A device for coupling a polishing wheel to a base and a process method

By using elastic pads and limiting washers in the connection device between the polishing wheel and the substrate, the problem of stress concentration of the polishing wheel at high linear speeds is solved, thereby improving the rotational strength and processing quality of the polishing wheel.

CN116038585BActive Publication Date: 2026-01-02GUILIN CHAMPION UNION DIAMOND CO LTD +1
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Patent Information

Application Number
CN202211657387.9
Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
Filing Date
2022-12-22
Publication Date
2026-01-02
Estimated Expiration
2042-12-22

AI Technical Summary

Technical Problem

Existing polishing wheels are prone to stress concentration and cracking at high linear speeds, making them unsuitable for high-speed polishing and resulting in poor processing quality.

Method used

A polishing wheel and substrate connection device is adopted, including a polishing wheel, substrate, pressure plate, locking screw, elastic pad and limiting washer. By setting an elastic pad between the polishing wheel and the pressure plate, and designing the connection part between the pressure plate and the elastic pad as an arc, the stress on the polishing wheel is reduced. At the same time, the thickness of the limiting washer is designed to limit the clamping height of the pressure plate.

Benefits of technology

It effectively reduces the impact of stress on the polishing wheel, improves rotational strength and linear speed, and enhances processing efficiency and polishing quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The application relates to a device for coupling a polishing wheel and a base and a process method thereof, and belongs to the polishing field.The device comprises a polishing wheel, a base, a pressing plate, a plurality of locking screws, an elastic pad and a plurality of limiting washers; the polishing wheel is installed on the base, the pressing plate is installed in the polishing wheel, the elastic pad is installed between the polishing wheel and the pressing plate, the limiting washer is installed between the base and the pressing plate, the locking screw penetrates through the limiting washer and is connected with the pressing plate and the base, the pressing plate is a circular ring structure with an arc-shaped side wall, and the pressing plate side surface is connected with the elastic pad. The application is favorable for reducing the stress generated by the device under high linear speed and the influence of the stress on the polishing wheel, thereby being favorable for improving the rotation strength and linear speed of the polishing wheel, improving the machining efficiency and greatly improving the polishing quality.
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Description

TECHNICAL FIELD

[0001] The present application relates to the field of polishing, in particular to a device for coupling a polishing wheel with a base and a process method thereof. BACKGROUND

[0002] The polishing wheels on the market using rubber and polyurethane as a binder have large elasticity and relatively low rotation strength, are prone to burst, and are difficult to adapt to high linear speed polishing processing. Moreover, the above-mentioned polishing wheels are mainly used in polishing occasions using mechanical or pneumatic feeding modes, and the cutting amount is difficult to accurately control with different contact areas, which is prone to problems such as poor flatness of the polished surface, high surface roughness, and low gloss. With the progress of grinding equipment, high linear speed and servo feeding process have become common processing technologies, and the existing polishing wheels are difficult to adapt. The polishing wheel made of high-strength polyurethane binder material can improve the rotation strength, but generally loses part of the elasticity due to the increase in rigidity. In the prior art, when the polishing wheel is assembled onto the main shaft, a rigid pressing plate and a threaded fastening structure are usually used to clamp the polishing wheel with the base onto the step or flange plate of the main shaft to form a fixed connection. Since the polishing wheel is an elastic body, after being clamped by the rigid pressing plate, the polishing wheel will deform at the part below the rigid pressing plate and the edge of the rigid pressing plate, and stress will be formed in the polishing wheel. Under the action of the centrifugal force generated by high-speed rotation, the polishing wheel will have a small amount of deformation. The high-strength polyurethane binder itself is sensitive to stress, and under the condition of high linear speed, the places with high stress are prone to cracks and then burst, causing safety problems. Therefore, reducing and eliminating stress is a key factor for the realization of high linear speed polishing. SUMMARY

[0003] The technical problem to be solved by the present application is to provide a device for coupling a polishing wheel with a base and a process method thereof, which reduces the stress generated by the device under high linear speed and the influence of stress on the polishing wheel.

