Processing area determination method, control method and system, electronic device, and medium

Abstract

This invention provides a processing area determination method, control method and system, electronic device, and medium. The method includes: receiving in real-time position information of a workpiece and corresponding distance information; determining, based on the change in distance information, whether the position on the workpiece corresponding to the currently received distance information is an edge of the workpiece; if so, determining, based on the position information corresponding to the currently received distance information, the position information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or the position information X2 corresponding to the processing end point, where X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece; and / or X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge. This method can avoid signal abrupt changes at edges.

Description

Technical Field

[0001] This invention relates to the field of semiconductor processing technology, and more specifically to a method for determining a processing area for a processing apparatus, a control method for a processing apparatus, a control system for a processing apparatus, an electronic device, and a storage medium. Background Technology

[0002] In many fields, processing equipment incorporates automatic following systems. The following explanation uses laser processing as an example. A laser processing device includes a stage assembly, a laser rangefinder, a processing head, a piezoelectric ceramic motor, and an automatic following system. In this device, the automatic following system is a non-contact measurement and real-time focusing system. During laser cutting, the automatic following system enables automatic focusing, with the focus automatically adjusting in real time to follow changes in product thickness. This ensures consistent depth of the laser-focused modified layer during the invisible cutting process, guaranteeing cutting quality.

[0003] In traditional laser processing equipment, the distance information measured by the laser rangefinder will change abruptly at the edge of the processed product. The piezoelectric ceramic motor has a long response time to the abrupt signal, which will cause the piezoelectric ceramic motor to jitter. As a result, the automatic following performance is insufficient at the beginning and end of the processing. Summary of the Invention

[0004] The present invention was proposed in view of the above-mentioned problems. The present invention provides a method for determining the processing area of ​​a processing apparatus, a control method for a processing apparatus, a control system for a processing apparatus, an electronic device, and a storage medium.

[0005] According to one aspect of the present invention, a method for determining a processing area for a processing apparatus is provided, comprising: receiving in real time position information of a workpiece to be processed and distance information corresponding to the position information, wherein the position information indicates the position of the workpiece to be processed in a first direction when it moves relative to the processing head of the processing apparatus along the first direction, and the distance information indicates the distance between the processing head and the workpiece to be processed in a second direction when the workpiece to be processed moves relative to the processing head along the first direction; determining, based on the change range of the distance information, whether the position on the workpiece corresponding to the currently received distance information is an edge of the workpiece to be processed; and if the determination result is yes, determining, based on the currently received distance information... The distance information is used to determine the location information X1 corresponding to the start point of the processing of the workpiece reaching the effective processing area and / or the location information X2 corresponding to the end point of the processing of the workpiece reaching the effective processing area, where X1 = X3 + i1, X3 represents the location information corresponding to the current distance information when the currently received distance information corresponds to the start edge of the workpiece, and i1 represents the first correction distance; and / or where X2 = X4 - i2, X4 represents the location information corresponding to the current distance information when the currently received distance information corresponds to the end edge of the workpiece, and i2 represents the second correction distance.

[0006] For example, the method further includes: when the change in distance information exceeds a preset change threshold for the first time, determining that the currently received distance information corresponds to the starting edge of the workpiece; and / or, when the change in distance information exceeds the preset change threshold for the second time, determining that the currently received distance information corresponds to the ending edge of the workpiece.

[0007] For example, i1 is the distance the workpiece moves relative to the processing head from the first moment to the second moment, where the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece moves relative to the processing head from the third moment to the fourth moment, where the fourth moment is the moment when the change in distance information exceeds the preset change threshold for the second time, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0008] According to another aspect of the present invention, a control method for a processing apparatus is provided, comprising: receiving in real time position information of a workpiece to be processed and distance information corresponding to the position information, wherein the position information represents the position of the workpiece to be processed in a first direction when it moves relative to the processing head of the processing apparatus along the first direction, and the distance information represents the distance between the processing head and the workpiece to be processed in a second direction when the workpiece to be processed moves relative to the processing head along the first direction; determining, based on the change amplitude of the distance information, whether the position on the workpiece to be processed corresponding to the currently received distance information is the edge of the workpiece to be processed; if the determination result is yes, determining, based on the position information corresponding to the currently received distance information, the position information X1 and / or X2 corresponding to the processing start point when the workpiece to be processed reaches the effective processing area. Alternatively, determine the position information X2 corresponding to the end point of the processing of the workpiece reaching the effective processing area; if the workpiece is determined to be within the effective processing area, start from the processing start point of the effective processing area, read the corresponding distance information, and control the processing head to move in the second direction to a focal position matching the distance information based on the read distance information; where X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or where X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

[0009] For example, the method further includes: when the change in distance information exceeds a preset change threshold for the first time, determining that the currently received distance information corresponds to the starting edge of the workpiece; and / or, when the change in distance information exceeds the preset change threshold for the second time, determining that the currently received distance information corresponds to the ending edge of the workpiece.

[0010] For example, i1 is the distance the workpiece moves relative to the processing head from the first moment to the second moment, where the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece moves relative to the processing head from the third moment to the fourth moment, where the fourth moment is the moment when the change in distance information exceeds the preset change threshold for the second time, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0011] For example, the processing device includes a ranging mechanism for measuring distance information. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. Reading the corresponding distance information includes: determining second position information X6 based on first position information X5 corresponding to at least one position point in the effective processing area; when the currently received position information is second position information X6, reading the distance information corresponding to the first position information X5 from the data storage module; wherein the second position information X6 satisfies the following formula: X6=X5+δx1, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction.

[0012] For example, the processing device includes a ranging mechanism and a focusing mechanism. The ranging mechanism is used to measure distance information, and the focusing mechanism is used to drive the processing head to move in a second direction. The position information includes position information corresponding to each different position point of the workpiece to be processed, and the distance information includes distance information corresponding to each different position point of the workpiece to be processed. Reading the corresponding distance information includes determining the second position information X6 based on the first position information X5 corresponding to at least one position point in the effective processing area. When the currently received position information is the second position information X6, the distance information corresponding to the first position information X5 is read from the data storage module. The second position information X6 satisfies the following formula: X6 = X5 + δx1 - δx2, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction, and δx2 represents the distance the workpiece to be processed moves relative to the processing head in the first direction within the response time of the focusing mechanism.

[0013] According to another aspect of the present invention, a control system for a processing apparatus is provided, comprising: a data receiving module, configured to receive in real time position information of a workpiece to be processed and distance information corresponding to the position information, wherein the position information represents the position of the workpiece to be processed relative to the processing head of the processing apparatus in a first direction, and the distance information represents the distance between the processing head and the workpiece to be processed in a second direction when the workpiece to be processed moves relative to the processing head in the first direction; a data storage module, configured to store the distance information; and a reading control module, connected to the data storage module and the data receiving module, configured to: determine, based on the change amplitude of the distance information, whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece; and, if the determination result is yes, determine the distance from the workpiece to the edge of the workpiece based on the position information corresponding to the currently received distance information. The position information X1 corresponding to the processing start point of the effective processing area and / or the position information X2 corresponding to the processing end point of the effective processing area are determined; when it is determined that the workpiece is within the effective processing area, starting from the processing start point of the effective processing area, the corresponding distance information is read, so as to control the processing head to move in the second direction to a focal position matching the distance information based on the read distance information; wherein, X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or wherein, X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

[0014] For example, the reading control module is further configured to determine that the currently received distance information corresponds to the starting edge of the workpiece when the change amplitude of the distance information exceeds the preset change threshold for the first time; and / or, to determine that the currently received distance information corresponds to the ending edge of the workpiece when the change amplitude of the distance information exceeds the preset change threshold for the second time.

[0015] For example, i1 is the distance the workpiece moves relative to the processing head from the first moment to the second moment, where the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece moves relative to the processing head from the third moment to the fourth moment, where the fourth moment is the moment when the change in distance information exceeds the preset change threshold for the second time, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0016] According to another aspect of the present invention, an electronic device is provided, including a processor and a memory, wherein the memory stores computer program instructions, which, when executed by the processor, are used to perform the above-described method for determining the processing area for a processing apparatus or the above-described method for controlling a processing apparatus.

