Ultrasonic horn assembly, ultrasonic-assisted chip removal device and method for multi-wire sawing

Abstract

The application provides an ultrasonic nozzle assembly, an ultrasonic auxiliary chip removal device and method for multi-wire cutting. The assembly adopts a main fluid pipe with a cavity containing target fluid, a nozzle communicating with the cavity of the main fluid pipe, and an ultrasonic generator for ultrasonic oscillation of the target fluid. The target fluid includes liquid and / or gas. The main fluid pipe is arranged between a groove wheel and a fixed table in a multi-wire cutting machine, and the fluid nozzle of the nozzle is arranged opposite to the cutting wire wound on the groove wheel in the multi-wire cutting machine, so as to spray the target fluid in the ultrasonic oscillation state from the fluid nozzle to the cutting wire. The application can effectively improve the chip removal capacity of the multi-wire cutting machine, effectively optimize the cutting capacity of the cutting wire in the multi-wire cutting machine, and improve the warping degree of the wire cutting, thereby improving the application effectiveness and reliability of the multi-wire cutting machine.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of substrate processing, and in particular to an ultrasonic nozzle assembly, an ultrasonic-assisted chip removal device and method for multi-wire sawing. BACKGROUND

[0002] Multi-wire sawing is a new type of cutting processing method for simultaneously cutting an object such as a semiconductor into hundreds of thin slices through high-speed reciprocating movement of a cutting wire such as a metal wire. At present, high-precision numerical control multi-wire high-speed cutting machine tools can comprehensively realize high-precision, high-speed and low-loss cutting of semiconductor materials and various hard and brittle materials.

[0003] However, in the process of multi-wire sawing of the current multi-wire sawing machine, the cutting chips at the cutting site will accumulate, resulting in reduced chip removal capacity and deterioration of the warp of the wire mesh direction and the feeding direction formed by the cutting wire.

[0004] Therefore, there is an urgent need to design a device that can assist the multi-wire sawing machine in chip removal during the operation of the multi-wire sawing machine. SUMMARY

[0005] In view of this, the embodiments of the present application provide an ultrasonic nozzle assembly, an ultrasonic-assisted chip removal device and method for multi-wire sawing to eliminate or improve one or more defects in the prior art.

[0006] One aspect of the present application provides an ultrasonic nozzle assembly, comprising: a main fluid pipe in which a target fluid is accommodated, a nozzle in communication with the inner cavity of the main fluid pipe, and an ultrasonic generator for ultrasonic oscillation of the target fluid, wherein the target fluid comprises a liquid and / or a gas;

[0007] The main fluid pipe is arranged between a groove wheel and a fixed table in a multi-wire sawing machine, and the fluid nozzle of the nozzle is arranged opposite to a cutting wire wound on the groove wheel in the multi-wire sawing machine, so as to spray the target fluid in an ultrasonic oscillation state from the fluid nozzle onto the cutting wire.

[0008] In some embodiments of the present application, the main fluid pipe has a plurality of;

[0009] The spacing of each main fluid pipe is arranged based on the groove spacing of each groove wheel in the multi-wire sawing machine.

[0010] In some embodiments of the present application, a plurality of nozzles are arranged on the main fluid pipe;

[0011] The number of the spray heads on each of the main fluid pipes is equal to or greater than the number of the cutting lines, so that each of the cutting lines is oppositely arranged at a preset angle with the fluid jet of at least one of the spray heads on each of the main fluid pipes.

[0012] Each of the spray heads on the main fluid pipe is movably connected with the main fluid pipe.

[0013] In some embodiments of the present application, one spray head is arranged on each of the main fluid pipes, and the fluid jet of the spray head comprises a strip-shaped jet, so that each of the strip-shaped jets on each of the main fluid pipes is oppositely arranged at a preset angle with all of the cutting lines.

[0014] In some embodiments of the present application, the inner cavity of the main fluid pipe comprises a liquid cavity for containing the liquid and a gas cavity for containing the gas.

[0015] The spray head comprises a double-flow nozzle.

