Microscope positioning mark device with specific pattern and image positioning method

Abstract

The present application belongs to the field of microscope measurement technology, and particularly relates to a microscope positioning mark device with micron-level specific patterns and an image positioning method, aiming at solving the problems of inaccurate positioning, easy misoperation and inability to judge the relative position of the to-be-measured region of the existing positioning mark technology. The microscope positioning mark device comprises a positioning mark table, a sliding cross beam, a slider and a needle array installed on the sliding cross beam, a lead screw assembly for controlling the movement of the sliding cross beam and a connecting fixture, and the image positioning method comprises the following steps: S100, assembling the positioning mark device, S200, preparing the mark needle, S300, making mark points, and S400, image positioning observation. The present application adopts an electrochemical corrosion method to prepare micron-level needle points, introduces the microscope positioning mark device with specific patterns and the image positioning method, and provides accurate positioning for in-situ technologies such as microscope combination experiments.

Description

TECHNICAL FIELD

[0001] The invention discussed herein relates to the field of microscope imaging, in particular to a microscope positioning mark device with a specific pattern and an image positioning method. BACKGROUND

[0002] The combination of optical microscope, electron microscope and ion microscope can be used to characterize the same plane sample and obtain millimeter-level large-scale and nanometer-level resolution image data sets, which has important applications in many fields such as geology, biology and materials. However, due to the different imaging principles, the contrast of the sample under observation under optical, electron and ion microscopes is quite different, and even the target area observed under the optical microscope completely disappears under the electron microscope. During the transfer of the sample between different microscopes, how to locate the micro area of interest (such as organic matter of geological samples, cells of biological samples, and grain boundaries of material samples) from a large area without losing the position of the area of interest due to sample rotation and different image contrasts is an important prerequisite for microscope combination experiments.

[0003] The existing positioning mark method mainly includes: 1. Coordinate plate positioning method, the sample is placed on the coordinate plate with horizontal and vertical coordinates for coordinate positioning; 2. Marking position with a marker pen, observing with the naked eye or under an optical microscope and making mark points on the sample plane to be tested. The above two methods have technical defects: 1. For the coordinate plate positioning method, the coordinate axis numbers are large and the scale is not accurate, and the internal test area of the sample is far away from the coordinate axis, which is easy to deviate during movement; 2. For the marker pen marking position, the positioning is not accurate (the naked eye has low accuracy, the thick marker pen under the optical microscope blocks the line of sight and the operation space is too small), easy to misoperate (the size of the mark point is large, which is easy to cover the sample test area), and the relative position of the test area cannot be judged (the mark point is a circle, and once the sample rotates, the relative position of the test area to the mark point cannot be judged). Therefore, designing and manufacturing a high-precision microscope mark point manufacturing device with a specific mark point pattern and establishing a corresponding use method are the key to solving the current problem. SUMMARY

[0004] In order to overcome the defects of the prior art, the present application provides a microscope positioning mark device with a specific pattern of microns, which can be used for sample positioning on the surface of a plane sample. The positioning mark device comprises:

[0005] A positioning mark table 1, a needle point array 2, a sliding cross beam 3, a sliding block 4, a connecting fastener 5, a nut support 6, a locking nut 7, a lead screw 8 and a hand wheel 9;

[0006] The positioning marker table 1 is composed of a rectangular base 101 and a column 102 fixed at a corner of the rectangular base; the column 102 is used to define the up-down movement of the sliding beam 3;

[0007] The sliding beam 3 is composed of a circular ring 301 and a cuboid crossbar 302, the circular ring 301 is through and the through hole of the circular ring 301 is passed through and fitted by the column 102 of the positioning marker table 1, and the sliding beam 3 is used to support the horizontal movement of the sliding block 4 on the cuboid crossbar 302;

[0008] The sliding block 4 is provided, which is in the shape of a cuboid with a center through structure, the through hole of the sliding block is passed through and fitted by the cuboid crossbar 302 of the sliding beam 3, a group of circular holes with a specific pattern are provided at the bottom of the sliding block 4, and the circular holes are used to install the needle tip array 2; the sliding block 4 is used to move with the needle tip array 2 on the sliding beam 3;

