A two-dimensional scanning device

Abstract

The present invention relates to a two-dimensional scanning device, comprising: a micromirror mechanism, a motor reflection mechanism, a prism mechanism, and an FPGA controller for outputting drive signals. The micromirror mechanism includes a one-dimensional MEMS micromirror, a micromirror base, and a micromirror lifting frame. The motor reflection mechanism includes a reflecting mirror, an adjustment motor, a motor base, and a motor lifting frame. The reflecting mirror is disposed on the adjustment motor. The prism mechanism includes a beam splitting prism, a prism base, a prism lifting frame, and a prism rotating frame. The light beam reflected from the laser sequentially passes through the beam splitting prism, the one-dimensional MEMS micromirror, the beam splitting prism, and the reflecting mirror. The present invention uses a one-dimensional MEMS micromirror to scan the high-frequency dimension, and uses a permanent magnet synchronous motor reflection device with simpler control in the low-frequency scanning dimension, reducing the control difficulty and increasing the scanning angle. Moreover, the one-dimensional MEMS micromirror and the permanent magnet synchronous motor reflection device can be installed at different positions according to actual needs, increasing the overall portability of the system.

Description

Technical Field

[0001] The present invention relates to a two-dimensional scanning device, belonging to the technical field of optical scanning. Background Art

[0002] An optical scanning mirror is a vector scanning device that can reflect an incident light beam in a specific manner and in chronological order, thereby achieving scanning imaging on an image plane. Among them, an electromagnetic-driven torsional micromirror, as a type of MEMS micromirror, while retaining the advantages of MEMS micromirrors, has more prominent performances in reducing the driving voltage, improving the signal response speed, and expanding the signal scanning range, and has good application value.

[0003] A two-dimensional scanning mirror mainly consists of a control signal, a controller, a driver, a mirror surface and its driving device, a light source, etc. Among them, a traditional two-dimensional scanning mirror mainly includes a MEMS (Micro Electro Mechanical System) micromirror and a scanning mirror system composed of two motors, which has the characteristics of small volume, high scanning frequency, and small driving voltage. Another commonly used two-dimensional scanning mirror is a two-dimensional scanning mirror system composed of two motors. The light passes through two reflections in total, and the two motors are respectively responsible for the scanning of the X and Y axes. Its physical structure is simple and the system is easy to control. However, due to the physical structure characteristics of the two-dimensional MEMS micromirror, it has the disadvantages of strong nonlinearity, strong coupling, and inability to perform large-scale scanning, and its scanning range limits the application in many occasions. And for the two-motor two-dimensional scanning mirror system, due to the characteristics of the motors themselves, its scanning frequency is lower than that of the two-dimensional MEMS scanning mirror, and the overall volume of the system is larger, and it cannot be applied in some occasions with clear volume requirements. Summary of the Invention

[0004] The present invention provides a two-dimensional scanning device, aiming to solve at least one of the technical problems existing in the prior art.

[0005] The technical solution of the present invention is a two-dimensional scanning device, which includes:

[0006] A micromirror mechanism, the micromirror mechanism includes a one-dimensional MEMS micromirror, a micromirror base, and a micromirror lifting frame for adjusting the height of the one-dimensional MEMS micromirror. The micromirror base is slidably arranged on a slide rail, and the micromirror lifting frame is arranged on the micromirror base;

[0007] A motor reflection mechanism, the motor reflection mechanism includes a reflector, an adjustment motor, a motor base, and a motor lifting frame for adjusting the height of the adjustment motor. The motor base is slidably arranged on the slide rail, and the motor lifting frame is arranged on the motor base; the reflector is arranged on the adjustment motor;

[0008] Prism mechanism, the prism mechanism includes a beam splitting prism, a prism base, a prism lifting frame for adjusting the height of the beam splitting prism, and a prism rotating frame for adjusting the reflection angle of the beam splitting prism. The prism base is slidably arranged on the slide rail, and the prism lifting frame and the prism rotating frame are both arranged on the prism base;

[0009] An FPGA controller for outputting drive signals of the one-dimensional MEMS mirror and the adjustment motor;

[0010] Wherein, the one-dimensional MEMS mirror and the reflector are respectively arranged on the left and right sides of the beam splitting prism, and the light beam reflected from the laser passes through the beam splitting prism, the one-dimensional MEMS mirror, the beam splitting prism, and the reflector in sequence.

