A high-precision, large-size, six-degree-of-freedom micro-motion device

Abstract

The present application belongs to the field of inkjet printing technology, and discloses a high-precision, large-size, six-degree-of-freedom micro-motion device, comprising: a lower fixed plate; an upper mounting plate for mounting a workpiece placement table; an air-floating flexible connection unit, connected between the upper mounting plate and the lower fixed plate, and capable of moving relative to the lower fixed plate along the X-axis and the Y-axis; four horizontal drive units, which are cross-distributed around the air-floating flexible connection unit, two of which are symmetrically arranged along the X-axis direction and used to drive the upper mounting plate to move along the Y-axis, and the other two are symmetrically arranged along the Y-axis direction and used to drive the upper mounting plate to move along the X-axis; at least three vertical drive units, which are evenly arranged around the air-floating flexible connection unit, the vertical drive units are connected between the lower fixed plate and the upper mounting plate, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the Z-axis; the precise fine-tuning of the position in three axial directions and the rotation angle in three axial directions can be achieved, which is conducive to the precise adjustment of the position and angle of the workpiece placement table.

Description

Technical Field

[0001] The present application relates to the field of inkjet printing technology, and in particular to a high-precision, large-size, six-degree-of-freedom micro-motion device. Background Art

[0002] At present, vacuum evaporation technology is usually used in the production of OLED displays. However, in the manufacture of large-size OLED display panels, inkjet printing technology has become one of the most promising technologies due to its low cost and the advantage of being able to print large-area panels. To prepare pixels in this way, the nozzle needs to be able to accurately spray ink on the target points of the OLED substrate. In order to achieve precise positioning of the inkjet position, a nozzle with adjustable angle and position can be used for spraying. However, the angle and position adjustment range of the nozzle is limited. If the position and angle errors of the placement table used to support the OLED workpiece are large and exceed the allowable error range of the inkjet printing process, the product quality cannot be guaranteed.

[0003] Therefore, it is necessary to find a six-degree-of-freedom micro-motion device that can achieve precise fine-tuning of the three-axial position and the three-axial rotation angle to adjust the position and angle of the workpiece placement table to ensure printing quality. Summary of the invention

[0004] The purpose of the present application is to provide a high-precision, large-size, six-DOF micro-motion device that can achieve precise fine-tuning of the three-axial position and the three-axial rotation angle, which is conducive to accurately adjusting the position and angle of the workpiece placement table.

[0005] The present application provides a high-precision, large-size, six-degree-of-freedom micro-motion device, comprising:

[0006] Lower fixing plate;

[0007] An upper mounting plate, the upper mounting plate being arranged above the lower fixing plate and used for mounting a workpiece placing table;

[0008] An air-floating flexible connection unit, wherein the upper end of the air-floating flexible connection unit is fixedly connected to the upper mounting plate, and the lower end is slidably connected to the lower fixing plate, and the air-floating flexible connection unit can move relative to the lower fixing plate along the X-axis and the Y-axis;

[0009] Four horizontal drive units, the four horizontal drive units are cross-distributed around the air-floating flexible connection unit; two of the horizontal drive units are symmetrically arranged on both sides of the air-floating flexible connection unit along the X-axis direction, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the Y-axis; the other two horizontal drive units are symmetrically arranged on both sides of the air-floating flexible connection unit along the Y-axis direction, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the X-axis;

[0010] At least three vertical drive units, all of which are evenly arranged around the air-floating flexible connection unit, are connected between the lower fixed plate and the upper mounting plate, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the Z axis.

[0011] The air-floating flexible connection unit can support the upper mounting plate while ensuring that the upper mounting plate has three axial degrees of freedom of movement and three axial degrees of freedom of rotation. The X-axis position, Y-axis position and rotation angle around the Z-axis of the upper mounting plate can be precisely fine-tuned through the horizontal drive unit, and the Z-axis position, rotation angle around the X-axis and rotation angle around the Y-axis of the upper mounting plate can be precisely fine-tuned through the vertical drive unit; thus, after the workpiece placement table is installed on the upper mounting plate, the position and angle of the workpiece placement table can be precisely adjusted.