[0016] The liquid inlet of the double-flow nozzle is in communication with the liquid cavity, and the gas inlet of the double-flow nozzle is in communication with the gas cavity.

[0017] In some embodiments of the present application, the ultrasonic generator is arranged on each of the main fluid pipes to ultrasonically oscillate the target fluid in the inner cavity of the main fluid pipe.

[0018] In some embodiments of the present application, the ultrasonic generator is fixedly arranged in each of the spray heads to ultrasonically oscillate the target fluid in the spray head.

[0019] In some embodiments of the present application, the two ends of the main fluid pipe are fixedly connected with different connecting rods, and the two connecting rods connected with the same main fluid pipe are movably connected with the two ends of one of the groove wheels.

[0020] Another aspect of the present application provides an ultrasonic auxiliary chip removal device for multi-wire cutting, comprising a frequency converter, a piezoelectric device connected to the frequency converter, and the ultrasonic spray head assembly.

[0021] The ultrasonic generator in the ultrasonic spray head assembly is connected to the piezoelectric device, so that the target fluid in the ultrasonic spray head assembly is ultrasonically oscillated and sprayed onto the cutting line under the driving of the frequency converter and the piezoelectric device, thereby pushing the cutting line to periodically oscillate in a direction perpendicular to the cutting direction of the multi-wire cutting machine to remove cutting chips.

[0022] Still another aspect of the present application provides an ultrasonic auxiliary chip removal method for multi-wire cutting, comprising:

[0023] The frequency converter and the piezoelectric device in the ultrasonic auxiliary chip removal device for the multi-wire cutting machine are controlled to operate, so that the target fluid in the ultrasonic nozzle assembly generates ultrasonic oscillation and is sprayed onto the cutting wire under the driving of the frequency converter and the piezoelectric device, thereby pushing the cutting wire to generate a periodic oscillation in a direction perpendicular to the cutting direction of the multi-wire cutting machine to remove the cutting chips.

[0024] The ultrasonic nozzle assembly provided by the application comprises a main fluid pipe containing a target fluid in an inner cavity, a nozzle in communication with the inner cavity of the main fluid pipe, and an ultrasonic generator for ultrasonic oscillation of the target fluid, wherein the target fluid comprises liquid and / or gas; the main fluid pipe is arranged between a groove wheel and a fixed table in the multi-wire cutting machine, and a fluid spray port of the nozzle is arranged opposite to the cutting wire wound on the groove wheel in the multi-wire cutting machine, so that the target fluid in the ultrasonic oscillation state is sprayed from the fluid spray port to the cutting wire, which can effectively improve the chip removal capacity of the multi-wire cutting machine, effectively optimize the cutting capacity of the cutting wire in the multi-wire cutting machine, and improve the warping degree of the wire cutting, thereby improving the application effectiveness and reliability of the multi-wire cutting machine.

[0025] Additional advantages, objects, and features of the application will be set forth in part in the description which follows, and in part will become apparent to those having ordinary skill in the art upon examination of the following or can be learned from practice of the application. The objects and other advantages of the application can be realized and attained by the structure particularly pointed out in the specification and claims hereof as well as the appended drawings.

[0026] It will be appreciated by persons skilled in the art that the objects and advantages of the application can not be limited to what has been specifically described hereinabove and a minimum of the above and other objects and advantages of the application can be learned by a fair study of the following detailed description taken in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF DRAWINGS

[0027] The accompanying drawings, which are included to provide a further understanding of the application and are incorporated in and constitute a part of this application, illustrate embodiments of the application and together with the description serve to explain the principles of the application. The components in the drawings are not necessarily to scale, emphasis instead being placed upon illustrating the principles of the application. To facilitate an understanding of some portions of this application, corresponding portions of the drawings have been exaggerated in some aspects and minimized in others – i.e., some components have been drawn larger in relation to other components than they often would be in an actual device manufactured according to this application. In the drawings:

[0028] Figure 1 A schematic view of the positional relationship between the ultrasonic nozzle assembly in an embodiment of the application and the general cutting structure of the multi-wire cutting machine.

