Automatic sheet taking and placing device and automatic sheet taking and placing method

Abstract

The application provides an automatic wafer taking and placing device and an automatic wafer taking and placing method. The automatic wafer taking and placing device comprises: a plurality of suction assemblies arranged side by side, wherein each suction assembly comprises: a suction plate set comprising a first suction plate and a second suction plate which are parallel to each other and are used for sucking solar cell wafers respectively; a driver used for driving the first suction plate and the second suction plate to move relatively so as to change the relative positions of the first suction plate and the second suction plate in the suction plate set; and a vacuum pipeline system used for changing and maintaining the working states of the first suction plate and the second suction plate in the suction plate set respectively. Through the cooperation between the relative positions of the first suction plate and the second suction plate in the suction plate set and the working states of the first suction plate and the second suction plate, the transfer of the solar cell wafers between different processes is realized, and the wafer breakage rate and the wafer scratching risk are reduced.

Description

Technical Field

[0001] This application relates to the field of solar cell manufacturing equipment technology, and in particular to an automatic cell loading and unloading device and method. Background Technology

[0002] In typical solar cell manufacturing processes, the transfer of solar cell preforms between two adjacent processes involves complex loading and unloading procedures. These procedures include multiple insertion and removal operations, as well as the use of transfer mechanisms to transport the solar cell preforms. Consequently, the transfer of solar cell preforms between adjacent processes typically results in a high breakage rate, a significant risk of scratches, and low safety.

[0003] Therefore, there is an urgent need for an automatic film loading and unloading device and an automatic film loading and unloading method. Summary of the Invention

[0004] The first aspect of this application provides an automatic wafer loading and unloading device for automatically loading and unloading solar cell preforms, comprising:

[0005] Multiple adsorption components are arranged side by side. The adsorption components include:

[0006] The suction cup plate assembly includes a first suction cup plate and a second suction cup plate that are parallel to each other and are used to adsorb solar cell preforms, with the first suction cup plate and the second suction cup plate being alternately arranged in two adjacent adsorption assemblies;

[0007] A driver is used to drive the first suction cup plate and the second suction cup plate to move relative to each other.

[0008] The vacuum piping system is used to change and maintain the operating states of the first and second suction cup plates in the suction cup plate assembly. The operating states include a vacuum adsorption state for adsorbing solar cell preforms and a desorption state for detaching solar cell preforms.

[0009] The transfer of solar cell preforms between different processes is achieved by the relative positions of the first and second suction cup plates in the suction cup plate assembly and the coordinated changes between the working states of the first and second suction cup plates.

[0010] The automatic wafer loading and unloading device provided in the first aspect of this application includes a suction cup assembly comprising a first suction cup plate and a second suction cup plate that are parallel to each other and are used to adsorb solar cell preforms. Under the drive of a driver, the first and second suction cup plates move relative to each other to change their relative positions in the suction cup plate assembly. The coordination and change between the relative positions of the first and second suction cup plates and their respective working states can realize the wafer loading, unloading, and insertion operations of different processes in the same device. At the same time, no transfer mechanism is required during the transfer of solar cell preforms between different processes, which greatly reduces the number of wafer loading and insertion operations between different processes, reduces equipment costs, reduces the breakage rate and the risk of scratches on solar cell preforms, and ensures the safety of cell production.

[0011] The second aspect of this application provides an automatic wafer loading and unloading method, which uses the automatic wafer loading and unloading device provided in the first aspect of this application to automatically load and unload solar cell preforms, including:

[0012] The adsorption component is inserted into the carrier used in the first process, which is loaded with solar cell preforms. The first suction cup plate is in a vacuum adsorption state and the second suction cup plate is in a de-adsorption state through the vacuum pipeline system. The first suction cup plate and the second suction cup plate are in a first relative position.

[0013] The first surface of the solar cell preform is adsorbed by the first suction cup plate in a vacuum adsorption state, and the first surface is treated by the first process.

[0014] Control the removal of the adsorption assembly containing the solar cell preform from the carrier used in the first process;

[0015] The first suction cup plate and the second suction cup plate are moved relative to each other by a driver. The first suction cup plate and the second suction cup plate are in a second relative position so that the second suction cup plate contacts the second surface of the solar cell preform. The first surface and the second surface are opposite to each other and the second surface is the surface to be processed in the second process.

[0016] The vacuum pipeline system is controlled to change the desorption state of the second suction cup plate to the vacuum adsorption state, so that the second suction cup plate adsorbs the second surface;

[0017] The vacuum adsorption state of the first suction cup plate is changed to the desorption state by the vacuum pipeline system, and the driver drives the first suction cup plate and the second suction cup plate to move relative to each other until they return to the first relative position.

[0018] The adsorption assembly with the solar cell preform is inserted into the carrier used in the second process. The vacuum pipeline system changes the vacuum adsorption state of the second suction cup plate to the desorption state. The adsorption assembly is removed from the carrier used in the second process so that the solar cell preform is placed in the carrier used in the second process and the second surface is exposed.

[0019] The automatic wafer loading and unloading method provided in the second aspect of this application involves a first suction cup plate used to pick up solar cell preforms located in the carrier used in the first process. The movement of the first and second suction cup plates, in coordination with the changing working states of both, causes the second suction cup plate to adsorb the solar cell preforms processed in the first process. The second suction cup plate then places the solar cell preforms into the carrier used in the second process. This automatic wafer loading and unloading method eliminates the transfer steps of the solar cell preform transfer mechanism between the first and second processes, thereby reducing the number of wafer loading and unloading operations between the first and second processes, improving the transfer efficiency of solar cell preforms between the first and second processes, reducing the breakage rate and the risk of scratches on the solar cell preforms, and ensuring the safety of cell production. Furthermore, the loading and unloading of solar cell preforms during the transfer process between the first and second processes is completed by the automatic wafer loading and unloading device, resulting in low production equipment costs and reduced cell manufacturing costs. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a front view of an embodiment of the automatic film loading and unloading device provided in the first aspect of this application;

[0022] Figure 2 This is a three-dimensional structural diagram from one perspective of an embodiment of the automatic film loading and unloading device provided in the first aspect of this application;

[0023] Figure 3 This is a three-dimensional structural schematic diagram from another perspective of an embodiment of the automatic film loading and unloading device provided in the first aspect of this application;

[0024] Figure 4 This is a schematic diagram of the automatic plate picking and placing device provided in the first aspect of this application assembled on a robotic arm;

[0025] Figure 5 This is a front view of an adsorption component connected to a vacuum distribution pipe in one embodiment of the automatic pick-and-place device provided in the first aspect of this application;

[0026] Figure 6 This is a three-dimensional structural diagram of an adsorption component connected to a vacuum distribution pipe in one embodiment of the automatic pick-and-place device provided in the first aspect of this application.

