Cleaning device and cleaning method

Abstract

The embodiment of the present invention relates to the field of crystalline silicon production, and discloses a cleaning device and a cleaning method. In the present invention, the inner wall of the exhaust pipe of the exhaust system of the single crystal furnace is cleaned by a dust collection component, a driving device and a dust collection bucket, so as to timely absorb the cleaned oxide solids and prevent volatiles from drifting after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust pipe of the single crystal furnace; the movement of the base plate is driven by the lifting device, thereby driving the movement of the driving device and the dust collection component. When a mechanical device is used for cleaning, the force is controllable, and the effect of multiple cleanings can be guaranteed to be consistent; by using a cleaning device for cleaning, the personnel requirements for cleaning are saved, manpower is saved and the cleaning efficiency is improved.

Description

Technical Field

[0001] The embodiments of the present invention relate to the field of crystalline silicon production, and in particular to a cleaning device and a cleaning method. Background Art

[0002] The single crystal furnace is a crystal pulling device for producing single crystal silicon. When working, the gas composition in the furnace is one of the key factors affecting product quality. During the pulling process, a large amount of oxides will be generated in the single crystal furnace, and the oxides will be discharged to the outside of the furnace through the exhaust pipe of the exhaust system located on the bottom plate of the single crystal furnace. However, the oxides are easy to adhere to the inner wall of the exhaust pipe. When the oxides accumulate to a certain extent, the exhaust pipe will be blocked by the accumulated attached oxides, which is not conducive to the continued exhaust of the single crystal furnace, thereby reducing the quality of the silicon rod.

[0003] At present, for the cleaning of the exhaust duct of the single crystal furnace, the operators need to use small dredging tools such as brush heads and scrapers to manually clean the exhaust duct, which wastes manpower and has a poor working environment. In addition, there are situations where the cleaning effects are inconsistent after multiple cleanings. Summary of the invention

[0004] The purpose of the embodiments of the present invention is to provide a cleaning device and a cleaning method, which cleans the inner wall of the exhaust duct of the single crystal furnace exhaust system through a mechanical device, absorbs the cleaned oxide solids in time, and prevents volatiles from drifting after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust duct of the single crystal furnace; while saving manpower, the cleaning intensity can be controlled, and the effect of multiple cleanings is guaranteed to be consistent.

[0005] In order to solve the above technical problems, an embodiment of the present invention provides a cleaning device, including: a dust collection assembly, a driving device, a base plate, a lifting device, a mobile carrier and a dust bucket; the dust collection assembly is connected to the driving device and the dust bucket; the driving device is installed on the base plate, the base plate is connected to the top of the lifting device, and the lifting device is used to drive the movement of the driving device and the dust collection assembly through the base plate; the lifting device and the dust bucket are located on the mobile carrier.

[0006] An embodiment of the present invention further provides a cleaning method, which uses the above-mentioned cleaning device to clean the exhaust duct.

[0007] In an embodiment of the present invention, the inner wall of the exhaust duct of the single crystal furnace exhaust system is cleaned by a dust collection assembly, a driving device and a dust collecting bucket, so as to timely absorb the cleaned oxide solids and prevent volatiles from drifting away after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust duct of the single crystal furnace; the movement of the base plate is driven by a lifting device, thereby driving the movement of the driving device and the dust collection assembly. When a mechanical device is used for cleaning, the force is controllable, and the effect of multiple cleanings can be guaranteed to be consistent; by using cleaning equipment for cleaning, the need for personnel during cleaning is saved, manpower is saved and the cleaning efficiency is improved.

[0008] In addition, the dust collection assembly also includes: a brush head part, a downward extension part and a dust collection hose; the lower end of the downward extension part is connected to the brush head part, and the upper end of the downward extension part is connected to the driving device; the dust collection hose connects the downward extension part and the dust collection bucket. By setting the downward extension part, the brush head part can extend downward to the exhaust pipe at the bottom of the single crystal furnace to clean the inner wall of the exhaust pipe; the dust collection hose connects the downward extension part and the dust collection bucket, so that the impurities cleaned by the downward extension part can be sucked into the dust collection bucket in time during the cleaning process.