[0012] Preferably, the high-precision, large-size, six-degree-of-freedom micro-motion device also includes at least three gravity balancing devices, all of which are evenly arranged around the air-floating flexible connection unit, and the gravity balancing device is connected between the lower fixed plate and the upper mounting plate, and is used to provide supporting force to the upper mounting plate to balance the gravity of the upper mounting plate itself and the gravity of the load on the upper mounting plate.

[0013] By balancing the gravity of the upper mounting plate itself and the gravity of the load on the upper mounting plate through the gravity balancing device, the pressure on the vertical drive unit can be reduced. On the one hand, it is beneficial to improve the position adjustment accuracy of the vertical drive unit. On the other hand, it can increase the adjustment speed of the vertical drive unit, which is beneficial to improve the height and angle adjustment efficiency.

[0014] Preferably, the gravity balancing device is an airbag arranged along the Z-axis direction.

[0015] Preferably, the air-floating flexible connection unit includes a guide rail assembly, an air-floating shaft and a flexible bearing, the lower end of the guide rail assembly is fixedly connected to the center of the lower fixed plate, the lower end of the air-floating shaft is fixedly connected to the upper end of the guide rail assembly, and the upper end of the air-floating shaft is connected to the upper mounting plate through the flexible bearing.

[0016] Preferably, the guide rail assembly includes an X-axis guide rail extending along the X-axis and a Y-axis guide rail extending along the Y-axis, and one of the X-axis guide rail and the Y-axis guide rail is arranged at the lower side of the other and fixedly connected to the lower fixed plate.

[0017] The guide rail assembly can ensure that the air-floating flexible connection unit can move along the X-axis and the Y-axis as a whole, thereby ensuring the adjustment accuracy of the X-axis position and the Y-axis position of the upper mounting plate.

[0018] Preferably, the air-floating shaft comprises a shaft sleeve and a shaft core, the shaft sleeve comprises a shaft sleeve cavity, the shaft core is inserted into the shaft sleeve cavity, and an air gap is provided between the shaft core and the inner wall of the shaft sleeve; the shaft core is provided with a shaft core cavity, a plurality of jet holes and an air inlet hole, the shaft core cavity is connected with the air gap through the plurality of jet holes, and the air inlet hole is used to input high-pressure gas into the shaft core cavity.

[0019] Through the air-floating shaft, a support force can be reliably provided to the upper mounting plate to further reduce the pressure on the vertical drive unit. On the one hand, it is beneficial to further improve the position adjustment accuracy of the vertical drive unit. On the other hand, it can further improve the adjustment speed of the vertical drive unit, thereby facilitating the improvement of the height and angle adjustment efficiency. In addition, due to the air gap between the sleeve and the shaft core, space is provided for the upper mounting plate to rotate slightly around three axes and fine-tune the height.

[0020] Preferably, the air gap is 5 μm-10 μm.

[0021] Preferably, the flexible bearing comprises an annular flexible sheet, the upper end of the shaft sleeve is provided with a flange portion, the inner side of the annular flexible sheet is connected to the flange portion, and the outer side is connected to the upper mounting plate.

[0022] In practical applications, the lower fixed plate is generally installed on the macro-motion platform, so that the high-precision large-size six-degree-of-freedom micro-motion device will move as a whole. The annular flexible sheet can provide resistance to the inertial force of the upper mounting plate and the load on the upper mounting plate during the overall acceleration and deceleration process, so as to reduce the inertial force transmitted to the horizontal drive unit and the vertical drive unit, thereby avoiding damage to the horizontal drive unit and the vertical drive unit due to the inertial force.

[0023] Preferably, the vertical drive unit includes a first mounting seat, a vertically arranged first voice coil motor, a first grating scale and a first grating scale reading head; the lower end of the first mounting seat is fixedly connected to the lower fixed plate; the first voice coil motor includes a first stator and a first mover, the lower end of the first stator is fixedly connected to the upper end of the first mounting seat, and the upper end of the first mover is fixedly connected to the upper mounting plate; the first grating scale and the first grating scale reading head are arranged opposite to each other, and one of the first grating scale and the first grating scale reading head is fixedly connected to the first mover, and the other is fixedly connected to the lower fixed plate.

