Method for detecting atomization of polycrystalline silicon reduction furnace, adjusting method, detection device and adjusting device

Abstract

This invention provides a method for detecting and adjusting atomization in a polysilicon reduction furnace, as well as a detection and adjustment device. The detection method includes: installing a dust detector on the exhaust gas outlet pipeline of the polysilicon reduction furnace; measuring the dust concentration every 2-5 minutes; using 15-20 values ​​prior to the current moment as a data set; calculating the range and variance of this data set; determining that when 24 < range ≤ 32 and 96 < variance ≤ 128, the current atomization is light; when 32 < range ≤ 40 and 128 < variance ≤ 160, the current atomization is moderate; and when the range > 40 and variance > 160, the current atomization is heavy. This method can accurately determine the degree of atomization in the reduction furnace, allowing operators to promptly monitor and adjust the furnace, achieving a certain degree of atomization boundary control, thereby reducing power consumption while ensuring product quality.

Description

Technical Field

[0001] This invention specifically relates to a method for detecting and adjusting atomization in a polycrystalline silicon reduction furnace, a detection device, and an adjustment device. Background Technology

[0002] The reduction furnace is the core equipment in polycrystalline silicon production. The polycrystalline silicon rods produced by it need to have a smooth and dense surface while meeting the requirements of physical and chemical properties such as resistivity, minority carrier lifetime, and impurity content.

[0003] The polycrystalline silicon reduction growth process is a complex chemical reaction process characterized by multiple variables, strong coupling, large time lag, and time-varying characteristics. During actual production operation of the reduction furnace, while normal polycrystalline silicon deposition is taking place, when the temperature of the gas phase space inside the furnace exceeds a certain level, chlorosilanes undergo thermal decomposition, resulting in the precipitation of fine silicon powder within the furnace gas phase space, a phenomenon known as atomization. This leads to irregular particles or internal inclusions on the surface of the polycrystalline silicon rod, causing the polycrystalline silicon product to fail to meet quality requirements.

[0004] There are many reasons for atomization during the operation of the reduction furnace, and there are also many corresponding measures that can be taken, such as: reducing the surface temperature of the polycrystalline silicon rod in the reduction furnace, increasing the flow rate of raw material hydrogen, increasing the total flow rate of raw materials, and controlling the content of dichlorosilane.

[0005] As research into the optimization and control of reduction furnaces deepens, it has been discovered that reduction furnaces exhibit corresponding power consumption reduction effects under different atomization states. Achieving a certain degree of edge-controlled atomization operation can both reduce power consumption and ensure product quality. However, the degree of atomization during reduction growth relies on operators' experience-based judgment through sight glasses on-site. Currently, there are no detection methods to achieve effective and intuitive monitoring and display, making it difficult for existing control strategies to achieve satisfactory results. Summary of the Invention

[0006] The technical problem to be solved by the present invention is to address the above-mentioned deficiencies in the prior art by providing a method for detecting atomization in a polycrystalline silicon reduction furnace that accurately characterizes the degree of atomization in the furnace during the operation of the reduction furnace. The invention also provides a method for adjusting atomization based on the detection results of the detection method. Furthermore, the invention provides a detection device for implementing the detection method and an adjustment device for implementing the adjustment method.

[0007] The technical solution adopted to solve the technical problem of this invention is:

[0008] This invention provides a method for detecting atomization in a polycrystalline silicon reduction furnace, comprising:

[0009] A dust detector is installed on the exhaust gas outlet pipeline of the polysilicon reduction furnace. The dust detector measures the dust concentration in the exhaust gas outlet pipeline of the polysilicon reduction furnace every 2-5 minutes.

[0010] Using the dust concentration values ​​of 15-20 times prior to the current moment as a set of data, calculate the range and variance of this set of data. When 24 < range ≤ 32 and 96 < variance ≤ 128, the polycrystalline silicon reduction furnace is judged to be slightly atomized at the current moment. When 32 < range ≤ 40 and 128 < variance ≤ 160, the polycrystalline silicon reduction furnace is judged to be moderately atomized at the current moment. When the range > 40 and the variance > 160, the polycrystalline silicon reduction furnace is judged to be heavily atomized at the current moment.

[0011] Optionally, the dust detector is a digital PM2.5 particulate matter concentration meter.

