Acoustic matching layer materials, sheets, compositions, acoustic probes and acoustic measurement devices, and related manufacturing methods

Abstract

This invention provides an acoustic matching layer material, an acoustic matching sheet, a composition for forming the acoustic matching sheet, an acoustic wave probe and an acoustic wave measuring device, and methods for manufacturing the acoustic matching layer material and the acoustic wave probe. The acoustic matching layer material contains a thermosetting resin component and inorganic filler particles. In cross-sectional observation of the acoustic matching layer material, the cross-sectional area of ​​the inorganic filler particles satisfies the following formula (1). b: Let a be the number-average value of the cross-sectional area of ​​the inorganic filler particles, and let b be the total cross-sectional area of ​​the inorganic filler particles that have a cross-sectional area that is 7 times or more than a. c: Let c be the total cross-sectional area of ​​the inorganic filler particles. Formula (1) 100×b / c≥25.

Description

Technical Field

[0001] This invention relates to an acoustic matching layer material, an acoustic matching sheet, a composition for forming an acoustic matching sheet, an acoustic wave probe and an acoustic wave measuring device, as well as various manufacturing methods of the acoustic matching layer material and the acoustic wave probe. Background Technology

[0002] An acoustic wave measuring device uses an acoustic wave probe that shines sound waves onto a subject such as a living organism, receives the reflected waves (echoes), and outputs a signal. The reflected waves received by the acoustic wave probe are converted into electrical signals and displayed as an image. Therefore, by using an acoustic wave probe, it is possible to visualize and observe the interior of the subject.

[0003] As sound waves, ultrasound, photoacoustic waves, etc., are appropriately selected according to the object being tested or the measurement conditions.

[0004] For example, an ultrasound diagnostic device, as a type of sound wave measuring device, sends ultrasound waves into the object being examined, receives ultrasound waves reflected by the tissues inside the object being examined, and displays them as an image.

[0005] Furthermore, as a type of acoustic wave measuring device, the photoacoustic wave measuring device receives sound waves emitted from inside the object under test through the photoacoustic effect and displays them as an image. The photoacoustic effect refers to the phenomenon that when electromagnetic wave pulses such as visible light, near-infrared light, or microwaves are irradiated onto the object under test, the object absorbs the electromagnetic waves, heats up, and expands thermally, thereby generating sound waves (typically ultrasound).

[0006] Since the acoustic wave measuring device transmits and receives sound waves from and from the object being examined, the acoustic wave probe is required to match the acoustic impedance of the object being examined (typically the human body). To meet this requirement, an acoustic matching layer is provided in the acoustic wave probe. This will be explained using an ultrasound diagnostic device probe (also known as an ultrasonic probe), which is a type of acoustic wave probe, as an example.

[0007] An ultrasonic probe comprises a piezoelectric element that transmits and receives ultrasonic waves and an acoustic lens that contacts the living body. An acoustic matching layer is disposed between the piezoelectric element and the acoustic lens. Ultrasonic waves oscillating from the piezoelectric element pass through the acoustic matching layer and further through the acoustic lens before entering the living body. There is typically a difference in acoustic impedance (density × velocity of sound) between the acoustic lens and the living body. If this difference is large, the ultrasonic waves are easily reflected at the surface of the living body, and the incident efficiency of the ultrasonic waves into the living body will decrease. Therefore, the acoustic lens is required to have acoustic impedance characteristics close to those of the living body.

[0008] On the other hand, the difference in acoustic impedance between the piezoelectric element and the living body is usually large. Therefore, the difference in acoustic impedance between the piezoelectric element and the acoustic lens is also usually large. Consequently, in the case of a stacked structure of the piezoelectric element and the acoustic lens, the ultrasonic waves oscillating from the piezoelectric element are reflected at the surface of the acoustic lens, reducing the incident efficiency of the ultrasonic waves towards the living body. To suppress this ultrasonic wave reflection, the aforementioned acoustic matching layer is provided between the piezoelectric element and the acoustic lens. The acoustic impedance of the acoustic matching layer is taken as a value between the acoustic impedance of the living body or the acoustic lens and the acoustic impedance of the piezoelectric element, thereby improving the propagation efficiency of ultrasonic waves from the piezoelectric element to the living body. Furthermore, in recent years, the development of acoustic matching layers has been underway that form the acoustic matching layer as a multilayer structure composed of multiple stacked acoustic matching sheets (sheet-shaped acoustic matching layer material), tilting the acoustic impedance from the piezoelectric element side to the acoustic lens side, thereby further improving the propagation efficiency of ultrasonic waves.

[0009] The acoustic impedance of an acoustic matching layer can be improved to a desired level by including inorganic fillers such as metal particles in the acoustic matching layer. For example, Patent Document 1 discloses an acoustic matching layer containing: a component derived from an adhesive material, which includes resins such as epoxy resin; and metal particles having a specific monodispersity. Furthermore, Patent Document 2 discloses an acoustic matching layer containing: a component derived from epoxy resin; and inorganic fillers such as ferrite.

[0010] Previous technical documents

[0011] Patent documents

[0012] Patent Document 1: International Publication No. 2019 / 088145

[0013] Patent Document 2: Japanese Patent Application Publication No. 2014-168489 Summary of the Invention

[0014] The technical problem to be solved by the invention

[0015] In the multi-layered acoustic matching layer, the aforementioned acoustic impedance tilt is designed such that the closer to the piezoelectric element, the greater the acoustic impedance of the acoustic matching sheet; and the closer to the acoustic lens, the smaller the acoustic impedance of the acoustic matching sheet. That is, the acoustic matching sheet is required to have an acoustic impedance close to that of the piezoelectric element (typically around 25 Mrayl) on the piezoelectric element side and an acoustic impedance close to that of the living body (1.4–1.7 Mrayl in the human body) on the acoustic lens side.

[0016] The acoustic impedance of an acoustic matching sheet is determined by multiplying the density of the sheet's constituent materials by the sound velocity. Therefore, when attempting to increase the acoustic impedance of an acoustic matching sheet used on the piezoelectric element side, a high-density material with a high sound velocity can be considered. However, it is known that if a high-density filler such as a metal is included in the acoustic matching sheet to increase the acoustic impedance, while the sheet density can be increased, the sound velocity of the sheet will decrease. Therefore, when using a high-density inorganic filler such as a metal in the acoustic matching sheet, if the sheet is to be used on the piezoelectric element side, techniques to suppress the aforementioned decrease in sound velocity or techniques to increase the sound velocity are required.

