Processing method of siliceous tile boat

Abstract

The present invention provides a processing method for a siliceous tile boat, which relates to the technical field of silicon boat preparation methods. A blank is cut and flat-ground to obtain a blank to be processed with qualified appearance dimensions, and then the blank to be processed is bonded to a quartz plate. The quartz plate to which the blank is bonded is clamped to a machine tool worktable to obtain a clamped blank. A processing coordinate system is set on the clamped blank, and the clamped blank is rough-processed and fine-processed based on the coordinate system to obtain a silicon boat tile boat to be inspected. The silicon boat tile boat to be inspected is inspected, and if the inspection fails, fine processing is continued. If the inspection passes, a finished silicon boat tile boat is obtained. The silicon boat tile boat prepared by this process has a moderate production time and a high pass rate.

Description

Technical Field

[0001] The invention belongs to the technical field of silicon boat preparation methods, and particularly relates to a processing method for a silicon tile boat. Background Art

[0002] Silicon wafers are the primary substrate material for modern ultra-large-scale integrated circuits (VLSIs). They are typically manufactured through processes including crystal pulling, slicing, chamfering, grinding, etching, back-sealing, polishing, and cleaning. Silicon wafer heat treatment is a crucial step in the fabrication of semiconductor devices or circuits. This process encompasses numerous processes, including CVD, oxidation, diffusion, and annealing, and accounts for the majority of the integrated circuit manufacturing process. This requires a carrier to hold the semiconductor wafers. The wafers are then placed on the carrier and placed in a heat treatment furnace for processing. This carrier, known in the industry as a wafer boat, is a crucial step in the fabrication of semiconductor devices or circuits.

[0003] Currently, the commonly used silicon wafer boats on the market include quartz boats, silicon carbide boats, and silicon tile boats. Quartz boats, when used as carriers for silicon wafers, can deform and soften over extended periods of use at processing temperatures exceeding 1000°C, leading to processing anomalies for the wafers placed within. Furthermore, the quartz boats and silicon wafers are made of different materials, resulting in significantly different coefficients of thermal expansion and contraction. This can lead to cold spots during heating and cooling, causing lattice collapse and grain dislocation, thus affecting wafer quality. As for silicon carbide boats, as the size of silicon wafers increases, the sophistication of integrated circuits becomes higher and higher, and the requirements for production processes become more and more stringent, oxidation reactions may occur during high-temperature processing, which may affect the quality of silicon wafers. In addition, silicon carbide material is a non-oxide material. Under high temperature and oxidizing conditions, it will inevitably cause oxidation problems. Although the oxidation product of SiC is SiO2, which can serve as a protective film to prevent further oxidation, at a temperature of about 800℃-1140℃, the SiO2 film will produce a volume change due to phase change, making its structure loose and the oxidation protection effect sharply reduced.

[0004] Therefore, with the advancement of semiconductor technology, quartz boats and silicon carbide boats have gradually become inadequate for the production of high-standard silicon wafers. Instead, high-purity silicon tile boats have emerged. These boats offer excellent stability at high temperatures. Using the same material as silicon wafers, they can reduce lattice defects caused by stress differences during temperature fluctuations. However, the silicon material in high-purity silicon tile boats is brittle, making it difficult to plastically remove the silicon with metal tools. Diamond-type tools can only be used for brittle removal through grinding, making them prone to cracking and breakage during processing. Summary of the Invention

[0005] In view of this, the present invention provides a method for processing a silicon tile boat, which can improve the processing quality of a high-purity silicon boat.

[0006] The technical solution adopted by the present invention to solve its technical problem is:

[0007] A method for processing a siliceous tile boat, for processing the siliceous tile boat, comprises the following steps:

[0008] Step 1: Cut the blank and grind it flat to obtain the blank to be processed;

[0009] Step 2: Bonding the blank to be processed onto the quartz plate, and clamping the quartz plate with the blank bonded to the machine tool worktable to obtain a clamped blank;

[0010] Step 3: Set a processing coordinate system on the clamped blank, and perform rough processing and fine processing on the clamped blank based on the coordinate system to obtain the silicon tile boat to be tested;

[0011] Step 4: Inspect the siliceous tile boat to be inspected. If it fails the inspection, continue to perform fine processing. If it passes the inspection, a finished siliceous tile boat is obtained.