[0011] Furthermore, the prism mechanism further includes a backing plate, and the backing plate is arranged between the prism base and the prism lifting frame; the laser is arranged on the backing plate.

[0012] Furthermore, the motor lifting frame includes a lower connecting plate, an upper connecting plate, a driving rotating plate, and a transmission rotating plate. The lower connecting plate is arranged on the motor base, the upper connecting plate supports the adjustment motor, and the driving rotating plate and the transmission rotating plate are arranged between the upper connecting plate and the lower connecting plate; the driving rotating plate and the transmission rotating plate are cross-rotatably connected; the driving rotating plate slides along the upper connecting plate to realize the lifting of the upper connecting plate.

[0013] Furthermore, the upper end of the transmission rotating plate is rotatably connected to the upper connecting plate, and the lower end of the transmission rotating plate is slidably connected to the lower connecting plate; a screw rod is arranged on the lower side of the upper connecting plate; the lower end of the driving rotating plate is rotatably connected to the lower connecting plate, and the upper end of the driving rotating plate is threadedly connected to the screw rod.

[0014] Furthermore, one end of the screw rod is connected with a handle, and by rotating the handle, the upper end of the driving rotating plate moves along the screw rod.

[0015] Furthermore, the mirror base, the motor base, and the prism base are all connected with knobs for fixing positions.

[0016] Furthermore, an analog-to-digital conversion acquisition circuit is connected between the adjustment motor and the FPGA controller.

[0017] The technical solution of the present invention relates to a control method of a two-dimensional scanning device. The method according to the present invention includes the following steps:

[0018] S100. Obtain the reference signal of the upper computer, the position signal of the one-dimensional MEMS mirror, and the encoder signal of the adjustment motor; wherein, the encoder signal is input to the first processing core, and the position signal is input to the second processing core;

[0019] S200. The first processing core obtains the voltage signal required for driving the adjustment motor through a vector control algorithm;

[0020] S300. The second processing core obtains the voltage signal required for driving the one-dimensional MEMS mirror through the operation of a super-twisting controller and a super-twisting observer;

[0021] S400. According to the driving signal output by the operation, drive the one-dimensional MEMS mirror and the adjustment motor to perform a swinging operation to perform a two-dimensional scanning task.

[0022] The technical solution of the present invention also relates to a computer-readable storage medium, on which program instructions are stored, and when the program instructions are executed by a processor, the above method is implemented.

[0023] The technical solution of the present invention also relates to a control system of a two-dimensional scanning device, and the system includes a computer device, and the computer device includes the above computer-readable storage medium.

[0024] The beneficial effects of the present invention are as follows:

[0025] The present invention realizes a two-dimensional scanning device combining a one-dimensional MEMS mirror and a permanent magnet synchronous motor reflection device. The function of a two-dimensional scanning mirror is realized through the one-dimensional swing of the MEMS mirror and the interval swing of the motor. For different scanning frequencies in different dimensions and the required scanning angles are different, and usually a larger scanning angle is required for the low-frequency dimension. A one-dimensional MEMS mirror is used to scan the high-frequency dimension to meet the needs of high-frequency scanning. In the low-frequency scanning dimension, a permanent magnet synchronous motor reflection device with simpler control is used, thereby reducing the control difficulty and increasing the scanning angle. Moreover, whether it is a permanent magnet synchronous motor or a one-dimensional MEMS mirror, an embedded system can be used for development, reducing the cost of industrial use and commercial development. At the same time, due to the independent development and joint control of the two parts of the system, the one-dimensional MEMS mirror and the permanent magnet synchronous motor reflection device can be installed at different positions according to actual needs, increasing the overall portability of the system. Compared with a two-dimensional MEMS mirror, the scanning angle of the present invention is larger, and since the two parts are independently developed, they can be independently installed according to actual needs; compared with a dual-motor scanning mirror system, the present invention has a higher scanning frequency to meet the needs of high-frequency scanning. Description of the Drawings

[0026] Figure 1 is a schematic structural diagram of a two-dimensional scanning device according to the present invention.

[0027] Figure 2 is Figure 1 An enlarged schematic view of part A in

[0028] Figure 3 is a system control flowchart according to the method of the present invention.

[0029] Figure 4 is a basic schematic diagram of program design according to the method of the present invention.