[0027] Figure 7 This is a simplified front view of the adsorption component connected to a vacuum distribution pipe in another embodiment of the automatic pick-and-place device provided in the first aspect of this application;

[0028] Figure 8 This is a schematic diagram of the automatic wafer loading and unloading device provided in the first aspect of this application, which has solar cell preforms adsorbed on it.

[0029] Figure 9 This is a top view of a graphite boat in the first process, showing the untreated second surface of the solar cell preform abutting against a graphite sheet while the first surface to be treated is exposed.

[0030] Figure 10 This is a schematic diagram of the first surface of the solar preform adsorbed by the automatic cell pick-and-place device in steps S10 and S20 of the automatic cell pick-and-place method provided in the second aspect of this application.

[0031] Figure 11 This is a schematic diagram of the transfer of solar prefabricated cells from the first suction cup plate to the second suction cup plate in steps S30 to S50 of the automatic cell loading and unloading method provided in the second aspect of this application.

[0032] Figure 12 This is a schematic diagram showing the first and second suction cup plates returning to their first relative positions in step S60 of the automatic pick-and-place method provided in the second aspect of this application. Point A is the view from the right side of the automatic film loading and unloading device. Diagram of solar cell preform structure;

[0033] Figure 13 This is a front view of the automatic film loading and unloading device after it has been horizontally rotated 180° in the automatic film loading and unloading method provided in the second aspect of this application;

[0034] Figure 14 This is a front view of prefabricated solar cells placed on a graphite boat;

[0035] Figure 15 This is a top view of a graphite boat in the second process, showing the first surface of the pre-fabricated solar cell wafer being processed and attached to a graphite sheet, while the second surface to be processed is exposed.

[0036] Explanation of reference numerals in the attached figures:

[0037] Automatic film loading and unloading device-10;

[0038] Adsorption assembly - 11; mounting clamp - 11a; first suction cup plate - 11b; second suction cup plate - 11c; suction nozzle - 11d; circular suction head - 11e; ventilation component - 11f; hollow structure - 11h;

[0039] First fastening plate-121; Second fastening plate-122; Fixed platform-13; Connecting component-14;

[0040] First vacuum main pipe - 15; First vacuum branch pipe - 151; First pipe connector - 152; Second vacuum main pipe - 16; Second vacuum branch pipe - 161; Second pipe connector - 162; Pipe laying arm - 17; Main section - 171;

[0041] Solar cell preform - 20; First surface - 21; Second surface - 22; Longitudinal central axis - 23;

[0042] Robotic arm-30;

[0043] Graphite boat-40; Graphite sheet-41; Checkpoint-42. Detailed Implementation

[0044] The technical solutions of this application will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this application. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0045] In the description of this application, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0046] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installation," "connection," and "linking" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection between two components. Those skilled in the art can understand the specific meaning of the above terms in this application based on the specific circumstances.

[0047] Furthermore, the technical features involved in the different embodiments of this application described below can be combined with each other as long as they do not conflict with each other.

[0048] In typical solar cell manufacturing processes, the transfer of solar cell preforms between two adjacent processes involves complex loading and unloading procedures. These procedures include multiple insertion and removal operations, as well as the use of transfer mechanisms to transport the preforms. Therefore, the transfer of solar cell preforms between adjacent processes typically results in a high breakage rate, a significant risk of scratches, and low safety. Specifically, the typical transfer of solar cell preforms between adjacent processes involves: retrieving silicon wafers from the basket of 100 wafers from the previous process, placing them in the loading conveyor channel, then transferring them to the unloading point where a robot retrieves them and inserts them into the carrier for the current process. After the current process is completed, the wafers are retrieved from the carrier and placed in the unloading conveyor channel, then transferred to the basket of 100 wafers via the unloading conveyor channel, and finally proceeding to the next process.

[0049] It should be noted that the solar cell preform in this application is a silicon wafer or a silicon wafer that has undergone some solar cell processing steps.

[0050] Specifically, the solar cell manufacturing process includes two consecutive steps: back-side coating and front-side coating. Both processes operate under vacuum, depositing a passivation film (such as silicon nitride) onto the silicon wafer surface. During each coating process, a silicon wafer is retrieved from the basket of wafers from the previous process, transported to the loading conveyor, and then to the unloading point. A robot at the unloading point retrieves the wafer and inserts it into a graphite boat. After one coating cycle, the robot retrieves the wafer from the graphite boat, transports it through the unloading conveyor to the basket of wafers, and then proceeds to the next process. In other words, back-side coating and front-side coating are treated as two separate processes, with the silicon wafer undergoing the same process twice before reaching the post-coating screen printing stage. This makes the solar cell coating process complex and unsafe. The multiple wafer insertions and retrievals, along with the intermediate transport processes, can easily lead to wafer fragments and scratches, affecting both the quality and cost of solar cell production.

[0051] This application is made in light of the discovery and analysis of the aforementioned technical problems.

[0052] The following is combined Figures 1 to 8 The structure of the automatic film loading and unloading device 10 in the first aspect embodiment of this application will be described.

[0053] The first aspect of this application provides an automatic wafer loading and unloading device 10 for automatically loading and unloading solar cell preforms 20, comprising:

[0054] Multiple adsorption components 11 arranged side by side, each adsorption component 11 including:

[0055] The suction cup plate assembly includes a first suction cup plate 11b and a second suction cup plate 11c that are parallel to each other and are used to adsorb the solar cell preform 20, respectively. The first suction cup plate 11b and the second suction cup plate 11c are alternately arranged in two adjacent adsorption assemblies 11.

[0056] A driver is used to drive the first suction cup plate 11b and the second suction cup plate 11c to move relative to each other, so as to change the relative position of the first suction cup plate 11b and the second suction cup plate 11c in the suction cup plate group.

[0057] The vacuum pipeline system is used to change and maintain the working states of the first suction cup plate 11b and the second suction cup plate 11c in the suction cup plate assembly. The working states include a vacuum adsorption state for adsorbing the solar cell preform 20 and a desorption state for detaching from the solar cell preform 20.

[0058] The transfer of the solar cell preform 20 between different processes is achieved by the relative positions of the first suction plate 11b and the second suction plate 11c in the suction plate assembly and the coordination and transformation between the working states of the first suction plate 11b and the second suction plate 11c.

[0059] It should be noted that the relative movement of the first suction cup plate 11b and the second suction cup plate 11c includes: the first suction cup plate 11b moving towards or away from the second suction cup plate 11c, the second suction cup plate 11c moving towards or away from the first suction cup plate 11b, and the first suction cup plate 11b moving towards or away from the second suction cup plate 11c while the second suction cup plate 11c moves towards or away from the first suction cup plate 11b.