[0009] The needle tip array 2 is a group of micron-level needle tip arrays arranged in a specific pattern, and the specific pattern is a pattern with orientation distinguishing function;

[0010] In some preferred embodiments, the sliding block 4 is provided with a circular hole at the bottom for installing the needle tip array 2, the bottom diameter of a single needle tip in the needle tip array 2 is consistent with the inner diameter of the circular hole, and the needle tip can be inserted into the inside of the circular hole for fixation, and the top tip diameter of the needle tip is controlled to be below 100 microns;

[0011] The lead screw 8 is a transmission element for converting rotary motion into vertical linear motion, the rotating handle 9 drives the rotation of the lead screw 8, controls the up-down movement of the locking nut 7, and drives the connection fastener 5, the sliding beam 3, the sliding block 4 and the needle tip array 2 to move up and down along the column 102 through the locking nut 7;

[0012] In some preferred embodiments, the lead screw 8 is a threaded rod, and the bottom end is installed by using a nut support 6 matched with the outer diameter of the lead screw 8;

[0013] The locking nut 7 matched with the outer diameter of the lead screw 8 is arranged in the middle of the lead screw 8, and the locking nut 7 is rigidly connected with the sliding beam 3 through the connection fastener 5;

[0014] The rotating handle 9 matched with the outer diameter of the lead screw 8 is arranged at the top of the lead screw 8, the lead screw 8 can be inserted into the rotating handle 9, the rotating handle 9 can rotate the lead screw 8, drives the locking nut 7 to move up and down, thereby changing the height of the connection fastener 5 on the column 102 of the positioning marker table 1, and drives the sliding beam 3 to move up and down along the column;

[0015] The connection fastener 5 is a U-shaped hard component, which has three preformed holes, namely a first preformed hole 504 for installing the sliding beam 3, a second preformed hole 505 for installing the column, and a third preformed hole 506 for installing the locking nut 7;

[0016] In some preferred embodiments, the connecting fixture 5 comprises a first fixing structure 501, a second fixing structure 502 and a third fixing structure 503, wherein the first fixing structure 501 and the second fixing structure 502 are in the shape of a thin plate, and the third fixing structure 503 is in the shape of a stepped component; the first fixing structure 501 is a cuboid with a first preformed hole 504, and the first preformed hole 504 is attached to the horizontal rod 302 of the cuboid; the second fixing structure 502 and the third fixing structure 503 are respectively provided with a second preformed hole 505 and a third preformed hole 506 at both ends; the second preformed holes 505 of the second fixing structure 502 and the third fixing structure 506 are vertically coincident, the inner diameter of the second preformed hole 505 is attached to the outer diameter of the column 301, and the second preformed hole 505 is used for inserting the column 102, and the vertical distance of the two second preformed holes is the same as the height of the circular ring 301 of the sliding horizontal beam 3; the inner diameter of the third preformed hole is attached to the outer diameter of the lead screw 8, and the third preformed hole is used for inserting the lead screw 8, and the vertical distance of the two third preformed holes is the same as the height of the locking nut 7.

[0017] In another aspect of the present application, based on the above-mentioned microscope positioning marker device, an image positioning method is provided, which comprises:

[0018] Step S100, assembling the positioning marker device, assembling the positioning marker table 1, the sliding horizontal beam 3, the connecting fixture 5, the nut support 6, the locking nut 7, the lead screw 8 and the hand wheel 9 into a complete microscope positioning marker device according to the relative relationship of each component of the microscope positioning marker device;

[0019] Step S200, preparing the marker needle tip, inserting the needle tip array 2 into the bottom hole of the sliding block 4, and dipping the tip of the needle tip array 2 with an appropriate amount of marker solution; making the cuboid horizontal rod 302 of the sliding horizontal beam 3 pass through the through hole in the sliding block 4, and moving the sliding horizontal beam 3 away from the rectangular base area of the positioning marker table 1;

