A detection device for detecting the air tightness of a shaft seal lip of a shaft seal for a vacuum pump and a detection method thereof

Abstract

The application discloses a kind of detection equipment of shaft seal lip air tightness of shaft seal for vacuum pump, including detection mechanism, control mechanism and terminal system, the detection mechanism is used to detect the air tight seal of shaft seal lip, the control mechanism is used to control and monitor the air pressure size, gas flow rate and temperature in the detection mechanism detection process, the terminal system is used to control detection mechanism and control mechanism, data transmission record and alarm emergency stop, the detection mechanism includes heating base, medium load body, shaft seal ring, sealing plate, tool shaft, motor stator and motor rotor, several mounting holes are provided on heating base.The shaft seal lip air tightness of shaft seal for vacuum pump is accurately detected in the application, the shaft seal simulation working state in detection, avoid the dust leakage to oil cavity or the oil of oil cavity into pump cavity due to the shaft seal lip air tightness problem, to reduce the influence on vacuum pump performance and life due to this problem, improve the reliability of entire product.

Description

Technical Field

[0001] This invention relates to the field of vacuum pump testing technology, specifically to a testing device and method for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal. Background Technology

[0002] Shaft seals are a common sealing device in vacuum pumps. One of their functions is to seal off gases. When the pump is in operation, the pressure in the pump chamber is higher than that in the gearbox and bearing chamber. This prevents gas from flowing into the gearbox or bearing chamber through the pump chamber, causing oil contamination, deteriorating the operating environment, leading to abnormal damage to the bearings and gears, and reducing the pump's service life. When the pump is at its ultimate pressure, the pressure in the gearbox and bearing chamber is higher than that in the pump chamber. This prevents oil and gas from flowing into the pump chamber, increasing the pump's operating resistance, increasing energy consumption, and reducing performance. In certain process environments, it can also mix with process reactants to form sticky deposits, leading to increased friction and causing malfunctions and shutdowns.

[0003] The shortcomings of existing technology:

[0004] Since the technology for airtightness inspection and shaft seal testing in the dry vacuum pump industry is almost non-existent, it is necessary to ensure the reliability of the product under different process environments. Summary of the Invention

[0005] The purpose of this invention is to provide a device for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal, so as to solve the problems mentioned in the background art.

[0006] To achieve the above objectives, the present invention provides the following technical solution: a device for testing the airtightness of a shaft seal lip for a vacuum pump, comprising a testing mechanism, a control mechanism, and a terminal system. The testing mechanism is used to test the airtightness of the shaft seal lip. The control mechanism is used to control and monitor the gas pressure, gas flow rate, and temperature during the testing process. The terminal system is used to control the testing mechanism and the control mechanism, transmit data, record data, and perform alarms and emergency stops.

[0007] The testing institutions include:

[0008] Heating base, which has several mounting holes;

[0009] A medium-load body is installed on the upper end of the heating base. Shaft seal test seats are provided on both sides of the medium-load body, and a middle bushing is provided between the shaft seal test seats.

[0010] A shaft sealing ring is disposed on the inner side wall of the shaft sealing test base, and an air guiding mechanism is provided on the shaft sealing test base and the shaft sealing ring;

[0011] A sealing plate is disposed on the upper end surface of the heating base, located on one side of the shaft seal test seat. A large bearing and a small bearing are respectively disposed on the inner side wall of the middle bushing and inside the sealing plate.

[0012] A tooling shaft is movably disposed between a large bearing and a small bearing, and the tooling shaft is used to install a shaft seal.

[0013] The motor stator is mounted on one side of the sealing plate by screws connecting the motor housing.

[0014] The motor rotor has a bolt assembly at one end, and the motor rotor is connected to the tooling shaft by the bolt assembly.

[0015] As a further improvement of the present invention, the control mechanism includes:

[0016] Intelligent temperature controller, which is used to control and monitor heating temperature;

[0017] A heating rod, which is disposed inside a heating base for heating the tooling shaft;

[0018] A temperature sensor, which is installed inside the shaft seal ring, is used to monitor the heating temperature;

[0019] A pressurizing assembly, which is connected to an air guiding mechanism, is used to pressurize the inside of the shaft seal ring to test the sealing effect of the shaft seal.