[0060] The relative positions of the first suction plate 11b and the second suction plate 11c, as well as the coordination and transformation between their respective working states, allow for the implementation of different processes of wafer loading, unloading, and insertion within the same device. For example, the solar cell manufacturing process includes a first process and a second process executed sequentially. After the first process is completed, multiple solar cell preforms are placed side-by-side in a first carrier. The first suction plate 11b and the second suction plate 11c are in a first relative position, with the first suction plate 11b in a vacuum adsorption state and the second suction plate 11c in a desorption state. The automatic wafer loading and unloading device 10 uses the first suction plate 11b to adsorb the solar cell preforms in the first carrier and removes them from the first carrier to achieve wafer loading and unloading. The relative movement of the first suction plate 11b and the second suction plate 11c refers to the first suction plate 11b and the second suction plate 11c being in a second relative position. At this time, one side of the solar cell preform is adsorbed by the first suction plate 11b, and the other side is against the second suction plate 11c. The second suction plate 11c is in a vacuum adsorption state, thus adsorbing the solar cell preform, while the first suction plate 11b is in a de-adsorption state. After the solar cell preform completes the exchange adsorption between the first suction plate 11b and the second suction plate 11c, the first suction plate 11b and the second suction plate 11c change from the second relative position to the first relative position, making room for the other side of the solar cell preform facing away from the second suction plate 11c to insert the preform, thus avoiding the first suction plate 11b from affecting the insertion. During the insertion process, the second suction plate 11c of the automatic cell loading and unloading device 10 adsorbs the solar pre-fabricated cell and inserts it into the carrier of the second process. After the solar pre-fabricated cell is inserted into the preset position of the carrier of the second process, the second suction plate 11c changes to a de-adsorption state so that the automatic cell loading and unloading device 10 can be removed from the carrier of the second process. As can be seen from the above, no transfer mechanism is required during the transfer of the solar cell pre-fabricated cell 20 between different processes, which greatly reduces the number of cell loading and unloading operations between different processes, reduces equipment costs, reduces the breakage rate and the risk of scratches on the solar cell pre-fabricated cell 20, and ensures the safety of cell production.

[0061] In some optional embodiments of the first aspect of this application, the fixing assembly includes a fixing platform 13 and a fastening plate. The fixing platform 13 is used to suspend a plurality of adsorption components 11. The fastening plate includes a first fastening plate 121 and a second fastening plate 122 respectively disposed at both ends of the bottom side of the fixing platform 13. A plurality of adsorption components 11 are arranged laterally from the first fastening plate 121 to the second fastening plate 122, and the first fastening plate 121 and the second fastening plate 122 clamp the plurality of adsorption components 11 onto the fixing platform 13.

[0062] In some optional embodiments of the first aspect of this application, the actuator includes a cylinder, the power output end of which is connected to the suction cup plate assembly to drive the first suction cup plate 11b and the second suction cup plate 11c to move relative to each other. Exemplarily, there can be multiple cylinders, each with its power output shaft connected to the first suction cup plate 11b and the second suction cup plate 11c of each suction cup plate assembly, enabling movement of the first suction cup plate 11b and the second suction cup plate 11c in each assembly. A controller can individually control the power output shaft of each cylinder to drive the first suction cup plate 11b and / or the second suction cup plate 11c to move. Alternatively, there can be one cylinder, which may include multiple power output shafts, each connected to either the first suction cup plate 11b or the second suction cup plate 11c in each suction cup plate assembly. A controller can control each power output shaft of the cylinder to operate independently to drive the first suction cup plate 11b and / or the second suction cup plate 11c to move.

[0063] In some optional embodiments of the first aspect of this application, the automatic pick-and-place device 10 further includes a connecting component 14, which is disposed on the upper side of the fixed platform 13 and is used to connect with the robotic arm 30. Figure 4 The illustration shows a scenario where the robotic arm 30 is connected to the automatic film pick-and-place device 10, allowing the position of the device to be adjusted via the robotic arm 30. Exemplarily, the connecting member 14 can be snapped into the robotic arm 30.

[0064] In these embodiments, the robotic arm 30 moves in multiple dimensions in space to change the position of the automatic pick-and-place device provided in the first aspect of this application, thereby enabling the adsorption component 11 of the automatic pick-and-place device to extend into and withdraw from the carrier, or to realize the overall movement function of the automatic pick-and-place device.

[0065] In some optional embodiments of the first aspect of this application, the adsorption assembly 11 further includes a mounting clamp 11a, which is disposed on the bottom side of the fixed platform 13 for mounting the suction cup plate assembly. The mounting clamp 11a has a channel, which can be a slide rail or a slide path. The first suction cup plate 11b moves relative to the second suction cup plate 11c via the channel in the mounting clamp 11a.

[0066] In some optional embodiments of the first aspect of this application, both the first suction plate 11b and the second suction plate 11c are provided with protruding suction nozzles 11d. When the suction nozzles 11d are attached to the surface of the solar cell preform 20, the suction nozzles 11d can adsorb the solar cell preform 20 through the negative pressure environment formed by the vacuum pipeline system.

[0067] In some alternative embodiments, the vacuum piping system includes a first vacuum piping group and a second vacuum piping group with independent airflow.

[0068] Continue to refer to Figure 3 and Figure 5 The first vacuum pipeline group includes a first main vacuum pipeline 15 and multiple first sub-vacuum pipelines 151 connected to the first main vacuum pipeline 15. Each of the multiple first sub-vacuum pipelines 151 corresponds one-to-one with a first suction cup plate 11b in a multiple adsorption assembly 11. The first sub-vacuum pipelines 151 are connected to the suction nozzles 11d of the first suction cup plates 11b.

[0069] Continue to refer to Figure 2 and Figure 5 The second vacuum pipeline group includes a second vacuum main pipeline 16 and a plurality of second vacuum sub-pipelines 161 connected to the second vacuum main pipeline 16. The plurality of second vacuum sub-pipelines 161 correspond one-to-one with the second suction cup plates 11c in the plurality of adsorption components 11. The second vacuum sub-pipelines 161 are connected to the suction cup nozzles 11d of the second suction cup plates 11c.

