Atomic force microscope laser head applicable to near-field optics

Abstract

The application discloses an atomic force microscope laser head capable of being applied to near-field optics, and belongs to the optical instrument field. A scanner fixing disc is installed on an atomic force head assembly, a mirror and a probe assembly are installed on the scanner fixing disc, the scanner fixing disc is provided with an optical path channel, the mirror is located in the optical path channel, a reflecting surface of the mirror faces the probe, the atomic force transmitter, the mirror and the probe are located on the same straight line with the optical path channel, light emitted by the atomic force transmitter is reflected to the probe through the mirror and is reflected to an atomic force receiver by the probe, a reflecting assembly reflects laser emitted by a laser transmitter of a near-field optical device to the probe, the probe reflects the laser and the reflected laser is reflected to a laser receiver through the reflecting assembly. Through the above design, the laser head has the functions of the near-field optical microscope and the atomic force microscope simultaneously, only one probe is needed, and the functions of the near-field optical microscope and the atomic force microscope can be used separately.

Description

TECHNICAL FIELD

[0001] The present application relates to the field of optical instruments, in particular to an atomic force microscope laser head capable of being applied to near-field optics. BACKGROUND

[0002] Near-field optics is an effective optical means to break the diffraction limit, and it is a new cross-discipline in the field of optics with the development of science and technology towards small size and low dimension, and its research object is the optical phenomenon within a wavelength (several nanometers) from the surface of an object. Near-field optical microscopy is a new type of super-high resolution microscopic imaging technology, and it is the product of the combination of probe technology and optical microscopic technology, and it is an important part of near-field optics. Since the near-field optical microscope can overcome the low resolution of the traditional optical microscope and the damage to biological samples caused by the scanning electron microscope and the scanning tunneling microscope, it has been more and more widely used, especially in the fields of biomedicine, nanomaterials and microelectronics, and it has become an optical means to explore the mystery of biological macromolecules, and it has brought a powerful experimental weapon to biologists.

[0003] The atomic force microscope is an analytical instrument that can be used to study the surface structure of solid materials including insulators. It studies the surface structure and properties of matter by detecting the extremely weak interatomic interaction force between the surface of the sample to be measured and a micro force sensitive element. One end of a pair of micro cantilevers extremely sensitive to weak force is fixed, and the other end of the micro needle tip approaches the sample, at which time it will interact with it, and the action force will cause the micro cantilever to deform or change the state of motion. When scanning the sample, the changes are detected by the sensor, so that the force distribution information can be obtained, and the surface topography structure information and surface roughness information can be obtained with nanometer resolution.

[0004] The existing sample needs to use the near-field optical microscope and the atomic force microscope respectively when being analyzed, so as to observe the composition elements of the sample and the surface topography characteristics of the sample, which causes the user to transfer the sample between the near-field optical microscope and the atomic force microscope, and the use is inconvenient. SUMMARY

[0005] In order to overcome the shortcomings of the prior art, one of the purposes of the present application is to provide an atomic force microscope laser head capable of being applied to near-field optics, which has the functions of the near-field optical microscope and the atomic force microscope, and the two functions can be used alone or simultaneously.

[0006] One of the purposes of the present application is achieved by adopting the following technical solutions:

[0007] The application discloses an atomic force microscope laser head capable of being applied to near field optics, which comprises an atomic force head assembly, a scanner fixing disc, a mirror, a probe assembly and a reflection assembly, wherein the atomic force head assembly comprises an atomic force transmitter and an atomic force receiver; the scanner fixing disc is installed on the atomic force head assembly; the mirror and the probe assembly are installed on the scanner fixing disc; the probe assembly comprises a probe; the scanner fixing disc is provided with an optical path channel; the mirror is located in the optical path channel and has a reflecting surface facing the probe; the atomic force transmitter, the mirror and the probe are located on the same line with the optical path channel; light emitted by the atomic force transmitter is reflected to the probe through the mirror and then reflected to the atomic force receiver by the probe; the reflection assembly reflects laser emitted by a laser transmitter of a near field optical device to the probe; the probe reflects the laser and the reflected laser is reflected to a laser receiver through the reflection assembly.

