A SERS detection structure for rapid enrichment of detected molecules and a preparation method thereof

Abstract

The application discloses a SERS detection structure for realizing rapid enrichment of detected molecules and a preparation method thereof, and relates to the technical field of molecule detection. The SERS detection structure for realizing rapid enrichment of detected molecules comprises a super-hydrophobic SERS unit and a heating resistor unit which are connected with each other. The heating resistor unit is used for heating the super-hydrophobic SERS unit to realize rapid enrichment of detected molecules. When the detected molecules are dropped on the surface of the super-hydrophobic SERS unit, the SERS detection structure can make the detected molecules be distributed in the form of droplets on the surface of the super-hydrophobic SERS unit. After the solvent is evaporated, the enrichment of the detected molecules can be realized, the detection uniformity is improved, and the detection limit is improved. In combination with the heating effect of the heating resistor unit, the evaporation speed of the droplets can be accelerated, the rapid enrichment of the detected molecules is realized, and the problem of low detection efficiency caused by too long evaporation time of the droplets is avoided. In addition, the detection structure is simple to prepare, does not need to depend on complex preparation steps, and the cost is reduced.

Description

Technical Field

[0001] This application relates to the field of molecular detection technology, and in particular to a SERS detection structure for rapid enrichment of the detected molecule and its preparation method. Background Technology

[0002] Surface-enhanced Raman spectroscopy (SERS) is a simple, low-cost, rapid, non-destructive, ultrasensitive, and information-rich analytical technique that can provide fingerprint-like information and offer identifiable vibrational information for molecular identification.

[0003] Currently, SERS is widely used in many fields such as analytical chemistry, biosensing, food and environmental safety. The activity of SERS mainly depends on the "hot spots" provided by the tips of the metal nanoparticles or metal nanostructures in the SERS chip. These "hot spots" are influenced by localized surface plasmon resonance (LSPR), which can provide significant electromagnetic enhancement. Furthermore, for SERS detection of analyte solutions exceeding the detection limit, a superhydrophobic (contact angle > 150°) SERS chip can be used to reduce the deposition area of ​​the analyte and achieve enrichment of the detected molecules.

[0004] In recent years, the main methods for fabricating superhydrophobic SERS chips include coating hydrophobic nanolayers on 3D nanostructure substrates, or using photolithography, nanoimprinting, and reactive plasma etching to prepare nanostructures with superhydrophobic properties. Traditional SERS chips often exhibit uneven distribution of detected molecules on the SERS chip surface due to the "coffee ring effect," which leads to a decrease in the uniformity of SERS chip detection and the detection limit. Furthermore, most existing methods rely on complex fabrication processes and suffer from slow evaporation rates and excessively long enrichment times of the analyte droplets, resulting in low detection efficiency. Summary of the Invention

[0005] The purpose of this application is to provide a SERS detection structure and its preparation method for achieving rapid enrichment of the detected molecules, in order to solve the problem that existing SERS chips often have uneven distribution of the detected molecules on the surface of the SERS chip due to the "coffee ring effect", which leads to a decrease in the detection uniformity and detection limit of the SERS chip; in addition, most existing methods rely on complex preparation methods and have problems such as slow evaporation rate of the analyte droplets and long enrichment time, resulting in low detection efficiency.

[0006] Firstly, this application provides a SERS detection structure for achieving rapid enrichment of the detected molecule, comprising:

[0007] Interconnected superhydrophobic SERS units and heating resistance units;

[0008] The superhydrophobic SERS unit enriches the molecules to be detected, thereby improving detection sensitivity;

[0009] The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules.

[0010] With the above technical solution, the SERS detection structure for rapid enrichment of detected molecules provided in this application includes interconnected superhydrophobic SERS units and heating resistor units. The heating resistor unit is used to heat the superhydrophobic SERS units to rapidly evaporate the solvent, thereby achieving rapid enrichment of detected molecules. In this application, when detected molecules are dropped onto the surface of the superhydrophobic SERS unit, the SERS detection structure allows for uniform distribution of the detected molecules on the surface, achieving molecule enrichment and avoiding uneven distribution of detected molecules on the surface of the superhydrophobic SERS unit due to the "coffee exchange effect." This improves detection uniformity and the detection limit. Furthermore, combined with the heating effect of the heating resistor unit, it accelerates droplet evaporation, avoiding the problem of reduced detection efficiency due to excessively long droplet evaporation time, thus achieving rapid enrichment of detected molecules. In addition, the detection structure is simple to prepare, requiring no complex preparation steps, thus reducing costs.

[0011] In one possible implementation, the heating resistor unit is disposed inside the superhydrophobic SERS unit, or around the superhydrophobic SERS unit, or on the back of the superhydrophobic SERS unit.

[0012] In one possible implementation, the heating resistance unit is a resistance unit made of noble metal material with a surface forming a superhydrophobic SERS unit having superhydrophobic properties.

[0013] In one possible implementation, a patterned superhydrophobic SERS unit is provided on the heating resistor unit to achieve patterned enrichment of the material.

[0014] Alternatively, the heating resistance unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and location of the material on the surface of the structure.