[0030] Figure 5 is a control schematic diagram of the adjustment motor according to the method of the present invention.

[0031] Figure 6 is a control schematic diagram of the one-dimensional MEMS mirror according to the method of the present invention.

[0032] Figure 7 is a tracking effect diagram of the experimental platform according to the method of the present invention.

[0033] Reference numerals:

[0034] Two-dimensional scanning device 100; slide rail 200; mirror mechanism 300; one-dimensional MEMS mirror 310; mirror base 320; mirror lifting frame 330; motor reflection mechanism 400; adjustment motor 410; reflecting mirror 420; motor base 430; motor lifting frame 440; lower connecting plate 441; upper connecting plate 442; active rotating plate 443; transmission rotating plate 444; screw 445; prism mechanism 500; beam splitting prism 510; prism base 520; prism lifting frame 530; prism rotating frame 540; carrier plate 550; laser 600. Detailed implementation manners

[0035] The following will clearly and completely describe the concept, specific structure and technical effects generated by the present invention in conjunction with the embodiments and the drawings, so as to fully understand the purpose, solution and effects of the present invention.

[0036] It should be noted that, unless otherwise specified, when a feature is referred to as "fixed" or "connected" to another feature, it can be directly fixed or connected to the other feature, or indirectly fixed or connected to the other feature. The singular forms "a", "the" and "said" used herein are also intended to include the plural forms, unless the context clearly indicates otherwise. In addition, unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those skilled in the technical field to which this technology belongs. The terms used in the description of this specification are only for describing specific embodiments, and are not intended to limit the present invention. The term "and / or" used herein includes any combination of one or more of the related listed items.

[0037] It should be understood that although the terms first, second, third, etc. may be used in this disclosure to describe various elements, these elements should not be limited to these terms. These terms are only used to distinguish elements of the same type from each other. For example, without departing from the scope of this disclosure, the first element may also be referred to as the second element, and similarly, the second element may also be referred to as the first element. The use of any and all examples or exemplary language (such as "for example", "such as", etc.) provided herein is only intended to better illustrate the embodiments of the present invention and will not impose a limitation on the scope of the present invention unless otherwise required.

[0038] See Figure 1 , the two-dimensional scanning device 100 of the present invention includes a micromirror mechanism 300, a motor reflection mechanism 400, a prism mechanism 500, and an FPGA controller for outputting drive signals for the one-dimensional MEMS micromirror 310 and the adjustment motor 410. The micromirror mechanism 300 includes a one-dimensional MEMS micromirror 310, a micromirror base 320, and a micromirror lifting frame 330 for adjusting the height of the one-dimensional MEMS micromirror 310. The micromirror base 320 is slidably disposed on the slide rail 200, and the micromirror lifting frame 330 is disposed on the micromirror base 320. The motor reflection mechanism 400 includes a reflector 420, an adjustment motor 410, a motor base 430, and a motor lifting frame 440 for adjusting the height of the adjustment motor 410. The motor base 430 is slidably disposed on the slide rail 200, and the motor lifting frame 440 is disposed on the motor base 430; the reflector 420 is disposed on the adjustment motor 410. The prism mechanism 500 includes a beam splitting prism 510, a prism base 520, a prism lifting frame 530 for adjusting the height of the beam splitting prism 510, and a prism rotating frame 540 for adjusting the reflection angle of the beam splitting prism 510. The prism base 520 is slidably disposed on the slide rail 200, and both the prism lifting frame 530 and the prism rotating frame 540 are disposed on the prism base 520.

[0039] For the two-dimensional scanning mirror composed of the above two-dimensional scanning device 100 of the present invention, the light beam is emitted from the laser 600 to the beam splitting prism 510. The beam splitting prism 510 causes the light beam to reach the one-dimensional MEMS micromirror 310 of the micromirror mechanism 300. The one-dimensional MEMS micromirror 310 reflects the light beam and makes the light beam pass through the beam splitting prism 510 to reach the reflector 420 of the motor reflection mechanism 400. After being reflected by the reflector 420, the light beam reaches the imaging light shielding plate or the PSD sensor.

