Wafer trace method with high efficiency and configuration by constructing cache index

Abstract

The application discloses a kind of Wafer tracing methods for constructing cache index to realize efficient configuration, including boat loading, boat unloading, the boat loading includes: (1) two claws of arm once grab two flower baskets half silicon wafer, the silicon wafer of two claws is crossed and is stored in odd number or even number of boat;(2) equipment reports out flower basket frequency and WaferID;The boat unloading includes: (1) two claws of arm once grab the silicon wafer of odd number or even number of boat;(2) equipment reports out boat frequency and WaferID, into flower basket frequency and WaferID (2 times in a flower basket), WaferID reported by equipment is only used for logging subsequent problem finding.The business process of the application is completed based on configuration, can be adjusted according to business and take effect immediately, without development, efficient and convenient, build cache database index to realize efficient retrieval of big data, the conversion processing of business process is completed through index, real-time and efficient.

Description

Technical Field

[0001] This invention relates to the field of Wafer data management systems, and more specifically to a method for constructing a cache index to achieve efficient configurable Wafer tracing. Background Technology

[0002] Existing technologies require development for each device and business process. After development, the device is deployed and tested online. Data is stored in a persistent database. As production capacity increases, more servers are needed for distributed processing, which is costly, inefficient, time-consuming, has a single point of failure, and cannot guarantee data reliability.

[0003] In the early stages of building a factory and connecting equipment to the network, it is necessary to develop each type of equipment according to the business, which involves a large workload and high development costs. When the business changes, it is necessary to redevelop the equipment, which is inefficient and time-consuming. As production capacity increases and terminal equipment is added, technical personnel must be sought to develop new equipment according to the business, which will increase costs, reduce efficiency, and consume time. Summary of the Invention

[0004] This invention provides a method for efficient configurable wafer traceability by constructing a cache index. The purpose is to use the cache database Redis to build an index on it to achieve process monitoring and anomaly traceability of single wafer production in the diffusion and oxidation processes of the solar energy industry, thereby improving product efficiency.

[0005] This invention is achieved through the following technical solution:

[0006] The method for constructing a cached index to implement an efficient and configurable Wafer tracing method includes loading and unloading, wherein loading includes:

[0007] (1) The two claws of the arm grab half of the silicon wafers of the two flower baskets at a time, and store the silicon wafers of the two claws in the odd or even position of the boat after crossing them.

[0008] (2) The device reports the number of flower baskets and WaferID, the number of boats and WaferID. The WaferID reported by the device is only used to record logs for later problem finding. The system binds WaferID to the boat according to the chip entry logic. When the number reaches 12, the whole boat is bound. The system only needs the flower basket number, boat number and number of times reported by the device to calculate the WaferID path.

[0009] The unloading of the boat includes:

[0010] (1) The two claws of the arm grab the odd or even number of silicon wafers on the boat at one time, and put them into two empty flower baskets after the two claws are separated.

[0011] (2) The device reports the number of boats and WaferIDs, and the number of flower baskets and WaferIDs. The WaferIDs reported by the device are only used for logging and subsequent problem finding. The system unbinds the WaferIDs from the boats according to the output logic. The system only needs the flower basket number, boat number, and number of times reported by the device to calculate the path of the WaferID.

[0012] As a preferred embodiment, the method for constructing a cache index to achieve efficient and configurable Wafer tracing specifically includes the following steps:

[0013] (1) Configure the message mapping for fetchOutCST1 and fetchOutCST2 for the flower basket;

[0014] (2) Associate fetchOutCST1 and fetchOutCST2 with the wafer data of the flower basket, and set the EquipmentID cache index key to cache the wafer information in the current flower basket of the device;

[0015] (3) Configure the waferInBoat message mapping;

[0016] (4) The wafer data associated with the fetchOutCST1 and fetchOutCST2 messages in waferInBoat is used to set the EquipmentID and BoatID cache index keys to cache one wafer information within the device boat;

[0017] (5) Configure the boatInfoReport message mapping when the boat is full;

[0018] (6) The boatInfoReport associates the wafer data with the waferInBoat message, and sets the EquipmentID and BoatID cache index keys to cache all wafer information in the boat.

[0019] (7) Configure the waferOutBoat message mapping;

[0020] (8) All wafer data associated with the boatInfoReport message in waferOutBoat, set EquipmentID and custom ABPosition cache index key to cache the A / B side wafer information of the outgoing boat;

[0021] (9) Configure message mapping for storeInCST1 and storeInCST2 in the flower basket;

[0022] (10) storeInCST1 and storeInCST2 are associated with waferOutBoat to obtain A-side and B-side wafer data respectively and put them into the basket. Set EquipmentID and CstID cache index keys to cache the wafer information put into the basket.

