A method for analyzing scratches of a glass substrate
By analyzing the scratch characteristics of glass substrates and adjusting the parameters of mobile equipment, the problem of scratches on glass substrates during processing was solved, and the product qualification rate was improved.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Patents(China)
- Current Assignee / Owner
- LG DISPLAY HIGH-TECH (CHINA) CO LTD
- Filing Date
- 2022-12-09
- Publication Date
- 2026-04-17
AI Technical Summary
During the glass substrate processing, scratches are easily caused to the glass substrate, resulting in a low product qualification rate, and existing technology cannot accurately determine the cause of the scratches.
By determining the scratch characteristics of the glass substrate, the movement parameters of the mobile device, including the amount of movement and rotation angle of the X-axis, Y-axis, and Z-axis, are adjusted, and tests and verifications are conducted to determine scratch-related parameters and optimize the movement parameters to reduce scratches.
This technology enables accurate identification of the causes of scratches on glass substrates, thereby improving the product qualification rate.
Smart Images

Figure CN115931876B_ABST
Abstract
Description
Technical Field
[0001] This invention relates to the technical field of glass substrate processing, and more particularly to a method for scratch analysis of glass substrates. Background Technology
[0002] Display panels require glass substrates during manufacturing, such as... Figure 1 and Figure 2 As shown, during the processing of glass substrates, a mobile device 2 is typically used to move the glass substrates from the placement platform 1 to the next process. The placement platform 1 usually has multiple placement stations, which are arranged in a matrix, that is, there are at least two placement stations in both the X-axis and Y-axis directions, and multiple glass substrates are stacked along the Z-axis at each placement station.
[0003] However, moving the glass substrate can easily cause scratches, affecting its quality. Currently, in actual production, it's impossible to accurately determine the cause of these scratches, leading to a low product yield. Summary of the Invention
[0004] This invention provides a scratch analysis method for glass substrates, enabling accurate determination of the causes of scratches on glass substrates, thereby allowing for targeted improvements and increasing the product qualification rate.
[0005] According to one aspect of the present invention, a scratch analysis method for a glass substrate is provided, the scratch analysis method for the glass substrate comprising:
[0006] The scratch characteristics of multiple defective glass substrates with scratches were identified.
[0007] Based on the scratch characteristics, suspected scratch parameters are determined, wherein the mobile device is provided with multiple movement parameters, and the mobile device moves the glass substrate based on the multiple movement parameters, and the suspected scratch parameters include at least one of the multiple movement parameters.
[0008] Adjust the baseline value of the suspected scratch parameter, and obtain the test parameter value based on the adjusted baseline value;
[0009] The mobile device is controlled to move the test glass substrate used for testing based on the test parameter values;
[0010] The test glass substrate is checked for scratches, and scratch-related parameters are determined based on the scratches. The scratch-related parameters refer to the movement parameters that are associated with the scratches on the glass substrate.
[0011] In an optional embodiment of the present invention, determining the scratch-related parameters based on the scratch condition includes:
[0012] When the test glass substrate has scratches and the number of scratches is less than the preset scratch threshold, or when the test glass substrate has no scratches, the scratch-related parameters are determined to be suspected scratch parameters.
[0013] When the test glass substrate has scratches and the number of scratches is greater than or equal to a preset scratch threshold, the scratch-related parameters are determined not to be suspected scratch parameters.
[0014] In an optional embodiment of the present invention, after determining that the scratch-related parameters are suspected scratch parameters, the method further includes:
[0015] The mobile device is controlled to move the first verification glass substrate for verification based on the test parameter value corresponding to the scratch-related parameters;
[0016] The verification parameter value is obtained by adjusting the test parameter value corresponding to the scratch-related parameters;
[0017] The mobile device is controlled to move the second verification glass substrate used for verification based on the verification parameter value;
[0018] The first and second verification glass substrates are checked for scratches, and the optimal scratch parameter values are determined based on the scratch condition.
[0019] In an optional embodiment of the present invention, determining the optimal scratch parameter value based on the scratch condition includes:
[0020] When the first verification glass substrate is free of scratches and the second verification glass substrate is scratched, the test parameter value is determined as the optimal scratch parameter value.
[0021] When both the first verification glass substrate and the second verification glass substrate have scratches, the verification parameter values are adjusted again.
[0022] The mobile device is controlled to move the third verification glass substrate used for verification based on the adjusted verification parameter values;
[0023] Determine whether the number of scratches on the third verification glass substrate is not less than a preset scratch number threshold;
[0024] When the number of scratches on the third verification glass substrate is greater than or equal to the preset scratch number threshold, the step of readjusting the verification parameter value is executed.
[0025] When the number of scratches on the third verification glass substrate is less than a preset scratch number threshold or there are no scratches, the adjusted verification parameter value corresponding to the third verification glass substrate having fewer scratches than the preset scratch threshold or no scratches is determined as the optimal scratch parameter value.
[0026] In an optional embodiment of the present invention, the scratch features include scratch angle and scratch location; determining the scratch features of multiple defective glass substrates with scratches includes:
[0027] Create an image of the glass substrate;
[0028] Scratches on multiple defective glass substrates are marked in the glass substrate image;
[0029] Angle and position analysis was performed on multiple scratches in the glass substrate image to obtain the scratch angle and scratch position.