[0015] In one possible implementation, the superhydrophobic SERS unit includes: a substrate, and an insulating layer, an electrode, a superhydrophobic nanostructure, and a noble metal rough structure sequentially disposed on the substrate.

[0016] The heating resistor unit is disposed between the insulating layer and the superhydrophobic nanostructure;

[0017] The electrodes are disposed on both sides of the heating resistor unit.

[0018] In one possible implementation, the superhydrophobic SERS unit includes: a substrate, an insulating layer disposed on both sides of the substrate, an electrode and a heating resistor unit disposed on the insulating layer, and a superhydrophobic nanostructure and a noble metal rough structure disposed on the substrate in a region where the insulating layer is not disposed.

[0019] In one possible implementation, the superhydrophobic SERS unit includes: a substrate, and a superhydrophobic nanostructure and a noble metal rough structure disposed on one side of the substrate; it also includes an insulating layer disposed sequentially on the side of the substrate away from the superhydrophobic nanostructure, and an electrode and a heating resistor unit disposed on the back side of the insulating layer.

[0020] Secondly, this application also provides a method for preparing a SERS detection structure that enables rapid enrichment of the detected molecule, the method being used to prepare the SERS detection structure for rapid enrichment of the detected molecule as described in any of the first aspects, the method comprising:

[0021] Fabrication of interconnected superhydrophobic SERS units and heating resistance units;

[0022] The superhydrophobic SERS unit enriches the molecules to be detected, thereby improving detection sensitivity;

[0023] The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules.

[0024] In one possible implementation, the fabrication of the interconnected superhydrophobic SERS unit and heating resistance unit includes:

[0025] The superhydrophobic SERS unit was prepared.

[0026] The heating resistance unit is fabricated inside the superhydrophobic SERS unit, around the superhydrophobic SERS unit, or on the back side of the superhydrophobic SERS unit;

[0027] The fabrication of the interconnected superhydrophobic SERS unit and heating resistance unit further includes:

[0028] The heating resistance unit is prepared by forming a superhydrophobic SERS unit with superhydrophobic properties on the surface of a noble metal material;

[0029] The fabrication of the interconnected superhydrophobic SERS unit and heating resistance unit further includes:

[0030] The heating resistor unit is prepared, and a patterned superhydrophobic SERS unit is set on the heating resistor unit to achieve patterned enrichment of the material;

[0031] Alternatively, the superhydrophobic SERS unit can be fabricated, and the heating resistance unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and location of the material on the surface of the structure.

[0032] In one possible implementation, when the heating resistor unit is disposed inside the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed inside the superhydrophobic SERS unit, comprises:

[0033] Provide a substrate;

[0034] An insulating layer is prepared on the substrate by chemical deposition or thermal oxidation.

[0035] The heating resistor unit and electrodes are formed on the insulating layer by metal sputtering, photolithography and etching processes. The metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper and platinum.

[0036] A nanostructure with superhydrophobic properties is prepared on the heating resistor unit, and then a noble metal rough structure is deposited using a magnetron sputtering process. The detection molecules are enriched based on the noble metal rough structure to improve the detection sensitivity. The metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper, and platinum.

[0037] When the heating resistor unit is disposed around the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed around the superhydrophobic SERS unit, includes:

[0038] An insulating layer is grown on the substrate by chemical deposition or thermal oxidation, and the insulating layer is patterned by photolithography and etching processes, leaving only the required insulating layer portion on the substrate.

[0039] Metal electrodes and heating resistor units are fabricated on the substrate by metal sputtering or electroplating. The metals corresponding to the rough noble metal structure include aluminum, silver, gold, copper, and platinum. Finally, photolithography and lift-off processes are used to pattern the metal electrodes and heating resistor units, ensuring that the metal electrodes and heating resistor units are retained only above the insulating layer.

[0040] Using photolithography, SERS unit regions are patterned on the substrate to prepare a nanostructure with superhydrophobic properties. A noble metal rough structure is deposited using magnetron sputtering. Finally, a stripping process is used to pattern the structure and remove excess photoresist above the insulating layer. Based on the noble metal rough structure, the detected molecules are enriched to improve the detection sensitivity.

[0041] When the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, includes:

[0042] Provide a substrate;

[0043] A nanostructure with superhydrophobic properties is prepared on one side of the substrate, and a noble metal rough structure is deposited on the surface of the substrate using a magnetron sputtering process. The detection molecules are enriched based on the noble metal rough structure to improve the detection sensitivity.

[0044] On the other side of the substrate, an insulating layer is prepared by chemical deposition or thermal oxidation.

[0045] The metal electrode and the heating resistor unit are fabricated on the insulating layer by sputtering, photolithography and metal etching processes.

[0046] The beneficial effects of the method for preparing a SERS detection structure that enables rapid enrichment of the detected molecule provided in the second aspect are the same as those of the SERS detection structure that enables rapid enrichment of the detected molecule described in the first aspect or any possible implementation of the first aspect, and will not be repeated here. Attached Figure Description

[0047] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0048] Figure 1 This illustration shows a schematic diagram of a SERS detection structure for rapid enrichment of detected molecules provided in an embodiment of this application.

