Superlens and lens

Abstract

The present disclosure relates to a superlens and a lens, the superlens comprising a substrate, a plurality of first nanopillars and a plurality of second nanopillars, the plurality of first nanopillars being spaced apart on the substrate, the plurality of second nanopillars being spaced apart on the substrate, at least one first nanopillar and at least one second nanopillar being arranged adjacently, and the turning angle of the at least one first nanopillar and the at least one second nanopillar being the same. In the superlens of the present disclosure, the first nanopillars and the second nanopillars are arranged correspondingly, and the turning angles of the corresponding first nanopillars and second nanopillars are the same, thereby reducing the structural height, improving the efficiency of the superlens and obtaining a larger phase delay.

Description

TECHNICAL FIELD

[0001] The present disclosure relates to the technical field of achromatic lenses, and more particularly, to an ultralens and a lens having the same. BACKGROUND

[0002] In the field of lens imaging, the achromatic technology has been developed for a long time. The common achromatic technology in the industry is to use multiple lens combinations, each lens having different materials and shapes to compensate for chromatic aberration caused by different wavelengths of incident light.

[0003] In recent years, the technology of super surface lens has been developed, which uses subwavelength structures to control incident light waves. However, the height of the nanometer column in the super surface lens in the related technology is relatively high, usually between 600-800nm, which results in a high aspect ratio of the nanometer column of up to 17.8, increases the processing difficulty of the super surface lens, reduces the processing accuracy of the super surface lens, and hinders the practical application and large-scale production of the super surface lens. SUMMARY

[0004] The present disclosure aims to at least partially solve one of the technical problems in the related art.

[0005] To this end, an embodiment of the present disclosure proposes an ultralens, in which a first nanometer column and a second nanometer column are correspondingly arranged, and the turning angles of the correspondingly arranged first nanometer column and second nanometer column are the same, which reduces the structure height, improves the efficiency of the ultralens, and obtains a larger phase delay.

[0006] An embodiment of the present disclosure also proposes a lens having the ultralens.

[0007] The ultralens according to an embodiment of the present disclosure comprises: a substrate; a plurality of first nanometer columns and a plurality of second nanometer columns, the plurality of first nanometer columns being spaced apart on the substrate, the plurality of second nanometer columns being spaced apart on the substrate, at least one first nanometer column and at least one second nanometer column being adjacently arranged, and the turning angles of the at least one first nanometer column and the at least one second nanometer column being the same.

[0008] In the ultralens according to an embodiment of the present disclosure, the first nanometer column and the second nanometer column are correspondingly arranged, and the turning angles of the correspondingly arranged first nanometer column and second nanometer column are the same, which reduces the height of the ultralens and obtains a larger phase delay.

[0009] In some embodiments, the number of the plurality of first nanometer columns and the plurality of second nanometer columns is consistent, one first nanometer column and one second nanometer column are adjacently arranged, and the turning angles of the one first nanometer column and the one second nanometer column are the same.

[0010] In some embodiments, the first nanopillar and the second nanopillar are made of materials with a refractive index of 3.5 or higher.

[0011] In some embodiments, the substrate has a first plane, and a plurality of first nanopillars and a plurality of second nanopillars are periodically arranged along the center of the first plane, wherein the periodic arrangement is a regular N-square periodic arrangement, where N≥4.

[0012] In some embodiments, the plurality of first nanopillars and the plurality of second nanopillars may be divided into multiple groups, each group of nanopillars including one first nanopillar and one second nanopillar.

[0013] In some embodiments, the cross-sectional areas of the first and second nanopillars in at least a portion of the group are different from those of the first and second nanopillars in other groups.

[0014] In some embodiments, at least a portion of the nanopillars are arranged in a rectangular periodic pattern, and one side of the first nanopillar and the second nanopillar in the at least a portion of the nanopillars coincides with the inscribed circle within the rectangle.

[0015] In some embodiments, at least a portion of the nanopillars are arranged in a rectangular periodic pattern, wherein the first nanopillar and the second nanopillar in the at least a portion of the nanopillars are located inside the inscribed circle within the rectangle.

