Force Sensor

Abstract

The strain body of the force sensor (1) of the present invention comprises: a tilting structure disposed between a force-bearing body and a supporting body; a force-bearing body side deformation body connecting the force-bearing body and the tilting structure; and a supporting body side deformation body connecting the tilting structure and the supporting body. The tilting structure comprises a first tilting body extending in a second direction orthogonal to the first direction and capable of elastic deformation under the action of a force in the first direction.

Description

[0001] This application is a divisional application of an invention patent application with a priority date of February 25, 2020, an application date of September 4, 2020, an application number of 2020109240256, and an invention name of “Force Sensor”, and all its contents are incorporated herein for reference. Technical Field

[0002] The present invention relates to a force sensor. Background Art

[0003] At present, there is a known force sensor that outputs the force acting on a predetermined axial direction and the moment (or torque) acting around a predetermined rotation axis as an electrical signal (for example, see Japanese Patent Gazette No. 6257017). This force sensor is widely used in force control of various robots such as collaborative robots, life-assisting robots, medical robots, and service robots, etc., represented by industrial robots. Therefore, it is required to improve safety and performance.

[0004] For example, in a general force sensor, when a force or torque is input, the strain body constituting the force sensor undergoes elastic deformation and generates strain, thereby causing displacement. By detecting the magnitude of the displacement in the form of an electrical signal, the magnitude of the input force or torque can be obtained. As detection methods, there are various methods such as electrostatic capacitance method and strain gauge method.

[0005] During the period when the strain body undergoes elastic deformation, stress is applied to the corresponding deformation. When the elastic deformation of the strain body caused by the applied stress is small, the displacement becomes small. In this case, the detection sensitivity of force or moment may decrease. If the detection sensitivity decreases, the detection accuracy may decrease. Summary of the invention

[0006] The present invention has been made in consideration of this point, and an object of the present invention is to provide a force sensor capable of improving detection accuracy.

[0007] The force sensor provided by the present invention has:

[0008] The force-bearing body is acted upon by the force or moment of the detection object;

[0009] A supporting body, arranged on one side of the force-bearing body in a first direction, supporting the force-bearing body;

[0010] A strain body, connecting the force-bearing body and the supporting body, and elastically deforming under the action of the force or moment applied to the force-bearing body;

[0011] a detection element that detects displacement caused by elastic deformation generated in the strain body; and

[0012] a detection circuit, which outputs an electrical signal representing the force or torque acting on the strain body according to the detection result of the detection element,

[0013] The strain body has:

[0014] A tilting structure is arranged between the force-bearing body and the supporting body;

[0015] A force-bearing body side deformation body, connecting the force-bearing body and the tilting structure, and capable of elastic deformation under the action of the force or moment applied to the force-bearing body; and

[0016] The support body side deformation body connects the tilting structure and the support body and can be elastically deformed under the action of the force or moment exerted on the force-bearing body.

[0017] The tilting structure includes a first tilting body, which is arranged in a plane including the first direction and a second direction orthogonal to the first direction, extends in a direction different from the first direction, and can be elastically deformed under the action of a force in the first direction.

[0018] Furthermore, in the above-mentioned force sensor, the force-receiving-body-side deformation body may extend along the first direction.

[0019] Furthermore, in the above force sensor, the support body side deformation body may be formed to extend along the first direction.

[0020] Furthermore, in the above-mentioned force sensor, the first tilting body may be formed to extend along the second direction.

[0021] In addition, in the above-mentioned force sensor, the first tilting body may also include: a first force-bearing body side opposing surface connected to the force-bearing body side deformation body and opposite to the force-bearing body, and a second force-bearing body side opposing surface arranged on both sides of the first force-bearing body side opposing surface in the second direction and opposite to the force-bearing body;

[0022] The first force-bearing body side opposing surface is located closer to the supporting body than the second force-bearing body side opposing surface.

[0023] In the force sensor described above, a center portion of the first tilting body in the second direction may be located closer to the support body than both end portions in the second direction.

[0024] In the above force sensor, a center portion of the first tilting body in the second direction may be located closer to the force receiving body than both end portions in the second direction.

[0025] In addition, in the above-mentioned force sensor, it can also be formed as follows: the tilting structure also includes a second tilting body and a pair of connecting bodies, the second tilting body is arranged between the first tilting body and the supporting body, and is arranged in a plane including the first direction and the second direction, and extends along a direction different from the first direction, and can be elastically deformed under the action of the force in the first direction; the pair of connecting bodies connects one of the two ends of the first tilting body in the second direction with the corresponding end of the two ends of the second tilting body in the second direction;

[0026] The force-bearing body side deformation body is connected to the first tilting body;

[0027] The support body side deformation body is connected to the second tilting body.

[0028] Furthermore, in the above-mentioned force sensor, the force-receiving-body-side deformation body may be located between both end portions of the first tilting body in the second direction.

[0029] Furthermore, in the above-mentioned force sensor, the support body side deformation body may be located between both end portions of the second tilting body in the second direction.

[0030] Furthermore, in the above-mentioned force sensor, the force receiving body side deformation body and the supporting body side deformation body may be arranged at positions overlapping each other when viewed from the first direction.

[0031] In the above force sensor, the tilting structure may be formed symmetrically with respect to the force receiving body side deformation body and the supporting body side deformation body in the second direction.

[0032] In the force sensor described above, a spring constant of the second tilting body with respect to the force acting in the first direction may be different from a spring constant of the first tilting body with respect to the force acting in the first direction.

[0033] Furthermore, in the above-mentioned force sensor, the second tilting body may be formed to extend along the second direction.

[0034] In addition, in the above-mentioned force sensor, the second tilting body may include: a first support body side opposing surface connected to the support body side deformable body and opposed to the support body, and a second support body side opposing surface arranged on both sides of the first support body side opposing surface in the second direction and opposed to the support body;

[0035] The first supporting body side opposing surface is located closer to the force receiving body than the second supporting body side opposing surface.

[0036] In the above force sensor, a center portion of the second tilting body in the second direction may be located closer to the force receiving body than both end portions in the second direction.

[0037] In the above force sensor, a center portion of the second tilting body in the second direction may be located closer to the support body than both end portions in the second direction.

[0038] In addition, in the above force sensor, the force-bearing body and the first tilting body may be connected via two force-bearing body side deformation bodies;

[0039] The support body side deformation body connects the first tilting body and the support body.

[0040] In the above-mentioned force sensor, the two force-receiving-body-side deformation bodies may be located at two end portions of the first tilting body in the second direction.

[0041] Furthermore, in the above force sensor, the supporting body side deformation body may be located between the two force receiving body side deformation bodies in the second direction.

[0042] Furthermore, in the force sensor described above, the strain body may be formed symmetrically with respect to the support body side deformation body in the second direction.

[0043] Furthermore, in the above-mentioned force sensor, the first tilting body may be formed to extend along the second direction.

[0044] In addition, in the above-mentioned force sensor, the first tilting body may include: a first support body side opposing surface connected to the support body side deformable body and opposite to the support body, and a second support body side opposing surface arranged on both sides of the first support body side opposing surface in the second direction and opposite to the support body;

[0045] The first supporting body side opposing surface is located closer to the force receiving body than the second supporting body side opposing surface.

[0046] In the above force sensor, a center portion of the first tilting body in the second direction may be located closer to the force receiving body than both end portions in the second direction.

[0047] In addition, in the above force sensor, the force-bearing body side deformation body may be connected to the force-bearing body via a force-bearing body side pedestal;

[0048] The support body side deformation body is connected to the support body via a support body side pedestal.

[0049] In addition, in the above force sensor, the detection element may include: a fixed electrode substrate disposed on the force receiving body or the support body, and a displacement electrode substrate disposed on the tilting structure and facing the fixed electrode substrate;

[0050] The displacement electrode substrates are disposed at two end portions of the tilting structure in the second direction.

[0051] Furthermore, in the force sensor described above, the displacement electrode substrate may be provided on the tilting structure via a columnar member.

[0052] Furthermore, in the above force sensor, the displacement electrode substrate may be provided on the columnar member via a reinforcing substrate.

[0053] In the above force sensor, the detection element may include a strain gauge provided in the strain body.

[0054] In addition, in the above force sensor, the force receiving body and the supporting body may be connected via four strain bodies;

[0055] The four strain bodies include a first strain body, a second strain body, a third strain body and a fourth strain body;

[0056] The first direction is set as the Z-axis direction in the XYZ three-dimensional coordinate system;

[0057] The first strain body is arranged on the negative side of the Y-axis direction relative to the center of the force-bearing body, the second strain body is arranged on the positive side of the X-axis direction relative to the center of the force-bearing body, the third strain body is arranged on the positive side of the Y-axis direction relative to the center of the force-bearing body, and the fourth strain body is arranged on the negative side of the X-axis direction relative to the center of the force-bearing body;

[0058] The second direction of the first strain body and the third strain body is set as the X-axis direction;

[0059] The second direction of the second strain body and the fourth strain body is set as a Y-axis direction.

[0060] In the force sensor described above, at least one of a planar shape of the force receiving body and a planar shape of the supporting body may be circular.

[0061] In the force sensor described above, at least one of a planar shape of the force receiving body and a planar shape of the supporting body may be a rectangle.

[0062] Furthermore, in the force sensor described above, the tilting structure of the strain body may be formed in a linear shape along the second direction when viewed from the first direction.

[0063] Furthermore, in the force sensor described above, the tilting structure of the strain body may be formed in a curved shape when viewed from the first direction.

[0064] Furthermore, the force sensor may further include an exterior body that covers the strain body from the outside when viewed from the first direction.

[0065] In the above force sensor, the outer casing may be fixed to the support body and separated from the force receiving body.

[0066] Furthermore, in the above-mentioned force sensor, a buffer member may be provided between the exterior body and the force receiving body.

[0067] According to the present invention, the detection accuracy can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0068] Figure 1 This is a perspective view showing an example of a robot to which the force sensor according to the first embodiment is applied.

[0069] Figure 2 is a cross-sectional view showing the force sensor in the first embodiment, and corresponds to Figure 3 AA line section diagram.

[0070] Figure 3 Yes means Figure 2 Top view of the force sensor.

[0071] Figure 4 Yes means Figure 2 The front view of the strain body.

[0072] Figure 5 Yes Figure 3 The figure shows the plane development of the strain body of the force sensor shown.

[0073] Figure 6 It is schematically indicated Figure 4 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side of the X-axis direction.

[0074] Fig. 7A It is schematically indicated Figure 4 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction.

[0075] Figure 7B It is schematically indicated Figure 4The front view of the deformation state of the strain body when the strain body is subjected to a force on the negative side of the Z-axis direction.

[0076] Figure 8 Yes means Figure 4 Table showing the change in electrostatic capacitance value of each capacitor element in the strain body.

[0077] Fig. 9 Yes means Figure 5 Table showing changes in the electrostatic capacitance value of each capacitive element in the force sensor.

[0078] Fig.10 Is based on Fig. 9 A table showing the changes in electrostatic capacitance values ​​for spindle sensitivity and other axis sensitivity.

[0079] Fig.11 Yes means Figure 4 Front view of a deformation example of the strain body.

[0080] Fig.12 Yes means Figure 4 A top view of another modified example of the strain body.

[0081] Fig.13 Yes means Figure 4 A top view of another modified example of the strain body.

[0082] Fig.14 Yes means Figure 4 A partially enlarged front view of another modified example of the strain body.

[0083] Fig.15 Yes means Figure 4 A partially enlarged front view of another modified example of the strain body.

[0084] Fig.16 Yes means Figure 4 A front view of another modified example of the strain body.

[0085] Fig.17 Yes means Figure 4 A front view of another modified example of the strain body.

[0086] Fig.18 Yes means Figure 4 A front view of another modified example of the strain body.

[0087] Fig.19 Yes means Figure 3 A top view of another variation of the force sensor.

[0088] Fig. 20 Yes means Figure 3 A top view of another variation of the force sensor.

[0089] Fig.21A Yes means Figure 4 A front view of a strain body of a modified example of a detection element.

[0090] Fig.21B Yes means Fig.21A A top view of the detection element.

[0091] Fig. 21C Yes means Fig.21B A top view of a modified example of .

[0092] Fig.22A It means setting Fig.21A FIG. 1 is a diagram of a Wheatstone bridge circuit for a detection element of a first tilting body.

[0093] Fig. 22B It means setting Fig.21A FIG. 4 is a diagram of a Wheatstone bridge circuit for a detection element of a second tilting body.

[0094] Fig.23A Yes means Fig.21A A schematic diagram showing the deformation state of the strain body when the strain body is subjected to a force on the positive side in the X-axis direction.

[0095] Fig. 23B Yes means Fig.21A A schematic diagram showing the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction.

[0096] Fig.24 It is a front view showing a strain body of the force sensor according to the second embodiment.

[0097] Fig.25 It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side of the X-axis direction.

[0098] Fig.26A It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction.

[0099] Fig.26B It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the negative side of the Z-axis direction.

[0100] Fig. 27 Yes means Fig.24 Top view of a deformation example of a strain body.

[0101] Fig.28 Yes means Fig.24 A top view of another modified example of the strain body.

[0102] Fig.29 Yes means Fig.24 A top view of another modified example of the strain body.

[0103] Fig.30 Yes means Fig.24 A top view of another modified example of the strain body.

[0104] Fig.31 Yes means Fig.24 A top view of another modified example of the strain body. DETAILED DESCRIPTION

[0105] Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In addition, in the drawings attached to this specification, for the sake of convenience of illustration and understanding, the scale and the aspect ratio are appropriately changed and exaggerated compared to the actual objects.

[0106] In addition, terms such as "parallel", "orthogonal", "equal", dimensions, values ​​of physical properties, etc. used in this specification to determine shapes, geometric conditions and physical properties and their degrees are not bound by strict meanings and should be interpreted as including a range of degrees that are expected to achieve the same function.

[0107] (First Embodiment)

[0108] First, use Figures 1 to 23B , a force sensor according to a first embodiment of the present invention is described.

[0109] Before describing the force sensor according to the present embodiment, Figure 1 An example of application of this force sensor in a robot is described. Figure 1 This is a diagram showing an example of a robot to which the force sensor according to the present embodiment is applied.

[0110] like Figure 1 As shown, the industrial robot 1000 includes a robot body 1100, an end effector 1200, a cable 1300, a control unit 1400, and a force sensor 1. The robot body 1100 includes an arm of the robot. The force sensor 1 is provided between the robot body 1100 and the end effector 1200.

[0111] The cable 1300 is extended inside the robot body 1100. The cable 1300 is connected to a connector (not shown) of the force sensor 1.

[0112] In addition, Figure 1In the embodiment, the control unit 1400 is arranged inside the robot body 1100, but it can also be arranged in other places (such as a control panel outside the robot). In addition, the installation method of the force sensor 1 in the robot is not limited to Figure 1 The method shown.

[0113] The force sensor 1 detects force or torque acting on the end effector 1200 functioning as a gripper. An electrical signal representing the detected force or torque is sent to the control unit 1400 of the industrial robot 1000 via the cable 1300. The control unit 1400 controls the actions of the robot body 1100 and the end effector 1200 based on the received electrical signal.

[0114] Furthermore, the force sensor 1 is not limited to industrial robots, but can be applied to various robots such as cooperative robots, life-assisting robots, medical robots, and service robots.

[0115] Below, refer to Figures 2 to 5 A force sensor according to an embodiment of the present invention will be described. Figure 2 is a cross-sectional view showing the force sensor in the first embodiment, and is equivalent to Figure 3 AA line section diagram. Figure 3 Yes means Figure 2 Top view of the force sensor. Figure 4 Yes means Figure 2 The front view of the strain body. Figure 5 Yes Figure 3 The figure shows the plane development of the strain body of the force sensor shown.

[0116] In the following description, an XYZ three-dimensional coordinate system is defined, the Z-axis direction (equivalent to the first direction) is set as the up-down direction, and the state of the force sensor 1 is described in such a manner that the force-bearing body 10 is arranged on the upper side and the supporting body 20 is arranged on the lower side. Therefore, the force sensor 1 in this embodiment is not limited to being used in a posture with the Z-axis direction as the up-down direction. In addition, it is arbitrary whether one of the force-bearing body 10 and the supporting body 20 is arranged on the upper side or the lower side.

[0117] The force sensor 1 has the function of outputting the force acting along a predetermined axial direction and the moment (or torque) acting around a predetermined rotation axis as an electrical signal. However, this is not limited to this, and it can also be configured to output only one of the force and the moment as an electrical signal, and further, it can also be configured to output at least one axial component of the force or the moment as an electrical signal.

[0118] like Figure 2 and Figure 3As shown, the force sensor 1 includes a force receiving body 10, a supporting body 20, strain bodies 30A to 30D, a detection element 50, a detection circuit 60, and an exterior body 80. Hereinafter, each component will be described in more detail.

[0119] The force-bearing body 10 is subjected to the force or moment of the detection object. By being subjected to the force or moment, the force-bearing body 10 moves relative to the supporting body 20. Figure 1 For example, the force receiving body 10 is fixed to the end effector 1200 by bolts or the like, and receives force or moment from the end effector 1200. The force receiving body 10 is connected to strain bodies 30A to 30D.

[0120] like Figure 3 As shown, in this embodiment, the plane shape of the force-bearing body 10 is circular. In addition, the force-bearing body 10 can also be formed in a flat plate shape.

