A bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof

Abstract

The present invention discloses a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof, comprising: a sensor substrate, wherein the bottom surface of the sensor substrate is set as a fixed surface, the side surface of the sensor substrate is set as a force-bearing surface, and the upper surface of the sensor substrate is provided with a bionic groove structure, wherein the bionic groove structure is a multi-groove structure with a fan-shaped distribution that simulates a scorpion slit receptor; a conductive layer, wherein the conductive layers are multiple and are respectively arranged in the bionic groove structure and within a certain range around the bionic groove structure, and each conductive layer is not in contact with each other in a default state; an electrode, comprising a first electrode and a second electrode, wherein the first electrode and the second electrode are used to connect the conductive layers on the bionic groove structure into a parallel structure; and the three-dimensional force is a three-axial force, and can simultaneously detect forces in three directions, including an X-axis, a Y-axis, and a Z-axis of a vertical force. The bionic flexible three-dimensional force sensor provided by the present invention enables a single sensor to detect three-dimensional forces without relying on an array strain gauge.

Description

Technical Field

[0001] The invention relates to the technical field of bionic strain sensors, and in particular to a bionic flexible three-dimensional force sensor. Background Art

[0002] With the rapid development of science and technology, unidirectional force sensors are gradually unable to meet the requirements in applications. Traditional one-dimensional mechanical sensors can only measure the magnitude of force in one direction. In the face of constantly changing force directions, three-dimensional force sensors are needed, but existing three-dimensional force sensors often combine multiple resistance strain gauge arrays to achieve three-dimensional force detection. Resistance strain gauges can convert changes in strain on mechanical components into changes in resistance. Specifically, when the measured object is deformed by force, the resistance strain gauges pasted on the surface of the measured object will also deform, and then the resistance will change with the action of external force. However, resistance strain gauges usually have very high requirements for the method of pasting them on the measured object. Slight deviations in the position of the patch will also affect the accurate value, so that the data obtained from repeated tests on the same measured object using resistance strain gauges will be different. This limits the performance of three-dimensional force sensors.

[0003] Therefore, the existing three-dimensional force sensor technology is in urgent need of improvement and development. Summary of the invention

[0004] In view of the above-mentioned deficiencies in the prior art, an object of the present invention is to provide a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof. The bionic flexible three-dimensional force sensor provided by the present invention enables a single sensor to detect three-dimensional force without relying on an array strain gauge.

[0005] The technical solution of the present invention is as follows:

[0006] A first aspect of the present invention provides a bionic flexible three-dimensional force sensor, comprising:

[0007] A bionic flexible three-dimensional force sensor, comprising:

[0008] A sensor substrate, wherein the bottom surface of the sensor substrate is set as a fixed surface, the side surface of the sensor substrate is set as a force-bearing surface, and the upper surface of the sensor substrate is provided with a bionic groove structure, wherein the bionic groove structure is a multi-groove structure with a fan-shaped distribution simulating a scorpion slit receptor;

[0009] Conductive layers, wherein the conductive layers are multiple and are respectively arranged on the bionic groove structure and within a certain range around the bionic groove structure, and each conductive layer is not in contact with each other in a default state;

[0010] Electrodes, the electrodes include a first electrode and a second electrode, the first electrode is a multi-electrode group, each first electrode is connected to a conductive layer, the second electrode is a single electrode, the conductive layer on each bionic groove structure is connected to the second electrode, and the first electrode and the second electrode are used to connect the conductive layers on the bionic groove structure into a parallel structure;

[0011] The three-dimensional force is a three-axial force, which can simultaneously detect forces in three directions, including the X-axis, the Y-axis, and the Z-axis of the vertical force.

[0012] The bionic flexible three-dimensional force sensor, wherein the multi-groove structure presenting a fan-shaped distribution is a multi-groove structure in which the groove structure as a whole presents a fan-shaped distribution.