[0012] Preferably, in the step three, setting the processing coordinate system on the clamped blank specifically comprises: setting the processing coordinate system on the upper surface of the quartz plate on which the blank has been clamped.

[0013] Preferably, in the step three, setting the processing coordinate system on the clamped blank is specifically: setting the processing coordinate system on the upper surface of the blank to be processed of the clamped blank, and cutting from the zero point to the negative value during processing.

[0014] Preferably, in the step three, the rough processing includes: S1: first processing the interior of the clamped blank with a roughing tool, and then processing the outer contour of the clamped blank to obtain a roughed product, the roughing tool diameter is 40-80mm-100-180#: the single cutting depth of the roughing tool is 0.1-0.3mm, the cutting width is 25-50mm, and the cutting speed is 300-600mm / min;

[0015] S2: Use the rough milling window tool to cut the roughened product and process the window to obtain the rough-processed product. The single cutting depth is 0.01-0.03mm, the cutting width is 10mm, and the cutting speed is 300-800mm / min.

[0016] Preferably, in the step three, the finishing includes: S1: cutting the rough-machined product with a finishing window cutter to finish the shape and size of the window to obtain a first finishing product, wherein the finishing window cutter has a diameter of 6mm-200-400#: a single cutting depth of 0.01-0.03mm, a cutting width of 6mm, and a cutting speed of 300-800mm / min;

[0017] S2: chamfering the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-200-400#, a single cutting depth of 0.01-0.03mm, a cutting width of 4mm, and a cutting speed of 100-500mm / min.

[0018] S3: According to the size of the siliceous tile boat drawing, use the fine milling tool to process the size of the second fine-processed product to obtain the siliceous tile boat to be tested. The diameter of the fine milling tool is 30mm-200-400#: single cutting depth 0.01-0.03mm, cutting width 0.5mm, cutting speed 500-1500mm / min.

[0019] Preferably, in the step three, the rough processing includes: S1: first processing the outer contour of the clamped blank with a roughing tool, and then processing the inner part of the clamped blank to obtain a roughed product, the roughing tool diameter is 50-60mm-80-150#: single cutting depth is 0.25-0.5mm, cutting width is 25-50mm, and cutting speed is 600-800mm / min;

[0020] S2: Use a rough milling window tool to cut the roughened product and process the window to obtain a rough-processed product. The diameter of the rough milling window tool is 50-60mm-80-150#: single cutting depth is 0.25-0.5mm, cutting width is 25-50mm, and cutting speed is 600-800mm / min.

[0021] Preferably, in step three, the finishing step includes: S1: cutting the rough-machined product with a finishing window cutter to finish the shape and size of the window to obtain a first finishing product, wherein the finishing window cutter has a diameter of 6mm-200-300#: a single cutting depth of 0.05-0.1mm, a cutting width of 6mm, and a cutting speed of 800-1000mm / min;

[0022] S2: Chamfer the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-270-350#, a single cutting depth of 0.03-0.05mm, a cutting width of 4mm, and a cutting speed of 300-500mm / min.

[0023] S3: According to the size of the siliceous tile boat drawing, use the fine milling tool to process the size of the second fine-processed product to obtain the siliceous tile boat to be tested. The diameter of the fine milling tool is 30mm-270-400#: single cutting depth 0.05-0.1mm, cutting width 0.3mm, cutting speed 2000-2500mm / min.

[0024] Preferably, in the rough machining step: when the roughing tool has finished machining the interior of the clamped blank, a first tooling is required to be padded inside the clamped blank, and the first tooling is fitted with the interior of the clamped blank.

[0025] Preferably, the first tooling includes: a first rectangular block, an isosceles trapezoidal block, and a second rectangular block. The upper part of the first rectangular block is in contact with the isosceles trapezoidal block, and the upper part of the isosceles trapezoidal block is in contact with the second rectangular block. The width of the first rectangular block is equal to the width of the lower base of the isosceles trapezoidal block, and the length of the upper base of the isosceles trapezoidal block is greater than the width of the second rectangular block.

