A heat insulation mechanism, a single crystal furnace and a re-throwing method

Abstract

The application relates to the technical field of silicon single crystal growth, and relates to a heat insulation mechanism applied to the main furnace chamber of a single crystal furnace, a first hole being formed in the main furnace chamber, which comprises: a bearing assembly, the bearing assembly being located in the interior of the single crystal furnace, the bearing assembly having a vertical direction moving freedom, the bearing assembly comprising: a bearing seat, the bearing seat having a containing space; a heat insulation assembly, the heat insulation assembly comprising: a heat insulation block, the heat insulation block being used for cooperating with the first hole to make the first hole be blocked, the heat insulation block being movable, the heat insulation block being driven by an external reinsertion device to have: a first state, the heat insulation block being located in the first hole; a second state, the heat insulation block being located in the containing space, the heat insulation block ascending to a position above the first hole along with the bearing assembly. The technical problem of poor heat insulation and sealing effect of a reinsertion hole in the prior art is solved, and the technical effect of improving the heat insulation and sealing effect of the reinsertion hole is achieved.

Description

Technical Field

[0001] This application relates to the field of silicon single crystal growth technology, and in particular to a heat insulation mechanism, a single crystal furnace, and a re-injection method. Background Technology

[0002] In the crystal growth process of a single crystal furnace, in order to increase the production capacity of the single crystal furnace, silicon material is added multiple times in the single crystal furnace to achieve multiple crystal pulling. Generally, the single crystal furnace is fed by external refeeding. External refeeding requires drilling refeeding holes on the outer wall of the main furnace chamber of the single crystal furnace and feeding material into the single crystal furnace through an external refeeding device.

[0003] In the existing technology, when the single crystal furnace is operating, a re-feeding hole is opened at the re-feeding port of the main furnace chamber. The presence of the re-feeding hole causes heat inside the single crystal furnace to be dissipated through the re-feeding hole, which greatly increases heat loss and also causes air leakage through the re-feeding hole, resulting in a reduction in the quality of the crystal rod.

[0004] Therefore, the technical problem with the existing technology is that the heat insulation and sealing effect of the re-entry hole is poor. Summary of the Invention

[0005] This application provides a heat insulation mechanism, a single crystal furnace, and a re-injection method, which solves the technical problem of poor heat insulation and sealing effect of the re-injection hole in the prior art, and achieves the technical effect of improving the heat insulation and sealing effect of the re-injection hole.

[0006] Firstly, the heat insulation mechanism provided in this application adopts the following technical solution:

[0007] A heat insulation mechanism is applied to the main furnace chamber of a single crystal furnace. The main furnace chamber has a first opening. The mechanism includes: a support assembly located inside the single crystal furnace, the support assembly having a vertical degree of freedom of movement, and the support assembly including a support base with an accommodating space; and a heat insulation assembly including a heat insulation block, the heat insulation block being used to cooperate with the first opening to block the first opening. The heat insulation block is movable and is driven by an external re-entry device to form the following states: in a first state, the heat insulation block is located within the first opening; in a second state, the heat insulation block is located within the accommodating space, and the heat insulation block moves away from the first opening along with the support assembly.

[0008] Preferably, the bearing assembly further includes: an action part connected to the bearing seat, the action part having an action force along a first direction, the action part acting directly or indirectly on the heat insulation block, such that the heat insulation block is in a state of being pressed against the inner wall of the single crystal furnace in the second state, wherein the first direction is from the inside out towards the inner wall of the single crystal furnace.

[0009] Preferably, the functional part includes: an elastic element located within the accommodating space, a first end of which is connected to the support base, and a second end of which is used to abut against the heat insulation block. The elastic element is elastic, such that in the second state, the elastic element is deformed by the pressure of the heat insulation block, causing the heat insulation block to abut against the inner wall of the single crystal furnace along a first direction; or, a connecting rod is connected to the support base; the functional part includes: an elastic element, a first end of which is connected to the connecting rod, and a second end of which is used to abut against the heat insulation block. The elastic element is elastic, such that... In the second state, the elastic element is deformed by the compression of the heat insulation block, causing the heat insulation block to abut against the inner wall of the single crystal furnace along the first direction; or, the actuating part includes: an elastic rod connected to the support seat, the elastic rod being elastic, the elastic rod acting on the support seat along the first direction, so that in the second state, the heat insulation block is abutted against the inner wall of the single crystal furnace along the first direction by the action of the elastic rod; or, the actuating part is specifically the heat insulation block, the heat insulation block being elastic, so that in the second state, the heat insulation block is compressed and deformed, abutting against the inner wall of the single crystal furnace along the first direction.

[0010] Preferably, the support has a protrusion and the heat insulation block has a groove, the protrusion being used to engage with the groove.

[0011] Preferably, the support has a guide surface located at the bottom of the accommodating space, and the guide surface is inclined from near the axis of the single crystal furnace downwards towards the inner wall of the single crystal furnace.

