Turbomolecular pump

Abstract

The turbine molecular pump comprises a pump body, a motor arranged in the pump body, a motor moving shaft connected with the motor, a rotating shaft arranged in the pump body, a threaded area arranged on the rotating shaft, and a screw thread connected with a screw hole on a power block. The rotating of the rotating handle drives the rotating of the rotating shaft, the threaded area is screwed with the screw hole on the power block, the power column passes through the pump body, the movement of the arc-shaped clamping rod is driven, and the motor moving shaft is protected. The rotating of the rotating disc drives the rope winding and pulling, the movement of the prompt sliding block is driven, the sliding rod moves, the dynamic contact piece and the static contact piece contact, and the alarm of the alarm device is realized.

Description

Technical Field

[0001] This invention relates to the field of molecular pump technology, and more specifically to a turbomolecular pump. Background Technology

[0002] A molecular pump is a vacuum pump that uses a high-speed rotating rotor to transfer momentum to gas molecules, giving them directional velocity, thus compressing them and driving them towards the exhaust port for removal by the forestage pump. A traction molecular pump uses gas molecules that collide with a high-speed rotating rotor to gain momentum and are driven to the pump outlet. A turbomolecular pump achieves pumping by the interaction of high-speed rotating moving blades and stationary fixed blades. This type of pump typically operates in a molecular flow state. A compound molecular pump is a composite molecular vacuum pump that combines a turbomolecular pump and a traction molecular pump in series.

[0003] Existing turbomolecular pumps consist of a motor and a pump body. The motor is mounted inside the pump body, while the motor shaft is exposed to the outside. The motor shaft has no protective function and is easily affected by external impacts, which affects the lifespan of the molecular pump. Summary of the Invention

[0004] The purpose of this invention is to provide a turbomolecular pump to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, the present invention provides the following technical solution:

[0006] A turbomolecular pump includes a pump body, an internal motor connected to a motor shaft, the motor shaft being disposed outside the pump body, an internal adjusting shaft rotatably mounted inside the pump body, the adjusting shaft having a threaded area connected to a threaded connection on a power block, the power block being connected to a power through-pipe, the power through-pipe passing through the pump body and connected to arc-shaped clamps via a lifting device, the two arc-shaped clamps being used to clamp and protect the motor shaft;

[0007] The lifting device includes a lifting box, within which a lifting shaft is rotatably mounted. The lifting shaft is threadedly connected to a lifting sleeve. A lifting disc is mounted on the lifting shaft. The lifting disc is connected to a positioning disc via a lifting rope. A lifting slide rod is threadedly mounted on the positioning disc. The lifting slide rod is connected to a lifting crossbar. The lifting crossbar passes through the lifting box and is connected to an arc-shaped clamping rod. The positioning disc is rotatably mounted via a rotating pulley and a rotating groove.

[0008] A rotating disk is provided on one side of the adjusting shaft, and a winding rope is provided on the rotating disk. The winding rope is connected to the indicator. A handle is provided at one end of the adjusting shaft. A stabilizing component is provided inside the pump body. A threaded block is threadedly connected in the threaded area. The threaded area and the stabilizing component are configured to cooperate. A rack is provided at the lower part of the threaded block. The rack is meshed with a gear. The gear is configured to cooperate with a balancing component through a moving rope. A positioning rod is provided on the power block. The positioning rod is slidably limited by the positioning groove on the top wall of the pump body.

[0009] Preferably, the prompter includes a prompting box, a prompting slider slidably disposed within the prompting box, a prompting slide rod disposed below the prompting slider, the prompting slide rod passing through a fixed prompting rod inside the prompting box and connecting to a movable contact piece, the movable contact piece engaging with a stationary contact piece on the fixed prompting rod, an alarm disposed below the prompting slider, the movable contact piece and the stationary contact piece engaging for alarm setting of the alarm, the prompting slider and the prompting box are connected by a prompting spring, and the prompting slider is connected to a winding rope.

[0010] Preferably, the stabilizing component includes a stabilizing housing, a stabilizing slider slidably disposed within the stabilizing housing, the stabilizing slider being connected to a stabilizing slide rod, the stabilizing slide rod being connected to a threaded block, the stabilizing slider being connected to a stabilizing moving rod, the stabilizing moving rod being connected to the stabilizing housing via a stabilizing spring, a stabilizing limiting groove being provided on the inner side wall of the stabilizing housing, a stabilizing limiting block slidably disposed within the stabilizing limiting groove, and the stabilizing limiting groove being connected to the stabilizing moving rod.