[0013] The bionic flexible three-dimensional force sensor, wherein the number of grooves of the multi-groove structure is N, where N is greater than or equal to three.

[0014] In the bionic flexible three-dimensional force sensor, the overall morphology of a single groove in the groove structure is a straight groove or a regular arc groove.

[0015] The bionic flexible three-dimensional force sensor, wherein the cross-sectional structure of the bionic groove structure is a triangle, and the lower end angle is less than 60°.

[0016] The bionic flexible three-dimensional force sensor, wherein the force-bearing surface is where the sensor contacts the external force, and the three-dimensional force is applied to the force-bearing surface;

[0017] The shape of the force-bearing surface is affected by the force-applying object, and the size and shape of the force-bearing surface are consistent with the size and shape of the surface where the force-applying object contacts the sensor.

[0018] In the bionic flexible three-dimensional force sensor, the fixing surface is a symmetrical surface opposite to the surface with the bionic groove structure, and is used to fix the sensor.

[0019] In the bionic flexible three-dimensional force sensor, the conductive layer is formed by sputtering, painting or evaporating a conductive material on the sensor substrate with the aid of a mask.

[0020] In the bionic flexible three-dimensional force sensor, the conductive material of the conductive layer includes but is not limited to one or more of gold, silver, copper and carbon nanoparticles.

[0021] A three-dimensional force detection method based on any one of the bionic flexible three-dimensional force sensors, comprising the steps of:

[0022] When the bionic flexible three-dimensional force sensor is not subjected to external force and does not deform, the second electrode is connected to the first electrode respectively arranged on the bionic groove structure to form a parallel circuit, and the resistance in each branch is the initial resistance of the conductive layer at the bionic groove structure;

[0023] When the force-bearing surface of the sensor substrate is subjected to external force, the bionic groove structure arranged on the sensor substrate is deformed; the corresponding conductive layer arranged on the bionic groove structure is deformed accordingly, resulting in a change in its own resistance. At this time, the second electrode and the first electrode are respectively connected to form a parallel circuit, and the resistance in each branch is the actual resistance of the conductive layer at the bionic groove structure;

[0024] When the sensor substrate is subjected to pressure, since the cross-sectional structure of the bionic groove structure is a triangle, the spacing of the bionic groove structure decreases, the sharp angle α of the bionic groove structure decreases, the spacing at the sharp corner of the bionic groove structure decreases, the contact increases, the contact area of ​​the conductive layer at each bionic groove structure increases, and the actual resistance of the conductive layer at the bionic groove structure decreases;

[0025] When the sensor substrate is subjected to tension, the spacing between the bionic groove structures expands, the sharp angle α of the bionic groove structures increases, the contact decreases, and the contact area of ​​the conductive layer at each bionic groove structure decreases, so that the actual resistance of the conductive layer at the bionic groove structure increases;

[0026] By calibrating the bionic flexible three-dimensional sensor in advance, the relationship between the resistance change at each bionic groove structure and the three-dimensional force size is determined, and the three-dimensional force size and direction are determined by detecting the resistance signal change.

[0027] Beneficial effects: The present invention provides a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof. The bionic flexible three-dimensional force sensor provided by the present invention enables a single sensor to detect three-dimensional force without relying on an array strain gauge. The present invention also has the following beneficial effects:

[0028] 1. The present invention has low implementation cost and is convenient for daily application.

[0029] 2. The present invention uses a bionic groove structure instead of a traditional array strain sensor to simultaneously detect three-dimensional forces, and has a simple structure.

[0030] 3. The present invention can detect three-dimensional force pressure by detecting changes in resistance signals, does not require complex algorithms to process signal data, and simplifies subsequent circuit systems.

[0031] 4. The present invention can improve the three-dimensional force detection accuracy by adjusting the number of bionic groove structures. BRIEF DESCRIPTION OF THE DRAWINGS

[0032] Figure 1Schematic diagram of the ultra-depth-of-field microscopy results of the scorpion's slit receptors.