[0017] The objective of this invention is to provide an acoustic matching layer material that, while using inorganic filler particles, can effectively increase the sound velocity of the resulting acoustic matching sheet and also suppress changes in the acoustic properties within the acoustic matching sheet.

[0018] Furthermore, the present invention also aims to provide an acoustic matching sheet that can effectively increase the sound velocity while using inorganic filler particles, and has minimal changes in the acoustic properties within the sheet, as well as an acoustic matching sheet forming composition suitable for forming the acoustic matching sheet.

[0019] Furthermore, the present invention also aims to provide an acoustic probe using the aforementioned acoustic matching sheet and an acoustic measurement device using the acoustic probe.

[0020] Furthermore, the present invention also aims to provide a method for manufacturing the above-mentioned acoustic matching layer material and a method for manufacturing an acoustic wave probe using the above-mentioned acoustic matching layer material.

[0021] means for solving technical problems

[0022] The inventors conducted in-depth research on the aforementioned issues and discovered that by including inorganic filler particles of a specific size in a specific proportion in the acoustic matching layer material, the sound velocity of the obtained acoustic matching layer can be effectively increased, and changes in acoustic properties can also be reduced. This invention was completed based on further repeated research based on these insights.

[0023] That is, the above-mentioned problems of the present invention have been solved by the following method.

[0024] <1>

[0025] An acoustic matching layer material contains thermosetting resin components and inorganic filler particles. In cross-sectional observation of the acoustic matching layer material, the cross-sectional area of ​​the inorganic filler particles satisfies the following formula (1).

[0026] Equation (1) 100×b / c≥25

[0027] b: Let a be the numerical average of the cross-sectional areas of the aforementioned inorganic filler particles, and let b be the total cross-sectional areas of the aforementioned inorganic filler particles that have a cross-sectional area more than 7 times that of a.

[0028] c: Let c be the total cross-sectional area of ​​the inorganic filler particles mentioned above.

[0029] <2>

[0030] According to the acoustic matching layer material described in <1>, the density of the aforementioned inorganic filler particles at 25°C is 7.5–21.5 g / cm³. 3 .

[0031] <3>

[0032] According to the acoustic matching layer material described in <1> or <2>, the inorganic filler particles contain metal particles.

[0033] <4>

[0034] According to the acoustic matching layer material described in <3>, the metal atoms constituting the aforementioned metal particles contain at least one metal atom from groups 4 to 12 of the periodic table.

[0035] <5>

[0036] According to any one of <1> to <4>, in the acoustic matching layer material, the content of the inorganic filler particles is 60 to 96% by mass.

[0037] <6>

[0038] The acoustic matching layer material according to any one of <1> to <5>, wherein the thermosetting resin component contains an epoxy resin component.

[0039] <7>

[0040] A sound matching sheet, comprising any one of the sound matching layer materials described in <1> to <6>.

[0041] <8>

[0042] A composition for forming an acoustic matching sheet as described in <7>, comprising a thermosetting resin, a curing agent, and an inorganic filler.

[0043] <9>

[0044] An acoustic probe having the acoustic matching sheet described in <7> as an acoustic matching layer.

[0045] <10>

[0046] An acoustic wave measuring device, comprising the acoustic wave probe described in <9>.

[0047] <11>

[0048] According to the acoustic wave measuring device described in <10>, the acoustic wave measuring device is an ultrasonic diagnostic device.

[0049] <12>

[0050] A method for manufacturing an acoustic matching layer material, wherein the acoustic matching layer material contains thermosetting resin components and inorganic filler particles, wherein the method for manufacturing the acoustic matching layer material...

[0051] The above manufacturing method includes the step of isostatic pressing a composition containing thermosetting resin, curing agent and inorganic filler for forming an acoustic matching layer.

[0052] In cross-sectional observation, the cross-sectional area of ​​the inorganic filler particles in the aforementioned acoustic matching layer material satisfies the following equation (1).

[0053] Equation (1) 100×b / c≥25

[0054] b: Let a be the numerical average of the cross-sectional areas of the aforementioned inorganic filler particles, and let b be the total cross-sectional areas of the aforementioned inorganic filler particles that have a cross-sectional area more than 7 times that of a.

[0055] c: Let c be the total cross-sectional area of ​​the inorganic filler particles mentioned above.

[0056] <13>

[0057] A method for manufacturing an acoustic probe, comprising the step of forming an acoustic matching layer using any one of <1> to <6>.

[0058] In this specification, "a" to "c" are values ​​determined by the methods described in the embodiments described later.

[0059] Furthermore, in this specification, “~” is used to mean that the values ​​recorded before and after it are included as lower and upper limits.

[0060] Effects of the Invention

[0061] The acoustic matching layer material of the present invention can effectively increase the sound velocity of the obtained acoustic matching sheet while using inorganic filler particles, and can also suppress changes in the acoustic properties within the acoustic matching sheet.

[0062] Furthermore, the acoustic matching sheet of the present invention can effectively increase the sound velocity while using inorganic filler particles, and the changes in the acoustic properties within the sheet are also minimal.

[0063] The acoustic matching sheet forming composition of the present invention can be used to obtain the above-mentioned acoustic matching sheet by curing it.

[0064] Furthermore, the acoustic probe and acoustic measuring device of the present invention have an acoustic matching sheet with the aforementioned excellent properties.

[0065] Furthermore, the acoustic matching layer material according to the present invention can be obtained using the method for manufacturing the acoustic matching layer material. The acoustic probe according to the present invention can be obtained using the acoustic matching layer material. Attached Figure Description

[0066] Figure 1 This is a three-dimensional perspective view of an example of a convex ultrasonic probe as a type of acoustic wave probe. Detailed Implementation

[0067] <Sound Matching Layer Material>

[0068] The acoustic matching layer material of the present invention (hereinafter also simply referred to as "the layer material of the present invention") is a material formed by curing the acoustic matching layer forming composition described later. It can be a sheet material that is directly used as an acoustic matching layer, or it can be a material that is processed into the shape of an acoustic matching layer in a preliminary stage (for example, a sheet material that is thicker than the acoustic matching layer, and the thick sheet material is sliced ​​and processed to be used as an acoustic matching layer).

[0069] The layer material of the present invention contains thermosetting resin components and inorganic filler particles. In the cross-sectional observation of the acoustic matching layer material, the cross-sectional area of ​​the inorganic filler particles satisfies the following formula (1).

[0070] Equation (1) 100×b / c≥25

[0071] b: Let a be the numerical average of the cross-sectional areas of the aforementioned inorganic filler particles, and let b be the total cross-sectional areas of the aforementioned inorganic filler particles that have a cross-sectional area more than 7 times that of a.

