Substrate Holding Manipulator and Substrate Handling Robot

Abstract

A substrate holding robot hand and a substrate transfer robot. The substrate holding robot hand (1) includes a sensor support member (50) that supports a plurality of substrate detection sensors (40) and includes a positioning portion (51) that positions the plurality of substrate detection sensors (40) relative to a plurality of blades (20) together.

Description

Technical Field

[0001] The present invention relates to a substrate holding robot hand and a substrate transfer robot, and particularly to a substrate holding robot hand and a substrate transfer robot equipped with a substrate detection sensor. Background Art

[0002] Conventionally, a substrate transfer robot equipped with a substrate transfer robot hand has been known. For example, such a substrate transfer robot is disclosed in Japanese Patent Application Laid-Open No. 2013-69914.

[0003] Japanese Patent Application Laid-Open No. 2013-69914 discloses a substrate transfer robot composed of a horizontal articulated robot. The substrate transfer robot includes a base, an arm connected to the base and rotatable in a horizontal plane, and a substrate transfer robot hand connected to the arm and rotatable in a horizontal plane. In addition, a robot hand main body (vane) for holding a substrate is provided in the substrate transfer robot hand.

[0004] In addition, although not explicitly described in Japanese Patent Application Laid-Open No. 2013-69914, in a conventional substrate transfer robot as described in Japanese Patent Application Laid-Open No. 2013-69914, there is a case where a substrate detection sensor for detecting a substrate held by the substrate transfer robot hand is provided in the substrate transfer robot hand. Further, the substrate detection sensor is positioned relative to the vane.

[0005] Patent Document 1: Japanese Patent Application Laid-Open No. 2013-69914

[0006] Here, in a case where a plurality of vanes are provided and a plurality of substrate detection sensors are provided corresponding to the plurality of vanes, it is necessary to perform positioning operations of the plurality of substrate detection sensors relative to the plurality of vanes according to the number of the plurality of substrate detection sensors. Therefore, there is a problem that the number of work processes for positioning the plurality of substrate detection sensors increases. Summary of the Invention

[0007] The present invention has been made to solve the above-described problems, and an object of the present invention is to provide a substrate holding robot hand and a substrate transfer robot capable of improving workability of positioning operations of a substrate detection sensor.

[0008] A substrate holding robot hand according to a first aspect of the present invention includes: a frame; a plurality of vanes supported by the frame and respectively supporting a substrate; a plurality of substrate detection sensors provided corresponding to the plurality of vanes and detecting the presence of the substrate; and a sensor support member supporting the plurality of substrate detection sensors and including a positioning portion for collectively performing positioning of the plurality of substrate detection sensors relative to the plurality of vanes.

[0009] In the substrate holding robot hand according to the first aspect of the present invention, as described above, the substrate holding robot hand includes a sensor support member that supports a plurality of substrate detection sensors and includes a positioning portion that collectively positions the plurality of substrate detection sensors with respect to the plurality of blades. Thus, by collectively positioning the plurality of substrate detection sensors with respect to the plurality of blades by the sensor support member, it is possible to reduce the operation steps for positioning the plurality of substrate detection sensors. As a result, the positioning operation of the substrate detection sensors can be simplified, and thus the workability of the positioning operation of the substrate detection sensors can be improved.

[0010] The substrate transfer robot according to the second aspect of the present invention includes a substrate holding robot hand and an arm that moves the substrate holding robot hand. The substrate holding robot hand includes: a frame; a plurality of blades supported by the frame and respectively supporting substrates; a plurality of substrate detection sensors provided corresponding to the plurality of blades and detecting the presence of substrates; and a sensor support member that supports the plurality of substrate detection sensors and includes a positioning portion that collectively positions the plurality of substrate detection sensors with respect to the plurality of blades.

[0011] In the substrate transfer robot according to the second aspect of the present invention, as described above, the substrate holding robot hand includes a sensor support member that supports a plurality of substrate detection sensors and includes a positioning portion that collectively positions the plurality of substrate detection sensors with respect to the plurality of blades. Thus, by collectively positioning the plurality of substrate detection sensors with respect to the plurality of blades by the sensor support member, it is possible to reduce the operation steps for positioning the plurality of substrate detection sensors. As a result, the positioning operation of the substrate detection sensors can be simplified, and thus a substrate transfer robot can be provided that can improve the workability of the positioning operation of the substrate detection sensors.