[0026] Preferably, in the rough processing step: when the roughing tool has completed processing the outer contour of the clamped blank, it is necessary to set a second tool under the outer contour of the clamped blank, and the second tool is fitted with the outer contour of the clamped blank, and the shape of the side of the second tool fitted with the clamped blank is the same as the outer contour of the clamped blank.

[0027] Compared with the prior art, the present invention has the following beneficial effects:

[0028] The present invention adopts a processing method for a siliceous tile boat, cuts a blank and grinds the blank flat to obtain a blank to be processed with qualified appearance dimensions, then bonds the blank to be processed to a quartz plate, clamps the quartz plate with the bonded blank to a machine tool worktable to obtain a clamped blank, sets a processing coordinate system on the clamped blank, performs rough processing and fine processing on the clamped blank based on the coordinate system to obtain a siliceous tile boat to be inspected, inspects the siliceous tile boat to be inspected, and continues to perform fine processing if the inspection fails, and obtains a finished siliceous tile boat if the inspection passes. The siliceous tile boat manufactured by this process has a moderate production time and a high pass rate. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 The present invention is a preparation process of a siliceous tile boat.

[0030] Figure 2 Schematic diagram of a siliceous tile boat.

[0031] Figure 3 This is a schematic diagram of the first tooling.

[0032] Figure 4 Schematic diagram of the production of the siliceous tile boat of Example 1.

[0033] Figure 5 This is a schematic diagram of the second tooling.

[0034] Figure 6 Schematic diagram of the manufacture of the siliceous tile boat of Example 2.

[0035] In the figure: a silicon tile boat 10, a window 11, a first tooling 100, a second tooling 200, a blank 110a, a blank to be processed 120a, a quartz plate 130a, and yellow wax 140a, a blank 110b, a blank to be processed 120b, a quartz plate 130b, and yellow wax 140b. DETAILED DESCRIPTION

[0036] The technical solutions and technical effects of the embodiments of the present invention are further elaborated below in conjunction with the accompanying drawings of the present invention.

[0037] Please see Figure 1 A method for processing a siliceous tile boat is provided, and is used to process a siliceous tile boat 10, comprising the following steps:

[0038] Step 1: Cut the blank and grind it flat to obtain the blank to be processed;

[0039] Step 2: Bonding the blank to be processed onto the quartz plate, and clamping the quartz plate with the blank bonded to the machine tool worktable to obtain a clamped blank;

[0040] Step 3: Set a processing coordinate system on the clamped blank, and perform rough processing and fine processing on the clamped blank based on the coordinate system to obtain the silicon tile boat to be tested;

[0041] Step 4: The siliceous tile boat to be inspected is inspected. If the inspection fails, fine processing is continued. If the inspection passes, a finished siliceous tile boat 10 is obtained.

[0042] Specifically, the method for testing the siliceous tile boat to be tested is: comparing the siliceous tile boat to be tested with the sample siliceous tile boat, if it is unqualified, continuing fine processing, if it is qualified, obtaining a finished siliceous tile boat 10.

[0043] Compared with the prior art, the present invention has the following beneficial effects:

[0044] The present invention adopts a processing method for a siliceous tile boat, cuts a blank and grinds the blank flat to obtain a blank to be processed with qualified appearance dimensions, then bonds the blank to be processed to a quartz plate, clamps the quartz plate with the bonded blank to a machine tool worktable to obtain a clamped blank, sets a processing coordinate system on the clamped blank, performs rough processing and fine processing on the clamped blank based on the coordinate system to obtain a siliceous tile boat to be inspected, inspects the siliceous tile boat to be inspected, and continues to perform fine processing if the inspection fails, and obtains a finished siliceous tile boat 10 if the inspection passes. The siliceous tile boat 10 manufactured by this process takes moderate time and has a high pass rate.

[0045] The present invention will now be described by way of the following examples.

