Device for grinding and polishing end face angle of chip

Abstract

The application discloses a kind of end face angle grinding and polishing device of chip, including machine table, polishing disc, angle setting mechanism, quick-release fixing seat, quick-release movable part and sample clamp, polishing disc and angle setting mechanism are set to machine table, quick-release movable part is detachably connected with quick-release fixing seat, sample clamp is detachably connected at the end of quick-release movable part, sample clamp includes clamp body and inner pressing plate, clamp body is equipped with clamping groove and a pair of mutually parallel mounting surface, inner pressing plate is fixed to clamp body and cooperates with clamping groove for clamping chip sample, the direction of the through hole of clamping groove is orthogonal or parallel with the normal of mounting surface, angle setting mechanism is used for driving sample clamp to rotate to change the included angle formed by the direction of the through hole of clamping groove and the rotation plane of polishing disc by quick-release fixing seat, quick-release movable part.This application is applicable to the same sample clamp to process different end face angles, and the same chip is precisely machined with the same sample clamp in multiple end faces and multiple angles.

Description

TECHNICAL FIELD

[0001] The present application relates to a kind of polishing devices, in particular to a kind of end face angle polishing devices of chip, belong to semiconductor wafer processing device technical field. BACKGROUND

[0002] Current optical communication technology develops rapidly, and optical fiber array products and optical chips are widely used. Due to various reasons, the end face of the product processed initially cannot be directly used for end face coupling, and the end face needs to be polished to remove a certain amount of material and ensure that the end face reaches a certain angle (specific angle + / - 0.3°, such as 82° + / - 0.3°, 80° + / - 0.3°, etc.) and surface roughness to meet the requirements of end face coupling.

[0003] The end face polishing device of the prior art usually needs to design a special angle clamp to clamp and fix the chip. For example, the PLC chip end face polishing process clamp and polishing device disclosed in Chinese Patent No. CN204772032U. The clamp of these devices has a fixed inclined reference surface, and the angle formed by the product after installation and the polishing surface is fixed, so that only one type of product with a certain angle can be processed at a time. If other angle samples need to be processed, the entire sample clamp needs to be replaced, which has low flexibility and high processing cost. In addition, the design of some clamps also has the problem that only one end face of the sample can be polished. If the other end face needs to be processed, the sample needs to be removed from the clamp, turned over and reinstalled, which affects the processing efficiency and reduces the processing accuracy. SUMMARY

[0004] In view of the defects of the prior art, the present application provides an end face angle polishing device for a chip, which solves the problem that the existing polishing device cannot flexibly realize multi-angle polishing of multiple end faces of the product.

[0005] The technical scheme of the present application is as follows: an end face angle polishing device for a chip, comprising a machine table, a polishing disc, an angle setting mechanism, a quick-release fixed seat, a quick-release movable part and a sample clamp. The polishing disc and the angle setting mechanism are arranged on the machine table. The quick-release movable part is detachably connected to the quick-release fixed seat. The sample clamp is detachably connected to the end of the quick-release movable part. The sample clamp comprises a clamp body and an inner pressing plate. The clamp body is provided with a clamping groove and a pair of parallel mounting surfaces. The inner pressing plate is fixed to the clamp body and cooperates with the clamping groove to clamp the chip sample. The through direction of the clamping groove is orthogonal or parallel to the normal of the mounting surface. The angle setting mechanism drives the sample clamp to rotate through the quick-release fixed seat and the quick-release movable part to change the included angle between the through direction of the clamping groove and the rotation plane of the polishing disc.

[0006] Further, the quick release fixing base is provided with a dovetail groove clamp, the dovetail groove clamp comprises a groove clamp bottom plate and a movable side plate, a dovetail groove is formed between the groove clamp bottom plate and the movable side plate, the distance between the movable side plate and the groove clamp bottom plate is adjustable, the groove clamp bottom plate is provided with a bayonet catch for limiting the quick release movable piece, at least one side of the quick release movable piece is provided with a dovetail boss matched with the dovetail groove, and the dovetail boss is provided with a fold line groove matched with the bayonet catch. Through the cooperation of the dovetail groove and the dovetail boss and the cooperation of the bayonet catch and the fold line groove, the quick release movable piece can be accurately installed and dismounted on the quick release fixing base, so that the quick release movable piece and the sample clamp can be separated from the whole device column body, and the sample clamp can be further dismounted to change the installation direction or replace the sample clamp.

[0007] Further, a push spring is arranged between the groove clamp bottom plate and the movable side plate.

[0008] Further, the sample clamp is prismatic, one pair of side surfaces of the prism are the installation surfaces, and the through direction of the clamping groove is parallel to the edge of the prism. With the polygonal cross section of the prism, the interference between the sample clamp and the polishing disc during grinding and polishing can be reduced, and the grinding and polishing of small-size chips are facilitated.

[0009] Further, the end of the quick release movable piece is U-shaped, and the sample clamp is connected with the arm part of the U-shaped notch. The U-shaped notch is used to avoid the sample installed in the clamping groove.