[0012] Optionally, the dust detector has an explosion-proof rating of ExdIICT4, a pressure resistance rating of PN1.0Mpa, a temperature resistance rating of 200℃, and a corrosion resistance rating of WF2 (Class C).

[0013] The present invention also provides a method for adjusting the atomization of a polycrystalline silicon reduction furnace, comprising:

[0014] If the above detection method determines that the atomization is slight, increase the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or do nothing.

[0015] When the above detection method determines that the atomization is moderate, increase the hydrogen flow rate at the inlet of the reduction furnace by 9-11 kg / h or stop the six-phase current of the reduction furnace for 1 hour.

[0016] When the above detection method determines that the atomization is severe, increase the hydrogen flow rate at the inlet of the reduction furnace by 14-16 kg / h or stop the six-phase current of the reduction furnace for 2 hours.

[0017] The present invention also provides a detection device for atomization in a polycrystalline silicon reduction furnace, comprising:

[0018] Dust detector, calculation module and judgment module,

[0019] The dust detector is installed on the exhaust gas outlet pipeline of the polysilicon reduction furnace and is used to measure the dust concentration value in the exhaust gas outlet pipeline of the polysilicon reduction furnace every 2-5 minutes.

[0020] The calculation module is electrically connected to the dust detector and is used to calculate the range and variance of a set of dust concentration values ​​from the current moment back 15-20 times.

[0021] The judgment module is electrically connected to the calculation module and is used to determine that the polysilicon reduction furnace is slightly atomized at the current moment when 24 < range ≤ 32 and 96 < variance ≤ 128, moderately atomized when 32 < range ≤ 40 and 128 < variance ≤ 160, and heavily atomized when range > 40 and variance > 160.

[0022] Optionally, the dust detector is a digital PM2.5 particulate matter concentration meter.

[0023] Optionally, the dust detector has an explosion-proof rating of ExdIICT4, a pressure resistance rating of PN1.0Mpa, a temperature resistance rating of 200℃, and a corrosion resistance rating of WF2 (Class C).

[0024] The present invention also provides an adjustment device for atomization in a polycrystalline silicon reduction furnace, comprising:

[0025] The execution module is connected to the judgment module in the detection device mentioned above. When the judgment module determines that the polysilicon reduction furnace is currently slightly atomized, it increases the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or does nothing.

[0026] When the judgment module determines that the polysilicon reduction furnace is currently under moderate atomization, the hydrogen flow rate at the furnace inlet will be increased by 9-11 kg / h or the six-phase current of the reduction furnace will be stopped for 1 hour.

[0027] When the judgment module determines that the polysilicon reduction furnace is currently heavily atomized, the hydrogen flow rate at the furnace inlet will be increased by 14-16 kg / h or the six-phase current of the reduction furnace will be stopped for 2 hours.

[0028] In this invention, by installing a dust detector on a polycrystalline silicon reduction furnace, the concentration of dust particles (fine silicon powder) inside the furnace can theoretically be accurately detected. This allows operators to make timely adjustments to the furnace, achieving a certain degree of edge-locking operation at the furnace's atomization boundary, thus reducing power consumption and ensuring product quality. However, existing dust detectors have limited high-temperature resistance and cannot be directly installed on the furnace body.

[0029] The applicant's preliminary research indicates that installing a dust detector on the exhaust gas outlet line of a polysilicon reduction furnace does not directly correlate the detected dust particle concentration with the atomization state inside the furnace. The dust particle concentration peaks after 24 hours of furnace operation, even though no atomization occurs inside the furnace at this time. This is because the flow rates of TCS (SiHCl3) and H2 entering the furnace are also nearing their peak values ​​at this point. The increased material flow carries away more particles, resulting in a correspondingly higher dust particle concentration detected in the exhaust gas outlet line.