[0024] Preferably, the horizontal driving unit includes a second mounting seat, a third mounting seat, a horizontally arranged second voice coil motor, a second grating scale and a second grating scale reading head; the lower end of the second mounting seat is fixedly connected to the lower fixed plate, and the upper end of the third mounting seat is fixedly connected to the upper mounting plate; the second voice coil motor includes a second stator and a second mover, an end of the second stator away from the second mover is fixedly connected to the second mounting seat, and an end of the second mover away from the second stator is fixedly connected to the third mounting seat; the second grating scale and the second grating scale reading head are arranged opposite to each other, and one of the second grating scale and the second grating scale reading head is fixedly connected to the second mover or the third mounting seat, and the other is fixedly connected to the lower fixed plate.

[0025] Beneficial effects: The high-precision, large-size, six-degree-of-freedom micro-motion device provided by the present application can support the upper mounting plate through the air-floating flexible connection unit, while ensuring that the upper mounting plate has three axial degrees of freedom of movement and three axial degrees of freedom of rotation. The X-axis position, Y-axis position and rotation angle around the Z-axis of the upper mounting plate can be accurately fine-tuned through the horizontal drive unit, and the Z-axis position, rotation angle around the X-axis and rotation angle around the Y-axis of the upper mounting plate can be accurately fine-tuned through the vertical drive unit; thus, after the workpiece placement table is installed on the upper mounting plate, the position and angle of the workpiece placement table can be accurately adjusted. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] Figure 1 A schematic diagram of the structure of a high-precision, large-size, six-DOF micro-motion device provided in an embodiment of the present application.

[0027] Figure 2 A top view of the high-precision, large-size, six-DOF micro-motion device provided in an embodiment of the present application with the upper mounting plate removed.

[0028] Figure 3 An exploded diagram of a high-precision, large-size, six-DOF micro-motion device provided in an embodiment of the present application.

[0029] Figure 4 It is a schematic diagram of the structure of the air floating shaft.

[0030] Figure 5 It is a structural schematic diagram of the vertical drive unit.

[0031] Figure 6 Schematic diagram of the structure of the horizontal drive unit.

[0032] Figure 7 It is a structural schematic diagram of the guide rail assembly.

[0033] Explanation of reference numerals: 1. lower fixing plate; 2. upper mounting plate; 3. air-floating flexible connection unit; 4. horizontal drive unit; 401. second mounting seat; 402. third mounting seat; 4021. connection plate; 403. second voice coil motor; 4031. second stator; 4032. second mover; 404. second grating ruler; 405. second grating ruler reading head; 406. fourth connecting frame; 5. vertical drive unit; 501. first mounting seat; 502. first voice coil motor; 5021. third A stator; 5022, a first mover; 503, a first grating scale; 504, a first grating scale reading head; 505, a first connecting frame; 506, a second connecting frame; 6, a gravity balance device; 7, a guide rail assembly; 701, an X-axis guide rail; 702, a Y-axis guide rail; 703, an adapter plate; 8, an air-floating shaft; 801, a sleeve; 8011, a flange; 802, a shaft core; 8021, a shaft core cavity; 8022, an air inlet; 803, an air gap; 9, a flexible bearing; 10, an annular pressure plate. DETAILED DESCRIPTION

[0034] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of the embodiments. The components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the application claimed for protection, but merely represents the selected embodiments of the present application. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without making creative work belong to the scope of protection of the present application.

[0035] It should be noted that similar reference numerals and letters represent similar items in the following drawings, so once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings. At the same time, in the description of this application, the terms "first", "second", etc. are only used to distinguish the description and cannot be understood as indicating or implying relative importance.

[0036] For ease of description, in this article, the directions of the X-axis, Y-axis, and Z-axis are as follows: Figure 1 As shown, the X-axis and the Y-axis are two axes perpendicular to each other on the horizontal plane, and the Z-axis is the axis in the vertical direction.