[0040] In an embodiment, see Figure 1, the microscope mechanism 300 includes a microscope base 320, a microscope support, a microscope lifting frame 330, and a one-dimensional MEMS mirror 310 arranged from bottom to top. The mirror surface of the one-dimensional MEMS mirror 310 faces the beam splitter prism 510, and the one-dimensional MEMS mirror 310 is electrically connected to a position sensor to obtain the rotation angle signal of the one-dimensional MEMS mirror 310 through the position sensor. The microscope base 320 is slidably arranged on the slide rail 200 and can be fixed on the slide rail 200 by adjusting the knob, so that the distance between the one-dimensional MEMS mirror 310 and the motor reflection mechanism 400 can be adjusted. At the same time, the height of the one-dimensional MEMS mirror 310 can be adjusted by the microscope lifting frame 330.

[0041] In an embodiment, refer to Figure 2 , the motor reflection mechanism 400 includes a motor base 430, a motor lifting frame 440, a motor support, and an adjustment motor 410 arranged from top to bottom. The rotating shaft end of the adjustment motor 410 is connected to a reflector 420, and the reflector 420 forms an angle with the one-dimensional MENS mirror. The reflection angle of the reflector 420 is adjusted by rotating the adjustment motor 410. The motor base 430 is slidably arranged on the slide rail 200 and can be fixed on the slide rail 200 by adjusting the knob. At the same time, the height of the reflector 420 can be adjusted by the motor lifting frame 440. It should be noted that the adjustment motor 410 in the embodiment of the present invention adopts a permanent magnet synchronous motor. Among them, the FPGA controller obtains the current signal of the adjustment motor 410 through the analog-to-digital conversion acquisition circuit.

[0042] In an application embodiment, the motor lifting frame 440 includes a lower connecting plate 441, an upper connecting plate 442, a driving rotating plate 443, and a transmission rotating plate 444. The lower connecting plate 441 is disposed on the motor base 430. The upper connecting plate 442 is used for installing the motor bracket. The driving rotating plate 443 and the transmission rotating plate 444 are disposed between the lower connecting plate 441 and the upper connecting plate 442. The middle part of the driving rotating plate 443 is rotatably connected to the middle part of the transmission rotating plate 444, and the two are combined in an X shape. The upper end of the driving rotating plate 443 and the lower end of the transmission rotating plate 444 are arranged on the same side, and the lower end of the driving rotating plate 443 and the upper end of the transmission rotating plate 444 are arranged on the same side. The upper end of the transmission rotating plate 444 is rotatably connected to the upper connecting plate 442, and the lower end of the transmission rotating plate 444 is slidably connected to the lower connecting plate 441. The lower end of the driving rotating plate 443 is rotatably connected to the lower connecting plate 441. A screw rod 445 is disposed at the bottom of the upper connecting plate 442. The upper end of the driving rotating plate 443 is threadedly connected to the screw rod 445. One end of the screw rod 445 is provided with a handle, and the handle is disposed outside the upper connecting plate 442. By rotating the screw rod 445 through the handle, the driving rotating plate 443 moves along the screw rod 445, so that the upper end of the driving rotating plate 443 moves relative to the upper connecting plate 442. The upper end of the driving rotating plate 443 moves away from or close to the handle. At the same time, the lower end of the driving rotating plate 443 rotates relative to the lower connecting plate 441, changing the inclination angle of the driving rotating plate 443, so that the upper connecting plate 442 drives the electrode and the mirror 420 to rise or fall. At the same time, the upper connecting plate 442 drives the upper end of the transmission rotating plate 444 to move upward. The upper end of the transmission rotating plate 444 rotates relative to the upper connecting plate 442, and drives the lower end of the transmission rotating plate 444 to slide relative to the lower connecting plate 441, thereby changing the inclination angle of the transmission rotating plate 444. Therefore, the height of the mirror 420 can be adjusted by the motor lifting frame 440.

[0043] In one embodiment, referring to Figure 1 , a prism mechanism 500 is disposed between the micromirror mechanism 300 and the motor mechanism. The prism mechanism 500 includes a prism base 520, a carrier plate 550, a prism lifting frame 530, a prism rotating frame 540, a prism bracket, and a beam splitter prism 510 arranged from bottom to top. The prism base 520 is slidably disposed on the slide rail 200 and can be fixed to the slide rail 200 by adjusting the knob, so that the distance between the beam splitter prism 510 and the one-dimensional MEMS micromirror 310 and the mirror 420 can be adjusted. The height of the beam splitter prism 510 can be adjusted by the prism lifting frame 530. The included angle between the beam splitter prism 510 and the one-dimensional MEMS micromirror 310 and the mirror 420 can be adjusted by the prism rotating frame 540. The one-dimensional MEMS micromirror 310 and the mirror 420 are respectively disposed on the left and right sides of the beam splitter prism 510. The laser 600 is disposed in front of the beam splitter prism 510, and the laser 600 is fixedly installed on the carrier plate 550 through a laser bracket.