[0004] The technical solution of the present application to solve the above technical problem is as follows: a device for coupling a polishing wheel with a base, comprising: a polishing wheel, a base, a pressing plate, a plurality of locking screws, an elastic pad, and a plurality of limiting washers; the polishing wheel is installed on the base, the pressing plate is installed in the polishing wheel, the elastic pad is installed between the polishing wheel and the pressing plate, the limiting washer is installed between the base and the pressing plate, the locking screw penetrates through the limiting washer and is connected with the pressing plate and the base, the pressing plate is a circular ring structure with an arc-shaped side wall, and the pressing plate side wall and the elastic pad are adaptively connected.

[0005] The beneficial effects of the present application are: by setting the elastic pad between the polishing wheel and the pressing plate, and setting the connecting part of the pressing plate and the elastic pad as a circular arc, the stress generated at the connecting part of the original pressing plate and the polishing wheel is partially transferred to the elastic pad, and the influence of the stress on the polishing wheel is reduced.

[0006] Based on the above technical solutions, the present application can be further improved as follows.

[0007] Further, the base body is annular plate structure, a plurality of radial exhaust grooves, a plurality of end face exhaust grooves, mounting holes and a plurality of connecting holes are arranged on the base body, the radial exhaust grooves are strip grooves, the end face exhaust grooves are spiral grooves, and the mounting holes and the connecting holes are through holes.

[0008] The beneficial effects of the above further scheme are: the base body is a connecting device of the polishing wheel, which is beneficial to assemble the polishing wheel to the main shaft through the flange, and under the rotation of the main shaft, the base body can drive the polishing wheel to rotate and polish the surface of the object.

[0009] Further, the mounting hole is arranged in the middle of the base body, and a plurality of connecting holes are arranged outside the mounting hole.

[0010] The beneficial effects of the above further scheme are: the mounting hole can assemble the base body and the polishing wheel to the flange of the main shaft, and then form a fixed connection with the main shaft, and the plurality of connecting holes are beneficial to form a correspondence with the plurality of limiting washers, and by pulling the pressing plate downward through the locking screw, the elastic pad is extruded, and then part of the stress is transferred to the elastic pad, reducing the influence of stress on the polishing wheel.

[0011] Further, the limiting washer is annular plate structure, the limiting washer is arranged between the base body and the pressing plate, the upper surface and the lower surface of the limiting washer correspondingly abut against the lower surface of the pressing plate and the upper surface of the base body, the locking screw passes through the connecting hole and the limiting washer, and the locking screw is threadedly connected with the pressing plate.

[0012] The beneficial effects of the above further scheme are: the limiting washer is arranged between the pressing plate and the base body, which is beneficial to design the thickness of the limiting washer according to the actual required compression amount of the elastic pad, and then plays a role in limiting the clamping height of the rigid pressing plate, that is, no matter how tightly the locking screw is screwed, the deformation amount of the elastic pad can be ensured to be appropriate.

[0013] Further, the radial exhaust grooves and the end surface exhaust grooves are arranged on the upper surface of the base body, the end surface exhaust grooves extend circumferentially around the connecting hole to the base body, and the radial exhaust grooves extend radially around the connecting hole to the base body, and a plurality of the radial exhaust grooves are connected with a plurality of the end surface exhaust grooves respectively.

[0014] The beneficial effect of the further scheme is that the radial exhaust grooves and the end surface exhaust grooves are beneficial to exhaust the excess glue and air during the gluing of the polishing wheel and the base body, so that the polishing wheel is in a balanced stress state in all directions when the polishing wheel is axially stressed, and no stress difference is generated.

[0015] Further, the polishing wheel comprises an upper polishing wheel and a lower polishing wheel, the upper polishing wheel is a tubular structure, the lower polishing wheel is a tubular structure with a straight-angled trapezoidal cross section, the bottom surface of the upper polishing wheel is connected with the top surface of the lower polishing wheel, the thickness of the upper polishing wheel is the same as the width of the top surface of the lower polishing wheel, and the bottom surface of the lower polishing wheel is connected with the upper surface of the base body.