[0011] Preferably, the balancing component includes a balancing vertical rod connected to a power block, a balancing vertical rod connected to a balancing horizontal rod, a balancing sleeve fitted on the balancing horizontal rod, and the balancing sleeve connected to a gear via a moving rope.

[0012] Preferably, the balance sleeve and the balance rod are connected by a balance spring.

[0013] Preferably, the balance bar is provided with a stop block.

[0014] Preferably, a buffer block is installed at the bottom of the lifting sleeve, the buffer block is connected to the lifting box body through a buffer spring, the side wall of the lifting box body is provided with a fixed column, the fixed column is provided with a fixed groove, the fixed groove is connected to the buffer block, the buffer block is also connected to a locking rod, and the locking rod passes through the lifting box body and is provided with a locking port.

[0015] Preferably, the side wall of the lifting box is provided with a locking block, and a locking rod is provided on the locking block. The locking rod is engaged with the locking port, and a pull cap is provided on the locking rod. The pull cap is connected to the locking block by a locking spring.

[0016] Preferably, the lifting slide rod is connected to the auxiliary sleeve, the auxiliary sleeve is slidably fitted with the auxiliary rod, and the auxiliary rod is connected to the top wall of the lifting box.

[0017] Compared with the prior art, the beneficial effects of the present invention are:

[0018] (1) This invention uses the rotation of the hand to drive the rotation of the hand, adjust the rotation of the shaft, and the threaded area engages with the threaded opening on the power block, thereby enabling the power column to pass through the pump body, driving the movement of the arc-shaped clamping rod, and thus protecting the motor shaft; the rotation of the rotating disk drives the rope to pull, which in turn drives the movement of the indicator slider, which in turn moves the indicator rod, causing the moving and stationary contacts to contact the alarm for the alarm device, and then the indicator arc-shaped clamping rod clamps with the motor shaft, ensuring complete protection and improving protection efficiency; rotating the lifting shaft causes the lifting disk to rotate, which in turn enables the lifting rope to pull. This causes the alignment plate to rotate, which in turn moves the lifting slide bar, which in turn moves the lifting crossbar. By moving the height of the arc-shaped clamping rod, the protection is adjusted according to the length of the motor shaft, improving protection efficiency. The movement of the lifting sleeve moves the buffer block, which in turn compresses the buffer spring and moves the locking rod, improving the rotational stability of the lifting shaft. At the same time, the locking rod engages with the locking port, further limiting the position of the buffer block, thereby improving the positioning stability of the lifting shaft, which in turn improves the stability of the lifting crossbar, and thus improves the protection efficiency of the motor shaft.

[0019] (2) By moving the stabilizing slide bar, the stabilizing slider moves, which in turn stretches the stabilizing spring, further improving the stability of the threaded block's movement, which in turn improves the rotational stability of the adjusting shaft, thereby improving the stability of the arc-shaped clamp rod's movement; by moving the threaded block, the rack moves, which in turn rotates the gear; by moving the moving rope, the balance sleeve moves, which in turn stretches the balance spring; by moving the power block, the balance vertical rod moves, which in turn stretches the balance spring in both directions, improving the stability of the threaded block's movement; and by moving the threaded block, the rotational stability of the adjusting shaft is achieved. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the structure of the present invention;

[0021] Figure 2 This is a schematic diagram of the lifting device of the present invention;

[0022] Figure 3 This is a schematic diagram of the structure of the locking rod and the locking port of the present invention;

[0023] Figure 4 This is a schematic diagram of the prompting device structure of the present invention;

[0024] Figure 5 This is a schematic diagram of the structure of the stabilizer of the present invention;

[0025] Figure 6 This is a schematic diagram of the structure of the balancing component of the present invention. Detailed Implementation