[0016] In some embodiments, the center of the rectangular region occupied by the first nanopillar and the second nanopillar coincides with the center of the inscribed circle.

[0017] In some embodiments, the superlens includes two combinations of the following: the size of the first nanopillar is smaller than the size of the second nanopillar, the size of the first nanopillar is equal to the size of the second nanopillar, and the size of the first nanopillar is larger than the size of the second nanopillar.

[0018] In some embodiments, the heights of the plurality of first nanopillars and the plurality of second nanopillars are consistent.

[0019] The lens according to embodiments of this disclosure includes the superlens described in any embodiment of this disclosure. Attached Figure Description

[0020] Figure 1 This is a top view of a superlens according to an embodiment of the present disclosure.

[0021] Figure 2 This is a perspective view of the first and second nanopillars in the superlens according to an embodiment of the present disclosure.

[0022] Figure 3This is a top view of the first and second nanopillars in the superlens according to an embodiment of the present disclosure.

[0023] Figure 4 This is another top view of the first and second nanopillars in the superlens according to an embodiment of the present disclosure. Figure 5 This is a top view of the first and second nanopillars in the superlens according to an embodiment of the present disclosure after they have been rotated by a certain angle.

[0024] Figure 6 This is a distribution diagram of the phase and frequency of incident light after passing through five structures when the superlens according to the embodiments of this disclosure is applied to a mobile phone.

[0025] Figure 7 This is a distribution diagram of the diffraction efficiency and phase delay of incident light through the entire structural database when the superlens according to an embodiment of this disclosure is applied to a mobile phone.

[0026] Figure 8 This is a focal length distribution diagram of the focal point of incident light in the 450-650nm range when the superlens according to an embodiment of this disclosure is applied to a mobile phone.

[0027] Figure 9 This is a cross-sectional distribution diagram of the focal point of incident light in the 450-650nm range when a superlens according to an embodiment of this disclosure is applied to a mobile phone. Reference numerals:

[0028] Superlens 100, substrate 1, first nanopillar 21, second nanopillar 22. Detailed Implementation

[0029] Embodiments of this disclosure are described in detail below, with examples of these embodiments illustrated in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this disclosure, and should not be construed as limiting it.

[0030] like Figures 1-3 As shown, the superlens 100 according to an embodiment of the present disclosure includes a substrate 1 and a plurality of first nanopillars 21 and a plurality of second nanopillars 22.

[0031] A plurality of first nanopillars 21 are disposed at intervals on the substrate 1, and a plurality of second nanopillars 22 are disposed at intervals on the substrate 1. At least one first nanopillar 21 and at least one second nanopillar 22 are disposed adjacent to each other, and the at least one first nanopillar 21 and the at least one second nanopillar 22 have the same turning angle.

[0032] Understandably, the substrate 1 is made of glass or sapphire, which has good light transmittance. The substrate 1 is generally flat or circular. Multiple first nanopillars 21 and multiple first nanopillars 22 are disposed on the substrate 1 at intervals. The axes of the multiple first nanopillars 21 and multiple first nanopillars 22 are parallel to the axis of the substrate 1.

[0033] Furthermore, in the field of achromatic lens technology, the phase at the surface of an achromatic lens can be divided into two terms: the first term is the phase at the intermediate wavelength, and the second term is the phase difference required for incident light of different frequencies.

[0034] The first item involves only a single wavelength and can be achieved by the geometric phase of the superlens unit. That is, different orientation angles of the nanopillars can provide different phases.

[0035] In the superlens 100 according to the embodiments of this disclosure, the first nanopillar 21 and the second nanopillar 22 are correspondingly arranged, and the first nanopillar 21 and the second nanopillar 22 that are correspondingly arranged have the same turning angle, thereby reducing the height of the superlens and obtaining a greater phase delay.