[0009] In addition, the downward extension part includes: a dust suction straight pipe and a rotating shaft running through the dust suction straight pipe; the rotating shaft connects the brush head part and the driving device; the dust suction straight pipe is connected to the dust suction hose. The driving device drives the rotating shaft to rotate, thereby driving the brush head to rotate and clean, which facilitates the downward cleaning work and makes the cleaning effect better.

[0010] In addition, the vacuum straight pipe also includes a vacuum pipe opening, which is a funnel-shaped pipe opening. By setting the vacuum pipe opening as a funnel-shaped pipe opening, the pipe opening coverage area is increased, and more cleaned impurities can be absorbed.

[0011] In addition, the brush head part includes: a straight pipe mouth brush head, a curved hose and a hose brush head, wherein the straight pipe mouth brush head is covered with a brush; the straight pipe mouth brush head is used to clean the straight pipe of the exhaust duct, and the curved hose and the hose brush head are used to clean the curved pipe of the exhaust duct. By providing the curved hose and the hose brush head, the cleaning area of ​​the cleaning device can be extended to the curved pipe of the exhaust duct; by providing the straight pipe brush head and the hose brush head, when cleaning the inner wall of the exhaust duct, the cleaning device can clean the straight pipe and the curved pipe of the exhaust duct at the same time, thereby enhancing the cleaning effect.

[0012] In addition, the base plate includes: a base plate limit slot and a base plate hydraulic device; wherein the base plate limit slot is used to limit the movable area of ​​the driving device; the base plate hydraulic device is connected to the driving device, and the hydraulic device controls the horizontal movement of the driving device. By arranging the hydraulic device and the limit slot on the base plate, the driving device can move laterally on the base plate, thereby driving the downward extension connected to the lower end of the driving device to move laterally, further realizing the mechanization and automation of the cleaning operation, thereby reducing the demand for manpower. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] One or more embodiments are exemplarily described by pictures in the corresponding drawings, and these exemplified descriptions do not constitute limitations on the embodiments. Elements with the same reference numerals in the drawings represent similar elements, and unless otherwise stated, the figures in the drawings do not constitute proportional limitations.

[0014] Figure 1 is an overall view of a cleaning device provided by an embodiment of the present invention;

[0015] Figure 2 is a plan view of the overall cleaning device provided by one embodiment of the present invention;

[0016] Figure 3 is a schematic diagram of a base plate portion of a cleaning device provided by an embodiment of the present invention;

[0017] Figure 4 is a schematic diagram of a downwardly extending portion of a cleaning device provided by an embodiment of the present invention;

[0018] Figure 5 is a schematic diagram of a brush head portion of a cleaning device provided by an embodiment of the present invention;

[0019] Figure 6 It is an operation flow chart of a cleaning method provided by one embodiment of the present invention.

[0020] In the figure: 1-dust suction assembly; 101-brush head part; 1011-straight pipe mouth brush head; 1012-bent hose; 1013 hose brush head; 102-downward extension part; 1021-dust suction straight pipe; 1022-rotating shaft; 103-dust suction hose; 2-driving device; 3-base plate; 301-base plate limit slot; 302-hydraulic device; 4-lifting device; 5-mobile carrier; 6-dust bucket. DETAILED DESCRIPTION

[0021] To make the purpose, technical scheme and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings. However, it will be appreciated by those skilled in the art that in the embodiments of the present invention, many technical details are proposed in order to enable the reader to better understand the present application. However, even without these technical details and various changes and modifications based on the following embodiments, the technical scheme claimed in the present application can be implemented. The division of the following embodiments is for the convenience of description, and should not constitute any limitation on the specific implementation of the present invention. The various embodiments can be combined and referenced with each other without contradiction.