[0012] Secondly, the single crystal furnace provided in this application adopts the following technical solution:

[0013] A single-crystal furnace includes: a main furnace chamber, the interior of which has a main furnace cavity; a first hole formed in the main furnace chamber; an insulation layer inside the main furnace cavity, with a gap between the insulation layer and the inner wall of the main furnace chamber, and a second hole formed in the insulation layer, the first hole and the second hole forming a re-injection channel, allowing an external re-injection device to perform re-injection through the re-injection channel; a flow guiding mechanism, comprising: a flow guiding cylinder assembly located within the inner ring of the insulation layer; a lifting assembly connected to the top of the main furnace chamber and used to drive the flow guiding cylinder assembly to move up and down; and a heat insulation mechanism, the heat insulation mechanism being the same as described above, located between the insulation layer and the inner wall of the main furnace chamber, and connected to the flow guiding mechanism, allowing the heat insulation mechanism to move up and down.

[0014] Preferably, a support tube is provided inside the second hole, and the support tube abuts against the inner wall of the second hole.

[0015] Preferably, the support tube extends through the gap into the first hole; wherein, the support tube includes a first part and a second part, the first part is inserted into the second hole, the second part is connected to the first part, and a notch is provided at the top of the second part located in the gap, so that a receiving area is formed on the second part, the receiving area being used to receive the bearing seat.

[0016] Preferably, the support has a heat-insulating surface. When the support is housed in the accommodating area, the heat-insulating surface is used to abut against the end face of the first part near the second part, so that the first part is sealed by the heat-insulating surface.

[0017] Thirdly, this application provides a re-investment method, which adopts the following technical solution:

[0018] A refilling method for a single crystal furnace includes: a heat insulation block is blocked in a first hole and positioned at a first position; an external refilling device pushes the heat insulation block inward to enter a receiving space until the side of the heat insulation block near the external refilling device is flush with or located on the inner side of the main furnace chamber, reaching a second position, causing an elastic element to deform and press the heat insulation block against the external refilling device; a drive support is raised, and the heat insulation block rises with the support to a third position, where the heat insulation block presses against the inner wall of the main furnace chamber under the action of the elastic element; the external refilling device feeds material through a refilling channel, and after feeding, the external refilling device exits the refilling channel; the drive support is lowered, and the heat insulation block falls with the support to a second position, where the heat insulation block enters the first hole under the action of the force.

[0019] Preferably, after the elastic element drives the heat insulation block into the first hole, it further includes: driving the support seat to rise, the guide surface abutting against the heat insulation block and driving the heat insulation block as a whole into the first hole and returning to the first position.

[0020] In summary, this application includes at least one of the following beneficial technical effects:

[0021] 1. In this application, a bearing component and a heat insulation component are provided on the first hole of the main furnace chamber. The heat insulation component seals and fills the first hole. The position of the heat insulation block in the heat insulation component is driven by an external re-injection device. The heat insulation block is received by the bearing component and rises with it to switch the open or closed state of the first hole. The heat insulation block moves and cooperates in the first hole, which facilitates re-injection on the one hand and improves the heat insulation and sealing effect of the first hole on the other hand.

[0022] 2. The elastic element acts on the heat insulation block, and the force generated by the deformation of the elastic element automatically pushes the heat insulation block into the first hole, thereby improving the automation of sealing the first hole.

[0023] 3. The bottom of the support seat is provided with an inclined guide surface. When the support seat rises with the guide tube, the guide surface acts on the heat insulation block, driving the heat insulation block to enter the first hole to complete the resetting, thereby improving the automation of sealing the first hole and improving the sealing effect of the first hole. Attached Figure Description

[0024] Figure 1 This is a schematic diagram of the heat insulation mechanism described in this application;

[0025] Figure 2 This is a structural development diagram of the heat insulation mechanism described in this application (the functional part has been omitted);

[0026] Figure 3 This is a first schematic diagram of the working part of the heat insulation mechanism described in this application;

[0027] Figure 4 This is a second schematic diagram of the functional part of the heat insulation mechanism described in this application;

[0028] Figure 5 This is a third schematic diagram of the working part of the heat insulation mechanism described in this application;

[0029] Figure 6 This is a schematic diagram of the first state of the heat insulation block of the heat insulation mechanism described in this application;

[0030] Figure 7 This is a schematic diagram of the second state of the heat insulation block of the heat insulation mechanism described in this application;

[0031] Figure 8 This is a cross-sectional view of the single crystal furnace described in this application;

[0032] Figure 9 yes Figure 8 Enlarged view of A in the middle;

[0033] Figure 10 This is a schematic diagram showing the cooperation between the support tube and the heat insulation mechanism of the single crystal furnace described in this application;

[0034] Figure 11 This is a schematic diagram of the re-feeding method for the single crystal furnace described in this application;

[0035] Figure 12 This is a schematic diagram of the S1 process in the single crystal furnace re-feeding method described in this application;

[0036] Figure 13 This is a schematic diagram of the S2 process in the single crystal furnace re-feeding method described in this application;

[0037] Figure 14 This is a schematic diagram of the S3 process in the single crystal furnace re-feeding method described in this application;

[0038] Figure 15 This is a schematic diagram of the S4 process in the single crystal furnace re-feeding method described in this application.