[0017] According to another aspect of the present invention, a storage medium is provided on which program instructions are stored, wherein the program instructions, when executed, are used to perform the above-described method for determining the processing area for a processing apparatus or the above-described method for controlling a processing apparatus.

[0018] According to embodiments of the present invention, the processing area determination method for a processing apparatus, the control method for a processing apparatus, the control system for a processing apparatus, the electronic device and the storage medium, and the electronic device and the storage medium, while accurately determining the processing start point and / or processing end point, can start processing later than the originally planned processing start point and / or end processing earlier than the originally planned processing end point. This can avoid signal abrupt changes at the edge of the workpiece to be processed, thereby ensuring the stability of the focusing mechanism. Attached Figure Description

[0019] The above and other objects, features, and advantages of the present invention will become more apparent from the more detailed description of the embodiments of the invention in conjunction with the accompanying drawings. The drawings are provided to further illustrate the embodiments of the invention and form part of the specification. They are used together with the embodiments of the invention to explain the invention and do not constitute a limitation thereof. In the drawings, the same reference numerals generally represent the same parts or steps.

[0020] Figure 1 A schematic diagram of a processing apparatus according to an embodiment of the present invention is shown;

[0021] Figure 2 A schematic flowchart illustrating a method for determining a processing area for a processing apparatus according to an embodiment of the present invention is shown.

[0022] Figure 3 The diagram illustrates the distance information measured by the ranging mechanism according to an embodiment of the present invention and the waveform of the real-time control signal output by the control system of the processing device to the focusing mechanism.

[0023] Figure 4 A schematic block diagram of a control system for a processing apparatus according to an embodiment of the present invention is shown.

[0024] Figure 5 A schematic diagram of a wafer-containing wafer according to an embodiment of the present invention is shown;

[0025] Figure 6A schematic diagram of an exemplary structure of a control system according to an embodiment of the present invention is shown;

[0026] Figure 7 A schematic flowchart illustrating a control method for a processing apparatus according to an embodiment of the present invention; and

[0027] Figure 8 A schematic block diagram of an electronic device according to an embodiment of the present invention is shown. Detailed Implementation

[0028] To make the objectives, technical solutions, and advantages of the present invention more apparent, exemplary embodiments according to the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of the present invention, and not all of the embodiments of the present invention. It should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described herein, all other embodiments obtained by those skilled in the art without inventive effort should fall within the protection scope of the present invention.

[0029] To make the objectives, technical solutions, and advantages of the present invention more apparent, exemplary embodiments according to the present invention will be described in detail below with reference to the accompanying drawings. Obviously, the described embodiments are merely a part of the embodiments of the present invention, and not all of the embodiments of the present invention. It should be understood that the present invention is not limited to the exemplary embodiments described herein. Based on the embodiments of the present invention described herein, all other embodiments obtained by those skilled in the art without inventive effort should fall within the protection scope of the present invention.

[0030] To facilitate understanding, an exemplary structure of the processing device will be introduced below. Figure 1 A schematic diagram of a processing apparatus 100 according to an embodiment of the present invention is shown. Figure 1 As shown, the processing apparatus 100 may include a stage assembly 110, a ranging mechanism 120, a processing head 130, and a focusing mechanism 140. Furthermore, Figure 1 The workpiece 150 to be processed is also shown. The workpiece can be any item, such as ceramics or a wafer. For ease of description and understanding, the following description primarily uses a wafer as the workpiece. Exemplarily, and not limitingly, the ranging mechanism 120 can be a laser rangefinder, and the focusing mechanism 140 can be a piezoelectric ceramic motor. The workpiece 150 and the processing head 130 can move relative to each other along a first direction, which can be such as... Figure 1 The X-axis direction shown is in the X-axis direction. Figure 1 The image shows a horizontal orientation. Note that... Figure 1 The position of the X-axis shown is only an example; its actual position can be relative to... Figure 1The position shown shifts vertically. The focusing mechanism 140 is connected to the processing head 130, and the focusing mechanism 140 can drive the processing head 130 to move together in a second direction. The second direction can be... Figure 1 The vertical direction is perpendicular to the X-axis. The ranging mechanism 120 and the processing head 130 / focusing mechanism 140 are spaced a certain distance apart in the X-axis direction.

[0031] When the workpiece 150 and the processing head 130 move relative to each other along a first direction, the position of the workpiece 150 in the first direction can be measured by a position measuring mechanism. In one embodiment, the relative movement between the workpiece 150 and the processing head 130 can be such that the position of the processing head 130 remains fixed while the workpiece 150 moves along the first direction. In this case, exemplarily, a position measuring mechanism (e.g., a linear encoder) can be used to measure the distance the workpiece 150 has moved in the first direction to indicate the position of the workpiece 150 in the first direction. In another embodiment, the relative movement between the workpiece 150 and the processing head 130 can be such that the position of the workpiece 150 remains fixed while the processing head 130 moves along the first direction. In this case, exemplarily, a position measuring mechanism (e.g., a linear encoder) can be used to measure the distance the processing head 130 has moved in the first direction to indicate the position of the workpiece 150 in the first direction. In yet another embodiment, the relative movement between the workpiece 150 and the processing head 130 can be such that the workpiece 150 and the processing head 130 move together along the first direction. In this case, for example, a position measuring mechanism (e.g., a grating ruler) can be used to measure the distance between the processing head 130 and the workpiece 150 in the first direction, which is used to indicate the position of the workpiece 150 in the first direction. This article mainly uses the scheme in which the position of the processing head 130 is kept fixed while the workpiece 150 moves along the first direction as an example for illustration.

[0032] Figure 1 The stage assembly 110 shown may include a machining platform for carrying the workpiece 150, a drive assembly for moving the machining platform (i.e., the workpiece 150) along the X-axis, and a position measuring mechanism for measuring the distance traveled by the machining platform (i.e., the workpiece 150) along the X-axis. The drive assembly may be a linear motor, such as... Figure 1The X-axis linear motor is shown. The position measuring mechanism can be a grating ruler. For example, the zero point of the grating ruler can be preset. The grating ruler is used to measure the distance of the processing platform from the origin, that is, the distance of the workpiece 150 from the origin. During processing, the drive assembly can move the processing platform along the X-axis direction. During this process, the processing head 130 processes each processing point in the X-axis direction. The position of each processing point on the X-axis can be determined by the grating ruler. When the workpiece is a wafer, the processing point can be any processing point on a dicing track parallel to the X-axis direction of the wafer. The height of each processing point can be determined by the distance information collected by the ranging mechanism 120. The distance information collected by the ranging mechanism 120 can be transmitted to the control system (which may be called an automatic following system) for the processing apparatus described herein. The control system for the processing apparatus can determine the corresponding control signal based on the distance information and output the control signal to the focusing mechanism 140, thereby controlling the focusing mechanism 140 to move up and down, so as to move the processing head 130 up and down to the focal position matching the distance information, that is, the processing position matching the height of each processing point.

[0033] It is understandable that, although in the example using a laser rangefinder as the ranging mechanism, the laser rangefinder measures the distance between the workpiece and the laser rangefinder in the second direction, this distance can be used to represent the distance between the workpiece and the processing head in the second direction. For example, the laser emitter and receiver of the laser rangefinder can be set at the same height as the end of the processing head facing the workpiece, so that the distance between the laser emitter and receiver of the laser rangefinder and the workpiece in the second direction (first distance) and the distance between the processing head and the workpiece in the second direction (second distance) are consistent. Of course, even if the first distance and the second distance are not consistent, there is still a fixed difference between them. In this case, the distance information collected by the laser rangefinder can still be used to represent the distance between the processing head and the workpiece in the second direction. It's just that when controlling the processing head to move to the focal position matching the distance information in the second direction based on the read distance information, the focal position can be appropriately adjusted up or down according to the preset difference between the first distance and the second distance. Of course, the ranging mechanism can also be designed to directly measure the distance between the workpiece and the processing head in the second direction, for example, by implementing a principle similar to a grating ruler.