[0016] Further, the lower polishing wheel is provided with a polishing wheel arc surface, the polishing wheel arc surface is arranged at the hypotenuse position of the straight-angled trapezoidal cross section of the lower polishing wheel, and the polishing wheel arc surface is an arc surface matched with the shape of the side wall of the pressing plate.

[0017] The beneficial effect of the further scheme is that the upper polishing wheel is the main working component of the polishing wheel, the lower polishing wheel is the main connecting component of the base body, the inclined side wall of the lower polishing wheel corresponds to the circular arc side wall of the pressing plate, which is beneficial to reduce the influence of stress on the elastic pad and the polishing wheel under the action of high-speed centrifugal force, thereby avoiding the cracking and breaking of the polishing wheel.

[0018] Further, the elastic pad is an annular plate structure, and the upper and lower surfaces of the elastic pad are connected with the side surface of the pressing plate and the polishing wheel arc surface respectively.

[0019] The beneficial effect of the further scheme is that the elastic pad is beneficial to deform the part of the polishing wheel clamped together with the elastic pad under the action of high-speed centrifugal force, uniformly buffer the axial clamping force at this time through the elastic pad, avoid the part of the polishing wheel clamped on the outer diameter from losing clamping force due to thinning, cause stress mutation and cracking, and further cause the breaking of the polishing wheel.

[0020] The application also provides a process method for connecting a polishing wheel and a base body, comprising the following steps:

[0021] S1: uniformly applying glue on the bottom surface of the polishing wheel, connecting the bottom surface of the polishing wheel and the base body, and applying pressure in the vertical direction to exhaust the excess glue and air from the connecting surface of the polishing wheel and the base body;

[0022] S2: disposing an elastic pad and a plurality of limiting washers on the base body, and designing the thickness of the limiting washers according to the compression amount required by the elastic pad;

[0023] S3: placing a pressing plate in the polishing wheel, so that the bottom surface of the pressing plate and the upper surface of the elastic pad abut;

[0024] S4: passing a plurality of locking screws through the plurality of limiting washers one by one, and screwing the locking screws and the pressing plate;

[0025] S5: by tightening the locking screws, the pressing plate is pulled down, so that the bottom surface of the pressing plate extrudes the elastic pad, until the pressing plate and the end surface of the limiting washer are in contact and cannot continue to be compressed.

[0026] The beneficial effects of the present application are: through the above process, the polishing wheel and the base body are fixedly connected, which is beneficial to balance the stress of the polishing wheel in all directions when the polishing wheel is subjected to axial force, and to avoid stress difference. At the same time, when the polishing wheel deforms under the action of centrifugal force during work, the part of the polishing wheel clamped can also deform together with the elastic pad, so that the axial clamping force is balanced and buffered through the elastic pad, avoiding the loss of clamping force of the clamped part of the polishing wheel due to deformation, causing stress mutation, and causing cracks and rupture. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 The overall structure schematic diagram provided for the embodiment of the present application;

[0028] Figure 2 The base body top view provided for the embodiment of the present application;

[0029] Figure 3 The Figure 2 The sectional view along the section line A-A in the structure shown;

[0030] Figure 4 The polishing wheel top view provided for the embodiment of the present application;

[0031] Figure 5 The Figure 4 The sectional view along the section line B-B in the structure shown;

[0032] Figure 6 The Figure 5 The local enlarged view of the J area in the structure shown;

[0033] Figure 7 The Figure 5 The polishing wheel sectional view part structure schematic diagram in the structure shown.

[0034] In the drawings, the component list represented by each reference sign is as follows:

[0035] 1, polishing wheel; 2, base; 3, pressing plate; 4, locking screw; 5, elastic pad; 6, limiting washer; 11, upper polishing wheel; 12, lower polishing wheel; 21, radial exhaust groove; 22, end face exhaust groove; 23, mounting hole; 24, connecting hole; 121, polishing wheel camber. DETAILED DESCRIPTION

[0036] The principles and features of the present application are described below, and the examples are only used to explain the present application, and are not used to limit the scope of the present application.

