Cutting blade with concave bevel and hair removal device

Abstract

The invention relates to a cutting blade (1) having a blade body (15) comprising or consisting of a first material (18) and a second material (19) combined with the first material, the cutting blade having a first face (2), a second face (3) opposite the first face, and a cutting edge (4), wherein the first face comprises a first surface (9), and the second face comprises a primary bevel (5) having a convex or straight cross-sectional shape and a secondary bevel (6) having a concave cross-sectional shape. Furthermore, the invention relates to a hair removal device comprising the cutting blade.

Description

[0001] This invention relates to a cutting blade having a blade body comprising a first material and a second material bonded to the first material, or composed of the first material and the second material. The cutting blade has a first face, a second face opposite to the first face, and a cutting edge. The first face includes a first surface, and the second face includes a primary bevel having a convex or straight cross-sectional shape and a secondary bevel having a concave cross-sectional shape. Furthermore, this invention relates to a hair removal device including the cutting blade.

[0002] The following definitions are used in this application:

[0003] • The front face is the surface of the cutting blade on which the cut hair slides during the cutting process.

[0004] • The flank face is the surface of the cutting tool that it passes over on the skin; the angle between the flank face and the skin contact surface is the clearance angle α.

[0005] The cutting bevel of the cutting blade is closed by the rake face and the flank face and is represented by the bevel angle θ.

[0006] • The cutting edge is the line where the rake face and the flank face intersect.

[0007] Cutting blades (especially razor blades) are typically made from a suitable base material such as stainless steel, in which a symmetrical wedge-shaped cutting edge is formed.

[0008] For razor blades, the design of the cutting edge must be optimized to find the best trade-off between blade sharpness and mechanical strength, and thus the durability of the cutting edge. The manufacture of conventional stainless steel razor blades involves hardening a steel substrate, and then typically sharpening the blade from both sides by grinding the hardened steel substrate to form a symmetrical cutting edge.

[0009] After sharpening, another coating can be applied to the steel blade to optimize its mechanical properties. Hard coating materials such as diamond, amorphous diamond, diamond-like carbon (DLC), nitrides, carbides, or oxides are suitable for improving the mechanical strength of the cutting edge.

[0010] Therefore, the harder the cutting edge material, the longer the blade retains its edge, and thus the less wear is expected. Other coatings can be applied to increase corrosion resistance or reduce blade friction.

[0011] Most blades in the prior art focus on blades with symmetrical blade bodies. However, there are some methods for teaching blades with asymmetrical blade bodies.

[0012] US 3,606,682 describes razor blades with improved cutting ease and shaving comfort. The blades have a recessed portion adjacent to the cutting edge, which allows for improved shaving comfort. This effect is present in both symmetrical and asymmetrical blade bodies.

[0013] US 3,292,478 describes a cutting die for textiles, leather and similar sheet materials, wherein the die has appropriately inclined surfaces on both sides, so that the cutting edge is non-centrally positioned between the side surfaces and the die has an asymmetrical shape.

[0014] The constant goal is to reduce the force required to cut an object, as this requires less energy and results in less wear on the cutting edge. In the context of shaving, cutting hair with lower force results in less pulling on the hair and therefore less discomfort.

[0015] The cutting force is reduced by decreasing the angle of the wedge-shaped cutting tool. However, making the blade sharper also makes it more brittle, and despite the application of a hard coating, the durability of conventional steel razor blades remains limited today.

[0016] In addition, the significant contribution to the cutting force comes from the friction between the tool and the object being cut.

[0017] Therefore, the present invention addresses the aforementioned drawbacks of the prior art and provides a cutting blade with a design that simultaneously allows for high comfort (i.e., low cutting force) and high durability (i.e., low brittleness of the blade) during the cutting process.

[0018] This problem is solved by the cutting blade and hair removal device of this application. A preferred embodiment of such a blade is also disclosed in this application.

[0019] The term "comprising" in the claims and description of this application has the meaning of not excluding other components. Within the scope of this invention, the term "consisting of" should be understood as the preferred embodiment of the term "comprising". If a group of at least a specific number of components is defined, this should also be understood as disclosing a group preferably "consisting of" those components.

[0020] In the following text, the term cross-sectional view refers to a view through a slice of the cutting element that is perpendicular to the cutting edge (if the cutting edge is straight) or perpendicular to the tangent of the cutting edge (if the cutting edge is curved) and perpendicular to the surface of the substrate of the cutting element.

[0021] The term "line" should be understood as relating to a perspective view (e.g., Figure 1 Connection points between different inclined planes (according to, for example) Figure 3The linear extension of the cross-sectional view (in perspective). As an example, if concave slopes are adjacent to each other, the turning point of the cross-sectional view extends into a line in the perspective view.

[0022] According to the present invention, a cutting blade having a blade body is provided, the blade body comprising a first material and a second material bonded to the first material or composed of the first material and the second material, the cutting blade having a first face, a second face opposite to the first face, and a cutting edge, wherein...