[0010] Further, one side of the inner pressing plate is provided with a rubber pad.

[0011] Further, a swing mechanism is arranged on the machine table, the swing mechanism comprises a swing driving source and a swing support, the angle setting mechanism is connected to the swing support, the swing driving source drives the swing support to rotate, and the rotation plane of the swing support is parallel to the rotation plane of the polishing disc. The position of the sample on the polishing disc is changed through the rotation of the swing support, so as to improve the grinding and polishing efficiency.

[0012] Further, a lifting mechanism is arranged on the machine table, which is used to drive the angle setting mechanism to approach or move away from the polishing disc, a pressurizing mechanism is arranged between the angle setting mechanism and the quick-release fixing seat, the pressurizing mechanism comprises a pressurizing support, a pressurizing driving source, a pressurizing movable frame and a distance measuring device, the quick-release fixing seat is fixedly connected with the pressurizing support, the pressurizing support is fixed on the angle setting mechanism and is driven to rotate by the angle setting mechanism, the pressurizing driving source is fixed on the pressurizing support and is used to drive the sample clamp to translate to approach or move away from the polishing disc through the pressurizing movable frame, the quick-release fixing seat and the quick-release movable piece, the translation plane of the sample clamp is parallel to the rotation plane of the sample clamp, and the distance measuring device is used to measure the translation distance of the pressurizing movable frame.

[0013] Further, a controller is arranged on the machine table, which is used to receive the measurement information of the distance measuring device and control the actions of the angle setting mechanism and the pressurizing driving source.

[0014] Further, the angle setting mechanism comprises an angle driving source, a rotary table and an angle sensor, the angle driving source is used to drive the rotary table to rotate, the angle sensor is used to detect the rotation angle of the rotary table, and the rotary table is used to connect the quick-release fixing seat.

[0015] The technical solution provided by the present application has the following advantages:

[0016] The angle setting mechanism directly changes the included angle between the end face of the chip sample clamped by the sample clamp and the rotation plane of the polishing disc, and the sample clamp is designed to be reversibly installed while keeping the angle position of the chip sample unchanged, so that the chip sample can complete the grinding and polishing of multiple end faces without being separated from the sample clamp, the operation is simple, and the processing precision of multiple end faces is high.

[0017] The quick-release movable piece is fixed by the cooperation of the dovetail groove and the dovetail boss and is positioned by the locking pin, so that the position accuracy of repeated disassembly and assembly of the quick-release movable piece can be improved, on the one hand, the disassembly and assembly of the sample clamp are more convenient, and on the other hand, the accuracy of reinstallation after disassembly can be ensured.

[0018] Overall, the present application is suitable for processing different end face angles with the same sample clamp, and is suitable for precise processing of multiple end faces and multiple angles of the same chip with the same sample clamp, which reduces the use cost and improves the processing efficiency and processing precision. BRIEF DESCRIPTION OF DRAWINGS

[0019] Figure 1 FIG. 1 is a structural schematic view of an end face angle grinding and polishing device for a chip according to an embodiment of the present application.

[0020] Figure 2Structure diagram of the lifting mechanism, swinging mechanism and polishing plate.

[0021] Figure 3 Structure diagram of the angle setting mechanism and other mechanisms and devices installed thereon.

[0022] Figure 4 Structure diagram of the angle setting mechanism.

[0023] Figure 5 Exploded view of the angle setting mechanism.

[0024] Figure 6 Structure diagram of the pressurizing mechanism.

[0025] Figure 7 Structure diagram of the quick-release fixing seat.

[0026] Figure 8 Structure diagram of the quick-release movable part of the single-side dovetail boss.

[0027] Figure 9 Structure diagram of the sample clamp.

[0028] Figure 10 Exploded view of the sample clamp.

[0029] Figure 11 Structure diagram of the quick-release movable part of the double-side dovetail boss installing the sample clamp.

[0030] Figure 12 Structure diagram of the coaxial installation of the sample clamp and the quick-release movable part.

[0031] Figure 13 Structure diagram of the perpendicular installation of the sample clamp and the quick-release movable part.

[0032] Figure 14 Structure diagram of the angle relationship of the coaxial installation of the sample clamp.

[0033] Figure 15 Structure diagram of the angle relationship of the perpendicular installation of the sample clamp.

[0034] Figure 16 Structure diagram of the relationship of the set angle, protruding length and clamp width.

[0035] Figure 17 Clamp turning diagram when processing parallel end faces.

[0036] Figure 18 Some end face angle diagrams that can be achieved by turning the clamp. DETAILED DESCRIPTION

[0037] The application will be further described in conjunction with the following examples. It should be understood that these examples are only used to illustrate but not limit the scope of the application. Various modifications of the present application, which are within the scope of the appended claims, will be apparent to those skilled in the art after reading the present description.