[0034] As described above, the position information measured by the position measuring mechanism can include position information corresponding one-to-one with each different position point of the workpiece, and the distance information can include distance information corresponding one-to-one with each different position point of the workpiece. Here, a position point can be understood as the physical location of the workpiece. For example, when the workpiece is within the effective processing area, each position point can be the aforementioned processing point.

[0035] In one embodiment, the processing apparatus 100 may further include the control system for the processing apparatus described herein. Figure 1 (Not shown in the image). In another embodiment, the control system for the processing apparatus can be independent of the processing apparatus 100, for example, communicatively connected to the ranging mechanism 120 and the position measuring mechanism in the processing apparatus 100, receiving distance information collected by the ranging mechanism 120 and position information collected by the position measuring mechanism, and then performing follow control based on the distance information and position information.

[0036] The above technical problem is described below using laser processing of wafers as an example. During distance-based tracking control, the distance information measured by the laser rangefinder will experience signal jumps when it passes the edge of the wafer, leading to jitter in the piezoelectric ceramic motor. For example, suppose that before the piezoelectric ceramic motor starts tracking, the output of the automatic tracking system is a fixed value, such as 3V, which is the zero point of the piezoelectric ceramic motor. When the laser rangefinder reaches above the edge of the wafer, the output of the automatic tracking system will immediately jump to, for example, -2V. This causes a sudden change in the output waveform, resulting in a 5ms delay in the piezoelectric ceramic motor's tracking. That is, at time T, the automatic tracking system outputs a real-time control signal to the piezoelectric ceramic motor, but the piezoelectric ceramic motor only starts moving the processing head after T+5ms, leading to inaccurate tracking and large processing errors.

[0037] To address the aforementioned technical problems, the present invention provides a method for determining the processing area of ​​a processing device. Figure 2 A schematic flowchart illustrating a processing area determination method 200 for a processing apparatus according to an embodiment of the present invention is shown. See also Figure 2 The processing area determination method 200 includes steps S210, S220 and S230.

[0038] In step S210, the position information of the workpiece to be processed and the distance information corresponding to the position information are received in real time. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device in the first direction. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction.

[0039] It can receive distance information measured by the ranging mechanism and position information measured by the position measuring mechanism in real time. The measurement methods for position and distance information have been described above and will not be repeated here.

[0040] In step S220, based on the change range of the distance information, it is determined whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece.

[0041] In one embodiment, the presence of a signal jump, i.e., abrupt change, can be determined based on the distance information measured by the ranging mechanism, thereby determining whether the position on the wafer corresponding to the currently received distance information is the edge of the wafer. In this embodiment, a significant change in the distance information is considered a signal jump. For example, when the change in distance information exceeds a threshold value, a signal jump can be determined, indicating that the ranging mechanism is aligned with the wafer edge, or that the ranging mechanism has reached above the wafer edge. The threshold value can be set to any suitable size as needed. For example, the threshold value can be any value greater than or equal to the thickness of the workpiece. In one embodiment, the threshold value can be preset by the user.

[0042] The magnitude of change in distance information can be calculated on a per-group basis, meaning the magnitude of change within each group of data points is calculated. Each group of data points can include two or more data points, representing distance information corresponding to two or more location points. Two adjacent groups of data points may or may not share any data points at their boundary. For example, for each group of data points, the difference between the first and last data points within that group can be calculated as the magnitude of change for that group. For instance, if the magnitude of change between the current data point and the previous data point in the distance information exceeds a threshold, the position on the wafer corresponding to the current data point acquired by the ranging mechanism can be determined as the edge of the wafer. Subsequently, based on the position information corresponding to the current data point, the target position information corresponding to the wafer being at the target location can be determined.

[0043] In step S230, if the judgment result is yes, the position information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or the position information X2 corresponding to the processing end point of the workpiece reaching the effective processing area are determined according to the position information corresponding to the currently received distance information, where X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or where X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

[0044] As described above, if following control begins when the ranging mechanism aligns with one wafer edge (i.e., processing starts), and ends when it aligns with the other wafer edge (i.e., processing ends), the signal jump at the wafer edge will cause the real-time control signal generated based on the distance information to also jump, resulting in inaccurate following. Therefore, after the ranging mechanism aligns with one wafer edge, it can continue to move a certain distance, for example, a first correction distance i1, before starting following. Conversely, if there is still a certain distance before the ranging mechanism aligns with the other wafer edge, for example, a second correction distance i2, then following ends. In other words, following can start later and end earlier to avoid the signal jump problem caused by the wafer edge.

[0045] Figure 3 A schematic diagram showing distance information measured by a ranging mechanism according to an embodiment of the present invention and a waveform of a real-time control signal output by a control system for a processing apparatus to a focusing mechanism is illustrated. (Refer to...) Figure 3 When the ranging mechanism passes the edge of the workpiece, the distance information will experience signal jumps, forming rising and falling edges. If tracking begins when the rising edge appears and ends when the falling edge appears, the waveform corresponding to the unoptimized tracking interval will be obtained on the real-time control signal. However, using the method provided in this embodiment of the invention, the waveform corresponding to the optimized tracking interval will be obtained on the real-time control signal. Figure 3 As shown, the waveform corresponding to the follow interval before optimization also has two unstable signal transitions, while the follow interval after optimization can avoid these transitions well.

[0046] According to the above technical solution, while accurately determining the processing start point and / or processing end point, processing can start later than the original processing start point and / or end earlier than the original processing end point. This can avoid signal abrupt changes at the edge of the workpiece, thereby ensuring the stability of the focusing mechanism.

[0047] According to an embodiment of the present invention, the method further includes: when the change amplitude of the distance information exceeds a preset change threshold for the first time, determining that the currently received distance information corresponds to the starting edge of the workpiece to be processed; and / or, when the change amplitude of the distance information exceeds the preset change threshold for the second time, determining that the currently received distance information corresponds to the ending edge of the workpiece to be processed.

[0048] See Figure 3 When the change in distance information first exceeds the preset change threshold (i.e., the rising edge of the distance signal appears), it can be determined that the currently received distance information corresponds to the starting edge of the workpiece. When the change in distance information exceeds the preset change threshold a second time (i.e., the falling edge of the distance signal appears), it can be determined that the currently received distance information corresponds to the ending edge of the workpiece.

[0049] Throughout the processing, since the workpiece has two edges, there are at least two signal transitions for distance information. The starting and ending edges of the workpiece are determined based on the order of these transitions. This determination method is simple and efficient.

[0050] According to an embodiment of the present invention, i1 is the distance the workpiece to be processed moves relative to the processing head from the first moment to the second moment, the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece to be processed moves relative to the processing head from the third moment to the fourth moment, the fourth moment is the moment when the change in distance information second exceeds the preset change threshold, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0051] i1 represents the distance traveled between the workpiece and the processing head from the first moment to the second moment. The first moment is when the change in distance information first exceeds a preset threshold, and the second moment is when the change in distance information after the first moment does not exceed the preset threshold. In other words, after the ranging mechanism passes the starting edge of the workpiece, the continued movement of i1 distances ensures that the signal transition of the distance information has stabilized. Since signal transitions (such as rising edges) last for a period of time, this setting ensures that at least this unstable period is skipped, and processing begins only after the distance information has stabilized. The setting for i2 is similar and will not be elaborated further.

[0052] By adopting the above methods, we can better ensure that the distance information signal is stable during processing, thereby further improving processing accuracy.

[0053] According to another aspect of the present invention, a control system for a processing apparatus is provided. Figure 4 A schematic block diagram of a control system 400 for a processing apparatus according to an embodiment of the present invention is shown. By way of example, and not limitation, the control system 400 may be implemented using a field-programmable gate array (FPGA). FPGAs have high-speed signal processing capabilities, which helps to accurately determine the position of the effective processing area, thereby helping to improve the tracking performance of the control system 400. Figure 4 As shown, the control system 400 may include a data receiving module 410, a data storage module 420, and a read control module 430.