[0026] The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0027] Please see Figure 1-6 In this embodiment of the invention, a turbomolecular pump includes a pump body 1, a motor 2 is provided inside the pump body 1, the motor 2 is connected to a motor shaft 3, the motor shaft 3 is disposed outside the pump body 1, an adjusting shaft 4 is rotatably provided inside the pump body 1, the adjusting shaft 4 is provided with a threaded area 5, the threaded area 5 is threadedly connected to the threaded port 7 on the power block 6, the power block 6 is connected to a power through column 8, the power through column 8 passes through the pump body 1, and is connected to an arc-shaped clamp 10 through a lifting device 9, the two arc-shaped clamps 10 are used to clamp and protect the motor shaft 3;

[0028] The lifting device 9 includes a lifting box 91, a lifting shaft 92 rotatably mounted inside the lifting box 91, the lifting shaft 92 being threadedly connected to a lifting sleeve 93, a lifting plate 94 mounted on the lifting shaft 92, the lifting plate 94 being connected to an alignment plate 96 via a lifting rope 95, a lifting slide rod 97 threadedly mounted on the alignment plate 96, the lifting slide rod 97 being connected to a lifting crossbar 98, the lifting crossbar 98 passing through the lifting box 91 and being connected to an arc-shaped clamping rod 10; the alignment plate 96 is rotatably mounted via a rotating pulley 99 and a rotating groove 910.

[0029] Rotating the lifting shaft 92 causes the lifting plate 94 to rotate, which in turn pulls the lifting rope 95, thereby driving the alignment plate 96 to rotate, which in turn moves the lifting slide bar 97, which in turn moves the lifting crossbar 98. By moving the height of the arc-shaped clamping rod 10, the protection is adjusted according to the length of the motor shaft 3, thus improving the protection efficiency.

[0030] A rotating disk 11 is provided on one side of the adjusting shaft 4, and a winding rope 12 is provided on the rotating disk 11. The winding rope 12 is connected to the indicator 13. A handle 14 is provided at one end of the adjusting shaft 4. A stabilizing component 15 is provided inside the pump body 1. A threaded block 16 is threadedly connected inside the threaded area 5. The threaded area 5 and the stabilizing component 15 are configured to cooperate. A rack 17 is provided at the lower part of the threaded block 16. The rack 17 is meshed with a gear 18. The gear 18 is configured to cooperate with a balancing component 19 through a moving rope 20. A positioning rod 21 is provided on the power block 6. The positioning rod 21 is slidably limited by the positioning groove 22 on the inner top wall of the pump body 1.

[0031] By rotating the handle 14, the rotating shaft 4 is adjusted to rotate. The threaded area 5 engages with the threaded opening 7 on the power block 6, thereby allowing the power column 8 to pass through the pump body 1 and drive the arc-shaped clamping rod 10 to move, thus protecting the motor shaft 3. By rotating the rotating disk 11, the winding rope 12 is pulled, which in turn drives the indicator slider 132 to move, which in turn moves the indicator rod 133. This causes the moving contact piece 135 and the stationary contact piece 136 to contact the alarm device 137, which then indicates that the arc-shaped clamping rod 10 is clamped with the motor shaft 3 and is fully protected, thus improving the protection efficiency.

[0032] The movement of the threaded block 16 drives the rack 17 to move, which in turn causes the gear 18 to rotate. The moving rope 20 drives the balance sleeve 193 to move, which in turn stretches the balance spring 194. The movement of the power block 6 drives the balance rod 191 to move, which in turn stretches the balance spring 194 in both directions, thus improving the stability of the movement of the threaded block 16. At the same time, the movement of the threaded block 16 also improves the rotational stability of the adjusting shaft 4.

[0033] The prompter 13 in this embodiment includes a prompting box 131, a prompting slider 132 slidably disposed inside the prompting box 131, a prompting slide rod 133 disposed at the lower part of the prompting slider 132, the prompting slide rod 133 passing through a prompting fixed rod 134 fixed inside the prompting box 131 and connected to a moving contact piece 135, the moving contact piece 135 contacting and cooperating with a stationary contact piece 136 on the prompting fixed rod 134, an alarm 137 disposed at the lower part of the prompting slider 132, the moving contact piece 135 and the stationary contact piece 136 contacting for alarm setting of the alarm 137, the prompting slider 132 and the prompting box 131 connected by a prompting spring, and the prompting slider 132 connected to a winding rope 12.