[0030] In an optional embodiment of the present invention, marking the scratches of the plurality of defective glass substrates in the glass substrate image includes:
[0031] Establish a glass substrate coordinate system on the glass substrate image;
[0032] The coordinates of the end of the scratch in the coordinate system of the glass substrate are determined;
[0033] Accordingly, the step of analyzing the angle and position of multiple scratches in the glass substrate image to obtain the scratch angle and scratch position includes:
[0034] The scratch angle and location are determined based on the coordinate values of the scratch.
[0035] In an optional embodiment of the present invention, the movement parameter includes a Y-axis rotation angle, wherein the Y-axis rotation angle refers to the angle by which the glass substrate rotates along the Y-axis when the mobile device moves the glass substrate, the glass substrate image includes a central region, and the step of determining the suspected scratch parameters based on the scratch features includes:
[0036] When the scratch angle of a scratch greater than a first preset threshold on a plurality of defective glass substrates is within a preset angle range and the scratch position of a scratch greater than a second preset threshold in the glass substrate image is in the middle region, the suspected scratch parameters are determined to include the Y-axis rotation angle, wherein the preset angle range is greater than or equal to 80 degrees and less than 100 degrees.
[0037] In an optional embodiment of the present invention, the suspected scratch parameter includes the Y-axis rotation angle, the parameter reference value includes the Y-axis rotation angle reference value, and the test parameter value includes the Y-axis rotation angle test parameter value;
[0038] The parameter baseline value for adjusting the suspected scratch parameters is used to obtain the test parameter value, including:
[0039] The Y-axis rotation angle reference value is reduced by a preset angle value, and the Y-axis rotation angle test parameter value is obtained after the reduction.
[0040] Accordingly, controlling the mobile device to move the test glass substrate used for testing based on the test parameter values includes:
[0041] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value.
[0042] In an optional embodiment of the present invention, the movement parameter further includes an X-axis movement value, wherein the X-axis movement value includes an X-axis movement reference value;
[0043] Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes:
[0044] The X-axis movement reference value is reduced by a first preset value, and the X-axis movement test parameter value is obtained after the reduction.
[0045] The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes:
[0046] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the X-axis movement test parameter value.
[0047] In an optional embodiment of the present invention, the movement parameter further includes a Z-axis movement value, which includes a Z-axis movement reference value;
[0048] Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes:
[0049] The Z-axis movement reference value is increased by a second preset value, and the Z-axis movement test parameter value is obtained after the increase.
[0050] The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes:
[0051] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the Z-axis movement test parameter value.
[0052] The technical solution of this invention involves identifying scratch characteristics of multiple defective glass substrates with scratches; then determining suspected scratch parameters based on these scratch characteristics. A mobile device includes multiple movement parameters, used to move the glass substrate based on these parameters. The suspected scratch parameters include at least one of the multiple movement parameters. A reference value for the suspected scratch parameters is then adjusted, and a test parameter value is obtained based on the adjusted reference value. The mobile device is then controlled to move the test glass substrate based on the test parameter value. Finally, the presence of scratches on the test glass substrate is detected, and scratch-related parameters are determined based on the scratch condition. These scratch-related parameters refer to the movement parameters associated with causing scratches on the glass substrate. This allows for more accurate analysis of the parameters causing scratches on the glass, enabling precise judgment of the cause of scratches on the glass substrate, and thus allowing for targeted improvements to increase the product's pass rate.
[0053] It should be understood that the description in this section is not intended to identify key or essential features of the embodiments of the present invention, nor is it intended to limit the scope of the invention. Other features of the invention will become readily apparent from the following description. Attached Figure Description
[0054] To more clearly illustrate the technical solutions in the embodiments of the present invention, the accompanying drawings used in the description of the embodiments will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.
[0055] Figure 1 This is a schematic diagram of the structure of the platform in related technologies;
[0056] Figure 2 This is a structural diagram illustrating the placement of platforms and mobile devices in related technologies;
[0057] Figure 3 A flowchart of a scratch analysis method for a glass substrate provided in Embodiment 1 of the present invention;
[0058] Figure 4 A flowchart illustrating a scratch analysis method for a glass substrate provided in Embodiment 2 of the present invention. Figure 5 This is a schematic diagram of a calibrated glass substrate image provided in Embodiment 3 of the present invention.
[0059] Among them: 1. Placement platform; 2. Mobile device. Detailed Implementation
[0060] To enable those skilled in the art to better understand the present invention, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present invention. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort should fall within the scope of protection of the present invention.
[0061] It should be noted that the terms "first," "second," etc., in the specification, claims, and accompanying drawings of this invention are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that such data can be interchanged where appropriate so that the embodiments of the invention described herein can be implemented in orders other than those illustrated or described herein. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover a non-exclusive inclusion; for example, a process, method, system, product, or apparatus that comprises a series of steps or units is not necessarily limited to those steps or units explicitly listed, but may include other steps or units not explicitly listed or inherent to such processes, methods, products, or apparatus.