[0044] In one embodiment, referring to Figure 3 , the control part of the two-dimensional scanning device 100 of the present invention adopts an FPGA controller. Among them, the reference input signal can be generated by a host computer, different devices in the application scenario, or the FPGA controller. The reference signal, the position sensor signal of the one-dimensional MEMS mirror 310, and the signal generated by the encoder of the adjustment motor 410 are input into the FPGA controller. The FPGA controller performs operations and outputs the control signals of the one-dimensional MEMS mirror 310 and the adjustment motor 410. After the control signals of the two parts are amplified by the corresponding driver boards, they are output as the actual drive signals of the adjustment motor 410 and the one-dimensional MEMS mirror 310. The one-dimensional MEMS mirror 310 and the adjustment motor 410 swing under the action of the drive signals to perform the scanning tasks of the x-axis and y-axis respectively. It should be noted that an analog-to-digital conversion circuit (AD chip) is connected between the FPGA controller and the adjustment motor 410 and its driver to collect the three-phase current and bus voltage of the adjustment motor 410 through the AD chip. The driver board of the one-dimensional MEMS mirror 310 is equipped with an AD and DA conversion circuit by itself.

[0045] Referring to Figure 4 , the FPGA controller in the two-dimensional scanning device 100 of the present invention includes a first processing core CPU0 and a second processing core CPU1. Specifically, the chip on the development board used includes a dual-core ARM processor and a traditional field programmable gate array FPGA logic component, that is, referring to Figure 3 the FPGA end and the ARM end in Figure 3 . Among them, ARM is a dual-core ARM. To make better use of the chip resources and improve the chip operation efficiency, the control of the adjustment motor 410 and the control of the one-dimensional MEMS mirror 310 are respectively deployed in the two cores, that is, referring to

[0046] CPU0 (central processing unit) and CPU1 in Figure 4, BRAM (Block RAM) is the memory array of the FPGA part. The FPGA and the ARM achieve the interactive transmission of data signals by reading and writing the BRAM. The data transmitted from the FPGA side to the ARM side includes the reference signal, the number of motor pulses, the digital signal of the motor current, and the digital signal of the rotation angle of the MEMS mirror. The data transmitted from the ARM side to the FPGA side includes the control voltage of the MEMS mirror and the duty cycle of the motor control. Its control period is controlled by the system clock master control module on the FPGA side, and in the embodiment of the present invention, it is set to two clock cycles.

[0047] Further, the reference signal, the number of motor pulses, the digital signal of the motor current, and the digital signal of the rotation angle of the MEMS mirror of the system are transmitted into the ARM side through the BARM. Among them, the reference signal, the number of motor pulses, and the digital signal of the motor current of the motor are received by the CPU0, and the reference signal of the MEMS mirror and the digital signal of the rotation angle of the MEMS mirror are received by the CPU1. In the embodiment of the present invention, the AXI_GPIO interrupt trigger mode is selected for the interrupt on the ARM side. The interrupt trigger signal is generated by the system clock master control module on the FPGA side, and a trigger signal is generated once every 10 us, which is also the control period of the MEMS mirror. When the interrupt is triggered, it enters the interrupt service function of the CPU0. In this interrupt function, the interrupt of the CPU1 is further triggered, and it enters the interrupt service function of the CPU1 to perform the operation of the MEMS mirror control algorithm. After the CPU1 interrupt service function ends, it returns to the interrupt service function of the CPU0, and then performs the control algorithm operation of the permanent magnet synchronous motor until the interrupt service function of the CPU0 runs to the end and returns to the main function, realizing the operation of a control period. In the embodiment of the present invention, the FGPA controller is used as the system controller. By adopting the AXI_GPIO interrupt and the CPU interrupt methods, the on-chip resources of the chip are fully utilized. While achieving high-speed sampling, the motor control algorithm and the MEMS control algorithm are deployed in different CPUs, reducing the system latency and better realizing the control effect.

