Suction and clamping integrated micro gripper

Abstract

The present invention discloses a suction-clamping integrated micro-gripper, comprising: an air inlet seat, a first vent hole and a second vent hole are arranged in the air inlet seat; a clamping assembly, the clamping assembly comprises an air bag arranged on the air inlet seat at one end, a first clamping arm integrally formed at the other end of the air bag, the air bag is connected to the first vent hole, and the first clamping arm has a first clamping surface; an adsorption assembly, the adsorption assembly comprises a support body arranged on the air inlet seat at one end, a second clamping arm integrally formed at the other end of the support body, the second clamping arm has a second clamping surface, the second clamping surface is arranged opposite to the first clamping surface, an airway penetrating the second clamping surface is arranged in the support body and the second clamping arm, and the airway is connected to the second vent hole. The present invention integrates the clamping and adsorption functions into one, overcomes the possibility of cells slipping in the liquid during the process of clamping cells, improves the stability of clamping, and can avoid the influence of adhesion during the process of releasing cells, and is easy to operate.

Description

Technical Field

[0001] The present invention relates to the field of micro-operation technology, and in particular to a suction-and-clamping integrated micro-gripper. Background Art

[0002] The rapid development of biological sciences has led to an increasing demand for manipulating entities at the micro-nanoscale. In general, the manipulation of biological objects, such as single cells, embryos, etc., can be divided into contact and non-contact. Non-contact technology is mainly based on optics, but this technology requires complex and expensive optical settings, and exposure to optical radiation may have long-term negative effects on the manipulated micro-objects. Grippers and micropipettes are commonly used contact technologies for manipulating microorganisms, but grippers require lower operating proficiency, are easier to control, more stable to operate, have more uniform stress on the manipulated object, and have better versatility. Microgrippers are the interface between the microgripper system and the clamped object, and the quality of their performance will greatly affect the actual working efficiency of micro-electromechanical systems (MEMS). However, existing microgrippers are difficult to operate and control in liquids, and will damage the biological environment and interfere with the organism. In addition, as the size of the object of the microgripper gradually decreases, the scale effect in the microscopic adhesion becomes more significant. Under microscopic conditions, the surface area ratio of the object continues to increase, and the adhesion gradually replaces inertial forces such as gravity to become the main force. The existence of adhesion brings great difficulties to the operation of tiny objects. Summary of the invention

[0003] In view of the shortcomings of the prior art, the object of the present invention is to provide a suction and clamping integrated micro-gripper.

[0004] In order to achieve the above purpose, the technical solution provided by an embodiment of the present invention is as follows:

[0005] A suction-and-clamping integrated micro-gripper, comprising:

[0006] An air intake seat, wherein a first air vent and a second air vent are provided in the air intake seat;

[0007] A clamping assembly, the clamping assembly comprising an airbag with one end disposed on the air inlet seat, and a first clamping arm integrally formed at the other end of the airbag, the airbag being connected to the first vent hole, and the first clamping arm having a first clamping surface;

[0008] An adsorption component, the adsorption component includes a support body with one end arranged on the air inlet seat, and a second clamping arm integrally formed at the other end of the support body, the second clamping arm has a second clamping surface, the second clamping surface is arranged opposite to the first clamping surface, and an air duct passing through the second clamping surface is arranged in the support body and the second clamping arm, and the air duct is connected to the second air vent.

[0009] As a further improvement of the present invention, a reinforcing body is provided between the airbag and the supporting body, the reinforcing body is provided on the air inlet seat, the reinforcing body is communicated with the airbag, and the reinforcing body is connected with the supporting body.

[0010] As a further improvement of the present invention, the first clamping arm is arranged to be inclined toward the second clamping arm.

[0011] As a further improvement of the present invention, the first clamping surface and the second clamping surface are respectively located on both sides of the center line of the reinforcement body, and one end of the air passage away from the air inlet seat is inclined toward the first clamping arm.

