Substrate processing apparatus and method, and display device

Abstract

Provided are a substrate processing method and apparatus and a display device capable of increasing the life of an inkjet head and making the concentration of units uniform. The substrate processing method includes: ejecting a first chemical liquid containing ionized quantum dots onto a substrate, ejecting a second chemical liquid containing a reducing agent onto the first chemical liquid, and causing the first chemical liquid and the second chemical liquid to react to synthesize quantum dot ink on the substrate.

Description

Technical Field

[0001] This invention relates to a substrate processing apparatus and method. Background Technology

[0002] To manufacture display devices such as LCD panels, PDP panels, and LED panels, a printing process (e.g., RGB patterning) is performed to spray ink onto a substrate.

[0003] However, quantum dot ink contains inorganic particles, which can aggregate. This aggregation of inorganic particles shortens the lifespan of the inkjet head. Furthermore, because quantum dot ink is difficult to eject at a uniform concentration, the concentration of each unit may be uneven. Summary of the Invention

[0004] The problem the invention aims to solve

[0005] The problem to be solved by the present invention is to provide a substrate processing method that can increase the lifespan of the inkjet head and make the concentration of the cells uniform.

[0006] Another problem to be solved by the present invention is to provide a substrate processing apparatus that can increase the lifespan of the inkjet head and make the concentration of the unit uniform.

[0007] Another problem to be solved by the present invention is to provide a display device manufactured using the above-described substrate processing method.

[0008] The subject matter of this invention is not limited to the subject matter mentioned above, and those skilled in the art will clearly understand other subject matters not mentioned from the following description.

[0009] Solution for solving the problem

[0010] One aspect of the substrate processing method of the present invention for achieving the above-mentioned objectives includes: spraying a first liquid containing ionized quantum dots onto a substrate, spraying a second liquid containing a reducing agent onto the first liquid, and reacting the first liquid with the second liquid to synthesize quantum dot ink on the substrate.

[0011] One aspect of the substrate processing apparatus of the present invention for achieving the other problem described above may include: a first inkjet device that sprays a first liquid containing ionized quantum dots onto a substrate; a second inkjet device that sprays a second liquid containing a reducing agent onto the first liquid on the substrate; and a heat treatment apparatus that heat-treats the substrate to react the first liquid with the second liquid to synthesize quantum dot ink on the substrate.

[0012] One aspect of the display device of the present invention for achieving the aforementioned further objective may include: a substrate; a plurality of dikes formed on the substrate to define an ejection region; and quantum dot ink formed in the ejection region, wherein the quantum dot ink synthesized in the ejection region includes a first region and a second region disposed on the first region, the volumes of the first region and the second region being 6 / 10 and 4 / 10 of the quantum dot ink synthesized in the ejection region, respectively, and the amount of quantum dots formed in the first region being more than 70% of the total quantum dots of the quantum dot ink synthesized in the ejection region.

[0013] Specific details of other embodiments are included in the detailed description and accompanying drawings. Attached Figure Description

[0014] Figure 1 This is a flowchart illustrating a substrate processing method according to an embodiment of the present invention.

[0015] Figures 2 to 4 It is used for explanation Figure 1 Intermediate step diagrams for each step.

[0016] Figure 5 yes Figure 4 A magnified view of region A.

[0017] Figure 6 This is a diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0018] Figure 7 This is a flowchart illustrating a substrate processing method according to another embodiment of the present invention.

[0019] Figure 8 It is used for explanation Figure 7 Example diagram of the inkjet device used in step S11 or step S21. Detailed Implementation

[0020] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings. (Refer to the accompanying drawings) Figure 1 The advantages and features of the invention, as well as the methods for achieving these advantages and features, will become clear from the detailed embodiments described below. However, the invention is not limited to the embodiments disclosed below, but can be implemented in various ways different from each other. These embodiments are provided only to make the disclosure of the invention complete and to fully inform those skilled in the art of the scope of the invention, which is defined only by the claims. Throughout this specification, the same reference numerals refer to the same structural elements.

