Cutting fluid circulation system for cooling diamond wire and silicon rod in diamond wire slicer

Abstract

The present invention belongs to the field of silicon wafer processing technology, and in particular relates to a cutting liquid circulation system for cooling diamond wires and silicon rods in diamond wire slicers. The system includes a peristaltic pump and a composite water tank, the composite water tank including a first water tank and a second water tank; the peristaltic pump includes a peristaltic pump water inlet, the first water tank and the second water tank are respectively provided with a first water tank outlet and a second water tank outlet, and the peristaltic pump water inlet can be selectively connected to the first water tank outlet or the second water tank outlet through a first control valve. Thus, the system combines the peristaltic pump with the composite water tank, easily completing the multi-threaded liquid diversion task to meet the cooling work of the diamond wire and silicon rod during diamond wire slicing, and the peristaltic pump allows the cutting liquid to be pumped out when the liquid level in the water tank is lower than the water suction pipe. The composite water tank is equivalent to dividing the entire water tank interior into two small water tanks, and the two water tanks are controlled by the control valve to work alternately to achieve long-term continuous slicing, greatly improving work efficiency.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon wafer processing, and in particular relates to a cutting liquid circulation system for cooling diamond wires and silicon rods in a diamond wire slicer. Background Art

[0002] Diamond wire slicers are highly efficient machines for processing photovoltaic silicon wafers. Their primary processing method involves slicing silicon ingots using a reciprocating diamond wire. Three cutting rollers arranged in a triangle rotate in opposite directions, creating a reciprocating motion between the two rollers. Driven by a feed mechanism, the ingot is fed toward the wires between the rollers, where the reciprocating motion slices the ingot into slices. During the slicing process, a cutting fluid must be used to cool the processed area.

[0003] However, the centrifugal pumps used in existing machine tools to extract cutting fluid require suction pipes that can only be placed below the liquid level, preventing dry pumping. This requires strict control of the liquid level inside the cutting fluid tank. Furthermore, the efficiency of replacing old and new fluid in the cutting fluid tank is low, making it unsuitable for today's and future ultra-fine wire and ultra-high-speed slicing requirements. Summary of the Invention

[0004] (1) Technical issues to be resolved

[0005] In order to solve the above-mentioned problems in the prior art, the present invention provides a cutting fluid circulation system for cooling the diamond wire and silicon rod in the diamond wire slicer, thereby solving the technical problems of difficulty in controlling the solution level inside the water tank containing the cutting fluid and low efficiency in replacing the old and new fluids in the cutting fluid tank.

[0006] (2) Technical solution

[0007] In order to achieve the above objectives, the main technical solutions adopted by the present invention include:

[0008] The present invention provides a cutting liquid circulation system for cooling diamond wires and silicon rods in a diamond wire slicer, comprising a peristaltic pump and a composite water tank, the composite water tank comprising a first water tank and a second water tank; the peristaltic pump comprising a peristaltic pump water inlet, the first water tank and the second water tank being respectively provided with a first water tank water outlet and a second water tank water outlet, the peristaltic pump water inlet being selectively connected to the first water tank water outlet or the second water tank water outlet through a first control valve.

[0009] Furthermore, it also includes a liquid adding module, which includes a metering fully automatic liquid adding tank and a second control valve. The metering fully automatic liquid adding tank is connected to the second control valve through a liquid outlet pipe. The second control valve is connected to a first liquid adding pipe and a second liquid adding pipe. The first liquid adding pipe and the second liquid adding pipe are respectively connected to the first water tank and the second water tank.

[0010] Furthermore, it also includes a heat exchanger, the heat exchanger includes a heat exchanger water inlet and a heat exchanger water outlet, the peristaltic pump includes a peristaltic pump water outlet, and the peristaltic pump water outlet is connected to the heat exchanger water inlet; the heat exchanger is provided with a cold water inlet and a cold water outlet, and the cold water inlet and the cold water outlet are respectively arranged on opposite sides of the heat exchanger and located at the upper and lower ends; heat is exchanged between the fluid channel formed by the cold water inlet and the cold water outlet and the fluid channel formed by the heat exchanger water inlet and the heat exchanger outlet.

