A material anti-electrolytic corrosion and sputtering resistance detection device and detection method

Abstract

The present application discloses a material anti-electrolytic corrosion and sputtering resistance detection device and detection method, comprising: a platform frame (1), comprising at least two vertically arranged support rods, the support rods are provided with a motion guide rail, the motion guide rail is hinged to a first electrode test platform (2) through a revolving pair, and the revolving pair is correspondingly provided with a first drive assembly; the first electrode test platform (2), comprising a mounting seat (10), the mounting seat (10) is hinged with each revolving pair, and a second drive assembly is arranged on the mounting seat (10), the output end of the second drive assembly is connected to a material fixing seat (18), the material fixing seat (18) is used to provide a mounting interface for a material to be tested (21), the material to be tested (21) acts as a first electrode, and performs a circular motion under the drive of the second drive assembly; the second electrode test platform (3), comprising a base, the base is provided with a second electrode with a polarity opposite to that of the material to be tested (21). The detection device of the present application can simulate a vacuum discharge process in a vacuum environment, and realize the comparison of the anti-electrolytic corrosion ability and sputtering resistance of different materials.

Description

Technical Field

[0001] The present application relates to the field of spacecraft technology, and in particular to a device and method for detecting material resistance to electrical corrosion and sputtering. Background Art

[0002] Electric propulsion refers to a power device that uses electric or magnetic fields to accelerate the ejection of ionized working fluid to generate thrust. It has been widely used in various propulsion tasks of spacecraft, such as attitude control, orbital position keeping, orbital maneuvers and interstellar flight. Spacecraft are very sensitive to fuel consumption, and specific impulse is a performance indicator for jet engines to evaluate fuel consumption. The higher the specific impulse, the faster the jet speed of the engine, and the same mass of fuel can produce greater thrust or obtain greater impulse. The specific impulse of chemical propulsion is difficult to increase significantly after reaching 340s, while electric propulsion can break through the specific impulse limit of traditional chemical propulsion and can be as high as 2000-5000s, which is about 10 times that of chemical propulsion, and is far from its upper limit. Therefore, the mass of fuel required to complete the same impulse task using electric propulsion will be much less than that of chemical propulsion. Due to its advantages such as high specific impulse and high thrust adjustment accuracy, electric propulsion is playing an increasingly important role in various aerospace fields such as satellites, deep space exploration, and high-precision space science experiments. It has become the forefront of aerospace technology and has received attention from all countries. Vacuum arc thruster is a type of electric propulsion. Ablation loss of anode material is a form of failure of vacuum arc thruster. Therefore, a method is needed to simulate the vacuum discharge process and compare the anti-electrolytic corrosion ability and sputtering resistance of different materials under vacuum arc discharge.

[0003] The prior art compares the electrical corrosion resistance and sputtering resistance of different materials under vacuum arc discharge. For example, CN113466119A proposes a method for measuring and evaluating the material's resistance to ion sputtering corrosion, which uses an ion source or an electron gun to bombard the material under test. However, for the vacuum arc discharge mechanism, the situation at the moment of breakdown discharge between the anode and cathode is far more complicated than simply bombarding the material surface with an ion source or an electron gun, so it is not applicable.

[0004] Existing technologies all use ion source or electron gun bombardment methods, or integrate the cathode and anode into a module for vacuum arc testing.

[0005] For vacuum arc electrode materials, the ion source or electron gun bombardment method cannot simulate the vacuum arc discharge process, so it is not suitable for the detection test of vacuum arc electrode materials and the evaluation of anti-corrosion and sputtering resistance.

[0006] The method of integrating the anode and cathode into a module for vacuum arc testing generally requires a long test time, and because the anode electrode material is wrapped in the middle of the module, the material test status cannot be observed in real time. In addition, the consistency of the vacuum arc test method using integrated modules is poor. After modularization, due to differences in component processing accuracy and status, there will be large differences in the status of different test modules, which does not meet the requirements of comparative tests. The anode and cathode discharge gap cannot be changed in the method of vacuum arc testing. During the vacuum arc test, as the anode and cathode are ablated, the discharge gap increases and the discharge state changes, which does not meet the requirements of comparative tests. Summary of the invention

[0007] The embodiments of the present application provide a material corrosion resistance and sputtering resistance detection device and detection method, which are used to simulate a vacuum discharge process in a vacuum environment to compare the corrosion resistance and sputtering resistance of different materials.