[0022] It should be noted that if the embodiments of the present invention involve directional indications (such as up, down, left, right, front, back, etc.), the directional indications are only used to explain the relative position relationship, movement status, etc. between the components under a certain specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0023] One embodiment of the present invention relates to a cleaning device that can be used to clean the inner wall of an exhaust duct of a single crystal furnace bottom exhaust system. Figure 1 As shown, in this embodiment, the cleaning device includes: a dust collection component 1, a driving device 2, a base plate 3, a lifting device 4, a mobile carrier 5 and a dust collection bucket 6; the dust collection component 1 is connected to the driving device 2 and the dust collection bucket 6; the driving device 2 is installed on the base plate 3, the base plate 3 is connected to the top of the lifting device 4, and the lifting device 4 is used to drive the driving device 2 and the dust collection component 1 to move through the base plate 3; the lifting device 4 and the dust collection bucket 6 are located on the mobile carrier 5. In this embodiment, the dust collection component 1, the driving device 2 and the dust collection bucket 6 are used to clean the inner wall of the exhaust pipe of the single crystal furnace exhaust system, so as to absorb the cleaned oxide solids in time and prevent volatiles from scattering after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust pipe of the single crystal furnace; the lifting device drives the movement of the base plate, thereby driving the movement of the driving device and the dust collection component, and when the mechanical device is used for cleaning, the force is controllable, and the effect of multiple cleanings can be guaranteed to be consistent; by using the equipment for cleaning, the personnel requirements for cleaning are saved, manpower is saved and the cleaning efficiency is improved.

[0024] like Figure 2 As shown, in one embodiment, the dust collection assembly 1 further includes: a brush head portion 101, a downward extension portion 102 and a dust collection hose 103; the lower end of the downward extension portion 102 is connected to the brush head portion 101, and the upper end of the downward extension portion 102 is connected to the driving device 2; the dust collection hose 103 connects the downward extension portion 102 and the dust collection bucket 6. In this embodiment, by providing the downward extension portion 102, the brush head portion can extend downward to the exhaust duct at the bottom of the single crystal furnace bottom and clean the inner wall of the exhaust duct; the dust collection hose 103 connects the downward extension portion 102 and the dust collection bucket 6, so that the impurities cleaned by the downward extension portion can be sucked into the dust collection bucket in time during the cleaning process.

[0025] like Figure 2 and Figure 3 As shown, in one embodiment, the base plate 3 includes: a base plate limit slot 301 and a base plate hydraulic device 302; wherein the base plate limit slot 301 is used to limit the movable area of ​​the drive device 2; the base plate hydraulic device 302 is connected to the drive device 2, and the hydraulic device 302 controls the horizontal movement of the drive device 2. By arranging the hydraulic device 302 and the limit slot 301 on the base plate 3, the drive device 2 can move horizontally on the base plate 3, thereby further realizing the mechanization and automation of the cleaning operation, thereby reducing the demand for manpower.

[0026] In one embodiment, the interior of the base plate limit slot 301 is hollowed out, and sliding slots that can be movably connected to the housing of the drive device 2 are provided on both sides of the limit slot 301, so that the drive device 2 can move laterally along the sliding slots on both sides of the base plate limit slot 301. The base plate hydraulic device 302 is connected to the housing of the drive device 2 to control the lateral movement of the drive device 2 on the base plate limit slot 301.

[0027] Since the driving device 2 is mounted on the base plate 3, the upper end of the downward extending portion 102 is connected to the driving device 2. Specifically, the driving device 2 is located above the base plate 3, and the downward extending portion 102 is located below the base plate 3. The downward extending portion 102 passes through the inner hollow area of ​​the base plate limit slot 301, and the upper end of the downward extending portion 102 is connected to the driving device 2.

[0028] In one embodiment, the length of the base plate limit slot 301 can be set to 1m to 2m, that is, the movable distance of the driving device 2 on the base plate 3 is 1m to 2m. Preferably, the length of the base plate limit slot 301 is set to 1.5m. It should be noted that the length of the base plate limit slot 301 can be set according to the actual cleaning situation and needs, and is not limited here.