[0037] Please refer to Figure 1-Figure 7 In some embodiments of the present application, a high-precision, large-size, six-DOF micro-motion device comprises:

[0038] Lower fixing plate 1;

[0039] An upper mounting plate 2, which is arranged above the lower fixing plate 1 and is used to install a workpiece placement table;

[0040] An air-floating flexible connection unit 3, the upper end of which is fixedly connected to the upper mounting plate 2, and the lower end of which is slidably connected to the lower fixing plate 1, and the air-floating flexible connection unit 3 can move relative to the lower fixing plate 1 along the X-axis and the Y-axis;

[0041] Four horizontal drive units 4 are arranged in a cross shape around the air-floating flexible connection unit 3 (eg Figure 2 As shown); two horizontal drive units 4 ( Figure 2 The upper and lower horizontal drive units 4) are symmetrically arranged on both sides of the air-floating flexible connection unit 3 along the X-axis direction, and are used to drive the upper mounting plate 2 to move relative to the lower fixing plate 1 along the Y-axis; the other two horizontal drive units 4 ( Figure 2 The left and right horizontal drive units 4 are symmetrically arranged on both sides of the air-floating flexible connection unit 3 along the Y-axis direction, and are used to drive the upper mounting plate 2 to move relative to the lower fixing plate 1 along the X-axis;

[0042] At least three vertical drive units 5 are evenly arranged around the air-floating flexible connection unit 3 , and the vertical drive units 5 are connected between the lower fixed plate 1 and the upper mounting plate 2 , and are used to drive the upper mounting plate 2 to move relative to the lower fixed plate 1 along the Z axis.

[0043] The air-floating flexible connection unit 3 can support the upper mounting plate 2 and ensure that the upper mounting plate 2 has three axial degrees of freedom of movement and three axial degrees of freedom of rotation. The X-axis position, Y-axis position and rotation angle around the Z-axis of the upper mounting plate 2 can be precisely adjusted by the horizontal drive unit 4 (for example, Figure 2 In the embodiment, the Y-axis position of the upper mounting plate 2 can be adjusted by the left and right horizontal drive units 4 working synchronously in the same direction, the X-axis position of the upper mounting plate 2 can be adjusted by the upper and lower horizontal drive units 4 working synchronously in the same direction, the rotation angle of the upper mounting plate 2 around the Z-axis can be adjusted by making the left and right horizontal drive units 4 work synchronously in the opposite direction and the upper and lower horizontal drive units 4 work synchronously in the opposite direction accordingly), and the Z-axis position, the rotation angle around the X-axis and the rotation angle around the Y-axis of the upper mounting plate 2 can be accurately fine-tuned by the vertical drive unit 5 (specifically, the Z-axis position of the upper mounting plate 2 can be adjusted by making all the vertical drive units 5 move up and down synchronously, and the rotation angle of the upper mounting plate 2 around the X-axis and the rotation angle around the Y-axis can be adjusted by adjusting the height deviation of each vertical drive unit 5); thus, when the workpiece placement table is mounted on the upper mounting plate 2, the workpiece placement table will move with the upper mounting plate 2, so the position and angle of the workpiece placement table can be accurately adjusted; and then the precise fine-tuning of the three-axial position and the three-axial rotation angle of the OLED workpiece can be achieved, which is conducive to ensuring the printing quality of the OLED workpiece.

[0044] In some preferred embodiments, see Figure 1-Figure 3 The high-precision, large-size, six-DOF micro-motion device also includes at least three gravity balancing devices 6, all of which are evenly arranged around the air-floating flexible connection unit 3. The gravity balancing devices 6 are connected between the lower fixing plate 1 and the upper mounting plate 2, and are used to provide a supporting force to the upper mounting plate 2 to balance the gravity of the upper mounting plate 2 itself and the gravity of the load on the upper mounting plate 2 (the load includes the workpiece placement table mounted on the upper mounting plate 2 and the OLED workpiece placed on the workpiece placement table). By balancing the gravity of the upper mounting plate 2 itself and the gravity of the load on the upper mounting plate 2 by the gravity balancing device 6, the pressure on the vertical drive unit 5 can be reduced, which is beneficial to improving the position adjustment accuracy of the vertical drive unit 5 on the one hand (especially when the vertical drive unit 5 includes a voice coil motor, the pressure will cause the relative movement between the mover and the stator of the voice coil motor, thereby affecting the position adjustment accuracy), and on the other hand, it can improve the adjustment speed of the vertical drive unit 5, which is beneficial to improving the adjustment efficiency of the height and angle of the upper mounting plate 2 (and thus improving the printing efficiency of the OLED workpiece).