[0034] The stabilizer 15 in this embodiment includes a stabilizer housing 151, a stabilizer slider 152 slidably disposed inside the stabilizer housing 151, the stabilizer slider 152 being connected to a stabilizer slide rod 153, the stabilizer slide rod 153 being connected to a threaded block 16, the stabilizer slider 152 being connected to a stabilizer moving rod 154, the stabilizer moving rod 154 being connected to the stabilizer housing 151 via a stabilizer spring 155, a stabilizer limiting groove 156 being provided on the inner sidewall of the stabilizer housing 151, a stabilizer limiting block 157 slidably disposed inside the stabilizer limiting groove 156, and the stabilizer limiting groove 156 being connected to the stabilizer moving rod 154.

[0035] The movement of the stabilizing slide bar 153 drives the movement of the stabilizing slider 152, thereby stretching the stabilizing spring 155, further improving the movement stability of the threaded block 16, and subsequently improving the rotational stability of the adjusting shaft 4, thus improving the movement stability of the arc-shaped clamp 10.

[0036] The balancing component 19 in this embodiment includes a balancing vertical rod 191, which is connected to the power block 6 and a balancing horizontal rod 192. A balancing sleeve 193 is fitted on the balancing horizontal rod 192, and the balancing sleeve 193 is connected to the gear 18 through a moving rope 20.

[0037] In this embodiment, the balance sleeve 193 and the balance rod 191 are connected by a balance spring 194.

[0038] In this embodiment, a stop block 195 is provided on the balance bar 192.

[0039] In this embodiment, a buffer block 911 is installed at the bottom of the lifting sleeve 93. The buffer block 911 is connected to the lifting box body 91 through a buffer spring 912. The side wall of the lifting box body 91 is provided with a fixed column 913. The fixed column 913 is provided with a fixed groove 914. The fixed groove 914 is connected to the buffer block 911. The buffer block 911 is also connected to a locking rod 915. The locking rod 915 passes through the lifting box body 91 and is provided with a locking port 916.

[0040] In this embodiment, the side wall of the lifting box 91 is provided with a locking block 917, and a locking rod 918 is provided on the locking block 917. The locking rod 918 is engaged with the locking port 916. The locking rod 918 is provided with a pull cap, and the pull cap is connected to the locking block 917 through a locking spring 919.

[0041] In this embodiment, the lifting slide bar 97 is connected to the auxiliary sleeve 920, the auxiliary sleeve 920 is slidably fitted with the auxiliary rod 921, and the auxiliary rod 921 is connected to the inner top wall of the lifting box 91.

[0042] The movement of the lifting sleeve 93 causes the buffer block 911 to move, which in turn compresses the buffer spring 912 and moves the locking rod 915, improving the rotational stability of the lifting shaft 92. At the same time, the locking rod 918 engages with the locking port 916 to further limit the position of the buffer block 911, thereby improving the positioning stability of the lifting shaft 92, which in turn improves the stability of the lifting crossbar 98, and thus improves the protection efficiency of the motor shaft.

[0043] Therefore, the embodiments should be considered exemplary and non-limiting in all respects, and the scope of the invention is defined by the appended claims rather than the foregoing description. Thus, all variations falling within the meaning and scope of equivalents of the claims are intended to be included within the invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0044] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A turbomolecular pump, comprising a pump body (1), wherein a motor (2) is disposed inside the pump body (1), characterized in that, The motor (2) is connected to a motor shaft (3), which is located outside the pump body (1). An adjustment shaft (4) is rotatably provided inside the pump body (1). A threaded area (5) is provided on the adjustment shaft (4). The threaded area (5) is threadedly connected to the threaded port (7) on the power block (6). The power block (6) is connected to the power column (8). The power column (8) passes through the pump body (1) and is connected to the arc-shaped clamp (10) through the lifter (9). The two arc-shaped clamps (10) are used to clamp and protect the motor shaft (3). The lifting device (9) includes a lifting box body (91), a lifting shaft (92) is rotatably provided inside the lifting box body (91), the lifting shaft (92) is threadedly connected to the lifting sleeve (93), the lifting shaft (92) is provided with a lifting plate (94), the lifting plate (94) is connected to the alignment plate (96) through a lifting rope (95), the alignment plate (96) is threadedly connected with a lifting slide rod (97), the lifting slide rod (97) is connected to a lifting crossbar (98), the lifting crossbar (98) passes through the lifting box body (91) and is connected to the arc-shaped clamping rod (10); the alignment plate (96) is rotatably set by a rotating pulley (99) and a rotating groove (910); The adjusting shaft (4) is provided with a rotating disk (11) on one side, and a winding rope (12) is provided on the rotating disk (11). The winding rope (12) is connected to the indicator (13). One end of the adjusting shaft (4) is provided with a handle (14). The pump body (1) is provided with a stabilizing component (15). A threaded block (16) is threadedly connected in the threaded area (5). The threaded area (5) and the stabilizing component (15) are configured to cooperate. A rack (17) is provided at the lower part of the threaded block (16). The rack (17) is meshed with a gear (18). The gear (18) is configured to cooperate with a balancing component (19) through a moving rope (20). A positioning rod (21) is provided on the power block (6). The positioning rod (21) is slidably limited to the positioning groove (22) on the inner top wall of the pump body (1).