[0054] The data receiving module 410 can be used to receive the position information of the workpiece to be processed and the distance information corresponding to the position information in real time. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device in the first direction. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction.

[0055] Data storage module 420 is used to store distance information.

[0056] The read control module 430, connected to the data storage module 420 and the data receiving module 410, is used to determine whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece based on the change range of the distance information. If the determination result is yes, the position information X1 corresponding to the start point of the workpiece reaching the effective processing area and / or the position information X2 corresponding to the end point of the workpiece reaching the effective processing area are determined based on the position information corresponding to the currently received distance information. If the workpiece is determined to be within the effective processing area, the corresponding distance information is read from the start point of the effective processing area to control the processing head to move in the second direction to a focal position matching the distance information based on the read distance information. Wherein, X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the start edge of the workpiece, and i1 represents the first correction distance; and / or where, X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the end edge of the workpiece, and i2 represents the second correction distance.

[0057] The exemplary structure and working principle of the control system 400 are further described below.

[0058] Exemplarily, and not limitingly, the data receiving module 410 may include a first data receiving module and a second data receiving module. The first data receiving module may be communicatively connected to the ranging mechanism 120 for receiving distance information from the ranging mechanism 120. The second data receiving module may be communicatively connected to a position measuring mechanism for receiving position information from the position measuring mechanism. Exemplarily, the first data receiving module may be an analog-to-digital converter (ADC) module. In the case where the ranging mechanism 120 is a laser rangefinder, the distance information it acquires is an analog signal. The ADC module can convert the distance information from an analog signal to a digital signal. The sampling frequency of the ADC module can be set as needed, for example, 20 megabits per second (Mbps). In the case where the position measuring mechanism is a grating ruler, the position information output by the grating ruler is a digital pulse signal. The output frequency of the grating ruler may be, for example, 500 kilohertz (kHz). Exemplarily, and not limitingly, the control system 400 may also include at least one downsampling module to downsample the distance information (e.g., digitized distance information) output by the data receiving module 410 at least once. Downsampling can be, for example, extracting data from received data at predetermined intervals of a number of data points (each data point can be understood as distance information corresponding to a location point). Since the first data receiving module collects a large amount of data, it doesn't need to process all of it; downsampling can reduce the workload of subsequent modules. In one example, the control system 400 may also include a first downsampling module connected to the data receiving module 410 (specifically, the aforementioned first data receiving module), used to downsample the distance information output by the data receiving module, for example, downsampling 20 Mbps distance information to 500 Kbps. Exemplarily, and not limitingly, the first downsampling module may also filter the distance information, such as through sliding filtering. Filtering removes interference, making the output distance signal (i.e., distance information) smoother. Filtering can be performed before or after downsampling.

[0059] For example, if the workpiece to be processed is a wafer, the data receiving module 410 can receive the wafer's position information and the corresponding distance information in real time. The wafer's position information can be obtained from the measurement value of the grating ruler at the current moment. The distance information corresponding to this position information can be obtained from the measurement value of the ranging mechanism at the same moment. Figure 1 As shown, the ranging mechanism measures the distance between itself and the wafer surface, for example, denoted by h.

[0060] The data storage module 420 can be used to store the acquired distance information. The data storage module 420 can be implemented using any type of memory, such as Random Access Memory (RAM), Read Only Memory (ROM), or Flash Memory. Optionally, the data storage module 420 can also further store the acquired location information. When storing location and distance information, the data storage module 420 can use a one-to-one correspondence method, for example, associating the location and distance information corresponding to each location point. In one example, the data storage module 420 can store all distance information output by the data receiving module 410 or by at least one downsampling module connected to the data receiving module 410 during the entire operating period of the ranging mechanism. In another example, the data storage module 420 can store only the distance information output by the data receiving module 410 or by at least one downsampling module connected to the data receiving module 410 during a portion of the operating period of the ranging mechanism. For example, the data storage module 420 can store only the distance information output by the data receiving module 410 or by at least one downsampling module connected to the data receiving module 410 when the workpiece is within the effective acquisition area. The effective acquisition area can be preset. For example, the user can input the position information corresponding to the acquisition start point and acquisition end point of the effective acquisition area in the control system 400. When the position information acquired by the grating ruler, i.e., the position information received by the data receiving module 410, is the position information corresponding to the acquisition start point, the data storage module 420 can be controlled to start storing the current distance information, or start storing the current distance information and position information. In addition, when the position information acquired by the grating ruler, i.e., the position information received by the data receiving module 410, is the position information corresponding to the acquisition end point, the data storage module 420 can be controlled to stop storing the distance information, or stop storing the distance information and position information. Exemplarily and not limitingly, the above-described operation of controlling the data storage module 420 to store distance information can be performed by the read control module 430.

[0061] Optionally, similar to the data storage module 420, the data receiving module 410 can also receive distance information measured by the ranging mechanism (e.g., performing ADC sampling on the distance information) during the entire working period of the ranging mechanism or during a portion of the working period of the ranging mechanism. The operation of the data receiving module 410 can be understood by referring to the above description of the data storage module 420, and will not be repeated here.

[0062] The read control module 430 can be connected to the data receiving module 410 and the data storage module 420. The read control module 430 can determine whether the workpiece is within the effective processing area based at least on the current position information. If the workpiece is within the effective processing area, it reads distance information corresponding to each position point within the effective processing area from the data storage module 420, starting from the processing start point of the effective processing area. Based on the read distance information, it controls the processing head to move in a second direction to a focal position matching the distance information. In other words, the read control module 430 reads distance information corresponding to each position point within the effective processing area, including the processing start point and the processing end point of the effective processing area. In one example, for any one or more position points, when the current position information received by the data receiving module 410 is the original position information X1 corresponding to one or more position points, the read control module 430 can directly read the distance information h1 corresponding to the original position information X1 from the data storage module 420 and control the processing head to move to the matching focal position according to the distance information h1. In another example, for any one or more location points, the original location information X1 can be corrected (or error compensated) to determine new location information X2. When the location information currently received by the data receiving module 410 is location information X2, the read control module 430 can read the distance information h1 corresponding to the original location information X1 from the data storage module 420, and control the processing head to move to the matching focal position according to the distance information h1. The correction can be based on several aspects, such as the distance between the processing head and the ranging mechanism and / or the response time of the focusing mechanism, etc., these embodiments will be described below. The operation of controlling the processing head to move to the focal position matching the distance information in the second direction based on the read distance information can be performed entirely by the read control module 430, or it can be performed by the read control module 430 in conjunction with other subsequent modules connected to the read control module 430.

[0063] The above-mentioned processing area determination method 100 for the processing device can be executed by reading the control module 430. The implementation of this scheme can be understood by referring to the above text, and will not be repeated here.

[0064] The aforementioned control system receives the position and distance information of the workpiece in real time via a data receiving module. By reading the data, the control module controls the processing head to follow the workpiece in real time while it remains within the effective processing area. This approach enables high-precision determination of the starting and ending positions of the focusing mechanism, improving the stability of the following motion. Furthermore, this control system allows for precise determination of the processing start and / or end points, enabling processing to begin later than the originally planned start point and / or end earlier than the originally planned end point. This avoids signal abrupt changes at the edges of the workpiece, thus ensuring the stability of the focusing mechanism.

[0065] To facilitate understanding of this article, we will use a wafer as an example to uniformly introduce the "effective acquisition area" and "effective processing area" described in this article.

[0066] Figure 5 A schematic diagram of a wafer comprising a wafer is shown according to an embodiment of the present invention. Generally, on the wafer, the wafer is fixed on a thin film, and a metal frame is fixed to the outer periphery of the thin film. Figure 5 As shown, the edges where points B and E are located are the edges of the metal frame on the wafer. The edges where points C and D are located are the wafer edges, and the circular area surrounded by the wafer edges is the wafer area. As the wafer moves along the X-axis, the ranging mechanism aligns with each point on the wafer one by one. For example, when the wafer edge passes the ranging mechanism (or vice versa), the distance information measured by the ranging mechanism will show a jump, and this jump can be used to determine whether the wafer edge position has been detected. However, typically, when points B or E (the metal frame edge) pass the ranging mechanism, the signal output of the ranging mechanism will also show a jump, but this is not the actual wafer edge. If this point is mistakenly identified as the wafer edge, problems can easily occur during processing. Therefore, in this embodiment of the invention, the area between B and E is defined as the "effective acquisition area on the wafer," which does not include the edges where points B and E are located. The effective acquisition area on the wafer can be a region slightly larger than the wafer area. The starting point of the effective acquisition area on the wafer can be a point between points B and C, and the ending point can be a point between points D and E.