[0030] This invention analyzes and studies multiple batches of dust particle concentration data monitored by the exhaust gas outlet pipeline of a polysilicon reduction furnace, and explores a range-variance method to establish the relationship between multiple dust particle concentrations monitored by the exhaust gas outlet pipeline and the atomization of the polysilicon reduction furnace. Specifically, taking the dust concentration values ​​of 15-20 times prior to the current moment as a set of data, the range and variance of this set of data are calculated. When 24 < range ≤ 32 and 96 < variance ≤ 128, the polysilicon reduction furnace is judged to be slightly atomized at the current moment; when 32 < range ≤ 40 and 128 < variance ≤ 160, the polysilicon reduction furnace is judged to be moderately atomized at the current moment; and when the range > 40 and the variance > 160, the polysilicon reduction furnace is judged to be heavily atomized at the current moment. Practice has shown that this method can accurately determine the atomization level of the reduction furnace, so that operators can promptly grasp the atomization level inside the furnace and make timely adjustments, achieving a certain degree of atomization boundary control operation. This achieves the goal of both reducing power consumption and ensuring the quality of products from the reduction furnace. This method greatly improves the control quality of the reduction furnace and reduces the difficulty of operating it. Attached Figure Description

[0031] Figure 1 This is a schematic diagram of the installation of the dust detector provided in Embodiment 1 of the present invention;

[0032] Figure 2 This is a schematic diagram illustrating the principle of dust concentration detection.

[0033] Figure 3 This is a nebulization analysis curve provided in Embodiment 1 of the present invention;

[0034] Figure 4 This is a frame diagram of a detection and adjustment device for atomization in a polycrystalline silicon reduction furnace. Detailed Implementation

[0035] The technical solutions of the invention will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only a part of the embodiments of the invention, not all of them. All other embodiments obtained by those skilled in the art based on the embodiments of the invention without creative effort are within the scope of the invention.

[0036] In the description of this invention, it should be noted that the use of terms such as "above" to indicate orientation or positional relationship is based on the orientation or positional relationship shown in the accompanying drawings and is only for the purpose of facilitating and simplifying the description. It does not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this invention.

[0037] In the description of this invention, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0038] In the description of this invention, it should be noted that, unless otherwise explicitly specified and limited, the terms "connection," "setting," "installation," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this invention based on the specific circumstances.

[0039] This invention provides a method for detecting atomization in a polycrystalline silicon reduction furnace, comprising:

[0040] A dust detector is installed on the exhaust gas outlet pipeline of the polysilicon reduction furnace. The dust detector measures the dust concentration in the exhaust gas outlet pipeline of the polysilicon reduction furnace every 2-5 minutes.

[0041] Using the dust concentration values ​​of 15-20 times prior to the current moment as a set of data, calculate the range and variance of this set of data. When 24 < range ≤ 32 and 96 < variance ≤ 128, the polycrystalline silicon reduction furnace is judged to be slightly atomized at the current moment. When 32 < range ≤ 40 and 128 < variance ≤ 160, the polycrystalline silicon reduction furnace is judged to be moderately atomized at the current moment. When the range > 40 and the variance > 160, the polycrystalline silicon reduction furnace is judged to be heavily atomized at the current moment.

[0042] The present invention also provides a method for adjusting the atomization of a polycrystalline silicon reduction furnace, comprising:

[0043] If the above detection method determines that the atomization is slight, increase the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or do nothing.

[0044] When the above detection method determines that the atomization is moderate, increase the hydrogen flow rate at the inlet of the reduction furnace by 9-11 kg / h or stop the six-phase current of the reduction furnace for 1 hour.

[0045] When the above detection method determines that the atomization is severe, increase the hydrogen flow rate at the inlet of the reduction furnace by 14-16 kg / h or stop the six-phase current of the reduction furnace for 2 hours.

[0046] The present invention also provides a detection device for atomization in a polycrystalline silicon reduction furnace, comprising:

[0047] Dust detector, calculation module and judgment module,

[0048] The dust detector is installed on the exhaust gas outlet pipeline of the polysilicon reduction furnace and is used to measure the dust concentration value in the exhaust gas outlet pipeline of the polysilicon reduction furnace every 2-5 minutes.

[0049] The calculation module is electrically connected to the dust detector and is used to calculate the range and variance of a set of dust concentration values ​​from the current moment back 15-20 times.

[0050] The judgment module is electrically connected to the calculation module and is used to determine that the polysilicon reduction furnace is slightly atomized at the current moment when 24 < range ≤ 32 and 96 < variance ≤ 128, moderately atomized when 32 < range ≤ 40 and 128 < variance ≤ 160, and heavily atomized when range > 40 and variance > 160.

[0051] The present invention also provides an adjustment device for atomization in a polycrystalline silicon reduction furnace, comprising:

[0052] The execution module is connected to the judgment module in the detection device mentioned above. When the judgment module determines that the polysilicon reduction furnace is currently slightly atomized, it increases the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or does nothing.