[0012] According to the present invention, the workability of the positioning operation of the substrate detection sensors can be improved. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 FIG. is a diagram showing the structure of a substrate transfer robot according to an embodiment of the present invention.

[0014] Figure 2 FIG. is a perspective view showing the structure of a substrate holding robot hand according to an embodiment of the present invention.

[0015] Figure 3 FIG. is a top view showing the structure of a substrate holding robot hand according to an embodiment of the present invention.

[0016] Figure 4This is a perspective view showing the structure of a substrate holding robot hand according to an embodiment of the present invention (a perspective view of the movable support unit and the movable pressing unit is omitted).

[0017] Figure 5 This is a perspective view of a sensor support member according to an embodiment of the present invention as viewed from above.

[0018] Figure 6 This is a top view of a sensor support member according to an embodiment of the present invention.

[0019] Figure 7 This is a perspective view of a sensor support member according to an embodiment of the present invention as viewed from below.

[0020] Figure 8 This is a side view of a sensor support member according to an embodiment of the present invention. Detailed Embodiment

[0021] Hereinafter, an embodiment of the present invention in which the present invention is embodied will be described based on the drawings.

[0022] Refer to Figures 1 to 8 The structure of a substrate transfer robot 100 according to this embodiment will be described.

[0023] As Figure 1 shown, the substrate transfer robot 100 includes a substrate holding robot hand 1 and an arm 2 that moves the substrate holding robot hand 1.

[0024] As Figure 1 shown, the arm 2 is a horizontal multi-joint robot arm. The arm 2 includes a first arm 2a and a second arm 2b. The first arm 2a is configured to be rotatable about one end portion with respect to a base 3 described later. Specifically, one end portion of the first arm 2a is rotatably connected to the base 3 via a first joint. The second arm 2b is configured to be rotatable about one end portion with respect to the first arm 2a. Specifically, one end portion of the second arm 2b is rotatably connected to the other end portion of the first arm 2a via a second joint. In addition, at the other end portion of the second arm 2b, the substrate holding robot hand 1 is rotatably connected via a third joint. At each of the first joint, the second joint, and the third joint, a drive mechanism including a servo motor as a drive source for rotational drive, a rotational position sensor that detects the rotational position of the output shaft of the servo motor, and a power transmission mechanism that transmits the output of the servo motor to the joint is provided.

[0025] In addition, the substrate transfer robot 100 further includes a base 3 for mounting the arm 2 and an arm lifting mechanism 4 for mounting the base 3. One end of the base 3 is configured to be connected to one end of the first arm 2a, and the other end is connected to the arm lifting mechanism 4. The arm lifting mechanism 4 is configured to lift the arm 2 by lifting the base 3.

[0026] As Figure 2 shown, a plurality (four) of blades 20 are provided on the substrate holding manipulator 1. That is, the substrate holding manipulator 1 is configured to be able to transfer (hold) a plurality (four) of substrates W.

[0027] As Figure 2 and Figure 3 shown, the substrate holding manipulator 1 includes a frame 10 and blades 20. The frame 10 is a support body for supporting the blades 20. The frame 10 includes a pair of side wall portions 10a and 10b, and a base end portion 10c connecting the pair of side wall portions 10a and 10b. The pair of side wall portions 10a and 10b are separately provided so that their wall surfaces face each other in a direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged. In addition, the pair of side wall portions 10a and 10b are provided so as to extend in a direction (Y direction) orthogonal to the direction in which the pair of front support portions 21a and 21b are arranged and parallel to the main surface 20c of the blade 20. The base end portion 10c connects the respective base end portions (portions on the Y2 direction side) of the pair of side wall portions 10a and 10b. The base end portion 10c has a shape that is curved convexly toward the base end side (Y2 direction side). When viewed from a direction perpendicular to the main surface 20c of the blade 20, the pair of side wall portions 10a and 10b and the base end portion 10c are provided so as to form a U shape.