[0011] Furthermore, it also includes a backwash filter, which includes a backwash filter water inlet and a backwash filter water outlet; the heat exchanger water outlet is connected to the backwash filter water inlet, and a filter plate is provided in the backwash filter for filtering the cutting fluid entering the backwash filter; the backwash filter water inlet and the backwash filter water outlet are respectively located in areas on different sides of the filter plate.

[0012] Furthermore, the first water tank and the second water tank are respectively provided with a first water outlet pipe and a second water outlet pipe, and the first water outlet pipe and the second water outlet pipe are merged into a first main water outlet pipe, and a first control valve is provided at the confluence of the first water outlet pipe and the second water outlet pipe, and the first control valve is used to control the independent opening and closing of the first water outlet pipe and the second water outlet pipe, and the water inlet of the peristaltic pump is connected to the first main water outlet pipe; the first water tank and the second water tank are respectively provided with a third water outlet pipe and a fourth water outlet pipe, and the third water outlet pipe and the fourth water outlet pipe are merged into a second main water outlet pipe, and a third control valve is provided at the confluence of the third water outlet pipe and the fourth water outlet pipe, and the third control valve is used to control the independent opening and closing of the third water outlet pipe and the fourth water outlet pipe, and the second main water outlet pipe is connected to the waste liquid tank.

[0013] Furthermore, a backwash water tank and a sewage pipe are provided on the backwash filter, and the sewage pipe is connected to the waste liquid tank.

[0014] Furthermore, the water outlet of the backflushing filter is connected to the integrated support through a fifth water outlet pipe; a flow sensor, a pressure sensor and a temperature sensor are provided on the fifth water outlet pipe.

[0015] Furthermore, the diamond wire slicer includes an integrated support, which includes three cutting rollers arranged in an inverted triangle, and diamond wire is wound around the three cutting rollers; the cutting liquid circulation system also includes a main slurry pipe and an auxiliary slurry pipe arranged in the integrated support, the main slurry pipe and the auxiliary slurry pipe are located above the three cutting rollers, and the main slurry pipe is arranged below the auxiliary slurry pipe. The main slurry pipe is used to spray cutting liquid onto the diamond wire between the two upper cutting rollers of the three cutting rollers, and the auxiliary slurry pipe is used to spray cutting liquid onto the silicon rod cut by the diamond wire.

[0016] Furthermore, it includes a liquid receiving box arranged below the integrated support, and a pump is provided on the liquid receiving box.

[0017] Furthermore, the pump is connected to a main liquid inlet pipe, which is divided into a first liquid inlet pipe and a second liquid inlet pipe, and the first liquid inlet pipe and the second liquid inlet pipe are respectively connected to the first water tank and the second water tank; a fourth control valve is provided at the place where the main liquid inlet pipe is divided into the first liquid inlet pipe and the second liquid inlet pipe, and the fourth control valve is used to control the independent opening and closing of the first liquid inlet pipe and the second liquid inlet pipe.

[0018] (3) Beneficial effects

[0019] The beneficial effects of the present invention are:

[0020] This technical solution provides a cutting fluid circulation system for cooling the diamond wire and silicon rods in a diamond wire slicer. Combining a peristaltic pump with a composite water tank, this system easily manages multi-threaded liquid diversion tasks to meet the cooling needs of the diamond wire and silicon rod during diamond slicing. Furthermore, the peristaltic pump allows for the liquid to be pumped out without damaging the peristaltic pump when the cutting fluid level in the water tank falls below the suction pipe. The composite water tank effectively divides the entire water tank into two smaller tanks, which operate alternately via a control valve, enabling long-term continuous slicing and significantly improving work efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 This is a schematic diagram of the structure of the cutting fluid circulation system used to cool the diamond wire and silicon rod in the diamond wire slicer.