[0020] In some preferred embodiments, the marker needle tip in step S200 is prepared by physical polishing or chemical corrosion;

[0021] In some preferred embodiments, the marker solution in step S200 comprises conductive silver glue, conductive carbon glue and conductive copper glue, and the average particle size is below 0.1 microns, which is dispersed in resin, additives and solution, and after drying, a conductive marker can be obtained;

[0022] Step S300, making a marking point, placing the planar sample on the rectangular base area of the positioning marker table 1, making the needle tip array 2 with the marker solution attached in contact with the surface of the planar sample, and leaving the marker solution on the surface of the sample, and after drying, obtaining a planar sample with specific pattern marking points;

[0023] In some preferred embodiments, the process of making the marking points in step S300 refers to placing the planar sample on the area of the rectangular base 101 of the positioning marking table 1, aligning the needle tip array 2 with the target position of the sample, then rotating the hand wheel 9 to control the rotation of the lead screw 8, and lowering the connecting fastener 5, the sliding crossbeam 3, the sliding block 4 and the needle tip array 2 through the locking nut 7, so that the needle tip array 2 attached with the marking solution is in contact with the surface of the planar sample, and then rotating the hand wheel 9 again to move the needle tip array 2 away from the planar sample after the marking points are made;

[0024] Step S400, image positioning observation, placing the planar sample with the made marking points under an optical, electronic or ion microscope for observation, finding the marking points with a specific pattern as the reference points, and then finding the target region of interest nearby for characterization; then switching to other types of microscopes for in-situ observation, finding the target region for observation through the marking points, and completing the combined use of microscopes.

[0025] The beneficial effects of the present application: through the design of the microscope positioning marking device and the establishment of the corresponding use method, the present application realizes the making of micron-level marking point array with specific pattern on the surface of planar sample, the marking point array has distinguishable contrast in optical, electronic and ion microscopes, the target region of interest in different directions and distances can be located through the marking point array, and the sample will not be contaminated, the combined use of optical, electronic and ion microscopes for characterization of the same sample is realized, and the millimeter-level large-scale, nanometer-level resolution image data set is obtained. BRIEF DESCRIPTION OF DRAWINGS

[0026] Other features, objects and advantages of the present application can be more clearly understood by reading and referring to the following detailed description of the drawings, and other drawings can also be obtained by those of ordinary skill in the art without creative labor on the premise that:

[0027] Figure 1 is a structural schematic diagram of the microscope positioning marking device in embodiment 1 of the present application;

[0028] Figure 2 is a structural schematic diagram of the positioning marking table carrying the sliding crossbeam in embodiment 1 of the present application;

[0029] Figure 3 is a structural schematic diagram of the sliding crossbeam in embodiment 1 of the present application;

[0030] Figure 4 is a structural schematic diagram of the sliding block carrying the needle tip array in embodiment 1 of the present application;

[0031] Figure 5 is a structural schematic diagram of the lead screw carrying the nut support, the locking nut and the hand wheel in embodiment 1 of the present application;

[0032] Figure 6 is the structural schematic diagram of the connection of the firmware in the embodiment 1 of the application;

[0033] Figure 7 is the effect schematic diagram of the needle tip prepared by different voltage and solution concentration in the embodiment 1 of the application;

[0034] Figure 8 is the effect schematic diagram of the complete microscope positioning marker device assembled in the embodiment 1 of the application;

[0035] Figure 9 is the effect schematic diagram of the planar sample used in the embodiment 1 of the application;

[0036] Figure 10 is the flow schematic diagram of the method for obtaining the marker point based on the microscope positioning marker device in the embodiment 2 of the application;

[0037] Figure 11 is the effect schematic diagram of the feature marker point made on the flat shale sample surface in the embodiment 2 of the application;

[0038] Figure 12 is the slide rail and the sliding sample table in the embodiment 3 of the application;

[0039] Figure 13 is the structural schematic diagram of the microscope positioning marker device with the slide rail in the embodiment 3 of the application;

[0040] Figure 14 is the structural schematic diagram of the microscope positioning marker device with the amplification positioning in the embodiment 4 of the application; DETAILED DESCRIPTION

[0041] The technical solutions in the application will be described in detail below with reference to the drawings in the application, so that the purpose, technical solutions and advantages of the application are more clear. Obviously, the embodiments described herein are only used to explain the related application, but not limit the application.

