Phase shifter and driving method thereof, and antenna

Abstract

The embodiment of the present disclosure provides a phase shifter and a driving method thereof, and an antenna, which belong to the field of microwave transmission technology. The embodiment of the present disclosure provides a phase shifter, which includes a first substrate and a second substrate arranged opposite to each other, and a first dielectric layer arranged between the two; the first substrate includes: a first base, a first reference electrode layer arranged on the side of the first substrate close to the first dielectric layer, the first reference electrode layer includes a plurality of insulated and spaced first reference electrodes, and each first reference electrode is provided with a first opening; the second substrate includes: a second substrate, a plurality of first transmission lines arranged on the side of the second substrate close to the first dielectric layer and spaced apart; wherein the first transmission lines correspond one to one with the first reference electrodes; each first transmission line has a first transmission end and a second transmission end, and the first transmission end of each first transmission line at least partially overlaps with the orthographic projection of the first opening on the second base.

Description

Technical Field

[0001] The present invention belongs to the technical field of microwave transmission, and in particular relates to a phase shifter, a driving method of the phase shifter, and an antenna. Background Art

[0002] Phased array antennas are widely used because they do not require the precision moving parts of traditional mechanical scanning antennas. Phased array antennas using liquid crystal phase shifters have become a research hotspot for phased array antennas due to their low cost and low profile. However, the high loss of RF signals caused by the use of liquid crystal phase shifters is an unavoidable problem. In order to meet the requirements of the ratio of the gain G of the system receiving antenna to the equivalent noise temperature T value, the gain can be increased by increasing the number of radiating elements to offset the insertion loss of the liquid crystal phase shifter. However, since each radiating element uses a separate phase shifter and the driving voltage of the phase shifter is generally not less than 15V, how to drive the high-voltage phase shifters of massive radiating elements becomes a problem. Summary of the invention

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art, and provides a phase shifter, which can drive the first reference electrode and the first transmission line separately, so that according to the phase shift amount required for different regions, a bias voltage can be separately input to the first reference electrode and the first transmission line corresponding to the region, so that a sufficiently large voltage difference is generated between the first reference electrode and the first transmission line to change the dielectric constant of the first dielectric layer, thereby better realizing phase shifting.

[0004] In a first aspect, an embodiment of the present disclosure provides a phase shifter, which includes a first substrate and a second substrate arranged opposite to each other, and a first dielectric layer arranged therebetween;

[0005] The first substrate comprises: a first base, a first reference electrode layer arranged on a side of the first substrate close to the first dielectric layer, the first reference electrode layer comprises a plurality of first reference electrodes arranged in an interval and insulated manner, each of the first reference electrodes being provided with a first opening; the second substrate comprises: a second base, a plurality of first transmission lines arranged in an interval and arranged on a side of the second substrate close to the first dielectric layer; wherein,

[0006] The first transmission lines correspond to the first reference electrodes one by one, and the orthographic projections of the first transmission lines and the corresponding first reference electrodes on the second substrate at least partially overlap;

[0007] Each of the first transmission lines has a first transmission end and a second transmission end, and the first transmission end of each of the first transmission lines at least partially overlaps with an orthographic projection of the first opening on the second substrate.

[0008] The phase shifter provided in the embodiment of the present disclosure has multiple first reference electrodes arranged in the first reference electrode layer. Therefore, according to the phase shift amount required in different regions, a first bias voltage can be input to each first reference electrode separately, and a second bias voltage can be input to each first transmission line separately, so that a sufficiently large voltage difference is generated between the first reference electrode and the first transmission line to change the dielectric constant of the first dielectric layer, thereby better realizing phase shifting.

[0009] In some examples, each of the first reference electrodes is further provided with a second opening, and the orthographic projections of the first opening and the second opening on the second substrate do not overlap; wherein,

[0010] The second transmission end of each of the first transmission lines at least partially overlaps with an orthographic projection of the second opening on the second substrate.

[0011] In some examples, the phase shifter also includes a first driving unit, which includes a plurality of first channels, one first channel connected to one first transmission line, and one first channel connected to one first reference electrode, the first driving unit being configured to provide a first bias voltage to each first reference electrode through the first channel and to provide a second bias voltage to each first transmission line.

[0012] In some examples, the first substrate further includes a plurality of first bias lines disposed on a side of the first substrate close to the first dielectric layer, each of the first bias lines being connected between one of the first channels and one of the first reference electrodes;

[0013] The second substrate further includes a plurality of second bias lines, which are arranged on a side of the second substrate close to the first dielectric layer, and each of the first bias lines is connected between one of the first channels and one of the first transmission lines.

[0014] In some examples, the phase shifter further includes a first driving unit and a second driving unit; the first driving unit includes a plurality of first channels, one first channel is connected to one first reference electrode, and the first driving unit is configured to provide a first bias voltage to each first reference electrode through the first channel;

[0015] The second driving unit includes a plurality of second channels, one of the second channels is connected to one of the first transmission lines, and the second driving unit is configured to provide a second bias voltage to each of the first transmission lines through the second channel.

[0016] In some examples, the first substrate further includes a plurality of first bias lines disposed on a side of the first substrate close to the first dielectric layer, each of the first bias lines being connected between one of the first channels and one of the first reference electrodes;

[0017] The second substrate further includes a plurality of second bias lines, which are arranged on a side of the second substrate close to the first dielectric layer, and each of the first bias lines is connected between one of the second channels and one of the first transmission lines.

[0018] In some examples, each of the first transmission lines also includes a transmission main body; wherein the first transmission end and the second transmission end each have a first endpoint and a second endpoint that are relatively set; the first endpoint of the first transmission end and the first endpoint of the second transmission end are respectively connected to two opposite ends of the transmission main body.

[0019] In some examples, the transmission body portion includes a planar spiral transmission line electrically connected to the first transmission end and the second transmission end.

[0020] In some examples, the transmission body portion includes at least one meandering line electrically connected to the first transmission end and the second transmission end;

[0021] The orthographic projection of the at least one meandering line on the first substrate has a portion intersecting with an extending direction of the orthographic projection of the first transmission end on the first substrate.

[0022] In a second aspect, an embodiment of the present disclosure further provides an antenna, comprising the above-mentioned phase shifter.

[0023] In some examples, the antenna further includes a plurality of radiation units disposed on a side of the first substrate away from the first dielectric layer; the radiation units correspond one-to-one to the first transmission lines, and the radiation units and the corresponding first transmission lines have orthographic projections of the first transmission lines on the first substrate at least partially overlap.