[0049] Figure 2 shows a schematic diagram of another SERS detection structure for achieving rapid enrichment of the detected molecule provided in an embodiment of this application;

[0050] Figure 3 shows a schematic diagram of another SERS detection structure for achieving rapid enrichment of the detected molecule provided in an embodiment of this application;

[0051] Figure 4This invention provides a schematic diagram of another SERS detection structure for rapid enrichment of the detected molecule, according to an embodiment of the present application.

[0052] Figure 5 This illustration shows a schematic diagram of a superhydrophobic nanostructure, which is a layer of candle ash nanoparticles, used to achieve rapid enrichment of the detected molecules in an SERS detection structure according to an embodiment of this application.

[0053] Figure 6 This invention provides a schematic diagram of another superhydrophobic nanostructure, namely a layer of candle ash nanoparticles, which enables the rapid enrichment of detected molecules in a SERS detection structure.

[0054] Figure 7 This illustration shows a schematic diagram of another superhydrophobic nanostructure provided in this application, which is a candle ash nanoparticle layer that enables the rapid enrichment of detected molecules in a SERS detection structure.

[0055] Figure 8 This illustration shows a schematic diagram of a superhydrophobic nanostructure, specifically a nanoforest layer, provided in an embodiment of this application, for SERS detection to achieve rapid enrichment of the detected molecules.

[0056] Figure 9 This illustration shows a schematic diagram of another superhydrophobic nanostructure provided in this application, namely a nanoforest layer, for SERS detection to achieve rapid enrichment of the detected molecules;

[0057] Figure 10 This illustration shows a schematic diagram of another superhydrophobic nanostructure provided in this application, namely a nanoforest layer, for SERS detection to achieve rapid enrichment of the detected molecules;

[0058] Figure 11 The diagram shows a flowchart of a method for preparing a SERS detection structure that enables rapid enrichment of the detected molecule, as provided in an embodiment of this application.

[0059] Figure label:

[0060] 10-Superhydrophobic SERS unit; 20-Heating resistance unit; 101-Substrate; 102-Insulating layer; 103-Electrode; 104-Superhydrophobic nanostructure; 1041-Candle ash nanoparticle layer; 1042-Nano forest layer; 105-Noble metal rough structure. Detailed Implementation

[0061] To facilitate a clear description of the technical solutions in the embodiments of this application, the terms "first" and "second" are used in the embodiments of this application to distinguish identical or similar items with essentially the same function and effect. For example, the first threshold and the second threshold are only used to distinguish different thresholds and do not limit their order. Those skilled in the art will understand that the terms "first" and "second" do not limit the quantity or execution order, and the terms "first" and "second" are not necessarily different.

[0062] It should be noted that, in this application, the terms "exemplary" or "for example" are used to indicate that something is being described as an example, illustration, or illustration. Any embodiment or design described as "exemplary" or "for example" in this application should not be construed as being more preferred or advantageous than other embodiments or design solutions. Specifically, the use of terms such as "exemplary" or "for example" is intended to present the relevant concepts in a concrete manner.

[0063] In this application, "at least one" means one or more, and "more than one" means two or more. "And / or" describes the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can mean: A alone, A and B simultaneously, or B alone, where A and B can be singular or plural. The character " / " generally indicates that the preceding and following related objects are in an "or" relationship. "At least one of the following" or similar expressions refer to any combination of these items, including any combination of single or plural items. For example, at least one of a, b, or c can mean: a, b, c, a combination of a and b, a combination of a and c, a combination of b and c, or a, b, and c, where a, b, and c can be single or multiple.

[0064] Figure 1 This illustration shows a schematic diagram of a SERS detection structure for rapid enrichment of the detected molecule, as provided in an embodiment of this application. Figure 1 As shown, the SERS detection structure for achieving rapid enrichment of the detected molecules includes:

[0065] Interconnected superhydrophobic SERS unit 10 and heating resistance unit 20;

[0066] The heating resistor unit 20 is used to heat the superhydrophobic SERS unit 10 to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules.

[0067] In summary, the SERS detection structure for rapid enrichment of detected molecules provided in this application comprises an interconnected superhydrophobic SERS unit 10 and a heating resistor unit 20. The heating resistor unit 20 heats the superhydrophobic SERS unit 10 to rapidly evaporate the solvent, thereby achieving rapid enrichment of the detected molecules. When the detected molecules are dropped onto the surface of the superhydrophobic SERS unit, the SERS detection structure in this application ensures uniform distribution of the detected molecules on the surface, achieving molecule enrichment and avoiding the uneven distribution of detected molecules on the surface of the superhydrophobic SERS unit caused by the "coffee ring effect." This improves detection uniformity and the detection limit. Furthermore, combined with the heating effect of the heating resistor unit, it accelerates the droplet evaporation rate, avoiding the problem of reduced detection efficiency due to excessively long droplet evaporation time, thus achieving rapid enrichment of the detected molecules. In addition, the detection structure is simple to prepare, requiring no complex preparation steps, thus reducing costs.

