A tungsten hexafluoride electron gas multi-port fine tuning collection separator

Abstract

The application provides a six tungsten fluoride electronic gas multi-inlet fine adjustment collection separator, which comprises a tank body, an upper inlet pipe, a gas distribution pipe and a lower inlet pipe connected to the tank body, the upper inlet pipe is connected with the gas distribution pipe, and a plurality of lower inlet pipes are connected with the gas distribution pipe; two temperature adjusting chambers are arranged outside the tank body; two upper and lower gas outlets are arranged on the tank body; and a temperature and pressure measuring device is arranged at each gas outlet. The application has the advantages of simple and reasonable structure design, convenient adjustment, precise control, high safety, efficient gas collection and separation, and reduced waste discharge.

Description

Technical Field

[0001] This invention belongs to the field of electronic gas processing technology, specifically relating to a tungsten hexafluoride electronic gas multi-port fine-tuning collection and separator. Background Technology

[0002] Gas collectors and separators are commonly used equipment in chemical processes, and the smoothness of the collection process directly affects the efficiency of reactions and production. Existing equipment often has a simple air intake port, and improper temperature control can easily cause blockage of the air intake port when the collector is drawing in gas.

[0003] Tungsten hexafluoride (WF6) is currently the only stable fluoride of tungsten that is industrially produced. Its main use is as a raw material in the electronics industry for tungsten chemical vapor deposition (CVD) processes, particularly WSi2, which can be used as wiring material in large-scale integrated circuits (LSI). It can also be used as a raw material for semiconductor electrodes, a fluorinating agent, a polymerization catalyst, and a raw material for optical materials.

[0004] A collection and separator needs to be designed to improve the production efficiency of tungsten hexafluoride electronic gas. Summary of the Invention

[0005] The technical problem to be solved by the present invention is to provide a tungsten hexafluoride electronic gas multi-inlet fine-tuning collection and separator that addresses the shortcomings of the prior art. This device allows gas to selectively enter the tank by setting multiple inlet points internally, enabling the gas to enter in stages. By precisely controlling the temperature and the orderly entry of the gas, the smoothness of the gas collection process is improved, effectively avoiding time loss, ensuring the normal progress of the reaction, and improving production efficiency.

[0006] To solve the above-mentioned technical problems, the technical solution adopted by the present invention is: a tungsten hexafluoride electronic gas multi-port fine-tuning collection and separator, characterized in that it includes a tank, an upper temperature regulating chamber and a lower temperature regulating chamber are wrapped on the outer side wall of the tank, the upper part of the tank is connected to multiple lower air inlet pipes, the multiple lower air inlet pipes are connected to the upper air inlet pipes through gas distribution pipes, and the upper and lower ends of the tank are respectively opened with an upper outlet and a lower outlet, and temperature and pressure measuring devices are provided on the side of the upper outlet and the lower outlet.

[0007] Preferably, the lower air inlet pipe includes a first lower air inlet pipe, a second lower air inlet pipe, and a third lower air inlet pipe. The first lower air inlet pipe, the second lower air inlet pipe, and the third lower air inlet pipe extend into the tank body and the positions of their air outlets are raised sequentially. The air outlets of the first lower air inlet pipe, the second lower air inlet pipe, and the third lower air inlet pipe are pointed.

[0008] Preferably, the first, second, and third lower air inlet pipes have evenly distributed side micro-holes on the pipe walls that extend into the tank.

[0009] Preferably, the temperature and pressure measuring device located next to the upper outlet includes an upper pressure gauge and an upper temperature gauge, and the temperature and pressure measuring device located next to the lower outlet includes a lower pressure gauge and a lower temperature gauge.

[0010] Preferably, an upper outlet valve is connected to the upper outlet, a lower outlet valve is connected to the lower outlet, a main intake valve is provided on the upper intake pipe, a mid-position intake valve is provided on the second lower intake pipe, a high-position intake valve is provided on the third lower intake pipe, and an intake pressure gauge is connected to the upper intake pipe.

[0011] Preferably, an upper temperature regulating cavity inlet and an upper temperature regulating cavity outlet are respectively provided on both sides of the upper temperature regulating cavity, an upper temperature regulating cavity inlet valve is connected to the upper temperature regulating cavity inlet, and an upper temperature regulating cavity outlet valve is connected to the upper temperature regulating cavity outlet. Similarly, a lower temperature regulating cavity inlet and a lower temperature regulating cavity outlet are respectively provided on both sides of the lower temperature regulating cavity, a lower temperature regulating cavity inlet valve is connected to the lower temperature regulating cavity inlet, and a lower temperature regulating cavity outlet valve is connected to the lower temperature regulating cavity outlet.

[0012] Preferably, the upper temperature regulating cavity and the lower temperature regulating cavity can have different volumes.

[0013] Compared with the prior art, the present invention has the following advantages:

[0014] This invention features a simple structure and is easy to use. The tank allows gas to selectively enter through multiple inlet points, enabling segmented gas entry. By precisely controlling the temperature and orderly gas entry, the smoothness of the gas collection process is improved, effectively avoiding time loss, ensuring the normal progress of the reaction, and increasing production efficiency. The operation is flexible and versatile, with high control precision.