[0033] Figure 2 The figure is a schematic diagram of the overall structure of a bionic flexible three-dimensional force sensor according to an embodiment of the present invention.

[0034] Figure 3 Schematic diagram of the bionic groove structure of the bionic flexible three-dimensional force sensor according to an embodiment of the present invention.

[0035] Figure 4 Schematic diagram of the cross-section of the bionic groove structure of the bionic flexible three-dimensional force sensor according to an embodiment of the present invention.

[0036] Figure 5 Schematic diagram of the mask structure of the bionic flexible three-dimensional force sensor according to an embodiment of the present invention.

[0037] Figure 6 Schematic diagram of the detection principle of the bionic flexible three-dimensional force sensor according to an embodiment of the present invention.

[0038] Figure 7 The finite element simulation diagram of the bionic flexible three-dimensional force sensor according to an embodiment of the present invention under different three-dimensional forces.

[0039] Figure 8 The schematic diagram of the specific structure of a bionic flexible three-dimensional force sensor including electrodes 3 according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0040] The present invention provides a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof. To make the purpose, technical solution and effect of the present invention clearer and more specific, the present invention is further described in detail below. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0041] Unless otherwise defined, all technical terms and scientific terms used herein have the same meaning as those commonly understood by those skilled in the art of the present invention. The terms used in the specification of the present invention herein are only for the purpose of describing specific embodiments and are not intended to limit the present invention.

[0042] With the continuous deepening of bionics research, many technical problems can be inspired by the biological world. The present invention is inspired by the scorpion's suture receptors. Scorpions have highly degraded vision, but they can rely on suture receptors to achieve ultra-sensitive perception of vibration signals from any direction. Specifically, the receptors on the scorpion's metatarsals can respond to the squeezing of the tarsus. Furthermore, the suture receptors can sense the three-dimensional force exerted on the tarsus in different scorpion foot postures. By analyzing and studying the structure of the scorpion's suture receptors, specifically, the ultra-depth of field microscope test results of the scorpion's suture receptors are as follows: Figure 1As shown in the figure, the scorpion's slit receptors are distributed in a fan-shaped pattern, and each groove is of different sizes, including short straight grooves and arc-shaped grooves with a certain curvature. Based on this, a bionic flexible three-dimensional force sensor is proposed.

[0043] like Figure 2 As shown, an embodiment of the present invention provides a bionic flexible three-dimensional force sensor, comprising:

[0044] A sensor substrate 1 , a conductive layer 2 arranged on the sensor substrate 1 , and an electrode 3 connected to the conductive layer 2 .

[0045] The bottom surface of the sensor substrate 1 is set as a fixed surface 13, the side surface of the sensor substrate 1 is set as a force-bearing surface 12, and the upper surface of the sensor substrate 1 is provided with a bionic groove structure 11, which is a multi-groove structure with a fan-shaped distribution that simulates the scorpion slit receptor. Such a structural setting can achieve ultra-sensitive perception of force signals from any direction and improve the detection sensitivity of the sensor.

[0046] There are multiple conductive layers 2, which are respectively arranged on the bionic groove structure 11 and within a certain range around the bionic groove structure, and each conductive layer 2 is not in contact with each other in a default state;

[0047] like Figure 8 As shown, the electrode 3 in the embodiment of the present invention includes a first electrode 31 and a second electrode 32, the first electrode 31 is a multi-electrode group, each first electrode 31 is connected to a conductive layer 2, the second electrode 32 is a single electrode, the conductive layer 2 on each bionic groove structure 11 is connected to the second electrode 32, and the first electrode 31 and the second electrode 32 are used to connect the conductive layer on the bionic groove structure into a parallel structure. In the embodiment of the present invention, the conductive layer 2 and the electrode 3 are connected in a parallel structure, and the resistance of the conductive layer will change accordingly when it is squeezed by force, and then according to a set relationship between the resistance change at each bionic groove structure and the size of the three-dimensional force, in actual testing, the size and direction of the three-dimensional force can be determined very conveniently and quickly through the resistance change.