[0012] As a further improvement of the present invention, the first clamping arm includes a first straight portion and a first inclined portion, the first straight portion is formed on the airbag, the first inclined portion is inclined toward the second clamping arm, and the inclination angle of the first inclined portion is 10-30°.

[0013] As a further improvement of the present invention, the air channel is perpendicular to the air inlet seat, and the first clamping surface and the second clamping surface are both located on the same side of the center line of the reinforcement body.

[0014] As a further improvement of the present invention, the first clamping arm includes a second straight portion and a second inclined portion, the second straight portion is formed on the airbag, the second inclined portion is inclined toward the second clamping arm, and the inclination angle of the second inclined portion is 36-56°.

[0015] As a further improvement of the present invention, a first ventilation portion is connected between the reinforcement body and the airbag, a second ventilation portion is connected between the reinforcement body and the support body, the second ventilation portion is connected to the reinforcement body, and the first ventilation portion and the second ventilation portion both extend to the air inlet seat.

[0016] As a further improvement of the present invention, the smaller the wall thickness of the airbag is, the larger the distance between the two opposite inner walls of the airbag, the distance between the reinforcement body and the airbag, and the distance between the reinforcement body and the support body are.

[0017] As a further improvement of the present invention, the first clamping surface is concave, the first clamping surface is provided with a liquid leakage channel, and the second clamping surface is provided with a recessed portion.

[0018] The beneficial effects of the present invention are:

[0019] (1) The present invention combines the clamping and adsorption functions into one, thus overcoming the possibility of cells slipping in the liquid during the clamping process, improving the stability of clamping, and enabling fine manipulation of biological microstructures. At the same time, it can create positive pressure in the airway during the cell release process, and blow the cells away from the clamping arm by airflow to avoid the influence of adhesion, thereby improving the convenience of operation.

[0020] (2) The first clamping arm and the airbag are integrally formed, and the support body and the second clamping arm are integrally formed, which improves the stability of the connection between the components, improves the printing yield rate, and reduces the alignment deviation between the end of the first clamping arm and the end of the second clamping arm, so that the end of the first clamping arm and the end of the second clamping arm are well aligned and the clamping stability is good.

[0021] (3) The structure is very compact, making it easy to operate in a small space.

[0022] (4) The structural layout of the present invention can be well printed using high-precision micro-nano 3D printing technology. The overall size is about millimeters, miniaturization is achieved, the clamped object is about microns, the opening and closing resolution can reach sub-micron, the clamping accuracy is high, and it is convenient for fine operation of tiny objects. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying creative work.

[0024] Figure 1 It is a structural schematic diagram of a preferred embodiment 1 of the present invention;

[0025] Figure 2 It is a front view of a preferred embodiment 1 of the present invention;

[0026] Figure 3 It is a right side view of the preferred embodiment 1 of the present invention;

[0027] Figure 4 A vertical cross-sectional view of a preferred embodiment 1 of the present invention;

[0028] Figure 5 It is a transverse cross-sectional view of a preferred embodiment 1 of the present invention;

[0029] Figure 6 It is a structural schematic diagram of the first clamping surface of the first clamping arm of the preferred embodiment 1 of the present invention;

[0030] Figure 7It is a structural schematic diagram of the second clamping surface of the second clamping arm of the preferred embodiment 1 of the present invention;

[0031] Figure 8 This is a schematic structural diagram of the first clamping arm in the open position in the preferred embodiment 1 of the present invention;

[0032] Fig. 9 This is a simulation diagram of the overall deformation of the first clamping arm of the preferred embodiment 1 of the present invention;

[0033] Fig.10 This is a deformation simulation diagram of the first clamping arm along the X-axis of the preferred embodiment 1 of the present invention;

[0034] Fig.11 This is a simulation diagram of equivalent elastic strain of the first preferred embodiment of the present invention;

[0035] Fig.12 This is an equivalent stress simulation diagram of the preferred embodiment 1 of the present invention;