[0023] • The first face includes the first surface

[0024] The second surface comprises a primary inclined plane with a convex or straight cross-sectional shape and a secondary inclined plane with a concave cross-sectional shape, wherein...

[0025] The first line connects the primary inclined plane and the secondary inclined plane.

[0026] • The primary bevel extends from the cutting edge to the first line.

[0027] • The cutting edge and primary bevel are formed in the second material.

[0028] • A first wedge angle θ1 exists between the first surface and the primary inclined plane or its tangent.

[0029] • There is a second wedge angle θ2 between the tangents of the first surface and the secondary inclined plane.

[0030] Surprisingly, it was found that when the wedge angle meets the following conditions, a cutting blade with a very stable cutting edge and excellent cutting performance can be provided:

[0031] θ1>θ2.

[0032] The cutting blade according to the invention exhibits low cutting force due to its thin secondary bevel with a low wedge angle θ2. This is achieved by reducing the contact area between the cutting blade and the object being cut in the region of the secondary bevel, which has the function of penetrating the bevel. According to the invention, the concave cross-sectional shape of the rake face results in a significant reduction in cutting force.

[0033] The second wedge angle θ2 represents the penetration angle of the blade through the object being cut. The smaller the penetration angle θ2, the lower the force required to penetrate the object being cut.

[0034] The cutting blade according to the invention is strengthened by adding a primary bevel with a first wedge angle θ1 greater than the second wedge angle θ2. Therefore, the primary bevel with the first wedge angle θ1 mechanically stabilizes the cutting edge to prevent damage caused by the cutting operation, allowing for the formation of an elongated blade body in the region of the secondary bevel without affecting the cutting performance of the blade. Thus, by using the primary bevel with the wedge angle θ1, the second wedge angle θ2 can be reduced. In other words, the wedge angle θ1 stabilizes the cutting edge, allowing for the formation of an elongated blade body in the region of the secondary bevel without affecting the cutting performance of the blade.

[0035] According to a preferred embodiment, the cutting blade has an asymmetrical cross-sectional shape. The asymmetrical cross-sectional shape refers to symmetry with respect to an axis that is the bisector of the primary wedge angle θ2 and is anchored at the cutting edge.

[0036] According to another preferred embodiment, the first wedge angle θ1 ranges from 10° to 90°, preferably from 12° to 75°, more preferably from 15° to 46°, and even more preferably from 20° to 45°, and / or the second wedge angle θ2 ranges from -5° to 40°, preferably from 0° to 30°, more preferably from 5° to 25°, and even more preferably from 10° to 15°, and / or the second wedge angle θ2 ranges from -5° to 30°, preferably from 0° to 20°, more preferably from -5° to 30°, preferably from 0° to 20°, more preferably from 5° to 15°, and even more preferably from 8° to 12°.

[0037] According to another preferred embodiment, the primary bevel has a length d1, which is the dimension projected onto the first surface from the distance from the cutting edge to the first line, and is 0.1 μm to 7 μm, preferably 0.5 μm to 5 μm, and more preferably 1 μm to 3 μm. A length d1 < 0.1 μm is difficult to manufacture because a cutting edge of this length is too brittle and cannot be used stably. The primary bevel utilizes the secondary bevel to stabilize the blade body, which allows for the formation of a slender blade in the region of the secondary bevel that provides low cutting force. Surprisingly, it has been found that if the length d1 is not greater than 7 μm, the primary bevel does not affect the cutting performance.

[0038] Preferably, the distance from the cutting blade (4) to the second line (11) projected onto the first surface (9) and / or the imaginary extension (9') of the first surface has a length d2, which ranges from 1 μm to 75 μm, more preferably from 5 μm to 50 μm, and even more preferably from 10 μm to 35 μm. The second line may be the final line of the secondary bevel, or optionally the intersection line of the secondary bevel and the tertiary bevel. The length d2 corresponds to the penetration depth of the cutting blade in the object to be cut. Generally, d2 corresponds to at least 30% of the diameter of the object to be cut, i.e., when the object is human hair, which is typically about 100 μm in diameter, the length d2 is about 30 μm.

[0039] The cutting blade is preferably defined by a blade body comprising a first material and a second material bonded to the first material, or consisting of the first material and the second material. The second material may be deposited as a coating at least in the region of the first material; that is, the second material may be an encapsulating coating of the first material or a coating deposited on the first material on the first surface.

[0040] The material of the first material is generally not limited to any specific material, as long as the material can be cut at an angle.

[0041] However, according to an alternative embodiment, the blade body consists only of a first material, i.e., an uncoated first material. In this case, the first material is preferably a material with an isotropic structure (i.e., having the same property values ​​in all directions). Such isotropic materials are generally more suitable for forming without relying on forming techniques.