[0053] When the judgment module determines that the polysilicon reduction furnace is currently under moderate atomization, the hydrogen flow rate at the furnace inlet will be increased by 9-11 kg / h or the six-phase current of the reduction furnace will be stopped for 1 hour.

[0054] When the judgment module determines that the polysilicon reduction furnace is currently heavily atomized, the hydrogen flow rate at the furnace inlet will be increased by 14-16 kg / h or the six-phase current of the reduction furnace will be stopped for 2 hours.

[0055] Example 1:

[0056] This embodiment provides a method for detecting atomization in a polysilicon reduction furnace, including:

[0057] S1: As Figure 1 As shown, a suitable location is selected on the exhaust gas outlet pipeline of the reduction furnace to vertically install the dust detector on the horizontal exhaust gas pipeline. Pipe opening 3 is made, and the probe 4 of the dust detector is inserted. The exhaust gas enters from the exhaust gas inlet 1 and exits from the exhaust gas outlet 2, with the exhaust gas in direct contact with the probe 4. The dust detector display panel 5 is used to display the measured particulate matter concentration.

[0058] The dust detector measures the concentration of particulate matter in the exhaust gas outlet pipeline of the reduction furnace. This particulate matter is mainly silicon powder. Silicon powder is mainly produced by the pyrolysis or reduction of trichlorosilane at high temperatures. If the silicon powder generated in the reduction furnace does not adhere to the silicon rod in time, it will exist in the reduction furnace in the form of dust and will then be discharged from the reduction furnace with the exhaust gas.

[0059] like Figure 2As shown, the silicon powder carried by the exhaust gas flows rapidly in the exhaust pipe, colliding and rubbing against each other to generate static electricity. When charged silicon powder particles pass through the measuring electrodes, the electrodes induce positive and negative charges. During the transfer of these charges, a current signal is formed, the magnitude of which is proportional to the mass content of the silicon powder. By further amplifying and processing this signal, the silicon powder concentration can be accurately measured. Using mature detection instruments and the principle of dynamic charge method, the silicon powder concentration in the exhaust gas can be detected.

[0060] The dust detector is specifically a digital PM2.5 particulate matter concentration meter, mainly composed of an electrostatic sensor and a central control unit, representing mature technology. Its explosion-proof rating is ExdIICT4, its pressure resistance rating is PN1.0Mpa, its temperature resistance rating is 200℃, and its corrosion resistance rating is WF2 (Class C).

[0061] The electrostatic sensor comprises a dust detector probe, a current collector, and a charge measuring device connected in sequence. The electrostatic sensor is mounted on the exhaust gas outlet pipeline of the reduction furnace via an insulating support. The current collector, charge measuring device, and other components are integrated and packaged within the sensor's electromechanical box. The insulating support serves to fix the sensor in place.

[0062] The dust detector probe consists of, from the inside out, a metal detection probe, a PTFE sleeve, a purge jacket, and an ion flow shield.

[0063] The metal probe is made of 316L stainless steel and is 600mm long. One end of the probe is embedded in the current collector, and the other end extends into the exhaust gas outlet pipeline as the measuring end.

[0064] The PTFE sleeve is made of polytetrafluoroethylene (PTFE) and covers the upper part of the metal probe. The sleeve can withstand fluorinated media, strong acids, strong oxidizing agents, strong reducing agents, and various organic solvents, thus protecting the metal probe.

[0065] The ion flow shield consists of an electrostatic shield and an ion generator. The electrostatic shield mainly includes an electrostatic shielding cavity, whose function is to make the internal electric field strength zero, thereby providing strong anti-interference capability and avoiding the influence of external electric fields on the equipment. The ion flow generator uses high-voltage direct current to pass through a conductor, causing corona discharge and ionization. The ionized ions move into the surrounding space under the influence of the electric field, forming an ion flow and reducing the influence of external electric fields on the detection results.

[0066] The central control unit is responsible for outputting the dust particle concentration value through logic operations on the signal measured by the charge measuring device.

[0067] In fact, dust detectors need to be installed on the reduction furnace body to accurately measure the actual dust concentration inside the furnace, and thus accurately reflect the current atomization level within the furnace. Operators can then use this data to adjust the atomization level in a timely manner, achieving both reduced power consumption and guaranteed quality. However, existing dust detectors have limited high-temperature resistance and cannot be directly installed on the reduction furnace body. Therefore, the only option is to install the dust detector on the exhaust pipe.