[0045] In some embodiments, the gravity balancing device 6 includes an air bag arranged along the Z-axis direction. The air pressure of the air bag can be controlled to adjust its supporting force on the upper mounting plate 2 to achieve gravity balance.

[0046] In some embodiments, see Figure 3 The air-floating flexible connection unit 3 includes a guide rail assembly 7, an air-floating shaft 8 and a flexible bearing 9. The lower end of the guide rail assembly 7 is fixedly connected to the center of the lower fixed plate 1, the lower end of the air-floating shaft 8 is fixedly connected to the upper end of the guide rail assembly 7, and the upper end of the air-floating shaft 8 is connected to the upper mounting plate 2 through the flexible bearing 9.

[0047] Further, see Figure 3 , Figure 7 The guide rail assembly 7 includes an X-axis guide rail 701 extending along the X-axis and a Y-axis guide rail 702 extending along the Y-axis, one of the X-axis guide rail 701 and the Y-axis guide rail 702 is arranged at the lower side of the other and is fixedly connected to the lower fixing plate 1 (for example Figure 7 In the embodiment, the X-axis guide rail 701 is arranged at the lower side of the Y-axis guide rail 702 and is fixedly connected to the lower fixed plate 1, but the Y-axis guide rail 702 can also be arranged at the lower side of the X-axis guide rail 701). The guide rail assembly 7 can ensure that the air-floating flexible connection unit 3 can move along the X-axis and the Y-axis as a whole, and ensure that the moving direction when moving along the X-axis and the Y-axis is accurate, thereby ensuring the adjustment accuracy of the X-axis position and the Y-axis position of the upper mounting plate 2.

[0048] Among them, the X-axis guide rail 701 and the Y-axis guide rail 702 are existing technologies (which mainly include fixed slide rails and slide seats slidably arranged on the fixed slide rails), and specific models can be selected according to actual needs.

[0049] Preferably, see Figure 3 , Figure 7 , an adapter plate 703 is provided between the X-axis guide rail 701 and the Y-axis guide rail 702. The adapter plate 703 can provide a horizontal mounting surface for the guide rail located on the upper side, thereby ensuring the mounting accuracy of the guide rail located on the upper side.

[0050] Further, see Figure 3 , Figure 4 The air-floating shaft 8 includes a shaft sleeve 801 and a shaft core 802. The shaft sleeve 801 includes a shaft sleeve cavity. The shaft core 802 is inserted into the shaft sleeve cavity. An air gap 803 is provided between the shaft core 802 and the inner wall of the shaft sleeve 801. The shaft core 802 is provided with a shaft core cavity 8021, a plurality of jet holes (not shown in the figure) and an air inlet hole 8022. The shaft core cavity 8021 is connected with the air gap 803 through the plurality of jet holes. The air inlet hole 8022 is used to input high-pressure gas into the shaft core cavity 8021.

[0051] exist Figure 4 In the embodiment, the upper end of the shaft sleeve cavity has an opening. When in use, a cover body can be placed at the opening of the upper end of the shaft sleeve cavity to close the opening, so that the high-pressure gas can support the shaft sleeve 801 and make the shaft sleeve 801 suspended. In addition, if the cover body is not placed at the opening, and the workpiece placement table and the upper mounting plate 2 are connected in an airtight manner, so that a sealed cavity is formed between the upper end of the shaft sleeve cavity and the workpiece placement table, the shaft sleeve 801 can also be suspended. In fact, the shaft sleeve cavity can also be set as a structure with only the lower end opening to achieve the suspension of the shaft sleeve 801.

[0052] Through the air-floating shaft 8, the upper mounting plate 2 can be reliably provided with a supporting force to further reduce the pressure on the vertical drive unit 5, which is beneficial to further improve the position adjustment accuracy of the vertical drive unit 5 on the one hand, and further improve the adjustment speed of the vertical drive unit 5 on the other hand, thereby improving the adjustment efficiency of the height and angle; in addition, since there is an air gap 803 between the sleeve 801 and the shaft core 802, space is provided for the upper mounting plate 2 to rotate slightly around three axes and fine-tune the height. In actual operation, the air pressure of the high-pressure gas input into the shaft core cavity 8021 can be adjusted according to the actual weight of the upper mounting plate 2 and the load to ensure that a certain air gap 803 is maintained between the sleeve 801 and the shaft core 802, thereby reducing the friction between the sleeve 801 and the shaft core 802, making the position and angle fine-tuning smoother, more efficient and more accurate. Preferably, the air gap 803 is 5μm-10μm.