[0037] As shown in Figure 1 , Figure 5 and Figure 6 , a device for coupling a polishing wheel with a base comprises a polishing wheel 1, a base 2, a pressing plate 3, a plurality of locking screws 4, an elastic pad 5 and a plurality of limiting washers 6; the polishing wheel 1 is installed on the base 2, the pressing plate 3 is installed in the polishing wheel 1, the elastic pad 5 is installed between the polishing wheel 1 and the pressing plate 3, the limiting washer 6 is installed between the base 2 and the pressing plate 3, the locking screw 4 penetrates through the limiting washer 6 and is connected with the pressing plate 3 and the base 2, the pressing plate 3 is a circular ring structure with an arc-shaped side wall, and the pressing plate 3 side wall and the elastic pad 5 are adaptively connected.

[0038] The present application has the beneficial effects that: by setting the elastic pad between the polishing wheel and the pressing plate, and setting the connecting part of the pressing plate and the elastic pad as a circular arc, it is beneficial to transfer part of the stress generated at the original connecting part of the pressing plate and the polishing wheel to the elastic pad, thereby reducing the influence of stress on the polishing wheel. At the same time, the thickness of the limiting washer can be designed according to the different deformation amounts of the elastic pad required in actual situations, thereby limiting the clamping height of the pressing plate and keeping the elastic pad at a fixed deformation amount, which is also beneficial to reduce the influence of stress on the polishing wheel, thereby improving the rotation strength and linear speed of the polishing wheel, improving the processing efficiency and also greatly improving the polishing quality.

[0039] Preferably, as shown in Figures 2 to 4 , the base 2 is a ring-shaped plate structure, the base 2 is provided with a plurality of radial exhaust grooves 21, a plurality of end face exhaust grooves 22, a mounting hole 23 and a plurality of connecting holes 24, the radial exhaust groove 21 is a strip-shaped groove, the end face exhaust groove 22 is a spiral-shaped groove, and the mounting hole 23 and the connecting hole 24 are both through holes.

[0040] The beneficial effects of the above preferred scheme are that: the base serves as a connecting and limiting device for the polishing wheel, which is beneficial to assemble the polishing wheel to the main shaft through the flange, and under the rotation of the main shaft, the base can drive the polishing wheel to rotate and polish the surface of the object.

[0041] Preferably, as shown in Figures 2 to 4As shown in the figure, the mounting hole 23 is arranged in the middle of the base body 2, and a plurality of the connecting holes 24 are arranged outside the mounting hole 23.

[0042] The beneficial effect of the above preferred scheme is that the mounting hole can assemble the base body and the polishing wheel to the flange of the main shaft, and then form a fixed connection with the main shaft, and the plurality of connecting holes are beneficial to form a correspondence with the plurality of limiting washers, and the pressing plate is pulled down by the locking screw, the elastic pad is extruded, and then part of the stress is transferred to the elastic pad, thereby reducing the influence of stress on the polishing wheel.

[0043] Preferably, as shown in the figure, Figure 5 As shown in the figure, the limiting washer 6 is in the form of a ring-shaped plate, the limiting washer 6 is arranged between the base body 2 and the pressing plate 3, the upper surface and the lower surface of the limiting washer 6 correspondingly abut the lower surface of the pressing plate 3 and the upper surface of the base body 2, the locking screw 4 passes through the connecting hole 24 and the limiting washer 6, and the locking screw 4 is threadedly connected with the pressing plate 3.

[0044] The beneficial effect of the above preferred scheme is that the limiting washer is arranged between the pressing plate and the base body, which is beneficial to design the thickness of the limiting washer according to the actual compression amount of the elastic pad, and then plays a role in limiting the clamping height of the rigid pressing plate, that is, regardless of how tightly the locking screw is tightened, the deformation amount of the elastic pad can be ensured to be appropriate.

[0045] Preferably, as shown in the figure, Figure 2 and Figure 3 As shown in the figure, the radial exhaust groove 21 and the end face exhaust groove 22 are arranged on the upper surface of the base body 2, the end face exhaust groove 22 extends circumferentially to the base body 2 around the connecting hole 24, the radial exhaust groove 21 extends radially to the base body 2 around the connecting hole 24, and a plurality of the radial exhaust grooves 21 are respectively connected with a plurality of the end face exhaust grooves 22.