[0062] In related technologies, such as Figure 1 and Figure 2 As shown, a glass substrate is required during the processing of the display panel. During processing, a mobile device 2 typically moves the glass substrate from the placement platform 1 to the next process. The placement platform 1 usually has multiple placement stations arranged in a matrix, meaning there are at least two placement stations in both the X-axis and Y-axis directions. Multiple glass substrates are stacked along the Z-axis at each placement station. In this embodiment of the invention, the longitudinal direction of the placement platform 1 is defined as the X-axis, and the transverse direction as the Y-axis. Since scratches can easily occur on the glass substrate during movement, affecting its quality, this invention provides a scratch analysis method for glass substrates to address this problem.
[0063] Example 1
[0064] Figure 3 This is a flowchart of a scratch analysis method for a glass substrate provided in Embodiment 1 of the present invention. This embodiment is applicable to situations where scratches are analyzed on a glass substrate. Figure 3 As shown, the scratch analysis method for the glass substrate includes:
[0065] S110. Determine the scratch characteristics of multiple defective glass substrates with scratches.
[0066] Among them, defective glass substrates refer to substrates with scratches. Scratch characteristics refer to the features of scratches on defective glass substrates, such as the angle and location of the scratches.
[0067] S120. Based on the scratch characteristics, determine the suspected scratch parameters, wherein the mobile device is provided with multiple movement parameters, the mobile device moves the glass substrate based on the multiple movement parameters, and the suspected scratch parameters include at least one of the multiple movement parameters.
[0068] Among them, movement parameters refer to parameter values related to movement when the mobile device moves the glass substrate, such as the amount of movement in the X, Y, and Z axes, and the rotation angles in the X, Y, and Z axes. Suspected scratch parameters refer to parameter values that may be related to causing scratches, i.e., parameters that may be suboptimal and lead to scratches. Since the characteristics of scratches caused by different suboptimal parameters may be different, suspected scratch parameters can be determined based on scratch characteristics.
[0069] S130. Adjust the baseline value of the suspected scratch parameter, and obtain the test parameter value based on the adjusted baseline value.
[0070] The reference value for the suspected scratch parameter refers to the parameter value used in normal production when the mobile device moves the glass substrate from the placement platform to the next process. In other words, it's the parameter value used for the movement parameter corresponding to the suspected scratch parameter of the mobile device in the process that produced the defective glass substrate. For example, when the suspected scratch parameter is an X-axis movement value, the reference value is the X-axis movement reference value, which is the amount of movement along the X-axis by the mobile device moving the glass substrate on the placement platform during the process that produced the defective glass substrate. The reference value for the suspected scratch parameter will vary depending on the suspected scratch parameter, the placement platform, and the mobile device; this is not a specific limitation but merely an example. The test parameter value is obtained by increasing or decreasing the reference value. The test parameter value is used to test whether the suspected scratch parameter is the movement parameter that caused the scratch on the glass substrate, resulting in the defect.
[0071] S140: Control the mobile device to move the test glass substrate used for testing based on the test parameter values.
[0072] The test glass substrate refers to the glass substrate used to test whether the adjusted test parameter value will cause scratches. The mobile device moves the test glass substrate according to the test parameter value, and the test parameter value can be used to determine whether the test parameter value will cause scratches on the glass substrate based on the scratch condition of the test glass substrate.
[0073] S150. Detect whether there are scratches on the test glass substrate, and determine scratch-related parameters based on the scratch situation, wherein the scratch-related parameters refer to the movement parameters that are related to causing scratches on the glass substrate.
[0074] Among them, scratch-related parameters refer to movement parameters associated with causing scratches on the glass substrate. Since the mobile device moves the test glass substrate according to the test parameter values, which are obtained by adjusting the baseline values of the suspected scratch parameters, it can be determined whether adjusting the value of the suspected scratch parameter will affect the scratch condition of the glass substrate based on the scratch condition of the test glass substrate. If adjusting the value of the suspected scratch parameter causes a significant change in the scratch condition of the glass substrate, it indicates that the suspected scratch parameter can affect the scratches on the glass substrate. If adjusting the value of the suspected scratch parameter does not cause a significant change in the scratch condition of the glass substrate, it indicates that the suspected scratch parameter is not a parameter that can affect the scratches on the glass substrate. Therefore, by detecting whether scratches exist on the test glass substrate, scratch-related parameters related to causing scratches on the glass substrate can be determined based on the scratch condition.
[0075] The above solution involves identifying scratch characteristics of multiple defective glass substrates with scratches; then determining suspected scratch parameters based on these scratch characteristics. A mobile device includes multiple movement parameters, used to move the glass substrate based on these parameters. The suspected scratch parameters include at least one of these movement parameters. Next, a baseline value for the suspected scratch parameters is adjusted, and a test parameter value is obtained based on the adjusted baseline value. Then, the mobile device is controlled to move the test glass substrate based on the test parameter value. Finally, the presence of scratches on the test glass substrate is detected, and scratch-related parameters are determined based on the scratch condition. These scratch-related parameters refer to the movement parameters associated with causing scratches on the glass substrate. This allows for a more accurate analysis of the parameters causing scratches on the glass, enabling precise judgment of the cause of scratches on the glass substrate, and thus allowing for targeted improvements to increase the product's pass rate.
[0076] In an optional embodiment of the present invention, determining the scratch-related parameters based on the scratch condition includes:
[0077] When the test glass substrate has scratches and the number of scratches is less than a preset scratch threshold, or when the test glass substrate has no scratches, the scratch-related parameters are determined to be suspected scratch parameters.