[0020] As a further improvement of the present invention, the terminal system includes:

[0021] The lower-level machine is electrically connected to the intelligent temperature controller, heating rod, temperature sensor and pressurization component. The lower-level machine is used for motor start-up, speed setting and control mechanism operation, and for recording experimental data during the test, including pressure value, flow value, start time and test time. It can also control alarms and emergency stop.

[0022] As a further improvement of the present invention, the air guiding mechanism includes:

[0023] An air inlet is provided on the shaft seal test seat and the middle bushing and connected to the air outlet of the pressurization assembly.

[0024] Several vent holes are provided, which are located on the shaft seal test seat and the shaft seal ring and connected to the pressure measuring structure of the pressurization assembly.

[0025] As a further improvement of the present invention, the pressurization component includes:

[0026] A four-way pipe, one end of which is connected to an air inlet, and a pressure sensor is installed on the pipe connecting the four-way pipe and the air inlet;

[0027] A three-way pipe, one end of which is connected to an external air compressor, and both ends of which are connected to a four-way pipe. The two ends of the three-way pipe and the four-way pipe are respectively equipped with a first solenoid valve, a second solenoid valve, a third solenoid valve, and a fourth solenoid valve.

[0028] An air intake pipe, which is connected to a four-way pipe, and a fifth solenoid valve is installed on the air intake pipe.

[0029] A flow meter, which is installed on the pipe at the outlet.

[0030] As a further improvement of the present invention, the upper ends of the intermediate load body and the intermediate bushing are provided with several through holes for observing the operating status of the large bearing and for installing temperature sensors.

[0031] As a further improvement of the present invention, a limiting ring matching the medium load body is provided on one side of the shaft seal test seat.

[0032] As a further improvement of the present invention, the lower-level computer is connected to the pressure sensor, the first solenoid valve, the second solenoid valve, the third solenoid valve, the fourth solenoid valve and the fifth solenoid valve for control, and the detection data of the temperature sensor, the pressure sensor and the flow meter are all displayed through the lower-level computer.

[0033] As a further improvement of the present invention, the pipelines of the first solenoid valve and the second solenoid valve are gas pressure testing pipelines, and the pipelines of the third solenoid valve, the fourth solenoid valve and the fifth solenoid valve are combined to form a pressure circulation pipeline.

[0034] As a further improvement of the present invention, a method for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal is also disclosed, characterized in that the method includes the following steps:

[0035] S1. Test preparation: Install the oil seal lip or air seal lip to be tested on the tooling shaft, and then install the tooling shaft through the large bearing and the small bearing.

[0036] S2, Test 1: First, heat the tooling shaft to the test temperature using a heating rod. Then, open the second solenoid valve, close the fourth and fifth solenoid valves, and adjust the first solenoid valve to make the pressure sensor display the test pressure. Read the two flow count values. If both values ​​are equal to 0, adjust the first solenoid valve to increase the intake pressure arithmetically at the set step value to the high pressure set value. Observe the two flow count values ​​at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that there is flow. The lower-level human-machine interaction software will display an alarm, close the second solenoid valve, open the fifth solenoid valve, and end the test.

[0037] S3, Test 2: First, heat the heating rod to a high temperature;

[0038] 1) Open the second, fourth, and fifth solenoid valves and adjust them until the pressure sensor displays the preset pressure;

[0039] 2) Close the second, fourth, and fifth solenoid valves, then open the fourth solenoid valve for a set time and read the values ​​of the two flow meters. If the value is greater than 0, an alarm will be displayed directly and the test can be ended depending on the situation. If the value is equal to 0, close the second and fourth solenoid valves, open the fifth solenoid valve for a set time, and determine whether the set test time has been reached.

[0040] 3) If the test is not reached, repeat step 2). Upon reaching the set time, close the fourth and fifth solenoid valves, open the second solenoid valve, and adjust the first solenoid valve until the pressure sensor displays the test pressure. Read the flow meter reading and determine if the value is zero. If it is zero, adjust the first solenoid valve to increase the intake pressure arithmetically at the set step value until the high-pressure set value. Observe the two flow meter values ​​at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that flow is occurring, and the human-machine interface software will display an alarm. Close the second solenoid valve and open the fifth solenoid valve. Determine whether to end the test depending on the situation. If the flow value remains zero throughout the test, close the second solenoid valve, open the fifth solenoid valve, and repeat step 2).