[0029] Figure 2 A structural schematic view of a first ultrasonic nozzle assembly in an embodiment of the application.

[0030] Figure 3This is a schematic diagram of the structure of a second ultrasonic nozzle assembly in one embodiment of this application.

[0031] Figure 4 This is a schematic diagram of the structure of a third ultrasonic nozzle assembly in one embodiment of this application.

[0032] Figure 5 This is a schematic diagram illustrating the basic principle of ultrasonic oscillation multi-wire cutting technology in the application example of this application.

[0033] Icon labels:

[0034] 1. Main fluid pipe;

[0035] 2. Spray nozzle;

[0036] 21. Strip-shaped nozzle;

[0037] 3. Ultrasonic generator;

[0038] 4. Grooved wheel;

[0039] 5. Fixed platform;

[0040] 6. Cutting line;

[0041] 7. Ultrasonic nozzle assembly;

[0042] 8. The object to be cut. Detailed Implementation

[0043] To make the objectives, technical solutions, and advantages of this application clearer, the application will be further described in detail below with reference to the embodiments and accompanying drawings. Here, the illustrative embodiments and their descriptions are used to explain this application, but are not intended to limit it.

[0044] It should also be noted that, in order to avoid obscuring this application with unnecessary details, only the structures and / or processing steps closely related to the scheme according to this application are shown in the accompanying drawings, while other details that are not closely related to this application are omitted.

[0045] In the description of this application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0046] It should be emphasized that the term "including / comprises" as used herein refers to the presence of a feature, element, step, or component, but does not exclude the presence or addition of one or more other features, elements, steps, or components.

[0047] It is also noted herein that, if it is not otherwise indicated, the term "connected" is to be interpreted broadly to include a connection that is directly connected as well as an indirect connection with intervening materials.

[0048] Hereinafter, embodiments of the present application will be described with reference to the accompanying drawings. In the drawings, like reference numerals designate like or similar parts, or like or similar steps.

[0049] To solve at least one of the problems that the cutting debris of the cutting part accumulates, the chip removal capacity is reduced, and the warp of the wire net direction and the feeding direction of the cutting wire is deteriorated in the process of the multi-wire saw cutting the to-be-cut object, embodiments of an ultrasonic nozzle assembly, an ultrasonic auxiliary chip removal device for multi-wire saw cutting comprising the ultrasonic nozzle assembly, and an ultrasonic auxiliary chip removal method for multi-wire saw cutting are provided, which greatly improve the chip removal capacity by introducing multi-wire saw cutting through the improvement of ultrasonic technology, alleviate the influence of crystal anisotropy on the warp, and improve the wire cutting warp.

[0050] The embodiments are specifically described as follows.

[0051] The embodiments of the present application provide an ultrasonic nozzle assembly, referring to Figure 1 , the ultrasonic nozzle assembly specifically comprises the following contents:

[0052] The inner cavity contains a main fluid pipe 1 of a target fluid, a nozzle 2 in communication with the inner cavity of the main fluid pipe 1, and an ultrasonic generator 3 for ultrasonic oscillation of the target fluid, wherein the target fluid includes liquid and / or gas; the main fluid pipe 1 is arranged between a groove wheel 4 and a fixed table 5 in a multi-wire saw machine, and the fluid nozzle of the nozzle 2 is arranged opposite to the cutting wire 6 wound on the groove wheel 4 in the multi-wire saw machine, so as to spray the target fluid in the ultrasonic oscillation state from the fluid nozzle to the cutting wire 6.

[0053] In one or more embodiments of the present application, the multi-wire saw machine refers to a device capable of multi-wire saw cutting of semiconductor and the like, and specifically can comprise Figure 1In addition to the ultrasonic nozzle assembly, the general cutting structure comprises at least two spaced and parallel grooved wheels 4, and each cutting wire 6 is wound around the grooved wheels 4. The cutting wires 6 are uniformly wound around the two spaced and parallel grooved wheels 4 to cut the to-be-cut object 8 on the fixing table 5 (which can also be an operation table). It can be understood that, in addition to the above-mentioned cutting structure, other structures and connection relationships of the multi-wire cutting machine can be set according to actual conditions, that is, the present application is applicable to various types of multi-wire cutting machines with the above-mentioned general cutting structure, and the present application does not limit this.

