AR, AG and AF coating systems for cover glass

Abstract

The present invention discloses an AR, AG and AF coating system for cover glass, which belongs to the technical field of cover glass production. The technical scheme is as follows: it includes a first vacuum transition chamber, a first vacuum chamber, a second vacuum transition chamber, a heating furnace, a glass cooling and heat preservation device, a third vacuum transition chamber, a second vacuum chamber, a fourth vacuum transition chamber, AF spraying equipment and AF baking equipment which are sequentially connected through a transmission roller. The present invention realizes automatic loading and unloading without manual interference, avoiding the problems of dirty glass and crystal points; at the same time, AG spraying is carried out in a vacuum environment, avoiding the problem of more moisture and gas on the glass surface in the atmospheric environment, resulting in poor film adhesion and poor wear resistance.

Description

Technical Field

[0001] The present invention relates to the technical field of cover glass production, and in particular to an AR, AG and AF coating system for cover glass. Background Art

[0002] Display cover glass is mainly used in terminal products such as mobile phones, car displays, and computers. It is installed on the outside of the terminal products and needs to be touched frequently. Therefore, its clarity, friction resistance, corrosion resistance, weather resistance, impact resistance, and anti-glare properties are many key factors in evaluating its quality.

[0003] AG glass forms a diffuse reflection coating on the glass surface by spraying, which reduces the direct reflected light on the glass surface, reduces the interference of ambient light, improves the viewing angle and brightness of the display, reduces screen reflection, makes the image clearer, the colors more vivid, and the colors more saturated, thereby significantly improving the display effect.

[0004] AR glass is a type of glass that has been coated on one or both sides. Multiple layers of niobium oxide and silicon oxide films are deposited on the glass surface to achieve a destructive interference effect to reduce the reflectivity of the glass surface. According to T=1-ρ-α (where T is transmittance, ρ is reflectivity, and α is absorptivity), when the reflectivity is reduced, the transmittance of the entire cover glass is increased, and the spectral reflectivity in the visible light range is reduced to less than 1%; the spectral reflectivity of uncoated glass in the visible light range on one side is about 4%.

[0005] AF glass achieves the purpose of surface modification by depositing a layer of AF material on the outermost layer of the cover glass. In a vacuum, the AF material is deposited on the surface of the cover glass by heating and evaporating the material. AF material is a fluorine-containing coating made of fluorosilicone resin with a special structure, generally called perfluoropolyether. AF material has the characteristics of anti-fingerprint, high hardness and scratch resistance.

[0006] The existing AG, AR, and AF coating processes for cover glass are: cleaning → AG spraying → cleaning → coating → AR coating → AF coating → baking. The coating system that implements this process has a low degree of automation, and manual material handling is required between different processes. In the process of handling materials and waiting, the glass surface will inevitably become dirty, and there are many human interferences in this process, resulting in low production efficiency and yield. At the same time, in the existing production system, AG spraying is carried out in an atmospheric environment, and there is more moisture and gas on the surface of the glass substrate, resulting in poor film adhesion and poor wear resistance. Therefore, it is urgent to develop an AR, AG, and AF coating system with good quality and high efficiency. Summary of the invention

[0007] The technical problem to be solved by the present invention is: to overcome the shortcomings of the prior art and provide an AR, AG and AF coating system for cover glass, which realizes automatic loading and unloading without human interference, and avoids the problems of glass dirt and crystal points; at the same time, AG spraying is carried out in a vacuum environment, avoiding the problem of excessive moisture and gas on the glass surface in the atmospheric environment, resulting in poor film adhesion and poor wear resistance.

[0008] The technical solution of the present invention is:

[0009] The AR, AG and AF coating system for cover glass comprises a first vacuum transition chamber, a conveying roller is arranged at the feeding end of the first vacuum transition chamber, and a conveying roller is arranged in the first vacuum transition chamber; gate valves are arranged at the feeding port and the discharging port of the first vacuum transition chamber respectively, and the discharging port of the first vacuum transition chamber is connected with the feeding port of the first vacuum chamber; an air inlet is arranged on the first vacuum chamber, a conveying roller is arranged in the first vacuum chamber, and a first sputtering cathode and a second sputtering cathode are sequentially installed along the glass transmission direction; the first sputtering cathode and the second sputtering cathode both comprise a target tube, a target material is arranged on the target tube, a magnet array is arranged in the target tube along the length direction, and the target tube is connected A power source is connected; the discharge port of the first vacuum chamber is connected to the feed port of the second vacuum transition chamber, and gate valves are respectively provided at the feed port and the discharge port of the second vacuum transition chamber; a transmission roller is provided in the second vacuum transition chamber; the first vacuum transition chamber, the first vacuum chamber and the second vacuum transition chamber are respectively connected to a vacuum pumping device; a transmission roller is provided at the discharge end of the second vacuum transition chamber, a heating furnace is provided at the transmission end of the transmission roller, and a transmission roller is provided in the heating furnace; a glass cooling and heat preservation device is provided at the discharge end of the heating furnace, and a transmission roller is provided in the glass cooling and heat preservation device; a transmission roller is provided at the discharge end of the glass cooling and heat preservation device; the glass cooling and heat preservation device discharges A third vacuum transition chamber is provided at the transmission end of the transmission roller at the end, and a transmission roller is provided in the third vacuum transition chamber; gate valves are respectively provided at the feed port and the discharge port of the third vacuum transition chamber, and the discharge port of the third vacuum transition chamber is connected with the feed port of the second vacuum chamber; an air inlet is provided on the second vacuum chamber, a transmission roller is provided in the second vacuum chamber, and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially installed along the glass transmission direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode all include a target tube, a target material is provided on the target tube, a magnet array is provided in the target tube along the length direction, and the target tube is connected to a power supply; the discharge port of the second vacuum chamber The material port is connected with the material feed port of the fourth vacuum transition chamber, and gate valves are respectively provided at the material feed port and the material discharge port of the fourth vacuum transition chamber; a transmission roller is provided in the fourth vacuum transition chamber; the third vacuum transition chamber, the second vacuum chamber and the fourth vacuum transition chamber are respectively connected with vacuum pumping devices; a transmission roller is provided at the material discharge end of the fourth vacuum transition chamber, and an AF spraying device is provided at the transmission end of the transmission roller; a transmission roller is provided at the material discharge end of the AF spraying device, and an AF baking device is provided at the transmission end of the transmission roller; a transmission roller is provided at the material discharge end of the AF baking device; the transmission roller is provided at the material discharge end of the AF baking device; the transmission rollers are all driven to rotate by a motor, and the motor, the gate valve and the power supply are respectively electrically connected to the control system.