[0008] Further, the reflection assembly is a section mirror assembly, which comprises a first section mirror and a second section mirror, and the probe is located between the first section mirror and the second section mirror.

[0009] Further, the first section mirror is provided with two first reflecting surfaces, and the two first reflecting surfaces respectively face the laser transmitter and the laser receiver.

[0010] Further, the second section mirror is provided with a second reflecting surface, and the second reflecting surface is arc-shaped.

[0011] Further, the number of the second section mirrors is two, and the two second section mirrors are symmetrical relative to the probe.

[0012] Further, the near field optical device is an objective lens.

[0013] Further, the scanner fixing disc is provided with a window, and the window is in communication with the optical path channel.

[0014] Further, the mirror is obliquely arranged.

[0015] Further, the probe assembly is adsorbed on the scanner fixing disc by a magnet.

[0016] Compared with the prior art, the application can be applied to the scanner fixed disc of the near-field optical atomic force microscope laser head, the mirror and the probe assembly are installed on the scanner fixed disc, the probe assembly comprises a probe, the scanner fixed disc is provided with an optical path channel, the mirror is located in the optical path channel, a reflecting surface of the mirror faces the probe, the atomic force transmitter, the mirror and the probe are located on the same straight line, light emitted by the atomic force transmitter is reflected to the probe through the mirror and is reflected to the atomic force receiver by the probe, the reflecting assembly reflects the laser emitted by the near-field optical device laser transmitter to the probe, the probe reflects the laser and the reflected laser is reflected to the laser receiver through the reflecting assembly, through the above design, the near-field optical atomic force microscope laser head can be applied to the near-field optical atomic force microscope laser head and has the functions of the near-field optical microscope and the atomic force microscope, only one probe is needed, and the functions of the near-field optical microscope and the atomic force microscope can be used separately. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application.

[0018] Figure 2 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application. Figure 1 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application.

[0019] Figure 3 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application. Figure 1 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application.

[0020] Figure 4 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application. Figure 1 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application.

[0021] Figure 5 It is a structure diagram of the near-field optical atomic force microscope laser head capable of being applied to the near-field optical atomic force microscope laser head in the first embodiment of the application.

[0022] In the drawing: 10, atomic force head assembly; 11, atomic force transmitter; 12, atomic force receiver; 20, scanner fixed disc; 21, optical path channel; 22, fixed hole; 23, mounting portion; 24, window; 25, fixed portion; 30, mirror; 40, probe assembly; 41, probe; 50, reflecting assembly; 51, first section mirror; 510, first reflecting surface; 52, second section mirror; 520, second reflecting surface; 100, industrial camera; 200, near-field optical device; 201, laser receiver; 202, laser transmitter. DETAILED DESCRIPTION

[0023] The technical solutions in the embodiments of the present application will be described clearly and completely below with reference to the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all the other embodiments obtained by those skilled in the art without creative work fall within the scope of the present application.

[0024] It should be noted that when a component is referred to as being "fixed" to another component, it can be directly on the other component or can be fixed thereto with another intermediate component. When a component is referred to as being "connected" to another component, it can be directly connected to the other component or can be connected thereto with another intermediate component. When a component is referred to as being "disposed" on another component, it can be directly disposed on the other component or can be disposed thereon with another intermediate component. The terms "vertical", "horizontal", "left", "right", and the like used herein are for illustrative purposes only.

[0025] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs. The terminology used in the description herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the application. As used herein, the term "and / or" includes any and all combinations of one or more of the associated listed items.

[0026] Figures 1 to 4 For a first embodiment of the present application, in the first embodiment, the present application can be applied to a near-field optical atomic force microscope laser head including an atomic force head assembly 10, a scanner fixing disc 20, a mirror 30, a probe assembly 40, and a reflection assembly 50.