[0041] 4) If the flow rate is still 0 when the final test time is reached, stop the test, close the second solenoid valve, open the fifth solenoid valve, and the human-machine interface will display "verification passed".

[0042] Compared with the prior art, the beneficial effects of the present invention are:

[0043] 1. The present invention is provided with a detection mechanism, which includes a heating base, a medium load body, a shaft seal ring, a tooling shaft, a motor stator and a motor rotor. Through the action of the detection mechanism, the shaft seal used is different for different series of vacuum pumps. Therefore, in the design process, the outer shell does not need to be replaced. Only the dimensions of the shaft seal ring, the experimental tooling shaft and the medium bushing need to be changed, which saves costs and facilitates installation.

[0044] 2. The method of the present invention accurately detects the airtightness of the shaft seal lip of the vacuum pump. During the test, the shaft seal is simulated to work, avoiding the situation where dust in the pump chamber leaks into the oil chamber or oil in the oil chamber enters the pump chamber due to the airtightness of the shaft seal lip. This reduces the impact of such problems on the performance and life of the vacuum pump and improves the reliability of the entire product. Attached Figure Description

[0045] Figure 1 This is a schematic diagram of the testing mechanism for a shaft seal lip airtightness testing device for a vacuum pump according to the present invention;

[0046] Figure 2 This is a schematic diagram of an airtightness testing device for a shaft seal lip of a vacuum pump according to the present invention.

[0047] Figure 3 This is a temperature control schematic diagram of a device for testing the airtightness of the shaft seal lip of a vacuum pump according to the present invention.

[0048] In the diagram: 1. Testing mechanism; 101. Heating base; 102. Medium load body; 103. Shaft seal test seat; 104. Medium bushing; 105. Shaft seal ring; 106. Sealing plate; 107. Large bearing; 108. Small bearing; 109. Tooling shaft; 111. Motor stator; 112. Motor rotor; 2. Control mechanism; 21. Intelligent temperature controller; 22. Heating rod; 23. Temperature sensor; 24. Pressurization assembly; 241. Four-way pipe; 242. Pressure sensor; 243. Three-way pipe; 244. First solenoid valve; 245. Second solenoid valve; 246. Third solenoid valve; 247. Fourth solenoid valve; 248. Air inlet pipe; 249. Fifth solenoid valve; 2401. Flow meter; 3. Terminal system; 31. Lower-level machine; 4. Air inlet; 5. Air outlet. Detailed Implementation

[0049] To make the technical problems to be solved, the technical solutions, and the beneficial effects of the present invention clearer, the present invention will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present invention and are not intended to limit the present invention.

[0050] It should be noted that when an element is referred to as "fixed," "mounted," "connected," or "set" with another element, it can be directly on or indirectly on the other element. It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," and "outer," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing the invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the invention.

[0051] As a further improvement of the present invention, the terms "first," "second," "third," etc., are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature.