[0010] Preferably, the glass cooling and heat-insulating device comprises a cooling furnace and a heat-conducting oil cooling and heat-insulating furnace, the cooling furnace is located between the heating furnace and the third vacuum transition chamber, and the heat-conducting oil cooling and heat-insulating furnace is located on one side of the cooling furnace; the cooling furnace comprises an upper cooling chamber and a lower cooling chamber, and a transmission roller is arranged between the upper cooling chamber and the lower cooling chamber; an upper air blowing main pipeline is arranged in the upper cooling chamber, and a lower air blowing main pipeline is arranged in the lower cooling chamber, and a plurality of air blowing fine branch pipelines are respectively connected to the upper air blowing main pipeline and the lower air blowing main pipeline, and the air outlets of the air blowing fine branch pipelines face To the glass; a support rod is arranged on the lower blowing air main pipeline, the transmission roller in the cooling furnace is installed on the support rod, and the bottom of the lower blowing air main pipeline is connected to the piston rods of several first cylinders; several second cylinders are also arranged below the glass in the cooling chamber, and the second cylinders are arranged at intervals perpendicular to the transmission direction; a photoelectric sensor is installed on the piston rod of the second cylinder, and a universal wheel is installed on the top of the piston rod; the heat transfer oil cooling and insulation furnace includes an upper heat transfer oil cooling and insulation chamber and a lower heat transfer oil cooling and insulation chamber, and the upper heat transfer oil cooling and insulation chamber and the lower A belt conveyor is arranged between the heat transfer oil cooling and heat preservation chambers, the transmission direction of the belt conveyor is perpendicular to the transmission direction of the transmission roller in the cooling furnace, and the belt conveyor is driven by a motor; a heat transfer oil storage container is arranged on the belt conveyor, a temperature sensor is installed in the heat transfer oil storage container, one end of the heat transfer oil storage container away from the cooling furnace is fixed on the belt of the belt conveyor, and a glass receiving gap is opened at the other end; a heat transfer oil inlet and a heat transfer oil outlet are arranged on the heat transfer oil storage container, and the heat transfer oil outlets are respectively connected to heat transfer oil freezing pipes through pipelines line and a thermal oil heating pipeline, the thermal oil freezing pipeline is connected with an oil cooler, a solenoid valve and an oil pump, the thermal oil heating pipeline is connected with a thermal oil heater, a solenoid valve and an oil pump; the thermal oil freezing pipeline and the thermal oil heating pipeline are respectively connected to the thermal oil inlet of the thermal oil storage container through pipelines; a photoelectric sensor is installed at one end of the cooling furnace away from the thermal oil cooling and insulation furnace and at a height corresponding to the thermal oil storage container, and the first cylinder, the second cylinder, the photoelectric sensor, the motor, the temperature sensor and the oil pump are respectively electrically connected to the control system.

[0011] Preferably, a mounting rod is provided below the upper air blowing main pipeline, and a plurality of pressure rollers are arranged on the mounting rod at intervals along the glass transmission direction. A long strip hole is vertically opened on the mounting rod corresponding to the position of the pressure roller. Both ends of the pressure roller are installed on the mounting rod through the long strip hole and when the pressure roller is in the lowermost position, the distance between the pressure roller and the transmission roller is less than the thickness of the glass.

[0012] Preferably, the heat transfer oil storage container includes a hollow upper shell and a lower shell, and the ends of the upper shell and the lower shell away from the cooling furnace are fixedly connected to a fixed plate, and the fixed plate is fixed on the belt of the belt conveyor; a plurality of rollers are respectively installed on the lower surface of the upper shell and the upper surface of the lower shell, temperature sensors are respectively installed in the upper shell and the lower shell, and a heat transfer oil inlet and a heat transfer oil outlet are respectively provided on the upper shell and the lower shell.

[0013] Preferably, an electric heating wire and a temperature sensor are respectively provided in the upper heat transfer oil cooling and heat preservation chamber and the lower heat transfer oil cooling and heat preservation chamber, and the electric heating wire and the temperature sensor are respectively electrically connected to the control system.

[0014] Preferably, the heating furnace comprises an upper heating chamber and a lower heating chamber, a transmission roller is arranged between the upper heating chamber and the lower heating chamber, and the transmission roller is driven by a motor; electric heating wires and temperature sensors are respectively arranged in the upper heating chamber and the lower heating chamber, and the electric heating wires and the temperature sensors are respectively electrically connected to the control system.

[0015] Preferably, the transmission rollers in the first vacuum chamber and the second vacuum chamber are connected to the bias power supply, and the bias power supply is electrically connected to the control system; in the first vacuum chamber and the second vacuum chamber, an ion confinement device is arranged below the glass, and the ion confinement device includes an outer cover, and three rows of magnets are fixed in the outer cover, each row of magnets is arranged perpendicular to the transmission direction of the glass, the S pole of the middle row of magnets faces the glass, and the N poles of the other two rows of magnets face the glass.

[0016] Preferably, a cooling box is connected below the outer cover, and a cooling water pipe is arranged in the cooling box.

[0017] Preferably, a glass cleaning device is provided at the transmission end of the transmission roller at the discharge end of the glass cooling and heat preservation device, a transmission roller is provided at the discharge end of the glass cleaning device, and a third vacuum transition chamber is provided at the transmission end of the transmission roller;

[0018] Preferably, photoelectric sensors are respectively provided on the transmission rollers at the feed end of the first vacuum transition chamber, the transmission rollers at the discharge end of the second vacuum transition chamber, the transmission rollers at the discharge end of the glass cooling and heat preservation device, the transmission rollers at the discharge end of the glass cleaning equipment, the transmission rollers at the discharge end of the fourth vacuum transition chamber, the transmission rollers at the discharge end of the AF spraying equipment and the transmission rollers at the discharge end of the AF baking equipment. The photoelectric sensors are arranged at the transmission starting end and the transmission end of the transmission rollers, and the photoelectric sensors are electrically connected to the control system.

[0019] Compared with the prior art, the present invention has the following beneficial effects:

[0020] 1. The coating system of the present invention connects the primary coating section, heating and cooling section, cleaning section, secondary coating section, spraying AF section and baking section through the transmission roller between the equipment, realizing automatic loading and unloading without manual interference, avoiding the problems of dirty glass and crystal points. At the same time, the present invention has made a pioneering design for the equipment of the primary coating section and the secondary coating section, so that AG spraying is carried out in a vacuum environment, avoiding the problem of poor film adhesion and poor wear resistance caused by more moisture and gas on the glass surface in the atmospheric environment.

[0021] 2. The present invention has made a unique design for the heating and cooling equipment of the glass. The glass is first heated at high temperature in a heating furnace, and then the heated glass is preliminarily cooled by air in a cooling furnace. Finally, the glass is cooled and insulated for a second time in a heat transfer oil cooling and insulation furnace, so that microcrystals are formed in the bottom oxide microcrystalline medium layer on the glass. The presence of microcrystals will cause the refraction of light, thereby reducing the intensity of direct light, increasing the haze and reducing the reflection at the same time.