[0042] The first material preferably comprises or consists of a material selected from the group consisting of:

[0043] Metals, preferably titanium, nickel, chromium, niobium, tungsten, tantalum, molybdenum, vanadium, platinum, germanium, iron, and their alloys, especially steel,

[0044] • Ceramics comprising at least one element selected from the group consisting of: carbon and / or nitrogen, boron, oxygen, or combinations thereof, preferably silicon carbide, zirconium oxide, aluminum oxide, silicon nitride, boron nitride, tantalum nitride, TiAlN, TiCN, and / or TiB2.

[0045] • Glass ceramics; preferably alumina-containing glass ceramics,

[0046] Composite materials made of ceramic materials within a metallic matrix (cermet).

[0047] Hard metals, preferably sintered carbide hard metals, such as tungsten carbide or titanium carbide bonded to cobalt or nickel,

[0048] • Silicon or germanium, preferably having a crystal plane parallel to the second face, wafer orientation <100> ,

[0049] <110> , <111> or <211> ,

[0050] Single crystal materials

[0051] Glass or sapphire,

[0052] • Polycrystalline or amorphous silicon or germanium,

[0053] • Single-crystal diamond or polycrystalline diamond, diamond-like carbon (DLC), adamantane carbon, and

[0054] • Their combination.

[0055] The steel used for the first material is preferably selected from the group consisting of: 1095, 12C27, 14C28N, 154CM, 3Cr13MoV, 4034, 40X10C2M, 4116, 420, 440A, 440B, 440C, 5160, 5Cr15MoV, 8Cr13MoV, 95X18, 9Cr18MoV, Acuto+, ATS-34, AUS-4, AUS-6 (=6A), AUS-8 (=8A), C75, CPM-10V, CPM-3V, CPM-D2, CPM-M4, CPM-S-30V, CPM-S-35VN, CPM-S-60V, CPM-154, Cronidur-30, CTS204P, CTS20CP, CTS 40CP, CTS B52, CTS B75P, CTS BD-1, CTS BD-30P, CTS XHP, D2, Elmax, GIN-1, H1, N690, N695, Niolox(1.4153), Nitro-B, S70, SGPS, SK-5, Sleipner, T6MoV, VG-10, VG-2, X-15T.N., X50CrMoV15, ZDP-189.

[0056] Preferably, the second material comprises or is composed of a material selected from the group consisting of:

[0057] • Oxides, nitrides, carbides, borides, preferably aluminum nitride, chromium nitride, titanium nitride, titanium carbonitride, titanium aluminum nitride, and cubic boron nitride.

[0058] Boron, aluminum, and magnesium

[0059] • Carbon, preferably diamond, polycrystalline diamond, nanocrystalline diamond, diamond-like carbon (DLC), and

[0060] • Their combination.

[0061] The second material may preferably be selected from the group consisting of: TiB2, AlTiN, TiAlN, TiAlSiN, TiSiN, CrAl, CrAlN, AlCrN, CrN, TiN, TiCN, and combinations thereof.

[0062] In addition, you can select all the materials referenced in VDI Guide 2840.

[0063] Particularly preferred are the use of nanocrystalline diamond as a second material and / or multilayers of nanocrystalline and polycrystalline diamond. It has been shown that the production of nanocrystalline diamond can be accomplished substantially more easily and economically compared to the production of single-crystal diamond. Therefore, longer and larger zone cutting blades can also be produced. Furthermore, regarding its grain size distribution, the nanocrystalline diamond layer is more homogeneous than the polycrystalline diamond layer, and the material also exhibits lower inherent stress. Therefore, macroscopic deformation of the cutting edge is less likely to occur.

[0064] Preferably, the thickness of the second material is 0.15 μm to 20 μm, more preferably 2 μm to 15 μm, and even more preferably 5 μm to 10 μm.

[0065] Preferably, the Young's modulus of the second material is less than 1200 GPa, more preferably less than 900 GPa, and even more preferably less than 750 GPa. Due to the low Young's modulus, the second material becomes more flexible and less rigid, and can be better adapted to the Young's modulus of the substrate to increase the mechanical stability of the cutting edge.

[0066] The transverse fracture stress σ0 of the second material is preferably at least 1 GPa, more preferably at least 2.5 GPa, and even more preferably at least 5 GPa.

[0067] For the definition of transverse fracture stress σ0, please refer to the following literature:

[0068] ·R.Morrell et al., Int.Journal of Refractory Metals&Hard Materials, 28

[0069] (2010), pp. 508-515;

[0070] · R. Danzer et al., in "Technische keramische Werkstoffe", J.

[0071] Kriegesmann, published by HvB Press, Ellerau, ISBN 978-3-938595-00-8, Chapter 6.2.3.1 "Der 4-Kugelversuch zur Ermittlung der biaxialenBiegefestigkeit Werkstoffe

[0072] Therefore, the transverse fracture stress σ0 is determined through statistical evaluation of fracture tests, for example, in the B3B load test according to the details in the aforementioned literature. It is thus defined as the fracture stress at which a 63% probability of fracture exists.