[0121] like Figure 2 As shown, the support body 20 supports the force-bearing body 10. The support body 20 is arranged on the negative side of the force-bearing body 10 in the Z-axis direction. The force-bearing body 10 and the support body 20 are arranged at different positions in the Z-axis direction, and the support body 20 is separated from the force-bearing body 10. Figure 1 For example, the support body 20 is fixed to the front end of the robot body 1100 (or the arm) by bolts or the like, and is supported by the robot body 1100. The support body 20 is connected to the strain bodies 30A to 30D.

[0122] like Figure 3 As shown, in the present embodiment, the planar shape of the support body 20 is circular like the force-bearing body 10. In addition, the support body 20 may also be formed into a flat plate. In addition, at least one of the planar shape of the force-bearing body 10 and the planar shape of the support body 20 may be circular. In this case, one of the planar shape of the force-bearing body 10 and the planar shape of the support body 20 may be circular, while the other may be a shape other than a circle.

[0123] like Figure 2 and Figure 3 As shown, the strain bodies 30A to 30D connect the load-bearing body 10 and the support body 20. More specifically, the strain bodies 30A to 30D are disposed between the load-bearing body 10 and the support body 20, and the strain bodies 30A to 30D are connected to the load-bearing body 10 and to the support body 20. The load-bearing body 10 is supported on the support body 20 via these strain bodies 30A to 30D.

[0124] In this embodiment, the force-bearing body 10 and the supporting body 20 are connected by four strain bodies 30A to 30D. The four strain bodies 30A to 30D include a first strain body 30A, a second strain body 30B, a third strain body 30C, and a fourth strain body 30D. Figure 3As shown, when observed from the Z-axis direction, the first strain body 30A is arranged on the negative side in the Y-axis direction relative to the center 0 of the force-bearing body 10. Similarly, when observed from the Z-axis direction, the second strain body 30B is arranged on the positive side in the X-axis direction relative to the center 0 of the force-bearing body 10, and the third strain body 30C is arranged on the positive side in the Y-axis direction relative to the center 0 of the force-bearing body 10. The fourth strain body 30D is arranged on the negative side in the X-axis direction relative to the center 0 of the force-bearing body 10. In other words, the center 0 of the force-bearing body 10 is arranged between the first strain body 30A and the third strain body 30C, and the center 0 of the force-bearing body 10 is arranged between the second strain body 30B and the fourth strain body 30D. In addition, the number of strain bodies connecting the force-bearing body 10 and the supporting body 20 is not limited to four, but is an arbitrary number, which can be two or three, or more than five. In addition, the force-bearing body 10 and the supporting body 20 can also be connected by only one strain body. In this case, when as Figure 4 When the detection element 50 is composed of two capacitive elements as shown, it is possible to detect the biaxial component of the force. The detection element 50 may also be composed of only one capacitive element to detect the uniaxial component of the force.

[0125] like Figure 3 As shown, the tilting structures 31 (described later) of the four strain bodies 30A to 30D in this embodiment are arranged in a ring shape. That is, as described above, the force-bearing body 10 and the support body 20 are formed into a circular shape when viewed from the Z-axis direction, and the tilting structures 31 of the four strain bodies 30A to 30D are arranged in a rectangular ring shape. The tilting structures 31 of each strain body 30A to 30D are formed in a straight line along the second direction when viewed from the Z-axis direction. That is, the second direction of the first strain body 30A and the second direction of the third strain body 30C are equivalent to the X-axis direction. The tilting structure 31 of the first strain body 30A and the tilting structure 31 of the third strain body 30C are formed in a straight line along the X-axis direction. The second direction of the second strain body 30B and the second direction of the fourth strain body 30D are equivalent to the Y-axis direction. The tilting structure 31 of the second strain body 30B and the tilting structure 31 of the fourth strain body 30D are formed in a straight line along the Y-axis direction. In addition, the arrangement of the four strain bodies 30A to 30D is not limited to the annular arrangement, and each may be arranged irregularly at any position.

[0126] Next, the strain bodies 30A to 30D involved in the present embodiment are described in more detail. The strain bodies 30A to 30I) involved in the present embodiment are constructed so that elastic deformation occurs under the action of the force or moment exerted on the force-bearing body 10 to generate strain, thereby causing displacement. Here, the first strain body 30A with the X-axis direction as the second direction among the above-mentioned four strain bodies 30A to 30D is used as an example for description. As for the second strain body 30B, the third strain body 30C and the fourth strain body 30I), since they have the same structure, the detailed description is omitted here.

[0127] like Figure 2 and Figure 4 As shown, the first strain body 30A has: a tilting structure 31 arranged between the force-bearing body 10 and the supporting body 20; a force-bearing body side deformation body 33 connecting the force-bearing body 10 and the tilting structure 31; and a supporting body side deformation body 34 connecting the tilting structure 31 and the supporting body 20.

[0128] The tilting structure 31 includes a first tilting body 35 that is arranged on a plane (equivalent to the XZ plane) that includes the Z-axis direction and the X-axis direction (equivalent to the second direction of the first strain body 30A) that is orthogonal to the Z-axis direction and extends in a direction different from the Z-axis direction. The first tilting body 35 of this embodiment extends along the X-axis direction (equivalent to the second direction of the first strain body 30A). The first tilting body 35 is arranged between the force-bearing body 10 and the supporting body 20, and is separated from the force-bearing body 10 and the supporting body 20. In this embodiment, the first tilting body 35 extends along the X-axis direction. More specifically, as Figure 4 As shown, the first tilting body 35 extends linearly from one end 35a to the other end 35b in the X-axis direction, and the central portion 35c of the first tilting body 35 in the X-axis direction and the two end portions 35a and 35b are located at the same position in the Z-axis direction. Moreover, the surface of the first tilting body 35 on the side of the force-bearing body 10 is formed flat as a whole.

[0129] In this embodiment, if Figure 2 and Figure 4 As shown, the tilting structure 31 further includes a second tilting body 36 disposed between the first tilting body 35 and the support body 20 , and a pair of connecting bodies 37 , 38 connecting the first tilting body 35 and the second tilting body 36 .

[0130] The tilting structure 31 includes a second tilting body 36 that is arranged on a plane (equivalent to the XZ plane) that includes the Z-axis direction and the X-axis direction (equivalent to the second direction of the first strain body 30A) that is orthogonal to the Z-axis direction and extends in a direction different from the Z-axis direction. The second tilting body 36 of this embodiment extends along the X-axis direction. The second tilting body 36 is separated from the first tilting body 35 in the Z-axis direction and is separated from the support body 20. In this embodiment, the second tilting body 36 extends along the X-axis direction. More specifically, as Figure 4 As shown, the second tilting body 36 extends linearly from one end 35a to the other end 36b in the X-axis direction, and the central portion 36c of the second tilting body 36 in the X-axis direction and the two end portions 35a and 35b are located at the same position in the Z-axis direction. Moreover, the surface of the second tilting body 36 on the side of the force-bearing body 10 is formed flat as a whole.

[0131] A pair of connecting bodies 37 and 38 connect one end of two ends 35a and 35b of the first tilting body 35 in the X-axis direction with a corresponding end of two ends 36a and 36b of the second tilting body 36 in the X-axis direction. Figure 4 As shown, the connecting body 37 disposed on the negative side in the X-axis direction connects the end 35a on the negative side in the X-axis direction of the first tilting body 35 and the end 36a on the negative side in the X-axis direction of the second tilting body 36. The connecting body 38 disposed on the positive side in the X-axis direction connects the end 35b on the positive side in the X-axis direction of the first tilting body 35 and the end 36b on the positive side in the X-axis direction of the second tilting body 36. Each of the connecting bodies 37 and 38 extends in the Z-axis direction.

[0132] In this way, Figure 4 As shown, the tilting structure 31 of the present embodiment is formed in a rectangular frame shape when viewed from the Y-axis direction (corresponding to a direction orthogonal to the Z-axis direction and the X-axis direction).

[0133] The first tilting body 35 can be elastically deformed under the action of the force in the Z-axis direction. The second tilting body 36 can be elastically deformed under the action of the force in the Z-axis direction. The spring constant of the first tilting body 35 with respect to the force in the Z-axis direction may be equal to the spring constant of the second tilting body 36 with respect to the force in the Z-axis direction. The spring constant can be adjusted mainly according to the size of the component in the Z-axis direction or the type of material used. For example, as described below, Fig.11 The spring constant is adjusted as in the first modified example shown.

[0134] The force-bearing body side deformation body 33 extends along the Z-axis direction and is connected to the first tilting body 35 of the tilting structure 31. More specifically, the upper end of the force-bearing body side deformation body 33 is connected to the force-bearing body 10, and the lower end is connected to the first tilting body 35. Thus, the force-bearing body 10 and the first tilting body 35 are connected by a force-bearing body side deformation body 33. In the present embodiment, the force-bearing body side deformation body 33 is located between the two end portions 35a, 35b of the first tilting body 35 in the X-axis direction. That is, the force-bearing body side deformation body 33 is located between a pair of connecting bodies 37, 38. More specifically, the force-bearing body side deformation body 33 is located at the center of the first tilting body 35 in the X-axis direction and is connected to the central portion 35c of the first tilting body 35.

[0135] The support body side deformable body 34 extends in the Z-axis direction and is connected to the second tilting body 36 of the tilting structure 31. More specifically, the lower end of the support body side deformable body 34 is connected to the support body 20, and the upper end is connected to the second tilting body 36. Thus, the support body 20 and the first tilting body 36 are connected by one support body side deformable body 34. In the present embodiment, the support body side deformable body 34 is located between the two end portions 36a, 36b of the second tilting body 36 in the X-axis direction. That is, the support body side deformable body 34 is located between a pair of connecting bodies 37, 38. More specifically, the support body side deformable body 34 is located at the center of the second tilting body 36 in the X-axis direction and is connected to the central portion 36c of the second tilting body 36.

[0136] The force-bearing body side deformation body 33 and the supporting body side deformation body 34 are arranged at positions overlapping each other when viewed from the Z-axis direction. That is, the force-bearing body side deformation body 33 and the supporting body side deformation body 34 are arranged at the same position in the X-axis direction. In the present embodiment, the force-bearing body side deformation body 33 and the supporting body side deformation body 34 are arranged at the center of the tilting structure 31 in the X-axis direction. In this way, the tilting structure 31 is formed symmetrically with respect to the force-bearing body side deformation body 33 and the supporting body side deformation body 34 in the X-axis direction.

[0137] The force-bearing body side deformation body 33 can be elastically deformed under the force or moment applied to the force-bearing body 10. The force-bearing body side deformation body 33 can also be elastically deformed mainly with respect to the force applied in the X-axis direction. The spring constant of the force-bearing body side deformation body 33 with respect to the force applied in the X-axis direction can also be smaller than the spring constant of the connecting bodies 37 and 38 with respect to the force applied in the X-axis direction.

[0138] The support body side deformable body 34 can be elastically deformed under the action of the force or moment exerted on the force-bearing body 10. The support body side deformable body 34 can also be mainly elastically deformed relative to the force acting in the X-axis direction. The spring constant of the support body side deformable body 34 relative to the force in the X-axis direction can also be smaller than the spring constant of the connecting bodies 37 and 38 relative to the force in the X-axis direction. The spring constant of the support body side deformable body 34 relative to the force in the X-axis direction can also be equal to the spring constant of the force-bearing body side deformable body 33 relative to the force in the X-axis direction.

[0139] The first strain body 30A thus constructed can be formed by machining from a plate made of a metal material such as an aluminum alloy or an iron alloy, or can also be formed by casting. In the case of being formed by machining, the tilting structure 31, the force-bearing body side deformation body 33, and the supporting body side deformation body 34 are formed in a plate shape with the Y-axis direction as the thickness direction, and are formed integrally from a continuous plate. Thus, the first strain body 30A can be easily manufactured. The first strain body 30A thus formed can also be fixed to the force-bearing body 10 and the supporting body 20, respectively, by bolts or adhesives. Alternatively, the force-bearing body 10, the supporting body 20, and the strain bodies 30A to 30D can be formed integrally from a continuous block by machining (such as cutting), or can also be formed by casting.

[0140] The detection element 50 is configured to detect displacement caused by elastic deformation of the first strain body 30A. The detection element 50 of this embodiment is configured as an element for detecting electrostatic capacitance. Figure 4 As shown, the detection element 50 has a fixed electrode substrate disposed on the support body 20 or the force-bearing body 10 and a displacement electrode substrate disposed on the tilting structure 31. Figure 4 In the example shown, the detection element 50 includes two fixed electrode substrates Ef1 and Ef2 and two displacement electrode substrates Ed1 and Ed2 as electrodes for the first strain body 30A.

[0141] The two fixed electrode substrates Ef1 and Ef2 include a first fixed electrode substrate Ef1 arranged on the negative side of the X-axis direction and a second fixed electrode substrate Ef2 arranged on the positive side of the X-axis direction. In the present embodiment, the fixed electrode substrates Ef1 and Ef2 are arranged on the surface of the support body 20 on the side of the force-bearing body 10. The fixed electrode substrates Ef1 and Ef2 can be bonded to the surface of the support body 20 on the side of the force-bearing body 10 by using an adhesive, or can be fixed to the surface of the support body 20 on the side of the force-bearing body 10 by using bolts or the like. The fixed electrode substrates Ef1 and Ef2 include a fixed electrode Ef opposite to the corresponding displacement electrode substrates Ed1 and Ed2 and an insulator IBf (refer to Figure 4 ). In addition, the fixed electrode substrates Ef1 and Ef2 can also be arranged on the surface of the support body 20 side of the force-bearing body 10.

[0142] The two displacement electrode substrates Ed1 and Ed2 include a first displacement electrode substrate Ed1 disposed on the negative side in the X-axis direction and a second displacement electrode substrate Ed2 disposed on the positive side in the X-axis direction. In the present embodiment, the displacement electrode substrates Ed1 and Ed2 are disposed on the surface on the support body 20 side in the first tilting body 36 of the tilting structure 31. The displacement electrode substrates Ed1 and Ed2 may be bonded to the surface on the support body 20 side in the second tilting body 36 by an adhesive, or may be fixed to the surface on the support body 20 side in the second tilting body 36 by bolts or the like. The displacement electrode substrates Ed1 and Ed2 include a displacement electrode Ed opposed to the corresponding fixed electrode substrates Ef1 and Ef2 and an insulator IBd (see FIG. 1 ) interposed between the displacement electrode Ed and the second tilting body 36. Figure 4 ). In addition, when the fixed electrode substrates Ef1 and Ef2 are arranged on the surface of the support body 20 side of the force-bearing body 10, the displacement electrode substrates Ed1 and Ed2 can also be arranged on the surface of the first tilting body 35 of the tilting structure 31 on the force-bearing body 10 side.

[0143] The first fixed electrode substrate Ef1 faces the first displacement electrode substrate Ed1, and the second fixed electrode substrate Ef2 faces the second displacement electrode substrate Ed2. The first fixed electrode substrate Ef1 and the first displacement electrode substrate Ed1 form a first capacitance element C1, and the second fixed electrode substrate Ef2 and the second displacement electrode substrate Ed2 form a second capacitance element C2. The first capacitance element C1 and the second capacitance element C2 form a detection element 50 for the first strain body 30A.

[0144] The first displacement electrode substrate Ed1 and the second displacement electrode substrate Ed2 are arranged at different positions in the X-axis direction. In the present embodiment, the first displacement electrode substrate Ed1 is arranged at a position closer to the negative side in the X-axis direction than the support body side deformation body 34, and the second displacement electrode substrate Ed2 is arranged at a position closer to the positive side in the X-axis direction than the support body side deformation body 34. When the dimension of the tilting structure 31 (or the second tilting body 36) in the X-axis direction is L, the displacement electrode substrates Ed1 and Ed2 may be arranged within a range of L / 4 or more and L / 2 or less from the center of the tilting structure 31 in the X-axis direction.

[0145] In this embodiment, the displacement electrode substrates Ed1 and Ed2 are arranged at both ends of the tilting structure 31 in the X-axis direction. More specifically, the first displacement electrode substrate Ed1 is arranged at the end 36a of the second tilting body 36 on the negative side in the X-axis direction, and the second displacement electrode substrate Ed2 is arranged at the end 36b of the second tilting body 36 of the tilting structure 31 on the positive side in the X-axis direction.

[0146] The first fixed electrode substrate Ef1 is disposed opposite to the first displacement electrode substrate Ed1 and below the first displacement electrode substrate Ed1. The second fixed electrode substrate Ef2 is disposed opposite to the second displacement electrode substrate Ed2 and below the second displacement electrode substrate Ed2.

[0147] The first capacitive element C1 and the second capacitive element C2 are arranged at the same position in the Y-axis direction. That is, the first displacement electrode substrate Ed1 and the second displacement electrode substrate Ed2 are arranged at the same position in the Y-axis direction, and the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 are also arranged at the same position in the Y-axis direction.

[0148] In this embodiment, the planar shape of the fixed electrode substrates Ef1 and Ef2 is a rectangle. The planar shape of the displacement electrode substrates Ed1 and Ed2 is also a rectangle. However, the planar shape of the fixed electrode substrates Ef1 and Ef2 and the displacement electrode substrates Ed1 and Ed2 is not limited to a rectangle, and may be other shapes such as a circle, a polygon, or an ellipse.