[0068] Figure 2 shows a schematic diagram of another SERS detection structure for rapid enrichment of the detected molecule provided in an embodiment of this application. As shown in Figure 2, the SERS detection structure for rapid enrichment of the detected molecule includes:

[0069] The superhydrophobic SERS unit 10 and the heating resistor unit 20 are shown in Figure 2(a). The heating resistor unit 20 is disposed inside the superhydrophobic SERS unit 10, or as shown in Figure 2(b), disposed around the superhydrophobic SERS unit 10, or as shown in Figure 2(c), disposed on the back side of the superhydrophobic SERS unit 10.

[0070] The heating resistor unit 20 is used to heat the superhydrophobic SERS unit 10, thereby enabling rapid enrichment of materials through the superhydrophobic nanostructure.

[0071] In summary, the SERS detection structure for rapid enrichment of detected molecules provided in this application includes a superhydrophobic SERS unit and a heating resistor unit. The heating resistor unit is disposed inside, around, or on the back of the superhydrophobic SERS unit. The heating resistor unit heats the superhydrophobic SERS unit to rapidly evaporate the solvent, thereby achieving rapid enrichment of the detected molecules. In this application, the SERS detection structure allows the detected molecules to be dropped onto the superhydrophobic SERS unit... When the superhydrophobic SERS unit is used, the molecules to be detected can be uniformly distributed on the surface of the superhydrophobic SERS unit, thus achieving the enrichment of the molecules and avoiding the uneven distribution of molecules on the surface of the superhydrophobic SERS unit caused by the "coffee exchange effect". This improves the detection uniformity and the detection limit. In addition, the heating effect of the heating resistor unit can accelerate the droplet evaporation rate and avoid the problem of reduced detection efficiency due to excessive droplet evaporation time, thus achieving rapid enrichment of the molecules to be detected. Furthermore, the detection structure is simple to prepare and does not rely on complex preparation steps, thereby reducing costs.

[0072] This application also provides a SERS detection structure for rapid enrichment of detected molecules. The heating resistor unit is a resistor unit made of noble metal material with a superhydrophobic SERS unit formed on its surface. The structure is simple. When the detected molecules are dropped onto the surface of the superhydrophobic SERS unit, the detected molecules can be uniformly distributed on the surface of the superhydrophobic SERS unit, achieving enrichment of the detected molecules. This avoids the phenomenon of uneven distribution of detected molecules on the surface of the superhydrophobic SERS unit caused by the "coffee ring effect", thereby improving detection uniformity and detection limit. In addition, combined with the heating effect of the heating resistor unit, the droplet evaporation rate can be accelerated, avoiding the problem of reduced detection efficiency due to excessive droplet evaporation time, thus achieving rapid enrichment of detected molecules. Furthermore, the detection structure is simple to prepare, without relying on complex preparation steps, reducing costs.

[0073] This application embodiment also provides a SERS detection structure for achieving rapid enrichment of the detected molecules, wherein a patterned superhydrophobic SERS unit is provided on the heating resistor unit to achieve patterned enrichment of the substance.

[0074] Alternatively, the heating resistance unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and location of the material on the surface of the structure.

[0075] For example, Figure 3 shows a schematic diagram of another SERS detection structure for rapid enrichment of detected molecules provided in this application embodiment. As shown in Figure 3(a), the superhydrophobic SERS unit 10 can be patterned on the heating resistor unit 20 to achieve patterned enrichment of the substance; or as shown in Figure 3(b), the heating resistor unit 20 can be patterned on the superhydrophobic SERS unit 10 to guide the enrichment rate and position of the substance on the structure surface. When the detected molecules are dropped onto the surface of the superhydrophobic SERS unit, the detected molecules can be uniformly distributed on the surface of the superhydrophobic SERS unit, achieving enrichment of the detected molecules and avoiding the phenomenon of uneven distribution of detected molecules on the surface of the superhydrophobic SERS unit due to the "coffee exchange effect", thereby improving detection uniformity and detection limit. In addition, combined with the heating effect of the heating resistor unit, the droplet evaporation rate can be accelerated, avoiding the problem of reduced detection efficiency due to excessive droplet evaporation time, achieving rapid enrichment of detected molecules. Furthermore, its detection structure is simple to prepare, does not rely on complex preparation steps, and reduces costs.

[0076] Figure 4 This application provides a schematic diagram of another SERS detection structure for rapid enrichment of the detected molecule, as illustrated in the embodiments of this application. Figure 4 As shown, the superhydrophobic SERS unit includes: a substrate 101, and an insulating layer 102, an electrode 103, a superhydrophobic nanostructure 104 and a noble metal rough structure 105 sequentially disposed on the substrate 101, and also includes a heating resistor unit 20 connected to the electrode 103.

[0077] It should be noted that, in this application, the rough structure of the precious metal can be composed of gold nanoparticles or other precious metals, and the embodiments of this application do not specifically limit it.

[0078] In this application, the heating resistor unit is disposed between the insulating layer and the superhydrophobic nanostructure; the electrodes are disposed on both sides of the heating resistor unit. In this application, the superhydrophobic nanostructure 104 can be either the candle ash nanoparticle layer 1041 or the nanoforest layer 1042. The superhydrophobic nanostructure can also be other material structures with hydrophobic properties. This application does not specifically limit this, and adjustments can be made according to actual application scenarios. This application uses the candle ash nanoparticle layer and the nanoforest layer as examples to describe the structure, as follows:

[0079] Figure 5 This illustration shows a schematic diagram of a SERS detection structure, which is a superhydrophobic nanostructure consisting of a layer of candle ash nanoparticles, to achieve rapid enrichment of the detected molecules, as provided in an embodiment of this application. Figure 5As shown, the superhydrophobic SERS unit includes: a substrate 101, and an insulating layer 102, an electrode 103, a candle ash nanoparticle layer 1041, and a noble metal rough structure 105 sequentially disposed on the substrate 101.

