Method for preparing flexible display panel and flexible display panel

Abstract

The embodiment of the present application discloses a preparation method of a flexible display panel and the flexible display panel. The preparation method of the flexible display panel comprises the following preparation steps: providing an array substrate; sequentially depositing an anode, an organic electroluminescent layer and a cathode on the array substrate; placing the array substrate in a vacuum chamber, the vacuum chamber is provided with an electric field, and a plurality of positive kinetic energy particles and / or negative kinetic energy particles exist in the vacuum chamber, and the positive kinetic energy particles or the negative kinetic energy particles accelerate under the action of the electric field until the cathode is bombarded. The embodiment has the beneficial effects that the embodiment provides a preparation method of a flexible display panel and the flexible display panel, without changing the existing preparation process of the flexible display panel, and through the mode of an external electric field and particle bombardment, the cathode is partially embedded into the electron transport layer, so that the adhesion between the cathode and the electron transport layer is strengthened, the risk of falling of the flexible display panel is reduced, and the service life of the flexible display panel is improved.

Description

Technical Field

[0001] The present application relates to the field of methods, and in particular to a method for preparing a flexible display panel and a flexible display panel. Background Art

[0002] Flexible OLED panels are the future of display technology. They typically need to be able to maintain normal display performance after being bent tens of thousands of times. The cathode is produced using a vapor deposition process, which has poor adhesion. During panel bending, the cathode can easily fall off, causing pixel luminescence failure. Summary of the Invention

[0003] The embodiments of the present application provide a method for preparing a flexible display panel and a flexible display panel, which can solve the technical problem of easy detachment of the cathode in the prior art.

[0004] The present invention provides a method for preparing a flexible display panel, comprising the following steps:

[0005] providing an array substrate;

[0006] Depositing an anode, a hole injection layer, a hole transport layer, a light-emitting layer, an electron injection layer, an electron transport layer and a cathode in sequence on the array substrate;

[0007] The array substrate is placed in a vacuum chamber, an electric field is provided in the vacuum chamber, and a plurality of positive kinetic energy particles and / or negative kinetic energy particles exist in the vacuum chamber. Under the action of the electric field, the positive kinetic energy particles or the negative kinetic energy particles are accelerated toward the cathode until they bombard the cathode.

[0008] Optionally, in some embodiments of the present application, the specific steps of placing the array substrate in a vacuum chamber are as follows:

[0009] A first electrode plate and a second electrode plate are provided in the vacuum chamber, and a target is provided on a side of the second electrode plate facing the first electrode plate.

[0010] Attaching a surface of the array substrate away from the anode to a surface of the first electrode plate facing the second electrode plate, with a plurality of positive kinetic energy particles between the anode and the second electrode plate;

[0011] Connect the first electrode plate to a positive signal, and connect the second electrode plate to a negative signal;

[0012] The positive kinetic energy particles bombard the target material under the action of the negative signal to generate negative kinetic energy particles, and the negative kinetic energy particles bombard the cathode under the action of the positive signal.

[0013] The kinetic particles are accelerated toward the cathode until they bombard the cathode.

[0014] Optionally, in some embodiments of the present application, the specific steps of placing the array substrate in a vacuum chamber are as follows:

[0015] The vacuum chamber is provided with a first electrode plate and a second electrode plate which are arranged opposite to each other;

[0016] Attaching a surface of the array substrate away from the anode to a surface of the first electrode plate facing the second electrode plate, with a plurality of positive kinetic energy particles between the anode and the second electrode plate;

[0017] Connect the first electrode plate to a negative signal, and connect the second electrode plate to a positive signal;

[0018] The positive electrode kinetic energy particles bombard the cathode under the action of the negative electrode signal.

[0019] Optionally, in some embodiments of the present application, the cathode is prepared by evaporation.

[0020] Optionally, in some embodiments of the present application, the material of the positive electrode kinetic particles includes at least one of argon, molybdenum, aluminum, silver, titanium, indium tin oxide, and indium zinc oxide.

[0021] Optionally, in some embodiments of the present application, the potential difference between the first electrode plate and the second electrode plate is less than 200V.

[0022] Optionally, in some embodiments of the present application, the time for the positive electrode kinetic energy particles or the negative electrode kinetic energy particles to bombard the cathode is 10s to 100s.

[0023] Optionally, in some embodiments of the present application, after the cathode is prepared and before the step of placing the array substrate in a vacuum chamber, the following preparation step is also included: preparing a layer of organic material on the cathode to form a protective layer.

[0024] Optionally, in some embodiments of the present application, the thickness of the protective layer is 10 nm to 100 nm.