[0070] like Figure 6 As shown, in some examples of these embodiments, the first suction cup plate 11b forms a cavity communicating with the first vacuum distribution pipe 151, and the second suction cup plate 11c also forms a cavity communicating with the second vacuum distribution pipe 161. The suction nozzle 11d includes a deformable circular suction head 11e and a plurality of ventilation components 11f arranged around the circular suction head 11e and communicating with the cavity of the plate and the circular suction head 11e. The circular suction head 11e has suction holes communicating with the external atmospheric environment. During the wafer loading and unloading process, the vacuum pipeline system is connected to the vacuum generator. When the vacuum generator operates to evacuate, a negative pressure environment is formed in the cavity of the plate and at the circular suction head 11e through the vacuum pipeline system. When the suction nozzle 11d is in contact with the surface of the solar cell preform 20, the suction nozzle 11d can adsorb the solar cell preform 20 in this negative pressure environment.

[0071] In some examples, the first suction cup plate 11b and the second suction cup plate 11c have multiple elongated hollow structures 11h and multiple elongated elliptical hollow structures 11h. The hollow structures 11h are used to reduce the weight of the first suction cup plate 11b and the second suction cup plate 11c and reduce manufacturing costs.

[0072] In some specific examples, multiple elongated perforated structures 11h are symmetrically distributed about the longitudinal central axis of their respective suction cup plates. Multiple elongated elliptical perforated structures 11h are also symmetrically distributed about the longitudinal central axis of their respective suction cup plates. Multiple suction nozzles 11d are also symmetrically distributed about the longitudinal central axis of their respective suction cup plates. In these examples, the first suction cup plate 11b and the second suction cup plate 11c are lighter, have lower manufacturing costs, and exhibit high symmetry, enabling more stable adsorption of the solar cell preform 20 during the loading and unloading process. This further enhances the safety of loading and unloading, reducing the probability of fragmentation and scratches.

[0073] In some alternative embodiments, please refer to the following: Figures 1 to 3 and Figure 5 The vacuum piping system also includes a pipe laying arm 17, one end of which overlaps with a first end on the upper side of the fixed platform 13, and the other end of which overlaps with a second end on the upper side of the fixed platform 13 opposite to the first end. The main body section 171 of the pipe laying arm 17 is located on one side of the fixed platform 13 along its length. The first vacuum main pipe 15 and the second vacuum main pipe 16 extend along the main body section 171. The first vacuum branch pipe 151 extends from the mounting clamp 11a in the corresponding adsorption component 11 toward the first vacuum main pipe 15 to the first pipe connector 152 located beside the first vacuum main pipe 15. The second vacuum branch pipe 161 extends from the mounting clamp 11a in the corresponding adsorption component 11 toward the second vacuum main pipe 16 to the second pipe connector 162 located beside the second vacuum main pipe 16.

[0074] like Figure 5 As shown, in some optional embodiments, the side of the first suction cup plate 11b with the suction nozzle 11d is positioned opposite to the side of the second suction cup plate 11c with the suction nozzle 11d. In some examples of these embodiments, in the initial state where the automatic pick-and-place device is not in operation, the side of the first suction cup plate 11b without the suction nozzle 11d and the side of the second suction cup plate 11c without the suction nozzle 11d are in contact with each other in each suction cup group, and the suction cup groups are spaced apart. In the arrangement direction of the plurality of adsorption components 11, the first suction cup plate 11b and the second suction cup plate 11c are arranged alternately.

[0075] In some specific examples, when it is necessary to switch between different processes for solar prefabricated cells: under the drive of the driver, the second suction cup plates 11c remain stationary, and the first suction cup plate 11b with the solar cell prefabricated cell 20 adsorbed moves toward the adjacent second suction cup plate 11c which does not belong to the same suction cup group; or, under the drive of the driver, the first suction cup plates 11b remain stationary, and the second suction cup plate 11c with the solar cell prefabricated cell 20 adsorbed moves toward the adjacent first suction cup plate 11b which does not belong to the same suction cup group; or, the second suction cup plate 11c in one of the two adjacent suction cup groups moves toward each other and the first suction cup plate 11b in the other of the two adjacent suction cup groups moves toward each other, and either the first suction cup plate 11b or the second suction cup plate 11c moving toward each other has the solar cell prefabricated cell 20 adsorbed.

[0076] like Figure 7As shown, in some alternative embodiments, the side of the first suction cup plate 11b with the suction nozzle 11d is arranged opposite to the side of the second suction cup plate 11c with the suction nozzle 11d. In some examples of these embodiments, in the initial state where the automatic pick-and-place device is not in operation, the side of the first suction cup plate 11b without the suction nozzle 11d and the side of the second suction cup plate 11c without the suction nozzle 11d are opposite to each other, while the side of the first suction cup plate 11b with the suction nozzle 11d and the side of the second suction cup plate 11c with the suction nozzle 11d are opposite to each other and spaced apart. In the arrangement direction of the plurality of adsorption components 11, the first suction cup plate 11b and the second suction cup plate 11c are arranged alternately.

[0077] In some specific examples, when it is necessary to switch between different processes for solar prefabricated cells: under the drive of the driver, the second suction plate 11c remains stationary, and the first suction plate 11b with the solar prefabricated cell 20 adsorbed moves toward the second suction plate 11c, which belongs to the same suction plate group; or, under the drive of the driver, the first suction plate 11b remains stationary, and the second suction plate 11c with the solar prefabricated cell 20 adsorbed moves toward the first suction plate 11b, which belongs to the same suction plate group; or, under the drive of the driver, the first suction plate 11b and the second suction plate 11c, which belong to the same suction plate group, move toward each other, and either the first suction plate 11b or the second suction plate 11c moving toward each other adsorbs the solar prefabricated cell 20.

[0078] The second aspect of this application provides an automatic wafer loading and unloading method, which uses the automatic wafer loading and unloading device 10 provided in the first aspect of this application to automatically load and unload solar cell preforms 20, including:

[0079] The adsorption component 11 is inserted into the carrier used in the first process, which contains the solar cell preform 20. The first suction plate 11b is in a vacuum adsorption state and the second suction plate 11c is in a de-adsorption state through the vacuum pipeline system. The first suction plate 11b and the second suction plate 11c are in a first relative position.

[0080] The first surface 21 of the solar cell preform 20 is adsorbed by the first suction cup plate 11b in a vacuum adsorption state, and the first surface 21 is processed by the first process.

[0081] Control the removal of the adsorption assembly 11, which has adsorbed the solar cell preform 20, from the carrier used in the first process;

[0082] The first suction plate 11b and the second suction plate 11c are moved relative to each other by the driver. The first suction plate 11b and the second suction plate 11c are in a second relative position so that the second suction plate 11c contacts the second surface 22 of the solar cell preform 20. The first surface 21 is opposite to the second surface 22 and the second surface 22 is the surface to be processed in the second process.

[0083] The vacuum pipeline system is controlled to change the desorption state of the second suction plate 11c to the vacuum adsorption state so that the second suction plate 11c adsorbs the second surface 22.