[0149] When viewed from the Z-axis direction, the first fixed electrode substrate Ef1 may be larger than the first displacement electrode substrate Ed1. For example, the planar shape of the first fixed electrode substrate Ef1 may be larger than the planar shape of the first displacement electrode substrate Ed1. Furthermore, even when the first displacement electrode substrate Ed1 is displaced in the X-axis direction, the Y-axis direction, or the Z-axis direction, the first displacement electrode substrate Ed1 may overlap with the first fixed electrode substrate Ef1 as a whole when viewed from the Z-axis direction. In other words, the size of the displacement electrode Ed and the size of the fixed electrode Ef may be set so that the displacement electrode Ed and the fixed electrode Ef constituting the first capacitive element C1 overlap even when the first displacement electrode substrate Ed1 is displaced in the X-axis direction, the Y-axis direction, or the Z-axis direction. In this way, even when the first displacement electrode substrate Ed1 is displaced, the facing area of ​​the displacement electrode Ed and the fixed electrode Ef can be prevented from changing, thereby preventing the change in the facing area from affecting the change in the electrostatic capacitance value. Therefore, the electrostatic capacitance value can be changed according to the change in the distance between the displacement electrode Ed and the fixed electrode Ef. Here, the so-called opposing area refers to the overlapping area of ​​the displacement electrode Ed and the fixed electrode Ef when viewed from the Z-axis direction. When the tilting structure 31 tilts, the displacement electrode Ed, which is smaller than the fixed electrode Ef, tilts, and the opposing area may change, but the tilt angle of the displacement electrode Ed is small at this time. Therefore, in the change of the electrostatic capacitance value, the distance between the displacement electrode Ed and the fixed electrode Ef is dominant. Therefore, in this specification, the change of the opposing area caused by the tilt of the displacement electrode Ed is not considered, and it is considered that the change of the electrostatic capacitance value is caused by the change of the distance between the displacement electrode Ed and the fixed electrode Ef. In addition, in the following description Figure 6 In order to make the drawings clear, the inclination of the tilting structure 31 is exaggerated. In addition, the planar shape of the first fixed electrode substrate Ef1 is not limited to being larger than the planar shape of the first displacement electrode substrate Ed1. The planar shape of the first displacement electrode substrate Ed1 may be larger than the planar shape of the first fixed electrode substrate Ef1.

[0150] Likewise, when viewed from the Z-axis direction, the planar shape of the second fixed electrode substrate E12 may be larger than the planar shape of the second displacement electrode substrate Ed2. In addition, the planar shape of the second displacement electrode substrate Ed2 may be larger than the planar shape of the second fixed electrode substrate E12.

[0151] The planar shape of the fixed electrode Ef of the fixed electrode substrates Ef1 and Ef2 and the planar shape of the insulator IBf may also be the same size. However, this is not limited to this, and the planar shape of the fixed electrode Ef and the planar shape of the insulator IBf may also be different sizes. The planar shape of the displacement electrode Ed of the displacement electrode substrates Ed1 and Ed2 and the planar shape of the insulator IBd are also the same.

[0152] like Figure 4 As shown, the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 may also be formed separately and separated from each other. However, this is not limited to the above, and the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 may also be integrated and constituted by a common fixed electrode substrate. Alternatively, in the case where the first fixed electrode substrate Ef1 and the second fixed electrode substrate Ef2 are formed separately, the first displacement electrode substrate Ed1 and the second displacement electrode substrate Ed2 may also be integrated and constituted by a common displacement electrode substrate.

[0153] The above-described first straining body 30A and the structure of the detection element 50 corresponding thereto can be similarly applied to the second straining body 30B, the third straining body 30C, and the fourth straining body 30D.

[0154] That is, Figure 5 As shown, the detection element 50 further includes two fixed electrode substrates Ef3 and Ef4 provided on the support body 20, and two displacement electrode substrates Ed3 and Ed4 provided on the second tilting body 36 of the tilting structure 31 as electrodes for the second strain body 30B. The two fixed electrode substrates Ef3 and Ef4 include a third fixed electrode substrate Ef3 and a fourth fixed electrode substrate Ef4. The two displacement electrode substrates Ed3 and Ed4 include a third displacement electrode substrate Ed3 and a fourth displacement electrode substrate Ed4. The third fixed electrode substrate Ef3 is opposite to the third displacement electrode substrate Ed3, and the fourth fixed electrode substrate Ef4 is opposite to the fourth displacement electrode substrate Ed4. The third fixed electrode substrate Ef3 and the third displacement electrode substrate Ed3 constitute a third capacitance element C3, and the fourth fixed electrode substrate Ef4 and the fourth displacement electrode substrate Ed4 constitute a fourth capacitance element C4.

[0155] The third displacement electrode substrate Ed3 and the third fixed electrode substrate Ef3 are arranged at a position closer to the negative side of the Y-axis direction than the support body side deformable body 34. The fourth displacement electrode substrate Ed4 and the fourth fixed electrode substrate Ef4 are arranged at a position closer to the positive side of the Y-axis direction than the support body side deformable body 34. The third capacitor element C3 and the fourth capacitor element C4 are arranged at the same position in the X-axis direction. The fixed electrode substrates Ef3 and Ef4 have the same structure as the above-mentioned fixed electrode substrates Ef1 and Ef2. The displacement electrode substrates Ed3 and Ed4 have the same structure as the above-mentioned displacement electrode substrates Ed1 and Ed2.

[0156] In addition, the detection element 50 further includes two fixed electrode substrates Ef5 and Ef6 provided on the support body 20 and two displacement electrode substrates Ed5 and Ed6 provided on the second tilting body 36 of the tilting structure 31 as electrodes for the third strain body 30C. The two fixed electrode substrates Ef5 and Ef6 include a fifth fixed electrode substrate Ef5 and a sixth fixed electrode substrate Ef6. The two displacement electrode substrates Ed3 and Ed4 include a fifth displacement electrode substrate Ed5 and a sixth displacement electrode substrate Ed6. The fifth fixed electrode substrate Ef5 is opposite to the fifth displacement electrode substrate Ed5, and the sixth fixed electrode substrate Ef6 is opposite to the sixth displacement electrode substrate Ed6. The fifth fixed electrode substrate Ef5 and the fifth displacement electrode substrate Ed5 constitute a fifth capacitance element C5, and the sixth fixed electrode substrate Ef6 and the sixth displacement electrode substrate Ed6 constitute a sixth capacitance element C6.

[0157] The fifth displacement electrode substrate Ed5 and the fifth fixed electrode substrate Ef5 are arranged at a position closer to the positive side of the X-axis direction than the support body side deformable body 34. The sixth displacement electrode substrate Ed6 and the sixth fixed electrode substrate Ef6 are arranged at a position closer to the negative side of the X-axis direction than the support body side deformable body 34. The fifth capacitor element C5 and the sixth capacitor element C6 are arranged at the same position in the Y-axis direction. The fixed electrode substrates Ef5 and Ef6 have the same structure as the above-mentioned fixed electrode substrates Ef1 and Ef2. The displacement electrode substrates Ed5 and Ed6 have the same structure as the above-mentioned displacement electrode substrates Ed1 and Ed2.

[0158] In addition, the detection element 50 further includes two fixed electrode substrates Ef7 and Ef8 provided on the support body 20 and two displacement electrode substrates Ed7 and Ed8 provided on the second tilting body 36 of the tilting structure 31 as electrodes for the fourth strain body 30D. The two fixed electrode substrates Ef7 and Ef8 include a seventh fixed electrode substrate Ef7 and an eighth fixed electrode substrate Ef8. The two displacement electrode substrates Ed7 and Ed8 include a seventh displacement electrode substrate Ed7 and an eighth displacement electrode substrate Ed8. The seventh fixed electrode substrate Ef7 is opposed to the seventh displacement electrode substrate Ed7, and the eighth fixed electrode substrate Ef8 is opposed to the eighth displacement electrode substrate Ed8. The seventh fixed electrode substrate Ef7 and the seventh displacement electrode substrate Ed7 constitute a seventh capacitance element C3, and the eighth fixed electrode substrate Ef8 and the eighth displacement electrode substrate Ed8 constitute an eighth capacitance element C8.

[0159] The seventh displacement electrode substrate Ed7 and the seventh fixed electrode substrate Ef7 are arranged at a position closer to the positive side of the Y-axis direction than the support body side deformable body 34. The eighth displacement electrode substrate Ed8 and the eighth fixed electrode substrate Ef8 are arranged at a position closer to the negative side of the Y-axis direction than the support body side deformable body 34. The seventh capacitance element C7 and the eighth capacitance element C8 are arranged at the same position in the X-axis direction. The fixed electrode substrates Ef7 and Ef8 have the same structure as the above-mentioned fixed electrode substrates Ef1 and Ef2. The displacement electrode substrates Ed7 and Ed8 have the same structure as the above-mentioned displacement electrode substrates Ed1 and Ed2.

[0160] Each of the fixed electrode substrates Ef1 to Ef8 may be formed of a ceramic substrate, a glass epoxy substrate or an FPC substrate (or a flexible printed circuit substrate) formed of a laminated electrode material. The FPC substrate is a printed substrate formed in a thin film and having flexibility, and may be integrally bonded to the support body 20. Each of the fixed electrode substrates Ef1 to Ef8 may be bonded to the support body 20 using an adhesive. The same is true for each of the displacement electrode substrates Ed1 to Ed8. Each of the displacement electrode substrates Ed1 to Ed8 may be bonded to the second tilting body 36 using an adhesive.

[0161] In addition, the detection element 50 is not limited to being a capacitive element that detects electrostatic capacitance. For example, the detection element 50 may also be composed of a strain gauge that detects strain generated by the force or torque applied to the force-bearing body 10. In addition, the detection element 50 may also be composed of a piezoelectric element that generates an electric charge when strain is generated. Furthermore, the detection element 50 may also be composed of an optical sensor that detects displacement by reflection of light, or may also be composed of a sensor that detects displacement by eddy current, or a sensor that detects displacement by the Hall effect. In particular, optical sensors that utilize reflection of light, sensors that utilize eddy current, and sensors that utilize the Hall effect are similar in detection principle to electrostatic capacitance, and thus can be easily replaced with capacitive elements that detect electrostatic capacitance. As an example, an example in which the detection element 50 is composed of a strain gauge will be described later.

[0162] like Figure 2 As shown, the detection circuit 60 outputs an electrical signal representing the force or torque acting on the strain bodies 30A to 30D based on the detection result of the detection element 50. The detection circuit 60 may also have a computing function composed of a microprocessor, for example. In addition, the detection circuit 60 may also have an A / D conversion function that converts the analog signal received from the above-mentioned detection element 50 into a digital signal, and a signal amplification function. The detection circuit 60 may also include a terminal for outputting an electrical signal, from which the signal is transmitted via a cable 1300 (see Figure 1 ) sends an electrical signal to the above-mentioned control unit 1400.

[0163] like Figure 2and Figure 3 As shown, the outer casing 80 is configured to cover the four strain bodies 30A to 30D from the outside when viewed from the Z-axis direction. The outer casing 80 is a cylindrical frame that constitutes the force sensor 1. The strain bodies 30A to 30D are accommodated in the outer casing 80. In the present embodiment, the planar cross-sectional shape of the outer casing 80 (equivalent to the shape in the cross section along the XY plane) is a circular frame shape.

[0164] like Figure 2 As shown, the outer casing 80 is fixed on the support body 20 and separated from the force-bearing body 10. An opening of the outer casing 80 (equivalent to Figure 2 The opening on the upper side of the middle part) is provided with a force-bearing body 10, and the other opening (equivalent to Figure 2 A support body 20 is arranged in the opening portion on the lower middle side.

[0165] More specifically, the support body 20 is fixed to the outer body 80 in a manner that closes the opening on the lower side of the outer body 80. The outer body 80 may also be made integrally with the support body 20. On the other hand, a gap is provided between the force-bearing body 10 and the outer body 80, and the force-bearing body 10 can be displaced according to the force or torque received from the end effector 1200. In addition, in order to ensure waterproofness and dustproofness, a buffer component 81 may also be present in the gap between the force-bearing body 10 and the outer body 80. The buffer component 81 may also be formed of a soft material that can be elastically deformed, such as rubber or sponge. In addition, the outer body 80 may also be made integrally with the force-bearing body 10 instead of the support body 20. In this case, a gap may also be provided between the outer body 80 and the support body 20. Alternatively, the portion of the outer body 80 on the side of the force-bearing body 10 may be made integrally with the force-bearing body 10, and the portion of the outer body 80 on the side of the support body 20 may be made integrally with the support body 20. In this case, the outer casing 80 is formed by a separate part on the side of the force receiving body 10 and a part on the side of the support body 20. A gap may be provided between the part on the side of the force receiving body 10 and the part on the side of the support body 20.

[0166] Next, refer to Figures 6 to 7B A method of applying force or moment to the force sensor 1 of the present embodiment configured as described above and detecting the force or moment will be described. Figure 6 It is schematically indicated Figure 4 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side of the X-axis direction. Fig. 7A It is schematically indicated Figure 4 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction. Figure 7B It is schematically indicated Figure 4 The front view of the deformation state of the strain body when the strain body is subjected to a force on the negative side of the Z-axis direction.

[0167] When the force-bearing body 10 is acted upon by a force or a moment, the force or the moment is transmitted to the first strain body 30A to the fourth strain body 30D. More specifically, the force or the moment is transmitted to the force-bearing body side deformation body 33, the tilting structure 31 and the supporting body side deformation body 34, and elastic deformation is generated in the force-bearing body side deformation body 33 or the supporting body side deformation body 34 and the tilting structure 31. As a result, the tilting structure 31 is displaced. Therefore, the distance between each fixed electrode substrate Ef1 to Ef8 of the detection element 50 and the corresponding displacement electrode substrate Ed1 to Ed8 changes, and the electrostatic capacitance value of each capacitor element C1 to C8 changes. The change in the electrostatic capacitance value is detected by the detection element 50 as the displacement generated in the strain body 30A to 30D. In this case, the change in the electrostatic capacitance value of each capacitor element C1 to C8 may be different. Therefore, the detection circuit 60 can detect the direction and magnitude of the force or moment acting on the load-bearing body 10 based on the change in the electrostatic capacitance value of each of the capacitive elements C1 to C8 detected by the detection element 50 .

[0168] Here, first, taking the first strain body 30A as an example, changes in the capacitance values ​​of the first capacitive element C1 and the second capacitive element C2 when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, and the force Fz in the Z-axis direction are described.

[0169] (When the effect is +Fx)

[0170] When a force Fx acts on the first strain body 30A toward the positive side in the X-axis direction, as shown in FIG. Figure 6 As shown, the force-bearing body side deformation body 33 and the supporting body side deformation body 34 of the first strain body 30A are elastically deformed in the X-axis direction. The tilting structure 31 of this embodiment is connected to the force-bearing body 10 via a force-bearing body side deformation body 33, and is connected to the supporting body 20 via a supporting body side deformation body 34, so the force-bearing body side deformation body 33 and the supporting body side deformation body 34 can be elastically deformed to the same extent. In addition, the first tilting body 35 and the second tilting body 36 of the tilting structure 31 of this embodiment are connected via two connecting bodies 37 and 38 extending in the Z-axis direction, so the force-bearing body side deformation body 33 and the supporting body side deformation body 34 can be elastically deformed to a greater extent than the connecting bodies 37 and 38. More specifically, the upper end of the force-bearing body side deformation body 33 is displaced more toward the positive side of the X-axis direction than the lower end. As a result, the force-bearing body side deformation body 33 is tilted relative to the Z-axis direction in a manner of tilting toward the positive side of the X-axis direction while elastically deforming. In addition, the upper end of the support body side deformable body 34 is displaced further toward the positive side in the X-axis direction than the lower end. As a result, the support body side deformable body 34 is tilted relative to the Z-axis direction in a manner of tilting toward the positive side in the X-axis direction while elastically deforming. Figure 6As shown, the tilting structure 31 (including the first tilting body 35, the second tilting body 36 and the connecting bodies 37 and 38) can tilt as a whole. In this case, the tilting structure 31 is viewed from the positive side in the Y-axis direction (towards Figure 6 The first strain body 30A (when viewed from the paper) rotates clockwise around the Y-axis and tilts relative to the Z-axis. In this way, the force Fx on the positive side of the X-axis direction can cause the force-bearing body side deformation body 33 and the support body side deformation body 34 of the first strain body 30A to elastically deform. A small elastic deformation may occur in the tilting structure 31, but it will not cause such a large elastic deformation as the elastic deformation of the force-bearing body side deformation body 33 and the support body side deformation body 34. In this case, the end 36a on the negative side of the X-axis direction of the second tilting body 36 rises, and the end 36b on the positive side of the X-axis direction falls.

[0171] like Figure 6 As shown in FIG. 1 , when the tilting structure 31 of the first strain body 30A rotates clockwise, the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1. As a result, the inter-electrode distance (equivalent to the distance in the Z-axis direction) between the first displacement electrode substrate Ed1 and the first fixed electrode substrate Ef1 increases, and the electrostatic capacitance value of the first capacitor C1 decreases. On the other hand, the second displacement electrode substrate Ed2 moves closer to the second fixed electrode substrate Ef2. As a result, the inter-electrode distance between the second displacement electrode substrate Ed2 and the second fixed electrode substrate Ef2 decreases, and the electrostatic capacitance value of the second capacitor C2 increases.

[0172] (When -Fx is used)

[0173] When a force Fx acts on the first strain body 30A toward the negative side in the X-axis direction, although not shown in the figure, the same Figure 6 That is, the electrostatic capacitance value of the first capacitive element C1 increases, and the electrostatic capacitance value of the second capacitive element C2 decreases.