[0080] The heating resistor unit 20 is disposed between the insulating layer 102 and the candle ash nanoparticle layer 1041;

[0081] The electrodes 103 are disposed on both sides of the heating resistor unit 20, and the candle ash nanoparticle layer 1041 is disposed on the upper surface of the heating resistor unit 20.

[0082] It should be noted that, in this application, the rough structure of the precious metal can be composed of gold nanoparticles or other precious metals, and the embodiments of this application do not specifically limit it.

[0083] In this application, a heating resistor unit is integrated into the superhydrophobic SERS unit. The heating resistor unit can surround the candle ash nanoparticle layer 1041. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0084] In this application, the superhydrophobic SERS unit includes: a substrate, an insulating layer disposed on both sides of the substrate, an electrode and a heating resistor unit disposed on the insulating layer, and a superhydrophobic nanostructure and a noble metal rough structure disposed on the substrate in a region where the insulating layer is not disposed.

[0085] Figure 6 This illustration shows a schematic diagram of another superhydrophobic nanostructure provided in this application, namely a layer of candle ash nanoparticles, for SERS detection to achieve rapid enrichment of the detected molecules. Figure 6 As shown, the superhydrophobic SERS unit package 10 includes: a substrate 101, an insulating layer 102 disposed on both sides of the substrate 101, an electrode 103 disposed on the insulating layer 102, a candle ash nanoparticle layer 1041 disposed on the substrate 101 in a region where the insulating layer 102 is not disposed, and a noble metal rough structure 105 disposed on the candle ash nanoparticle layer 1041.

[0086] The heating resistance unit 20 is disposed around the electrode 103 in the regions on both sides of the candle ash nanoparticle layer 1041.

[0087] In this application, a heating resistor unit is integrated around the superhydrophobic SERS unit. The heating resistor unit can surround the detected molecular droplet, that is, around the noble metal rough structure 105 on the candle ash nanoparticle layer 1041. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0088] In this application, the superhydrophobic SERS unit includes: a substrate, and a superhydrophobic nanostructure and a noble metal roughening structure disposed on one side of the substrate; it also includes an insulating layer disposed sequentially on the side of the substrate away from the noble metal roughening structure, and an electrode and a heating resistor unit disposed on the back side of the insulating layer.

[0089] Figure 7 This illustration shows a schematic diagram of another SERS detection structure provided in this application, which is a layer of candle ash nanoparticles that enables rapid enrichment of the detected molecules. Figure 7 As shown, the superhydrophobic SERS unit 10 includes: a substrate 101, a candle ash nanoparticle layer 1041 disposed on one side of the substrate 101, and a noble metal rough structure 105 disposed on the candle ash nanoparticle layer 1041; it also includes an insulating layer 102 disposed sequentially on the side of the substrate 101 away from the candle ash nanoparticle layer 1041, and an electrode 103 and a heating resistor unit 20 disposed on the back side of the insulating layer 102.

[0090] In this application, the heating resistor unit can be pre-integrated onto the back side of the superhydrophobic SERS unit. When the heating resistor unit is working, it can transfer heat through the substrate to the area around the detected molecular droplet, that is, around the noble metal rough structure 105 on the candle ash nanoparticle layer 1041. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0091] Figure 8 This illustration shows a schematic diagram of a SERS detection structure based on a superhydrophobic nanostructure, specifically a nanoforest layer, to achieve rapid enrichment of the detected molecules, as provided in an embodiment of this application. Figure 8 As shown, the superhydrophobic SERS unit 10 includes: a substrate 101, and an insulating layer 102, an electrode 103, the nanoforest layer 1042, and a noble metal rough structure 105 sequentially disposed on the substrate 101.

[0092] The heating resistor unit 20 is disposed between the insulating layer 102 and the nanoforest layer 1042;

[0093] The electrodes 103 are disposed on both sides of the heating resistor unit 20, and the nanoforest layer 1042 is disposed on the upper surface of the heating resistor unit 20.

[0094] In this application, a heating resistor unit is integrated into the superhydrophobic SERS unit. The heating resistor unit can surround the candle ash nanoparticle layer 1041. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0095] Figure 9 This invention provides a schematic diagram of another superhydrophobic nanostructure, a nanoforest layer, for SERS detection, which enables rapid enrichment of the detected molecules. Figure 9 As shown, the superhydrophobic SERS unit 10 includes: a substrate 101, an insulating layer 102 disposed on both sides of the substrate 101, an electrode 103 disposed on the insulating layer 102, a nanoforest layer 1042 disposed on the substrate 101 in a region where the insulating layer 102 is not disposed, and a noble metal rough structure 105 disposed on the nanoforest layer 1042.

[0096] The heating resistor unit 20 is disposed around the electrode 103 in the regions on both sides of the nanoforest layer 1042.