[0021] Spatially relative terms such as "below," "below," "lower," "above," and "upper," as shown in the figure, can be used to readily describe the relationship between an element or structural feature and other elements or features. Spatially relative terms should be understood as terms that include not only the directions shown in the figure but also the different orientations of elements during use or operation. For example, when the elements shown in the figure are flipped, an element described as "below" or "below" of other elements can be placed "above" of other elements. Therefore, the exemplary term "below" can include both the "below" and "above" directions. Elements can also be oriented in other directions, thus the spatially relative terms can be interpreted according to the orientation.

[0022] While terms like "first," "second," etc., are used to describe various elements, structural features, and / or parts, these elements, structural features, and / or parts are not limited by these terms. These terms are merely used to distinguish one element, structural feature, or part from others. Therefore, within the technical concept of this invention, the first element, first structural feature, or first part mentioned below can also be a second element, second structural feature, or second part.

[0023] Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the description with reference to the drawings, the same or corresponding structural elements will be given the same reference numerals regardless of the drawing numbers, and repeated descriptions thereof will be omitted.

[0024] Figure 1 This is a flowchart illustrating a substrate processing method according to an embodiment of the present invention. Figures 2 to 4 It is used for explanation Figure 1 Intermediate step diagrams for each step. Figure 5 yes Figure 4 A magnified view of region A.

[0025] refer to Figure 1 and Figure 2 A first liquid solution 120R, 120G, 120B containing ionized quantum dots is sprayed onto the substrate 100 (S10).

[0026] Specifically, multiple banks 110 can be formed on the substrate 100. The multiple banks 110 define the areas where the liquid medicine should be sprayed (i.e., spraying areas 101, 102, 103). The banks 110 can also be inorganic banks using oxides, nitrides, or oxynitrides, or organic banks using polyimide, etc. Alternatively, the banks 110 can also be in the form of organic banks stacked on inorganic banks.

[0027] The quantum dots contained in the first drug solutions 120R, 120G, and 120B can be in an ionized state.

[0028] Specifically, quantum dots can be particles with crystal structures ranging from a few nanometers to tens of nanometers in size, consisting of hundreds to thousands of atoms.

[0029] Quantum dots exhibit quantum confinement due to their extremely small size. Quantum confinement refers to the phenomenon where the band gap of an object increases when it is smaller than a nanometer. Therefore, when a quantum dot is illuminated by light with energy greater than its band gap, the quantum dot absorbs the light, becomes excited, emits light of a specific wavelength, and then returns to its ground state. The wavelength of the emitted light corresponds to the band gap.

[0030] A quantum dot can be a core-shell structure comprising a core and a shell covering the core. Alternatively, a quantum dot can be a core-shell-shell structure comprising a core, a first shell covering the core, and a second shell covering the first shell.

[0031] The nucleus of a quantum dot may include group II-VI compounds, group III-VI compounds, group III-V compounds, group IV-VI compounds, group IV elements or compounds, group I-III-VI compounds, or combinations thereof.

[0032] Group II-VI compounds may be selected from the group consisting of: dielemental compounds selected from the group consisting of CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, ZnO, HgS, HgSe, HgTe, MgSe, MgS, and mixtures thereof; and compounds selected from the group consisting of CdSeS, CdSeTe, CdSTe, ZnSeS, ZnSeTe, ZnSTe, HgSeS, HgSeTe, HgSTe, CdZnS, CdZnSe, CdZnT e. Tri-element compounds selected from the group consisting of CdHgS, CdHgSe, CdHgTe, HgZnS, HgZnSe, HgZnTe, MgZnSe, MgZnS, and mixtures thereof; and tetra-element compounds selected from the group consisting of CdZnSeS, CdZnSeTe, CdZnSTe, CdHgSeS, CdHgSeTe, CdHgSTe, HgZnSeS, HgZnSeTe, HgZnSTe, and mixtures thereof.

[0033] III-VI group compounds may include dielement compounds such as In2S3 and In2Se3, trielement compounds such as InGaS3 and InGaSe3, or any combination thereof.

[0034] Group III-V compounds can be selected from the following groups: binary compounds selected from the group consisting of GaN, GaP, GaAs, GaSb, AlN, AlP, AlAs, AlSb, InN, InP, InAs, InSb, and mixtures thereof; tri-element compounds selected from the group consisting of GaNP, GaNAs, GaNSb, GaPAs, GaPSb, AlNP, AlNAs, AlNSb, AlPAs, AlPSb, InGaP, InAlP, InNP, InNAs, InNSb, InPAs, InPSb, GaAlNP, and mixtures thereof; and tetra-element compounds selected from the group consisting of GaAlNAs, GaAlNSb, GaAlPAs, GaAlPSb, GaInNP, GaInNAs, GaInNSb, GaInPAs, GaInPSb, InAlNP, InAlNAs, InAlNSb, InAlPAs, InAlPSb, and mixtures thereof. III-V semiconductor compounds may also contain group II metals (e.g., InZnP, etc.).