[0068] However, the applicant's preliminary research showed that installing a dust detector on the exhaust gas outlet pipeline of a polysilicon reduction furnace did not directly correlate the concentration of dust particles detected with the atomization state inside the furnace. For example... Figure 3 As shown, the dust particle concentration reached its peak after 24 hours of operation in the reduction furnace, while no atomization occurred inside the furnace at this time. The reason for this is that the flow rates of TCS (SiHCl3) and H2 entering the reduction furnace were also almost at their peak at this time. With more material entering the reduction furnace, more particles were carried away from the furnace, resulting in a correspondingly high dust particle concentration detected in the exhaust gas outlet pipeline.

[0069] Therefore, it is necessary to analyze multiple batches of data on the measured silicon powder concentration in the exhaust gas to find the pattern between the atomization degree and silicon powder concentration at different time periods, so as to characterize the real-time atomization conditions inside the furnace. The range-variance method (step S2) explored by the applicant can establish the relationship between the concentration of multiple dust particles monitored by the exhaust gas outlet pipeline and the atomization of the polysilicon reduction furnace:

[0070] S2: The dust detector measures the dust concentration in the exhaust pipe of the polysilicon reduction furnace every 3 minutes. Using the dust concentration values ​​of the previous 15 values ​​as a set of data, calculate the range and variance of this set of data. When 24 < range ≤ 32 and 96 < variance ≤ 128, the polysilicon reduction furnace is judged to be slightly atomized at the current moment; when 32 < range ≤ 40 and 128 < variance ≤ 160, the polysilicon reduction furnace is judged to be moderately atomized at the current moment; when the range > 40 and the variance > 160, the polysilicon reduction furnace is judged to be heavily atomized at the current moment.

[0071] The following examples illustrate the application of the range and variance method:

[0072] Figure 3 To convert the dust concentration at the exhaust gas outlet pipe measured every 3 minutes during the operation of the reduction furnace into an atomization index, and then magnify it by 200 times (for easier data observation), an atomization index curve was plotted. The dust concentration measured by the dust detector ranged from 0 to 100 mg / m³. 3 The atomization index has a range of 0-25, and the two have a linear relationship, meaning that 0 corresponds to 0 mg / m³. 3 25 corresponds to 100mg / m 3 .

[0073] Experimental studies have found that the atomization index value is not directly related to the atomization state inside the reduction furnace. As shown in the figure, the atomization index reached its peak after 24 hours of operation, even though no atomization had occurred inside the furnace at this time. The reason for the higher atomization index at 24 hours is that the flow rates of TCS (SiHCl3) and H2 entering the furnace are also nearing their peak values, resulting in a larger amount of material entering the furnace and carrying away more particles, thus leading to a higher atomization index measurement. The atomization index curve is affected not only by the atomization state inside the reduction furnace but also by the flow rates of H2 and TCS.

[0074] Therefore, it is not necessary to judge atomization before the reduction furnace has been running for 20 hours, and atomization should only be judged after 20 hours.

[0075] Take the atomization index (which is 1 / 4 of the dust particle concentration) of 15 cycles (3 minutes per cycle, with one point taken in each cycle) before the current time as a set of data, and determine the range and variance of this set of data.

[0076] Mild atomization judgment: 6 < range ≤ 8 and 6 < variance ≤ 8

[0077] Moderate atomization judgment: 8 < range ≤ 10 and 8 < variance ≤ 10

[0078] Severe atomization is defined as: range > 10 and variance > 10.

[0079] When the reduction furnace has been running for 55.9 hours, take a set of data from the previous period, as shown in Table 1, and calculate the range and variance of this set of data.

[0080] Table 1

[0081] Runtime 55.2 55.25 55.3 55.35 55.4 55.45 55.5 55.55 Atomization Index 15.33 15.33 17.82 16.09 13.51 19.89 13.16 14.06 Runtime 55.6 55.65 55.7 55.75 55.8 55.85 55.9 Atomization Index 19.81 20.36 19.77 18.84 17.14 14.11 14.15

[0082] The range of this data set is 7.2; the variance is 6.26. The atomization state inside the furnace is determined to be light atomization.