[0039] Explanation of reference numerals in the attached drawings: 100, main furnace chamber; 101, first hole; 102, gap; 110, insulation layer; 111, second hole; 112, support pipe; 1121, first part; 1122, second part; 1123, notch; 1124, accommodating area; 200, flow guiding mechanism; 210, flow guiding tube assembly; 211, flow guiding tube body; 212, flow guiding seat; 220, lifting assembly; 300, heat insulation mechanism; 310, bearing assembly; 311, bearing seat; 312, accommodating cavity; 313, guide surface; 314, heat insulation surface; 315, elastic element; 316, connecting rod; 317, elastic rod; 320, heat insulation assembly; 321, heat insulation block; 400, external re-feeding device. Detailed Implementation

[0040] The serial numbers assigned to components in this document, such as "first" and "second," are used solely to distinguish the described objects and have no sequential or technical meaning. The terms "connection" and "linkage" used in this application, unless otherwise specified, include both direct and indirect connections (linkages). It should be understood that the terms "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," and "counterclockwise," indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings and are used solely for the convenience of describing this application and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0041] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0042] This application provides a heat insulation mechanism, a single crystal furnace, and a re-injection method, which solves the technical problem of poor heat insulation and sealing effect of the re-injection hole in the prior art, and achieves the technical effect of improving the heat insulation and sealing effect of the re-injection hole.

[0043] To better understand the above technical solutions, a detailed description of the technical solutions will be provided below in conjunction with the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of this application and are not intended to limit the scope of this application.

[0044] The green development goal of single crystal furnaces is to reduce power consumption and improve thermal efficiency, which means reducing heat loss. Currently, to achieve continuous crystal pulling and increase yield, a refill hole is opened in the main furnace chamber 100 during operation. The silicon material is placed in a crucible inside the insulation layer 110. Therefore, the insulation layer 110 also needs channels to allow the external refill device 400 to pass through the refill hole and the channels in the insulation layer 110 to enter the inner ring of the insulation layer 110 and add silicon material to the crucible. The existence of the refill hole significantly increases heat loss, thus increasing the sealing requirements at the refill hole location. Therefore, the heat loss problem at the refill hole of the single crystal furnace urgently needs to be solved.

[0045] This embodiment provides a heat insulation mechanism, such as Figure 1 As shown, it is applied inside the main furnace chamber 100 of a single crystal furnace. The main furnace chamber 100 has a first hole 101 for re-injection. The heat insulation mechanism 300 is used to cooperate with the first hole 101 to improve the sealing of the first hole 101. The heat insulation mechanism 300 includes a supporting component 310 and a heat insulation component 320. The supporting component 310 is used to support and drive the heat insulation component 320. The heat insulation component 320 is used to cooperate with the first hole 101.

[0046] Thermal insulation component 320, such as Figure 1 , 2 As shown, the heat insulation component 320 is used to cooperate with the first hole 101. The heat insulation component 320 includes a heat insulation block 321, which cooperates with the first hole 101 to seal the first hole 101 and reduce heat leakage from the first hole 101. In one embodiment, the heat insulation block 321 is made of carbon felt to improve the sealing effect of the first hole 101. The heat insulation block 321 is blocked in the first hole 101, but it can be displaced in the first hole 101 under the drive of external force. For example, under the action of the external re-feeding device 400, the heat insulation block 321 can move into the single crystal furnace in the first hole 101.

[0047] Support component 310, such as Figure 2 , 3As shown, the support assembly 310 is used to support and drive the heat insulation assembly 320. The support assembly 310 is located inside the main furnace chamber 100. Specifically, the support assembly 310 is located between the inner wall of the main furnace chamber 100 and the insulation layer 110. The support assembly 310 is connected to the flow guiding mechanism 200 and can move up and down vertically with the flow guiding mechanism 200. The support assembly 310 includes a support base 311 and an elastic element 315. The elastic element 315 forms the working part of the support assembly 310. Specifically, the working part is connected to the support base 311 and has a force along a first direction. The working part acts directly or indirectly on the heat insulation block 321, so that in the second state, the heat insulation block 321 is pressed against the inner wall of the single crystal furnace by the force of the working part. The first direction is from the inside out towards the inner wall of the single crystal furnace. The support base 311 is connected to the flow guiding mechanism 200. The connection of 0 can be a direct connection or an indirect connection, which can enable the support seat 311 to rise and fall in the vertical direction with the flow guiding mechanism 200. The support seat 311 has a receiving space for accommodating the heat insulation component 320. The opening of the receiving space faces the inner wall of the single crystal furnace. That is to say, the heat insulation component 320 can be moved into the receiving space through the first hole 101 by external re-pour. The elastic member 315 is located inside the receiving space. The first end of the elastic member 315 is fixedly connected to the support seat 311, and the second end of the elastic member 315 acts on the heat insulation component 320. The elastic member 315 is elastic. In one embodiment, the elastic member 315 can be specifically a spring. In this way, after the heat insulation block 321 enters the receiving space, the elastic member 315 is squeezed and deformed, and the heat insulation block 321 is pressed against the inner wall of the single crystal furnace along the first direction.