[0072] c: Let c be the total cross-sectional area of ​​the inorganic filler particles mentioned above.

[0073] That is, the proportion of b in c is more than 25%.

[0074] As shown in the embodiments described below, "a" to "c" are the cross-sectional areas of the inorganic filler particles when the cross-section of the acoustic matching layer material is observed using a cross-section polisher and by ion milling.

[0075] The acoustic matching layer material of the present invention, while using inorganic filler particles, can effectively increase the sound velocity of the resulting acoustic matching sheet and also suppress changes in the acoustic properties within the acoustic matching sheet. The reason for this is not yet clear, but can be inferred as follows.

[0076] The layer material of the present invention comprises inorganic filler particles, which use a thermosetting resin component as a matrix and have a specific size distribution within the matrix. Specifically, within the matrix, a specific proportion of inorganic filler particles are dispersed in a large-particle-size manner in mutual contact (linked), effectively increasing the sound wave transmission speed between the inorganic filler particles or between the inorganic filler particles and the thermosetting resin component. On the other hand, it is believed that a certain amount of small-particle-size inorganic filler particles that are not in contact with each other (unlinked) are also dispersed, which contributes to the uniformity of the entire acoustic matching layer material and effectively suppresses variations in acoustic properties.

[0077] The above formula (1) is preferably the following formula (2), more preferably the following formula (3), and even more preferably the following formula (4).

[0078] Equation (2) 100×b / c≥30

[0079] Equation (3) 80≥100×b / c≥30

[0080] Equation (4) 80≥100×b / c≥50

[0081] The shape of the layer material of the present invention is not particularly limited, for example, it can be sheet-shaped, cylindrical and prismatic, with sheet-shaped being preferred.

[0082] Hereinafter, the thermosetting resin component will sometimes be referred to as "adhesive material". In this case, when the layer material of the present invention contains the curing agent component (a component derived from the curing agent) described later, the thermosetting resin component and the curing agent component will be collectively referred to as "adhesive material".

[0083] "Thermosetting resin" refers to a resin that has the property of curing by heat, and "thermosetting resin component" refers to the component of a thermosetting resin that is in a cured state by heat (for example, a thermosetting resin is cured by reacting with a curing agent by heat).

[0084] (Thermosetting resin)

[0085] The thermosetting resin contained in the layer material guiding this invention is not particularly limited. Examples include epoxy resin, phenolic resin, melamine resin, urea-formaldehyde resin, unsaturated polyester resin, alkyd resin, thermosetting polyurethane resin, and thermosetting polyimide resin.

[0086] From the viewpoint of further suppressing changes in the acoustic properties of the obtained acoustic matching layer material, the thermosetting resin preferably contains epoxy resin. In this case, a combination of epoxy resin and a curing agent is preferred. That is, epoxy resin is preferably used as the thermosetting resin, and a curing agent is further used in combination. In this case, the layer material of the present invention will contain an adhesive material (thermosetting resin component) containing epoxy resin and curing agent components.

[0087] When epoxy resin is used as a thermosetting resin, the epoxy resin preferably contains one or more of bisphenol A type epoxy resin, bisphenol F type epoxy resin and phenolic varnish type epoxy resin.

[0088] There are no particular limitations on the bisphenol A type epoxy resins that can be used in this invention; resins commonly used as the main agent in epoxy adhesives can be widely used. Preferred specific examples include bisphenol A diglycidyl ether (jER825, jER828, and jER834 (all trade names), manufactured by Mitsubishi Chemical Corporation) and bisphenol A propoxylated diglycidyl ether (manufactured by Sigma-Aldrich Co. LLC).

[0089] There are no particular limitations on the bisphenol F type epoxy resins that can be used in this invention, and resins commonly used as the main agent in epoxy adhesives can be widely used. Preferred specific examples include bisphenol F diglycidyl ether (trade name: EPICLON830, manufactured by DIC Corporation) and 4,4'-methylenebis(N,N-diglycidyl aniline).

[0090] There are no particular limitations on the phenolic varnish-type epoxy resins that can be used in this invention; resins commonly used as the main component in epoxy adhesives can be widely used. Such phenolic varnish-type epoxy resins are, for example, sold by Sigma-Aldrich Co. LLC under product number 406775.

[0091] The curing agent can be any known epoxy resin curing agent without particular limitation. Examples include aliphatic amines, aromatic amines, polyamide amines, polyether amines, dicyandiamide, dihydrazide compounds, acid anhydrides, phenolic resins, etc. Among these, from the viewpoint of slowing down the curing speed and increasing the pot life of the mixture, at least one of primary and secondary amines is preferred. Primary amines are more preferred.

[0092] (Inorganic filler particles)

[0093] The layer material of the present invention contains inorganic filler particles. By adjusting the content of these inorganic filler particles, the density of the layer material can be adjusted, and the acoustic impedance of the layer material can be adjusted to a desired level.

[0094] Furthermore, from the perspective of increasing the acoustic impedance of the layer material by increasing its density, the density of the inorganic filler particles (25℃, g / cm³) is... 3 The density is preferably 4.0 or higher, more preferably 7.5 or higher, and even more preferably 15 or higher. Furthermore, the density of the inorganic filler particles is preferably 21.5 or lower.

[0095] There are no particular limitations on the inorganic filler particles; for example, it is preferable to contain metal particles. The content of metal particles in the inorganic filler particles is not particularly limited, but is preferably 80% by mass or more, more preferably 90% by mass or more, even more preferably 95% by mass or more, and can be 100% by mass.

[0096] Inorganic filler particles can also be surface treated. For example, this surface treatment can be performed with reference to International Publication No. 2019 / 088148.

[0097] When inorganic filler particles contain metal particles, the metal atoms constituting the metal particles can be present in the form of monomers, or in the form of metal carbides, nitrides, oxides, or borides. Furthermore, alloys can also be formed. Examples of alloys include high-tensile steel (Fe-C), chromium-molybdenum steel (Fe-Cr-Mo), manganese-molybdenum steel (Fe-Mn-Mo), stainless steel (Fe-Ni-Cr), 42 alloy, Invar alloy (Fe-Ni), iron-cobalt (Fe-Co), silicon steel (Fe-Si), copper, Tom Vac (Cu-Zn), copper-nickel-zinc alloy (Cu-Zn-Ni), bronze (Cu-Sn), cupronickel (Cu-Ni), red copper (Cu-Au), Constanze alloy (Cu-Ni), aluminum alloy (Al-Cu), Hastelloy alloy (Ni-Mo-Cr-Fe), Monel alloy (Ni-Cu), Inconel nickel alloy (Ni-Cr-Fe), nickel-chromium alloy (Ni-Cr), manganese-iron (Mn-Fe), superhard alloy (WC / Co), and tungsten carbide (WC).