[0022] 3. The present invention roughens the glass surface and the outermost AR film layer by adding bias voltage and magnetic field to the sputtering cathode, so that the glass and film surface have a concave-convex feel, and the adhesion and hardness of the film layer are increased. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required for use in the embodiments or the description of the prior art will be briefly introduced below. Obviously, for ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 It is a schematic diagram of the positional relationship of the coating system of the present invention.

[0025] Figure 2 It is a schematic structural diagram of the first sputtering cathode in the first vacuum chamber of the present invention.

[0026] Figure 3 1 is a side view of a first sputtering cathode in a first vacuum chamber of the present invention.

[0027] Figure 4 It is a schematic structural diagram of the second sputtering cathode in the first vacuum chamber of the present invention.

[0028] Figure 5 It is a structural schematic diagram of a heating furnace and a cooling furnace of the present invention.

[0029] Figure 6 It is a structural schematic diagram of a cooling furnace and a heat-conducting oil cooling and heat-insulating furnace of the present invention.

[0030] Figure 7 It is a structural schematic diagram of the heat transfer oil storage container of the present invention.

[0031] Figure 8 It is a schematic diagram of the positional relationship of the heating furnace, the cooling furnace and the heat transfer oil cooling and insulation furnace of the present invention.

[0032] Fig. 9 It is a schematic structural diagram of the lower shell of the heat transfer oil storage container of the present invention.

[0033] Fig.10 It is a schematic diagram of the film layer structure of the coated glass obtained by using the coating system of the present invention.

[0034] In the figure, 1, glass; 2, first vacuum transition chamber; 3, transmission roller; 4, first vacuum chamber; 5, air inlet; 6, target tube; 7, magnet; 8, second vacuum transition chamber; 9, heating furnace; 901, upper heating chamber; 902, lower heating chamber; 10, third vacuum transition chamber; 11, second vacuum chamber; 12, fourth vacuum transition chamber; 13, AF spraying equipment; 14, AF baking equipment; 15, cooling furnace; 1501, upper cooling chamber; 1502, cooling chamber; 16, upper air blowing main pipeline; 17, lower air blowing main pipeline; 18, air blowing fine branch pipeline; 19, support rod; 20, first cylinder; 21, second cylinder; 22, photoelectric sensor; 23, universal wheel; 24, pressure roller; 25, thermal oil cooling and insulation furnace; 2501, upper thermal oil cooling and insulation chamber; 2502, lower thermal oil cooling and insulation chamber Temperature chamber; 2503, belt conveyor; 2504, thermal oil storage container; 25041, upper shell; 25042, lower shell; 25043, glass receiving gap; 25044, thermal oil inlet; 25045, thermal oil outlet; 26, temperature sensor; 27, oil cooler; 28, solenoid valve; 29, oil pump; 30, thermal oil heater; 31, fixing plate; 32, roller; 33, electric heating wire; 34, outer cover; 35, cooling box; 36, cooling water pipe; 37, glass cleaning equipment; 38, motor; 39, thermal insulation rock wool; 40, check valve; 41, thermal oil inlet valve; 42, thermal oil outlet valve; 43, bottom oxidation microcrystalline medium layer; 44, first oxidation medium layer; 45, second oxidation medium layer; 46, third oxidation medium layer; 47, fourth oxidation medium layer; 48, AF layer. DETAILED DESCRIPTION

[0035] In order to enable those skilled in the art to better understand the technical solutions in the present invention, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work should fall within the scope of protection of the present invention.

[0036] Example 1

[0037] like Figure 1 As shown, this embodiment provides an AR, AG and AF coating system for cover glass, and the process flow of coating using the system is as follows: loading → primary coating → heating and cooling → cleaning → secondary coating → spraying AF → baking → unloading.

[0038] The loading process is implemented by a transmission roller 3, which can be a conventional transmission roller 3 in the art, and is driven by a motor 38 to move and transport the glass 1. Along the transmission direction of the glass 1, the two ends of the transmission roller 3 are the transmission start end and the transmission end, respectively. The first vacuum transition chamber 2 is arranged at the transmission end of the transmission roller 3, and the loading of the first vacuum transition chamber 2 is completed by the transmission roller 3.

[0039] The first vacuum transition chamber 2 is also provided with a conveying roller 3 for conveying the glass 1 in the first vacuum transition chamber 2; the first vacuum transition chamber 2 is provided with gate valves at the feeding port and the discharging port, respectively, and the feeding and discharging of the glass 1 are completed by opening and closing the gate valves, and when the gate valves are opened, the external air enters the first vacuum transition chamber 2, and the vacuum of the first vacuum transition chamber 2 is broken. The first vacuum transition chamber 2 is connected to a vacuum pumping device, and when the gate valves are opened and closed, the vacuum pumping device is started to vacuum the first vacuum transition chamber 2, so that the vacuum degree of the first vacuum transition chamber 2 is restored to be consistent with that of the first vacuum chamber 4.

[0040] The discharge port of the first vacuum transition chamber 2 is connected to the feed port of the first vacuum chamber 4; Figure 2 As shown, the first vacuum chamber 4 is connected to a vacuum pump and is provided with an air inlet 5; a conveying roller 3 is provided in the first vacuum chamber 4 and first sputtering cathodes (such as Figure 2-3 As shown, ) and a second sputtering cathode (as Figure 4 As shown, the first sputtering cathode and the second sputtering cathode both include a target tube 6 (two target tubes 6 are shown in the figure), a target material is arranged on the target tube 6, a magnet array is arranged in the target tube 6 along the length direction (the arrangement of the magnet array is the prior art and will not be repeated here), and the target tube 6 is connected to a medium frequency high voltage power supply (the frequency can be 35MHz and the voltage can be 600V). Among them, the target materials of the first sputtering cathode and the second sputtering cathode can be silicon oxide, niobium oxide, aluminum oxide, zirconium oxide or titanium oxide.

[0041] After the glass enters the first vacuum chamber 4, argon gas and oxygen are introduced into the first vacuum chamber 4 through the air inlet 5. In a high vacuum environment, the air is thin. After the medium-frequency high-voltage power supply connected to the first sputtering cathode is turned on to energize the target tube 6, the gas introduced into the first vacuum chamber 4 will be ionized to generate a glow discharge. The magnet array in the target tube 6 will bind the electrons and ions formed by the ionization around the target tube 6, forming a plasma zone around the target tube 6. The ions in the plasma zone will bombard the surface of the target material, thereby bombarding the atoms on the surface of the target material and depositing them on the surface of the glass to form an underlying oxide microcrystalline dielectric layer 43 (such as Fig.10As the glass continues to be transported in the first vacuum chamber 4, it passes through the first sputtering cathode and reaches the second sputtering cathode. One or more of argon, krypton, hydrogen and oxygen are introduced into the chamber through the gas inlet 5. Then, the first oxidized medium layer 44 (as shown in FIG. 4 ) is deposited on the bottom oxidized microcrystalline medium layer 43 on the surface of the glass by the same principle. Fig.10 As shown), a coating process is completed.