[0022] [Description of Reference Numerals]

[0023] 1: Peristaltic pump; 11: Peristaltic pump water inlet; 12: Peristaltic pump water outlet;

[0024] 2: composite water tank; 21: first water tank; 22: second water tank;

[0025] 3: First water outlet pipe; 4: Second water outlet pipe; 5: First main water outlet pipe; 6: First control valve;

[0026] 7: Liquid adding module; 71: Metering type automatic liquid adding tank; 72: Second control valve; 73: Liquid outlet pipe; 74: First liquid adding pipe; 75: Second liquid adding pipe;

[0027] 8: Heat exchanger; 81: Heat exchanger water inlet; 82: Heat exchanger water outlet; 83: Cold water inlet; 84: Cold water outlet;

[0028] 9: Backflush filter; 91: Backflush filter water inlet; 92: Backflush filter water outlet; 93: Filter plate; 94: Backflush water tank; 95: Drain pipe;

[0029] 10: Third water outlet pipe; 13: Third control valve; 14: Waste liquid tank; 15: Fifth water outlet pipe;

[0030] 16: integrated support; 161: cutting roller; 162: diamond wire; 163: main slurry pipe; 164:

[0031] Auxiliary pulp pipe;

[0032] 17: flow sensor; 18: pressure sensor; 19: temperature sensor;

[0033] 20: Liquid receiving tank; 201: Pump;

[0034] 23: Main liquid inlet pipe; 24: First liquid inlet pipe; 25: Second liquid inlet pipe; 26: Fourth control valve; 27: Fourth water outlet pipe; 28: Second main water outlet pipe. DETAILED DESCRIPTION

[0035] To better understand the above technical solutions, exemplary embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. Although exemplary embodiments of the present invention are shown in the accompanying drawings, it should be understood that the present invention can be implemented in various forms and should not be limited by the embodiments described herein. Instead, these embodiments are provided to enable a clearer and more thorough understanding of the present invention and to fully convey the scope of the present invention to those skilled in the art.

[0036] like Figure 1 As shown, the present invention provides a cutting fluid circulation system for cooling diamond wire and silicon rods in a diamond wire slicer, comprising a peristaltic pump 1 and a composite water tank 2. The peristaltic pump 1 utilizes the principle of negative pressure to absorb water, so even when the cutting fluid level in the water tank is lower than the suction pipe, it can be pumped dry without damaging the peristaltic pump 1. The composite water tank 2 comprises a first water tank 21 and a second water tank 22. The peristaltic pump 1 comprises a peristaltic pump water inlet 11 and a peristaltic pump water outlet 12. The first water tank 21 and the second water tank 22 are respectively provided with a first water tank outlet and a second water tank outlet. The peristaltic pump water inlet 11 can be selectively connected to the first water tank outlet or the second water tank outlet via a first control valve 6. That is, the first control valve 6 has two states: the peristaltic pump water inlet 11 is only connected to the first water tank outlet; the peristaltic pump water inlet 11 is only connected to the second water tank outlet.

[0037] Specifically, the first water tank outlet and the second water tank outlet are respectively provided with a first water outlet pipe 3 and a second water outlet pipe 4, and the first water outlet pipe 3 and the second water outlet pipe 4 are merged into a first main water outlet pipe 5. A first control valve 6 is provided at the confluence of the first water outlet pipe 3 and the second water outlet pipe 4. The first control valve 6 is used to control the independent opening and closing of the first water outlet pipe 3 and the second water outlet pipe 4, and the peristaltic pump water inlet 11 is connected to the first main water outlet pipe 5.

[0038] The purpose of providing the composite water tank 2 is to adopt a dual-circulation structure, allowing the cutting fluid to be replaced without stopping the machine, thus reducing the auxiliary time required for each cut of the existing slicer to change the cutting fluid. That is, one water tank supplies liquid during cutting, while the other water tank removes the waste liquid through the drain device and then injects new liquid. Under the action of the first control valve 6, the first water tank 21 and the second water tank 22 can achieve seamless alternating operation.