[0035] Group IV-VI compounds can be selected from the following groups: dielemental compounds selected from the group consisting of SnS, SnSe, SnTe, PbS, PbSe, PbTe, and mixtures thereof; trielemental compounds selected from the group consisting of SnSeS, SnSeTe, SnSTe, PbSeS, PbSeTe, PbSTe, SnPbS, SnPbSe, SnPbTe, and mixtures thereof; and tetraelemental compounds selected from the group consisting of SnPbSSe, SnPbSeTe, SnPbSTe, and mixtures thereof. Group IV elements can be selected from the group consisting of Si, Ge, and mixtures thereof. Group IV compounds can be dielemental compounds selected from the group consisting of SiC, SiGe, and mixtures thereof.

[0036] Group I-III-VI semiconductor compounds may include ternary compounds such as AgInS, AgInS2, CuInS, CuInS2, CuGaO2, AgGaO2, AgAlO2, or any combination thereof.

[0037] At this point, two-element, three-element, or four-element compounds can exist within the particle at a uniform concentration, or they can exist within the same particle in states with partially different concentration distributions. Furthermore, a core / shell structure can exist where one quantum dot surrounds other quantum dots. The core-shell interface can have a concentration gradient where the concentration of the elements present in the shell decreases towards the center.

[0038] As mentioned earlier, quantum dots can have a core-shell structure comprising a core and a shell surrounding the core. The shell can function as a protective layer to prevent chemical modification of the core and maintain semiconductor properties, and / or as a charging layer to impart electrophoretic properties to the quantum dot. The shell can be single-layered or multi-layered. The interface between the core and the shell can have a concentration gradient, where the concentration of the element present in the shell decreases towards the center.

[0039] Examples of shells for such quantum dots include metal or non-metal oxides, semiconductor compounds, or combinations thereof.

[0040] For example, metal or non-metal oxides can be exemplified as two-element compounds such as SiO2, Al2O3, TiO2, ZnO, MnO, Mn2O3, Mn3O4, CuO, FeO, Fe2O3, Fe3O4, CoO, Co3O4, NiO, etc., or three-element compounds such as MgAl2O4, CoFe2O4, NiFe2O4, CoMn2O4, etc., but the present invention is not limited thereto.

[0041] Examples of semiconductor compounds include CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe, ZnSeS, ZnTeS, GaAs, GaP, GaSb, HgS, HgSe, HgTe, InAs, InP, InGaP, InSb, AlAs, AlP, AlSb, etc., but the present invention is not limited thereto.

[0042] Furthermore, quantum dots can have a full width of half maximum (FWHM) of an emission wavelength spectrum of about 45 nm or less, preferably about 40 nm or less, and more preferably about 30 nm or less, which can improve color purity or color reproducibility. In addition, since light emitted through such quantum dots is emitted in all directions, the viewing angle can be improved.

[0043] Furthermore, the morphology of quantum dots is not particularly limited as it is a commonly used morphology in this field, but more specifically, it can be in the form of spherical, pyramidal, multi-arm, or cubic nanoparticles, nanotubes, nanowires, nanofibers, nanoplate particles, etc.

[0044] Quantum dots can adjust the color of the emitted light according to the particle size, thus quantum dots can have a variety of emitting colors such as red, green, and blue.

[0045] For example, such as Figure 2 As shown, a first liquid 120R for generating quantum dots capable of emitting red light is sprayed into the first spraying region 101. A first liquid 120G for generating quantum dots capable of emitting green light can be sprayed into the second spraying region 102. A first liquid 120B for generating quantum dots capable of emitting blue light can be sprayed into the third spraying region 103.

[0046] refer to Figure 1 and Figure 3 A second liquid 130 (S20) containing a reducing agent is sprayed onto the first liquids 120R, 120G, and 120B.