[0042] The application provides a microscope positioning marker device with a micron-level specific pattern and a corresponding positioning imaging method, which ensures that the target position of interest can be quickly positioned and found when a sample is observed by a microscope (including an optical microscope and an electron microscope) in situ technology, and the target area is not lost after the sample is taken out for other tests, thereby providing an effective positioning marker means for establishing a large-scale and high-precision microscope data set.

[0043] The embodiment 1 of the application is a microscope positioning marker device, and the detailed description of each structural component is as follows:

[0044] Figure 1For the structural schematic diagram of assembling the complete microscope positioning mark device in the embodiment of the present application, the positioning mark table 1, the needle point array 2, the sliding crossbeam 3, the sliding block 4, the connecting fastener 5, the nut support 6, the locking nut 7, the lead screw 8 and the hand wheel 9 are installed together, the connection between each assembly part is stable, and there is no shaking or sliding;

[0045] As shown in Figure 2 , the positioning mark table 1 is composed of a rectangular base 101 and a stand 102 fixed at a corner of the rectangular base, and the stand 102 is tangent to two sides of the rectangular base 101 respectively; the stand 102 of the positioning mark table 1 is used to limit the sliding crossbeam 3 to move up and down along the stand;

[0046] The length and width of the rectangular base are in the range of the size of common rocks, metals and biological samples, and meet the portability requirement, preferably 4-10 cm; the diameter and height of the stand can meet the overall stability of the positioning mark table 1 and match the length of the needle point array 2, preferably 1-3 cm in diameter and 5-10 cm in height;

[0047] As shown in Figure 3 , the sliding crossbeam 3 is composed of a circular ring 301 and a cuboid crossbeam 302, the height of the circular ring 301 is the same as that of the cuboid crossbeam 302, and the height of the circular ring 301 is preferably 1-3 cm; the circular ring 301 is through and the through hole in the circular ring 301 is passed through and fitted by the stand 102 of the positioning mark table 1, so that the sliding crossbeam 3 can be stably sleeved on the stand 102 of the positioning mark table 1 without shaking; the sliding crossbeam 3 is used to support the sliding block 4 to move horizontally on the cuboid crossbeam 302;

[0048] As shown in Figure 4 , the sliding block 4 is in the shape of a cuboid with a central through structure, the through hole in the sliding block 4 is passed through and fitted by the cuboid crossbeam 302 of the sliding crossbeam 3, and a group of circular holes with a specific pattern are arranged at the bottom of the sliding block 4, which are used to install the needle point array 2; the sliding block 4 is used to move with the needle point array 2 on the sliding crossbeam 3;

[0049] The specific pattern refers to a polygonal pattern such as a triangle and a quadrilateral with mirror symmetry and a pattern composed of other circular holes without symmetry, and the diameter of the circular hole is consistent with the diameter of the bottom of the needle point, preferably 0.5-3 mm, so as to ensure that the needle point array 2 can be inserted into the circular hole and stably clamped;

[0050] The needle point array 2 is a plurality of micron-level marking point needles fitted with the specific pattern circular hole at the bottom of the sliding block 4, which can distinguish different directions;

[0051] The shape of each needle tip of the needle tip array 2 can be consistent or inconsistent; the bottom of the needle tip is a rod-shaped structure with a diameter consistent with the inner diameter of the circular hole, which can be inserted into the circular hole for fixation, and the top of the needle tip is a conical structure, with the diameter of the tip of the top of the needle tip controlled to be less than 100 microns;

[0052] As shown in Figure 5 , the lead screw 8 is a transmission element for converting rotary motion into vertical linear motion; the lead screw 8 is rotated by rotating the hand wheel 9 at a constant speed to control the up and down movement of the locking nut 7, which drives the connecting fixture 5, the sliding cross beam 3, the sliding block 4 and the needle tip array 2 to move up and down along the column 102 of the positioning marker platform 1;