[0023] In a preferred embodiment, in the step (2) of loading the boat, the number of times the equipment reports the flower baskets is equal to the WaferID, which is 2 times per flower basket.

[0024] In a preferred embodiment, the number of times the boat is loaded in step (2) is the same as the number of times a quartz boat is loaded (WaferID 12 times).

[0025] In a preferred embodiment, after the two claws are disassembled in step (1) of unloading the boat, two empty flower baskets are placed in the basket. It is important to note whether the direction of the robotic arm picking up / placing the pieces is consistent with the boat loading action.

[0026] In a preferred embodiment, in the unloading step (2), the number of times the equipment reports the boat dispatch is equal to the WaferID of 12 times for one quartz boat.

[0027] In a preferred embodiment, the number of times the flower basket is loaded in step (2) of unloading the boat is the same as the number of times the flower basket is loaded twice per WaferID.

[0028] In a preferred embodiment, the customized ABPosition in step (8) includes the A / B face.

[0029] Beneficial effects:

[0030] (1) The business processes of this invention are all based on configuration and can be adjusted immediately according to the business. No development is required, which is efficient and convenient. The cache database index is built to achieve efficient retrieval of big data. The business process is transformed and processed in real time and efficiently through the index.

[0031] (2) Fully configurable business process implementation, using custom indexes to achieve real-time flow of large concurrent data, and using data flow to reflect the production flow of business in real time;

[0032] (3) All operations are configurable, visual, and flexible, and can be customized according to business needs, enabling self-service completion of data flow connection;

[0033] (4) Throughout the process, the data is stored in a cache database and the data is queried using the invented indexing mechanism to achieve efficient retrieval of big data and complete the connection of business data flow.

[0034] (5) Reduced labor costs: The entire business flow is implemented based on configuration, with no development costs;

[0035] (6) Improved traceability: The entire data stream storage is based on a cache database to complete the storage and transformation of data. Through a self-invented indexing mechanism, it can achieve efficient retrieval of big data, real-time data processing business processes without delay, and accurate and lossless data traceability. Attached Figure Description

[0036] Figure 1 This is a schematic diagram of the process structure of the Wafer tracing method for building a cache index to achieve efficient configuration in this invention. Detailed Implementation

[0037] The embodiments of the present invention will be described in detail below with reference to the accompanying drawings: These embodiments are implemented based on the technical solution of the present invention, and provide detailed implementation methods and specific operation processes, but the protection scope of the present invention is not limited to the following embodiments.

[0038] like Figure 1 As shown, a configurable Wafer tracing method for constructing a cache index includes loading and unloading the wafer, wherein loading includes:

[0039] (1) The two claws of the arm grab half of the silicon wafers of the two flower baskets at a time, and store the silicon wafers of the two claws in the odd or even position of the boat after crossing them.

[0040] (2) The device reports the number of flower baskets and WaferID (2 times for one flower basket), the number of boat entries and WaferID (12 times for one quartz boat). The WaferID reported by the device is only used for logging and subsequent problem finding. The system binds the WaferID to the boat according to the chip entry logic. When the number reaches 12 times, the entire boat is bound. The system only needs the flower basket number, boat number, and number of entries reported by the device to calculate the WaferID path.

[0041] The unloading of the boat includes:

[0042] (1) The two claws of the arm grab the silicon wafers at the odd or even positions of the boat at one time. After the two claws are separated, they are placed into two empty flower baskets (note whether the direction of the robotic arm picking up / placing wafers is consistent with the movement of the boat).

[0043] (2) The device reports the number of boats and WaferID (12 times for one quartz boat), and the number of baskets and WaferID (2 times for one basket). The WaferID reported by the device is only used for logging and subsequent problem finding. The system unbinds WaferID from boat according to the output logic. The system only needs the basket number, boat number and number of times reported by the device to calculate the path of WaferID.

[0044] The method for constructing a cached index to achieve efficient and configurable Wafer tracing includes the following steps:

[0045] (1) Configure the message mapping for fetchOutCST1 and fetchOutCST2 for the flower basket;

[0046] (2) Associate fetchOutCST1 and fetchOutCST2 with the wafer data of the flower basket, and set the EquipmentID cache index key to cache the wafer information in the current flower basket of the device;

[0047] (3) Configure the waferInBoat message mapping;

[0048] (4) The wafer data associated with the fetchOutCST1 and fetchOutCST2 messages in waferInBoat is used to set the EquipmentID and BoatID cache index keys to cache one wafer information within the device boat;

[0049] (5) Configure the boatInfoReport message mapping when the boat is full;

[0050] (6) The boatInfoReport associates the wafer data with the waferInBoat message, and sets the EquipmentID and BoatID cache index keys to cache all wafer information in the boat.