[0067] It should be noted that, although Figure 5This text uses points on a wafer as examples to describe various regions or locations. However, it is understood that these regions and locations can be correlated to regions or locations within the range of movement during the relative movement of the wafer and the processing head. That is, within this range of movement, there is an actual moving area corresponding to the aforementioned "effective acquisition area on the wafer," which is referred to as the "effective acquisition area" in this text. For example, when the wafer reaches the starting point of the effective acquisition area, the ranging mechanism can be aligned with the starting point of the effective acquisition area on the wafer; that is, the distance information acquired by the ranging mechanism is the distance information at the starting point of the effective acquisition area on the wafer. When the wafer reaches the ending point of the effective acquisition area, the ranging mechanism can be aligned with the ending point of the effective acquisition area on the wafer; that is, the distance information acquired by the ranging mechanism is the distance information at the ending point of the effective acquisition area on the wafer.

[0068] The effective acquisition area has corresponding position information at both the start and end points, i.e., corresponding grating ruler readings. The position information measured by the grating ruler can be used to determine whether the wafer has entered the effective acquisition area. Optionally, the data receiving module 410 can only receive (i.e., sample) the distance information corresponding to when the wafer enters the effective acquisition area, and / or the data storage module 420 can only store the distance information corresponding to when the wafer enters the effective acquisition area. Thus, the distance information stored in the data storage module 420 will only cause a signal transition when the ranging mechanism reaches point C or point D (wafer edge). Exemplarily, but not limitingly, the position information corresponding to the effective acquisition area on the X-axis can be preset by the user through the interactive module and can optionally be stored in the second data storage module. The second data storage module can be the data storage module 420 (which can be referred to as the first data storage module) or a storage module independent of the data storage module 420.

[0069] In one example, when the wafer reaches the starting point of the effective acquisition area, the data receiving module 410 can begin sampling the distance information and sequentially store the sampled distance information into the data storage module 420 after at least one downsampling. However, the control system 400 does not begin implementing follow control from the starting point of the effective acquisition area. Follow control is the operation of outputting real-time control signals to the focusing mechanism to control the focusing mechanism (i.e., the processing head) to move up and down following the distance information. The control system 400 can implement follow control from the moment the wafer enters the effective processing area, which can also be called the follow area. (Continue to refer to...) Figure 5In one embodiment, the area enclosed by the edges of points C and D (i.e., the wafer area) can be considered as the effective processing area on the wafer. In another embodiment, the area located inside the wafer area, i.e., smaller than the wafer area, can be considered as the effective processing area on the wafer. As described above, after the ranging mechanism aligns with one side of the wafer edge, it can continue to move a certain distance, such as a first correction distance i1. At this point, the position on the workpiece to be processed is the processing start point of the effective processing area, which can also be considered as the following start position. Conversely, before the ranging mechanism aligns with the other side of the wafer edge, there is still a certain distance, such as a second correction distance i2. At this point, the position on the workpiece to be processed is the processing end point of the effective processing area, which is the following end position. That is to say, following can start late and end early to avoid the signal jump problem caused by the wafer edge. The processing area determination method 100 for the processing apparatus adopts the method of the latter embodiment.

[0070] Similar to the effective acquisition area on the wafer, within the range of relative movement between the wafer and the processing head, there is an actual movement area corresponding to the aforementioned "effective processing area on the wafer," which is referred to herein as the "effective processing area." For example, when the wafer reaches the processing start point of the effective processing area, the ranging mechanism can be aligned with the start point of the effective processing area on the wafer; that is, the distance information acquired by the ranging mechanism is the distance information at the start point of the effective processing area on the wafer. When the wafer reaches the processing end point of the effective processing area, the ranging mechanism can be aligned with the end point of the effective processing area on the wafer; that is, the distance information acquired by the ranging mechanism is the distance information at the end point of the effective processing area on the wafer.

[0071] According to an embodiment of the present invention, the reading control module 430 can also be used to: determine that the workpiece is at the target position point when the position information received by the data receiving module 410 is target position information. When the target position information is the third position information X1 corresponding to the processing start point of the workpiece reaching the effective processing area, the target position point is the processing start point. When the target position information is the fourth position information X2 corresponding to the processing end point of the workpiece reaching the effective processing area, the target position point is the processing end point.

[0072] In one embodiment, the user can preset the change threshold through the interaction module, and optionally store it in the third data storage module. The third data storage module can be the second data storage module, data storage module 420, or a storage module included within the read control module 430, or it can be a storage module independent of the second data storage module, data storage module 420, and read control module 430.

[0073] According to an embodiment of the present invention, the reading control module is further configured to determine that the currently received distance information corresponds to the starting edge of the workpiece when the change amplitude of the distance information exceeds the preset change threshold for the first time; and / or, determine that the currently received distance information corresponds to the ending edge of the workpiece when the change amplitude of the distance information exceeds the preset change threshold for the second time.

[0074] According to an embodiment of the present invention, i1 is the distance the workpiece to be processed moves relative to the processing head from the first moment to the second moment, the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece to be processed moves relative to the processing head from the third moment to the fourth moment, the fourth moment is the moment when the change in distance information second exceeds the preset change threshold, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0075] The embodiments for determining that the currently received distance information corresponds to the start edge / or end edge of the workpiece to be processed, as well as the embodiments for setting i1 and i2, have been described above and will not be repeated here.

[0076] According to an embodiment of the present invention, the processing apparatus includes a ranging mechanism for measuring distance information. The ranging mechanism is used to measure distance information. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. The reading control module 430 can read the corresponding distance information from the data storage module 420 in the following manner: determining the second position information X6 based on the first position information X5 corresponding to at least one position point in the effective processing area; when the currently received position information is the second position information X6, reading the distance information corresponding to the first position information X5 from the data storage module; wherein the second position information X6 satisfies the following formula: X6 = X5 + δx1, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction.

[0077] See back Figure 1There is a certain distance, denoted as δx1, between the ranging mechanism and the processing head in the first direction. As described above, the ranging mechanism can reach any position point first, and then the processing head will only reach that position point after the workpiece and / or processing head has moved a certain distance. Therefore, for any position point, if processing is initiated at that position point as soon as the position information received by the data receiving module 410 equals the position information corresponding to the distance measured by the ranging mechanism, there will be a certain error because the processing head has not actually reached that position point yet. Adding the original position information of any position point to δx1 can compensate for this error, making the processing position of the processing head more accurate.

[0078] It should be noted that the aforementioned first position information X5 is position information that corresponds one-to-one with at least one position point. That is, for each of the at least one position points, it has its own first position information X5 (i.e., the original position information without error compensation). Furthermore, for each of the at least one position points, its corresponding first position information X5 can be added to δx1 to obtain the corresponding second position information X6 (i.e., the new position information after error compensation).

[0079] The location points within the effective processing area can include the processing start point and the processing end point. That is, the above error compensation operation based on δx1 can also be performed for these two location points.

[0080] According to the above technical solution, this solution can compensate for the error caused by the installation distance between the ranging mechanism and the processing head, thereby effectively improving the processing accuracy.

[0081] According to an embodiment of the present invention, the processing apparatus further includes a ranging mechanism and a focusing mechanism. The ranging mechanism is used to measure distance information, and the focusing mechanism is used to drive the processing head to move in a second direction. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. The reading control module 430 can read the corresponding distance information from the data storage module in the following manner: determine the second position information X6 based on the first position information X5 corresponding to at least one position point in the effective processing area; when the currently received position information is the second position information X6, read the distance information corresponding to the first position information X5 from the data storage module; wherein the second position information X6 satisfies the following formula: X6=X5+δx1-δx2, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction, and δx2 represents the moving distance of the workpiece to be processed relative to the processing head in the first direction during the response time of the focusing mechanism.