[0053] The lead screw 8 is a threaded rod, and the types of lead screws that can be used include sliding lead screws, rolling lead screws and static pressure lead screws; the nominal thread can be 10-50 mm, and the length is higher than the height of the column of the positioning marker platform 1, preferably 8-20 cm, to ensure the vertical movement distance of the sliding cross beam 3;

[0054] The bottom end of the lead screw 8 is installed with a nut support 6 that fits the outer diameter of the lead screw 8, and the lead screw 8 can be inserted into the nut support 6; the middle section of the lead screw 8 is provided with a locking nut 7 that fits the outer diameter of the lead screw 8, and the height of the locking nut 7 is preferably 1-3 cm; the locking nut 7 is rigidly connected to the sliding cross beam 3 through the connecting fixture 5, and the up and down movement of the locking nut 7 can be controlled by rotating the lead screw 8, which drives the sliding cross beam 3 to move up and down along the column of the positioning marker platform 1; the top of the lead screw 8 is provided with a hand wheel 9 that fits the outer diameter of the lead screw 8, and the lead screw 8 can be inserted into the hand wheel 9; the lead screw 8 can be rotated by rotating the hand wheel 9 at a constant speed, which drives the locking nut 7 to move up and down, thereby changing the height of the connecting fixture 5 on the column of the positioning marker platform 1, and driving the sliding cross beam 3 to move up and down along the column 102;

[0055] As shown in Figure 6 , the connecting fixture 5 is a hard component with three pre-made holes, namely a first pre-made hole 504 for installing the sliding cross beam 3, a second pre-made hole 505 for installing the column, and a third pre-made hole 506 for installing the locking nut 7; the material of the hard component can include metal, plastic, ceramic or rock;

[0056] The connecting fixture 5 comprises a first fixing structure 501, a second fixing structure 502 and a third fixing structure 503, wherein the first fixing structure 501 and the second fixing structure 502 are in the shape of a thin plate, and the third fixing structure 503 is in the shape of a stepped component; the first fixing structure 501 is a cuboid with a first preformed hole 504, and the first preformed hole 504 is attached to the cuboid horizontal rod 302 of the sliding crossbeam 3; the second fixing structure 502 and the third fixing structure 503 are respectively provided with a second preformed hole 505 and a third preformed hole 506 at two ends; the preformed holes of the second fixing structure 502 and the third fixing structure 503 are vertically coincident, the inner diameter of the second preformed hole 505 is attached to the outer diameter of the stand column 102 for inserting the stand column 102, and the vertical distance between the two second preformed holes 505 is the same as the height of the circular ring 301 of the sliding crossbeam 3; the inner diameter of the third preformed hole 506 is attached to the outer diameter of the lead screw 8 for inserting the lead screw 8, and the vertical distance between the two third preformed holes 506 is the same as the height of the locking nut 7 for fixing the locking nut 7.

[0057] The material of the needle array can be gold, silver, copper, iron, aluminum, tungsten, titanium, etc., preferably with a diameter of 0.5-3 mm, a rod-shaped structure at the bottom of the needle, and a conical structure at the top of the needle, which can be prepared by physical polishing and chemical corrosion to control the diameter of the tip to be below 100 microns; preferably, the electrochemical corrosion method can more effectively control the morphology of the needle tip by adjusting the electrolyte concentration and electrolysis voltage;

[0058] Figure 7 The effect diagram for preparing tungsten metal needle tips by electrochemical corrosion in a sodium hydroxide solution, the tungsten needle used in this embodiment is 1.6 mm in diameter, by immersing in a 1-2 mol / L sodium hydroxide solution as a working electrode, graphite, copper electrode, etc. as a counter electrode, and using a 7-11V voltage for electrochemical corrosion reaction, after a certain time, metal needle tips with different tip diameters can be obtained, the cathode reaction is 6H2O+6e - →3H2(g)+6OH - , the anode reaction is W+8OH - →WO4 2- +4H2O+6e - , and a typical experimental scheme is shown in Table 1;

[0059] Table 1 Different metal needle tips prepared by using different reaction parameters

[0060] (a) (b) (c) NaOH concentration (mol / L) 1.5 1.5 2 Electrolysis voltage (V) 9.5 11 11

[0061] Figure 8 The effect diagram of the complete microscope positioning marker device assembled in the embodiment of the application, the sample placement area is below the needle array;

[0062] Figure 9For some typical plane samples that need to be marked, including shale, coal, sandstone, etc.