[0052] Example 1

[0053] Please see Figure 1-3This invention provides a technical solution: a device for testing the airtightness of a shaft seal lip for a vacuum pump, comprising a testing mechanism 1, a control mechanism 2, and a terminal system 3. The testing mechanism 1 is used to test the airtightness of the shaft seal lip. The control mechanism 2 is used to control and monitor the gas pressure, gas flow rate, and temperature during the testing process of the testing mechanism 1. The terminal system 3 is used to control the testing mechanism 1 and the control mechanism 2, transmit data, record data, and perform alarm and emergency stop. The testing mechanism 1 includes a heating base 101, a medium-load body 102, a shaft seal ring 105, a tooling shaft 109, a motor stator 111, and a motor rotor 112. The heating base 101 has several mounting holes. The medium-load body 102 is installed on the upper end of the heating base 101. Shaft seal test seats 103 are installed on both sides of the medium-load body 102. A middle bushing 104 is installed between the shaft seal test seats 103. The shaft seal ring 105 is installed on the inner side wall of the shaft seal test seat 103. A gas guiding mechanism is installed on the shaft seal test seat 103 and the shaft seal ring 105. Plate 106 is mounted on the upper surface of heating base 101, located on one side of shaft seal test seat 103. A large bearing 107 and a small bearing 108 are respectively installed on the inner wall of the bushing 104 and inside the sealing plate 106. A tooling shaft 109 is installed between the large bearing 107 and the small bearing 108, and is used to install the shaft seal. The motor stator 111 is fixed to one side of the sealing plate 106 by screws connecting to the housing. A bolt assembly is installed at one end of the motor rotor 112, and the motor rotor 112 is connected to... The tooling shafts 109 are connected by bolt assemblies. When performing an airtightness test on the shaft seal lip, the shaft seal to be tested is first placed on the tooling shaft 109, and then installed inside the shaft seal ring 105 through the large bearing 107 and the small bearing 108. The test can then be performed. Since different series of vacuum pumps use different shaft seals, the outer shell does not need to be replaced during the design process. Only the dimensions of the shaft seal ring 105, the experimental tooling shaft 109 and the middle bushing 104 need to be changed, which saves costs and facilitates installation.

[0054] In some embodiments of the present invention, the control mechanism 2 includes an intelligent temperature controller 21, a heating rod 22, a temperature sensor 23, and a pressurization assembly 24. The intelligent temperature controller 21 is used to control and monitor the heating temperature. The heating rod 22 is fixed inside the heating base 101 for heating the tooling shaft 109. The temperature sensor 23 is installed inside the shaft sealing ring 105 for monitoring the heating temperature. The pressurization assembly 24 is connected to the air guiding mechanism for pressurizing the inside of the shaft sealing ring 105 to test the sealing effect of the shaft seal. The intelligent temperature controller 21 can control and monitor the heating temperature at the same time, and cooperate with the pressurization assembly 24 to perform pressurization tests.

[0055] In some embodiments of the present invention, the terminal system 3 includes a lower-level machine 31, which is electrically connected to the intelligent temperature controller 21, the heating rod 22, the temperature sensor 23 and the pressurization component 24. The lower-level machine 31 is used for motor start-up, speed setting and operation control of the control mechanism 2, and for recording experimental data during the test, including pressure value, flow rate value, start time and test time. It can also control alarms and emergency stops.

[0056] In some embodiments of the present invention, the air guiding mechanism includes an air inlet 4 and several air outlets 5. The air inlet 4 is disposed on the shaft seal test seat 103 and the middle bushing 104 and connected to the air outlet end of the pressurizing component 24. The air outlets 5 are disposed on the shaft seal test seat 103 and the shaft seal ring 105 and connected to the pressure measuring structure of the pressurizing component 24. The air inlet pressure and air outlet flow rate can be detected in real time and effectively, which facilitates rapid judgment of the sealing effect.

[0057] In some embodiments of the present invention, the pressurization assembly 24 includes a four-way pipe 241, a three-way pipe 243, an air inlet pipe 248, and a flow meter 2401. One end of the four-way pipe 241 is connected to the air inlet 4, and a pressure sensor 242 is installed on the pipe connecting the four-way pipe 241 and the air inlet 4. One end of the three-way pipe 243 is connected to an external air compressor, and both ends of the three-way pipe 243 are connected to the four-way pipe 241. A first solenoid valve 244 and a second solenoid valve 2401 are respectively installed at the two ends of the three-way pipe 243 connected to the four-way pipe 241. The first solenoid valve 244, the second solenoid valve 245, the third solenoid valve 246, the fourth solenoid valve 247, the air inlet pipe 248 is connected to the four-way pipe 241, the fifth solenoid valve 249 is installed on the air inlet pipe 248, and the flow meter 2401 is installed on the pipe of the air outlet 5. By controlling the closing of the first solenoid valve 244, the second solenoid valve 245, the third solenoid valve 246, the fourth solenoid valve 247 and the fifth solenoid valve 249, the air seal lip and the oil seal lip can be effectively detected, and the detection effect under different pressures can also be controlled.