[0054] In addition, in the above description, the target fluid includes liquid and / or gas, specifically, only liquid flows in the main fluid pipe 1 so that the nozzle 2 sprays liquid onto the cutting wire 6, only gas flows in the main fluid pipe 1 so that the nozzle 2 sprays gas onto the cutting wire 6, or liquid and gas flow in the main fluid pipe 1 and shield each other, so that the nozzle 2 sprays liquid and gas at the same time or overlaps onto the cutting wire 6.

[0055] It can be understood that the liquid can refer to various liquids capable of generating ultrasonic oscillation under the action of the ultrasonic generator 3, such as water, special cutting liquid, etc.; and the gas can refer to various gases capable of generating ultrasonic oscillation under the action of the ultrasonic generator 3, preferably harmless to the human body, such as air, etc.

[0056] In one or more embodiments of the present application, the main fluid pipe 1 is arranged in parallel with the grooved wheels 4 in the multi-wire cutting machine, and the length thereof can be determined according to the length of the grooved wheels 4 and / or the length of the wire net formed by the cutting wires 6 (the length refers to the distance in the same direction as the length direction of the grooved wheels 4), for example, the length of the main fluid pipe 1 can be set to be longer than the length of the wire net or equal to the length of the grooved wheels 4, so that the nozzles 2 on the main fluid pipe 1 are sufficient to cover each cutting wire 6.

[0057] In one or more embodiments of the present application, the target fluid in the ultrasonic oscillation state can be referred to as a pump-type oscillation fluid.

[0058] In addition, the main fluid pipe 1 is arranged between the grooved wheels 4 and the fixing table 5 in the multi-wire cutting machine, specifically, because the overall area of the wire net formed by the cutting wires 6 in the multi-wire cutting machine is much larger than the surface area of the to-be-cut object 8, the fixing table 5 can be provided with a boss having a surface area capable of completely bearing the to-be-cut object 8 but smaller than the overall area of the wire net, so that the main fluid pipe 1 is fixedly arranged between the grooved wheels 4 and the fixing table 5, and specifically, the main fluid pipe 1 can be arranged on both sides of the boss, so as to avoid the influence of the ultrasonic nozzle assembly 7 on the complete cutting of the wire net on the to-be-cut object 8.

[0059] In an example, a support can be detachably arranged or fixedly arranged on the panel on both sides of the boss away from the boss on the fixing table 5, and the ultrasonic nozzle assembly 7 can be directly fixed on the support to be fixed.

[0060] As can be seen from the above description, the ultrasonic nozzle assembly 7 provided by the embodiments of the present application can effectively improve the chip removal capacity of the multi-wire cutting machine, effectively optimize the cutting capacity of the cutting wire 6 in the multi-wire cutting machine, and improve the warping degree of the wire cutting, thereby improving the application effectiveness and reliability of the multi-wire cutting machine.

[0061] In order to further improve the chip removal effectiveness of the ultrasonic nozzle assembly 7 in the multi-wire cutting process, in the ultrasonic nozzle assembly 7 provided by the embodiments of the present application, the main fluid pipe 1 can include at least two, and each main fluid pipe 1 is arranged in parallel. The spacing of each main fluid pipe 1 is based on the groove spacing of each groove wheel 4 in the multi-wire cutting machine, for example, the spacing of each main fluid pipe 1 can be less than the groove spacing of each groove wheel 4 in the multi-wire cutting machine.

[0062] In order to further improve the chip removal reliability and accuracy of the ultrasonic nozzle assembly 7 in the multi-wire cutting process, in the ultrasonic nozzle assembly 7 provided by the embodiments of the present application, a plurality of nozzles 2 are arranged on the main fluid pipe 1.