[0063] Embodiment 2 of the present application is a microscope positioning mark point making method, which is implemented by the above microscope positioning marking device, and the method comprises the following steps: Figure 10

[0064] Step S100, assembling the positioning marking device, according to the relative relationship of the components of the microscope positioning marking device shown in the figure, assembling the positioning marking table 1, the sliding crossbeam 3, the connecting fastener 5, the nut support 6, the locking nut 7, the lead screw 8 and the hand wheel 9 into a complete microscope positioning marking device; Figure 1

[0065] Step S200, preparing the marking needle tip, inserting the needle tip array 2 into the bottom hole of the sliding block 4, dipping the tip of the needle tip array 2 with an appropriate amount of marking solution, making the cuboid crossbar 302 of the sliding crossbeam 3 pass through the through hole in the sliding block 4, and moving the sliding crossbeam 3 away from the rectangular base area of the positioning marking table 1;

[0066] The marking needle tip in the step S200 is prepared by physical polishing and chemical corrosion; preferably, the electrochemical corrosion method can more effectively control the appearance of the needle tip by adjusting the concentration of the electrolyte and the electrolysis voltage;

[0067] The marking solution in the step S200 includes conductive silver glue, conductive carbon glue and conductive copper glue, the average particle size of which is below 0.1 microns, which is dispersed in resin, additives and solution, and after drying, the marking solution can obtain a conductive marking solution which has distinguishable contrast in optical, electronic and ion microscopes;

[0068] Step S300, making mark points, placing the plane sample in the rectangular base area of the positioning marking table 1, making the needle tip array 2 with the marking solution attached in contact with the surface of the plane sample, and leaving the marking solution on the sample surface, and obtaining the plane sample with specific pattern mark points after drying;

[0069] The process of making mark points in the step S300 refers to placing the plane sample in the rectangular base area of the positioning marking table 1, aligning the needle tip array 2 with the target position of the sample, then rotating the hand wheel 9 at a constant speed to control the rotation of the lead screw 8, and driving the connecting fastener 5, the sliding crossbeam 3, the sliding block 4 and the needle tip array 2 to descend at a constant speed through the locking nut 7, so that the needle tip array 2 with the marking solution attached is in contact with the surface of the plane sample, and then rotating the hand wheel 9 again to make the needle tip array 2 away from the plane sample after the mark points are made;

[0070] ​​Step S400, image positioning observation, the plane sample with marked points is placed under the optical, electronic or ion microscope, the marked point with specific pattern is found as the reference point, then the target area of interest is found nearby for characterization; then it is switched to other types of microscopes for in-situ observation, the target area is found for observation through the marked point, and the microscope combination experiment is completed;

[0071] In some preferred embodiments, the marked point in step S400 is a triangular, quadrilateral or other polygon pattern with mirror symmetry, and other circular hole patterns without symmetry, which can locate the relative position between the marked point and the target area of interest. Even if the plane sample is placed at a random angle in the microscope, the marked point can be accurately positioned.

[0072] Figure 11 The effect diagram of the plane sample with marked points in the embodiment of the application is shown. The specific pattern is a triangle, and the three needle tips used are of different thicknesses. The marked points P1, P2 and P3 have asymmetry. The specific pattern is used for positioning, and even if the sample rotates during transfer, the target area nearby can be found.

[0073] Embodiment 3 of the application is a microscope positioning marking device with a slide rail, which is basically the same as embodiment 1, except that the slide rail and the sliding sample stage are used to control the placement and removal of the plane sample, increasing the stability of the operation.