[0024] In some examples, the radiation units correspond to the first reference electrodes one by one, and the orthographic projections of the radiation units and the corresponding first reference electrodes on the first substrate at least partially overlap;

[0025] Each of the radiation units at least partially overlaps with an orthographic projection of the first opening on the first substrate.

[0026] In some examples, a second opening is further disposed on each of the first reference electrodes, and an orthographic projection of each of the radiation units and the second opening on the first substrate does not overlap.

[0027] In some examples, the antenna further includes a third substrate disposed on a side of the first substrate away from the first dielectric layer;

[0028] The third substrate comprises a third base, and a plurality of radiation units arranged on a side of the third base away from the first base, and a plurality of second transmission lines arranged on a side of the third base close to the first base; a plurality of first through holes are opened in the third base, and a first end of each of the second transmission lines is connected to a radiation unit through a first through hole; wherein,

[0029] The second transmission lines correspond to the first transmission lines one by one, and the second ends of the second transmission lines at least partially overlap with the orthographic projections of the corresponding first transmission lines on the first substrate.

[0030] In some examples, the antenna further includes a fourth substrate disposed on a side of the second substrate away from the first dielectric layer;

[0031] The fourth substrate comprises a fourth base, a second reference electrode layer arranged on a side of the fourth base away from the second base, and a power division transmission structure arranged on a side of the fourth base close to the second base;

[0032] The orthographic projections of the power division transmission structure and the second reference electrode layer on the second substrate at least partially overlap;

[0033] The power division transmission structure includes a combined transmission line and multiple power division transmission lines, the first end of each of the multiple power division transmission lines is connected to the first end of the combined transmission line; the second end of one of the power division transmission lines and the orthographic projection of the second transmission end of a first transmission line on the fourth substrate at least partially overlap.

[0034] In some examples, a second opening is also provided on each first reference electrode; the power division transmission line corresponds one-to-one to the first reference electrode, and the second end of the power division transmission line and the corresponding second opening of the first reference electrode have at least partially overlapping orthographic projections on the fourth substrate.

[0035] In a third aspect, the embodiments of the present disclosure further provide a method for driving a phase shifter, which is used for the above-mentioned phase shifter, and comprises the following steps:

[0036] According to the phase shift amount required by the area where each first transmission line is located, the corresponding first bias voltage is input to each of the first reference electrodes, and the corresponding second bias voltage is input to each of the plurality of first transmission lines. BRIEF DESCRIPTION OF THE DRAWINGS

[0037] Figure 1 A schematic structural diagram of an embodiment of a phase shifter provided in an embodiment of the present disclosure.

[0038] Figure 2A schematic structural diagram of an embodiment of a second substrate of a phase shifter provided in an embodiment of the present disclosure.

[0039] Figure 3 For along Figure 1 Cross-sectional view taken along the AB direction.

[0040] Figure 4 A schematic structural diagram of another embodiment of a phase shifter provided in an embodiment of the present disclosure.

[0041] Figure 5 FIG. 4 is a diagram showing an exemplary bias voltage waveform of a phase shifter.

[0042] Figure 6 A schematic diagram of an exemplary phase shifter for applying bias voltage.

[0043] Figure 7 This is a bias voltage waveform diagram of the phase shifter provided in an embodiment of the present disclosure.

[0044] Figure 8 A schematic diagram of a phase shifter provided in an embodiment of the present disclosure loading a bias voltage.

[0045] Fig. 9 This is one of the structural schematic diagrams of another embodiment of the phase shifter provided in the embodiment of the present disclosure.

[0046] Fig.10 The second structural schematic diagram of another embodiment of the phase shifter provided in the embodiment of the present disclosure.

[0047] Fig.11 This is one of the structural schematic diagrams of another embodiment of the first transmission line of the phase shifter provided in the embodiment of the present disclosure.

[0048] Fig.12 A working principle diagram of an embodiment of a driving unit of a phase shifter provided in an embodiment of the present disclosure.

[0049] Fig.13 A working principle diagram of an embodiment of a control unit of a phase shifter provided in an embodiment of the present disclosure.

[0050] Fig.14 One of the structural schematic diagrams of an embodiment of the antenna provided in the embodiment of the present disclosure.

[0051] Fig.15 The second structural diagram of an embodiment of the antenna provided in the embodiment of the present disclosure. DETAILED DESCRIPTION

[0052] In order to make the purpose, technical scheme and advantages of the present invention clearer, the present invention will be further described in detail below in conjunction with the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0053] The shapes and sizes of the components in the drawings do not reflect the actual proportions, and are only intended to facilitate understanding of the contents of the embodiments of the present invention.

[0054] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure should be understood by people with ordinary skills in the field to which the present disclosure belongs. The "first", "second" and similar words used in the present disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, similar words such as "one", "one" or "the" do not indicate quantity restrictions, but indicate that there is at least one. Similar words such as "include" or "comprise" mean that the elements or objects appearing before the word cover the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Similar words such as "connect" or "connected" are not limited to physical or mechanical connections, but can include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the described object changes, the relative positional relationship may also change accordingly.

[0055] The embodiments of the present disclosure are not limited to the embodiments shown in the drawings, but include modifications of the configurations formed based on the manufacturing process. Therefore, the regions illustrated in the drawings have schematic properties, and the shapes of the regions shown in the drawings illustrate the specific shapes of the regions of the elements, but are not intended to be limiting.

[0056] Before describing the following embodiments, it should be noted that the first dielectric layer in the phase shifter provided in the following embodiments includes but is not limited to a liquid crystal layer, and the first dielectric layer is only described as a liquid crystal layer. When the first transmission end of the first transmission line in the phase shifter is used as a receiving end, the second transmission end of the first transmission line is used as a transmitting end; when the second transmission end of the first transmission line is used as a receiving end, the first transmission end of the first transmission line is used as a transmitting end. In the following description, for ease of understanding, the first transmission end of the transmission line is used as a transmitting end and the second transmission end is used as a receiving end for illustration, but this does not constitute a limitation to the present invention.

[0057] In addition, in the embodiments of the present disclosure, the first transmission line may be a delay line, or a strip transmission line, etc. For ease of description, in the embodiments of the present disclosure, the first transmission line is taken as an example of a delay line, wherein the shape of the delay line includes but is not limited to any one or a combination of a bow shape, a wave shape, and a sawtooth shape.