[0098] The aforementioned metal atoms preferably contain at least one metal atom from Groups 4 to 12 of the periodic table, more preferably at least one metal atom from Groups 4 to 9 of the periodic table. The aforementioned metal atoms more preferably contain at least one of Ti, Ag, Pt, Fe, Co, Zr, Mo, and W, and even more preferably at least one of Fe, Co, Zr, Mo, and W. The content of metal atoms from Groups 4 to 12 of the periodic table constituting the metal particles is not particularly limited, but in total, it is preferably 80% by mass or more, more preferably 90% by mass or more, even more preferably 95% by mass or more, and may also be 100% by mass.

[0099] In the acoustic matching layer material of the present invention, the number-mean value 'a' of the cross-sectional area of ​​the inorganic filler particles is, for example, 1 × 10⁻⁶. -5 ~2×10 4 μm 2 It can be 3×10 -3 ~2×10 3 μm 2 It can also be 7×10 -2 ~2×10 2 μm2 .

[0100] In the layer material of the present invention, the contents of inorganic filler particles and binder materials can be appropriately adjusted according to the target acoustic impedance, etc. For example, when the acoustic matching layer is multilayered, the content of metal particles in the layer material of the acoustic matching layer used on the piezoelectric element side is relatively high, while the content of metal particles in the layer material of the acoustic matching layer used on the acoustic lens side is relatively low. As a result, the acoustic impedance can be tilted from the piezoelectric element side to the acoustic lens side, making the propagation of sound waves more efficient.

[0101] In the layer material of the present invention, the content of inorganic filler particles can be appropriately adjusted as described above, typically 50-98% by mass, preferably 60-96% by mass, and more preferably 65-96% by mass.

[0102] Furthermore, the content of the adhesive material in the layer material is typically 2 to 50% by mass, preferably 4 to 40% by mass, and more preferably 4 to 35% by mass.

[0103] The layer material of the present invention can be composed of an adhesive material and inorganic filler particles. Furthermore, it may contain other components without impairing the effects of the present invention. Examples of components other than the adhesive material and inorganic filler particles include substances contained in the acoustic matching layer forming composition described later that originate from components that are not thermosetting resins, inorganic filler particles, or curing agents.

[0104] In the layer material of the present invention, the total content of each of the adhesive material and the inorganic filler particles is preferably 80% by mass or more, more preferably 90% by mass or more, and can be 100% by mass.

[0105] <Sound Matching Sheet (Sound Matching Layer)>

[0106] As needed, the layer material of the present invention can be cut and diced to obtain an acoustic matching sheet by means of a desired thickness or shape. Furthermore, the acoustic matching sheet can also be further processed into a desired shape using conventional methods.

[0107] For example, in a low-temperature region where no curing reaction occurs or in a low-temperature region with a sufficiently slow curing rate, the composition of the present invention, described later, is molded into a desired sheet shape. Then, by applying isostatic pressing and, if necessary, heating to form a cross-linked structure and curing, the molded article is cut and diced to the desired thickness or shape as needed, thereby producing an acoustic matching sheet or its precursor sheet. That is, the formed acoustic matching sheet is preferably a cured product of the composition of the present invention forming a three-dimensional network structure (i.e., a sheet composed of an acoustic matching layer material). This acoustic matching sheet is used as the acoustic matching layer of an acoustic wave probe. The structure of an acoustic wave probe containing an acoustic matching layer will be described later.

[0108] <Composition for forming acoustic matching layer>

[0109] The acoustic matching layer forming composition of the present invention (the composition used in the acoustic matching layer material of the present invention (the composition for forming the acoustic matching layer material of the present invention), also referred to as "acoustic matching sheet forming composition", or simply "the composition of the present invention") contains a thermosetting resin and inorganic filler particles.

[0110] Furthermore, the composition of the present invention may contain the curing agent described above, and may also appropriately contain at least one of the components that are not thermosetting resins, inorganic filler particles and curing agents, such as curing inhibitors, solvents, dispersants, pigments, dyes, antistatic agents, antioxidants, flame retardants and thermal conductivity improvers.

[0111] When the compositions of the present invention contain epoxy resin and epoxy resin curing agent as thermosetting resins, even under mild conditions, the curing reaction of the epoxy resin in the composition may sometimes occur over time. Therefore, the properties of the composition may sometimes change and become unstable over time. However, for example, by storing the above-mentioned compositions at a temperature below -10°C, it is possible to produce compositions in which the curing reaction does not occur or is sufficiently suppressed, thus maintaining the stability of each component.

[0112] Furthermore, when using epoxy resin as a thermosetting resin, it is preferable to use a resin composition containing epoxy resin and inorganic filler particles as the main agent, and to separate the main agent and the curing agent. When forming the sound matching layer, by mixing the main agent and the curing agent to prepare the composition of the present invention and using the composition to form a layer, a sound matching layer or a sheet-like sound matching layer material (sound matching sheet) can be formed.

[0113] In the composition of the present invention, the mass ratio of epoxy resin to curing agent can be appropriately adjusted according to the type of curing agent used, etc. For example, the ratio of epoxy resin to curing agent can be 99 / 1 to 20 / 80, preferably 90 / 10 to 40 / 60.

[0114] Furthermore, in the case where the main agent and curing agent are separated as described above, and the composition of the present invention is prepared by mixing the main agent and curing agent during the formation of the layer, it is preferable to mix the main agent and curing agent in such a way that the mass ratio of epoxy resin to curing agent is epoxy resin / curing agent = 99 / 1 to 20 / 80, and more preferably to mix the main agent and curing agent in such a way that the mass ratio of epoxy resin to curing agent is 90 / 10 to 40 / 60.

[0115] <Preparation of the composition for forming the acoustic matching layer>

[0116] The acoustic matching layer forming composition of the present invention can be obtained, for example, by mixing the components constituting the acoustic matching layer forming composition and making them homogeneous. The mixing method is not particularly limited as long as it can substantially homogeneously mix the components. For example, the desired homogeneous mixing can be achieved by using a planetary mixer (rotational-revolutionary mixer).

[0117] Furthermore, by employing a main agent (composed of a resin composition containing thermosetting resin and inorganic filler particles) and a curing agent of the thermosetting resin in distinct forms, the main agent can be obtained by mixing the thermosetting resin and the inorganic filler particles. When manufacturing an acoustic matching layer material, the composition for the acoustic matching layer material of the present invention can be obtained by mixing this main agent and the curing agent. By molding and curing this composition, an acoustic matching layer material or its precursor can be prepared.