[0174] (When the effect is +Fy)

[0175] When a force Fy is applied to the first strain body 30A toward the positive side of the Y-axis direction (not shown), the first strain body 30A rotates around the X-axis (equivalent to the counterclockwise direction toward the positive side of the X-axis direction). As a result, the first strain body 30A is elastically deformed in a manner that it tilts toward the positive side of the Y-axis direction and is inclined relative to the Z-axis direction. Therefore, the first strain body 30A is elastically deformed in a manner that is bent in the thickness direction. However, as described above, the first capacitor element C1 and the second capacitor element C2 are configured at the same position in the Y-axis direction. Therefore, even if the first strain body 30A rotates around the X-axis, the electrostatic capacitance value increases in a part of the first capacitor element C1, and decreases in another part of the first capacitor element C1. Therefore, from the perspective of the first capacitor element C1 as a whole, there will be no change in the electrostatic capacitance value. Similarly, from the perspective of the second capacitor element C2 as a whole, there will be no change in the electrostatic capacitance value.

[0176] (When the effect is -Fy)

[0177] The same is true when the force Fy acts on the first strain body 30A toward the negative side in the Y-axis direction. The capacitance value does not change when viewed from the first capacitive element C1 as a whole and the second capacitive element C2 as a whole.

[0178] (When the effect is +Fz)

[0179] In addition, when a force Fz acts on the first strain body 30A toward the positive side in the Z-axis direction, as shown in FIG. Fig. 7A As shown in FIG. 1 , the first tilting body 35 and the second tilting body 36 of the tilting structure 31 are elastically deformed. More specifically, while the first tilting body 35 is elastically deformed, the force-bearing body side deformation body 33 is pulled up toward the positive side in the Z-axis direction. Fig. 7A As shown in FIG. 1 , the first tilting body 35 is pulled up by the force-bearing body side deformation body 33 at its central portion 35c in the X-axis direction. At this time, the first tilting body 35 elastically deforms in an upward convex manner (e.g., inverted V shape) while pulling the connecting bodies 37 and 38 toward the positive side in the Z-axis direction. Fig. 7A As shown, the second tilting body 36 is pulled up at both ends 36a and 36b in the X-axis direction. At this time, the second tilting body 36 is elastically deformed so as to be convex downward (for example, in a V-shape).

[0180] like Fig. 7A As shown, when the first tilting body 35 and the second tilting body 36 are elastically deformed, the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1. Therefore, the electrostatic capacitance value of the first capacitor C1 decreases. In addition, the second displacement electrode substrate Ed2 moves away from the second fixed electrode substrate Ef2. Therefore, the electrostatic capacitance value of the second capacitor C2 decreases.

[0181] (When -Fz is used)

[0182] When a force Fz acts on the first strain body 30A in the negative direction of the Z-axis direction, as shown in FIG. Figure 7B As shown in FIG. 1 , the first tilting body 35 and the second tilting body 36 of the tilting structure 31 are elastically deformed. More specifically, while the first tilting body 35 is elastically deformed, the force-bearing body side deformation body 33 is pressed downward toward the negative side in the Z-axis direction. Figure 7B As shown in FIG. 1 , the first tilting body 35 is pressed down by the force-bearing body side deformation body 33 at its central portion 35c in the X-axis direction. At this time, the first tilting body 35 elastically deforms in a downward convex (e.g., V-shaped) manner, while pressing the connecting bodies 37 and 38 downward toward the negative side in the Z-axis direction. Figure 7B As shown, the second tilting body 36 is pressed down at both ends 36a and 36b in the X-axis direction. At this time, the second tilting body 36 is elastically deformed so as to bulge upward (for example, in an inverted V shape).

[0183] like Figure 7B As shown in FIG. 1 , when the first tilting body 35 and the second tilting body 36 are elastically deformed, the first displacement electrode substrate Ed1 approaches the first fixed electrode substrate Ef1. Therefore, the electrostatic capacitance value of the first capacitor C1 increases. In addition, the second displacement electrode substrate Ed2 approaches the second fixed electrode substrate Ef2. Therefore, the electrostatic capacitance value of the second capacitor C2 increases.

[0184] Here, Figure 8 Shown set at Figure 4 FIG. 1 is a graph showing a change in the capacitance value of each of the capacitive elements C1 and C2 on the first strain body 30A. Figure 8 Yes means Figure 4 FIG. 5 is a table showing changes in the electrostatic capacitance value of each capacitive element C1 , C2 in the first strain body 30A.

[0185] exist Figure 8 FIG. 1 shows the change in the electrostatic capacitance value of the capacitor elements C1 and C2 with respect to the force Fx in the X-axis direction, the force Fy in the Y-axis direction, and the force Fz in the Z-axis direction. Figure 8 In the figure, "-(negative)" indicates a decrease in the electrostatic capacitance value, and "+(positive)" indicates an increase in the electrostatic capacitance value. For example, Figure 8 In the table shown, “-” is shown in C1 of the row of Fx, which means that when the force of +Fx acts as described above, the electrostatic capacitance value of the first capacitive element C1 decreases. Figure 8 In the table shown, "+" is indicated in C2 of the row of Fx, which means that when the force of +Fx acts as described above, the electrostatic capacitance value of the second capacitive element C2 increases. Figure 8 In FIG. 1 , the numerical value “0 (zero)” indicates that the electrostatic capacitance values ​​of the capacitor elements C1 and C2 have not changed.

[0186] according to Figure 8 As shown in the table, in the force sensor 1 in which the force-bearing body 10 and the supporting body 20 are connected only by the first strain body 30A, the forces Fx and Fz acting on the force-bearing body 10 can be calculated by the following formula. In addition, in the following formula, for convenience, "=" is used to connect the force or torque and the change in electrostatic capacitance value. However, the force or torque and the electrostatic capacitance value are different physical quantities, so the force is actually calculated by converting the change in the electrostatic capacitance value. C1 and C2 in the following formula represent the change in the electrostatic capacitance value in each capacitor element.

[0187] [Formula 1]

[0188] Fx=-C1+C2

[0189] [Formula 2]

[0190] Fz=-C1-C2

[0191] Next, refer to Fig. 9 and Fig.10 Yes Figure 5 The following describes changes in the electrostatic capacitance values ​​of the capacitor elements C1 to C8 when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, the force Fz in the Z-axis direction, the moment Mx around the X-axis, the moment My around the Y-axis, and the moment Mz around the Z-axis act on the force sensor 1 shown. Fig. 9 Yes means Figure 5 Table showing changes in the electrostatic capacitance value of each capacitive element in the force sensor. Fig.10 Is based on Fig. 9 A table showing the changes in electrostatic capacitance values ​​for spindle sensitivity and other axis sensitivity.

[0192] (When the effect is +Fx)

[0193] First, a case where a force Fx acts on the force receiving body 10 toward the positive side in the X-axis direction will be described.

[0194] In this case, the first strain body 30A and Figure 6 The first strain body 30A shown in the figure is also elastically deformed, the electrostatic capacitance value of the first capacitive element C1 is reduced, and the electrostatic capacitance value of the second capacitive element C2 is increased. Fig. 9 In the table shown, the row of Fx is indicated as “- (negative)” in C1 and as “+ (positive)” in C2.

[0195] The second strain body 30B rotates around the Y axis (equivalent to the clockwise direction toward the positive side of the Y axis direction). However, as described above, the third capacitor element C3 and the fourth capacitor element C4 are arranged at the same position in the X axis direction. Therefore, similar to the first strain body 30A when the force Fy in the Y axis direction is applied, the third capacitor element C3 as a whole and the fourth capacitor element C4 as a whole do not change in electrostatic capacitance value. This situation is Fig. 9 In the table shown, "0 (zero)" is indicated in C3 and C4 of the Fx row.

[0196] The third strain body 30C and Figure 6 The first strain body 30A shown in FIG. 1 is also elastically deformed. Therefore, the electrostatic capacitance value of the fifth capacitive element C5 increases, and the electrostatic capacitance value of the sixth capacitive element C6 decreases. Fig. 9 In the row of Fx in the table shown, C5 is indicated as "+", and C6 is indicated as "-".

[0197] The fourth strain body 30D rotates around the Y axis in the same manner as the second strain body 30B. However, as described above, the seventh capacitor element C7 and the eighth capacitor element C8 are arranged at the same position in the X axis direction. Therefore, the seventh capacitor element C7 as a whole and the eighth capacitor element C8 as a whole do not change in electrostatic capacitance value. Fig. 9 In the table shown, "0 (zero)" is indicated in C7 and C8 of the Fx row.

[0198] (When the effect is +Fy)

[0199] Next, the case where a force Fy acts on the force receiving body 10 toward the positive side in the Y-axis direction is described. In the following description, the change in the electrostatic capacitance value is also defined as described above. Fig. 9 The symbols in the table.

[0200] In this case, the first strain body 30A rotates around the X-axis (equivalent to the counterclockwise direction toward the positive side of the X-axis direction). However, as described above, the first capacitor element C1 and the second capacitor element C2 are arranged at the same position in the Y-axis direction. Therefore, the first capacitor element C1 as a whole and the second capacitor element C2 as a whole do not change in electrostatic capacitance value.

[0201] The second strain body 30B and Figure 6 The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the third capacitive element C3 is reduced, and the electrostatic capacitance value of the fourth capacitive element C4 is increased.

[0202] The third strain body 30C rotates around the X axis similarly to the first strain body 30A. However, the fifth capacitive element C5 and the sixth capacitive element C6 are arranged at the same position in the Y axis direction. Therefore, the entire fifth capacitive element C5 and the entire sixth capacitive element C6 do not change in electrostatic capacitance value.

[0203] The fourth strain body 30D and Figure 6 The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the seventh capacitive element C7 increases, and the electrostatic capacitance value of the eighth capacitive element C8 decreases.

[0204] (When the effect is +Fz)

[0205] Next, the case where a force Fz acts on the force receiving body 10 toward the positive side in the Z-axis direction is described. In the following description, the change in the electrostatic capacitance value is also defined as described above. Fig. 9 The symbols in the table.

[0206] In this case, each of the strain bodies 30A to 30D and Fig. 7A The first strain body 30A shown in the figure is similarly elastically deformed, thereby reducing the capacitance value of each of the capacitive elements C1 to C8.

[0207] (When the effect is +Mx)

[0208] Next, a moment Mx (refer to Figure 5 In the following description, the change in electrostatic capacitance value is also specified as described above. Fig. 9 The symbols in the table.

[0209] In this case, the first strain body 30A and Figure 7B The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the first capacitive element C1 increases, and the electrostatic capacitance value of the second capacitive element C2 increases.

[0210] In the second strain body 30B, since the force-bearing body side deformation body 33 is located at the center O of the force-bearing body 10 in the Y-axis direction, the elastic deformation of the second strain body 30B is smaller than that of the first strain body 30A and the third strain body 30C. Here, in order to simplify the description, it is considered that the second strain body 30B does not undergo elastic deformation. Therefore, the electrostatic capacitance value of the third capacitor element C3 does not change, and the electrostatic capacitance value of the fourth capacitor element C4 does not change.

[0211] The third strain body 30C and Fig. 7A The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the fifth capacitive element C5 is reduced, and the electrostatic capacitance value of the sixth capacitive element C6 is reduced.

[0212] In the fourth strain body 30D, since the force-bearing body side deformation body 33 is located at the center 0 of the force-bearing body 10 in the Y-axis direction, the elastic deformation of the fourth strain body 30D is smaller than that of the first strain body 30A and the third strain body 30C. Here, in order to simplify the description, it is considered that the fourth strain body 30D does not undergo elastic deformation. Therefore, the electrostatic capacitance value of the seventh capacitor element C7 does not change, and the electrostatic capacitance value of the eighth capacitor element C8 does not change.

[0213] (When the effect is +My)

[0214] Next, a moment My (refer to Figure 5 In the following description, the change in electrostatic capacitance value is also specified as described above. Fig. 9 The symbols in the table.

[0215] In this case, in the first strain body 30A, since the force-bearing body side deformation body 33 is located at the center O of the force-bearing body 10 in the X-axis direction, the elastic deformation of the first strain body 30A is smaller than that of the second strain body 30B and the fourth strain body 30D. Here, in order to simplify the description, it is considered that the first strain body 30A does not undergo elastic deformation. Therefore, the electrostatic capacitance value of the first capacitor element C1 does not change, and the electrostatic capacitance value of the second capacitor element C2 does not change.

[0216] The second strain body 30B and Figure 7B The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the third capacitive element C3 increases, and the electrostatic capacitance value of the fourth capacitive element C4 increases.

[0217] In the third strain body 30C, since the force-bearing body side deformation body 33 is located at the center 0 of the force-bearing body 10 in the X-axis direction, the elastic deformation of the third strain body 30C is smaller than that of the second strain body 30B and the fourth strain body 30D. Here, in order to simplify the description, it is considered that the third strain body 30C does not undergo elastic deformation. Therefore, the electrostatic capacitance value of the fifth capacitor element C5 does not change, and the electrostatic capacitance value of the sixth capacitor element C6 does not change.

[0218] The fourth strain body 30D and Fig. 7A The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the seventh capacitive element C7 is reduced, and the electrostatic capacitance value of the eighth capacitive element C8 is reduced.

[0219] (When the effect is +Mz)

[0220] Next, a moment Mz (refer to Figure 5 In the following description, the change in electrostatic capacitance value is also specified as described above. Fig. 9 The symbols in the table.

[0221] In this case, the first strain body 30A is elastically deformed in the same manner as when the force Fx in the positive direction of the X-axis direction acts. Figure 6 The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the first capacitive element C1 is reduced, and the electrostatic capacitance value of the second capacitive element C2 is increased.

[0222] The second strain body 30B is elastically deformed in the same manner as when the force Fy in the positive direction of the Y-axis direction acts. Figure 6 The first strain body 30A shown is similarly elastically deformed, the electrostatic capacitance value of the third capacitive element C3 is reduced, and the electrostatic capacitance value of the fourth capacitive element C4 is increased.

[0223] The third strain body 30C is elastically deformed in the same manner as when the force Fx in the negative side of the X-axis direction acts. As a result, the capacitance value of the fifth capacitive element C5 decreases, and the capacitance value of the sixth capacitive element C6 increases.

[0224] The fourth strain body 30D is elastically deformed in the same manner as when the force Fy in the negative side of the Y-axis direction acts. As a result, the capacitance value of the seventh capacitive element C7 decreases, and the capacitance value of the eighth capacitive element C8 increases.

[0225] Thus, when the change in the electrostatic capacitance value of each capacitor element C1 to C8 is detected, the direction and magnitude of the force or moment acting on the force-bearing body 10 are detected. Fig. 9 As shown, the electrostatic capacitance value of each of the capacitive elements C1 to C8 changes.

[0226] according to Fig. 9 As shown in the table, the forces Fx, Fy, Fz and moments Mx, My, Mz acting on the load-bearing body 10 can be calculated by the following formulas. In this way, the six-axis components of the force can be detected. In addition, in the following formulas, for convenience, "=" is used to connect the force or moment and the change in electrostatic capacitance value. However, the force or moment and the electrostatic capacitance value are different physical quantities, so in fact, the force or moment is calculated by converting the change in the electrostatic capacitance value. C1~C8 in the following formulas represent the change in the electrostatic capacitance value in each capacitor element.

[0227] [Formula 3]

[0228] Fx=-C1+C2+C5-C6

[0229] [Formula 4]

[0230] Fy=-C3+C4+C7-C8

[0231] [Formula 5]

[0232] Fz=-C1-C2-C3-C4-C5-C6-C7-C8

[0233] [Formula 6]

[0234] Mx=+C1+C2-C5-C6

[0235] [Formula 7]

[0236] My=+C3+C4-C7-C8

[0237] [Formula 8]

[0238] Mz=-C1+C2-C3+C4-C5+C6-C7+C8

[0239] As mentioned above, Figure 5 The force sensor 1 shown in the figure can detect the forces Fx, Fy, Fz and the moments Mx, My, Mz as shown in [Equation 3] to [Equation 8] above, and thus can detect the six-axis force components. However, the force sensor 1 is not limited to the six axis components of force that can be detected, and the axis components that can be detected are arbitrary depending on the number, structure, and shape of the strain bodies. For example, when only using Figure 4 When the first strain body 30A shown connects the force receiving body 10 and the support body 20, as shown in the above [Formula 1] and [Formula 2], the forces Fx and Fz can be detected, and thus the biaxial components of the force can be detected.

[0240] If you will Fig. 9 The change in the electrostatic capacitance value of each capacitor element C1 to C8 shown in FIG. 3 is applied to the above-mentioned [Formula 3] to [Formula 8], and the following equation is obtained: Fig.10 A table showing the spindle sensitivity and other axis sensitivities. Fig.10 VFx shown is the output when a force Fx in the X-axis direction acts, VFy is the output when a force Fy in the Y-axis direction acts, and VFz is the output when a force Fz in the Z-axis direction acts. In addition, VMx is the output when a moment Mx around the X-axis acts, VMy is the output when a moment My around the Y-axis acts, and VMz is the output when a moment Mz around the Z-axis acts.

[0241] Fig.10 The values ​​shown in the table are for Fig. 9The forces Fx, Fy, Fz and moments Mx, My, Mz recorded in the table are substituted into the right side of the above [Formula 3] to [Formula 8] by setting the capacitor element with the sign "+" to "+1" and the capacitor element with the sign "-" to "-1". For example, the value "4" recorded in the square where the column of Fx intersects the row of VFx is in [Formula 3] representing Fx, according to Fig. 9 The value obtained by substituting "+1" for C2 and C5 and "-1" for C1 and C6 in the row of Fx. In addition, the value "0" recorded in the square where the column of Fx intersects the row of VFy is in [Formula 3] representing Fx, according to Fig. 9 The rows of Fy are obtained by substituting 0 into C1, C2, C5, and C6.