[0048] In the embodiment of the present invention, the three-dimensional force refers to a three-axial force, that is, forces in three directions, namely, the X-axis, the Y-axis, and the Z-axis (vertical force), can be detected simultaneously.

[0049] The sensor substrate 1 has a bionic groove structure 11 , a force-bearing surface 12 and a fixing surface 13 .

[0050] like Figure 3 As shown, the bionic groove structure 11 refers to a multi-groove structure with fan-shaped distribution inspired by the scorpion slit receptors. Each groove is of different sizes, including short straight grooves and arc grooves with a certain curvature.

[0051] The fan-shaped distribution in the embodiment of the present invention refers to the overall fan-shaped distribution of the groove structure, such as Figure 3 shown.

[0052] The multi-groove structure refers to a structure in which the number of grooves is N, where N is greater than or equal to three. The reason is that when N is less than 3, the detection accuracy is not high, and it is easy to cause the resistance changes caused by different external forces (different directions and sizes) to be the same. For example, when there is only one groove, when two external forces of equal size are applied at symmetrical angles along the vertical plane of the structure, the resistance changes caused are the same. Therefore, it is impossible to distinguish the direction of the force from the resistance change. Therefore, setting N greater than or equal to three in the present invention can improve the detection accuracy.

[0053] In the embodiment of the present invention, the overall morphology of a single groove in the groove structure 11 is a straight groove or a regular arc groove, such as Figure 4 As shown, the cross-sectional shape of the bionic groove structure is a triangular structure, and the sharp angle α is less than 60°. The cross-sectional shape of the bionic groove structure in the embodiment of the present invention is a triangular structure, which is convenient for specific applications. If it is squeezed and deformed, the conductive layer arranged on the bionic groove structure also produces a change in resistance.

[0054] In the embodiment of the present invention, the force-bearing surface 12 refers to the place where the sensor contacts the external force, that is, the three-dimensional force is applied to the force-bearing surface.

[0055] In the embodiment of the present invention, the size and shape of the force-bearing surface 12 are affected by the force-applying object, that is, the size and shape of the force-bearing block need to be consistent with the size and shape of the surface where the force-applying object contacts the sensor, that is, to ensure that the three-dimensional force is applied just to the force-bearing block of the entire force-bearing surface.

[0056] The fixing surface 13 is a symmetrical surface opposite to the surface with the bionic groove structure, and is mainly used to fix the sensor.

[0057] In an embodiment of the present invention, the conductive layer 2 has multiple conductive layers, which are formed by sputtering, coating or evaporating conductive materials on each bionic groove structure of the sensor substrate 1 with the help of a mask. All the conductive layers 2 arranged on each bionic groove structure of the sensor substrate 1 in the embodiment of the present invention are not a complete conductor, that is, the conductive material only exists in each bionic groove structure and a certain range around the bionic groove structure. The certain range refers to the range that ensures that the conductive materials around each bionic groove structure do not contact each other, that is, the conductive layers respectively arranged on each bionic groove structure do not contact each other in the default state. That is, each conductive layer does not contact each other in the default state, and has an independent extrusion space to reflect the change in resistance when subjected to force extrusion.

[0058] like Figure 5As shown, the mask described in the embodiment of the present invention needs to be designed according to the structural position and size of the bionic groove structure on the sensor substrate. In the specific mask, a1>a2, b1>b2, where a1 and b1 represent the length and width of the bionic groove structure of the mask, and a2 and b2 represent the length and width of the bionic groove structure on the sensor substrate.

[0059] In the embodiment of the present invention, the conductive material for preparing the conductive layer includes but is not limited to one or more of gold, silver, copper and carbon nanoparticles. The electrodes should ensure that the conductive layer on the bionic groove structure is a parallel structure. That is, in the embodiment of the present invention, if the conductive layer is regarded as a resistor, it forms a parallel circuit through the electrodes.