[0036] In some embodiments, such as Figures 1-2 As shown, the number of multiple first nanopillars 21 and multiple second nanopillars 22 is the same, a first nanopillar 21 and a second nanopillar 22 are arranged adjacent to each other, and the first nanopillar 21 and the second nanopillar 22 have the same turning angle.

[0037] Specifically, such as Figures 1-2 As shown, the number of multiple first nanopillars 21 and multiple second nanopillars 22 is the same, that is, each first nanopillar 21 corresponds to one second nanopillar 22. The first nanopillar 21 and the second nanopillar 22 are arranged adjacent to each other, which further improves the achromatic effect of the superlens 100. It can eliminate chromatic aberration for all wavelengths in the wide band of visible light and has continuity.

[0038] In some embodiments, the first nanopillar 21 is made of monocrystalline silicon, and / or the second nanopillar 22 is made of monocrystalline silicon.

[0039] Understandably, the nanopillars are made of single-crystal silicon. While ensuring high efficiency and covering a larger phase delay, the use of single-crystal silicon effectively reduces the height and aspect ratio of the nanopillars, which greatly reduces the processing difficulty of the superlens 100, improves the processing accuracy of the superlens 100, and reduces the cost of the superlens 100.

[0040] In related technologies, the height of nanopillars in metasurface lenses is relatively high, typically between 600-800 nm, resulting in an aspect ratio as high as 17.8. This increases the processing difficulty of metasurface lenses, reduces their processing accuracy, and hinders their practical application and large-scale mass production.

[0041] This disclosure uses single-crystal silicon to prepare nanopillars, which can reduce the height of the nanopillars to about 300 nm and reduce the aspect ratio of the structure to 6, which is more than half that of nanopillars in the prior art.

[0042] In some embodiments, the first nanopillar 21 and the second nanopillar 22 are made of materials with a refractive index of 3.5 or higher.

[0043] Understandably, the nanopillars can also be made of other high-refractive-index materials, such as amorphous silicon.

[0044] In some embodiments, such as Figures 1-2 As shown, the substrate 1 has a first plane, and a plurality of first nanopillars 21 and a plurality of second nanopillars 22 are periodically arranged along the center of the first plane. The periodic arrangement is a regular N-square periodic arrangement, where N≥4.

[0045] It is understandable that the first plane of the substrate 1 is the upper surface of the substrate 1, and the multiple nanopillars are periodically arranged along the center of the upper surface of the substrate 1, so that the distribution of the multiple nanopillars is more uniform, which is beneficial to improving the performance of the superlens 100.

[0046] Furthermore, different periodic arrangements can be selected according to different application environments of the superlens 100. The periodic arrangements in this disclosure include, but are not limited to, regular square periodic arrangements and regular hexagonal periodic arrangements.

[0047] In some embodiments, such as Figures 1-2 As shown, the plurality of first nanopillars 21 and the plurality of second nanopillars 22 can be divided into multiple groups, each group of nanopillars including one first nanopillar 21 and one second nanopillar 22.

[0048] Understandably, the spacing between adjacent groups of nanopillars can be designed according to actual applications, further improving the rationality of the superlens 100 design.

[0049] Furthermore, the dimensions of the first nanopillar 21 and the second nanopillar 22 can be the same or different.

[0050] In some embodiments, the cross-sectional areas of the first nanopillars 21 and second nanopillars 22 of at least some groups are different from those of the first nanopillars 21 and second nanopillars 22 of other groups.

[0051] Understandably, the different cross-sectional areas of the nanopillars in different groups are beneficial to improving the ability of the superlens 100 to eliminate chromatic aberration for all light waves, which is more conducive to practical applications.

[0052] In some embodiments, the superlens 100 includes at least two combinations of the following: the size of the first nanopillar 21 is smaller than the size of the second nanopillar 22, the size of the first nanopillar 21 is equal to the size of the second nanopillar 22, and the size of the first nanopillar 21 is greater than the size of the second nanopillar 22.