[0242] like Fig.10 As shown in FIG. 1 , regarding the force Fx, VFx becomes a value of "4", but VFy, VFz, VMx, VMy, and VMz become a value of "0". As a result, regarding the force Fx, there is no other-axis sensitivity, and only the main-axis sensitivity can be detected. Regarding the forces Fy and Fz and the moments Mx, My, and Mz, there is similarly no other-axis sensitivity, and only the main-axis sensitivity can be detected. That is, a force sensor 1 that can suppress the generation of other-axis sensitivity can be obtained.

[0243] In addition, the situation of generating other axis sensitivities is also considered. For example, when the force Fz acts on the first strain body 30A in the positive direction of the Z axis, the change in the electrostatic capacitance value of the first capacitor C1 is sometimes different from the change in the electrostatic capacitance value of the second capacitor C2. In this case, other axis sensitivities may be generated relative to the force Fz. In addition, when the force Fz, moment Mx, and My act on the force-bearing body 10, the first strain body 30A is displaced in the Z axis direction. Fig. 9 In the table shown, the Fz row, the Mx row, and the My row may have different changes in electrostatic capacitance values ​​even if they are marked with the same symbol. In this case, other axis sensitivities may be generated with respect to the force Fz, the moment Mx, and the My. Other axis sensitivities may also be generated with respect to the force Fx, Fy, and the moment Mz. For example, when a moment Mx acts on the force-bearing body 10, Fig. 9 As shown in the figure, in the third capacitor element C3, the fourth capacitor element C4, the seventh capacitor element C7 and the eighth capacitor element C8, the electrostatic capacitance value does not change, so the value of "0" is recorded, but sometimes the electrostatic capacitance value changes, resulting in other axis sensitivities. The same is true for the moments My and Mz. In addition, for the capacitor elements that record the value of "0" in the rows of forces FX and Fy, the electrostatic capacitance value sometimes changes, resulting in other axis sensitivities.

[0244] However, even when other axis sensitivities are generated, the other axis sensitivities can be obtained by calculating the matrix (with Fig.10 The inverse matrix of the 6-row 6-column matrix corresponding to the table shown is also called the characteristic matrix), and the inverse matrix is ​​multiplied by the output of the force sensor (or the characteristic matrix) to perform correction operations. In this way, the sensitivity of other axes can be reduced and the generation of sensitivity of other axes can be suppressed.

[0245] Thus, according to the present embodiment, the strain bodies 30A to 30D connecting the force-bearing body 10 and the supporting body 20 have a tilting structure 31 connected to the force-bearing body side deformation body 33 and the supporting body side deformation body 34, and the tilting structure 31 includes a first tilting body 35 arranged on a plane including the Z-axis direction and the X-axis direction orthogonal to the Z-axis direction and extending in a direction different from the Z-axis direction. The first tilting body 35 can be elastically deformed under the action of a force in the Z-axis direction. Thus, the tilting structure 31 can be easily elastically deformed by the action of a force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be increased, thereby improving the detection sensitivity of the force or torque. Thus, the detection accuracy of the force sensor 1 can be improved.

[0246] In addition, according to this embodiment, the structure of the strain bodies 30A to 30D can be simplified. In addition, six-axis components can be detected simply by connecting at least three strain bodies to the force receiving body 10 and the supporting body 20. Therefore, the price of the force sensor 1 can be reduced.

[0247] In addition, according to the present embodiment, the force-bearing body side deformable body 33 extends in the Z-axis direction. Thus, when a force or moment acts on the force-bearing body 10, the force-bearing body side deformable body 33 can be further elastically deformed. Therefore, the strain bodies 30A to 30D can be easily further elastically deformed, and the displacement of the displacement electrode substrates Ed1 to Ed8 provided on the strain bodies 30A to 30D can be increased. Therefore, the detection sensitivity of the force or moment can be further improved, and thus the detection accuracy of the force sensor 1 can be further improved.

[0248] In addition, according to the present embodiment, the support body side deformable body 34 extends in the Z-axis direction. Thus, when a force or moment acts on the force-bearing body 10, the support body side deformable body 34 can be further elastically deformed. Therefore, the strain bodies 30A to 30D can be easily further elastically deformed, and the displacement of the displacement electrode substrates Ed1 to Ed8 provided on the strain bodies 30A to 30D can be increased. Therefore, the detection sensitivity of the force or moment can be further improved, and the detection accuracy of the force sensor 1 can be further improved.

[0249] In addition, according to the present embodiment, the first tilting bodies 35 of the strain bodies 30A to 30D extend in the second direction. That is, the first tilting bodies 35 of the strain bodies 30A and 30C extend in the X-axis direction, and the first tilting bodies 35 of the strain bodies 30B and 30I extend in the Y-axis direction. Thus, when a force in the Z-axis direction is applied, the first tilting bodies 35 can be easily elastically deformed further. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be further increased, thereby further improving the detection sensitivity of the force or moment.

[0250] In addition, according to the present embodiment, the force-bearing body side deformable body 33 is connected to the first tilting body 35, and the supporting body side deformable body 34 is connected to the second tilting body 36 connected to the first tilting body 35 via the connecting bodies 37 and 38. The second tilting body 36 can be elastically deformed under the action of the force in the X-axis direction. Thus, the tilting structure 31 can be easily further elastically deformed by the action of the force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be further increased, thereby further improving the detection sensitivity of the force or moment. Thus, the detection accuracy of the force sensor 1 can be further improved.

[0251] In addition, according to the present embodiment, the force-bearing body side deformation body 33 is located between the two end portions 35a and 35b of the first tilting body 35 in the X-axis direction. Thus, the first tilting body 35 can be easily elastically deformed by the force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be easily increased, thereby improving the detection sensitivity of the force or moment.

[0252] In addition, according to the present embodiment, the support body side deformable body 34 is located between the two end portions 36a and 36b of the second tilting body 36 in the X-axis direction. Thus, the second tilting body 36 can be easily elastically deformed by the action of the force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be easily increased, thereby improving the detection sensitivity of the force or moment.

[0253] In addition, according to the present embodiment, the force-bearing body side deformable body 33 and the supporting body side deformable body 34 are arranged at overlapping positions when viewed from the Z-axis direction. As a result, the force-bearing body side deformable body 33 and the supporting body side deformable body 34 can be arranged at the same position in the second direction. Therefore, when a force Fz in the Z-axis direction acts on the force-bearing body 10, the force-bearing body 10 can be suppressed from being displaced in a direction orthogonal to the Z-axis direction (equivalent to the X-axis direction or the Y-axis direction), thereby enabling the force-bearing body 10 to be displaced along the Z-axis direction. In this case, the generation of the above-mentioned other axis sensitivity can be suppressed.

[0254] In addition, according to the present embodiment, the tilting structure 31 is formed symmetrically with respect to the force-bearing body side deformable body 33 and the supporting body side deformable body 34 in the second direction. As a result, the tilting of the tilting structure 31 can be increased. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be further increased, and the detection sensitivity of the force or moment can be further improved. In addition, when a force in the Z-axis direction acts, the displacement of the first displacement electrode substrate Ed1 can be equal to the displacement of the second displacement electrode substrate Ed2. Therefore, the calculation of the force or moment can be facilitated.

[0255] According to this embodiment, the displacement electrode substrates Ed1 to Ed8 of the detection element 50 are disposed at both ends in the second direction of the tilting structure 31. This can further increase the displacement of the displacement electrode substrates Ed1 to Ed8, thereby further improving the detection sensitivity of force or moment.

[0256] In addition, according to the present embodiment, the first strain body 30A is arranged on the negative side of the Y-axis direction relative to the center O of the force-bearing body 10, the second strain body 30B is arranged on the positive side of the X-axis direction, the third strain body 30C is arranged on the positive side of the Y-axis direction, and the fourth strain body 30D is arranged on the negative side of the X-axis direction. Moreover, the second direction of the first strain body 30A and the third strain body 30C is set to the X-axis direction, and the second direction of the second strain body 30B and the fourth strain body 30D is set to the Y-axis direction. Thus, when observed from the Z-axis direction, the first strain body 30A to the fourth strain body 30D can be arranged in a ring shape relative to the center O of the force-bearing body 10. In addition, the first strain body 30A to the fourth strain body 30D can be evenly arranged around the center O of the force-bearing body 10. Therefore, the detection accuracy of the force or moment in any direction can be improved, and the reduction in the detection accuracy of the force or moment due to the direction can be suppressed.

[0257] In addition, according to the present embodiment, the planar shapes of the force receiving body 10 and the support body 20 are circular. Thus, the force receiving body 10 and the support body 20 can be formed according to the shapes of the arm of the robot body 1100 and the end effector 1200.

[0258] According to the present embodiment, the tilting structure 31 of each strain body 30A to 30D is formed in a straight line along the second direction when viewed from the Z-axis direction. Thus, the tilting structure 31 can be formed in a plate shape. For example, the tilting structure 31 can be easily manufactured from a plate material.

[0259] (First Modification)

[0260] In addition, in the above-mentioned present embodiment, an example is described in which the spring constant of the first tilting body 35 with respect to the force in the Z-axis direction is equal to the spring constant of the second tilting body 36 with respect to the force in the Z-axis direction. However, this is not limited to this. Fig.11 As shown, the spring constant of the second tilting body 36 with respect to the force in the Z-axis direction may be different from the spring constant of the first tilting body 35 with respect to the force in the Z-axis direction. For example, the spring constant of the second tilting body 36 with respect to the force in the Z-axis direction may be smaller than the spring constant of the first tilting body 35 with respect to the force in the Z-axis direction. Fig.11 Yes means Figure 4 Front view of a deformation example of the strain body.

[0261] according to Fig.11 In the first modified example shown, when a force in the Z-axis direction acts on the tilting structure 31, the elastic deformation of the first tilting body 35 can be suppressed, and the elastic deformation of the second tilting body 36 can be increased. Therefore, the two ends 36a and 36b of the second tilting body 36 in the X-axis direction are greatly lifted, so that the displacement of the displacement electrode substrates Ed1 and Ed2 provided on the second tilting body 36 can be increased. Therefore, the detection sensitivity of the force or moment can be further improved.

[0262] exist Fig.11 In the figure, an example is shown in which the dimension of the first tilting body 35 in the Z-axis direction is increased in order to increase the above-mentioned spring constant of the first tilting body 35, but the method of increasing the spring constant of the first tilting body 35 is arbitrary. In addition, the above-mentioned spring constant of the second tilting body 36 may also be reduced. In addition, the spring constant of the second tilting body 36 with respect to the force in the Z-axis direction may be larger than the spring constant of the first tilting body 35 with respect to the force in the Z-axis direction. In this case, the fixed electrode substrates Ef1 and Ef2 may be arranged on the surface on the side of the support body 20 of the force-bearing body 10, and the displacement electrode substrates Ed1 and Ed2 may be arranged on the surface on the side of the force-bearing body 10 in the first tilting body 35 of the tilting structure 31.

[0263] (Second Modification)

[0264] In the above embodiment, the first tilting body 35 of the first strain body 30A has a flat surface on the side of the force receiving body 10, and the second tilting body 36 has a flat surface on the side of the support body 20. However, this is not limited to this. Fig.12 As shown, the surface of the first tilting body 35 on the side of the force receiving body 10 may be formed concave around the force receiving body side deformable body 33. In addition, the surface of the second tilting body 36 on the side of the support body 20 may be formed concave around the support body side deformable body 34. Fig.12 Yes means Figure 4 A top view of another modified example of the strain body.

[0265] More specifically, if Fig.12 As shown, the first tilting body 35 may also include a first force-bearing body side opposing surface 41 and a second force-bearing body side opposing surface 42 that are opposite to the force-bearing body 10. The force-bearing body side deformation body 33 is connected to the first force-bearing body side opposing surface 41. The second force-bearing body side opposing surface 42 is arranged on both sides of the first force-bearing body side opposing surface 41 in the X-axis direction. The first force-bearing body side opposing surface 41 is located at a position closer to the support body 20 side than the second force-bearing body side opposing surface 42. The first force-bearing body side opposing surface 41 is formed around the force-bearing body side deformation body 33. The first force-bearing body side opposing surface 41 is farther away from the force-bearing body 10 than the second force-bearing body side opposing surface 42. In this way, the surface of the first tilting body 35 on the force-bearing body 10 side is formed into a concave shape, and the concave portion is connected to the force-bearing body side deformation body 33. The first force-bearing body side facing surface 41 is formed throughout the central portion 35c of the first tilting body 35 and its vicinity, and around the force-bearing body side deformable body 33 ( Fig.12 In the example shown, the groove G is formed on both sides (corresponding to the two sides in the X-axis direction). The first force-bearing body side facing surface 41 and the second force-bearing body side facing surface 42 can also be formed in a flat shape. Fig.12 In the example shown, the force-bearing body side deformation body 33 and the first tilting body 35 of the tilting structure 31 are integrally formed in a continuous state, and the first force-bearing body side opposing surfaces 41 are provided on both sides of the force-bearing body side deformation body 33 .

[0266] Thus, according to the second modification, the first tilting body 35 includes a first force-bearing body side opposing surface 41 located closer to the support body 20 than the second force-bearing body side opposing surface 42, and the first force-bearing body side opposing surface 41 is connected to the force-bearing body side deformation body 33. Thus, the dimension of the force-bearing body side deformation body 33 in the Z-axis direction can be increased. Therefore, even if the dimension of the force-bearing body side deformation body 33 in the Z-axis direction is not reduced, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0267] In addition, when the first tilting body 35 includes a first force-bearing body side opposing surface 41 located closer to the support body 20 side than the second force-bearing body side opposing surface 42, although not shown, the surface of the second tilting body 36 on the support body 20 side can also be formed as a whole to be flat.

[0268] Similarly, the second tilting body 36 may also include a first support body side opposing surface 43 and a second support body side opposing surface 44 that are opposite to the support body 20. The support body side deformable body 34 is connected to the first support body side opposing surface 43. The second support body side opposing surface 44 is arranged on both sides of the first support body side opposing surface 43 in the X-axis direction. The first support body side opposing surface 43 is located closer to the force-bearing body 10 side than the second support body side opposing surface 44. The first support body side opposing surface 43 is formed around the support body side deformable body 34. The first support body side opposing surface 43 is farther away from the support body 20 than the second support body side opposing surface 44. In this way, the surface of the second tilting body 36 on the support body 20 side is formed into a concave shape, and the concave portion is connected to the support body side deformable body 34. The first support body side opposing surface 43 is formed throughout the central portion 36c of the second tilting body 36 and the portion near it, and around the support body side deformable body 34 ( Fig.12 In the example shown, the groove G is formed on both sides of the first support body side facing surface 43 and the second support body side facing surface 44. Fig.12 In the example shown, the support body side deformable body 34 and the second tilting body 36 of the tilting structure 31 are integrally formed in a continuous state, and the first support body side opposing surfaces 43 are provided on both sides of the support body side deformable body 34 .

[0269] Thus, according to the second modification, the second tilting body 36 includes a first support body side opposing surface 43 located closer to the force-bearing body 10 than the second support body side opposing surface 44, and the first support body side opposing surface 43 is connected to the support body side deformable body 34. Thus, it is possible to increase the dimension of the support body side deformable body 34 in the Z-axis direction. Therefore, even if the dimension of the support body side deformable body 34 in the Z-axis direction is not shortened, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0270] In addition, when the second tilting body 36 includes the first support body side facing surface 43 located closer to the force receiving body 10 than the second support body side facing surface 44, as shown in FIG. Fig.13 As shown, the surface of the first tilting body 35 on the side of the force-bearing body 10 can also be formed as a whole flat. Fig.13 In the example shown, the first tilting body 35 does not include the first force-bearing body side facing surface 41, and no groove G is formed around the force-bearing body side deformable body 33. The groove G is formed around the support body side deformable body 34 on the surface of the second tilting body 36 on the support body 20 side. Fig.13 Yes means Figure 4 A top view of another modified example of the strain body.

[0271] (Third Modification)

[0272] In the above embodiment, the displacement electrode substrates Ed1 and Ed2 of the first strain body 30A are provided on the surface of the second tilting body 36 of the tilting structure 31 on the side of the support body 20. However, this is not limited to this. Fig.14 As shown, the displacement electrode substrates Ed1 and Ed2 may be provided on the surface of the second tilting body 36 on the support body 20 side via the columnar member 45 . Fig.14 Yes means Figure 4 A partially enlarged front view of another modified example of the strain body.

[0273] exist Fig.14 In the example shown, the planar shape of the columnar member 45 may be smaller than the planar shape of the displacement electrode substrates Ed1|, Ed2. The planar shape of the columnar member 45 is arbitrary, and may be rectangular or circular. The columnar member 45 may be joined to the second tilting body 36 by an adhesive, or may be fixed to the second tilting body 36 by bolts or the like. The displacement electrode substrates Ed1, Ed2 may be joined to the columnar member 45 by an adhesive, or may be fixed to the columnar member 45 by bolts or the like.

[0274] Thus, according to the third modified example, the displacement electrode substrates Ed1 and Ed2 are provided on the second tilting body 36 via the columnar member 45. Thus, the detection of displacement can be stabilized. That is, when a force acts on the first strain body 30A, the second tilting body 36 of the tilting structure 31 is elastically deformed, and stress may be generated in the portion near the displacement electrode substrates Ed1 and Ed2 in the second tilting body 36. If such stress is generated, it will cause hysteresis and drift of the zero-point voltage (equivalent to the output voltage when no load is applied). In contrast, if Fig.14 As shown, by providing the displacement electrode substrates Ed1 and Ed2 on the second tilting body 36 via the columnar member 45, the influence of the stress generated in the second tilting body 36 on the displacement electrode substrates Ed1 and Ed2 can be reduced. Therefore, the detection of displacement can be stabilized.