[0047] Specifically, the reducing agent can also be in an ionized state.

[0048] In addition, alkaline substances can be used as reducing agents. For example, NaCl, NaOH, etc., can be used, but are not limited to these. The reducing agent donates electrons to the ionized quantum dots to reduce them.

[0049] Additionally, the second solution 130 may contain various additives besides the reducing agent. For example, the second solution 130 may contain ligands, antioxidants, binders, dispersants, flow modifiers, etc.

[0050] Ligands may include, for example, carboxylic acids. That is, they may include oleic acid, formic acid, succinic acid, glutaric acid, etc.

[0051] Examples of antioxidants include the amine series.

[0052] Examples of adhesives include at least one of epoxy resins, acrylic resins, and polyesters.

[0053] On the other hand, Figure 3The description uses the example of spraying the same second liquid 130 into all spraying areas 101, 102, and 103, but is not limited to this. That is, a suitable second liquid 130 can be sprayed into each spraying area. Specifically, the second liquid 130 sprayed into the first spraying area 101 can be suitable for the first liquid 120R, the second liquid 130 sprayed into the second spraying area 102 can be suitable for the first liquid 120G, and the second liquid 130 sprayed into the third spraying area (103) can be suitable for the first liquid 120B.

[0054] On the other hand, the volume ratio of the first reagent 120R, 120G, 120B sprayed into the spraying regions 101, 102, 103 to the second reagent 130 can be from 5:5 to 7:3. That is, when observing based on the ratio of the first reagent 120R / second reagent 130 sprayed into a spraying region (e.g., 101), the amount of the first reagent 120R can be equal to the amount of the second reagent 130, or the amount of the first reagent 120R can be greater than the amount of the second reagent 130. If the volume ratio of the first reagent 120R to the second reagent 130 is less than 5:5, the amount of quantum dots generated in a spraying region (e.g., 101) may be less than the target value. Conversely, if the volume ratio of the first reagent 120R to the second reagent 130 exceeds 7:3, the amount of reducing agent is quite small and may not be sufficient to generate quantum dots.

[0055] refer to Figure 1 and Figure 4 The first reagent solution 120R, 120G, and 120B are reacted with the second reagent solution 130 to synthesize quantum dot inks 150R, 150G, and 150B (S30).

[0056] Specifically, when synthesizing quantum dot inks 150R, 150G, and 150B, the substrate 100 can be heat-treated. Alternatively, when synthesizing quantum dot inks 150R, 150G, and 150B, the substrate 100 can be irradiated with UV or with an electron beam (e-beam). Alternatively, both heat treatment and UV / electron beam irradiation can be performed.

[0057] Here, the aforementioned substrate processing method will be used as an example for explanation. Hereinafter, (l) refers to the liquid state, (s) refers to the solid state, and (g) refers to the gas state.

[0058] The state of QD after being ionized by nitrate can be represented as QD 2+ (l)+NO3 2- (l) + H₂O(l). Furthermore, the state of the reducing agent (NaCl) after ionization can be represented as 2Na + (l)+2Cl -(l) + H2O(l). Therefore, the process of synthesizing quantum dot inks 150R, 150G, and 150B by reacting the first reagents 120R, 120G, and 120B with the second reagent 130 is represented as follows. As a result of the synthesis, solid-state QDs are formed.

[0059] QD 2+ (l)+NO3 2- (l) + H₂O(l) + 2Na + (l)+2Cl - (l)=

[0060] QD 0 (s)+2Na + (l)+NO3 2- (l) + H₂O(l) + 2Cl(g)

[0061] Here, for reference Figure 5 The quantum dot ink 150R synthesized in the ejection region (e.g., 101) may include a first region 151 and a second region 152 configured on the first region 151.

[0062] The first region 151 corresponds to the first liquid medicine 120R. That is, the volume of the first region 151 corresponds to the amount of the first liquid medicine 120R. The second region 152 corresponds to the second liquid medicine 130. That is, the volume of the second region 152 corresponds to the amount of the second liquid medicine 130.