[0008] The present application provides a device for detecting the electrical corrosion resistance and sputtering resistance of a material, comprising:

[0009] The platform frame 1 comprises at least two vertically arranged support rods, on which a motion guide rail is arranged, and the motion guide rail is hinged to the first electrode test platform 2 through a rotating pair, and the rotating pair is correspondingly provided with a first driving assembly, and the corresponding first driving assembly is controlled to drive the rotating pair to adjust the position of the first electrode test platform 2;

[0010] The first electrode test platform 2 includes a mounting seat 10, the mounting seat 10 is hinged with each revolving pair, a second driving assembly is arranged on the mounting seat 10, a material fixing seat 18 is connected to the output end of the second driving assembly, and the material fixing seat 18 is used to provide a mounting interface for the material 21 to be tested. The material 21 to be tested acts as a first electrode and performs a circular motion under the drive of the second driving assembly;

[0011] The second electrode test platform 3 comprises a base, on which a second electrode having a polarity opposite to that of the material 21 to be tested is arranged.

[0012] Optionally, the platform frame 1 includes three vertically arranged support rods, and the motion guide rail is a linear bearing 11;

[0013] The first driving component is a first piezoelectric ceramic motor 8 or a micron-level linear motor. The first piezoelectric ceramic motor 8 drives the rotating pair through a belt transmission mechanism 9 .

[0014] Optionally, the second driving component is a second piezoelectric ceramic motor 12 or a micron-level linear motor;

[0015] A first driving wheel 17 is also provided on the output end of the second piezoelectric ceramic motor 12, and a second driven wheel 15 is also provided on the mounting seat 10, and the second driven wheel 15 is driven by the first driving wheel 17;

[0016] The material fixing seat 18 is arranged on the second driven wheel 15 , and controls the output of the second piezoelectric ceramic motor 12 to realize the use of the first driving wheel 17 to drive the second driven wheel 15 , so that the material 21 to be tested makes a circular motion around the second electrode based on the second driven wheel 15 .

[0017] Optionally, the second driven wheel 15 is arranged on the mounting seat 10 through a bearing and an end cover.

[0018] Optionally, the second driven wheel 15 and the first driving wheel 17 are driven by a belt.

[0019] Optionally, the material fixing seat 18 is provided with a locking assembly for fixing the material to be tested.

[0020] Optionally, a wiring hole is provided on the base of the second electrode test platform 3 .

[0021] The present application also provides a material anti-corrosion and sputtering resistance detection method, which is implemented based on the material anti-corrosion and sputtering resistance detection device, including:

[0022] Fix the cathode on the base of the second electrode test platform of the material corrosion resistance and sputtering resistance testing device, install the anode prepared into the required shape on the material fixing seat, and connect the wires to the anode and cathode;

[0023] According to the required discharge gap, adjusting the first electrode test platform so that the discharge gap is satisfied between the anode and the cathode;

[0024] The entire material anti-corrosion and sputtering resistance testing device is placed in a vacuum system, the second driving component is started, ignited, and the test is completed.

[0025] Optionally, before placing the entire material anti-corrosion and sputtering resistance testing device into the vacuum system, the following steps are also included:

[0026] The second driving assembly is started to rotate the anode relative to the cathode, and ignition is tested.

[0027] The embodiment of the present application can separate the anode and the cathode and control the discharge gap through the first electrode test platform and the second electrode test platform, and can simulate the vacuum discharge process in a vacuum environment to compare the anti-electrolytic corrosion ability and sputtering resistance of different materials.

[0028] The above description is only an overview of the technical solution of the present application. In order to more clearly understand the technical means of the present application, it can be implemented in accordance with the contents of the specification. In order to make the above and other purposes, features and advantages of the present application more obvious and easy to understand, the specific implementation methods of the present application are listed below. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Various other advantages and benefits will become apparent to those of ordinary skill in the art by reading the detailed description of the preferred embodiments below. The accompanying drawings are only for the purpose of illustrating the preferred embodiments and are not to be considered as limiting the present application. Also, the same reference symbols are used throughout the accompanying drawings to represent the same components. In the accompanying drawings:

[0030] Figure 1 This is an example of the overall structure of the detection device according to the embodiment of the present application;

[0031] Figure 2 This is an example of the structure of the platform frame portion of the detection device according to an embodiment of the present application;

