Laser device

Abstract

The laser device of the present application includes a vacuum container including a wall portion; a laser medium disposed in the vacuum container; a cooler disposed outside the vacuum container; and a heat transfer conductor which penetrates the wall portion in a prescribed direction and is connected to the laser medium and the cooler.

Description

Technical Field

[0001] This disclosure relates to laser devices. Background Technology

[0002] A laser device is known to include: a laser medium for amplifying the laser, a cooler for cooling the laser medium, and a vacuum container for housing the laser medium and the cooler (for example, see Patent Document 1).

[0003] Existing technical documents

[0004] Patent documents

[0005] Patent Document 1: Japanese Patent Application Publication No. 2010-34413 Summary of the Invention

[0006] The problem the invention aims to solve

[0007] In laser devices like those described above, proper cooling of the laser medium is crucial for achieving high laser output. However, proper cooling of the laser medium necessitates large-scale cooling devices and vacuum containers, which in turn increases the overall size of the laser device.

[0008] The purpose of this disclosure is to provide a laser device that can suppress the enlargement of device size and properly cool the laser medium.

[0009] Methods for solving problems

[0010] One aspect of the laser device disclosed herein includes: a vacuum container with walls; a laser medium disposed within the vacuum container; a cooler disposed outside the vacuum container; and a heat transfer conductor that extends through the walls in a predetermined direction and is connected to the laser medium and the cooler.

[0011] In one aspect of the laser device disclosed herein, a cooler is disposed outside a vacuum container and is connected to a laser medium disposed within the vacuum container via a heat transfer conductor. This allows for miniaturization of the vacuum container compared to a structure where both the laser medium and the cooler are disposed within the vacuum container, enabling efficient and reliable cooling of the laser medium. Furthermore, in a structure where both the laser medium and the cooler are disposed within the vacuum container, the laser medium is affected by radiative heat emitted from the cooler; however, this is avoided in the laser device of one aspect of the present disclosure. As described above, the laser device according to one aspect of the present disclosure can suppress the enlargement of the device size and appropriately cool the laser medium.

[0012] Alternatively, one aspect of the laser device disclosed herein may further include: a cylindrical body disposed between a wall and a cooler, the wall having an opening connecting the space inside the vacuum container with the space inside the cylindrical body, through which a heat transfer conductor passes. This allows for maintaining the vacuum level inside the vacuum container and easily achieves a structure where the heat transfer conductor penetrates the wall of the vacuum container. Furthermore, the space inside the cylindrical body where the heat transfer conductor is disposed, like the space inside the vacuum container, becomes a space with a high vacuum level, thus preventing condensation on the heat transfer conductor.

[0013] Alternatively, one aspect of the laser apparatus disclosed herein may further include: a support portion supporting the vacuum container and the cooler; and a vibration eliminator disposed between the support portion and the cooler, configured to eliminate vibrations in the aforementioned direction, wherein a heat transfer conductor extends through the wall portion such that the heat transfer conductor can move relative to the wall portion in the aforementioned direction, and the support portion supports the vacuum container and the cooler such that the cooler can move relative to the vacuum container in the aforementioned direction. Thus, as a cooler, for example, in the case of using a mechanical cooler that generates vibration, it is possible to suppress the transmission of the cooler's vibration to the laser medium via the heat transfer conductor. Therefore, it is possible to prevent the characteristics of the laser emitted from the laser medium from becoming unstable.

[0014] In one aspect of the laser device disclosed herein, the vibration eliminator may be a first fluid pressure cylinder configured to extend and retract along the aforementioned direction. Thus, as a cooler, for example, in the case of using a mechanical cooler that generates vibration, the transmission of the cooler's vibration to the laser medium via the heat transfer conductor can be suppressed with a simple structure.

[0015] Alternatively, one aspect of the laser device disclosed herein may further include: a cylindrical body disposed between a wall and a cooler, the wall having an opening communicating with the space inside the vacuum container and the space inside the cylindrical body, a heat transfer conductor passing through the cylindrical body and the opening, and the cylindrical body including a telescopic portion configured to extend and retract in the aforementioned direction. This allows for maintaining the vacuum level inside the vacuum container and easily achieving a structure where the heat transfer conductor penetrates the wall of the vacuum container. Furthermore, the space inside the cylindrical body where the heat transfer conductor is disposed, like the space inside the vacuum container, becomes a space with a high vacuum level, thus preventing condensation on the heat transfer conductor. Moreover, the cylindrical body disposed between the wall of the vacuum container and the cooler includes a telescopic portion configured to extend and retract. Therefore, as a cooler, for example, in the case of using a mechanical cooler that generates vibration, the transmission of the cooler's vibration to the vacuum container can be suppressed.

[0016] In one aspect of the laser device disclosed herein, the aforementioned direction may be vertical, and the support portion may include: a device frame to which a vacuum container is fixed; and a second fluid pressure cylinder disposed between the device frame and the cooler, configured to extend and retract along the aforementioned direction. Thus, by adjusting the position of the "unit including the laser medium, cooler, and heat transfer conductor" in the vertical direction using the second fluid pressure cylinder, it is possible to prevent the position of the laser medium in the vertical direction from deviating from the laser beam path due to the weight of the unit. Therefore, it is possible to suppress the instability of the characteristics of the laser emitted from the laser medium.

[0017] Alternatively, one aspect of the laser device disclosed herein may further include: an excitation source that emits excitation light incident at multiple positions on the end face of a laser medium, the multiple positions being arranged along the aforementioned direction. Thus, as a cooler, for example, in the case of using a mechanical cooler that generates vibration, the vibration is suppressed by a vibration eliminator, and the direction of the vibration transmitted from the cooler to the laser medium is consistent with the direction of the multiple positions arranged on the end face of the laser medium; therefore, uniformity of the excitation distribution in the laser medium can be achieved.

[0018] Alternatively, one aspect of the laser device disclosed herein may include: a pair of coolers, each serving as a cooler; and a pair of heat transfer conductors, each serving as a heat transfer conductor, wherein the pair of coolers are arranged opposite each other in a manner that clamps a vacuum container in the aforementioned direction, and the pair of heat transfer conductors are arranged opposite each other in a manner that clamps a laser medium in the aforementioned direction. This allows for uniform and reliable cooling of the laser medium.

[0019] In one aspect of the laser device disclosed herein, the aforementioned direction may also be vertical. Thus, by arranging a pair of coolers clamping a vacuum container vertically, it is possible to suppress the large-area installation of the laser device.

[0020] Invention Effects

[0021] According to this disclosure, it is possible to provide a laser device that can suppress the enlargement of device size and properly cool the laser medium. Attached Figure Description

[0022] Figure 1 This is a side view of the laser device according to the first embodiment.