[0058] See also Figure 5 , Figure 6 In the related art, the first reference electrode layer of the phase shifter usually adopts a planar electrode, and a plurality of transmission electrodes are arranged on the second substrate. The orthographic projection of the planar electrode on the second substrate covers the orthographic projection of each transmission electrode on the second substrate. By inputting a reference voltage Vref to the first reference electrode layer which is a planar electrode, and then inputting a third bias voltage Vs to each transmission electrode separately according to the phase shift amount required by different regions of the phase shifter, the principle diagram is shown in FIG. Figure 6 , Figure 6 In the example, two transmission electrodes receive the third bias voltages Vs1 and Vs2 respectively, which is equivalent to the common potential of the first reference electrodes corresponding to each transmission electrode. The driving voltage Vo that changes the dielectric constant of the first dielectric layer 3 of a region of the phase shifter is equal to the difference between the third bias voltage Vs received by the transmission electrode in this region and the reference voltage Vref. In order to offset the insertion loss of the liquid crystal phase shifter, the number of radiation units is usually increased. Correspondingly, the number of transmission electrodes in the phase shifter increases, so a large number of transmission electrodes need to be driven. At this time, the driving voltage for display can be connected to the transmission electrodes for driving, but the voltage range of the driving voltage for display is usually small, for example, it may be only 18V, while the voltage range required for the driving voltage of the first dielectric layer driving the liquid crystal layer is higher, for example, up to 30V. Therefore, in the case of the common potential of the first reference electrode layer that provides the reference voltage to each transmission electrode, the voltage range of the driving voltage cannot meet the driving voltage required by the phase shifter.

[0059] In order to solve the above problems, an embodiment of the present disclosure provides a phase shifter, as described below in detail.

[0060] First, see Figure 1-Figure 3 ,in, Figure 3 For along Figure 1 The cross-sectional view cut along the AB direction, Figure 2 Schematic diagram of the planar structure of an embodiment of the second substrate. The disclosed embodiment provides a phase shifter, which includes a first substrate and a second substrate arranged opposite to each other, and a first dielectric layer 3 arranged between the first substrate and the second substrate. The first substrate includes a first base 11, a first reference electrode layer arranged on the side of the first base 11 close to the first dielectric layer 3, and the first reference electrode layer includes a plurality of first reference electrodes 12 arranged at intervals and insulated, and each first reference electrode 12 is provided with a first opening 121.

[0061] The second substrate includes a second base 21, and a plurality of first transmission lines 22 arranged at intervals on a side of the second base 21 close to the first dielectric layer 3. The first transmission lines 22 correspond to the first reference electrodes 12 one by one, and the orthographic projections of the first transmission lines 22 and the first reference electrodes 12 corresponding to the first transmission lines 22 on the second base 21 at least partially overlap, and the first transmission lines 22 and the first reference electrodes 12 corresponding to the first transmission lines 22 form a phase shift unit. In the phase shifter, a plurality of phase shift units arranged in an array are included, and each phase shift unit can individually adjust the phase shift amount of its region.

[0062] Since a plurality of first reference electrodes 12 are arranged at intervals on the side of the first substrate 11 close to the first dielectric layer 3, a first bias voltage V1 can be input to each first reference electrode 12 according to the phase shift amount required in different regions of the phase shifter, and a second bias voltage V1' can be input to each first transmission line 22, so that a sufficiently large voltage difference is generated between the first reference electrode 12 and the first transmission line 22 to change the dielectric constant of the first dielectric layer 3, thereby better realizing phase shifting. Specifically, see Figure 7 , Figure 8 , Figure 8In the figure, the two first reference electrodes 12 in the phase shifter receive the first bias voltages V11 and V12 respectively, and the two first transmission lines 22 receive the second bias voltages V11' and V12' respectively. This is equivalent to that the driving voltages Vo (Vo=V1-V1') of the regions where the different first transmission lines 22 of the phase shifter are located can be independently set, and the driving voltage Vo of each region can be flexibly adjusted. Moreover, when the voltage range of the driving unit remains unchanged, the dynamic range of the voltage of the entire phase shifter can be expanded only by changing the polarity of the first bias voltage V1 and the second bias voltage V1'. For example, the voltage range of the driving unit is 18V, and 9V is used as the reference voltage of the driving unit itself. The positive and negative of the first bias voltage and the second bias voltage are determined with respect to the reference voltage. That is, the first bias voltage or the second bias voltage less than the reference voltage (9V) is negative polarity, and the first bias voltage or the second bias voltage greater than or equal to the reference voltage (9V) is positive polarity. The driving unit can input a first bias voltage V1 of 18V to the first reference electrode 12 of the region, and the polarity of the voltage is positive for the driving unit, that is, 9+9V; accordingly, a second bias voltage V1' of 0V can be input to the first transmission line 22 of the region, and the polarity of the voltage is negative for the driving unit, that is, 9+(-9)V, so that the driving voltage Vo of the region reaches 18V, and 0V and 18V are the same for the output voltage data of the driving unit, both are 9V, but with opposite polarities, thereby reducing the data volume of the driving unit; and, for each region of the phase shifter, by voltage reversal, for example, inputting a first bias voltage with opposite polarity to the adjacent first reference electrode 12, and inputting a second bias voltage with opposite polarity to the adjacent first transmission line 22, the dynamic range of the voltage of the entire phase shifter can be expanded, and polarization of the liquid crystal molecules in the first dielectric layer 3 can be prevented.

[0063] For some examples, see Figure 2, each first transmission line 22 has a first transmission end 22a, a second transmission end 22b and a transmission main body 22c; wherein the first transmission end 22a, the second transmission end 22b and the transmission main body 22c all have a first endpoint and a second endpoint; the first endpoint of the first transmission end 22a is electrically connected to the first endpoint of the transmission main body 22c, and the first endpoint of the second transmission end 22b is electrically connected to the second endpoint of the transmission main body 22c. It should be noted here that the first endpoint and the second endpoint are relative concepts. If the first endpoint is the head end, the second endpoint is the end end, otherwise it is the opposite. In addition, in the embodiment of the present disclosure, the first endpoint of the first transmission end 22a is electrically connected to the first endpoint of the transmission main body 22c, and at this time, the first endpoint of the first transmission end 22a and the first endpoint of the transmission main body 22c can be a common endpoint. Correspondingly, the first endpoint of the second transmission end 22b is electrically connected to the second endpoint of the transmission main body 22c, and the first endpoint of the second transmission end 22b and the second endpoint of the transmission main body 22c are a common endpoint.