[0028] The blade 20 is a thin plate-shaped support plate for supporting the substrate W. The blade 20 has a shape in which the front end portion 20a side is bifurcated. In the blade 20, a pair of front support portions 21a and 21b are separately provided in the bifurcated portions. The pair of front support portions 21a and 21b have a plurality (two) of support surfaces provided at different heights from each other. In addition, the pair of rear support portions 22a and 22b have support surfaces provided at substantially the same height as the lower side (Z2 direction side) support surfaces of the pair of front support portions 21a and 21b. Herein, "height" refers to the distance from the main surface 20c of the blade 20 in a direction (Z direction) perpendicular to the main surface 20c of the blade 20.

[0029] The pair of front support portions 21a and 21b and the pair of rear support portions 22a and 22b are provided on the main surface 20c of the blade 20. The support surfaces of the pair of front support portions 21a and 21b and the pair of rear support portions 22a and 22b are configured to support the back surface (surface on the Z2 direction side) of the outer peripheral edge portion of the substantially circular substrate W from the lower side.

[0030] In a direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged, the pair of rear support portions 22a and 22b are arranged at a position closer to the inside (the side closer to the center line L3) than the pair of front support portions 21a and 21b. Further, in a direction (X direction) parallel to the direction in which the pair of front support portions 21a and 21b are arranged, the pair of side wall portions 10a and 10b are arranged at a position closer to the inside (the side closer to the center line L3) than the pair of rear support portions 22a and 22b. In addition, the center line L3 is a center line extending in a direction (Y direction) orthogonal to the direction in which the pair of front support portions 21a and 21b are arranged and parallel to the main surface 20c of the blade 20.

[0031] In addition, the substrate holding robot 1 further includes a movable support unit 71 that performs forward and backward movement for supporting the substrate W, and a first movable pressing unit 72 and a second movable pressing unit 73 that perform forward and backward movement for pressing the substrate W. The movable support unit 71 includes a pair of support members 71a that support the substrate W, and a cylinder 71b that serves as an actuator for moving the pair of support members 71a forward and backward in the Y direction. The movable support unit 71 is configured such that the pair of support members 71a are advanced in the Y1 direction by the cylinder 71b to be arranged at a support position for supporting the substrate W. In addition, the movable support unit 71 is configured such that the pair of support members 71a are retracted in the Y2 direction by the cylinder 71b to be arranged at a retracted position where the substrate W is not supported. In addition, the pair of support members 71a have support surfaces provided at substantially the same height as the support surfaces on the upper side (Z1 direction side) of the pair of front support portions 21a and 21b. Each support surface of the pair of support members 71a is configured to support the back surface (the surface on the Z2 direction side) of the outer peripheral portion of the substantially circular substrate W from below. In addition, the first movable pressing unit 72 and the second movable pressing unit 73 are an example of the "movable pressing unit" in the claims.

[0032] The first movable pressing unit 72 includes a pair of pressing members 72a that press the substrate W, and a cylinder 72b that serves as an actuator for moving the pair of pressing members 72a forward and backward in the Y direction. The first movable pressing unit 72 is configured to be able to press the substrate W by advancing the pair of pressing members 72a in the Y1 direction by the cylinder 72b. In addition, the first movable pressing unit 72 is configured to be able to retract the pair of pressing members 72a in the Y2 direction by the cylinder 72b to be arranged at a retracted position where the substrate W is not pressed.

[0033] The second movable pressing unit 73 has a pair of pressing members 73a that press the substrate W, and a cylinder 73b as an actuator for moving the pair of pressing members 73a forward and backward in the Y direction. The second movable pressing unit 73 is configured to be able to press the substrate W by moving the pair of pressing members 73a forward in the Y1 direction through the cylinder 73b. In addition, the second movable pressing unit 73 is configured to be able to move the pair of pressing members 73a backward in the Y2 direction through the cylinder 73b to place them at a retracted position where they do not press the substrate W.