[0027] The atomic force head assembly 10 includes an atomic force transmitter 11 (LS) and an atomic force receiver 12 (PSD). The atomic force transmitter 11 is used to transmit light used by an atomic force microscope, and the atomic force receiver 12 is used to receive light reflected by the probe 41.

[0028] The scanner fixing disc 20 is provided with a light path channel 21, a fixing hole 22, a mounting portion 23, a window 24 and a fixing portion 25. The light path channel 21 is linear and penetrates through the scanner fixing disc 20. The fixing hole 22 is located at the upper end of the scanner fixing disc 20, and the fixing hole 22 is provided in multiple numbers and uniformly arranged at the edge of the scanner fixing disc 20. The scanner fixing disc 20 is fixed to the atomic force head assembly 10 by means of the bolts extending into the fixing hole 22 and cooperating with the atomic force head assembly 10. The mounting portion 23 is formed by the notch on the side wall of the scanner fixing disc 20, and the side wall of the notch is inclined, so that the reflecting mirror 30 can be inclined and fixed to the mounting portion 23. The mounting portion 23 is located on the light path channel 21, so that the reflecting mirror 30 is located in the light path channel 21. The window 24 is arranged on the side wall of the scanner fixing disc 20, and the window 24 is in communication with the light path channel 21 and is arranged opposite to the mounting portion 23. The fixing portion 25 is located at the bottom of the scanner fixing disc 20 and at the end of the light path channel 21.

[0029] The reflecting mirror 30 is fixed to the mounting portion 23 of the scanner fixing disc 20. Specifically, the reflecting mirror 30 is fixed to the mounting portion 23 by means of glue, and the reflecting surface of the reflecting mirror 30 faces the probe assembly 40.

[0030] The probe assembly 40 includes a probe 41, and the probe 41 is located in the light path channel 21. The probe assembly 40 is adsorbed to the corresponding position of the scanner fixing disc 20 by means of the internal magnet.

[0031] The reflecting assembly 50 is a section mirror assembly in this embodiment, and the section mirror assembly includes a first section mirror 51 and a second section mirror 52. The first section mirror 51 includes two first reflecting surfaces 510, and the two first reflecting surfaces 510 are oppositely arranged. Specifically, in this embodiment, the first section mirror 51 has an isosceles trapezoidal section, and the two first reflecting surfaces 510 are respectively two waist portions of the isosceles trapezoidal section. The second section mirror 52 includes a second reflecting surface 520, and the second reflecting surface 520 is arc-shaped. Specifically, the number of the second section mirror 52 is two, and the two second section mirrors 52 are mounted to the scanner fixing disc 20. The two second section mirrors 52 are symmetrical with respect to the probe 41. Specifically, the probe 41 is located between the first section mirror 51 and the second section mirror 52.

[0032] When the atomic force microscope laser head capable of being applied to near-field optics is used, when the function of the atomic force microscope is used, the atomic force transmitter 11 emits light, the light enters the light path channel 21 of the scanner fixing disc 20, passes through the reflecting mirror 30, is shot on the probe 41, the probe 41 reflects the light to the atomic force receiver 12, the atomic force receiver 12 analyzes the reflected light, thereby obtaining the test result of the sample, and the external industrial camera 100 (CCD) irradiates white light to the reflecting mirror 30, the white light is reflected to the probe 41 of the probe assembly 40 through the reflecting mirror 30, is reflected back to the industrial camera 100 again, and the user can observe conveniently.

[0033] When the function of the near-field optical microscope is used, the atomic force microscope laser head capable of being applied to the near-field optics is used in connection with the terahertz device, specifically, the atomic force microscope laser head capable of being applied to the near-field optics is located in the near-field optical device 200, the near-field optical device 200 comprises a laser receiver 201 and a laser emitter 202, and the first profile mirror 51 of the reflection assembly 50 is located between the laser receiver 201 and the laser emitter 202. When the function of the near-field optical microscope is used, the laser emitted by the laser emitter 202 is reflected to the first reflection surface 510, the first reflection surface 510 reflects the laser to the second reflection surface 520 of the second profile mirror 52, and the second reflection surface 520 reflects the laser to the probe 41 of the probe assembly 40. The probe 41 reflects the laser to the second reflection surface 520, the second reflection surface 520 reflects the laser to the first reflection surface 510, and the first reflection surface 510 reflects the laser to the laser receiver 201. The laser receiver 201 analyzes the reflected laser of the probe 41, and observes the sample composition elements and the sample surface topography.