[0073] Due to the extremely high transverse fracture stress of the second material, the separation of individual microcrystals from the second material (especially from the cutting edge) is almost completely suppressed. Therefore, the cutting blade retains its original sharpness even after long-term use.

[0074] The second material preferably has a hardness of at least 20 GPa. The hardness is determined by nanoindentation (Yeon-Gil Jung et al., J. Mater. Res., Vol. 19, No. 10, p. 3076).

[0075] The surface roughness R of the second material RMS Preferably less than 100 nm, more preferably less than 50 nm, and even more preferably less than 20 nm, the surface roughness is calculated according to the following formula:

[0076]

[0077] A = Assessment Area

[0078] Z(x,y) = Local roughness distribution

[0079] Surface roughness R RMS Measured according to DIN ENISO 25178. The surface roughness makes additional mechanical polishing of the surface of the second material unnecessary.

[0080] In a preferred embodiment, the average grain size d of the nanocrystalline diamond in the second material is... 50 The average grain size is 1 nm to 100 nm, preferably 5 nm to 90 nm, and more preferably 5 nm to 30 nm. 50 X-ray diffraction or transmission electron microscopy and grain counting can be used to determine this.

[0081] Preferably, the first material and / or the second material are coated with a low-friction material in at least some areas, the low-friction material preferably being selected from the group consisting of: fluoropolymers (e.g., PTFE), parylene, polyvinylpyrrolidone, polyethylene, polypropylene, polymethyl methacrylate, graphite, diamond-like carbon (DLC), and combinations thereof.

[0082] The end radius of the cutting edge is preferably less than 200 nm, more preferably less than 100 nm, and even more preferably less than 50 nm, for example, determined by cross-sectional SEM using the method shown in Figure 8.

[0083] Preferably, the tip radius r of the cutting edge is proportional to the average grain size d of the second material. 50 Related. Therefore, if the end radius r of the second material at the cutting edge and the average grain size d of the nanocrystalline diamond hard coating are... 50 It is advantageous for the ratio r / d50 to be 0.03 to 20, preferably 0.05 to 15, and particularly preferably 0.5 to 10.

[0084] In a preferred embodiment, the second surface further includes a straight or concave third-order inclined surface, wherein the second line connects the second-order inclined surface and the third-order inclined surface. The third-order inclined surface extends rearward from the second line. Furthermore, a third wedge angle θ3 is located between the first surface and the third-order inclined surface or its tangent, wherein the third wedge angle θ3 preferably ranges from 1° to 60°, more preferably from 10° to 55°, and even more preferably from 30° to 46°, and most preferably 45°.

[0085] According to the present invention, by adding a thick and robust third-level bevel with a third-level wedge angle greater than the secondary wedge angle, and by using this third-level bevel to cut the object, the force acting on the thin secondary bevel is reduced, thereby further strengthening the cutting blade. For this function, the third wedge angle θ3 must be greater than the second wedge angle θ2. Therefore, the third-level bevel with the third wedge angle θ3 has the function of cutting the object.

[0086] The cutting edge connecting the primary and secondary bevels is preferably formed within the second material.

[0087] More preferably, the cutting edge between the secondary and tertiary bevels is positioned at the boundary surface between the first and second materials. This makes the manufacturing process easier and therefore more economical. For example, it can be based on... Figure 8a and Figure 8b The process of manufacturing blades.

[0088] The first face preferably also includes a fourth bevel extending from the cutting edge to the first surface. If the first face corresponds to the flank face, the fourth bevel will improve cutting comfort, i.e., shaving comfort.

[0089] In a preferred embodiment, the first face corresponds to the flank face, and the second face corresponds to the rake face of the cutting blade. However, the first face can also be used as the rake face and the second face as the flank face.

[0090] Therefore, according to the present invention, a hair removal device is also provided, which includes a razor blade as described above.

[0091] The invention is further illustrated by the following figures, which show specific embodiments according to the invention. However, these specific embodiments should not be construed as limiting the invention in any way as described in the claims of the overview section of the specification.

[0092] Figure 1 This is a perspective view of the first cutting blade according to the present invention.

[0093] Figure 2 This is a cross-sectional view of a cutting blade with a convex primary bevel according to the present invention.

[0094] Figure 3 This is a cross-sectional view of a cutting blade with a straight primary bevel according to the present invention.

[0095] Figure 4 This is a cross-sectional view of another cutting blade having a second material according to the present invention.

[0096] Figure 5 This is a cross-sectional view of another cutting blade according to the invention, which has a convex primary bevel and an additional bevel on a first surface.

[0097] Figure 6 This is a cross-sectional view of another cutting blade according to the invention, which has a straight primary bevel and an additional bevel on its first surface.

[0098] Figure 7 This is a perspective view of another cutting blade according to the invention, which has a non-linear cutting edge including curved sections.

[0099] Figures 8a to 8b This is a flowchart of the process used to manufacture cutting blades.

[0100] Figure 9 This is a cross-sectional view of the circular end, showing the determination of the end radius.

[0101] The following reference numerals are used in the accompanying drawings of this application.