[0063] The number of nozzles 2 on each main fluid pipe 1 is equal to or greater than the number of cutting wires 6, so that each cutting wire 6 is arranged at a preset angle with respect to the fluid nozzle of at least one nozzle 2 on each main fluid pipe 1.

[0064] Specifically, referring to Figure 2 , a plurality of nozzles 2 are arranged on each main fluid pipe 1, and each nozzle 2 corresponds to one cutting wire 6. The ultrasonic generator 3 can be arranged on each main fluid pipe 1, or arranged inside each nozzle 2 not shown in Figure 2 .

[0065] In another case, referring to Figure 3 , each nozzle 2 can correspond to a plurality of cutting wires 6. The length of the fluid nozzle of the nozzle 2 is set according to the diameter and spacing of the cutting wire. If the diameter of the cutting wire is L and the spacing is C, the length of the fluid nozzle of the nozzle 2 is equal to or greater than 2L+C. At the same time, the ultrasonic generator 3 can be arranged on each main fluid pipe 1, or arranged inside each nozzle 2 not shown in Figure 3 .

[0066] In one or more embodiments of the present application, the plurality of nozzles 2 arranged on the main fluid pipe 1 can be referred to as densely arranged nozzles 2, and the number of nozzles 2 on each main fluid pipe 1 is exemplified as 400-600.

[0067] It can be understood that the preset angle can refer to the angle between the direction of the fluid jet of the fluid nozzle and the length direction of the cutting line 6, which is between 45° and 90°. In order to further improve the application flexibility and reliability of the nozzle 2, in an ultrasonic nozzle assembly 7 provided in an embodiment of the present application, each of the nozzles 2 on the main fluid pipe 1 is movably connected with the main fluid pipe 1, so that the position of each of the nozzles 2 on the main fluid pipe 1 can be flexibly adjusted.

[0068] Specifically, the movable connection between each of the nozzles 2 and the main fluid pipe 1 can be exemplified as that the liquid inlet and the air inlet of each of the nozzles 2 are respectively communicated with the main fluid pipe 1 through a respective hose. Based on the characteristics of the hose, each of the nozzles 2 can change the position within a certain range.

[0069] In order to further improve the use quantity and setting cost of the nozzles 2, in an ultrasonic nozzle assembly 7 provided in an embodiment of the present application, referring to Figure 4 , only one nozzle 2 is arranged on the main fluid pipe 1, and the fluid jet of the nozzle 2 includes a strip-shaped jet 21, so that the strip-shaped jet 21 on each main fluid pipe is arranged at a preset angle with respect to all the cutting lines. That is, if the data of the cutting line is N, the diameter of the cutting line is L, and the spacing is C, the length of the strip-shaped jet 21 of the nozzle 2 is equal to or greater than N×L+(N-1)×C. At the same time, the ultrasonic generator 3 can also be arranged on each main fluid pipe 1, or arranged inside each nozzle 2 which is not shown in Figure 4 , or a plurality of ultrasonic generators 3 are arranged in a neat matrix on each main fluid pipe 1.

[0070] In addition, for the case of Figure 4 , the main fluid pipe 1 can be arranged in multiple or only one to further reduce the use quantity and setting cost of the nozzles 2.

[0071] In order to further improve the reliability of gas / liquid injection, in an ultrasonic nozzle assembly 7 provided in an embodiment of the present application, the inner cavity of the main fluid pipe 1 includes a liquid cavity for containing the liquid and a gas cavity for containing the gas.

[0072] The spray head 2 comprises a double-flow nozzle; it can be understood that the double-flow nozzle refers to a nozzle provided with two mutually isolated inlets and two mutually isolated outlets, and one inlet and one outlet are communicated in the double-flow nozzle, and the other inlet and the other outlet are also communicated in the double-flow nozzle. Various types of double-flow nozzles can be used.

[0073] The liquid inlet of the double-flow nozzle is communicated with the liquid cavity; and the gas inlet of the double-flow nozzle is communicated with the gas cavity.