[0036] Fig.13 It is a structural schematic diagram of a preferred embodiment 2 of the present invention;

[0037] Fig.14 It is a front view of a second preferred embodiment of the present invention;

[0038] Fig.15 It is a right side view of the second preferred embodiment of the present invention;

[0039] Fig.16 It is a vertical cross-sectional view of a second preferred embodiment of the present invention;

[0040] Fig.17 It is a transverse cross-sectional view of a second preferred embodiment of the present invention;

[0041] Fig.18 It is a structural schematic diagram of the first clamping surface of the first clamping arm of the preferred embodiment 1 of the present invention;

[0042] Fig.19 It is a structural schematic diagram of the second clamping surface of the second clamping arm of the preferred embodiment 1 of the present invention;

[0043] Fig. 20 This is a schematic structural diagram of a preferred embodiment 2 of the present invention with the first clamping arm opened;

[0044] Fig.21 This is a simulation diagram of the overall deformation of the first clamping arm of the second preferred embodiment of the present invention;

[0045] Fig. 22 This is a deformation simulation diagram of the first clamping arm along the X-axis of the preferred embodiment 2 of the present invention;

[0046] Fig.23This is a simulation diagram of equivalent elastic strain of the second preferred embodiment of the present invention;

[0047] Fig.24 This is an equivalent stress simulation diagram of the preferred embodiment 2 of the present invention. DETAILED DESCRIPTION

[0048] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0049] Embodiment 1

[0050] See also Figure 1-Figure 7 The embodiment of the present application discloses an integrated suction and clamping micro-gripper, comprising: an air inlet seat 1, in which a first air vent 11 and a second air vent 12 are arranged; a clamping component 2, wherein the clamping component 2 comprises an air bag 21 with one end arranged on the air inlet seat 1, and a first clamping arm 22 integrally formed at the other end of the air bag 21, wherein the air bag 21 is connected to the first air vent 11, and the first clamping arm 22 has a first clamping surface 221; an adsorption component 3, wherein the adsorption component 3 comprises a support body 31 with one end arranged on the air inlet seat 1, and a second clamping arm 32 integrally formed at the other end of the support body 31, wherein the second clamping arm 32 has a second clamping surface 321, wherein the second clamping surface 321 is arranged opposite to the first clamping surface 221, and an airway 33 penetrating the second clamping surface 321 is arranged in the support body 31 and the second clamping arm 32, wherein the airway 33 is connected to the second air vent 12.

[0051] Preferably, a reinforcing body 4 is provided between the airbag 21 and the supporting body 31. The reinforcing body 4 is provided on the air inlet seat 1, and the reinforcing body 4 is in communication with the airbag 21 and connected to the supporting body 31. Airflow can flow between the reinforcing body 4 and the airbag 21. When the airbag 21 and the reinforcing body 3 expand and deform, since the reinforcing body 3 is connected to the supporting body 31, the airbag 21 and the reinforcing body 4 are supported by the supporting body 31, thereby improving the stability of deformation of the airbag 21 and the reinforcing body 4, thereby improving the stability of movement of the first clamping arm 22.

[0052] Preferably, a first vent 5 is connected between the reinforcement body 4 and the airbag 21, a second vent 6 is connected between the reinforcement body 4 and the support body 31, the second vent 6 is connected to the reinforcement body 4, and the first vent 5 and the second vent 6 both extend to the air inlet seat 1. Airflow can flow between the airbag 21, the first vent 5, the reinforcement body 4, and the second vent 6.

[0053] Preferably, the first clamping arm 22 is tilted toward the second clamping arm 32. By tilting the first clamping arm 22, the distance between the first clamping arm 22 and the second clamping arm 32 is changed, the structural requirements for the second clamping arm 32 are reduced, the smoothness of ventilation of the airway 33 in the second clamping arm 32 is improved, and the first clamping arm 22 and the second clamping arm 32 are well aligned and the clamping stability is good.

