezoelectric element 4021, a first support 4022, and a second support 4023. The first and second supports 4022 are located at opposite ends of the piezoelectric element 4021 along its extension direction and are connected to the piezoelectric element 4021. A prestressing device 404 applies prestress to the second support 4023 via an elastic element 4025; and the first support 4022 is pivotally connected to the stator 201 via a ball joint 403. The elastic element 4025 may include an arc-shaped elastic structure integrally formed with the second support 4023, making it part of the mover 402. Figure 1 Compared to the piezoelectric inertial motor drive module 100 shown, the piezoelectric inertial motor drive module 400 differs in that the friction device further includes a friction block 4024b for providing a friction surface, which is rotatably connected to one side of the second support 4023 via a ball joint 4024a.

[0053] When the piezoelectric inertial motor drive module 400 operates, the deformation of the piezoelectric element 4021 after being energized generates an output force, causing the distance between the first support 4022 and the second support 4023 to change with the expansion and contraction of the piezoelectric element 4021. The prestressing loading device 404 applies prestress to the second support 4023 along the expansion and contraction direction of the piezoelectric element 4021 through the elastic element 4025, thereby generating a rotational torque about the pivot axis of the ball joint 403. This rotational torque causes the ball joint 4024a to press against the friction block 4024b and the driven element 405. This rotational torque can be decomposed relative to the friction block 4024b to obtain the torque component that causes the friction block 4024b to press against the driven element 405. Under the action of this torque component, the driving element 405 is subjected to force, thereby undergoing macroscopic motion.

[0054] Figure 7 A schematic diagram of a piezoelectric inertial motor according to an exemplary embodiment of this application is shown. Specifically, the piezoelectric inertial motor may include one or more piezoelectric inertial motor drive modules disclosed in this application. Simple modifications made by those skilled in the art based on the technical solutions disclosed in this application without inventive effort still fall within the scope of protection claimed in this application.

[0055] Although the subject matter has been described in terms of specific structural features and / or methodological actions, it should be understood that the subject matter defined in the appended claims is not limited to the specific features or actions described above. Rather, the specific features and actions described above are disclosed as examples of implementing the claims.

Claims

1. A piezoelectric inertial motor drive module, characterized in that... include: stator; The mover includes a piezoelectric element, a first support body, and a second support body. The first support body and the second support body are located at both ends of the piezoelectric element along the extension direction and are connected to the piezoelectric element. The first support body is pivotally connected to the stator via a first hinge. A friction device is provided on one side of the second support body. as well as A prestressing loading device is used to apply prestress to the second support body along the extension and retraction direction of the piezoelectric element, thereby generating a rotational torque about the pivot axis of the first hinge, the rotational torque causing the friction device to press against the element to be driven. The mover also includes an elastic element disposed on the opposite side of the piezoelectric element of the second support, and the prestressing loading device applies the prestress to the second support through the elastic element, wherein the elastic element includes an elastic structure integrally formed with the second support.

2. The piezoelectric inertial motor drive module according to claim 1, characterized in that, The prestressing loading device includes an elastic element, one end of which is fixed to a fixed frame and the other end of which abuts against the second support body to apply the prestress to the second support body.

3. The piezoelectric inertial motor drive module according to claim 1, characterized in that, The elastic structure includes a bow-shaped structure, a zigzag structure, or a sawtooth structure extending from the second support.

4. The piezoelectric inertial motor drive module according to claim 1, characterized in that, The elastic element is integrally formed with the first support and the second support. The first support includes an extension that extends along the telescoping direction of the piezoelectric element to one side of the piezoelectric element, the second support, and the elastic element. The extension is connected to the end of the elastic element opposite to the second support.

5. The piezoelectric inertial motor drive module according to claim 1, characterized in that, The friction device includes a friction block for providing a friction surface, the friction block being rotatably connected to one side of the second support via a ball joint.

6. The piezoelectric inertial motor drive module according to claim 1, characterized in that, The first hinge includes a bearing or a ball joint.

7. The piezoelectric inertial motor drive module according to claim 1, characterized in that, Each of the first support and the second support is a conductive support, which is bonded to the piezoelectric element by conductive adhesive.

8. A piezoelectric inertial motor, characterized in that, It includes one or more piezoelectric inertial motor drive modules as described in any one of claims 1-7.

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