[0074] In order to further improve the reliability of ultrasonic oscillation, in the ultrasonic spray head assembly 7 provided in the embodiment of the present application, the ultrasonic generator 3 is arranged on each of the main fluid pipes 1 to perform ultrasonic oscillation on the target fluid in the inner cavity of the main fluid pipe 1.

[0075] In order to further improve the reliability of ultrasonic oscillation, in the ultrasonic spray head assembly 7 provided in the embodiment of the present application, the ultrasonic generator 3 is arranged on each of the main fluid pipes 1 to perform ultrasonic oscillation on the target fluid in the inner cavity of the main fluid pipe 1.

[0076] Of course, in view of the cost of setting, the ultrasonic generator 3 arranged on the main fluid pipe 1 and the ultrasonic generator 3 fixedly arranged in each of the spray heads 2 can be selectively arranged.

[0077] In order to further improve the application reliability and setting flexibility of the ultrasonic spray head assembly 7, in the ultrasonic spray head assembly 7 provided in the embodiment of the present application, the two ends of the main fluid pipe 1 are fixedly connected with different connecting rods, and the two connecting rods connected to the same main fluid pipe 1 are movably connected with the two ends of one groove wheel 4.

[0078] In order to effectively improve the chip removal capacity of multi-wire cutting, optimize the cutting capacity, and improve the warping degree of wire cutting, the embodiment of the present application further provides an ultrasonic auxiliary chip removal device for multi-wire cutting, which specifically comprises the following contents:

[0079] The frequency converter, the piezoelectric device connected to the frequency converter, and the ultrasonic spray head assembly 7 described in the foregoing embodiments; to effectively realize the application automation of the ultrasonic spray head assembly 7.

[0080] The ultrasonic generator in the ultrasonic nozzle assembly 7 is connected to the piezoelectric device, so that the target fluid in the ultrasonic nozzle assembly 7 produces ultrasonic oscillation under the drive of the frequency converter and piezoelectric device and sprays onto the cutting line, thereby pushing the cutting line to produce a periodic oscillation perpendicular to the cutting direction of the multi-wire cutting machine to discharge cutting debris.

[0081] As can be seen from the above description, the ultrasonic auxiliary chip removal device for multi-wire cutting provided by the embodiments of the present application can effectively improve the chip removal capacity of the multi-wire cutting machine, and can effectively optimize the cutting capacity of the cutting wire in the multi-wire cutting machine and improve the warping degree of the wire cutting, thereby improving the application effectiveness and reliability of the multi-wire cutting machine.

[0082] In order to effectively improve the chip removal capacity of multi-wire cutting, optimize the cutting capacity, and improve the warping degree of the wire cutting, the embodiments of the present application also provide an ultrasonic auxiliary chip removal method for multi-wire cutting, which specifically includes the following contents:

[0083] The frequency converter and piezoelectric device in the ultrasonic auxiliary chip removal device for multi-wire cutting described in the foregoing embodiments are controlled to operate, so that the target fluid in the ultrasonic nozzle assembly 7 produces ultrasonic oscillation under the drive of the frequency converter and piezoelectric device and sprays onto the cutting line, thereby pushing the cutting line to produce a periodic oscillation perpendicular to the cutting direction of the multi-wire cutting machine to discharge cutting debris.

[0084] As can be seen from the above description, the ultrasonic auxiliary chip removal method for multi-wire cutting provided by the embodiments of the present application can effectively improve the chip removal capacity of the multi-wire cutting machine, and can effectively optimize the cutting capacity of the cutting wire in the multi-wire cutting machine and improve the warping degree of the wire cutting, thereby improving the application effectiveness and reliability of the multi-wire cutting machine.