[0063] For example, when the volume ratio of the first liquid 120R to the second liquid 130 sprayed into the spraying region 101 is a:b (as mentioned above, a:b is 5:5 to 7:3), the volume of the first region 151 can be a / (a+b) of the quantum dot ink 150R, and the volume of the second region 152 can be b / (a+b) of the quantum dot ink 150R. For example, the volume of the first region 151 can be 6 / 10 of the quantum dot ink 150R synthesized in the spraying region 101, and the volume of the second region 152 can be 4 / 10 of the quantum dot ink 150R synthesized in the spraying region 101.

[0064] As shown in the figure, the amount of quantum dots (QDs) formed in the first region 151 can be considerably greater than the amount of quantum dots (QDs) formed in the second region 152. For example, the amount of quantum dots (QDs) formed in the first region 151 can be more than 70% of the total quantum dot QDs of the quantum dot ink 150R synthesized in the ejection region 101.

[0065] The amount of quantum dots (QDs) formed in the first region 151 can vary depending on the spraying amounts of the first liquids 120R, 120G, and 120B, the spraying amount of the second liquid 130, the amount of ionized quantum dots in the first liquids 120R, 120G, and 120B, and the amount of reducing agent in the second liquid 130. For example, it can be more than 80% or 90% of the total quantum dot QDs of the quantum dot ink 150R synthesized in the spraying region 101.

[0066] If, as described above, quantum dot ink 150R is synthesized on substrate 100 after ejecting a first liquid containing ionized quantum dots 120R, 120G, 120B and a second liquid containing a reducing agent 130, the quantum dots (QDs) will not agglomerate. That is, when viewed with reference to the plane of ejection region 101, they can be uniformly distributed throughout the ejection region 101.

[0067] On the other hand, since the first liquids 120R, 120G, and 120B contain ionized quantum dots, most of the quantum dots QD are formed in the space where the first liquids 120R, 120G, and 120B are ejected (i.e., corresponding to the first region 151). Therefore, most (approximately 70% or more) of the quantum dots QD formed in the ejection region 101 can be located within the first region 151.

[0068] Furthermore, since the quantum dots are ionized within the first solutions 120R, 120G, and 120B, the circulation of the first solutions 120R, 120G, and 120B within the storage unit becomes easier. Moreover, because the inkjet head ejects the first solutions 120R, 120G, and 120B containing ionized quantum dots, nozzle clogging that could occur due to condensed quantum dots can be prevented. Therefore, the lifespan of the inkjet head can be increased.

[0069] Furthermore, since the first liquids 120R, 120G, and 120B containing ionized quantum dots are used, quantum dot ink (QD) can be generated at a uniform concentration regardless of the ejection regions 101, 102, and 103.

[0070] On the other hand, the synthesis of quantum dot inks 150R, 150G, and 150B on substrate 100 by spraying the liquid twice has been described, but it can also be applied to the formation of other components (e.g., metal wiring, transparent wiring (ITO), etc.).

[0071] For example, a first liquid containing an ionized metal substance can be sprayed onto a substrate, followed by a second liquid containing an ionized reducing agent, so that the first liquid and the second liquid react to form metal wiring on the substrate.

[0072] For example, the state of Ag after being ionized by nitric acid can be represented as Ag 2+(l)+NO3 2- (l) + H₂O(l). Furthermore, the state of the reducing agent (NaCl) after ionization can be represented as 2Na + (l)+2Cl - (l) + H₂O(l). Therefore, the process of synthesizing metallic wiring by reacting the first and second solutions is shown below. As a result of the synthesis, solid Ag is generated.

[0073] Ag 2+ (l)+NO3 2- (l) + H₂O(l) + 2Na + (l)+2Cl - (l)=

[0074] Ag 0 (s)+2Na + (l)+NO3 2- (l) + H₂O(l) + 2Cl(g)

[0075] Figure 6 This is a diagram illustrating a substrate processing apparatus according to an embodiment of the present invention.

[0076] refer to Figure 6 According to one embodiment of the present invention, the substrate processing apparatus includes a process stage PT, a first rack 411, a second rack 412, a first inkjet head module 421, a second inkjet head module 422, a first image generation module 431, a second image generation module 432, a support module 440, a control module 450, etc.

[0077] The process stage PT is a space used to perform inkjet printing on substrate G. Substrate 100 is supported on support module 440. Support module 440 allows substrate 100 to move in a first direction S. Instead of the illustration, a holder may grasp substrate G and move it, or the substrate G may be moved by air flotation. Substrate G may be, for example, a glass substrate. The device completed by inkjet printing can be a display device.