[0083] Practice has shown that this method can accurately determine the atomization level of the reduction furnace, so that operators can promptly grasp the atomization level inside the furnace and make timely adjustments, achieving a certain degree of atomization boundary control operation. This achieves the goal of both reducing power consumption and ensuring the quality of products from the reduction furnace. This method greatly improves the control quality of the reduction furnace and reduces the difficulty of operating it.

[0084] Example 2:

[0085] This embodiment provides a method for adjusting the atomization of a polycrystalline silicon reduction furnace, including:

[0086] When the detection method of Example 1 determines that the atomization is slight, increase the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or do nothing.

[0087] When the detection method of Example 1 determines that the atomization is moderate, increase the hydrogen flow rate at the inlet of the reduction furnace by 9-11 kg / h or stop the six-phase current of the reduction furnace for 1 hour.

[0088] When the detection method of Example 1 is used to determine that the atomization is severe, the hydrogen flow rate at the inlet of the reduction furnace is increased by 14-16 kg / h or the six-phase current of the reduction furnace is stopped for 2 hours.

[0089] After digitally classifying the atomization level of the reduction furnace, different adjustment measures can be taken to achieve the best control effect, thereby enabling the furnace to operate at the edge of the atomization boundary to a greater extent, which reduces power consumption and ensures the quality of the reduction furnace products.

[0090] Example 3:

[0091] like Figure 4 As shown, this embodiment provides a detection device for atomization in a polysilicon reduction furnace, comprising:

[0092] Dust detector, calculation module and judgment module,

[0093] The dust detector is installed on the exhaust gas outlet pipeline of the polysilicon reduction furnace to measure the dust concentration in the exhaust gas outlet pipeline every 2-5 minutes.

[0094] The calculation module is electrically connected to the dust detector and is used to calculate the range and variance of a set of dust concentration values ​​from the current moment back 15-20 times.

[0095] The judgment module is electrically connected to the calculation module. It is used to determine that the polysilicon reduction furnace is slightly atomized at the current time when 24 < range ≤ 32 and 96 < variance ≤ 128, moderately atomized at the current time when 32 < range ≤ 40 and 128 < variance ≤ 160, and heavily atomized at the current time when range > 40 and variance > 160.

[0096] The dust detector is a digital PM2.5 particulate matter concentration meter.

[0097] Its explosion-proof rating is ExdIICT4, its pressure resistance rating is PN1.0Mpa, its temperature resistance rating is 200℃, and its corrosion resistance rating is WF2 (Class C).

[0098] Example 4:

[0099] like Figure 4 As shown, this embodiment provides an adjustment device for atomization in a polycrystalline silicon reduction furnace, comprising:

[0100] The execution module is connected to the judgment module in the detection device of Example 3. When the judgment module determines that the polysilicon reduction furnace is currently slightly atomized, it increases the hydrogen flow rate at the inlet of the reduction furnace by 4-6 kg / h or does nothing.

[0101] When the judgment module determines that the polysilicon reduction furnace is currently under moderate atomization, the hydrogen flow rate at the furnace inlet will be increased by 9-11 kg / h or the six-phase current of the reduction furnace will be stopped for 1 hour.

[0102] When the judgment module determines that the polysilicon reduction furnace is currently heavily atomized, the hydrogen flow rate at the furnace inlet will be increased by 14-16 kg / h or the six-phase current of the reduction furnace will be stopped for 2 hours.

[0103] The calculation module, judgment module, and execution module can be integrated into the DCS system.

[0104] It is understood that the above embodiments are merely exemplary implementations used to illustrate the principles of the present invention, and the present invention is not limited thereto. For those skilled in the art, various modifications and improvements can be made without departing from the spirit and essence of the present invention, and these modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A method for detecting atomization in a polycrystalline silicon reduction furnace, characterized in that, The dust detector is installed on the tail gas outlet pipeline of the polycrystalline silicon reduction furnace, and measures the dust concentration value in the tail gas outlet pipeline of the polycrystalline silicon reduction furnace every 2-5 minutes, After the polycrystalline silicon reduction furnace is operated for 20 hours, 15-20 dust concentration values before the current time are taken as a group of data, the range and variance of the group of data are calculated, when 24 < the range ≤ 32 and 96 < the variance ≤ 128, it is judged that the polycrystalline silicon reduction furnace is slightly atomized at the current time, when 32 < the range ≤ 40 and 128 < the variance ≤ 160, it is judged that the polycrystalline silicon reduction furnace is moderately atomized at the current time, and when the range > 40 and the variance > 160, it is judged that the polycrystalline silicon reduction furnace is severely atomized at the current time. The dust detector is a digital PM2.5 particulate matter concentration instrument.