[0078] When the test glass substrate has scratches and the number of scratches is greater than or equal to a preset scratch threshold, the scratch-related parameters are determined not to be suspected scratch parameters.
[0079] During testing, one or more batches of test glass substrates are typically tested. Each batch usually contains multiple test glass substrates. The number of preset scratch thresholds varies depending on the number of test glass substrates tested, and no specific limit is specified here. When the test glass substrate has scratches and the number of scratches is less than the preset scratch threshold, or when the test glass substrate has no scratches, it indicates that adjusting the baseline value of the suspected scratch parameter can significantly improve the scratch situation. This suggests that the suspected scratch parameter is likely the parameter causing the scratches on the glass substrate, and therefore, the suspected scratch parameter can be identified as a scratch-related parameter. When the test glass substrate has scratches and the number of scratches is greater than or equal to the preset scratch threshold, it indicates that adjusting the baseline value of the suspected scratch parameter has little impact on the scratch situation. This suggests that the suspected scratch parameter is likely unrelated to the parameter causing the scratches on the glass substrate, and therefore, the scratch-related parameter is not identified as a suspected scratch parameter. This method allows for convenient identification of scratch-related parameters.
[0080] In an optional embodiment of the present invention, after determining that the scratch-related parameters are suspected scratch parameters, the method further includes:
[0081] The mobile device is controlled to move the first verification glass substrate for verification based on the test parameter value corresponding to the scratch-related parameters.
[0082] The verification parameter value is obtained by adjusting the test parameter value corresponding to the scratch-related parameters.
[0083] The mobile device is controlled to move the second verification glass substrate used for verification based on the verification parameter value.
[0084] The first and second verification glass substrates are checked for scratches, and the optimal scratch parameter values are determined based on the scratch condition.
[0085] Among them, the verification parameter value refers to the parameter value that verifies whether the scratch-related parameter is related to the scratch condition. It is obtained by adjusting the test parameter value corresponding to the scratch-related parameter through preset rules. The optimal scratch parameter value is the parameter value that can make the glass substrate free of scratches.
[0086] When the mobile device moves the test glass substrate based on the test parameter value corresponding to the scratch-related parameter, the scratch condition of the test glass substrate is significantly improved. To verify whether the scratch-related parameter is indeed a parameter that affects scratches, the mobile device is controlled to move the first verification glass substrate used for verification based on the test parameter value corresponding to the scratch-related parameter. This allows the determination of whether the scratch-related parameter is indeed a parameter that affects scratches based on the scratch condition of the first verification glass substrate. Furthermore, to find the optimal scratch parameter value corresponding to the scratch-related parameter, the test parameter value corresponding to the scratch-related parameter is adjusted to obtain a verification parameter value. The mobile device is then controlled to move the second verification glass substrate used for verification based on the verification parameter value. Thus, based on the scratch conditions of the first and second verification glass substrates, it is possible to verify whether the scratch-related parameter is the core factor causing scratches on the glass substrate. At the same time, it is possible to determine the specific parameter value that can improve the scratch condition of the glass substrate the most among the parameter values corresponding to the scratch-related parameters. That is, based on the scratch conditions of the first verification glass substrate and the second verification glass substrate, the optimal parameter value corresponding to the scratch-related parameters can be determined, so that the glass substrate is less prone to scratches and the product qualification rate is improved.
[0087] Based on the above embodiments, determining the optimal scratch parameter value based on the scratch condition includes:
[0088] When the first verification glass substrate is free of scratches and the second verification glass substrate is scratched, the test parameter value is determined as the optimal scratch parameter value.
[0089] When both the first verification glass substrate and the second verification glass substrate have scratches, the verification parameter values are adjusted again.
[0090] The mobile device is controlled to move the third verification glass substrate used for verification based on the adjusted verification parameter values.
[0091] Determine whether the number of scratches on the third verification glass substrate is not less than a preset scratch number threshold.
[0092] When the number of scratches on the third verification glass substrate is greater than or equal to a preset scratch number threshold, the step of readjusting the verification parameter value is performed.
[0093] When the number of scratches on the third verification glass substrate is less than a preset scratch number threshold or there are no scratches, the adjusted verification parameter value corresponding to the third verification glass substrate having fewer scratches than the preset scratch threshold or no scratches is determined as the optimal scratch parameter value.
[0094] When the first verification glass substrate is free of scratches while the second verification glass substrate is scratched, it indicates that the glass substrate will not be scratched when the mobile device moves the glass substrate based on the test parameter value. Therefore, the test parameter value can be determined as the optimal parameter value for scratching, making the glass substrate less prone to scratches and improving the product qualification rate.