[0042] like Figure 1 As shown, the discharge port of the first vacuum chamber 4 is connected to the feed port of the second vacuum transition chamber 8. The structure of the second vacuum transition chamber 8 is the same as that of the first vacuum transition chamber 2. Gate valves are respectively provided at the feed port and the discharge port. A transmission roller 3 is provided inside. A vacuum pump is connected to the second vacuum transition chamber 8. The glass coming out of the discharge port of the first vacuum chamber 4 enters the second vacuum transition chamber 8.

[0043] Among them, the vacuum pumping device configured for the first vacuum transition chamber 2, the first vacuum chamber 4 and the second vacuum transition chamber 8 includes a mechanical pump, a vacuum gauge is installed on the pipeline on the inlet side of the mechanical pump, a Roots pump is connected to the inlet side of the mechanical pump through a pipeline, a vacuum gauge is installed on the pipeline on the inlet side of the Roots pump, a three-way pipe is installed on the inlet side of the Roots pump, one branch of which is connected to the first vacuum chamber 4 through a vacuum valve, and the other branch is connected to four molecular pumps in parallel through a pipeline, and the four molecular pumps are connected to the first vacuum chamber 4 through vacuum valves. When vacuuming, the three-way pipe must be used to use the mechanical pump and the Roots pump to roughly pump the first vacuum chamber 4, and then the molecular pump is used to finely pump the first vacuum chamber 4 to make the first vacuum chamber 4 reach a high vacuum state. Through the cooperation of the first vacuum transition chamber 2 and the second vacuum transition chamber 8 with the first vacuum chamber 4, when the glass enters and exits the first vacuum chamber 4, it can be ensured that the first vacuum chamber 4 always maintains a vacuum state and the vacuum degree is stable. In the present invention, AG spraying is carried out in a vacuum environment, thereby avoiding the problem that the film layer has poor adhesion and poor wear resistance due to more moisture and gas on the glass surface in the atmospheric environment.

[0044] like Figure 5 As shown, the discharging end of the second vacuum transition chamber 8 is provided with a conveying roller 3, and the conveying end of the conveying roller 3 is provided with a heating furnace 9, which includes an upper heating chamber 901 and a lower heating chamber 902, and the inner walls of the upper heating chamber 901 and the lower heating chamber 902 are filled with thermal insulation rock wool 39, and a conveying roller 3 is provided between the upper heating chamber 901 and the lower heating chamber 902; the upper heating chamber 901 and the lower heating chamber 902 are respectively provided with an electric heating wire 33 and a temperature sensor 26, and the electric heating wire 33 and the temperature sensor 26 are respectively electrically connected to the control system. The heating furnace 9 performs high-temperature heating treatment on the glass after AG spraying to enhance the mechanical strength, impact resistance and thermal stability of the glass.

[0045] like Figure 5 As shown, a cooling furnace 15 is provided at the discharge end of the heating furnace 9, and a photoelectric sensor 22 is provided between the heating furnace 9 and the cooling furnace 15 for sensing the position of the glass. After the glass is heated in the heating furnace 9, it is transferred to the cooling furnace 15. The cooling furnace 15 is used to cool the glass, and includes an upper cooling chamber 1501 and a lower cooling chamber 1502, and a transmission roller 3 is provided between the upper cooling chamber 1501 and the lower cooling chamber 1502. Among them, the upper cooling chamber 1501 is made of stainless steel, and the inner wall is filled with thermal insulation rock wool 39, and the upper air blowing main pipeline 16 is arranged below it near the glass. The lower cooling chamber 1502 is made of stainless steel, and the inner wall is filled with thermal insulation rock wool 39, and the lower air blowing main pipeline 17 is arranged above near the glass. The upper air blowing main pipe 16 and the lower air blowing main pipe 17 are respectively connected with a plurality of air blowing fine pipes 18, and the air outlets of the air blowing fine pipes 18 face the glass. The upper air blowing main pipe 16 and the lower air blowing main pipe 17 are ventilated through an air compressor, and finally air is blown to the upper and lower surfaces of the glass through the air blowing fine pipes 18 to perform air cooling on the heated high-temperature glass. In order to improve the air cooling efficiency, the arrangement of the upper air blowing main pipe 16 and the lower air blowing main pipe 17 can be designed so that the air blowing fine pipes 18 are evenly distributed on the entire glass plate surface.

[0046] A support rod 19 is provided on the lower blowing air main pipeline 17, and the conveying roller 3 in the cooling furnace 15 is installed on the support rod 19. The bottom of the lower blowing air main pipeline 17 is connected to the piston rods of several first cylinders 20, so that the conveying roller 3 can be driven to rise and fall by the first cylinders 20. Several second cylinders 21 (four in the figure) are also provided below the glass in the cooling chamber 1502, and the second cylinders 21 are arranged at intervals perpendicular to the conveying direction; a photoelectric sensor 22 is installed on the piston rod of the second cylinder 21, and a universal wheel 23 is installed on the top of the piston rod. The second cylinder 21 can lift the glass after the first cylinder 20 drives the conveying roller 3 to descend.

[0047] Because the glass is thin and light, it is prone to displacement and deformation during the air cooling process. In order to increase the weight of the glass, such as Figure 5 As shown, a mounting rod can be arranged below the upper air blowing main pipe 16, and a plurality of pressure rollers 24 are arranged on the mounting rod at intervals along the glass transmission direction. A long strip hole is vertically opened on the mounting rod corresponding to the position of the pressure roller 24. The two ends of the pressure roller 24 are installed on the mounting rod through the long strip hole. When the pressure roller 24 is at the lowest position, the distance between the pressure roller 24 and the transmission roller 3 is less than the thickness of the glass. When the glass enters the cooling furnace 15, as the glass is transmitted and moved forward, the pressure roller 24 located above the glass will be lifted upward, and the long strip hole on the mounting rod reserves space for the pressure roller 24 to move up and down. The pressure roller 24 presses on the glass, increasing the weight of the glass, and can fix the glass during the air cooling process to prevent the glass from shifting and deforming.