[0023] Figure 2 This is a front view of the laser device according to the first embodiment.

[0024] Figure 3 This is a front view of the laser device according to the second embodiment.

[0025] Figure 4 This is a side view of a modified laser device.

[0026] Figure 5 This is a side view of a modified laser device. Detailed Implementation

[0027] Hereinafter, embodiments of the present disclosure will be described in detail with reference to the accompanying drawings. Furthermore, in the various drawings, the same or equivalent parts are labeled with the same reference numerals, and repeated descriptions are omitted.

[0028] [First Implementation]

[0029] Figure 1 and Figure 2 The laser device 1A shown is, for example, a laser amplification device that amplifies the laser L1 used for laser nuclear fusion. The energy of the laser L1 output from the laser device 1A is, for example, in the range of 50 to 100 J. Figure 1 and Figure 2 As shown, the laser device 1A includes: a vacuum container 10, a laser medium 20, a pair of coolers 30A and 30B, a holder 40, a pair of heat transfer conductors 50A and 50B, a pair of cylinders 60A and 60B, a support 70, multiple fluid pressure cylinders (first fluid pressure cylinder, vibration eliminator) 80A, multiple fluid pressure cylinders (first fluid pressure cylinder, vibration eliminator) 80B, a laser source 100, multiple excitation sources 110, and multiple excitation sources 120. Hereinafter, the first horizontal direction will be referred to as the X-axis direction, the second horizontal direction perpendicular to the first horizontal direction will be referred to as the Y-axis direction, and the vertical direction will be referred to as the Z-axis direction. Furthermore, in Figure 1 and Figure 2 In the diagram, the vacuum container 10 and a pair of cylindrical bodies 60A and 60B are shown in cross-section.

[0030] Vacuum container 10 is a container in which the vacuum level inside is increased by evacuation using a vacuum pump (not shown). As an example, in laser device 1A, during operation of laser device 1A, the vacuum level inside vacuum container 10 is maintained at 10 Pa to 10 Pa. -5 The vacuum container 10 includes: a pair of walls 11, 12, a pair of walls 13, 14, a pair of walls 15, 16 and a pair of light-transmitting members 17, 18.

[0031] A pair of walls 11 and 12 are opposite each other in the X-axis direction. A pair of walls 13 and 14 are opposite each other in the Y-axis direction. A pair of walls 15 and 16 are opposite each other in the Z-axis direction. The pair of walls 11 and 12, the pair of walls 13 and 14, and the pair of walls 15 and 16 are formed, for example, from stainless steel in a cuboid box shape. A light-transmitting member 17 is hermetically fixed to the opening 11a of the wall 11. A light-transmitting member 18 is hermetically fixed to the opening 12a of the wall 12. The pair of light-transmitting members 17 and 18 are opposite each other in the X-axis direction. The shape of each opening 11a and 12a when viewed from the X-axis direction is, for example, rectangular. Each light-transmitting member 17 and 18 is formed, for example, from synthetic quartz, fused silica, or sapphire in a rectangular plate shape. A non-reflective coating for laser L1 and excitation light L2 (described later) is applied to each light-transmitting member 17 and 18.

[0032] The laser medium 20 is disposed within the vacuum container 10. The laser medium 20 is a solid-state laser medium, for example, formed from a Yb:YAG crystal in a cuboid shape. The laser medium 20 has a pair of end faces 21 and 22 facing each other in the X-axis direction. End face 21 faces the light-transmitting member 17. End face 22 faces the light-transmitting member 18. When viewed from the X-axis direction, the shape of each end face 21 and 22 is, for example, rectangular. As an example, the laser medium 20 is formed by stacking multiple solid-state laser media formed from Yb:YAG crystals into rectangular plates, and disposed within the vacuum container 10 such that the stacking direction of the multiple solid-state laser media is parallel to the X-axis direction. The length of one side of the laser medium 20 is, for example, about 110 mm.

[0033] A pair of coolers 30A and 30B are disposed outside the vacuum container 10. Cooler 30A is disposed on the upper side relative to the vacuum container 10. Cooler 30B is disposed on the lower side relative to the vacuum container 10. That is, the pair of coolers 30A and 30B are arranged opposite each other in a manner that clamps the vacuum container 10 in the Z-axis direction. Each cooler 30A and 30B is a mechanical cooler that generates vibration (e.g., a Stirling refrigerator, a Gifford-McMahon refrigerator, etc.). A flange 32 and a bracket 33 are provided on the housing 31 of each cooler 30A and 30B.

[0034] The support 40 holds the laser medium 20 with its end faces 21 and 22 exposed. As an example, the support 40 holds a stack of multiple solid-state laser media (i.e., multiple solid-state laser media constituting the laser medium 20). The support 40 is, for example, formed of copper in a rectangular frame shape. The laser medium 20 and the support 40 are separated from the vacuum container 10.

[0035] Heat transfer conductor 50A penetrates the upper wall 15 of vacuum container 10 along the Z-axis direction (a predetermined direction). Heat transfer conductor 50B penetrates the lower wall 16 of vacuum container 10 along the Z-axis direction. That is, a pair of heat transfer conductors 50A and 50B are arranged opposite each other in a manner that clamps the laser medium 20 in the Z-axis direction.

[0036] The heat transfer conductor 50A extends through the opening 15a in the wall 15 in a manner that allows it to move relative to the wall 15 along the Z-axis. The opening 15a, when viewed from the Z-axis, is, for example, circular in shape. A gap is formed between the heat transfer conductor 50A and the edge of the opening 15a. The heat transfer conductor 50A is connected to the laser medium 20 and the cooler 30A. The end of the heat transfer conductor 50A located inside the vacuum container 10 is connected to the support 40. The end of the heat transfer conductor 50A located outside the vacuum container 10 is connected to the cooler 30A. The heat transfer conductor 50A is, for example, formed of copper and is cylindrical with a centerline parallel to the Z-axis. The diameter of the heat transfer conductor 50A is, for example, about 100 mm.

[0037] Furthermore, the connection between the heat transfer conductor 50A and the laser medium 20 only needs to achieve a thermal connection; physically, it can be a direct connection (connection without certain components) or an indirect connection (connection via certain components). The connection between the heat transfer conductor 50A and the cooler 30A only needs to achieve a thermal connection; physically, it can be a direct connection or an indirect connection.

[0038] The heat transfer conductor 50B extends through the opening 16a in the wall 16, allowing it to move relative to the wall 16 along the Z-axis. The opening 16a, when viewed from the Z-axis, is circular, for example. A gap is formed between the heat transfer conductor 50B and the edge of the opening 16a. The heat transfer conductor 50B is connected to the laser medium 20 and the cooler 30B. The end of the heat transfer conductor 50B located inside the vacuum container 10 is connected to the support 40. The end of the heat transfer conductor 50B located outside the vacuum container 10 is connected to the cooler 30B. The heat transfer conductor 50B is, for example, formed of copper and is cylindrical with a centerline parallel to the Z-axis. The diameter of the heat transfer conductor 50B is, for example, 100 mm.