[0048] In one embodiment, such as Figure 4As shown, the bearing assembly 310 includes a connecting rod 316, a bearing seat 311, and an elastic element 315. The elastic element 315 forms the working part of the bearing assembly 310. Specifically, the working part is connected to the bearing seat 311 and has a force along a first direction. The working part acts directly or indirectly on the heat insulation block 321, so that in the second state, the heat insulation block 321 is pressed against the inner wall of the single crystal furnace by the action of the working part. The first direction is from the inside to the outside towards the inner wall of the single crystal furnace. The connecting rod 316 serves as the connecting base of the bearing seat 311 and is connected to the flow guiding mechanism 200, so that the bearing assembly 310 can be vertically raised and lowered together with the flow guiding mechanism 200. The connecting rod 316 extends downward to the first hole 101. In the position; the support 311 is connected to the bottom of the connecting rod 316. The support 311 has a receiving space for accommodating the heat insulation component 320. The opening of the receiving space faces the inner wall of the single crystal furnace. That is, the heat insulation component 320 can be moved into the receiving space through the first hole 101 by external re-pumping drive; the first end of the elastic member 315 is connected to the connecting rod 316, and the second end of the elastic member 315 extends into the interior of the receiving space to act on the heat insulation component 320. The elastic member 315 is elastic. In one embodiment, the elastic member 315 can specifically be an elastic rod. In this way, after the heat insulation block 321 enters the receiving space, the elastic member 315 is squeezed and deformed, and the heat insulation block 321 is pressed against the inner wall of the single crystal furnace along the first direction.

[0049] In another embodiment, such as Figure 5As shown, the support assembly 310 includes a support base 311 and an elastic rod 317. The elastic rod 317 forms the working part of the support assembly 310. Specifically, the working part is connected to the support base 311 and has a force along a first direction. The working part acts directly or indirectly on the heat insulation block 321, so that in the second state, the heat insulation block 321 is pressed against the inner wall of the single crystal furnace by the force of the working part. The first direction is from the inside to the outside towards the inner wall of the single crystal furnace. The elastic rod 317 serves as the connecting base of the support base 311 and is connected to the flow guiding mechanism 200, so that the support assembly 310 can be vertically raised and lowered together with the flow guiding mechanism 200. The elastic rod 317 extends downward to a position corresponding to the first hole 101; the support seat 311 is connected to the bottom of the elastic rod 317, and the support seat 311 has a receiving space for accommodating the heat insulation component 320. The opening of the receiving space faces the inner wall of the single crystal furnace. That is to say, the heat insulation component 320 can move into the receiving space through the first hole 101 when driven by external re-injection; it is worth noting that the elastic rod 317 itself is elastic. The elastic rod 317 acts on the support seat 311 along the first direction, causing the support seat 311 to abut against the inner wall of the single crystal furnace. The first direction is the direction towards the inner wall of the single crystal furnace, and the first direction is the outward direction towards the inner wall of the single crystal furnace.

[0050] In another embodiment, the support component 310 includes a support base 311, and the heat insulation block 321 is made of carbon felt material, which is elastic, so that the heat insulation block 321 itself forms a working part. The heat insulation block 321 itself deforms to form a force along the first direction. Specifically, the support base 311 has a receiving space for receiving the heat insulation component 320. The opening of the receiving space faces the inner wall of the single crystal furnace. That is to say, the heat insulation component 320 can move into the receiving space through the first hole 101 driven by the external re-injection device. Thus, in the second state, the external re-injection device 400 acts on the heat insulation block 321, and the heat insulation block 321 deforms itself and abuts against the inner wall of the single crystal furnace. The first direction is from the inside to the outside towards the inner wall of the single crystal furnace.

[0051] Furthermore, such as Figure 6 , 7As shown, in any of the above-mentioned supporting components 310, the supporting base 311 has a guide surface 313. The guide surface 313 is used to drive the heat insulation block 321 into the interior of the first hole 101 when the heat insulation block 321 is reset. The guide surface 313 is disposed at the bottom of the supporting base 311 and is arranged at an angle. Specifically, the angle of the guide surface 313 is downward from the side near the axis of the single crystal furnace to the side near the inner wall of the single crystal furnace. Thus, during the resetting process of the heat insulation block 321, when the heat insulation block 321 is acted upon by the elastic element 315 or the elastic rod 317, part of the heat insulation block 321 enters the first hole 101. The flow guiding mechanism 200 drives the entire bearing assembly 310 to move upward, causing the guide surface 313 to abut against the heat insulation block 321. As the guide surface 313 rises with the bearing assembly 310, the heat insulation block 321 and the guide surface 313 undergo relative displacement, causing the heat insulation block 321 to be pushed and enter the first hole 101 as a whole, thereby sealing the first hole 101.

[0052] Furthermore, in any of the aforementioned supporting components 310, the supporting base 311 has a protrusion, and the heat insulation block 321 has a groove. The groove is used to engage with the protrusion. The protrusion and groove are not shown in the figure. Specifically, the protrusion is disposed on the surface of the supporting base 311 relative to the heat insulation block 321, and the groove is disposed on the surface of the heat insulation block 321 relative to the supporting base 311. When the heat insulation block 321 is pushed into the receiving cavity 312 by the external re-throwing device 400, the groove on the heat insulation block 321 engages with the protrusion on the supporting base 311. The depth of the groove should be greater than the length of the protrusion, so that the heat insulation block 321 can continue to be pushed inward, but cannot move left or right, so that the heat insulation block 321 is limited when it rises with the supporting base 311.