2. The method of claim 1, wherein the method is characterized by: The dust detector has an explosion-proof level of ExdIICT4, a pressure resistance level of PN1.0Mpa, a temperature resistance level of 200℃, and a C-grade corrosion resistance level of WF2.

3. The method of claim 2, wherein the method further comprises: determining the number of polycrystalline silicon reduction furnace atomizations by counting the number of times the polycrystalline silicon reduction furnace atomization signal is detected. The detection method comprises the following steps:

4. A method of adjusting the atomization of a polycrystalline silicon reduction furnace, characterized by, When it is determined by the detection method in any one of claims 1-3 that the polycrystalline silicon reduction furnace is slightly atomized, the hydrogen flow rate at the inlet of the reduction furnace is increased by 4-6kg / h or no operation is performed; When it is determined by the detection method in any one of claims 1-3 that the polycrystalline silicon reduction furnace is moderately atomized, the hydrogen flow rate at the inlet of the reduction furnace is increased by 9-11kg / h or the six currents of the reduction furnace are stopped for 1h; When it is determined by the detection method in any one of claims 1-3 that the polycrystalline silicon reduction furnace is severely atomized, the hydrogen flow rate at the inlet of the reduction furnace is increased by 14-16kg / h or the six currents of the reduction furnace are stopped for 2h. The detection device comprises a dust detector, a calculation module and a judgment module, 5. A device for detecting atomization of a polycrystalline silicon reduction furnace, characterized by comprising: The dust detector is installed on the tail gas outlet pipeline of the polycrystalline silicon reduction furnace, and measures the dust concentration value in the tail gas outlet pipeline of the polycrystalline silicon reduction furnace every 2-5 minutes, The calculation module is electrically connected with the dust detector, and is used to take 15-20 dust concentration values before the current time as a group of data after the polycrystalline silicon reduction furnace is operated for 20 hours, and calculate the range and variance of the group of data, The judgment module is electrically connected with the calculation module, and is used to judge that the polycrystalline silicon reduction furnace is slightly atomized at the current time when 24 < the range ≤ 32 and 96 < the variance ≤ 128, judge that the polycrystalline silicon reduction furnace is moderately atomized at the current time when 32 < the range ≤ 40 and 128 < the variance ≤ 160, and judge that the polycrystalline silicon reduction furnace is severely atomized at the current time when the range > 40 and the variance > 160. The dust detector is a digital PM2.5 particulate matter concentration instrument. The dust detector has an explosion-proof level of ExdIICT4, a pressure resistance level of PN1.0Mpa, a temperature resistance level of 200℃, and a C-grade corrosion resistance level of WF2.

6. The apparatus for detecting the atomization of the polycrystalline silicon reduction furnace according to claim 5, wherein The execution module is connected with the judgment module in the detection device in any one of claims 5-7, and is used to increase the hydrogen flow rate at the inlet of the reduction furnace by 4-6kg / h or perform no operation when the judgment module judges that the polycrystalline silicon reduction furnace is slightly atomized at the current time; 7. The apparatus for detecting the atomization of the polycrystalline silicon reduction furnace according to claim 6, wherein When the judgment module judges that the polycrystalline silicon reduction furnace is moderately atomized at the current time, the hydrogen flow rate at the inlet of the reduction furnace is increased by 9-11kg / h or the six currents of the reduction furnace are stopped for 1h; 8. A polycrystalline silicon reduction furnace atomization adjustment device, characterized by, When the judgment module judges that the polycrystalline silicon reduction furnace is severely atomized at the current time, the hydrogen flow rate at the inlet of the reduction furnace is increased by 14-16kg / h or the six currents of the reduction furnace are stopped for 2h. ​ ​ When the judgment module judges that the current time of the polycrystalline silicon reduction furnace is heavy atomization, the hydrogen flow into the reduction furnace is increased by 14-16 kg / h or the six currents of the reduction furnace are stopped for 2 h.

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