[0025] Correspondingly, an embodiment of the present application further provides a flexible display panel, which is manufactured using the method for manufacturing a flexible display panel.

[0026] The beneficial effect of the embodiments of the present application is that the embodiments of the present application provide a method for preparing a flexible display panel and a flexible display panel, without changing the preparation process of the existing flexible display panel, by means of an external electric field and particle bombardment, so that the cathode part is embedded in the electron transport layer, thereby strengthening the adhesion between the cathode and the electron transport layer, reducing the risk of the flexible display panel falling off, and improving the service life of the flexible display panel. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are only some embodiments of the present application. For those skilled in the art, other drawings can be obtained based on these drawings without creative work.

[0028] Figure 1 is a flow chart of preparing a flexible display panel provided in an embodiment of the present application;

[0029] Figure 2 This is a diagram of the overall structure of the cathode bombardment provided by the embodiment of the present application;

[0030] Figure 3 Schematic diagram of the structure of the organic electroluminescent layer provided in the embodiment of the present application;

[0031] Figure 4 is a flow chart of preparing a flexible display panel provided in another preferred embodiment of the present application;

[0032] Figure 5 This is an overall structural diagram of the cathode bombardment provided by another preferred embodiment of the present application.

[0033] Description of reference numerals:

[0034] Flexible display panel 1; array substrate 100;

[0035] Anode 200; organic electroluminescent layer 300;

[0036] cathode 400; hole injection layer 310;

[0037] Hole transport layer 320; Light emitting unit 330;

[0038] Electron injection layer 340; electron transport layer 350;

[0039] Vacuum chamber 2; first electrode plate 21;

[0040] Second electrode plate 22; positive kinetic energy particles 3;

[0041] Target material 4; negative electrode kinetic energy particles 41. DETAILED DESCRIPTION

[0042] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, not all of the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without making creative work are within the scope of protection of the present application. In addition, it should be understood that the specific implementation methods described herein are only used to illustrate and explain the present application, and are not used to limit the present application. In the present application, unless otherwise specified, the directional words used, such as "upper" and "lower", generally refer to the upper and lower parts of the device in actual use or working state, specifically the drawing direction in the accompanying drawings; and "inside" and "outside" refer to the outline of the device.

[0043] The embodiments of the present application provide a method for manufacturing a flexible display panel and a flexible display panel, which are described in detail below.

[0044] Example

[0045] This embodiment is mainly used to explain the preparation method of the flexible display panel of the present invention and the flexible display panel 1 prepared according to the preparation method. The flexible display panel 1 prepared by the preparation method of the flexible display panel has good bending performance and strong adhesion performance between film layers.

[0046] Specifically, such as Figure 1 As shown, the specific preparation method of the flexible display panel is as follows:

[0047] S1) An array substrate 100 is provided. A plurality of thin film transistor units are provided in the array substrate 100 to function as driving switches.

[0048] S2) Figure 2 and Figure 3 As shown, an anode 200, an organic electroluminescent layer 300 and a cathode 400 are sequentially deposited on the array substrate 100, wherein the anodes 200 are arranged at intervals and are connected one-to-one with the thin film transistor units, and the organic electroluminescent layer 300 includes a stacked hole injection layer 310, a hole transport layer 320, a light-emitting unit 330, an electron injection layer 340 and an electron transport layer 350. The cathode 400 in this embodiment is prepared by a conventional evaporation process, which is simple in preparation and helps to reduce preparation costs. However, since the flexible display panel 1 is ultimately prepared in this embodiment, it is inevitable that it will be bent multiple times during use. The vapor-deposited cathode 400 has poor adhesion to the organic electroluminescent layer 300, and the technical problem of cathode falling off is likely to occur after multiple bendings, thereby causing the flexible display panel 1 to fail in luminescence.

[0049] S3) The array substrate 100 is placed in a vacuum chamber 2, which is filled with a unidirectional electric field. Specifically, a first electrode plate 21 and a second electrode plate 22 are provided in the vacuum chamber 2, wherein the surface of the array substrate 100 away from the anode 200 is in contact with the surface of the first electrode plate 21 facing the second electrode plate 22, so as to prevent subsequent particles from moving between the array substrate 100 and the first electrode plate 21, thereby wasting energy. In this embodiment, a negative signal is applied to the first electrode plate 21, and a positive signal is applied to the second electrode plate 22. To ensure the movement of subsequent high-kinetic energy particles, the potential difference between the positive signal and the negative signal does not exceed 200V, preferably 120V. To ensure the movement path of subsequent positive kinetic energy particles, a cavity is provided between the second electrode plate 22 and the cathode 400.