[0046] The beneficial effect of the above preferred scheme is that the radial exhaust groove and the end face exhaust groove are beneficial to exhaust the excess glue and air on the glue surface of the polishing wheel and the base body during the gluing process of the polishing wheel and the base body, so that the polishing wheel is in a balanced stress state in all directions when the polishing wheel is axially stressed, and no stress difference is generated.

[0047] Preferably, as shown in the figure, Figure 7 As shown in the figure, the polishing wheel 1 includes an upper polishing wheel 11 and a lower polishing wheel 12, the upper polishing wheel 11 is in the form of a tube, the lower polishing wheel 12 is in the form of a tube with a straight-angle trapezoidal cross section, the bottom surface of the upper polishing wheel 11 is connected with the top surface of the lower polishing wheel 12, the thickness of the upper polishing wheel 11 is the same as the width of the top surface of the lower polishing wheel 12, and the bottom surface of the lower polishing wheel 12 is connected with the upper surface of the base body 2.

[0048] Preferably, as shown in Figure 7 The lower polishing wheel 12 is provided with a polishing wheel arc surface 121, which is arranged at the hypotenuse of the right trapezoidal cross section of the lower polishing wheel 12, and the polishing wheel arc surface 121 is an arc surface matched with the shape of the side wall of the pressure plate 3.

[0049] The beneficial effects of the above preferred scheme are that the upper polishing wheel is the main working component of the polishing wheel, and the lower polishing wheel is the main connecting component with the base body. The inclined side wall of the lower polishing wheel corresponds to the circular arc side wall of the pressure plate, which is beneficial to reducing the influence of stress on the elastic pad and the polishing wheel under the action of high-speed centrifugal force, thereby avoiding cracks and breakage of the polishing wheel.

[0050] Preferably, as shown in Figure 6 The elastic pad 5 is a ring-shaped plate structure, and the upper and lower surfaces of the elastic pad 5 are connected one by one with the side surface of the pressure plate 3 and the polishing wheel arc surface 121.

[0051] The beneficial effects of the above preferred scheme are that the elastic pad is beneficial to deforming the part of the polishing wheel clamped together with the elastic pad under the action of high-speed centrifugal force, uniformly buffering the axial clamping force at this time through the elastic pad, avoiding the part of the polishing wheel clamped by the outer diameter from losing clamping force due to thinning, causing stress mutation and cracks, and further causing the breakage of the polishing wheel.

[0052] As shown in Figures 1 to 7 The application also provides a process method for connecting a polishing wheel and a base body, which comprises the following steps:

[0053] S1: uniformly applying glue on the bottom surface of the polishing wheel 1, connecting the bottom surface of the polishing wheel 1 and the base body 2, and applying pressure in the vertical direction to discharge excess glue and air from the connecting surface of the polishing wheel 1 and the base body 2;

[0054] S2: arranging the elastic pad 5 and the plurality of limiting washers 6 on the base body 2, and designing the thickness of the limiting washers 6 according to the required compression amount of the elastic pad 5;

[0055] S3: placing the pressure plate 3 in the polishing wheel 1 so that the bottom surface of the pressure plate 3 abuts against the upper surface of the elastic pad 5;

[0056] S4: passing the plurality of locking screws 4 one by one through the plurality of limiting washers 6, and threadedly connecting the locking screws 4 and the pressure plate 3;

[0057] S5: pulling down the pressure plate 3 by tightening the locking screws 4, so that the bottom surface of the pressure plate 3 extrudes the elastic pad 5, until the pressure plate 3 cannot continue to compress because the end surface of the limiting washer 6 is contacted.

[0058] The beneficial effects of the present application are: the polishing wheel and the base are fixedly connected through the above process method, which is beneficial to make the polishing wheel balanced in stress everywhere when the polishing wheel is subjected to axial force, and no stress difference is generated, and at the same time, when the polishing wheel is deformed under the action of centrifugal force during work, the part of the polishing wheel clamped can also be deformed together with the elastic pad, the axial clamping force is balanced and buffered through the elastic pad, the clamping force of the outer diameter of the polishing wheel is avoided to be lost due to deformation, stress mutation is avoided, and cracks and breakage are avoided.