[0082] During follow-up control, a certain response time is required from sending a control signal to the focusing mechanism 140 to the focusing mechanism 140 responding. In laser processing equipment, the following accuracy requirements in the wafer's movement direction (i.e., the X-axis direction) are relatively high, needing to reach the micrometer level. However, the response time of the piezoelectric ceramic motor is in the millisecond range, which directly affects the X-axis following accuracy, and thus the final cutting accuracy. Therefore, it is possible to consider compensating for the error caused by the response time of the focusing mechanism.

[0083] In one embodiment, the response time of the focusing mechanism can be considered fixed, i.e., δx2 is fixed. In this case, the value of δx2 can be preset. For each position point, the second position information X6 is calculated uniformly based on the preset δx2. Exemplarily, δx2 can be set by the user through the interaction module, and the set δx2 can optionally be stored in the fourth data storage module. The fourth data storage module can be the second data storage module, the third data storage module, the data storage module 420, or a storage module included within the read control module 430, or a storage module independent of the second data storage module, the third data storage module, the data storage module 420, and the read control module 430.

[0084] In another embodiment, the response time can be determined by the rate of change of distance information corresponding to multiple position points. Based on this response time, δx2 corresponding to the multiple position points is determined, and error compensation is performed on the first position information X5 corresponding to these multiple position points based on the determined δx2 to obtain the second position information X6 corresponding to the multiple position points. In this scheme, position points within the effective processing area can be grouped, with multiple position points forming a position point group. Adjacent position point groups can share position points at the boundary or not share any position points. For any two different position point groups, if their rates of change are different, the corresponding response times will also be different, and therefore the compensation distance δx2 will be different. The reason for implementing this scheme is that the response time of the focusing mechanism 140 is related to the step of the input signal, but is basically independent of the amplitude of the input signal. The following uses a piezoelectric ceramic motor as an example for explanation. When the input signal is a sine wave, the response time of the piezoelectric ceramic motor is approximately 2.7ms; when the input signal is a pulse wave, the response time of the piezoelectric ceramic motor is approximately 5ms. For example, an external signal (e.g., a signal generated by a signal generator) can be used as an input signal to the focusing mechanism 140 for testing. By adjusting the slope of the input signal, a relationship function between the slope k1 of the input signal and the response time y is fitted, for example, y = f(k1). In this way, after determining the rate of change of multiple position points, the corresponding response time can be determined based on the above relationship function.

[0085] The above-mentioned scheme with fixed response time has a simple algorithm, low requirements for hardware and software, and low cost, while the scheme with real-time response time has good tracking performance and high processing accuracy.

[0086] According to the above technical solution, this solution can compensate for the errors caused by response time and the installation distance between the ranging mechanism and the processing head, thereby effectively improving the processing accuracy.

[0087] According to an embodiment of the present invention, the processing apparatus further includes a focusing mechanism for driving the processing head to move in a second direction. The system further includes: a first data processing module connected to the reading control module for performing numerical simulation based on the distance information received from the reading control module to obtain a fitting signal; and an output module connected to the first data processing module for generating a corresponding real-time control signal based on the fitting signal and outputting the real-time control signal to the focusing mechanism to control the focusing mechanism to drive the processing head to a focal position matching the distance information in the second direction.

[0088] In one embodiment, the control system 400 may further include a first data processing module and an output module. Figure 6 A schematic diagram illustrating an exemplary structure of a control system 400 according to an embodiment of the present invention is shown. It should be noted that... Figure 6 The various modules in the control system 400 shown are merely examples and not intended to limit the invention. Many of these modules can be omitted or replaced with other modules, and the control system 400 may further include... Figure 6 Other modules besides the one shown. Additionally, Figure 6 The connection relationships between the various modules shown can also be adjusted.

[0089] See Figure 6 The diagram illustrates the first data processing module. This first data processing module can be a digital-to-analog (DA) fitting output module, connected to the readout control module 430. The first data processing module can perform DA fitting based on the distance information received from the readout control module 430 using the formula y = k²h + b. Here, h represents the distance information measured by the ranging mechanism, k² and b can be pre-set, and y can represent the fitted signal obtained after fitting. (See also...) Figure 6 The diagram also shows an output module. The output module is connected to the first data processing module, and the fitted signal obtained by the first data processing module can be transmitted to the output module. The output module can generate a corresponding real-time control signal based on the fitted signal and output the real-time control signal to the focusing mechanism. The real-time control signal can control the focusing mechanism to move the processing head in the second direction to a focal position that matches the distance information read by the ranging mechanism.

[0090] For example, see Figure 6The output module may include an output control submodule and a data output submodule. The output control submodule may be a DA output control submodule, used to control the data output submodule to output real-time control signals. The data output submodule may be a digital-to-analog converter (DAC) submodule, which can perform digital-to-analog conversion and other operations on the real-time control signals to obtain analog real-time control signals and output these signals to the focusing mechanism.

[0091] In addition, see Figure 6 The diagram also shows the first and second data receiving modules described above. Referring to the above description, the functions of the first and second data receiving modules can be understood, and will not be repeated here. Furthermore, see... Figure 6 The diagram also shows a second data processing module. This second data processing module can be understood as the aforementioned first downsampling module. That is, the second data processing module can downsample the distance information received by the first data receiving module and can optionally perform sliding filtering. Furthermore, Figure 6 It is also shown that the output signal frequency of the first data receiving module is 200 Mbps, the output signal frequency of the second data processing module is 500 Kbps, and the output signal frequency of the second data receiving module (which may be the pulse output frequency of a position measuring mechanism such as a grating ruler) is 500 kHz, but these are just examples and these frequencies can be adjusted as needed.

[0092] According to the above technical solution, based on the first data processing module and the output module, a fitted signal can be obtained, and a corresponding real-time control signal can be generated based on the fitted signal. This allows for automatic control of the focusing mechanism to move the processing head in the second direction. This solution has a high degree of automation.

[0093] For example, the system further includes: a first interaction module connected to the output module, used to obtain first indication information from the host computer, and the output module is further used to generate a fixed control signal based on the first indication information before the processing head is at the processing start point in the effective processing area, and output the fixed control signal to the focusing mechanism to control the focusing mechanism to drive the processing head to stay in a fixed position in the second direction.

[0094] In one embodiment, the control system 400 may further include a first interaction module. See also Figure 6The diagram illustrates an interaction module, which may include a first interaction module. The first interaction module may include any wired and / or wireless communication interface to communicate with a host computer and receive first instruction information from the host computer. For example, the first interaction module may include one or more of an RS232 interface, a Bluetooth interface, a WiFi interface, and a Universal Serial Bus (USB) interface. Furthermore, the first interaction module may also include an instruction configuration submodule, used to transmit instruction information to the corresponding module based on the type of instruction information received from the host computer. For example, upon receiving first instruction information, the instruction configuration submodule may transmit the first instruction information to an output module for corresponding output control. As another example, upon receiving the following second instruction information, the instruction configuration submodule may transmit the second instruction information to a judgment module for corresponding judgment.

[0095] Users can input first position information into the host computer using input devices such as a mouse, keyboard, or touchscreen. The host computer can then transmit this first instruction information to the first interaction module. (See also...) Figure 6 The first interaction module can be connected to the output module. The first indication information can indicate any voltage value, based on which the focusing mechanism can be activated, but the focusing mechanism does not move in the second direction, but remains in a fixed position. Before the workpiece enters the effective processing area, the output module can generate a fixed control signal based on the first indication information. Then, the fixed control signal is output to the focusing mechanism to control the focusing mechanism to keep the processing head fixed in the vertical direction.

[0096] For example, the first interaction module can be connected to the aforementioned output control submodule and transmit the first indication information to the output control submodule. Upon receiving the first indication information, the output control submodule controls the data output submodule to output a fixed control signal. Conversely, upon receiving the aforementioned fitting signal, the output control submodule can control the data output submodule to output a real-time control signal.