[0015] The present invention will now be described in further detail with reference to the accompanying drawings and embodiments. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the structure of the present invention.

[0017] Explanation of reference numerals in the attached figures:

[0018] 1—Upper intake pipe; 2—Intake pressure gauge; 3—Main intake valve;

[0019] 4—Gas distribution pipe; 5—High-position air intake valve; 6—Mid-position air intake valve;

[0020] 7-1—First lower air intake pipe; 7-2—Second lower air intake pipe; 7-3—Third lower air intake pipe;

[0021] 8—Upper outlet valve; 9—Upper inlet pressure gauge; 10—Upper inlet thermometer;

[0022] 11—Tank body; 12—Upper temperature regulating chamber; 13—Upper regulating chamber inlet valve;

[0023] 14—Upper regulating chamber outlet valve; 15—Lower regulating chamber outlet valve; 16—Lower temperature regulating chamber;

[0024] 17—Lower outlet valve; 18—Lower inlet pressure gauge; 19—Lower inlet thermometer;

[0025] 20—Lower regulating chamber inlet valve; 21—Upper regulating chamber outlet; 22—Lower regulating chamber outlet;

[0026] 23—Upper regulating chamber inlet; 24—Lower regulating chamber inlet; 25—Lower outlet;

[0027] 26—Upward Exit. Detailed Implementation

[0028] like Figure 1 As shown, the present invention includes a tank 11, on which an upper temperature regulating cavity 12 and a lower temperature regulating cavity 16 are provided on the outer side wall. The upper part of the tank 11 is connected to multiple lower air inlet pipes, which are connected to the upper air inlet pipe 1 through a split air pipe 4. An upper outlet 26 and a lower outlet 25 are respectively opened at the upper and lower ends of the tank 11. Temperature and pressure measuring devices are provided on the sides of both the upper outlet 26 and the lower outlet 25.

[0029] In this embodiment, the lower air inlet pipe includes a first lower air inlet pipe 7-1, a second lower air inlet pipe 7-2, and a third lower air inlet pipe 7-3. The first lower air inlet pipe 7-1, the second lower air inlet pipe 7-2, and the third lower air inlet pipe 7-3 extend into the tank body 11 and the positions of their air outlet ports are sequentially raised. The air outlet ports of the first lower air inlet pipe 7-1, the second lower air inlet pipe 7-2, and the third lower air inlet pipe 7-3 are pointed.

[0030] In this embodiment, the first lower air inlet pipe 7-1, the second lower air inlet pipe 7-2, and the third lower air inlet pipe 7-3 are provided with uniformly distributed side micro-holes on the pipe wall of the tank body 11.

[0031] In this embodiment, the temperature and pressure measuring device located beside the upper outlet 26 includes an upper pressure gauge 9 and an upper temperature gauge 10, and the temperature and pressure measuring device located beside the lower outlet 25 includes a lower pressure gauge 18 and a lower temperature gauge 19.

[0032] In this embodiment, an upper outlet valve 8 is connected to the upper outlet 26, a lower outlet valve 17 is connected to the lower outlet 25, an air intake master valve 3 is provided on the upper air intake pipe 1, a mid-position air intake valve 6 is provided on the second lower air intake pipe 7-2, a high-position air intake valve 5 is provided on the third lower air intake pipe 7-3, and an air intake pressure gauge 2 is connected to the upper air intake pipe 1.

[0033] In this embodiment, an upper temperature regulating cavity 12 is provided with an upper regulating cavity inlet 23 and an upper regulating cavity outlet 21 on both sides. An upper regulating cavity inlet valve 13 is connected to the upper regulating cavity inlet 23, and an upper regulating cavity outlet valve 14 is connected to the upper regulating cavity outlet 21. A lower temperature regulating cavity 16 is provided with a lower regulating cavity inlet 24 and a lower regulating cavity outlet 22 on both sides. A lower regulating cavity inlet valve 20 is connected to the lower regulating cavity inlet 24, and a lower regulating cavity outlet valve 15 is connected to the lower regulating cavity outlet 22.

[0034] In this embodiment, the upper temperature regulating cavity 12 and the lower temperature regulating cavity 16 have the same volume.

[0035] When in use, open the main intake valve 3. At this time, the intake pressure is observed through the intake pressure gauge 2. At this time, the high-position intake valve 5, the middle-position intake valve 6, the upper outlet valve 8, and the lower outlet valve 17 are in the closed state.

[0036] When the hot tungsten hexafluoride gas with a certain temperature after the reaction enters the tank 11, if the temperature at the inlet is too low, below the freezing point of 2.3℃, a single inlet will be blocked instantly without feedback, preventing the gas from entering the tank 11. If multiple inlets are set up and a more precise temperature fine-tuning system is implemented, the gas can enter in batches without blocking the pipeline.

[0037] Specifically, initially, the high-position air inlet valve 5, the middle-position air inlet valve 6, the upper outlet valve 8, and the lower outlet valve 17 are closed. The upper temperature regulating chamber 12 and the lower temperature regulating chamber 16 adjust the temperature in the tank, so that the temperature of the upper thermometer 10 is 4°C.