[0084] The vacuum adsorption state of the first suction cup plate 11b is changed to the desorption state by the vacuum pipeline system, and the driver drives the first suction cup plate 11b and the second suction cup plate 11c to move relative to each other until they return to the first relative position.

[0085] The adsorption assembly 11, which adsorbs the solar cell preform 20, is inserted into the carrier used in the second process. The vacuum pipeline system changes the vacuum adsorption state of the second suction plate 11c to the desorption state. The adsorption assembly 11 is removed from the carrier used in the second process so that the solar cell preform 20 is placed in the carrier used in the second process and the second surface 22 is exposed.

[0086] The automatic wafer picking and placing method provided in the second aspect of this application involves a first suction cup plate 11b for picking up solar cell preforms 20 located in the carrier used in the first process. The relative movement of the first suction cup plate 11b and the second suction cup plate 11c, in coordination with the changing working states of both, causes the second suction cup plate 11c to adsorb the solar cell preforms 20 processed in the first process. The second suction cup plate 11c is then used to place the solar cell preforms 20 into the carrier used in the second process. This automatic wafer picking and placing method eliminates the transfer steps of the solar cell preforms 20 transfer mechanism between the first and second processes, thereby reducing the number of wafer picking and placing operations between the first and second processes, improving the transfer efficiency of the solar cell preforms 20 between the first and second processes, reducing the breakage rate and the risk of scratches on the solar cell preforms 20, and ensuring the safety of cell production. Furthermore, the automatic wafer picking and placing device 10 completes all the wafer picking and placing operations during the transfer process between the first and second processes, resulting in low production equipment costs and reduced cell manufacturing costs.

[0087] The following is combined Figures 8 to 15 The application of the automatic wafer loading and unloading method according to the second aspect of this application to two coating processes will be described in detail.

[0088] In this embodiment, the automatic wafer handling device 10 provided in the first aspect of this application is used to complete the efficient transfer of the solar cell preform 20 (a silicon wafer in this embodiment) in two coating processes.

[0089] The first process is a coating process on the first surface 21 of the solar cell preform 20, and the second process is a coating process on the second surface 22 of the solar cell preform 20. The carrier used in the first process and the carrier used in the second process can be the same graphite boat 40. The graphite boat 40 is provided with a plurality of graphite sheets 41 arranged at intervals. The graphite sheets 41 are used to support one surface of the solar cell preform 20 so that the other surface is exposed. The exposed surface is the surface to be coated.

[0090] In some examples of these embodiments, the automatic wafer loading and unloading method includes the following steps prior to the step of extending the adsorption assembly 11 into the carrier used in the first process that holds the solar cell preform 20:

[0091] Step S01: Insert the adsorption component 11 into the feed basket of the previous process of the first process, which contains the solar cell preform 20, and control the vacuum pipeline system to put the first suction plate 11b into a vacuum adsorption state and the second suction plate 11c into a desorption state.

[0092] Step S02: The first suction cup plate 11b in a vacuum adsorption state adsorbs the first surface 21 of the solar cell preform 20 to be processed.

[0093] Step S03: Control the adsorption component 11 with the solar cell preform 20 adsorbed to move out of the previous process feeding basket of the first process and extend into the empty graphite boat 40, so that the untreated second surface 22 of the solar cell preform 20 is attached to the graphite sheet 41 of the graphite boat 40, exposing the first surface 21 to be treated.

[0094] Figure 8 The diagram shows the automatic pick-and-place device 10 holding a solar cell preform 20.

[0095] Figure 9 This illustrates a situation where the untreated second surface 22 of the solar cell preform 20 is attached to the graphite sheet 41 of the graphite boat 40, while the first surface 21 to be treated is exposed.

[0096] The graphite boat 40, carrying the aforementioned solar cell preform 20, is moved into a tubular coating apparatus to perform the first process (i.e., the first coating process), where the exposed first surface 21 of the solar cell preform 20 is coated. After coating, a solar cell preform 20 with the first surface 21 treated in the first process is obtained. The graphite boat 40 is then ejected from the tubular coating apparatus, and the following steps are performed:

[0097] Step S10: The adsorption component 11 is inserted into the carrier (i.e., graphite boat 40) used in the first process, which contains the solar cell preform 20. The first suction plate 11b is placed in a vacuum adsorption state via a vacuum pipeline system, while the second suction plate 11c is placed in a desorption state. The first suction plate 11b and the second suction plate 11c are in a first relative position. In some examples, the first relative position refers to... Figure 10 In each suction cup plate group shown, the non-suction cup surfaces of the first suction cup plate 11b and the second suction cup plate 11c are in contact with each other, and adjacent suction cup groups are spaced apart. In the arrangement direction of multiple suction cup groups, the first suction cup plate 11b and the second suction cup plate 11c are alternately arranged.

[0098] Step S20: The first surface 21 of the solar cell preform 20 is adsorbed by the first suction cup plate 11b in a vacuum adsorption state, and the first surface 21 is processed by the first process.

[0099] like Figure 11 As shown,

[0100] Step S30: Control the removal of the adsorption assembly 11 with the adsorbed solar cell preform 20 from the carrier used in the first process;

[0101] Step S40: Drive the first suction plate 11b and the second suction plate 11c to move relative to each other by the driver. The first suction plate 11b and the second suction plate 11c are in a second relative position so that the second suction plate 11c contacts the second surface 22 of the solar cell preform 20, wherein the first surface 21 and the second surface 22 are opposite to each other and the second surface 22 is the surface to be processed in the second process.

[0102] Step S50: Control the vacuum pipeline system to change the desorption state of the second suction plate 11c to the vacuum adsorption state, so that the second suction plate 11c adsorbs the second surface 22.

[0103] In some examples, the driver moves the first suction cup plate 11b relative to the second suction cup plate 11c. This means that the second relative position of the first suction cup plate may include the second suction cup plate 11c in each suction cup plate group that has the solar cell preform 20 adsorbed on it remaining stationary. The first suction cup plate 11b that has the solar cell preform 20 adsorbed on it moves to the adjacent second suction cup plate 11c that does not belong to the same suction cup group until the second suction cup plate 11c contacts the second surface 22 of the solar cell preform 20.

[0104] like Figure 12 As shown, in step S60: the vacuum adsorption state of the first suction cup plate 11b is changed to the desorption state through the vacuum pipeline system, and the driver drives the first suction cup plate 11b and the second suction cup plate 11c to move relative to each other until they return to the first relative position. At this time, the second suction cup plate 11c adsorbs the solar cell preform 20.