[0053] Thus, driven by the external re-energizing device 400, the heat insulation block 321 forms a first state and a second state during its movement: such as Figure 6 , 7As shown, in the first state, the heat insulation block 321 is blocked in the first hole 101; in the second state, the heat insulation block 321 is located in the accommodating space, and the heat insulation block 321 moves away from the first hole with the support component 310. In the same embodiment, the heat insulation block 321 rises with the support component 310 to a position above the first hole 101. Specifically, the external re-injection device 400 drives the heat insulation block 321 to move inward, so that the heat insulation block 321 enters the accommodating space of the support seat 311. After re-injection, the heat insulation block 321 returns from the second state to the first state under the action of the flow guiding mechanism 200 and the guide surface 313, and blocks the first hole 101 again. It is worth noting that after the silicon material is re-added in the single crystal furnace, it needs to be heated and melted into a liquid state after sealing. At this time, the water-cooled heat shield and the flow guide tube need to be in the highest position to reduce the loss of heat power during the melting process and reduce the total power output. Therefore, after the re-added material is added and the heat insulation block 321 returns to the first hole 101, the flow guide tube, water-cooled heat shield, etc. need to be raised to the highest position.

[0054] In other embodiments, a tungsten wire rope can be connected to the heat insulation block 321. The tungsten wire rope extends to the outside of the main furnace chamber 100 through the re-entry hole. The heat insulation block 321 can be manually reset by manually driving the tungsten wire rope. That is, after the heat insulation block 321 descends from the second state to a position flush with the first hole 101, the heat insulation block 321 is pulled back into the first hole 101 by pulling the tungsten wire rope to block the first hole 101. Of course, the heat insulation block 321 can also be reset and blocked in the first hole 101 by using an external clamp.

[0055] This embodiment also provides a single crystal furnace, such as Figure 8 As shown, the single crystal furnace is used for crystal growth and employs the aforementioned heat insulation mechanism 300. Specifically, the single crystal furnace includes a main furnace chamber 100, an auxiliary furnace chamber, a crucible, a heat insulation layer 110, a flow guiding mechanism 200, a heat insulation mechanism 300, and a support tube 112. The main furnace chamber 100 serves as the main body for the crystal pulling reaction; the auxiliary furnace chamber is used to receive the crystal rod after crystal pulling; the crucible is used to hold silicon raw materials; the heat insulation layer 110 is used for heat insulation of the main furnace chamber 100; the flow guiding mechanism 200 is used for flow guiding inside the main furnace chamber 100; the heat insulation mechanism 300 is used for heat insulation on the first hole 101; and the support tube 112 is used to support the heat insulation layer 110.

[0056] The main furnace chamber 100, auxiliary furnace chamber, crucible, and insulation layer 110 are all structures found in conventional single-crystal furnaces. Therefore, the specific structures of the main furnace chamber 100, auxiliary furnace chamber, crucible, and insulation layer 110 will not be described in detail in this embodiment. For example... Figure 8As shown, the main furnace chamber 100 serves as the main body of the crystal pulling reaction. The main furnace chamber 100 has a main furnace cavity inside. A first hole 101 is opened on the side wall of the main furnace chamber 100, which connects the main furnace cavity to the external space. The auxiliary furnace chamber is connected to the top of the main furnace chamber 100. The heat insulation layer 110 is located inside the main furnace cavity. The heat insulation layer 110 is arranged in a ring shape. There is a gap 102 between the heat insulation layer 110 and the inner wall of the main furnace chamber 100. The crucible is located in the inner ring of the heat insulation layer 110. In order to refill the crucible, a second hole 111 needs to be opened on the heat insulation layer 110 at the position corresponding to the first hole 101. A refilling channel is formed between the first hole 101 and the second hole 111. The refilling channel is arranged horizontally. The external refilling device 400 refills silicon material through this refilling channel.

[0057] Traffic diversion mechanism 200, such as Figure 8 As shown, the flow guiding mechanism 200 is used for flow guiding inside the main furnace chamber 100. The flow guiding mechanism 200 includes a flow guiding cylinder assembly 210 and a lifting assembly 220. The flow guiding cylinder assembly 210 is used to guide the flow inside the main furnace chamber 100; the lifting assembly 220 is used to drive the flow guiding cylinder assembly 210 to rise and fall. The guide tube assembly 210 is located in the inner ring of the insulation layer 110. The guide tube assembly 210 includes a guide tube body 211 and a guide seat 212. The guide seat 212 serves as the mounting base for the guide tube body 211. The guide tube body 211 is fixedly connected to the bottom of the guide seat 212. The water-cooled heat shield is also fixedly connected to the guide seat 212. The lifting assembly 220 is connected to the top of the main furnace chamber 100 and acts on the guide seat 212, enabling the guide tube assembly 210 to lift vertically. The lifting assembly 220 includes a lifting rod and a driving component. There are two sets of lifting rods, and the two sets of lifting rods are fixedly connected to the guide seat 212. The driving component is connected to the top of the main furnace chamber 100. In one embodiment, the driving component is driven by a cylinder or a screw. The driving component acts on the lifting rod, thereby realizing the lifting of the guide tube assembly.

[0058] The heat insulation mechanism 300 is used for heat insulation on the first hole 101. The structure of the heat insulation mechanism 300 is the same as that described above, and will not be repeated here. It is worth noting that the heat insulation mechanism 300 is located in the gap 102 and is connected upward to the flow guide seat 212. Specifically, the heat insulation mechanism 300 is connected to the flow guide seat 212 through the connecting rod 316 or the elastic rod 317. Alternatively, the bearing seat 311 in the heat insulation mechanism 300 can be directly connected to the flow guide seat 212, so that the entire heat insulation mechanism 300 can rise and fall with the flow guide assembly.