[0038] As shown in Figure 1 The end face angle polishing device of the chip of the embodiment comprises a touch control screen 1, a lifting mechanism 2, a swing mechanism 3, an angle setting mechanism 4, a pressing mechanism 5, a Bluetooth micrometer 6, a quick-release fixing seat 7, a quick-release movable part 8, a sample clamp 9, a polishing disc 10 and a machine table 11. The touch control screen 1 is installed on an adjustable support on the side of the machine table 11 and can be adjusted in front and back, left and right and up and down angles to facilitate the operator to operate.

[0039] As shown in Figure 2 The lifting mechanism 2 mainly comprises a fixed support 201, a screw rod seat 202, a screw rod 203, a screw rod connecting block 204, a connecting shaft 205, a lifting motor 207, a track 208, a sliding block 206 and the like. The fixed support 201 is fixed with the machine table 11, and the lifting motor 207 is fixedly installed on the fixed support 201. The lifting motor 207 is connected with the screw rod 203 through the connecting shaft 205, and the screw rod 203 is vertically arranged. The top of the screw rod 203 is supported by the screw rod seat 202 fixed at the top end of the fixed support 201. The screw rod connecting block 204 is connected on the screw rod 203, and the other end of the screw rod connecting block 204 is fixed with the motor support fixed plate 304 of the swing mechanism 3. Vertical tracks 208 are arranged on both sides of the fixed support 201, and the motor support fixed plate 304 is also fixed with the sliding block 206 arranged on the sliding track 208. When the lifting motor 207 works, the screw rod 203 is driven to rotate reversely, thereby driving the screw rod connecting block 204 to move up and down, and finally driving the motor support fixed plate 304 to move up and down along the track 208. The polishing disc 10 is arranged on one side of the lifting mechanism, and the polishing motor 12 is fixedly installed on the machine table 11. The polishing disc 10 is driven to rotate by the polishing motor 12, and the rotating plane thereof is a horizontal plane. In the embodiment, the lifting mechanism 2 is arranged to conveniently change the distance between other components connected with the lifting mechanism 2, such as the quick-release movable part 8 and the sample clamp 9, and the polishing disc 10, so as to leave enough space for adjusting and replacing the quick-release movable part 8 and the sample clamp 9.

[0040] As shown in Figure 3As shown, the swing mechanism 3 includes a swing motor 301, a mounting bracket 302, a motor bracket fixing plate 304, an adapter block 305 and a swing arm bracket 303. The main components of the swing mechanism 3 are connected with the lifting mechanism 2 through the motor bracket fixing plate 304. Specifically, the swing motor 301 is vertically installed on the mounting bracket 302, and the back side of the mounting bracket 302 is fixed with the motor bracket fixing plate 304. The motor shaft of the swing motor 301 is connected with the swing arm bracket 303 through the connecting block 305. The swing motor 301 drives the swing arm bracket 303 to rotate as a swing driving source. The rotation plane of the swing arm bracket 303 is parallel to the rotation plane of the polishing disc 10, which is also a horizontal plane. The swing mechanism 3 is used to make the other components mounted thereon move in the rotation plane of the polishing disc 10, change the contact position between the polishing disc 10 and the chip sample, and thus change the cutting speed, improve the efficiency and uniformity of polishing.

[0041] An angle setting mechanism 4 is installed on the swing arm bracket 303, which is used to accurately rotate a specified angle. Please refer to Figure 4 and Figure 5 As shown, the angle setting mechanism 4 mainly includes an angle setting motor 401, a hollow mounting platform 402, a hollow rotating platform 403, an adapter platform 404 and an angle sensor 405. The hollow mounting platform 402 is fixed on the swing arm bracket 303, the angle setting motor 401 is installed on the top side of the hollow mounting platform 402, the hollow rotating platform 403 and the adapter platform 404 are combined to form a shaft penetrating through the hollow mounting platform 402 and connected with the hollow mounting platform 402 for rotation, and the angle setting motor 401 drives the hollow rotating platform 403 to rotate and drive the adapter platform 404 to rotate. The angle setting motor 401 is provided with an encoder for measuring the angle of rotation of the motor. The angle sensor 405 is arranged on the shaft formed by the hollow rotating platform 403 and the adapter platform 404, and can measure the angle deflection state of the adapter platform 404 in real time. The angle setting mechanism 4 can be controlled by the angle of polishing required set on the touch control screen 1 to control the rotation angle.