[0046] Example 1:

[0047] Please see Figure 2 、 Figure 3 、 Figure 4 A method for processing a siliceous tile boat comprises the following steps:

[0048] Step 1: Cut the blank 110a and grind it flat to obtain a blank to be processed with qualified appearance and size. The blank 120a to be processed is a rectangular parallelepiped. Figure 4 In process A, the length and width tolerance of the blank to be processed is: +1mm-10mm, and the height tolerance is 0.5mm-2mm. Please refer to Figure 4 A state and B state;

[0049] Specifically, because the long and wide sides are cut surfaces, they can be completed by a cutting machine, and the height dimension is processed by a circular grinder;

[0050] Step 2: Bond the blank 120a to be processed on the quartz plate 130a, and clamp the quartz plate 130a with the blank 120a to be processed to the working table of the machine tool to obtain the clamped blank. Figure 4 Middle B state;

[0051] Specifically, the quartz plate 130a and the blank to be processed 120a are placed on a heating platform and heated to 170°C. Then, yellow paraffin 140a is evenly applied to the center of the quartz plate. Then, wearing heat-insulating gloves, the blank to be processed 120a is placed on the central surface of the quartz plate 130a so that the four sides of the blank to be processed 120a are parallel to the four sides of the quartz plate 130a. Then, press the upper surface of the blank to be processed 120a with your palm to make the blank to be processed 120a move in a clockwise direction. Press and slide for about ten circles. The air bubbles between the lower surface of the blank 120a to be processed and the upper surface of the quartz plate 130a are expelled, and the bonding gap is reduced. A weight of a certain mass is then placed on the upper surface of the blank 110a. The blank 120a is allowed to cool to room temperature, resulting in the quartz plate 130a bonded to the blank 120a. When the quartz plate 130a, bonded to the blank 120a, is clamped to the machine tool work surface, pressure plates are required at the four corners of the quartz plate 130a. Quartz plate 130a is a brittle material and easily breaks. Therefore, a soft material is placed under the steel pressure plate to prevent direct contact. When tightening the screws, use a torque wrench to tighten the screws diagonally, half a turn at a time, to prevent the quartz plate from breaking.

[0052] Step 3: Please see Figure 4 In the C1 state of the C process, the machining coordinate system is set on the upper surface of the quartz plate where the blank has been clamped. The coordinate system established on the upper surface of the quartz plate is used as the reference. Roughing is performed first, and then finishing is performed. The specific steps are as follows:

[0053] The roughing steps are:

[0054] S1: First use the roughing tool to process the inside of the clamped blank, please refer to Figure 4 C2 state of the C process, and then process the outer contour of the clamped blank, please refer to Figure 4 In the C3 state of the middle C process, the roughened product is obtained. The roughening tool diameter is 40-80mm-100-180#: the single cutting depth is 0.1-0.3mm, the cutting width is 25-50mm, and the cutting speed is 300-600mm / min;

[0055] When the roughing tool has finished processing the interior of the clamped blank, the clamped blank and the quartz plate are dewaxed, the first tooling 100 is padded into the interior of the clamped blank and the first tooling 100 is bonded to the quartz plate again. The first tooling 100 is fitted with the interior of the clamped blank. The first tooling 100 is easy to manufacture, and the finished product is easy to fit with and take out of the first tooling 100.

[0056] S2: Use the roughing window cutter to cut the roughed product, process the window 11, and obtain the rough-processed product. The single cutting depth is 0.01-0.03mm, the cutting width is 10mm, and the cutting speed is 300-800mm / min.

[0057] Finishing steps:

[0058] S1: Use a fine milling window tool to cut the rough product, fine-machine the shape and size of the window 11, and obtain the first fine-machined product. The fine milling window tool has a diameter of 6mm-200-400#: a single cutting depth of 0.01-0.03mm, a cutting width of 6mm, and a cutting speed of 300-800mm / min;

[0059] S2: chamfering the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-200-400#, a single cutting depth of 0.01-0.03mm, a cutting width of 4mm, and a cutting speed of 100-500mm / min.

[0060] S3: According to the size of the silicon tile boat 10 drawing, the size of the second fine-processed product is processed with a fine milling tool to obtain the silicon tile boat to be tested. The fine milling tool has a diameter of 30mm-200-400#: a single cutting depth of 0.01-0.03mm, a cutting width of 0.5mm, and a cutting speed of 500-1500mm / min;

[0061] Step 4: Inspect the siliceous tile boat to be inspected. If it fails the inspection, continue to fine-tune the size. If it passes the inspection, a finished siliceous tile boat 10 is obtained.