[0034] In the substrate holding robot 1, the support surfaces on the upper side (Z1 direction side) of the pair of front support portions 21a and 21b, and the support surfaces of the pair of support members 71a of the movable support unit 71 support the processed (cleaned) substrate W. Moreover, the pair of pressing members 72a of the first movable pressing unit 72 press the processed (cleaned) substrate W supported by the support surfaces on the upper side (Z1 direction side) of the pair of front support portions 21a and 21b, and the support surfaces of the pair of support members 71a of the movable support unit 71.

[0035] In addition, in the substrate holding robot 1, the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 21a and 21b, and the support surfaces of the pair of rear support portions 22a and 22b support the substrate W before processing (before cleaning). Moreover, the pair of pressing members 73a of the second movable pressing unit 73 press the substrate W before processing (before cleaning) supported by the support surfaces on the lower side (Z2 direction side) of the pair of front support portions 21a and 21b and the support surfaces of the pair of rear support portions 22a and 22b. The pair of front support portions 21a and 21b, the pair of rear support portions 22a and 22b, the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 are used separately for the substrate W before processing (before cleaning) and the substrate W after processing (after cleaning).

[0036] In addition, the cylinders 71b of the movable support unit 71, the cylinders 72b of the first movable pressing unit 72, and the cylinders 73b of the second movable pressing unit 73 are disposed inside the frame 10. Further, the cylinders 71b of the movable support unit 71, the cylinders 72b of the first movable pressing unit 72, and the cylinders 73b of the second movable pressing unit 73 are arranged and disposed inside the frame 10 in a direction (Z direction) perpendicular to the main surface 20c of the blade 20. Specifically, when viewed from the direction (Z direction) perpendicular to the main surface 20c of the blade 20, the cylinders 71b of the movable support unit 71, the cylinders 72b of the first movable pressing unit 72, and the cylinders 73b of the second movable pressing unit 73 are arranged to overlap. Thereby, the cylinders 71b, 72b, and 73b are not arranged and disposed in the width direction (X direction) of the frame 10, and thus the cylinders 71b, 72b, and 73b can be compactly disposed in the width direction (X direction) of the frame 10.

[0037] In addition, the substrate holding robot 1 further includes a cover (housing) 80 provided separately from the frame 10 (see Figure 2 ). The cover 80 is provided so as to cover the frame 10 and a part of the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 (the part disposed inside the frame 10).

[0038] As Figure 4 shown, the substrate transfer robot 100 includes: a plurality of substrate detection sensors 40 provided corresponding to a plurality of blades 20 that respectively support a substrate (semiconductor wafer) W and detect the presence of the substrate W; and a sensor support member 50 that supports the plurality of substrate detection sensors 40 and includes a first hole portion 51 that collectively positions the plurality of substrate detection sensors 40 with respect to the plurality of blades 20. In addition, the first hole portion 51 is an example of the "positioning portion" in the claims. Further, in Figure 4 , the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73 are omitted.

[0039] In addition, the substrate detection sensor 40 is any one of an optical sensor (reflection type, transmission type), a capacitance sensor, a distance sensor, and a touch sensor (a sensor designed on the premise of contacting the substrate W). In the present embodiment, the substrate detection sensor 40 is a reflection type optical sensor. In the case of an optical sensor, fine adjustment of the inclination is required, and thus the sensor support member 50 of the present embodiment that collectively positions the plurality of substrate detection sensors 40 with respect to the plurality of blades 20 is particularly effective.

[0040] In addition, in the present embodiment, as Figure 5 and Figure 6As shown, the sensor support member 50 further includes a fixing portion 52 that is provided in common with respect to the plurality of substrate detection sensors 40 and fixes the sensor support member 50 to the frame 10. The first hole portion 51 is provided in the fixing portion 52. The fixing portion 52 has a plate shape extending in the Y direction.

[0041] In addition, in the present embodiment, the first hole portion 51 is configured to be able to adjust the position of the fixing portion 52 in the direction (Y1 direction) toward the blade 20 side. That is, the fixing portion 52 is configured to be able to slide and move in the Y direction with respect to the screw 43 (refer to Figure 4 ) inserted into the fixing portion 52.

[0042] In addition, in the present embodiment, the first hole portion 51 has an elongated hole shape (oval shape) extending in the direction (Y1 direction) toward the blade 20 side.