[0048] like Figure 1 , 6 As shown in Figure 8, a heat transfer oil cooling and insulation furnace 25 is arranged on one side of the cooling furnace 15. The heat transfer oil cooling and insulation furnace 25 includes an upper heat transfer oil cooling and insulation chamber 2501 and a lower heat transfer oil cooling and insulation chamber 2502, both of which are made of stainless steel, and the inner wall is filled with insulation rock wool 39; a belt conveyor 2503 is arranged between the upper heat transfer oil cooling and insulation chamber 2501 and the lower heat transfer oil cooling and insulation chamber 2502, and the transmission direction of the belt conveyor 2503 is perpendicular to the transmission direction of the transmission roller 3 in the cooling furnace 15, and the belt conveyor 2503 is driven by a motor 38; a heat transfer oil storage container 2504 is arranged on the belt conveyor 2503, which is used to contain heat transfer oil to cool and insulate the glass. Figure 6-7 As shown, the heat transfer oil storage container 2504 includes a hollow upper shell 25041 and a lower shell 25042. The upper shell 25041 and the lower shell 25042 can be made of copper plates. The good thermal conductivity of copper plates facilitates heat conduction between the heat transfer oil in the upper shell 25041 and the lower shell 25042 and the glass, and can quickly cool the glass. The ends of the upper shell 25041 and the lower shell 25042 away from the cooling furnace 15 are fixedly connected to the fixing plate 31 (the fixing plate 31 can be made of a stainless steel plate), and the fixing plate 31 is fixed to the belt of the belt conveyor 2503, thereby fixing the heat transfer oil storage container 2504 on the belt conveyor 2503. Figure 7 and 9 As shown, a plurality of ceramic rollers 32 are respectively installed on the lower surface of the upper shell 25041 and the upper surface of the lower shell 25042, and the ceramic rollers 32 separate the upper shell 25041 and the lower shell 25042 to form a glass receiving gap 25043. A temperature sensor 26 is respectively installed in the upper shell 25041 and the lower shell 25042, and a heat transfer oil inlet 25044 and a heat transfer oil outlet 25045 are respectively provided on the upper shell 25041 and the lower shell 25042 ( Fig. 9 Five are shown).

[0049] After the air cooling treatment, the control system controls the four second cylinders 21 to rise simultaneously to support the glass, and then controls the first cylinder 20 to descend, driving the down-blowing main pipeline 17 and the conveying roller 3 in the cooling furnace 15 to descend together; then the control system starts the belt conveyor 2503 to transfer the heat transfer oil storage container 2504 from one side of the cooling furnace 15 to the cooling furnace 15. For the convenience of description, the positions corresponding to the four second cylinders 21 are respectively recorded as No. 1 top lifting position, No. 2 top lifting position, No. 3 top lifting position and No. 4 top lifting position according to the distance from the heat transfer oil cooling and insulation furnace 25 from near to far. When the front end of the thermal oil storage container 2504 reaches the No. 1 lifting position, the photoelectric sensor 22 at this position detects the thermal oil storage container 2504, and the control system controls the second cylinder 21 at the No. 1 lifting position to descend, and the thermal oil storage container 2504 continues to move forward. After passing the No. 1 lifting position, the second cylinder 21 at this position rises again until it touches the bottom of the thermal oil storage container 2504. The universal wheel 23 at the top of the piston rod of the second cylinder 21 can reduce the friction between the second cylinder 21 and the thermal oil storage container 2504 during the continuous transmission of the thermal oil storage container 2504. By analogy, the thermal oil storage container 2504 continues to drive, and passes through the No. 2-4 lifting positions in turn. The second cylinders 21 at the corresponding positions successively descend and then rise, and finally the glass is transferred to the glass receiving gap 25043 formed by the upper shell 25041 and the lower shell 25042 of the thermal oil storage container 2504. During the transfer process, the ceramic rollers 32 on the upper shell 25041 and the lower shell 25042 can reduce the sliding friction between them and the glass surface.

[0050] like Figure 6 As shown, a photoelectric sensor 22 is installed on the inner wall of the cooling furnace 15, which is away from one end of the thermal oil cooling and insulation furnace 25 and corresponds to the height of the thermal oil storage container 2504. When the thermal oil storage container 2504 is transmitted to this position, the photoelectric sensor 22 detects the thermal oil storage container 2504, and the control system turns off the belt conveyor 2503 to stop the thermal oil storage container 2504 at this position, and starts cooling and insulating the glass.

[0051] like Fig. 9As shown, the thermal oil outlets 25045 of the upper shell 25041 and the lower shell 25042 are respectively connected to the thermal oil freezing pipeline and the thermal oil heating pipeline through pipelines (a thermal oil outlet valve 42 is installed on the pipeline), the thermal oil freezing pipeline is connected to an oil cooler 27 (BL-415 produced by Foshan Ruijia Machinery Equipment Co., Ltd.), a solenoid valve 28, an oil pump 29 and a check valve 40, and the thermal oil heating pipeline is connected to a thermal oil heater 30 (JOST produced by Nanjing Kolod Machinery Co., Ltd.), a solenoid valve 28, an oil pump 29 and a check valve 40; the thermal oil freezing pipeline and the thermal oil heating pipeline (a thermal oil inlet valve 41 is installed on the pipeline) are respectively connected to the thermal oil inlet 25044 of the thermal oil storage container 2504 through pipelines.

[0052] The heat transfer oil is cooled by the oil cooler 27, and then the cooled heat transfer oil is pumped 29 into the upper shell 25041 and the lower shell 25042 of the heat transfer oil storage container 2504 through the pipeline, and the glass in the glass receiving gap 25043 is cooled, which can avoid the wind spots caused by simple air cooling, and can ensure the uniformity of the temperature of the entire glass plate surface, and avoid the concentration of thermal stress; at the same time, the heat transfer oil has a fast heat exchange speed, and can quickly cool the glass. As the heat transfer oil circulates in each pipeline, the temperature of the heat transfer oil continues to decrease. When the temperature detector in the upper shell 25041 and the lower shell 25042 detects that the temperature of the heat transfer oil is too low, the control system controls to close the solenoid valve 28 on the heat transfer oil freezing pipeline and open the solenoid valve 28 on the heat transfer oil heating pipeline, and heats the heat transfer oil through the heat transfer oil heater 30; when the temperature sensor 26 detects that the temperature of the heat transfer oil is too high, the reverse operation is performed to cool the heat transfer oil again. By alternately cooling and heating the heat transfer oil, its temperature is maintained within a temperature range with small fluctuations, and then the process time is controlled by the control system, so that the glass is first cooled to the temperature of the heat transfer oil and then kept warm for a period of time, so as to complete the cooling and heat preservation treatment of the glass. When the coated glass after the high-temperature heating treatment in the heating furnace 9 is cooled and heat-insulated, microcrystals will be formed in the bottom oxide microcrystalline medium layer 43, and the presence of microcrystals will cause the refraction of light, thereby reducing the intensity of direct light, increasing the haze and reducing the reflection.