[0048] After performing motor control operations and MEMS control operations on the ARM side, the duty cycle information of six PWM signals and the amplitude of the voltage control signal required by the MEMS mirror are obtained. The ARM stores this data in the BARM, and the FPGA reads the corresponding addresses of the BARM to obtain the corresponding information. Among them, the voltage control signal of the MEMS mirror is output through the FPGA pins, and after passing through the DA (analog-to-digital conversion), it is input into the drive board of the MEMS to control the MEMS. The FPGA processes the duty cycle of the motor PWM to obtain the corresponding PWM waveform, which is output through the pins to the drive board of the permanent magnet synchronous motor to achieve motor control. Finally, the permanent magnet synchronous motor and the MEMS mirror rotate to the position determined by the desired signal. When the desired reference signal changes according to a certain rule, the permanent magnet synchronous motor and the MEMS mirror perform corresponding rotations, thereby realizing the scanning function.

[0049] Referring to Figures 3 to 6 , in some embodiments, the FPGA-based two-dimensional scanning mirror control method according to the present invention at least includes the following steps:

[0050] S100. Obtain the reference signal from the upper computer, the position signal of the one-dimensional MEMS mirror 310, and the encoder signal of the adjustment motor 410; wherein, the encoder signal is input to the first processing core, and the position signal is input to the second processing core;

[0051] S200. After the first processing core performs position loop calculation and speed loop calculation through the vector control algorithm, obtain the voltage signal required for driving the adjustment motor 410;

[0052] S300. The second processing core obtains the voltage signal required for driving the one-dimensional MEMS mirror 310 through the operation of the super-twisting controller and the super-twisting observer;

[0053] S400. According to the driving signal output by the operation, drive the one-dimensional MEMS mirror 310 and the adjustment motor 410 to perform a swinging operation to perform a two-dimensional scanning task.

[0054] In one embodiment, referring to Figure 5, the adjustment motor 410 in the embodiment of the present invention is a permanent magnet synchronous motor, and the control method for the permanent magnet synchronous motor is a vector control method. Specifically, the main control algorithm adopted is the PID control strategy. After the system position and attitude are input, through the calculation of the position loop and the speed loop, the reference q-axis current signal is obtained. The motor adopts id = 0 vector control. After the calculation of the current loop, the actual control input q-axis and d-axis current signals are obtained. After being processed by the SVPWM module, six low-voltage control PWM (pulse width modulation) signals are obtained. The PWM signal is a commonly used control signal in the motor control process. After being converted by the drive board, the three-phase voltage signal actually required during motor drive can be obtained, which is the voltage signal required for driving the adjustment motor 410. The signal output by CPU0 is the duty cycle information of the six PWM signals.

[0055] Specifically, refer to Figure 5 , the vector control algorithm adopted by the present invention mainly includes three parts, namely the controller part, the current acquisition part, and the position acquisition part. The reference signal REF and the position signal collected by the encoder are input into the position loop adjustment PI regulator for operation. The calculation result and the result of speed calculation (the speed feedback value of the encoder) are input into the speed loop adjustment PI regulator to obtain the calculation result. The three-phase current signals ia / ib / ic of the adjustment motor 410 are acquired for current acquisition, and the three-phase current is finally converted to obtain the d-axis / q-axis current signals id / iq. The output result of the speed adjustment loop PI regulator and the current signal iq are input into the Q-axis current adjustment PI regulator together to obtain the voltage signal Uq. At the same time, after setting id = 0, it is input into the D-axis current adjustment PI regulator together with the current signal id to obtain the voltage signal Ud. The voltage signal Uq and the voltage signal Ud are processed through conversion and the SVPWM module, and then processed through the inverter, so as to obtain the drive signal of the adjustment motor 410 to control the adjustment motor 410 to perform a swinging operation and realize the scanning task.

[0056] In one embodiment, refer to Figure 6 , for the control of the one-dimensional MEMS mirror 310 in the embodiment of the present invention, the main control method adopted is the super-twisting control method, and a corresponding super-twisting observer is designed to realize the noise reduction of the feedback signal. The current deflection angle information fed back by the system is processed by the super-twisting observer to obtain the observed deflection angle and speed information after observation. After being calculated by the super-twisting algorithm controller through the reference deflection angle and speed information, the input voltage amplitude for controlling the one-dimensional MEMS mirror 310 is obtained, which is the voltage signal required for driving the one-dimensional MEMS mirror 310. The signal output by CPU1 is the voltage signal amplitude of the MEMS mirror.