[0275] (Fourth Modification)

[0276] In addition, if Fig.15 As shown, the displacement electrode substrates Ed1 and Ed2 may also be provided on the columnar member 45 via a reinforcing substrate 46 . Fig.15 Yes means Figure 4 A partially enlarged front view of another modified example of the strain body.

[0277] exist Fig.15In the example shown, the planar shape of the reinforcing substrate 46 may be equal to the planar shape of the displacement electrode substrates Ed1 and Ed2. The reinforcing substrate 46 may be bonded to the columnar member 45 by an adhesive, or may be fixed to the columnar member 45 by bolts or the like. In this case, the displacement electrode substrates Ed1 and Ed2 may be bonded to the reinforcing substrate 46 by an adhesive. The spring constant of the reinforcing substrate 46 with respect to the force acting in the Z-axis direction may be larger than the spring constant of the displacement electrode substrates Ed1 and Ed2 with respect to the force acting in the Z-axis direction. Thus, the deformation of the displacement electrode substrates Ed1 and Ed2 can be suppressed. The reinforcing substrate 46 may be made of a metal material, for example, in order to suppress deformation due to temperature changes, it may be made of the same material as the force receiving body 10, the support body 20, and the strain bodies 30A to 30D. In this case, the reinforcing substrate 46 may be made of an aluminum alloy or an iron alloy. The reinforcing substrate 46 may be made integrally with the columnar member 45. By using such a reinforcing substrate 46, the deformation of the displacement electrode substrates Ed1 and Ed2 can be suppressed. For example, even when the FPC substrate is used as the displacement electrode substrates Ed1 and Ed2, deformation of the displacement electrode substrates Ed1 and Ed2 can be effectively suppressed.

[0278] (Fifth Modification)

[0279] In addition, in the above-mentioned present embodiment, an example is described in which the first tilting body 35 and the second tilting body 36 extend linearly along the X-axis direction (equivalent to the second direction of the strain body 30A). However, this is not limited to this. As long as the first tilting body 35 and the second tilting body 36 are arranged on a plane including the Z-axis direction (equivalent to the first direction) and the X-axis direction and extend in a direction different from the Z-axis direction, they can be formed into any shape. For example, it can also be formed into Fig.16 Here, Fig.16 Yes means Figure 4 A front view of another deformation example of the strain body. In addition, Fig.16 The first strain body 30A shown is similar to Figure 7B The first strain body 30A shown in FIG. 1 is the same shape as the first strain body 30A when subjected to the force Fz on the negative side of the Z-axis direction, but Fig.16 , the first strain body 30A is shown in the figure in a state where no force or moment is applied.

[0280] exist Fig.16In the first strain body 30A shown, the central portion 35c of the first tilting body 35 in the X-axis direction is located closer to the support body 20 side (or the second tilting body 36 side) than the two end portions 35a and 35b in the X-axis direction. More specifically, the first tilting body 35 includes a first tilting body negative side portion 35d disposed at a position closer to the negative side in the X-axis direction than the central portion 35c, and a first tilting body positive side portion 35e disposed at a position closer to the positive side in the X-axis direction than the central portion 35c. The first tilting body negative side portion 35d is a portion connecting the negative side end portion 35a and the central portion 35c, and is inclined in a manner of advancing toward the negative side in the Z-axis direction toward the positive side in the X-axis direction. The first tilting body negative side portion 35d extends in a direction inclined relative to the Z-axis direction (equivalent to a direction different from the Z-axis direction) in the XZ plane. The first tilting body positive side portion 35e is a portion connecting the positive side end portion 35b and the central portion 35c, and is inclined in a manner that it moves toward the positive side in the X-axis direction and toward the positive side in the Z-axis direction. The first tilting body positive side portion 35e extends in a direction inclined relative to the Z-axis direction (equivalent to a direction different from the Z-axis direction) in the XZ plane. In this way, Fig.16 The first tilting body 35 in the illustrated modification is formed in a substantially V-shape.

[0281] The central portion 36c of the second tilting body 36 in the X-axis direction is located closer to the force-bearing body 10 (or the first tilting body 35) than the two end portions 36a and 36b in the X-axis direction. More specifically, the second tilting body 36 includes: a second tilting body negative side portion 36d disposed at a position closer to the negative side of the X-axis direction than the central portion 36c, and a second tilting body positive side portion 36e disposed at a position closer to the positive side of the X-axis direction than the central portion 36c. The second tilting body negative side portion 36d is a portion connecting the negative side end portion 36a and the central portion 36c, and is inclined in a manner of advancing toward the positive side of the Z-axis direction toward the positive side of the X-axis direction. The second tilting body negative side portion 36d extends in a direction inclined relative to the Z-axis direction (equivalent to a direction different from the Z-axis direction) in the XZ plane. The second tilting body positive side portion 36e is a portion connecting the positive side end portion 36b and the central portion 36c, and is inclined in a manner of advancing toward the negative side of the Z-axis direction toward the positive side of the X-axis direction. The second tilting body positive side portion 36e extends in a direction inclined relative to the Z-axis direction (equivalent to a direction different from the Z-axis direction) in the XZ plane. Fig.16 The second tilting body 36 in the illustrated modification is formed substantially in an inverted V shape.

[0282] Thus, according to Fig.16In the modified example shown, the center portion 35c of the first tilting body 35 in the X-axis direction is located closer to the support body 20 than the two end portions 35a and 35b in the X-axis direction. As a result, the center portion 35c of the first tilting body 35 in the X-axis direction can be moved away from the force-bearing body 10, thereby increasing the size of the force-bearing body side deformation body 33 in the Z-axis direction. Therefore, even if the size of the force-bearing body side deformation body 33 in the Z-axis direction is not reduced, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0283] In addition, according to Fig.16 In the modified example shown, the center portion 36c of the second tilting body 36 in the X-axis direction is located closer to the force-bearing body 10 than the two end portions 36a and 36b in the X-axis direction. As a result, the center portion 36c of the second tilting body 36 in the X-axis direction can be moved away from the support body 20, thereby increasing the dimension in the Z-axis direction of the support body side deformable body 34. Therefore, even without reducing the dimension in the Z-axis direction of the support body side deformable body 34, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0284] (Sixth Modification)

[0285] In addition, in the above-mentioned present embodiment, an example is described in which the first tilting body 35 and the second tilting body 36 extend linearly along the X-axis direction (equivalent to the second direction of the strain body 30A). However, this is not limited to this. As long as the first tilting body 35 and the second tilting body 36 are arranged on a plane including the Z-axis direction (equivalent to the first direction) and the X-axis direction and extend in a direction different from the Z-axis direction, they can be formed into any shape. For example, it can also be formed into Fig.17 Here, Fig.17 Yes means Figure 4 A front view of another deformation example of the strain body. In addition, Fig.17 The first strain body 30A shown is similar to Fig. 7A The first strain body 30A shown in FIG. 1 is similar in shape to the first strain body 30A when subjected to the force Fz on the positive side in the Z-axis direction, but Fig.17 , the first strain body 30A is shown in the figure in a state where no force or moment is applied.

[0286] exist Fig.17 In the first strain body 30A shown, the center portion 35c of the first tilting body 35 in the X-axis direction is located closer to the force-bearing body 10 (or the opposite side of the second tilting body 36) than the two end portions 35a and 35b in the X-axis direction. More specifically, the first tilting body negative side portion 35d of the first tilting body 35 is inclined in a manner that moves toward the positive side in the X-axis direction and toward the positive side in the Z-axis direction. The first tilting body positive side portion 35e is inclined in a manner that moves toward the positive side in the X-axis direction and toward the negative side in the Z-axis direction. In this way, Fig.17 The first tilting body 35 in the illustrated modification is formed substantially in an inverted V shape.

[0287] The center portion 36c of the second tilting body 36 in the X-axis direction is located closer to the support body 20 (or the opposite side of the first tilting body 35) than the two end portions 36a and 36b in the X-axis direction. More specifically, the second tilting body negative side portion 36d of the second tilting body 36 is inclined in a manner that moves toward the positive side in the X-axis direction and toward the negative side in the Z-axis direction. The second tilting body positive side portion 36e is inclined in a manner that moves toward the positive side in the X-axis direction and toward the positive side in the Z-axis direction. In this way, Fig.17 The second tilting body 36 in the illustrated modification is formed in a substantially V-shape.

[0288] Thus, according to Fig.17 In the modified example shown, the center portion 35c of the first tilting body 35 in the X-axis direction is located closer to the force receiving body 10 than the two ends 35a and 35b in the X-axis direction. Thus, the height of the force sensor 1 can be increased without increasing the dimension of the force receiving body side deformation body 33 in the Z-axis direction.

[0289] In addition, according to Fig.17 In the modified example shown, the center portion 36c of the second tilting body 36 in the X-axis direction is located closer to the support body 20 than the two ends 36a and 36b in the X-axis direction. Thus, the height of the force sensor 1 can be increased without increasing the Z-axis dimension of the support body side deformable body 34.

[0290] (Seventh Modification)

[0291] In addition, in the above-mentioned embodiment, the example in which the upper end of the force-bearing body side deformation body 33 is connected to the force-bearing body 10 is described. However, this is not limited to this. For example, Fig.18 As shown, the force-bearing body side deformation body 33 can also be connected to the force-bearing body 10 via the force-bearing body side pedestal 39. As a result, the force-bearing body side deformation body 33 can be stably installed on the force-bearing body 10 through the force-bearing body side pedestal 39. For example, the force-bearing body side pedestal 39, the force-bearing body side deformation body 33 and the first tilting body 35 can also be formed integrally, in which case, the force-bearing body side pedestal 39 can also be fixed to the force-bearing body 10 by bolts or adhesives. Alternatively, the force-bearing body side pedestal 39 and the force-bearing body side deformation body 33 can also be formed separately and fixed to each other by bolts or adhesives.

[0292] Likewise, the lower end of the support body side deformation body 34 is not limited to being connected to the support body 20, for example, Fig.18As shown, the support body side deformable body 34 may also be connected to the support body 20 via the support body side pedestal 40. Thus, the support body side deformable body 34 can be stably mounted on the support body 20 using the support body side pedestal 40. For example, the support body side pedestal 40, the support body side deformable body 34, and the second tilting body 36 may also be formed integrally, in which case the support body side pedestal 40 may also be fixed to the support body 20 by bolts or adhesives. Alternatively, the support body side pedestal 40 and the support body side deformable body 34 may also be formed separately and fixed to each other by bolts or adhesives.

[0293] Furthermore, the force-bearing body side pedestal 39, the force-bearing body side deformable body 33, the tilting structure 31, the supporting body side deformable body 34, and the supporting body side pedestal 40 may be formed integrally. In this case, the force-bearing body side pedestal 39 may be fixed to the force-bearing body 10 by bolts or adhesives, and the supporting body side pedestal 40 may be fixed to the supporting body 20 by bolts or adhesives.

[0294] In addition, the load-bearing body side pedestal 39 and the supporting body side pedestal 40 are not limited to applications. Fig.18 The first strain body 30A shown can also be applied to Fig.11 Among the first strain body 30A and other strain bodies 30A to 30D shown.

[0295] (Eighth Modification)

[0296] In the above embodiment, the example in which the plane shape of the force receiving body 10 is circular and the tilting structure 31 is formed in a linear shape along the second direction when viewed from the Z-axis direction is described. However, the present invention is not limited thereto.

[0297] For example, Fig.19 As shown, the tilting structure 31 may be formed in a curved shape when viewed from the Z-axis direction. Fig.19 Yes means Figure 3 FIG. 1 is a top view of another modified example of the force sensor. In this case, the tilting structure 31 may be formed into a curved shape that is concentric with the force-bearing body 10. That is, the tilting structures 31 of the four strain bodies 30A to 30D may be arranged in a circular ring shape. In addition, when the tilting structures 31 of each strain body 30A to 30D are formed into a curved shape, the planar shape of the force-bearing body 10 may also be as described later. Fig. 20 In this case, the planar shape of the support body 20 may also be a rectangle.

[0298] In addition, for example, Fig. 20As shown, the plane shape of the force-bearing body 10 may also be a rectangle. In this case, the plane shape of the supporting body 20 may also be a rectangle. Thus, the force-bearing body 10 and the supporting body 20 can be formed according to the configuration of the strain bodies 30A to 300, so that a force sensor 1 with high space efficiency can be obtained. In addition, the plane cross-sectional shape of the outer casing 80 may also be a rectangular frame shape. That is, at least one of the plane shape of the force-bearing body 10 and the plane shape of the supporting body 20 may also be a rectangle. In this case, one of the plane shape of the force-bearing body 10 and the plane shape of the supporting body 20 may be a rectangle, while the other may be a shape other than a rectangle. In addition, the plane shape of the force-bearing body 10 may also be a polygon, an ellipse, or other shapes other than a rectangle. The same is true for the supporting body 20. The plane cross-sectional shape of the outer casing 80 may also be a polygonal frame, an elliptical frame, or other shapes corresponding to the plane shape of the force-bearing body 10 and the plane shape of the supporting body 20.

[0299] (Ninth Modification)

[0300] In addition, in the above-mentioned embodiment, the example in which the detection element 50 is configured as an element for detecting electrostatic capacitance is described. However, the present invention is not limited thereto, and the detection element 50 may also be configured as a strain gauge for detecting strain generated by the force or moment applied to the load-bearing body 10. For example, Fig.21A As shown, the detection element 50 may also have a strain gauge provided on the first strain body 30A. Fig.21A Yes means Figure 4 A front view of a strain body of a modified example of a detection element. Fig.21B Yes means Fig.21A A top view of the detection element. Fig. 21C Yes means Fig.21B A top view of a modified example of . Fig.22A It means setting Fig.21A FIG. 1 is a diagram of a Wheatstone bridge circuit for a detection element of a first tilting body. Fig. 22B This is a diagram showing a Wheatstone bridge circuit for a detection element provided in the second tilting body shown in FIG. 21|A . Fig.23A Yes means Fig.21A A schematic diagram showing the deformation state of the strain body when the strain body is subjected to a force on the positive side in the X-axis direction. Fig. 23B Yes means Fig.21A A schematic diagram showing the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction.

[0301] like Fig.21A As shown, strain gauges R1 to R8 may also be disposed in the tilting structure 31. Fig.23A and Fig. 23B As shown, the dimensions of the connecting bodies 37 and 38 in the X-axis direction of the tilting structure 31 of this embodiment can also be smaller than Figure 4 The dimensions of the connecting bodies 37 and 38 of the tilting structure 31 in the X-axis direction are larger. In other words, the spring constants of the connecting bodies 37 and 38 of the present embodiment with respect to the force in the X-axis direction may be larger than Figure 4 The spring constant of the connectors 37 and 38 in the X-axis direction is large.

[0302] More specifically, the strain gauges R1 to R4 may also be installed on the surface of the first tilting body 35 of the tilting structure 31 on the side of the force-bearing body 10. For example, two strain gauges R1 and R2 may be installed on the upper surface of the first tilting body negative side portion 35d of the first tilting body 35, and two strain gauges R3 and R4 may be installed on the upper surface of the first tilting body positive side portion 35e. In the first tilting body negative side portion 35d, one strain gauge R1 may be located on the side of the end portion 35a on the negative side of the X-axis direction (or the side of the connecting body 37), and the other strain gauge R2 may be located on the side of the central portion 35c (or the side of the deformation body 33 on the force-bearing body side). In the first tilting body positive side portion 35e, one strain gauge R3 may be located on the side of the central portion 35c (or the side of the deformation body 33 on the force-bearing body side), and the other strain gauge R4 may be located on the side of the end portion 35b on the positive side of the X-axis direction (or the side of the connecting body 38). Fig.21B As shown, the four strain gauges R1 to R4 provided in the first tilting body 35 may be located at the center of the first tilting body 35 in the Y-axis direction.

[0303] In addition, if Fig.22A As shown, the detection circuit 60 may also have a Wheatstone bridge circuit 61 that outputs an electrical signal based on the detection results of the four strain gauges R1 to R4 installed on the first tilting body 35. The Wheatstone bridge circuit 61 is configured such that a bridge voltage as an electrical signal corresponding to the strain detected by each strain gauge R1 to R4 is generated between output terminals T11 and T12 by applying a predetermined voltage from a bridge voltage source E1. In the Wheatstone bridge circuit 61, the strain gauge R1 is opposed to the strain gauge R3, and the strain gauge R2 is opposed to the strain gauge R4. Thus, as described later, the force Fx in the X-axis direction can be detected, thereby preventing the force Fz in the Z-axis direction from affecting the detection of the force Fx. That is, the force Fx as the main axis sensitivity can be detected, thereby preventing the generation of other axis sensitivities.