[0085] In order to further illustrate the present application, the present application also provides a specific application example of applying the ultrasonic nozzle assembly 7 to implement the ultrasonic auxiliary multi-wire cutting method, which solves the problem of greatly improving the chip removal capacity by introducing multi-wire cutting through the improvement of ultrasonic technology, alleviating the influence of crystal anisotropy on Warp, and improving the wire cutting Warp. The specific description is as follows:

[0086] (I) Ultrasonic nozzle assembly

[0087] 1) The nozzle can be installed above the two groove wheels of the multi-wire cutting machine, and each nozzle position can be moved appropriately. The number of nozzles ranges from 400 to 600, which can be determined according to the number of groove grooves of the specific machine.

[0088] 2) The nozzle has liquid and gas inlets, and one or both fluids can be selectively opened according to the use requirements.

[0089] 3) On the other side of the spray head, a micro ultrasonic generator is installed to provide ultrasonic oscillation to the liquid or gas in the main fluid pipe, or the ultrasonic oscillation of the gas and / or liquid is provided by an ultrasonic generator arranged on the main fluid pipe.

[0090] 4) The ultrasonic oscillation part is composed of a transducer and a horn, and the ultrasonic oscillation is transmitted to the fluid through the horn.

[0091] (II) Ultrasonic-assisted multi-wire cutting method

[0092] 1) An ultrasonic spray head with a set of closely arranged needle holes with a specific frequency is provided, and the diameter of the closely arranged needle hole spray head is < the slot pitch.

[0093] 2) The entire set of closely arranged spray heads is driven by one or more sets of ultrasonic generation systems.

[0094] 3) The spray head can be used for spraying gas or liquid.

[0095] 4) The relative position of the set of closely arranged spray heads can be adjusted according to the groove pitch.

[0096] 5) To maximize the chip removal capacity, the resonance concept is introduced in this cutting method, and the ultrasonic energy value is about 30-130% of the tension of each saw wire, and the amplitude of the pump-type oscillation fluid is in the range of 0.5-25um.

[0097] The ultrasonic frequency is similar to the swing cycle period, about 10-70KHz.

[0098] The basic principle of ultrasonic oscillation multi-wire cutting technology is described in Figure 5 , and the basic working principle is as follows:

[0099] The frequency converter and piezoelectric driver drive the ultrasonic generator to produce ultrasonic oscillation, which is transmitted to the multiple pump-type oscillators connected thereto, and the cutting fluid or certain gas or other fluid substances are pumped out from the needle hole spray head and directly hit the reciprocating wire mesh at a certain angle (45°-90°), pushing the wire mesh to produce a periodic oscillation perpendicular to the cutting direction, thereby timely removing the cutting debris and improving the cutting capacity, timely correcting the cutting position deviation of the wire mesh caused by the anisotropy of the crystal, thereby improving the wire cutting Warp, and the cutting capacity is improved by about 10%-60%, and the Warp is improved by about 10%-30%.

[0100] As described above, the application examples can improve the chip removal capacity of multi-wire cutting, optimize the cutting capacity, and improve the wire cutting Warp by using ultrasonic-assisted multi-wire cutting, needle hole ultrasonic oscillation technology, and pump-type oscillation jet flow. At the same time, the multi-wire cutting machine can also be replaced by a laser cutting machine, an electric spark cutting machine, etc.

[0101] It is to be expressly understood that the application is not limited to the described and illustrated particular configurations and processes. For the sake of clarity, detailed descriptions of known methods are omitted. In the above described embodiments, several specific steps are described and illustrated as examples. However, the method processes of the application are not limited to the specific steps described and illustrated, and the skilled person can make various changes, modifications and additions, or change the order of the steps, after having understood the spirit of the application.

[0102] In this application, features described and / or illustrated with respect to one embodiment can be used in the same or similar manner in one or more other embodiments and / or combined with or substituted for features of other embodiments.

[0103] The above only describes the preferred embodiments of the application, and is not intended to limit the application. The skilled in the art can make various changes and modifications to the embodiments of the application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the application shall be included in the protection scope of the application.