[0059] Support tube 112, such as Figure 9 , 10As shown, the support tube 112 is used to support the insulation layer 110. The support tube 112 is inserted into the second hole 111, and the outer wall of the support tube 112 abuts against the inner wall of the second hole 111, so that the insulation layer 110 is supported by the support tube 112, preventing the insulation layer 110 from collapsing at the position of the second hole 111. In one embodiment, the support tube 112 is a carbon carbon sleeve; furthermore, the support tube 112 extends from the second hole 111 through the gap 102 into the first hole 101. It is worth noting that since the heat insulation block 321 needs to enter the first hole 101, to avoid the support tube 112 and the heat insulation block 321 need to be inserted into the first hole 101, the support tube 112 and the heat insulation block 321 need to be inserted into the first hole 101. To prevent interference between the heating block 321 and the support base 311, a notch 1123 is provided at the top of the support tube 112 portion located within the gap 102 and the first hole 101. Specifically, the support tube 112 includes a first part 1121 and a second part 1122. The first part 1121 is tubular and inserted into the second hole 111. The second part 1122 is connected to the first part 1121 and is located within the gap 102 or extends into the first hole. The notch 1123 is provided at the top of the second part 1122 located within the gap 102. This results in a receiving area 1124 being formed on the second part 1122, which is used to receive the support 311 of the heat insulation mechanism 300. In one embodiment, the first part 1121 is a complete tube and passes through the second hole 111, the second part 1122 is a semi-tube and is connected to one end of the first part 1121, and the end of the second part 1122 away from the first part 1121 is flush with the inner wall of the main furnace chamber 100 or extends into the first hole 101. Furthermore, the support 311 has a surface near the interior of the main furnace chamber 100 with a... A heat insulation surface 314 is provided. When the support seat 311 descends to the height corresponding to the first hole 101, the support seat 311 is accommodated in the accommodating area 1124, so that the heat insulation block 321 can enter the first hole 101, and the heat insulation surface 314 on the heat insulation block 321 abuts against the end face of the first part 1121, so that the first part 1121 is blocked by the support seat 311. The semi-tubular shape refers to the lower half of the support tube 112 that retains the bottom. It is worth noting that the shape of the support seat 311 and the guide surface 313 should match the shape of the accommodating area 1124.

[0060] It is understood that the external refilling device 400 is used to refill the crucible through the refilling channel. The external refilling device has a quartz tube, which is used to pass through the refilling channel to pour silicon material. In other words, the heat insulation block 321 is pushed inward by the quartz tube. The structure of the external refilling device 400 will not be described in detail here. Specifically, refilling devices such as those with announcement numbers CN217077856U, CN113089080A, or CN114395795A can be used to refill silicon material.

[0061] This embodiment also provides a re-investment method, such as Figure 11As shown, the process includes four stages: the first stage, the second stage, the third stage, and the fourth stage. The first stage describes the initial positions of the heat insulation block 321 and the guide tube assembly 210; the second stage is used to remove the heat insulation block 321 to clear the refill channel; the third stage is used for feeding by the external refill device 400; and the fourth stage is used to reset the heat insulation block 321. Specifically:

[0062] like Figure 12 As shown, S1 is the first stage:

[0063] S11: The heat insulation block 321 is located in the first position, where the first position means that the heat insulation block 321 is blocked in the first hole 101, so that the first hole 101 is sealed by the heat insulation block 321 to reduce heat loss.

[0064] S12: At the same time, the guide tube assembly 210 is located at the first height, where the first height refers to the position where crystals can grow normally inside the main furnace chamber 100. At this time, the support 311 is flush with the height of the first hole 101.

[0065] like Figure 13 As shown, S2 is the second stage:

[0066] S21: The quartz tube of the external re-feeding device 400 is introduced into the first hole 101 from the outside of the main furnace chamber 100. The quartz tube abuts against and acts on the heat insulation block 321 to push it into the inside of the main furnace chamber 100.

[0067] S22: The heat insulation block 321 gradually enters the receiving space of the support seat 311. The groove on the heat insulation block 321 and the protrusion on the support seat 311 cooperate. The heat insulation block 321 contacts the elastic element 315, causing the elastic element 315 to deform. The heat insulation block 321 is sandwiched between the elastic element 315 and the quartz tube of the external re-feeding device 400 until the external re-feeding device 400 pushes the heat insulation block 321 to the second position. The second position means that the side of the heat insulation block 321 near the external re-feeding device 400 is flush with the inner wall of the main furnace chamber 100 or the side of the heat insulation block 321 near the external re-feeding device 400 reaches the inner side of the inner wall of the main furnace chamber 100. That is, at this time, the heat insulation block 321 is located outside the first hole 101.

[0068] S23: The position of the quartz tube in the external re-throw device 400 remains unchanged;

[0069] S24: The lifting assembly 220 drives the guide tube assembly 210 to rise to the second height. The support seat 311 and the heat insulation block 321 rise synchronously with the guide tube assembly 210, so that the heat insulation block 321 reaches the third position. The third position means that the heat insulation block 321 is located directly above the second position and abuts against the inner wall of the main furnace chamber 100. During the rising process, the heat insulation block 321 is abutted against the inner wall of the main furnace chamber 100 by the action of the elastic element 315.