[0057] Specifically, refer to Figure 6, the control of the one-dimensional MEMS micromirror 310 in the present invention includes: obtaining a reference deflection angle θ ref and the feedback deflection angle output by the super-twisting observer to calculate the deflection angle estimation error e; differentiating the reference deflection angle and the feedback deflection angle through a differentiator to obtain the angular velocity estimation error Input the deflection angle estimation error and the angular velocity estimation error into the super-twisting controller to obtain the voltage signal u required for driving the one-dimensional MEMS micromirror 310. Thus, the current deflection angle θ of the one-dimensional MEMS micromirror 310 is obtained.

[0058] The two-dimensional scanning device 100 of the present invention has been applied to the tracking system platform, which consists of the developed two-dimensional scanning mirror device, the host computer and the camera. The host computer processes the visual image obtained by the monocular camera, calculates the spatial coordinates of the tracking target point, obtains the deflection angles of the adjustment motor 410 and the one-dimensional MEMS micromirror 310 through coordinate pose conversion, and inputs them to the two-dimensional scanning mirror system, thereby realizing the tracking of the target point. See the tracking effect in Figure 7 , a short straight line is seen in the shooting result, and the laser points in the square are noise points caused by the glass shell of the MEMS micromirror and the glass layer of the plane mirror. It can be seen that the system has achieved a good tracking effect.

[0059] It should be recognized that the method steps in the embodiments of the present invention can be implemented or executed by computer hardware, a combination of hardware and software, or computer instructions stored in a non-transitory computer-readable memory. The method can use standard programming techniques. Each program can be implemented in a high-level procedural or object-oriented programming language to communicate with the computer system. However, if necessary, the program can be implemented in assembly or machine language. In any case, the language can be a compiled or interpreted language. In addition, for this purpose, the program can run on a dedicated integrated circuit programmed for this purpose.

[0060] In addition, the operations of the processes described herein can be performed in any suitable order, unless otherwise indicated herein or otherwise clearly contradicted by the context. The processes described herein (or variations and / or combinations thereof) can be executed under the control of one or more computer systems configured with executable instructions, and can be implemented as code (e.g., executable instructions, one or more computer programs, or one or more applications) executed jointly on one or more processors, by hardware, or a combination thereof. The computer program includes a plurality of instructions executable by one or more processors.

[0061] Further, the method can be implemented in any type of computing platform operatively connected to a suitable one, including but not limited to personal computers, minicomputers, mainframes, workstations, network or distributed computing environments, separate or integrated computer platforms, or communicating with charged particle tools or other imaging devices, etc. Aspects of the present invention can be implemented in machine-readable code stored on a non-transitory storage medium or device, whether removable or integrated into the computing platform, such as a hard disk, optical read and / or write storage medium, RSM, ROM, etc., such that it can be read by a programmable computer and can be used to configure and operate the computer to perform the processes described herein when the storage medium or device is read by the computer. Additionally, the machine-readable code, or portions thereof, can be transmitted via wired or wireless networks. When such media includes instructions or programs that implement the steps described above in conjunction with a microprocessor or other data processor, the invention described herein includes these and other different types of non-transitory computer-readable storage media. When programmed according to the methods and techniques of the present invention, the present invention can also include the computer itself.

[0062] A computer program can be applied to input data to perform the functions described herein, thereby transforming the input data to generate output data stored in non-volatile memory. The output information can also be applied to one or more output devices such as a display. In a preferred embodiment of the present invention, the transformed data represents physical and tangible objects, including a specific visual depiction of the physical and tangible objects generated on the display.

[0063] As described above, it is only a preferred embodiment of the present invention, and the present invention is not limited to the above-described embodiments. As long as it achieves the technical effects of the present invention by the same means, any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present invention shall be included within the scope of protection of the present invention. Within the scope of protection of the present invention, its technical solutions and / or implementation manners can have various different modifications and variations.