[0039] Furthermore, the connection between the heat transfer conductor 50B and the laser medium 20 only needs to achieve a thermal connection; physically, it can be a direct or indirect connection. Similarly, the connection between the heat transfer conductor 50B and the cooler 30B only needs to achieve a thermal connection; physically, it can be a direct or indirect connection.

[0040] A cylindrical body 60A is disposed between the wall 15 of the vacuum container 10 and the cooler 30A. The end of the cylindrical body 60A on the vacuum container 10 side is hermetically fixed to the edge of the opening 15a of the wall 15. The end of the cylindrical body 60A on the cooler 30A side is hermetically fixed to the flange 32 of the cooler 30A. A heat transfer conductor 50A is disposed inside the cylindrical body 60A. A gap is formed between the cylindrical body 60A and the heat transfer conductor 50A. The opening 15a connects the space inside the vacuum container 10 with the space inside the cylindrical body 60A, and the heat transfer conductor 50A passes through the cylindrical body 60A and the opening 15a. When viewed from the Z-axis direction, the opening 15a is located inside the cylindrical body 60A, and the heat transfer conductor 50A is located inside both the cylindrical body 60A and the opening 15a.

[0041] A cylindrical body 60B is disposed between the wall 16 of the vacuum container 10 and the cooler 30B. The end of the cylindrical body 60B on the vacuum container 10 side is hermetically fixed to the edge of the opening 16a of the wall 16. The end of the cylindrical body 60B on the cooler 30B side is hermetically fixed to the flange 32 of the cooler 30B. A heat transfer conductor 50B is disposed inside the cylindrical body 60B. A gap is formed between the cylindrical body 60B and the heat transfer conductor 50B. The opening 16a connects the space inside the vacuum container 10 with the space inside the cylindrical body 60B, and the heat transfer conductor 50B passes through the cylindrical body 60B and the opening 16a. When viewed from the Z-axis direction, the opening 16a is located inside the cylindrical body 60B, and the heat transfer conductor 50B is located inside both the cylindrical body 60B and the opening 16a.

[0042] Each cylinder 60A, 60B includes a main body 61 and a telescopic part 62. The telescopic part 62 is configured to extend and retract along the Z-axis direction. As an example, the telescopic part 62 is disposed on the side of the vacuum container 10 relative to the main body 61, and the telescopic part 62 is hermetically connected to the main body 61. The main body 61 is formed of stainless steel, for example, in a cylindrical shape with a centerline parallel to the Z-axis direction. The telescopic part 62 is formed of stainless steel, for example, in a cylindrical shape with a centerline parallel to the Z-axis direction. The telescopic part 62 has, for example, a corrugated structure.

[0043] The support portion 70 supports the vacuum container 10 and the pair of coolers 30A and 30B in a manner that allows them to move relative to the vacuum container 10 along the Z-axis. The support portion 70 includes: a device frame 71, multiple fluid pressure cylinders (second fluid pressure cylinders) 75A, and multiple fluid pressure cylinders (second fluid pressure cylinders) 75B. The vacuum container 10 is fixed to the device frame 71. Each fluid pressure cylinder 75A and 75B is configured to extend and retract along the Z-axis and eliminate vibrations in the Z-axis direction. Each fluid pressure cylinder 75A and 75B restricts the movement of the unit "including the laser medium 20, the support 40, the pair of heat transfer conductors 50A and 50B, and the pair of coolers 30A and 30B" in a direction perpendicular to the Z-axis. Alternatively, hydraulic cylinders, oil cylinders, etc., can also be used as the fluid pressure cylinders 75A and 75B.

[0044] Multiple fluid pressure cylinders 75A are disposed between the device frame 71 and the cooler 30A. Specifically, the multiple fluid pressure cylinders 75A are disposed between the plate 73 of the device frame 71 and the flange 32 of the cooler 30A. The plate 73 is part of the device frame 71 and is disposed between the vacuum container 10 and the cooler 30A. The cylinder 60A penetrates the plate 73 through an opening 73a. The shape of the opening 73a, when viewed from the Z-axis direction, is, for example, circular. A gap is formed between the cylinder 60A and the edge of the opening 73a. The multiple fluid pressure cylinders 75A are arranged at equal angular intervals around the cylinder 60A. In this embodiment, four fluid pressure cylinders 75A are arranged at 90-degree intervals around the cylinder 60A.

[0045] Multiple fluid pressure cylinders 75B are disposed between the device frame 71 and the cooler 30B. Specifically, the multiple fluid pressure cylinders 75B are disposed between the plate 74 of the device frame 71 and the flange 32 of the cooler 30B. The plate 74 is part of the device frame 71 and is disposed between the vacuum container 10 and the cooler 30B. The cylinder 60B penetrates the plate 74 through an opening 74a. The shape of the opening 74a, when viewed from the Z-axis direction, is, for example, circular. A gap is formed between the cylinder 60B and the edge of the opening 74a. The multiple fluid pressure cylinders 75B are arranged at equal angular intervals around the cylinder 60B. In this embodiment, four fluid pressure cylinders 75B are arranged at 90-degree intervals around the cylinder 60B.

[0046] Multiple fluid pressure cylinders 80A are disposed between the support 70 and the cooler 30A. Specifically, multiple fluid pressure cylinders 80A are disposed between the plate 73 of the device frame 71 and the bracket 33 of the cooler 30A. Each fluid pressure cylinder 80A is configured to be able to extend and retract along the Z-axis direction and eliminate vibration in the Z-axis direction. Each fluid pressure cylinder 80A restricts the movement of the "unit including the laser medium 20, the support 40, a pair of heat transfer conductors 50A, 50B and a pair of coolers 30A, 30B" in a direction perpendicular to the Z-axis direction. The multiple fluid pressure cylinders 80A are arranged at equal angular intervals around the cylinder 60A. In this embodiment, two fluid pressure cylinders 80A are arranged at 180-degree intervals around the cylinder 60A. In addition, hydraulic cylinders, oil cylinders, etc., can also be used as each fluid pressure cylinder 80A.