[0043] In addition, in the present embodiment, a plurality of the first hole portions 51 having an elongated hole shape are provided in the fixing portion 52. Specifically, two of the first hole portions 51 are provided in the fixing portion 52. In addition, the two first hole portions 51 are arranged adjacent to each other in the X direction.

[0044] In addition, in the present embodiment, by fixing the fixing portion 52 to the frame 10, the plurality of substrate detection sensors 40 are positioned with respect to the plurality of blades 20. Specifically, screws 43 are inserted into the two first hole portions 51 respectively. In addition, in this state, the position of the fixing portion 52 (substrate detection sensor 40) in the Y direction is then adjusted. Moreover, by fastening the screw 43 to the front end portion 10d of the frame 10 (refer to Figure 4 ), the sensor support member 50 is fixed to the frame 10. Thereby, the plurality of substrate detection sensors 40 are positioned with respect to the plurality of blades 20.

[0045] In addition, in the present embodiment, the plurality of blades 20 provided on the substrate holding robot 1 are arranged to be stacked in the vertical direction (Z direction) perpendicular to the main surface 20c of the blade 20. The sensor support member 50 includes a plurality of plate-shaped sensor arrangement portions 53 stacked in the vertical direction corresponding to the plurality of blades 20 stacked in the vertical direction. In addition, "stacked" also includes the concept of being stacked separately from each other.

[0046] Specifically, four blades 20 are provided on the substrate holding robot 1. In addition, four plate-shaped sensor arrangement portions 53 are provided corresponding to the four blades 20. In addition, the sensor arrangement portion 53 has a stepped shape. Moreover, the substrate detection sensor 40 is arranged in the lower stage portion 53a of the sensor arrangement portion 53 having a stepped shape. In addition, the corner portion on the Y1 direction side of the sensor arrangement portion 53 is chamfered.

[0047] In addition, the sensor support member 50 includes a connecting member 56 which connects four sensor arrangement portions 53 on the Y1 direction side and connects the fixing portion 52 on the Y2 direction side. The connecting member 56 has a plate shape. In addition, the connecting member 56 is arranged along the Z direction.

[0048] In addition, in the present embodiment, each of the plurality of sensor arrangement portions 53 includes a second hole portion 54 for fastening and fixing the substrate detection sensor 40 with a screw 42 (refer to Figure 4 ). The second hole portion 54 is provided in the lower stage portion 53a of the sensor arrangement portion 53 having a stepped shape.

[0049] In addition, in the present embodiment, each of the plurality of plate-shaped sensor arrangement portions 53 includes a third hole portion 55 through which a wiring 41 extending from the substrate detection sensor 40 (refer to Figure 4 ) penetrates and is inserted. The third hole portion 55 is provided at the boundary between the lower stage portion 53a and the upper stage portion 53b of the sensor arrangement portion 53 having a stepped shape.

[0050] In addition, in the present embodiment, as Figure 7 shown, each of the plurality of plate-shaped sensor arrangement portions 53 includes a guide groove 57 for guiding the wiring 41 penetrating and inserted through the third hole portion 55. The guide groove 57 is arranged to extend from the Y1 direction side to the Y2 direction side on the Z2 direction side of the upper stage portion 53b. The wiring 41 is arranged inside the guide groove 57. In addition, the wiring 41 guided by the guide groove 57 is guided to the Y2 direction side of the connecting member 56 via a cutout 56a or a hole portion 56b provided in the connecting member 56. In addition, as Figure 8 shown, by providing the guide groove 57, the bending of the wiring 41 extending from the substrate detection sensor 40 to the Y2 direction side can be reduced (close to a straight line shape).

[0051] In addition, in the present embodiment, as Figure 3 shown, when viewed from the Z direction, the movable support unit 71 for supporting the forward and backward movement of the substrate W has a U shape. In addition, when viewed from the Z direction, the first movable pressing unit 72 and the second movable pressing unit 73 for pressing the forward and backward movement of the substrate W have a U shape. Moreover, the substrate detection sensor 40 and the sensor support member 50 are arranged inside the movable support unit 71 having a U shape, and the first movable pressing unit 72 and the second movable pressing unit 73 having a U shape. Specifically, the substrate detection sensor 40 and the sensor support member 50 are arranged to be clamped by the U-shaped portion of the movable support unit 71 having a U shape.