[0097] In this application, a heating resistor unit is integrated around the superhydrophobic SERS unit. The heating resistor unit can surround the molecular droplet being detected, that is, around the noble metal rough structure 105 on the nanoforest layer 1042. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0098] Figure 10 This illustration shows a schematic diagram of another superhydrophobic nanostructure provided in this application, namely a nanoforest layer, for SERS detection to achieve rapid enrichment of the detected molecules. Figure 10 As shown, the superhydrophobic SERS unit 10 includes: a substrate 101, a nanoforest layer 1042 disposed on one side of the substrate 101, and a noble metal rough structure 105 disposed on the nanoforest layer 1042; it also includes an insulating layer 102 disposed sequentially on the side of the substrate 101 away from the nanoforest layer 1042, and an electrode 103 and a heating resistor unit 20 disposed on the back side of the insulating layer 102.

[0099] In this application, the heating resistor unit can be pre-integrated into the back side of the superhydrophobic SERS unit. When the heating resistor unit is working, it can transfer heat through the substrate to the area around the detected molecular droplet, that is, around the noble metal rough structure 105 on the nanoforest layer 1042. When the heating resistor unit is working, the heat around the droplet will accelerate the evaporation rate of the droplet and improve the enrichment efficiency.

[0100] for Figures 6-10 Any of the SERS detection structures described above for achieving rapid enrichment of the detected molecules can be configured with a patterned superhydrophobic SERS unit on the heating resistor unit to achieve patterned enrichment of the substance; or the heating resistor unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and location of the substance on the structure surface. The embodiments of this application will not be elaborated here.

[0101] In summary, the SERS detection structure for rapid enrichment of detected molecules provided in this application embodiment can achieve uniform distribution of detected molecules on the surface of the superhydrophobic SERS unit when the detected molecules are dropped onto it, thus enriching the detected molecules and avoiding the uneven distribution of detected molecules on the surface of the superhydrophobic SERS unit caused by the "coffee exchange effect". This improves detection uniformity and detection limit. Furthermore, combined with the heating effect of the heating resistor unit, the droplet evaporation rate can be accelerated, avoiding the problem of reduced detection efficiency due to excessive droplet evaporation time, thus achieving rapid enrichment of detected molecules. In addition, the detection structure is simple to prepare, requiring no complex preparation steps, thereby reducing costs.

[0102] Figure 11 This document illustrates a flowchart of a method for preparing a SERS detection structure that enables rapid enrichment of the detected molecule, as provided in an embodiment of this application. Figure 11 As shown, used for preparation Figures 1-10 The SERS detection structure for rapid enrichment of the detected molecule as described above, wherein the method includes:

[0103] Step 301: Fabricate interconnected superhydrophobic SERS units and heating resistance units.

[0104] The superhydrophobic SERS unit enriches the molecules to be detected, thereby improving detection sensitivity;

[0105] The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules.

[0106] Optionally, step 301 above may include:

[0107] Sub-step S1: Prepare the superhydrophobic SERS unit.

[0108] Sub-step S2: The heating resistor unit is fabricated inside the superhydrophobic SERS unit, around the superhydrophobic SERS unit, or on the back side of the superhydrophobic SERS unit.

[0109] The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules.

[0110] In this application, the superhydrophobic nanostructure includes either a layer of candle ash nanoparticles or a nanoforest layer.

[0111] Optionally, when the heating resistor unit is disposed inside the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, including the placement of the heating resistor unit inside the superhydrophobic SERS unit, comprises the following sub-steps:

[0112] Sub-step S21: Provide a substrate;

[0113] Sub-step S22: An insulating layer is prepared on the substrate by chemical deposition or thermal oxidation process;

[0114] Sub-step S23: The heating resistor unit and electrode are formed on the insulating layer by metal sputtering, photolithography and etching processes. The metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper and platinum.

[0115] Sub-step S24: Fabricate a nanostructure with superhydrophobic properties on the heating resistor unit.

[0116] In the case where the superhydrophobic nanostructure is a layer of candle ash nanoparticles, the specific implementation process of the above sub-step A4 may include:

[0117] The substrate of the pre-integrated heating resistor unit is placed 1.5 cm above the candle wick. To ensure uniform deposition of the candle ash nanoparticles, the substrate is swept across the top of the flame every 2 seconds for 60 seconds, depositing the candle ash nanoparticle layer in the middle area of ​​the second insulating layer where no electrode is deposited.

[0118] Sub-step S25: Deposit a noble metal rough structure using a magnetron sputtering process, and enrich the detected molecules based on the noble metal rough structure to improve detection sensitivity; the metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper, and platinum.

[0119] Specifically, photolithography can be used to pattern SERS unit regions on the substrate, a noble metal rough structure can be deposited using magnetron sputtering, and finally, an excess photoresist can be removed using a lift-off process. Based on the noble metal rough structure, the detected molecules can be enriched to improve detection sensitivity.

[0120] Optionally, when the heating resistor unit is disposed around the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, including the placement of the heating resistor unit around the superhydrophobic SERS unit, comprises the following sub-steps:

[0121] Sub-step S26: Provide a substrate;

[0122] Sub-step S27: An insulating layer is grown on the substrate by chemical deposition or thermal oxidation, and the insulating layer is patterned by photolithography and etching processes, retaining only the required insulating layer portion on the substrate.