2. A turbomolecular pump according to claim 1, characterized in that, The prompter (13) includes a prompting box (131), a prompting slider (132) is slidably disposed inside the prompting box (131), a prompting slide rod (133) is disposed at the lower part of the prompting slider (132), the prompting slide rod (133) passes through a prompting fixed rod (134) fixed inside the prompting box (131) and is connected to a moving contact piece (135), the moving contact piece (135) is in contact with a stationary contact piece (136) on the prompting fixed rod (134), an alarm (137) is disposed at the lower part of the prompting slider (132), the moving contact piece (135) and the stationary contact piece (136) are in contact for alarm setting of the alarm (137), the prompting slider (132) is connected to the prompting box (131) through a prompting spring, and the prompting slider (132) is connected to a winding rope (12).

3. A turbomolecular pump according to claim 1, characterized in that, The stabilizer (15) includes a stabilizer box (151), a stabilizer slider (152) is slidably disposed inside the stabilizer box (151), the stabilizer slider (152) is connected to a stabilizer slide rod (153), the stabilizer slide rod (153) is connected to a threaded block (16), the stabilizer slider (152) is connected to a stabilizer moving rod (154), the stabilizer moving rod (154) is connected to the stabilizer box (151) through a stabilizer spring (155), the inner sidewall of the stabilizer box (151) is provided with a stabilizer limiting groove (156), a stabilizer limiting block (157) is slidably disposed inside the stabilizer limiting groove (156), and the stabilizer limiting groove (156) is connected to the stabilizer moving rod (154).

4. A turbomolecular pump according to claim 1, characterized in that, The balancing component (19) includes a balancing vertical rod (191), which is connected to the power block (6). The balancing vertical rod (191) is connected to the balancing horizontal rod (192), and a balancing sleeve (193) is fitted on the balancing horizontal rod (192). The balancing sleeve (193) is connected to the gear (18) through the moving rope (20).

5. A turbomolecular pump according to claim 4, characterized in that, The balance sleeve (193) and the balance rod (191) are connected by a balance spring (194).

6. A turbomolecular pump according to claim 4, characterized in that, The balance bar (192) is provided with a stop block (195).

7. A turbomolecular pump according to claim 1, characterized in that, The bottom end of the lifting sleeve (93) is equipped with a buffer block (911). The buffer block (911) is connected to the lifting box body (91) through a buffer spring (912). The side wall of the lifting box body (91) is provided with a fixed column (913). The fixed column (913) is provided with a fixed groove (914). The fixed groove (914) is connected to the buffer block (911). The buffer block (911) is also connected to a locking rod (915). The locking rod (915) passes through the lifting box body (91) and is provided with a locking port (916).

8. A turbomolecular pump according to claim 1, characterized in that, The lifting box (91) has a locking block (917) on its side wall. The locking block (917) has a locking rod (918) that is pulled out. The locking rod (918) is engaged with the locking port (916). The locking rod (918) has a pull cap, and the pull cap is connected to the locking block (917) by a locking spring (919).

9. A turbomolecular pump according to claim 1, characterized in that, The lifting slide bar (97) is connected to the auxiliary sleeve (920), the auxiliary sleeve (920) is slidably fitted with the auxiliary rod (921), and the auxiliary rod (921) is connected to the inner top wall of the lifting box body (91).

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