[0095] The third verification glass substrate refers to the glass substrate used to verify whether the adjusted verification parameter values will cause scratches. When both the first and second verification glass substrates have scratches, it indicates that the test parameter values and verification parameter values corresponding to the scratch-related parameters will cause scratches on the glass substrate. Therefore, the verification parameter values corresponding to the scratch-related parameters are continuously adjusted again, and then the third verification glass substrate is tested. If the number of scratches on the third verification glass substrate is greater than or equal to a preset scratch number threshold, it indicates that the verification parameter values will still cause severe scratches on the glass substrate. At this time, the step of readjusting the verification parameter values is executed again, thereby controlling the mobile device to move the third verification glass substrate used for verification based on the adjusted verification parameter values, so as to continuously adjust the verification parameter values. When the number of scratches on the third verification glass substrate is less than the preset scratch number threshold or there are no scratches, the adjusted verification parameter values corresponding to the third verification glass substrate having scratches less than the preset scratch number threshold or no scratches are determined as the optimal scratch parameter values. Thus, the optimal parameter values corresponding to the scratch-related parameters at this time can make the glass substrate less prone to scratches, and the product qualification rate is improved.
[0096] Example 2
[0097] Figure 4 This is a flowchart of a scratch analysis method for a glass substrate provided in Embodiment 2 of the present invention. This embodiment is an improvement upon Embodiment 1, and optionally, the scratch features include scratch angle and scratch location. Determining the scratch features of multiple defective glass substrates with scratches includes: establishing a glass substrate image; marking all scratches on the multiple defective glass substrates in the glass substrate image; and performing angle and position analysis on the multiple scratches in the glass substrate image to obtain the scratch angle and scratch location. Based on this, as... Figure 4 As shown, the scratch analysis method for this glass substrate includes:
[0098] S210. Create an image of the glass substrate.
[0099] The glass substrate image is an image created by proportionally enlarging, reducing, or keeping the dimensions of the actual glass substrate unchanged. Since the glass substrate often needs to be divided into multiple smaller pieces during subsequent processing, regions can be defined in the glass substrate image.
[0100] S220. Mark all scratches on the defective glass substrates in the glass substrate image.
[0101] The scratches on different defective glass substrates are located in different places. By marking the scratches of multiple defective glass substrates in the same glass substrate image, it is easier to organize and analyze the scratches.
[0102] S230. Analyze the angle and position of multiple scratches in the glass substrate image to obtain the scratch angle and scratch position.
[0103] By analyzing the angles and positions of multiple scratches in the glass substrate image, the scratch angles and positions of different scratches can be determined. This allows us to determine the probability of occurrence of different scratch angles and the probability of occurrence of different scratch positions, thus obtaining the scratch angles and scratch positions.
[0104] Specifically, marking the scratches of the multiple defective glass substrates in the glass substrate image includes:
[0105] Establish a glass substrate coordinate system on the glass substrate image.
[0106] The coordinates of the scratched end in the coordinate system of the glass substrate are determined.
[0107] Accordingly, the step of analyzing the angle and position of multiple scratches in the glass substrate image to obtain the scratch angle and scratch position includes:
[0108] The scratch angle and location are determined based on the coordinate values of the scratch.
[0109] The glass substrate coordinate system can be established by using the two mutually perpendicular sides of the glass substrate as the X-axis and Y-axis, respectively.
[0110] Different scratches are located at different positions on the glass substrate, and therefore have different coordinate values in the glass substrate coordinate system. Thus, it is possible to calibrate the coordinate values of different scratches in the glass substrate coordinate system.
[0111] Furthermore, scratches are typically lines with two ends. The coordinates of these two ends can be mapped onto the glass substrate coordinate system. Based on these coordinate values, the scratch angle and position on the glass substrate coordinate system can be easily determined. In other words, the scratch angle and position on the glass substrate can be readily determined from the scratch's coordinate values.
[0112] S240. Based on the scratch angle and the scratch location, a suspected scratch parameter is determined, wherein the mobile device is provided with multiple movement parameters, and the mobile device moves the glass substrate based on the multiple movement parameters, and the suspected scratch parameter includes at least one of the multiple movement parameters.
[0113] S250. Adjust the baseline value of the suspected scratch parameter, and obtain the test parameter value based on the adjusted baseline value.
[0114] S260, Control the mobile device to move the test glass substrate used for testing based on the test parameter values.
[0115] S270. Detect whether there are scratches on the test glass substrate, and determine scratch-related parameters based on the scratch situation, wherein the scratch-related parameters refer to the movement parameters that are related to causing scratches on the glass substrate.
[0116] In an optional embodiment of the present invention, the movement parameter includes a Y-axis rotation angle, wherein the Y-axis rotation angle refers to the angle by which the glass substrate rotates along the Y-axis when the mobile device moves the glass substrate. The Y-axis rotation angle is... Figure 1 Ry in the image, the glass substrate image includes a central region, and the determination of suspected scratch parameters based on the scratch features includes:
[0117] When the scratch angle of a scratch greater than a first preset threshold on a plurality of defective glass substrates is within a preset angle range and the scratch position of a scratch greater than a second preset threshold in the glass substrate image is in the middle region, the suspected scratch parameters are determined to include the Y-axis rotation angle, wherein the preset angle range is greater than or equal to 80 degrees and less than 100 degrees.
[0118] The Y-axis rotation angle refers to the angle at which the glass substrate rotates along the Y-axis when the mobile device moves the glass substrate. The middle region is the area near the center of the glass substrate image, and this region can be defined as needed. When the scratch angle of scratches greater than a first preset threshold on multiple defective glass substrates is within a preset angle range, and the scratch position of scratches greater than a second preset threshold in the glass substrate image is in the middle region, and the preset angle range is greater than or equal to 80 degrees and less than 100 degrees, it indicates that the probability of scratches occurring in the middle position of the glass substrate, which is close to the vertical direction, is relatively high. This suggests that the scratches on the glass substrate were likely caused by the mobile device touching another glass substrate while moving the glass substrate, so the suspected scratch parameter is likely the Y-axis rotation angle.