[0053] It is understood that the dimensions of the first nanopillar 21 and the second nanopillar 22 in the superlens 100 of this disclosure can be the same or different, and the dimension of the first nanopillar 21 can be larger than the dimension of the second nanopillar 22, or the dimension of the first nanopillar 21 can be smaller than the dimension of the second nanopillar 22. This is beneficial to improving the superlens 100's ability to eliminate chromatic aberration for all light waves, and is more conducive to practical applications.

[0054] In some embodiments, such as Figure 3 As shown, at least a portion of the nanopillars are arranged in a rectangular periodic pattern, and one side of the first nanopillar 21 and the second nanopillar 22 in at least a portion of the nanopillars coincides with the inscribed circle within the rectangle.

[0055] It is understood that each group of nanopillars includes a first nanopillar 21 and a second nanopillar 22. Each group of nanopillars corresponds to a substrate with a rectangular cross-section. That is, the first nanopillar 21 and the second nanopillar 22 are arranged in a rectangular periodic pattern. When the size is at its maximum, one side of the first nanopillar 21 and the second nanopillar 22 coincides with the inscribed circle of the substrate. That is, the two corner points of one or the other side of the first nanopillar 21 and the second nanopillar 22 coincide with the inscribed circle of the substrate.

[0056] Furthermore, since there is a fixed spacing g (e.g., 40nm-100nm) between the first nanopillar 21 and the second nanopillar 22, when the position and size of one of the first nanopillar 21 or the second nanopillar 22 are determined, the position and size of the other first nanopillar 21 or the second nanopillar 22 can be determined relatively.

[0057] In some embodiments, such as Figure 4 As shown, at least a portion of the nanopillars are arranged in a rectangular periodic pattern, and the first nanopillar 21 and the second nanopillar 22 in at least a portion of the nanopillars are located inside the inscribed circle within the rectangle.

[0058] Specifically, such as Figure 4 As shown, if the corner points of the first nanopillar 21 and the second nanopillar 22 do not coincide with the inscribed circle of the substrate, the first nanopillar 21 and the second nanopillar 22 will be located inside the inscribed circle.

[0059] In some embodiments, such as Figure 4 As shown, the center of the rectangular region occupied by the first nanopillar 21 and the second nanopillar 22 coincides with the center of the inscribed circle.

[0060] If the corners of the first nanopillar 21 and the second nanopillar 22 do not coincide with the inscribed circle of the substrate, the first nanopillar 21 and the second nanopillar 22 will be located at the center of the inscribed circle. At the same time, the center of the rectangular area occupied by the first nanopillar 21 and the second nanopillar 22 coincides with the center of the inscribed circle. Since there is a fixed spacing g (e.g., 40nm-100nm) between the first nanopillar 21 and the second nanopillar 22, when the position and size of one of the first nanopillar 21 or the second nanopillar 22 are determined, the position and size of the other first nanopillar 21 or the second nanopillar 22 can be determined relatively by the conditions such as the center of the rectangular area coinciding with the center of the inscribed circle and the fixed spacing g.

[0061] In some embodiments, such as Figure 5 As shown, at least some of the nanopillars in the group, the first nanopillar 21 and the second nanopillar 22 will rotate around the center of the rectangle by a certain angle.

[0062] like Figure 5 As shown, the axes of the first nanopillar 21 and the second nanopillar 22 can have a certain angle with the center line of the outer rectangular period, thereby improving the design flexibility of the first nanopillar 21 and the second nanopillar 22.

[0063] In some embodiments, the heights of the plurality of first nanopillars 21 and the plurality of second nanopillars 22 are consistent.

[0064] The lens according to embodiments of the present disclosure includes a superlens 100 of any embodiment of the present disclosure.

[0065] Specifically, a specific implementation of the superlens 100 according to the embodiments of this disclosure is as follows:

[0066] For a broadband achromatic lens, the phase distribution of light of different frequencies on the lens surface is as follows:

[0067]

[0068] Where ω is the angular frequency of the incident light, r is the radial coordinate of the lens surface, c is the speed of light, and F is the focal length of the lens. As can be seen from the above equation, incident light at different positions on the lens surface will acquire different phase values; and at the same position on the lens surface, light of different frequencies will also acquire different phase values.