[0053] In addition, in order to reduce the heat exchange between the heat transfer oil and the external air during the circulation process and reduce the heat loss of the heat transfer oil, such as Figure 6As shown, an electric heating wire 33 and a temperature sensor 26 are respectively arranged in the upper heat-conducting oil cooling and heat-insulating chamber 2501 and the lower heat-conducting oil cooling and heat-insulating chamber 2502, and the electric heating wire 33 and the temperature sensor 26 are respectively electrically connected to the control system. The electric heating wire 33 arranged close to the glass plane in the upper heat-conducting oil cooling and heat-insulating chamber 2501 and the lower heat-conducting oil cooling and heat-insulating chamber 2502 can heat the surrounding air to the same temperature as the heat-conducting oil, reduce the heat transfer between the heat-conducting oil and the air, and maintain the stability of the temperature of the heat-conducting oil.

[0054] After the heat transfer oil storage container 2504 cools and insulates the glass, the control system reversely controls the belt conveyor 2503 to pull the heat transfer oil storage container back into the heat transfer oil cooling and insulation furnace 25. During this process, the four second cylinders 21 rise up in succession to support the glass, and then the first cylinder 20 rises to drive the transmission roller 3 back to its original position. The four second cylinders 21 then descend at the same time to put the glass back on the transmission roller 3 to continue transmitting it to the next process.

[0055] like Figure 1 As shown, the discharging end of the cooling furnace 15 is provided with a conveying roller 3, and the conveying end of the conveying roller 3 is provided with a glass cleaning device 37 (KSD-PBQX produced by Shenzhen Keshengda Ultrasonic Automation Equipment Co., Ltd.), which has the functions of wind cutting, soaking, detergent brushing, pure water washing, and blowing drying, etc., and can clean the dirt on the glass surface, improve the cleanliness of the glass surface, and avoid the formation of defects in the film layer in the subsequent secondary coating process.

[0056] like Figure 1 As shown, the discharging end of the glass cleaning equipment 37 is provided with a conveying roller 3, the conveying end of the conveying roller 3 is provided with a third vacuum transition chamber 10, and the conveying roller 3 is provided in the third vacuum transition chamber 10; the feeding port and the discharging port of the third vacuum transition chamber 10 are respectively provided with gate valves, and the discharging port of the third vacuum transition chamber 10 is connected with the feeding port of the second vacuum chamber 11; the second vacuum chamber 11 is provided with an air inlet 5, the second vacuum chamber 11 is provided with a conveying roller 3, and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially installed along the glass transmission direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode all include a target tube 6, a target material is provided on the target tube 6, a magnet array is provided in the target tube 6 along the length direction, and the target tube 6 is connected to a medium-frequency high-voltage power supply. The discharge port of the second vacuum chamber 11 is connected to the feed port of the fourth vacuum transition chamber 12, and gate valves are respectively provided at the feed port and the discharge port of the fourth vacuum transition chamber 12; a transmission roller 3 is provided in the fourth vacuum transition chamber 12; the third vacuum transition chamber 10, the second vacuum chamber 11 and the fourth vacuum transition chamber 12 are respectively connected to vacuum pumping devices.

[0057] The working process of the third vacuum transition chamber 10, the second vacuum chamber 11 and the fourth vacuum transition chamber 12 is the same as that of the first vacuum transition chamber 2, the first vacuum chamber 4 and the second vacuum transition chamber 8, which will not be repeated here. The second oxidizing medium layer 45, the third oxidizing medium layer 46 and the fourth oxidizing medium layer 47 (such as Fig.10 As shown), the secondary coating process is completed. Among them, the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode can be made of silicon oxide, niobium oxide, aluminum oxide, zirconium oxide or titanium oxide.

[0058] like Figure 1 As shown, the discharging end of the fourth vacuum transition chamber 12 is provided with a conveying roller 3, and the conveying end of the conveying roller 3 is provided with an AF spraying device 13 (AF6500 produced by Guangdong Zhenyi Intelligent Equipment Co., Ltd.), which sprays AF liquid on the surface of the coated glass by spraying to form an anti-fingerprint hydrophobic coating (AF layer 48, such as Fig.10 As shown in the figure), the coated glass is more resistant to dirt and scratches. The discharging end of the AF spraying equipment 13 is provided with a conveying roller 3, and the conveying end of the conveying roller 3 is provided with an AF baking equipment 14 (XUD2400 produced by Dongguan Xinyuanda Machinery Equipment Co., Ltd.) to bake and cure the AF layer 48. The equipment is used in combination with the AF spraying equipment 13 to enhance the AF coating and improve its adhesion and wear resistance. The discharging end of the AF baking equipment 14 is provided with a conveying roller 3 to convey the glass that has completed the whole process to be packaged.

[0059] In addition, in order to realize the automatic transmission of glass, such as Figure 5 As shown, photoelectric sensors 22 are respectively arranged on the conveying roller 3 at the feeding end of the first vacuum transition chamber 2, the conveying roller 3 at the discharging end of the second vacuum transition chamber 8, the conveying roller 3 at the discharging end of the glass cooling and heat preservation device, the conveying roller 3 at the discharging end of the glass washing equipment 37, the conveying roller 3 at the discharging end of the fourth vacuum transition chamber 12, the conveying roller 3 at the discharging end of the AF spraying equipment 13, and the conveying roller 3 at the discharging end of the AF baking equipment 14. The photoelectric sensors 22 are arranged at the transmission starting end and the transmission end of the conveying roller 3, and the photoelectric sensors 22 are electrically connected to the control system. The photoelectric sensor 22 at the transmission starting end can detect that the glass is transmitted to the conveying roller 3, and the glass continues to be transmitted forward until it reaches the transmission end. The photoelectric sensor 22 at the transmission end detects that the glass is in place. The control system determines whether the glass in place is to continue to be transmitted forward or to wait in place according to whether there is glass being processed in the next process; when waiting in place, it only needs to control the motor 38 of the conveying roller 3 to be turned off.

[0060] Example 2

[0061] On the basis of Example 1, the transmission rollers 3 in the first vacuum chamber 4 and the second vacuum chamber 11 are connected to the bias power supply, and the bias power supply is electrically connected to the control system; in the first vacuum chamber 4 and the second vacuum chamber 11, an ion trapping device is arranged under the glass, and the ion trapping device includes a stainless steel outer cover 34, and three rows of magnets 7 are fixed in the outer cover 34 by bolts, each row of magnets 7 is arranged perpendicular to the glass transmission direction, the S pole of the middle row of magnets 7 faces the glass 1, and the N poles of the other two rows of magnets 7 face the glass 1.