[0119] Based on the above embodiments, the suspected scratch parameters include the Y-axis rotation angle, the parameter reference value includes the Y-axis rotation angle reference value, and the test parameter value includes the Y-axis rotation angle test parameter value.
[0120] The parameter baseline value for adjusting the suspected scratch parameters is used to obtain the test parameter value, including:
[0121] The Y-axis rotation angle reference value is reduced by a preset angle value, and the Y-axis rotation angle test parameter value is obtained after the reduction.
[0122] Accordingly, controlling the mobile device to move the test glass substrate used for testing based on the test parameter values includes:
[0123] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value.
[0124] The Y-axis rotation angle reference value is the angle at which the glass substrate on the placement platform rotates along the Y-axis during the conventional glass substrate processing steps, driven by the mobile device. When moving the glass substrate, if the angle of rotation along the Y-axis is too large, it can easily scratch the glass substrate stacked on top of it. By reducing the Y-axis rotation angle reference value by a preset angle to obtain the Y-axis rotation angle test parameter value, the Y-axis rotation angle test parameter value is theoretically less likely to cause scratches on the glass substrate than the Y-axis rotation angle reference value. Therefore, when subsequently controlling the mobile device to move the test glass substrate based on the Y-axis rotation angle test parameter value, it can detect whether the test glass substrate has scratches, and based on the scratch condition, it can easily determine whether the Y-axis rotation angle value is a scratch-related parameter.
[0125] Based on the above embodiments, the movement parameter further includes an X-axis movement value, which includes an X-axis movement reference value.
[0126] Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes:
[0127] The X-axis movement reference value is reduced by a first preset value, and the X-axis movement test parameter value is obtained after the reduction.
[0128] The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes:
[0129] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the X-axis movement test parameter value.
[0130] The X-axis movement value is the value of the movement along the X-axis when the mobile device moves the glass substrate. The X-axis movement reference value is the amount of movement along the X-axis by the mobile device driving the glass substrate on the placement platform during the conventional glass substrate processing steps. Since the Y-axis rotation angle value implies rotation along the Y-axis, if the glass substrate moves too far along the X-axis, it can easily scratch adjacent rows of glass substrates. By reducing the X-axis movement reference value by a first preset value to obtain the X-axis movement test parameter value, the X-axis movement test parameter value is theoretically less likely to cause scratches on the glass substrate than the X-axis movement reference value. To avoid inaccurate testing, the X-axis movement reference value is reduced by a first preset value to obtain the X-axis movement test parameter value. The mobile device is controlled to move the test glass substrate based on the Y-axis rotation angle test parameter value and the X-axis movement test parameter value, preventing the X-axis movement value from affecting the test.
[0131] Based on the above embodiments, the movement parameters further include Z-axis movement values, which include Z-axis movement reference values.
[0132] Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes:
[0133] The Z-axis movement reference value is increased by a second preset value, and the Z-axis movement test parameter value is obtained after the increase.
[0134] The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes:
[0135] The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the Z-axis movement test parameter value.
[0136] The Z-axis movement value is the value of the movement along the Z-axis when the mobile device moves the glass substrate. The Z-axis movement reference value is the amount of movement along the Z-axis by the mobile device driving the glass substrate on the placement platform during the conventional glass substrate processing steps. Since the Y-axis rotation angle value implies that the Y-axis needs to rotate, if the distance the glass substrate moves along the Z-axis is too small, it is easy to scratch the glass substrate stacked on top of it. By adding a second preset value to the Z-axis movement reference value to obtain the Z-axis movement test parameter value, the Z-axis movement test parameter value is theoretically less likely to cause scratches on the glass substrate than the Z-axis movement reference value. To avoid inaccurate testing, the Z-axis movement reference value is added to the second preset value to obtain the Z-axis movement test parameter value. The mobile device is controlled to move the test glass substrate based on the Y-axis rotation angle test parameter value and the Z-axis movement test parameter value, preventing the Z-axis movement value from affecting the test.
[0137] Optionally, in practical applications, the X-axis movement reference value can be reduced by a first preset value to obtain the X-axis movement test parameter value, while the Z-axis movement reference value can be increased by a second preset value to obtain the Z-axis movement test parameter value, thus preventing the X-axis movement value and the Z-axis movement value from affecting the test.
[0138] Example 3
[0139] Embodiment 3 of this invention provides a specific application example of a scratch analysis method for glass substrates. In this embodiment, the X-axis movement reference value is 5, the Z-axis movement reference value is 20, and the Y-axis rotation angle reference value is -1°. When the mobile device moves the glass substrate according to the X-axis movement reference value, Z-axis movement reference value, and Y-axis rotation angle reference value, a defective glass substrate will be generated. At this time, a glass substrate image is established, and a glass substrate coordinate system is established on the glass substrate image. The coordinate values of the scratches in the glass substrate coordinate system are calibrated, and the scratch analysis results can be obtained as follows. Figure 5 The image of the glass substrate shown has multiple scratches marked as black dots based on coordinate values. This is because the glass substrate will be cut into smaller pieces in subsequent processes to manufacture different panels. Figure 5 The boxes in the image represent the segmented areas. These boxes are irrelevant to this case and have no impact on the scratch analysis; they are merely illustrative. Based on the distribution of multiple scratches in the glass substrate image, it can be seen that most scratches are located in the central area. Then, based on the coordinate values of the scratches, the scratch angles can be determined, resulting in Table 1.