[0042] The pressing mechanism 5 is fixed on the angle setting mechanism 4 by screws. Please refer to Figure 6As shown, the pressing mechanism 5 mainly consists of a pressing cylinder 501, a pressing support 502, a guide rail 503, a sliding block 504, a connecting piece 507, a pressing movable frame 508, etc. The pressing support 502 is an angle piece, the back side of which is fixedly connected with the adapter platform 404 of the angle setting mechanism 4. The pressing cylinder 501 is a pressing driving source for providing the power of downward pressing, and is fixedly installed on the top of the pressing support 502. The guide rail 503 is installed on the front side of the pressing support 502, and the pressing movable frame 508 is fixedly connected with the sliding block 504, which cooperates with the guide rail 503. The bottom end of the guide rail 503 is provided with a stop block 505 to prevent the sliding block 504 from slipping off the guide rail 503. The cylinder rod 506 of the pressing cylinder 501 is connected with the pressing movable frame 508 through the connecting piece 507. The pressing movable frame 508 can be lifted upward along the guide rail 503 and pressed downward under the action of the pressing cylinder 501. A Bluetooth micrometer 6 is further installed on the pressing support 502 as a distance measuring mechanism, and a micrometer pin 509 is installed on the pressing movable frame 508. During the upward and downward movement of the pressing movable frame 508, the micrometer pin 509 contacts with the measuring end of the Bluetooth micrometer 6, and the Bluetooth micrometer 6 can measure the displacement change of the pressing movable frame 508 along the guide rail 503 in real time to measure the removal amount of the chip end face. The function of the pressing mechanism 5 is to control the relative displacement of the chip and the polishing and grinding disc 10 in the vertical direction to realize grinding.

[0043] Please combine Figure 7As shown, the quick release fixing seat 7 is fixed on the pressing movable frame 508 of the pressing mechanism 5 by screws. The quick release fixing device 7 mainly consists of a fixed installation base plate 701, a slot clamping bottom plate 702, a movable side plate 703, a side plate locking knob 704, a limiting pin 705, a bayonet lock unlocking knob 707, a bayonet lock 708, etc. The slot clamping bottom plate 702 is fixed on the fixed installation base plate 701, and the movable side plate 703 is located on the top side of the slot clamping bottom plate 702, forming a transversely-through dovetail groove with the slot clamping bottom plate 702 and the movable side plate 703. The limiting pin 705 is arranged on the top of the slot clamping bottom plate 702 for guiding the movable side plate 703, and the push spring 706 is arranged on the limiting pin 705 between the slot clamping bottom plate 702 and the movable side plate 703. The side plate locking knob 704 is threadedly connected with the top of the slot clamping bottom plate 702 for adjusting the distance between the movable side plate 703 and the slot clamping bottom plate 702, thereby changing the slot width of the dovetail groove. When the side plate locking knob 704 is tightened, the movable side plate 703 is moved towards the slot clamping bottom plate 702, and when the side plate locking knob 704 is loosened, the movable side plate 703 is moved away from the slot clamping bottom plate 702 under the action of the push spring 706. In addition, the bayonet lock 708 is arranged on the slot clamping bottom plate 702 and located in the dovetail groove. The bayonet lock 708 is connected with the bayonet lock unlocking knob 707, and the bayonet lock unlocking knob 707 extends from the bottom side of the slot clamping bottom plate 702. The bayonet lock unlocking knob 707 has a bayonet lock push spring 709 inside, which pushes the bayonet lock unlocking knob 707 upwards, and the bayonet lock push spring 709 is compressed, and the bayonet lock 708 moves upwards. After the bayonet lock unlocking knob 707 is released, the bayonet lock 708 moves downwards under the action of the bayonet lock push spring 709. The up-and-down movement direction of the bayonet lock 708 is perpendicular to the through direction of the dovetail groove, and the function of the bayonet lock 708 is to limit and lock the quick release movable part 8.

[0044] As shown in Figure 8 The quick release movable part 8 consists of a base plate 801 and a dovetail boss 802, and the dovetail boss 802 is fixed on one side of the base plate 801. The bottom end of the base plate 801 is made into a U shape, and mounting holes are arranged on the front and rear sides and the end side of the two arm parts of the U-shaped part to install the sample clamp 9. The dovetail boss 802 has a transverse groove 803 and a positioning bayonet slot 804, the transverse groove 803 extends to the center along the axial direction from the edge of the dovetail boss 802, and the positioning bayonet slot 804 is arranged perpendicularly to the transverse groove 803 to form a broken line groove for cooperating with the bayonet lock 708. Please refer to Figure 3 , Figure 7 , Figure 8As shown, the disassembly of the quick-release movable part 8 and the quick-release fixed seat 7 is as follows: the side plate locking knob 704 of the quick-release fixed seat 7 is loosened, the movable side plate 703 is away from the groove clamp bottom plate 702, the dovetail groove is opened, at this time, along the outside to the inside, the dovetail boss 802 of the quick-release movable part 8 can be clamped into the dovetail groove of the quick-release fixed seat 7, and the clamping pin 708 can be clamped into the transverse groove 803. When the dovetail boss 802 is pushed to the middle, the clamping pin 708 is clamped into the positioning clamping groove 804 under the pushing of the clamping pin pushing spring 709. At this time, the side plate locking knob 704 can be tightened, and the dovetail groove is tightened to lock the quick-release movable part 8. When the quick-release movable part 8 is removed, the side plate locking knob 704 is loosened first, the clamping pin unlocking knob 707 is pushed to make the clamping pin 708 move along the positioning clamping groove 804 to the position of the transverse groove 803, and then the quick-release movable part 8 is transversely moved to make the quick-release movable part 8 out of the dovetail groove.