[0054] The first clamping surface 221 and the second clamping surface 321 are respectively located on both sides of the center line of the reinforcement body 4, thereby improving the alignment between the first clamping arm 22 and the second clamping arm 32. The end of the air duct 33 away from the air inlet seat 1 is tilted toward the first clamping arm 22. At the same time, the air duct 33 is tilted close to the center line of the reinforcement body 4, which can reduce the tilt angle required for the first clamping arm 22 during clamping alignment, thereby improving the stability of the first clamping arm 22 and improving the alignment between the first clamping arm 22 and the second clamping arm 32.

[0055] The first clamping arm 22 includes a first straight portion 222 and a first inclined portion 223, which reduce the volume of the first clamping arm 22. The first straight portion 222 is formed on the airbag 21, and the first inclined portion 223 is inclined toward the second clamping arm 32. The inclination angle A of the first inclined portion 223 is 10-30°, so that the inclination angle of the first inclined portion 223 is moderate, ensuring the stability of the first inclined portion 223 while ensuring the alignment between the first inclined portion 223 and the second clamping arm 32, thereby ensuring the stability of clamping.

[0056] See also Figure 6 , Figure 7 The first clamping surface 221 is concave, and the first clamping surface 221 is provided with a first liquid leakage channel 2211, and the second clamping surface 321 is provided with a first recessed portion 3211. The provision of the first liquid leakage channel 2211 facilitates the liquid to pass through the first liquid leakage channel 2211 during clamping, thereby avoiding the accumulation of liquid and the possibility of the cell slipping in the liquid during the clamping process. The first clamping surface 221 and the first recessed portion 3211 cooperate with each other to form a receiving hole during clamping, thereby facilitating the cell to be received in the receiving hole, and further improving the stability and success rate of cell clamping.

[0057] In order to avoid adhesion during printing and ensure the printing yield, it is preferred that the smaller the wall thickness of the airbag 21, the larger the distance between the two opposite inner walls of the airbag 21, the distance between the reinforcement body 4 and the airbag 21, and the distance between the reinforcement body 4 and the support body 31.

[0058] Preferably, the wall thickness of the airbag 21 is 15-25μm, the spacing between the two opposite inner walls of the airbag 21 is 65-110μm, the spacing between the reinforcement body 4 and the airbag 21, and the spacing between the reinforcement body 4 and the support body 31 are both 65-90μm, which can avoid the rupture of the airbag 21, ensure that the airbag 21 can be printed and formed, improve the yield rate, and at the same time ensure that the deformation of the airbag 21 is large so that the driving stroke is large.

[0059] The airbag 21 has a first side portion 211 and a second side portion 212 opposite to the first side portion 211. The wall thickness d1 of the first side portion 211 is smaller than the wall thickness d2 of the second side portion 212. The wall thickness d1 of the first side portion 211 is 15-25 μm. The spacing d3 between the inner wall of the first side portion 211 and the inner wall of the second side portion 212 is 65-110 μm. The spacing d4 between the reinforcement body 4 and the first side portion 211 and the spacing d5 between the reinforcement body 4 and the support body 31 are both 65-90 μm. In order to ensure stable deformation and large deformation of the airbag 21, the wall thickness d1 of the first side portion 211 is preferably 20 μm. In order to better avoid adhesion between the reinforcement body 4 and the airbag 21, and between the reinforcement body 4 and the support body 31, and to ensure the compactness of the structure, the spacing d3 between the inner side wall of the first side portion 211 and the inner side wall of the second side portion 212 is 100 μm, and the spacing d4 between the reinforcement body 4 and the first side portion 211, and the spacing d5 between the reinforcement body 4 and the support body 31 are both 90 μm. The wall thickness d2 of the second side portion 212 is preferably 20-270 μm. It is further preferred that the wall thickness d2 of the second side portion 212 is 70 μm, so that the end of the first clamping arm 22 is well aligned when closed, the clamping force is improved, and the opening and closing amount of the first clamping arm 22 can be ensured, the volume of the micro-gripper is reduced, the material consumption is reduced, and the cost is reduced. Preferably, the wall thickness d6 of the reinforcing body 4 is 20 μm, and the spacing d7 between the two opposite side walls of the reinforcing body 4 is 100 μm. The supporting body 31 has a third side portion 311 and a fourth side portion 312 opposite to the third side portion 311, the wall thickness d8 of the third side portion 311 is 30 μm, the wall thickness d9 of the fourth side portion 312 is 70 μm, and the aperture d10 of the air channel 33 is 100 μm.