[0059] The process method for connecting the polishing wheel and the base in the present application is further described below:

[0060] When the bottom surface of the polishing wheel 1 and the base 2 are connected, glue can be uniformly applied on the bottom surface of the polishing wheel 1 or the top surface of the base, which can be selected according to the actual situation. Before the bottom surface of the polishing wheel 1 and the base 2 are connected, radial exhaust grooves 21 and end face exhaust grooves 22 need to be formed on the base 2, so that the excess glue and air can be discharged from the radial exhaust grooves 21 and the end face exhaust grooves 22 when pressure is applied in the vertical direction; in addition, mounting holes 23 and a plurality of connecting holes 24 need to be formed on the base 2.

[0061] Since the connecting hole 24 is a through hole and the limiting washer 6 is a ring-shaped plate structure, when the locking screw 4 passes through the connecting hole 24 and the limiting washer 6 and is threadedly connected with the pressing plate 3, the downward locking force only acts on the pressing plate 3, that is, the pressing plate 3 is pulled towards the limiting washer 6, and when the lower surface of the pressing plate 3 and the upper surface of the limiting washer 6 are connected, the pressing plate 3 will not continue to apply pressure to the elastic pad 5 no matter how tightly the locking screw 4 is screwed, at this time, the deformation amount of the elastic pad 5 can be ensured not to be too large or too small, in fact, the deformation amount of the elastic pad 5 required in actual use can be determined through experiments, and the thickness of the limiting washer 6 is determined to achieve the optimal effect and reduce the influence of stress on the polishing wheel 1.

[0062] In the description of the present application, it should be understood that the orientations or positional relationships indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential" are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0063] In addition, the terms "first", "second", etc. are used only for the purpose of description and do not imply or imply relative importance or imply the number of the technical features indicated. Therefore, the features defined as "first", "second" can explicitly or implicitly include at least one of the features. In the description of the present application, the meaning of "a plurality of" is at least two, such as two, three, etc., unless otherwise explicitly specified.

[0064] In the present application, unless otherwise explicitly specified and limited, the terms "mounting", "connecting", "connecting", "fixing" and the like should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship between two elements, unless otherwise explicitly limited. For those skilled in the art, the specific meaning of the above terms in the present application can be understood according to the specific circumstances.

[0065] In the present application, unless otherwise explicitly specified and limited, the first feature is "on" or "under" the second feature, which can be direct contact between the first and second features, or indirect contact between the first and second features through an intermediate medium. Moreover, the first feature "above", "above" and "above" the second feature can be directly above or obliquely above the first feature, or only indicate that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature can be directly below or obliquely below the first feature, or only indicate that the horizontal height of the first feature is less than that of the second feature.

[0066] In the description of the present application, the description of the terms "one embodiment", "some embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present application. In the present application, the illustrative description of the above terms is not necessarily for the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any suitable manner in any one or more embodiments or examples. In addition, those skilled in the art can combine and combine different embodiments or features of different embodiments or examples described in the present application without contradiction.

[0067] Although the embodiments of the present application have been shown and described above, it can be understood that the above embodiments are exemplary and cannot be understood as limiting the present application, and those skilled in the art can make changes, modifications, replacements and variations to the above embodiments within the scope of the present application.