[0058] In some embodiments of the present invention, the upper ends of the intermediate load body 102 and the intermediate bushing 104 are each equipped with several through holes for observing the operating status of the large bearing 107 and for installing the temperature sensor 23.

[0059] In some embodiments of the present invention, a limiting ring matching the medium load body 102 is installed on one side of the shaft seal test seat 103, which can increase the sealing effect of the shaft seal test seat 103 and the medium load body 102 and facilitate their installation and positioning.

[0060] In some embodiments of the present invention, the lower-level computer 31 is controlled to connect to the pressure sensor 242, the first solenoid valve 244, the second solenoid valve 245, the third solenoid valve 246, the fourth solenoid valve 247, and the fifth solenoid valve 249, and the detection data of the temperature sensor 23, the pressure sensor 242, and the flow meter 2401 are all displayed through the lower-level computer 31.

[0061] In some embodiments of the present invention, the pipelines of the first solenoid valve 244 and the second solenoid valve 245 are pressure testing pipelines, and the pipelines of the third solenoid valve 246, the fourth solenoid valve 247 and the fifth solenoid valve 249 are combined to form a pressure circulation pipeline.

[0062] Example 2

[0063] This invention also provides a method for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal, which includes the following steps:

[0064] For testing preparation, install the oil seal lip or air seal lip to be tested on the tooling shaft 109, and then install the tooling shaft 109 through the large bearing 107 and the small bearing 108.

[0065] The test begins by heating the tooling shaft 109 to the test temperature using heating rod 22. Then, the second solenoid valve 245 is opened, and the fourth solenoid valve 247 and the fifth solenoid valve 249 are closed. The first solenoid valve 244 is adjusted so that the pressure sensor 242 displays the test pressure. The values ​​of the two flow meters 2401 are read. If both values ​​are 0, the first solenoid valve 244 is adjusted so that the intake pressure increases arithmetically at a set step value until the high pressure set value is reached. The values ​​of the two flow meters 2401 are observed at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that there is flow. The human-machine interaction software of the lower-level machine 31 will display an alarm, close the second solenoid valve 245, open the fifth solenoid valve 249, and end the test.

[0066] Example 3

[0067] This invention also provides a method for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal, which includes the following steps:

[0068] For testing preparation, install the oil seal lip or air seal lip to be tested on the tooling shaft 109, and then install the tooling shaft 109 through the large bearing 107 and the small bearing 108 to test the second test. First, heat the heating rod 22 to a high temperature.

[0069] 1) Open the second solenoid valve 245, the fourth solenoid valve 247 and the fifth solenoid valve 249, and adjust them until the pressure sensor 242 displays the preset pressure;

[0070] 2) Close the second solenoid valve 245, the fourth solenoid valve 247, and the fifth solenoid valve 249. Then, open the fourth solenoid valve 247 for a set time and read the values ​​of the two flow meters 2401. If the value is greater than 0, an alarm will be displayed directly, and the test can be ended as appropriate. If the value is equal to 0, close the second solenoid valve 245 and the fourth solenoid valve 247, open the fifth solenoid valve 249 for a set time, and determine whether the set test time has been reached.

[0071] 3) If the pressure is not reached, repeat step 2). When the set time is reached, close the fourth solenoid valve 247 and the fifth solenoid valve 249, open the second solenoid valve 245, adjust the first solenoid valve 244 until the pressure sensor 242 displays the test pressure, read the reading of the flow meter 2401, and determine if the value is equal to zero. If it is equal to zero, adjust the first solenoid valve 244 to increase the intake pressure arithmetically at the set step value to the high pressure set value. Observe the values ​​of the two flow meters 2401 at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that there is flow, and the human-machine interface software will display an alarm. Close the second solenoid valve 245 and open the fifth solenoid valve 249. Determine whether to end the test depending on the situation. If the flow value is always equal to 0 during the test, close the second solenoid valve 245, open the fifth solenoid valve 249, and repeat step 2).

[0072] 4) If the flow rate is still 0 when the final test time is reached, stop the test, close the second solenoid valve 245, open the fifth solenoid valve 249, and the human-machine interface will display "verification passed".