[0060] Specifically, in the embodiment of the present invention, Figure 2 As shown, the electrode 3 can be divided into a first electrode 31 and a second electrode 32 .

[0061] Preferably, if Figure 2 As shown, the first electrode 31 is a multi-electrode group, that is, the number of electrodes is consistent with the number of bionic groove structures. Each first electrode is connected to the conductive layer on the bionic groove structure.

[0062] like Figure 2 As shown, the second electrode 32 is a single electrode, that is, the conductive layers on each bionic groove structure are connected to the second electrode and share the second electrode.

[0063] like Figure 6 As shown, the detection principle of the present invention is explained by taking the number N of bionic groove structures equal to 3 as an example. Figure 6 In the embodiment, three conductive layers (such as Figure 6 a) are connected to three first electrodes (such as Figure 6 a), and are connected together with a second electrode 32.

[0064] like Figure 6 As shown in a, when the bionic flexible three-dimensional force sensor is not subjected to external force, no deformation occurs. At this time, the second electrode 32 and the three first electrodes (such as Figure 6 311, 312 and 313) shown in a are connected to form Figure 6 The parallel circuit shown in b, the resistance in each branch is the initial resistance R of the conductive layer at the bionic groove structure. 10 , R 20 , R 30 .

[0065] In the embodiment of the present invention, Figure 8As shown in FIG. 1 , when the force-bearing surface 12 of the sensor substrate 1 is subjected to external force, the bionic groove structure will deform, and the deformation amount is greater than that of the part without the bionic groove structure. In the embodiment of the present invention, since the bionic groove structure and its surroundings are covered with a conductive layer, when the sensor substrate 1 is deformed, the conductive layer 2 is also deformed, resulting in a change in its own resistance. At this time, the second electrode 32 and the first electrode (such as Figure 6 311, 312 and 313) shown in a are connected to form Figure 6 The parallel circuit shown in b, the resistance in each branch is the actual resistance R of the conductive layer at the bionic groove structure. 11 , R 21 , R 31 .

[0066] Specifically, taking the conductive layer material as silver nanoparticles as an example, when the sensor substrate 1 is subjected to pressure, since the cross-sectional structure of the bionic groove structure is a triangle, the spacing of the bionic groove structure decreases (the sharp angle α decreases, the spacing at the sharp corner will first decrease, and the contact increases, such as Figure 4 b), the contact area of ​​the conductive layer at each bionic groove structure increases (especially the conductive layer at the sharp corners, such as Figure 4 b), the resistance decreases, but due to the different positions of the bionic groove structure, the deformation size of the bionic groove structure is not consistent (see below for details, Figure 7 ac), resulting in the resistance reduction being inconsistent.

[0067] When the sensor substrate 1 is subjected to tension, the spacing of the bionic groove structure expands (the sharp angle α increases and the contact decreases, such as Figure 4 c), the contact area of ​​the conductive layer at each bionic groove structure is reduced. At the same time, since the conductive layer is made of brittle material, it will break brittlely when subjected to external force, and cracks will be generated in the conductive layer, resulting in a sharp increase in resistance. In addition, since the spacing between the cracks is at the micro-nano level, there is a tunneling effect on both sides of the crack, so it will not cause the conductive layer to be broken, but will only increase the resistance.

[0068] However, due to the different positions of the bionic groove structures, the deformation sizes of the bionic groove structures are not consistent (see below for details). Figure 7 ac), resulting in different resistance increase amplitudes. For easier understanding, this embodiment explains the principle of single and multiple bionic groove structures responding to three-dimensional forces respectively. Since three-dimensional forces can be decomposed into component forces along the XYZ axis, for a single bionic groove structure, when the magnitude and direction of the external force are constant, the component forces along the XYZ axis are fixed, and the magnitude of the deformation generated is fixed. Therefore, when the applied external force is fixed, the resistance change of the conductive layer at the bionic groove structure is also fixed.