[0064] In some examples, when the first transmission end 22a is used as a transmitting end of a microwave signal, the second transmission end 22b is used as a receiving end of a microwave signal; correspondingly, when the second transmission end 22b is used as a transmitting end of a microwave signal, the first transmission end 22a is used as a receiving end of a microwave signal. As described above, taking the first transmission end 22a of the first transmission line 22 as the transmitting end as an example, the first transmission end 22a of each first transmission line 22 and the orthographic projection of the first opening 121 on the first reference electrode 12 corresponding to the first transmission line 22 on the second substrate 21 at least partially overlap, so that the second transmission end 22b of the first transmission line 22 receives the microwave signal and then transmits it to the first transmission end 22a, and the first transmission end 22a couples the microwave signal out of the phase shifter through the first opening 121 on the first reference electrode 12. In some examples, the extension direction of the orthographic projection of the first transmission end 22a on the second substrate 21 can pass through the center of the orthographic projection of the first opening 121 on the second substrate 21.

[0065] In some examples, the first opening 121 can be of any shape, such as a circular opening and a polygonal opening, the polygonal opening including a rectangular opening, a triangular opening, a trapezoidal opening, etc. If the first opening 121 is a polygonal opening, the orthographic projection of the first transmission end 22a on the second substrate 21 only overlaps with one side of the orthographic projection of the first opening 121 on the second substrate 21; if the first opening 121 is a circular opening, the orthographic projection of the first transmission end 22a on the second substrate 21 only overlaps with one side of the circular edge of the orthographic projection of the first opening 121 on the second substrate 21.

[0066] For some examples, see Figure 4, each first reference electrode 12 is further provided with a second opening 122, and the orthographic projections of the first opening 121 and the second opening 122 on the second substrate 21 do not overlap. The second transmission end 22b of each first transmission line 22 and the orthographic projection of the second opening 122 on the first reference electrode 12 corresponding to the first transmission line 22 on the second substrate 21 at least partially overlap. In some examples, the extension direction of the orthographic projection of the second transmission end 22b on the second substrate 21 can pass through the center of the orthographic projection of the second opening 122 on the second substrate 21.

[0067] In some examples, the second opening 122 can be of any shape, such as a circular opening and a polygonal opening, the polygonal opening including a rectangular opening, a triangular opening, a trapezoidal opening, etc. If the second opening 122 is a polygonal opening, the orthographic projection of the second transmission end 22b on the second substrate 21 only overlaps with one side of the orthographic projection of the second opening 122 on the second substrate 21; if the second opening 122 is a circular opening, the orthographic projection of the second transmission end 22b on the second substrate 21 only overlaps with one circular edge of the orthographic projection of the second opening 122 on the second substrate 21.

[0068] In some examples, the specific shape of the first transmission line 22 can be various, for example, see Figure 2 Each first transmission line 22 has a first transmission end 22a, a second transmission end 22b and a transmission body portion 22c electrically connecting the two, wherein the transmission body portion 22c may include a planar spiral transmission line electrically connected to the first transmission end 22a and the second transmission end 22b.

[0069] For example, see Fig.11 Taking a first transmission line 22 in the phase shifter as an example, the transmission main body 22c may include at least one meandering line electrically connected to the first transmission end 22a and the second transmission end 22b. The transmission main body 22c includes but is not limited to meandering lines, and the number of meandering lines may be one or more. The shape of the meandering line includes but is not limited to a bow shape, a wavy shape, etc.

[0070] In some examples, when the transmission main body 22c includes a plurality of meandering lines, the shapes of the meandering lines are at least partially different. That is, the shapes of the meandering lines may be partially the same, or the shapes of all the meandering lines may be different.

[0071] In some examples, the transmission main body 22c of the first transmission line 22 includes at least one meandering line electrically connected to the first transmission end 22a and the second transmission end 22b; and the orthographic projection of the at least one meandering line on the first substrate 11 has a portion that intersects with the extension direction of the orthographic projection of the first transmission end 22a on the first substrate 11. In this case, the space occupied by the first transmission line 22 in the phase shifter can be reduced to reduce the volume of the phase shifter. Of course, the transmission main body 22c can also be other shapes, such as bow-shaped, wavy, sawtooth, etc., which are not limited here.

[0072] For some examples, see Figure 1-Figure 4 , the first substrate also includes a plurality of first bias lines 01, which are arranged on the side of the first substrate 11 close to the first dielectric layer 3, each of which is connected to a first reference electrode 12, and transmits a first bias voltage to the first reference electrode 12; correspondingly, the second substrate also includes a plurality of second bias lines 02, which are arranged on the side of the second substrate 21 close to the first dielectric layer 3, each of which is connected to a first transmission line 22, and provides a second bias voltage to the first transmission line 22, so that a DC steady-state electric field is formed between the first transmission line 22 and the first reference electrode 12. Microscopically, the liquid crystal molecules of the first dielectric layer 3, which is a liquid crystal layer, deflect their axis orientation due to the electric field force. Macroscopically, the dielectric constant of the first dielectric layer 3, which is a liquid crystal layer, is changed. When a microwave signal is transmitted between the first transmission line 22 and the first reference electrode 12, the dielectric constant of the first dielectric layer 3, which is a liquid crystal layer, changes, causing the phase of the microwave signal to change accordingly. Specifically, the magnitude of the phase change of the microwave signal is positively correlated with the deflection angle of the liquid crystal molecules and the electric field strength, that is, applying a DC bias voltage can change the phase of the microwave signal. This is the working principle of the liquid crystal phase shifter.

[0073] It should be noted that, in the embodiment of the present disclosure, the phase shifter further includes a first wiring board and a second wiring board; wherein the first wiring board is bound and connected to the first substrate, and is configured to provide a first bias voltage to the first bias line 01. The second wiring board is bound and connected to the second substrate, and is configured to provide a second bias voltage to the second bias line 02. Both the first wiring board and the second wiring board may include various types of wiring boards, such as a flexible printed circuit (FPC) or a printed circuit board (PCB), etc., which are not limited here. The first wiring board may have at least one first pad, one end of the first bias line 01 is connected to the first pad (i.e., bonded to the first pad), and the other end of the first bias line 01 is connected to a first reference electrode 12; the second wiring board may also have at least one second pad, one end of the second bias line 02 is connected to the second pad (i.e., bonded to the second pad), and the other end of the second bias line 02 is connected to a first transmission line 22.