[0123] Sub-step S28: The metal electrode and the heating resistor unit are prepared on the substrate by metal sputtering or electroplating. The metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper and platinum. Finally, the metal electrode and the heating resistor unit are patterned by photolithography and lift-off process to ensure that the metal electrode and the heating resistor unit are only retained above the insulating layer.

[0124] Sub-step S29: Using photolithography, SERS unit regions are patterned on the substrate to prepare nanostructures with superhydrophobic properties. A noble metal rough structure is deposited using magnetron sputtering. Finally, a stripping process is used to pattern the structure and remove excess photoresist above the insulating layer. Based on the noble metal rough structure, the detected molecules are enriched to improve detection sensitivity.

[0125] Optionally, when the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, including the provision of the heating resistor unit on the back side of the superhydrophobic SERS unit, comprises the following sub-steps:

[0126] Sub-step S211: Provide a substrate;

[0127] Sub-step S212: A nanostructure with superhydrophobic properties is prepared on one side of the substrate, and a noble metal rough structure is deposited on the surface of the substrate using a magnetron sputtering process. The detection molecules are enriched based on the noble metal rough structure to improve the detection sensitivity.

[0128] Sub-step S213: On the other side of the substrate, an insulating layer is prepared by chemical deposition or thermal oxidation process;

[0129] Sub-step S214: Fabricate the metal electrode and the heating resistor unit on the insulating layer using sputtering, photolithography, and metal etching processes.

[0130] Optionally, step 301 above may also include:

[0131] Sub-step A1: Prepare the heating resistance unit of the superhydrophobic SERS unit with superhydrophobic properties on the surface of the noble metal material.

[0132] Optionally, step 301 above may also include:

[0133] Sub-step B1: Prepare the heating resistor unit, and set the patterned superhydrophobic SERS unit on the heating resistor unit to achieve patterned enrichment of the material.

[0134] Or sub-step B2: Prepare the superhydrophobic SERS unit, and pattern the heating resistance unit on the superhydrophobic SERS unit to guide the enrichment rate and enrichment location of the material on the surface of the structure.

[0135] In summary, the method for preparing a SERS detection structure for rapid enrichment of detected molecules provided in this application involves preparing interconnected superhydrophobic SERS units and heating resistor units. The heating resistor units are used to heat the superhydrophobic SERS units to rapidly evaporate the solvent, thereby achieving rapid enrichment of detected molecules. When the detected molecules are dropped onto the surface of the superhydrophobic SERS units, the molecules can be uniformly distributed on the surface, achieving molecule enrichment and avoiding the uneven distribution of detected molecules on the surface of the superhydrophobic SERS units caused by the "coffee exchange effect." This improves detection uniformity and the detection limit. Furthermore, combined with the heating effect of the heating resistor units, the droplet evaporation rate can be accelerated, avoiding the problem of reduced detection efficiency due to excessively long droplet evaporation time. This achieves rapid enrichment of detected molecules. In addition, the detection structure is simple to prepare, requiring no complex preparation steps, thus reducing costs.

[0136] This application provides a method for preparing SERS detection structures that enable rapid enrichment of the target molecule, and can prepare structures such as... Figures 1 to 10 To avoid repetition, any of the SERS detection structures shown here that enable rapid enrichment of the detected molecules will not be described again.

[0137] Although this application has been described herein in conjunction with various embodiments, those skilled in the art, by reviewing the accompanying drawings, the disclosure, and the appended claims, will understand and implement other variations of the disclosed embodiments in carrying out the claimed application. In the claims, the word "comprising" does not exclude other components or steps, and "a" or "an" does not exclude multiple instances. A single processor or other unit can implement several functions listed in the claims. While different dependent claims may recite certain measures, this does not mean that these measures cannot be combined to produce good results.

[0138] Although this application has been described in conjunction with specific features and embodiments, it is obvious that various modifications and combinations can be made thereto without departing from the spirit and scope of this application. Accordingly, this specification and drawings are merely exemplary illustrations of this application as defined by the appended claims, and are considered to cover any and all modifications, variations, combinations, or equivalents within the scope of this application. Clearly, those skilled in the art can make various alterations and modifications to this application without departing from the spirit and scope of this application. Thus, if such modifications and modifications of this application fall within the scope of the claims of this application and their equivalents, this application is also intended to include such modifications and modifications.

Claims

1. A SERS detection structure for rapid enrichment of the detected molecule, characterized in that, include: Interconnected superhydrophobic SERS units and heating resistance units; The superhydrophobic SERS unit enriches the molecules to be detected, thereby improving detection sensitivity; The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly evaporate the solvent and achieve rapid enrichment of the detected molecules. The heating resistor unit is disposed inside the superhydrophobic SERS unit, or around the superhydrophobic SERS unit, or on the back of the superhydrophobic SERS unit; When the heating resistor unit is disposed around the superhydrophobic SERS unit, the superhydrophobic SERS unit includes: a substrate, an insulating layer disposed on both sides of the substrate, an electrode and a heating resistor unit disposed on the insulating layer, and a superhydrophobic nanostructure and a noble metal rough structure disposed on the area of ​​the substrate where the insulating layer is not disposed.