[0078] The first frame 411 and the second frame 412 can be spaced apart from each other and configured to span the process stage PT.

[0079] The first inkjet head module 421 and the first image generation module 431 are disposed on the first frame 411 and are movable along the first frame 411 (refer to reference numeral W1). The first inkjet head module 421 is capable of ejecting a first liquid containing ionized quantum dots (refer to...). Figure 2 (120R, 120G, 120B). The first image generation module 431 is capable of capturing images of the first liquid 120R, 120G, 120B ejected onto the substrate G.

[0080] The second inkjet head module 422 and the second image generation module 432 are disposed on the second frame 412 and are movable along the second frame 412 (refer to reference numeral W2). The second inkjet head module 422 is capable of ejecting a second liquid containing an ionized reducing agent (refer to reference numeral W2). Figure 3 (130). The second image generation module 432 is capable of capturing images of the second liquid 130 ejected onto the substrate G.

[0081] The control module 450 controls the support module 440, the first inkjet head module 421, the first image generation module 431, the second inkjet head module 422, and the second image generation module 432.

[0082] To describe the operation, the substrate 100 moves below the first frame 411. During the swath operation performed by the support module 440 in the first direction S, the first inkjet head module 421 moves in the second direction W1, and at the same time, the first inkjet head module 421 sprays the first liquids 120R, 120G, and 120B onto the substrate 100.

[0083] Next, once the first liquids 120R, 120G, and 120B have been ejected, the substrate 100 moves below the second frame 412. During the swath operation performed by the support module 440 in the first direction S, the second inkjet head module 422 moves in the second direction W2, and simultaneously ejects the second liquid 130 onto the substrate 100.

[0084] Next, once the second liquid 130 has been sprayed out, the substrate 100 is moved to the heat treatment apparatus. The heat treatment apparatus heat-treats the substrate 100, causing the first liquids 120R, 120G, and 120B to react with the second liquid 130 to synthesize quantum dot inks 150R, 150G, and 150B on the substrate 100.

[0085] Figure 7 This is a flowchart illustrating a substrate processing method according to another embodiment of the present invention. Figure 8 It is used to explain in Figure 7 Example diagram of the inkjet device used in step S11 or S21. For ease of illustration, to correspond with the use of... Figures 1 to 6 The explanation will focus on the differences in the content.

[0086] exist Figure 6 In the substrate processing method described herein, a process of ejecting a first liquid containing ionized quantum dots and a process of ejecting a second liquid containing an ionized reducing agent are performed in an inkjet device.

[0087] On the contrary, Figure 7In the substrate processing method described herein, a process of ejecting a first liquid containing ionized quantum dots and a process of ejecting a second liquid containing ionized reducing agent are performed in a separate inkjet device.

[0088] Specifically, refer to Figure 7 The first inkjet device sprays a first liquid containing ionized quantum dots onto the substrate (S11).

[0089] Next, a second inkjet device, different from the first inkjet device, sprays a second liquid containing a reducing agent onto the first liquid on the substrate (S21).

[0090] Next, the heat treatment apparatus heat-treats the substrate to react the first and second solutions. As a result, quantum dot ink can be synthesized on the substrate (S31).

[0091] Here, for reference Figure 8 The substrate processing apparatus includes a process stage PT, a frame 410, an inkjet head module 420, an image generation module 430, a support module 440, and a control module 450. Only one frame 410 can be configured on the process stage PT. The frame 410 is equipped with an inkjet head module 420 and an image generation module 430 that are movable in the second direction W.

[0092] To explain the operation, the substrate 100 enters the first inkjet device ( Figure 8 (Substrate processing apparatus). First inkjet apparatus sprays first liquids 120R, 120G, and 120B onto substrate 100.

[0093] Next, if the first inkjet fluids 120R, 120G, and 120B have been ejected, the substrate 100 moves from the first inkjet unit to the second inkjet unit (essentially the same as...). Figure 8 (A device of the same form as the substrate processing device). The second inkjet device sprays the second liquid 130 onto the substrate 100.

[0094] Next, once the second liquid 130 has been sprayed out, the substrate 100 is moved to the heat treatment apparatus. The heat treatment apparatus heat-treats the substrate 100, causing the first liquids 120R, 120G, and 120B to react with the second liquid 130 to synthesize quantum dot inks 150R, 150G, and 150B on the substrate 100.