[0105] Step S70: The adsorption assembly 11, on which the solar cell preform 20 is adsorbed, is extended into the carrier used in the second process. The vacuum pipeline system changes the vacuum adsorption state of the second suction cup plate 11c to the desorption state. The adsorption assembly 11 is removed from the carrier used in the second process, so that the solar cell preform 20 is placed in the carrier used in the second process, exposing the second surface 22. In some examples, the first surface 21 of the solar cell preform 20, after being processed in the first process, is attached to the graphite sheet 41 of the carrier (i.e., the graphite boat 40), exposing the second surface 22 for subsequent coating treatment of the second surface 22.

[0106] In some embodiments, the automatic wafer loading and unloading method further includes, between step S60 (where the driver moves the first suction plate 11b relative to the second suction plate 11c until it returns to its first relative position) and step S70 (where the adsorption assembly 11 with the adsorbed solar cell preform 20 inserted into the carrier used in the second process), the following steps:

[0107] Step S61: Control the automatic pick-and-place device 10 to rotate horizontally by 180° so that the solar cell preform 20 adsorbed on the second suction plate 11c rotates horizontally by 180° along the longitudinal central axis 23 perpendicular to the fixed platform 13.

[0108] Figure 13 The diagram shows a front view of the automatic cell loading and unloading device 10 after it has been horizontally rotated 180°. In these embodiments, rotating the automatic cell loading and unloading device 10 horizontally by 180° also causes the solar cell preform 20 to rotate horizontally by 180° along the longitudinal central axis perpendicular to the fixed platform 13. This prevents the sides and bottom edges of the solar cell preform 20 that were originally in contact with the carrier from repeatedly contacting the carrier at the same positions, thus avoiding the risks of scorching and breakage at the clamping point 42 of the solar cell preform 20 and further improving the quality of cell production.

[0109] Specifically, such as Figure 14 As shown, in the first process, the solar cell preform 20 is placed in the graphite boat 40, and the three locking points 42 of the graphite boat 40 engage with the edge of the solar cell preform 20 to form three first locking points 42 positions. Before the second process, the automatic loading and unloading device 10 is rotated horizontally by 180°, and different positions on the edge of the solar cell preform 20 contact the three locking points 42 of the graphite boat 40 to form three new second locking points 42 positions. This avoids the same position on the edge of the solar cell preform 20 from contacting the locking points 42 again in the second process, thus avoiding the problems of the locking points 42 being scorched and the solar cell preform 20 being damaged.

[0110] Furthermore, such as Figure 15As shown, the first surface 21 of the solar cell preform 20, after being processed in the first process, is attached to the graphite sheet 41 of the graphite boat 40, and the placement position of the solar cell preform 20 in the graphite boat 40 in the second process is the same as the placement position of the solar cell preform 20 in the graphite boat 40 in the first process.

[0111] In these embodiments, "same placement position" means that the graphite sheet 41 on which the first surface 21 of the solar cell preform 20 is bonded in the second process is the same as that on the second surface 22 of the solar cell preform 20 in the first process, and the position of the solar cell preform 20 on the graphite boat 40 in the second process is also the same as that in the first process. This same placement position of the solar cell preform 20 on the graphite boat 40 in the second process reduces coating loss, increases the yield of the coating process, and ensures the quality of the cell fabrication.

[0112] This application also provides the following technical solutions:

[0113] Technical Solution 1. An automatic wafer loading and unloading device for automatically loading and unloading solar cell preforms, comprising:

[0114] Multiple adsorption components arranged side by side, the adsorption components including:

[0115] The suction cup plate assembly includes a first suction cup plate and a second suction cup plate that are parallel to each other and are used to adsorb the solar cell preform, with the first suction cup plate and the second suction cup plate being alternately arranged in two adjacent adsorption assemblies;

[0116] A driver is used to drive the first suction cup plate and the second suction cup plate to move relative to each other;

[0117] A vacuum piping system is used to change and maintain the operating states of the first and second suction cup plates in the suction cup plate assembly. These operating states include a vacuum adsorption state for adsorbing the solar cell preform and a desorption state for detaching from the solar cell preform.

[0118] The transfer of the solar cell preform between different processes is achieved by coordinating and changing the relative positions of the first and second suction cup plates in the suction cup plate assembly and the working states of the first and second suction cup plates.

[0119] Technical Solution 2. The automatic film pick-and-place device according to Technical Solution 1, the automatic film pick-and-place device further includes locking and fixing the plurality of adsorption components and a fixing component assembled with the driver, the fixing component including:

[0120] A fixed platform is used to suspend multiple of the adsorption components;

[0121] The first fastening plate and the second fastening plate are respectively disposed at the bottom ends of the fixed platform. The plurality of adsorption components are arranged laterally from the first fastening plate to the second fastening plate. The first fastening plate and the second fastening plate clamp the plurality of adsorption components on the fixed platform.

[0122] Technical Solution 3. The automatic film picking and placing device according to Technical Solution 2 further includes a connecting component, which is disposed on the upper side of the fixed platform and is used to connect with the robotic arm.

[0123] Technical Solution 4. According to the automatic sheet loading and unloading device described in Technical Solution 2, the adsorption component further includes:

[0124] A mounting clamp is provided on the bottom side of the fixed platform for mounting the suction cup plate assembly. The mounting clamp has a groove, through which the first suction cup plate and the second suction cup plate can move relative to each other.

[0125] Technical Solution 5. According to the automatic wafer loading and unloading device described in Technical Solution 4, both the first suction cup plate and the second suction cup plate are provided with protruding suction nozzles. When the suction nozzles are attached to the surface of the solar cell preform, the suction nozzles can adsorb the solar cell preform through the negative pressure environment formed by the vacuum pipeline system.

[0126] Technical Solution 6. According to the automatic plate picking and placing device described in Technical Solution 5, the side of the first suction cup plate with the suction nozzle is arranged opposite to the side of the second suction cup plate with the suction nozzle.

[0127] Technical Solution 7. According to the automatic plate picking and placing device described in Technical Solution 5, the side of the first suction cup plate with the suction nozzle is arranged opposite to the side of the second suction cup plate with the suction nozzle.

[0128] Technical Solution 8. According to the automatic wafer loading and unloading device described in Technical Solution 5, the vacuum pipeline system includes a first vacuum pipeline group and a second vacuum pipeline group with independent airflow.

[0129] The first vacuum pipeline assembly includes a first main vacuum pipeline and multiple first sub-vacuum pipelines connected to the first main vacuum pipeline. Each of the multiple first sub-vacuum pipelines corresponds one-to-one with a first suction cup plate in one of the multiple adsorption components. The first sub-vacuum pipelines are connected to the suction nozzles of the first suction cup plates.