[0029] In one embodiment, the lifting height of the lifting device 4 is 2 to 5 meters. It should be noted that the "lifting height" in this application refers to the maximum extent to which the lifting device 4 can rise or fall. The lifting device 4 of this embodiment is connected to the base plate 3 above, and the downward extension portion 102 connected to the drive device 2 is driven by the base plate 3 to extend downward in the exhaust duct. Preferably, the lifting height of the lifting device 4 is 3 meters. It should be noted that the maximum lifting height of the lifting device 4 can be set according to the actual cleaning situation and needs, and is not limited here.

[0030] In one embodiment, the lifting device 4 is an electric hydraulic lifting device. It should be noted that the lifting mode of the lifting device 2 can be set accordingly according to actual application requirements, and is not limited here.

[0031] like Figure 2 and Figure 4 As shown, in one embodiment, the downward extension portion 102 includes: a dust suction straight pipe 1021 and a rotating shaft 1022 running through the interior of the dust suction straight pipe; the rotating shaft 1022 connects the brush head portion 101 and the driving device 2; and the dust suction straight pipe 1021 connects the dust suction hose. Specifically, in this embodiment, the upper end of the dust suction straight pipe 1021 is connected to the housing of the driving device 2; and the side of the dust suction straight pipe 1021 is connected to the dust suction hose 103. In this embodiment, the driving device 2 drives the rotating shaft 1022 to rotate, thereby driving the brush head to rotate and clean, which facilitates the downward cleaning work and makes the cleaning effect better.

[0032] In one embodiment, the length of the rotating shaft 1022 is greater than or equal to the dust suction straight pipe 1021. The length of the dust suction straight pipe 1021 and / or the rotating shaft 1022 is 2m to 3m. Preferably, the length of the rotating shaft 1022 is 2.48m. It should be noted that the lengths of the rotating shaft 1022 and the dust suction straight pipe 1021 can be set according to the actual cleaning situation and requirements, and are not limited here.

[0033] In one embodiment, the radius of the rotating shaft 1022 is smaller than the radius of the dust suction straight pipe 1021. Optionally, the radius of the rotating shaft 1022 and the radius of the dust suction straight pipe 1021 are 1:2 to 1:6. It should be noted that the radii of the rotating shaft 1022 and the dust suction straight pipe 1021 can be set according to the actual cleaning situation and needs, and are not limited here.

[0034] In one embodiment, the driving device 2 can drive the rotating shaft 1022 to rotate. Preferably, the driving device 2 drives the rotating shaft 1022 to rotate continuously in a clockwise direction. It should be noted that, without affecting the rotation of the rotating shaft 1022, the direction and manner in which the driving device 2 drives the rotating shaft 1022 to rotate can be set according to the actual cleaning situation and needs, such as continuous counterclockwise rotation, or repeated clockwise rotation for a certain angle and then counterclockwise rotation for a certain angle, which is not limited here.

[0035] In one embodiment, the dust suction straight pipe 1021 also includes a dust suction pipe opening, and the dust suction pipe opening is a funnel-shaped pipe opening. In this embodiment, the dust suction pipe opening is set as a funnel-shaped pipe opening, so that the pipe opening coverage area is increased, and more cleaned impurities can be absorbed. Optionally, the inner diameter of the funnel-shaped pipe opening is the same as the diameter of the dust suction straight pipe 1021, and the outer diameter of the funnel-shaped pipe opening is larger than the inner diameter of the funnel-shaped pipe opening. It should be noted that the outer diameter and the inner diameter of the funnel-shaped pipe opening can be adjusted accordingly according to the diameter of the dust suction straight pipe 1021 and the exhaust pipe, and there is no limitation here.