[0062] Example 2:

[0063] Please see Figure 2 、 Figure 5 、 Figure 6 A method for processing a siliceous tile boat is provided, and is used to process a siliceous tile boat 10, comprising the following steps:

[0064] Step 1: Cut the blank 110b and grind it flat to obtain a blank 120b with qualified appearance and size. The blank 120b is a rectangular parallelepiped. The length and width tolerances of the blank 120b are: +1mm-5mm, and the height tolerance is 0.2mm-0.8mm. Please refer to Figure 6 Middle A' process;

[0065] Step 2: Bond the blank 120b to be processed on the quartz plate 130b, and clamp the quartz plate 130b with the blank 110b bonded to the machine tool work surface to obtain the clamped blank. Figure 6 Middle B' state;

[0066] Specifically, the quartz plate 130b and the blank to be processed 120b are placed on a heating platform and heated to 170°C, then yellow paraffin 140b is evenly applied to the center of the quartz plate 130b, and then wearing heat-insulating gloves, the blank to be processed 120b is placed on the central surface of the quartz plate 130b, so that the four sides of the blank to be processed 120b are parallel to the four sides of the quartz plate 130b, and then the upper surface of the blank to be processed 120b is pressed with the palm of the hand to make the blank to be processed 120b move in a clockwise direction, and press and slide for about ten circles. On the right, the bubbles between the lower surface of the blank 120b to be processed and the upper surface of the quartz plate 130b are expelled, and the bonding gap is reduced. Then, a weight of a certain mass is placed on the upper surface of the blank 110b. The temperature is allowed to cool to room temperature, and the quartz plate 130b is bonded to the blank 120b to be processed. When the quartz plate 130b with the blank 120b to be processed is clamped to the machine tool work surface, it is necessary to clamp the four corners of the quartz plate 130b. The quartz plate 130b is a brittle material and is extremely easy to break. Therefore, a soft material is placed under the steel pressure plate to prevent direct contact. When tightening the screws, use a torque wrench to tighten the screws diagonally in half turns each time to prevent the quartz plate 130b from breaking.

[0067] Step 3: Set the machining coordinate system on the upper surface of the blank 120b to be machined, and cut from zero to negative value during machining. Figure 6 In the C'1 state of the C' process, the coordinate system established on the upper surface of the blank 120b to be processed is used as a reference, and roughing is performed first, and then fine processing is performed. The specific steps are as follows:

[0068] The processing coordinate system is set on the upper surface of the product. The product is processed from zero to negative values. This can ensure that the product thickness will not be too small due to the yellow wax 140b bonding layer between the blank 120b to be processed and the quartz plate 130b, and when the thickness of the blank 110b is too large, it will not affect the normal processing process.

[0069] The roughing steps are:

[0070] S1: First use the roughing tool to process the outer contour of the clamped blank, please refer to Figure 6 C'2 state of the C' process, and then process the inside of the clamped blank, please refer to Figure 6 In the C'3 state of the middle C process, the roughened product is obtained, the roughening tool diameter is 50-60mm-80-150#: single cutting depth is 0.25-0.5mm, cutting width is 25-50mm, and cutting speed is 600-800mm / min;

[0071] When the roughing tool has finished processing the outer contour of the clamped blank, the clamped blank and the quartz plate 130b are dewaxed, the second tool 200 is padded on the outside of the clamped blank, and then the second tool 200 is bonded to the quartz plate 130b, and the second tool 200 is fitted with the outer contour of the clamped blank, and the shape of the side of the second tool 200 fitted with the clamped blank is the same as the outer contour of the clamped blank; the second tool 200 has a high degree of coordination with the outer contour of the siliceous tile boat 10 and a good fitting effect. Because the siliceous tile boat 10 is tile-shaped, supporting its outer contour not only provides good support for the clamped blank during processing, but also allows it to withstand a larger amount of cutting, and the outside of the product can be processed first. After the roughing step S1 is completed, features such as the product windows can be processed again without repeated processing, thereby reducing tool marks and broken edges of the window 11.