[0304] In addition, if Fig.21AAs shown, strain gauges R5 to R8 may also be installed on the surface of the second tilting body 36 of the tilting structure 31 on the side of the support body 20. For example, two strain gauges R5 and R6 may be installed on the lower surface of the second tilting body negative side portion 36d of the second tilting body 36, and two strain gauges R7 and R8 may be installed on the lower surface of the second tilting body positive side portion 36e. In the second tilting body negative side portion 36d, one strain gauge R5 may be located on the side of the end portion 36a on the negative side in the X-axis direction (or the connecting body 37 side), and the other strain gauge R6 may be located on the side of the central portion 36c (or the side of the supporting body side deformable body 34). In the second tilting body positive side portion 36e, one strain gauge R7 may be located on the side of the central portion 36c (or the side of the supporting body side deformable body 34), and the other strain gauge R8 may be located on the side of the end portion 36b on the positive side in the X-axis direction (or the side of the connecting body 38). The strain gauges R5 to R8 provided on the second tilting body 36 may also be arranged on the side of the second tilting body 36. Fig.21B The strain gauges R1 to R4 provided on the first tilting body 35 shown are arranged in the same manner.

[0305] In addition, if Fig. 22B As shown, the detection circuit 60 may also include a Wheatstone bridge circuit 62 that outputs an electrical signal based on the detection results of the four strain gauges R5 to R8 installed on the second tilting body 36. The Wheatstone bridge circuit 62 is configured such that a bridge voltage as an electrical signal corresponding to the strain detected by each strain gauge R5 to R8 is generated between output terminals T21 and T22 by applying a predetermined voltage from a bridge voltage source E2. In the Wheatstone bridge circuit 62, the strain gauge R5 is opposed to the strain gauge R8, and the strain gauge R6 is opposed to the strain gauge R7. Thus, as described later, the force Fz in the Z-axis direction can be detected, and the force Fx in the X-axis direction can be prevented from affecting the detection of the force Fz. That is, the force Fz as the main axis sensitivity can be detected, and the generation of other axis sensitivities can be prevented.

[0306] In addition, the strain gauges R5 to R8 provided on the second tilting body 36 may also be provided on the first tilting body 35. That is, eight strain gauges R1 to R8 may also be provided on the first tilting body 35. In this case, Fig. 21C As shown, two rows of strain gauges along the X-axis direction may also be formed on the surface of the first tilting body 35 on the side of the force-bearing body 10. As a result, it is not necessary to install the eight strain gauges R1 to R8 on the surface of the second tilting body 36 on the side of the support body 20, and they can be installed only on the surface of the first tilting body 35 on the side of the force-bearing body 10, thereby achieving efficient manufacturing operations. Alternatively, the eight strain gauges R1 to R8 may be set on the surface of the second tilting body 36 on the side of the support body 20. In this case, it is not necessary to install them on the surface of the first tilting body 35 on the side of the force-bearing body 10, and they can be installed only on the surface of the second tilting body 36 on the side of the support body 20, thereby achieving efficient manufacturing operations.

[0307] With such a structure, when the force-bearing body 10 is subjected to a force or a moment, the tilting structure 31 and the supporting body side deformation body 34 are mainly elastically deformed, but the first tilting body 35 and the second tilting body 36 of the tilting structure 31 are also elastically deformed. When the first tilting body 35 is elastically deformed, the first tilting body 35 generates strain, which is detected by the strain gauges R1 to R4 provided on the first tilting body 35.

[0308] For example, when a force Fx acts on the positive side in the X-axis direction, Figure 6 As shown in FIG. 1 , the force-bearing body side deformation body 33 and the supporting body side deformation body 34 of the tilting structure 31 are inclined relative to the Z-axis direction, and the tilting structure 31 can tilt as a whole. Fig.23A As shown, the first tilting body 35 and the second tilting body 36 are elastically deformed in a bending manner. Compressive stress is generated in the portion on the side of the end 35a on the negative side of the first tilting body 35d in the negative side portion 35d of the first tilting body, and the resistance value of the strain gauge R1 located in this portion decreases in accordance with the compressive strain. Tensile stress is generated in the portion on the side of the central portion 35c in the negative side portion 35d of the first tilting body, and the resistance value of the strain gauge R2 located in this portion increases in accordance with the tensile strain. In addition, compressive stress is generated in the portion on the side of the central portion 35c in the positive side portion 35e of the first tilting body, and the resistance value of the strain gauge R3 located in this portion decreases in accordance with the compressive strain. Tensile stress is generated in the portion on the side of the end 35b on the positive side of the first tilting body 35e in the positive side portion 35e of the first tilting body, and the resistance value of the strain gauge R4 located in this portion increases in accordance with the tensile strain.

[0309] In this way, the resistance value of strain gauges R1 to R4 changes from Fig.22A The output terminals T11 and T12 of the Wheatstone bridge circuit 61 shown output an electric signal indicating the force Fx in the X-axis direction acting on the first strain body 30A.

[0310] In the strain gauges R5 to R8 provided in the second tilting body 36, stresses in the opposite direction to those in the strain gauges R1 to R4 provided in the first tilting body 35 are generated, and the resistance values ​​change. Fig. 22B The output terminals T21 and T22 of the Wheatstone bridge circuit 62 shown output electric signals.

[0311] In addition, for example, when a force Fz acts toward the positive side in the Z-axis direction, Fig. 7A As shown in FIG. 1 , the first tilting body 35 and the second tilting body 36 of the tilting structure 31 are elastically deformed. Fig. 23BAs shown, the first tilting body 35 and the second tilting body 36 are elastically deformed in a bending manner. Compressive stress is generated in the portion on the side of the end 36a on the negative side of the second tilting body 36d in the X-axis direction, and the resistance value of the strain gauge R5 located in this portion decreases in accordance with the compressive strain. Tensile stress is generated in the portion on the side of the central portion 36c in the negative side portion 36d of the second tilting body, and the resistance value of the strain gauge R6 located in this portion increases in accordance with the tensile strain. In addition, tensile stress is generated in the portion on the side of the central portion 36c in the positive side portion 36e of the second tilting body, and the resistance value of the strain gauge R7 located in this portion increases in accordance with the tensile strain. Compressive stress is generated in the portion on the side of the end 36b on the positive side of the second tilting body 36e in the X-axis direction, and the resistance value of the strain gauge R8 located in this portion decreases in accordance with the compressive strain.

[0312] In this way, the resistance value of strain gauges R5 to R8 changes from Fig. 22B The output terminals T21 and T22 of the Wheatstone bridge circuit 62 shown output an electric signal indicating the force Fz in the Z-axis direction acting on the first strain body 30A.

[0313] In the strain gauges R1 to R4 provided in the first tilting body 35, stresses in the same direction as those in the strain gauges R5 to R8 provided in the second tilting body 36 are generated, and the resistance values ​​change. Fig.22A The output terminals T11 and T12 of the Wheatstone bridge circuit 61 shown output electric signals.

[0314] By using the settings in Fig.21A The strain gauges R1 to R8 in the first strain body 30A shown in FIG. 1 can detect the force Fx in the X-axis direction and the force Fz in the Z-axis direction, thereby detecting the biaxial components of the force. Figure 5 Each of the strain bodies 30A to 30D shown is provided with a strain gauge, and can detect forces Fx, Fy, and Fz and moments Mx, My, and Mz, thereby being able to detect six-axis components of force.

[0315] In addition, Fig.21A , Fig.23A as well as Fig. 23B In the example in which the strain gauges R1 to R4 are mounted on the surface of the first tilting body 35 on the side of the force-bearing body 10, the present invention is not limited thereto. Fig.23A and Fig. 23BAs shown by the dotted line, the strain gauges R1 to R4 can also be installed on the surface of the first tilting body 35 on the support body 20 side (or the surface of the second tilting body 36 side). In this case, the relationship between compression and tension of the strain gauges R1 to R4 is opposite, but the force Fz in the Z-axis direction can also be detected. In addition, an example in which the strain gauges R5 to R8 are installed on the surface of the second tilting body 36 on the support body 20 side is described. However, this is not limited to this. Fig.23A and Fig. 23B As shown by the dotted line, strain gauges R5 to R8 may also be installed on the surface of the second tilting body 36 on the side of the force receiving body 10 (or the surface on the side of the first tilting body 35). In this case, the relationship between compression and tension of the strain gauges R5 to R8 is opposite, but the force Fx in the X-axis direction can be detected in the same manner.

[0316] In addition, FIG. 21A to FIG. 23B In the example shown, the four strain gauges R1 to R4 installed on the first tilting body 35 constitute Fig.22A The example of using the Wheatstone bridge circuit 61 shown in the figure to detect the force Fx in the X-axis direction is described. However, this is not limited to this, and the force Fz in the Z-axis direction can also be detected by using four strain gauges R1 to R4. In this case, for example, Fig.22A In the Wheatstone bridge circuit 61 shown in FIG. 1 , the strain gauge R3 and the strain gauge R4 may also be exchanged. FIG. 21A to FIG. 23B In the example shown, the four strain gauges R5 to R8 installed on the second tilting body 36 constitute Fig. 22B The example of using the Wheatstone bridge circuit 62 shown in the figure to detect the force Fz in the Z-axis direction is described. However, it is not limited to this, and the four strain gauges R5 to R8 can also be used to detect the force Fx in the X-axis direction. In this case, for example, Fig. 22B In the Wheatstone bridge circuit 62 shown, the strain gauge R7 and the strain gauge R8 may also be swapped.

[0317] (Second Embodiment)

[0318] Next, use Figure 24 to Figure 23B A force sensor according to a second embodiment of the present invention will be described.

[0319] exist Figures 24 to 28 The second embodiment shown in the figure is mainly different in that the force-bearing body and the first tilting body are connected by two force-bearing body side deformation bodies, and the support body side deformation body connects the first tilting body and the support body. Figures 1 to 23B The first embodiment shown is substantially the same. Figures 24 to 28 In, with Figures 1 to 23B The same components as those in the first embodiment are denoted by the same reference numerals, and detailed description thereof will be omitted.

[0320] First, refer to Fig.24 The force sensor 1 according to the present embodiment will be described. Fig.24 It is a front view showing a strain body of the force sensor according to the second embodiment.

[0321] In the force sensor 1 of this embodiment, as Fig.24 As shown, the tilting structure 31 of the first strain body 30A is composed of a first tilting body 35. The tilting structure 31 of this embodiment does not have Figure 4 The second tilting body 36, connecting bodies 37, 38 as shown. In the present embodiment, the first tilting body 35 extends in the X-axis direction. More specifically, it extends linearly from one end 35a in the X-axis direction to the other end 35b of the first tilting body 35, and the central portion 35c in the X-axis direction of the first tilting body 35 and the two end portions 35a, 35b are located at the same position in the Z-axis direction. Moreover, the surface of the first tilting body 35 on the side of the force-bearing body 10 is formed as a whole to be flat. In addition, the surface of the first tilting body 35 on the side of the force-bearing body 20 is formed as a whole to be flat.

[0322] The force-bearing body 10 and the first tilting body 35 are connected by two force-bearing body side deformation bodies 33 extending in the Z-axis direction. The two force-bearing body side deformation bodies 33 are arranged at different positions in the X-axis direction. Fig.24 In the example shown, two force-bearing body side deformation bodies 33 are located at two ends 35a and 35b in the X-axis direction of the first tilting body 35. More specifically, each force-bearing body side deformation body 33 is connected to the force-bearing body 10 at its upper end and to the first tilting body 35 at its lower end.

[0323] The support body side deformable body 34 is located between the two force-bearing body side deformable bodies 33 in the X-axis direction. More specifically, the support body side deformable body 34 is located at the center of the first tilting body 35 in the X-axis direction and is connected to the central portion 35c of the first tilting body 35. More specifically, the lower end of the support body side deformable body 34 is connected to the support body 20, and the upper end is connected to the first tilting body 35.

[0324] In this way, the first strain body 30A is formed symmetrically with respect to the support body side deformation body 34 in the X-axis direction.

[0325] Next, refer to Figures 25 to 26B A method of applying force or moment to the force sensor 1 according to the present embodiment configured as described above and detecting the force or moment will be described. Fig.25 It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side of the X-axis direction. Fig.26A It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the positive side in the Z-axis direction. Fig.26B It is schematically indicated Fig.24 The front view of the deformation state of the strain body when the strain body is subjected to a force on the negative side of the Z-axis direction.

[0326] Here, taking the first strain body 30A as an example, changes in the capacitance values ​​of the first capacitive element C1 and the second capacitive element C2 when the force Fx in the X-axis direction, the force Fy in the Y-axis direction, and the force Fz in the Z-axis direction are applied are described.

[0327] (When the effect is +Fx)

[0328] When a force Fx acts on the first strain body 30A toward the positive side in the X-axis direction, as shown in FIG. Fig.25 As shown, the two force-bearing body side deformation bodies 33 and the supporting body side deformation body 34 of the first strain body 30A are elastically deformed in the X-axis direction. The first tilting body 35 of the tilting structure 31 of this embodiment is connected to the force-bearing body 10 via two force-bearing body side deformation bodies 33, and is connected to the supporting body 20 via one supporting body side deformation body 34. Therefore, compared with the force-bearing body side deformation body 33, the supporting body side deformation body 34 can be elastically deformed to a greater extent. More specifically, the upper end of the supporting body side deformation body 34 is displaced toward the positive side of the X-axis direction to a greater extent than the lower end. As a result, Fig.25 As shown, the two force-bearing body side deformation bodies 33 and the first tilting body 35 can tilt together with the force-bearing body 10 as a whole. Fig.25 Although not shown in the figure, each force-bearing body side deformable body 33 is also elastically deformed, and the upper end of each force-bearing body side deformable body 33 can be displaced further to the positive side in the X-axis direction than the lower end. In this way, the support body side deformable body 34 of the first strain body 30A can be elastically deformed mainly by the force Fx on the positive side in the X-axis direction. In this case, the end 35a on the negative side in the X-axis direction of the first tilting body 35 rises, and the end 35b on the positive side in the X-axis direction falls.

[0329] As a result, the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1, and the capacitance value of the first capacitive element C1 decreases. In addition, the second displacement electrode substrate Ed2 moves closer to the second fixed electrode substrate Ef2, and the capacitance value of the second capacitive element C2 increases.

[0330] (When -Fx is used)

[0331] When a force Fx acts on the first strain body 30A toward the negative side in the X-axis direction, although not shown in the figure, the same Fig.25 That is, the electrostatic capacitance value of the first capacitive element C1 increases, and the electrostatic capacitance value of the second capacitive element C2 decreases.

[0332] (When the effect is +Fy)

[0333] When a force Fy is applied to the first strain body 30A toward the positive side of the Y-axis direction (not shown), the first strain body 30A rotates around the X-axis (equivalent to the counterclockwise direction toward the positive side of the X-axis direction). As described above, the first capacitor element C1 and the second capacitor element C2 are arranged at the same position in the Y-axis direction. Therefore, even if the first strain body 30A rotates around the X-axis, the electrostatic capacitance value increases in a part of the first capacitor element C1, while the electrostatic capacitance value decreases in another part of the first capacitor element C1. Therefore, from the perspective of the first capacitor element C1 as a whole, there will be no change in the electrostatic capacitance value. Similarly, from the perspective of the second capacitor element C2 as a whole, there will be no change in the electrostatic capacitance value.

[0334] (When the effect is -Fy)

[0335] The same is true when the force Fy acts on the first strain body 30A toward the negative side in the Y-axis direction. The capacitance value does not change when viewed from the first capacitive element C1 as a whole and the second capacitive element C2 as a whole.

[0336] (When the effect is +Fz)

[0337] In addition, when a force Fz acts on the first strain body 30A toward the positive side in the Z-axis direction, as shown in FIG. Fig.26A As shown in FIG. 1 , the first tilting body 35 of the tilting structure 31 is elastically deformed. More specifically, while the first tilting body 35 is elastically deformed, the two force-bearing body side deformation bodies 33 are pulled up toward the positive side in the Z-axis direction. Fig.26A As shown, the first tilting body 35 is pulled up by the force-bearing body side deforming body 33 at its two ends 35a and 35b in the X-axis direction. On the other hand, the center portion 35c in the X-axis direction of the first tilting body 35 is connected to the supporting body side deforming body 34, and is not substantially pulled up. Therefore, the first tilting body 35 is elastically deformed in a downwardly convex (for example, V-shaped) manner.

[0338] like Fig.26A As shown, when the first tilting body 35 is elastically deformed, the first displacement electrode substrate Ed1 moves away from the first fixed electrode substrate Ef1. Therefore, the electrostatic capacitance value of the first capacitive element C1 decreases. In addition, the second displacement electrode substrate Ed2 moves away from the second fixed electrode substrate Ef2. Therefore, the electrostatic capacitance value of the second capacitive element C2 decreases.

[0339] (When -Fz is used)

[0340] When a force Fz acts on the first strain body 30A toward the negative side in the Z-axis direction, as shown in FIG. Fig.26B As shown in FIG. 1 , the first tilting body 35 of the tilting structure 31 is elastically deformed. More specifically, while the first tilting body 35 is elastically deformed, the force-bearing body side deformation body 33 is pressed downward toward the negative side in the Z-axis direction. Fig.26B As shown, the first tilting body 35 is pressed down by the force-bearing body side deforming body 33 at its two end portions 35a and 35b in the X-axis direction. On the other hand, the center portion 35c in the X-axis direction of the first tilting body 35 is connected to the supporting body side deforming body 34, and is not substantially pressed down. Therefore, the first tilting body 35 is elastically deformed in a manner of convexly protruding upward (e.g., inverted V-shape).

[0341] like Fig.26B As shown, when the first tilting body 35 is elastically deformed, the first displacement electrode substrate Ed1 approaches the first fixed electrode substrate Ef1. Therefore, the electrostatic capacitance value of the first capacitive element C1 increases. In addition, the second displacement electrode substrate Ed2 approaches the second fixed electrode substrate Ef2. Therefore, the electrostatic capacitance value of the second capacitive element C2 increases.