[0060] Preferably, the cross section of the airbag 21 is rectangular, which increases the deformation of the airbag 21 , thereby increasing the driving stroke of the airbag 21 and increasing the opening and closing amount of the first clamping arm 22 .

[0061] See also Figure 4The first vent hole 11 includes a first vent port 111, a first reduced diameter hole 112 and a first mounting hole 113 which are connected in sequence, the first vent port 111 is connected to the airbag 21, the second vent hole 12 includes a second vent port 121, a second reduced diameter hole 122 and a second mounting hole 123 which are connected in sequence, and the second vent port 121 is connected to the air passage 33. The first mounting hole 113 and the second mounting hole 123 are respectively used for inserting and assembling two air pipes, and the two air pipes are connected to an external charging and discharging air source. The first reduced diameter hole 112 and the second reduced diameter hole 122 are set to pre-tighten the two air pipes inserted into the first mounting hole 113 and the second mounting hole 123, respectively. The two air pipes respectively seal the connection between the first mounting hole 113 and the first reduced diameter hole 112, and the connection between the second mounting hole 123 and the second reduced diameter hole 122, so as to avoid the glue from flowing into the first vent 111 and the second vent 121 and blocking the first vent 111 and the second vent 121 when glue is used to fix the air pipe, thereby ensuring the smoothness of ventilation. Specifically, the first vent 111 faces and is connected to the first vent 5 and the airbag 21, and the second vent 121 faces and is connected to the airway 33.

[0062] The micro-gripper of this embodiment is printed by a micro-nano 3D printer based on sub-pixel scanning technology (SMS) and light-curing initiation principle. Preferably, a micro-nano 3D printer of the MP series of Prismlab is used, and the model may be MP-36-3L or MP-200-17DL. The parameters of the 3D printers of the MP-36-3L and MP-200-17DL models are shown in Table 1. Preferably, the MP-36-3L model is used, with a printing accuracy of 3.2 μm and a printing resolution of 1.6 μm, which improves the printing quality and yield rate.

[0063] Table 1 Parameters of micro-nano 3D printer

[0064]

[0065] In order for the micro-gripper to be used in biological operations and to provide sufficient deformation to drive the first clamping arm 22 to open without rupturing the airbag 21, it is necessary to select the molding material. The material needs to be biocompatible and have a low elastic modulus. The preferred materials are shown in Table 2.

[0066] Table 2 Selected material parameters

[0067]

[0068] The micro-gripper of this embodiment has a length L1 of 1.8 mm, a width W1 of 1.8 mm, a height H1 of 3.24 mm, and a height H2 of 4.54 mm.

[0069] When in use, when the distance between the first clamping surface 221 and the second clamping surface 321 is greater than or equal to the size of the clamped object in the natural state, the clamped object is stably adsorbed and clamped by generating negative pressure in both the airbag 21 and the airway 33; if the distance between the first clamping surface 221 and the second clamping surface 321 is less than the size of the clamped object in the natural state, the clamped object is stably adsorbed and clamped by generating positive pressure in the airbag 21 and negative pressure in the airway 33. The air pressure control in the airbag 21 and the airway 33 can be respectively arranged by setting a syringe connected to the corresponding air pipe, and the air pressure in the airbag 2 and the airway 33 is changed by pushing and pulling the piston of the corresponding syringe. The control accuracy of the opening and closing amount of the first clamping arm 22 can reach 1μm, but it is not limited to this method, and other control structures that can change the air pressure in the airbag 2 and the airway 33 are also possible.