[0069] Expanding equation (1) using Taylor series yields a new expression:

[0070]

[0071] Where, ω d Let be a frequency in the middle of a wide band. Equation (2) shows that the phase at the surface of the achromatic lens can be decomposed into two terms: the first term is the phase at the middle wavelength, and the second term is the phase difference required for incident light of different frequencies. The first term only involves a single wavelength and can be achieved by the geometric phase of the superlens unit, i.e., the rotation angle of the rotating unit. In order to eliminate chromatic aberration, the second term must be satisfied at the same time. We achieve this by changing the unit size to generate different propagation phases for incident light of different frequencies.

[0072] Substituting equation (1) into the second term of equation (2), we get:

[0073]

[0074] As can be seen from equation (3), the phase difference value, i.e., the phase delay, obtained by incident light of different frequencies has different values ​​at different coordinates. Therefore, in order to meet the achromatic requirements, this disclosure needs to select unit structures with different phase delays and construct a superlens according to the calculation requirements.

[0075] In this disclosure, an achromatic superlens is constructed by changing the material of the nanopillars. While ensuring high efficiency and covering a larger phase delay, the use of single-crystal silicon effectively reduces the height and aspect ratio of the nanopillars, which greatly reduces the fabrication difficulty of the superlens, improves the fabrication accuracy of the superlens, and reduces the cost of the superlens.

[0076] Furthermore, using monocrystalline silicon to manufacture nanopillars allows for better compatibility with semiconductor silicon processes, which is more conducive to the application of actual products and subsequent mass production.

[0077] In summary, the superlens 100 disclosed herein is of great significance for reducing camera module height and improving lens performance, and has broad application prospects in smartphone cameras and AR / VR cameras.

[0078] Specifically, this disclosure constructs a superlens 100 with D=15um, f=30um, and H=300nm. The superlens 100 of this disclosure embodiment can be applied to mobile phones.

[0079] in, Figure 6 This is a distribution diagram of the phase and frequency of light incident on five different structures when the superlens according to the embodiments of this disclosure is applied to a mobile phone. It can be seen that the phase linearity is very good, and different slopes correspond to different phase delays. Figure 7When a superlens according to an embodiment of this disclosure is applied to a mobile phone, a database is constructed for all structures that meet the conditions, showing the distribution of diffraction efficiency and phase delay of the incident light corresponding to them. The phase delay of the entire database can reach about 7 fs, which is an improvement over existing solutions, ensuring that the superlens has a large aperture and NA; and it has high diffraction efficiency, ensuring that the final superlens has high diffraction efficiency. Figure 8 This is a focal length distribution diagram of the focal point of incident light in the 450-650nm range when the superlens according to an embodiment of this disclosure is applied to a mobile phone, showing 11 wavelengths. Figure 9 This is a cross-sectional distribution diagram of the focal point of incident light in the 450-650nm range when the superlens according to an embodiment of this disclosure is applied to a mobile phone, showing five wavelengths.

[0080] according to Figures 6-9 As shown, the focal lengths of all wavelengths are the same and the focal points overlap, thus this disclosure achieves the function of eliminating chromatic aberration.

[0081] Specifically, when light of any wavelength within the 450nm-650nm band is incident, they can all obtain their respective desired lens phase distributions and produce the same focal length.

[0082] For ease of display, Figure 8 The focal point distributions for 11 incident wavelengths are listed. They are all located at the same position behind the superlens and overlap very well. The simulation results demonstrate that the superlens 100 of this disclosure achieves the effect of eliminating chromatic aberration for all wavelengths in the wide visible light band, exhibiting continuity.

[0083] Figure 9 The focal point distribution is shown for five different wavelengths of incident light. As can be seen from the intensity distribution diagram of the cross section, the superlens 100 of this embodiment achieves a focusing effect close to the diffraction limit at each wavelength.

[0084] The superlens 100 of this disclosure can eliminate chromatic aberration at all wavelengths and has continuity, rather than being limited to a few discrete specific wavelengths.