[0118] <Manufacturing Method of Sound Matching Layer Material>

[0119] The method for manufacturing the acoustic matching layer material of the present invention is a method for manufacturing an acoustic matching layer material containing thermosetting resin components and inorganic filler particles. In cross-sectional view, the cross-sectional area of ​​the inorganic filler particles in the above-mentioned acoustic matching layer material satisfies the following formula (1). The manufacturing method preferably includes a step of isostatically pressing an acoustic matching layer forming composition containing a thermosetting resin, inorganic filler particles, and a curing agent as needed.

[0120] Equation (1) 100×b / c≥25

[0121] b: Let a be the numerical average of the cross-sectional areas of the aforementioned inorganic filler particles, and let b be the total cross-sectional areas of the aforementioned inorganic filler particles that have a cross-sectional area more than 7 times that of a.

[0122] c: Let c be the total cross-sectional area of ​​the inorganic filler particles mentioned above.

[0123] Isostatic pressing can be performed under cold conditions (0–30°C) or hot conditions (40–100°C). For example, it can be performed by placing the acoustic matching layer material into a template and then performing isostatic pressing as follows.

[0124] It can perform isostatic pressing under vacuum conditions at 25–350 MPa for 5–30 minutes (cold isostatic pressing).

[0125] In addition, after cold isostatic pressing, the acoustic matching layer material can be cured (crosslinked) by heating at 60–100°C for 80–200 minutes as needed.

[0126] For example, it is possible to perform isostatic pressing under thermal conditions (hot isostatic pressing) in a vacuum at 25–350 MPa for 5–200 minutes.

[0127] Furthermore, the composition can be pre-pressed before hot isostatic pressing. For example, this pre-pressing can be performed under the conditions described above for cold isostatic pressing.

[0128] From the viewpoint of changes in the viscosity of the composition for acoustic matching layer materials and the acoustic characteristics of the acoustic matching layer materials, the particle size of the inorganic filler particles used in the manufacturing method of the acoustic matching layer material of the present invention is preferably 0.01 to 100 μm, more preferably 0.1 to 50 μm, even more preferably 0.2 to 30 μm, even more preferably 0.5 to 20 μm, and more preferably 1 to 10 μm. Here, the "particle size" of the inorganic filler particles refers to the average primary particle size. Furthermore, when the inorganic filler particles are surface-treated, the average primary particle size of the surface-treated inorganic filler particles is preferably within the above-mentioned range.

[0129] Here, the average primary particle size refers to the median particle size of the volumetric reference. The median particle size of this volumetric reference is determined as follows.

[0130] Inorganic filler particles were added to methanol to a concentration of 0.5% by mass, and ultrasonication was applied for 10 minutes to disperse the metal particles. The particle size distribution of the metal particles treated in this manner was measured using a laser diffraction scattering particle size distribution measuring device (manufactured by HORIBA, Ltd., trade name: LA950V2), and the median particle size on this volumetric basis was determined. Furthermore, the median particle size corresponds to the cumulative 50% when the particle size distribution is expressed as a cumulative distribution.

[0131] <Acoustic Probe>

[0132] The acoustic probe of the present invention has at least one layer of the acoustic matching sheet of the present invention as the acoustic matching layer.

[0133] An example of the structure of the acoustic probe of the present invention is shown below. Figure 1 middle. Figure 1 The acoustic probe shown is an ultrasonic probe used in ultrasonic diagnostic devices. Furthermore, an ultrasonic probe is specifically designed to use ultrasound waves as the sound wave in an acoustic probe. Therefore, the basic structure of an ultrasonic probe can be directly applied to an acoustic probe.

[0134] <Ultrasonic probe>

[0135] The ultrasonic probe 10 is a key component of the ultrasonic diagnostic device, capable of both generating and transmitting ultrasonic beams. In the structure of the ultrasonic probe 10, as follows... Figure 1As shown, an acoustic lens 1, an acoustic matching layer 2, a piezoelectric element layer 3, and a backing material 4 are sequentially arranged from the front end (the surface that contacts the living body being inspected). In addition, in recent years, for the purpose of receiving higher harmonics, a technique has been proposed in which the transmitting ultrasonic transducer (piezoelectric element) and the receiving ultrasonic transducer (piezoelectric element) are made of different materials and formed into a stacked structure.

[0136] (Piezoelectric element layer)

[0137] The piezoelectric element layer 3 is the part that generates ultrasonic waves. Electrodes are attached to both sides of the piezoelectric element. If a voltage is applied, the piezoelectric element will repeatedly contract and expand and vibrate, thereby generating ultrasonic waves.

[0138] As materials for piezoelectric elements, so-called ceramic inorganic piezoelectrics are widely used, which are sintered bodies such as quartz, LiNbO3, LiTaO3 and KNbO3 single crystals, ZnO and AlN thin films, and Pb(Zr, Ti)O3 systems that have undergone polarization treatment. Typically, piezoelectric ceramics such as lead zirconate titanate (PZT) with good conversion efficiency are used.

[0139] Furthermore, piezoelectric elements that detect received waves on the high-frequency side need to have a wider bandwidth sensitivity. Therefore, organic piezoelectric elements utilizing organic polymers such as polyvinylidene fluoride (PVDF) are used as suitable piezoelectric elements for high frequencies and wide bandwidths.

[0140] Furthermore, Japanese Patent Application Publication No. 2011-071842 and other publications describe cMUTs that utilize MEMS (Micro ElectroMechanical Systems) technology, which exhibit excellent short-pulse characteristics and wide bandwidth characteristics, excellent mass production capabilities, and can produce array structures with minimal characteristic variations.

[0141] In this invention, any piezoelectric element material can be preferably used.

[0142] (Backing material)

[0143] The backing material 4 is disposed on the back side of the piezoelectric element layer 3. By suppressing excessive vibrations, it shortens the pulse width of the ultrasound waves, which helps to improve the distance resolution in ultrasound diagnostic images.

[0144] (Sound matching layer)

[0145] The acoustic matching layer 2 is designed to reduce the acoustic impedance difference between the piezoelectric element layer 3 and the object under test and to effectively transmit and receive ultrasonic waves.

[0146] (acoustic lens)

[0147] The acoustic lens 1 is designed to focus ultrasound waves toward the slice direction using refraction, thereby improving resolution. Furthermore, it requires close contact with the living body being examined to match the acoustic impedance of the ultrasound waves with that of the living body (1.4–1.7 Mrayl in the human body), and to minimize the attenuation of the ultrasound waves from the acoustic lens 1 itself.