[0047] Multiple fluid pressure cylinders 80B are disposed between the support 70 and the cooler 30B. Specifically, the multiple fluid pressure cylinders 80B are disposed between the plate 74 of the device frame 71 and the bracket 33 of the cooler 30B. Each fluid pressure cylinder 80B is configured to be a cylinder capable of extension and retraction along the Z-axis direction and eliminating vibration in the Z-axis direction. Each fluid pressure cylinder 80B restricts the movement of the unit "including the laser medium 20, the support 40, a pair of heat transfer conductors 50A, 50B and a pair of coolers 30A, 30B" in a direction perpendicular to the Z-axis direction. The multiple fluid pressure cylinders 80B are arranged at equal angular intervals around the cylinder 60B. In this embodiment, two fluid pressure cylinders 80B are arranged at 180-degree intervals around the cylinder 60B. In addition, hydraulic cylinders, oil cylinders, etc., can also be used as each fluid pressure cylinder 80B.

[0048] A laser source 100 is disposed outside the vacuum container 10. The laser source 100 emits a laser L1 as a seed light amplified by the laser medium 20. The laser L1 emitted from the laser source 100 passes through the light-transmitting member 17 along the X-axis and is incident on the end face 21 of the laser medium 20 along the X-axis. The laser L1, amplified by the laser medium 20, exits from the end face 22 of the laser medium 20 along the X-axis and passes through the light-transmitting member 18 along the X-axis. The laser source 100 is, for example, a source including a semiconductor laser.

[0049] Multiple excitation light sources 110 and 120 are disposed outside the vacuum container 10. The multiple excitation light sources 110 and 120 emit excitation light L2 to excite the laser medium 20. The excitation light L2 emitted from the multiple excitation light sources 110 passes through the light-transmitting member 17 and is incident on multiple positions P1 on the end face 21 of the laser medium 20. The multiple positions P1 are arranged along the Z-axis direction. The excitation light L2 emitted from the multiple excitation light sources 120 passes through the light-transmitting member 18 and is incident on multiple positions P2 on the end face 22 of the laser medium 20. The multiple positions P2 are arranged along the Z-axis direction. The laser light source 100 is, for example, a light source including a semiconductor laser or a light source including a flash lamp.

[0050] In the laser device 1A configured as described above, the unit comprising a laser medium 20, a support 40, a pair of heat transfer conductors 50A and 50B, and a pair of coolers 30A and 30B can be moved along the Z-axis direction by multiple fluid pressure cylinders 75A and 75B. Thus, the position of the laser medium 20 in the Z-axis direction is positioned relative to the optical path of the laser L1 by the multiple fluid pressure cylinders 75A and 75B. At this time, as the pair of coolers 30A and 30B move relative to the vacuum container 10, the telescopic portions 62 of each cylinder 60A and 60B extend and retract, thereby maintaining the airtightness of the continuous space from inside the vacuum container 10 to inside each cylinder 60A and 60B.

[0051] With the laser medium 20 positioned relative to the optical path of laser L1 along the Z-axis, if a vacuum pump (not shown) is used to evacuate the system, the vacuum level of the continuous space from the vacuum container 10 to each cylinder 60A, 60B is increased. As a result, the laser medium 20, the support 40, and the pair of heat transfer conductors 50A, 50B are vacuum-insulated. At this time, due to the pressure difference between the continuous space from the vacuum container 10 to each cylinder 60A, 60B and atmospheric pressure, a force acting towards the center of the vacuum container 10 acts on each part of the laser device 1A, but the fluid pressure of the multiple fluid pressure cylinders 80A, 80B is adjusted in a manner capable of withstanding this force. In this state, the pair of coolers 30A, 30B operate, and excitation light L2 is emitted from multiple excitation light sources 110, 120 to excite the laser medium 20, while laser L1 is emitted from the laser light source 100.

[0052] At this time, although vibration in the Z-axis direction is generated due to the operation of the pair of coolers 30A and 30B, the transmission of this vibration to the laser medium 20 is suppressed by multiple fluid pressure cylinders 75A and 75B and multiple fluid pressure cylinders 80A and 80B. Additionally, the heat generated by the laser medium 20 moves via the support 40 to the pair of heat transfer conductors 50A and 50B (i.e., the pair of heat transfer conductors 50A and 50B function as heat sinks), and the heat moving to the pair of heat transfer conductors 50A and 50B is dissipated by the pair of coolers 30A and 30B. As an example, in the laser device 1A, during operation, the temperature of the laser medium 20 is maintained at 100K.

[0053] As explained above, in the laser device 1A, cooler 30A is disposed outside the vacuum container 10, and cooler 30A is connected to the laser medium 20 disposed inside the vacuum container 10 via heat transfer conductor 50A. Similarly, cooler 30B is disposed outside the vacuum container 10, and cooler 30B is connected to the laser medium 20 disposed inside the vacuum container 10 via heat transfer conductor 50B. Therefore, compared to the structure where the laser medium 20 and a pair of coolers 30A and 30B are disposed inside the vacuum container 10, the vacuum container 10 can be miniaturized, and the laser medium 20 can be cooled efficiently and reliably. Furthermore, in the structure where the laser medium 20 and a pair of coolers 30A and 30B are disposed inside the vacuum container 10, the laser medium 20 is affected by radiant heat emitted from each cooler 30A and 30B, but this can be avoided in the laser device 1A. As described above, according to the laser device 1A, the large size of the device can be suppressed, and the laser medium 20 can be cooled appropriately.

[0054] In the laser device 1A, a cylindrical body 60A is disposed between the wall 15 of the vacuum container 10 and the cooler 30A. An opening 15a in the wall 15 connects the space inside the vacuum container 10 with the space inside the cylindrical body 60A. A heat transfer conductor 50A passes through the cylindrical body 60A and the opening 15a. Similarly, a cylindrical body 60B is disposed between the wall 16 of the vacuum container 10 and the cooler 30B. An opening 16a in the wall 16 connects the space inside the vacuum container 10 with the space inside the cylindrical body 60B. A heat transfer conductor 50B passes through the cylindrical body 60B and the opening 16a. Thus, the vacuum level inside the vacuum container 10 can be maintained, and a structure in which a pair of heat transfer conductors 50A and 50B respectively penetrate a pair of walls 15 and 16 of the vacuum container 10 can be easily achieved. In addition, the spaces inside the cylinder 60A containing the heat transfer conductor 50A and the spaces inside the cylinder 60B containing the heat transfer conductor 50B are also high-vacuum spaces, just like the space inside the vacuum container 10. Therefore, it is possible to prevent condensation from occurring on the heat transfer conductor 50A and the heat transfer conductor 50B.