[0102] List of reference numerals

[0103] 1 blade

[0104] 2 First page

[0105] 3. Second page

[0106] 4 Cutting blades

[0107] 5. Primary Inclined Plane

[0108] 6 secondary inclined planes

[0109] 7. Third-level inclined plane

[0110] 9 First Surface

[0111] 9' Imaginary extension of the first surface

[0112] 10 First Line

[0113] 11 Second Line

[0114] 15 Blade Body

[0115] 18 First Material

[0116] 19 Second Material

[0117] 20 Boundary Surface

[0118] 60° bisector

[0119] 61 Vertical lines

[0120] 62 circles

[0121] 65 Construction Points

[0122] 66 Construction Points

[0123] 67 Construction Points

[0124] 260° bisector

[0125] Figure 1 This is a perspective view of a cutting blade according to the present invention. The cutting blade 1 has a blade body 15, which includes a first surface 2 and a second surface 3 opposite to the first surface 2. A cutting edge 4 is positioned at the intersection of the first surface 2 and the second surface 3. The cutting edge 4 is shaped to be straight or substantially straight. The first surface 2 includes a flat first surface 9, while the second surface 3 is segmented into different bevels. The second surface 3 includes a convex primary bevel 5, a concave secondary bevel 6, and a straight third bevel 7. The primary bevel 5 is connected to the secondary bevel 6 via a first line 10, and the secondary bevel is connected to the third bevel 7 at the other end via a second line 11.

[0126] exist Figure 2The image shows a cross-sectional view of a cutting blade according to the present invention. The cutting blade 1 has a first face 2 and a second face 3 opposite to the first face 2. A cutting edge 4 is positioned at the intersection of the first face 2 and the second face 3. The first face 2 includes a flat first surface 9, while the second face 3 is segmented into different bevels. The second face 3 of the cutting blade 1 has a convex primary bevel 5, which has a first wedge angle θ1 between the tangent of the first surface 9 and the primary bevel 5. A secondary bevel 6 is shaped to be concave and has a second wedge angle θ2 between the tangent of the first surface 9 and the secondary bevel 6, wherein the bisector 260 of the second wedge angle θ2 is anchored at the cutting edge 4. θ2 is less than θ1. A straight third bevel 7 has a third wedge angle θ3 greater than θ2. The primary bevel 5 has a length d1, which is the dimension projected onto the first surface 9, and is in the range of 0.1 μm to 7 μm. The primary inclined plane 5 and the secondary inclined plane 6 together have a length d2, which is the dimension projected onto the first surface 9, and is in the range of 1 μm to 150 μm, preferably 5 μm to 100 μm.

[0127] exist Figure 3 The image shows a cross-sectional view of a cutting blade according to the present invention. The cutting blade 1 has a first face 2 and a second face 3 opposite to the first face 2. A cutting edge 4 is positioned at the intersection of the first face 2 and the second face 3. The first face 2 includes a flat first surface 9, while the second face 3 is segmented into different bevels. The second face 3 of the cutting blade 1 has a straight primary bevel 5, which has a first wedge angle θ1 between the first surface 9 and the primary bevel 5. A secondary bevel 6 is shaped concave and has a second wedge angle θ2 less than θ1 between the tangents of the first surface 9 and the secondary bevel 6. A straight third bevel 7 has a third wedge angle θ3 greater than θ2. The primary bevel 5 has a length d1, which is the dimension projected onto the first surface 9 and is in the range of 0.1 μm to 7 μm. The primary inclined plane 5 and the secondary inclined plane 6 together have a length d2, which is the dimension projected onto the first surface 9, and is in the range of 1 μm to 150 μm, preferably 5 μm to 100 μm.

[0128] exist Figure 4 The image shows another cross-sectional view of the cutting blade of the present invention, wherein the cutting blade 1 includes a blade body 15 comprising a first material 18 and a second material 19, such as a diamond layer on the first material 18 at a first face 2. A straight primary bevel 5 (extending from the cutting edge 4 to the first line 10) and a concave secondary bevel 6 (extending from the first line 10 to the second line 11) are located in the second material 19, while a tertiary bevel 7 is located in the first material 18. The first material 18 and the second material 19 are separated by a boundary surface 20. Figure 2 As shown, the first inclined plane can alternatively be convex.

[0129] Figure 5 An embodiment of a cutting blade 1 having a first surface 2 and a second surface 3 according to the present invention is shown. The second surface 3 has a convex primary bevel 5, a concave secondary bevel 6, and a straight third bevel 7. A fourth bevel 8 is positioned on the first surface 2 between the surface 9 and the cutting edge 4. The angle between the fourth bevel 8 and the imaginary extension 9' of the surface is θ4. The wedge angle θ1 between the tangent of the convex primary bevel 5 and the surface 9 is greater than the wedge angle θ2 between the tangent of the concave secondary bevel 6 and the surface 9. Furthermore, the wedge angle θ3 between the straight third bevel 7 and the surface 9 is greater than θ2.