[0045] The sample clamp 9 can be fixedly installed at the bottom end of the base plate 801 in various directions. Please refer to Figure 9 、 Figure 10 As shown, the sample clamp 9 mainly consists of a clamp body 901 and an inner pressing plate 904. Since the sample clamp 9 needs to ensure that the relative position of the chip sample and the polishing disc 10 (mainly the angle) does not change when installed in various directions to meet the polishing requirements of multiple end faces, in the embodiment, the clamp body 901 is processed into an octagonal prism, so that its volume is small and interference with the polishing disc 10 can be avoided. The cross section of the clamp body 901 is a central symmetric octagonal deformation figure, the overall outer contour of the clamp body 901 is three-axis symmetric, and a group of relatively parallel side surfaces (cylindrical surface) on the clamp body 901 are installation surfaces 901a, which are used for abutting and installing with the end of the base plate 801 of the quick-release movable part 8. A clamping groove 901b that penetrates through the clamp body 901 laterally is arranged in the middle of the clamp body 901, that is, the openings of the two ends of the clamping groove 901b are arranged on the side surfaces (cylindrical surface) of the octagonal prism, and the penetration direction of the clamping groove 901b is orthogonal or parallel to the normal direction of the installation surface. One side of the clamping groove 901b is flared, the inner pressing plate 904 has a rubber pad 905, one side of the rubber pad 905 faces the clamping groove 901b, and the clamp body 901 is connected to a pressing plate top wire 906 which can press the inner pressing plate 904. After the chip sample 902 and the protective sheet 903 are overlapped, they are inserted into the clamping groove 901b. The pressing plate top wire 906 can press the inner pressing plate 904, so that the chip sample 902 is tightly fixed, and the rubber pad 905 can prevent the protective sheet 903 and the chip sample 902 from being crushed due to excessive pressure.

[0046] There are two installation modes of the sample clamp 9 on the quick-release movable part 8: one is a coaxial installation mode, and the sample clamp 9 is installed on the end surface of the base plate 801, as shown in Figure 12 The other is a vertical installation mode, and the sample clamp 9 is installed on one of the two side surfaces of the base plate 801, as shown in Figure 13For the convenience of turning over the chip sample 902, the sample clamp 9 need not be disassembled only for turning over. As shown in Figure 11 , dovetail bosses 802 can be provided on both sides of the base plate 801 of the quick-release movable part 8. When the chip sample 902 is turned over, only the quick-release movable part 8 need be disassembled and then turned over and installed again.

[0047] Please refer to Figure 14 , Figure 15 , when the set angle of the angle setting mechanism 4 is 0≦α<45°, the sample clamp 9 is installed coaxially with the U-shaped mouth end of the base plate 801. In the coaxial installation mode, the angle setting mechanism 4 sets the clockwise rotation angle α according to the software, and the sample chip 902 to be processed forms a sample angle β. The sample angle β=90°-α. For example, when the angle setting mechanism 4 sets the clockwise rotation angle α to 10° according to the software, the sample chip 902 forms a sample angle of 80°. When the set angle of the angle setting mechanism 4 is 45°<α≦90°, the perpendicular installation mode is adopted with the U-shaped mouth end of the U-shaped base plate 801. In the perpendicular installation mode, the angle setting mechanism 4 sets the clockwise rotation angle α according to the software, and the sample chip 902 to be processed forms a sample angle β. The sample angle β=the rotation angle α. For example, when the angle setting mechanism 4 sets the clockwise rotation angle α to 80° according to the software, the sample chip forms a sample angle of 80°. When α=45°, one of the two modes can be adopted.

[0048] Please refer to Figure 16 , the chip sample 902 forms an inclination angle β with the polishing disc 10, and forms a low point a and a high point b of the end face of the chip sample 902. The height difference h between the b point and the a point; the clamp body 901 side face forms a low point c and a high point d. The control of each dimension is as follows:

[0049] The protruding length of the chip sample from the surface of the clamp body 901 is L, the thickness of the chip stack (the chip sample 902 and the protective sheet 903) is T, and the half of the designed width of the upper side of the trapezoidal face of the clamp body 901 is W (the distance from the center line to the c point). The maximum L can be 4 times the thickness T of the chip stack.

[0050] The lines parallel to the polishing disc face passing through the three points c, b, and a are S1, S2, and S3. The distance between the c point and S3 is H.

[0051] During polishing, the end face removal amount of the chip sample 902 should be greater than or equal to h, and H≥h, otherwise H<h, the clamp body 901 will be polished, and the end face of the chip sample 902 will not be processed.

[0052] H=(L+T / 2*tanβ)*sinβ-W*cosβ;

[0053] h=T*cosβ;

[0054] (L+T / 2*tanβ)*sinβ-W*cosβ≥T*cosβ;

[0055] Design the fixture body 901 half width W = 2.7mm, chip stack thickness T = 2.5mm, Lmax = 4T, calculate the limit value of the angle β: tanβ≥0.49, then β≥26.1°.