[0055] In the laser device 1A, a fluid pressure cylinder 80A is disposed between the support 70 and the cooler 30A. The heat transfer conductor 50A is movable relative to the wall 15 along the Z-axis direction and passes through the wall 15. The cooler 30A is supported by the support 70 so that it can move relative to the vacuum container 10 along the Z-axis direction. Similarly, a fluid pressure cylinder 80B is disposed between the support 70 and the cooler 30B. The heat transfer conductor 50B is movable relative to the wall 16 along the Z-axis direction and passes through the wall 16. The cooler 30B is supported by the support 70 so that it can move relative to the vacuum container 10 along the Z-axis direction. Thus, as for each cooler 30A and 30B, for example, in the case of using a mechanical cooler that generates vibration, the transmission of vibration of each cooler 30A and 30B to the laser medium 20 can be suppressed with a simple structure. Therefore, the characteristic of suppressing the laser L1 emitted from the laser medium 20 becomes unstable.

[0056] In the laser device 1A, the cylindrical body 60A disposed between the wall 15 of the vacuum container 10 and the cooler 30A includes a telescopic portion 62 configured to extend and retract along the Z-axis direction. Similarly, the cylindrical body 60B disposed between the wall 16 of the vacuum container 10 and the cooler 30B includes a telescopic portion 62 configured to extend and retract along the Z-axis direction. Thus, as for each cooler 30A and 30B, for example, in the case of using a mechanical cooler that generates vibration, the transmission of vibration of each cooler 30A and 30B to the vacuum container 10 can be suppressed.

[0057] In the laser device 1A, the vacuum container 10 is fixed to the device frame 71. Fluid pressure cylinders 75A and 75B, disposed between the device frame 71 and the cooler 30A, and between the device frame 71 and the cooler 30B, are configured to extend and retract along the Z-axis. Thus, by adjusting the position of the unit comprising the laser medium 20, the support 40, a pair of heat transfer conductors 50A and 50B, and a pair of coolers 30A and 30B, in the Z-axis direction using multiple fluid pressure cylinders 75A and 75B, it is possible to prevent the position of the laser medium 20 from deviating from the optical path of the laser L1 due to the weight of the unit. Therefore, it is possible to suppress the instability of the characteristics of the laser emitted from the laser medium 20.

[0058] In the laser device 1A, excitation light L2 is incident on multiple positions P1 arranged along the Z-axis direction on the end face 21 of the laser medium 20, and excitation light L2 is incident on multiple positions P2 arranged along the Z-axis direction on the end face 22 of the laser medium 20. Thus, each cooler 30A, 30B, for example, in the case of using a mechanical cooler that generates vibration, is suppressed by multiple fluid pressure cylinders 80A, 80B, and the direction of vibration transmitted from each cooler 30A, 30B to the laser medium 20 is consistent with the direction of the multiple positions P1 arranged on the end face 21 of the laser medium 20 and the direction of the multiple positions P2 arranged on the end face 22 of the laser medium 20. Therefore, uniformity of the excitation distribution in the laser medium 20 can be achieved.

[0059] In the laser device 1A, a pair of coolers 30A and 30B are arranged opposite each other, clamping the vacuum container 10 in the Z-axis direction, and a pair of heat transfer conductors 50A and 50B are arranged opposite each other, clamping the laser medium 20 in the Z-axis direction. This allows for uniform and reliable cooling of the laser medium 20. Furthermore, the pair of coolers 30A and 30B clamping the vacuum container 10 are arranged vertically, thus preventing the laser device 1A from becoming too large.

[0060] [Second Implementation]

[0061] Figure 3 The laser device 1B shown mainly consists of a pair of coolers 30A and 30B, a pair of heat transfer conductors 50A and 50B, and a pair of cylinders 60A and 60B, which are related to... Figure 1 and Figure 2 The laser device 1B shown is different from the laser device 1A described above. Hereinafter, laser device 1B will be described focusing on its differences from the laser device 1A described above. Furthermore, in... Figure 3 In the diagram, the vacuum container 10 and a pair of cylindrical bodies 60A and 60B are shown in cross-section.

[0062] like Figure 3 As shown, cooler 30A is disposed on one side of vacuum container 10 in the Y-axis direction. Cooler 30B is disposed on the other side of vacuum container 10 in the Y-axis direction. That is, a pair of coolers 30A and 30B are disposed opposite each other in a manner that clamps vacuum container 10 in the Y-axis direction.

[0063] Heat transfer conductor 50A penetrates one side wall 13 of vacuum container 10 along the Y-axis direction (a predetermined direction). Heat transfer conductor 50B penetrates the other side wall 14 of vacuum container 10 along the Y-axis direction. That is, a pair of heat transfer conductors 50A and 50B are arranged opposite each other in a manner that clamps the laser medium 20 in the Y-axis direction.

[0064] The heat transfer conductor 50A extends through the opening 13a in the wall 13 in a manner that allows it to move relative to the wall 13 along the Y-axis. The opening 13a, when viewed from the Y-axis, is, for example, circular in shape. A gap is formed between the heat transfer conductor 50A and the edge of the opening 13a. The heat transfer conductor 50A is connected to the laser medium 20 and the cooler 30A. The end of the heat transfer conductor 50A located inside the vacuum container 10 is connected to the support 40. The end of the heat transfer conductor 50A located outside the vacuum container 10 is connected to the cooler 30A. The heat transfer conductor 50A is, for example, formed of copper and is cylindrical with a centerline parallel to the Y-axis.

[0065] The heat transfer conductor 50B extends through the opening 14a of the wall 14 in such a way that the heat transfer conductor 50B can move relative to the wall 14 along the Y-axis direction. The opening 14a, when viewed from the Y-axis direction, is, for example, circular in shape. A gap is formed between the heat transfer conductor 50B and the edge of the opening 14a. The heat transfer conductor 50B is connected to the laser medium 20 and the cooler 30B. The end of the heat transfer conductor 50B located inside the vacuum container 10 is connected to the support 40. The end of the heat transfer conductor 50B located outside the vacuum container 10 is connected to the cooler 30B. The heat transfer conductor 50B is, for example, formed of copper and is cylindrical with a centerline parallel to the Y-axis direction.

[0066] A cylindrical body 60A is disposed between the wall 13 of the vacuum container 10 and the cooler 30A. The end of the cylindrical body 60A on the vacuum container 10 side is hermetically fixed to the edge of the opening 13a of the wall 13. The end of the cylindrical body 60A on the cooler 30A side is hermetically fixed to the flange 32 of the cooler 30A. A heat transfer conductor 50A is disposed inside the cylindrical body 60A. A gap is formed between the cylindrical body 60A and the heat transfer conductor 50A. The opening 13a connects the space inside the vacuum container 10 with the space inside the cylindrical body 60A, and the heat transfer conductor 50A passes through the cylindrical body 60A and the opening 13a. When viewed from the Y-axis direction, the opening 13a is located inside the cylindrical body 60A, and the heat transfer conductor 50A is located inside both the cylindrical body 60A and the opening 13a.