[0148] That is, the material used as the acoustic lens 1 is a material whose sound velocity is sufficiently lower than that of the human body, which reduces the attenuation of ultrasound waves and whose acoustic impedance is close to that of human skin, thereby improving the sensitivity of ultrasound transmission and reception.

[0149] The operation of the ultrasonic probe 10 with this structure will be explained. A voltage is applied to the electrodes disposed on both sides of the piezoelectric element to cause the piezoelectric element layer 3 to resonate, transmitting an ultrasonic signal from the acoustic lens to the object under test. Upon reception, the piezoelectric element layer 3 vibrates due to the reflected signal (echo signal) from the object under test; this vibration is electrically converted into a signal, and an image is obtained.

[0150] <Manufacturing Method of Acoustic Probe>

[0151] The acoustic probe of the present invention can be manufactured using conventional methods, except that it uses the acoustic matching layer material of the present invention. Specifically, the method for manufacturing the acoustic probe of the present invention includes the step of forming an acoustic matching layer on a piezoelectric element using an acoustic matching sheet made of the acoustic matching layer material of the present invention. The piezoelectric element can be disposed on a backing material using conventional methods.

[0152] Furthermore, acoustic lenses are formed on the acoustic matching layer using conventional methods with the material used to form acoustic lenses.

[0153] <Sound Wave Measurement Device>

[0154] The acoustic wave measuring device of the present invention includes the acoustic wave probe of the present invention. The acoustic wave measuring device has the function of displaying the signal strength of the signal received by the acoustic wave probe or visualizing the signal.

[0155] The acoustic wave measuring device of the present invention is preferably an ultrasonic diagnostic device using an ultrasonic probe.

[0156] Example

[0157] The present invention will be further described in detail based on an embodiment using ultrasound as the sound wave. The present invention is not limited to the embodiments except as specified herein.

[0158] In the following description, the amount of a component being incorporated refers to the amount of the component itself. That is, when the raw material contains a solvent, it is the amount after removing the solvent. Furthermore, in this invention, the sound wave is not limited to ultrasound; any audible frequency sound wave can be used as long as an appropriate frequency is selected based on the object being tested and the measurement conditions.

[0159] <1> Preparation of the composition for forming the acoustic matching layer

[0160] The compositions for forming acoustic matching layers described in Table 1 (hereinafter referred to as Table 1) were prepared as follows.

[0161] (1) Preparation of the composition for forming the acoustic matching layer used in Example 1

[0162] The acoustic matching layer forming composition used in Example 1 was prepared by adding 23.9 parts by weight of epoxy resin (bisphenol A diglycidyl ether (manufactured by Mitsubishi Chemical Corporation, "jER825" (trade name), epoxy equivalent 170)), 6.1 parts by weight of isophorone diamine, and 70 parts by weight of iron particles into a cylindrical container with an internal space of 40 mm in diameter to achieve a mixed thickness of 3 mm, and then mixing it by means of a rotation and revolution device (trade name: ARV-310, manufactured by THINKY CORPORATION).

[0163] (2) Preparation of the compositions for forming acoustic matching layers used in Examples 2-72 and Comparative Examples 1-17

[0164] Instead of the composition described in Table 1 below, the acoustic matching layer forming compositions used in Examples 2-72 and Comparative Examples 1-17 were prepared in the same manner as those used in Example 1. When using raw materials containing solvents for preparation, the solvent was evaporated after mixing, thereby obtaining the acoustic matching layer forming composition.

[0165] <2> Fabrication of Sound Matching Sheets (Sheet-shaped Sound Matching Layer Material)

[0166] (1) Fabrication of acoustic matching sheets using cold isostatic pressing

[0167] Regarding the embodiments and comparative examples described as "cold working" in the "Pressure Method" row of Table 1 below, sound matching sheets were manufactured as follows.

[0168] The composition for forming the sound matching layer was placed in a square template (a 40mm square stainless steel (SUS) frame with openings at the top and bottom, 1mm thick), and then placed in an aluminum laminated bag. The bag was then sealed after the internal air was removed using a vacuum packaging machine. The sealed bag was placed in a cold isostatic pressing apparatus (CL10-55-40 (trade name), manufactured by Nikkiso Co., Ltd.) and pressurized at 300MPa for 30 minutes at 25°C. After pressing, the template containing the composition for forming the sound matching layer was removed from the laminated bag and heated and cured at 100°C for 180 minutes, thereby obtaining a sound matching sheet (40mm square, 1mm thick).

[0169] (2) Fabrication of acoustic matching sheets using hot isostatic pressing

[0170] Regarding the embodiments and comparative examples described as "heating" in the "Pressure Method" row of Table 1 below, sound matching sheets were manufactured as follows.

[0171] The composition for forming the sound matching layer was placed in a square template (SUS, 40 mm square, 1 mm thick), and then placed in an aluminum laminated bag. The bag was then sealed after the internal air was removed using a vacuum packaging machine. The sealed bag was placed in a hot isostatic pressing apparatus (500 mL full extract type (trade name), manufactured by Toyo Koatsu Inc.) and pressurized at 50 MPa at 25°C for 30 minutes. Under pressure, the composition was heated and cured at 60°C for 180 minutes to obtain a sound matching sheet (40 mm square, 1 mm thick).

[0172] (3) Fabrication of acoustic matching sheets using vacuum electrothermal pressing

[0173] Regarding the comparative example of "vacuum electrothermal" recorded in the "Pressure Method" row of Table 1 below, an acoustic matching sheet was fabricated as follows.

[0174] The acoustic matching layer forming composition was placed in a square template (made by SUS, 40 mm square, thickness: 1 mm), and Teflon (registered trademark, DuPont) sheets (thickness: 1 mm) were placed above and below it. The acoustic matching layer forming composition sandwiched between the Teflon sheets was placed in a vacuum electrothermal press 11FD (trade name, manufactured by Imoto machinery Co., LTD). Under vacuum and at 25°C, it was pressurized at 9 MPa for 240 minutes. Then, under pressure, the composition was heated and cured at 60°C for 180 minutes to obtain the acoustic matching sheet (40 mm square, thickness: 1 mm).

[0175] (4) Fabrication of acoustic matching sheets without pressurization process

[0176] Regarding the embodiments and comparative examples recorded as "-" in the "Pressure Method" row of Table 1 below, sound matching sheets were fabricated as follows.