[0062] After the glass is transferred to the first vacuum chamber 4, one or more of argon, krypton, hydrogen and oxygen are introduced into the first vacuum chamber 4 through the air inlet 5, and the control system turns on the bias power supply and the medium-frequency high-voltage power supply. In the vacuum environment, the gas is ionized under high pressure, and the ionized gas is affected by the magnetic field in the target tube 6, the magnetic field in the ion confinement device, and the electric field formed by the bias power supply, and plasma is generated below the target material and above the glass substrate. At this time, the glass is continuously bombarded by the high-energy plasma, and the surface of the glass will form an uneven morphology. After judging that the glass has completely passed through the first sputtering cathode through the glass transmission time, the control system turns off the medium-frequency high-voltage power supply and the bias power supply, stops introducing gas, and controls the transmission roller 3 to rotate in the opposite direction to make the glass return to the first vacuum transition chamber 2. Then, the glass is forwardly transferred to the first vacuum chamber 4, argon and oxygen are introduced, and the medium-frequency high-voltage power supply is turned on. When the glass passes through the first sputtering cathode again, the bottom oxide microcrystalline dielectric layer 43 will be deposited on the glass.

[0063] Similarly, after the glass passes through the fifth sputtering cathode in the second vacuum chamber 11 and is coated with the fourth oxidizing medium layer 47, the medium-frequency high-voltage power supply is turned off, the gas is stopped from being introduced, and the conveying roller 3 is controlled to rotate in the reverse direction to make the glass return to the starting position of the fifth sputtering cathode. Then, the glass is forwardly conveyed again, one or more of argon, krypton, hydrogen and oxygen are introduced, the medium-frequency high-voltage power supply and the bias power supply are turned on, and the gas is ionized in the vacuum environment. The ionized gas is affected by the magnetic field in the target tube 6 and the magnetic field in the ion confinement device and the electric field formed by the bias power supply, and plasma will appear below the target and above the glass respectively. When the glass passes through the fifth sputtering cathode again, the surface of the fourth oxidizing medium layer 47 is continuously bombarded by the high-energy plasma, and the surface of the fourth medium layer will form an uneven morphology.

[0064] In this embodiment, a bias voltage and a magnetic field are applied to the first sputtering cathode and the fifth sputtering cathode, so that the glass and the film layer have an uneven morphology, thereby increasing the adhesion and hardness of the film layer.

[0065] In addition, a cooling box 35 is connected below the outer cover 34 of the ion confinement device. A cooling water pipe 36 is provided in the cooling box 35. Circulating cooling water flows through the cooling water pipe 36 to cool down the magnet 7 in the outer cover 34 and the outer cover 34 to prevent the magnet 7 from demagnetizing due to high temperature. At the same time, the film material diffracted and deposited on the top of the outer cover 34 is tightly combined with the outer cover 34 to avoid the film material on the top of the outer cover 34 from cracking due to sudden temperature changes, thereby causing crystal points on the glass.

[0066] Although the present invention has been described in detail by referring to the accompanying drawings and in combination with the preferred embodiments, the present invention is not limited thereto. Without departing from the spirit and essence of the present invention, a person of ordinary skill in the art may make various equivalent modifications or substitutions to the embodiments of the present invention, and these modifications or substitutions shall be within the scope of the present invention. Any person skilled in the art who is familiar with the present technical field can easily think of changes or substitutions within the technical scope disclosed by the present invention, and all of these shall be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. AR, AG and AF coating systems for cover glass, It is characterized in that It comprises a first vacuum transition chamber (2), a conveying roller (3) being arranged at the feed end of the first vacuum transition chamber (2), and a conveying roller (3) being arranged inside the first vacuum transition chamber (2); gate valves are respectively arranged at the feed inlet and the discharge outlet of the first vacuum transition chamber (2), and the discharge outlet of the first vacuum transition chamber (2) is connected to the feed inlet of the first vacuum chamber (4); An air inlet (5) is provided on the first vacuum chamber (4), a transport roller (3) is provided in the first vacuum chamber (4), and a first sputtering cathode and a second sputtering cathode are sequentially installed along the transport direction of the glass (1); the first sputtering cathode and the second sputtering cathode both comprise a target tube (6), a target material is provided on the target tube (6), a magnet array is provided in the target tube (6) along the length direction, and the target tube (6) is connected to a power source; The discharge port of the first vacuum chamber (4) is connected to the feed port of the second vacuum transition chamber (8), and gate valves are respectively provided at the feed port and the discharge port of the second vacuum transition chamber (8); a transmission roller (3) is provided in the second vacuum transition chamber (8); The first vacuum transition chamber (2), the first vacuum chamber (4) and the second vacuum transition chamber (8) are respectively connected to a vacuum pumping device; A conveying roller (3) is provided at the discharge end of the second vacuum transition chamber (8); a heating furnace (9) is provided at the transmission end of the conveying roller (3); a conveying roller (3) is provided in the heating furnace (9); a glass cooling and heat preservation device is provided at the discharge end of the heating furnace (9); a conveying roller (3) is provided in the glass cooling and heat preservation device; and a conveying roller (3) is provided at the discharge end of the glass cooling and heat preservation device; A third vacuum transition chamber (10) is provided at the transmission end of the transmission roller (3) at the discharge end of the glass cooling and heat preservation device, and a transmission roller (3) is provided in the third vacuum transition chamber (10); gate valves are provided at the feed inlet and the discharge inlet of the third vacuum transition chamber (10), respectively, and the discharge inlet of the third vacuum transition chamber (10) is connected to the feed inlet of the second vacuum chamber (11); An air inlet (5) is provided on the second vacuum chamber (11), a transmission roller (3) is provided in the second vacuum chamber (11), and a third sputtering cathode, a fourth sputtering cathode and a fifth sputtering cathode are sequentially installed along the glass transmission direction; the third sputtering cathode, the fourth sputtering cathode and the fifth sputtering cathode all include a target tube (6), a target material is provided on the target tube (6), a magnet array is provided in the target tube (6) along the length direction, and the target tube (6) is connected to a power supply; The discharge port of the second vacuum chamber (11) is connected to the feed port of the fourth vacuum transition chamber (12); the feed port and the discharge port of the fourth vacuum transition chamber (12) are respectively provided with gate valves; and a transmission roller (3) is provided in the fourth vacuum transition chamber (12); The third vacuum transition chamber (10), the second vacuum chamber (11) and the fourth vacuum transition chamber (12) are respectively connected to a vacuum pumping device; A conveying roller (3) is provided at the discharge end of the fourth vacuum transition chamber (12), and an AF spraying device (13) is provided at the transmission end of the conveying roller (3); a conveying roller (3) is provided at the discharge end of the AF spraying device (13), and an AF baking device (14) is provided at the transmission end of the conveying roller (3); and a conveying roller (3) is provided at the discharge end of the AF baking device (14); The transmission rollers (3) are driven to rotate by a motor (38), and the motor (38), the gate valve and the power supply are electrically connected to the control system respectively; The glass cooling and heat preservation device comprises a cooling furnace (15) and a heat transfer oil cooling and heat preservation furnace (25); the cooling furnace (15) is located between the heating furnace (9) and the third vacuum transition chamber (10), and the heat transfer oil cooling and heat preservation furnace (25) is located on one side of the cooling furnace (15); the cooling furnace (15) comprises an upper cooling chamber (1501) and a lower cooling chamber (1502); a transmission roller (3) is arranged between the upper cooling chamber (1501) and the lower cooling chamber (1502); an upper blowing main pipeline (16) is arranged in the upper cooling chamber (1501), and a lower blowing main pipeline (17) is arranged in the lower cooling chamber (1502); the upper blowing main pipeline (16) and the lower blowing main pipeline (17) are connected to each other. The pipe (17) is connected to a plurality of fine blowing pipes (18), and the air outlets of the fine blowing pipes (18) face the glass; a support rod (19) is provided on the lower blowing main pipe (17), the transmission roller (3) in the cooling furnace (15) is installed on the support rod (19), and the bottom of the lower blowing main pipe (17) is connected to the piston rods of a plurality of first cylinders (20); a plurality of second cylinders (21) are also provided below the glass in the cooling chamber (1502), and the second cylinders (21) are arranged at intervals perpendicular to the transmission direction; a photoelectric sensor (22) is installed on the piston rod of the second cylinder (21), and a universal wheel (23) is installed on the top of the piston rod; The heat transfer oil cooling and insulation furnace (25) comprises an upper heat transfer oil cooling and insulation chamber (2501) and a lower heat transfer oil cooling and insulation chamber (2502); a belt conveyor (2503) is arranged between the upper heat transfer oil cooling and insulation chamber (2501) and the lower heat transfer oil cooling and insulation chamber (2502); the transmission direction of the belt conveyor (2503) is perpendicular to the transmission direction of the transmission roller (3) in the cooling furnace (15); the belt conveyor (2503) is driven by a motor 1; a heat transfer oil storage container (2504) is arranged on the belt conveyor (2503); a temperature sensor (26) is installed in the heat transfer oil storage container (2504); the heat transfer oil storage container (2504) is away from the cooling furnace (15); One end is fixed on the belt of the belt conveyor (2503), and the other end is provided with a glass receiving slit (25043); a heat transfer oil inlet (25044) and a heat transfer oil outlet (25045) are provided on the heat transfer oil storage container (2504); the heat transfer oil outlet (25045) is respectively connected to a heat transfer oil freezing pipeline and a heat transfer oil heating pipeline through pipelines; the heat transfer oil freezing pipeline is connected to an oil cooler (27), a solenoid valve (28) and an oil pump (29); the heat transfer oil heating pipeline is connected to a heat transfer oil heater (30), a solenoid valve 1 and an oil pump 1; the heat transfer oil freezing pipeline and the heat transfer oil heating pipeline are respectively connected to the heat transfer oil inlet (25044) of the heat transfer oil storage container (2504) through pipelines; A photoelectric sensor 1 is installed at one end of the cooling furnace (15) away from the heat-conducting oil cooling and insulation furnace (25) and at a height corresponding to the heat-conducting oil storage container (2504). The first cylinder (20), the second cylinder (21), the photoelectric sensor (22), the photoelectric sensor 1, the motor (38), the motor 1, the temperature sensor (26), the oil pump (29) and the oil pump 1 are respectively electrically connected to the control system.

2. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that A mounting rod is arranged below the upper air blowing main pipe (16), and a plurality of pressure rollers (24) are arranged on the mounting rod at intervals along the glass transmission direction. A long strip hole is vertically opened on the mounting rod at the position corresponding to the pressure roller (24). Both ends of the pressure roller (24) pass through the long strip hole and are installed on the mounting rod. When the pressure roller (24) is in the lowest position, the distance between the pressure roller (24) and the transmission roller (3) is less than the thickness of the glass.

3. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that The heat transfer oil storage container (2504) comprises a hollow upper shell (25041) and a lower shell (25042); one end of the upper shell (25041) and the lower shell (25042) away from the cooling furnace (15) is fixedly connected to a fixed plate (31); the fixed plate (31) is fixed to the belt of the belt conveyor (2503); a plurality of rollers (32) are respectively installed on the lower surface of the upper shell (25041) and the upper surface of the lower shell (25042); a temperature sensor (26) is respectively installed in the upper shell (25041) and the lower shell (25042); and a heat transfer oil inlet (25044) and a heat transfer oil outlet (25045) are respectively provided on the upper shell (25041) and the lower shell (25042).

4. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that An electric heating wire (33) and a temperature sensor (26) are respectively arranged in the upper heat transfer oil cooling and heat preservation chamber (2501) and the lower heat transfer oil cooling and heat preservation chamber (2502), and the electric heating wire (33) and the temperature sensor (26) are respectively electrically connected to the control system via wires.

5. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that The heating furnace (9) comprises an upper heating chamber (901) and a lower heating chamber (902), a transmission roller (3) being arranged between the upper heating chamber (901) and the lower heating chamber (902), the transmission roller (3) being driven by a motor (38); an electric heating wire and a temperature sensor are respectively arranged in the upper heating chamber (901) and the lower heating chamber (902), the electric heating wire and the temperature sensor being respectively electrically connected to a control system via a wire.

6. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that The transmission rollers (3) in the first vacuum chamber (4) and the second vacuum chamber (11) are both connected to a bias power supply, and the bias power supply is electrically connected to a control system; in the first vacuum chamber (4) and the second vacuum chamber (11), an ion trapping device is arranged below the glass, the ion trapping device comprises an outer cover (34), three rows of magnets (7) are fixed in the outer cover (34), each row of magnets (7) is arranged perpendicular to the glass transmission direction, the S poles of the middle row of magnets (7) face the glass (1), and the N poles of the other two rows of magnets (7) face the glass (1).

7. The AR, AG and AF coating system for cover glass according to claim 6, It is characterized in that A cooling box (35) is connected below the outer cover (34), and a cooling water pipe (36) is arranged in the cooling box (35).

8. The AR, AG and AF coating system for cover glass according to claim 1, It is characterized in that A glass cleaning device (37) is provided at the transmission end of the transmission roller (3) at the discharge end of the glass cooling and heat preservation device, a transmission roller (3) is provided at the discharge end of the glass cleaning device (37), and a third vacuum transition chamber (10) is provided at the transmission end of the transmission roller (3).

9. The AR, AG and AF coating system for cover glass according to claim 8, It is characterized in that Photoelectric sensors are respectively arranged on the transmission roller (3) at the feeding end of the first vacuum transition chamber (2), the transmission roller (3) at the discharging end of the second vacuum transition chamber (8), the transmission roller (3) at the discharging end of the glass cooling and heat preservation device, the transmission roller (3) at the discharging end of the glass cleaning equipment (37), the transmission roller (3) at the discharging end of the fourth vacuum transition chamber (12), the transmission roller (3) at the discharging end of the AF spraying equipment (13), and the transmission roller (3) at the discharging end of the AF baking equipment (14). The photoelectric sensors are arranged at the transmission starting end and the transmission end of the transmission roller (3), and the photoelectric sensors are electrically connected to the control system.

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