[0050] S4) Add positive kinetic particles 3 into the vacuum chamber 2, and the positive kinetic particles 3 are positively charged. Specifically, the positive kinetic particles 3 are placed in the cavity between the cathode 400 and the second electrode plate 22, and the initial position is located on the second electrode plate 22. In this embodiment, the positive kinetic particles 3 can be placed on the electrode plate 21 first and then the electrode signal is passed to the first electrode plate 21 and the second electrode plate 22, so as to avoid the positive kinetic particles 3 being directly adsorbed on the cathode 400 when placed in the vacuum chamber 2, thereby failing to achieve the technical effect of bombarding the cathode 400.

[0051] After the first electrode plate 21 and the second electrode plate 22 are connected to the corresponding positive and negative electrode signals, the positive kinetic particles 3 will accelerate toward the first electrode plate 21 to which the negative signal is applied under the action of the electric field, that is, the positive kinetic particles 3 will accelerate to bombard the cathode 400 under the action of the electric field. After receiving the bombardment, the cathode 400 will deform toward the direction of the organic electroluminescent layer 300, so that part of the cathode 400 is embedded in the organic electroluminescent layer 300. Specifically, part of the cathode 400 is embedded in the electron transport layer 350, thereby increasing the adhesion performance between the cathode 400 and the electron transport layer 350.

[0052] Furthermore, to enhance the acceleration effect of the positive kinetic energy particles 3 and the bombardment force of the positive kinetic energy particles 3 on the cathode 400, in this embodiment, the positive kinetic energy particles 3 are high-kinetic energy particles, and their material is a metal material or a metal oxide material, specifically, including at least one of argon, molybdenum, aluminum, silver, titanium, indium tin oxide, and indium zinc oxide. In other preferred embodiments of the present invention, the positive kinetic energy particles 3 can also be a radical material.

[0053] In particular, before step S3), a protective layer preparation step can be added. A protective layer 500 is deposited or printed on the side of the cathode 400 away from the array substrate 100. The protective layer 500 is made of an organic material and has a thickness of 10 nm to 100 nm. The protective layer 500 does not affect the bombardment effect of the positive kinetic energy particles 3, but it can prevent the positive kinetic energy particles 3 from damaging the organic electroluminescent layer 300 and the cathode 400, which would result in an increase in voltage and a decrease in efficiency of the completed flexible display panel 1.

[0054] In another preferred embodiment of the present invention, Figure 4 As shown, the step S3) and the step S4) can also be replaced by:

[0055] S31) Figure 5 As shown, the array substrate 100 is placed in a vacuum chamber 2, and the vacuum chamber 2 is filled with an electric field in a single direction. Specifically, a first electrode plate 21 and a second electrode plate 22 are provided in the vacuum chamber 2, wherein the surface of the array substrate 100 away from the anode 200 is in contact with the surface of the first electrode plate 21 facing the second electrode plate 22, thereby preventing subsequent particles from moving between the array substrate 100 and the first electrode plate 21, causing energy waste. In this embodiment, the first electrode plate 21 is connected to a positive signal, the second electrode plate 22 is connected to a negative signal, and a target material 4 is provided on the surface of the second electrode plate 22 facing the first electrode plate 21. In order to ensure the subsequent movement of high-kinetic energy particles, the potential difference between the positive signal and the negative signal does not exceed 200V, preferably 120V. In order to ensure the movement path of subsequent kinetic energy particles, a cavity is provided between the second electrode plate 22 and the cathode 400.

[0056] S41) Add positive kinetic particles 3 into the vacuum chamber 2, and the positive kinetic particles 3 are positively charged. Specifically, the positive kinetic particles 3 are placed in the cavity between the cathode 400 and the second electrode plate 22. Before the electrical signal is connected, the positive kinetic particles 3 are biased toward the side of the cathode 400, thereby preventing the positive kinetic particles 3 from being directly adsorbed on the target material 4 when placed in the vacuum chamber 2.

[0057] After the first electrode plate 21 and the second electrode plate 22 are connected to the corresponding positive and negative electrode signals, the positive kinetic particles 3 will accelerate toward the second electrode plate 22 under the action of the electric field, that is, the positive kinetic particles 3 will accelerate to bombard the target material 4 under the action of the electric field. After being bombarded, the target material 4 will sputter out negative kinetic particles 41. Under the bombardment, the negative kinetic particles 41 will break away from the target material 4 and accelerate toward the cathode 400 under the action of the electric field until they bombard the cathode 400. After being bombarded, the cathode 400 will deform toward the organic electroluminescent layer 300, so that part of the cathode 400 is embedded in the organic electroluminescent layer 300. Specifically, part of the cathode 400 is embedded in the electron transport layer 350, thereby increasing the adhesion performance between the cathode 400 and the electron transport layer 350.