[0069] When the external force remains unchanged in magnitude but changes in direction, the force component along the XYZ axis will also change, the force component on the bionic groove structure will also change, and the deformation of the sensor will also change, resulting in a change in resistance. When the external force remains unchanged in direction but changes in magnitude, the force component along the XYZ axis will also change, the force component on the bionic groove structure will also change, and the deformation of the sensor will also change, resulting in a change in resistance (see below for details). Figure 7 ac). For multiple bionic groove structures at different positions, when an external force is applied, the deformations generated are different because the distances from the force-bearing surface are different. Therefore, the resistance changes between the conductive layers at each bionic groove structure are also inconsistent. Therefore, the present invention can calibrate the bionic flexible three-dimensional sensor in advance, that is, determine the relationship between the resistance change at each bionic groove structure and the three-dimensional force size. In actual testing, the size and direction of the three-dimensional force can be determined by the resistance change. The details are as follows:

[0070] Further, if Figure 7 As shown, the present invention explains the influence of the bionic groove structure on the sensor through a finite element simulation diagram of applying different three-dimensional forces to the bionic flexible three-dimensional force sensor.

[0071] like Figure 7 ac applies axial forces of 8N along the X, Y, and Z axes to the force-bearing surface 12, respectively. It can be seen from the figure that even when the same force is applied, the deformation of the sensor substrate is not the same. Further analysis from the figure shows that when different axial forces are applied, the maximum position of the substrate deformation is not consistent and there are significant differences; secondly, when the direction of the axial force is different, the deformation of each bionic groove structure is also significantly different, which is also the key to the bionic groove structure being able to detect three-dimensional axial forces. For the sensing substrate, the magnitude of the force is the same, but for a single groove, the deformation of the groove is different due to the different directions of the force. Figure 7 Taking 7a and 7b as examples, forces were applied along the X-axis and Y-axis respectively. The groove near the symmetry plane of the force-bearing surface in 7a (in the ellipse) was almost not deformed, but obvious deformation could be seen at the same position in 7b (in the ellipse).

[0072] Therefore, it can be proved that the reasonable arrangement of the bionic groove structure can make the substrate respond to forces in different directions. Figure 7 As shown in FIG. d, the force-bearing surface 12 exerts axial forces (about 13.85 N) along the three axes X, Y, and Z at the same time, and the force component on each axis is 8 N. It can be seen that the greater the external force on the sensor substrate, the greater the overall deformation. In addition, since it is the combined force of the three axial forces, each groove (which deforms under a single axial force) also deforms (such as Figure 7 d as shown in the oval circle). Figure 7 As shown in Figs. e and 7f, the same force of opposite direction (8N, 2N along the X, Y, and Z axes) is applied to the force-bearing surface. It can be seen that the overall deformation is consistent, indicating that the sensor substrate can respond well to forces of the same magnitude. Secondly, the direction of the force is opposite, and the deformation of the bionic groove structure is just the opposite. The spacing of the bionic groove structure in 7e decreases, and the spacing of the bionic groove structure in 7f increases, which shows that the sensor substrate can respond well to forces of the same magnitude in different directions.

[0073] Based on the above embodiment, the embodiment of the present invention further provides a three-dimensional force detection method of a bionic flexible three-dimensional force sensor, comprising the following steps:

[0074] Step 1:.

[0075] The present invention provides a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof. The bionic flexible three-dimensional force sensor is relatively traditional.

[0076] In summary, the present invention provides a bionic flexible three-dimensional force sensor and a three-dimensional force detection method thereof, wherein the bionic flexible three-dimensional force sensor has the following beneficial effects:

[0077] 1. The present invention has low implementation cost and is convenient for daily application.