[0032] Figure 3 This is a partial structural example of the second electrode test platform of the detection device of the embodiment of the present application;

[0033] Figure 4 This is a partial structural example of the first electrode test platform of the detection device of the embodiment of the present application;

[0034] Figure 5 This is an example of a top-view cross-sectional structure of a detection device according to an embodiment of the present application;

[0035] Figure 6 An example of a customizable anode structure of a detection device according to an embodiment of the present application;

[0036] Figure 7 This is an example of the gap feeler gauge structure of the detection device of the embodiment of the present application;

[0037] Figure 8 This is an example of the anode rotation orientation structure of the detection device of the embodiment of the present application;

[0038] Fig. 9 This is an example of a vacuum arc of a detection device according to an embodiment of the present application;

[0039] Fig.10 This is an example of the overall structure of the detection device according to an embodiment of the present application after being placed in a vacuum system. DETAILED DESCRIPTION

[0040] The exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. Although the exemplary embodiments of the present disclosure are shown in the accompanying drawings, it should be understood that the present disclosure can be implemented in various forms and should not be limited by the embodiments set forth herein. On the contrary, these embodiments are provided to enable a more thorough understanding of the present disclosure and to fully convey the scope of the present disclosure to those skilled in the art.

[0041] The terms that may be used in this application are explained as follows:

[0042] Ion bombardment: High-speed ions are fired at the target surface, causing atoms on the target to fly out. After a period of time, damage will be found on the target surface. By bombarding different target surfaces with ions for a long time and observing the damage on the target surface, we can evaluate the ability of different materials to resist ion bombardment and sputtering.

[0043] Secondary electron emission: When electrons with sufficient energy bombard the solid surface, a certain number of electrons are emitted from the solid surface.

[0044] The secondary electron emission process can be divided into three stages:

[0045] The incident electrons interact with the electrons in the emitter, and some of the electrons are excited to higher energy levels;

[0046] A portion of the excited electrons move toward the emitter-vacuum interface.

[0047] Among the electrons reaching the surface, those with energy greater than the surface potential barrier are emitted into the vacuum environment.

[0048] The present application embodiment provides a material anti-corrosion and sputtering resistance detection device, such as Figure 1 As shown, including:

[0049] The platform frame 1 includes at least three groups of vertically arranged support rods, and the support rods are provided with motion guide rails, which are hinged to the first electrode test platform 2 through a rotating pair. The rotating pair is correspondingly provided with a first driving component, and the corresponding first driving component is controlled to drive the rotating pair to adjust the position of the first electrode test platform 2. In some embodiments, the platform frame 1 includes three vertically arranged support rods, and the motion guide rails are linear bearings 11. Figure 2As shown, the first driving component is a first piezoelectric ceramic motor 8 or a micron-level linear motor. This application takes the first driving component as the first piezoelectric ceramic motor 8 as an example. The first piezoelectric ceramic motor 8 drives the rotating pair through a belt transmission mechanism 9. In some specific examples, a rotating pair is connected to a support rod, and the rotating pair can be a hinge kinematic pair. For example, in the case of three vertically arranged support rods, three first piezoelectric ceramic motors 8 can be set, thereby adjusting the position of the first electrode test platform 2 by controlling the coordinated movement of the three first piezoelectric ceramic motors 8.

[0050] The first electrode test platform 2 includes a mounting seat 10, the mounting seat 10 is hinged with each rotating pair, a second driving component is arranged on the mounting seat 10, a material fixing seat 18 is connected to the output end of the second driving component, the material fixing seat 18 is used to provide a mounting interface for the material 21 to be tested, and the material 21 to be tested acts as a first electrode and performs circular motion under the drive of the second driving component. In a specific application, the first electrode can be an anode or a cathode, and the corresponding subsequent second electrode can be a cathode or an anode, which can be set according to actual needs. The specific circular motion can be a circular motion relative to the second electrode.

[0051] The movement process of the three groups of vertical movement mechanisms (rotation pairs) of the platform frame 1 is the same as above and below. The rotation on the first electrode test platform will cause the mounting base 10 to vibrate. In some specific applications, three motors (such as piezoelectric ceramic motors) are used to control them respectively, so as to use the three groups of motors to stabilize the bracket connecting rods corresponding to the mounting base.