[0038] The reaction gas enters through the upper inlet pipe 1 and is cooled and recovered as gas. As the gas enters, the temperature reading on the upper thermometer 10 increases, and then the temperature is finely adjusted through the upper temperature regulating chamber 12 and the lower temperature regulating chamber 16. If the adjustment is excessive, the lower end of the first lower inlet pipe 7-1 may solidify and block the gas, preventing it from entering. The pressure on the inlet pressure gauge 2 will increase, which is detrimental to the upstream reaction. Therefore, the gas needs to be output smoothly to the tank.

[0039] Immediately open or simultaneously open the middle-position inlet valve 6, allowing gas to enter from the lower end of the second lower inlet pipe 7-2. This then opens the high-position inlet valve 5, allowing gas to enter from the third lower inlet pipe 7-3. This ensures gas can enter the tank smoothly within a small range (this range varies depending on the tank's capacity, especially with changes in height, generally around 10°C or more), allowing the reaction to proceed normally. Simultaneously, make minor adjustments to the upper temperature regulating chamber 12 and the lower temperature regulating chamber 16, ensuring the upper thermometer 10 reaches the set value of approximately 4°C. The first lower inlet pipe 7-1 and the second lower inlet pipe 7-2 will automatically and gradually open. Alternatively, the high-position inlet valve 5 and the middle-position inlet valve 6 can remain open. This cycle continues, allowing gas to continuously enter and the reaction to proceed without interruption, resulting in gas collection.

[0040] During separation, ensure the temperature is above 18℃, adjust the amplitude of the upper temperature regulating chamber 12 and the lower temperature regulating chamber 16 to ensure the upper inlet thermometer 10 is above 18℃, and open the upper outlet valve 8 to allow the tungsten hexafluoride gas to be separated and output. Repeat multiple times.

[0041] Based on the characteristics of the impurities, adjust the temperature to below 2.3 and open the lower outlet valve 17 to discharge the heavy components in the tank through the lower outlet 25.

[0042] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention in any way. Any simple modifications, alterations, and equivalent changes made to the above embodiments based on the inventive essence shall still fall within the protection scope of the present invention.

Claims

1. A tungsten hexafluoride electronic gas multi-port fine-tuning collection and separator, characterized in that, The tank (11) includes an upper temperature regulating chamber (12) and a lower temperature regulating chamber (16) wrapped around the outer side wall of the tank (11). The upper part of the tank (11) is connected to multiple lower air inlet pipes, which are connected to the upper air inlet pipe (1) through a split pipe (4). The upper and lower ends of the tank (11) are respectively provided with an upper outlet (26) and a lower outlet (25). Temperature and pressure measuring devices are provided on the sides of the upper outlet (26) and the lower outlet (25). The lower air inlet pipe includes a first lower air inlet pipe (7-1), a second lower air inlet pipe (7-2), and a third lower air inlet pipe (7-3). The first lower air inlet pipe (7-1), the second lower air inlet pipe (7-2), and the third lower air inlet pipe (7-3) extend into the tank body (11) and the position of the air outlet port rises sequentially. The air outlet ports of the first lower air inlet pipe (7-1), the second lower air inlet pipe (7-2), and the third lower air inlet pipe (7-3) are pointed. The upper temperature regulating chamber (12) has an upper regulating chamber inlet (23) and an upper regulating chamber outlet (21) on its two sides respectively. The upper regulating chamber inlet (23) is connected to an upper regulating chamber inlet valve (13), and the upper regulating chamber outlet (21) is connected to an upper regulating chamber outlet valve (14). The lower temperature regulating chamber (16) has a lower regulating chamber inlet (24) and a lower regulating chamber outlet (22) on its two sides respectively. The lower regulating chamber inlet (24) is connected to a lower regulating chamber inlet valve (20), and the lower regulating chamber outlet (22) is connected to a lower regulating chamber outlet valve (15).

2. The tungsten hexafluoride electronic gas multi-port fine-tuning collector and separator according to claim 1, characterized in that, The first lower air inlet pipe (7-1), the second lower air inlet pipe (7-2), and the third lower air inlet pipe (7-3) extend into the wall of the tank body (11) and have evenly distributed side micro-holes.

3. The tungsten hexafluoride electronic gas multi-port fine-tuning collector and separator according to claim 1, characterized in that, The temperature and pressure measuring device located next to the upper outlet (26) includes an upper pressure gauge (9) and an upper temperature gauge (10), and the temperature and pressure measuring device located next to the lower outlet (25) includes a lower pressure gauge (18) and a lower temperature gauge (19).

4. The tungsten hexafluoride electronic gas multi-port fine-tuning collector and separator according to claim 1, characterized in that, An upper outlet valve (8) is connected to the upper outlet (26), a lower outlet valve (17) is connected to the lower outlet (25), an air intake master valve (3) is provided on the upper air intake pipe (1), a middle position air intake valve (6) is provided on the second lower air intake pipe (7-2), a high position air intake valve (5) is provided on the third lower air intake pipe (7-3), and an air intake pressure gauge (2) is connected to the upper air intake pipe (1).

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