[0053] Among them, the flexible bearing 9 can be a flexible bearing in the prior art; in this embodiment, see Figure 3 , Figure 4 The flexible bearing 9 includes an annular flexible sheet, and a flange portion 8011 is provided at the upper end of the sleeve 801. The inner side of the annular flexible sheet is connected to the flange portion 8011, and the outer side is connected to the upper mounting plate 2.

[0054] It should be noted that the flexible bearing 9 in the air-floating flexible connection unit 3 can also be replaced with a universal hinge, which can also provide support and six degrees of freedom for the upper mounting plate 2. However, in actual applications, the lower fixed plate 1 is generally installed on a macro-motion platform (a macro-motion platform of an OLED printing device, used to transport a workpiece placement table), so that the high-precision, large-size, six-degree-of-freedom micro-motion device will move as a whole, and the annular flexible sheet can provide resistance to the inertial force of the upper mounting plate 2 and the load on the upper mounting plate 2 during the overall acceleration and deceleration process (the overall movement process includes the acceleration process and the deceleration process), so as to reduce the inertial force transmitted to the horizontal drive unit 4 and the vertical drive unit 5, thereby avoiding the horizontal drive unit 4 and the vertical drive unit 5 from being damaged by the inertial force.

[0055] The annular flexible sheet may be made of spring steel, but is not limited thereto.

[0056] In some embodiments, the inner side of the annular flexible sheet is directly connected to the flange portion 8011 via a plurality of screws or bolts.

[0057] In other embodiments, see Figure 4 The air-floating flexible connection unit 3 further includes an annular pressing plate 10, the inner side of the annular flexible sheet is sandwiched between the annular pressing plate 10 and the flange portion 8011, and the annular pressing plate 10 and the flange portion 8011 are connected by a plurality of screws or bolts. This connection method can reduce stress concentration (if the annular flexible sheet is directly connected to the flange portion 8011 by a plurality of screws or bolts, a large stress concentration is likely to occur at the screw or bolt connection), thereby facilitating the improvement of the service life of the annular flexible sheet.

[0058] Similarly, the outer side of the annular flexible sheet can be directly connected to the upper mounting plate 2 by multiple screws or bolts, or another annular pressure plate 10 can be used to clamp the outer side of the annular flexible sheet between the other annular pressure plate 10 and the upper mounting plate 2 (the other annular pressure plate 10 and the upper mounting plate 2 are connected by screws or bolts).

[0059] Further, see Figure 5The vertical drive unit 5 includes a first mounting seat 501, a vertically arranged first voice coil motor 502, a first grating ruler 503 and a first grating ruler reading head 504; the lower end of the first mounting seat 501 is fixedly connected to the lower fixed plate 1; the first voice coil motor 502 includes a first stator 5021 and a first mover 5022, the lower end of the first stator 5021 is fixedly connected to the upper end of the first mounting seat 501, and the upper end of the first mover 5022 is fixedly connected to the upper mounting plate 2; the first grating ruler 503 and the first grating ruler reading head 504 are arranged opposite to each other, and one of the first grating ruler 503 and the first grating ruler reading head 504 is fixedly connected to the first mover 5022, and the other is fixedly connected to the lower fixed plate 1 (for example Figure 5 In the figure, the first grating ruler 503 is fixedly connected to the first mover 5022, and the first grating ruler reading head 504 is fixedly connected to the lower fixed plate 1; but it is also possible to make the first grating ruler 503 fixedly connected to the lower fixed plate 1, and the first grating ruler reading head 504 fixedly connected to the first mover 5022).

[0060] A voice coil motor is used for height adjustment. Since the voice coil motor itself has a high position adjustment accuracy, precise fine-tuning can be achieved, and there is a certain gap between the stator and the mover of the voice coil motor. When the horizontal position of the upper mounting plate 2 is adjusted, the voice coil motor will not hinder the fine-tuning process (the gap between the stator and the mover of the voice coil motor is at the millimeter level, and the position fine-tuning in this article is at the micron level. Therefore, there is enough space between the stator and the mover that will not hinder the position fine-tuning process).