[0052] A horizontal inclination sensor is installed on the mounting base 10 of the platform frame 1, and the level of the first electrode test platform is measured by the sensor. Specifically, first manually teach the three groups of vertical motion motors to adjust the mounting base 10 to an approximate horizontal position, and then start the preset horizontal self-calibration program. Obtain the coordinates corresponding to X, Y, and Z through the horizontal self-calibration program. At this time, the coordinates are marked as P (x, y, z), and the coordinates required to meet the test are defined as O (0°±0.1°, 0°±0.1°, 0°±0.1°). The relevant parameters of point 0 can be set in the program in advance, and the coordinates corresponding to the three directions of point P and point O can be compared and calculated to obtain the corresponding directions and corresponding pulses of the three groups of vertical motion motors, so as to achieve the platform frame maintaining a horizontal inclination range that meets the test requirements.

[0053] The second electrode test platform 3 includes a base, on which a second electrode having a polarity opposite to that of the material 21 to be tested is disposed. Figure 1 , Figure 3As shown, for example, the second electrode is a cathode, and the second electrode test platform 3 includes a cathode base 23, on which a cathode column 22 is arranged. The cathode column 22 can be made of pure metal and is columnar, and is consumed as a cathode during the test.

[0054] After the mounting base 10 is adjusted to the horizontal inclination range that meets the test requirements by the aforementioned method, the first electrode test platform can be moved up and down according to the height of the second electrode (e.g., cathode) to achieve the discharge gap required for the test. The up and down movement process can be the movement of three groups of vertical motion motors in the same direction and with the same number of pulses at the same time. With the guarantee of micron-level precision motors and linear bearings, the three groups of vertical motion structures can be synchronized. After reaching the required height, the aforementioned horizontal self-calibration program is started again to calibrate the horizontal state of the mounting base 10.

[0055] The embodiment of the present application can separate the anode and the cathode and control the discharge gap through the first electrode test platform and the second electrode test platform, which can be used to simulate the vacuum discharge process in a vacuum environment and compare the anti-electrolytic corrosion ability and sputtering resistance of different materials.

[0056] In some embodiments, Figure 4 As shown, the second driving component is a second piezoelectric ceramic motor 12 or a micron-level linear motor. This application takes the second driving component as the second piezoelectric ceramic motor 12 as an example. A first driving wheel 17 is also provided on the output end of the second piezoelectric ceramic motor 12, and a second driven wheel 15 is also provided on the mounting seat 10, and the second driven wheel 15 is driven by the first driving wheel 17. The material fixing seat 18 is provided on the second driven wheel 15, and the output of the second piezoelectric ceramic motor 12 is controlled to realize the use of the first driving wheel 17 to drive the second driven wheel 15, so that the material 21 to be tested performs a circular motion around the second electrode based on the second driven wheel 15.

[0057] In some specific examples, the second driven wheel 15 is disposed on the mounting seat 10 via a bearing 16 and an end cover 13. Figure 4 In the embodiment, a sleeve 14 is further provided outside the bearing, and a material fixing seat 18 is provided on the second driven wheel 15. In a specific application, there is a driving relationship between the first driving wheel 17 and the second driven wheel 15, for example, a gear belt or other driving method. In some embodiments, the second driven wheel 15 and the first driving wheel 17 are belt driven. For example, the first driving wheel 17 and the second driven wheel 15 are both provided with a belt groove, and a belt (not shown in the figure) is installed through the belt groove to realize transmission.

[0058] In some embodiments, the material fixing seat 18 is provided with a locking assembly for fixing the material to be tested. Figure 4In the embodiment, the locking assembly may be a locking nut 19. In some examples, after the material to be tested is prepared, a terminal is led out. For example, when the material to be tested is used as an anode, an anode terminal 20 may be led out.

[0059] In some embodiments, a wiring hole is provided on the base of the second electrode test platform 3. Figure 3 As shown, in the case where the second electrode is a cathode, a cathode connection hole 24 is provided on the base of the second electrode test platform 3 .

[0060] In view of the demand for electric propulsion in the field of vacuum arc research, the embodiment of the present application proposes a new type of anode test platform (first electrode test platform) with a piezoelectric ceramic motor installed on the test platform to achieve micron-level movement. By controlling the piezoelectric ceramic motor, the anode can rotate around the cathode at a uniform speed. Figure 5 The dashed and solid lines in the figure are 25. The method of the present application sets the anode and the cathode separately. In a specific application, a micrometer-level gap feeler gauge can be used to measure the discharge gap of the vacuum arc.