[0097] The first indication information may include a "register" value used to indicate the magnitude of a fixed control signal. There is a preset correspondence between the register value and the voltage value. For example, if the register value transmitted from the host computer to the first interactive module is 0 (before and after implementing follow control), the output module can output a fixed voltage (e.g., according to a pre-configured correspondence between register values ​​and voltage values ​​in the FPGA). Alternatively, the host computer can also output third indication information to the first interactive module. Assuming the third indication information includes a register value of 1, the magnitude of the voltage output by the output module can be calculated in real-time based on distance information (i.e., in the case of real-time follow control).

[0098] Optionally, for situations following real-time follow control, to avoid piezoelectric ceramic motor jitter caused by edge signal jumps, the voltage corresponding to register value 0 can be omitted after implementing follow control. Instead, the voltage corresponding to the last position point during follow control (i.e., the magnitude of the real-time control signal corresponding to the last position point) can be maintained. In this case, the host computer does not need to send register value 0 to the interaction module after implementing follow control.

[0099] According to the above technical solution, based on the first interactive module, it can receive the first instruction information and generate a fixed control signal based on the first instruction information. This makes it convenient to keep the focusing mechanism driving the processing head in a suitable position according to the user's needs before implementing follow control.

[0100] For example, the reading control module is also used to control the data storage module to store distance information during the process of the workpiece being processed being at the start point and end point of the effective collection area. The effective collection area includes the effective processing area. The system also includes: a judgment module, connected to the data receiving module and the reading control module, used to determine whether the workpiece has reached the start point or end point of the collection based on the position information; and a second interaction module, connected to the judgment module, used to obtain second indication information from the host computer. The judgment module determines the position information corresponding to the start point and end point of the collection based on the second indication information.

[0101] The second interaction module and the first interaction module can be the same interaction module (e.g., ...). Figure 6 The interactive module shown can be either one or two separate interactive modules. Similar to the first interactive module, the second interactive module can include any wired and / or wireless communication interface to communicate with the host computer and receive second instruction information from the host computer. For example, the second interactive module can include one or more of the following: RS232 interface, Bluetooth interface, WiFi interface, Universal Serial Bus (USB) interface, etc. If the first and second interactive modules are implemented using the same interactive module, this interactive module can include the aforementioned instruction configuration submodule. If the first and second interactive modules are two separate interactive modules, the instruction configuration submodule can optionally be omitted from both the first and second interactive modules.

[0102] In one embodiment, the read control module 430 can also be used to control the data storage module 420 to store the distance information collected by the ranging mechanism during the process of the wafer moving from the starting point to the ending point of the effective acquisition area. For example... Figure 6As shown, the control system 400 may further include a judgment module. The judgment module can be connected to the second data receiving module and the second interaction module. The user can input second position information into the host computer via input devices such as a mouse, keyboard, or touchscreen. The host computer can then transmit the second indication information to the second interaction module. The second indication information may include the position information corresponding to the acquisition start point and acquisition end point. For example, the user can use the keyboard to input the measurement values ​​on the grating ruler corresponding to the acquisition start point and acquisition end point in the information input boxes displayed on the user interface of the host computer. The judgment module can determine in real time whether the workpiece to be processed has reached the acquisition start point or acquisition end point based on the position information received by the data receiving module 410. The reading control module 430 can control the data storage module 420 to store distance information during the process of the workpiece being within the effective acquisition area at the acquisition start point and acquisition end point, based on the judgment result of the judgment module.

[0103] According to the above technical solution, it is possible to automatically determine whether the workpiece to be processed is within the collection start point and collection end point of the collection area, and to control the data storage module to store distance information while the workpiece is within the effective collection area. This solution can effectively save storage space and also help reduce the workload of the control system 400.

[0104] According to another aspect of the present invention, a control method for a processing apparatus is also provided. Figure 7 A schematic flowchart illustrating a control method 700 for a processing apparatus according to an embodiment of the present invention is shown. See also Figure 7 The control method 700 for the processing apparatus includes steps S710, S720, S730 and S740.

[0105] In step S710, the position information of the workpiece to be processed and the distance information corresponding to the position information are received in real time. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device in the first direction. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction.

[0106] In step S720, based on the change range of the distance information, it is determined whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece.

[0107] In step S730, if the determination result is yes, the position information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or the position information X2 corresponding to the processing end point of the workpiece reaching the effective processing area are determined according to the position information corresponding to the currently received distance information, wherein X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or wherein X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

[0108] In step S740, if it is determined that the workpiece is within the effective processing area, starting from the processing start point of the effective processing area, the corresponding distance information is read, and the processing head is controlled to move in the second direction to a focal position that matches the distance information based on the read distance information.

[0109] According to an embodiment of the present invention, the method further includes: when the change amplitude of the distance information exceeds a preset change threshold for the first time, determining that the currently received distance information corresponds to the starting edge of the workpiece to be processed; and / or, when the change amplitude of the distance information exceeds the preset change threshold for the second time, determining that the currently received distance information corresponds to the ending edge of the workpiece to be processed.

[0110] According to an embodiment of the present invention, i1 is the distance the workpiece to be processed moves relative to the processing head from the first moment to the second moment, the first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 is the distance the workpiece to be processed moves relative to the processing head from the third moment to the fourth moment, the fourth moment is the moment when the change in distance information second exceeds the preset change threshold, and the third moment is the moment before the fourth moment when the change in distance information does not exceed the preset change threshold.

[0111] According to an embodiment of the present invention, the processing apparatus includes a ranging mechanism for measuring distance information. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. Reading the corresponding distance information includes: determining second position information X6 based on first position information X5 corresponding to at least one position point in the effective processing area; when the currently received position information is second position information X6, reading the distance information corresponding to the first position information X5 from the data storage module; wherein the second position information X6 satisfies the following formula: X6=X5+δx1, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction.

[0112] According to an embodiment of the present invention, the processing device includes a ranging mechanism and a focusing mechanism. The ranging mechanism is used to measure distance information, and the focusing mechanism is used to drive the processing head to move in a second direction. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. Reading the corresponding distance information includes: determining second position information X6 based on first position information X5 corresponding to at least one position point in the effective processing area; when the currently received position information is second position information X6, reading the distance information corresponding to the first position information X5 from the data storage module; wherein, the second position information X6 satisfies the following formula: X6=X5+δx1-δx2, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction, and δx2 represents the moving distance of the workpiece to be processed relative to the processing head in the first direction during the response time of the focusing mechanism.

[0113] According to another aspect of the present invention, an electronic device is also provided. Figure 8 A schematic block diagram of an electronic device 800 according to an embodiment of the present invention is shown, such as... Figure 8 As shown, the electronic device 800 may include a processor 810 and a memory 820. The memory 820 stores a computer program, and the processor 810 executes the computer program to implement the processing area determination method for the processing apparatus as described above, or the control method for the processing apparatus as described above.

[0114] According to another aspect of the present invention, a storage medium is also provided. Program instructions are stored on the storage medium, which, when executed, are used to perform the processing area determination method for a processing apparatus as described above, or the control method for a processing apparatus as described above. The storage medium may, for example, include a storage component of a tablet computer, a hard disk of a personal computer, a read-only memory (ROM), an erasable programmable read-only memory (EPROM), a portable compact disc read-only memory (CD-ROM), a USB memory, or any combination of the above storage media. The computer-readable storage medium may be any combination of one or more computer-readable storage media.

[0115] Those skilled in the art can understand the specific implementation schemes of the above-mentioned control method, electronic equipment and storage medium for the processing apparatus by reading the above description of the processing area determination method for the processing apparatus and the control system for the processing apparatus. For the sake of brevity, they will not be described in detail here.

[0116] Although exemplary embodiments have been described herein with reference to the accompanying drawings, it should be understood that the above exemplary embodiments are merely illustrative and are not intended to limit the scope of the invention. Various changes and modifications can be made therein by those skilled in the art without departing from the scope and spirit of the invention. All such changes and modifications are intended to be included within the scope of the invention as claimed in the appended claims.