[0070] The airbag 21 of the micro-gripper is inflated so that the first clamping arm 22 is opened. Figure 8 The micro-gripper of this embodiment is simulated below, and the simulation results are all based on the results obtained under the pressure drive of one atmosphere. The simulation diagram is shown in Figure 9-12 In practical applications, when the driving pressure is greater than one atmosphere, the amount of opening and closing will also increase.

[0071] Fig. 9 Reflecting the total deformation of the first clamping arm 22, the maximum deformation is 158.15 μm. Fig.10 It is reflected that the maximum deformation along the X-axis is 131.04 μm. Fig.11 It reflects that the maximum equivalent elastic strain is 0.043. When the tension is large enough, that is, Fig. 9 and Fig.10 When the maximum value of is large enough, the airbag 21 will not rupture. Fig.12 This reflects that the maximum equivalent stress is 100.75 MPa, and the airbag 21 will not rupture.

[0072] Embodiment 2

[0073] See also Figure 13-Figure 19 The difference between this embodiment and the first embodiment is that:

[0074] The airway 33 is perpendicular to the air inlet seat 1, and the airway 33 is a straight airway. The first clamping surface 221 and the second clamping surface 321 are both located on the same side of the center line of the reinforcement body 4. In the sub-pixel scanning light-curing micro-nano 3D printing technology, if the narrow airway structure has a large vertical angle, it will cause airway obstruction due to the scattering effect during exposure. Therefore, a vertically straight airway structure is adopted to make the airway 33 less likely to be blocked, thereby improving the yield rate. At the same time, the first clamping surface 221 and the second clamping surface 321 are both located on the same side of the center line of the reinforcement body 4, and the matching spacing between the first clamping surface 221 and the second clamping surface 321 is reduced to ensure stable clamping. The first clamping arm 22 includes a second straight portion 226 and a second inclined portion 227, which reduce the volume of the first clamping arm 22. The second straight portion 226 is formed on the airbag 21, and the second inclined portion 227 is inclined toward the second clamping arm 32. The inclination angle B of the second inclined portion 227 is 36-56°, so that the inclination angle of the second inclined portion 227 is moderate, which facilitates the second inclined portion 227 and the second clamping arm 32 to clamp the operated object.

[0075] Preferably, the first clamping surface 221 is provided with a second liquid leakage channel 2212, and the second clamping surface 321 is provided with a second concave cavity 3212. The second liquid leakage channel 2212 is provided to facilitate the liquid to pass through the second liquid leakage channel 2212 during clamping, thereby avoiding the accumulation of liquid, further avoiding the possibility of cells slipping in the liquid during the clamping process, and the cells can be stored in the second concave cavity 3212 during clamping, thereby avoiding the cells from slipping, and further improving the stability and success rate of cell clamping.

[0076] The length L2 of the micro-gripper of this embodiment is 1.8 mm, the width W2 is 1.8 mm, the height H3 is 3.25 mm, and the height H4 is 4.55 mm.

[0077] The airbag 21 of the micro-gripper is expanded so that the first clamping arm 22 is opened. Fig. 20 The micro-gripper of this embodiment is simulated below, and the simulation results are all based on the results obtained under the pressure drive of one atmosphere. The simulation diagram is shown in Figure 21-24 In practical applications, when the driving pressure is greater than one atmosphere, the amount of opening and closing will also increase.

[0078] Fig.21 Reflecting the stretching amount of the first clamping arm 22, the maximum deformation amount is 156.15 μm. Fig. 22 It is reflected that the maximum deformation along the X-axis is 72.25 μm. Fig.23 It reflects that the maximum equivalent elastic strain is 0.041. When the tension is large enough, that is, Fig.21 and Fig. 22 When the maximum value of is large enough, the airbag 21 will not rupture. Fig.24 This reflects that the maximum equivalent stress is 98.99 MPa, and the airbag 21 will not rupture.