[0074] In some examples, the orthographic projections of the first bias lines 01 on the first substrate 11 do not overlap with each other; and the orthographic projections of the second bias lines 02 on the second substrate 21 do not overlap with each other.

[0075] For some examples, see Fig. 9 The phase shifter further includes a first driving unit 001, the first driving unit 001 includes a plurality of first channels, the first channel of one first driving unit 001 is connected to one first transmission line 22, and the first channel of one first driving unit 001 is connected to one first reference electrode 12, wherein the first channel connected to each first transmission line 22 is different from the first channel connected to each first reference electrode 12. The first driving unit 001 is configured to provide a first bias voltage to each first reference electrode 12 through the first channel, and to provide a second bias voltage to each first transmission line 22 through the first channel. Specifically, a first channel can be connected to a first reference electrode 12 through a first bias line 01, that is, a first end of a first bias line 01 is connected to a first channel of a first driving unit 001, and a second end of the first bias line 01 is connected to a first reference electrode 12; correspondingly, a first channel can be connected to a first transmission line 22 through a second bias line 02, that is, a first end of a second bias line 02 is connected to a first channel of the first driving unit 001, and a second end of the second bias line 02 is connected to a first transmission line 22.

[0076] In some examples, two driving units may be used to drive the first reference electrode 12 and the first transmission line 22 respectively. Fig.10, the phase shifter further includes a first driving unit 001 and a second driving unit 002. The first driving unit 001 includes a plurality of first channels, a first channel of a first driving unit 001 is connected to a first reference electrode 12, and the first driving unit 001 is configured to provide a first bias voltage to each first reference electrode 12 through the first channel; correspondingly, the second driving unit 002 includes a plurality of second channels, a second channel of a second driving unit 002 is connected to a first transmission line 22, and the second driving unit 002 is configured to provide a second bias voltage to each first transmission line 22 through the second channel. Specifically, a first channel can be connected to a first reference electrode 12 through a first bias line 01, that is, a first end of a first bias line 01 is connected to a first channel of a first driving unit 001, and a second end of the first bias line 01 is connected to a first reference electrode 12; correspondingly, a second channel can be connected to a first transmission line 22 through a second bias line 02, that is, a first end of a second bias line 02 is connected to a second channel of a second driving unit 002, and a second end of the second bias line 02 is connected to a first transmission line 22.

[0077] See also Fig.12The first driving unit 001 and / or the second driving unit 002 can be a driving chip, specifically a driving chip for display. Taking the first driving unit 001 as an example, the first driving unit 001 includes a serial-to-parallel conversion circuit, a shift register, a latch, a level conversion circuit, a positive voltage digital-to-analog conversion circuit (PDAC), a positive voltage amplifier circuit (PAMP), a negative voltage digital-to-analog conversion circuit (NDAC), a negative voltage amplifier circuit (NAMP), a buffer and an output data selector (OUT-MUX). The working principle of the first driving unit 001 providing the bias voltage is as follows: the bias voltage corresponding to the first bias voltage is input into the first driving unit 001 in the format of low-voltage differential signal (LVDS), and the LVDS signal is converted through the serial-to-parallel conversion circuit to convert the bias voltage signal of each first channel transmitted in serial mode into a bias voltage signal transmitted in parallel mode, and the bias voltage signals of multiple first channels are sequentially stored in the data register, and then sequentially output to the buffer for temporary storage; the level conversion circuit converts each bias voltage signal into a voltage value required by the first reference electrode 12 or the first transmission line 22, and then according to the polarity of the first bias voltage required by the first reference electrode 12, or the polarity of the second bias voltage required by the first transmission line 22, the bias voltage is transmitted to the PDAC or NDAC, and a positive bias voltage or a negative bias voltage is generated through digital-to-analog conversion, and then amplified and stored in the buffer, and under the control of the control signal TP, the corresponding first channel is selected through the output data selector, and transmitted to the first reference electrode 12 or the first transmission line 22 connected to the first channel. In combination with the above, bias voltages can be provided to each first reference electrode 12 and each first transmission line 22 individually through different first channels of a first driving unit 001 in the above manner, or bias voltages can be provided to each first reference electrode 12 and each first transmission line 22 respectively through two driving units in the above manner. Therefore, the voltage range output by the first driving unit 001 or the second driving unit 002 can be expanded only by changing the polarity of the first bias voltage and the second bias voltage, thereby providing a sufficient voltage difference to change the dielectric constant of the first dielectric layer 3 to achieve phase shift.

[0078] In some examples, the first driving unit 001 and / or the second driving unit 002 may specifically be a driving chip of HX8157 of HIMAX, and may be specifically set according to the phase shifting performance required by the phase shifter.

[0079] For some examples, see Figure 5The phase shifter provided in the embodiment of the present disclosure may further include a control unit, which is connected to the first driving unit 001 and / or the second driving unit 002, provides a control signal TP to the first driving unit 001 and / or the second driving unit 002, and outputs a signal in LVDS format to control the first driving unit 001 and / or the second driving unit 002 to generate and output a bias voltage. The control unit may be a timing controller (TCON) or a programmable logic device (FPGA), etc., which is not limited here.

[0080] In some examples, the first reference electrode 12 may be made of metal material, such as any one of copper, aluminum, gold, and silver. The thickness of the first reference electrode 12 is about 0.1 μm-100 μm. The specific material and thickness of the first reference electrode 12 can be specifically set according to the size and performance requirements of the phase shifter.

[0081] In some examples, the phase shifter includes not only the above-mentioned structure, but also includes a supporting structure (not shown in the figure) and a frame-sealing glue 4 and other structures; wherein the frame-sealing glue 4 is arranged between the first substrate and the second substrate, which is located in the peripheral area and surrounds the microwave transmission area, and is used to seal the liquid crystal box of the phase shifter (the first dielectric layer 3 is a liquid crystal layer); the supporting structure is arranged between the first substrate and the second substrate, and the number thereof can be multiple, and each supporting structure is arranged at intervals in the microwave transmission area to maintain the box thickness of the liquid crystal box.

[0082] In some examples, the support structure in the embodiments of the present disclosure can be made of organic materials and have a certain elasticity, so as to prevent the first substrate 11 and the second substrate 21 from being damaged by external forces when the phase shifter is squeezed. Furthermore, appropriate spherical particles can be added to the support structure to ensure the stability of the support structure when maintaining the box thickness.