[0072] S2: Use a rough milling window tool to cut the roughed product to process the window 11 to obtain a rough-processed product. The rough milling window tool has a diameter of 10mm-200-300#: a single cutting depth of 0.05-0.1mm, a cutting width of 10mm, and a cutting speed of 800-1000mm / min;

[0073] Finishing steps:

[0074] S1: Use a fine milling window tool to cut the rough product, fine-machine the shape and size of the window 11, and obtain the first fine-machined product. The fine milling window tool has a diameter of 6mm-200-300#: a single cutting depth of 0.05-0.1mm, a cutting width of 6mm, and a cutting speed of 800-1000mm / min;

[0075] S2: Chamfer the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-270-350#, a single cutting depth of 0.03-0.05mm, a cutting width of 4mm, and a cutting speed of 300-500mm / min.

[0076] S3: According to the size of the siliceous tile boat drawing, use the fine milling tool to process the size of the second fine-processed product to obtain the siliceous tile boat to be tested. The diameter of the fine milling tool is 30mm-270-400#: single cutting depth 0.05-0.1mm, cutting width 0.3mm, cutting speed 2000-2500mm / min.

[0077] Step 3: Inspect the silicon tile boat to be inspected. If it fails the inspection, continue to fine-tune the size. If it passes the inspection, a finished silicon tile boat 10 is obtained.

[0078] A batch of tile boats were manufactured by the method of embodiment 1 and the method of embodiment 2, and the test data are shown in Table 1:

[0079] Table 1

[0080] Example 1 Example 2 Difficulty of process design easy Disaster First-time production success rate / % 80% 30% Probability of knife marks occurring / % 90% 5% Edge collapse probability / % 80% 10% Time for making tile silicon boat / h 60-90H 15-40H Knife collision rate / % 10% 1% Batch product qualification rate / % 80% 95%

[0081] Through the experiment in Table 1 above, it can be seen that when the process of Example 1 is used to manufacture the silicon tile boat 10, the first-time success rate of manufacturing different types of silicon tile boats 10 is high, and the product qualification rate is high, but the size and appearance can only meet the requirements of small batches, and the processing time is relatively long, and the operation difficulty is high during manufacturing. It is suitable for the production of small batches of different types of silicon tile boats 10.

[0082] When the silicon tile boat 10 is manufactured by the process of the above-mentioned embodiment 2, the processing efficiency is greatly reduced compared with the processing time of embodiment 1, and the operation is simple and easy. The edge chipping rate, tool collision rate, and the probability of tool marks during manufacturing are greatly reduced, reducing manual grinding by the staff. Therefore, this process is suitable for the long-term production of the same type of silicon tile boat 10.

[0083] The above disclosure is only a preferred embodiment of the present invention, and it is certainly not intended to limit the scope of the present invention. A person skilled in the art can understand that all or part of the processes of the above embodiment and equivalent changes made in accordance with the claims of the present invention are still within the scope of the invention.

Claims

1. A method for processing a siliceous tile boat, for processing a siliceous tile boat, characterized in that: The following steps are involved: Step 1: Cut the blank and grind it flat to obtain the blank to be processed; Step 2: Bonding the blank to be processed onto the quartz plate, and clamping the quartz plate with the blank bonded to the machine tool worktable to obtain a clamped blank; Step 3: Setting a machining coordinate system on the clamped blank, and performing rough machining and fine machining on the clamped blank based on the coordinate system to obtain a silicon tile boat to be inspected; Setting the machining coordinate system on the clamped blank specifically includes: setting the machining coordinate system on the upper surface of the quartz plate on which the blank has been clamped; The rough processing includes: S1: first processing the interior of the clamped blank with a roughing tool, and then processing the outer contour of the clamped blank to obtain a roughed product, S2: then cutting the roughed product with a rough milling window tool to process the window to obtain a rough-processed product; When the roughing tool has finished processing the interior of the clamped blank, a first tooling is required to be inserted into the interior of the clamped blank, and the first tooling is fitted into the interior of the clamped blank; The first tooling includes: a first rectangular block, an isosceles trapezoidal block, and a second rectangular block, wherein the upper portion of the first rectangular block is in contact with the isosceles trapezoidal block, and the upper portion of the isosceles trapezoidal block is in contact with the second rectangular block, the width of the first rectangular block is equal to the width of the lower base of the isosceles trapezoidal block, and the length of the upper base of the isosceles trapezoidal block is greater than the width of the second rectangular block; Step 4: Inspect the siliceous tile boat to be inspected. If it fails the inspection, continue to perform fine processing. If it passes the inspection, a finished siliceous tile boat is obtained.