[0130] Figure 6 Another embodiment of a cutting blade 1 having a first surface 2 and a second surface 3 according to the present invention is shown. The second surface 3 has a straight primary bevel 5, a concave secondary bevel 6, and a straight third bevel 7. A fourth bevel 8 is positioned on the first surface 2 between the surface 9 and the cutting edge 4. The angle between the fourth bevel 8 and the imaginary extension 9' of the surface is θ4. The wedge angle θ1 between the straight primary bevel 5 and the surface 9 is greater than the wedge angle θ2 between the tangent of the concave secondary bevel 6 and the surface 9. Furthermore, the wedge angle θ3 between the straight third bevel 7 and the surface 9 is greater than θ2.

[0131] exist Figure 7 The image shows a perspective view of another cutting blade according to the invention. The cutting blade 1 has a blade body 15 comprising a first face 2 and a second face 3 opposite to the first face 2. A cutting edge 4 is located at the intersection of the first face 2 and the second face 3. In this embodiment, the cutting edge 4 is not shaped to be straight, but rather consists of curved sections. The first face 2 comprises a flat first surface 9, while the second surface 3 is segmented into a convex primary bevel 5, a concave secondary bevel 6, and a straight tertiary bevel 7. The primary bevel 5 is connected to the secondary bevel 6 via a cutting edge 10, which is connected to the tertiary bevel 7 at the other end via a cutting edge 11. The cutting edges 10 and 11 follow the shape of the cutting edge 4 and are therefore shaped not to be straight, but also consist of curved sections.

[0132] exist Figures 8a to 8bThe diagram shows a flowchart of the process of the present invention. In the first step 1, a silicon wafer 101 is coated with a silicon nitride (Si3N4) layer 102 as a protective layer for silicon by PE-CVD or thermal processing (low-pressure CVD). The layer thickness and deposition process must be carefully selected to ensure sufficient chemical stability to withstand subsequent etching steps. In the second step, a photoresist 103 is deposited onto the Si3N4-coated substrate and then patterned by photolithography. The patterned photoresist is then used as a mask to structure the (Si3N4) layer by, for example, plasma reactive ion etching (RIE) with CF4. After patterning, the photoresist 103 is stripped with an organic solvent in the third step. The remaining patterned Si3N4 layer 102 serves as a mask for a subsequent pre-structuring step 4 (e.g., by anisotropic wet chemical etching in KOH) of the silicon wafer 101. The etching process ends when the structure on the second surface 3 has reached a predetermined depth and the continuous silicon first surface 2 is retained. Other wet and dry chemical processes are also suitable, such as isotropic wet chemical etching in HF / HNO3 solution or the application of fluorine-containing plasma. In the subsequent step 5, the remaining Si3N4 is removed by treatment with, for example, hydrofluoric acid (HF) or fluorine plasma. In step 6, the pre-structured Si substrate is coated with a diamond layer 104 (e.g., nanocrystalline diamond) of approximately 10 μm thickness. The diamond layer 104 can be deposited on the pre-structured second surface 3 and the continuous first surface 2 of the Si wafer 101 (as shown in step 6), or only on the continuous first surface 2 of the Si wafer (not shown here). In the case of double-sided coating, the diamond layer 104 on the structured second surface 3 must be removed in a separate step 7 before the subsequent blade forming steps 9a to 9d of the dicing blade. Selective removal of the diamond layer 104 is performed, for example, by using Ar / O2 plasma (e.g., RIE or ICP mode), which demonstrates high selectivity to the silicon substrate. In step 8, the silicon wafer 101 is thinned such that the diamond layer 104 is partially independent without substrate material, and the desired substrate thickness is achieved in the remaining area. This step can be performed by wet chemical etching in KOH or HF / HNO3 etchant or preferably by plasma etching in RIE or ICP mode containing CF4, SF6 or CHF3 plasma.

[0133] In the next step 9, ( Figure 8bAnisotropic etching of the diamond layer is performed using Ar / O2 plasma in a RIE system to form a cutting edge. A straight bevel with a wedge angle θ1 is formed by utilizing a constant ratio of etching rates for silicon and diamond. However, process parameters can also vary over time; for example, a decrease in the reactive component oxygen (change in oxygen flux / partial pressure) over time will cause the diamond etching rate to decrease, resulting in a curved, convex primary bevel 5, as shown. Figure 2 As shown. Step 9a illustrates the structured silicon wafer 101 and diamond layer 104 etched at a higher magnification prior to step 9, and step 9b illustrates the resulting first bevel 5 after etching. Finally, steps 9c and 9d illustrate the formation of the secondary bevel 6. This step also involves simultaneous anisotropic etching of the diamond layer and silicon, performed, for example, by an Ar / O2 plasma in a RIE system. Silicon acts as a mask for the diamond layer 104. However, similar to step 9b, the etching rate ratio between silicon and diamond can vary over time. To form the concave secondary bevel 6 shown in step 9d, a constant etching rate for silicon and an etching rate for diamond that increases over time are used. Alternatively, the silicon etching rate can be a constant etching rate for diamond that decreases over time. Process details are disclosed, for example, in DE198 59 905A1.