[0039] Since the cutting fluid flowing out of the composite water tank 2 is affected by the heat generated by the surrounding equipment during operation during the transportation process through the peristaltic pump 1, resulting in an increase in temperature, the cutting fluid circulation system also includes a heat exchanger 8 to cool the heated cutting fluid. Specifically, the heat exchanger 8 includes a heat exchanger water inlet 81 and a heat exchanger water outlet 82. The peristaltic pump water outlet 12 is connected to the heat exchanger water inlet 81. The heat exchanger 8 is provided with a cold water inlet 83 and a cold water outlet 84. The cold water inlet 83 and the cold water outlet 84 are respectively arranged on opposite sides of the heat exchanger 8 and are located at the upper and lower ends. The water entering the cold water inlet 83 absorbs the heat of the cutting fluid entering the heat exchanger water inlet 81 and is discharged from the cold water outlet 84 after being heated. That is, heat is exchanged between the fluid channel formed by the cold water inlet 83 and the cold water outlet 84 and the fluid channel formed by the heat exchanger water inlet 81 and the heat exchanger water outlet 82.

[0040] It should be noted that the cold water referred to in the heat exchanger 8 is lower in temperature than the fluid flowing between the water inlet 81 and the water outlet 82 of the heat exchanger, and is a relative concept.

[0041] In order to prevent the impurities in the cutting fluid sprayed onto the diamond wire 162 and the silicon rod from causing wear and damage to the equipment, the cutting fluid circulation system also includes a backwash filter 9 to filter the impurities in the cutting fluid. In this embodiment, the backwash filter 9 is selected as a candle filter, and the original non-woven fabric filter is changed to a backwash filter filter, which reduces the need to manually replace the filter bag after each cut, reduces the intensity of manual labor, and improves work efficiency. In addition, its filter medium can be reused many times, which can save a large amount of filter consumables. Specifically, the backwash filter 9 includes a backwash filter water inlet 91 and a backwash filter water outlet 92. The heat exchanger outlet 82 is connected to the backwash filter water inlet 91. A filter plate 93 is provided in the backwash filter 9 for filtering the cutting fluid entering the backwash filter 9 from the backwash filter water inlet 91. The backwash filter water inlet 91 and the backwash filter water outlet 92 are respectively located in areas on different sides of the filter plate 93. The backwash filter 9 is provided with a backwash water tank 94 and a drain pipe 95. The backwash water tank 94 is provided on one side of the backwash filter water outlet 92, and the drain pipe 95 is provided on one side of the backwash filter water inlet 91 and connected to the waste liquid tank 14. During backwashing, the backwash water tank 94 fills the backwash filter 9 with water to flush the filter plate 93, and the waste liquid after flushing the filter plate 93 is discharged from the drain pipe 95.

[0042] After being filtered by backflush filter 9, the cutting fluid is passed through fifth outlet pipe 15 and connected to integrated support 16. Fifth outlet pipe 15 is equipped with a flow sensor 17, a pressure sensor 18, and a temperature sensor 19, enabling controllable parameters of the cutting fluid entering integrated support 16.

[0043] The integrated support 16 is the structure of the diamond wire slicer. The integrated support 16 includes three cutting rollers 161 arranged in an inverted triangle. Diamond wire 162 is wound around the three cutting rollers 161. It also includes a main slurry pipe 163 and an auxiliary slurry pipe 164 belonging to the cutting liquid circulation system. The main slurry pipe 163 and the auxiliary slurry pipe 164 are located above the three cutting rollers 161, and the main slurry pipe 163 is arranged below the auxiliary slurry pipe 164. The main slurry pipe 163 is used to spray cutting liquid onto the diamond wire 162 between the two cutting rollers 161 located above the three cutting rollers 161, and the auxiliary slurry pipe 164 is used to spray cutting liquid onto the silicon rod cut by the diamond wire 162.