[0140] Table 1: Distribution of Scratch Angle Values
[0141] Scratch angle value 0°-79° 80°-89° 90° 91°-99° 100°-110° percentage 5.9% 51.0% 9.8% 29.4% 3.9%
[0142] As shown in Table 1, most scratches are vertical. This means that the coordinates of the scratches can determine the location and angle of multiple scratches, thus revealing their distribution. It can be observed that scratches are more likely to occur vertically in the middle region of the glass substrate. Scratches meeting the conditions of a first preset threshold having scratch angles within a preset angle range and a second preset threshold having scratches located in the middle region, where the preset angle range is greater than or equal to 80 degrees and less than 100 degrees, are identified as having Y-axis rotation angles.
[0143] Because the Y-axis rotation angle value implies that the Y-axis needs to rotate, if the X-axis movement value is too large, the glass substrate being moved may collide with other glass substrates in the same row; if the Z-axis movement value is too small, the glass substrate being moved may collide with stacked glass substrates. To avoid inaccurate testing, the X-axis movement reference value is lowered by a first preset value to obtain the X-axis movement test parameter value, while the Z-axis movement reference value is increased by a second preset value to obtain the Z-axis movement test parameter value, preventing the X-axis and Z-axis movement values from affecting the test. Adjusting the X-axis movement reference value, Z-axis movement reference value, and Y-axis rotation angle reference value in different ways can yield multiple sets of test parameter values. Each set of test parameter values includes X-axis movement test parameter values, Z-axis movement test parameter values, and Y-axis rotation angle test parameter values. In this embodiment, two sets of test parameter values are obtained, and the scratch condition of the test glass substrate after the mobile device moves the test glass substrate based on the test parameter values can be obtained. As shown in Table 2, the two sets of test parameter values are the first and second sets in Table 2.
[0144] Table 2: Relationship between X-axis movement test parameter values, Z-axis movement test parameter values, Y-axis rotation angle test parameter values, and scratch condition.
[0145]
[0146] Table 2 shows that when the Y-axis rotation angle test parameter value is -0.4°, there are no scratches on the glass substrate, and when the Y-axis rotation angle test parameter value is -0.5°, there are fewer scratches on the glass substrate. This indicates that the Y-axis rotation angle should be a scratch-related parameter.
[0147] Since the glass substrate showed no scratches when the Y-axis rotation angle test parameter value was 0.4°, this parameter value was verified to determine if it was the optimal value. The following two sets of verification data were obtained, as shown in Table 3. The third set of data in Table 3 represents the parameter values for moving the first verification glass substrate, and the fourth set of data in Table 3 represents the parameter values for moving the second verification glass substrate.
[0148] Table 3: Relationship between X-axis movement test parameter values, Z-axis movement test parameter values, Y-axis rotation angle test parameter values, and scratch condition.
[0149]
[0150] As shown in Table 3, the first verification glass substrate has no scratches while the second verification glass substrate has scratches. Therefore, the optimal parameter value for the Y-axis rotation angle is -0.4°.
[0151] As can be seen from the above specific application cases, the scratch analysis method for glass substrates disclosed in this application can accurately analyze the parameters that cause scratches on the glass substrate, make an accurate judgment on the cause of scratches on the glass substrate, and then determine the optimal parameter value corresponding to the scratch-related parameters, so that the glass substrate is less prone to scratches and the product qualification rate is improved.
[0152] It should be understood that the various forms of processes shown above can be used, with steps reordered, added, or deleted. For example, the steps described in this invention can be executed in parallel, sequentially, or in different orders, as long as the desired result of the technical solution of this invention can be achieved, and no limitation is imposed herein.
[0153] The specific embodiments described above do not constitute a limitation on the scope of protection of this invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations, and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this invention should be included within the scope of protection of this invention.
Claims
1. A method for scratch analysis of a glass substrate, characterized in that, include: The scratch characteristics of multiple defective glass substrates with scratches were identified. Based on the scratch characteristics, suspected scratch parameters are determined, wherein the mobile device is provided with multiple movement parameters, and the mobile device moves the glass substrate based on the multiple movement parameters, and the suspected scratch parameters include at least one of the multiple movement parameters. Adjust the baseline value of the suspected scratch parameter, and obtain the test parameter value based on the adjusted baseline value; The mobile device is controlled to move the test glass substrate used for testing based on the test parameter values; The test glass substrate is checked for scratches, and scratch-related parameters are determined based on the scratches. The scratch-related parameters refer to the movement parameters that are associated with the scratches on the glass substrate. The movement parameters include the amount of movement in the X-axis direction, Y-axis direction, and Z-axis direction, as well as the rotation angles in the X-axis direction, Y-axis direction, and Z-axis direction. The test parameter value is obtained by increasing or decreasing the parameter baseline value, and is used to test whether the suspected scratch parameter is the movement parameter that causes scratches on the glass substrate and causes defects. The determination of scratch-related parameters based on scratch conditions includes: When the test glass substrate has scratches and the number of scratches is less than the preset scratch threshold, or when the test glass substrate has no scratches, the scratch-related parameters are determined to be suspected scratch parameters. When the test glass substrate has scratches and the number of scratches is greater than or equal to the preset scratch threshold, the scratch-related parameters are determined not to be suspected scratch parameters. The scratch features include the scratch angle and the scratch location.