Claims

1. An ultrasonic nozzle assembly, characterized in that, The main fluid pipe containing target fluid in the inner cavity, the nozzle in communication with the inner cavity of the main fluid pipe, and the ultrasonic generator for ultrasonic oscillation of the target fluid, wherein the target fluid includes liquid and gas; the inner cavity of the main fluid pipe includes a liquid cavity for containing the liquid and a gas cavity for containing the gas; the nozzle includes a double-flow nozzle; the liquid inlet of the double-flow nozzle is in communication with the liquid cavity; the gas inlet of the double-flow nozzle is in communication with the gas cavity; the main fluid pipe is arranged between the groove wheel and the fixed table in the multi-wire cutting machine, and the fluid nozzle of the nozzle is arranged opposite to the cutting wire wound on the groove wheel in the multi-wire cutting machine; the ultrasonic energy value of the ultrasonic generator is any value between 30% and 130% of the tension value of each cutting wire; the ultrasonic frequency of the ultrasonic generator is any value between 10KHz and 70KHz; the target fluid in the ultrasonic oscillation state with an amplitude between 0.5um and 25um is sprayed from the fluid nozzle to the cutting wire at an angle between 45° and 90°, thereby driving the cutting wire to produce a periodic oscillation in the direction perpendicular to the cutting direction of the multi-wire cutting machine to discharge cutting debris. The main fluid pipe has a plurality of; 2. The ultrasonic showerhead assembly of claim 1, wherein, The spacing of each main fluid pipe is based on the groove spacing of each groove wheel in the multi-wire cutting machine. The main fluid pipe is provided with a plurality of nozzles; 3. The ultrasonic horn assembly of claim 1, wherein, The number of nozzles on each main fluid pipe is equal to or greater than the number of cutting wires, so that each cutting wire is arranged opposite to the fluid nozzle of at least one nozzle on each main fluid pipe at a preset angle. Each nozzle on the main fluid pipe is movably connected to the main fluid pipe. The main fluid pipe is provided with one nozzle, and the fluid nozzle of the nozzle includes a strip-shaped nozzle, so that the strip-shaped nozzle on each main fluid pipe is arranged opposite to all the cutting wires at a preset angle.

4. The ultrasonic horn assembly of claim 1, wherein, Each main fluid pipe is provided with an ultrasonic generator for ultrasonic oscillation of the target fluid in the inner cavity of the main fluid pipe.

5. The ultrasonic horn assembly of claim 1, wherein, Each nozzle is fixedly provided with an ultrasonic generator for ultrasonic oscillation of the target fluid in the nozzle.

6. The ultrasonic horn assembly of claim 1 or 5, wherein, The two ends of the main fluid pipe are respectively fixedly connected to different connecting rods, and the two connecting rods connected to the same main fluid pipe are movably connected to the two ends of one groove wheel.

7. The ultrasonic horn assembly of claim 1, wherein, The frequency converter, the piezoelectric device connected to the frequency converter, and the ultrasonic nozzle assembly of any one of claims 1 to 7; 8. An ultrasonic assisted chip removal device for multi-wire sawing, characterized by The ultrasonic generator in the ultrasonic nozzle assembly is connected to the piezoelectric device, so that the target fluid in the ultrasonic nozzle assembly is driven by the frequency converter and the piezoelectric device to produce ultrasonic oscillation and be sprayed onto the cutting wire, thereby driving the cutting wire to produce a periodic oscillation in the direction perpendicular to the cutting direction of the multi-wire cutting machine to discharge cutting debris. The frequency converter, the piezoelectric device connected to the frequency converter, and the ultrasonic nozzle assembly of any one of claims 1 to 7; ​ 9. An ultrasonic-assisted chip removal method for multi-wire sawing, characterized by ​ Controlling the operation of the frequency converter and piezoelectric device in the ultrasonic auxiliary chip removal device for multi-wire sawing as claimed in claim 8, so that the target fluid in the ultrasonic nozzle assembly produces ultrasonic oscillation under the drive of the frequency converter and piezoelectric device and is sprayed onto the sawing wire, thereby pushing the sawing wire to produce a periodic oscillation in the direction perpendicular to the cutting direction of the multi-wire sawing machine to remove the cutting chips.

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