[0052] Specifically, when observed from the Z direction, the U-shaped first movable pressing unit 72 is disposed inside the U-shaped second movable pressing unit 73. When observed from the Z direction, the U-shaped movable support unit 71 is disposed inside the U-shaped first movable pressing unit 72. Further, when observed from the Z direction, the substrate detection sensor 40 and the sensor support member 50 are disposed inside the U-shaped movable support unit 71.

[0053] [Effects of the Present Embodiment]

[0054] In the present embodiment, the following effects can be obtained.

[0055] In the present embodiment, as described above, the substrate holding robot 1 includes the sensor support member 50 that supports the plurality of substrate detection sensors 40 and includes the first hole portion 51 that collectively positions the plurality of substrate detection sensors 40 with respect to the plurality of blades 20. Thus, by collectively positioning the plurality of substrate detection sensors 40 with respect to the plurality of blades 20 by the sensor support member 50, the operation steps for positioning the plurality of substrate detection sensors 40 can be reduced. As a result, the positioning operation of the substrate detection sensors 40 can be simplified, and thus the workability of the positioning operation of the substrate detection sensors 40 can be improved.

[0056] Further, in the present embodiment, as described above, the sensor support member 50 further includes the fixing portion 52 that is provided in common with respect to the plurality of substrate detection sensors 40 and fixes the sensor support member 50, and the first hole portion 51 is provided in the fixing portion 52. Thus, since the fixing portion 52 is provided in common with respect to the plurality of substrate detection sensors 40, the plurality of substrate detection sensors 40 can be easily positioned collectively by the first hole portion 51 provided in the common fixing portion 52.

[0057] Further, in the present embodiment, as described above, the first hole portion 51 is configured to be able to adjust the position of the fixing portion 52 in the direction toward the blade 20 side. Thus, even when a deviation occurs in the distance between the first hole portion 51 and the blade 20 due to manufacturing errors or the like, the distance from the blade 20 can be adjusted by the first hole portion 51.

[0058] In addition, in the present embodiment, as described above, the first hole portion 51 has an elongated hole shape extending in the direction toward the blade 20 side. As a result, the fixing portion 52 can slide in the direction toward the blade 20 side with respect to a screw 43 or the like inserted into the first hole portion 51 having the elongated hole shape. As a result, the position of the fixing portion 52 can be easily adjusted in the direction toward the blade 20 side. In addition, due to the first hole portion 51 having the elongated hole shape, the fixing portion 52 can only move in the direction toward the blade 20 side, and the fixing portion 52 can be positioned in a direction orthogonal to the direction toward the blade 20 side.

[0059] In addition, in the present embodiment, as described above, a plurality of the first hole portions 51 having the elongated hole shape are provided in the fixing portion 52. As a result, since screws 43 or the like are inserted into the plurality of first hole portions 51, rotation of the fixing portion 52 in the horizontal plane including the direction toward the blade 20 side can be suppressed, unlike the case where only one first hole portion 51 having the elongated hole shape is provided.

[0060] In addition, in the present embodiment, as described above, by fixing the fixing portion 52 to the frame 10, a plurality of substrate detection sensors 40 are positioned with respect to the plurality of blades 20. As a result, since the fixing portion 52 (sensor support member 50) is fixed to the frame 10 that supports the plurality of blades 20, deviation of the relative positional relationship between the plurality of substrate detection sensors 40 supported by the sensor support member 50 and the plurality of blades 20 can be suppressed.

[0061] In addition, in the present embodiment, as described above, the plurality of blades 20 are arranged to be stacked in the vertical direction perpendicular to the main surface 20c of the blade 20, and the sensor support member 50 includes a plurality of plate-shaped sensor arrangement portions 53 that are stacked in the vertical direction corresponding to the plurality of blades 20 stacked in the vertical direction. As a result, a plurality of substrate detection sensors 40 can be easily arranged corresponding to the plurality of stacked blades 20.