[0070] like Figure 13 As shown, S3 is the third stage:

[0071] S31: The quartz tube of the external re-feeding device 400 continues to enter inward along the re-feeding channel, and the quartz tube passes through the gap 102 and the heat insulation layer 110 in sequence to enter the top of the crucible.

[0072] S32: External feeding device 400 feeds material into the crucible;

[0073] S33: The quartz tube of the external re-feeding device 400 exits from the re-feeding channel;

[0074] like Figure 15 As shown, S4 is the fourth stage:

[0075] S41: The lifting assembly 220 drives the guide tube assembly 210 to descend back to the first height, and the support seat 311 and the heat insulation block 321 descend synchronously with the guide tube assembly 210, so that the heat insulation block 321 returns to the second position.

[0076] S42: Since the quartz tube of the external re-injection device 400 has exited from the first hole 101, the heat insulation block 321 reaches the second position and is driven by the elastic element 315, causing part of the elastic element 315 to enter the first hole 101.

[0077] S43: The lifting assembly 220 drives the guide tube assembly 210 to rise to the second height. The support seat 311 rises with the guide tube assembly 210. The guide surface at the bottom of the support seat 311 abuts against the heat insulation block 321. The heat insulation block 321 and the guide surface 313 are relatively displaced, so that the heat insulation block 321 is pushed and enters the first hole 101 as a whole. The heat insulation block 321 returns to the first position, thus sealing the first hole 101.

[0078] S44: Material melting inside the crucible.

[0079] Working principle / steps:

[0080] The external re-injection device 400 is inserted into the first hole 101. The quartz tube of the external re-injection device 400 acts on the heat insulation block 321 and pushes the heat insulation block 321 inward until the heat insulation block 321 is completely pushed out of the first hole 101 and enters the receiving space cavity of the support seat 311. At this time, the heat insulation block 321 abuts against the elastic member 315, causing the elastic member 315 to be squeezed. The heat insulation block 321 is sandwiched between the quartz tube and the elastic member 315.

[0081] The drive support 311 rises, and the heat insulation block 321 rises accordingly. During the rise, the heat insulation block 321 is pressed against the inner wall of the main furnace chamber 100 by the elastic element 315; the quartz tube is re-added through the re-addition channel and then withdrawn.

[0082] When the drive support 311 descends, the heat insulation block 321 is driven to descend to the height of the first hole 101. When the elastic element 315 drives the heat insulation block 321 into the first hole 101, the drive support 311 rises. The guide surface 313 at the bottom of the support 311 acts on the heat insulation block 321, causing the entire heat insulation block 321 to enter the first hole 101.

[0083] Technical effects:

[0084] 1. In this application, a support component 310 and a heat insulation component 320 are provided on the first hole 101 of the main furnace chamber 100. The heat insulation component 320 seals and fills the first hole 101. The position of the heat insulation block 321 in the heat insulation component 320 is driven by the external re-injection device 400. The heat insulation block 321 is received by the support component 310 and rises to switch the open or closed state of the first hole 101. The heat insulation block 321 is movable and fits in the first hole 101, which facilitates re-injection on the one hand and improves the heat insulation and sealing effect of the first hole 101 on the other hand.

[0085] 2. The elastic element 315 acts on the heat insulation block 321. The force generated by the deformation of the elastic element 315 automatically pushes the heat insulation block 321 into the first hole 101, thereby improving the automation of sealing the first hole 101.

[0086] 3. The bottom of the support seat 311 is provided with an inclined guide surface 313. When the support seat 311 rises with the guide tube, the guide surface 313 acts on the heat insulation block 321, driving the heat insulation block 321 to enter the first hole 101 as a whole to complete the reset, thereby improving the automation of sealing the first hole 101 and improving the sealing effect of the first hole 101.

[0087] Although preferred embodiments of this application have been described, those skilled in the art, upon learning the basic inventive concept, can make other changes and modifications to these embodiments. Therefore, the appended claims are intended to be interpreted as including the preferred embodiments as well as all changes and modifications falling within the scope of this application.

[0088] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of the claims of this application and their equivalents, this application also intends to include such modifications and variations.