[0061] The first grating ruler 503 (or the first grating ruler reading head 504) can be directly fixed on the outer surface of the first mover 5022, or as shown in FIG. Figure 5 As shown, it is connected to the first mover 5022 via a first connecting frame 505 ; the first grating scale reading head 504 (or the first grating scale 503 ) is connected to the lower fixed plate 1 via a second connecting frame 506 .

[0062] Further, see Figure 6, the horizontal driving unit 4 includes a second mounting seat 401, a third mounting seat 402, a horizontally arranged second voice coil motor 403, a second grating ruler 404, and a second grating ruler reading head 405; the lower end of the second mounting seat 401 is fixedly connected to the lower fixed plate 1, and the upper end of the third mounting seat 402 is fixedly connected to the upper mounting plate 2; the second voice coil motor 403 includes a second stator 4031 and a second mover 4032, and the end of the second stator 4031 away from the second mover 4032 is fixedly connected to the second mounting seat 401, and the end of the second mover 4032 away from the second stator 4031 is fixedly connected to the third mounting seat 402; the second grating ruler 404 and the second grating ruler reading head 405 are arranged opposite to each other, and one of the second grating ruler 404 and the second grating ruler reading head 405 is fixedly connected to the second mover 4032 or the third mounting seat 402, and the other is fixedly connected to the lower fixed plate 1 (for example Figure 6 In the figure, the second grating scale 404 is fixedly connected to the second mover 4032 or the third mounting seat 402, and the second grating scale reading head 405 is fixedly connected to the lower fixed plate 1; but the second grating scale 404 can also be fixedly connected to the lower fixed plate 1, and the second grating scale reading head 405 can be fixedly connected to the second mover 4032 or the third mounting seat 402).

[0063] A voice coil motor is used for horizontal position adjustment. Since the voice coil motor itself has a high position adjustment accuracy, precise fine-tuning can be achieved, and there is a certain gap between the stator and the mover of the voice coil motor. When the height of the upper mounting plate 2 is adjusted, the voice coil motor will not hinder the fine-tuning process (the gap between the stator and the mover of the voice coil motor is at the millimeter level, and the position fine-tuning in this article is at the micron level. Therefore, there is enough space between the stator and the mover that will not hinder the position fine-tuning process).

[0064] The second grating ruler 404 (or the second grating ruler reading head 405) can be directly fixed on the outer surface of the second mover 4032, or connected to the second mover 4032 through a third connecting frame, or as Figure 6 As shown, a connecting plate 4021 is provided at the lower end of the third mounting seat 402, and the second grating ruler 404 (or the second grating ruler reading head 405) is provided on the connecting plate 4021; the second grating ruler reading head 405 (or the second grating ruler 404) is connected to the lower fixing plate 1 through a fourth connecting frame 406. Figure 6 The fourth connecting frame includes an L-shaped seat and a slide seat. The L-shaped seat is fixed on the lower fixed plate 1, and the slide seat can be slidably arranged on the L-shaped seat up and down to adjust the gap between the second grating scale reading head 405 and the second grating scale 404, so as to ensure that the second grating scale reading head 405 can reliably read the position of the second grating scale 404; for example, a waist hole extending in the up and down direction is provided on the L-shaped seat, and the slide seat is fixed to the L-shaped seat by a screw passing through the waist hole.

[0065] In this document, relational terms such as first and second, etc. are used merely to distinguish one entity or operation from another entity or operation, but do not necessarily require or imply any such actual relationship or order between these entities or operations.