[0062] In addition, in the present embodiment, as described above, each of the plurality of sensor arrangement portions 53 includes a second hole portion 54 for fastening and fixing the substrate detection sensor 40. As a result, by fastening the substrate detection sensor 40 to the sensor arrangement portion 53 with a screw 43 via the second hole portion 54, a plurality of substrate detection sensors 40 can be easily fixed to the plurality of sensor arrangement portions 53.

[0063] In addition, in the present embodiment, as described above, each of the plurality of plate-shaped sensor arrangement portions 53 includes a third hole portion 55 through which the wiring 41 extending from the substrate detection sensor 40 penetrates and is inserted. Thereby, the wiring 41 extending from the substrate detection sensor 40 can be guided to a desired position (such as the space inside the substrate holding robot 1) via the third hole portion 55. In addition, since the movement of the wiring 41 extending from the substrate detection sensor 40 is restricted by the third hole portion 55, it is possible to suppress the wiring 41 from coming into contact with other components as the substrate holding robot 1 moves.

[0064] In addition, in the present embodiment, each of the plurality of plate-shaped sensor arrangement portions 53 includes a guide groove 57 that guides the wiring 41 inserted through the third hole portion 55. Thereby, the wiring 41 can be arranged inside the guide groove 57, and thus it is possible to suppress interference between the wiring 41 and other components.

[0065] In addition, in the present embodiment, as described above, the substrate holding robot 1 further includes: a movable support unit 71 that performs forward and backward movement for supporting the substrate W and has a U shape; and a first movable pressing unit 72 and a second movable pressing unit 73 that perform forward and backward movement for pressing the substrate W and have a U shape. The substrate detection sensor 40 and the sensor support member 50 are arranged inside the movable support unit 71 having a U shape, the first movable pressing unit 72 having a U shape, and the second movable pressing unit 73 having a U shape. Thereby, since the substrate detection sensor 40 and the sensor support member 50 are arranged in the free space inside the movable support unit 71 having a U shape, the first movable pressing unit 72 having a U shape, and the second movable pressing unit 73 having a U shape, it is possible to effectively utilize the free space (that is, it is possible to suppress the enlargement of the substrate holding robot 1).

[0066] [Modification Example]

[0067] Furthermore, all points of the embodiments disclosed this time should be considered as illustrative and not as limitations on the present invention. The scope of the present invention is not defined by the description of the above embodiments, but is represented by the claims, and also includes the meaning equivalent to the claims and all changes (modification examples) within its scope.

[0068] For example, in the above-described embodiment, an example is shown in which the first hole portion 51 is configured to be able to adjust the position of the fixing portion 52 in the direction toward the blade 20 side, but the present invention is not limited thereto. For example, the first hole portion 51 may also be configured not to be able to adjust the position in the direction toward the blade 20 side. That is, the first hole portion 51 may also be a perfect circle shape. Additionally, the first hole portion 51 may be formed in a cross shape and configured to be able to adjust the position in two directions, namely, the direction toward the blade 20 side and the direction orthogonal to this direction.

[0069] Furthermore, in the above-described embodiment, an example is shown in which a plurality of the first hole portions 51 are provided in the fixing portion 52, but the present invention is not limited thereto. For example, only one first hole portion 51 may be provided in the fixing portion 52.

[0070] Moreover, in the above-described embodiment, an example is shown in which the first hole portion 51 is applied as the "positioning portion" of the present invention, but the present invention is not limited thereto. As the "positioning portion" of the present invention, a structure other than the first hole portion 51 may also be applied.

[0071] In addition, in the above-described embodiment, an example is shown in which the fixing portion 52 is fixed to the frame 10, but the present invention is not limited thereto. For example, the fixing portion 52 may also be fixed to a part of the substrate holding robot 1 other than the frame 10.

[0072] Also, in the above-described embodiment, an example is shown in which four blades 20 are provided, but the present invention is not limited thereto. For example, the number of blades 20 may also be a plurality other than four.