[0061] The present application also provides a material anti-corrosion and sputtering resistance detection method, which is implemented based on the aforementioned material anti-corrosion and sputtering resistance detection device and includes the following steps:

[0062] Fix the cathode on the base of the second electrode test platform of the material corrosion resistance and sputtering resistance test device, install the anode prepared into the required shape on the material fixing seat, and connect the wires to the anode and cathode. Specifically, according to the actual test requirements, a columnar cathode made of pure metal can be placed on the cathode base. Figure 6 As shown in the figure (only some shapes are listed in the figure, and the specific shape is made according to the actual test requirements), the material to be tested is made into an anode of the required shape. If the material to be tested is a non-metallic material and is not conductive, after the material to be tested is made into the required shape, a layer of metal film of the same material as the cathode is plated on the surface, and the exposed cable is directly wrapped on the metal coating at the tail of the anode. The resistance between the cable and the anode discharge part is ≤10Ω.

[0063] Weld the wire to the terminal at the end of the anode, install the anode on the material holder, adjust the discharge distance between the cathode and cathode, and tighten the locking nut to ensure that the position of the anode does not change. To measure the discharge distance, you can use a micron-level gap feeler gauge, such as Figure 7 As shown, the thickness of the gap feeler gauge is made according to the actual needs of the test.

[0064] According to the required discharge gap, the first electrode test platform is adjusted so that the discharge gap between the anode and the cathode is met. Specifically, according to the actual test requirements, if a different discharge gap is required, the motion platform is controlled by a program. When the predetermined gap is met, the program corresponding to the motion platform is recorded and reproduced. After confirmation, the debugged motion platform program is saved.

[0065] The piezoelectric ceramic motor on the anode test platform (first electrode test platform) is started by the program to make the anode rotate around the cathode at a constant speed with micron-level accuracy. The anode rotation direction and vacuum arc are shown in the figure below. Figure 8 , Fig. 9 As shown in the figure, after confirming that there is no obvious change in the discharge gap between the cathode and the anode around the entire circle, save the debugged program.

[0066] Place the entire material anti-corrosion and sputtering resistance testing device into the vacuum system, start the second drive component, ignite, and complete the test. After the above work is completed, place the application in the vacuum system and evacuate the vacuum system. Fig.10 After the test vacuum requirement is met, turn on the pulse power supply to generate pulse discharge between the cathode and cathode, start the anode rotation program, and let the anode rotate around the cathode at a constant speed with micron-level accuracy. Fig. 9 As shown, at the moment when the arc spot is generated, part of the emitted high-energy particles, low-energy particles, ion clusters, electrons and atomic clusters will directly sputter on the anode made of the material under test. As the test progresses, the sputtering loss of the anode will become more obvious. After the test, the material under test is scanned with an electron microscope to obtain the surface composition and sputtering depth of the anode after sputtering. By comparing the data of different test materials, the anti-electrolytic corrosion ability and sputtering resistance of different materials can be analyzed.

[0067] In some embodiments, before placing the entire material anti-corrosion and sputtering resistance detection device into the vacuum system, the process further includes: starting the second driving component to rotate the anode relative to the cathode, and conducting a test ignition. During the test ignition process, an oscilloscope can be used to measure parameters such as frequency, voltage, and current during discharge.

[0068] The material anti-electrolytic corrosion and sputtering resistance detection method of the present application manufactures the anode of the tested material according to the actual test requirements, and uses a columnar metal as the cathode to complete the test. The method of the present application can also plate the surface of the tested non-metallic material with a metal film layer that is the same as the cathode material to test the anti-electrolytic corrosion ability and sputtering resistance of the non-metallic material. The method of the present application can be used to simulate the reduction vacuum arc working condition to test the material's anti-electrolytic corrosion ability and sputtering resistance.

[0069] It should be noted that, in this article, the terms "include", "comprises" or any other variations thereof are intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements includes not only those elements, but also other elements not explicitly listed, or also includes elements inherent to such process, method, article or device. In the absence of further restrictions, an element defined by the sentence "comprises a ..." does not exclude the existence of other identical elements in the process, method, article or device including the element.

[0070] The serial numbers of the above-mentioned embodiments of the present application are for description only and do not represent the advantages or disadvantages of the embodiments.