[0134] exist Figure 9 The diagram illustrates how the end radius can be determined. The end radius is determined by first drawing a line 60 that bisects the cross-sectional image of the first bevel of the cutting edge 1. At the bisection of line 60, point 65 of the first bevel is drawn. A second line 61 is drawn perpendicular to line 60 at a distance of 100 nm from point 65. Two additional points 66 and 67 are drawn at the bisection of the first bevel by line 61. A circle 62 is then constructed from points 65, 66, and 67. The radius of circle 62 is the end radius of the cutting edge 4.

Claims

1. A cutting blade (1) having a blade body (15), the blade body comprising a first material (18) and a second material (19) bonded to the first material (18) or composed of the first material and the second material, the cutting blade (1) having a first face (2), a second face (3) opposite to the first face (2), and a cutting edge (4), wherein The first surface (2) includes the first surface (9). The second surface (3) includes a primary inclined surface (5) having a convex or straight cross-sectional shape and a secondary inclined surface (6) having a concave cross-sectional shape, wherein The first line (10) connects the primary inclined plane (5) and the secondary inclined plane (6). The primary bevel (5) extends from the cutting edge (4) to the first line (10). The cutting edge (4) and the primary bevel (5) are formed in the second material (19). A first wedge angle θ1 is formed between the first surface (9) and the primary inclined plane (5) or between the first surface (9) and the primary inclined plane (5) and the tangent line passing through the cutting edge (4). A second wedge angle θ2 exists between the tangents of the first surface (9) and the secondary inclined plane (6). Where θ1>θ2, and The primary inclined plane and the secondary inclined plane together have a length d2, which is the size of the primary inclined plane and the secondary inclined plane projected onto the first surface, and the length d2 ranges from 5 μm to 100 μm.

2. The cutting blade according to claim 1, Its features are, The first wedge angle θ1 ranges from 10° to 90°, and the second wedge angle θ2 ranges from -5° to 40°.

3. The cutting blade according to claim 1 or 2, Its features are, The primary inclined plane (5) has a length d1, which is the dimension projected onto the first surface (9) from the distance from the cutting edge (4) to the first line (10), and the length d1 is 0.1 μm to 7 μm.

4. The cutting blade according to claim 1 or 2, Its features are, The length d2 ranges from 10 μm to 75 μm.

5. The cutting blade according to claim 1 or 2, Its features are, The first material (18) comprises materials selected from the group consisting of or made of said materials. composition: Metals, including titanium, nickel, chromium, niobium, tungsten, tantalum, molybdenum, vanadium, platinum, germanium, iron, and alloys thereof; Ceramics, wherein the ceramics comprise carbon, nitrogen, boron, oxygen, and combinations thereof; Glass and ceramics; Composite materials made of ceramic materials in a metal matrix; hard metal; Silicon or germanium; Single crystal materials; Glass or sapphire; Polycrystalline or amorphous silicon or germanium; Single-crystal diamond or polycrystalline diamond, diamond-like carbon, adamantane carbon; and Their combination.

6. The cutting blade according to claim 1 or 2, Its features are, The second material (19) comprises or consists of materials selected from the group consisting of: Oxides, nitrides, carbides, borides; Boron, aluminum, magnesium; Carbon; and Their combination.

7. The cutting blade according to claim 1 or 2, Its features are, The second material (19) satisfies at least one of the following properties: Thickness ranges from 0.15 μm to 20 μm; Elastic modulus less than 1200 GPa; The transverse fracture stress σ0 is at least 1 GPa; The hardness is at least 20 GPa.

8. The cutting blade according to claim 1 or 2, Its features are, The second material (19) comprises nanocrystalline diamond or is composed of nanocrystalline diamond and satisfies at least one of the following properties: Average surface roughness R RMS Less than 100nm; The average grain size d of the nanocrystalline diamond 50 The range is from 1nm to 100nm.

9. The cutting blade according to claim 1 or 2, Its features are, The first material (18) and / or the second material (19) are coated with a low-friction material in at least a region, the low-friction material being selected from the group consisting of: fluoropolymers, parylene, polyvinylpyrrolidone, polyethylene, polypropylene, polymethyl methacrylate, graphite, diamond-like carbon, and combinations thereof.

10. The cutting blade according to claim 1 or 2, Its features are, The end radius of the cutting blade (4) is less than 200 nm.

11. The cutting blade according to claim 1 or 2, Its features are, The second surface (3) also includes a straight or concave third-order inclined surface (7), wherein The second line (11) connects the secondary inclined plane (6) and the third inclined plane (7). The third-level inclined plane (7) extends backward from the second line (11), A third wedge angle θ3 is provided between the first surface (9) and the third-level inclined plane (7) or between the tangents of the first surface (9) and the third-level inclined plane (7), wherein the third wedge angle θ3 ranges from 1° to 60°.