[0074] Figure 12 (a-c) are structure schematic diagrams of the slide rail, the sliding sample stage and the sliding sample stage loaded on the slide rail, respectively;

[0075] The slide rail is a long groove; the sliding sample stage is a cube with a circular hole in the middle of the top end, and the edge length is matched with the inner diameter of the sliding sample stage; the plane sample is stuck on the top of the sliding sample stage, or on the butane-shaped table, and then inserted into the circular hole of the sliding sample stage for fixation;

[0076] Figure 13 is a structure schematic diagram of the microscope positioning marking device with a slide rail in embodiment 3 of the application. The slide rail is fixed on the rectangular base 101 of the positioning marking table 1 by mechanical or adhesive means, to avoid movement of the slide rail during operation and affect the accuracy of the marked point.

[0077] Embodiment 4 of the application is a microscope positioning marking device with magnification and shooting functions, which is based on embodiment 3. An external magnification observation device is used to assist the operation, so that the marked point is closer to the target area of the plane sample to be measured.

[0078] Figure 14It is the structural schematic view of the microscope positioning mark device with amplification shooting function, which is equipped with auxiliary equipment such as stereoscopic microscope and camera; the positioning mark device is placed on the base of the stereoscopic microscope and fixed, the objective lens of the stereoscopic microscope is aligned with the positioning mark device, the process of making mark points is synchronously observed, the mark process can be monitored under higher magnification, so that the mark points are more accurately close to the target area.

[0079] Those skilled in the art can easily understand that the protection scope of the present application is obviously not limited to the specific embodiments, and equivalent changes or replacements can still be made to the related technical features, and the technical solutions after the changes or replacements will not deviate from the protection scope of the technical solutions of the embodiments of the present application without deviating from the principles of the present application.

Claims

1. A microscope positioning mark device having a specific pattern of micrometer scale, characterized by, The device comprises a positioning mark platform (1), a needle tip array (2), a sliding beam (3), a sliding block (4), a connecting fastener (5), a nut support (6), a locking nut (7), a lead screw (8) and a hand wheel (9); The positioning mark platform (1) is composed of a rectangular base (101) and a stand (102) fixed at a corner of the rectangular base; the stand (102) is used to limit the up-down movement of the sliding beam (3); The sliding beam (3) is composed of a circular ring (301) and a cuboid beam (302), the circular ring (301) is through and the through hole of the circular ring (301) is passed through and fitted by the stand (102) of the positioning mark platform (1), and the sliding beam (3) is used to support the horizontal movement of the sliding block (4) on the cuboid beam (302); The sliding block (4) is shaped as a cuboid with a through structure in the center, the through hole of the sliding block (4) is passed through and fitted by the cuboid beam (302) of the sliding beam (3), a group of circular holes with a specific pattern are arranged at the bottom of the sliding block (4), and the circular holes are used to install the needle tip array (2); the sliding block (4) is used to move on the sliding beam (3) with the needle tip array (2); the diameter of the bottom of a single needle tip in the needle tip array (2) is consistent with the inner diameter of the circular hole, and can be inserted into the inside of the circular hole for fixation; The needle tip array (2) is a group of micron-level needle tip arrays arranged in a specific pattern, and the specific pattern is a pattern with orientation distinguishing function; The connecting fastener (5) is a hard component shaped as a square bracket, has three preformed holes, and is respectively provided with a first preformed hole (504) for installing the sliding beam (3), a second preformed hole (505) for installing the stand, and a third preformed hole (506) for installing the locking nut (7); The lead screw (8) is a transmission element for converting rotary motion into vertical linear motion, the lead screw (8) is rotated by rotating the hand wheel (9), the locking nut (7) is controlled to move up and down, the connecting fastener (5), the sliding beam (3), the sliding block (4) and the needle tip array (2) are driven by the locking nut (7) to move up and down along the stand (102).