[0177] The raw materials for the sound matching layer forming composition were added to a cylindrical container with an internal space of 40 mm in diameter to achieve a mixed thickness of 1 mm, and mixed using a rotation and revolution device (trade name: ARV-310, manufactured by THINKYCORPORATION). With the composition placed in the container, it was heated at 60°C for 24 hours, and then further heated at 150°C for 60 minutes, thereby obtaining a sound matching sheet (40 mm in diameter, 1 mm thick).

[0178] <3> Fabrication of reference sound matching sheet

[0179] Regarding the examples and comparative examples of sound matching sheets produced in (1) to (3) of “<2> Fabrication of Sound Matching Sheets” above, sound matching sheets were produced in the same manner as (4) of “<2> Fabrication of Sound Matching Sheets” above using the corresponding sound matching layer forming compositions, and were used as reference sound matching sheets in [Experimental Example 2] below.

[0180] [Cross-section extraction and cross-section analysis]

[0181] (1) Using a cross-section polishing machine (trade name SM-09010, manufactured by JEOL Ltd.) and by ion polishing, cross sections were extracted in the thickness direction from the acoustic matching sheet prepared above, and three analytical cross sections of the acoustic matching sheet were randomly formed. The cross sections were extracted by irradiating an argon ion beam with an accelerating voltage of 5 kV for 14 hours.

[0182] (2) After carbon evaporation was performed on each analytical section, an image (5120×3840 pixels) was obtained from the section using a scanning electron microscope (trade name SU8030, manufactured by Hitachi High-Technologies Corporation).

[0183] (3) For each image, the image analysis software ImageJ (version 1.47) (manufactured by the National Institutes of Health) was used to binarize the images and distinguish between the adhesive materials (thermosetting resin components and curing agent components) and inorganic filler particles. During the analysis of each image, the magnification and threshold of the scanning electron microscope (trade name: SU8030, manufactured by Hitachi High-Technologies Corporation) were set to ensure that the number of inorganic filler particles counted was between 1000 and 1200. Particles that were in contact with each other and thus connected were also counted as one particle. That is, the entire group of particles connected together was counted as one connected particle.

[0184] (4) The cross-sectional area (in μm) of the particles counted above. 2 The mean of the three analytical images (the sum of the cross-sectional areas of all particles in the three analytical images / the number of particles) is set as "a", and the sum of the cross-sectional areas of all particles in the three analytical images is set as c.

[0185] For each image, extract particles with a cross-sectional area at least 7 times that of a (these particles are usually connecting particles). Then, calculate the cross-sectional area (in μm) of all particles with a cross-sectional area at least 7 times that of a. 2 The total of ) is set as "b".

[0186] The proportion (%, 100×b / c) of the total cross-sectional area "b" of all particles with a cross-sectional area more than 7 times that of the above a in the total cross-sectional area "c" of all particles was calculated.

[0187] In addition, "a" in Examples 1 to 72 is 0.07 to 200 μm. 2 The "a" in Comparative Examples 1-17 ranges from 0.07 to 200 μm. 2 .

[0188] [Experimental Example 1] Measurement of the speed of sound

[0189] The ultrasonic velocity was measured at 25°C using a sing-around acoustic velocity measuring device (manufactured by ULTRASONIC ENGINEERING CO.,LTD., trade name "UVM-2") according to JIS Z2353 (2003). For the acoustic matching sheet material obtained above, which is either circular (40mm diameter, 1mm thickness) when viewed from above, or square (40mm diameter, 1mm thickness), three circular regions with a diameter of 1.5cm were randomly selected. The entire interior of these three circular regions (small probe size for a single channel) was used as the measurement object. The arithmetic mean of the sound velocity in the three circular regions was calculated. The percentage change in sound velocity obtained from the following formula was applied to the evaluation criteria below for evaluation. In this test, A to D were considered acceptable. The results are recorded in Table 1 below.

[0190] The percentage change in sound velocity (%) = 100 × (arithmetic mean of sound velocities of the sound matching sheet) / (arithmetic mean of sound velocities of the reference sound matching sheet)

[0191] -Evaluation Criteria-

[0192] A: More than 110%

[0193] B: 108% or higher but less than 110%

[0194] C: 105% or higher but less than 108%

[0195] D: 102% or higher but less than 105%

[0196] E: 101% or higher but less than 102%

[0197] F: 100% or more but less than 101%

[0198] In addition, for the sound matching sheets of Comparative Examples 1, 9, 10, 11, 13, 15 and 17, no pressure was applied during manufacturing, so the proportion of sound velocity change was not calculated.

[0199] [Experimental Example 2] Changes in acoustic impedance (AI)

[0200] A test piece of 9 mm × 9 mm was cut from each sound velocity measurement object (circle with a diameter of 1.5 cm) in the above Test Example 1. According to the density measurement method of Method A (water displacement method) described in JIS K7112 (1999), the density of the test piece at 25 °C was measured using an electronic specific gravity meter (manufactured by AlfaMirage Co., Ltd., trade name “SD-200L”). For the acoustic matching sheets of each example and comparative example, the acoustic impedance (density × sound velocity) of every three circular regions was calculated, and the standard deviation of the three acoustic impedances (Mrayl) was obtained. Then, it was applied to the following evaluation criteria to evaluate the change in acoustic characteristics. A and B passed this test. The results are shown in Table 1 below.

[0201] - Evaluation Criteria -

[0202] A: Less than 0.3 Mrayl

[0203] B: 0.3 Mrayl or more and less than 0.5 Mrayl

[0204] C: 0.5 Mrayl or more

[0205]

[0206]

[0207]

[0208]

[0209]

[0210] “Ex.”: Example

[0211] “Comp.”: Comparative Example

[0212] “Resin”: Thermosetting resin

[0213] “Particle”: Inorganic filler particle

[0214] [Thermosetting resin]

[0215] (A-1) Bisphenol A diglycidyl ether (“jER825” (trade name) manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 170)

[0216] (A-2) Bisphenol A diglycidyl ether (“jER828” (trade name) manufactured by Mitsubishi Chemical Corporation, epoxy equivalent 190)

[0217] (A-3) Bisphenol A diglycidyl ether (manufactured by Mitsubishi Chemical Corporation, "jER834" (trade name), epoxy equivalent 230)

[0218] (A-4) Bisphenol F diglycidyl ether (“EPICLON830” (trade name) manufactured by DIC Corporation, epoxy equivalent 170)

[0219] (A-5) Epoxy resin (TESK CO.,LTD. manufactured "C1001A" (trade name))

[0220] (A-6) Carbamate resin (Mitsui Chemicals, Inc., "Takenate A-242B" (trade name))

[0221] (A-7) Phenolic resin (“J-325 (60wt% methanol solution)” (trade name) manufactured by DIC Corporation)

[0222] [Curing agent]

[0223] (B-1)Isophorone Diamine

[0224] (B-2)triethylenetetramine

[0225] (B-3)2,4,6-Tris(dimethylaminomethyl)phenol (manufactured by Nacalai Tesque Inc., trade name "LUVEAKDMP-30")

[0226] (B-4) Polyamide-based amine (manufactured by DIC Corporation, trade name "LUCKAMIDE EA-330")

[0227] (B-5)diphenylmethanediamine

[0228] (B-6) m-phenylenediamine

[0229] (B-7) Polyetheramine T-403 (trade name, manufactured by BASF)

[0230] (B-8)2-Ethyl-4-methylimidazolium

[0231] (B-9) Hexahydrophthalic anhydride (manufactured by New Japan Chemical Co., Ltd., trade name "RIKACIDHH")

[0232] (B-10)C1001B (Product name, manufactured by TESK CO.,LTD.)