[0066] The above description is only an embodiment of the present application and is not intended to limit the protection scope of the present application. For those skilled in the art, the present application may have various modifications and variations. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A high-precision, large-size, six-degree-of-freedom micro-motion device, characterized in that: include: Lower fixing plate; An upper mounting plate, the upper mounting plate being arranged above the lower fixing plate and used for mounting a workpiece placing table; An air-floating flexible connection unit, wherein the upper end of the air-floating flexible connection unit is fixedly connected to the upper mounting plate, and the lower end is slidably connected to the lower fixing plate, and the air-floating flexible connection unit can move relative to the lower fixing plate along the X-axis and the Y-axis; Four horizontal drive units, the four horizontal drive units are cross-distributed around the air-floating flexible connection unit; two of the horizontal drive units are symmetrically arranged on both sides of the air-floating flexible connection unit along the X-axis direction, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the Y-axis; the other two horizontal drive units are symmetrically arranged on both sides of the air-floating flexible connection unit along the Y-axis direction, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the X-axis; At least three vertical drive units, all of which are evenly arranged around the air-floating flexible connection unit, the vertical drive units are connected between the lower fixed plate and the upper mounting plate, and are used to drive the upper mounting plate to move relative to the lower fixed plate along the Z axis; The air-floating flexible connection unit includes a guide rail assembly, an air-floating shaft and a flexible bearing, the lower end of the guide rail assembly is fixedly connected to the center of the lower fixed plate, the lower end of the air-floating shaft is fixedly connected to the upper end of the guide rail assembly, and the upper end of the air-floating shaft is connected to the upper mounting plate through the flexible bearing; The guide rail assembly includes an X-axis guide rail extending along the X-axis and a Y-axis guide rail extending along the Y-axis, wherein one of the X-axis guide rail and the Y-axis guide rail is arranged at the lower side of the other and is fixedly connected to the lower fixing plate; The air-floating shaft includes a shaft sleeve and a shaft core, the shaft sleeve includes a shaft sleeve cavity, the shaft core is inserted into the shaft sleeve cavity, and an air gap is provided between the shaft core and the inner wall of the shaft sleeve; the shaft core is provided with a shaft core cavity, a plurality of jet holes and an air inlet hole, the shaft core cavity is connected to the air gap through the plurality of jet holes, and the air inlet hole is used to input high-pressure gas into the shaft core cavity.

2. The high-precision, large-size, six-DOF micro-motion device according to claim 1, characterized in that: It also includes at least three gravity balancing devices, all of which are evenly arranged around the air-floating flexible connection unit. The gravity balancing devices are connected between the lower fixed plate and the upper mounting plate, and are used to provide supporting force to the upper mounting plate to balance the gravity of the upper mounting plate itself and the gravity of the load on the upper mounting plate.

3. The high-precision, large-size, six-DOF micro-motion device according to claim 2, characterized in that: The gravity balancing device is an air bag arranged along the Z-axis direction.

4. The high-precision, large-size, six-DOF micro-motion device according to claim 1, characterized in that: The air gap is 5 μm-10 μm.

5. The high-precision, large-size, six-DOF micro-motion device according to claim 1, characterized in that: The flexible bearing comprises an annular flexible sheet, the upper end of the shaft sleeve is provided with a flange portion, the inner side of the annular flexible sheet is connected to the flange portion, and the outer side is connected to the upper mounting plate.

6. The high-precision, large-size, six-DOF micro-motion device according to claim 1, characterized in that: The vertical drive unit includes a first mounting seat, a vertically arranged first voice coil motor, a first grating scale and a first grating scale reading head; the lower end of the first mounting seat is fixedly connected to the lower fixed plate; the first voice coil motor includes a first stator and a first mover, the lower end of the first stator is fixedly connected to the upper end of the first mounting seat, and the upper end of the first mover is fixedly connected to the upper mounting plate; the first grating scale and the first grating scale reading head are arranged opposite to each other, and one of the first grating scale and the first grating scale reading head is fixedly connected to the first mover, and the other is fixedly connected to the lower fixed plate.

7. The high-precision, large-size, six-DOF micro-motion device according to claim 1, characterized in that: The horizontal drive unit includes a second mounting seat, a third mounting seat, a horizontally arranged second voice coil motor, a second grating scale, and a second grating scale reading head; the lower end of the second mounting seat is fixedly connected to the lower fixed plate, and the upper end of the third mounting seat is fixedly connected to the upper mounting plate; the second voice coil motor includes a second stator and a second mover, an end of the second stator away from the second mover is fixedly connected to the second mounting seat, and an end of the second mover away from the second stator is fixedly connected to the third mounting seat; the second grating scale and the second grating scale reading head are arranged opposite to each other, and one of the second grating scale and the second grating scale reading head is fixedly connected to the second mover or the third mounting seat, and the other is fixedly connected to the lower fixed plate.

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