[0130] The second vacuum pipeline group includes a second vacuum main pipeline and a plurality of second vacuum branch pipelines connected to the second vacuum main pipeline. The plurality of second vacuum branch pipelines correspond one-to-one with the second suction cup plates in the plurality of adsorption components. The second vacuum branch pipelines are connected to the suction cup nozzles of the second suction cup plates.

[0131] Technical Solution 9. According to the automatic plate loading and unloading device of Technical Solution 8, the vacuum pipeline system further includes a pipeline laying arm, one end of which overlaps with a first end on the upper side of the fixed platform, and the other end of which overlaps with a second end on the upper side of the fixed platform opposite to the first end. The main body section of the pipeline laying arm is located on one side of the fixed platform along its length. The first vacuum main pipeline and the second vacuum main pipeline extend along the main body section. The first vacuum branch pipeline extends from the mounting clamp in the corresponding adsorption component to the first vacuum main pipeline to a first pipeline connector located on the side of the first vacuum main pipeline. The second vacuum branch pipeline extends from the mounting clamp in the corresponding adsorption component to the second vacuum main pipeline to a second pipeline connector located on the side of the second vacuum main pipeline.

[0132] Technical Solution 10. An automatic wafer loading and unloading method, comprising using the automatic wafer loading and unloading device as described in Technical Solution 1 to automatically load and unload solar cell preforms, including:

[0133] The adsorption component is inserted into the carrier used in the first process that contains the solar cell preform. The first suction cup plate is in the vacuum adsorption state and the second suction cup plate is in the desorption state through the vacuum pipeline system. The first suction cup plate and the second suction cup plate are in a first relative position.

[0134] The first surface of the solar cell preform is adsorbed by the first suction cup plate in the vacuum adsorption state, and the first surface is treated by the first process.

[0135] Control the removal of the adsorption assembly with the adsorbed solar cell preform from the carrier used in the first process;

[0136] The first suction cup plate and the second suction cup plate are driven to move relative to each other by the driver, and the first suction cup plate and the second suction cup plate are in a second relative position so that the second suction cup plate contacts the second surface of the solar cell preform, wherein the first surface is opposite to the second surface and the second surface is the surface to be processed in the second process;

[0137] The vacuum pipeline system is controlled to change the desorption state of the second suction cup plate to the vacuum adsorption state, so that the second suction cup plate adsorbs the second surface;

[0138] The vacuum pipe system changes the vacuum adsorption state of the first suction cup plate to the desorption state, and the driver drives the first suction cup plate and the second suction cup plate to move relative to each other until they return to the first relative position.

[0139] The adsorption assembly with the solar cell preform adsorbed is extended into the carrier used in the second process. The vacuum pipeline system changes the vacuum adsorption state of the second suction cup plate to the desorption state. The adsorption assembly is removed from the carrier used in the second process so that the solar cell preform is placed in the carrier used in the second process and the second surface is exposed.

[0140] Technical Solution 11. The automatic wafer picking and placing method according to Technical Solution 10, wherein the automatic wafer picking and placing method further includes, between the step of driving the first suction cup plate and the second suction cup plate to move relative to each other until the first relative position is returned, and the step of controlling the adsorption assembly with the pre-fabricated solar cell wafer adsorbed to extend into the carrier used in the second process:

[0141] The automatic pick-and-place device is controlled to rotate horizontally by 180° so that the solar cell preform adsorbed on the second suction cup plate rotates horizontally by 180° along the longitudinal central axis perpendicular to the fixed platform.

[0142] Technical Solution 12. According to the automatic wafer loading and unloading method described in Technical Solution 10, the first step is a first surface coating step for the solar cell preform, the second step is a second surface coating step for the solar cell preform, and the carrier used in the first step and the carrier used in the second step are the same graphite boat.

[0143] Technical Solution 13. In the automatic wafer loading and unloading method according to Technical Solution 10, the following steps are further included before the step of extending the adsorption component into the carrier used in the first process that loads the solar cell preform:

[0144] The adsorption assembly is controlled to extend into the loading basket of the previous process of the first process, which contains the solar cell preform. The vacuum pipeline system puts the first suction cup plate in the vacuum adsorption state and the second suction cup plate in the desorption state. The first suction cup plate in the vacuum adsorption state adsorbs the first surface of the solar cell preform to be processed.

[0145] The adsorption assembly, on which the solar cell preform is adsorbed, is moved out of the previous process feeding basket of the first process and extended into the empty graphite boat, so that the untreated second surface of the solar cell preform is attached to the graphite sheet of the graphite boat, exposing the first surface to be treated.

[0146] Technical Solution 14. In the automatic wafer handling method according to Technical Solution 10, in the step of controlling the adsorption assembly with the solar cell preform adsorbed to extend into the carrier used in the second process, the vacuum pipeline system changing the vacuum adsorption state of the second suction cup plate to the desorption state, and the adsorption assembly being removed from the carrier used in the second process so that the solar cell preform is placed in the carrier used in the second process and the second surface is exposed,

[0147] The first surface of the solar cell preform, after being processed in the first step, is attached to the graphite sheet of the graphite boat, and the placement position of the solar cell preform in the graphite boat in the second step is the same as the placement position of the solar cell preform in the graphite boat in the first step.

[0148] The above are merely specific embodiments of this application, but the scope of protection of this application is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the scope of the technology disclosed in this application should be included within the scope of protection of this application. Therefore, the scope of protection of this application should be determined by the scope of the claims.

Claims

1. An automatic film loading and unloading device, characterized in that, For automated loading and unloading of solar cell preforms, including: Multiple adsorption components arranged side by side, the adsorption components including: The suction cup plate assembly includes a first suction cup plate and a second suction cup plate that are parallel to each other and are used to adsorb the solar cell preform, with the first suction cup plate and the second suction cup plate being alternately arranged in two adjacent adsorption assemblies; A driver is used to drive the first suction cup plate and the second suction cup plate to move relative to each other; A vacuum piping system is used to change and maintain the operating states of the first and second suction cup plates in the suction cup plate assembly. These operating states include a vacuum adsorption state for adsorbing the solar cell preform and a desorption state for detaching from the solar cell preform. The transfer of the solar cell preform between different processes is achieved by coordinating and changing the relative positions of the first and second suction cup plates in the suction cup plate assembly and the working states of the first and second suction cup plates.

2. The automatic film loading and unloading device according to claim 1, characterized in that, The automatic pick-and-place device further includes locking and fixing multiple adsorption components and a fixing component assembled with the driver, the fixing component including: A fixed platform is used to suspend multiple of the adsorption components; The first fastening plate and the second fastening plate are respectively disposed at the bottom ends of the fixed platform. The plurality of adsorption components are arranged laterally from the first fastening plate to the second fastening plate. The first fastening plate and the second fastening plate clamp the plurality of adsorption components on the fixed platform.