12. The cutting blade according to claim 1 or 2, Its features are, The second line (11) is arranged at the boundary surface (20) of the first material (18) and the second material (19).

13. The cutting blade according to claim 1 or 2, Its features are, The first surface (2) includes a flat first surface (9).

14. The cutting blade according to claim 1 or 2, Its features are, The first surface (2) includes a fourth-level inclined surface (8), wherein a third line (12) connects the fourth-level inclined surface (8) and the first surface (9). The fourth-level inclined plane (8) extends from the cutting edge (4) to the third line (12). A fourth wedge angle θ4 is provided between the imaginary extension (9') of the first surface and the fourth-level inclined plane (8), wherein θ4 is 5° to 75°.

15. The cutting blade according to claim 2, Its features are, The first wedge angle θ1 ranges from 12° to 75°.

16. The cutting blade according to claim 2, Its features are, The first wedge angle θ1 ranges from 15° to 46°.

17. The cutting blade according to claim 2, Its features are, The first wedge angle θ1 ranges from 20° to 45°.

18. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from -5° to 30°.

19. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from 0° to 30°.

20. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from 5° to 25°.

21. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from 0° to 20°.

22. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from 5° to 15°.

23. The cutting blade according to claim 2, Its features are, The second wedge angle θ2 ranges from 8° to 12°.

24. The cutting blade according to claim 3, The length d1 is 0.5 μm to 5 μm.

25. The cutting blade according to claim 3, The length d1 is 1 μm to 3 μm.

26. The cutting blade according to claim 4, Its features are, The length d2 ranges from 15 μm to 50 μm.

27. The cutting blade according to claim 5, Its features are, The ceramic comprises silicon carbide, zirconium oxide, aluminum oxide, silicon nitride, boron nitride, tantalum nitride, TiAlN, TiCN and / or TiB2.

28. The cutting blade according to claim 5, Its features are, The glass-ceramic is an alumina-containing glass-ceramic.

29. The cutting blade according to claim 5, Its features are, Hard metals are sintered carbide hard metals.

30. The cutting blade according to claim 5, Its features are, Hard metals are tungsten carbide or titanium carbide bonded with cobalt or nickel.

31. The cutting blade according to claim 6, Its features are, The nitrides are aluminum nitride, chromium nitride, titanium nitride, titanium carbonitride, titanium aluminum nitride, and cubic boron nitride.

32. The cutting blade according to claim 6, Its features are, Carbon is found in diamond, polycrystalline diamond, nanocrystalline diamond, diamond-like carbon, and tetrahedral amorphous carbon.

33. The cutting blade according to claim 7, Its features are, The thickness of the second material (19) is 2 μm to 15 μm.

34. The cutting blade according to claim 7, Its features are, The thickness of the second material (19) is 3 μm to 12 μm.

35. The cutting blade according to claim 7, Its features are, The elastic modulus of the second material (19) is less than 900 GPa.

36. The cutting blade according to claim 7, Its features are, The elastic modulus of the second material (19) is less than 750 GPa.

37. The cutting blade according to claim 7, Its features are, The transverse fracture stress σ0 of the second material (19) is at least 2.5 GPa.

38. The cutting blade according to claim 7, Its features are, The transverse fracture stress σ0 of the second material (19) is at least 5 GPa.

39. The cutting blade according to claim 8, Its features are, The average surface roughness R of the second material (19) RMS Less than 50nm.

40. The cutting blade according to claim 8, Its features are, The average surface roughness R of the second material (19) RMS Less than 20nm.

41. The cutting blade according to claim 8, Its features are, The average grain size d of the nanocrystalline diamond in the second material (19) 50 The range is from 5nm to 90nm.

42. The cutting blade according to claim 8, Its features are, The average grain size d of the nanocrystalline diamond in the second material (19) 50 The range is from 7nm to 30nm.

43. The cutting blade according to claim 8, Its features are, The average grain size d of the nanocrystalline diamond in the second material (19) 50 The range is from 10nm to 20nm.

44. The cutting blade according to claim 10, Its features are, The end radius of the cutting blade (4) is less than 100 nm.

45. The cutting blade according to claim 10, Its features are, The end radius of the cutting blade (4) is less than 50 nm.

46. ​​The cutting blade according to claim 11, Its features are, The range of the third wedge angle θ3 is 10° to 55°.

47. The cutting blade according to claim 11, Its features are, The third wedge angle θ3 ranges from 19° to 46°.

48. The cutting blade according to claim 11, Its features are, The third wedge angle θ3 is 45°.

49. The cutting blade according to claim 14, Its features are, The fourth wedge angle θ4 ranges from 10° to 60°.

50. The cutting blade according to claim 14, Its features are, The fourth wedge angle θ4 ranges from 15° to 46°.

51. The cutting blade according to claim 14, Its features are, The fourth wedge angle θ4 is 45°.

Images