[0056] Considering the redundancy in the actual use process, the design of the chip end face can be polished in the angle range: 30°≦β≤90°.

[0057] Please also refer to Figures 1 to 10 and Figure 17 , Figure 18 As shown, the same sample fixture 9 can be used without disassembling the sample, and different angle requirements of the sample can be processed by rotating and turning the sample fixture 9 and the quick-release movable part 8. For example, Figure 18 The leftmost side shows the original cross section of the chip sample 902. Only by turning the quick-release movable part 8, two bevels can be obtained on the same end face of the chip sample 902 to form a sharp corner structure. By rotating the sample fixture 9, a trapezoidal cross section can be obtained, both ends of which are inclined to the same side. By turning the rotating sample fixture 9, a parallelogram cross section can be obtained.

[0058] The specific grinding and polishing method of the chip end face angle grinding and polishing device of the embodiment is as follows:

[0059] First step: bonding and fixing of the stack

[0060] 1.1 The size of the chip sample 902 is 22mm*20mm*0.5mm, and the size of the protective sheet 903 is 22mm*20mm*1mm

[0061] Align two protective sheets 903 with a chip sample 902, bond with wax or glue, and then press tightly to form a stack with a size of 22mm*20mm*2.5mm.

[0062] 1.2 Put the stack into the fixture body 901, and the 22mm*2.5mm end face is the grinding and polishing surface. Make the length of the two end faces protruding from the surface of the fixture body 901 basically equal. Then install the inner pressing plate 904, and also ensure that the two sides of the inner pressing plate 904 protrude from the surface of the fixture body 901 with the same height. Tighten the three pressing plate top screws 906 to fix the stack tightly.

[0063] Second step: fixing and installation of the sample fixture 9

[0064] The sample holder 9 clamping the chip stack is fixed to the U-shaped port end of the base plate 801 of the quick-release movable part 8 with two screws in a coaxial manner. Then the quick-release movable part 8 with the sample holder 9 is installed on the quick-release fixed seat 7. The grinding disc 10 is replaced with a cast iron disc without grooves, and the height adjustment feet at the bottom of the machine are adjusted to ensure that the disc surface is level.

[0065] Third step: program setting and running: set the grinding disc speed to 20 rpm, the swing arm amplitude to 2 degrees, the swing speed to 50%, the angle a to 10 degrees, and the removal amount to 500 microns. Set the end face pressure to 200 g. After the program is set, click start. The angle setting mechanism 4 first confirms zero angle, and then rotates clockwise by 10 degrees. The lifting mechanism 2 controls the swing mechanism 3 to move downward, and when the lower end face of the chip stack is about 10 mm away from the disc surface, the lifting mechanism 2 stops. At this time, the pressing mechanism 5 starts to work, and the lower end face of the chip stack continues to move slowly towards the disc surface until it comes into contact with the disc surface, and the value on the Bluetooth micrometer 6 no longer changes. At this time, the Bluetooth micrometer 6 is reset to zero, and the abrasive is sprayed on the grinding disc. Then the grinding disc starts to rotate and the swing arm swings; the first end face of the chip starts to be ground on the grinding disc; when the Bluetooth micrometer 6 detects that the removal amount reaches 500 microns,

[0066] Fourth step: turning over the sample holder 9, refer to Figure 15

[0067] Loosen the two screws that fix the sample holder 9, and then remove the sample holder 9 as a whole. Then the sample holder 9 is turned over by 180 degrees along the center plane of the holder, so that the second end face of the chip sample 902 faces downward. Then the sample holder 9 is fixed again.

[0068] Fifth step: repeat the third step to grind the second end face until the grinding is completed. After the grinding is completed, the first end face and the second end face are parallel.

[0069] Sixth step: Next, polish both end faces. Start lifting the cylinder 501 of the grinding disc pressing mechanism 5 to make the chip end face away from the grinding disc surface, at the same time, the lifting mechanism 2 starts to move upward to the original position, the angle setting mechanism 4 rotates to the zero degree position, and the grinding disc stops rotating. The grinding of the first end face and the second end face is completed. Remove the cast iron grinding disc and replace it with a polyurethane polishing disc. Confirm that the polishing disc surface is level. Spray polishing liquid on the polishing disc surface.

[0070] Seventh step: polishing of the second end face: set the grinding disc rotation speed to 40 rpm, the swing arm amplitude to 2 degrees, the swing speed to 50%, the angle a to 10 degrees, and the polishing time to 10 minutes, and the end face pressure to 200 g. After setting the program, click start. The angle setting mechanism 4 first performs zero angle confirmation, and then rotates clockwise by 10 degrees. The lifting mechanism 2 controls the swing mechanism 3 to move downward, and when the lower end face of the chip is about 10 mm away from the disc face, the lifting mechanism 2 stops. At this time, the pressing mechanism 5 starts to work, and the lower end face of the chip continues to slowly move towards the disc face until it is in contact with the disc face, and the value on the Bluetooth micrometer 6 no longer changes. At this time, the Bluetooth micrometer is reset to zero, and the polishing liquid is sprayed on the polishing disc. Then the polishing disc starts to rotate, and the swing arm swings; the second end face of the chip starts to polish on the polishing disc; when the set time of 10 minutes arrives, the cylinder 501 of the pressing mechanism 5 starts to lift, so that the end face of the chip is away from the polishing disc face, and at the same time, the lifting mechanism 2 starts to move upward to the original position, the angle setting mechanism 4 rotates to the zero degree position, and the polishing disc stops rotating. After the second end face is polished, the second end face is washed with clean water.