2. The scratch analysis method for glass substrates according to claim 1, characterized in that, After determining that the scratch-related parameters are suspected scratch parameters, the process also includes: The mobile device is controlled to move the first verification glass substrate for verification based on the test parameter value corresponding to the scratch-related parameters; The verification parameter value is obtained by adjusting the test parameter value corresponding to the scratch-related parameters; The mobile device is controlled to move the second verification glass substrate used for verification based on the verification parameter value; The first and second verification glass substrates are checked for scratches, and the optimal scratch parameter values are determined based on the scratch condition.
3. The scratch analysis method for glass substrates according to claim 2, characterized in that, Determining the optimal scratch parameter values based on the scratch condition includes: When the first verification glass substrate is free of scratches and the second verification glass substrate is scratched, the test parameter value is determined as the optimal scratch parameter value. When both the first verification glass substrate and the second verification glass substrate have scratches, the verification parameter values are adjusted again. The mobile device is controlled to move the third verification glass substrate used for verification based on the adjusted verification parameter values; Determine whether the number of scratches on the third verification glass substrate is not less than a preset scratch number threshold; When the number of scratches on the third verification glass substrate is greater than or equal to the preset scratch number threshold, the step of readjusting the verification parameter value is executed. When the number of scratches on the third verification glass substrate is less than a preset scratch number threshold or there are no scratches, the adjusted verification parameter value corresponding to the third verification glass substrate having fewer scratches than the preset scratch threshold or no scratches is determined as the optimal scratch parameter value.
4. The scratch analysis method for glass substrates according to any one of claims 1 to 3, characterized in that, The determination of scratch characteristics of multiple defective glass substrates with scratches includes: Create an image of the glass substrate; Scratches on multiple defective glass substrates are marked in the glass substrate image; Angle and position analysis was performed on multiple scratches in the glass substrate image to obtain the scratch angle and scratch position.
5. The scratch analysis method for glass substrates according to claim 4, characterized in that, The step of marking the scratches of the multiple defective glass substrates in the glass substrate image includes: Establish a glass substrate coordinate system on the glass substrate image; The coordinates of the end of the scratch in the coordinate system of the glass substrate are determined; Accordingly, the step of analyzing the angle and position of multiple scratches in the glass substrate image to obtain the scratch angle and scratch position includes: The scratch angle and location are determined based on the coordinate values of the scratch.
6. The scratch analysis method for glass substrates according to claim 4, characterized in that, The movement parameters include a Y-axis rotation angle, wherein the Y-axis rotation angle refers to the angle by which the glass substrate rotates along the Y-axis when the mobile device moves the glass substrate. The glass substrate image includes a central region. Determining suspected scratch parameters based on the scratch features includes: When the scratch angle of a scratch greater than a first preset threshold on a plurality of defective glass substrates is within a preset angle range and the scratch position of a scratch greater than a second preset threshold in the glass substrate image is in the middle region, the suspected scratch parameters include the Y-axis rotation angle, wherein the preset angle range is greater than or equal to 80 degrees and less than 100 degrees.
7. The scratch analysis method for glass substrates according to claim 6, characterized in that, The suspected scratch parameters include the Y-axis rotation angle, the parameter reference value includes the Y-axis rotation angle reference value, and the test parameter value includes the Y-axis rotation angle test parameter value. The parameter baseline value for adjusting the suspected scratch parameters is used to obtain the test parameter value, including: The Y-axis rotation angle reference value is reduced by a preset angle value, and the Y-axis rotation angle test parameter value is obtained after the reduction. Accordingly, controlling the mobile device to move the test glass substrate used for testing based on the test parameter values includes: The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value.
8. The scratch analysis method for glass substrates according to claim 7, characterized in that, The movement parameters also include X-axis movement values, which include X-axis movement reference values; Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes: The X-axis movement reference value is reduced by a first preset value, and the X-axis movement test parameter value is obtained after the reduction. The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes: The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the X-axis movement test parameter value.
9. The scratch analysis method for glass substrates according to claim 7, characterized in that, The movement parameters also include Z-axis movement values, which include Z-axis movement reference values; Before controlling the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value, the method further includes: The Z-axis movement reference value is increased by a second preset value, and the Z-axis movement test parameter value is obtained after the increase. The control of the mobile device to move the test glass substrate for testing based on the Y-axis rotation angle test parameter value includes: The mobile device is controlled to move the test glass substrate used for testing based on the Y-axis rotation angle test parameter value and the Z-axis movement test parameter value.
Citation Information
Patent Citations
Method for detecting mechanical scratching condition of silicon wafers
CN102130030A