[0079] It will be apparent to those skilled in the art that the invention is not limited to the details of the exemplary embodiments described above and that the invention can be implemented in other specific forms without departing from the spirit or essential features of the invention. Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description, and it is intended that all variations falling within the meaning and scope of the equivalent elements of the claims be included in the invention. Any reference numeral in a claim should not be considered as limiting the claim to which it relates.

[0080] In addition, it should be understood that although the present specification is described according to implementation modes, not every implementation mode contains only one independent technical solution. This description of the specification is only for the sake of clarity. Those skilled in the art should regard the specification as a whole. The technical solutions in each embodiment may also be appropriately combined to form other implementation modes that can be understood by those skilled in the art.

Claims

1. A suction and clamping integrated micro-gripper, characterized in that: include: An air intake seat, wherein a first air vent and a second air vent are provided in the air intake seat; A clamping assembly, the clamping assembly comprising an airbag with one end disposed on the air inlet seat, and a first clamping arm integrally formed at the other end of the airbag, the airbag being connected to the first vent hole, and the first clamping arm having a first clamping surface; An adsorption component, the adsorption component includes a support body with one end arranged on the air inlet seat, and a second clamping arm integrally formed at the other end of the support body, the second clamping arm has a second clamping surface, the second clamping surface is arranged opposite to the first clamping surface, and an air duct passing through the second clamping surface is arranged in the support body and the second clamping arm, and the air duct is connected to the second air vent.

2. The suction-and-clamping integrated micro-gripper according to claim 1, characterized in that: A reinforcing body is arranged between the airbag and the supporting body, the reinforcing body is arranged on the air inlet seat, the reinforcing body is communicated with the airbag, and the reinforcing body is connected with the supporting body.

3. The suction-and-clamping integrated micro-gripper according to claim 2, characterized in that: The first clamping arm is arranged obliquely toward the second clamping arm.

4. The suction-and-clamping integrated micro-gripper according to claim 3, characterized in that: The first clamping surface and the second clamping surface are respectively located on both sides of the center line of the reinforcement body, and one end of the air passage away from the air inlet seat is inclined toward the first clamping arm.

5. The suction-and-clamping integrated micro-gripper according to claim 4, characterized in that: The first clamping arm includes a first straight portion and a first inclined portion, the first straight portion is formed on the airbag, the first inclined portion is inclined toward the second clamping arm, and the inclination angle of the first inclined portion is 10-30°.

6. The suction-and-clamping integrated micro-gripper according to claim 3, characterized in that: The air channel is perpendicular to the air inlet seat, and the first clamping surface and the second clamping surface are both located on the same side of the center line of the reinforcement body.

7. The suction-and-clamping integrated micro-gripper according to claim 6, characterized in that: The first clamping arm includes a second straight portion and a second inclined portion, the second straight portion is formed on the airbag, the second inclined portion is inclined toward the second clamping arm, and the inclination angle of the second inclined portion is 36-56°.

8. The suction-and-clamping integrated micro-gripper according to claim 2, characterized in that: A first ventilation portion is connected between the reinforcement body and the airbag, a second ventilation portion is connected between the reinforcement body and the support body, the second ventilation portion is connected to the reinforcement body, and the first ventilation portion and the second ventilation portion both extend to the air inlet seat.

9. The suction-and-clamping integrated micro-gripper according to claim 2, characterized in that: The smaller the wall thickness of the airbag is, the larger the distance between the two opposite inner walls of the airbag, the distance between the reinforcement body and the airbag, and the distance between the reinforcement body and the support body are.

10. The suction-and-clamping integrated micro-gripper according to claim 1, characterized in that: The first clamping surface is concave, a liquid leakage channel is provided on the first clamping surface, and a recess is provided on the second clamping surface.

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