[0036] like Figure 5As shown, in one embodiment, the brush head part 101 of the cleaning device includes: a straight pipe mouth brush head 1011, a curved hose 1012 and a hose brush head 1013. The straight pipe mouth brush head 1011 is used to clean the straight pipe of the exhaust pipe, and the brush head is covered with a brush; the straight pipe mouth brush head 1011 is detachable, which is convenient for cleaning the brush head part of the device after the exhaust pipe is cleaned. The curved hose 1012 and the hose brush head 1013 are used to clean the curved pipe of the exhaust pipe. Optionally, the length of the curved hose 1012 is 1 to 1.5m. Preferably, the length of the curved hose 1012 in this embodiment is 1.2m. When the cleaning device provided in this embodiment is used to clean the exhaust pipe, this embodiment can extend the cleaning area of ​​the cleaning device to the curved pipe of the exhaust pipe by setting the curved hose and the hose brush head 1013; by setting the straight pipe brush head and the hose brush head 1013, when cleaning the inner wall of the exhaust pipe, the cleaning device can simultaneously clean the straight pipe and the curved pipe of the exhaust pipe, thereby enhancing the cleaning effect. It should be noted that the length of the curved hose 1012 can be adjusted accordingly according to the actual length of the exhaust pipe, and is not limited here.

[0037] In one embodiment, the body of the mobile carrier 5 is made of carbon steel. The body of the mobile carrier 5 is made of carbon steel, which is durable, strong and reliable, can withstand bumps, and can reduce the manufacturing cost of the equipment. It should be noted that the materials used for various parts of the cleaning equipment can be selected according to actual conditions and production requirements, and are not limited here.

[0038] In an embodiment of the present invention, the inner wall of the exhaust duct of the single crystal furnace exhaust system is cleaned by a dust collection assembly, a driving device and a dust collecting bucket, so as to timely absorb the cleaned oxide solids and prevent volatiles from being dispersed after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust duct of the single crystal furnace; the movement of the base plate is driven by a lifting device, thereby driving the movement of the driving device and the dust collection assembly. When a mechanical device is used for cleaning, the force is controllable, and the effect of multiple cleanings can be guaranteed to be consistent; by using equipment for cleaning, the need for personnel during cleaning is saved, manpower is saved and the cleaning efficiency is improved.

[0039] The embodiment of the present invention also provides a cleaning method, using the above cleaning device to clean the exhaust pipe, such as Figure 6 shown.

[0040] The implementation details of the cleaning method of this embodiment are specifically described below. The following content is only for ease of understanding and is not necessary for implementing this solution.

[0041] Step S1: Start cleaning, control the mobile carrier vehicle 5 of the cleaning equipment to move to the vicinity of the exhaust pipe to be cleaned;

[0042] Step S2: Control the hydraulic device 302 on the base plate 3 to drive the driving device 2 to move horizontally so that the downward extending portion 102 is aligned with the exhaust pipe opening to be cleaned;

[0043] Step S3: Control the lifting device 4 to descend, drive the base plate 3 to move downward, and make the downward extension part 102 descend to the inside of the exhaust pipe to be cleaned; at the same time, start the driving device 2 to drive the rotating shaft 1022 to rotate and start the dust collecting bucket 6 to vacuum, thereby driving the brush head part 1 to rotate and clean, and vacuum synchronously;

[0044] Step S4: Control the lifting device 4 to continue to descend, so that the downward extending portion 102 drives the brush head portion 1 to extend into the bottom end of the exhaust duct for cleaning;

[0045] Step S5: After the cleaning is completed, the rotation of the driving device 2 and the dust collection work of the dust collecting bucket 6 are stopped;

[0046] Step S6: Control the lifting device 4 to rise, so that the downward extending portion 102 rises until the brush head portion 1 leaves the exhaust duct;

[0047] Step S7: Control the hydraulic device 302 on the base plate 3 to drive the driving device 2 to move horizontally, so that the downward extending portion 102 is away from the exhaust pipe opening to be cleaned;

[0048] After the cleaning is finished, the mobile carrier vehicle 5 of the cleaning equipment is controlled to leave the single crystal furnace dismantling and cleaning area, and the cleaning equipment is cleaned.