[0058] The flexible display panel 1 prepared according to the above-mentioned method for preparing a flexible display panel includes an array substrate 100, an anode 200, an organic electroluminescent layer 300, and a cathode 400. The organic electroluminescent layer 300 includes a stacked hole injection layer 310, a hole transport layer 320, a light-emitting unit 330, an electron injection layer 340, and an electron transport layer 350. The cathode 400 is provided on the electron transport layer 350. Through the above-mentioned method for preparing a flexible display panel, the adhesion between the cathode 400 and the electron transport layer 350 is strengthened, thereby effectively avoiding the technical problem of the cathode 400 and the electron transport layer 350 falling off when the flexible display panel 1 is bent.

[0059] The beneficial effect of this embodiment is that this embodiment provides a method for preparing a flexible display panel and a flexible display panel, without changing the existing preparation process of the flexible display panel, by means of an external electric field and particle bombardment, the cathode part is embedded into the electron transport layer, thereby strengthening the adhesion between the cathode and the electron transport layer, reducing the risk of the flexible display panel falling off, and improving the service life of the flexible display panel.

[0060] The above is a detailed introduction to a method for preparing a flexible display panel and a flexible display panel provided in an embodiment of the present application. Specific examples are used herein to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the method of the present application and its core idea; at the same time, for technical personnel in this field, based on the ideas of the present application, there will be changes in the specific implementation methods and application scope. In summary, the content of this specification should not be understood as a limitation on the present application.

Claims

1. A method for preparing a flexible display panel, characterized in that: The method comprises the following preparation steps: providing an array substrate; Depositing an anode, an organic electroluminescent layer and a cathode in sequence on the array substrate; The array substrate is placed in a vacuum chamber, an electric field is provided in the vacuum chamber, and a plurality of positive kinetic energy particles and / or negative kinetic energy particles exist in the vacuum chamber. Under the action of the electric field, the positive kinetic energy particles or the negative kinetic energy particles are accelerated toward the cathode until they bombard the cathode, so that part of the cathode is embedded in the organic electroluminescent layer.

2. The method for preparing a flexible display panel according to claim 1, wherein: The specific steps of placing the array substrate in a vacuum chamber are as follows: A first electrode plate and a second electrode plate are provided in the vacuum chamber, and a target is provided on a side of the second electrode plate facing the first electrode plate. Attaching a surface of the array substrate away from the anode to a surface of the first electrode plate facing the second electrode plate, with a plurality of positive kinetic energy particles between the anode and the second electrode plate; Connect the first electrode plate to a positive signal, and connect the second electrode plate to a negative signal; The positive kinetic energy particles bombard the target material under the action of the negative signal to generate negative kinetic energy particles, and the negative kinetic energy particles bombard the cathode under the action of the positive signal.

3. The method for preparing a flexible display panel according to claim 1, wherein: The specific steps of placing the array substrate in a vacuum chamber are as follows: The vacuum chamber is provided with a first electrode plate and a second electrode plate which are arranged opposite to each other; Attaching a surface of the array substrate away from the anode to a surface of the first electrode plate facing the second electrode plate, with a plurality of positive kinetic energy particles between the anode and the second electrode plate; Connect the first electrode plate to a negative signal, and connect the second electrode plate to a positive signal; The positive electrode kinetic energy particles bombard the cathode under the action of the negative electrode signal.

4. The method for preparing a flexible display panel according to claim 1, wherein: The cathode is prepared by an evaporation method.

5. The method for preparing a flexible display panel according to claim 1, wherein: The material of the positive electrode kinetic energy particles includes at least one of argon, molybdenum, aluminum, silver, titanium, indium tin oxide, and indium zinc oxide.

6. The method for preparing a flexible display panel according to claim 2, wherein: The potential difference between the first electrode plate and the second electrode plate is less than 200V.

7. The method for preparing a flexible display panel according to claim 1, wherein: The time for the positive electrode kinetic energy particles or the negative electrode kinetic energy particles to bombard the cathode is 10s to 100s.

8. The method for preparing a flexible display panel according to claim 1, wherein: After the cathode is prepared and before the step of placing the array substrate in a vacuum chamber, the following preparation steps are further included: A layer of organic material is prepared on the cathode to form a protective layer.

9. The method for preparing a flexible display panel according to claim 8, wherein: The thickness of the protective layer is 10 nm to 100 nm.

10. A flexible display panel, characterized in that: The flexible display panel is prepared by the method for preparing the flexible display panel according to any one of claims 1 to 9.

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