2. The microscope positioning mark device according to claim 1, characterized in that The lead screw (8) is a threaded rod, and the bottom end is installed by using the nut support (6) fitted with the outer diameter of the lead screw (8); The locking nut (7) fitted with the outer diameter of the lead screw (8) is arranged at the middle section of the lead screw (8), and the locking nut (7) is rigidly connected with the sliding beam (3) through the connecting fastener (5); The hand wheel (9) fitted with the outer diameter of the lead screw (8) is arranged at the top of the lead screw (8), the lead screw (8) can be inserted into the hand wheel (9), the lead screw (8) can be rotated by rotating the hand wheel (9), the locking nut (7) is driven to move up and down, thereby changing the height of the connecting fastener (5) on the stand of the positioning mark platform (1), and driving the sliding beam (3) to move up and down along the stand (102).

3. The microscope positioning mark device according to claim 1, characterized in that The connecting member (5) comprises a first fixing structure (501), a second fixing structure (502) and a third fixing structure (503), wherein the first fixing structure (501) and the second fixing structure (502) are I-shaped thin plates, and the third fixing structure (503) is a stepped component; the first fixing structure (501) is a rectangular parallelepiped with a first prefabricated hole (504), and the first prefabricated hole (504) is fitted with the rectangular parallelepiped crossbar (302); the second fixing structure (502) and the third fixing structure (503) are respectively provided with a second prefabricated hole (505) at both ends. and a third prefabricated hole (506); the prefabricated holes of the second fixing structure (502) and the third fixing structure (503) overlap in the vertical direction, the inner diameter of the second prefabricated hole (505) fits the outer diameter of the column (102) for inserting the column (102), and the vertical distance between the two second prefabricated holes (505) is the same as the height of the circular ring (301) of the sliding beam (3); the inner diameter of the third prefabricated hole (506) fits the outer diameter of the lead screw (8) for inserting the lead screw (8), and the vertical distance between the two third prefabricated holes (506) is the same as the height of the locking nut (7).

4. An image positioning method characterized by, The method is implemented by the microscope positioning marking device according to any one of claims 1 to 3, comprising: Step S100, assembling the positioning marking device, according to the relative relationship of the various components of the microscope positioning marking device, assembling the positioning marking platform (1), the sliding beam (3), the connecting piece (5), the nut support (6), the locking nut (7), the lead screw (8) and the hand wheel (9) into a complete microscope positioning marking device; Step S200, prepare the marker needle tip, insert the needle tip array (2) into the circular hole at the bottom of the slider (4), and dip the tip of the needle tip array (2) into an appropriate amount of marker solution; make the rectangular crossbar (302) of the sliding beam (3) pass through the internal through-hole of the slider (4), and move the sliding beam (3) to a rectangular base area away from the positioning marker platform (1); Step S300, making marking points, placing a planar sample on the rectangular base area of ​​the positioning marking platform (1), making the needle tip array (2) attached with the marking solution contact the surface of the planar sample, and making the marking solution remain on the sample surface, and obtaining a planar sample with a specific pattern of marking points after drying; Step S400, image positioning observation, place the flat sample with marked points under an optical, electron or ion microscope for observation, find the marked points with specific patterns and use them as reference points, and then find the target area of ​​interest nearby for characterization; then switch to other types of microscopes for in situ observation, find the target area through the marked points for observation, and complete the microscope combination experiment.

5. The method of claim 4, wherein, The marker needle tip is prepared by physical grinding and chemical etching.

6. The method of claim 4, wherein, The marker solution in step S200 includes conductive silver paste, conductive carbon paste and conductive copper paste, with an average particle size of less than 0.1 micron, which is dispersed in resin, additives and solution. After drying, a conductive marker can be obtained.

7. The method of claim 4, wherein, The process of making the marking point in step S300 is specifically as follows: Put the planar sample on the positioning mark table (1) rectangular base area, make the needle tip array (2) align with the sample target position, then rotate the hand wheel (9) to control the screw rod (8) to rotate, through the locking nut (7) to drive the connecting fastener (5), sliding crossbeam (3), slider (4) and needle tip array (2) to descend, so that the needle tip array (2) attached with the marker solution is in contact with the planar sample surface, after the mark point is made, rotate the hand wheel (9) again to make the needle tip array (2) away from the planar sample.

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