[0071] Through the description of the above implementation methods, those skilled in the art can clearly understand that the above-mentioned embodiment methods can be implemented by means of software plus a necessary general hardware platform, and of course by hardware, but in many cases the former is a better implementation method. Based on such an understanding, the technical solution of the present application, or the part that contributes to the prior art, can be embodied in the form of a software product, which is stored in a storage medium (such as ROM / RAM, a disk, or an optical disk), and includes a number of instructions for enabling a terminal (which can be a mobile phone, a computer, a server, or a network device, etc.) to execute the methods described in each embodiment of the present application.

[0072] The embodiments of the present application are described above in conjunction with the accompanying drawings, but the present application is not limited to the above-mentioned specific implementation methods. The above-mentioned specific implementation methods are merely illustrative and not restrictive. Under the guidance of the present application, ordinary technicians in this field can also make many forms without departing from the purpose of the present application and the scope of protection of the claims, all of which are within the protection of the present application.

Claims

1. A material anti-corrosion and sputtering resistance detection device, characterized in that: include: The platform frame (1) comprises at least three groups of vertically arranged support rods, the support rods are provided with motion guide rails, the motion guide rails are hinged to the first electrode test platform (2) through a rotating pair, the rotating pair is correspondingly provided with a first drive assembly, and the corresponding first drive assembly is controlled to drive the rotating pair to adjust the position of the first electrode test platform (2); A first electrode test platform (2) comprises a mounting seat (10), the mounting seat (10) being hinged to each revolving pair, a second driving assembly being arranged on the mounting seat (10), a material fixing seat (18) being connected to an output end of the second driving assembly, the material fixing seat (18) being used to provide a mounting interface for a material to be tested (21), the material to be tested (21) acting as a first electrode and performing a circular motion under the drive of the second driving assembly; A second electrode test platform (3) comprises a base, on which a second electrode having a polarity opposite to that of the material to be tested (21) is arranged; A first driving wheel (17) is also arranged on the output end of the second driving component, and a second driven wheel (15) is also arranged on the mounting seat (10), and the second driven wheel (15) is driven by the first driving wheel (17); The material fixing seat (18) is arranged on the second driven wheel (15), and controls the output of the second piezoelectric ceramic motor (12) to realize the use of the first driving wheel (17) to drive the second driven wheel (15), so that the material (21) to be tested performs a circular motion around the second electrode based on the second driven wheel (15); The second driven wheel (15) is arranged on the mounting seat (10) via a bearing and an end cover; The platform frame (1) comprises three vertically arranged support rods, and the motion guide rail is a linear bearing (11); The first driving component is a first piezoelectric ceramic motor (8) or a micron-level linear motor, and the first driving component drives the rotating pair through a belt transmission mechanism (9), and the movement process of the three groups of vertical movement mechanisms of the platform frame (1) is the same as above and below; The second driving component is a second piezoelectric ceramic motor (12) or a micron-level linear motor.

2. The material anti-corrosion and sputtering resistance detection device according to claim 1, characterized in that: The second driven wheel (15) and the first driving wheel (17) are driven by a belt.

3. The material anti-corrosion and sputtering resistance detection device according to claim 1, characterized in that: The material fixing seat (18) is provided with a locking assembly for fixing the material to be tested.

4. The material anti-corrosion and sputtering resistance detection device according to claim 1, characterized in that: A wiring hole is arranged on the base of the second electrode test platform (3).

5. A method for testing the electrical corrosion resistance and sputtering resistance of a material, characterized in that: The device for detecting the electrical corrosion resistance and sputtering resistance of a material according to any one of claims 1 to 4 is implemented, comprising: Fix the cathode on the base of the second electrode test platform of the material corrosion resistance and sputtering resistance testing device, install the anode prepared into the required shape on the material fixing seat, and connect the wires to the anode and cathode; According to the required discharge gap, adjusting the first electrode test platform so that the discharge gap is satisfied between the anode and the cathode; The entire material anti-corrosion and sputtering resistance testing device is placed in a vacuum system, the second driving component is started, ignited, and the test is completed.

6. The method for testing the material's electrical corrosion resistance and sputtering resistance according to claim 5, characterized in that: Before placing the entire material anti-corrosion and sputtering resistance testing device into the vacuum system, it also includes: The second driving assembly is started to rotate the anode relative to the cathode, and ignition is tested.

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