[0044] Because the cutting fluid is recycled, a liquid receiving box 20 is provided below the integrated support 16 to collect the cooled cutting fluid. Specifically, a pump 201 is provided on the liquid receiving box 20, and a main liquid inlet pipe 23 is connected to the pump 201. The main liquid inlet pipe 23 is divided into a first liquid inlet pipe 24 and a second liquid inlet pipe 25. The first liquid inlet pipe 24 and the second liquid inlet pipe 25 are respectively connected to the first water tank 21 and the second water tank 22. A fourth control valve 26 is provided where the main liquid inlet pipe 23 is divided into the first liquid inlet pipe 24 and the second liquid inlet pipe 25. The fourth control valve 26 is used to control the independent opening and closing of the first liquid inlet pipe 24 and the second liquid inlet pipe 25. In this way, the used cutting fluid collected in the liquid receiving box 20 can be pumped back into the composite water tank 2, waiting for the next cooling, so as to realize the recycling of the cutting fluid.

[0045] The first water tank 21 and the second water tank 22 are respectively provided with a third water outlet pipe 10 and a fourth water outlet pipe 27. The third water outlet pipe 10 and the fourth water outlet pipe 27 merge into a second main water outlet pipe 28. A third control valve 13 is provided at the confluence of the third water outlet pipe 10 and the fourth water outlet pipe 27 to independently open and close the third water outlet pipe 10 and the fourth water outlet pipe 27. The second main water outlet pipe 28 is connected to the waste liquid tank 14. The waste liquid discharged from the backflushing filter 9 into the waste liquid tank 14 is discharged together through the drainage device.

[0046] During the circulation of the cutting liquid, there will definitely be losses. Therefore, in order to ensure the cooling effect each time, the water circulation system also includes a liquid adding module 7, which can add cutting liquid to the composite water tank 2 during the cooling process. Specifically, the liquid adding module 7 includes a metering type fully automatic liquid adding tank 71 and a second control valve 72. The metering type fully automatic liquid adding tank 71 is connected to the second control valve 72 through a liquid outlet pipe 73. The second control valve 72 is connected to a first liquid adding pipe 74 and a second liquid adding pipe 75. The first liquid adding pipe 74 and the second liquid adding pipe 75 are connected to the first water tank 21 and the second water tank 22 respectively. The liquid storage tank in the metering type fully automatic liquid adding tank 71 includes a stirrer to mix the cutting liquid. The liquid storage tank is also provided with a measuring cylinder including a liquid level gauge and a liquid level alarm. When the liquid adding module 7 adds liquid to the composite water tank 2, the evenly stirred cutting liquid in the liquid storage tank is pumped into the measuring cylinder and is below the safe liquid level. The cutting liquid in the measuring cylinder is then discharged through the liquid outlet pipe 73.

[0047] Working principle:

[0048] The cutting liquid circulation system is set at the rear end of the diamond wire slicer. First, the cutting liquid is supplied to the composite water tank 2 by the liquid injection device. The first control valve 6 controls the first main water outlet pipe 5 to connect with the first water outlet pipe 3 of the first water tank 21 or the second water outlet pipe 4 of the second water tank 22. The cutting liquid in the composite water tank 2 enters the peristaltic pump 1 from the peristaltic pump water inlet 11 through the first main water outlet pipe 5, then exits from the peristaltic pump water outlet 12 and enters the heat exchanger 8 from the heat exchanger water inlet 81, then exits from the heat exchanger water outlet 82, and then enters the backwash filter 9 from the backwash filter water inlet 91 for filtration and then exits from the backwash filter water outlet 92. The cutting liquid then passes through the flow sensor 17, pressure sensor 18 and temperature sensor 19 to supply liquid to the main slurry pipe 163 and auxiliary slurry pipe 164 in the integrated support 16 to cool the diamond wire 162 and silicon rod. After the cooling work is completed, the cutting liquid falls into the liquid receiving box 20 below the integrated support 16, enters the main liquid inlet pipe 23 under the action of the pump 201, and under the control of the fourth control valve 26, chooses to enter the first water tank 21 through the first liquid inlet pipe 24 or the second liquid inlet pipe 25 into the second water tank 22 to complete a cutting liquid cycle.