[0083] In some examples, the first bias line 01 and / or the second bias line 02 are made of high-resistance material. When a bias voltage is applied to the first bias line 01 and / or the second bias line 02, the electric field formed by the first reference electrode 1 is only used to drive the liquid crystal molecules of the first dielectric layer 3 to deflect, and for the microwave signal transmitted by the phase shifter, it is equivalent to an open circuit, that is, the microwave signal is only transmitted along the first transmission line 22. Among them, the conductivity of the first bias line 01 and / or the second bias line 02 is less than 14500000 siemens / m (Siemens / meter), and the first bias line 01 and / or the second bias line 02 with a lower conductivity value is selected according to the size of the phase shifter. In some examples, the material of the first bias line 01 and / or the second bias line 02 includes but is not limited to any one of indium tin oxide (ITO), nickel (Ni), tantalum nitride (TaN), chromium (Cr), indium oxide (In2O3), and tin oxide (Sn2O3). Preferably, the first bias line 01 and / or the second bias line 02 is made of ITO material.

[0084] In some examples, the first transmission line 22 is made of metal material. Specifically, the material of the first transmission line 22 is, but not limited to, made of metal such as aluminum, silver, gold, chromium, molybdenum, nickel or iron.

[0085] In some examples, the first substrate 11 can be made of a variety of materials. For example, if the first substrate 11 is a flexible substrate, the material of the first substrate 11 can include at least one of polyethylene glycol terephthalate (PET) and polyimide (PI). If the first substrate 11 is a rigid substrate, the material of the first substrate 11 can also be glass. The thickness of the first substrate 11 can be about 0.1 mm-1.5 mm. The second substrate 21 can also be made of a variety of materials. For example, if the second substrate 21 is a flexible substrate, the material of the second substrate 21 can include at least one of polyethylene glycol terephthalate (PET) and polyimide (PI). If the second substrate 21 is a rigid substrate, the material of the second substrate 21 can also be glass. The thickness of the second substrate 21 can be about 0.1 mm-1.5 mm. Of course, the materials of the first substrate 11 and the second substrate 21 can also be other materials, which are not limited here. The specific thickness of the first substrate 11 and the second substrate 21 may also be set according to the skin depth of the electromagnetic wave (radio frequency signal).

[0086] In some examples, the thickness of the first dielectric layer 3, which is a liquid crystal layer, is about 1 μm-1 mm. Of course, the thickness of the first dielectric layer 3 can be specifically set according to the size of the phase shifter and the requirements of the phase shift angle. In addition, the first dielectric layer 3 in the embodiment of the present disclosure uses a microwave liquid crystal material. For example: the liquid crystal molecules in the first dielectric layer 3 are positive liquid crystal molecules or negative liquid crystal molecules. It should be noted that when the liquid crystal molecules are positive liquid crystal molecules, the angle between the long axis direction of the liquid crystal molecules in the embodiment of the present disclosure and the second electrode is greater than 0° and less than or equal to 45°. When the liquid crystal molecules are negative liquid crystal molecules, the angle between the long axis direction of the liquid crystal molecules in the specific embodiment of the present disclosure and the second electrode is greater than 45° and less than 90°, which ensures that after the liquid crystal molecules are deflected, the dielectric constant of the first dielectric layer 3 is changed to achieve the purpose of phase shifting.

[0087] In some examples, the first substrate further includes a first alignment layer (not shown in the figure), which is arranged on the side of the first reference electrode 12 away from the first substrate 11; and further includes a second alignment layer (not shown in the figure), which is arranged on the side of the first transmission line 22 away from the second substrate 21. The first alignment layer and the second alignment layer are used to align the liquid crystal molecules in the first dielectric layer 3. The first alignment layer and the second alignment layer can both be made of polyimide materials. The thickness of the first alignment layer and the second alignment layer can be about 30nm-2μm.

[0088] In a second aspect, the embodiments of the present disclosure further provide a method for driving a phase shifter, which is used for the above-mentioned phase shifter, and comprises the following steps:

[0089] According to the phase shift amount required by the area where each first transmission line 22 is located, the second bias voltage corresponding to the first transmission line 22 is input to each first transmission line 22, and the first bias voltage corresponding to the first reference electrode 12 is input to each of the plurality of first reference electrodes 12.

[0090] Specifically, the phase shifter is applied to the antenna. During the scanning process of the antenna, different radiating units require different amounts of phase compensation, that is, different phase shifting amounts required by phase shifting units in different areas where the first transmission lines 22 are located are different. A corresponding table of driving voltage-phase shifting amount can be preset in the control unit. According to the phase shifting amount required for the area where the first transmission line 22 corresponding to a radiating unit is located, the bias voltage is searched in the preset corresponding table. According to the searched driving voltage, the corresponding first bias voltage and second bias voltage are generated, so that the difference between the first bias voltage and the second bias voltage is equal to the driving voltage.

[0091] In some examples, the first bias voltage and the second bias voltage may be voltages with the same value and opposite polarities. It should be noted that the first drive unit 001 or the second drive unit 002 has its own reference voltage, and usually, the median of its voltage range can be used as the reference voltage. For example, if the output voltage range of the first drive unit 001 is 0-18V, 9V can be used as the reference voltage of the first drive unit 001, and the positive and negative of the first bias voltage and the second bias voltage are determined with respect to the reference voltage, that is, the first bias voltage or the second bias voltage less than the reference voltage (9V) is negative polarity, and the first bias voltage or the second bias voltage greater than or equal to the reference voltage (9V) is positive polarity. For example, assuming that the driving voltage required for the region where a first transmission line 22 in the phase shifter is located is XV, the first bias voltage can be set to (9+x / 2)V, and the second bias voltage can be set to (9-x / 2). For the driving unit (the first driving unit 001 or the second driving unit 002), the input LVDS data is consistent, both (x / 2)V, and it is only necessary to change the polarity of the output voltage by selecting a digital-to-analog conversion circuit with different polarities. Therefore, it is possible to achieve a sufficient voltage difference to drive the phase shifter without adding additional data, and it is possible to flexibly set the second bias voltage of the first transmission line 22 in each region and the first bias voltage of the first reference electrode 12. In addition, by flipping the polarity of the first bias voltage to the first reference electrode 12 and the second bias voltage to the first transmission line 22, it is possible to prevent the liquid crystal molecules in the first dielectric layer 3 from being polarized and causing the performance of the phase shifter to deteriorate.