[0073] In addition, in the above-described embodiment, an example is shown in which the substrate detection sensor 40 and the sensor support member 50 are arranged inside the U-shaped movable support unit 71, the U-shaped first movable pressing unit 72, and the second movable pressing unit 73, but the present invention is not limited thereto. For example, the substrate detection sensor 40 and the sensor support member 50 may also be arranged outside the movable support unit 71, the first movable pressing unit 72, and the second movable pressing unit 73.

[0074] Description of Reference Numerals

[0075] 1... Substrate holding robot; 2... Arm; 10... Frame; 20... Vane; 20c... Main surface; 40... Substrate detection sensor; 41... Wiring; 50... Sensor support member; 51... First hole portion (positioning portion); 52... Fixing portion; 53... Sensor arrangement portion; 54... Second hole portion; 55... Third hole portion; 57... Guide groove; 71... Movable support unit; 72... First movable pressing unit (movable pressing unit); 73... Second movable pressing unit (movable pressing unit); 100... Substrate transfer robot; W... Substrate.

Claims

1. A substrate holding robot hand, wherein, the substrate holding robot hand includes: a frame; a plurality of blades, supported by the frame and respectively supporting a substrate; a plurality of substrate detection sensors, provided corresponding to the plurality of blades and detecting the presence of the substrate; and a sensor support member, supporting the plurality of substrate detection sensors and including a positioning portion that collectively positions the plurality of substrate detection sensors relative to the plurality of blades, the sensor support member further includes a fixing portion, which is provided in common relative to the plurality of substrate detection sensors and fixes the sensor support member, the positioning portion is provided on the fixing portion.

2. The substrate holding robot hand according to claim 1, wherein, the positioning portion is configured to be able to adjust the position of the fixing portion in a direction toward the blade side.

3. The substrate holding robot hand according to claim 2, wherein, the positioning portion includes a first hole portion having an elongated hole shape extending in a direction toward the blade side.

4. The substrate holding robot hand according to claim 3, wherein, a plurality of the first hole portions having the elongated hole shape are provided in the fixing portion.

5. The substrate holding robot hand according to claim 1, wherein, by fixing the fixing portion to the frame, the plurality of substrate detection sensors are positioned relative to the plurality of blades.

6. The substrate holding robot hand according to claim 1, wherein, the plurality of blades are arranged to be stacked in a vertical direction perpendicular to the main surface of the blade, the sensor support member includes a plurality of plate-shaped sensor arrangement portions, and the plurality of plate-shaped sensor arrangement portions are stacked in the vertical direction corresponding to the plurality of blades stacked in the vertical direction.

7. The substrate holding robot hand according to claim 6, wherein, the plurality of sensor arrangement portions respectively include a second hole portion for fastening and fixing the substrate detection sensor.

8. The substrate holding robot hand according to claim 6, wherein, the plurality of plate-shaped sensor arrangement portions respectively include a third hole portion through which a wiring extending from the substrate detection sensor penetrates and is inserted.

9. The substrate holding robot hand according to claim 8, wherein, the plurality of plate-shaped sensor arrangement portions respectively include a guide groove for guiding the wiring penetrating and inserted through the third hole portion.

10. The substrate holding robot hand according to claim 1, wherein, the substrate holding robot hand further includes: a movable support unit, performing a forward and backward movement for supporting the substrate and having a U-shaped configuration; and a movable pressing unit, performing a forward and backward movement for pressing the substrate and having a U-shaped configuration, the substrate detection sensor and the sensor support member are arranged inside the movable support unit having the U-shaped configuration and the movable pressing unit having the U-shaped configuration.

11. A substrate transfer robot, wherein, the substrate transfer robot includes: a substrate holding robot hand; and an arm for moving the substrate holding robot hand, the substrate holding robot hand includes: a frame; A plurality of vanes, supported by the frame and respectively supporting substrates; A plurality of substrate detection sensors, arranged to correspond to the plurality of vanes and detecting the presence of the substrates; and A sensor support member, supporting the plurality of substrate detection sensors and including a positioning portion for collectively positioning the plurality of substrate detection sensors relative to the plurality of vanes, The sensor support member further includes a fixing portion, which is provided in common with respect to the plurality of substrate detection sensors and fixes the sensor support member, The positioning portion is provided on the fixing portion.

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