2. The SERS detection structure for rapid enrichment of the detected molecule according to claim 1, characterized in that, The heating resistance unit is a resistance unit made of noble metal material with a surface formed of superhydrophobic SERS unit.

3. The SERS detection structure for rapid enrichment of the detected molecule according to claim 1, characterized in that, A patterned superhydrophobic SERS unit is set on the heating resistor unit to achieve patterned enrichment of the detected molecules; Alternatively, the heating resistance unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and location of the detected molecules on the surface of the structure.

4. The SERS detection structure for rapid enrichment of the detected molecule according to claim 1, characterized in that, When the heating resistor unit is disposed inside the superhydrophobic SERS unit, the superhydrophobic SERS unit includes: a substrate, and an insulating layer, an electrode, a superhydrophobic nanostructure, and a noble metal rough structure sequentially disposed on the substrate; the heating resistor unit is disposed between the insulating layer and the superhydrophobic nanostructure; the electrode is disposed on both sides of the heating resistor unit.

5. The SERS detection structure for rapid enrichment of the detected molecule according to claim 1, characterized in that, When the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, the superhydrophobic SERS unit includes: a substrate, and a superhydrophobic nanostructure and a noble metal rough structure disposed on one side of the substrate; it also includes an insulating layer disposed sequentially on the side of the substrate away from the noble metal rough structure, and an electrode and a heating resistor unit disposed on the back side of the insulating layer.

6. A method for preparing a SERS detection structure for rapid enrichment of the target molecule, characterized in that, The method for preparing the SERS detection structure for rapid enrichment of the detected molecule as described in any one of claims 1-5 includes: Fabricating interconnected superhydrophobic SERS units and heating resistor units; the fabrication of interconnected superhydrophobic SERS units and heating resistor units includes: fabricating the superhydrophobic SERS units; fabricating the heating resistor units inside the superhydrophobic SERS units, around the superhydrophobic SERS units, or on the back side of the superhydrophobic SERS units; The superhydrophobic SERS unit enriches the molecules to be detected, thereby improving detection sensitivity; The heating resistor unit is used to heat the superhydrophobic SERS unit to rapidly enrich the molecules to be detected. When the heating resistor unit is disposed inside the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed inside the superhydrophobic SERS unit, includes: providing a substrate; preparing an insulating layer on the substrate by chemical deposition or thermal oxidation; forming the heating resistor unit and electrodes on the insulating layer by metal sputtering, photolithography, and etching; fabricating a nanostructure with superhydrophobic properties on the heating resistor unit, and then depositing a noble metal rough structure by magnetron sputtering, thereby enriching the detected molecules based on the noble metal rough structure to improve detection sensitivity; the metal corresponding to the noble metal rough structure includes aluminum, silver, gold, copper, or platinum.

7. The method for preparing a SERS detection structure for rapid enrichment of the detected molecule according to claim 6, characterized in that, The fabrication of the interconnected superhydrophobic SERS unit and heating resistance unit further includes: The heating resistor unit is prepared, and a patterned superhydrophobic SERS unit is set on the heating resistor unit to achieve patterned enrichment of the detected molecules. Alternatively, the superhydrophobic SERS unit can be prepared, and the heating resistance unit can be patterned on the superhydrophobic SERS unit to guide the enrichment rate and enrichment position of the detected molecules on the surface of the structure.

8. The method for preparing a SERS detection structure for rapid enrichment of the detected molecule according to claim 6, characterized in that, When the heating resistor unit is disposed around the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed around the superhydrophobic SERS unit, includes: Provide a substrate; An insulating layer is grown on the substrate by chemical deposition or thermal oxidation, and the insulating layer is patterned by photolithography and etching processes, leaving only the required insulating layer portion on the substrate. Metal electrodes and heating resistor units are fabricated on the substrate by metal sputtering or electroplating. The metals corresponding to the noble metal rough structure include aluminum, silver, gold, copper or platinum. Finally, photolithography and lift-off processes are used to pattern the metal electrodes and heating resistor units, ensuring that the metal electrodes and heating resistor units are retained only above the insulating layer. Using photolithography, SERS unit regions are patterned on the substrate to prepare a nanostructure with superhydrophobic properties. A noble metal rough structure is deposited using magnetron sputtering. Finally, a stripping process is used to pattern the structure and remove excess photoresist above the insulating layer. Based on the noble metal rough structure, the detected molecules are enriched to improve the detection sensitivity. When the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, the fabrication of the superhydrophobic SERS unit, wherein the heating resistor unit is disposed on the back side of the superhydrophobic SERS unit, includes: Provide a substrate; A nanostructure with superhydrophobic properties is prepared on one side of the substrate, and a noble metal rough structure is deposited on the surface of the substrate using a magnetron sputtering process. The detection molecules are enriched based on the noble metal rough structure to improve the detection sensitivity. On the other side of the substrate, an insulating layer is prepared by chemical deposition or thermal oxidation. The metal electrode and the heating resistor unit are fabricated on the insulating layer by sputtering, photolithography and metal etching processes.

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