[0067] A cylindrical body 60B is disposed between the wall 14 of the vacuum container 10 and the cooler 30B. The end of the cylindrical body 60B on the vacuum container 10 side is hermetically fixed to the edge of the opening 14a of the wall 14. The end of the cylindrical body 60B on the cooler 30B side is hermetically fixed to the flange 32 of the cooler 30B. A heat transfer conductor 50B is disposed inside the cylindrical body 60B. A gap is formed between the cylindrical body 60B and the heat transfer conductor 50B. The opening 14a connects the space inside the vacuum container 10 with the space inside the cylindrical body 60B, and the heat transfer conductor 50B passes through the cylindrical body 60B and the opening 14a. When viewed from the Y-axis direction, the opening 14a is located inside the cylindrical body 60B, and the heat transfer conductor 50B is located inside both the cylindrical body 60B and the opening 14a.

[0068] Each cylinder 60A, 60B includes a main body 61 and a telescopic part 62. The telescopic part 62 is configured to extend and retract along the Y-axis. As an example, the telescopic part 62 is disposed on the side of the vacuum container 10 relative to the main body 61, and the telescopic part 62 is hermetically connected to the main body 61. The main body 61 is formed, for example, from stainless steel and is cylindrical with a centerline parallel to the Y-axis. The telescopic part 62 is formed, for example, from stainless steel and is cylindrical with a centerline parallel to the Y-axis. The telescopic part 62 has, for example, a corrugated structure.

[0069] The support portion 70 supports the vacuum container 10 and the pair of coolers 30A and 30B in a manner that allows them to move relative to the vacuum container 10 along the Y-axis. The support portion 70 includes: a device frame 71, a pair of plates 77 and 78, a plurality of fluid pressure cylinders 75A, and a plurality of fluid pressure cylinders 75B. The vacuum container 10 is fixed to the device frame 71. Each fluid pressure cylinder 75A and 75B is configured to extend and retract along the Z-axis and eliminate vibration in the Z-axis direction. Alternatively, hydraulic cylinders, oil cylinders, etc., can also be used as the fluid pressure cylinders 75A and 75B.

[0070] Multiple fluid pressure cylinders 75A are disposed between the device frame 71 and the lower end of the plate 77. The plate 77 is part of the support 70 and is disposed between the vacuum container 10 and the cooler 30A. The cylinder 60A penetrates the plate 77 through an opening 77a. The shape of the opening 77a, when viewed from the Y-axis direction, is, for example, circular. A gap is formed between the edge of the cylinder 60A and the opening 77a. The multiple fluid pressure cylinders 75A are arranged symmetrically about a plane including the centerline of the cylinder 60A and perpendicular to the X-axis direction.

[0071] Multiple fluid pressure cylinders 75B are disposed between the lower end of the device frame 71 and the plate 78. The plate 78 is part of the support 70 and is disposed between the vacuum container 10 and the cooler 30B. The cylinder 60B penetrates the plate 78 through an opening 78a. The shape of the opening 78a, when viewed from the Y-axis direction, is, for example, circular. A gap is formed between the cylinder 60B and the edge of the opening 78a. The multiple fluid pressure cylinders 75B are arranged symmetrically about a plane including the centerline of the cylinder 60B and perpendicular to the X-axis direction.

[0072] Multiple fluid pressure cylinders 80A are disposed between the support 70 and the cooler 30A. Specifically, the multiple fluid pressure cylinders 80A are disposed between the plate 77 and the flange 32 of the cooler 30A. Each fluid pressure cylinder 80A is configured to be able to extend and retract along the Y-axis direction and eliminate vibration in the Y-axis direction. Each fluid pressure cylinder 80A restricts the movement of the unit "including the laser medium 20, the support 40, the pair of heat transfer conductors 50A and 50B, and the pair of coolers 30A and 30B" in a direction perpendicular to the Y-axis direction. The multiple fluid pressure cylinders 80A are arranged at equal angular intervals around the cylinder 60A. In addition, hydraulic cylinders, oil cylinders, etc., can also be used as each fluid pressure cylinder 80A.

[0073] Multiple fluid pressure cylinders 80B are disposed between the support 70 and the cooler 30B. Specifically, the multiple fluid pressure cylinders 80B are disposed between the plate 78 and the flange 32 of the cooler 30B. Each fluid pressure cylinder 80B is configured to be able to extend and retract along the Y-axis direction and eliminate vibration in the Y-axis direction. Each fluid pressure cylinder 80B restricts the movement of the unit "including the laser medium 20, the support 40, the pair of heat transfer conductors 50A and 50B and the pair of coolers 30A and 30B" in a direction perpendicular to the Y-axis direction. The multiple fluid pressure cylinders 80B are arranged at equal angular intervals around the cylinder 60B. In addition, hydraulic cylinders, oil cylinders, etc., can also be used as each fluid pressure cylinder 80B.

[0074] In the laser device 1B configured as described above, the "unit comprising a laser medium 20, a support 40, a pair of heat transfer conductors 50A and 50B, a pair of coolers 30A and 30B, multiple fluid pressure cylinders 80A and 80B, and a pair of plates 77 and 78" can be moved along the Z-axis direction via the multiple fluid pressure cylinders 75A and 75B. Thus, the position of the laser medium 20 in the Z-axis direction is positioned relative to the optical path of the laser L1 via the multiple fluid pressure cylinders 75A and 75B.

[0075] With the laser medium 20 positioned relative to the optical path of laser L1 along the Z-axis, if a vacuum pump (not shown) is used to evacuate the system, the vacuum level of the continuous space from the vacuum container 10 to each cylinder 60A, 60B is increased. As a result, the laser medium 20, the support 40, and the pair of heat transfer conductors 50A, 50B are vacuum-insulated. At this time, due to the pressure difference between the continuous space from the vacuum container 10 to each cylinder 60A, 60B and atmospheric pressure, a force acting towards the center of the vacuum container 10 acts on various parts of the laser device 1B, but the fluid pressure of the multiple fluid pressure cylinders 80A, 80B is adjusted in a manner capable of withstanding this force. In this state, the pair of coolers 30A, 30B operate, and excitation light L2 is emitted from multiple excitation light sources 110, 120 to excite the laser medium 20, while laser L1 is emitted from the laser light source 100.

[0076] At this time, although vibration in the Y-axis direction is generated due to the operation of the pair of coolers 30A and 30B, the transmission of this vibration to the laser medium 20 is suppressed by the multiple fluid pressure cylinders 80A and 80B. Furthermore, the heat generated by the laser medium 20 moves via the support 40 to the pair of heat transfer conductors 50A and 50B (i.e., the pair of heat transfer conductors 50A and 50B function as heat sinks), and the heat moving to the pair of heat transfer conductors 50A and 50B is dissipated by the pair of coolers 30A and 30B. In addition, in the laser device 1B, as each cooler 30A and 30B vibrates, the telescopic portions 62 of each cylinder 60A and 60B extend and retract, thus maintaining the airtightness of the continuous space from inside the vacuum container 10 to inside each cylinder 60A and 60B.