[0071] Eighth step: polishing of the first end face: loosen the two screws of the sample clamp 9 again, and turn the sample clamp 9 by 180 degrees along the center plane of the clamp, so that the first end face faces downward, and then fix the sample clamp 9 again.

[0072] Ninth step: repeat the seventh step to polish the first end face until the first end face is polished. After completion, wash the first end face with clean water.

[0073] At this point, the double-end face polishing is completed.

[0074] The sample clamp 9 is removed as a whole and placed on the angle measuring instrument and the roughness measuring instrument for data measurement. The first end face angle is measured to be 80.12 degrees, and the surface roughness is 8 nm. The second end face angle is 80.18 degrees, and the surface roughness is 9 nm. After the above verification, the present application can realize rapid multi-angle grinding and polishing of the chip end face, and the angle accuracy and surface roughness after polishing are superior to the application requirements.

Claims

1. A device for end face angle lapping of a chip, characterized by The utility model relates to a kind of angle setting mechanism, quick detachable movable part, sample clamp and swing mechanism, including machine table, polishing disc, quick detachable fixed seat, quick detachable movable part, sample clamp and be set on the swing mechanism of the machine table, the polishing disc and the angle setting mechanism are arranged in the machine table, the quick detachable movable part is detachably connected with the quick detachable fixed seat, the sample clamp is detachably connected in the end of the quick detachable movable part, the sample clamp is prismatic, the sample clamp includes clamp body and inner pressing plate, the clamp body is equipped with clamping groove and a pair of mutually parallel mounting surface, the inner pressing plate is fixed to the clamp body and is cooperated with the clamping groove for clamping chip sample, one pair of side of the prism is the mounting surface, the through direction of the clamping groove is parallel with the edge of the prism, the through direction of the clamping groove is orthogonal or parallel with the normal of the mounting surface, the angle setting mechanism is driven the sample clamp rotation to change the included angle formed by the through direction of the clamping groove and the rotation plane of the polishing disc by the quick detachable fixed seat, the quick detachable movable part, the quick detachable fixed seat is equipped with dovetail groove clamp, the dovetail groove clamp includes groove clamp bottom plate and movable side plate, the movable side plate and the groove clamp bottom plate form dovetail groove between, the spacing of the movable side plate and the groove clamp bottom plate is adjustable, the groove clamp bottom plate is equipped with the bayonet lock for limiting the quick detachable movable part, at least one side of the quick detachable movable part is equipped with dovetail boss matched with the dovetail groove, the dovetail boss is equipped with the fold line groove matched with the bayonet lock, the end of the quick detachable movable part is U-shaped, the sample clamp is connected with the arm portion of the U-shaped, the swing mechanism includes swing driving source and swing support, the angle setting mechanism is connected to the swing support, the swing driving source drives the swing support rotation, the rotation plane of the swing support is parallel with the rotation plane of the polishing disc.

2. The device for end face angle polishing of a chip according to claim 1, wherein Pushing spring is arranged between the groove clamp bottom plate and the movable side plate.

3. The device for end face angle polishing of a chip according to claim 1, wherein The inner pressing plate is equipped with rubber pad on one side.

4. The device for end face angle polishing of a chip according to claim 1, wherein The utility model relates to a kind of angle setting mechanism, quick detachable movable part, sample clamp and swing mechanism, including machine table, polishing disc, quick detachable fixed seat, quick detachable movable part, sample clamp and be set on the swing mechanism of the machine table, the polishing disc and the angle setting mechanism are arranged in the machine table, the quick detachable movable part is detachably connected with the quick detachable fixed seat, the sample clamp is detachably connected in the end of the quick detachable movable part, the sample clamp is prismatic, the sample clamp includes clamp body and inner pressing plate, the clamp body is equipped with clamping groove and a pair of mutually parallel mounting surface, the inner pressing plate is fixed to the clamp body and is cooperated with the clamping groove for clamping chip sample, one pair of side of the prism is the mounting surface, the through direction of the clamping groove is parallel with the edge of the prism, the through direction of the clamping groove is orthogonal or parallel with the normal of the mounting surface, the angle setting mechanism is driven the sample clamp rotation to change the included angle formed by the through direction of the clamping groove and the rotation plane of the polishing disc by the quick detachable fixed seat, the quick detachable movable part, the quick detachable fixed seat is equipped with dovetail groove clamp, the dovetail groove clamp includes groove clamp bottom plate and movable side plate, the movable side plate and the groove clamp bottom plate form dovetail groove between, the spacing of the movable side plate and the groove clamp bottom plate is adjustable, the groove clamp bottom plate is equipped with the bayonet lock for limiting the quick detachable movable part, at least one side of the quick detachable movable part is equipped with dovetail boss matched with the dovetail groove, the dovetail boss is equipped with the fold line groove matched with the bayonet lock, the end of the quick detachable movable part is U-shaped, the sample clamp is connected with the arm portion of the U-shaped, the swing mechanism includes swing driving source and swing support, the angle setting mechanism is connected to the swing support, the swing driving source drives the swing support rotation, the rotation plane of the swing support is parallel with the rotation plane of the polishing disc.