Claims

1. A two-dimensional scanning device, characterized in that, Comprising: A microscope mechanism (300), the microscope mechanism (300) includes a one-dimensional MEMS mirror (310), a microscope base (320), and a microscope lifting frame (330) for adjusting the height of the one-dimensional MEMS mirror (310). The microscope base (320) is slidably disposed on a slide rail (200), and the microscope lifting frame (330) is disposed on the microscope base (320); A motor reflection mechanism (400), the motor reflection mechanism (400) includes a reflector (420), an adjustment motor (410), a motor base (430), and a motor lifting frame (440) for adjusting the height of the adjustment motor (410). The motor base (430) is slidably disposed on the slide rail (200), and the motor lifting frame (440) is disposed on the motor base (430); The reflector (420) is disposed on the adjustment motor (410); A prism mechanism (500), the prism mechanism (500) includes a beam splitting prism (510), a prism base (520), a prism lifting frame (530) for adjusting the height of the beam splitting prism (510), and a prism rotating frame (540) for adjusting the reflection angle of the beam splitting prism (510). The prism base (520) is slidably disposed on the slide rail (200), and both the prism lifting frame (530) and the prism rotating frame (540) are disposed on the prism base (520); An FPGA controller for outputting drive signals of the one-dimensional MEMS mirror (310) and the adjustment motor (410); Wherein, the one-dimensional MEMS mirror (310) and the reflector (420) are respectively disposed on the left and right sides of the beam splitting prism (510), and the light beam reflected from the laser (600) sequentially passes through the beam splitting prism (510), the one-dimensional MEMS mirror (310), the beam splitting prism (510), and the reflector (420).

2. The two-dimensional scanning device (100) according to claim 1, wherein: The prism mechanism (500) further includes a backing plate (550), and the backing plate (550) is disposed between the prism base (520) and the prism lifting frame (530); The laser (600) is disposed on the backing plate (550).

3. The two-dimensional scanning device (100) according to claim 1, wherein: The motor lifting frame (440) includes a lower connecting plate (441), an upper connecting plate (442), a driving rotating plate (443), and a transmission rotating plate (444). The lower connecting plate (441) is disposed on the motor base (430), the upper connecting plate (442) supports the adjustment motor (410), and the driving rotating plate (443) and the transmission rotating plate (444) are disposed between the upper connecting plate (442) and the lower connecting plate (441); The driving rotating plate (443) is cross-rotatably connected to the transmission rotating plate (444); The driving rotating plate (443) slides along the upper connecting plate (442) to realize the lifting of the upper connecting plate (442).

4. The two-dimensional scanning device (100) according to claim 3, characterized in that: The upper end of the transmission rotating plate (444) is rotatably connected to the upper connecting plate (442), and the lower end of the transmission rotating plate (444) is slidably connected to the lower connecting plate (441); a screw rod (445) is arranged on the lower side of the upper connecting plate (442); the lower end of the active rotating plate (443) is rotatably connected to the lower connecting plate (441), and the upper end of the active rotating plate (443) is threadedly connected to the screw rod (445).

5. The two-dimensional scanning device (100) according to claim 4, characterized in that: One end of the screw rod (445) is connected with a handle, and by rotating the handle, the upper end of the active rotating plate (443) moves along the screw rod (445).

6. The two-dimensional scanning device (100) according to claim 1, wherein: The microscope base (320), the motor base (430) and the prism base (520) are all connected with knobs for fixing positions.

7. The two-dimensional scanning device (100) according to claim 1, characterized in that: An analog-to-digital conversion acquisition circuit is connected between the adjustment motor (410) and the FPGA controller.

8. A control method for a two-dimensional scanning mirror, applied to the two-dimensional scanning device (100) according to any one of claims 1 to 7, characterized in that, The method includes the following steps: S100. Obtain a reference signal of the upper computer, a position signal of the one-dimensional MEMS mirror (310), and an encoder signal of the adjustment motor (410); wherein, the encoder signal is input into a first processing core, and the position signal is input into a second processing core; S200. The first processing core obtains a voltage signal required for driving the adjustment motor (410) through a vector control algorithm; S300. The second processing core obtains a voltage signal required for driving the one-dimensional MEMS mirror (310) through the operations of a super-twisting controller and a super-twisting observer; S400. According to the driving signal output by the operation, drive the one-dimensional MEMS mirror (310) and the adjustment motor (410) to perform a swinging operation to perform a two-dimensional scanning task.

9. A computer-readable storage medium, on which program instructions are stored, and when the program instructions are executed by a processor, the method according to any one of claims 1 to 8 is implemented.

10. A control system for a two-dimensional scanning mirror, characterized in that, Including: A computer device, and the computer device includes the computer-readable storage medium according to claim 9.

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