[0049] The steps of the above method are divided only for clear description. When implemented, they can be combined into one step or some steps can be split and decomposed into multiple steps. As long as they include the same operations, they are all within the scope of protection of this patent; adding insignificant modifications to the method or introducing insignificant designs that do not change the core design of its process are all within the scope of protection of this patent.

[0050] In an embodiment of the present invention, the inner wall of the exhaust duct of the single crystal furnace exhaust system is cleaned by a dust collection assembly, a driving device and a dust collecting bucket, so as to timely absorb the cleaned oxide solids and prevent volatiles from being dispersed after cleaning, thereby ensuring the environmental sanitation of the inner wall of the exhaust duct of the single crystal furnace; the movement of the base plate is driven by a lifting device, thereby driving the movement of the driving device and the dust collection assembly. When a mechanical device is used for cleaning, the force is controllable, and the effect of multiple cleanings can be guaranteed to be consistent; by using equipment for cleaning, the need for personnel during cleaning is saved, manpower is saved and the cleaning efficiency is improved.

[0051] Those skilled in the art will appreciate that the above-mentioned embodiments are specific examples for implementing the present invention, and in actual applications, various changes may be made thereto in form and detail without departing from the spirit and scope of the present invention.

Claims

1. A cleaning device, characterized in that: include: Dust collection assembly, drive device, base plate, lifting device, mobile carrier and dust collection bucket; The dust collection assembly is connected to the driving device and the dust collection bucket; The driving device is installed on the base plate, the base plate is connected to the top of the lifting device, and the lifting device is used to drive the driving device and the dust collection assembly to move through the base plate; The lifting device and the dust collecting bucket are located on the mobile carrying vehicle; Wherein, the dust suction assembly comprises: a brush head part, a downward extending part and a dust suction hose; the lower end of the downward extending part is connected to the brush head part, and the upper end of the downward extending part is connected to the driving device; the dust suction hose is connected to the downward extending part and the dust collecting bucket; The downward extending portion includes: a dust suction straight pipe and a rotating shaft running through the dust suction straight pipe; the rotating shaft connects the brush head part and the driving device; the driving device drives the rotating shaft to rotate, thereby driving the brush head part to rotate and clean; the dust suction straight pipe is connected to the dust suction hose; The brush head part includes: a straight pipe mouth brush head, a curved hose and a hose brush head which are sequentially connected from top to bottom, wherein the straight pipe mouth brush head is covered with a brush; the straight pipe mouth brush head is used to clean the straight pipe of the exhaust duct, and the curved hose and the hose brush head are used to clean the curved pipe of the exhaust duct.

2. The cleaning device according to claim 1, characterized in that The length of the dust suction straight pipe and / or the rotating shaft is 2m~3m.

3. The cleaning device according to claim 1, characterized in that: The straight dust suction pipe comprises a dust suction pipe opening, and the dust suction pipe opening is a funnel-shaped pipe opening.

4. The cleaning device according to claim 1, characterized in that The straight-tube-mouth brush head is a detachable brush head.

5. The cleaning device according to claim 1, characterized in that: The base plate comprises: a base plate limiting slot and a base plate hydraulic device; Wherein, the limiting slot of the base plate is used to limit the movable area of ​​the driving device; The base plate hydraulic device is connected to the driving device, and the hydraulic device controls the horizontal movement of the driving device.

6. The cleaning device according to claim 1, characterized in that The lifting height of the lifting device is 2~5m.

7. A cleaning method, characterized in that: The exhaust duct is cleaned using the cleaning device according to any one of claims 1 to 6.

8. The cleaning method according to claim 7, characterized in that: Before using the cleaning device to clean the exhaust duct, the driving device is first controlled to move horizontally on the base plate, and then the lifting device is controlled to drive the driving device and the dust collection assembly to move through the base plate.

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