[0078] 2. The present invention uses a bionic groove structure instead of a traditional array strain sensor to simultaneously detect three-dimensional forces, and has a simple structure.

[0079] 3. The present invention can detect three-dimensional force pressure by detecting changes in resistance signals, does not require complex algorithms to process signal data, and simplifies subsequent circuit systems.

[0080] 4. The present invention can improve the three-dimensional force detection accuracy by adjusting the number of bionic groove structures.

[0081] It should be understood that the application of the present invention is not limited to the above examples. For ordinary technicians in this field, improvements or changes can be made based on the above description. All these improvements and changes should fall within the scope of protection of the claims attached to the present invention.

Claims

1. A bionic flexible three-dimensional force sensor, characterized in that: include: A sensor substrate, wherein the bottom surface of the sensor substrate is set as a fixed surface, the side surface of the sensor substrate is set as a force-bearing surface, and the upper surface of the sensor substrate is provided with a bionic groove structure, wherein the bionic groove structure is a multi-groove structure with a fan-shaped distribution simulating a scorpion slit receptor; Conductive layers, wherein the conductive layers are multiple and are respectively arranged on the bionic groove structure and within a certain range around the bionic groove structure, and each conductive layer is not in contact with each other in a default state; Electrodes, the electrodes include a first electrode and a second electrode, the first electrode is a multi-electrode group, each first electrode is connected to a conductive layer, the second electrode is a single electrode, the conductive layer on each bionic groove structure is connected to the second electrode, and the first electrode and the second electrode are used to connect the conductive layers on the bionic groove structure into a parallel structure; The three-dimensional force is a three-axial force, which can simultaneously detect forces in three directions, including the X-axis, the Y-axis, and the Z-axis of the vertical force.

2. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The multi-groove structure presenting a fan-shaped distribution is a multi-groove structure in which the groove structure as a whole presents a fan-shaped distribution.

3. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The number of grooves in the multi-groove structure is N, where N is greater than or equal to three.

4. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The overall morphology of a single groove in the groove structure is a straight groove or a regular arc groove.

5. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The cross-sectional structure of the bionic groove structure is a triangle, and the lower end angle is less than 60 degrees.

6. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The force-bearing surface is the place where the sensor contacts the external force, and the three-dimensional force is applied to the force-bearing surface; The shape of the force-bearing surface is affected by the force-applying object, and the size and shape of the force-bearing surface are consistent with the size and shape of the surface where the force-applying object contacts the sensor.

7. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The fixing surface is a symmetrical surface opposite to the surface having the bionic groove structure, and is used for fixing the sensor.

8. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The conductive layer is formed by sputtering, painting or evaporating a conductive material on the sensor substrate with the aid of a mask.

9. The bionic flexible three-dimensional force sensor according to claim 1, characterized in that: The conductive material of the conductive layer includes, but is not limited to, one or more selected from the group consisting of gold, silver, copper and carbon nanoparticles.

10. A three-dimensional force detection method based on the bionic flexible three-dimensional force sensor according to any one of claims 1 to 9, characterized in that: Includes steps: When the bionic flexible three-dimensional force sensor is not subjected to external force and does not deform, the second electrode is connected to the first electrode respectively arranged on the bionic groove structure to form a parallel circuit, and the resistance in each branch is the initial resistance of the conductive layer at the bionic groove structure; When the force-bearing surface of the sensor substrate is subjected to external force, the bionic groove structure arranged on the sensor substrate is deformed; the corresponding conductive layer arranged on the bionic groove structure is deformed accordingly, resulting in a change in its own resistance. At this time, the second electrode and the first electrode are respectively connected to form a parallel circuit, and the resistance in each branch is the actual resistance of the conductive layer at the bionic groove structure; By calibrating the bionic flexible three-dimensional sensor in advance, the relationship between the resistance change at each bionic groove structure and the three-dimensional force size is determined, and the three-dimensional force size and direction are determined by detecting the resistance signal change.

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