[0051] (7) Configure the waferOutBoat message mapping;

[0052] (8) All wafer data associated with the boatInfoReport message in waferOutBoat, set EquipmentID and custom ABPosition (A / B face) cache index key to cache the A / B face wafer information of the outgoing boat;

[0053] (9) Configure message mapping for storeInCST1 and storeInCST2 in the flower basket;

[0054] (10) storeInCST1 and storeInCST2 are associated with waferOutBoat to obtain A-side and B-side wafer data respectively and put them into the basket. Set EquipmentID and CstID cache index keys to cache the wafer information put into the basket.

[0055] The foregoing has shown and described the basic principles, main features, and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of the invention. Various changes and modifications can be made to the invention without departing from its spirit and scope, and all such changes and modifications fall within the scope of the present invention as claimed. The scope of protection of this invention is defined by the appended claims and their equivalents.

Claims

1. A method for efficiently configuring wafer traceability by constructing a cache index, characterized in that, The method comprises boat loading and boat unloading, and the boat loading comprises: (1) the arm two claws once grab two flower baskets half of the silicon wafer, the silicon wafer of two claws is crossed and stored in the odd number or even number of boat; (2) the device reports the flower basket times and WaferID, the boat times and WaferID, the WaferID reported by the device is only used for logging to find out the problem later, the system binds the WaferID into the boat according to the wafer logic, when the times reach 12 times, the whole boat is bound, the system only needs the flower basket number, boat number and times of the device to calculate the path of WaferID; The boat unloading comprises: (1) the arm two claws once grab the silicon wafer of the odd number or even number of boat, and the two claws are put into two empty flower baskets after being separated; (2) the device reports the boat times and WaferID, the flower basket times and WaferID, the WaferID reported by the device is only used for logging to find out the problem later, the system unbinds the WaferID from the boat according to the wafer logic, the system only needs the flower basket number, boat number and times of the device to calculate the path of WaferID; The method for constructing cache index to realize efficient configuration wafer tracking comprises the following steps: (1) configure the flower basket fetchOutCST1 and fetchOutCST2 message mapping; (2) the fetchOutCST1 and fetchOutCST2 are associated with the wafer data of the flower basket, and the EquipmentID cache index key is set to cache the wafer information in the current flower basket of the device; (3) configure the waferInBoat message mapping; (4) the waferInBoat is associated with the wafer data of the fetchOutCST1 and fetchOutCST2 messages, and the EquipmentID and BoatID cache index keys are set to cache the wafer information in the device boat once; (5) configure the boatInfoReport message mapping; (6) the boatInfoReport is associated with the wafer data of the waferInBoat message, and the EquipmentID and BoatID cache index keys are set to cache all wafer information in the device boat; (7) configure the waferOutBoat message mapping; (8) the waferOutBoat is associated with all wafer data of the boatInfoReport message, and the EquipmentID and ABPosition cache index keys are set to cache the A / B face wafer information of the boat; (9) configure the storeInCST1 and storeInCST2 message mapping; (10) the storeInCST1 and storeInCST2 are associated with the A face and B face wafer data of the waferOutBoat respectively to enter the flower basket, and the EquipmentID and CstID cache index keys are set to cache the wafer information of the flower basket.

2. The wafer traceability method of claim 1, wherein, The equipment reports the number of flower baskets and WaferID in the loading step (2) twice.

3. The wafer traceability method of claim 1, wherein, The number of times of loading in the loading step (2) and WaferID in a quartz boat 12 times.

4. The wafer traceability method of claim 1, wherein, In the unloading step (1), two empty flower baskets are placed after the two claws are disassembled. It needs to be noted whether the direction of the wafer picking / placing of the robot and the loading action are consistent.

5. The wafer traceability method of claim 1, wherein, The equipment reports the number of boats and WaferID in the unloading step (2) 12 times.

6. The wafer traceability method of claim 1, wherein, The number of times of loading in the unloading step (2) and WaferID in a flower basket 2 times.

7. The wafer traceability method of claim 1, wherein, The ABPosition in the step (8) is self-defined and includes A / B surfaces.

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