[0034] The function of the atomic force microscope and the function of the near-field optical microscope of the atomic force microscope laser head capable of being applied to the near-field optics in the present application can be used simultaneously or separately.

[0035] Please continue to refer to Figure 5 For the second embodiment of the present application, in the second embodiment, the structure of the atomic force microscope laser head capable of being applied to the near-field optics is substantially the same as that of the first embodiment, and the difference lies in that the reflection assembly 50 is an objective lens, and the objective lens is a large numerical aperture objective lens, which can be infinitely close to the sample, so that higher quality test results are obtained. At this time, the atomic force microscope laser head capable of being applied to the near-field optics is used in connection with the SNOM device.

[0036] The atomic force microscope laser head capable of being applied to the near-field optics has the functions of the near-field optical microscope and the atomic force microscope simultaneously, only one probe 41 is needed, and the functions of the near-field optical microscope and the atomic force microscope can be used separately.

[0037] The above embodiments only express several embodiments of the present application, and the description is more specific and detailed, but it cannot be understood as a limitation on the scope of the patent. It should be noted that for ordinary skilled persons in the art, without departing from the concept of the present application, a number of modifications and improvements can be made, which are equivalent modifications and evolutions of the above embodiments according to the essential technology of the present application, and these all belong to the protection scope of the present application.

Claims

1. A laser head for an atomic force microscope capable of near-field optics, comprising an atomic force head assembly, wherein the atomic force head assembly includes an atomic force emitter and an atomic force receiver, characterized in that: The atomic force microscope laser head applicable to near-field optics further includes a scanner mounting plate, a mirror, a probe assembly, and a reflection assembly. The scanner mounting plate is mounted on the atomic force microscope head assembly. The mirror and the probe assembly are mounted on the scanner mounting plate. The probe assembly includes a probe. The scanner mounting plate has an optical path channel. The mirror is located in the optical path channel, with its reflecting surface facing the probe. The atomic force emitter, the mirror, and the probe are aligned with the optical path channel. Light emitted by the atomic force emitter is reflected by the mirror to the probe and then to the atomic force receiver. The reflecting component is a profiled mirror assembly, which includes a first profiled mirror and a second profiled mirror. The probe is located between the first profiled mirror and the second profiled mirror. The first profiled mirror includes two first reflecting surfaces, which are arranged opposite to each other. The cross-section of the first profiled mirror is an isosceles trapezoid, and the two first reflecting surfaces are the two sides of the isosceles trapezoid. The second profiled mirror includes a second reflecting surface, which is arc-shaped. There are two second profiled mirrors, which are symmetrical about the probe. The reflecting component reflects the laser emitted by the laser emitter of the near-field optical device to the probe. The probe reflects the laser and the reflected laser is reflected by the reflecting component to the laser receiver.

2. The atomic force microscope laser head applicable to near-field optics according to claim 1, characterized in that: The two first reflective surfaces face the laser emitter and the laser receiver, respectively.

3. The atomic force microscope laser head applicable to near-field optics according to claim 1, characterized in that: The near-field optical device is an objective lens.

4. The atomic force microscope laser head applicable to near-field optics according to claim 1, characterized in that: The scanner mounting plate has a window, which is connected to the optical path channel.

5. The atomic force microscope laser head applicable to near-field optics according to claim 1, characterized in that: The reflector is tilted.

6. The atomic force microscope laser head applicable to near-field optics according to claim 1, characterized in that: The probe assembly is attached to the scanner mounting plate by a magnet.

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