[0073] The testing conditions for the gas seal lip and oil seal lip in Examples 2 and 3 of this invention are shown in the table below:

[0074]

[0075] This invention provides accurate testing of the airtightness of the shaft seal lip for vacuum pumps. The testing simulates the working state of the shaft seal, preventing dust leakage from the pump chamber into the oil chamber or oil entering the pump chamber due to airtightness issues of the shaft seal lip. This reduces the impact of such problems on the performance and lifespan of the vacuum pump, improving the overall reliability of the product. Furthermore, since different vacuum pump series use different shaft seals, the outer casing does not need to be replaced during the design process. Only the dimensions of the shaft seal ring 105, the experimental fixture shaft 109, and the intermediate bushing 104 need to be changed, saving costs and facilitating installation.

[0076] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus.

[0077] Although embodiments of the invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A device for testing the airtightness of a shaft seal lip for a vacuum pump, comprising a testing mechanism (1), a control mechanism (2), and a terminal system (3), characterized in that: The detection mechanism (1) is used to detect the airtightness of the shaft seal lip. The control mechanism (2) is used to control and monitor the air pressure, gas flow rate and temperature during the detection process of the detection mechanism (1). The terminal system (3) is used to control the detection mechanism (1) and the control mechanism (2), record data transmission and alarm emergency stop. The testing organization (1) includes: Heating base (101) with several mounting holes; A medium load body (102) is installed on the upper end of a heating base (101). Shaft seal test seats (103) are provided on both sides of the medium load body (102), and a middle bushing (104) is provided between the shaft seal test seats (103). A shaft sealing ring (105) is disposed on the inner side wall of the shaft sealing test seat (103), and an air guiding mechanism is provided on the shaft sealing test seat (103) and the shaft sealing ring (105); A sealing plate (106) is set on the upper end face of the heating base (101) on one side of the shaft seal test seat (103). A large bearing (107) and a small bearing (108) are respectively provided on the inner side wall of the middle bushing (104) and inside the sealing plate (106). Tooling shaft (109), which is movably disposed between large bearing (107) and small bearing (108), is used to install shaft seal; The motor stator (111) is mounted on one side of the cover plate (106) by means of screws connecting the motor housing. The motor rotor (112) has a bolt assembly at one end, and the motor rotor (112) is connected to the tooling shaft (109) by the bolt assembly.

2. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 1, characterized in that: The control mechanism (2) includes: Intelligent temperature controller (21), the intelligent temperature controller (21) is used to control the heating temperature and monitor the heating temperature; Heating rod (22), which is disposed inside heating base (101) for heating tooling shaft (109); Temperature sensor (23) is disposed inside shaft seal ring (105) for monitoring heating temperature; A pressurizing assembly (24) is connected to an air guiding mechanism to pressurize the inside of the shaft seal ring (105) to test the sealing effect of the shaft seal.

3. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 2, characterized in that: The terminal system (3) includes: The lower-level machine (31) is electrically connected to the intelligent temperature controller (21), heating rod (22), temperature sensor (23) and pressurization component (24). The lower-level machine (31) is used for motor start-up, speed setting and control of the operation of the control mechanism (2), and for recording experimental data in the test, including pressure value, flow value, start time and test time. It can also control alarm and emergency stop.

4. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 3, characterized in that: The air guiding mechanism includes: An air inlet (4) is provided on the shaft seal test seat (103) and the middle bushing (104) and connected to the air outlet of the pressurization assembly (24); Several air vents (5) are provided on the shaft seal test seat (103) and the shaft seal ring (105) and connected to the pressure measuring structure of the pressurization assembly (24).

5. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 4, characterized in that: The pressurization assembly (24) includes: Four-way pipe (241), one end of which is connected to air inlet (4), and a pressure sensor (242) is installed on the pipe connecting the four-way pipe (241) and air inlet (4). A three-way pipe (243) is connected at one end to an external air compressor, and both ends of the three-way pipe (243) are connected to a four-way pipe (241). The two ends of the three-way pipe (243) and the four-way pipe (241) are respectively provided with a first solenoid valve (244), a second solenoid valve (245), a third solenoid valve (246), and a fourth solenoid valve (247). An intake pipe (248) is connected to a four-way pipe (241), and a fifth solenoid valve (249) is provided on the intake pipe (248). A flow meter (2401) is installed on the pipe of the air outlet (5).

6. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 1, characterized in that: The upper ends of the intermediate load body (102) and the intermediate bushing (104) are provided with several through holes for observing the operating status of the large bearing (107) and for installing the temperature sensor (23).

7. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 1, characterized in that: One side of the shaft seal test seat (103) is provided with a limiting ring that matches the medium load body (102).

8. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 5, characterized in that: The lower-level machine (31) is connected to the pressure sensor (242), the first solenoid valve (244), the second solenoid valve (245), the third solenoid valve (246), the fourth solenoid valve (247), and the fifth solenoid valve (249) for control, and the detection data of the temperature sensor (23), the pressure sensor (242), and the flow meter (2401) are all displayed through the lower-level machine (31).

9. The testing device for the airtightness of the shaft seal lip of the vacuum pump shaft seal according to claim 5, characterized in that: The pipelines of the first solenoid valve (244) and the second solenoid valve (245) are for detecting air pressure. The pipelines of the third solenoid valve (246), the fourth solenoid valve (247) and the fifth solenoid valve (249) are combined to form a pressure circulation pipeline.

10. The testing equipment and method for testing the airtightness of the shaft seal lip of a vacuum pump shaft seal according to any one of claims 1-9, characterized in that: This method includes the following steps: S1. Test preparation: Install the oil seal lip or air seal lip to be tested on the tooling shaft (109), and then install the tooling shaft (109) through the large bearing (107) and the small bearing (108); S2, Test 1: First, heat the tooling shaft (109) to the test temperature using the heating rod (22). Then, open the second solenoid valve (245), close the fourth solenoid valve (247) and the fifth solenoid valve (249), adjust the first solenoid valve (244) to make the pressure sensor (242) display the test pressure, and read the values ​​of the two flow meters (2401). If the two values ​​are equal to 0, adjust the first solenoid valve (244) to make the intake pressure increase arithmetically to the high pressure setting value. Observe the values ​​of the two flow meters (2401) at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that there is flow. The human-machine interaction software of the lower computer (31) will display an alarm, close the second solenoid valve (245), open the fifth solenoid valve (249), and end the test. S3, Test 2: First, heat the heating rod (22) to a high temperature; 1) Open the second solenoid valve (245), the fourth solenoid valve (247) and the fifth solenoid valve (249) and adjust them to the preset pressure displayed by the pressure sensor (242); 2) Close the second solenoid valve (245), the fourth solenoid valve (247) and the fifth solenoid valve (249), and then open the fourth solenoid valve (247) for a set time to read the values ​​of the two flow meters (2401). If the value is greater than 0, an alarm will be displayed directly and the test can be ended depending on the situation. If the value is equal to 0, then close the second solenoid valve (245) and the fourth solenoid valve (247), open the fifth solenoid valve (249) for a set time, and determine whether the set test time has been reached; 3) If not reached, repeat step 2). When the set time is reached, close the fourth solenoid valve (247) and the fifth solenoid valve (249), open the second solenoid valve (245), adjust the first solenoid valve (244) until the pressure sensor (242) displays the test pressure, read the reading of the flow meter (2401), and determine whether the value is equal to zero. If it is equal to 0, adjust the first solenoid valve (244) to increase the intake pressure at a set step value to the high pressure set value. Observe the values ​​of the two flow meters (2401) at each pressure point. If the flow value is greater than 0 during the pressurization period, it is considered that there is flow. The human-machine interaction software will display an alarm, close the second solenoid valve (245), open the fifth solenoid valve (249), and decide whether to end the test depending on the situation. If the flow value is always equal to 0 during the period, close the second solenoid valve (245), open the fifth solenoid valve (249), and repeat step 2). 4) If the flow rate is still equal to 0 when the final test time is reached, stop the test, close the second solenoid valve (245), open the fifth solenoid valve (249), and the human-machine interaction software interface will display that the verification has passed.

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