Claims

1. An apparatus for coupling a polishing wheel to a base, comprising: The polishing wheel (1), the base body (2), the pressing plate (3), the plurality of locking screws (4), the elastic pad (5) and the plurality of limiting washers (6) are included. The polishing wheel (1) is installed on the base body (2), the pressing plate (3) is installed in the polishing wheel (1), the elastic pad (5) is installed between the polishing wheel (1) and the pressing plate (3), the limiting washer (6) is installed between the base body (2) and the pressing plate (3), the locking screw (4) penetrates the limiting washer (6) and is connected with the pressing plate (3) and the base body (2), the pressing plate (3) is a circular ring structure with an arc-shaped side wall, and the pressing plate (3) side wall and the elastic pad (5) are adaptively connected. The base body (2) is an annular plate structure, a plurality of radial exhaust grooves (21), a plurality of end face exhaust grooves (22), a mounting hole (23) and a plurality of connecting holes (24) are arranged on the base body (2), the radial exhaust grooves (21) are strip-shaped grooves, the end face exhaust grooves (22) are spiral grooves, and the mounting hole (23) and the connecting hole (24) are through holes. The mounting hole (23) is arranged in the middle of the base body (2), and a plurality of connecting holes (24) are arranged outside the mounting hole (23).

2. The apparatus of claim 1 wherein, The limiting washer (6) is an annular plate structure, the limiting washer (6) is arranged between the base body (2) and the pressing plate (3), the upper surface and the lower surface of the limiting washer (6) correspondingly abut against the lower surface of the pressing plate (3) and the upper surface of the base body (2), the locking screw (4) penetrates the connecting hole (24) and the limiting washer (6), and the locking screw (4) is threadedly connected with the pressing plate (3).

3. The apparatus of claim 2 wherein, The radial exhaust grooves (21) and the end face exhaust grooves (22) are arranged on the upper surface of the base body (2), the end face exhaust grooves (22) extend circumferentially to the base body (2) around the connecting hole (24), the radial exhaust grooves (21) extend radially to the base body (2) around the connecting hole (24), and a plurality of radial exhaust grooves (21) are connected with a plurality of end face exhaust grooves (22) respectively.

4. The apparatus of claim 1 wherein, The polishing wheel (1) includes an upper polishing wheel (11) and a lower polishing wheel (12), the upper polishing wheel (11) is a tubular structure, the lower polishing wheel (12) is a tubular structure with a straight-angled trapezoidal cross section, the bottom surface of the upper polishing wheel (11) is connected with the top surface of the lower polishing wheel (12), the thickness of the upper polishing wheel (11) is the same as the width of the top surface of the lower polishing wheel (12), and the bottom surface of the lower polishing wheel (12) is connected with the upper surface of the base body (2).

5. The apparatus of claim 1 wherein, The lower polishing wheel (12) is provided with a polishing wheel arc surface (121), the polishing wheel arc surface (121) is arranged at the hypotenuse position of the straight-angled trapezoidal cross section of the lower polishing wheel (12), and the polishing wheel arc surface (121) is an arc surface matched with the shape of the side wall of the pressing plate (3).

6. The apparatus of claim 5 wherein, ​ 7. The apparatus of claim 6 wherein, The elastic pad (5) is a ring-shaped plate structure, and the upper and lower surfaces of the elastic pad (5) are connected with the side surface of the pressing plate (3) and the arc surface (121) of the polishing wheel one by one.

8. A process for coupling a polishing wheel to a device for polishing a substrate, characterized by, The process method of the device for coupling the polishing wheel and the base body according to any one of claims 1 to 7 comprises the following steps: S1: uniformly applying glue on the bottom surface of the polishing wheel (1), connecting the bottom surface of the polishing wheel (1) and the base body (2), and applying pressure in the vertical direction to discharge the excess glue and air from the connecting surface of the polishing wheel (1) and the base body (2); S2: arranging the elastic pad (5) and the plurality of limiting washers (6) on the base body (2), and designing the thickness of the limiting washers (6) according to the required compression amount of the elastic pad (5); S3: placing the pressing plate (3) in the polishing wheel (1) so that the bottom surface of the pressing plate (3) abuts against the upper surface of the elastic pad (5); S4: passing the plurality of locking screws (4) through the plurality of limiting washers (6) one by one, and threadedly connecting the locking screws (4) and the pressing plate (3); S5: by tightening the locking screws (4), the pressing plate (3) is pulled downward, the bottom surface of the pressing plate (3) presses the elastic pad (5), and the pressing plate (3) is in contact with the end surface of the limiting washer (6) and cannot continue to be compressed.

Citation Information

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