[0342] Thus, according to the present embodiment, the force-bearing body 10 and the first tilting body 35 are connected by two force-bearing body side deformation bodies 33, and the supporting body side deformation body 34 connects the first tilting body 35 and the supporting body 20. Thus, it is possible to reduce the dimension of the tilting structure 31 in the Z-axis direction. Therefore, it is possible to reduce the height of the force sensor 1, thereby achieving compactness.

[0343] In addition, according to the present embodiment, the two force-bearing body side deformation bodies 33 of the first strain body 30A are located at the two ends 35a and 35b in the X-axis direction of the first tilting body 35. Thus, the first tilting body 35 can be easily elastically deformed by the action of the force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be easily increased, thereby improving the detection sensitivity of the force or moment.

[0344] In addition, according to the present embodiment, the support body side deformable body 34 of the first strain body 30A is located between the two force-bearing body side deformable bodies 33 in the X-axis direction. Thus, the first tilting body 35 can be easily elastically deformed by the force in the Z-axis direction. Therefore, the displacement of the displacement electrode substrates Ed1 to Ed8 can be easily increased, thereby improving the detection sensitivity of the force or moment.

[0345] In addition, according to the present embodiment, the strain bodies 30A to 30D are formed symmetrically in the second direction with respect to the support body side deformation body 34. Thus, when a force in the Z-axis direction acts, the displacement of the first displacement electrode substrate Ed1 and the displacement of the second displacement electrode substrate Ed2 can be made equal. Therefore, calculation of force or moment can be facilitated.

[0346] (Tenth Modification)

[0347] In the above-mentioned embodiment, an example is described in which the surface of the first tilting body 35 of the first strain body 30A on the support body 20 side is formed flat as a whole. However, this is not limited to this. Fig. 27 As shown, the surface of the first tilting body 35 on the support body 20 side may be formed in a concave shape around the support body side deformable body 34 . Fig. 27 Yes means Fig.24 Top view of a deformation example of a strain body.

[0348] More specifically, the second tilting body 35 may also include a first support body side opposing surface 47 and a second support body side opposing surface 48 that are opposite to the support body 20. The support body side deformable body 34 is connected to the first support body side opposing surface 47. The second support body side opposing surface 48 is arranged on both sides of the first support body side opposing surface 47 in the X-axis direction. The first support body side opposing surface 47 is located closer to the force-bearing body 10 side than the second support body side opposing surface 48. The first support body side opposing surface 47 is formed around the support body side deformable body 34. The first support body side opposing surface 47 is farther away from the support body 20 than the second support body side opposing surface 48. In this way, the surface of the first tilting body 35 on the support body 20 side is formed into a concave shape, and the concave portion is connected to the support body side deformable body 34. The first support body side opposing surface 47 is formed throughout the central portion 35c of the first tilting body 35 and the portion near it, and around the support body side deformable body 34 ( Fig. 27 In the example shown, grooves G are formed on both sides of the first support body side facing surface 47 and the second support body side facing surface 48. Fig. 27 In the example shown, the support body side deformable body 34 and the first tilting body 35 of the tilting structure 31 are integrally formed in a continuous state, and the first support body side opposing surfaces 47 are provided on both sides of the support body side deformable body 34 .

[0349] Thus, according to the tenth modification, the first tilting body 35 includes the first support body side opposing surface 47 located closer to the force-bearing body 10 than the second support body side opposing surface 48, and the first support body side opposing surface 47 is connected to the support body side deformable body 34. Thus, it is possible to increase the dimension of the support body side deformable body 34 in the Z-axis direction. Therefore, even if the dimension of the support body side deformable body 34 in the Z-axis direction is not shortened, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0350] (Eleventh Modification)

[0351] In addition, in the above-mentioned present embodiment, an example is described in which the first tilting body 35 extends linearly along the X-axis direction (equivalent to the second direction of the strain body 30A). However, this is not limited to this. As long as the first tilting body 35 and the second tilting body 36 are arranged on a plane including the Z-axis direction (equivalent to the first direction) and the X-axis direction and extend in a direction different from the Z-axis direction, they can be formed into any shape. For example, it can also be formed into Fig.28 Here, Fig.28 Yes means Fig.24 A front view of another deformation example of the strain body. In addition, Fig.28 The strain body 30A shown is as follows Fig.26B The shape of the strain body when subjected to the negative force Fz in the Z-axis direction is the same as that shown in the figure, but Fig.28 , the strain body 30A is shown in the figure in a state where no force or moment is applied.

[0352] exist Fig.28 In the strain body 30A shown, the central portion 35c of the first tilting body 35 in the X-axis direction is located at a position closer to the force-bearing body 10 side than the two end portions 35a and 35b in the X-axis direction. More specifically, the first tilting body 35 includes a first tilting body negative side portion 35d configured on the negative side of the X-axis direction, and a first tilting body positive side portion 35e configured on the positive side of the X-axis direction. The first tilting body negative side portion 35d is a portion connecting the negative side end portion 35a and the central portion 35c, and is tilted in a manner that advances toward the positive side of the X-axis direction and toward the positive side of the Z-axis direction. The first tilting body negative side portion 35d extends in a direction inclined relative to the Z-axis direction (equivalent to a direction different from the Z-axis direction) in the XZ plane. The first tilting body positive side portion 35e is a portion connecting the positive side end portion 35b and the central portion 35c, and is tilted in a manner that advances toward the negative side of the Z-axis direction and toward the positive side of the X-axis direction. The first tilting body positive side portion 35e extends in a direction inclined relative to the Z-axis direction (corresponding to a direction different from the Z-axis direction) in the XZ plane. Fig.28 The first tilting body 35 in the illustrated modification is formed substantially in an inverted V shape.

[0353] Thus, according to Fig.28 In the modified example shown, the two ends 35a and 35b of the first tilting body 35 in the X-axis direction are located closer to the support body 20 than the center portion 35c in the X-axis direction. As a result, the two ends 35a and 35b of the first tilting body 35 in the X-axis direction can be moved away from the force-bearing body 10, thereby increasing the size of the force-bearing body side deformation body 33 in the Z-axis direction. Therefore, even if the size of the force-bearing body side deformation body 33 in the Z-axis direction is not reduced, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0354] In addition, according toFig.28 In the modified example shown, the center portion 35c of the first tilting body 35 in the X-axis direction is located closer to the force-bearing body 10 than the two end portions 35a and 35b in the X-axis direction. As a result, the center portion 35c of the first tilting body 35 in the X-axis direction can be moved away from the support body 20, thereby increasing the size of the support body side deformable body 34 in the Z-axis direction. Therefore, even if the size of the support body side deformable body 34 in the Z-axis direction is not reduced, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0355] In addition, the shape of the first tilting body 35 is not limited to Fig.28 In the example shown, for example, although not shown, the center portion 35c of the first tilting body 35 in the X-axis direction may be located closer to the support body 20 than the two end portions 35a and 35b in the X-axis direction. In this case, the first tilting body 35 is formed roughly in a V-shape. In this way, the height of the force sensor 1 can be increased without increasing the dimension of the force-bearing body side deformation body 33 in the Z-axis direction or the dimension of the support body side deformation body 34 in the Z-axis direction.

[0356] (Twelfth Modification)

[0357] In addition, in the above-mentioned embodiment, the example in which the force-bearing body side deformation body 33 extends along the Z-axis direction is described. However, this is not limited to this. Fig.29 and Fig.30 As shown, the force-bearing body side deformation body 33 may also be inclined relative to the Z-axis direction when viewed from the Y-axis direction. Fig.29 Yes means Fig.24 A top view of another modified example of the strain body. Fig.30 Yes means Fig.24 A top view of another modified example of the strain body.

[0358] exist Fig.29 In the deformation example shown, the two force-bearing body side deformation bodies 33 are respectively inclined relative to the Z-axis direction in a manner of moving away from each other toward the force-bearing body 10. More specifically, the force-bearing body side deformation body 33 located on the negative side in the X-axis direction is inclined relative to the Z-axis direction in a manner in which the upper end is located closer to the negative side in the X-axis direction than the lower end. On the other hand, the force-bearing body side deformation body 33 located on the positive side in the X-axis direction is inclined relative to the Z-axis direction in a manner in which the upper end is located closer to the positive side in the X-axis direction than the lower end. In this way, the force-bearing body 10, the two force-bearing body side deformation bodies 33 and the first tilting body 35 are configured in an inverted trapezoidal shape when viewed from the Y-axis direction.

[0359] Thus, according to Fig.29 In the modified example shown, even without reducing the lengthwise dimension of the force receiving body side deformation body 33, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0360] exist Fig.30 In the deformation example shown, the two force-bearing body side deformation bodies 33 are respectively inclined relative to the Z-axis direction in a manner of approaching each other toward the force-bearing body 10. More specifically, the force-bearing body side deformation body 33 located on the negative side in the X-axis direction is inclined relative to the Z-axis direction in a manner in which the upper end is located closer to the positive side of the X-axis direction than the lower end. On the other hand, the force-bearing body side deformation body 33 located on the positive side in the X-axis direction is inclined relative to the Z-axis direction in a manner in which the upper end is located closer to the negative side of the X-axis direction than the lower end. In this way, the force-bearing body 10, the two force-bearing body side deformation bodies 33 and the first tilting body 35 are configured in a trapezoidal shape when viewed from the Y-axis direction.

[0361] Thus, according to Fig.30 In the modified example shown, even without reducing the lengthwise dimension of the force receiving body side deformation body 33, the height of the force sensor 1 can be reduced, thereby achieving compactness.

[0362] (Thirteenth Modification)

[0363] In addition, in the above-mentioned embodiment, the upper end of each force-bearing body side deformation body 33 is connected to the force-bearing body 10. However, it is not limited to this. For example, Fig.31 As shown, each force-bearing body side deformation body 33 can also be connected to the force-bearing body 10 via the force-bearing body side pedestal 39. Thus, each force-bearing body side deformation body 33 can be stably mounted on the force-bearing body 10 via the force-bearing body side pedestal 39. For example, the force-bearing body side pedestal 39, the force-bearing body side deformation body 33 and the first tilting body 35 can also be formed integrally, in which case, each force-bearing body side pedestal 39 can also be fixed to the force-bearing body 10 by bolts or adhesives. Alternatively, the force-bearing body side pedestal 39 and the force-bearing body side deformation body 33 can also be formed separately and fixed to each other by bolts or adhesives.

[0364] Likewise, the lower end of the support body side deformation body 34 is not limited to being connected to the support body 20, for example, Fig.31 As shown, the support body side deformable body 34 may also be connected to the support body 20 via the support body side pedestal 40. Thus, the support body side deformable body 34 can be stably mounted on the support body 20 using the support body side pedestal 40. For example, the support body side pedestal 40, the support body side deformable body 34, and the first tilting body 35 may also be formed integrally, in which case the support body side pedestal 40 may also be fixed to the support body 20 by bolts or adhesives. Alternatively, the support body side pedestal 40 and the support body side deformable body 34 may also be formed separately and fixed to each other by bolts or adhesives.

[0365] Furthermore, the force-bearing body side pedestal 39, the force-bearing body side deformable body 33, the tilting structure 31, the supporting body side deformable body 34, and the supporting body side pedestal 40 may be formed integrally. In this case, the force-bearing body side pedestal 39 may be fixed to the force-bearing body 10 by bolts or adhesives, and the supporting body side pedestal 40 may be fixed to the supporting body 20 by bolts or adhesives.

[0366] In addition, the load-bearing body side pedestal and the supporting body side pedestal are not limited to applications Fig.31 The first strain body 30A shown can also be applied to Fig.24 Among the first strain body 30A and other strain bodies 30A to 30D shown.

[0367] (Fourteenth Modification)

[0368] In addition, in the above-mentioned present embodiment, the example in which the detection element 50 is configured as an element for detecting electrostatic capacitance is described. However, the present invention is not limited to this, and the detection element 50 may also be a strain gauge (see FIG. 21A to FIG. 23B ) structure. For example, the strain gauges R1 to R4 may be installed on the surface of the first tilting body 35 of the tilting structure 31 on the side of the force bearing body 10, and the strain gauges R5 to R8 may be installed on the surface of the first tilting body 35 on the side of the support body 20. In this case, the strain gauges R1 to R4 and the strain gauges R5 to R8 may also be installed as shown in FIG. Fig.21B In addition, for example, the strain gauges R1 to R8 may be mounted on the surface of the first tilting body 35 on the side of the force-bearing body 10 or the side of the support body 20, and Fig. 21C Configure as shown.

[0369] The present invention is not limited to the above-mentioned embodiments and variations. In the implementation stage, the constituent elements can be deformed and concretized within the scope of the main purpose. In addition, various inventions can be formed by appropriate combinations of multiple constituent elements disclosed in the above-mentioned embodiments and variations. It is also possible to delete several constituent elements from all the constituent elements shown in the embodiments and variations. Furthermore, it is also possible to appropriately combine the structural elements in different embodiments and variations.

Claims

1. A force sensor, characterized in that: have: The force-bearing body is acted upon by the force or moment of the detection object; A support body, arranged on one side of the force-bearing body in a first direction, supporting the force-bearing body; A strain body, connecting the force-bearing body and the supporting body, and elastically deforming under the action of the force or moment exerted on the force-bearing body; a detection element for detecting a displacement generated by elastic deformation generated in the strain body; as well as a detection circuit, which outputs an electrical signal representing the force or torque acting on the strain body according to the detection result of the detection element, The strain body has: A tilting structure is arranged between the force-bearing body and the supporting body; A deformation body on the side of the force-bearing body, connecting the force-bearing body and the tilting structure, and capable of elastic deformation under the action of the force or moment exerted on the force-bearing body; as well as The support body side deformation body connects the tilting structure and the support body and can be elastically deformed under the action of the force or moment exerted on the force-bearing body. The tilting structure comprises a first tilting body, The first tilting body is arranged in a plane including the first direction and a second direction orthogonal to the first direction, extends in a direction different from the first direction, and can be elastically deformed under the action of a force in the first direction. The tilting structure also includes a second tilting body and a pair of connecting bodies. The second tilting body is arranged between the first tilting body and the supporting body, and is arranged in a plane including the first direction and the second direction, and extends in a direction different from the first direction, and can be elastically deformed under the action of a force in the first direction. The pair of connecting bodies connects one of the two ends of the first tilting body in the second direction with a corresponding end of the two ends of the second tilting body in the second direction. The force-bearing body side deformation body is connected to the first tilting body, The support body side deformation body is connected to the second tilting body, The detection element has: A fixed electrode substrate disposed on the force-bearing body or the supporting body; and a displacement electrode substrate disposed on the tilting structure and facing the fixed electrode substrate, The displacement electrode substrates are disposed at two end portions of the tilting structure in the second direction.

2. The force sensor according to claim 1, characterized in that: The force-bearing body side deformation body extends along the first direction.

3. The force sensor according to claim 1 or 2, characterized in that: The support body side deformation body extends along the first direction.

4. The force sensor according to claim 1 or 2, characterized in that: The first tilting body extends along the second direction.

5. The force sensor according to claim 4, characterized in that: The first tilting body comprises: A first force-bearing body side opposing surface connected to the force-bearing body side deformation body and opposite to the force-bearing body; and a second force-bearing body side facing surface disposed on both sides of the first force-bearing body side facing surface in the second direction and facing the force-bearing body; The first force-bearing body side opposing surface is located closer to the supporting body than the second force-bearing body side opposing surface.

6. The force sensor according to claim 1 or 2, characterized in that: The force-bearing-body-side deformation body is located between two ends of the first tilting body in the second direction.

7. The force sensor according to claim 1 or 2, characterized in that: The support body side deformation body is located between two end portions of the second tilting body in the second direction.

8. The force sensor according to claim 1 or 2, characterized in that: The second tilting body extends along the second direction, The second tilting body comprises: A first support body side opposing surface connected to the support body side deformation body and opposite to the support body; and a second support body side facing surface disposed on both sides of the first support body side facing surface in the second direction and facing the support body; The first supporting body side opposing surface is located closer to the force receiving body than the second supporting body side opposing surface.

9. The force sensor according to claim 1 or 2, characterized in that: The force-bearing body side deformation body is connected to the force-bearing body via the force-bearing body side pedestal, The support body side deformation body is connected to the support body via a support body side pedestal.

10. The force sensor according to claim 1 or 2, characterized in that: The displacement electrode substrate is disposed on the tilting structure via a columnar member.

11. The force sensor according to claim 10, characterized in that: The displacement electrode substrate is disposed on the columnar component via a reinforcing substrate.

12. The force sensor according to claim 1 or 2, characterized in that: The force-bearing body and the supporting body are connected via four strain bodies. The four strain bodies include a first strain body, a second strain body, a third strain body and a fourth strain body. The first direction is set as the Z-axis direction in the XYZ three-dimensional coordinate system, The first strain body is arranged on the negative side of the Y-axis direction relative to the center of the force-bearing body, the second strain body is arranged on the positive side of the X-axis direction relative to the center of the force-bearing body, the third strain body is arranged on the positive side of the Y-axis direction relative to the center of the force-bearing body, and the fourth strain body is arranged on the negative side of the X-axis direction relative to the center of the force-bearing body. The second direction of the first strain body and the third strain body is set as the X-axis direction, The second direction of the second strain body and the fourth strain body is set as a Y-axis direction.

13. The force sensor according to claim 12, characterized in that: At least one of the planar shape of the force-bearing body and the planar shape of the supporting body is circular or rectangular, The tilting structure of the strainer is formed in a curved shape when viewed from the first direction.

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