[0085] Meanwhile, the Super Lens 100 is made of a high-refractive-index material, which, while ensuring high efficiency and covering a larger phase delay, reduces the structural height and depth ratio by more than half, greatly reducing the processing difficulty and improving the processing accuracy. It is also compatible with semiconductor silicon processes, which is more conducive to the application of actual products and subsequent mass production.

[0086] In summary, the superlens 100 of this disclosure is of great significance for reducing the height of camera modules and improving lens performance, and has broad application prospects in smartphone cameras and AR / VR cameras.

[0087] according toFigures 6-9 As shown, the focal lengths of all wavelengths are the same, and the focal points overlap, thus achieving the function of eliminating chromatic aberration. The achromatic lens 100 of this embodiment has an NA of 0.48, which is a significant improvement compared to existing results. By constructing achromatic lenses with a wider variety of heights and sizes, even larger NA and aperture values ​​can be achieved.

[0088] In the description of this disclosure, it should be understood that the terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this disclosure and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this disclosure.

[0089] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this disclosure, "a plurality of" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0090] In this disclosure, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a connection that allows communication between components; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this disclosure according to the specific circumstances.

[0091] In this disclosure, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0092] In this disclosure, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to a specific feature, structure, material, or characteristic described in connection with that embodiment or example, which is included in at least one embodiment or example of this disclosure. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0093] Although embodiments of the present disclosure have been shown and described above, it is to be understood that the above embodiments are exemplary and should not be construed as limiting the present disclosure. Those skilled in the art can make changes, modifications, substitutions and variations to the above embodiments within the scope of the present disclosure.

Claims

1. A superlens, characterized in that, include: Base; A plurality of first nanopillars and a plurality of second nanopillars are disposed on the substrate at intervals. The plurality of first nanopillars are disposed on the substrate at intervals. At least one first nanopillar and at least one second nanopillar are disposed adjacent to each other and the at least one first nanopillar and the at least one second nanopillar have the same turning angle. The material of the first nanopillars and the second nanopillars includes a material with a refractive index of 3.5 or higher. The cross-sectional area of ​​at least a portion of the first nanopillars and the second nanopillars is different from that of the other groups of first nanopillars and the second nanopillars. The substrate has a first plane. The plurality of first nanopillars and the plurality of second nanopillars are periodically arranged along the center of the first plane. The periodic arrangement is a regular N-square periodic arrangement, where N≥4. The number of multiple first nanopillars and multiple second nanopillars is the same, one first nanopillar and one second nanopillar are arranged adjacent to each other, and the first nanopillar and the second nanopillar have the same turning angle.

2. The superlens according to claim 1, characterized in that, The plurality of first nanopillars and the plurality of second nanopillars can be divided into multiple groups, and each group of nanopillars includes one first nanopillar and one second nanopillar.

3. The superlens according to claim 1, characterized in that, At least a portion of the nanopillars are arranged in a rectangular periodic pattern, and one side of the first nanopillar and the second nanopillar in the at least a portion of the nanopillars coincides with the inscribed circle within the rectangle.

4. The superlens according to claim 1, characterized in that, At least a portion of the nanopillars are arranged in a rectangular periodic pattern, with the first and second nanopillars of the at least a portion of the nanopillars located inside the inscribed circle within the rectangle.

5. The superlens according to claim 4, characterized in that, The center of the rectangular region occupied by the first nanopillar and the second nanopillar coincides with the center of the inscribed circle.

6. The superlens according to claim 1, characterized in that, The superlens includes at least two combinations of the following: the size of the first nanopillar is smaller than the size of the second nanopillar, the size of the first nanopillar is equal to the size of the second nanopillar, and the size of the first nanopillar is greater than the size of the second nanopillar.

7. The superlens according to claim 1, characterized in that, The heights of the plurality of first nanopillars and the plurality of second nanopillars are consistent.

8. A lens, characterized in that, Includes the superlens according to any one of claims 1-7.

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