[0049] When the composite water tank 2 needs to be replenished, the second control valve 72 is opened to allow the cutting fluid in the controlled metering fully automatic liquid filling tank 71 to enter the liquid outlet pipe 73 and then enter the first water tank 21 through the first liquid filling pipe 74 or the second liquid filling pipe 75 into the second water tank 22 to complete the liquid replenishment.

[0050] When the water tank needs to be cleaned, open the third control valve 13 to control the waste liquid in the first water tank 21 to pass through the third water outlet pipe 10 or the waste liquid in the second water tank 22 to pass through the fourth water outlet pipe 27 into the second main water outlet pipe 28 and then be discharged to the waste liquid tank 14, and finally discharged through the drainage device.

[0051] In the description of this specification, the terms "one embodiment", "some embodiments", "embodiments", "examples", "specific examples" or "some examples" refer to the specific features, structures, materials or characteristics described in conjunction with the embodiment or example and included in at least one embodiment or example of the present invention. In this specification, the schematic expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described may be combined in any one or more embodiments or examples. In addition, those skilled in the art may combine and combine different embodiments or examples and features of different embodiments or examples described in this specification without contradiction.

[0052] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are illustrative and are not to be construed as limitations on the present invention. A person skilled in the art may alter, modify, replace and modify the above embodiments within the scope of the present invention.

Claims

1. A cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer, characterized in that: It comprises a peristaltic pump (1) and a composite water tank (2), wherein the composite water tank (2) comprises a first water tank (21) and a second water tank (22); The peristaltic pump (1) comprises a peristaltic pump water inlet (11), the first water tank (21) and the second water tank (22) are respectively provided with a first water tank water outlet and a second water tank water outlet, and the peristaltic pump water inlet (11) can be selectively communicated with the first water tank water outlet or the second water tank water outlet via a first control valve (6); A liquid receiving box (20) is provided below the integrated support (16); a pump (201) is provided on the liquid receiving box (20); a main liquid inlet pipe (23) is connected to the pump (201); the main liquid inlet pipe (23) is connected to the first water tank (21) and the second water tank (22) so as to pump the used cutting liquid collected in the liquid receiving box (20) back into the composite water tank (2); It also includes a waste liquid tank (14), wherein the first water tank (21) and the second water tank (22) are respectively provided with a third water outlet pipe (10) and a fourth water outlet pipe (27), and the third water outlet pipe (10) and the fourth water outlet pipe (27) are connected to the waste liquid tank (14); It also includes a liquid adding module (7), the liquid adding module (7) including a first liquid adding pipe (74) and a second liquid adding pipe (75), the first liquid adding pipe (74) and the second liquid adding pipe (75) being connected to the first water tank (21) and the second water tank (22) respectively; Under the action of the first control valve (6), the first water tank (21) and the second water tank (22) operate alternately, so as to enable the composite water tank (2) to replace the cutting fluid without stopping the machine.

2. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 1, characterized in that: The liquid adding module (7) comprises a metering type fully automatic liquid adding tank (71) and a second control valve (72); the metering type fully automatic liquid adding tank (71) is connected to the second control valve (72) via a liquid outlet pipe (73); and the second control valve (72) is connected to the first liquid adding pipe (74) and the second liquid adding pipe (75).

3. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 1, characterized in that: The apparatus further comprises a heat exchanger (8), wherein the heat exchanger (8) comprises a heat exchanger water inlet (81) and a heat exchanger water outlet (82), and the peristaltic pump (1) comprises a peristaltic pump water outlet (12), wherein the peristaltic pump water outlet (12) is connected to the heat exchanger water inlet (81); The heat exchanger (8) is provided with a cold water inlet (83) and a cold water outlet (84), and the cold water inlet (83) and the cold water outlet (84) are respectively provided on opposite sides of the heat exchanger (8) and located at the upper and lower ends; Heat is exchanged between the fluid channel formed by the cold water inlet (83) and the cold water outlet (84) and the fluid channel formed by the heat exchanger water inlet (81) and the heat exchanger water outlet (82).

4. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 3, characterized in that: Also included is a backflushing filter (9), wherein the backflushing filter (9) includes a backflushing filter water inlet (91) and a backflushing filter water outlet (92); The water outlet (82) of the heat exchanger is connected to the water inlet (91) of the backflushing filter, and a filter plate (93) is provided in the backflushing filter (9) for filtering the cutting fluid entering the backflushing filter (9); The backflushing filter water inlet (91) and the backflushing filter water outlet (92) are respectively located in areas on different sides of the filter plate (93).

5. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 4, characterized in that: The first water tank (21) and the second water tank (22) are respectively provided with a first water outlet pipe (3) and a second water outlet pipe (4); the first water outlet pipe (3) and the second water outlet pipe (4) are combined into a first main water outlet pipe (5); a first control valve (6) is provided at the point where the first water outlet pipe (3) and the second water outlet pipe (4) are combined; the first control valve (6) is used to control the independent opening and closing of the first water outlet pipe (3) and the second water outlet pipe (4); the water inlet (11) of the peristaltic pump is connected to the first main water outlet pipe (5); The third water outlet pipe (10) and the fourth water outlet pipe (27) are combined into a second main water outlet pipe (28). A third control valve (13) is provided at the point where the third water outlet pipe (10) and the fourth water outlet pipe (27) are combined. The third control valve (13) is used to control the independent opening and closing of the third water outlet pipe (10) and the fourth water outlet pipe (27). The second main water outlet pipe (28) is connected to the waste liquid tank (14).

6. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 4, characterized in that: The backflushing filter (9) is provided with a backflushing water tank (94) and a sewage pipe (95), and the sewage pipe (95) is connected to the waste liquid tank (14).

7. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 4, characterized in that: The backflushing filter water outlet (92) is connected to the integrated support (16) via a fifth water outlet pipe (15); The fifth water outlet pipe (15) is provided with a flow sensor (17), a pressure sensor (18) and a temperature sensor (19).

8. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 7, characterized in that: The diamond wire slicer comprises an integrated support (16), wherein the integrated support (16) comprises three cutting rollers (161) arranged in an inverted triangle, and each of the three cutting rollers (161) is wound with a diamond wire (162); The cutting liquid circulation system further comprises a main slurry pipe (163) and an auxiliary slurry pipe (164) arranged in the integrated support (16); the main slurry pipe (163) and the auxiliary slurry pipe (164) are located above the three cutting rollers (161); the main slurry pipe (163) is arranged below the auxiliary slurry pipe (164); the main slurry pipe (163) is used to spray cutting liquid onto the diamond wire (162) between the two cutting rollers (161) located above among the three cutting rollers (161); and the auxiliary slurry pipe (164) is used to spray cutting liquid onto the silicon rod cut by the diamond wire (162).

9. The cutting fluid circulation system for cooling diamond wire and silicon rod in a diamond wire slicer according to claim 1, characterized in that: The main liquid inlet pipe (23) is divided into a first liquid inlet pipe (24) and a second liquid inlet pipe (25), and the first liquid inlet pipe (24) and the second liquid inlet pipe (25) are connected to the first water tank (21) and the second water tank (22) respectively; A fourth control valve (26) is provided at the location where the main liquid inlet pipe (23) is divided into the first liquid inlet pipe (24) and the second liquid inlet pipe (25). The fourth control valve (26) is used to control the independent opening and closing of the first liquid inlet pipe (24) and the second liquid inlet pipe (25).

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