2. A method for processing a siliceous tile boat, for processing a siliceous tile boat, characterized in that: The following steps are involved: Step 1: Cut the blank and grind it flat to obtain the blank to be processed; Step 2: Bonding the blank to be processed onto the quartz plate, and clamping the quartz plate with the blank bonded to the machine tool worktable to obtain a clamped blank; Step 3: Setting a machining coordinate system on the clamped blank, and performing rough machining and fine machining on the clamped blank based on the coordinate system to obtain the silicon tile boat to be inspected; Setting a machining coordinate system on the clamped blank specifically includes: setting the machining coordinate system on the upper surface of the blank to be machined of the clamped blank, and cutting from the zero point to the negative value during machining; The rough processing includes: S1: first using a roughing tool to process the outer contour of the clamped blank, and then processing the interior of the clamped blank to obtain a roughed product, S2: then using a roughing window milling tool to cut the roughed product and process the window to obtain a rough-processed product; In the roughing step: when the roughing tool finishes machining the outer contour of the clamped blank, a second tooling is provided below the outer contour of the clamped blank, the second tooling being in contact with the outer contour of the clamped blank, and a surface of the second tooling in contact with the clamped blank having the same shape as the outer contour of the clamped blank; Step 4: Inspect the siliceous tile boat to be inspected. If it fails the inspection, continue to perform fine processing. If it passes the inspection, a finished siliceous tile boat is obtained.

3. The method for processing a siliceous tile boat according to claim 1, wherein: In the step 3, the diameter of the roughing tool is 40-80mm-100-180#; the single cutting depth of the roughing tool is 0.1-0.3mm, the cutting width is 25-50mm, and the cutting speed is 300-600mm / min; The single cutting depth is 0.01-0.03mm, the cutting width is 10mm, and the cutting speed is 300-800mm / min.

4. The method for processing a siliceous tile boat according to claim 1, wherein: In the step three, the finishing includes: S1: cutting the rough-machined product with a finishing window cutter to finish the shape and size of the window to obtain a first finishing product, wherein the finishing window cutter has a diameter of 6mm-200-400#: a single cutting depth of 0.01-0.03mm, a cutting width of 6mm, and a cutting speed of 300-800mm / min; S2: chamfering the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-200-400#, a single cutting depth of 0.01-0.03mm, a cutting width of 4mm, and a cutting speed of 100-500mm / min. S3: According to the size of the siliceous tile boat drawing, use the fine milling tool to process the size of the second fine-processed product to obtain the siliceous tile boat to be tested. The diameter of the fine milling tool is 30mm-200-400#: single cutting depth 0.01-0.03mm, cutting width 0.5mm, cutting speed 500-1500mm / min.

5. The method for processing a siliceous tile boat according to claim 2, wherein: In the step 3, the diameter of the roughing tool is 50-60mm-80-150#: the single cutting depth is 0.25-0.5mm, the cutting width is 25-50mm, and the cutting speed is 600-800mm / min; The rough milling window tool has a diameter of 50-60mm-80-150#: a single cutting depth of 0.25-0.5mm, a cutting width of 25-50mm, and a cutting speed of 600-800mm / min.

6. The method for processing a siliceous tile boat according to claim 2, wherein: In the step three, the finishing step includes: S1: cutting the rough-machined product with a finishing window cutter to finish the shape and size of the window to obtain a first finishing product, wherein the finishing window cutter has a diameter of 6mm-200-300#: a single cutting depth of 0.05-0.1mm, a cutting width of 6mm, and a cutting speed of 800-1000mm / min; S2: Chamfer the first finished product with a chamfering tool to obtain a second finished product. The chamfering tool has a diameter of 4mm-270-350#, a single cutting depth of 0.03-0.05mm, a cutting width of 4mm, and a cutting speed of 300-500mm / min. S3: According to the size of the siliceous tile boat drawing, use the fine milling tool to process the size of the second fine-processed product to obtain the siliceous tile boat to be tested. The diameter of the fine milling tool is 30mm-270-400#: single cutting depth 0.05-0.1mm, cutting width 0.3mm, cutting speed 2000-2500mm / min.

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