[0117] Those skilled in the art will recognize that the units and algorithm steps of the various examples described in conjunction with the embodiments disclosed herein can be implemented in electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are implemented in hardware or software depends on the specific application and design constraints of the technical solution. Those skilled in the art can use different methods to implement the described functions for each specific application, but such implementations should not be considered beyond the scope of this invention.

[0118] It should be noted that the above embodiments are illustrative of the invention and not restrictive, and that those skilled in the art can devise alternative embodiments without departing from the scope of the appended claims. In the claims, any reference signs placed between parentheses should not be construed as limiting the claims. The word "comprising" does not exclude the presence of elements or steps not listed in the claims. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements. The invention can be implemented by means of hardware comprising several different elements and by means of a suitably programmed computer. In the unit claims enumerating several means, several of these means may be embodied by the same item of hardware. The use of the words first, second, and third, etc., does not indicate any order. These words can be interpreted as names.

[0119] The above description is merely a specific embodiment of the present invention or an explanation of that embodiment. The scope of protection of the present invention is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in the present invention should be included within the scope of protection of the present invention. The scope of protection of the present invention should be determined by the scope of the claims.

Claims

1. A method for determining the processing area of ​​a processing apparatus, comprising: The device receives in real time the position information of the workpiece to be processed and the distance information corresponding to the position information. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction. Based on the change range of the distance information, determine whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece; If the determination result is yes, based on the location information corresponding to the currently received distance information, determine the location information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or determine the location information X2 corresponding to the processing end point of the workpiece reaching the effective processing area. Wherein, X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or where, X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

2. The method of claim 1, wherein, The method further includes: When the change in the distance information exceeds the preset change threshold for the first time, it is determined that the currently received distance information corresponds to the starting edge of the workpiece to be processed; and / or, when the change in the distance information exceeds the preset change threshold for the second time, it is determined that the currently received distance information corresponds to the ending edge of the workpiece to be processed.

3. The method of claim 2, wherein, i1 represents the distance traveled between the workpiece and the processing head from the first moment to the second moment. The first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 represents the distance the workpiece to be processed moves relative to the processing head from the third time to the fourth time. The fourth time is the moment when the change in the distance information exceeds the preset change threshold for the second time. The third time is the moment when the change in the distance information did not exceed the preset change threshold before the fourth time.

4. A control method for a processing apparatus, comprising: The device receives in real time the position information of the workpiece to be processed and the distance information corresponding to the position information. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction. Based on the change range of the distance information, determine whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece; If the judgment result is yes, based on the location information corresponding to the currently received distance information, determine the location information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or determine the location information X2 corresponding to the processing end point of the workpiece reaching the effective processing area; When it is determined that the workpiece to be processed is within the effective processing area, starting from the processing start point of the effective processing area, the corresponding distance information is read, so as to control the processing head to move in the second direction to a focal position that matches the distance information based on the read distance information; Wherein, X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or where, X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

5. The method of claim 4, wherein, The method further includes: When the change in the distance information exceeds the preset change threshold for the first time, it is determined that the currently received distance information corresponds to the starting edge of the workpiece to be processed; and / or, when the change in the distance information exceeds the preset change threshold for the second time, it is determined that the currently received distance information corresponds to the ending edge of the workpiece to be processed.

6. The method of claim 5, wherein, i1 represents the distance traveled between the workpiece and the processing head from the first moment to the second moment. The first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 represents the distance the workpiece to be processed moves relative to the processing head from the third time to the fourth time. The fourth time is the moment when the change in the distance information exceeds the preset change threshold for the second time. The third time is the moment before the fourth time when the change in the distance information did not exceed the preset change threshold.

7. The method according to any one of claims 4-6, characterized in that, The processing device includes a ranging mechanism for measuring distance information. The position information includes location information corresponding one-to-one with each different location point of the workpiece to be processed. The distance information includes distance information corresponding one-to-one with each different location point of the workpiece to be processed. The reading of the corresponding distance information includes: Based on the first position information X5 corresponding to at least one position point within the effective processing area, determine the second position information X6; When the currently received location information is the second location information X6, the distance information corresponding to the first location information X5 is read from the data storage module; Wherein, the second position information X6 satisfies the following formula: X6=X5+δx1, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction.

8. The method according to any one of claims 4-6, characterized in that, The processing device includes a ranging mechanism and a focusing mechanism. The ranging mechanism is used to measure the distance information, and the focusing mechanism is used to move the processing head in the second direction. The position information includes position information corresponding one-to-one with each different position point of the workpiece to be processed, and the distance information includes distance information corresponding one-to-one with each different position point of the workpiece to be processed. The reading of the corresponding distance information includes: Based on the first position information X5 corresponding to at least one position point within the effective processing area, determine the second position information X6; When the currently received location information is the second location information X6, the distance information corresponding to the first location information X5 is read from the data storage module; Wherein, the second position information X6 satisfies the following formula: X6=X5+δx1-δx2, where δx1 represents the distance between the ranging mechanism and the processing head in the first direction, and δx2 represents the distance the workpiece to be processed moves relative to the processing head in the first direction within the response time of the focusing mechanism.

9. A control system for a processing apparatus, characterized in that, include: The data receiving module is used to receive in real time the position information of the workpiece to be processed and the distance information corresponding to the position information. The position information is used to indicate the position of the workpiece to be processed in the first direction when it moves relative to the processing head of the processing device. The distance information is used to indicate the distance between the processing head and the workpiece to be processed in the second direction when the workpiece to be processed moves relative to the processing head in the first direction. Data storage module, used to store the distance information; The read control module, connected to the data storage module and the data receiving module, is used for: Based on the change range of the distance information, determine whether the position on the workpiece corresponding to the currently received distance information is the edge of the workpiece; If the judgment result is yes, based on the location information corresponding to the currently received distance information, determine the location information X1 corresponding to the processing start point of the workpiece reaching the effective processing area and / or determine the location information X2 corresponding to the processing end point of the workpiece reaching the effective processing area; When it is determined that the workpiece to be processed is within the effective processing area, starting from the processing start point of the effective processing area, the corresponding distance information is read, so as to control the processing head to move in the second direction to a focal position that matches the distance information based on the read distance information; Wherein, X1 = X3 + i1, X3 represents the position information corresponding to the currently received distance information when it corresponds to the starting edge of the workpiece, and i1 represents the first correction distance; and / or where, X2 = X4 - i2, X4 represents the position information corresponding to the currently received distance information when it corresponds to the ending edge of the workpiece, and i2 represents the second correction distance.

10. The system of claim 9, wherein, The reading control module is also used to determine that the currently received distance information corresponds to the starting edge of the workpiece when the change amplitude of the distance information exceeds a preset change threshold for the first time; And / or, when the change in the distance information exceeds the preset change threshold for the second time, it is determined that the currently received distance information corresponds to the end edge of the workpiece to be processed.

11. The system of claim 10, wherein, i1 represents the distance traveled between the workpiece and the processing head from the first moment to the second moment. The first moment is the moment when the change in distance information first exceeds the preset change threshold, and the second moment is the moment after the first moment when the change in distance information does not exceed the preset change threshold; and / or, i2 represents the distance the workpiece to be processed moves relative to the processing head from the third time to the fourth time. The fourth time is the moment when the change in the distance information exceeds the preset change threshold for the second time. The third time is the moment when the change in the distance information did not exceed the preset change threshold before the fourth time.

12. An electronic device comprising a processor and a memory, wherein, The memory stores computer program instructions, which, when executed by the processor, are used to perform the processing area determination method for a processing apparatus as described in any one of claims 1-3 or the control method for a processing apparatus as described in any one of claims 4-8.

13. A storage medium having stored thereon program instructions which, when executed by a processor, cause the processor to perform the method of any of claims 1 to 12. The program instructions, when executed, are used to perform the processing area determination method for a processing apparatus as described in any one of claims 1-3 or the control method for a processing apparatus as described in any one of claims 4-8.

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