[0092] Taking the application of the phase shifter to a 1×4 antenna array as an example, that is, the phase shifter includes phase shifting units arranged in sequence in the same direction as a model for simulation, its port parameters (reflection characteristics Sii, transmission characteristics Sij), gain (normal direction) and bandwidth (gain and frequency relationship), Sii in the vertical state of the liquid crystal, Sii in the mixed state of the liquid crystal, Sij in the parallel state of the liquid crystal, Sij in the vertical state of the liquid crystal, Sij in the mixed state of the liquid crystal, Sij in the parallel state of the liquid crystal, the normal radiation pattern in the vertical state of the liquid crystal, the normal radiation pattern in the mixed state of the liquid crystal, and the normal radiation pattern in the parallel state of the liquid crystal are shown in the following table. Among them, ① is an antenna using a phase shifter with the first reference electrode layer as a surface electrode, and ② is an antenna provided in the embodiment of the present disclosure. It can be seen that the performance parameters of the two are not much different, so it can be verified that the phase shifter provided in the embodiment of the present disclosure has good performance.

[0093] ① ② Vertical Sii impedance bandwidth, port parameters 0.36G, -33dB 0.36G, -35dB Mixed state Sii impedance bandwidth, port parameters 0.2G, -20dB 0.24G, -20dB Parallel State Sii impedance bandwidth, port parameters 0.48G, -10dB 0.48G, -15dB Vertical Sij port isolation -30dB -27dB Mixed state Sij port isolation -30dB -30dB Parallel State Sij port isolation -30dB -30dB Vertical Normal Direction Diagram 2.5dB 2.5dB Mixed state Normal Direction Diagram 4.0dB 4.0dB Parallel State Normal Direction Diagram 3.6dB 3.7dB

[0094] In a third aspect, an embodiment of the present disclosure further provides an antenna, comprising the above-mentioned phase shifter.

[0095] In some examples, the antenna further includes a plurality of radiation units 33, and the plurality of radiation units 33 are disposed on a side of the first substrate 11 away from the first dielectric layer 3. The radiation units 33 correspond to the first transmission lines 22 one by one, and the orthographic projections of one radiation unit 33 and the first transmission end 22a of the first transmission line 22 corresponding to the radiation unit on the first substrate 11 at least partially overlap.

[0096] In some examples, the radiation unit 33 corresponds to the first reference electrode 12 one by one, and the orthographic projection of one radiation unit 33 and the first reference electrode 12 corresponding to the radiation unit 33 on the first substrate 11 at least partially overlaps; the orthographic projection of each radiation unit 33 and the first opening 121 on the first reference electrode 12 on the first substrate 11 at least partially overlaps, and the orthographic projection of each radiation unit 33 and the second opening 122 of the first reference electrode 12 on the first substrate 11 do not overlap. By forming a double-sided metal on a glass substrate (first substrate 11), the radiation unit 33 and the first reference electrode 12 are formed on both sides of the first substrate 11, and the radiation unit 33 is covered on the first opening 121, and the first opening 121 is directly opposite to the first transmission end 22a of the first transmission line 22. Taking the first transmission end 22a as the transmitting end as an example, the first transmission line 22a couples the microwave signal to the radiation unit 33 through the first opening 121.

[0097] For some examples, see Fig.14 , the radiation unit may also be arranged in other ways, for example, the antenna further includes a third substrate, and the third substrate is arranged on the side of the first substrate 11 away from the first dielectric layer 3. The third substrate includes a third substrate 31, and a plurality of radiation units 33 arranged on the side of the third substrate 31 away from the first substrate 11, and a plurality of second transmission lines 32 arranged on the side of the third substrate 31 close to the first substrate 11. A plurality of first through holes via1 are provided in the third substrate 31, and the first end of each second transmission line 32 is connected to a radiation unit 33 through a first through hole via1, and the second end of the second transmission line 32 is coupled with a first transmission line 22 through a first opening 121 on the first reference electrode 12. Specifically, the second transmission lines 32 correspond to the first transmission lines 22 one by one, and the second end of a second transmission line 32 and the first transmission end 22a of the first transmission line 22 corresponding to the second transmission line 32 are at least partially overlapped in the orthographic projection on the first substrate 11.

[0098] In some examples, the third substrate may be a printed circuit board (PCB).

[0099] For some examples, see Fig.14 , Fig.15The antenna further includes a fourth substrate, which is arranged on the side of the second substrate 21 away from the first dielectric layer 3. The fourth substrate includes a fourth substrate 41, a second reference electrode layer 42 arranged on the side of the fourth substrate 41 away from the second substrate 21, and a power division transmission structure 43 arranged on the side of the fourth substrate 41 close to the second substrate 21. The power division transmission structure 43 and the orthographic projection of the second reference electrode layer 41 on the second substrate 21 at least partially overlap to form a microstrip line structure. Fig.15 The power division transmission structure 43 includes a combined transmission line 43a and multiple power division transmission lines 43b. The first ends of the multiple power division transmission lines 43b are all connected to the first end of the combined transmission line 43a, and the second end of the combined transmission line 43a is connected to the radio frequency cable to receive the radio frequency signal; the power division transmission line 43b corresponds to the first transmission line 22 one by one, and the second end of a power division transmission line 43b and the second transmission end 22b of the first transmission line 22 corresponding to the power division transmission line 43b are at least partially overlapped in the positive projection on the fourth substrate 41. After receiving the radio frequency signal, the second end of the combined transmission line 43a is power-divided into multiple sub-signals, which are respectively input into each power division transmission line 43b. The power division transmission line 43b is then coupled with the second transmission end 22b of the first transmission line 22 to couple the sub-signals to the first transmission line 22.

[0100] In some examples, a second opening 122 is further provided on each first reference electrode 12. The power division transmission lines 43b of the power division transmission structure 43 correspond one-to-one with the first reference electrodes 12, and the orthographic projections of the second ends of the power division transmission lines 43b and the second openings 122 of the first reference electrodes 12 corresponding to the power division transmission lines 43b on the fourth substrate 41 at least partially overlap.

[0101] In some examples, the power division transmission structure 43 can also be arranged on the side of the second substrate 21 close to the first dielectric layer 3, that is, the power division transmission structure 43 is arranged on the same layer as the first transmission line 22, and the second end of the power division transmission line 43b is electrically connected to the second transmission end 22b of the first transmission line 22 corresponding to the power division transmission line 43b. In addition, the second reference electrode layer 41 is arranged on the side of the second substrate 21 away from the first dielectric layer 3. In this case, there is no need to arrange the fourth substrate, so that the thickness of the antenna can be reduced.