5. The apparatus for end face angle polishing of a chip according to claim 4, wherein The utility model relates to a kind of angle setting mechanism, quick detachable movable part, sample clamp and swing mechanism, including machine table, polishing disc, quick detachable fixed seat, quick detachable movable part, sample clamp and be set on the swing mechanism of the machine table, the polishing disc and the angle setting mechanism are arranged in the machine table, the quick detachable movable part is detachably connected with the quick detachable fixed seat, the sample clamp is detachably connected in the end of the quick detachable movable part, the sample clamp is prismatic, the sample clamp includes clamp body and inner pressing plate, the clamp body is equipped with clamping groove and a pair of mutually parallel mounting surface, the inner pressing plate is fixed to the clamp body and is cooperated with the clamping groove for clamping chip sample, one pair of side of the prism is the mounting surface, the through direction of the clamping groove is parallel with the edge of the prism, the through direction of the clamping groove is orthogonal or parallel with the normal of the mounting surface, the angle setting mechanism is driven the sample clamp rotation to change the included angle formed by the through direction of the clamping groove and the rotation plane of the polishing disc by the quick detachable fixed seat, the quick detachable movable part, the quick detachable fixed seat is equipped with dovetail groove clamp, the dovetail groove clamp includes groove clamp bottom plate and movable side plate, the movable side plate and the groove clamp bottom plate form dovetail groove between, the spacing of the movable side plate and the groove clamp bottom plate is adjustable, the groove clamp bottom plate is equipped with the bayonet lock for limiting the quick detachable movable part, at least one side of the quick detachable movable part is equipped with dovetail boss matched with the dovetail groove, the dovetail boss is equipped with the fold line groove matched with the bayonet lock, the end of the quick detachable movable part is U-shaped, the sample clamp is connected with the arm portion of the U-shaped, the swing mechanism includes swing driving source and swing support, the angle setting mechanism is connected to the swing support, the swing driving source drives the swing support rotation, the rotation plane of the swing support is parallel with the rotation plane of the polishing disc. The utility model relates to a kind of angle setting mechanism, quick detachable movable part, sample clamp and swing mechanism, including machine table, polishing disc, quick detachable fixed seat, quick detachable movable part, sample clamp and be set on the swing mechanism of the machine table, the polishing disc and the angle setting mechanism are arranged in the machine table, the quick detachable movable part is detachably connected with the quick detachable fixed seat, the sample clamp is detachably connected in the end of the quick detachable movable part, the sample clamp is prismatic, the sample clamp includes clamp body and inner pressing plate, the clamp body is equipped with clamping groove and a pair of mutually parallel mounting surface, the inner pressing plate is fixed to the clamp body and is cooperated with the clamping groove for clamping chip sample, one pair of side of the prism is the mounting surface, the through direction of the clamping groove is parallel with the edge of the prism, the through direction of the clamping groove is orthogonal or parallel with the normal of the mounting surface, the angle setting mechanism is driven the sample clamp rotation to change the included angle formed by the through direction of the clamping groove and the rotation plane of the polishing disc by the quick detachable fixed seat, the quick detachable movable part, the quick detachable fixed seat is equipped with dovetail groove clamp, the dovetail groove clamp includes groove clamp bottom plate and movable side plate, the movable side plate and the groove clamp bottom plate form dovetail groove between, the spacing of the movable side plate and the groove clamp bottom plate is adjustable, the groove clamp bottom plate is equipped with the bayonet lock for limiting the quick detachable movable part, at least one side of the quick detachable movable part is equipped with dovetail boss matched with the dovetail groove, the dovetail boss is equipped with the fold line groove matched with the bayonet lock, the end of the quick detachable movable part is U-shaped, the sample clamp is connected with the arm portion of the U-shaped, the swing mechanism includes swing driving source and swing support, the angle setting mechanism is connected to the swing support, the swing driving source drives the swing support rotation, the rotation plane of the swing support is parallel with the rotation plane of the polishing disc.

6. The device for end face angle polishing of a chip according to claim 1, wherein The angle setting mechanism comprises an angle driving source, a rotary table and an angle sensor, the angle driving source is used to drive the rotary table to rotate, the angle sensor is used to detect the rotation angle of the rotary table, and the rotary table is used to connect the quick-release fixing seat.

Images