[0095] The embodiments of the present invention have been described above and with reference to the accompanying drawings. However, those skilled in the art will understand that the present invention can be implemented in other specific forms without changing the technical concept or essential features of the invention. Therefore, it should be understood that the embodiments described above are illustrative in all respects and not limiting.

Claims

1. A substrate processing method, comprising: A first solution containing ionized quantum dots is sprayed onto the substrate. A second liquid containing a reducing agent is sprayed onto the first liquid. The first and second pharmaceutical solutions are reacted to synthesize quantum dot inks on the substrate. Multiple dams defining the ejection area are formed on the substrate. The first and second medicinal solutions are sprayed into the spraying area. The volume ratio of the first liquid medicine to the second liquid medicine sprayed into the spraying area is 5:5 to 7:

3.

2. The substrate processing method according to claim 1, wherein, During the synthesis of the quantum dot ink, the substrate is subjected to heat treatment.

3. The substrate processing method according to claim 1, wherein, During the synthesis of the quantum dot ink, the substrate is subjected to UV irradiation or electron beam irradiation.

4. The substrate processing method according to claim 1, wherein, The reducing agent contains an alkaline substance.

5. The substrate processing method according to claim 1, wherein, The second solution also contains at least one of a ligand, an antioxidant, and a binder.

6. The substrate processing method according to claim 5, wherein, The ligands include carboxylic acids.

7. The substrate processing method according to claim 5, wherein, The antioxidants include amine series.

8. The substrate processing method according to claim 5, wherein, The adhesive includes at least one of epoxy resin, acrylic resin, and polyester.

9. The substrate processing method according to claim 1, wherein, The volume ratio of the first liquid medicine to the second liquid medicine sprayed into the spraying area is a:b. The quantum dot ink synthesized within the ejection region includes a first region and a second region disposed on the first region. The volumes of the first region and the second region are a / (a+b) and b / (a+b) of the quantum dot ink synthesized in the ejection region, respectively. The amount of quantum dots formed in the first region is more than 70% of the total quantum dots of the quantum dot ink synthesized in the ejection region.

10. The substrate processing method according to claim 1, wherein, The first inkjet device that ejects the first liquid and the second inkjet device that ejects the second liquid are different from each other.

11. A substrate processing apparatus, comprising: The first inkjet device sprays a first liquid containing ionized quantum dots onto a substrate. The second inkjet device sprays a second liquid containing a reducing agent onto the first liquid on the substrate; as well as A heat treatment apparatus is used to heat-treat the substrate, causing the first and second pharmaceutical solutions to react and synthesize quantum dot inks on the substrate. Multiple dams defining the ejection area are formed on the substrate. The first inkjet device sprays the first liquid medicine into the spraying area. The second inkjet device sprays the second liquid into the spraying area. The volume ratio of the first liquid medicine to the second liquid medicine sprayed into the spraying area is 5:5 to 7:

3.

12. The substrate processing apparatus according to claim 11, wherein, The reducing agent includes an alkaline substance.

13. The substrate processing apparatus according to claim 11, wherein, The second liquid also includes at least one of a ligand, an antioxidant, and a binder.

14. The substrate processing apparatus according to claim 11, wherein, The volume ratio of the first liquid medicine to the second liquid medicine sprayed into the spraying area is a:b. The quantum dot ink synthesized within the ejection region includes a first region and a second region disposed on the first region. The volumes of the first region and the second region are a / (a+b) and b / (a+b) of the quantum dot ink synthesized in the ejection region, respectively. The amount of quantum dots formed in the first region is more than 70% of the total quantum dots of the quantum dot ink synthesized in the ejection region.

15. A display device, comprising: substrate; Multiple dams are formed on the substrate to define the ejection area; as well as Quantum dot ink, which forms within the ejection region, The quantum dot ink synthesized within the ejection region includes a first region and a second region disposed on the first region. The volumes of the first region and the second region are 6 / 10 and 4 / 10 of the quantum dot ink synthesized in the ejection region, respectively. The amount of quantum dots formed in the first region is more than 70% of the total quantum dots of the quantum dot ink synthesized in the ejection region.

Images