[0077] As explained above, in the laser device 1B, cooler 30A is disposed outside the vacuum container 10, and cooler 30A is connected to the laser medium 20 disposed inside the vacuum container 10 via heat transfer conductor 50A. Similarly, cooler 30B is disposed outside the vacuum container 10, and cooler 30B is connected to the laser medium 20 disposed inside the vacuum container 10 via heat transfer conductor 50B. Therefore, compared to the structure where the laser medium 20 and a pair of coolers 30A and 30B are disposed inside the vacuum container 10, the vacuum container 10 can be miniaturized, and the laser medium 20 can be cooled efficiently and reliably. Furthermore, in the structure where the laser medium 20 and a pair of coolers 30A and 30B are disposed inside the vacuum container 10, the laser medium 20 is affected by radiative heat emitted from each cooler 30A and 30B, but this can be avoided in the laser device 1B. As described above, according to the laser device 1B, the large size of the device can be suppressed, and the laser medium 20 can be cooled appropriately.

[0078] In the laser device 1B, a cylindrical body 60A is disposed between the wall 13 of the vacuum container 10 and the cooler 30A. An opening 13a in the wall 13 connects the space inside the vacuum container 10 with the space inside the cylindrical body 60A. A heat transfer conductor 50A passes through the cylindrical body 60A and the opening 13a. Similarly, a cylindrical body 60B is disposed between the wall 14 of the vacuum container 10 and the cooler 30B. An opening 14a in the wall 14 connects the space inside the vacuum container 10 with the space inside the cylindrical body 60B. A heat transfer conductor 50B passes through the cylindrical body 60B and the opening 14a. Thus, the vacuum level inside the vacuum container 10 can be maintained, and a structure in which a pair of heat transfer conductors 50A and 50B respectively penetrate a pair of walls 13 and 14 of the vacuum container 10 can be easily achieved. In addition, the spaces inside the cylinder 60A containing the heat transfer conductor 50A and the spaces inside the cylinder 60B containing the heat transfer conductor 50B are also high-vacuum spaces, just like the space inside the vacuum container 10. Therefore, it is possible to prevent condensation from occurring on the heat transfer conductor 50A and the heat transfer conductor 50B.

[0079] In the laser device 1B, a fluid pressure cylinder 80A is disposed between the support 70 and the cooler 30A. The heat transfer conductor 50A is able to move relative to the wall 13 along the Y-axis direction, and the heat transfer conductor 50A penetrates the wall 13. The cooler 30A is supported by the support 70 so that it can move relative to the vacuum container 10 along the Y-axis direction. Similarly, a fluid pressure cylinder 80B is disposed between the support 70 and the cooler 30B. The heat transfer conductor 50B is able to move relative to the wall 14 along the Y-axis direction, and the heat transfer conductor 50B penetrates the wall 14. The cooler 30B is supported by the support 70 so that it can move relative to the vacuum container 10 along the Y-axis direction. Thus, as for each cooler 30A and 30B, for example, in the case of using a mechanical cooler that generates vibration, the transmission of vibration of each cooler 30A and 30B to the laser medium 20 can be suppressed with a simple structure. Therefore, the characteristic of suppressing the laser L1 emitted from the laser medium 20 becomes unstable.

[0080] In the laser device 1B, the cylindrical body 60A disposed between the wall 13 of the vacuum container 10 and the cooler 30A includes a telescopic portion 62 configured to extend and retract along the Y-axis direction. Similarly, the cylindrical body 60B disposed between the wall 14 of the vacuum container 10 and the cooler 30B includes a telescopic portion 62 configured to extend and retract along the Y-axis direction. Thus, as for each cooler 30A and 30B, for example, in the case of using a mechanical cooler that generates vibration, the transmission of vibration of each cooler 30A and 30B to the vacuum container 10 can be suppressed.

[0081] In the laser device 1B, the vacuum container 10 is fixed to the device frame 71, and a pair of coolers 30A and 30B are connected to a pair of plates 77 and 78, respectively. Fluid pressure cylinders 75A and 75B, arranged between the device frame 71 and the plates 77 and 78, are configured to extend and retract along the Z-axis. Thus, by adjusting the position of the unit "including the laser medium 20, the support 40, the pair of heat transfer conductors 50A and 50B, the pair of coolers 30A and 30B, the multiple fluid pressure cylinders 80A and 80B, and the pair of plates 77 and 78" in the Z-axis direction using multiple fluid pressure cylinders 75A and 75B, it is possible to prevent the position of the laser medium 20 in the Z-axis direction from deviating from the optical path of the laser L1 due to the weight of the unit. Therefore, it is possible to suppress the instability of the characteristics of the laser emitted from the laser medium 20.

[0082] In the laser device 1B, a pair of coolers 30A and 30B are arranged opposite each other, clamping the vacuum container 10 in the Y-axis direction, and a pair of heat transfer conductors 50A and 50B are arranged opposite each other, clamping the laser medium 20 in the Y-axis direction. This allows for uniform and reliable cooling of the laser medium 20.

[0083] [Variation Example]

[0084] This disclosure is not limited to the first and second embodiments described above. For example, in the laser device of this disclosure, the number of coolers and the number of heat transfer conductors are each at least one. Furthermore, in the laser device of this disclosure, the direction (prescribed direction) in which the heat transfer conductor penetrates the wall of the vacuum container is arbitrary.

[0085] As an example, such as Figure 4 As shown in (a), in the laser device 1A of the first embodiment, the cooler 30B, heat transfer conductor 50B, cylinder 60B, multiple fluid pressure cylinders 75B, and multiple fluid pressure cylinders 80B may also be omitted. This is also the case for the laser device 1B of the second embodiment. Furthermore, as... Figure 4 As shown in (b), in the laser device 1A of the first embodiment, the cooler 30A, heat transfer conductor 50A, cylinder 60A, multiple fluid pressure cylinders 75A, and multiple fluid pressure cylinders 80A may also be omitted. The same applies to the laser device 1B of the second embodiment.

[0086] like Figure 5 As shown, in the laser device 1A of the first embodiment, the plurality of fluid pressure cylinders 75A and 75B may be omitted. The same applies to the laser device 1B of the second embodiment. Figure 5In the example shown, a plurality of fluid pressure cylinders 80A are arranged between the plate 73 of the support portion 70 and the flange 32 of the cooler 30A, and a plurality of fluid pressure cylinders 80B are arranged between the plate 74 of the support portion 70 and the flange 32 of the cooler 30B.