[0102] It is to be understood that the above embodiments are merely exemplary embodiments used to illustrate the principles of the present invention, but the present invention is not limited thereto. For those of ordinary skill in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A phase shifter, comprising a first substrate and a second substrate arranged opposite to each other, and a first dielectric layer arranged therebetween; The first substrate comprises: a first base, a first reference electrode layer arranged on a side of the first substrate close to the first dielectric layer, the first reference electrode layer comprises a plurality of first reference electrodes arranged in an interval and insulated manner, each of the first reference electrodes being provided with a first opening; the second substrate comprises: a second base, a plurality of first transmission lines arranged in an interval and arranged on a side of the second substrate close to the first dielectric layer; wherein, The first transmission lines correspond to the first reference electrodes one by one, and the orthographic projections of the first transmission lines and the corresponding first reference electrodes on the second substrate at least partially overlap; Each of the first transmission lines has a first transmission end and a second transmission end, and the first transmission end of each of the first transmission lines at least partially overlaps with an orthographic projection of the first opening on the second substrate.

2. The phase shifter according to claim 1, wherein: Each of the first reference electrodes is also provided with a second opening, and the orthographic projections of the first opening and the second opening on the second substrate do not overlap; wherein, The second transmission end of each of the first transmission lines at least partially overlaps with an orthographic projection of the second opening on the second substrate.

3. The phase shifter according to claim 1, wherein: The phase shifter also includes a first driving unit, which includes a plurality of first channels, one of the first channels is connected to one of the first transmission lines, and one of the first channels is connected to one of the first reference electrodes, and the first driving unit is configured to provide a first bias voltage to each of the first reference electrodes through the first channel, and to provide a second bias voltage to each of the first transmission lines.

4. The phase shifter according to claim 3, wherein: The first substrate further includes a plurality of first bias lines, which are arranged on a side of the first substrate close to the first dielectric layer, and each of the first bias lines is connected between one of the first channels and one of the first reference electrodes; The second substrate further includes a plurality of second bias lines, which are arranged on a side of the second substrate close to the first dielectric layer, and each of the second bias lines is connected between one of the first channels and one of the first transmission lines.

5. The phase shifter according to claim 1, wherein: The phase shifter further includes a first driving unit and a second driving unit; the first driving unit includes a plurality of first channels, one of the first channels is connected to one of the first reference electrodes, and the first driving unit is configured to provide a first bias voltage to each of the first reference electrodes through the first channel; The second driving unit includes a plurality of second channels, one of the second channels is connected to one of the first transmission lines, and the second driving unit is configured to provide a second bias voltage to each of the first transmission lines through the second channel.

6. The phase shifter according to claim 5, wherein: The first substrate further includes a plurality of first bias lines, which are arranged on a side of the first substrate close to the first dielectric layer, and each of the first bias lines is connected between one of the first channels and one of the first reference electrodes; The second substrate further includes a plurality of second bias lines, which are arranged on a side of the second substrate close to the first dielectric layer, and each of the second bias lines is connected between one of the second channels and one of the first transmission lines.

7. The phase shifter according to any one of claims 1 to 6, wherein: Each of the first transmission lines also includes a transmission main body; wherein the first transmission end and the second transmission end each have a first endpoint and a second endpoint that are relatively arranged; the first endpoint of the first transmission end and the first endpoint of the second transmission end are respectively connected to two opposite ends of the transmission main body.

8. The phase shifter according to claim 7, wherein: The transmission main body includes a planar spiral transmission line electrically connected to the first transmission end and the second transmission end.

9. The phase shifter according to claim 7, wherein: The transmission main body includes at least one meandering line electrically connected to the first transmission end and the second transmission end; The orthographic projection of the at least one meandering line on the first substrate has a portion intersecting with an extending direction of the orthographic projection of the first transmission end on the first substrate.

10. An antenna, wherein: Comprising the phase shifter described in any one of claims 1-9.

11. The antenna according to claim 10, wherein: The antenna also includes a plurality of radiation units, which are arranged on a side of the first substrate away from the first dielectric layer; the radiation units correspond to the first transmission lines one by one, and the orthographic projections of the radiation units and the corresponding first transmission lines on the first substrate at least partially overlap.

12. The antenna according to claim 11, wherein: The radiation units correspond to the first reference electrodes one by one, and the orthographic projections of the radiation units and the corresponding first reference electrodes on the first substrate at least partially overlap; Each of the radiation units at least partially overlaps with an orthographic projection of the first opening on the first substrate.

13. The antenna according to claim 12, wherein: A second opening is also provided on each of the first reference electrodes, and the orthographic projection of each of the radiation units and the second opening on the first substrate does not overlap.

14. The antenna according to claim 10, wherein: The antenna further comprises a third substrate, which is arranged on a side of the first substrate away from the first dielectric layer; The third substrate comprises a third base, and a plurality of radiation units arranged on a side of the third base away from the first base, and a plurality of second transmission lines arranged on a side of the third base close to the first base; a plurality of first through holes are opened in the third base, and a first end of each of the second transmission lines is connected to a radiation unit through a first through hole; wherein, The second transmission lines correspond to the first transmission lines one by one, and the second ends of the second transmission lines at least partially overlap with the orthographic projections of the corresponding first transmission lines on the first substrate.

15. The antenna according to claim 10, wherein: The antenna further includes a fourth substrate, which is arranged on a side of the second substrate away from the first dielectric layer; The fourth substrate comprises a fourth base, a second reference electrode layer arranged on a side of the fourth base away from the second base, and a power division transmission structure arranged on a side of the fourth base close to the second base; The orthographic projections of the power division transmission structure and the second reference electrode layer on the second substrate at least partially overlap; The power division transmission structure includes a combined transmission line and multiple power division transmission lines, the first end of each of the multiple power division transmission lines is connected to the first end of the combined transmission line; the second end of one of the power division transmission lines and the orthographic projection of the second transmission end of a first transmission line on the fourth substrate at least partially overlap.

16. The antenna according to claim 15, wherein: Each first reference electrode is also provided with a second opening; the power division transmission line corresponds to the first reference electrode one by one, and the orthographic projections of the second end of the power division transmission line and the corresponding second opening of the first reference electrode on the fourth substrate at least partially overlap.

17. A method for driving a phase shifter, used for the phase shifter according to any one of claims 1 to 9, comprising the following steps: According to the phase shift amount required by the area where each first transmission line is located, the corresponding first bias voltage is input to each of the first reference electrodes, and the corresponding second bias voltage is input to each of the plurality of first transmission lines.

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