Claims

1. A heat insulation mechanism applied in a main furnace chamber (100) of a single crystal furnace, a first hole (101) being formed on the main furnace chamber (100), characterized in that, The application relates to a single crystal furnace, which comprises a bearing assembly (310) located in the interior of the single crystal furnace, the bearing assembly (310) having a vertical moving freedom, the bearing assembly (310) comprising a bearing seat (311) with a containing space, a heat insulation assembly (320) comprising a heat insulation block (321) used for cooperating with the first hole (101) so that the first hole (101) is blocked, the heat insulation block (321) being movable, the heat insulation block (321) being driven by an external driving device (400) to have a first state in which the heat insulation block (321) is located in the first hole (101) and a second state in which the heat insulation block (321) is located in the containing space and moves with the bearing assembly (310) to a direction away from the first hole (101), the bearing assembly (310) further comprising an acting part connected to the bearing seat (311), the acting part having an acting force in a first direction, the acting part directly or indirectly acting on the heat insulation block (321) so that the heat insulation block (321) is in a state of being abutted against the inner wall of the single crystal furnace in the second state, wherein the first direction is from the interior to the exterior and towards the inner wall of the single crystal furnace, the acting part comprising an elastic member (315) located in the containing space, a first end of the elastic member (315) being connected to the bearing seat (311), a second end of the elastic member (315) being used for abutting cooperation with the heat insulation block (321), the elastic member (315) having elasticity so that, in the second state, the elastic member (315) is deformed by being pressed by the heat insulation block (321) to abut the heat insulation block (321) against the inner wall of the single crystal furnace in the first direction, or the bearing seat (311) is connected with a connecting rod (316), the acting part comprising an elastic member (315), a first end of the elastic member (315) being connected to the connecting rod (316), a second end of the elastic member (315) being used for abutting cooperation with the heat insulation block (321), the elastic member (315) having elasticity so that, in the second state, the elastic member (315) is deformed by being pressed by the heat insulation block (321) to abut the heat insulation block (321) against the inner wall of the single crystal furnace in the first direction, or the acting part is specifically the heat insulation block (321), the heat insulation block (321) having elasticity so that, in the second state, the heat insulation block (321) is deformed by compression to abut against the inner wall of the single crystal furnace in the first direction. The bearing seat (311) has a protrusion, and the heat insulation block (321) has a groove, the protrusion being used for cooperating with the groove.

2. A thermal insulation mechanism according to claim 1, wherein ​ 3. The heat shield mechanism according to claim 1, wherein The bearing seat (311) has a guide surface (313) located at the bottom of the accommodating space, and the guide surface (313) is inclined from the position close to the axis of the single crystal furnace to the position close to the inner wall of the single crystal furnace.

4. A single crystal furnace characterized by comprising: The application relates to a single crystal furnace. The main furnace chamber (100) has a main furnace cavity in the interior; a first hole (101) is formed in the main furnace chamber (100); a heat preservation layer (110) is arranged in the main furnace cavity; a gap (102) is formed between the heat preservation layer (110) and the inner wall of the main furnace chamber (100); a second hole (111) is formed in the heat preservation layer (110); a reentry channel is formed between the first hole (101) and the second hole (111), so that an external reentry device (400) can reenter through the reentry channel; a flow guide mechanism (200) is arranged in the heat preservation layer (110); the flow guide mechanism (200) comprises a flow guide cylinder assembly (210); a lifting assembly (220) is connected to the top of the flow guide cylinder assembly (210) and the main furnace chamber (100), and the lifting assembly (220) is used for driving the flow guide cylinder assembly (210) to lift; and a heat insulation mechanism (300) is arranged between the heat preservation layer (110) and the inner wall of the main furnace chamber (100), and the heat insulation mechanism (300) is connected to the flow guide mechanism (200), so that the heat insulation mechanism (300) can be lifted. A support pipe (112) is arranged in the second hole (111) and abuts against the inner wall of the second hole (111). The support pipe (112) extends into the first hole (101) through the gap (102); the support pipe (112) comprises a first part (1121) and a second part (1122); the first part (1121) is inserted into the second hole (111); the second part (1122) is connected to the first part (1121) and located in the gap (102); a notch (1123) is formed in the top of the second part (1122) in the gap (102), so that an accommodating area (1124) is formed in the second part (1122); and the bearing seat (311) is accommodated in the accommodating area (1124).

5. A single crystal furnace as claimed in claim 4, wherein The bearing seat (311) has a heat insulation surface (314); when the bearing seat (311) is accommodated in the accommodating area (1124), the heat insulation surface (314) abuts against the end surface of the first part (1121) close to the second part (1122), so that the first part (1121) is sealed by the heat insulation surface (314).

6. A single crystal furnace as claimed in claim 5, wherein The application relates to a single crystal furnace.

7. A single crystal furnace as defined in claim 6, wherein ​ 8. A method of re-throwing a crystal puller as claimed in any one of claims 4 to 7, wherein, ​ The heat insulation block (321) is blocked in the first hole (101) and is located at the first position; the external re-feeding device (400) pushes the heat insulation block (321) to move inward into the accommodation space until the side of the heat insulation block (321) close to the external re-feeding device (400) is flush with or located inside the inner wall of the main furnace chamber (100) to reach the second position, so that the elastic member (315) is deformed to abut the heat insulation block (321) on the external re-feeding device (400); the driving carrier (311) is driven to ascend, the heat insulation block (321) ascends to the third position with the carrier (311), and the heat insulation block (321) is abutted on the inner wall of the main furnace chamber (100) under the action of the elastic member (315); the external re-feeding device (400) feeds through the re-feeding channel, and the external re-feeding device (400) exits the re-feeding channel after feeding; The driving carrier (311) is driven to descend, and the heat insulation block (321) descends to the second position with the carrier (311), and the heat insulation block (321) enters the first hole (101) under the action of the force.

9. The method of claim 8, wherein, After the elastic member (315) drives the heat insulation block (321) to enter the first hole (101), the heat insulation block (321) is further driven to ascend by the driving carrier (311), the guide surface (313) abuts on the heat insulation block (321) and drives the heat insulation block (321) to enter the first hole (101) as a whole and return to the first position.

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