3. The automatic film loading and unloading device according to claim 2, characterized in that, The automatic plate picking and placing device also includes a connecting component, which is disposed on the upper side of the fixed platform and is used to connect with the robotic arm.

4. The automatic film loading and unloading device according to claim 2, characterized in that, The adsorption assembly further includes: A mounting clamp is provided on the bottom side of the fixed platform for mounting the suction cup plate assembly. The mounting clamp has a groove, through which the first suction cup plate and the second suction cup plate can move relative to each other.

5. The automatic film loading and unloading device according to claim 4, characterized in that, Both the first suction cup plate and the second suction cup plate are provided with protruding suction nozzles. When the suction nozzles are attached to the surface of the solar cell preform, the suction nozzles can adsorb the solar cell preform through the negative pressure environment formed by the vacuum pipeline system.

6. The automatic film loading and unloading device according to claim 5, characterized in that, The side of the first suction cup plate with the suction nozzle is opposite to the side of the second suction cup plate with the suction nozzle.

7. The automatic film loading and unloading device according to claim 5, characterized in that, The side of the first suction cup plate with the suction nozzle is arranged opposite to the side of the second suction cup plate with the suction nozzle.

8. The automatic film loading and unloading device according to claim 5, characterized in that, The vacuum pipeline system includes a first vacuum pipeline group and a second vacuum pipeline group with independent airflow. The first vacuum pipeline assembly includes a first main vacuum pipeline and multiple first sub-vacuum pipelines connected to the first main vacuum pipeline. Each of the multiple first sub-vacuum pipelines corresponds one-to-one with a first suction cup plate in one of the multiple adsorption components. The first sub-vacuum pipelines are connected to the suction nozzles of the first suction cup plates. The second vacuum pipeline group includes a second vacuum main pipeline and a plurality of second vacuum sub-pipelines connected to the second vacuum main pipeline. The plurality of second vacuum sub-pipelines correspond one-to-one with the second suction cup plates in the plurality of adsorption components. The second vacuum sub-pipelines are connected to the suction cup nozzles of the second suction cup plates.

9. The automatic film loading and unloading device according to claim 8, characterized in that, The vacuum piping system further includes a pipe laying arm, one end of which overlaps a first end on the upper side of the fixed platform, and the other end of which overlaps a second end on the upper side of the fixed platform opposite to the first end. The main body of the pipe laying arm is located on one side of the fixed platform along its length. The first vacuum main pipe and the second vacuum main pipe extend along the main body, and the first vacuum branch pipe extends from the mounting clip in the corresponding adsorption component toward the first vacuum main pipe to a first pipe connector located beside the first vacuum main pipe. The second vacuum branch pipe extends from the mounting clip in the corresponding adsorption component toward the second vacuum main pipe to a second pipe connector located beside the second vacuum main pipe.

10. An automatic film loading and unloading method, characterized in that, The automatic loading and unloading device as described in claim 2 is used to automatically load and unload solar cell preforms, comprising: The adsorption component is inserted into the carrier used in the first process that contains the solar cell preform. The first suction cup plate is in the vacuum adsorption state and the second suction cup plate is in the desorption state through the vacuum pipeline system. The first suction cup plate and the second suction cup plate are in a first relative position. The first surface of the solar cell preform is adsorbed by the first suction cup plate in the vacuum adsorption state, and the first surface is treated by the first process. Control the removal of the adsorption assembly with the adsorbed solar cell preform from the carrier used in the first process; The first suction cup plate and the second suction cup plate are driven to move relative to each other by the driver, and the first suction cup plate and the second suction cup plate are in a second relative position so that the second suction cup plate contacts the second surface of the solar cell preform, wherein the first surface is opposite to the second surface and the second surface is the surface to be processed in the second process; The vacuum pipeline system is controlled to change the desorption state of the second suction cup plate to the vacuum adsorption state, so that the second suction cup plate adsorbs the second surface; The vacuum pipe system changes the vacuum adsorption state of the first suction cup plate to the desorption state, and the driver drives the first suction cup plate and the second suction cup plate to move relative to each other until they return to the first relative position. The adsorption assembly with the solar cell preform adsorbed is extended into the carrier used in the second process. The vacuum pipeline system changes the vacuum adsorption state of the second suction cup plate to the desorption state. The adsorption assembly is removed from the carrier used in the second process so that the solar cell preform is placed in the carrier used in the second process and the second surface is exposed.

11. The automatic wafer picking and placing method according to claim 10, characterized in that, The automatic wafer loading and unloading method further includes, between the step of driving the first suction cup plate and the second suction cup plate to move relative to each other until the first relative position is returned, and the step of controlling the adsorption assembly with the solar cell preform attached to extend into the carrier used in the second process: The automatic pick-and-place device is controlled to rotate horizontally by 180° so that the solar cell preform adsorbed on the second suction cup plate rotates horizontally by 180° along the longitudinal central axis perpendicular to the fixed platform.

12. The automatic wafer picking and placing method according to claim 10, characterized in that, The first process is a first surface coating process for the solar cell preform, and the second process is a second surface coating process for the solar cell preform. The carrier used in the first process and the carrier used in the second process are the same graphite boat.

13. The automatic wafer picking and placing method according to claim 12, characterized in that, The automatic wafer loading and unloading method further includes the following steps before the step of extending the adsorption component into the carrier used in the first process that loads the solar cell preform: The adsorption assembly is controlled to extend into the feed basket preceding the first process, which contains the solar cell preform. The vacuum piping system puts the first suction cup plate in a vacuum adsorption state and the second suction cup plate in a desorption state. The first suction cup plate in the vacuum adsorption state adsorbs the first surface of the solar cell preform to be processed. The adsorption assembly, on which the solar cell preform is adsorbed, is moved out of the previous process feeding basket of the first process and extended into the empty graphite boat, so that the untreated second surface of the solar cell preform is attached to the graphite sheet of the graphite boat, exposing the first surface to be treated.

14. The automatic wafer picking and placing method according to claim 12, characterized in that, In the step of controlling the adsorption assembly on which the solar cell preform is adsorbed to extend into the carrier used in the second process, the vacuum pipeline system changes the vacuum adsorption state of the second suction cup plate to the desorption state, and the adsorption assembly is removed from the carrier used in the second process, so that the solar cell preform is placed in the carrier used in the second process and the second surface is exposed. The first surface of the solar cell preform, after being processed in the first step, is attached to the graphite sheet of the graphite boat, and the placement position of the solar cell preform in the graphite boat in the second step is the same as the placement position of the solar cell preform in the graphite boat in the first step.

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