[0233] (B-11) Takenate A-242A (manufactured by Mitsui Chemicals, Inc.)

[0234] [Inorganic filler particles]

[0235] Fe: EW-I (particle size: 2μm, density (25℃): 7.9g / cm³) 3 (Product name, manufactured by BASF)

[0236] Co: Cobalt powder S-series (particle size: 4μm, density (25℃): 8.9g / cm³) 3 (Product name, manufactured by Freeport Cobalt)

[0237] Zr: RC-100 zirconia (particle size: 1~4μm, density (25℃): 6.0g / cm³) 3 ) (trade name, manufactured by DAIICHIKIGENSO KAGAKU KOGYO CO., LTD)

[0238] Mo: Molybdenum powder Mo-6 (particle size: 6μm, density (25℃): 10.3g / cm³) 3 (Product name, manufactured by JAPAN NEWMETALSCO.,LTD.)

[0239] WC: Uniform tungsten carbide powder (particle size: 9μm, density (25℃): 15.8g / cm³) 3 (Manufactured by ALMTCorp.)

[0240] W: Uniform tungsten powder (particle size: 5μm, density (25℃): 19.3g / cm³) 3 (Manufactured by ALMTCorp.)

[0241] Ti: Large-particle titanium dioxide (particle size: 1 μm, density (25℃): 4.2 g / cm³) 3 (Manufactured by FUJI TITANIUM INDUSTRY CO.,LTD.)

[0242] The results in Table 1 show the following.

[0243] The acoustic matching sheets of Comparative Examples 2-6, 12, 14, and 16 were manufactured using an isostatic pressing process, but did not meet the particle cross-sectional area requirements of the present invention. The increase in sound velocity of these acoustic matching sheets was relatively poor. Furthermore, the acoustic matching sheets of Comparative Examples 7 and 8, manufactured using a vacuum electrothermal pressing process, did not meet the particle cross-sectional area requirements of the present invention, and the increase in sound velocity was also relatively poor.

[0244] In contrast, it can be seen that the sound velocity of the sound matching sheet of the present invention (Examples 1 to 72) increases significantly, while the change in acoustic properties is small.

[0245] The invention has been described together with its embodiments, but we believe that, unless otherwise specified, any details described are not intended to limit our invention, but should be interpreted broadly without departing from the spirit and scope of the invention as set forth in the appended claims.

[0246] This application claims priority based on Japanese Patent Application No. 2020-166114, filed on September 30, 2020, the contents of which are incorporated herein by reference as part of the description.

[0247] Symbol Explanation

[0248] 1-Acoustic lens, 2-Acoustic matching layer, 3-Piezoelectric element layer, 4-Backing material, 7-Housing, 9-Plug rope, 10-Ultrasonic probe (probe).

Claims

1. An acoustic matching layer material comprising a thermosetting resin component and inorganic filler particles, wherein, in cross-sectional observation of the acoustic matching layer material, the cross-sectional area of ​​the inorganic filler particles satisfies the following formula (1). Equation (1) 100×b / c≥25 b: Let a be the number-average value of the cross-sectional area of ​​the inorganic filler particles, and let b be the total cross-sectional area of ​​particles with a cross-sectional area that is 7 times or more than a among the inorganic filler particles. c: Let c be the total cross-sectional area of ​​the inorganic filler particles. The particle with a cross-sectional area more than 7 times that of a is a connecting particle.

2. The acoustic matching layer material according to claim 1, wherein, The inorganic filler particles have a density of 7.5–21.5 g / cm³ at 25°C. 3 .

3. The acoustic matching layer material according to claim 1 or 2, wherein, The inorganic filler particles contain metal particles.

4. The acoustic matching layer material according to claim 3, wherein, The metal atoms constituting the metal particles contain at least one metal atom from groups 4 to 12 of the periodic table.

5. The acoustic matching layer material according to claim 1 or 2, wherein, In the acoustic matching layer material, the content of the inorganic filler particles is 60-96% by mass.

6. The acoustic matching layer material according to claim 1 or 2, wherein, The thermosetting resin component contains an epoxy resin component.

7. A sound matching sheet comprising the sound matching layer material according to any one of claims 1 to 6.

8. The use of a composition for forming a sound matching sheet containing a thermosetting resin, a curing agent and an inorganic filler in the formation of the sound matching sheet according to claim 7.

9. An acoustic probe having the acoustic matching sheet of claim 7 as an acoustic matching layer.

10. An acoustic wave measuring device comprising the acoustic wave probe of claim 9.

11. The acoustic wave measuring device according to claim 10, wherein, The sound wave measuring device is an ultrasonic diagnostic device.

12. A method for manufacturing an acoustic matching layer material, wherein the acoustic matching layer material contains a thermosetting resin component and inorganic filler particles, and in the method for manufacturing the acoustic matching layer material, The manufacturing method includes: The step of isostatic pressing a composition containing thermosetting resin, curing agent and inorganic filler for forming an acoustic matching layer. In cross-sectional observation, the cross-sectional area of ​​the inorganic filler particles in the acoustic matching layer material satisfies the following equation (1). Equation (1) 100×b / c≥25 b: Let a be the number-average value of the cross-sectional area of ​​the inorganic filler particles, and let b be the total cross-sectional area of ​​particles with a cross-sectional area that is 7 times or more than a among the inorganic filler particles. c: Let c be the total cross-sectional area of ​​the inorganic filler particles. The particle with a cross-sectional area more than 7 times that of a is a connecting particle.

13. A method for manufacturing an acoustic wave probe, comprising: The step of forming an acoustic matching layer using the acoustic matching layer material according to any one of claims 1 to 6.

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