[0087] Each cooler 30A and 30B is not limited to a mechanical cooler that generates vibration (e.g., a Stirling refrigerator, a Gifford-McMahon refrigerator, etc.), but may also be a cooling water circulator, a liquid nitrogen-based heat exchanger, an electronic cooling device, a cryogenic gas (liquid helium)-based heat exchanger, etc.

[0088] Each of the cylindrical bodies 60A and 60B can also be integrally formed as a telescopic portion 62. Furthermore, in the laser device 1A of the first embodiment, a component (e.g., an O-ring, etc.) that maintains airtightness and allows the heat transfer conductor 50A to move in the Z-axis direction can be disposed between the heat transfer conductor 50A and the edge of the opening 15a. In this case, the cylindrical body 60A can be omitted. Similarly, a component that maintains airtightness and allows the heat transfer conductor 50B to move in the Z-axis direction can be disposed between the heat transfer conductor 50B and the edge of the opening 16a. In this case, the cylindrical body 60B can be omitted. Furthermore, in the laser device 1B of the second embodiment, a component that maintains airtightness and allows the heat transfer conductor 50A to move in the Y-axis direction can be disposed between the heat transfer conductor 50A and the edge of the opening 13a. In this case, the cylindrical body 60A can be omitted. Similarly, a component capable of maintaining an airtight seal and allowing the heat transfer conductor 50B to move in the Y-axis direction may be disposed between the heat transfer conductor 50B and the edge of the opening 14a. In this case, the cylinder 60B may be omitted.

[0089] The laser device 1A of the first embodiment and the laser device 1B of the second embodiment are configured as laser amplification devices that amplify laser L1, but they can also be configured as laser oscillation devices, which include: a reflector facing the end face 21 of the laser medium 20 and a reflector facing the end face 22 of the laser medium 20.

[0090] In the laser device 1A of the first embodiment, instead of multiple fluid pressure cylinders 80A and 80B, if the vibration eliminator is configured to eliminate vibration in the Z-axis direction, other structures can also be used. In the laser device 1B of the second embodiment, instead of multiple fluid pressure cylinders 80A and 80B, if the vibration eliminator is configured to eliminate vibration in the Y-axis direction, other structures can also be used. Examples of other structures include attenuation devices such as air dampers and oil dampers.

[0091] [Explanation of reference numerals in the attached figures]

[0092] 1A, 1B…Laser device; 10…Vacuum container; 13, 14, 15, 16…Wall; 13a, 14a, 15a, 16a…Opening; 20…Laser medium; 21, 22…End face; 30A, 30B…Cooler; 50A, 50B…Heat transfer conductor; 60A, 60B…Cylinder; 62…Telescopic part; 70…Support part; 71…Device frame; 75A, 75B…Fluid pressure cylinder (second fluid pressure cylinder); 80A, 80B…Fluid pressure cylinder (first fluid pressure cylinder, vibration eliminator); 110, 120…Excitation source.

Claims

1. A laser device, wherein, have: Vacuum container including the walls; A laser medium disposed within the vacuum container; A cooler configured outside the vacuum container; A heat transfer conductor that extends through the wall in a predetermined direction and is connected to the laser medium and the cooler; A support portion that supports the vacuum container and the cooler; and A vibration damper is disposed between the support and the cooler, and is configured to eliminate vibrations in the stated direction. The heat transfer conductor penetrates the wall in such a way that it can move relative to the wall portion along the stated direction. The support portion supports the vacuum container and the cooler in such a way that the cooler can move relative to the vacuum container along the direction.

2. The laser device according to claim 1, wherein, It also includes: a cylindrical body disposed between the wall and the cooler. The wall portion has an opening that connects the space inside the vacuum container with the space inside the cylindrical body. The heat transfer conductor passes through the cylinder and the opening.

3. The laser device according to claim 1, wherein, The vibration eliminator is a first fluid pressure cylinder configured to extend and retract along the said direction.

4. The laser device according to claim 1, wherein, It also includes: a cylindrical body disposed between the wall and the cooler. The wall portion has an opening that connects the space inside the vacuum container with the space inside the cylindrical body. The heat transfer conductor passes through the cylinder and the opening. The cylinder includes a telescopic section configured to extend and retract along the said direction.

5. The laser device according to claim 3, wherein, It also includes: a cylindrical body disposed between the wall and the cooler. The wall portion has an opening that connects the space inside the vacuum container with the space inside the cylindrical body. The heat transfer conductor passes through the cylinder and the opening. The cylinder includes a telescopic section configured to extend and retract along the said direction.

6. The laser device according to claim 1, wherein... The direction mentioned is the vertical direction. The support portion includes: A device frame to which the vacuum container is fixed; and The second fluid pressure cylinder is disposed between the device frame and the cooler and is configured to extend and retract along the direction.

7. The laser device according to claim 3, wherein... The direction mentioned is the vertical direction. The support portion includes: A device frame to which the vacuum container is fixed; and The second fluid pressure cylinder is disposed between the device frame and the cooler and is configured to extend and retract along the direction.

8. The laser device according to claim 4, wherein The direction mentioned is the vertical direction. The support portion includes: A device frame to which the vacuum container is fixed; and The second fluid pressure cylinder is disposed between the device frame and the cooler and is configured to extend and retract along the direction.

9. The laser device according to claim 5, wherein The direction mentioned is the vertical direction. The support portion includes: A device frame to which the vacuum container is fixed; and The second fluid pressure cylinder is disposed between the device frame and the cooler and is configured to extend and retract along the direction.

10. The laser device according to any one of claims 1, 3 to 9, wherein, It also includes: an excitation light source that emits excitation light at multiple locations on the end face of the laser medium. The plurality of positions are arranged along the direction.

11. The laser device according to any one of claims 1 to 9, wherein, have: Each is a pair of coolers serving as the cooler; and Each is a pair of heat transfer conductors that serve as the heat transfer conductors. The pair of coolers are configured opposite each other in a manner that clamps the vacuum container in the direction described above. The pair of heat transfer conductors are arranged opposite each other in a manner that clamps the laser medium in the direction stated above.

12. The laser device according to claim 10, wherein, have: Each is a pair of coolers serving as the cooler; and Each is a pair of heat transfer conductors that serve as the heat transfer conductors. The pair of coolers are configured opposite each other in a manner that clamps the vacuum container in the direction described above. The pair of heat transfer conductors are arranged opposite each other in a manner that clamps the laser medium in the direction stated above.

13. The laser device according to claim 11, wherein, The direction mentioned is the vertical direction.

14. The laser device according to claim 12, wherein, The direction mentioned is the vertical direction.

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